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Inventories, net (Details) - USD ($)
$ in Thousands
Dec. 31, 2019
Dec. 31, 2018
Inventories, net    
Raw materials $ 95,867 $ 91,875
Work in process 32,131 23,857
Finished goods (completed systems) 12,366 13,268
Inventories, net $ 140,364 $ 129,000