XML 60 R48.htm IDEA: XBRL DOCUMENT v3.21.1
Inventories, net (Details) - USD ($)
$ in Thousands
Mar. 31, 2021
Dec. 31, 2020
Inventories, net    
Raw materials $ 100,634 $ 100,254
Work in process 34,283 33,867
Finished goods (completed systems) 39,464 26,955
Inventories, net $ 174,381 $ 161,076