<SEC-DOCUMENT>0001047469-20-003259-index.html : 20200529
<SEC-HEADER>0001047469-20-003259.hdr.sgml : 20200529
<ACCEPTANCE-DATETIME>20200529121426
ACCESSION NUMBER:		0001047469-20-003259
CONFORMED SUBMISSION TYPE:	S-3ASR
PUBLIC DOCUMENT COUNT:		7
FILED AS OF DATE:		20200529
DATE AS OF CHANGE:		20200529
EFFECTIVENESS DATE:		20200529

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AXCELIS TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001113232
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				341818596
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		S-3ASR
		SEC ACT:		1933 Act
		SEC FILE NUMBER:	333-238772
		FILM NUMBER:		20925505

	BUSINESS ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915
		BUSINESS PHONE:		978-787-4000

	MAIL ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	EATON SEMICONDUCTOR EQUIPMENT INC
		DATE OF NAME CHANGE:	20000501
</SEC-HEADER>
<DOCUMENT>
<TYPE>S-3ASR
<SEQUENCE>1
<FILENAME>a2241704zs-3asr.htm
<DESCRIPTION>S-3ASR
<TEXT>
Document 1 - file: a2241704zs-3asr.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-4.1
<SEQUENCE>2
<FILENAME>a2241704zex-4_1.htm
<DESCRIPTION>EX-4.1
<TEXT>
Document 2 - file: a2241704zex-4_1.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-5.1
<SEQUENCE>3
<FILENAME>a2241704zex-5_1.htm
<DESCRIPTION>EX-5.1
<TEXT>
Document 3 - file: a2241704zex-5_1.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-23.1
<SEQUENCE>4
<FILENAME>a2241704zex-23_1.htm
<DESCRIPTION>EX-23.1
<TEXT>
Document 4 - file: a2241704zex-23_1.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>5
<FILENAME>g605218.jpg
<DESCRIPTION>G605218.JPG
<TEXT>
Document 5 - file: g605218.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>6
<FILENAME>g209182ksi001.jpg
<DESCRIPTION>G209182KSI001.JPG
<TEXT>
Document 6 - file: g209182ksi001.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>7
<FILENAME>g209182ksi002.jpg
<DESCRIPTION>G209182KSI002.JPG
<TEXT>
Document 7 - file: g209182ksi002.jpg

</DOCUMENT>
</SEC-DOCUMENT>