# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001558370-21-006110
Filing Date
2021-05-06
Accepted
2021-05-06 10:45:50
Documents
72
Period of Report
2021-03-31

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | acls-20210331x10q.htm iXBRL | 10-Q | 1487406
2 | EX-10.1 | acls-20210331xex10d1.htm | EX-10.1 | 76668
3 | EX-31.1 | acls-20210331xex31d1.htm | EX-31.1 | 12609
4 | EX-31.2 | acls-20210331xex31d2.htm | EX-31.2 | 13050
5 | EX-33.1 | acls-20210331xex33d1.htm | EX-33.1 | 6835
6 | EX-33.2 | acls-20210331xex33d2.htm | EX-33.2 | 6061
| Complete submission text file | 0001558370-21-006110.txt |  | 6176466

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
7 | EX-101.SCH | acls-20210331.xsd | EX-101.SCH | 40583
8 | EX-101.CAL | acls-20210331_cal.xml | EX-101.CAL | 68282
9 | EX-101.DEF | acls-20210331_def.xml | EX-101.DEF | 126441
10 | EX-101.LAB | acls-20210331_lab.xml | EX-101.LAB | 408450
11 | EX-101.PRE | acls-20210331_pre.xml | EX-101.PRE | 284759
12 | EXTRACTED XBRL INSTANCE DOCUMENT | acls-20210331x10q_htm.xml | XML | 1110578

Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 21896401
SIC: 3559 Special Industry Machinery, NEC