<SEC-DOCUMENT>0001558370-21-010725.txt : 20210806
<SEC-HEADER>0001558370-21-010725.hdr.sgml : 20210806
<ACCEPTANCE-DATETIME>20210806105240
ACCESSION NUMBER:		0001558370-21-010725
CONFORMED SUBMISSION TYPE:	10-Q
PUBLIC DOCUMENT COUNT:		71
CONFORMED PERIOD OF REPORT:	20210630
FILED AS OF DATE:		20210806
DATE AS OF CHANGE:		20210806

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AXCELIS TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001113232
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				341818596
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		10-Q
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-30941
		FILM NUMBER:		211151381

	BUSINESS ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915
		BUSINESS PHONE:		978-787-4000

	MAIL ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	EATON SEMICONDUCTOR EQUIPMENT INC
		DATE OF NAME CHANGE:	20000501
</SEC-HEADER>
<DOCUMENT>
<TYPE>10-Q
<SEQUENCE>1
<FILENAME>acls-20210630x10q.htm
<DESCRIPTION>10-Q
<TEXT>
<XBRL>
<?xml version='1.0' encoding='UTF-8'?>

      <!-- iXBRL document created with: Toppan Merrill Bridge iXBRL 9.6.7811.37134 -->
      <!-- Based on: iXBRL 1.1 -->
      <!-- Created on: 8/6/2021 2:50:37 PM -->
      <!-- iXBRL Library version: 1.0.7811.37150 -->
      <!-- iXBRL Service Job ID: 85aebdd7-8ff3-40a3-af85-4aee7845c1ab -->

  <html xmlns:us-gaap="http://fasb.org/us-gaap/2020-01-31" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xbrldt="http://xbrl.org/2005/xbrldt" xmlns:ixt-sec="http://www.sec.gov/inlineXBRL/transformation/2015-08-31" xmlns:srt="http://fasb.org/srt/2020-01-31" xmlns:ix="http://www.xbrl.org/2013/inlineXBRL" xmlns:ref="http://www.xbrl.org/2006/ref" xmlns:xbrli="http://www.xbrl.org/2003/instance" xmlns:dei="http://xbrl.sec.gov/dei/2020-01-31" xmlns:iso4217="http://www.xbrl.org/2003/iso4217" xmlns="http://www.w3.org/1999/xhtml" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xs="http://www.w3.org/2001/XMLSchema-instance" xmlns:ixt="http://www.xbrl.org/inlineXBRL/transformation/2015-02-26" xmlns:xbrldi="http://xbrl.org/2006/xbrldi" xmlns:acls="http://www.axcelis.com/20210630"><head><meta content="text/html" http-equiv="content-type" /><title></title></head><body><div style="margin-top:30pt;"></div><div style="display:none;"><ix:header><ix:hidden><ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" xs:nil="true" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" name="us-gaap:CommitmentsAndContingencies" id="Hidden_UH0MAgsHtE2gWwq6j0Ag4Q"></ix:nonFraction><ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" xs:nil="true" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" name="us-gaap:CommitmentsAndContingencies" id="Hidden_YZ86FPjWo0qjHJQeZwg7CQ"></ix:nonFraction><ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" name="us-gaap:CommonStockSharesOutstanding" id="Hidden_vzph5N5n_0CEriURooq3Nw">33657000</ix:nonFraction><ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" name="us-gaap:CommonStockSharesOutstanding" id="Hidden_hiZnTVFr40CTBLh5hSvD9w">33633000</ix:nonFraction><ix:nonNumeric contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" name="us-gaap:OperatingLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList" id="Hidden_W9KnNs_BPUCoZMTZ8ue8sA">us-gaap:OperatingLeaseRightOfUseAsset</ix:nonNumeric><ix:nonNumeric contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" name="us-gaap:FinanceLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList" id="Hidden_A9wG4K0J4UKHRE76HpHnMg">us-gaap:FinanceLeaseRightOfUseAsset</ix:nonNumeric><ix:nonNumeric contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" name="us-gaap:OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList" id="Hidden_7xdEmmVR-kiGHLFbeFZHxw">us-gaap:OtherLiabilitiesCurrent</ix:nonNumeric><ix:nonNumeric contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" name="us-gaap:OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList" id="Hidden_iFHUJS1o9kGUqT5DhGNMFw">us-gaap:OtherLiabilitiesCurrent</ix:nonNumeric><ix:nonNumeric contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" name="us-gaap:FinanceLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList" id="Hidden_Cv0WhFSvyEe6gpVSxXkYow">us-gaap:OtherLiabilitiesCurrent</ix:nonNumeric><ix:nonNumeric contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" name="us-gaap:OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList" id="Hidden_dHd0m_i_ckaUDDKTbKPNiA">us-gaap:OtherLiabilitiesNoncurrent</ix:nonNumeric><ix:nonNumeric contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" name="us-gaap:OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList" id="Hidden_oweD4mqRAkyNnxDFt4u52A">us-gaap:OtherLiabilitiesNoncurrent</ix:nonNumeric><ix:nonNumeric contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" name="us-gaap:FinanceLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList" id="Hidden_4JxT6-VdKkyC-ozm6pXPvg">us-gaap:FinanceLeaseLiabilityNoncurrent</ix:nonNumeric><ix:nonNumeric contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" name="us-gaap:OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList" id="Hidden_EFu-sVp3nUiwnTcDpuJATQ">us-gaap:OtherLiabilitiesCurrent us-gaap:OtherLiabilitiesNoncurrent</ix:nonNumeric><ix:nonNumeric contextRef="As_Of_6_30_2021_srt_RangeAxis_srt_MinimumMember_O-5Oo9z0SEm3XMiGRuOLdQ" name="us-gaap:LesseeOperatingLeaseRenewalTerm" id="Hidden_zan9aSK8zE6OWipLaR-PbQ">P1Y</ix:nonNumeric><ix:nonNumeric contextRef="As_Of_6_30_2021_srt_RangeAxis_srt_MinimumMember_O-5Oo9z0SEm3XMiGRuOLdQ" name="us-gaap:LesseeOperatingLeaseTermOfContract" id="Hidden_92crWef4lkGqNHzmJbisQA">P1Y</ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="dei:EntityCentralIndexKey" id="Tc_syJ8tm-MXUqsMtwiHkbrHQ_2_1">0001113232</ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="dei:CurrentFiscalYearEndDate" id="Tc_2n0Oj3N50k-HfxchW5er7Q_3_1">--12-31</ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="dei:DocumentFiscalYearFocus" id="Tc_SPN65jn60kW1TwsQBJFC9Q_4_1">2021</ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="dei:DocumentFiscalPeriodFocus" id="Tc_GMZsAQyZd0Ge-C4lNfrGzg_5_1">Q2</ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="dei:AmendmentFlag" id="Tc_OrEYIGdj706flOmXlD9tQA_6_1">false</ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="dei:EntityRegistrantName" id="Hidden_YldTQHeT102xPCcvq4nmHQ">AXCELIS TECHNOLOGIES INC</ix:nonNumeric><ix:nonFraction unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg" contextRef="Duration_1_1_2021_To_6_30_2021_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_cQ4F0Y1lpUWtviWdWANV4Q" decimals="3" name="us-gaap:ConcentrationRiskPercentage1" id="Hidden_du9mfOOU5EGSpVFrDPCNpg">0.296</ix:nonFraction><ix:nonFraction unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg" contextRef="Duration_1_1_2021_To_6_30_2021_srt_MajorCustomersAxis_acls_ThirdLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_j0C_ywhC5kqJU_mGLP_QSQ" decimals="3" name="us-gaap:ConcentrationRiskPercentage1" id="Hidden_bCiyUD-GJEW9dwOcR7kUFA">0.296</ix:nonFraction></ix:hidden><ix:references><link:schemaRef xlink:type="simple" xlink:href="acls-20210630.xsd"></link:schemaRef></ix:references><ix:resources><xbrli:context id="Duration_1_1_2021_To_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_qxYF29GUZEK4V73nPRU4lw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-03-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_ISQyc_YFT0Ggp2-cT9xM1Q"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-04-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2020_To_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_kQChkn8LbEaU-QAGr3O5aQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-04-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_b17p1G-nhEW5n_uF4leI5A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-03-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_jrp5HTMctEGaBiB28D3Lcg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-06-30</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_8SoISsYsQEmHgmYHZWy3NQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-06-30</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_1OMo5RzwUE2qmccn3CI7VQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-06-30</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_yk0zeuok1ESpzKSxw-_Yng"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-03-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_nPR1QHLRd0K6xO7MTzjQDA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-03-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_nMZiZF1p1UeYuA1-E7JPNg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-03-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_EjhaMDWkVkaY2PX5EPO33w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_e61Wz1CQE0qiyYcZjij5Yg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_21pDDGs74UqeJxBPHlYzOQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_FtxaGvJtt0GIO2vBuTSv0A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-06-30</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_aZJX0TutVE-uQ6w765155A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-06-30</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_idn7dSJpdU6u4H_5_bzuPw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-06-30</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_sLmqwPENdkO6QkOCbLKQ_w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-03-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_-8tath2-uEKtz8uE9FV9Iw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-03-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_TXi4cj5lNkO4zanH3e0wpg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-03-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_BYlqNNHP6kuAhGqLvpu1aA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2019-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_d0eqQfbvBEmk6gA7IHzN4w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2019-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_YsEAJpEiF0CucsZJ79McXQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2019-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_g56DknHgzE22JRq2ngeP8w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-06-30</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_yCLXcdhezkCA8IlJrhRQoA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-03-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_uzzcW3x6bE--mq9X_qlBvw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_p5MwFWjzgEmVRz-u0rc0Lg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-06-30</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_k-roo0M6bUam9HVt-d3Vog"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-03-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_SoIXUiAhFUmgd7essTKzKg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2019-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_6_30_2021_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_us-gaap_PlanNameAxis_acls_StockPlan2000Member_HVl0riEuP0OGyi-NSg5YHw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">acls:StockOptionAwardsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">acls:StockPlan2000Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2021_To_6_30_2021_srt_StatementGeographicalAxis_srt_NorthAmericaMember_NEOMdVsPLEyRJ4bIQ1Fqkg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:NorthAmericaMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-04-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2021_To_6_30_2021_srt_StatementGeographicalAxis_srt_EuropeMember_VFQ0RtdcrEasegSfJlNWWQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:EuropeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-04-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2021_To_6_30_2021_srt_StatementGeographicalAxis_srt_AsiaMember_D8-EjbAdWUGp9d6taxPD_g"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:AsiaMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-04-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_CIEelAIbeEuWRJlD5jK5vw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:NewSystemsRevenueMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-04-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_CsIOrAftermarketMember_aeBeVeoQykSPdY4ivJP6HA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:CsIOrAftermarketMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-04-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_6_30_2021_srt_StatementGeographicalAxis_srt_NorthAmericaMember_WMOuVFAHXEu4snTEayMOpA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:NorthAmericaMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_6_30_2021_srt_StatementGeographicalAxis_srt_EuropeMember_7aYEOIYHd06aUpdNgdi5KA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:EuropeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_6_30_2021_srt_StatementGeographicalAxis_srt_AsiaMember_jqdlc7_0s0Kz1yRqcL8iUg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:AsiaMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_CsIOrAftermarketMember_TicKoU9nx0Wjl559v7_68A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:CsIOrAftermarketMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2020_To_6_30_2020_srt_StatementGeographicalAxis_srt_NorthAmericaMember_3ltgpALfo0OIvGrA9bu5eA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:NorthAmericaMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-04-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2020_To_6_30_2020_srt_StatementGeographicalAxis_srt_EuropeMember_mSKgEEjdw0KK9jbwnggJiA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:EuropeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-04-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2020_To_6_30_2020_srt_StatementGeographicalAxis_srt_AsiaMember_sWwca1JA_UemYMycl1F-lQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:AsiaMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-04-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_QLowhise_EWfbCxHfpYWhQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:NewSystemsRevenueMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-04-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_acls_CsIOrAftermarketMember_a2NOCaAuIUSxTOjbsCuaOA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:CsIOrAftermarketMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-04-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_6_30_2020_srt_StatementGeographicalAxis_srt_NorthAmericaMember_HAn6Qh15rkatbPxF72mX2Q"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:NorthAmericaMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_6_30_2020_srt_StatementGeographicalAxis_srt_EuropeMember_brKP66xXNEmuH9-_Iz3PNA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:EuropeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_6_30_2020_srt_StatementGeographicalAxis_srt_AsiaMember_gGOkoCkXY0ODg73v1ZDa2Q"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:AsiaMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_aqASi6Lgl0y688FqkLnekg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:NewSystemsRevenueMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_acls_CsIOrAftermarketMember_WVc5IdW6PECXChKAn2jwNw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:CsIOrAftermarketMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2021_To_6_30_2021_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_QNR4-3SSo02w6_10P-JE4Q"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-04-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_6_30_2021_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_Yvxyzm8yg0SNKmN2RVXDEw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2020_To_6_30_2020_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_H-V3txgTH0yEDXnAa1DUtQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-04-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_6_30_2020_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_HgtTxlyUB0u26rdyUj-qkA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_30_2015_To_1_30_2015_srt_CounterpartyNameAxis_acls_BeverlyPropertyOwnerLlcMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingMember_ikN0WgABQ0Oc3EVaZNO4XA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:CounterpartyNameAxis">acls:BeverlyPropertyOwnerLlcMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:BuildingMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2015-01-30</xbrli:startDate><xbrli:endDate>2015-01-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_1x5HWVO72UqGpq3lSg5vJg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedTranslationAdjustmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_H_xVYtRFcEGPut0zNaxYsg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedDefinedBenefitPlansAdjustmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_IIcvKTwEi0elPGhQkd7WcQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-04-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_WSxitDFH_E2sNO8nvvvOTA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-03-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2020_To_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_CtCAykjwqUmInz4EceSxvA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-04-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_F9cCveT0DkqT5kW6lI3UDA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-03-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2021_To_6_30_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_ServiceMember_FSj452F2NkW_cwGShJp-8g"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:ServiceMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-04-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2021_To_6_30_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingAndMarketingExpenseMember_LhPsuVd2s0mQm7i1GpW9DA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:SellingAndMarketingExpenseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-04-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2021_To_6_30_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_UOAsZKMKtkuyCOTrcaa_JA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:ResearchAndDevelopmentExpenseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-04-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2021_To_6_30_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_GeneralAndAdministrativeExpenseMember_G38viKXzTE6J8aNCkxOzig"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:GeneralAndAdministrativeExpenseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-04-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_6_30_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_ServiceMember_0BYdpgalq0qBObRVNMEYrg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:ServiceMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_6_30_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingAndMarketingExpenseMember_ekhbGo7f0km2QXJUas_27w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:SellingAndMarketingExpenseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_6_30_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember__Wm4NbhGzkG8JA-3yNvkww"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:ResearchAndDevelopmentExpenseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_6_30_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_GeneralAndAdministrativeExpenseMember_M2eZ4S3rhU2T52988OgStg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:GeneralAndAdministrativeExpenseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2020_To_6_30_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_ServiceMember_DNcIBesDR0WAx8tJpfZeAw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:ServiceMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-04-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2020_To_6_30_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingAndMarketingExpenseMember_3WMIF-t1m0Od_EYdIVUqxA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:SellingAndMarketingExpenseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-04-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2020_To_6_30_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_bOdIPKEt_UOYlnABbTs6dQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:ResearchAndDevelopmentExpenseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-04-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2020_To_6_30_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_GeneralAndAdministrativeExpenseMember_SzbRC-XIQUe2J4Q3ZQI7Lg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:GeneralAndAdministrativeExpenseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-04-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_6_30_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_ServiceMember_LJCz9i16REm6mYOfTQTJFQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:ServiceMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_6_30_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingAndMarketingExpenseMember_Ip8jAZUCB0KJaalGOwu0eQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:SellingAndMarketingExpenseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_6_30_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_EnJPApftgku3_AVQt4IeFg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:ResearchAndDevelopmentExpenseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_6_30_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_GeneralAndAdministrativeExpenseMember_P-YXIVTwzUSUiO77F6K2Fg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:GeneralAndAdministrativeExpenseMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_h4oY94pFW0iXqEL70dTv8g"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-04-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_iLquTy6h6EGwrhHMLkr38Q"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-03-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2020_To_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_9eWRNT0z40SUKHvCIS5EYQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-04-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_LzqFMH4R-Uisa6DN0Wxm4w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-03-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_7_31_2020_srt_CounterpartyNameAxis_acls_SiliconValleyBankMember_us-gaap_CreditFacilityAxis_us-gaap_RevolvingCreditFacilityMember_BHV27yDiN0OhXbnK1dB6aQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:CounterpartyNameAxis">acls:SiliconValleyBankMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:CreditFacilityAxis">us-gaap:RevolvingCreditFacilityMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-07-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_6_30_2021_srt_CounterpartyNameAxis_acls_SiliconValleyBankMember_us-gaap_CreditFacilityAxis_us-gaap_RevolvingCreditFacilityMember_1PtMB98UE0qoxrddCYeVXQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:CounterpartyNameAxis">acls:SiliconValleyBankMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:CreditFacilityAxis">us-gaap:RevolvingCreditFacilityMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-06-30</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_6_30_2021_srt_CounterpartyNameAxis_acls_SiliconValleyBankMember_us-gaap_CreditFacilityAxis_us-gaap_RevolvingCreditFacilityMember_us-gaap_ShortTermDebtTypeAxis_us-gaap_LetterOfCreditMember_f9a-CoaN6k2l9efRYpvUrA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:CounterpartyNameAxis">acls:SiliconValleyBankMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:CreditFacilityAxis">us-gaap:RevolvingCreditFacilityMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ShortTermDebtTypeAxis">us-gaap:LetterOfCreditMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-06-30</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_1_30_2015_srt_CounterpartyNameAxis_acls_BeverlyPropertyOwnerLlcMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingMember_jmWTWk8TAU2MlL8_CzlyZQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:CounterpartyNameAxis">acls:BeverlyPropertyOwnerLlcMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:BuildingMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2015-01-30</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_6_30_2021_srt_RangeAxis_srt_MinimumMember_O-5Oo9z0SEm3XMiGRuOLdQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-06-30</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_6_30_2021_srt_RangeAxis_srt_MaximumMember_DwErj1lpCkWn0mWzw3VRWw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-06-30</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_6_30_2021_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_SaleAndLeaseBackMember_XO2P9-16s0C-1V43VObF-w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">acls:SaleAndLeaseBackMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-06-30</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2021_To_6_30_2021_srt_RangeAxis_srt_MaximumMember_ZnuU6u7lLU-23WdVDtAsjA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-04-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_6_30_2021_srt_RangeAxis_srt_MaximumMember_20Nye_pU60KPVnSZPrRM4A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2020_To_6_30_2020_srt_RangeAxis_srt_MaximumMember_mZg6wqDjnUOiZUO1ONyttQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-04-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_6_30_2020_srt_RangeAxis_srt_MaximumMember_m9F1xkRmoUWAhyuzx-0Kfg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_us-gaap_ProductMember_m8Lp4xDTCkCzgM248x2JYg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">us-gaap:ProductMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-04-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_ServicesMember_B3p_Js8bOEyj9Cp65IPR3Q"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:ServicesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-04-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_us-gaap_ProductMember_dRwAU8JJFUKNNaVrq5xq8A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">us-gaap:ProductMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_ServicesMember_HIMbhElbm0ifjaWX7uAk6Q"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:ServicesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_us-gaap_ProductMember_6gxzGc6zWUaLTLlbbEBCbg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">us-gaap:ProductMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-04-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_acls_ServicesMember_L8qGAvVgAkyJyGPxzt2lhw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:ServicesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-04-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_us-gaap_ProductMember_mlFbuuqGIkiASdw8XYr6cw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">us-gaap:ProductMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_acls_ServicesMember_mzKMywcD6kqNnycd7mcvxg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:ServicesMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_3_31_2021_Qs-qxUhDAk-CSx7C4Sn69A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:instant>2021-03-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_3_31_2020_-5Cw11QoRE6nHA_ngva07Q"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:instant>2020-03-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2021_To_6_30_2021_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_LyZ34Ub6ZE2jg6FrLmqvlQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:SecondLargestCustomerMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-04-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2021_To_6_30_2021_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_ioU0Dgho30i3_iChW8hv2Q"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:LargestCustomerMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-04-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_6_30_2021_srt_MajorCustomersAxis_acls_ThirdLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_j0C_ywhC5kqJU_mGLP_QSQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:ThirdLargestCustomerMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_6_30_2021_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_cQ4F0Y1lpUWtviWdWANV4Q"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:SecondLargestCustomerMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_6_30_2021_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_zupJXrbQo0a-8SQG-rownQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:SecondLargestCustomerMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_6_30_2021_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_eSq_6G4BokG9b5v5esDOdg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:LargestCustomerMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_6_30_2021_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_aiCji2R-9U6Rikh9GFRo_A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:LargestCustomerMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2020_To_6_30_2020_srt_MajorCustomersAxis_acls_ThirdLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_mKAzDHjbQESuboLfItMLNQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:ThirdLargestCustomerMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-04-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2020_To_6_30_2020_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_B0YXsPg90Uu6S-dCilKtng"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:SecondLargestCustomerMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-04-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2020_To_6_30_2020_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_ZV9jt22dP0uGeDhuhWngTQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:LargestCustomerMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-04-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_RiSTmhVFYkGWxNcD0K7wdA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:SecondLargestCustomerMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_aFNIvfPpnkaFunvsLdiyvQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:LargestCustomerMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_6_30_2020_srt_MajorCustomersAxis_acls_ThirdLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_BzG27lzRTEKsj0BTibH8JA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:ThirdLargestCustomerMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_6_30_2020_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_qwe-Gd93y0appJEy4zDK-A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:SecondLargestCustomerMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_6_30_2020_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_F3aWLUtC4kSC605maGsNbg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:LargestCustomerMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_6_30_2020_vfxHSqwZwkeC1Z0d0SG93A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:instant>2020-06-30</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_6_30_2021_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_9xTv3Pq1gUSA_r8gGJJknA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByAssetClassAxis">acls:MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel1Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-06-30</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_6_30_2021_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_kuTMgTqgiki9V2z7-fMlxg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByAssetClassAxis">acls:MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementBasisAxis">us-gaap:EstimateOfFairValueFairValueDisclosureMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-06-30</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2020_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_FraS8kKQ90OGZQfA-1XGoA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByAssetClassAxis">acls:MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel1Member</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2020_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_lVUVH_kXYE6gJiajsabg5w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:FairValueByAssetClassAxis">acls:MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementBasisAxis">us-gaap:EstimateOfFairValueFairValueDisclosureMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2019_FtHnUOMLjkeW-5RTgMqhrA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:instant>2019-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember__5v7cq8u6k6j4ROt48LqZQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-04-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_LcVXrn_7VEe2d4S1f3MdVA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-03-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_3_31_2021_gPmQL1FpQka6Ntdd-jalcA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-03-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2020_To_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_pmCEepBP-UK1T09W5cnpig"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-04-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_6Y1LtOVOr0eV3onJXZYpfg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-03-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_3_31_2020_jBnQ2ZrbZEec0jeFEn7byw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-03-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_lj4AoPsMfkCbp5bs5wvdSw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedTranslationAdjustmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-06-30</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_CCIgEjvg00eOsfhU2VWCfA"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedDefinedBenefitPlansAdjustmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-06-30</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_3gAqRSnshEqM1_usXZTg1g"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedTranslationAdjustmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_hy0Vpmp4gkyQqT14NwPRmQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedDefinedBenefitPlansAdjustmentMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2020-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_8_3_2021_XPjaK0vTnkm9mIMenPJxzg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:instant>2021-08-03</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_6_30_2021_us-gaap_PlanNameAxis_acls_StockPlan2000Member_gPtI2pgzX0W3fHkKR6jOFg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">acls:StockPlan2000Member</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_srt_RangeAxis_srt_MinimumMember_eoI0MHitoEKWWaFv3U4W5w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:NewSystemsRevenueMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_srt_RangeAxis_srt_MaximumMember_s_z-Qx9rgU29sO1r_6EnQw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:NewSystemsRevenueMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_fPmnjFnuFEeqgfLBIms0Xg"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:NewSystemsRevenueMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="As_Of_6_30_2021_us-gaap_LongtermDebtTypeAxis_us-gaap_RevolvingCreditFacilityMember_TBzxievtWUanTNO0EDnI7w"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:LongtermDebtTypeAxis">us-gaap:RevolvingCreditFacilityMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:instant>2021-06-30</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:instant>2020-12-31</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:instant>2021-06-30</xbrli:instant></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:startDate>2021-04-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:startDate>2020-04-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2021_To_6_30_2021_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_eiDKLI-O4kSIZoQQF5U5dw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-04-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_6_30_2021_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_EFekRRJHqkGFwzmsymSNnw"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_6_30_2021_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_wvkv2eEMZ0G0rpajOPkWzQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_4_1_2020_To_6_30_2020_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_s0j2Mdde6Ue5RgxCmzOmuQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-04-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_12_31_2020_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_ycrS1Nkupk2NK-C8fQ6Qog"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-12-31</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2020_To_6_30_2020_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_9RBgDTrzwk-3NBew4OGitQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier><xbrli:segment><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember><xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember></xbrli:segment></xbrli:entity><xbrli:period><xbrli:startDate>2020-01-01</xbrli:startDate><xbrli:endDate>2020-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:context id="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"><xbrli:entity><xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier></xbrli:entity><xbrli:period><xbrli:startDate>2021-01-01</xbrli:startDate><xbrli:endDate>2021-06-30</xbrli:endDate></xbrli:period></xbrli:context><xbrli:unit id="Unit_Standard_customer_0YOFupMhv0yS1XDebetzdQ"><xbrli:measure>acls:customer</xbrli:measure></xbrli:unit><xbrli:unit id="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w"><xbrli:measure>iso4217:USD</xbrli:measure></xbrli:unit><xbrli:unit id="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg"><xbrli:measure>xbrli:pure</xbrli:measure></xbrli:unit><xbrli:unit id="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA"><xbrli:measure>xbrli:shares</xbrli:measure></xbrli:unit><xbrli:unit id="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ"><xbrli:divide><xbrli:unitNumerator><xbrli:measure>iso4217:USD</xbrli:measure></xbrli:unitNumerator><xbrli:unitDenominator><xbrli:measure>xbrli:shares</xbrli:measure></xbrli:unitDenominator></xbrli:divide></xbrli:unit></ix:resources></ix:header></div><div style="max-width:100%;padding-left:4.47%;padding-right:4.47%;position:relative;"><div style="margin-top:21.6pt;min-height:5.75pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 30pt 0pt;"><a href="#Toc"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="border-bottom-style:none;font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1pt;padding-bottom:0pt;padding-top:1pt;border-top:3.0pt solid #000000;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><p style="border-top-style:none;font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1pt;padding-bottom:1pt;padding-top:0pt;border-bottom:1.0pt solid #000000;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:4pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><a id="_2494976f_e7f1_4334_95c3_e19465c91c49"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-size:18pt;font-weight:bold;">UNITED STATES</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-size:18pt;font-weight:bold;">SECURITIES AND EXCHANGE COMMISSION</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Washington, D.C. 20549</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:4pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><a id="_aa9211d5_b804_4991_bcb7_6c961604a42d"></a><p style="font-family:'Times New Roman','Times','serif';font-size:18pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">FORM&#160;</b><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="dei:DocumentType" id="Narr_7Q_h0dPF5EmtMQQ3CX9HoA"><b style="font-weight:bold;">10-Q</b></ix:nonNumeric></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:4pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(Mark One)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:4pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;border:0;"><tr><td style="width:18pt;padding:0pt;"></td><td style="vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;"><ix:nonNumeric format="ixt-sec:boolballotbox" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="dei:DocumentQuarterlyReport" id="Narr_DTedQSObJkSx5ZzUWvE9zw"><b style="font-family:'Segoe UI Symbol';font-weight:bold;">&#9746;</b></ix:nonNumeric></p></td><td style="padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;"><b style="font-weight:bold;">QUARTERLY REPORT PURSUANT TO SECTION&#160;13 OR&#160;15(d)&#160;OF&#160;THE SECURITIES EXCHANGE ACT OF 1934</b></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:4pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For the quarterly period ended </b><ix:nonNumeric format="ixt:datemonthdayyearen" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="dei:DocumentPeriodEndDate" id="Narr_A44B36zVME-Ceeu5MZck-Q"><b style="font-weight:bold;">June 30, 2021</b></ix:nonNumeric></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:4pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Or</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:4pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;border:0;"><tr><td style="width:18pt;padding:0pt;"></td><td style="vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;"><ix:nonNumeric format="ixt-sec:boolballotbox" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="dei:DocumentTransitionReport" id="Narr_dzwK3pNh4UW2zb9tSjJFyw"><b style="font-family:'Segoe UI Symbol';font-weight:bold;">&#9744;</b></ix:nonNumeric></p></td><td style="padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:12pt;margin-bottom:0pt;margin-top:0pt;"><b style="font-weight:bold;">TRANSITION REPORT PURSUANT TO SECTION&#160;13 OR&#160;15(d)&#160;OF&#160;THE SECURITIES EXCHANGE ACT OF 1934</b></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:4pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">For the transition period from&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;to&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:4pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Commission file number </b><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="dei:EntityFileNumber" id="Narr_UKXlZUrnP0Kmzrt0R9LICg"><b style="font-weight:bold;">000-30941</b></ix:nonNumeric></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:4pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:18pt;text-align:center;margin:0pt;"><span style="-sec-ix-hidden:Hidden_YldTQHeT102xPCcvq4nmHQ;"><b style="font-family:'Times New Roman','Times','serif';font-size:18pt;font-style:normal;font-weight:bold;text-align:center;">AXCELIS TECHNOLOGIES,&#160;INC.</b></span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">(Exact name of registrant as specified in its charter)</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:4pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><a id="_d70cb385_ad51_4cf3_a08a_6d5db2fa6924"></a><a id="_c7cea947_f89c_4a88_b91c_6ebddc62ee39"></a><a id="_d3449bdd_1a30_460f_94aa_eff39929ec10"></a><a id="Tc_R5UVuVCfEU6D8qWH8oc01A_2_0"></a><a id="Tc_kP14teQ_nE6_CNMmvk8Gdg_2_2"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:top;width:49%;margin:0pt;padding:0pt;"></td><td style="vertical-align:bottom;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:48.99%;margin:0pt;padding:0pt;"></td></tr><tr><td style="vertical-align:top;width:49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:center;margin:0pt;"><ix:nonNumeric format="ixt-sec:stateprovnameen" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="dei:EntityIncorporationStateCountryCode" id="Tc_pj8aoki6w0erT37FQUZapg_1_0"><b style="font-weight:bold;">Delaware</b></ix:nonNumeric></p></td><td style="vertical-align:bottom;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:48.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="dei:EntityTaxIdentificationNumber" id="Tc_2rmbGu5y70WBGAEIdQxP8A_1_2"><b style="font-weight:bold;">34-1818596</b></ix:nonNumeric></p></td></tr><tr><td style="vertical-align:top;width:49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:center;margin:0pt;">(State or other jurisdiction of<br />incorporation or organization)</p></td><td style="vertical-align:bottom;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:48.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:center;margin:0pt;">(IRS Employer<br />Identification No.)</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="dei:EntityAddressAddressLine1" id="Narr_GzMjOqy850aS3VMi51-Q1g"><b style="font-weight:bold;">108 Cherry Hill Drive</b></ix:nonNumeric></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="dei:EntityAddressCityOrTown" id="Narr_RHmmUXihykOj3KX7GEKqgg"><b style="font-weight:bold;">Beverly</b></ix:nonNumeric><b style="font-weight:bold;">, </b><ix:nonNumeric format="ixt-sec:stateprovnameen" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="dei:EntityAddressStateOrProvince" id="Narr_ud_T2usNE0G2dhcI45KOVg"><b style="font-weight:bold;">Massachusetts</b></ix:nonNumeric><b style="font-weight:bold;"> </b><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="dei:EntityAddressPostalZipCode" id="Narr_NkO3dm-Hy0Kw5Pppe8DWuQ"><b style="font-weight:bold;">01915</b></ix:nonNumeric></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">(Address of principal executive offices, including zip code)</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:4pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(</b><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="dei:CityAreaCode" id="Narr_jrPkDcHwTUufZt3y2VGeeQ"><b style="font-weight:bold;">978</b></ix:nonNumeric><b style="font-weight:bold;">)&#160;</b><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="dei:LocalPhoneNumber" id="Narr_pQGTGMaorEirP_EDBAqPtQ"><b style="font-weight:bold;">787-4000</b></ix:nonNumeric></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">(Registrant&#8217;s telephone number, including area code)</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><a id="_b1111763_18e1_44f8_b719_183f71371712"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:12.95pt;margin:0pt;">Securities registered pursuant to Section 12(b) of the Act:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:12.95pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><a id="_781a6ff4_b703_481c_90d3_73b1d7fb8e5f"></a><a id="Tc_3hwp9rN_qUitv5rhywaL-g_1_0"></a><a id="Tc_L-oD_2efbUiD2Lmwg9u-zQ_1_1"></a><a id="Tc_CZ8XJTXiz0yzXJO_VAS1Mg_1_2"></a><a id="_ba63ec99_42da_4275_b6dd_c30879e2bde7"></a><a id="_5f840ef1_c7d4_428b_b23b_1b46d28cfa61"></a><a id="_fdde906d_67ae_4fe7_b833_3dd2b3640df6"></a><a id="_4aa7111e_37f7_4ef9_942e_21ae0d3ca70e"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;width:83.91%;"><tr style="height:1pt;"><td style="vertical-align:top;width:31.51%;margin:0pt;padding:0pt 5.4pt 0pt 5.4pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:top;width:35.14%;margin:0pt;padding:0pt 5.4pt 0pt 5.4pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:top;width:33.33%;margin:0pt;padding:0pt 5.4pt 0pt 5.4pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:top;width:31.51%;border-bottom:1px solid #000000;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;margin:0pt;padding:0pt 5.15pt 0pt 5.15pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">Title of each class</p></td><td style="vertical-align:top;width:35.14%;border-bottom:1px solid #000000;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;margin:0pt;padding:0pt 5.15pt 0pt 5.15pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">Trading symbol</p></td><td style="vertical-align:top;width:33.33%;border-bottom:1px solid #000000;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;margin:0pt;padding:0pt 5.15pt 0pt 5.15pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">Name of each exchange on which registered</p></td></tr><tr><td style="vertical-align:top;width:31.51%;border-bottom:1px solid #000000;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;margin:0pt;padding:0pt 5.15pt 0pt 5.15pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="dei:Security12bTitle" id="Tc_1vpiXLNVTEGX7EMtnDrdjQ_2_0">Common Stock, $0.001 par value</ix:nonNumeric></p></td><td style="vertical-align:top;width:35.14%;border-bottom:1px solid #000000;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;margin:0pt;padding:0pt 5.15pt 0pt 5.15pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="dei:TradingSymbol" id="Tc_WeaWqdc_E0acc0nH4YIylg_2_1">ACLS</ix:nonNumeric></p></td><td style="vertical-align:top;width:33.33%;border-bottom:1px solid #000000;border-left:1px solid #000000;border-right:1px solid #000000;border-top:1px solid #000000;margin:0pt;padding:0pt 5.15pt 0pt 5.15pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><ix:nonNumeric format="ixt-sec:exchnameen" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="dei:SecurityExchangeName" id="Tc_0Sa3sz1BOke7cLn8j28pEQ_2_2">Nasdaq Global Select Market</ix:nonNumeric></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:13.2pt;margin:0pt;"><span style="font-size:4pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:13.2pt;margin:0pt;">Indicate by check mark whether the registrant (1)&#160;has filed all reports required to be filed by Section&#160;13 or 15(d)&#160;of the Securities Exchange Act of 1934 during the preceding 12&#160;months (or for such shorter period that the registrant was required to file such reports), and (2)&#160;has been subject to such filing requirements for the past 90&#160;days.&#160;&#160;<ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="dei:EntityCurrentReportingStatus" id="Narr_PW_pzecvpUW4bDbUHsyd2g">Yes</ix:nonNumeric>&#160;<span style="font-family:'Segoe UI Symbol';">&#9746;</span> &#160;No&#160;<span style="font-family:'Segoe UI Symbol';">&#9744;</span>.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:4pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><a id="_668edd82_a5c9_4d61_a132_26320d1d9fad"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:13.2pt;margin:0pt;">Indicate by check mark whether the registrant has submitted electronically every Interactive Data File required to be submitted pursuant to Rule&#160;<span style="white-space:pre-wrap;">405 of Regulation S-T during the preceding 12 months (or for such shorter period that the registrant was required to submit such files).  </span><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="dei:EntityInteractiveDataCurrent" id="Narr_HVaWuNMPj0iWiF4c_zjvSQ">Yes</ix:nonNumeric>&#160;<span style="font-family:'Segoe UI Symbol';">&#9746;</span><span style="white-space:pre-wrap;">  No&#160;</span><span style="font-family:'Segoe UI Symbol';">&#9744;</span>.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:4pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:13.2pt;margin:0pt;">Indicate by check mark whether the registrant is a large accelerated filer, an accelerated filer, a non-accelerated filer, smaller reporting company, or an emerging growth company. See the definitions of &#8220;large accelerated filer,&#8221; &#8220;accelerated filer,&#8221; &#8220;smaller reporting company,&#8221; and &#8220;emerging growth company&#8221; in Rule&#160;12b-2 of the Exchange Act.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:4pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><a id="_355d8e67_e765_428b_9b57_27b10bcc0774"></a><a id="_bf805597_0f5d_43e9_852d_bbaf33942e5a"></a><a id="_46c1ca12_3f3c_4130_87ca_1987d6b39847"></a><a id="_e526d2a7_2b80_4e83_9633_85513be984bb"></a><a id="_713bb24c_cff4_4ad2_a330_33bd2baf834f"></a><a id="_8776733a_d04b_45b8_aea9_f021e4a9bd0a"></a><a id="_8c7de39e_a7bc_4579_8836_d4c6a04bc9a0"></a><a id="_6516652a_f495_4a0e_a4e2_7f67239fa645"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:top;width:49%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"></div></div></td><td style="vertical-align:bottom;width:1.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:top;width:48.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"></div></div></td></tr><tr style="height:1pt;"><td style="vertical-align:top;width:49%;margin:0pt;padding:0pt;"></td><td style="vertical-align:bottom;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:48.99%;margin:0pt;padding:0pt;"></td></tr><tr><td style="vertical-align:top;width:49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:center;margin:0pt;"><ix:nonNumeric format="ixt-sec:entityfilercategoryen" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="dei:EntityFilerCategory" id="Narr_mufizb6sZUWWAlUCf7XBXw">Large accelerated filer</ix:nonNumeric>&#160;<span style="font-family:'Segoe UI Symbol';">&#9746;</span></p></td><td style="vertical-align:bottom;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:48.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:center;margin:0pt;">Accelerated filer&#160;<span style="font-family:'Segoe UI Symbol';">&#9744;</span></p></td></tr><tr><td style="vertical-align:top;width:49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:center;margin:0pt;">Non-accelerated filer&#160;<span style="font-family:'Segoe UI Symbol';">&#9744;</span></p></td><td style="vertical-align:bottom;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:48.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:center;margin:0pt;">Smaller reporting company&#160; <ix:nonNumeric format="ixt-sec:boolballotbox" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="dei:EntitySmallBusiness" id="Narr_TEf2EqQll0eGMC0bt3xRfw"><span style="font-family:'Segoe UI Symbol';">&#9744;</span></ix:nonNumeric></p></td></tr><tr><td style="vertical-align:top;width:49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:48.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:center;margin:0pt;"><span style="white-space:pre-wrap;">Emerging growth company  </span><ix:nonNumeric format="ixt-sec:boolballotbox" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="dei:EntityEmergingGrowthCompany" id="Narr_s1iAfBrLKUy05NaU9SBWPA"><span style="font-family:'Segoe UI Symbol';">&#9744;</span></ix:nonNumeric></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:5pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:12.95pt;margin:0pt;"><span style="white-space:pre-wrap;">If an emerging growth company, indicate by check mark if registrant has elected not to use the extended transition period for complying with any new or revised financial accounting standards provided pursuant to Section 13(a) of the Exchange Act.    </span><span style="font-family:'Segoe UI Symbol';">&#9744;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:12.95pt;margin:0pt;"><span style="font-size:5pt;visibility:hidden;">&#8203;</span></p><a id="_f29eb855_de11_448f_96af_06d475fd9f5b"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:12.95pt;margin:0pt;">Indicate by check mark whether the registrant is a shell company (as defined in Rule&#160;12b-2 of the Exchange Act)&#160;Yes&#160;<ix:nonNumeric format="ixt-sec:boolballotbox" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="dei:EntityShellCompany" id="Narr_E-FSB0OCQEuzinBLQ9rc6w"><span style="font-family:'Segoe UI Symbol';">&#9744;</span></ix:nonNumeric> No&#160; <span style="font-family:'Segoe UI Symbol';">&#9746;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:4pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><a id="_f0807b37_9bb6_457d_b714_504717a71068"></a><a id="_7045be82_f200_4c9f_8df6_fe1f69395130"></a><a id="_ac8ae6f8_8acb_49b2_b01d_265408448212"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:13.2pt;margin:0pt;">As of August 3, 2021 there were <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" format="ixt:numdotdecimal" scale="0" contextRef="As_Of_8_3_2021_XPjaK0vTnkm9mIMenPJxzg" decimals="INF" name="dei:EntityCommonStockSharesOutstanding" id="Narr_Q5AYkC3UmUSixVlHGHtM4A">33,574,743</ix:nonFraction> shares of the registrant&#8217;s common stock outstanding.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1pt;padding-bottom:1pt;padding-top:1pt;border-bottom:3.0pt solid #000000;border-top:1.0pt solid #000000;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><p style="display:none;font-family:'Calibri','Helvetica','sans-serif';line-height:0pt;margin:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:0pt;visibility:hidden;">&#8203;</span></p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:91.06%;border:0;margin:30pt 4.47% 30pt 4.47%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="margin-top:21.6pt;min-height:36pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 30pt 0pt;"><a href="#Toc"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_d2314555_04f3_4c59_928c_90585000010a"></a><a id="Toc"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Table of Contents</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:top;width:8.07%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"></div></div></td><td style="vertical-align:top;width:86.68%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"></div></div></td><td style="vertical-align:bottom;width:5.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td colspan="2" style="vertical-align:top;width:94.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;padding-left:10pt;text-indent:-10pt;margin:0pt;"><a href="#PART1FINANCIALINFORMATION_304973"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;line-height:1.37;text-align:left;">PART&#160;I&#160;-&#160;FINANCIAL&#160;INFORMATION</b></a></p></td><td style="vertical-align:bottom;width:5.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#Item1FinancialStatements_869987"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;line-height:1.37;text-align:left;">Item 1.</b></a></p></td><td style="vertical-align:top;width:86.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#Item1FinancialStatements_869987"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;line-height:1.37;text-align:left;">Financial Statements (Unaudited)</b></a></p></td><td style="vertical-align:bottom;width:5.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:8.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:86.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#ConsolidatedStatementsofOperations_8900"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;line-height:1.37;text-align:left;">Consolidated Statements of Operations for the three and six months ended June 30, 2021 and 2020</span></a></p></td><td style="vertical-align:bottom;width:5.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:right;margin:0pt;">3</p></td></tr><tr><td style="vertical-align:top;width:8.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:86.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#ConsolidatedStatementsofComprehensiveInc"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;line-height:1.37;text-align:left;">Consolidated Statements of Comprehensive Income for the three and six months ended June 30, 2021 and 2020</span></a></p></td><td style="vertical-align:bottom;width:5.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:right;margin:0pt;">4</p></td></tr><tr><td style="vertical-align:top;width:8.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:86.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#ConsolidatedBalanceSheets_859153"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;line-height:1.37;text-align:left;">Consolidated Balance Sheets as of June 30, 2021 and December&#160;31, 2020</span></a></p></td><td style="vertical-align:bottom;width:5.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:right;margin:0pt;">5</p></td></tr><tr><td style="vertical-align:top;width:8.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:86.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#ConsolidatedStatementEquity"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;line-height:1.37;text-align:left;">Consolidated Statements of Stockholders&#8217; Equity for the three and six months ended June 30, 2021 and 2020</span></a></p></td><td style="vertical-align:bottom;width:5.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:right;margin:0pt;">6</p></td></tr><tr><td style="vertical-align:top;width:8.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:86.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#ConsolidatedStatementsofCashFlows_699712"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;line-height:1.37;text-align:left;">Consolidated Statements of Cash Flows for the six months ended June 30, 2021 and 2020</span></a></p></td><td style="vertical-align:bottom;width:5.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:right;margin:0pt;">7</p></td></tr><tr><td style="vertical-align:top;width:8.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:86.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#NotestoConsolidatedFinancialStatementsUn"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;line-height:1.37;text-align:left;">Notes to Consolidated Financial Statements (Unaudited)</span></a></p></td><td style="vertical-align:bottom;width:5.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:right;margin:0pt;">8</p></td></tr><tr><td style="vertical-align:top;width:8.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#Item2ManagementsDiscussionandAnalysisofF"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;line-height:1.37;text-align:left;">Item 2.</b></a></p></td><td style="vertical-align:top;width:86.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#Item2ManagementsDiscussionandAnalysisofF"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;line-height:1.37;text-align:left;">Management&#8217;s Discussion and Analysis of Financial Condition and Results of Operations</b></a></p></td><td style="vertical-align:bottom;width:5.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:right;margin:0pt;">19</p></td></tr><tr><td style="vertical-align:top;width:8.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:86.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#Overview_288809"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;line-height:1.37;text-align:left;">Overview</span></a></p></td><td style="vertical-align:bottom;width:5.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:right;margin:0pt;">19</p></td></tr><tr><td style="vertical-align:top;width:8.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:86.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#CriticalAccountingEstimates_482826"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;line-height:1.37;text-align:left;">Critical Accounting Estimates</span></a></p></td><td style="vertical-align:bottom;width:5.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:right;margin:0pt;">19</p></td></tr><tr><td style="vertical-align:top;width:8.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:86.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#ResultsofOperations_659595"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;line-height:1.37;text-align:left;">Results of Operations</span></a></p></td><td style="vertical-align:bottom;width:5.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:right;margin:0pt;">20</p></td></tr><tr><td style="vertical-align:top;width:8.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:86.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#LiquidityandCapitalResources_541794"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;line-height:1.37;text-align:left;">Liquidity and Capital Resources</span></a></p></td><td style="vertical-align:bottom;width:5.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:right;margin:0pt;">26</p></td></tr><tr><td style="vertical-align:top;width:8.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#Item3QuantitativeandQualitativeDisclosur"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;line-height:1.37;text-align:left;">Item 3.</b></a></p></td><td style="vertical-align:top;width:86.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#Item3QuantitativeandQualitativeDisclosur"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;line-height:1.37;text-align:left;">Quantitative and Qualitative Disclosures About Market Risk</b></a></p></td><td style="vertical-align:bottom;width:5.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:right;margin:0pt;">28</p></td></tr><tr><td style="vertical-align:top;width:8.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#Item4ControlsandProcedures_773908"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;line-height:1.37;text-align:left;">Item 4.</b></a></p></td><td style="vertical-align:top;width:86.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#Item4ControlsandProcedures_773908"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;line-height:1.37;text-align:left;">Controls and Procedures</b></a></p></td><td style="vertical-align:bottom;width:5.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:right;margin:0pt;">28</p></td></tr><tr><td colspan="2" style="vertical-align:top;width:94.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#PARTIIOTHERINFORMATION_940705"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;line-height:1.37;text-align:left;">PART&#160;II - OTHER INFORMATION</b></a></p></td><td style="vertical-align:bottom;width:5.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:right;margin:0pt;">29</p></td></tr><tr><td style="vertical-align:top;width:8.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#Item1LegalProceedings_163018"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;line-height:1.37;text-align:left;">Item&#160;1.</b></a></p></td><td style="vertical-align:top;width:86.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#Item1LegalProceedings_163018"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;line-height:1.37;text-align:left;">Legal Proceedings</b></a></p></td><td style="vertical-align:bottom;width:5.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:right;margin:0pt;">29</p></td></tr><tr><td style="vertical-align:top;width:8.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#Item1ARiskFactors_163682"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;line-height:1.37;text-align:left;">Item&#160;1A.</b></a></p></td><td style="vertical-align:top;width:86.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#Item1ARiskFactors_163682"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;line-height:1.37;text-align:left;">Risk Factors</b></a></p></td><td style="vertical-align:bottom;width:5.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:right;margin:0pt;">29</p></td></tr><tr><td style="vertical-align:top;width:8.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#Item2UnregisteredSalesofEquitySecurities"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;line-height:1.37;text-align:left;">Item&#160;2.</b></a></p></td><td style="vertical-align:top;width:86.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#Item2UnregisteredSalesofEquitySecurities"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;line-height:1.37;text-align:left;">Unregistered Sales of Equity Securities and Use of Proceeds</b></a></p></td><td style="vertical-align:bottom;width:5.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:right;margin:0pt;">29</p></td></tr><tr><td style="vertical-align:top;width:8.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#Item3DefaultsUponSeniorSecurities_689958"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;line-height:1.37;text-align:left;">Item&#160;3.</b></a></p></td><td style="vertical-align:top;width:86.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#Item3DefaultsUponSeniorSecurities_689958"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;line-height:1.37;text-align:left;">Defaults Upon Senior Securities</b></a></p></td><td style="vertical-align:bottom;width:5.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:right;margin:0pt;">29</p></td></tr><tr><td style="vertical-align:top;width:8.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#Item4MineSafetyDisclosures_365895"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;line-height:1.37;text-align:left;">Item&#160;4.</b></a></p></td><td style="vertical-align:top;width:86.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#Item4MineSafetyDisclosures_365895"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;line-height:1.37;text-align:left;">Mine Safety Disclosures</b></a></p></td><td style="vertical-align:bottom;width:5.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:right;margin:0pt;">29</p></td></tr><tr><td style="vertical-align:top;width:8.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#Item5OtherInformation_535580"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;line-height:1.37;text-align:left;">Item&#160;5.</b></a></p></td><td style="vertical-align:top;width:86.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#Item5OtherInformation_535580"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;line-height:1.37;text-align:left;">Other Information</b></a></p></td><td style="vertical-align:bottom;width:5.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:right;margin:0pt;">29</p></td></tr><tr><td style="vertical-align:top;width:8.07%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#Item6Exhibits_453635"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;line-height:1.37;text-align:left;">Item&#160;6.</b></a></p></td><td style="vertical-align:top;width:86.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><a href="#Item6Exhibits_453635"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;line-height:1.37;text-align:left;">Exhibits</b></a></p></td><td style="vertical-align:bottom;width:5.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;text-align:right;margin:0pt;">30</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">2</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="margin-top:21.6pt;min-height:36pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 30pt 0pt;"><a href="#Toc"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><a id="_40cc4a85_8b40_48af_ba0f_bf8b42fc6405"></a><a id="_contentSection_288e3e41_4b4b_41aa_96e6_"></a><a id="PART1FINANCIALINFORMATION_304973"></a><p style="font-family:'Times New Roman','Times','serif';font-size:1pt;margin:0pt;"><span style="white-space:pre-wrap;">  </span><b style="font-size:10pt;font-weight:bold;">PART&#160;1&#8212;FINANCIAL INFORMATION</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><a id="Item1FinancialStatements_869987"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 1.&#160;&#160;&#160;&#160;Financial Statements.</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Axcelis Technologies,&#160;Inc.</b></p><a id="ConsolidatedStatementsofOperations_8900"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Consolidated Statements of Operations</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(In thousands, except per share amounts)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(Unaudited)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p><a id="_daf8d9f8_d863_4aea_b03a_c87de65a0f1b"></a><a id="Tc_Zd0hu8_dbUmQ9dq44Ji85A_1_2"></a><a id="Tc_dKwZqnZ5d06M9MZa-zKv6w_1_8"></a><a id="Tc_ms9MIzTUxkO9uHD0ZnsoPw_2_3"></a><a id="Tc_CYf7GkzufkOhlzLdf7kGdQ_2_8"></a><a id="Tc_fuPKQYcTdUe-BJiNI4fdkw_3_2"></a><a id="Tc_vTquSt7gA0aN48xoLz8DXA_3_5"></a><a id="Tc_8q_f4D2vsEWWLFy_W2QGWg_3_8"></a><a id="Tc_EZD-NYxEfkalFE6uCV9LjQ_3_11"></a><a id="Tc_PL6F8TiNKkOC4cBoVGRKgA_4_0"></a><a id="Tc_B5rd2ZjfY0yu72cWannVHg_5_0"></a><a id="Tc_6GZUeIyinEW_tgDwl8jRTg_5_2"></a><a id="Tc_tP7KKAO0OUWEwm6y8NpQXg_5_5"></a><a id="Tc_wRCfUJ5PWk28Tz7zVoiT8w_5_8"></a><a id="Tc_mfa6E8KPpkajnAVzM1S1kg_5_11"></a><a id="Tc_ZsNWgBzkMUiSWLgcKHSklA_6_0"></a><a id="Tc_-XXHDZUSQUGYhLA1iAm0Ng_7_0"></a><a id="Tc_8-6kKDa7SEGpxLNvicaH5Q_8_0"></a><a id="Tc_tm9m5UHClkKpgyDTnX6cRw_9_0"></a><a id="Tc_SfV2Yw7glkaisQdpKv0Lbg_10_0"></a><a id="Tc_Wc_xk4zhQUm7Y4DGGRo-Zw_11_0"></a><a id="Tc___P2jApaHE2sTBu6auNShA_12_0"></a><a id="Tc_049NWbsA1E6cmgYIkQA-lA_13_0"></a><a id="Tc_Z3JkkCTLzkyZH1o3mNcquQ_14_0"></a><a id="Tc_ufm7XilIAE-7lt4Ul5-HOA_15_0"></a><a id="Tc_zco_NzxsEEyISf1iahMHdQ_16_0"></a><a id="Tc_xi1N_pOKVUq23x1jIi9CEQ_17_0"></a><a id="Tc_Pv_ELzYSa02KRQE-igeBvQ_18_0"></a><a id="Tc_nsM5tKKTh0SeCCy-TevobA_19_0"></a><a id="Tc_gRenTOdiG02A5Ol7s8EyTQ_20_0"></a><a id="Tc_AWIbH-V_n0i-0Q_5MdYGnw_21_0"></a><a id="Tc_J5RwdC0DGku_LqScXHMR-A_22_0"></a><a id="Tc_V253JZS9L0ietpy6s9_t0w_23_0"></a><a id="Tc_i8h3H2-DqkW72ZyJG3VSJg_24_0"></a><a id="Tc_ZlnxsJlDaUClPFBA9Q6qEQ_25_0"></a><a id="Tc_-UnaSAv62UePDwsG9TYMWg_26_0"></a><a id="Tc_mElwTJXRok6_I_FtgxY8tg_26_2"></a><a id="Tc_QwDufEL4rUWH0eNreQeX-Q_26_5"></a><a id="Tc_XZyLKC_H9UKjOW0MbznJ4Q_26_8"></a><a id="Tc_BNvX2LPoUkO8KSNHAN5iGQ_26_11"></a><a id="Tc_wUjwvkVoYUW6tXprfeaHHw_27_0"></a><a id="Tc_fgE4kpYNU06JAn1cxuZZLw_28_0"></a><a id="Tc_XRVecQ2pSUKjv8KliUH9VQ_28_2"></a><a id="Tc_oLv3ZIoOI0mLx6fErMECZA_28_5"></a><a id="Tc_hh-GA7hbFk2SVP_EJST7Og_28_8"></a><a id="Tc_62HPfqjoW0WDp0djPQQLhA_28_11"></a><a id="Tc_af2iNe5qVkSs8epgVHtAYw_29_0"></a><a id="Tc_u-RU2Z51eEqqlxrhkQ14Pg_29_2"></a><a id="Tc_C3xK3dx3Rk-EsovEzmIHBg_29_5"></a><a id="Tc_DN3oGMe16E-QpwaIv5JmYw_29_8"></a><a id="Tc_FbmZpWKroEOjg-ZX9GOFqw_29_11"></a><a id="Tc_Yzk-3lR7jE-z919Ov1VQYQ_30_0"></a><a id="Tc_TuU_saDu10SWkKEyeZ-NXA_31_0"></a><a id="Tc_903BGaTZu02McOt8ZL9F6A_32_0"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:23.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Three months ended  </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:24.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;width:21.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:24.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.55%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.14%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Revenue:</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Product</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_us-gaap_ProductMember_m8Lp4xDTCkCzgM248x2JYg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_yhlje8_B8UivryMkcO_sUA_5_3">140,156</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_us-gaap_ProductMember_6gxzGc6zWUaLTLlbbEBCbg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_EC1921suX0O3ecVmbZvLwQ_5_6">117,194</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_us-gaap_ProductMember_dRwAU8JJFUKNNaVrq5xq8A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_9M5vUFhLYEWjD1VlthNCvw_5_9">266,765</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_us-gaap_ProductMember_mlFbuuqGIkiASdw8XYr6cw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc__upR2K8zX02UhEcmWYSh_Q_5_12">229,327</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Services</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_ServicesMember_B3p_Js8bOEyj9Cp65IPR3Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_8Z8-IR9CDkm17A2nu1Rxow_6_3">7,118</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_acls_ServicesMember_L8qGAvVgAkyJyGPxzt2lhw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_4riuv7W-X0WFWCyZ7fjcoA_6_6">5,771</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_ServicesMember_HIMbhElbm0ifjaWX7uAk6Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_pkWyvje8Vkq1hz1_xjGFbg_6_9">13,285</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_acls_ServicesMember_mzKMywcD6kqNnycd7mcvxg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_TrkasPssPkOfF-eh29pGWQ_6_12">12,629</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Total revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_FohOEfBdrECFgzXA4Vh07A_7_3">147,274</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_g4KgDrvWG02oeNJUfxybeQ_7_6">122,965</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_j1NC4LPS2UOa8-t3ULUHmg_7_9">280,050</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Revenues" scale="3" id="Tc_561MdHdOdEaoLUQCdenyDw_7_12">241,956</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cost of revenue:</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Product</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_us-gaap_ProductMember_m8Lp4xDTCkCzgM248x2JYg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CostOfGoodsAndServicesSold" scale="3" id="Tc_7v4dau06QkGfRjKDwxY1MA_9_3">76,688</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_us-gaap_ProductMember_6gxzGc6zWUaLTLlbbEBCbg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CostOfGoodsAndServicesSold" scale="3" id="Tc_-B2YgpHewUu9d6Tj0we60g_9_6">65,519</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_us-gaap_ProductMember_dRwAU8JJFUKNNaVrq5xq8A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CostOfGoodsAndServicesSold" scale="3" id="Tc_YgYH5NWGgEOQm5P16Wy0Bg_9_9">147,022</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_us-gaap_ProductMember_mlFbuuqGIkiASdw8XYr6cw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CostOfGoodsAndServicesSold" scale="3" id="Tc_6jLMu2QYcECscNKR2UoU4Q_9_12">132,691</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Services</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_ServicesMember_B3p_Js8bOEyj9Cp65IPR3Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CostOfGoodsAndServicesSold" scale="3" id="Tc_50DTXN4g8E-z9Fu6Ze8hew_10_3">6,572</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_acls_ServicesMember_L8qGAvVgAkyJyGPxzt2lhw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CostOfGoodsAndServicesSold" scale="3" id="Tc_dOMuIbpFbkWWoP00_RkkEw_10_6">5,547</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_ServicesMember_HIMbhElbm0ifjaWX7uAk6Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CostOfGoodsAndServicesSold" scale="3" id="Tc_8Wn7NRTK-U2UK8J2GfDymA_10_9">12,579</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_acls_ServicesMember_mzKMywcD6kqNnycd7mcvxg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CostOfGoodsAndServicesSold" scale="3" id="Tc_qUv5uqjuNk2Boir0zf-ICQ_10_12">11,817</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Total cost of revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CostOfGoodsAndServicesSold" scale="3" id="Tc_az-juuFQO0-ss0S8joQD7g_11_3">83,260</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CostOfGoodsAndServicesSold" scale="3" id="Tc_l4klwmra90G2vnHC4lkkYQ_11_6">71,066</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CostOfGoodsAndServicesSold" scale="3" id="Tc_sadzZjzUuEiQE9gl5QTfFw_11_9">159,601</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CostOfGoodsAndServicesSold" scale="3" id="Tc_KzaIO0b6vkaIAeQEevCoPQ_11_12">144,508</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Gross profit</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:GrossProfit" scale="3" id="Tc_GOTLX_3MoUCLMjBk83t7SA_12_3">64,014</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:GrossProfit" scale="3" id="Tc_70et4BnAoU-wqpTXifEXng_12_6">51,899</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:GrossProfit" scale="3" id="Tc_qaA2ATJqskWVju2mV_bo6A_12_9">120,449</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:GrossProfit" scale="3" id="Tc_ubGOjlsDa0CN6-T1EYqKfg_12_12">97,448</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Operating expenses:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Research and development</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ResearchAndDevelopmentExpense" scale="3" id="Tc_OOnlf1brPUW1SfcdAUs3mw_14_3">16,623</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ResearchAndDevelopmentExpense" scale="3" id="Tc_gCsIlc_rbU6ZWjWN9CqoHA_14_6">16,040</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ResearchAndDevelopmentExpense" scale="3" id="Tc_Qk7hVzLcpkGplrLxbf8Y5A_14_9">32,308</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ResearchAndDevelopmentExpense" scale="3" id="Tc_4kfOhFS9hUWIpO8v2DttFA_14_12">30,646</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Sales and marketing</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:SellingAndMarketingExpense" scale="3" id="Tc_i46adAvXkUKOpMT-6mawBw_15_3">12,177</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:SellingAndMarketingExpense" scale="3" id="Tc_SyMtYFE6pUmnlRwYZOWotA_15_6">9,437</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:SellingAndMarketingExpense" scale="3" id="Tc_ZKaY56EyBkyLoojXxD0nrw_15_9">22,564</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:SellingAndMarketingExpense" scale="3" id="Tc_S-tkiT9xQEyCkVU7w3LhUQ_15_12">17,641</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">General and administrative</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:GeneralAndAdministrativeExpense" scale="3" id="Tc_8ZRZoqMAHUqFW7oU4VfDbg_16_3">11,217</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:GeneralAndAdministrativeExpense" scale="3" id="Tc_s51MVscUaUWOFPE8MjwDug_16_6">10,041</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:GeneralAndAdministrativeExpense" scale="3" id="Tc_ijmUKXxA_E62VpcNshyGRw_16_9">21,230</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:GeneralAndAdministrativeExpense" scale="3" id="Tc_Qkmm_XUddUWeJcQGINRgbQ_16_12">19,077</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Total operating expenses</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingExpenses" scale="3" id="Tc_d41Pop1ud0acMjw1pKYIVg_17_3">40,017</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingExpenses" scale="3" id="Tc_GzO9y3XG8kOK8ozklPSICQ_17_6">35,518</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingExpenses" scale="3" id="Tc_iGuGF4-m1E6vF-q2crt5gA_17_9">76,102</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingExpenses" scale="3" id="Tc_QDDhlL96PkiOqe6k8O8iNA_17_12">67,364</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income from operations</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingIncomeLoss" scale="3" id="Tc_yrG_zSOgXUasLFeKPkBNSg_18_3">23,997</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingIncomeLoss" scale="3" id="Tc_MWgrvzWQrEaf6pw6tsWSvQ_18_6">16,381</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingIncomeLoss" scale="3" id="Tc_Yqpn521sCUehbgCzfITUvw_18_9">44,347</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingIncomeLoss" scale="3" id="Tc_a3gUQkc5AkW-p7ftW9l88Q_18_12">30,084</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other (expense) income:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Interest income</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentIncomeInterest" scale="3" id="Tc_0l817oH6wUKCBk61DQE-PQ_20_3">40</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentIncomeInterest" scale="3" id="Tc_uVeUOaOxCECLPCUEstiBLg_20_6">70</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentIncomeInterest" scale="3" id="Tc_y5v7NGL6LU-Dgdt38XZe8A_20_9">73</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InvestmentIncomeInterest" scale="3" id="Tc__mn-Jtg8T0yD0t1uCiMHDQ_20_12">552</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Interest expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestExpense" scale="3" id="Tc_tHhvFDaTeUaJsqq_mIuq3g_21_3">1,274</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestExpense" scale="3" id="Tc_xPJQGRBVLUKBV9CMLdSmRA_21_6">1,299</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestExpense" scale="3" id="Tc_IG7ExyxMeUm66rWETjbnew_21_9">2,303</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InterestExpense" scale="3" id="Tc_SCPqG92bFkW6YJydsYTczA_21_12">2,602</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Other, net</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherNonoperatingIncomeExpense" sign="-" scale="3" id="Tc_uGhxSAtrKU-UaeHFWIMYfw_22_3">15</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherNonoperatingIncomeExpense" scale="3" id="Tc_aPJYYmIpS0uLNAF96DEDog_22_6">421</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherNonoperatingIncomeExpense" sign="-" scale="3" id="Tc_wCs-zQXxvESvGvb59urD4Q_22_9">1,168</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherNonoperatingIncomeExpense" sign="-" scale="3" id="Tc_K-dfBiT8nE62UHUPqoNKvg_22_12">199</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Total other expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NonoperatingIncomeExpense" sign="-" scale="3" id="Tc_8v0x_tJGIkakxtk3sx6EFw_23_3">1,249</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NonoperatingIncomeExpense" sign="-" scale="3" id="Tc_l-6g6SwdWUi1gaTozqaVHQ_23_6">808</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NonoperatingIncomeExpense" sign="-" scale="3" id="Tc_SjgiA1uiBUmxvTYNYapkwg_23_9">3,398</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NonoperatingIncomeExpense" sign="-" scale="3" id="Tc_qyx7fI5C60ytdefYlUj1Cg_23_12">2,249</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income before income taxes</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" scale="3" id="Tc_MAsssxQHwkqr2mSgmE1j0g_24_3">22,748</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" scale="3" id="Tc_F_MzWX5gr0itHFa5FRGfAw_24_6">15,573</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" scale="3" id="Tc_iradXfD9i0G5iso3duliFA_24_9">40,949</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" scale="3" id="Tc_PwfycA7R3kucjF3k-_iUpQ_24_12">27,835</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Income tax provision</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" scale="3" id="Tc_LwhWBLh5oEO3F6KQmINl4w_25_3">3,842</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" scale="3" id="Tc_BQZqOz5Le0eRw4DSaBBxqg_25_6">2,271</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" scale="3" id="Tc_USg7K4we1EqnJ2ce9PupEw_25_9">5,563</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" scale="3" id="Tc_9EU0b8wmCU-8mJthFVCB_A_25_12">3,312</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.72%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_PhdwkORSAUaVfG9Jk7VyOQ_26_3">18,906</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_zXk1JgnNs0aVM4A06lCKww_26_6">13,302</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.72%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_f9vpWQg5akCFh-NmQGns4Q_26_9">35,386</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.11%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_-jJxPSYwJUuRJyEkTOgslQ_26_12">24,523</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income per share:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Basic</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.72%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareBasic" scale="0" id="Tc_F2diZK84_EmPp00tuR2D0Q_28_3">0.56</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareBasic" scale="0" id="Tc_UVRDLqCgeUmVp3I86KZu2w_28_6">0.40</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.72%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareBasic" scale="0" id="Tc_z3zNnHmd3ECkwctcsX0cJA_28_9">1.05</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.11%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareBasic" scale="0" id="Tc_jSSVJ7_jOUmo0pKrdKNqfw_28_12">0.74</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Diluted</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareDiluted" scale="0" id="Tc_gk6w-5OD90CSdgBvQSnD-Q_29_3">0.55</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareDiluted" scale="0" id="Tc_8katv7BcxEWMSvWpfYx24g_29_6">0.39</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareDiluted" scale="0" id="Tc_1SmwDqA6BEq0bB68R92F-Q_29_9">1.03</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareDiluted" scale="0" id="Tc_gX2Gca92ZEisSYopbZTh4Q_29_12">0.72</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Shares used in computing net income per share:</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Basic weighted average common shares</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfSharesOutstandingBasic" scale="3" id="Tc_arBlv-RI_UCp3PQzd-s0Gg_31_3">33,677</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfSharesOutstandingBasic" scale="3" id="Tc_7xn2k3e_gE65khRZ17FoAA_31_6">33,116</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.72%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfSharesOutstandingBasic" scale="3" id="Tc_ooIbddQiXkqKmZZHVDHnPg_31_9">33,696</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.11%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfSharesOutstandingBasic" scale="3" id="Tc_VtxuuW0Ub0ec9OIYs8uQqw_31_12">32,998</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:43.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Diluted weighted average common shares</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.72%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding" scale="3" id="Tc_0cXzjb5fL0yzHblBd5LyPg_32_3">34,311</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding" scale="3" id="Tc_u8f_K6rU50e3msp0X0FWUQ_32_6">33,958</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.72%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.83%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding" scale="3" id="Tc_uu2jOMYZ7kOkZr0olqzHtA_32_9">34,473</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.11%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding" scale="3" id="Tc_DbK2Ghq99E2HlQH-zjqJgg_32_12">34,023</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">See accompanying Notes to these Consolidated Financial Statements</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">3</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="margin-top:21.6pt;min-height:36pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 30pt 0pt;"><a href="#Toc"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><a id="_a9927a62_1ca8_4b13_a1c7_d2fe51a43ea2"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Axcelis Technologies,&#160;Inc.</b></p><a id="ConsolidatedStatementsofComprehensiveInc"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Consolidated Statements of Comprehensive Income </b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(In thousands)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(Unaudited)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><a id="_58c763bb_79e9_4cec_9333_ec0753e72401"></a><a id="Tc_QBisNwbje0m1I1jum_UMcw_1_2"></a><a id="Tc_CVjy60qi1EGJu0Oql3zjEA_1_8"></a><a id="Tc_-JKpnbJOfEGTFLuUFN3UmQ_2_2"></a><a id="Tc_jR3LBpI8akqYxQSpr4jH5w_2_8"></a><a id="Tc_KkeZ2pmryESBVjRqMdV1bQ_3_2"></a><a id="Tc_emQp7fRrsE-3Ddff3XiIrg_3_5"></a><a id="Tc_mO-B5rD_3UuTi6prLTHhQA_3_8"></a><a id="Tc_DUQRGeRjCEmyH8ZMjX8zng_3_11"></a><a id="Tc_ccjAkdks4kychCB9JNX73w_4_0"></a><a id="Tc_QM17TbXDlkSCJfazdUM1pw_4_2"></a><a id="Tc_ugKhHP7HhEekoMJd8qitTg_4_5"></a><a id="Tc_TcMwLjfolUaqm6rdno1Wtw_4_8"></a><a id="Tc_YnadTZll4EiA4ikyBKCMfA_4_11"></a><a id="Tc_RdllCyAcwkWte5f_3sjORg_5_0"></a><a id="Tc_G1Kcx35S_EaJAyJHOoNcLg_6_0"></a><a id="Tc_I0HjgKerbEKjPfg4Wa_oEQ_7_0"></a><a id="Tc_IjaU7sQn3UCLLK65Zgg7qw_8_0"></a><a id="Tc_dUkrEJkqNkC2VkL_Llao6g_9_0"></a><a id="Tc_z2pWRfNhh06OUD5l0fGobA_9_2"></a><a id="Tc_1sfRBOS-hkWfRXzn_xEQow_9_5"></a><a id="Tc_c35oPH5bMUKPwqu1zquKXA_9_8"></a><a id="Tc_7OuKgTUBSk2MgqZVtBeJrA_9_11"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:60.95%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:60.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:17.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Three months ended  </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:17.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:60.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:17.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:17.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:60.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:60.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net income</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_QPl3nS5qKkSZADDTwavKWQ_4_3">18,906</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc__NN_WrqiykegnWripRHoww_4_6">13,302</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_u0eu3EX06kqSMn8SBN0PVQ_4_9">35,386</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_Lyr9lEf8hECmNvsDTxCoKQ_4_12">24,523</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:60.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other comprehensive income (loss):</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:60.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Foreign currency translation adjustments</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" scale="3" id="Tc_iNmFWpiHG0uivNzlOBbnqA_6_3">552</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" scale="3" id="Tc_i_IeePXCJ0m-t_d0P-MKLg_6_6">836</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_baYmbjOre0uyCYQfVrEwkw_6_9">820</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_yt4sxce_A0W4JLoHbVa3DA_6_12">276</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:60.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Amortization of actuarial loss and other adjustments from pension plan, net of tax</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_xHzatY7AJUOWHghF8ylGBg_7_3">34</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_D13ZupFd-0Wh2HqtjgKjxQ_7_6">57</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_S61XsronI0qOTCoUt_b2DQ_7_9">54</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_AHIOTKBkQk-mekN-VpnYEQ_7_12">114</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:60.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Total other comprehensive income (loss)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossNetOfTax" scale="3" id="Tc_6J3ZxzQ-qUSDLJkBhHwx5Q_8_3">586</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossNetOfTax" scale="3" id="Tc_O0MI0v9YGE-gUeqc5-dJuA_8_6">893</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossNetOfTax" sign="-" scale="3" id="Tc_YgBN_6iiY0Oh63NHVCDREA_8_9">766</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossNetOfTax" sign="-" scale="3" id="Tc_tBgsxp3TVEOe6qUNfjP8aw_8_12">162</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:60.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Comprehensive income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ComprehensiveIncomeNetOfTax" scale="3" id="Tc_Rz1BqBySpkK5GiI_-8Xl3g_9_3">19,492</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ComprehensiveIncomeNetOfTax" scale="3" id="Tc_ybdVbrwQ_Ey1XzftVJ6oiA_9_6">14,195</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ComprehensiveIncomeNetOfTax" scale="3" id="Tc_HU20QR2RN0yVDTMUMFa5nw_9_9">34,620</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ComprehensiveIncomeNetOfTax" scale="3" id="Tc_OD1EWrTiKUSWBu4Ebyedaw_9_12">24,361</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">See accompanying Notes to these Consolidated Financial Statements</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">4</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="margin-top:21.6pt;min-height:36pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 30pt 0pt;"><a href="#Toc"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><a id="_4759834b_07ff_40d3_a351_434eb6065499"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Axcelis Technologies,&#160;Inc.</b></p><a id="ConsolidatedBalanceSheets_859153"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Consolidated Balance Sheets</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(In thousands, except per share amounts)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(Unaudited)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><a id="_c4d31299_f8ea_44f8_a1db_9c93247ed33d"></a><a id="Tc_1C74d0BbWUG128JJ2PxLBw_1_2"></a><a id="Tc_5XZryBhVr06Gj6H9rcUjTw_1_5"></a><a id="Tc_1rOGpYNBo0S59e1W_2Oa1w_2_2"></a><a id="Tc_H2LF9KZ0502RRRir7ArDKA_2_5"></a><a id="Tc_oAC2rtT_oUmexjZekDQ76g_3_0"></a><a id="Tc_z8m3FMRmX0-l1q00rfn-LQ_4_0"></a><a id="Tc_CDIYpg8wnUaoTOHzN5dhbQ_5_0"></a><a id="Tc_qLyux5p1fUial_imW8SYaQ_5_2"></a><a id="Tc_b4og8hCoNkWLzXg4zv51bA_5_5"></a><a id="Tc_GPUa7B_DJkGuIxLjsrEOtQ_6_0"></a><a id="Tc_Z2RBG6MkJEigS45OPoAMvw_7_0"></a><a id="Tc_Jj8-ov3glUeLxejwbojBSw_8_0"></a><a id="Tc_afbjXVbPBkqacoAT96M8mQ_9_0"></a><a id="Tc_cni-T7JlLkSfg_n-K7CMlQ_10_0"></a><a id="Tc_5svT9aP2S0-MoG1Bj_YRJQ_11_0"></a><a id="Tc_PuwmpIPrz0616WbVHmdOCw_12_0"></a><a id="Tc_ROgNnheyxUipW0I10Cu8GA_13_0"></a><a id="Tc_tjpwR6sC6kGdIKB6_-9sVw_14_0"></a><a id="Tc_j5Cypix0x0ihkej4bNOOIg_15_0"></a><a id="Tc_j6Ptuz7VI0ax9Zt9YZKaQA_16_0"></a><a id="Tc_m-NPCngGVUKxR-Goig2Lgg_16_2"></a><a id="Tc_I1pfRJskdECQVKLOdA2VNg_16_5"></a><a id="Tc_SrRgx2hk1UyBwDUCHBjd7A_17_0"></a><a id="Tc_I0p6KZQsb0eHzLBTDs_wXA_18_0"></a><a id="Tc_dETxIrR1nU23goIePC_Iiw_19_0"></a><a id="Tc__KdYf8Ph40Kfcd9qObC33Q_19_2"></a><a id="Tc_NrmM0K1VEEekYj9L_G82Cw_19_5"></a><a id="Tc_gbMbvkcXW0eOAiCeXZ9-IA_20_0"></a><a id="Tc_gSPUlU_eh0ibEmtNpV1mvw_21_0"></a><a id="Tc_e9be7xDTDky-91n2N8s2jA_22_0"></a><a id="Tc_d901266hD0O-Pr9VD6ht8g_23_0"></a><a id="Tc_TCRsi7Zl6keqTICl40zXew_24_0"></a><a id="Tc_KjPDomTMVUC9xygrwh0JoA_25_0"></a><a id="Tc_FCLnyT2wb0eUNRNJQY1rsQ_26_0"></a><a id="Tc_PkoOf9Z1oUuZQJeSxvqsUw_27_0"></a><a id="Tc_n3mPOoGCE0m-UYIeISHbKg_28_0"></a><a id="Tc_w7Amc88UoEe07gqn6GUofQ_29_0"></a><a id="Tc_P6FemA00Vkuqfwws25OmIw_30_0"></a><a id="Tc_gLqhHZ1prkCsUYM3M0ZRGw_31_0"></a><a id="Tc_npcL9oXCdECiOuZXiKWjIw_32_0"></a><a id="Tc_GOSGqs_d6E6Eckotj4YmWw_33_0"></a><a id="Tc_Azy4pGjmxk6V_8BHVrvmYQ_34_0"></a><a id="Tc_ccU9ga0BKU2Spgd0UpMMkw_35_0"></a><a id="Tc_jGInSjCVtUuqmr2nQtpzWw_36_0"></a><a id="Tc_mk07lRQqvUe3sfp2TzA2Nw_37_0"></a><a id="Tc_MUeQhinljk-uT8kce1AfTw_38_0"></a><a id="Tc_UzvQBP9ik0CJBkIR2UltBQ_38_2"></a><a id="Tc_ZNhTQllyXk6hkbEMP-HMsA_38_5"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.09%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">ASSETS</b></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Current assets:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Cash and cash equivalents</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashAndCashEquivalentsAtCarryingValue" scale="3" id="Tc_h_OLD2z9w0a-wfhCwU9l_A_5_3">219,731</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashAndCashEquivalentsAtCarryingValue" scale="3" id="Tc_46pqanqyVE-4dp2YSS9B0A_5_6">203,479</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Accounts receivable, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccountsReceivableNetCurrent" scale="3" id="Tc_yqcrJeaUGUytJJcHGYE2TA_6_3">79,544</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccountsReceivableNetCurrent" scale="3" id="Tc_GAB1qPG-JEqmWbKzLsWdjA_6_6">86,865</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Inventories, net</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryNet" scale="3" id="Tc_TCcGJQITWEOKMT8RscFV1A_7_3">192,321</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryNet" scale="3" id="Tc_nLkn7i_W9ki2nOlLWHwzKQ_7_6">161,076</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Prepaid expenses and other current assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PrepaidExpenseAndOtherAssetsCurrent" scale="3" id="Tc_2s3lc1Jl5UCX4R_DA_lj9g_8_3">22,535</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PrepaidExpenseAndOtherAssetsCurrent" scale="3" id="Tc_dQnCUqykEkGQ8QJipYwZ8A_8_6">19,371</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Total current assets</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AssetsCurrent" scale="3" id="Tc_vKG3raoUwU2uOKiGhy6jWQ_9_3">514,131</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AssetsCurrent" scale="3" id="Tc_7gUrNYSWkkKgHvuSDkSq0g_9_6">470,791</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Property, plant and equipment, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_FF_3YuUup0S9JxBG3fZwnA_10_3">30,683</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PropertyPlantAndEquipmentNet" scale="3" id="Tc_z0i6f_BzUkurLXY93aJWgg_10_6">29,840</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Operating lease assets</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseRightOfUseAsset" scale="3" id="Tc_L0_9WLwcikGMeuogXgADfQ_11_3">7,626</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseRightOfUseAsset" scale="3" id="Tc_xnLyEDqouEydmXCTRmRIyw_11_6">4,542</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Finance lease assets, net</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseRightOfUseAsset" scale="3" id="Tc_UIttTY8b_US9Mc_5d-CqcA_12_3">19,889</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseRightOfUseAsset" scale="3" id="Tc_I_JQ0ZBOUUGUR9hekdZLJQ_12_6">20,544</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-term restricted cash</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RestrictedCashAndCashEquivalentsNoncurrent" scale="3" id="Tc_dErDqOvbEUaiIIjj4bO_Eg_13_3">755</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RestrictedCashAndCashEquivalentsNoncurrent" scale="3" id="Tc__zQ037TAnEWEa40-VUEpjQ_13_6">753</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Deferred income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxAssetsNet" scale="3" id="Tc_gko67WpiL0OgRj2Yid0E1g_14_3">51,386</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxAssetsNet" scale="3" id="Tc_FfVs81tZrEaM7fKNilOo9w_14_6">57,851</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other assets</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherAssetsNoncurrent" scale="3" id="Tc_C4cAT7C0z0G-Cuv6-eBcaA_15_3">36,170</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherAssetsNoncurrent" scale="3" id="Tc_PqM6pXD_u0C5vKctoEATyg_15_6">40,303</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Total assets</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.09%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Assets" scale="3" id="Tc_79aYBHEAKkaqKlWxDA4A7A_16_3">660,640</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Assets" scale="3" id="Tc_LBu45smyBE-rF0Lwlx15sg_16_6">624,624</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">LIABILITIES AND STOCKHOLDERS&#8217; EQUITY</b></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Current liabilities:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Accounts payable</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccountsPayableCurrent" scale="3" id="Tc_9mP9ziRLlkCjKJ1JWP24Lg_19_3">40,695</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccountsPayableCurrent" scale="3" id="Tc_T07scU1zJUKI7iD_nbh0cA_19_6">24,013</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Accrued compensation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:EmployeeRelatedLiabilitiesCurrent" scale="3" id="Tc_WckHr0FakUyaOwFWt4d5QA_20_3">14,906</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:EmployeeRelatedLiabilitiesCurrent" scale="3" id="Tc_UTQqHYBTpkqudGKyNCp7Jw_20_6">24,562</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Warranty</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualClassifiedCurrent" scale="3" id="Tc_DxcJ0R4Rk0CJjffh1qd1Iw_21_3">4,690</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualClassifiedCurrent" scale="3" id="Tc_cFXta5eXmkqjxESlhj-sXQ_21_6">4,280</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccruedIncomeTaxesCurrent" scale="3" id="Tc_GwDlLXwXvkCltsErsJrFeQ_22_3">622</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccruedIncomeTaxesCurrent" scale="3" id="Tc_SWtiDBfDmUKdebyMRkmAhA_22_6">654</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Deferred revenue</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiabilityCurrent" scale="3" id="Tc_dO8bDyS4TESqP_BA9-FFaA_23_3">34,112</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiabilityCurrent" scale="3" id="Tc_NjuG2srEBUmw-S0Vzj0eEQ_23_6">21,221</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Current portion of finance lease obligation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityCurrent" scale="3" id="Tc_43ljnWdFPEC89EEpYCMFQg_24_3">864</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityCurrent" scale="3" id="Tc_qicmOvIHIkK4BuLcNTMSLQ_24_6">756</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Other current liabilities</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherLiabilitiesCurrent" scale="3" id="Tc_CTOygdTBPkG8uVMjJcHXQg_25_3">10,585</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherLiabilitiesCurrent" scale="3" id="Tc_OUWVAWS3sEWMA8serhOenw_25_6">8,945</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Total current liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LiabilitiesCurrent" scale="3" id="Tc_8oQo-9K2fEODZncRQKY0Gg_26_3">106,474</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LiabilitiesCurrent" scale="3" id="Tc_SWShY7WgSU61eDzTC2gNXg_26_6">84,431</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-term finance lease obligation</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityNoncurrent" scale="3" id="Tc_8zjb-sD1-ESlAi6gu7U-uA_27_3">46,923</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityNoncurrent" scale="3" id="Tc_D0HRswsqdEi_bKWbibdlHQ_27_6">47,393</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Long-term deferred revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiabilityNoncurrent" scale="3" id="Tc_ZjyqpPWwhku8Xr2o6rVptQ_28_3">1,406</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiabilityNoncurrent" scale="3" id="Tc_8sDdHakgbUuYrKrEntZ5WQ_28_6">1,837</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Other long-term liabilities</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherLiabilitiesNoncurrent" scale="3" id="Tc_T5F428h0BEubgG0RsFnMng_29_3">11,735</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherLiabilitiesNoncurrent" scale="3" id="Tc_S-Bts5VImE6ATrwCENuaGQ_29_6">9,361</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Total liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Liabilities" scale="3" id="Tc_V0YydiwFEEmhGD0tUvo7ng_30_3">166,538</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:Liabilities" scale="3" id="Tc_Ady-qYu5TUW5qsklSXImNQ_30_6">143,022</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Commitments and contingencies (Note&#160;16)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Stockholders&#8217; equity:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Common stock, $<ix:nonFraction unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:CommonStockParOrStatedValuePerShare" scale="0" id="Narr_CkLAyq6yLk28CqeOAuDcuw"><ix:nonFraction unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="INF" format="ixt:numdotdecimal" name="us-gaap:CommonStockParOrStatedValuePerShare" scale="0" id="Narr_Hih9rBmWO0eWPzJGP39ywQ">0.001</ix:nonFraction></ix:nonFraction> par value, <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CommonStockSharesAuthorized" scale="3" id="Narr_1UJcAbqY-kaLpxUEP00gOg"><ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CommonStockSharesAuthorized" scale="3" id="Narr_hghZ0gvXz06na0YIhBfQHw">75,000</ix:nonFraction></ix:nonFraction> shares authorized; <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CommonStockSharesIssued" scale="3" id="Narr_zKt4-J9MpUqEZfbPoBjbKQ">33,657</ix:nonFraction> shares issued and <span style="-sec-ix-hidden:Hidden_vzph5N5n_0CEriURooq3Nw;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">outstanding</span></span> at June 30, 2021; <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CommonStockSharesIssued" scale="3" id="Narr_3ZjpDy1OIkCSwz4IaFMS4g">33,633</ix:nonFraction> shares issued and <span style="-sec-ix-hidden:Hidden_hiZnTVFr40CTBLh5hSvD9w;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">outstanding</span></span> at December 31, 2020</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CommonStockValueOutstanding" scale="3" id="Tc_VW12RggmFkqo4cbdtvln4Q_33_3">34</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CommonStockValueOutstanding" scale="3" id="Tc_gJ--z3tAhU-_p1aI4Pulvw_33_6">34</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Additional paid-in capital</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdditionalPaidInCapital" scale="3" id="Tc_cZLlvcX6h0aNvWnVnL6koQ_34_3">561,680</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdditionalPaidInCapital" scale="3" id="Tc_diq8QD0-8EiZ8P-12Dq27Q_34_6">570,102</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Accumulated deficit</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RetainedEarningsAccumulatedDeficit" sign="-" scale="3" id="Tc_FusfNExoLk6KjzIe8j-Q1Q_35_3">70,281</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RetainedEarningsAccumulatedDeficit" sign="-" scale="3" id="Tc_8hbHmXMO1U-f_9Xj9yWFYA_35_6">91,969</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Accumulated other comprehensive income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax" scale="3" id="Tc_jBC4Xn7yv0S-cU4gYGckHw_36_3">2,669</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax" scale="3" id="Tc_QaPl4nRCS0mQyEExrulvrg_36_6">3,435</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 24pt;">Total stockholders&#8217; equity</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_Ox-xYDRijkyX5Di5lzjt9Q_37_3">494,102</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_tB5o8QFVbEaNpgDDhzKpwA_37_6">481,602</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 24pt;">Total liabilities and stockholders&#8217; equity</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.09%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LiabilitiesAndStockholdersEquity" scale="3" id="Tc_gFTr9dYvSUCS50En7n3Olg_38_3">660,640</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LiabilitiesAndStockholdersEquity" scale="3" id="Tc_6nLvrFc_JESA199RaE-nIw_38_6">624,624</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:73.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 24pt;"><span style="margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:2pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">See accompanying Notes to these Consolidated Financial Statements</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">5</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="margin-top:21.6pt;min-height:36pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 30pt 0pt;"><a href="#Toc"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_6f6d0f43_81cc_49e6_b89b_3b314513e2b7"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Axcelis Technologies, Inc.</b></p><a id="ConsolidatedStatementEquity"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Consolidated Statements of Stockholders&#8217; Equity</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(In thousands)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(Unaudited)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:2pt;visibility:hidden;">&#8203;</span></p><a id="_99eff1d5_ee31_432e_b99b_6582f5cfd9fe"></a><a id="Tc_U0t1tR4m20edKOpKYhlE7A_1_14"></a><a id="Tc_Tgi8MoMV-kWDcAIcOcFHzw_2_8"></a><a id="Tc_G5UJcJGf5EKLfPAfwtOOFw_2_14"></a><a id="Tc_5X5vVRk5A0iy4Ysh_L_R0Q_2_17"></a><a id="Tc_B6hFPCXMgkuhfi6_wd6ong_3_3"></a><a id="Tc_ZNIn0RPApkyzf3zz9EY_0A_3_8"></a><a id="Tc_y0fDtBnZ0ketl2A4-Qj5ag_3_11"></a><a id="Tc_wfGhfG21_UasiuUxwsE_uw_3_14"></a><a id="Tc_TbSWFE0rpEapwgqmnTWTyw_3_17"></a><a id="Tc_2ZHMnr1Ex0iqm5VG_HfvxQ_4_3"></a><a id="Tc_pP8eOu5qq0OFSUCgzO3Akg_4_5"></a><a id="Tc_KXjvBvTmukqA53_JSNspWQ_4_8"></a><a id="Tc_Yt5SvVenhkqrytNFKWFJag_4_11"></a><a id="Tc_YsGQTQTRoUaxu4V9tBJIEw_4_14"></a><a id="Tc_ng3stL0t-kahAdiXBSce6A_4_17"></a><a id="Tc_KjofXG4vmESGec6QERxiXw_5_0"></a><a id="Tc_7aNOnmHM-k2a2WgEF3cn5A_5_5"></a><a id="Tc_Zrl6wHoWl0moVgKoTZXbBw_5_8"></a><a id="Tc_w-C73j6eoEunVzzHg_MnOQ_5_11"></a><a id="Tc_kVQglEPejkeag4QjPzRKhg_5_14"></a><a id="Tc_Z1XJ_JiufUeiBLvx9PVWXQ_5_17"></a><a id="Tc_Q5NuV6bRCUi8FENA1_4DZA_6_0"></a><a id="Tc_jq4gvmzLKE6olGWvd5t_Zw_6_3"></a><a id="Tc_YxvmuCrR_E636G8zk5tyOA_6_6"></a><a id="Tc_shMbeZ0ia0-rM2ZoHf9CYg_6_9"></a><a id="Tc_cM0_7HRzaEyq8bJCwwjBCw_6_15"></a><a id="Tc_ed1xkdJHFEGREdoMuTbaNg_7_0"></a><a id="Tc_V4M9CgZvME-OLUbUA068og_7_3"></a><a id="Tc_FX-jVEDtI0WIealuBnD3ZA_7_6"></a><a id="Tc_-5r_dmpcD0-0Ox-6oBHooA_7_9"></a><a id="Tc_C0i0nbthcUGyCkQYVplJvA_7_12"></a><a id="Tc_1Q4uBZq7HkiweTwh5Z9k4A_8_0"></a><a id="Tc_cvtNgiUMiU2qM7TJgJ2_DQ_8_3"></a><a id="Tc_1akUhZiAdEaHcX9CX-oYrw_8_6"></a><a id="Tc_TwauzpIrXUW7TDsw8qG0wQ_8_9"></a><a id="Tc_sSuxHiTmxU-NkXBHK6xzhA_8_12"></a><a id="Tc_xMkmzBm8NkuXkB3scjKg8A_9_0"></a><a id="Tc_hVR3C5i4FUOSdv3JFRUo3Q_9_12"></a><a id="Tc_Hkyiwaf8rUmGtOjgBgj7mQ_9_15"></a><a id="Tc_TzSYiEQsk0-L98F2wpAunQ_10_0"></a><a id="Tc_hpmBUjGvrkix8VhAM5u3MQ_10_6"></a><a id="Tc_He3U_w79UESZyBdhv4hsFw_10_12"></a><a id="Tc_o946Wrj5sUekL2rt8zLfaA_10_15"></a><a id="Tc_4RW391UN-UKbny9EmVW0Tg_11_0"></a><a id="Tc_FBfOlUj25kW8lcdDt9Vgdg_11_6"></a><a id="Tc_8iyurIG14k-nYuBroLAalQ_11_12"></a><a id="Tc_1NeHTicuMEOSrOeBTp2Jow_11_15"></a><a id="Tc_x7gh51z0M0GT4QHgnEggUg_12_0"></a><a id="Tc_CYauWijiI0KLIgFxv6Z8zA_12_3"></a><a id="Tc_MA83_rAdIkmqQdgfrxgBkg_12_6"></a><a id="Tc_EgVoY0J6A0SfiYky5u7jsQ_12_12"></a><a id="Tc_M45pW4fJvkSgtSN7sIDI2g_12_15"></a><a id="Tc_1aF5EV-ZD0yvl4qzBmi5Jg_13_0"></a><a id="Tc_pABU43mj40Sdz2L0KL5nuQ_13_15"></a><a id="Tc_tFEDWmHLbUiBX52Gwio9xw_14_0"></a><a id="Tc_PB6Mau8jqUGNh53_yA2IQg_14_5"></a><a id="Tc_WOtwA_ry10eVegKRw5mYog_14_8"></a><a id="Tc_aAvJKFiC4kaQpaLcDdQcSQ_14_11"></a><a id="Tc_KII3QOYywUegIQxTR9u9vA_14_14"></a><a id="Tc_fVmT002QoE-rwMiPosXRmA_14_17"></a><a id="Tc_2nZxjGCuoEithvgj8jaKfQ_15_0"></a><a id="Tc_qQlpKXRnxkipTtW6a7oWbA_15_3"></a><a id="Tc_sijgTvPt0E61A6EpN8pGTg_15_6"></a><a id="Tc_rLFYYWU100SXFHpRI-geFQ_15_9"></a><a id="Tc_fzzNF5bQ_Um_0Br94BaNZA_15_15"></a><a id="Tc_HhETxGQ0fEeTx1TWKY4c1g_16_0"></a><a id="Tc_3IBZmbFsVk6cm0gA8d0Sjg_16_3"></a><a id="Tc_b52Ut4T5yE6Teyz21FFnlA_16_6"></a><a id="Tc_zJoe5rpuwkSMMODjjaZtTA_16_9"></a><a id="Tc_zR9eLTJSGEunPwY7e3UuDQ_16_12"></a><a id="Tc_fDVtARoDIUaB0Jlvptu_Zw_17_0"></a><a id="Tc_KesopuWI1kiJrWy6a_lLog_17_3"></a><a id="Tc_8I9t0eKFDk2ZatMLcryYiQ_17_6"></a><a id="Tc_jNvBZyP5RkOHOhlZz5sUGA_17_9"></a><a id="Tc_PPrMSr0OLEmLi-tsLSp4qA_17_12"></a><a id="Tc_Lj4P6nppj0eJDdQMomv4dA_18_0"></a><a id="Tc_mBoMq-9X30mkPxBfxCyvxg_18_6"></a><a id="Tc_o2wOL8fzuEWFfif71ry2eA_18_12"></a><a id="Tc_TvjtOkLgv0ae-kxaiVxHjg_18_15"></a><a id="Tc_XBakHeLDV0qNzTDf0BH4rg_19_0"></a><a id="Tc_pWAJw_WmikmdUev1OI5Ibg_19_6"></a><a id="Tc_IHZKX9u-P0W0jXH95FeXIw_19_12"></a><a id="Tc_RwhPH-1pEUSzzT7Ec91Uhw_19_15"></a><a id="Tc_GY_0oKJ_CkaC3YDYtnIDvg_20_0"></a><a id="Tc_cF-tQpqG802PcoDGAzqpOw_20_6"></a><a id="Tc_xt1y5uQoGEuEOlmafTkkFw_20_12"></a><a id="Tc_85TyPH9pXUGH3D-WRAvGjw_20_15"></a><a id="Tc_bWVwtBLKRkOIvQjGbZVQCw_21_0"></a><a id="Tc__fBQzyu3_UCNbyxBKi4jaQ_21_3"></a><a id="Tc_q9M-kybd-UuUh2qNMKgUrQ_21_6"></a><a id="Tc_01P8d0e97kSGZJK5SSvB9g_21_12"></a><a id="Tc_DXEhjyZKaUa4it0vKuGbSQ_21_15"></a><a id="Tc_JrrIIFjRXUuV4soVQKB6gA_22_0"></a><a id="Tc_RciR--GMNEeFaeGg068YwA_22_5"></a><a id="Tc_FjrApaJ3mkeO88Mh4pWUvw_22_8"></a><a id="Tc_OkRNDzflsEqPVT8aqn4f7A_22_11"></a><a id="Tc_luo7MdAc_0eKqRssNjIoHQ_22_14"></a><a id="Tc_WFV95AzbCk6FztVl6_q61w_22_17"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:35.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:4.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.69%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:35.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:35.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Additional</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Other</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:35.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:14.01%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Common Stock</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Paid-in</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Comprehensive</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Stockholders&#8217;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:35.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.07%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Capital</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Deficit</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Income&#160;(Loss)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Equity</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:35.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance at December 31, 2019</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_SoIXUiAhFUmgd7essTKzKg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:SharesOutstanding" scale="3" id="Tc_LrbDbW9_10ehiaJI2mebFw_5_3">32,585</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:4.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_SoIXUiAhFUmgd7essTKzKg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_vJRolRzZ3E2h067R1r-xig_5_6">33</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.69%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_d0eqQfbvBEmk6gA7IHzN4w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_RcOZRSsNY0aNKAtETmNKbw_5_9">559,878</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_BYlqNNHP6kuAhGqLvpu1aA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" sign="-" scale="3" id="Tc_pHpbsANoFkiQtnFwFpOCAA_5_12">140,226</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_YsEAJpEiF0CucsZJ79McXQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" sign="-" scale="3" id="Tc_gFnhsGvam0mZfz5zQoS07Q_5_15">258</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.12%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2019_FtHnUOMLjkeW-5RTgMqhrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_YRChMxvOpUywscBDN48_Rg_5_18">419,427</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:35.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Net income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_LzqFMH4R-Uisa6DN0Wxm4w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_6W_nOXPvOkCmirIMOSY3lw_6_12">11,221</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_3_31_2020_jBnQ2ZrbZEec0jeFEn7byw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_Zt7Vnvv3RkWZXJfQIvAxIg_6_18">11,221</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:35.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Foreign currency translation adjustments</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:4.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_F9cCveT0DkqT5kW6lI3UDA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_QEkfEgWeUEGIEhxRsKRTJw_7_15">1,112</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_3_31_2020_jBnQ2ZrbZEec0jeFEn7byw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_tPbjkOJ1MkeK3tkos5onbA_7_18">1,112</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:35.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Change in pension obligation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_F9cCveT0DkqT5kW6lI3UDA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_W-a4E0cgXUOvjcKrqMzt7A_8_15">57</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_3_31_2020_jBnQ2ZrbZEec0jeFEn7byw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_IQig4ytJa02JbPmLTFutZw_8_18">57</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:35.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Exercise of stock options</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_b17p1G-nhEW5n_uF4leI5A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised" scale="3" id="Tc_lrG69cP5Y0-dFb9qqdno9g_9_3">540</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:4.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_b17p1G-nhEW5n_uF4leI5A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised" scale="3" id="Tc_UIT8nZp0z0-Um_7JIUYAYg_9_6">1</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_6Y1LtOVOr0eV3onJXZYpfg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised" scale="3" id="Tc_Z-NVv6XINESy6RVW52ovYA_9_9">4,498</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_3_31_2020_jBnQ2ZrbZEec0jeFEn7byw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised" scale="3" id="Tc_tQj3X68MK0KPZ2WuyM1ZgQ_9_18">4,499</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:35.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Issuance of shares under Employee Stock Purchase Plan</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_b17p1G-nhEW5n_uF4leI5A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" scale="3" id="Tc_Cm5q1v3SG0Ob2BCm2rl7Xw_10_3">1</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_6Y1LtOVOr0eV3onJXZYpfg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan" scale="3" id="Tc_PyL0OAAWO0Cby6ccHjghmw_10_9">19</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_3_31_2020_jBnQ2ZrbZEec0jeFEn7byw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan" scale="3" id="Tc_3NB6CjuZEUyGN-uxfeFAVw_10_18">19</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:top;width:35.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Issuance of restricted common shares,<br />net of shares withheld</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_b17p1G-nhEW5n_uF4leI5A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures" scale="3" id="Tc_jAezT_IGZ0K901sS99XzoQ_11_3">69</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:4.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_6Y1LtOVOr0eV3onJXZYpfg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures" sign="-" scale="3" id="Tc_BhT8SKLil0ubUy20C9f40Q_11_9">1,162</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_3_31_2020_jBnQ2ZrbZEec0jeFEn7byw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures" sign="-" scale="3" id="Tc_Hcgr_vdTV0OujHmnTVusZQ_11_18">1,162</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:35.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Stock-based compensation expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_6Y1LtOVOr0eV3onJXZYpfg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" scale="3" id="Tc_2IAzAvxe4k2afQ_DuJYJnA_12_9">1,724</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_3_31_2020_jBnQ2ZrbZEec0jeFEn7byw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" scale="3" id="Tc_s__Q74jVGUi9FGecgKrNYQ_12_18">1,724</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:35.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Repurchase of common stock</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_b17p1G-nhEW5n_uF4leI5A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockRepurchasedDuringPeriodShares" scale="3" id="Tc_tHDyD74IlkC_dgrsvkHR2A_13_3">358</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:4.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_b17p1G-nhEW5n_uF4leI5A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockRepurchasedDuringPeriodValue" scale="3" id="Tc_VRfsUCSPOUeJTafgLo_0ew_13_6">1</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.69%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_6Y1LtOVOr0eV3onJXZYpfg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockRepurchasedDuringPeriodValue" scale="3" id="Tc_df-UM-MzS0WPZOyJ7SKFiA_13_9">5,775</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_LzqFMH4R-Uisa6DN0Wxm4w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockRepurchasedDuringPeriodValue" scale="3" id="Tc_P06YM4Qgykym9AuU3HqVxQ_13_12">1,725</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.12%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_3_31_2020_jBnQ2ZrbZEec0jeFEn7byw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockRepurchasedDuringPeriodValue" scale="3" id="Tc_vEHcjN249k2conUOWRt8tg_13_18">7,501</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:35.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance at March 31, 2020</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="As_Of_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_k-roo0M6bUam9HVt-d3Vog" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:SharesOutstanding" scale="3" id="Tc_75eNwNgx3Uqaj9YgupKvuQ_14_3">32,837</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.11%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.96%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_k-roo0M6bUam9HVt-d3Vog" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_Bruen8xx6EuTXiMuw0KV0w_14_6">33</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.69%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_-8tath2-uEKtz8uE9FV9Iw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_VGOahzzDYUeqc8uZX-cmbQ_14_9">559,182</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_sLmqwPENdkO6QkOCbLKQ_w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" sign="-" scale="3" id="Tc_H0Dgk99CbU6-A9W2fcaqBQ_14_12">130,730</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_TXi4cj5lNkO4zanH3e0wpg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" sign="-" scale="3" id="Tc_YrYhaGq0JkSoceNJ9v1QKQ_14_15">1,313</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_3_31_2020_-5Cw11QoRE6nHA_ngva07Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_s8mWhpBzR0G5KhzIO4J15g_14_18">427,172</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:35.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Net income</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:4.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_9eWRNT0z40SUKHvCIS5EYQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_7PKRU4qtD0WB9JK4Xn3Jug_15_12">13,302</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_SIJ6pEX8REWwlYVO0Jltpw_15_18">13,302</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:35.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Foreign currency translation adjustments</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_CtCAykjwqUmInz4EceSxvA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" scale="3" id="Tc_r1FY-tjUQUmQ44K-BqT5oA_16_15">836</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" scale="3" id="Tc_CwC52nr3UUOzPUdinBvw6A_16_18">836</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:35.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Change in pension obligation</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:4.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_CtCAykjwqUmInz4EceSxvA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_7PQ0x9lntEymWI8TF1AOWw_17_15">57</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_9R1DwBwCkUSjGtKozZbeag_17_18">57</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:35.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Exercise of stock options</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_kQChkn8LbEaU-QAGr3O5aQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised" scale="3" id="Tc_dcntNL5ldUOwtw3u74hYJw_18_3">343</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_pmCEepBP-UK1T09W5cnpig" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised" scale="3" id="Tc_IAwXZ70_b0KEyzBsczFaEQ_18_9">2,783</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised" scale="3" id="Tc_eWcaAYhfoEG7TR2g9eKG-w_18_18">2,783</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:35.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Issuance of shares under Employee Stock Purchase Plan</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_kQChkn8LbEaU-QAGr3O5aQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" scale="3" id="Tc_LBF0PiQs002MTy4j1VNb_Q_19_3">21</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:4.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_pmCEepBP-UK1T09W5cnpig" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan" scale="3" id="Tc_fNwe2OWS30mXcrfWyqLPLg_19_9">490</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan" scale="3" id="Tc_3oGwkcs_zk6N9l-a1jw3qQ_19_18">490</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:35.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Issuance of restricted common shares,<br />net of shares withheld</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_kQChkn8LbEaU-QAGr3O5aQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures" scale="3" id="Tc_ZTfZASfT90aoc43HzpjatA_20_3">232</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_pmCEepBP-UK1T09W5cnpig" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures" sign="-" scale="3" id="Tc_IGui2JBrmkeO_GksjXu02Q_20_9">2,698</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures" sign="-" scale="3" id="Tc_MRhVfgmBiEWoktH8HBTPjw_20_18">2,698</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:35.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Stock-based compensation expense</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:4.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_pmCEepBP-UK1T09W5cnpig" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" scale="3" id="Tc_gK0PdS9jEU6W2FCRVd6hAQ_21_9">3,082</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" scale="3" id="Tc_FR0pVK4DN0yfu1dH4dxF2A_21_18">3,082</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:35.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance at June 30, 2020</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="As_Of_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_p5MwFWjzgEmVRz-u0rc0Lg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:SharesOutstanding" scale="3" id="Tc_q9KqD2_XMkmWE2cbo8G-cA_22_3">33,433</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.11%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.96%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_p5MwFWjzgEmVRz-u0rc0Lg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_OQhJyKDZcUqKTvH_L4N82w_22_6">33</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.69%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_aZJX0TutVE-uQ6w765155A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_4HqFGlGKM0SyS-YCEqE6fw_22_9">562,839</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_FtxaGvJtt0GIO2vBuTSv0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" sign="-" scale="3" id="Tc_RNAk7Kx9yEO_hJX8-kZ3VA_22_12">117,428</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_idn7dSJpdU6u4H_5_bzuPw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" sign="-" scale="3" id="Tc_K-RnWqYLNUy_evnhPmDyeg_22_15">420</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2020_vfxHSqwZwkeC1Z0d0SG93A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_ZnYc96JTqEiL5E4h3ooKvw_22_18">445,024</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:2pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:2pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:2pt;visibility:hidden;">&#8203;</span></p><a id="_31f43722_1500_48af_8e5f_4e7b75ebd19e"></a><a id="Tc_v96cbR0bkUi1XOYrjOhSVg_1_14"></a><a id="Tc_3UzIH3gX_UqU1A8E7PnTTA_2_8"></a><a id="Tc_4icB7ahz70ymlpz2CBU33Q_2_14"></a><a id="Tc_vmbPmh_op0moJyLm5F9Nhw_2_17"></a><a id="Tc_J6xOgK5yfEOIDU3rlEPzSw_3_3"></a><a id="Tc_ciR7FTsRlkqZwSjXC8d_Xw_3_8"></a><a id="Tc_VSdc0kKPnkOQRnOF0qbe4w_3_11"></a><a id="Tc_WzWEPOw_xk6AgAj-sSvUwg_3_14"></a><a id="Tc__4k1grm1IU6Jo7NGD_ocbA_3_17"></a><a id="Tc_E8DTvwhpGky1sXFEYsT6kQ_4_3"></a><a id="Tc_nM6g_2L66EuokmE7jB4Sog_4_5"></a><a id="Tc_Bw1H9mdDRUKZzbwOU7kg5g_4_8"></a><a id="Tc_Uo4_CJNnxES8nhy5ptsMBw_4_11"></a><a id="Tc_ztM-V0BStEaqyvPOiKweQg_4_14"></a><a id="Tc_PndQK5v8_k65YK88JVIJ4Q_4_17"></a><a id="Tc_a5b3S8TSS02SdJp-cbI1gw_5_0"></a><a id="Tc_nl7-5zHlVEmqU4IQNw0RgQ_5_5"></a><a id="Tc_ocI7466eYUG1zctEHUVazw_5_8"></a><a id="Tc_RWyxo9OZNEmeQncSW4YHlQ_5_11"></a><a id="Tc_bvlLb9BKvkmaozp_CjOuKg_5_14"></a><a id="Tc_sRCIALC6kE2paxGgyRaXQA_5_17"></a><a id="Tc_LoCjIRDZ20-AARlt_hrHig_6_0"></a><a id="Tc_diIn0McWJUi5Jq3S5JzxrQ_6_3"></a><a id="Tc_NBwLsG7DYkmmFNMWw2hXNQ_6_6"></a><a id="Tc_J8n8io4l_UquqtVqqK_gUw_6_9"></a><a id="Tc_zoiGEpJqCEagolq_M3yf3Q_6_15"></a><a id="Tc_Rrv7SKuo7keiwiZ4QZU6QA_7_0"></a><a id="Tc_o7YLCYIB0kuQZ1d1bRjaCA_7_3"></a><a id="Tc_CABuh__dR0SX3AaD80rS6A_7_6"></a><a id="Tc_cJ3a-YkOgUG8FFWL-0FIcQ_7_9"></a><a id="Tc_Y74NVWhgn0CPUmJcuvlqow_7_12"></a><a id="Tc_qRynQV78sU66ZZucGzXtOA_8_0"></a><a id="Tc_slqfSiHqnkOkoaxADVABMg_8_3"></a><a id="Tc_MeOTI8FtU0Ct3qDkQ33uWw_8_6"></a><a id="Tc_1WUo9mycQUi75RE30QnGGw_8_9"></a><a id="Tc_umchgQ6rrE-vxtXP5RZDug_8_12"></a><a id="Tc_tqPuDo77kU-g4y8n-JkqzQ_9_0"></a><a id="Tc_TK2S0oB9rkOxEEqXyONM3g_9_6"></a><a id="Tc_WJZ1oPB4o0qT3lqZjL0UeA_9_12"></a><a id="Tc_QxnEnctb40mt-CAnpC_iqA_10_0"></a><a id="Tc_cTPkRVYKRE61xbC2KV6YtA_10_6"></a><a id="Tc_eH-1K21wHEyxkGrRiL-GBg_10_12"></a><a id="Tc_yY5KcVbgukGmOLGfaZ6JEA_10_15"></a><a id="Tc_B-sxhkM42UOjTVROzdXlJA_11_0"></a><a id="Tc_uvGfj4TkqEeJq69r4A0hhA_11_3"></a><a id="Tc_TWHMRgSdc0WfTQ258Am2rg_11_6"></a><a id="Tc_1DWLGsKxg0mrB9iMtQt84A_11_12"></a><a id="Tc_c6qs0fkZ8EGHImP6-3KQDA_11_15"></a><a id="Tc_tQn-ntQMP0G7XlHAADcXYw_12_0"></a><a id="Tc_anudteRf3kOmcEhVVJr5ig_12_6"></a><a id="Tc_BupxOYvwakOg2Eofn9fNhA_12_15"></a><a id="Tc_ydhzz_9VIk6NU68ClDwf1A_13_0"></a><a id="Tc_0C8DN12b10q3ZDSqncPLIw_13_5"></a><a id="Tc_PQfDJDRHGke9zqptk-SiPw_13_8"></a><a id="Tc_oJSIgx5R6kq51iw009-xgg_13_11"></a><a id="Tc_L9350pNF3U-Ic-KfCHOqXw_13_14"></a><a id="Tc_laVJjtmFY0yoZcGkX-TNOQ_13_17"></a><a id="Tc_pqLhl16kg0eCa9Nz_80u-w_14_0"></a><a id="Tc_0hsSbsvDaEqW2Y_kd0V6lA_14_3"></a><a id="Tc_IBWjwKrdFkCEenBnfdDTrw_14_6"></a><a id="Tc_JNodXr6Ukk6L7X8OBPJhlw_14_9"></a><a id="Tc_EoD4ELhkeEWEReq1IAZq1A_14_15"></a><a id="Tc_vi2bml0fMUaKnbSx97rGwg_15_0"></a><a id="Tc_4_SOtLya-U2q2iX9hjM-Eg_15_3"></a><a id="Tc_qASVIcLkWEaP47WRkttyqw_15_6"></a><a id="Tc_L_WzC-QHNEeo9PE0hjdHiA_15_9"></a><a id="Tc_fowoqQhYTkm3dphfBaWZCA_15_12"></a><a id="Tc_gCYvP72hpkaXVjtOAiD_5w_16_0"></a><a id="Tc_9YewRWm_CkSN7zZ5huYS5g_16_3"></a><a id="Tc_ShKmW0r-QEuBlKynLo6SQQ_16_6"></a><a id="Tc_5dixmINccU6CgQKZF_qbjg_16_9"></a><a id="Tc_nUdg5FWU402J5vnu6JXXHQ_16_12"></a><a id="Tc_IVPvQ7OwDUeZZEgxLAQ4XQ_17_0"></a><a id="Tc_inYPc85lCkuB6lTrVRS8Ig_17_6"></a><a id="Tc_aqCW7hFZAkGJCEB2x7o8Kw_17_12"></a><a id="Tc_3kH328LAgUmZvH77s5py0A_17_15"></a><a id="Tc_As1PIRQ57E65VOYMRSfZDQ_18_0"></a><a id="Tc_dCD06pLJJkKP7nDlrzkXmQ_18_6"></a><a id="Tc_dItHUnnpFU-59ObqF490sQ_18_12"></a><a id="Tc_GrZ7Fuh_O02DscI4qGiFkg_18_15"></a><a id="Tc_iDuuppVcfU2bVcUWDKtAqQ_19_0"></a><a id="Tc_aHPR0p5Vtk-wa9nEIAZRDQ_19_6"></a><a id="Tc_kksDYj-0k0-JKM9kvMEQ9w_19_12"></a><a id="Tc_MWEp0fNhdEyrqg8o6l0zDA_19_15"></a><a id="Tc_jEsdPx6S-UOdlQ0d04vwqA_20_0"></a><a id="Tc_cE-IY2vEaEGkJfPqvBAKyQ_20_3"></a><a id="Tc_513j77UBO0iKtsKIWEdmBQ_20_6"></a><a id="Tc_tV5wGxQuXEWGTLAeyx-3Ig_20_15"></a><a id="Tc_y7j-NMm6g0ac7e4ACVlJHw_21_0"></a><a id="Tc_cYHCoqOz80uh1CQcf6IYIQ_21_6"></a><a id="Tc_4nWmRkMrg0u_44wDNySdmQ_21_15"></a><a id="Tc_CZ_Rgm4xWk-NxMqDpG7gXg_22_0"></a><a id="Tc_sAipPW_AcEOMswRf1-pL-A_22_5"></a><a id="Tc_il8tbc_DXkmUYAqWD1cyCA_22_8"></a><a id="Tc_713FipuaAUOAb9N08ek0_g_22_11"></a><a id="Tc_QKRGlM1gNk6hrBiK0V0i4A_22_14"></a><a id="Tc_5ptA62ymWkaXjBnwR0wOYg_22_17"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:35.59%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.79%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:35.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:35.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Additional</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Other</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td></tr><tr><td style="vertical-align:bottom;width:35.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:14.14%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Common Stock</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Paid-in</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Accumulated</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Comprehensive</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Stockholders&#8217;</b></p></td></tr><tr><td style="vertical-align:bottom;width:35.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Shares</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Amount</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Capital</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Deficit</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Income&#160;(Loss)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Equity</b></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:35.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance at December 31, 2020</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_uzzcW3x6bE--mq9X_qlBvw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:SharesOutstanding" scale="3" id="Tc_7kdQSRXl_UOEAmfH1yVCig_5_3">33,633</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_uzzcW3x6bE--mq9X_qlBvw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_scQ5EJ-RqE6rBxKcISRFhg_5_6">34</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_e61Wz1CQE0qiyYcZjij5Yg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_tLbc8gaUHku5UaAzML7GeQ_5_9">570,102</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_EjhaMDWkVkaY2PX5EPO33w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" sign="-" scale="3" id="Tc_TBfAq4_WBEe1n_WxEJieeA_5_12">91,969</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_21pDDGs74UqeJxBPHlYzOQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_u91_etvjUEaHnpyslvPmyA_5_15">3,435</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.12%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_t5uUl7SAZUKbWEFG2Ps5Mg_5_18">481,602</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:35.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Net income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_iLquTy6h6EGwrhHMLkr38Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_h6BwwryGJ062HR4uwlVDqg_6_12">16,480</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_3_31_2021_gPmQL1FpQka6Ntdd-jalcA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_6RW8mxuJFki7FzqrqPADXA_6_18">16,480</ix:nonFraction></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:35.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Foreign currency translation adjustments</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_WSxitDFH_E2sNO8nvvvOTA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc__i5cY6uzgES04yUclG658w_7_15">1,372</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_3_31_2021_gPmQL1FpQka6Ntdd-jalcA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_u6TSLZEPXEav7xaB9Qo64A_7_18">1,372</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:35.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Change in pension obligation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_WSxitDFH_E2sNO8nvvvOTA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_T1SpQ9H1Vk2pE1dvDxT2zQ_8_15">20</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_3_31_2021_gPmQL1FpQka6Ntdd-jalcA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc__HQyh-0bJ0KgLHjTGLafMw_8_18">20</ix:nonFraction></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:35.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Exercise of stock options</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_1_1_2021_To_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_qxYF29GUZEK4V73nPRU4lw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised" scale="3" id="Tc_fzxu7A7jWkSWe9egvf9L6w_9_3">268</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_LcVXrn_7VEe2d4S1f3MdVA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised" scale="3" id="Tc_oahuvLn3CUSzjkj8rvvBlA_9_9">2,512</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_3_31_2021_gPmQL1FpQka6Ntdd-jalcA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised" scale="3" id="Tc_3_a2H2bvr0aTVGIpd3OeiQ_9_18">2,512</ix:nonFraction></p></td></tr><tr><td style="vertical-align:top;width:35.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Issuance of restricted common shares,<br />net of shares withheld</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_1_1_2021_To_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_qxYF29GUZEK4V73nPRU4lw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures" scale="3" id="Tc_H1wO5V847kCk8uU63X_3yg_10_3">81</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_LcVXrn_7VEe2d4S1f3MdVA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures" sign="-" scale="3" id="Tc_UGuPRHKWsUaDB1uvJiAm8g_10_9">2,354</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_3_31_2021_gPmQL1FpQka6Ntdd-jalcA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures" sign="-" scale="3" id="Tc_zvL6cuejeUSPLnmfQnKIbQ_10_18">2,354</ix:nonFraction>)</p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:35.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Stock-based compensation expense</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_LcVXrn_7VEe2d4S1f3MdVA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" scale="3" id="Tc_g9PzClyGZ0WctekVu3qLYQ_11_9">2,407</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_3_31_2021_gPmQL1FpQka6Ntdd-jalcA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" scale="3" id="Tc_K-JiRvNjBU-_zE3uLpIBkw_11_18">2,407</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:35.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Repurchase of common stock</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_1_1_2021_To_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_qxYF29GUZEK4V73nPRU4lw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockRepurchasedDuringPeriodShares" scale="3" id="Tc_OBA9WT_bNUOYbN1qQHaYEA_12_3">303</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_LcVXrn_7VEe2d4S1f3MdVA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockRepurchasedDuringPeriodValue" scale="3" id="Tc_QOoq8GzldkGaKvCQ-8Wx8w_12_9">5,468</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_iLquTy6h6EGwrhHMLkr38Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockRepurchasedDuringPeriodValue" scale="3" id="Tc_CvKPj38cQkCZCTVTcZY0Qg_12_12">6,167</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_3_31_2021_gPmQL1FpQka6Ntdd-jalcA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockRepurchasedDuringPeriodValue" scale="3" id="Tc_MDXG-L5dy0W81RFmru7FUw_12_18">11,635</ix:nonFraction>)</p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:35.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance at March 31, 2021</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="As_Of_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_yCLXcdhezkCA8IlJrhRQoA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:SharesOutstanding" scale="3" id="Tc_qX2axl76D0CAs32djgaysA_13_3">33,679</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_yCLXcdhezkCA8IlJrhRQoA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_nmZH3CsmpEGnMUVsGdODTA_13_6">34</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.79%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_nPR1QHLRd0K6xO7MTzjQDA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_5vU5hXDqE0qG7D8SYxvqSQ_13_9">567,199</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_yk0zeuok1ESpzKSxw-_Yng" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" sign="-" scale="3" id="Tc_uYV25DNwxEaz3iUf8s5hgg_13_12">81,656</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_nMZiZF1p1UeYuA1-E7JPNg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_p2_EHvwK80CuIlXbbt9diw_13_15">2,083</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.12%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_3_31_2021_Qs-qxUhDAk-CSx7C4Sn69A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_mLa2rH3FnUit-TOvc_4XYQ_13_18">487,660</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:35.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Net income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_h4oY94pFW0iXqEL70dTv8g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_4rRCZMQcNEKyafQooHN_Og_14_12">18,906</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_mdZJTlP3u0Gf1aP17QeLMQ_14_18">18,906</ix:nonFraction></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:35.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Foreign currency translation adjustments</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_IIcvKTwEi0elPGhQkd7WcQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" scale="3" id="Tc_kxlZGpDH00CJqBU2v7ZYSw_15_15">552</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" scale="3" id="Tc_eojjVP6rtkedpAyDQgL2Uw_15_18">552</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:35.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Change in pension obligation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_IIcvKTwEi0elPGhQkd7WcQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_iPHBqWMR1kOYVQhytWe7Lg_16_15">34</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" sign="-" scale="3" id="Tc_0U2W0y-Bm0CAQy0YBhoeIg_16_18">34</ix:nonFraction></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:35.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Exercise of stock options</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_ISQyc_YFT0Ggp2-cT9xM1Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised" scale="3" id="Tc_-GoeTjiiPkOb4xRE1ZGdyg_17_3">72</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember__5v7cq8u6k6j4ROt48LqZQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised" scale="3" id="Tc_sS9_V8yD-kKqUg1f9hR6cg_17_9">563</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised" scale="3" id="Tc_N2ARsR7IhkOpltAvcRQzcA_17_18">563</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:35.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Issuance of shares under Employee Stock Purchase Plan</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_ISQyc_YFT0Ggp2-cT9xM1Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" scale="3" id="Tc_sIUX7lj990W1Kp15_WuGIg_18_3">15</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember__5v7cq8u6k6j4ROt48LqZQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan" scale="3" id="Tc_hVbYZzYTvkK81RfyMF5kSw_18_9">509</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan" scale="3" id="Tc_kVPAEbZy20qoHbOXhf_44w_18_18">509</ix:nonFraction></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:top;width:35.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Issuance of restricted common shares,<br />net of shares withheld</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_ISQyc_YFT0Ggp2-cT9xM1Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures" scale="3" id="Tc_TPKTfWxX40yxUGIQk9tSAg_19_3">214</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember__5v7cq8u6k6j4ROt48LqZQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures" sign="-" scale="3" id="Tc_CJTS1MvlrU2DMDdoU5F_lw_19_9">4,141</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures" sign="-" scale="3" id="Tc_W_LQXwEDSkOhcrHHp87mNg_19_18">4,141</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:35.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Stock-based compensation expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember__5v7cq8u6k6j4ROt48LqZQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" scale="3" id="Tc_SfODF4kSc0GJI68a6K-nzg_20_9">3,377</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" scale="3" id="Tc_GLUWlYKk80uYy9sUn13Jiw_20_18">3,377</ix:nonFraction></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:35.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Repurchase of common stock</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_ISQyc_YFT0Ggp2-cT9xM1Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockRepurchasedDuringPeriodShares" scale="3" id="Tc_u8INv5ST00OID283w5JGuw_21_3">323</ix:nonFraction>)</p></td><td colspan="2" style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td colspan="2" style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember__5v7cq8u6k6j4ROt48LqZQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockRepurchasedDuringPeriodValue" scale="3" id="Tc_mmTVPC6rwEasd9bczBpuZQ_21_9">5,827</ix:nonFraction>)</p></td><td colspan="2" style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_h4oY94pFW0iXqEL70dTv8g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockRepurchasedDuringPeriodValue" scale="3" id="Tc_eSZmVDIIzU6fpFhXTujbPg_21_12">7,531</ix:nonFraction>)</p></td><td colspan="2" style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> &#8212;</p></td><td colspan="2" style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.12%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockRepurchasedDuringPeriodValue" scale="3" id="Tc_O-b6j6NpDE2EalYnVEgp8Q_21_18">13,358</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;width:35.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance at June 30, 2021</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="As_Of_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_g56DknHgzE22JRq2ngeP8w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:SharesOutstanding" scale="3" id="Tc_vdb9WPbZO0qRS6GtjMajOw_22_3">33,657</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_g56DknHgzE22JRq2ngeP8w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_shBPzB1zD0-hjokL2Ccm6g_22_6">34</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.79%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_8SoISsYsQEmHgmYHZWy3NQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_hQp4SFv6tE6w-dM3NvVxEw_22_9">561,680</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.08%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_jrp5HTMctEGaBiB28D3Lcg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" sign="-" scale="3" id="Tc_hMc06XgmV0OtsWFxQzZgJg_22_12">70,281</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_1OMo5RzwUE2qmccn3CI7VQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_CDI7CMQdf0mdjZthFWj9WQ_22_15">2,669</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:StockholdersEquity" scale="3" id="Tc_yC4gsK1mbEGisa4oQ11jrg_22_18">494,102</ix:nonFraction></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">See accompanying Notes to these Consolidated Financial Statements</p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">6</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="margin-top:21.6pt;min-height:36pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 30pt 0pt;"><a href="#Toc"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_3d212d59_1508_4094_a7f9_8cd67d5f16b3"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Axcelis Technologies,&#160;Inc.</b></p><a id="ConsolidatedStatementsofCashFlows_699712"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Consolidated Statements of Cash Flows</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(In thousands)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(Unaudited)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><a id="_6fd0c57d_fe5e_4340_bc7e_11cc65357b31"></a><a id="Tc_c1RxUkYckUuPpYuYHMttAA_1_2"></a><a id="Tc_AJe70LVrS0qbIok2dy7XVA_2_2"></a><a id="Tc_meUui2129E6_plv7vLsenw_3_2"></a><a id="Tc_V-OKaJaRokOuhLbyn0fpkg_3_5"></a><a id="Tc_JtJW7l8hMEORMbJd0zO9xg_4_0"></a><a id="Tc__p7WFrzDIUGUDxdexhHzkQ_5_0"></a><a id="Tc_tQK0W0QL_0idQWXZMdqQsQ_5_2"></a><a id="Tc_Y9b_S6kiR0iNYoJ6PR2zDQ_5_5"></a><a id="Tc__f4WKD27V0GUil3cqgFMZw_6_0"></a><a id="Tc_ePMTd8uqVUiDEqFtJfNJ-w_7_0"></a><a id="Tc_oYvGhlltOUStGEuMPb3Lxg_8_0"></a><a id="Tc_YrB44sWoXk-s5AQ8d7HrCA_9_0"></a><a id="Tc_bi_XqD84I0OV1xl_btDXtQ_10_0"></a><a id="Tc_74OEe14uh0ebLFBYMvTjBQ_11_0"></a><a id="Tc_Jv4Fq9tDN06eS7d63FfWZA_12_0"></a><a id="Tc_rcHIskIbPEaZRelwLZpBnQ_13_0"></a><a id="Tc_6uwRhftjlU-M7bVQ4NGaqQ_14_0"></a><a id="Tc_66mVDCjQ0UKbQ66mCotYQw_15_0"></a><a id="Tc_YUUqRHz5ZE-6xQYadtQhig_16_0"></a><a id="Tc_7_h6vWrypEO_4FX10Tcx1A_17_0"></a><a id="Tc_qtHPzdhT_E2UcRkmnz3-0A_18_0"></a><a id="Tc_-RtDUjqutUC9QdLWVxmv4g_19_0"></a><a id="Tc_3yts09wY4UKUO0tGTTSQSA_21_0"></a><a id="Tc_lfMZ1zlDhUeXJlx-czwEKg_22_0"></a><a id="Tc_ERpg_-Yo6Ey5a6vmNBaCBA_23_0"></a><a id="Tc_MJR-FTF3YEmw6XntBUFJNw_25_0"></a><a id="Tc_IS8ikU8MdEi2elV4vy1U1A_26_0"></a><a id="Tc_DbYJuc2-XkO538yURLTmQA_27_0"></a><a id="Tc_EVtH-JQclk-cZO-4TkJezw_28_0"></a><a id="Tc_Lt6SrU3gl0agDnzGdb81eQ_29_0"></a><a id="Tc_Fm5NfDfo6Ueardf2bQjPNw_30_0"></a><a id="Tc_I-V8EdaHKESCy162cixw9w_31_0"></a><a id="Tc_bhcBWuFVBUeiV5dIT6B92Q_33_0"></a><a id="Tc_UQyow7NivUWDepA-2OBTuw_34_0"></a><a id="Tc_9qg2Jxh9_E-e5S2H5BVMrw_36_0"></a><a id="Tc_u_SyaK78aE67LRoxZklhLA_37_0"></a><a id="Tc_gD4_zJQt8UO3VAJfRwSNhw_37_2"></a><a id="Tc_o-msHvwdyEyuyzDn9GQL5Q_37_5"></a><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:21.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:21.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Cash flows from operating activities</b></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Net income</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProfitLoss" scale="3" id="Tc_-EWxfI50h0CgchC7fAHeEA_5_3">35,386</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProfitLoss" scale="3" id="Tc_KurpyDWmdUeJ8myDQUSBhQ_5_6">24,523</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Adjustments to reconcile net income to net cash provided by operating activities:</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Depreciation and amortization</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DepreciationDepletionAndAmortization" scale="3" id="Tc_MJUBW_IPEkWjukN2DKZA_w_7_3">5,336</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DepreciationDepletionAndAmortization" scale="3" id="Tc_DqkGnxN8jU6w_NqjWIeZDA_7_6">4,829</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Deferred income taxes</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxExpenseBenefit" scale="3" id="Tc_IWNLcFUS2keBYRnR4u_7Qw_8_3">5,107</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxExpenseBenefit" scale="3" id="Tc_8KQ4w6zZLEy8rrXWAAvCzA_8_6">3,035</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Stock-based compensation expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensation" scale="3" id="Tc_JY4bjRaLY0y0PusZ_VVI8Q_9_3">5,784</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ShareBasedCompensation" scale="3" id="Tc_ckNBYUOb5kqtVXuTBoMAew_9_6">4,806</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Provision for excess and obsolete inventory</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryWriteDown" scale="3" id="Tc_OgR_GN5G5U2eBSig_WqI1g_10_3">1,888</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryWriteDown" scale="3" id="Tc_KHrcd3nK_0-Bhq65nKJ8yg_10_6">1,708</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Changes in operating assets&#160;and liabilities:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 24pt;">Accounts receivable</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInAccountsReceivable" sign="-" scale="3" id="Tc_Il-wziLABEGknr7EShcdxA_12_3">7,091</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInAccountsReceivable" sign="-" scale="3" id="Tc_pcyq2kBQ90OcoXgN_cROUQ_12_6">18,752</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 24pt;">Inventories</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInInventories" scale="3" id="Tc_g5wizv19aUGkE63Kgqftig_13_3">32,418</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInInventories" scale="3" id="Tc_XXPUG5ACWEeowTQVJT4twA_13_6">9,123</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 24pt;">Prepaid expenses and other current assets</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" scale="3" id="Tc_mMCxnIls5UufuMPDesH5VQ_14_3">3,309</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" scale="3" id="Tc_h-GRoKTgfEKSRNIFczk2aQ_14_6">4,206</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 24pt;">Accounts payable and other current liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInAccountsPayableAndAccruedLiabilities" scale="3" id="Tc_MNfIRK39o0-Z_C6-A3aJaw_15_3">7,282</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInAccountsPayableAndAccruedLiabilities" scale="3" id="Tc_h35tYqF-jUqsCNRsPhYY2Q_15_6">11,808</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 24pt;">Deferred revenue</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInContractWithCustomerLiability" scale="3" id="Tc_paMmF7veI0itOZqtcwkTag_16_3">12,460</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInContractWithCustomerLiability" scale="3" id="Tc_0ze6nCO-BUeRlIRGPH4AXg_16_6">1,167</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 24pt;">Income taxes</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInAccruedIncomeTaxesPayable" sign="-" scale="3" id="Tc_nQBLRrDYJESvqvfIPTXF6w_17_3">27</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInAccruedIncomeTaxesPayable" scale="3" id="Tc_sgpLfgB950u4zig-CPLdzA_17_6">5</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 24pt;">Other assets and liabilities</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInOtherOperatingCapitalNet" sign="-" scale="3" id="Tc_WrUbwBwBBEq5eesckRUfqg_18_3">1,341</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.6%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncreaseDecreaseInOtherOperatingCapitalNet" scale="3" id="Tc_GqBngwHv9k61NAVkTXo5wg_18_6">729</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 36pt;">Net cash provided by operating activities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetCashProvidedByUsedInOperatingActivities" scale="3" id="Tc_vyDsb463o0-O8OdaSwZ95g_19_3">45,921</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetCashProvidedByUsedInOperatingActivities" scale="3" id="Tc_ZAuNh5Nxlk6EwzsEmqyUIw_19_6">56,575</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 36pt;"><span style="margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Cash flows from investing activities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Expenditures for property, plant and equipment and capitalized software</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PaymentsToAcquirePropertyPlantAndEquipment" scale="3" id="Tc_QAz0ylymS0qPVIqhhv7rsw_22_3">2,392</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.6%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PaymentsToAcquirePropertyPlantAndEquipment" scale="3" id="Tc_tRoZsF0ON0WMqqtwIefROg_22_6">2,975</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 36pt;">Net cash used in investing activities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetCashProvidedByUsedInInvestingActivities" sign="-" scale="3" id="Tc_q4jEhRw0gkGlYIdrvSI0sw_23_3">2,392</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetCashProvidedByUsedInInvestingActivities" sign="-" scale="3" id="Tc_cGYh9VM64E-Na6yH5H-1sw_23_6">2,975</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><span style="margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Cash flows from financing activities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Net settlement on restricted stock grants</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="acls:RepaymentOfNetSettlementOnRestrictedStockGrants" scale="3" id="Tc_mLwdq6X4vE2inQJ7HMyXfw_26_3">6,495</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="acls:RepaymentOfNetSettlementOnRestrictedStockGrants" scale="3" id="Tc_lrUx8LkOKEWQgtBUbMXdzw_26_6">3,860</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Repurchase of common stock</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PaymentsForRepurchaseOfCommonStock" scale="3" id="Tc_3gk7l0BLoEiNlEOsHTrMqg_27_3">24,993</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:PaymentsForRepurchaseOfCommonStock" scale="3" id="Tc_7Dv2IUCi3km7uYw8D3WMsg_27_6">7,501</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Proceeds from Employee Stock Purchase Plan</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromStockPlans" scale="3" id="Tc_U23PIvCvD0O-fK_9y5f44A_28_3">508</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromStockPlans" scale="3" id="Tc_DNsyLvnnBkK6gvKE4QDXCg_28_6">509</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Principal payments on finance lease obligation</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeasePrincipalPayments" scale="3" id="Tc_yxCCjMCoJk6PwX1m-qu__Q_29_3">362</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeasePrincipalPayments" scale="3" id="Tc_-jRhfC8l9UWtnpycRUitow_29_6">108</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;">Proceeds from exercise of stock options</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromStockOptionsExercised" scale="3" id="Tc_ZUJSvQVByU6T3SlJc5hNVg_30_3">3,075</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.6%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromStockOptionsExercised" scale="3" id="Tc_a2t1xFFEUUOAnS81PyC_Pw_30_6">7,282</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 36pt;">Net cash used in financing activities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetCashProvidedByUsedInFinancingActivities" sign="-" scale="3" id="Tc_4sSl-Grm8kixbnYvHE9anA_31_3">28,267</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetCashProvidedByUsedInFinancingActivities" sign="-" scale="3" id="Tc_JIHePCf0502gBYuqMc6Eqw_31_6">3,678</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 36pt;"><span style="margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Effect of exchange rate changes on cash and cash equivalents</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" scale="3" id="Tc_JkvWhtGWVEuE1bLhfasWKg_33_3">992</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" scale="3" id="Tc__j2iRHKnR0mXbTn1Le6blw_33_6">560</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Net increase in cash, cash equivalents and restricted cash</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" scale="3" id="Tc_3cW8XGuTWk60YftFsaxAYg_34_3">16,254</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" scale="3" id="Tc_w5DIJIJrRk-7VNsflmRg9Q_34_6">50,482</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash, cash equivalents and restricted cash at beginning of period</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" scale="3" id="Tc_cxYS7D0cPUCYIFM25YGoCw_36_3">204,232</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.6%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2019_FtHnUOMLjkeW-5RTgMqhrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" scale="3" id="Tc_7gndEq4Zr0SLvh92-GA1ng_36_6">146,534</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:71.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash, cash equivalents and restricted cash at end of period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" scale="3" id="Tc_ymdaOb98L0-WrP7LJ9bI9w_37_3">220,486</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.6%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.1%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2020_vfxHSqwZwkeC1Z0d0SG93A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" scale="3" id="Tc_-qUkL8t240SvISEXLtni2g_37_6">197,016</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">See accompanying Notes to these Consolidated Financial Statements</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:5pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">7</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="margin-top:21.6pt;min-height:36pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 30pt 0pt;"><a href="#Toc"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_c1b86357_ce8d_4c0c_8d0a_15a875060c46"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Axcelis Technologies,&#160;Inc.</b></p><a id="NotestoConsolidatedFinancialStatementsUn"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Notes to Consolidated Financial Statements (Unaudited)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="us-gaap:OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock" id="Tb_qA2r7MeqFEi1AyjMPBSE-w" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;1.&#160;&#160;Nature of Business</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Axcelis Technologies,&#160;Inc. (&#8220;Axcelis&#8221; or the &#8220;Company&#8221;) was incorporated in Delaware in 1995 and is a producer of ion implantation equipment used in the fabrication of semiconductor chips in the United States, Europe and Asia. In addition, we provide extensive worldwide aftermarket service and support, including spare parts, equipment upgrades, used equipment and maintenance services to the semiconductor industry. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The accompanying unaudited consolidated financial statements have been prepared in accordance with U.S. generally accepted accounting principles for interim financial information and with the instructions to Form&#160;10-Q and Article&#160;10 of Regulation S-X. Accordingly, they do not include all of the information and footnotes required by generally accepted accounting principles for complete financial statements. In the opinion of management, all adjustments which are of a normal recurring nature and considered necessary for a fair presentation of these financial statements have been included. Operating results for the interim periods presented are not necessarily indicative of the results that may be expected for other interim periods or for the year as a whole.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The balance sheet at December&#160;31, 2020 has been derived from the audited consolidated financial statements at that date but does not include all the information and footnotes required by generally accepted accounting principles for complete financial statements. For further information, refer to the consolidated financial statements and footnotes thereto included in Axcelis Technologies,&#160;Inc.&#8217;s Annual Report on Form&#160;10-K for the year ended December&#160;31, 2020.</p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><a id="_contentSection_2483b59b_abe4_4e14_a38e_"></a><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="us-gaap:DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock" id="Tb_6lgFwpmx4EKYU-Fj1J2xPw" continuedAt="Tb_6lgFwpmx4EKYU-Fj1J2xPw_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 2.&#160;&#160;Stock-Based Compensation</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We maintain the Axcelis Technologies,&#160;Inc. 2012 Equity Incentive Plan, as amended (the &#8220;2012 Equity Plan&#8221;), which became effective on May&#160;2, 2012, and permits the issuance of options, restricted stock, restricted stock units (&#8220;RSUs&#8221;) and performance awards to selected employees, directors and consultants of the Company. Our 2000 Stock Plan (the &#8220;2000 Stock Plan&#8221;) expired on May 1, 2012 and <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_1_1_2021_To_6_30_2021_us-gaap_PlanNameAxis_acls_StockPlan2000Member_gPtI2pgzX0W3fHkKR6jOFg" decimals="INF" format="ixt-sec:numwordsen" name="acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardGrantsInPeriodGross" scale="0" id="Narr_6G2jZYkyU0ef7ymO4h5UOw">no</ix:nonFraction> new grants may be made under that plan after that date. However, unexpired options granted under the 2000 Stock Plan, which have a <ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_us-gaap_PlanNameAxis_acls_StockPlan2000Member_HVl0riEuP0OGyi-NSg5YHw" format="ixt-sec:durwordsen" name="us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" id="Narr_oGFl9ziQnUe_vfgoZTdYqw">10-year</ix:nonNumeric> term, remain outstanding and subject to the terms of the 2000 Stock Plan. We also maintain the Axcelis Technologies,&#160;Inc. 2020 Employee Stock Purchase Plan (the &#8220;2020 ESPP&#8221;), an Internal Revenue Code Section&#160;423 plan. The Company&#8217;s Employee Stock Purchase Plan, which was effective in June 2000 (the &#8220;2000 ESPP&#8221;), expired in June 2020.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:27pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The 2012 Equity Plan is more fully described in Note&#160;13 to the consolidated financial statements in our Annual Report on Form&#160;10-K for the year ended December 31, 2020.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We recognized stock-based compensation expense of $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="6" id="Narr_xv55IxEJEUW9gDCyCpsviQ">3.4</ix:nonFraction>&#160;million and $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="6" id="Narr_98uPwdYpek6j9zmdTsi5lQ">3.1</ix:nonFraction> million for the three-month periods ended June 30, 2021 and 2020, respectively. We recognized stock-based compensation expense of $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="6" id="Narr_OEaXt6bulUSe-VbVpvbsWw">5.8</ix:nonFraction> million and $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:AllocatedShareBasedCompensationExpense" scale="6" id="Narr_oD1_97KEtUW3-dApBLFUnw">4.8</ix:nonFraction> million for the six-month periods ended June 30, 2021 and 2020, respectively. These amounts include compensation expense related to RSUs, non-qualified stock options and stock to be issued to participants under the 2020 ESPP and 2000 ESPP.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">In the three-month periods ended June 30, 2021 and 2020, we issued <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_QNR4-3SSo02w6_10P-JE4Q" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised" scale="6" id="Narr_N1a2BbGpq0idfzCcqzhzjQ">0.3</ix:nonFraction> million and <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_H-V3txgTH0yEDXnAa1DUtQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised" scale="6" id="Narr_ZFk3ITKCR0y1N0vNZQn23Q">0.6</ix:nonFraction> million shares of common stock, respectively, upon stock option exercises, purchases under the employee stock purchase plans and vesting of RSUs. In the three-month periods ended June 30, 2021 and 2020, we received proceeds of $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_QNR4-3SSo02w6_10P-JE4Q" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromStockOptionsExercised" scale="6" id="Narr_qo4O_wV1ckyCAb3VSN35IQ">1.1</ix:nonFraction>&#160;million and $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_H-V3txgTH0yEDXnAa1DUtQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromStockOptionsExercised" scale="6" id="Narr_xXBSmj45akaYbIsIutZYGA">3.3</ix:nonFraction>&#160;million, respectively, in connection with the exercise of stock options and purchases under the employee stock purchase plans.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">In the six-month periods ended June 30, 2021 and 2020, we issued <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_1_1_2021_To_6_30_2021_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_Yvxyzm8yg0SNKmN2RVXDEw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised" scale="6" id="Narr_KAxbUkoKr0OMjqmwHbCOBw">0.7</ix:nonFraction> million and <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_1_1_2020_To_6_30_2020_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_HgtTxlyUB0u26rdyUj-qkA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised" scale="6" id="Narr_jjJ-CqxFuEathge7iklSsA">1.2</ix:nonFraction> million shares of common stock, respectively, upon stock option exercises, purchases under the employee stock purchase plans and vesting of RSUs. In the six-month periods ended June 30, 2021 and 2020, we received proceeds of $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_Yvxyzm8yg0SNKmN2RVXDEw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromStockOptionsExercised" scale="6" id="Narr_2vKJZ0W0GEmRJc7ihJm83g">3.6</ix:nonFraction>&#160;million and $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_HgtTxlyUB0u26rdyUj-qkA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromStockOptionsExercised" scale="6" id="Narr_Q7v7ctqXMUSMHkgEjzvg1g">7.8</ix:nonFraction>&#160;million, respectively, in connection with the exercise of stock options and purchases under the employee stock purchase plans.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">8</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="margin-top:21.6pt;min-height:36pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 30pt 0pt;"><a href="#Toc"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><ix:continuation id="Tb_6lgFwpmx4EKYU-Fj1J2xPw_cont1"></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><a id="Tc_kAGTDZ8gLUqPYrFbgCvf9Q_1_3"></a><a id="Tc_GbVkSW9xAEyjrcqwbpcF0Q_1_6"></a><a id="Tc_KYo2Wlmu0UyweIeQOYSKkQ_2_0"></a><a id="Tc_ftiI0zBRSEmP5iTkXzobsQ_2_1"></a><a id="Tc_d4Z8tKfCekaPI8PPEqZRyA_2_3"></a><a id="Tc_cmE91NrhsECVaHmai-j48w_2_6"></a><a id="Tc_24yBIsudF0Giu9qqTxrL7w_3_0"></a><a id="Tc_lGqLpezBqEy9nPJaqPJyKw_3_3"></a><a id="Tc_pzMLXhZyLkO7T-0pPE8UQA_4_1"></a><a id="Tc_EpGLP7r27EaVyQnxk-DLPg_4_3"></a><a id="Tc_gVYHtD8Sy0qD24Mgua9qrg_4_6"></a><a id="Tc_341p4UMWTk6FzSl3nxY7hA_5_1"></a><a id="Tc_NOQRBG80p0WH7jaefW0fvA_6_0"></a><a id="Tc_w8Q1Mhaq7Em9-VFG6-vvfg_6_3"></a><a id="Tc_mH6mqEvM9kWFeqmnfJMoyQ_6_6"></a><a id="Tc_gR3mMejqOUmpwFvy3Q1snw_7_0"></a><a id="Tc_7rPgy-qguEeoP_8aCUv8GQ_8_0"></a><a id="Tc_9Nx-rcxw-UKCWrSWsrLEwg_9_1"></a><a id="Tc_PqywUzllckSlc2ANhGjh9w_9_3"></a><a id="Tc_zJtwXeakjk-frQhNj4dvfg_9_6"></a><a id="Tc_ugt5hAhU7UemwM5vsHbmkA_10_1"></a><a id="Tc_AZBT_X6UcEGvgFErkFKsOQ_11_0"></a><a id="Tc_0oQ8GY7TZ0Cn2vAFGiF7mA_12_1"></a><a id="Tc_t5q1swftF0q7PZvzTP6T2Q_13_1"></a><a id="Tc_wShoug4p9EyvbMuq9RvEHQ_14_3"></a><a id="Tc_MSck8g205UaCFipX03al7w_14_6"></a><a id="Tc_Sc0uY8Vxz0y4gBG-sTorPQ_16_0"></a><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="acls:LeaseDisclosureTextBlock" id="Tb_JQhv96fEJkaSfRWAq5n2LA" continuedAt="Tb_JQhv96fEJkaSfRWAq5n2LA_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 3.&#160;&#160;Leases </b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We have operating leases for office space, warehouse space, computer and office equipment and vehicles used in our business operations. We have a finance lease as a result of the 2015 sale-leaseback of our corporate headquarters in Beverly, Massachusetts. All new agreements are reviewed to determine if they contain a lease component. A lease is a contract or part of a contract that conveys the right to control the use of identified property, plant or equipment over a period of time in exchange for consideration. We recognize the lease obligation on a discounted basis using the explicit or implicit discount rate stated within the agreement. We recognize a corresponding right-of-use asset, which is initially determined based upon the net present value of the associated liability and is adjusted for deferred costs and possible impairment, if any. For those lease agreements that do not indicate the applicable discount rate, we use our incremental borrowing rate. We have made the following policy elections: (i) operating leases with an initial term of 12 months or less are not recorded on the consolidated balance sheet; (ii) we recognize lease expense for operating leases on a straight-line basis over the lease term; and (iii) we account for lease components and non-lease components that are fixed payments as one component. Some of our operating leases include one or more options to renew, with renewal terms that can <ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" format="ixt:booleantrue" name="us-gaap:LesseeOperatingLeaseExistenceOfOptionToExtend" id="Narr_YA-Onezxh0Cuu0_eAlgQSg">extend</ix:nonNumeric> the respective lease term <span style="-sec-ix-hidden:Hidden_zan9aSK8zE6OWipLaR-PbQ;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">1</span></span> to <ix:nonNumeric contextRef="As_Of_6_30_2021_srt_RangeAxis_srt_MaximumMember_DwErj1lpCkWn0mWzw3VRWw" format="ixt-sec:durwordsen" name="us-gaap:LesseeOperatingLeaseRenewalTerm" id="Narr_MNp0J9gwf0uyO57Glu3xBQ">3 years</ix:nonNumeric>. The exercise of lease renewal options are at our sole discretion. For lease extensions that are reasonably certain to occur, we have included these renewal periods in our calculation of the net present value of the lease obligation and related right-of-use asset. Certain leases also include options to purchase the leased property. The depreciable life of certain assets and leasehold improvements is limited by the expected lease term, unless there is a transfer of title or purchase option reasonably certain of exercise. Our lease agreements do not contain any material residual value guarantees or material restrictive covenants. The amounts of operating and finance lease right-of-use assets and related lease obligations recorded within our consolidated balance sheets are as follows: </p><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="acls:LeaseBalanceSheetDisclosureTableTextBlock" id="Tb_HxSIWsm6WUSyB8Ehf3mD9w" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:10.8%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;width:2.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:54.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Leases</b></p></td><td style="vertical-align:bottom;width:20.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Classification</b></p></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.8%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Assets</b></p></td><td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:22.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_W9KnNs_BPUCoZMTZ8ue8sA;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;text-align:left;">Operating leases</span></span></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating lease assets</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseRightOfUseAsset" scale="3" id="Tc_R4BXJYMjLEy6V__3fRSCYg_4_4">7,626</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseRightOfUseAsset" scale="3" id="Tc_OEJ-JeZ2cUy8zUgjrwGuZw_4_7">4,542</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_A9wG4K0J4UKHRE76HpHnMg;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;text-align:left;">Finance lease</span></span></p></td><td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance lease assets *</p></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseRightOfUseAsset" scale="3" id="Tc_v_AeHWt6wkmo7dDKRGJfWA_5_4">19,889</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseRightOfUseAsset" scale="3" id="Tc_qUvhRBlDtEOh4UXtyL_xkA_5_7">20,544</ix:nonFraction></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Total leased assets</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.56%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="acls:OperatingAndFinanceLeaseRightOfUseAsset" scale="3" id="Tc_U4Df4yztHEepuZAH6Jc2DA_6_4">27,515</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.63%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="acls:OperatingAndFinanceLeaseRightOfUseAsset" scale="3" id="Tc_FqSfhrkoOEmYuIIhlXvBeQ_6_7">25,086</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Liabilities</b></p></td><td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Current</b></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_7xdEmmVR-kiGHLFbeFZHxw;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;text-align:left;">Operating</span></span></p></td><td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Other current liabilities</p></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseLiabilityCurrent" scale="3" id="Tc_w0fdtFUM70uqRt5WSnMzzQ_9_4">3,215</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseLiabilityCurrent" scale="3" id="Tc_hxchTHvX0Eas1ii9N0U0SQ_9_7">2,573</ix:nonFraction></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_Cv0WhFSvyEe6gpVSxXkYow;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;text-align:left;">Finance</span></span></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Current portion of finance lease obligation</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityCurrent" scale="3" id="Tc_95snWTbbL0W7z7fwDRv0Qg_10_4">864</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityCurrent" scale="3" id="Tc_WAX5dsjwO0edHCKg48MirA_10_7">756</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Noncurrent</b></p></td><td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_dHd0m_i_ckaUDDKTbKPNiA;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;text-align:left;">Operating </span></span></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Other long-term liabilities</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseLiabilityNoncurrent" scale="3" id="Tc_7U2O9o_Nt0aVWQ3eC4Lrfg_12_4">4,398</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseLiabilityNoncurrent" scale="3" id="Tc_CRlLNhMU50iqZHOaTDFHRQ_12_7">1,949</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_4JxT6-VdKkyC-ozm6pXPvg;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;text-align:left;">Finance </span></span></p></td><td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance lease obligation</p></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityNoncurrent" scale="3" id="Tc_y1ABwsVs5EuDZ2QdwlajLA_13_4">46,923</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityNoncurrent" scale="3" id="Tc_5b2j37XGckqZd3yh1iYNOg_13_7">47,393</ix:nonFraction></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_EFu-sVp3nUiwnTcDpuJATQ;"><b style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:bold;text-align:left;">Total lease liabilities</b></span></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.56%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="acls:OperatingAndFinanceLeaseLiability" scale="3" id="Tc_qAeNIIoPJkuGLosdxShK_w_14_4">55,400</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.63%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="acls:OperatingAndFinanceLeaseLiability" scale="3" id="Tc_taf-fArIpU2FBFm8di8N2A_14_7">52,671</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td colspan="8" style="vertical-align:top;width:100%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">* Finance lease assets are recorded net of accumulated depreciation of $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-5" format="ixt:numdotdecimal" name="acls:FinanceLeaseAccumulatedDepreciation" scale="6" id="Narr_k7UAEvVFHku1Bb1-K-Jc8A">48.9</ix:nonFraction> million and include $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:PrepaidRent" scale="6" id="Narr_IcXZI9b90UaDgTKwdwbuDw">0.7</ix:nonFraction> million of prepaid financing costs as of June 30, 2021. Finance lease assets are recorded net of accumulated depreciation of $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-5" format="ixt:numdotdecimal" name="acls:FinanceLeaseAccumulatedDepreciation" scale="6" id="Narr_3-Z5nJbL80ygsUAVsZWPAQ">48.4</ix:nonFraction> million and include $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:PrepaidRent" scale="6" id="Narr_5LENUh3ssU-CRTFDIlkDjw">0.7</ix:nonFraction><span style="color:#ff0000;"> </span>million of prepaid financing costs as of December 31, 2020. <br /><span style="visibility:hidden;">&#8203;</span></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="display:inline-block;text-indent:0pt;width:36pt;"></span>All of our operating lease office locations support selling and servicing functions. Operating lease expense, and depreciation and interest expense relating to our finance lease obligation, are recognized within our consolidated statement of operations for the three and six months ended June 30, 2021 and 2020 as follows:</p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">9</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="margin-top:21.6pt;min-height:36pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 30pt 0pt;"><a href="#Toc"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_h0zUAJxPMkqaITelbjp1rQ_1_3"></a><a id="Tc_v2N9u7BUFUCgKN0sdjI6hA_1_9"></a><a id="Tc_M5Oy8kebEUu1keGa7-H5tg_2_3"></a><a id="Tc_Mo-T9ooGk0GkCl9gX_1NOQ_2_9"></a><a id="Tc_5CulJNt2Fki2poQqh-9DCw_3_0"></a><a id="Tc_G2t9Fk8vl0aomrk9Xt8DAQ_3_1"></a><a id="Tc_d-d_cTjksUqyUXuU76UaDA_3_3"></a><a id="Tc_yKG2oqD-ZE-cSyHAxk5jNw_3_6"></a><a id="Tc_SpXcXTtHm0SYApWtzH0ASg_3_9"></a><a id="Tc_oki4AAtWDE-SZNzSGn5wlQ_3_12"></a><a id="Tc_sn4tFBf6UkmmzqtNPNGXpg_4_0"></a><a id="Tc_WbxSgTr8B06X1rdEglkURQ_4_3"></a><a id="Tc_zvZl1GfibkK0cRpuoB_8sA_5_0"></a><a id="Tc_0-eMVy2WL0i1uYoSYKXhFQ_5_1"></a><a id="Tc_98zebaDyaUenksJJWDfNCw_5_3"></a><a id="Tc_qgmjLTOOq0Gevnn_8EjcwQ_5_6"></a><a id="Tc_neRzs6O7WEC1HpnOF4Q8jA_5_9"></a><a id="Tc_x0aL5H3gY0Cj8opbYqpJ0A_5_12"></a><a id="Tc_8FBDgsTIlku8QM6BRadYFw_6_0"></a><a id="Tc_LPoBQbUawk-z_LmhCdetCA_6_1"></a><a id="Tc_4szb6MhaEE-NFEWgHMsRmg_7_0"></a><a id="Tc_ST-PF2_nwEWO3XVCctrpLA_7_1"></a><a id="Tc_8LZZ-fQJgE-n7kzDyYr91w_8_0"></a><a id="Tc_S4Jt_0mIBkyN6qRw9C0o0g_8_1"></a><a id="Tc_KaTM0Q4CvUeOhb85TmMGag_9_0"></a><a id="Tc_DxWIu1VC3E6QaI3eQJT7Ug_9_3"></a><a id="Tc_vV01H2KxaUy9BrEdayINsQ_9_6"></a><a id="Tc_iHLS2Cvqi0mK7ZI10y7DXg_9_9"></a><a id="Tc_HqP9Hp3Sa0OAsHR5TVQPeA_9_12"></a><a id="Tc_IdK7N3ghq0Gxw2wAHUIu9A_10_0"></a><a id="Tc_-1CaSa_bR0ytZSuE6xJj0g_11_0"></a><a id="Tc_idoRTBIAXEyArkINzr5ISQ_11_1"></a><a id="Tc_Hve-8cocLEySJ2dqVi_MkA_11_3"></a><a id="Tc_wcJb3V9uhE6EY2mFY2Jylg_11_6"></a><a id="Tc_4nhT6n3Up0-HlXz3QWL6bA_11_9"></a><a id="Tc_S7ib0oYhSUuf35OU6y4liA_11_12"></a><a id="Tc_C8-uFIKDXkWJ1a2iZX8DFw_12_0"></a><a id="Tc_k4j6XXmF0kKYoLoB4LRSGQ_12_1"></a><a id="Tc_QDjWI8eb-Ea8PRYfo1UHnQ_13_0"></a><a id="Tc_CLqFkn70jkypnEK_eMXu1w_13_3"></a><a id="Tc_J_dn9-Jt8U6D7FoHf5C8Kw_13_6"></a><a id="Tc_K3Gyog1hJ0Wr_Yn6QcxPiA_13_9"></a><a id="Tc_qcv72XGiD0-o5Qyfzd_WGg_13_12"></a><a id="Tc_-stAaVhG_UOvsyNZS5yC1A_15_0"></a><a id="Tc_K_-0P4F04Um5qdmhOsaKWg_15_3"></a><a id="Tc_sQxnEB0yPUaK8EUl0LsNxg_15_6"></a><a id="Tc_lZUx8poWyEeq8sQnuI_Htg_15_9"></a><a id="Tc_Q00O2vftIkWHiyEj-dTqkw_15_12"></a><a id="Tc_L23ngVPITUeAsTxaJyXTLQ_17_0"></a><a id="_9e9f66e6_08f1_406a_82bb_1d6cee3fdc81"></a><a id="Tc_D1w3Dfj_h02QxEoV8mDTLw_1_2"></a><a id="Tc__sMSULees0a3saoBoDZh7g_1_5"></a><a id="Tc_bGH0b4tQCUCIZ-MvBG3WGw_1_8"></a><a id="Tc_MgTZs1Rn6UmWQ7YogzIiKQ_2_0"></a><a id="Tc_sySh7xIHt0WzUaFrLFzPkA_2_2"></a><a id="Tc_59AjdLe3tkOgJdKIWw609g_2_5"></a><a id="Tc_a9emCMsC40GJ6NPL7qZ9fQ_2_8"></a><a id="Tc_x2XyMUp1NkWsCS9KvbW2Kg_3_2"></a><a id="Tc_WFA7zmzJCka9USw02EWWLg_4_0"></a><a id="Tc_3SbENlFg_kKL62axUUzBKg_4_2"></a><a id="Tc_BObuWO12cEOzCu7mRMKamA_4_5"></a><a id="Tc_d7IyYt8-mUamRv9E56OB6A_4_8"></a><a id="Tc_3KH7io3tHkeLjhqhZ8BS2w_5_0"></a><a id="Tc_2k_pxIMJvEKDrtliztS2Yg_6_0"></a><a id="Tc_F9M-9XGyDk-44hWbN_h2ig_7_0"></a><a id="Tc_sNIUoaMLVkuE_r9comaW0w_8_0"></a><a id="Tc_4FG0DlM5T06Zrs013THAUQ_9_0"></a><a id="Tc_Y56KSZumVEOrSiKLCsE3Yg_10_0"></a><a id="Tc_iOybQNGe_Ue3sghEJj_NZw_10_2"></a><a id="Tc_3qMtfEuP_0CQ2vACnDgTJw_10_5"></a><a id="Tc_JPnWFpsTe0i-3OWVevvAmA_10_8"></a><a id="Tc_MkKLJz9Ae0qPtWSEzOyM9w_11_0"></a><a id="Tc_9RHtBf9DDU-DaYA_dQc0ew_12_0"></a><a id="Tc_FwCMzyVieECN3BATtJzE9A_12_2"></a><a id="Tc_J8j9W_NKnEmzJEW2MTjvOQ_12_5"></a><a id="Tc_5Qw3Xwjvt0yAfAFsjamSnA_12_8"></a><a id="Tc_wGmnF-VVWECv05JaVllOEg_14_0"></a><ix:continuation id="Tb_JQhv96fEJkaSfRWAq5n2LA_cont1" continuedAt="Tb_JQhv96fEJkaSfRWAq5n2LA_cont2"><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="us-gaap:LeaseCostTableTextBlock" id="Tb_T3NPfUs9n0yFPx64AY4C_Q" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.07;margin:0pt 0pt 0pt 36pt;"><span style="font-size:5pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:17.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Three months ended  </b></p></td><td style="vertical-align:bottom;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:14.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:17.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:14.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:39.69%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><b style="font-weight:bold;">Lease cost</b></p></td><td style="vertical-align:bottom;width:22.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Classification</b></p></td><td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="16" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Operating lease cost</b></p></td><td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:33.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Service</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Cost of revenue</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_ServiceMember_FSj452F2NkW_cwGShJp-8g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_8QVZL7oBcEiKtmfJ1Jgntg_5_4">644</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_ServiceMember_DNcIBesDR0WAx8tJpfZeAw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_1vPnxwJ0bkWzQ76L9qUz2Q_5_7">624</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_ServiceMember_0BYdpgalq0qBObRVNMEYrg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_XmkJg8w8HUWVHQQPQglVxw_5_10">1,283</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_ServiceMember_LJCz9i16REm6mYOfTQTJFQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_mtKqOpEe3USS0KwW1rZyDw_5_13">1,174</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Research and development</p></td><td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating expenses</p></td><td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_UOAsZKMKtkuyCOTrcaa_JA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc__IlalhqCzkSO0LW3mrtKaA_6_4">122</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_bOdIPKEt_UOYlnABbTs6dQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_HnzVzmsNvU6sQj0HXYb4Zw_6_7">128</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember__Wm4NbhGzkG8JA-3yNvkww" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_hUc4x8KPaEyusltpBHXLNw_6_10">252</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_EnJPApftgku3_AVQt4IeFg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_3oSj2LlhvEWqts8LgrcEsA_6_13">209</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Sales and marketing*</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating expenses</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingAndMarketingExpenseMember_LhPsuVd2s0mQm7i1GpW9DA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_gdG6jsyJxUSvnO1EKMorZw_7_4">376</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingAndMarketingExpenseMember_3WMIF-t1m0Od_EYdIVUqxA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_bIw6hFuzQ0mCJ0Jys41Gug_7_7">346</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingAndMarketingExpenseMember_ekhbGo7f0km2QXJUas_27w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_KdY_mbHRIUy0GKeBxexP4A_7_10">755</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingAndMarketingExpenseMember_Ip8jAZUCB0KJaalGOwu0eQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_JesblnipfE6W5E4cBzkb3w_7_13">678</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">General and administrative*</p></td><td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating expenses</p></td><td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_GeneralAndAdministrativeExpenseMember_G38viKXzTE6J8aNCkxOzig" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_PeBQxKOso02VG56Uv7KMxg_8_4">201</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_GeneralAndAdministrativeExpenseMember_SzbRC-XIQUe2J4Q3ZQI7Lg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_4RHST4MsVkml9uIVwfdXvQ_8_7">220</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_GeneralAndAdministrativeExpenseMember_M2eZ4S3rhU2T52988OgStg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_zbNuXsVNA0GngyJ5AC2Z_A_8_10">461</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_GeneralAndAdministrativeExpenseMember_P-YXIVTwzUSUiO77F6K2Fg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_DpBE6HZ-xE-AgOS2-c_Knw_8_13">435</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Total operating lease cost</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.52%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_yzrSz4knGkyMoOhqUUxSWQ_9_4">1,343</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_T5MzIg0c00OS07qowB_UPA_9_7">1,318</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_vqP9V6VVmUiycd1Onfu4tg_9_10">2,751</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseCost" scale="3" id="Tc_669bBcf5ok2gZAe4Uk_DQw_9_13">2,496</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Finance lease cost</b></p></td><td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Depreciation of leased assets</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Cost of revenue, R&amp;D, Sales and marketing and G&amp;A</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseRightOfUseAssetAmortization" scale="3" id="Tc_djdOfilzaEGk9Nazw9qFWA_11_4">328</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseRightOfUseAssetAmortization" scale="3" id="Tc_hfWNqUEoIE2ZBf4R096VKA_11_7">328</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseRightOfUseAssetAmortization" scale="3" id="Tc_F5ldxO2kf0yUCX8LhCq5dg_11_10">656</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseRightOfUseAssetAmortization" scale="3" id="Tc_B-mbgz1_Q0OVc6NA9Z9AVA_11_13">681</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Interest on lease liabilities</p></td><td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Interest expense</p></td><td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseInterestExpense" scale="3" id="Tc_Tom5hu036UaT-0HtpzuE5g_12_4">1,274</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseInterestExpense" scale="3" id="Tc_N5qXZnXcvES64lPp2yVjPA_12_7">1,299</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseInterestExpense" scale="3" id="Tc_Cf8kiVrpfUKCuNuwsC5h-w_12_10">2,553</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseInterestExpense" scale="3" id="Tc_e1kGRmTmXUuP54HtfLbMSg_12_13">2,602</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Total finance lease cost</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.52%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="acls:FinanceLeaseCost" scale="3" id="Tc_3fVxksCJP0SFHdUCoUNmEA_13_4">1,602</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="acls:FinanceLeaseCost" scale="3" id="Tc_DXri41Q2fkWaZqSyxW9nbw_13_7">1,627</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="acls:FinanceLeaseCost" scale="3" id="Tc_l7oMM6nk60iBqlW26QFuFw_13_10">3,209</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="acls:FinanceLeaseCost" scale="3" id="Tc_Ao4I3Nffp0qJ7frfn8Hv5g_13_13">3,283</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Total lease cost</b></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.52%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LeaseCost" scale="3" id="Tc_5Z8FbXDY9k2N3tyfXy3V7Q_15_4">2,945</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LeaseCost" scale="3" id="Tc_EU2mECOBekWykSGWHJb2oQ_15_7">2,945</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LeaseCost" scale="3" id="Tc_LX-oXQP1QEq2Oodw5bt3CA_15_10">5,960</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LeaseCost" scale="3" id="Tc_5ZsXLX_fFEGIIqNSnhaT9g_15_13">5,779</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td colspan="14" style="vertical-align:bottom;width:97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">* Sales and marketing and general and administrative expense also includes short-term lease and variable lease costs of approximately $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-5" format="ixt:numdotdecimal" name="acls:ShortTermAndVariableLeaseCost" scale="6" id="Narr_VjBxgtTGD0mYZ_KT_kkjeA">0.4</ix:nonFraction> million and $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-5" format="ixt:numdotdecimal" name="acls:ShortTermAndVariableLeaseCost" scale="6" id="Narr_xanLbgAtqESTsWB7zUmwGw">0.9</ix:nonFraction> million for the three and six months ended June 30, 2021, respectively, and includes short-term and variable lease costs of approximately $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-5" format="ixt:numdotdecimal" name="acls:ShortTermAndVariableLeaseCost" scale="6" id="Narr_qGLRvz06rkSCH_AIt7TByA">0.3</ix:nonFraction> million and $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-5" format="ixt:numdotdecimal" name="acls:ShortTermAndVariableLeaseCost" scale="6" id="Narr_Gw0jSKaHuUqMzCYEFZFJHA">0.5</ix:nonFraction> million for the three and six months ended June 30, 2020, respectively.</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">  </span><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="display:inline-block;text-indent:0pt;width:36pt;"></span>The lease of our corporate headquarters, shown below under finance leases, had an original lease term of <ix:nonNumeric contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" format="ixt-sec:durwordsen" name="us-gaap:LesseeFinanceLeaseTermOfContract1" id="Narr_yiMF-6R2GUWgYVXp2-Homw">22 years</ix:nonNumeric>, beginning in January 2015. All other locations are treated as operating leases, with lease terms ranging from <span style="-sec-ix-hidden:Hidden_92crWef4lkGqNHzmJbisQA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">1</span></span> to <ix:nonNumeric contextRef="As_Of_6_30_2021_srt_RangeAxis_srt_MaximumMember_DwErj1lpCkWn0mWzw3VRWw" format="ixt-sec:durwordsen" name="us-gaap:LesseeOperatingLeaseTermOfContract" id="Narr_HQmiGnXAL02ok_tyyltKvA">10 years</ix:nonNumeric>. The tables below reflect the minimum cash outflow regarding our current lease obligations as well as the weighted-average remaining lease term and weighted-average discount rates used in our calculation of our lease obligations and right-of-use assets as of June 30, 2021: </p><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="acls:OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock" id="Tb_U3K7ei_RIEyZQkHoucP6iA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Finance</b></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Operating</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:64.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Maturity of Lease Liabilities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Leases</b></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Leases</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Leases</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">2021</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityPaymentsRemainderOfFiscalYear" scale="3" id="Tc_1wW4U5as5k2-A4x0iwthGw_4_3">2,929</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseLiabilityPaymentsRemainderOfFiscalYear" scale="3" id="Tc_pnSGlicD2UG2ZpM_CK1SIQ_4_6">1,827</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsRemainderOfFiscalYear" scale="3" id="Tc_6v1Ll2inTkKy745ggUk4Ow_4_9">4,756</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">2022</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityPaymentsDueNextTwelveMonths" scale="3" id="Tc_GtoKGLYUt0SNrt-2giafUg_5_3">5,980</ix:nonFraction></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" scale="3" id="Tc_jrO1SYTZEUmJfGqussK0oA_5_6">3,053</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths" scale="3" id="Tc_8Bpyj10xx0KT82Ni093_CA_5_9">9,033</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">2023</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityPaymentsDueYearTwo" scale="3" id="Tc_yp2oD0kZmEydyYMB-Y6W3Q_6_3">6,114</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" scale="3" id="Tc_gkJfeehHTUi8C-J-sGDZlg_6_6">1,544</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo" scale="3" id="Tc_S6roCNDvuEeuH3W7W36hgw_6_9">7,658</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">2024</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityPaymentsDueYearThree" scale="3" id="Tc_GWYsqI_sd0u-fWnZ2Lq3yw_7_3">6,252</ix:nonFraction></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearThree" scale="3" id="Tc_lPCeDmwD0UKb5T55-tXX4w_7_6">794</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree" scale="3" id="Tc_RQ3o0Q74z0-YoobO3MAM5w_7_9">7,046</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">2025</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityPaymentsDueYearFour" scale="3" id="Tc_eOOwGT2Az0CMylgKaaYlcA_8_3">5,930</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearFour" scale="3" id="Tc_AjQYcvwJuUuWn-y6rEbaug_8_6">712</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour" scale="3" id="Tc_7uk2vgkPMka44WzJvKAmIA_8_9">6,642</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Thereafter</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="acls:FinanceLeaseLiabilityPaymentsDueAfterYearFour" scale="3" id="Tc_gPwsttFHeE-BZapHu82sDA_9_3">73,723</ix:nonFraction></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="acls:LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour" scale="3" id="Tc_Z4LBK_XH0Eab_5vXI_lVYA_9_6">545</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFour" scale="3" id="Tc_8Zyt0PBJyk2bzlvz-NOoKQ_9_9">74,268</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Total lease payments</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityPaymentsDue" scale="3" id="Tc_a9XczoDsq0mkrbVOE_55jA_10_3">100,928</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseLiabilityPaymentsDue" scale="3" id="Tc_G1Eh4TRKIE-YSbrIAldqfw_10_6">8,475</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" scale="3" id="Tc_8rjgDZUujkSrP-THqVukxQ_10_9">109,403</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Less interest portion*</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityUndiscountedExcessAmount" scale="3" id="Tc_gNkzSMoNxEGgY1wOxWikYw_11_3">53,141</ix:nonFraction>)</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" scale="3" id="Tc_WEK9pYyWakqzG-dqvEn7Ig_11_6">862</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="acls:LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount" scale="3" id="Tc_O4_0CRdDXk6llJswg8Rf5Q_11_9">54,003</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance lease and operating lease obligations</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiability" scale="3" id="Tc_HgikyzmarkmspCtkquNNew_12_3">47,787</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseLiability" scale="3" id="Tc_TU0B2kJ_PEmG1hK-eTsNtQ_12_6">7,613</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="acls:OperatingAndFinanceLeaseLiability" scale="3" id="Tc_Hao_YVkdskWnnYsPGhzfSA_12_9">55,400</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td colspan="10" style="vertical-align:bottom;width:98.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">* Finance lease interest calculated using the implied interest rate; operating lease interest calculated using estimated corporate borrowing rate.</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr></table></ix:nonNumeric><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="acls:LeaseQuantitativeDisclosureTableTextBlock" id="Tb_zAWxIATsWkCHwsaxvVURwg" continuedAt="Tb_zAWxIATsWkCHwsaxvVURwg_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></ix:nonNumeric></ix:continuation></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">10</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="margin-top:21.6pt;min-height:36pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 30pt 0pt;"><a href="#Toc"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_UZJmFMhzY0q0XjPlH92AtA_1_2"></a><a id="Tc_fskjOFRFgESSPCru_mfVPg_2_0"></a><a id="Tc_aPmpJ1AabESJ64w5bupyeg_2_2"></a><a id="Tc_LQP8_EnA8EihSIkKyu1n2g_3_0"></a><a id="Tc_vYpZPRpO9UCjuEFBzA_JCg_4_0"></a><a id="Tc_IlJq8TajNEWJvv6rS-zqng_5_0"></a><a id="Tc_3yJN2HroFkyJ3hnFQ74OSg_6_0"></a><a id="Tc_h3bV7nNq7kCp3HEQKyPmAw_7_0"></a><a id="Tc_BFnFi67viEu_9qH3crcJsQ_8_0"></a><a id="Tc_sH6pdWztQEyTBtGR0fDn7w_1_2"></a><a id="Tc_wDVWpivyc06z-_KWSDT6RQ_2_2"></a><a id="Tc_zLzi_SbaKEqJiiOFE2shgQ_3_0"></a><a id="Tc_3K1B2CgYtUWAI5A4EDHEOw_3_2"></a><a id="Tc_ojrthi6Ltk6tnQEzPH5eJQ_3_5"></a><a id="Tc_f_3AVPbAVEmXSbXh0LGRWw_4_2"></a><a id="Tc_KQA7a7qTak6vu9OCbHXcsw_5_0"></a><a id="Tc_y9cdWphTMUmiq0iP-y4HsQ_5_2"></a><a id="Tc_egWFyUIhm0msWy82ANK8uw_5_5"></a><a id="Tc_oeNKds7oYUC8DPb9XRumQw_6_0"></a><a id="Tc_BrMfSoQGKEiGawwDs7bGcw_7_0"></a><a id="Tc_uYezqqMg_kuvaEytxfLXMw_8_0"></a><a id="Tc_RjWdlHjvuUqHOrQWp-uxLg_9_0"></a><a id="Tc_SqbejXf9_ki5PcKWz6oBJQ_9_2"></a><a id="Tc_ME7fy6q01067NK2AJBfPnw_9_3"></a><a id="Tc_-_RDRM5uQkyru3gj4WlP8A_9_5"></a><a id="Tc_1WDn6Do3J06mYYTmb7T10w_9_6"></a><ix:continuation id="Tb_JQhv96fEJkaSfRWAq5n2LA_cont2"><ix:continuation id="Tb_zAWxIATsWkCHwsaxvVURwg_cont1"><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:14.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><b style="font-weight:bold;">Lease term and discount rate</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Weighted-average remaining lease term (years):</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating leases</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" format="ixt-sec:duryear" name="us-gaap:OperatingLeaseWeightedAverageRemainingLeaseTerm1" id="Tc_9SO74HBq80CW8CsnOiq3Kw_4_3"><span style="font-size:8pt;">3.0</span></ix:nonNumeric></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><ix:nonNumeric contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" format="ixt-sec:duryear" name="us-gaap:FinanceLeaseWeightedAverageRemainingLeaseTerm1" id="Tc_aOHsvyxPSkGi_hAZ9FXFkQ_5_3"><span style="font-size:8pt;">15.6</span></ix:nonNumeric></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Weighted-average discount rate:</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><ix:nonFraction unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeaseWeightedAverageDiscountRatePercent" scale="-2" id="Tc_0q3pe29QHEuTqMSjAg_epA_7_3">4.5</ix:nonFraction>%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance leases</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><ix:nonFraction unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseWeightedAverageDiscountRatePercent" scale="-2" id="Tc_olkVldL4VEGI9F9nBw0j9w_8_3">10.5</ix:nonFraction>%</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr></table></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="display:inline-block;text-indent:0pt;width:36pt;"></span>Our cash outflows from our operating leases include rent expense and other charges associated with these leases. These cash flows are included within the operating activities section of our statement of cash flows. Our cash flows from our finance lease include both an interest component and payment of principal component. The table below shows our cash outflows, by lease type and related section of our statement of cash flows, as well as the non-cash amount capitalized on our balance sheet in relation to our operating lease right-of-use assets for the six months ending June 30, 2021 and 2020, respectively:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="acls:LeaseCashFlowInformationDisclosureTableTextBlock" id="Tb_xaK9QdSrXke8b6cmjYnDSA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:26.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:26.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><b style="font-weight:bold;">Cash paid for amounts included in the measurement of lease liabilities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.91%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:26.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating cash outflows from operating leases</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeasePayments" scale="3" id="Tc_apgCCnAldEydYD-houve4w_5_3">2,751</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OperatingLeasePayments" scale="3" id="Tc_waOSc_6tEUy0qEXnk8pDoQ_5_6">2,496</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating cash outflows from finance leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseInterestPaymentOnLiability" scale="3" id="Tc_X8X-8m7jxEyLVcnaZ1E-FQ_6_3">2,556</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseInterestPaymentOnLiability" scale="3" id="Tc_6WEq0tICYEq6qqehkx-1yw_6_6">2,746</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Financing cash outflows from finance leases</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeasePrincipalPayments" scale="3" id="Tc_PX7Suv9unku2PPsLNFsRNw_7_3">362</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:FinanceLeasePrincipalPayments" scale="3" id="Tc_0DXWNGOur0-_dR9IdNipvA_7_6">108</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating lease assets obtained in exchange for operating lease liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability" scale="3" id="Tc_Ow9OyeWbMUWYIpvFQQN2YA_8_3">4,192</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability" scale="3" id="Tc_dQz_AD5E10CcucZNiy9yuw_8_6">1,038</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance lease assets obtained in exchange for new finance lease liabilities</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p><a id="Tc_gCzaY11ZQU2KZF_hJMxtSQ_1_2"></a><a id="Tc_82O1XLp68kK1Hi4QfJ3dQA_1_8"></a><a id="Tc_OgXnhbfN0EiQdAuzFZpYwg_2_2"></a><a id="Tc_lzUxvpJsKU23CjnOHjTDvQ_2_8"></a><a id="Tc_Hfkmd63d7Ua7HpjJW-G_lw_3_2"></a><a id="Tc_XT8tR8FxTEqOmFGg05onWQ_3_5"></a><a id="Tc_mKQmhQNhNkuv-_wtV6qm_g_3_8"></a><a id="Tc_eIjAqWJopUe3j_DKCFIKww_3_11"></a><a id="Tc_hGsMuiJS6E2uv0jIak-YgA_4_2"></a><a id="Tc_C0aP3kBd1Ey377YoSnkGrg_5_0"></a><a id="Tc_TJ-atGV0cUa7_sJsA25YTA_5_2"></a><a id="Tc_QMB2zYtQ3Um-rhSz7lAnfw_5_5"></a><a id="Tc_ciVhU098mEuG5RfHwVMIMw_5_8"></a><a id="Tc_NsIFQ0njZUeZfXEZ5aCXlA_5_11"></a><a id="Tc_KFudzGQ3GkKGtzQQD6oxCg_6_0"></a><a id="Tc_idtUI398Mk61OXCrydZj2w_7_0"></a><a id="Tc_BMdz00MMpEWJAFXrnrO5Vg_7_2"></a><a id="Tc_hqC6rSeZikOOBxcCU7ZD9w_7_5"></a><a id="Tc_mady6WaOWUaX2U_xVnykqA_7_8"></a><a id="Tc_euXq-Hw-xUaZEvC5OsnCRA_7_11"></a><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="us-gaap:RevenueFromContractWithCustomerTextBlock" id="Tb_A6E70765XEipHB-WFWa2Dg" continuedAt="Tb_A6E70765XEipHB-WFWa2Dg_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Note 4.  Revenue</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="display:inline-block;text-indent:0pt;width:36pt;"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;text-align:left;"> </b></span>To reflect the organization of our business operations, we divide revenue into two categories: revenue from sales of new systems and revenue arising from the sale of used systems, parts and labor to customers who own systems, which we refer to as &#8220;Aftermarket.&#8221;</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="display:inline-block;text-indent:0pt;width:36pt;"></span>Revenue by categories used by management are as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="acls:RevenueFromExternalCustomersByDisciplineAreasTableTextBlock" id="Tb_17fu3APKY0KeprOweiQ4Fw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100.52%;"><tr style="height:1pt;"><td style="vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:24.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Three months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:27.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:24.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:27.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:53.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Systems</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_CIEelAIbeEuWRJlD5jK5vw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_X4xwdOMIBU-26ydqGfLuhA_5_3">100,138</ix:nonFraction> </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_QLowhise_EWfbCxHfpYWhQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_ELeSNLOmP06sOBZSMS_Z8w_5_6">76,815</ix:nonFraction> </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_fPmnjFnuFEeqgfLBIms0Xg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_UVAqqsYXz06DQvJasRhQCQ_5_9">181,129</ix:nonFraction> </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_aqASi6Lgl0y688FqkLnekg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_4cg3aLLkyEmf-iLIGSrvaA_5_12">159,152</ix:nonFraction> </p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Aftermarket</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_CsIOrAftermarketMember_aeBeVeoQykSPdY4ivJP6HA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_1v7SUSIKZEKwy1s6Y8E5rw_6_3">47,136</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_acls_CsIOrAftermarketMember_a2NOCaAuIUSxTOjbsCuaOA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_KRrsYIdkhk-4I3aNweUg0w_6_6">46,150</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_CsIOrAftermarketMember_TicKoU9nx0Wjl559v7_68A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_a983Wt19F02KEKL-O5fjCA_6_9">98,921</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_acls_CsIOrAftermarketMember_WVc5IdW6PECXChKAn2jwNw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_PubmJECc0kiDA171j2GprA_6_12">82,804</ix:nonFraction></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Total Revenue</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_jnwoMRlJCEuU_Hzthgqc5w_7_3">147,274</ix:nonFraction> </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc__sWcdrOaLU6AZUL00iZwVA_7_6">122,965</ix:nonFraction> </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.16%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_eww1uL8xikmMBMsJMVIsJA_7_9">280,050</ix:nonFraction> </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_ruVMbzgOvUGJqOgAuG9W2g_7_12">241,956</ix:nonFraction> </p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="display:inline-block;text-indent:0pt;width:36pt;"></span>We also consider revenue by geography. Revenue is allocated to geographic markets based upon the location to which our products are shipped and in which our services are performed. Revenue in our principal geographic markets is as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="us-gaap:RevenueFromExternalCustomersByGeographicAreasTableTextBlock" id="Tb_TtKCZ6omOUaVn7lfwBCrOA" continuedAt="Tb_TtKCZ6omOUaVn7lfwBCrOA_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></ix:nonNumeric></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">11</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="margin-top:21.6pt;min-height:36pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 30pt 0pt;"><a href="#Toc"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_Cn1RzNsgiEuXz2xg7PRJEw_1_2"></a><a id="Tc_4j9Wmx0TuEGtssGFVsNp7g_1_8"></a><a id="Tc_NAbiLARVUUekRUCVgHJTzQ_2_2"></a><a id="Tc_6l_51WU-gEaEbAvz5IIoXA_2_8"></a><a id="Tc_2MhBpNKY_E-yLuKleuC3Wg_3_2"></a><a id="Tc_WjHtuVSTH0abQ_L35U4R0g_3_5"></a><a id="Tc_bwO3Gp4bjUKG_ZqEaig-jA_3_8"></a><a id="Tc_iu-6GwKuCU-aC5jLvPqvTA_3_11"></a><a id="Tc_skFFCZmwmUuM_PDNEoO-tg_4_2"></a><a id="Tc_nIn3KpAz5UavZbumpNrxLQ_5_0"></a><a id="Tc_xn6DU3OKokqHppHHBDLMnA_5_2"></a><a id="Tc_XCf4AEko8UGD48rMcKgLNQ_5_5"></a><a id="Tc_CRJCdOJl3UW9nbeJqQOsvQ_5_8"></a><a id="Tc_TkgwdDbQyk2c3j-7u9yxjA_5_11"></a><a id="Tc_ggQn4WYiCkqJi39BENtHbQ_6_0"></a><a id="Tc_10vXIYV_d02OF39mNaacKw_7_0"></a><a id="Tc_I-d38kFmZUW55J5O8HvALg_8_0"></a><a id="Tc_VINI3Ah86Euu1yBuvgjIXg_8_2"></a><a id="Tc_mFvEi80Zv06K-23akZXkvQ_8_5"></a><a id="Tc_1K8Zdfh2m0aU5dby-k-sPw_8_8"></a><a id="Tc_U1J52AlGbUeKFQL4igHwbw_8_11"></a><a id="_7247dc7e_7639_47af_a371_764497dc934b"></a><a id="Tc_jpsjteSPz0K2JUJg_vDiCQ_1_2"></a><a id="Tc_w0ZcolSfX0Weqnnet_2D_A_1_5"></a><a id="Tc_sp9MK-afjk-k7kn3qGtAvw_2_2"></a><a id="Tc_woH3auNBNEaM3zPDdkC6Sw_2_5"></a><a id="Tc_VatgxJ6ECEOrn1WtG1oxOQ_3_2"></a><a id="Tc_G8OE_N2mbEyU4IXsUJhXhA_4_0"></a><a id="Tc_rOCh7Z-ddkiUKhON1eKVEg_4_2"></a><a id="Tc_CWS6elsrSEyZL-5TaZBoyQ_4_5"></a><a id="_2e5a57d7_0637_4587_9f1d_d030f2861869"></a><a id="Tc_Td0APdHzjEGufnQbAxBytQ_1_2"></a><a id="Tc__ipV2aNdIkieZcmLW_J5vQ_1_8"></a><a id="Tc_-GLb5UgQhk2jJwNUIwc6sQ_2_2"></a><a id="Tc_BDMr_Qt1eUSMJ-RSkb74ag_2_8"></a><a id="Tc_rlagXKhTakiaZ9MIHQiHrw_3_2"></a><a id="Tc_Ai2gQoR_ME2I3YXc2Yu7Dg_3_5"></a><a id="Tc_sLnT-eM_Rkq5E6PKq2Pd5Q_3_8"></a><a id="Tc_XxJr1y_3i0eNGt82GagdmQ_3_11"></a><a id="Tc_VxQLohsrF0e6JS41kOmwNA_4_2"></a><a id="Tc_vY1PrPG3h0-Y9dH1L9TQ9w_5_0"></a><a id="Tc_JbF0O_-GoEGRU8V2bKUhjA_5_2"></a><a id="Tc_QXD4oEygNE2wfjklM0T0dA_5_5"></a><a id="Tc_lVI5UJfC302XC9uImQtjlw_5_8"></a><a id="Tc_SC18DLGC50GYWKTLLgfQRg_5_11"></a><a id="Tc_zmtnYh8srUCtvn_AZqSu9g_6_0"></a><a id="Tc_-lBkVdUmJU2rrJZtS4buLw_7_0"></a><a id="Tc_k-P3Gi74SkeXiE2Zq1YWeg_8_0"></a><a id="Tc_Nthu9qbrrUqNW52J7-xhIg_8_2"></a><a id="Tc_krL4R1VWj0mPcB9elhfD7A_8_5"></a><a id="Tc_0vN3PhvCWEG46Je7CyZp2g_8_8"></a><a id="Tc_zyoHHPJaKkSbI0HPamxUWg_8_11"></a><ix:continuation id="Tb_A6E70765XEipHB-WFWa2Dg_cont1"><ix:continuation id="Tb_TtKCZ6omOUaVn7lfwBCrOA_cont1"><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:22.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Three months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:21.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:22.63%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:21.8%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:45.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">North America </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_srt_StatementGeographicalAxis_srt_NorthAmericaMember_NEOMdVsPLEyRJ4bIQ1Fqkg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_pI5jJs-0yUCWUIYSx6Vzjg_5_3">10,204</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_srt_StatementGeographicalAxis_srt_NorthAmericaMember_3ltgpALfo0OIvGrA9bu5eA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_FNXduIGXuUSdYQw0zaICVA_5_6">8,915</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_srt_StatementGeographicalAxis_srt_NorthAmericaMember_WMOuVFAHXEu4snTEayMOpA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_JPefzwbKqUeIJJNTqBWRtA_5_9">19,712</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_srt_StatementGeographicalAxis_srt_NorthAmericaMember_HAn6Qh15rkatbPxF72mX2Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_tKD2VF5gT0u43sVcpabSRg_5_12">19,576</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Asia Pacific</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_srt_StatementGeographicalAxis_srt_AsiaMember_D8-EjbAdWUGp9d6taxPD_g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_7FPHKsawmEqlTEozU9ztyw_6_3">116,642</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_srt_StatementGeographicalAxis_srt_AsiaMember_sWwca1JA_UemYMycl1F-lQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_6HLYw67HZ0WHhNqosJYLhA_6_6">106,604</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_srt_StatementGeographicalAxis_srt_AsiaMember_jqdlc7_0s0Kz1yRqcL8iUg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_83qoA6ZClECbGZ2VV1SdCQ_6_9">220,033</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_srt_StatementGeographicalAxis_srt_AsiaMember_gGOkoCkXY0ODg73v1ZDa2Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_Q4yNG2aneUCrJGSS3jhkOw_6_12">203,432</ix:nonFraction></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Europe</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_srt_StatementGeographicalAxis_srt_EuropeMember_VFQ0RtdcrEasegSfJlNWWQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_7KiUsvJ2EUWq7Uo3AmWehA_7_3">20,428</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_srt_StatementGeographicalAxis_srt_EuropeMember_mSKgEEjdw0KK9jbwnggJiA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_LjtIo9J9DkunMvE4aj92ow_7_6">7,446</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_srt_StatementGeographicalAxis_srt_EuropeMember_7aYEOIYHd06aUpdNgdi5KA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_a5aIbyUC8kGyjfX2hNMerQ_7_9">40,305</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_srt_StatementGeographicalAxis_srt_EuropeMember_brKP66xXNEmuH9-_Iz3PNA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_xjtYQo0XJUWKQX_18ZxAtw_7_12">18,948</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Total Revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_vnnHrq7DyEuNEUu6Rj--dw_8_3">147,274</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_qqBiNsfQNESQ5lCDhrw-AA_8_6">122,965</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_04FaH2J_zEaK6EdSyMvPPQ_8_9">280,050</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax" scale="3" id="Tc_L0SHuqwpbUG7M2L971sg7Q_8_12">241,956</ix:nonFraction></p></td></tr></table></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="display:inline-block;text-indent:0pt;width:36pt;"></span>Our system sales revenue transactions give rise to contract liabilities (in the case of pre-payments and the fair value of goods and services to be delivered after the system delivery, such as installation and certain warranty obligations). </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="display:inline-block;text-indent:0pt;width:36pt;"></span>Contract liabilities are as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="us-gaap:ContractWithCustomerAssetAndLiabilityTableTextBlock" id="Tb_HaQtJvvQPUWFHceCFNo6nw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:69.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.85%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.85%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:69.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:69.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:69.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:28.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:69.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Contract liabilities</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:11.85%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiability" scale="3" id="Tc_TepQUoX8yk-FtjvxVPUCsg_4_3">35,518</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:11.85%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiability" scale="3" id="Tc_DXU3NOxB7k-QUb-iZW54Eg_4_6">23,058</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:69.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="display:inline-block;text-indent:0pt;width:36pt;"></span>Contract liabilities are reflected as deferred revenue on the consolidated balance sheet and relate to payments invoiced or received in advance of completion of performance obligations under a contract. Contract liabilities are recognized as revenue upon the fulfillment of performance obligations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="display:inline-block;text-indent:0pt;width:36pt;"></span><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:17.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Three months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:17.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:17.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';">&#160;&#160;&#160;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:17.8%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.14%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:36.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance, beginning of the period</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_3_31_2021_Qs-qxUhDAk-CSx7C4Sn69A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiability" scale="3" id="Tc_DmZ8uDn4_0uYrN68Mt3jaQ_5_3">22,142</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_3_31_2020_-5Cw11QoRE6nHA_ngva07Q" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiability" scale="3" id="Tc_ZhNfaXd1P0Sjo20AIKe1QA_5_6">34,106</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiability" scale="3" id="Tc_W3foHsrobUieNfuunXTQTA_5_9">23,058</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2019_FtHnUOMLjkeW-5RTgMqhrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiability" scale="3" id="Tc_O6JwrBg96kGVLAwQ7l5iaw_5_12">29,251</ix:nonFraction></p></td></tr><tr><td style="vertical-align:bottom;width:62.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">    Deferral of revenue</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="acls:ContractWithCustomerLiabilityDeferralOfRevenue" scale="3" id="Tc_pu9hEqpp3EimWKKtApilhg_6_3">21,893</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="acls:ContractWithCustomerLiabilityDeferralOfRevenue" scale="3" id="Tc__tr7lVja2E6T1lsZgYTS2w_6_6">6,248</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="acls:ContractWithCustomerLiabilityDeferralOfRevenue" scale="3" id="Tc_NJz2tM3a2EWio_uW_Bx9pA_6_9">30,117</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="acls:ContractWithCustomerLiabilityDeferralOfRevenue" scale="3" id="Tc_v0vtwwtINEur7iySMzOQQA_6_12">10,724</ix:nonFraction></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:62.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">    Recognition of deferred revenue</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiabilityRevenueRecognized" sign="-" scale="3" id="Tc_SDfaCltba0CFIZ9Oj1O9gg_7_3">8,517</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiabilityRevenueRecognized" sign="-" scale="3" id="Tc_dw5FJ7HyQUmRCARfYBSnTw_7_6">9,937</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.64%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiabilityRevenueRecognized" sign="-" scale="3" id="Tc_RYyWPXnro0iNsXjKDOUQLg_7_9">17,657</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiabilityRevenueRecognized" sign="-" scale="3" id="Tc_7A-ZlvApkkWSgpGz_acK2A_7_12">9,558</ix:nonFraction>)</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance, end of the period</p></td><td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiability" scale="3" id="Tc_qvw69UKhIkWjBVsHALjhow_8_3">35,518</ix:nonFraction></p></td><td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.89%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2020_vfxHSqwZwkeC1Z0d0SG93A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiability" scale="3" id="Tc_iT3cgvAkl0-EduXDIMwuig_8_6">30,417</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.89%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.64%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiability" scale="3" id="Tc_gLJgMo8TvUKIcY_NtixT4Q_8_9">35,518</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.89%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.2%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2020_vfxHSqwZwkeC1Z0d0SG93A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ContractWithCustomerLiability" scale="3" id="Tc_qglilT_Ut0OO6NRxIFHS6g_8_12">30,417</ix:nonFraction></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="display:inline-block;text-indent:0pt;width:36pt;"></span>The majority of our system transactions have payment terms of <ix:nonFraction unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg" contextRef="Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_fPmnjFnuFEeqgfLBIms0Xg" decimals="2" format="ixt:numdotdecimal" name="acls:PercentageOfPaymentUponShipmentOfTool" scale="-2" id="Narr_SgXnWd1I6UChXpUy-6eUgA">90</ix:nonFraction>% due upon shipment of the tool and <ix:nonFraction unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg" contextRef="Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_fPmnjFnuFEeqgfLBIms0Xg" decimals="2" format="ixt:numdotdecimal" name="acls:PercentageOfPaymentUponInstallation" scale="-2" id="Narr_K6wgVSXojEilnfgOKu_W0A">10</ix:nonFraction>% due upon acceptance. Aftermarket transaction payment terms usually provide that payment is due either within <ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_srt_RangeAxis_srt_MinimumMember_eoI0MHitoEKWWaFv3U4W5w" format="ixt-sec:durday" name="acls:PeriodOfPaymentUponDeliveryOfParts" id="Narr_zjkorV-5zkiG_GIQgr0IWQ">30</ix:nonNumeric> or <ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_srt_RangeAxis_srt_MaximumMember_s_z-Qx9rgU29sO1r_6EnQw" format="ixt-sec:durwordsen" name="acls:PeriodOfPaymentUponDeliveryOfParts" id="Narr_wNRPTLIiUESJx5d839aHww">60 days</ix:nonNumeric> after the service is provided or parts delivered.</p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="us-gaap:LoansNotesTradeAndOtherReceivablesDisclosureTextBlock" id="Tb_q8hmIuwfU0-TMqQLrPhLAA" continuedAt="Tb_q8hmIuwfU0-TMqQLrPhLAA_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;margin:0pt;"><b style="font-weight:bold;">Note 5. </b><b style="font-weight:bold;">Receivables and Allowances for Credit Losses</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">All trade receivables are reported on the Consolidated Balance Sheets at their amortized cost adjusted for any write-offs and net of allowances for credit losses. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Axcelis maintains an allowance for credit losses, which represent an estimate of expected losses over the remaining contractual life of our receivables, considering current market conditions and estimates for supportable forecasts when appropriate. The estimate is a result of the Company&#8217;s ongoing assessments and evaluations of collectability, historical loss experience, and future expectations in estimating credit losses in our receivable portfolio. Axcelis uses historical loss experience rates and applies them to a related aging analysis while also considering customer and/or economic risk where appropriate. Determination of the proper amount of allowances requires management to exercise judgment about the timing, frequency and severity of credit losses that could materially affect the provision for credit losses and, as a result, net earnings. The allowance takes into consideration numerous quantitative and qualitative factors that include receivable type, historical loss experience, loss migration, delinquency trends, collection experience, current economic conditions, estimates for supportable forecasts, when appropriate, and credit risk characteristics. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">12</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="margin-top:21.6pt;min-height:36pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 30pt 0pt;"><a href="#Toc"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_kDNLskSNN0ef7LL7PaPVxg_1_2"></a><a id="Tc_u9iqh4k7lEKqNrn3w8JTeQ_1_8"></a><a id="Tc_kSGTQnOKBU-N2TVYR22hfA_2_2"></a><a id="Tc_YamrgTeZV0ar-S92d1MnjQ_2_8"></a><a id="Tc_WswIStFlukaePla72_44Dg_3_2"></a><a id="Tc_I_Jv_wZxGEypikLYV2A0tw_3_5"></a><a id="Tc_uToaCh5T4Uy42v7zAl04XA_3_8"></a><a id="Tc_3XbUUe1oZU20HENF10cdnQ_3_11"></a><a id="Tc_hXyRJPtu4E2oBnFOdRCzug_4_2"></a><a id="Tc_8QqpR2eYYEC_T3ntcTN3_A_5_0"></a><a id="Tc_a7VZm3hGV0GBB-Y66vgKhA_5_2"></a><a id="Tc_42R7WXdOH0mEW4jdvfw7bw_5_3"></a><a id="Tc_QLw2vwrM0UGyHugr_xp3yw_5_5"></a><a id="Tc_LNxIrtsEOUmGX0mzMEgQ_g_5_6"></a><a id="Tc_jTi9_EBDskmTRDeEYpMmyA_5_8"></a><a id="Tc_m_LGtykf3E2XSdH5vr7aQA_5_9"></a><a id="Tc_WzmcLYHrKESGWHNjgGK3Nw_5_11"></a><a id="Tc_q0ocXZLXCUefZxpHL9Rjcw_6_0"></a><a id="Tc_qbGsELxgnU2Vsg4m5nB77w_6_3"></a><a id="Tc_0UThXFDGB0SNgaRiKURYwg_6_6"></a><a id="Tc_sg4WXCBlR0mHsxOCAxKPig_6_9"></a><a id="Tc_jv5fNrVIq0OWzj1CFVGARw_6_12"></a><a id="Tc_2PO5aEoeaUaiEM7cXS47fA_7_0"></a><a id="Tc_sxnULQDzqEaeaSAaim2Urg_7_3"></a><a id="Tc_YjRAVjoitEG8jV-tOSA4xQ_7_6"></a><a id="Tc_rs5Qt5QDaUeV7HgCa8o_PQ_7_9"></a><a id="Tc_zDW8kUCz5ESrcxxwkHnmTg_8_0"></a><a id="Tc_zZYOeJaDoEWZ64WEuEuLkg_8_3"></a><a id="Tc_Bb16cz4ga0eu_jAIxkKM-A_8_6"></a><a id="Tc_AROkjeGq90aXcjJalD_9iw_8_9"></a><a id="Tc_Sblm3NGg4kSdRWPEgx1qYw_8_12"></a><a id="Tc_UKq8PW5pDUyl7oE0OqaDIA_9_0"></a><a id="Tc_t9Gb5_PA10WW80ZSxNMOFw_9_2"></a><a id="Tc_ZiHkUrWUQ021ewIeWhwZZQ_9_3"></a><a id="Tc_Vo1dlbWgTkO6FZ212zp_nQ_9_5"></a><a id="Tc_xI2NpTKljEyXNyIDc-r_Ag_9_6"></a><a id="Tc_US0MoCsvTE2IjroXhzErmQ_9_8"></a><a id="Tc_KHdtcv3Y3kymeRtng3obKA_9_9"></a><a id="Tc_hY8D5mskhUGbQo2ygCosqg_9_11"></a><a id="Tc_6UvmrWoTTkiJ_QObWYN6sQ_9_12"></a><ix:continuation id="Tb_q8hmIuwfU0-TMqQLrPhLAA_cont1"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Axcelis evaluates the credit risk of the customer when extending credit based on a combination of various financial and qualitative factors that may affect our customers&#8217; ability to pay. These factors may include the customer&#8217;s financial condition, past payment experience, and credit bureau report, as well as the value of the underlying collateral.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Management performs detailed reviews of Axcelis&#8217; receivables on a quarterly basis to assess the adequacy of the allowances and to determine if any impairment has occurred. Amounts determined to be uncollectable are charged directly against the allowances, while amounts recovered on previously written-off accounts increase the allowances. Changes to the allowances for credit losses are maintained through adjustments to the provision for credit losses, which are charged to current period earnings.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The following table shows changes of the allowances for credit losses related to trade receivables for the three and six months ended June 30, 2021 and 2020, respectively:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="us-gaap:AccountsReceivableAllowanceForCreditLossTableTextBlock" id="Tb_84_8WzJhe0m_Ki6kpu8Ejw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:57.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:1.91%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:1.09%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:57.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Three months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td><td style="vertical-align:bottom;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:57.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:18.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:18.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:57.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:8.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:8.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:8.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:8.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="14" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:57.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:38.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:57.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance, beginning of period</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2019_FtHnUOMLjkeW-5RTgMqhrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent" scale="3" id="Tc_18tXZ6GGL0i0GtySJX6Xew_5_12">818</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:57.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">    Provision for credit losses</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:57.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">    Charge-offs</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AllowanceForDoubtfulAccountsReceivableWriteOffs" scale="3" id="Tc_nDRZmyvbzkS8wu_dNTq8YA_7_12">818</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:57.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">    Recoveries</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:57.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance, end of period</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><a id="Tc_zaYRIaTrik-lq3_00l9l4g_1_2"></a><a id="Tc_OysoNsWl60W7fmDn1N_Mzw_1_8"></a><a id="Tc_FsYT75uDEk2-jdfQEWSMlw_2_2"></a><a id="Tc_ACzXlm8OGUGvYIm3RJI00A_2_8"></a><a id="Tc_hRpzu2pPak6vGYIBd9Er3w_3_2"></a><a id="Tc_hHjwy6StCkq-kMEaJnpuGA_3_5"></a><a id="Tc_S3LxhobIWUi8X5O0ueBRxQ_3_8"></a><a id="Tc_czkIklXI3kGYlX_tQheoPg_3_11"></a><a id="Tc_cTPgH_vQWEm0pMFI5WHg2A_4_2"></a><a id="Tc_ZXV06Rp4M0WsfQ4sDwNU-Q_5_0"></a><a id="Tc_Bu24UUAP6k2rMYawxKSRGQ_5_2"></a><a id="Tc_1mnH969GSUybhbCR9lCbDQ_5_5"></a><a id="Tc_gEoNRKo1J06RJ5-idHE5yg_5_8"></a><a id="Tc_qrLdRQJS9k6O8qmhro1Qdg_5_11"></a><a id="Tc_aGuP2k1Md0KVaHfhOVdS6A_6_0"></a><a id="Tc_bFyYUjjrnUOjHgIcG167kQ_7_0"></a><a id="Tc_k5FEEbh_6keHYVOILaT20Q_8_0"></a><a id="Tc_PmvGGF1d1keea5aHpwbRsw_9_0"></a><a id="Tc_omqcr-JuJEC8OBJQqLcZjw_10_0"></a><a id="Tc_9ZqHwPcsgE21DUn4wALuWA_10_2"></a><a id="Tc_BVQ9JTIWrEuF9xpiAwzHTw_10_5"></a><a id="Tc_I3gEcgULo0eXiJMU6OCZ-w_10_8"></a><a id="Tc_DN_MnvTV1E-uA-AooevorQ_10_11"></a><a id="Tc_GmfmJLShbEyjZsAZncjRLQ_11_0"></a><a id="Tc_0AYtLhIOGk2I33bX1cXHfg_11_2"></a><a id="Tc_HcBAPY5ZpUqeCj2Yg9WBIQ_11_5"></a><a id="Tc_jW4JGEk-1EKHqmV8Cc0mtQ_11_8"></a><a id="Tc_othG-4YmMk2bONsPQ3QGFg_11_11"></a><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="us-gaap:EarningsPerShareTextBlock" id="Tb_7mzEgIJFaE6sHXB0Hst7fw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 6.&#160;&#160;Computation of Net Earnings per Share</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Basic earnings per share is computed by dividing income available to common stockholders (the numerator) by the weighted-average number of common shares outstanding (the denominator) for the period. The computation of diluted earnings per share is similar to basic earnings per share, except that the denominator is increased by the number of additional common shares that would have been outstanding if the potentially dilutive common shares issuable on exercise of stock options and vesting of RSUs had been issued, calculated using the treasury stock method. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:27.35pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The components of net earnings per share are as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" id="Tb_giSUWd1z5kqisZpXvfBGRw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:16.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Three months ended  </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:17.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:16.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:17.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.73%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="14" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;width:35.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands, except per share amounts) </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Net income available to common stockholders</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_uR6qA-PbykuEvPVJ6EDyHQ_5_3">18,906</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_DOQrOy3XcEaPCO4gjFiz6g_5_6">13,302</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_ROtpOt97eECJJxmvHKr2cA_5_9">35,386</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic" scale="3" id="Tc_E30_F1R0E0K1ZiBcvvoS-g_5_12">24,523</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Weighted average common shares outstanding used in computing basic income per share</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfSharesOutstandingBasic" scale="3" id="Tc_iKbMpagay02dERcHzW8GIg_6_3">33,677</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfSharesOutstandingBasic" scale="3" id="Tc_ls_N6FOMa0Sg7IilZTKntw_6_6">33,116</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfSharesOutstandingBasic" scale="3" id="Tc_aBXAByAjuEybqcjzhJ7xUA_6_9">33,696</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfSharesOutstandingBasic" scale="3" id="Tc_arDOAXhhxEecx4JXPOnzng_6_12">32,998</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Incremental options and RSUs</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncrementalCommonSharesAttributableToShareBasedPaymentArrangements" scale="3" id="Tc_w9xKmgE1oEWX9igCQWzwRw_7_3">634</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncrementalCommonSharesAttributableToShareBasedPaymentArrangements" scale="3" id="Tc_lM_hbywcyEC-QQ8Qz61nzw_7_6">842</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncrementalCommonSharesAttributableToShareBasedPaymentArrangements" scale="3" id="Tc_-PRKMVxpwkGWthToaYUpdw_7_9">777</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:IncrementalCommonSharesAttributableToShareBasedPaymentArrangements" scale="3" id="Tc_VQvuys2R8kK119ihAxG5Hw_7_12">1,025</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Weighted average common shares used in computing diluted net income per share</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding" scale="3" id="Tc_nALWfB8EykGgQURJZGZN9A_8_3">34,311</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding" scale="3" id="Tc_-iitLQQWI0aIu8Ewba-HXg_8_6">33,958</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding" scale="3" id="Tc_eU_v-BCZpESik7aReGyg-Q_8_9">34,473</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding" scale="3" id="Tc_ZBBQUxz6hEuw7oByQf3EAA_8_12">34,023</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Net income per share</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Basic</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareBasic" scale="0" id="Tc_C9J_09Jb50mctXB_b_EMbQ_10_3">0.56</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareBasic" scale="0" id="Tc_vlTeo5rZwEKI0z-NOgOHzQ_10_6">0.40</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareBasic" scale="0" id="Tc_yFTu_ytH4EWcjY7m_7TqUg_10_9">1.05</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareBasic" scale="0" id="Tc_ihmtMTarhUO33WCumNBA4g_10_12">0.74</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Diluted</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareDiluted" scale="0" id="Tc_pZQSQxb66ECdrgXbTmrClw_11_3">0.55</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareDiluted" scale="0" id="Tc_t1dOmjyJwUmcrNJoopkNtg_11_6">0.39</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareDiluted" scale="0" id="Tc_ceOQW-Pchkm3HqNuJQGetg_11_9">1.03</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EarningsPerShareDiluted" scale="0" id="Tc_Vo_Mhb-eOEK7-v8cNejOMA_11_12">0.72</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Diluted weighted average common shares outstanding does not include <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" scale="3" id="Narr_n8fadsVXoEqefg4VD7FB9Q">1,800</ix:nonFraction> and <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" scale="3" id="Narr_aD5J0_8zcEuyf0cf40e5Ew">3,138</ix:nonFraction> common equivalent shares issuable with respect to outstanding equity awards for the three-month periods ended June 30, 2021 and 2020, respectively, or <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" scale="3" id="Narr_BpWIyuOIMUelU08QOVVUSQ">1,352</ix:nonFraction> and <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" scale="3" id="Narr_LYFlPd9qdE-DyR4xeeFevQ">5,006</ix:nonFraction> common equivalent shares issuable with respect to outstanding equity awards for the six-month periods ending June 30, 2021 and 2020, respectively, as their effect would have been anti-dilutive.</p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:27pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">13</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="margin-top:21.6pt;min-height:36pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 30pt 0pt;"><a href="#Toc"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_HPkC5aWm4EiSrqABJJZz4w_1_2"></a><a id="Tc_pMVrK5XwUUyAQP858MBrpA_1_5"></a><a id="Tc_OYDsDhgEv0yFZxDoFXKIfA_2_2"></a><a id="Tc_yiCih8C73ECPilbxBykoTg_2_5"></a><a id="Tc_36OuJkRlAUeVvgoD-Zpw3g_2_8"></a><a id="Tc_v34TRi1fEUmL2E0LsSErCg_3_2"></a><a id="Tc_2wMIQXtsTkKv1-FERVchiw_4_0"></a><a id="Tc_cXR5IC0xV0q2cXbdPfbL_Q_4_2"></a><a id="Tc_Rln8KcS5sEG-BaKVkx_bdg_4_5"></a><a id="Tc_PEz1P8Bmd0eV7Zo9AgDMwA_4_8"></a><a id="Tc_b9V15BEdGki1ti0gqGowSQ_5_0"></a><a id="Tc_LRlIvgDeckWw1nk85Ghydg_6_0"></a><a id="Tc_wM9lTYP7MU2DTEV-x1QL7Q_6_2"></a><a id="Tc_Gc56S7tXhUm0FCOn3NXi-A_6_5"></a><a id="Tc_sg3CCoID1Ui4WuJ5jmHFOQ_6_8"></a><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="us-gaap:ComprehensiveIncomeNoteTextBlock" id="Tb_Ep-aujMCdUCIiGWBsSjWGQ" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><b style="font-weight:bold;">Note 7.&#160;&#160;Accumulated Other Comprehensive Income </b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The following table presents the changes in accumulated other comprehensive income, net of tax, by component, for the six months ended June 30, 2021:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="us-gaap:ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock" id="Tb_nBlVLG5GLkeuP-_40VdT1A" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.59%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.88%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Foreign</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Defined&#160;benefit</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">currency</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">pension&#160;plan</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance at December 31, 2020</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_3gAqRSnshEqM1_usXZTg1g" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax" scale="3" id="Tc_ZsgnJ0TS0UKOUkg0M0SPAw_4_3">3,945</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_hy0Vpmp4gkyQqT14NwPRmQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax" sign="-" scale="3" id="Tc_ZDTTzy1jIU6IH3_89YQgNQ_4_6">510</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax" scale="3" id="Tc_OqOAhVSlOUO0Jyem4zIyPw_4_9">3,435</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Other comprehensive loss and pension reclassification</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_1x5HWVO72UqGpq3lSg5vJg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossNetOfTax" sign="-" scale="3" id="Tc_UGvcsM4Zqk61HNNz4daM3Q_5_3">820</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_H_xVYtRFcEGPut0zNaxYsg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossNetOfTax" scale="3" id="Tc_xGM7OBe92EKHcznImm6_fQ_5_6">54</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:OtherComprehensiveIncomeLossNetOfTax" sign="-" scale="3" id="Tc_O8ZMY7gCvE-hH86Kpv6gFw_5_9">766</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance at June 30, 2021</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_lj4AoPsMfkCbp5bs5wvdSw" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax" scale="3" id="Tc_vAW0bsx6tEavsLEqy-zs_w_6_3">3,125</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_CCIgEjvg00eOsfhU2VWCfA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax" sign="-" scale="3" id="Tc_durn4Dq0pk2AeHvbSdHWpg_6_6">456</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.59%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.88%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax" scale="3" id="Tc_cd1wZloT1Ue_r6jGdVK9iQ_6_9">2,669</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><a id="Tc_g0V50iRTxUiljRksE1RZqA_1_1"></a><a id="Tc_BynIF0TPUUSBUaImFuSmyg_1_4"></a><a id="Tc_wd3SP-ayWkuCRWG34pbREQ_2_1"></a><a id="Tc_bGZArh0GsU2a5NWn_v7MHg_2_5"></a><a id="Tc_Sqinns2ZkEeMARtUHW_xmQ_3_1"></a><a id="Tc_adtFz7CLyEedre3Xnstlfg_4_0"></a><a id="Tc_rDfJ2oslK0eDRHSrrwBkQw_4_1"></a><a id="Tc_Lcv5XsZtJEeeg8a-Z3TmhA_4_4"></a><a id="Tc_HnGpr7_kVUWTqCmHSG7IBA_5_0"></a><a id="Tc_GnmuVg269kep5yMERaSnFA_6_0"></a><a id="Tc_WwE_Pv7Xhkeb1abHR84w4A_6_1"></a><a id="Tc__mpIAAkHN0S4kCoJVlMzCw_6_4"></a><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="acls:CashCashEquivalentsAndRestrictedCashTextBlock" id="Tb_Fby8iYL9V0OdyhEmxJNz_A" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 8. Cash, cash equivalents and restricted cash</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The following table provides a reconciliation of cash, cash equivalents, and restricted cash reported within the consolidated balance sheets to the total of the amounts shown in the statement of cash flows:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="acls:CashCashEquivalentsAndRestrictedCashTableTextBlock" id="Tb_KOP_ndfYuUa9KLGfWuTMUA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:15.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:15.39%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:18.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:18.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:18.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:15.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:38.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Cash and cash equivalents</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:15.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashAndCashEquivalentsAtCarryingValue" scale="3" id="Tc_1hwKACAP90upIQi518d7QA_4_2">219,731</ix:nonFraction> </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:15.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashAndCashEquivalentsAtCarryingValue" scale="3" id="Tc_Vk4JK44HqEeyMvTKzoEPpw_4_5">203,479</ix:nonFraction> </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Long-term restricted cash</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:15.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RestrictedCashAndCashEquivalents" scale="3" id="Tc_A1nYqng-8EW_jiJW7MISgg_5_2">755</ix:nonFraction> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:15.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:RestrictedCashAndCashEquivalents" scale="3" id="Tc_L2NxZp4VMkCDn2SP-iB44g_5_5">753</ix:nonFraction> </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Total cash, cash equivalents and restricted cash</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:15.37%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" scale="3" id="Tc_hWUT2D-VIkWclqow5cGENQ_6_2">220,486</ix:nonFraction> </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:15.39%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" scale="3" id="Tc_8pEMlIrAM0aqjMV2rslNYg_6_5">204,232</ix:nonFraction> </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">As of June 30, 2021, we had $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_us-gaap_LongtermDebtTypeAxis_us-gaap_RevolvingCreditFacilityMember_TBzxievtWUanTNO0EDnI7w" decimals="-5" format="ixt:numdotdecimal" name="acls:LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit" scale="6" id="Narr_wi1pmoRGvkyrdIj1jPhrlg">0.8</ix:nonFraction>&#160;million in restricted cash representing the total of (i) cash collateral for a $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:WorkersCompensationLiabilityCurrentAndNoncurrent" scale="6" id="Narr_9W2D0Eo4tUK7ezCEFYT_UA">0.7</ix:nonFraction>&#160;million letter of credit relating to workers&#8217; compensation insurance and (ii) a $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-5" format="ixt:numdotdecimal" name="acls:DepositRelatingToCustomsActivity" scale="6" id="Narr_pQJ0mS8LMEuAvzQk_H2jHg">0.1</ix:nonFraction>&#160;<span style="white-space:pre-wrap;">million deposit relating to customs activity.  </span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><a id="Tc_smM-BEfit02TUF4Vj9KM6w_1_2"></a><a id="Tc_Le3jEpH7oE2mmpMOxddnBw_1_5"></a><a id="Tc_I6xhk6X4P06h_UZkdfphNw_2_2"></a><a id="Tc_diP11iCZ9k-6uKMAp2W4ig_2_5"></a><a id="Tc_z7wS_9QJhUChroJrEnr9zQ_3_2"></a><a id="Tc_slVMGACGK06UdgYl-qOROQ_4_0"></a><a id="Tc_GTwjvpR0lEyzB02iXl7ZaQ_4_2"></a><a id="Tc_sDqJ46vZRkOJIQJ5bf-4uA_4_5"></a><a id="Tc_vcjnqZn7vUeIEeJh_vDfcQ_5_0"></a><a id="Tc_W9SDkCGACESCDi--GPXu-g_6_0"></a><a id="Tc_QA_1ou_sxE6vO0NXnqjMEw_7_0"></a><a id="Tc_kVqxeqcmCEqB9fpGW0_cZw_7_2"></a><a id="Tc_hCNOmDZdJUaVHtsi8yIPvg_7_5"></a><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="us-gaap:InventoryDisclosureTextBlock" id="Tb_yM8ZRDNI40mbX2ZE999Gtg" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;9.&#160;&#160;Inventories, net</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The components of inventories are as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="us-gaap:ScheduleOfInventoryCurrentTableTextBlock" id="Tb_erGXbxeLmUuOylO-2Lrnvg" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.12%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:22.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Raw materials</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryRawMaterialsNetOfReserves" scale="3" id="Tc_uyqMbvlqtEOEOQxNfYzNVQ_4_3">109,795</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryRawMaterialsNetOfReserves" scale="3" id="Tc_uhtxDpzmaEKsgsMFdl52Lg_4_6">100,254</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Work in process</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryWorkInProcessNetOfReserves" scale="3" id="Tc_iDISjiGQdkS6qgB8HVrHrQ_5_3">40,233</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryWorkInProcessNetOfReserves" scale="3" id="Tc_gfEtCIaI7Ey1vEdWAxLy_w_5_6">33,867</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Finished goods (completed systems)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryFinishedGoodsNetOfReserves" scale="3" id="Tc_O6kUV9CO5USmLLCE6j2c3g_6_3">42,293</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.12%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryFinishedGoodsNetOfReserves" scale="3" id="Tc_EZQuL_cor062eBnziaTSnw_6_6">26,955</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">      Inventories, net</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryNet" scale="3" id="Tc_NOnyXU_UM0-2ucmgw_cgrA_7_3">192,321</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:InventoryNet" scale="3" id="Tc_kinXGC93vUm3j0ejc-fwGg_7_6">161,076</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">When recorded, inventory reserves reduce the carrying value of inventories to their net realizable value. We establish inventory reserves when conditions exist that indicate inventory may be in excess of anticipated demand or is obsolete based upon assumptions about future demand for the Company&#8217;s products or market conditions. We regularly evaluate the ability to realize the value of inventories based on a combination of factors including the following: forecasted sales or usage, estimated product end of life dates, estimated current and future market value and new product introductions. Purchasing and usage alternatives are also explored to mitigate inventory exposure.</p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="us-gaap:ProductWarrantyDisclosureTextBlock" id="Tb_ZRaHG3ybqkWZEtQd5T5wdQ" continuedAt="Tb_ZRaHG3ybqkWZEtQd5T5wdQ_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;10.&#160;&#160;Product Warranty</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We generally offer a <ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" format="ixt-sec:durwordsen" name="acls:ProductWarrantyPeriod" id="Narr_dxHxLma--EWsZMGvacnPSg">one-year</ix:nonNumeric> warranty for all of our systems, the terms and conditions of which vary depending upon the product sold. For all systems sold, we accrue a liability for the estimated cost of standard warranty at the time of system shipment and defer the portion of systems revenue attributable to the fair value of non-standard warranty. Costs for non-standard warranty are expensed as incurred. Factors that affect our warranty liability include the number of installed units, historical and anticipated product failure rates, material usage and service labor costs. We periodically assess the adequacy of our recorded liability and adjust the amount as necessary.</p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">14</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="margin-top:21.6pt;min-height:36pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 30pt 0pt;"><a href="#Toc"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="Tc_p1nGPeElRE2j4yBX0aN96g_1_2"></a><a id="Tc_-TfTmcdJQ0W-a2OjkwFOYA_2_2"></a><a id="Tc_3SFVkOrsmEib3ZdbpdBX3Q_3_2"></a><a id="Tc_6AC-29nOBEO-BqkJmzGfrg_3_5"></a><a id="Tc_FVJt88fEakKXASBvh2mLJQ_4_2"></a><a id="Tc_8waI3aa_KE2e1O7VqEymZQ_5_0"></a><a id="Tc_sQlVZvIh-kafw0u03orpKw_5_2"></a><a id="Tc_zPm4sJE0H025dPnP69uYsA_5_5"></a><a id="Tc_3w6LC4d1P0qup6kEKCwaYQ_6_0"></a><a id="Tc_4xg_RUkAmEuhn1qu-6pkNA_7_0"></a><a id="Tc_J73z0G8dz0W5vWKqRl4Wiw_8_0"></a><a id="Tc_isdcj0m76EyYwfsgAHpxIw_9_0"></a><a id="Tc_GYDkWXT-fU6-HBMx4K9X7g_9_2"></a><a id="Tc_NelC0jvGf0m1Psb6GWislg_9_5"></a><a id="Tc_KehPddDSFkG5MbITb478hQ_11_0"></a><a id="Tc_YNTYxVhZnUqyBqFgrX7IiQ_11_2"></a><a id="Tc_ltAywwaEiU-s0Zh8k22fFw_11_5"></a><a id="Tc_dVihrAuiQ0a3BUGZhvlZmA_12_0"></a><a id="Tc_ef-MsyccF0Ctj4vKppMsgA_13_0"></a><a id="Tc_Z-sWbiyG0U6BHf40nMoP6Q_13_2"></a><a id="Tc_RHx403SypUewyxv0rK4GJg_13_5"></a><ix:continuation id="Tb_ZRaHG3ybqkWZEtQd5T5wdQ_cont1"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The changes in our standard product warranty liability are as follows:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="us-gaap:ScheduleOfProductWarrantyLiabilityTableTextBlock" id="Tb_tQyHNZ-HnEeMQKuGEUQgiQ" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:17.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:17.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:17.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance at January&#160;1 (beginning of year)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrual" scale="3" id="Tc_DA1hZUCcbU2WZAnFmERjWw_5_3">4,612</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2019_FtHnUOMLjkeW-5RTgMqhrA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrual" scale="3" id="Tc_xN396fuXPEOPWRUEXphXkQ_5_6">3,244</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Warranties issued during the period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualWarrantiesIssued" scale="3" id="Tc_bNns-yri1kazMPd1bjTG1g_6_3">3,013</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualWarrantiesIssued" scale="3" id="Tc_xlzmYIICx06L0oWE6PpjcQ_6_6">2,635</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Settlements made during the period</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualPayments" scale="3" id="Tc_j3RwgkGnXk2im74G3D_Ggg_7_3">1,991</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualPayments" scale="3" id="Tc_dxSkS8qchEqGJLexOQDq3A_7_6">1,913</ix:nonFraction>)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Changes in estimate of liability for pre-existing warranties during the period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease" sign="-" scale="3" id="Tc_Jw66R_FhvU6J9W8Xbhss_w_8_3">372</ix:nonFraction>)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease" scale="3" id="Tc_IXjSa-QvK0OVdrpfEgtTZA_8_6">177</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance at June 30 (end of period)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrual" scale="3" id="Tc_1iXYaitw0k6gw8u4ttSiJA_9_3">5,262</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2020_vfxHSqwZwkeC1Z0d0SG93A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrual" scale="3" id="Tc_NQi_4VgWHEik-OhakqTfjA_9_6">4,143</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Amount classified as current</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualClassifiedCurrent" scale="3" id="Tc_Nmj_GOPvU0SQy-ibrmTd9A_11_3">4,690</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2020_vfxHSqwZwkeC1Z0d0SG93A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualClassifiedCurrent" scale="3" id="Tc_vm0vUgSPmEe40EzK2N10Bw_11_6">3,942</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Amount classified as long-term </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualNoncurrent" scale="3" id="Tc_YYiIYOXP90iiKInT8G40wg_12_3">572</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2020_vfxHSqwZwkeC1Z0d0SG93A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrualNoncurrent" scale="3" id="Tc_MYgLq8YPuES-GkWOXydi_A_12_6">201</ix:nonFraction></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 18pt;">Total warranty liability</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrual" scale="3" id="Tc_8tWwjC1NL02OsVBRjhMtow_13_3">5,262</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2020_vfxHSqwZwkeC1Z0d0SG93A" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:ProductWarrantyAccrual" scale="3" id="Tc_DEJTxMKYeE6_KL_A-2QceA_13_6">4,143</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="us-gaap:FairValueDisclosuresTextBlock" id="Tb_D863REKRVEiII6C16b3bXg" continuedAt="Tb_D863REKRVEiII6C16b3bXg_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;11.&#160;&#160;Fair Value Measurements</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Certain assets on our balance sheets are reported at their fair value. Fair value is defined as the price that would be received for an asset or paid to transfer a liability (an exit price) in the principal or most advantageous market for the asset or liability in an orderly transaction between market participants on the measurement date.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:27pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><b style="font-weight:bold;">(a)&#160;&#160;Fair Value Hierarchy</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The accounting guidance for fair value measurement requires an entity to maximize the use of observable inputs and minimize the use of unobservable inputs when measuring fair value. The standard establishes a fair value hierarchy based on the level of independent, objective evidence surrounding the inputs used to measure fair value. A financial instrument&#8217;s categorization within the fair value hierarchy is based upon the lowest level of input that is significant to the fair value measurement. The fair value hierarchy is as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:27pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="text-decoration:underline;text-decoration-color:#000000;">Level 1 </span>-&#160;applies to assets or liabilities for which there are quoted prices in active markets for identical assets or liabilities.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="text-decoration:underline;text-decoration-color:#000000;">Level 2 </span>-&#160;applies to assets or liabilities for which there are inputs other than quoted prices that are observable for the asset or liability, such as quoted prices for similar assets or liabilities in active markets; quoted prices for identical assets or liabilities in markets with insufficient volume or infrequent transactions (less active markets); or model-derived valuations in which significant inputs are observable or can be derived principally from, or corroborated by, observable market data.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="text-decoration:underline;text-decoration-color:#000000;">Level 3 </span>-&#160;applies to assets or liabilities for which there are unobservable inputs to the valuation methodology that are significant to the measurement of the fair value of the assets or liabilities.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><b style="font-weight:bold;">(b)&#160;&#160;Fair Value Measurements</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Our money market funds and short-term investments are included in cash and cash equivalents in the consolidated balance sheets. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">15</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="margin-top:21.6pt;min-height:36pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 30pt 0pt;"><a href="#Toc"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_92d7069e_82f5_4ece_a00f_1e464312ddbf"></a><a id="Tc_CwrsBcB4IUOubTBkHuW7Iw_1_2"></a><a id="Tc_icw5Warxu0CN_DASB-pY9g_2_2"></a><a id="Tc_WmhulwwpkUy9SjcGdh1RTA_3_2"></a><a id="Tc_1-toXvtrcUqFyhsXE6lcoA_3_5"></a><a id="Tc_SmYZqEXjgEqeaxxW6J6Qig_3_8"></a><a id="Tc_uzP8tb0nEEaS8D6ECvQJmw_3_11"></a><a id="Tc_RKNCUWVQBkW2fi3E6EDBmA_4_2"></a><a id="Tc_yfwjziC__keVNL-1UGilig_5_0"></a><a id="Tc_3Sh2aKYJn0SEVWTQFXQwtA_6_0"></a><a id="Tc_QCaHFKv5ZkeW7Vyu1aTx-A_7_0"></a><a id="Tc_WHZOUqjIi0yZjjlFIEAnbA_7_2"></a><a id="Tc_aBYnNXNjBkO0tK8-OBJnfA_7_5"></a><a id="Tc_QmmuVyxAs0SG_8jIvsqU1w_7_6"></a><a id="Tc_Q4mBOOndikCDVbzZsMQ5RQ_7_8"></a><a id="Tc_md-5V5Vzz0WrFl2t7wsiWA_7_9"></a><a id="Tc_M5eIT3gwOEWy29lncP-KnQ_7_11"></a><a id="_08564c05_a993_43cf_b655_9a9c544a2e50"></a><a id="Tc_acAu3R-wgkCfGxQzfEX-XA_1_2"></a><a id="Tc_2NReNwAXWUK21mdjRJKhHQ_2_2"></a><a id="Tc_EQ5R8R_Yv0OZxKkcYHVmvg_3_2"></a><a id="Tc_-DSb4KFH7Um0Jg9xaUYvaA_3_5"></a><a id="Tc_5wCdQTTefEuWE6bylmYEow_3_8"></a><a id="Tc_Lkn0QispE0eoCguXNlDTlA_3_11"></a><a id="Tc_rFEpoTR4mkyKT1DrptaCzQ_4_2"></a><a id="Tc_JRtJ6cRky0uv_neLQZPpKw_5_0"></a><a id="Tc_7ZE7IW-7rEG3keUpLdCzlg_6_0"></a><a id="Tc_eT8kzE4cnUGXr_gAzmFPYw_7_0"></a><a id="Tc_5f6jAGWfAUyUjj6K8jREQw_7_2"></a><a id="Tc_C49ULfnnCEeFWJlR-vQoaw_7_5"></a><a id="Tc_RojMsdmJB06m4eF_7aS2tw_7_6"></a><a id="Tc_WTftD1R590SJKBPzp6D8aw_7_8"></a><a id="Tc_6eqYnm_flk6yTm9-vEAmeg_7_9"></a><a id="Tc_EzwBWEZYPECwhUVn8U9wwg_7_11"></a><ix:continuation id="Tb_D863REKRVEiII6C16b3bXg_cont1"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The following table sets forth our assets by level within the fair value hierarchy:</p><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="us-gaap:ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock" id="Tb_PNtaZV4NIkCJwJz6u93qgw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:24.5pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value&#160;Measurements</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;1</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;2</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;3</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="14" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Assets</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash equivalents:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Money market funds, U.S. Government Securities and Agency Investments</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_9xTv3Pq1gUSA_r8gGJJknA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashAndCashEquivalentsFairValueDisclosure" scale="3" id="Tc_ziHtdtXnaUi3kA8KOfEJKQ_7_3">190,731</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_kuTMgTqgiki9V2z7-fMlxg" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashAndCashEquivalentsFairValueDisclosure" scale="3" id="Tc_b0HiEKVHQ0y-UEnafrUj6A_7_12">190,731</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value&#160;Measurements</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;1</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;2</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;3</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="14" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Assets</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash equivalents:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Money market funds, U.S. Government Securities and Agency Investments</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_FraS8kKQ90OGZQfA-1XGoA" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashAndCashEquivalentsFairValueDisclosure" scale="3" id="Tc_j6jJaFax2kSfITeqOCAEgQ_7_3">172,119</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_lVUVH_kXYE6gJiajsabg5w" decimals="-3" format="ixt:numdotdecimal" name="us-gaap:CashAndCashEquivalentsFairValueDisclosure" scale="3" id="Tc_3MENWeE9A0qvdWRS313uPA_7_12">172,119</ix:nonFraction></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><b style="font-weight:bold;">(c)&#160;&#160;Other Financial Instruments</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The carrying amounts reflected in the consolidated balance sheets for accounts receivable, prepaid expenses and other current assets and non-current assets, restricted cash, accounts payable and accrued expenses approximate fair value due to their short-term maturities.</p></ix:continuation><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="us-gaap:DebtDisclosureTextBlock" id="Tb_1OtcUhG7xUWQ31RZuEYzpg" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;12.&#160;&#160;Financing Arrangements</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">On January 30, 2015, we sold our corporate headquarters facility in Beverly, Massachusetts for $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_30_2015_To_1_30_2015_srt_CounterpartyNameAxis_acls_BeverlyPropertyOwnerLlcMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingMember_ikN0WgABQ0Oc3EVaZNO4XA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:ProceedsFromSaleOfPropertyHeldForSale" scale="6" id="Narr_3HRdrA-e8EKp-6qmO2racg">48.9</ix:nonFraction>&#160;million. As part of the sale, we also entered into a <ix:nonNumeric contextRef="As_Of_1_30_2015_srt_CounterpartyNameAxis_acls_BeverlyPropertyOwnerLlcMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingMember_jmWTWk8TAU2MlL8_CzlyZQ" format="ixt-sec:durwordsen" name="us-gaap:LesseeOperatingLeaseTermOfContract" id="Narr_YDPLqfOd-0GpnJNsZoLlxQ">22-year</ix:nonNumeric> lease agreement of our headquarters facility. This sale-leaseback is accounted for as a financing lease under generally accepted accounting principles and, as such, we have recorded a financing obligation of $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_SaleAndLeaseBackMember_XO2P9-16s0C-1V43VObF-w" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:FinanceLeaseLiabilityNoncurrent" scale="6" id="Narr_UQwuOiQGA0iUbpaGtOLpuw">47.8</ix:nonFraction>&#160;million as of June 30, 2021. The associated lease payments include both an interest component and payment of principal, with the remaining liability being extinguished at the end of the original lease term. We posted a security deposit of $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_SaleAndLeaseBackMember_XO2P9-16s0C-1V43VObF-w" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:SecurityDeposit" scale="6" id="Narr_cYu-yvx6d0W926z9IOX27g">5.9</ix:nonFraction>&#160;<span style="white-space:pre-wrap;">million in the form of an irrevocable letter of credit at the time of the closing. This letter of credit reduces our availability under our credit facility, as described in the next paragraph.   </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">On July 31, 2020, we entered into a Senior Secured Credit Facilities Credit Agreement (the &#8220;Credit Agreement&#8221;) with Silicon Valley Bank, in its capacity as administrative agent and collateral agent for itself and as a lender, and such other banks and financial institutions or entities that from time to time join as lenders under the Credit Agreement.&#160;The Credit Agreement provides for a revolving credit facility in an aggregate principal amount not to exceed $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_7_31_2020_srt_CounterpartyNameAxis_acls_SiliconValleyBankMember_us-gaap_CreditFacilityAxis_us-gaap_RevolvingCreditFacilityMember_BHV27yDiN0OhXbnK1dB6aQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:LineOfCreditFacilityMaximumBorrowingCapacity" scale="6" id="Narr_zcCd6ojfUEialtftCrt5EQ">40.0</ix:nonFraction> million. Our obligations under the Credit Agreement are secured by&#160;a security interest, senior to any current and future debts and to any security interest, in all of our rights, title, and interest in, to and under substantially all of our assets, subject to limited exceptions, including permitted liens. The revolving credit facility terminates on July 31, 2023. As of June 30, 2021, we were in compliance with all covenant requirements of the Credit Agreement. As of such date, <ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_srt_CounterpartyNameAxis_acls_SiliconValleyBankMember_us-gaap_CreditFacilityAxis_us-gaap_RevolvingCreditFacilityMember_1PtMB98UE0qoxrddCYeVXQ" decimals="-5" format="ixt-sec:numwordsen" name="us-gaap:LineOfCreditFacilityFairValueOfAmountOutstanding" scale="6" id="Narr_wqc2hrB_e0a5o0S632_nLg">no</ix:nonFraction> borrowings had been made under the Credit Agreement, although a letter of credit for $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_srt_CounterpartyNameAxis_acls_SiliconValleyBankMember_us-gaap_CreditFacilityAxis_us-gaap_RevolvingCreditFacilityMember_us-gaap_ShortTermDebtTypeAxis_us-gaap_LetterOfCreditMember_f9a-CoaN6k2l9efRYpvUrA" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:LettersOfCreditOutstandingAmount" scale="6" id="Narr_fhFwgmmkoEmq7wh63_lQUg">5.9</ix:nonFraction> million reduces the funds available for borrowing under the credit line. We entered into a First Amendment to the Credit Agreement with Silicon Valley Bank in March 2021 to (i) align the covenants with our 2021 stock repurchase program, and (ii) established terms to transition from a Eurodollar based interest rate option to an interest rate benchmark using a secured overnight financing rate (known as &#8220;SOFR&#8221;) published by the Federal Reserve Bank of New York.</p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="us-gaap:IncomeTaxDisclosureTextBlock" id="Tb_2i9VBopE4EiduYp-WyL9Hw" continuedAt="Tb_2i9VBopE4EiduYp-WyL9Hw_cont1" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:40.5pt;text-indent:-40.5pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;13.&#160;&#160;Income Taxes </b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Income tax expense was $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" scale="6" id="Narr_6hadeF5EH0m6o8vaHX39xg">3.8</ix:nonFraction> million for the three months ended June 30, 2021, compared to $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" scale="6" id="Narr_TkOjcnZy2EmjJmmQDrCqQQ">2.3</ix:nonFraction> million for the three months ended June 30, 2020. The $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-5" format="ixt:numdotdecimal" name="acls:IncreaseInIncomeTaxExpenseBenefit" scale="6" id="Narr_-ap6sBKDtE2CmSCva2s53w">1.5</ix:nonFraction> million increase was primarily due to a $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-5" format="ixt:numdotdecimal" name="acls:IncreaseInPreTaxIncome" scale="6" id="Narr_VTbqgnnJ-0-_EK2CW66Y_A">7.2</ix:nonFraction> million increase in pretax income. Income tax expense was $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" scale="6" id="Narr_AxqW8pnf_k2jOOEiXIeZZQ">5.6</ix:nonFraction> million during the six months ended June 30, 2021, compared with $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:IncomeTaxExpenseBenefit" scale="6" id="Narr_T_RodhwhSEeFMviJ3jPD_g">3.3</ix:nonFraction><span style="white-space:pre-wrap;"> million for the six months ended June 30, 2020.  The </span>$<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-5" format="ixt:numdotdecimal" name="acls:IncreaseInIncomeTaxExpenseBenefit" scale="6" id="Narr_N9BM0_7rAUGbVVjyj3RaFw">2.3</ix:nonFraction> million increase was primarily due to a $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" decimals="-5" format="ixt:numdotdecimal" name="acls:IncreaseInPreTaxIncome" scale="6" id="Narr_cu0qI-0MbkmRUu1Ufx4Qpg">13.1</ix:nonFraction> million increase in pretax income. </p></ix:nonNumeric></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">16</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="margin-top:21.6pt;min-height:36pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 30pt 0pt;"><a href="#Toc"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><ix:continuation id="Tb_2i9VBopE4EiduYp-WyL9Hw_cont1"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The effective tax rate for the three and six months ended June 30, 2021 and 2020, respectively, was less than the U.S. statutory rate of <ix:nonFraction unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg" contextRef="Duration_1_1_2020_To_6_30_2020_srt_RangeAxis_srt_MaximumMember_m9F1xkRmoUWAhyuzx-0Kfg" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate" scale="-2" id="Narr_Ah1TYboKyU6AK8Dlj4Gq6g"><ix:nonFraction unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg" contextRef="Duration_4_1_2020_To_6_30_2020_srt_RangeAxis_srt_MaximumMember_mZg6wqDjnUOiZUO1ONyttQ" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate" scale="-2" id="Narr_bRvmuBk3e0CBr9HqXjGEXw"><ix:nonFraction unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg" contextRef="Duration_1_1_2021_To_6_30_2021_srt_RangeAxis_srt_MaximumMember_20Nye_pU60KPVnSZPrRM4A" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate" scale="-2" id="Narr_7W4ki_EHpkidnKDRQsSgTA"><ix:nonFraction unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg" contextRef="Duration_4_1_2021_To_6_30_2021_srt_RangeAxis_srt_MaximumMember_ZnuU6u7lLU-23WdVDtAsjA" decimals="2" format="ixt:numdotdecimal" name="us-gaap:EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate" scale="-2" id="Narr_l__wrO57JEG0ygWcEfrvxg">21</ix:nonFraction></ix:nonFraction></ix:nonFraction></ix:nonFraction>% due to favorable discrete items related to equity compensation in those periods and Federal research and development tax credits that reduce the annual tax rate.