<SEC-DOCUMENT>0001047469-20-001907-index.html : 20200330
<SEC-HEADER>0001047469-20-001907.hdr.sgml : 20200330
<ACCEPTANCE-DATETIME>20200330101739
ACCESSION NUMBER:		0001047469-20-001907
CONFORMED SUBMISSION TYPE:	DEF 14A
PUBLIC DOCUMENT COUNT:		10
CONFORMED PERIOD OF REPORT:	20200519
FILED AS OF DATE:		20200330
DATE AS OF CHANGE:		20200330
EFFECTIVENESS DATE:		20200330

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AXCELIS TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001113232
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				341818596
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		DEF 14A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-30941
		FILM NUMBER:		20754631

	BUSINESS ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915
		BUSINESS PHONE:		978-787-4000

	MAIL ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	EATON SEMICONDUCTOR EQUIPMENT INC
		DATE OF NAME CHANGE:	20000501
</SEC-HEADER>
<DOCUMENT>
<TYPE>DEF 14A
<SEQUENCE>1
<FILENAME>a2240881zdef14a.htm
<DESCRIPTION>DEF 14A
<TEXT>
Document 1 - file: a2240881zdef14a.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>2
<FILENAME>g147595.jpg
<DESCRIPTION>G147595.JPG
<TEXT>
Document 2 - file: g147595.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>3
<FILENAME>g178104.jpg
<DESCRIPTION>G178104.JPG
<TEXT>
Document 3 - file: g178104.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>4
<FILENAME>g96433.jpg
<DESCRIPTION>G96433.JPG
<TEXT>
Document 4 - file: g96433.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>5
<FILENAME>g142188.jpg
<DESCRIPTION>G142188.JPG
<TEXT>
Document 5 - file: g142188.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>6
<FILENAME>g77779.jpg
<DESCRIPTION>G77779.JPG
<TEXT>
Document 6 - file: g77779.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>7
<FILENAME>g487269.jpg
<DESCRIPTION>G487269.JPG
<TEXT>
Document 7 - file: g487269.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>8
<FILENAME>g994931.jpg
<DESCRIPTION>G994931.JPG
<TEXT>
Document 8 - file: g994931.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>9
<FILENAME>g20032bgi001.jpg
<DESCRIPTION>G20032BGI001.JPG
<TEXT>
Document 9 - file: g20032bgi001.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>10
<FILENAME>g20032bgi002.jpg
<DESCRIPTION>G20032BGI002.JPG
<TEXT>
Document 10 - file: g20032bgi002.jpg

</DOCUMENT>
</SEC-DOCUMENT>