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v3.19.3.a.u2

Revenue (Details) - USD ($) $ in Thousands | 12 Months Ended |  |  |
--- | --- | --- | --- | ---
Dec. 31, 2019 | Dec. 31, 2018 | Dec. 31, 2017 | Dec. 31, 2016
Disaggregation of Revenue |  |  |  |
Product warranty period | 1 year |  |  |
Extended warranty period | 1 year |  |  |
Contract liabilities | $ 29,251 | $ 22,584 | $ 18,145 | $ 11,009
Short-term deferred revenue | 24,601 | 19,513 |  |
Long-term deferred revenue | $ 4,650 | $ 3,071 |  |
ASC 606 Adjustments | Maximum |  |  |  |
Disaggregation of Revenue |  |  |  |
Unsatisfied extended warranty performance obligations, period | 24 months |  |  |
Systems |  |  |  |
Disaggregation of Revenue |  |  |  |
Payment upon shipment of tool, as a percent | 90.00% |  |  |
Payment upon installation, as a percent | 10.00% |  |  |
Payment upon delivery of parts, period | 90 days |  |  |
Systems | Minimum |  |  |  |
Disaggregation of Revenue |  |  |  |
Payment upon delivery of parts, period | 30 days |  |  |
Systems | Maximum |  |  |  |
Disaggregation of Revenue |  |  |  |
Payment upon delivery of parts, period | 60 days |  |  |

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