Leases - Future Minimum Cash Outflow and Weighted-average Remaining Lease Term and Discount Rate (Details) - USD ($) $ in Thousands	Mar. 31, 2021	Dec. 31, 2020
Future minimum lease payments finance lease
2021	$ 4,394
2022	5,980
2023	6,114
2024	6,252
2025	5,930
Thereafter	73,723
Total lease payments	102,393
Less interest portion	(54,417)
Finance lease obligations	47,976
Future minimum lease payments operating lease
2021	2,129
2022	1,673
2023	534
2024	126
2025	74
Thereafter	145
Total lease payments	4,681
Less interest portion	(482)
Operating lease obligations	4,199
Future minimum lease payments finance and operating lease
2021	6,523
2022	7,653
2023	6,648
2024	6,378
2025	6,004
Thereafter	73,868
Total lease payments	107,074
Less interest portion	(54,899)
Total lease liabilities	$ 52,175	$ 52,671
Lease term and discount rate
Operating leases -Weighted-average remaining lease term (in years)	2 years 3 months 18 days
Finance leases - Weighted-average remaining lease term (in years)	15 years 9 months 18 days
Operating leases - Weighted-average discount rate	4.50%
Finance leases - Weighted-average discount rate	10.50%
Finance lease term	22 years
Minimum
Lease term and discount rate
Operating lease term	1 year
Maximum
Lease term and discount rate
Operating lease term	10 years

n/a.

No definition available.

Name:	acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract
Namespace Prefix:	acls_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance and operating lease.

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due after fifth fiscal year following latest fiscal year.

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFive
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in fifth fiscal year following latest fiscal year.

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFive
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in fourth fiscal year following latest fiscal year.

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in third fiscal year following latest fiscal year.

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in second fiscal year following latest fiscal year.

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance and operating lease having an initial or remaining lease term in excess of one year due in remainder of fiscal year following latest fiscal year.

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsRemainderOfFiscalYear
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments in excess of discounted obligation for lease payments for finance and operating lease.

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Present value of lessee's discounted obligation for lease payments from operating and finance lease.

+ References

No definition available.

+ Details

Name:	acls_OperatingAndFinanceLeaseLiability
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

n/a.

+ References

No definition available.

+ Details

Name:	acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract
Namespace Prefix:	acls_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- References

No definition available.

+ Details

Name:	us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

Present value of lessee's discounted obligation for lease payments from finance lease.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 842
-SubTopic 20
-Section 50
-Paragraph 6
-URI http://asc.fasb.org/extlink&oid=77888426&loc=SL77918701-209980

Reference 2: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 842
-SubTopic 20
-Section 45
-Paragraph 1
-Subparagraph (b)
-URI http://asc.fasb.org/extlink&oid=77888419&loc=SL77918627-209977

+ Details

Name:	us-gaap_FinanceLeaseLiability
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance lease.

+ References

+ Details

Name:	us-gaap_FinanceLeaseLiabilityPaymentsDue
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance lease, due after fifth fiscal year following latest fiscal year.

+ References

+ Details

Name:	us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance lease, due in fifth fiscal year following latest fiscal year.

+ References

+ Details

Name:	us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance lease, due in fourth fiscal year following latest fiscal year.

+ References

+ Details

Name:	us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance lease, due in third fiscal year following latest fiscal year.

+ References

+ Details

Name:	us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance lease, due in second fiscal year following latest fiscal year.

+ References

+ Details

Name:	us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance lease, due in remainder of fiscal year following latest fiscal year ended.

+ References

Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 842
-SubTopic 20
-Section 50
-Paragraph 6
-URI http://asc.fasb.org/extlink&oid=77888426&loc=SL77918701-209980

+ Details

Name:	us-gaap_FinanceLeaseLiabilityPaymentsRemainderOfFiscalYear
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments in excess of discounted obligation for lease payments for finance lease.

+ References

+ Details

Name:	us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Weighted average discount rate for finance lease calculated at point in time.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 842
-SubTopic 20
-Section 50
-Paragraph 4
-Subparagraph (g)(4)
-URI http://asc.fasb.org/extlink&oid=77888426&loc=SL77918686-209980

Reference 2: http://www.xbrl.org/2003/role/exampleRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 842
-SubTopic 20
-Section 55
-Paragraph 53
-URI http://asc.fasb.org/extlink&oid=77888399&loc=SL77918982-209971

+ Details

Name:	us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent
Namespace Prefix:	us-gaap_
Data Type:	num:percentItemType
Balance Type:	na
Period Type:	instant

- Definition

Weighted average remaining lease term for finance lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 842
-SubTopic 20
-Section 50
-Paragraph 4
-Subparagraph (g)(3)
-URI http://asc.fasb.org/extlink&oid=77888426&loc=SL77918686-209980

Reference 2: http://www.xbrl.org/2003/role/exampleRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 842
-SubTopic 20
-Section 55
-Paragraph 53
-URI http://asc.fasb.org/extlink&oid=77888399&loc=SL77918982-209971

+ Details

Name:	us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1
Namespace Prefix:	us-gaap_
Data Type:	xbrli:durationItemType
Balance Type:	na
Period Type:	instant

- Definition

Term of lessee's finance lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.

+ References

Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 842
-SubTopic 20
-Section 50
-Paragraph 3
-Subparagraph (a)(3)
-URI http://asc.fasb.org/extlink&oid=77888426&loc=SL77918673-209980

+ Details

Name:	us-gaap_LesseeFinanceLeaseTermOfContract1
Namespace Prefix:	us-gaap_
Data Type:	xbrli:durationItemType
Balance Type:	na
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for operating lease.

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for operating lease, due after fifth fiscal year following latest fiscal year.

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for operating lease, due in fifth fiscal year following latest fiscal year.

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for operating lease, due in fourth fiscal year following latest fiscal year.

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for operating lease, due in third fiscal year following latest fiscal year.

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for operating lease, due in second fiscal year following latest fiscal year.

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for operating lease having an initial or remaining lease term in excess of one year due in remainder of fiscal year following latest fiscal year.

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseLiabilityPaymentsRemainderOfFiscalYear
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments in excess of discounted obligation for lease payments for operating lease.

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Term of lessee's operating lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseTermOfContract
Namespace Prefix:	us-gaap_
Data Type:	xbrli:durationItemType
Balance Type:	na
Period Type:	instant

- References

No definition available.

+ Details

Name:	us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

Present value of lessee's discounted obligation for lease payments from operating lease.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 842
-SubTopic 20
-Section 45
-Paragraph 1
-Subparagraph (b)
-URI http://asc.fasb.org/extlink&oid=77888419&loc=SL77918627-209977

+ Details

Name:	us-gaap_OperatingLeaseLiability
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Weighted average discount rate for operating lease calculated at point in time.

+ References

+ Details

Name:	us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent
Namespace Prefix:	us-gaap_
Data Type:	num:percentItemType
Balance Type:	na
Period Type:	instant

- Definition

Weighted average remaining lease term for operating lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.

+ References

Reference 1: http://www.xbrl.org/2003/role/exampleRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 842
-SubTopic 20
-Section 55
-Paragraph 53
-URI http://asc.fasb.org/extlink&oid=77888399&loc=SL77918982-209971

Reference 2: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 842
-SubTopic 20
-Section 50
-Paragraph 4
-Subparagraph (g)(3)
-URI http://asc.fasb.org/extlink&oid=77888426&loc=SL77918686-209980

+ Details

Name:	us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1
Namespace Prefix:	us-gaap_
Data Type:	xbrli:durationItemType
Balance Type:	na
Period Type:	instant

- Details

Name:	srt_RangeAxis=srt_MinimumMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	srt_RangeAxis=srt_MaximumMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type: