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Inventories, net (Tables)
3 Months Ended
Mar. 31, 2021
Inventories, net  
Schedule of components of inventories

March 31,

December 31,

    

2021

    

2020

    

(in thousands)

Raw materials

$

100,634

$

100,254

Work in process

 

34,283

 

33,867

Finished goods (completed systems)

 

39,464

 

26,955

Inventories, net

$

174,381

$

161,076