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Revenue (Details) - USD ($) $ in Thousands | 3 Months Ended |  |  |
--- | --- | --- | --- | ---
Mar. 31, 2021 | Dec. 31, 2020 | Mar. 31, 2020 | Dec. 31, 2019
Disaggregation of Revenue |  |  |  |
Contract liabilities | $ 22,142 | $ 23,058 | $ 34,106 | $ 29,251
Deferred revenue | 20,417 | 21,221 |  |
Long-term deferred revenue | $ 1,725 | $ 1,837 |  |
Systems |  |  |  |
Disaggregation of Revenue |  |  |  |
Payment upon shipment of tool, as a percent | 90.00% |  |  |
Payment upon installation, as a percent | 10.00% |  |  |
Systems | Minimum |  |  |  |
Disaggregation of Revenue |  |  |  |
Payment upon delivery of parts, period | 30 days |  |  |
Systems | Maximum |  |  |  |
Disaggregation of Revenue |  |  |  |
Payment upon delivery of parts, period | 60 days |  |  |

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