XML 95 R80.htm IDEA: XBRL DOCUMENT
v3.19.3.a.u2

Income Taxes - Additional Information (Details) - USD ($) $ in Thousands | 12 Months Ended |
--- | --- | ---
Dec. 31, 2019 | Dec. 31, 2018 | Dec. 31, 2017 | Dec. 31, 2016
Tax Credit Carryforward [Line Items] |  |  |  |
Cash associated with indefinitely reinvested foreign earnings | $ 9,700 |  |  |
Unrecognized tax benefits related to uncertain tax positions | 9,799 | $ 9,127 | $ 9,105 | $ 6,844
Recorded as a decrease in deferred tax assets and offsetting valuation allowance | 9,390 | 8,451 | 7,996 |
Unrecognized Tax Benefits Recorded as Other Long Term Liability | 409 | 676 | 1,109 |
Reversal of tax reserve | 334 | $ 543 | $ 511 |
Unrecognized tax benefits | 9,800 |  |  |
Tax Reserve Member |  |  |  |
Tax Credit Carryforward [Line Items] |  |  |  |
Reversal of tax reserve | 200 |  |  |
Unrecognized Tax Benefits Reserve Accrued Interest Member |  |  |  |
Tax Credit Carryforward [Line Items] |  |  |  |
Reversal of tax reserve | 100 |  |  |
Research and development and other tax credit carryforwards |  |  |  |
Tax Credit Carryforward [Line Items] |  |  |  |
Tax credit carryforwards | $ 24,900 |  |  |

X
- Definition The gross amount of unrecognized tax benefits pertaining to uncertain tax positions taken in tax returns, recorded as a decrease in deferred tax assets and offsetting valuation allowance, as of the balance sheet date. + References No definition available. + Details
Name: | acls_UnrecognizedTaxBenefitsRecordedAsDecreaseInDeferredTaxAssetsAndOffsettingValuationAllowance
Namespace Prefix: | acls_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | instant

X
- Definition The gross amount of unrecognized tax benefits pertaining to uncertain tax positions taken in tax returns, recorded as other long-term liability, as of the balance sheet date. + References No definition available. + Details
Name: | acls_UnrecognizedTaxBenefitsRecordedAsOtherLongTermLiability
Namespace Prefix: | acls_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | instant

X
- Definition The amount of the tax credit carryforward, before tax effects, available to reduce future taxable income under enacted tax laws. + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 740 -SubTopic 10 -Section 50 -Paragraph 3 -Subparagraph (a) -URI http://asc.fasb.org/extlink&oid=84230637&loc=d3e32559-109319 + Details
Name: | us-gaap_TaxCreditCarryforwardAmount
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | instant

X
- Definition Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table. + References No definition available. + Details
Name: | us-gaap_TaxCreditCarryforwardLineItems
Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

X
- Definition Amount of undistributed earnings of foreign subsidiaries intended to be permanently reinvested outside the country of domicile. + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 944 -SubTopic 740 -Section 50 -Paragraph 1 -Subparagraph (b) -URI http://asc.fasb.org/extlink&oid=6487024&loc=d3e29054-158556 Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 740 -SubTopic 30 -Section 50 -Paragraph 2 -Subparagraph (b)(c) -URI http://asc.fasb.org/extlink&oid=6424122&loc=d3e41874-109331 Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 740 -SubTopic 10 -Section 25 -Paragraph 3 -Subparagraph (a)(1) -URI http://asc.fasb.org/extlink&oid=115928272&loc=d3e28200-109314 Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 942 -SubTopic 740 -Section 50 -Paragraph 1 -Subparagraph (b) -URI http://asc.fasb.org/extlink&oid=6479915&loc=d3e66715-112838 + Details
Name: | us-gaap_UndistributedEarningsOfForeignSubsidiaries
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | instant

X
- Definition Amount of unrecognized tax benefits. + References Reference 1: http://www.xbrl.org/2003/role/disclosureRef -Publisher FASB -Name Accounting Standards Codification -Topic 740 -SubTopic 10 -Section 45 -Paragraph 10B -URI http://asc.fasb.org/extlink&oid=84176650&loc=SL37586934-109318 Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 740 -SubTopic 10 -Section 50 -Paragraph 15A -Subparagraph (a) -URI http://asc.fasb.org/extlink&oid=84230637&loc=SL6600010-109319 + Details
Name: | us-gaap_UnrecognizedTaxBenefits
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | instant

X
- Definition Amount of decrease in unrecognized tax benefits resulting from lapses of applicable statutes of limitations. + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 740 -SubTopic 10 -Section 50 -Paragraph 15A -Subparagraph (a)(4) -URI http://asc.fasb.org/extlink&oid=84230637&loc=SL6600010-109319 + Details
Name: | us-gaap_UnrecognizedTaxBenefitsReductionsResultingFromLapseOfApplicableStatuteOfLimitations
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration

X
- Definition The total amount of unrecognized tax benefits that, if recognized, would affect the effective tax rate. + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 740 -SubTopic 10 -Section 50 -Paragraph 15A -Subparagraph (b) -URI http://asc.fasb.org/extlink&oid=84230637&loc=SL6600010-109319 + Details
Name: | us-gaap_UnrecognizedTaxBenefitsThatWouldImpactEffectiveTaxRate
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | instant

X
- Details
Name: | us-gaap_BalanceSheetLocationAxis=acls_TaxReserveMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_BalanceSheetLocationAxis=acls_UnrecognizedTaxBenefitsReserveAccruedInterestMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_TaxCreditCarryforwardAxis=acls_ResearchDevelopmentAndOtherTaxCreditMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |