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Revenue (Details) - USD ($) $ in Thousands	3 Months Ended
	Mar. 31, 2021	Dec. 31, 2020	Mar. 31, 2020	Dec. 31, 2019
Disaggregation of Revenue
Contract liabilities	$ 22,142	$ 23,058	$ 34,106	$ 29,251
Deferred revenue	20,417	21,221
Long-term deferred revenue	$ 1,725	$ 1,837
Systems
Disaggregation of Revenue
Payment upon shipment of tool, as a percent	90.00%
Payment upon installation, as a percent	10.00%
Systems | Minimum
Disaggregation of Revenue
Payment upon delivery of parts, period	30 days
Systems | Maximum
Disaggregation of Revenue
Payment upon delivery of parts, period	60 days

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- Definition

Represents the percentage of payment terms due upon installation.

+ References

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+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 606
-SubTopic 10
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