# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001558370-21-010725
Filing Date
2021-08-06
Accepted
2021-08-06 10:52:40
Documents
71
Period of Report
2021-06-30

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | acls-20210630x10q.htm iXBRL | 10-Q | 1960665
2 | EX-31.1 | acls-20210630xex31d1.htm | EX-31.1 | 12612
3 | EX-31.2 | acls-20210630xex31d2.htm | EX-31.2 | 13053
4 | EX-32.1 | acls-20210630xex32d1.htm | EX-32.1 | 6838
5 | EX-32.2 | acls-20210630xex32d2.htm | EX-32.2 | 6064
| Complete submission text file | 0001558370-21-010725.txt |  | 7055931

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
6 | EX-101.SCH | acls-20210630.xsd | EX-101.SCH | 41222
7 | EX-101.CAL | acls-20210630_cal.xml | EX-101.CAL | 68248
8 | EX-101.DEF | acls-20210630_def.xml | EX-101.DEF | 124857
9 | EX-101.LAB | acls-20210630_lab.xml | EX-101.LAB | 404067
10 | EX-101.PRE | acls-20210630_pre.xml | EX-101.PRE | 281561
11 | EXTRACTED XBRL INSTANCE DOCUMENT | acls-20210630x10q_htm.xml | XML | 1328607

Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 211151381
SIC: 3559 Special Industry Machinery, NEC