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We had $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxAssetsNet" scale="6" id="Narr_IB2SBoqzWUOq_yYf0pkvVw">51.4</ix:nonFraction> million and $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DeferredIncomeTaxAssetsNet" scale="6" id="Narr_5y9U4dkAP0GHqB5-soTx9Q">57.9</ix:nonFraction> million of net deferred tax assets worldwide relating to net operating loss carryforwards, tax credit carryforwards and other temporary differences, as of June 30, 2021 and December 31, 2020, respectively. These deferred tax assets are available to reduce income taxes in future years. We have a $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:DeferredTaxAssetsValuationAllowance" scale="6" id="Narr_sEnrYotBJ0K6p_TNzyz4hw">9.1</ix:nonFraction><span style="white-space:pre-wrap;"> million valuation allowance in the U.S. against certain tax credits and state net operating losses due to the uncertainty of their realization based on long-term Company forecasts and the expiration dates on these tax assets. If future operating results of the Company within the U.S. or these foreign jurisdictions are significantly less than our expectations, it is reasonably possible that we would be required to record an additional valuation allowance on our deferred tax assets in the future.  </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></ix:continuation><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="us-gaap:ConcentrationRiskDisclosureTextBlock" id="Tb_9-ss7GL0U0qA6id_lS6yGw" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:40.3pt;text-indent:-40.3pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;14.&#160;&#160;Concentration of Risk</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">For the three months ended June 30, 2021, <ix:nonFraction unitRef="Unit_Standard_customer_0YOFupMhv0yS1XDebetzdQ" contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_eiDKLI-O4kSIZoQQF5U5dw" decimals="INF" format="ixt-sec:numwordsen" name="acls:ConcentrationRiskNumberOfCustomers" scale="0" id="Narr_QSs8XkWDjkOnvDTRxKrgRA">two</ix:nonFraction> customers accounted for <ix:nonFraction unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg" contextRef="Duration_4_1_2021_To_6_30_2021_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_ioU0Dgho30i3_iChW8hv2Q" decimals="3" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Narr_N-F8E2-YKkiY8K70MuCKKQ">19.7</ix:nonFraction>% and <ix:nonFraction unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg" contextRef="Duration_4_1_2021_To_6_30_2021_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_LyZ34Ub6ZE2jg6FrLmqvlQ" decimals="3" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Narr_oqWsEWPRx0ijSAWgDHfKRQ">10.2</ix:nonFraction>% of total revenue, respectively. For the three months ended June 30, 2020, <ix:nonFraction unitRef="Unit_Standard_customer_0YOFupMhv0yS1XDebetzdQ" contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_s0j2Mdde6Ue5RgxCmzOmuQ" decimals="INF" format="ixt-sec:numwordsen" name="acls:ConcentrationRiskNumberOfCustomers" scale="0" id="Narr_-S0Ke7ztZUOFgJTcXeU9JQ">three</ix:nonFraction> customers accounted for <ix:nonFraction unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg" contextRef="Duration_4_1_2020_To_6_30_2020_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_ZV9jt22dP0uGeDhuhWngTQ" decimals="3" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Narr_9VY7DR7F20SzdYVlmipP0A">22.5</ix:nonFraction>%, <ix:nonFraction unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg" contextRef="Duration_4_1_2020_To_6_30_2020_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_B0YXsPg90Uu6S-dCilKtng" decimals="3" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Narr_eFrB7oXFQUarD13Xa9kCZA">22.2</ix:nonFraction>% and <ix:nonFraction unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg" contextRef="Duration_4_1_2020_To_6_30_2020_srt_MajorCustomersAxis_acls_ThirdLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_mKAzDHjbQESuboLfItMLNQ" decimals="3" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Narr_gYXoSEcoVkOgHm55aUOY-g">11.6</ix:nonFraction>% of total revenue, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">For the six months ended June 30, 2021, <ix:nonFraction unitRef="Unit_Standard_customer_0YOFupMhv0yS1XDebetzdQ" contextRef="Duration_1_1_2021_To_6_30_2021_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_EFekRRJHqkGFwzmsymSNnw" decimals="INF" format="ixt-sec:numwordsen" name="acls:ConcentrationRiskNumberOfCustomers" scale="0" id="Narr_677t56cFpU-e5iMVoszTsQ">one</ix:nonFraction> customer accounted for <ix:nonFraction unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg" contextRef="Duration_1_1_2021_To_6_30_2021_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_eSq_6G4BokG9b5v5esDOdg" decimals="3" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Narr_hfIWfMaRwUK8xvzvzadWBA">24.4</ix:nonFraction>% of total revenue. For the <span style="-sec-ix-hidden:Hidden_du9mfOOU5EGSpVFrDPCNpg;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;white-space:pre-wrap;">six months</span></span><span style="white-space:pre-wrap;"> ended </span><span style="-sec-ix-hidden:Hidden_bCiyUD-GJEW9dwOcR7kUFA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;white-space:pre-wrap;">June 30, 2020</span></span><span style="white-space:pre-wrap;">, <ix:nonFraction unitRef="Unit_Standard_customer_0YOFupMhv0yS1XDebetzdQ" contextRef="Duration_1_1_2020_To_6_30_2020_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_9RBgDTrzwk-3NBew4OGitQ" decimals="INF" format="ixt-sec:numwordsen" name="acls:ConcentrationRiskNumberOfCustomers" scale="0" id="Narr_Eu3u5Kzo8Eug2vgYnQUa9g">three</ix:nonFraction> customers accounted for <ix:nonFraction unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg" contextRef="Duration_1_1_2020_To_6_30_2020_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_F3aWLUtC4kSC605maGsNbg" decimals="3" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Narr_SggzQdTVMEOe2U5TOmXEBw">19.7</ix:nonFraction>%, <ix:nonFraction unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg" contextRef="Duration_1_1_2020_To_6_30_2020_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_qwe-Gd93y0appJEy4zDK-A" decimals="3" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Narr_359C5zcC802lvG9QUBNllw">18.5</ix:nonFraction>% and <ix:nonFraction unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg" contextRef="Duration_1_1_2020_To_6_30_2020_srt_MajorCustomersAxis_acls_ThirdLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_BzG27lzRTEKsj0BTibH8JA" decimals="3" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Narr_1W-f_ljH7kamYBzePlhU2w">16.2</ix:nonFraction>% of total revenue, respectively.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">At June 30, 2021, <ix:nonFraction unitRef="Unit_Standard_customer_0YOFupMhv0yS1XDebetzdQ" contextRef="Duration_1_1_2021_To_6_30_2021_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_wvkv2eEMZ0G0rpajOPkWzQ" decimals="INF" format="ixt-sec:numwordsen" name="acls:ConcentrationRiskNumberOfCustomers" scale="0" id="Narr_ohexLyrL50iqX2BgMYd0sQ">two</ix:nonFraction> customers accounted for <ix:nonFraction unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg" contextRef="Duration_1_1_2021_To_6_30_2021_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_aiCji2R-9U6Rikh9GFRo_A" decimals="3" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Narr_D5xpAVJQoUaIResua3VN9Q">11.7</ix:nonFraction>% and <ix:nonFraction unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg" contextRef="Duration_1_1_2021_To_6_30_2021_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_zupJXrbQo0a-8SQG-rownQ" decimals="3" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Narr_xGhofE92pUabYBlSpnH5NA">10.0</ix:nonFraction>% of accounts receivable, respectively. At December 31, 2020, <ix:nonFraction unitRef="Unit_Standard_customer_0YOFupMhv0yS1XDebetzdQ" contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_ycrS1Nkupk2NK-C8fQ6Qog" decimals="INF" format="ixt-sec:numwordsen" name="acls:ConcentrationRiskNumberOfCustomers" scale="0" id="Narr_AUlm8L2_HkiEZPai6yhXRA">two</ix:nonFraction> customers accounted for <ix:nonFraction unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg" contextRef="Duration_1_1_2020_To_12_31_2020_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_aFNIvfPpnkaFunvsLdiyvQ" decimals="3" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Narr_Hb0mGAQTHUW59lGGLd7Oyg">23.8</ix:nonFraction>% and <ix:nonFraction unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg" contextRef="Duration_1_1_2020_To_12_31_2020_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_RiSTmhVFYkGWxNcD0K7wdA" decimals="3" format="ixt:numdotdecimal" name="us-gaap:ConcentrationRiskPercentage1" scale="-2" id="Narr_l4-trJ1-zUWajJ0anCDhLA">11.9</ix:nonFraction>% of accounts receivable, respectively.</p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:27pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="us-gaap:StockholdersEquityNoteDisclosureTextBlock" id="Tb_vzvNXPWgAUW4d4n1NZPbVA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 15. Share Repurchase</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">In December 2020, our Board of Directors approved stock repurchases of up to $<ix:nonFraction unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w" contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ" decimals="-6" format="ixt:numdotdecimal" name="us-gaap:StockRepurchaseProgramAuthorizedAmount1" scale="6" id="Narr_5r1s0aKvlkSwKNdrX2T4WQ">100</ix:nonFraction> million of our common stock through the end of 2021. During the six months ended June 30, 2021, we purchased <ix:nonFraction unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="-5" format="ixt:numdotdecimal" name="us-gaap:TreasuryStockSharesAcquired" scale="6" id="Narr_JC8zOb-7fE-9GF8QeHPtGQ">0.6</ix:nonFraction> million shares at an average cost of $<ix:nonFraction unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ" contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw" decimals="2" format="ixt:numdotdecimal" name="us-gaap:TreasuryStockAcquiredAverageCostPerShare" scale="0" id="Narr_QFZfjr-xD0aCcLpG0QcVCg">39.92</ix:nonFraction> per share. The timing and actual number of shares repurchased under this program will depend on various factors including price, corporate and regulatory requirements, alternative investment opportunities and other market conditions. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Shares repurchased by us are accounted for when the transaction is settled. Shares repurchased and retired are deducted from common stock for par value and from additional paid-in capital for the excess over par value.&#160;If additional paid-in capital has been exhausted, the excess over par value is deducted from retained earnings. Direct costs incurred to acquire the shares are included in the total cost of the shares. </p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="us-gaap:CommitmentsAndContingenciesDisclosureTextBlock" id="Tb_rdDWMd7LGUO2QWL0aj5lfg" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;16.&#160;&#160;Contingencies</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(a)&#160;&#160;Litigation</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We are from time to time a party to litigation that arises in the normal course of our business operations. We are not presently a party to any litigation that we believe might have a material adverse effect on our business operations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(b)&#160;&#160;Indemnifications</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:10.5pt;margin:0pt;"><span style="font-size:10.5pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Our system sales agreements typically include provisions under which we agree to take certain actions, provide certain remedies and defend our customers against third-party claims of intellectual property infringement under specified conditions and indemnify customers against any damage and costs awarded in connection with such claims. We have not incurred any material costs as a result of such indemnifications and have not accrued any liabilities related to such obligations in the accompanying consolidated financial statements.</p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">17</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="margin-top:21.6pt;min-height:36pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 30pt 0pt;"><a href="#Toc"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><ix:nonNumeric contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ" name="us-gaap:NewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock" id="Tb_sZG07erywk6iBSkMi3pONA" escape="true"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 17.&#160;&#160;Recent Accounting Guidance</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:10.5pt;margin:0pt;"><span style="font-size:10.5pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman';font-size:10pt;font-weight:bold;text-align:right;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">i.</td><td style="text-align:right;width:18pt;padding:0pt;"></td><td style="padding:0pt;"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;text-align:left;">Accounting Standards Update 2019-12 Income Taxes (Topic 740) </b></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We adopted Financial Accounting Standards Board ASU No. 2019-12 &#8220;<i style="font-style:italic;">Income Taxes (Topic 740)</i>&#8221; as of January 1, 2021 on a prospective basis. The amendments in this ASU simplify the accounting for income taxes by removing certain exceptions from the previous standard as well as requiring entities to include franchise tax partially based on income as an income based tax and to account for an enacted change in tax laws or rates in the annual effective tax rate computation in the interim period that includes the enactment date. The guidance in ASU 2019-12 is required for annual reporting periods beginning after December 15, 2020. Adoption of ASU 2019-12 had no material effect on our consolidated financial statements and disclosures.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></ix:nonNumeric><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">18</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="margin-top:21.6pt;min-height:36pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 30pt 0pt;"><a href="#Toc"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_052bff4c_bca5_40a4_b84f_8fabc8a2209c"></a><a id="_contentSection_6c6e17d5_8958_404b_8f79_"></a><a id="Item2ManagementsDiscussionandAnalysisofF"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 2.&#160;&#160;Management&#8217;s Discussion and Analysis of Financial Condition and Results of Operations.</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><i style="font-style:italic;">Certain statements within &quot;Management&#39;s Discussion and Analysis of Financial Condition and Results of Operations&quot; are forward-looking statements that involve risks and uncertainties. Words such as may, will, should, would, anticipates, expects, intends, plans, believes, seeks, estimates and similar expressions identify such forward-looking statements. The forward-looking statements contained herein are based on current expectations and entail various risks and uncertainties that could cause actual results to differ materially from those expressed in such forward-looking statements. Factors that might cause such a difference include, among other things, those set forth under &quot;Liquidity and Capital Resources&quot; below and under &#8220;Risk Factors&#8221; in Part I, Item&#160;1A to our </i><a style="-sec-extract:exhibit;" href="https://www.sec.gov/ix?doc=/Archives/edgar/data/1113232/000155837021001972/acls-20201231x10k.htm"><i style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:italic;font-weight:normal;text-align:left;">annual report on Form 10-K for the year ended December 31, 2020</i></a><i style="font-style:italic;">, which discussion is incorporated herein by reference. Readers are cautioned not to place undue reliance on these forward-looking statements, which reflect management&#39;s analysis only as of the date hereof. We assume no obligation to update these forward-looking statements to reflect actual results or changes in factors or assumptions affecting forward-looking statements, except as may be required by law.</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><a id="Overview_288809"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Overview</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We are primarily a producer of ion implantation equipment used in the fabrication of semiconductor chips in the United States, Europe and Asia. In addition, we provide extensive worldwide aftermarket service and support, including spare parts, equipment upgrades and maintenance services to the semiconductor industry. Our product development and manufacturing activities currently occur primarily in the United States although we are adding additional manufacturing capacity in South Korea that should come online by year end 2021. Our equipment and service products are highly technical and are sold through a direct sales force in the United States, Europe and Asia. Consolidation and partnering within the semiconductor manufacturing industry has resulted in a small number of customers representing a substantial portion of our business. Our ten largest customers accounted for 71.1% of total revenue for the six months ended June 30, 2021.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">In the first half of 2021, we delivered strong financial performance driven by strong semiconductor industry fundamentals and an increasing demand for our Purion products, especially in the high growth power device market. The rapid acceleration of the electrification of the automotive industry is creating substantial demand for power devices and image sensors, which is driving sustainable growth for the Purion product extensions specifically developed for these markets.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Despite the many difficult logistical challenges brought on by trade tensions between the United States and China and COVID-19, we are continuing to work closely with our customers across market segments to provide them with the best ion implant solutions for their specific manufacturing challenges.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">In December 2020, the United States Commerce Department placed one of our major Chinese customers, Semiconductor Manufacturing International Corporation (&#8220;SMIC&#8221;), on the U.S. export controls Entity List. As a result of the Entity List classification, we are required to obtain export controls licenses for all U.S. shipments to this customer. Although we have begun receiving these licenses, this situation did delay some shipments to this customer in the first half of 2021. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160; </p><a id="CriticalAccountingEstimates_482826"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Critical Accounting Estimates</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Management&#8217;s discussion and analysis of our financial condition and results of operations included herein and in our Annual Report on Form&#160;10-K for the year ended December&#160;31, 2020 are based upon our consolidated financial statements, which have been prepared in accordance with accounting principles generally accepted in the United States. The preparation of these financial statements requires management to make estimates and judgments that affect the reported amounts of assets, liabilities, revenues and expenses and related disclosure of contingent assets and liabilities. On an ongoing basis, we evaluate our estimates and assumptions. Management&#8217;s estimates are based on historical experience and on various other assumptions that are believed to be reasonable under the circumstances, the results of which form the basis for making judgments about the carrying values of assets and liabilities that are not readily apparent from other sources. Actual results may differ from these estimates under different assumptions or conditions.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">19</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="margin-top:21.6pt;min-height:36pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 30pt 0pt;"><a href="#Toc"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Management has not identified any need to make any material change in, and has not changed, any of our critical accounting estimates and judgments as described in Management&#8217;s Discussion and Analysis of Financial Condition and Results of Operations included in our Annual Report on Form&#160;10-K for the year ended December&#160;31, 2020.</p><a id="ResultsofOperations_659595"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Results of Operations</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The following table sets forth our results of operations as a percentage of total revenue:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:52.72%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.53%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:52.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:17.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Three months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:17.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:52.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;width:17.64%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;width:17.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:52.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:52.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Revenue:</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:52.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Product</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 95.2</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 95.3</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 95.3</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 94.8</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:52.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Services</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 4.8</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 4.7</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 4.7</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 5.2</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:52.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 18pt;">Total revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 100.0</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 100.0</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 100.0</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 100.0</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:52.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Cost of revenue:</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:52.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Product</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 52.1</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 53.3</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 52.5</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 54.8</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:52.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Services</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 4.5</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 4.5</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 4.5</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 4.9</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:52.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 18pt;">Total cost of revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 56.6</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 57.8</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 57.0</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 59.7</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:52.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Gross profit</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 43.4</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 42.2</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 43.0</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 40.3</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:52.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Operating expenses:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:52.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Research and development</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 11.3</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 13.0</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 11.5</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 12.7</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:52.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Sales and marketing</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 8.3</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 7.7</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 8.1</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 7.3</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:52.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">General and administrative</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 7.6</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 8.2</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 7.6</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 7.9</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:52.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 18pt;">Total operating expenses</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 27.2</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 28.9</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 27.2</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 27.9</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:52.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Income from operations</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 16.2</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 13.3</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 15.8</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 12.4</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:52.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Other (expense) income:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:52.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Interest income</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 0.1</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 0.2</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:52.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Interest expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (0.9)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (1.1)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (0.8)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (1.1)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:52.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Other, net</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> &#8212;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 0.3</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (0.4)</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (0.1)</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:52.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 18pt;">Total other expense</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (0.9)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (0.7)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (1.2)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (1.0)</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:52.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Income before income taxes</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 15.3</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 12.6</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 14.6</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 11.4</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:52.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Income tax provision</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 2.6</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 1.8</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 2.0</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 1.4</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;</p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:52.72%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">      Net income</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 12.7</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">%</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 10.8</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">%</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.52%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 12.6</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">%</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.53%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 10.0</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">%</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Revenue</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The following table sets forth our product and services revenue:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:23.05%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.91%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:23.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Three months ended  </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:12.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period-to-Period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:15.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period-to-Period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:23.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:12.98%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Change</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.11%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:15.14%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Change</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:23.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.85%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.85%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">$</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">%&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.85%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.85%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.14%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">$</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">%&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="25" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:23.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="22" style="vertical-align:bottom;white-space:nowrap;width:73.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(dollars&#160;in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:23.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Revenue:</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:23.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Product</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 140,156</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 117,194</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 22,962</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 19.6</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i>&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 266,765</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 229,327</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 37,438</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 16.3</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:23.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 18pt;"><i style="font-style:italic;">Percentage of revenue</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 95.2</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i>&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 95.3</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i>&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 95.3</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i>&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 94.8</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i>&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:23.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Services</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 7,118</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 5,771</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 1,347</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 23.3</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i>&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 13,285</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 12,629</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 656</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 5.2</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:23.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 18pt;"><i style="font-style:italic;">Percentage of revenue</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 4.8</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i>&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 4.7</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i>&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 4.7</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i>&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 5.2</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i>&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.91%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:23.05%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 18pt;">Total revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 147,274</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 122,965</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 24,309</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 19.8</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i>&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 280,050</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 241,956</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.91%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 38,094</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.77%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 15.7</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">20</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="margin-top:21.6pt;min-height:36pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 30pt 0pt;"><a href="#Toc"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;text-decoration:underline;text-decoration-color:#000000;">Three months ended June 30, 2021 Compared with Three months ended June 30, 2020</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Product</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Product revenue, which includes systems sales, sales of spare parts, product upgrades and used systems was $140.2&#160;million, or 95.2% of revenue during the three months ended June 30, 2021, compared with $117.2&#160;million, or 95.3% of revenue for the three months ended June 30, 2020. The $23.0&#160;million increase in product revenue for the three-month period ending June 30, 2021, in comparison to the same period in 2020, was primarily driven by an increase in the number of systems sold.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:27pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">A portion of our revenue from systems sales is deferred until installation and other services related to future performance obligations are performed. The total amount of deferred revenue at June 30, 2021 and December&#160;31, 2020 was $35.5&#160;million and $23.1&#160;million, respectively. The increase in deferred revenue was primarily due to customer prepayments for systems. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:27pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Services</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Services revenue, which includes the labor component of maintenance and service contracts and fees for service hours provided by on-site service personnel, was $7.1&#160;million, or 4.8% of revenue for the three months ended June 30, 2021, compared with $5.8&#160;million, or 4.7% of revenue for the three months ended June 30, 2020. Although services revenue typically increases with the expansion of the installed base of systems, it can fluctuate from period to period based on capacity utilization at customers&#8217; manufacturing facilities, which affects the need for equipment service. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;text-decoration:underline;text-decoration-color:#000000;">Six months ended June 30, 2021 Compared with Six months ended June 30, 2020</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Product</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Product revenue was $266.8&#160;million, or 95.3% of revenue during the six months ended June 30, 2021, compared with $229.3&#160;million, or 94.8% of revenue for the six months ended June 30, 2020. The $37.4&#160;million increase in product revenue for the six-month period ending June 30, 2021, in comparison to the same period in 2020, was primarily driven by an increase in the number of systems sold and to a lesser extent revenue increases in spare parts, product upgrades and used systems.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:27pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Services</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Services revenue was $13.3&#160;million, or 4.7% of revenue for the six months ended June 30, 2021, compared with $12.6&#160;million, or 5.2% of revenue for the six months ended June 30, 2020. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Revenue Categories used by Management</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">In addition to the line item revenue categories discussed above, management also regularly disaggregates revenue in the following categories, which it finds relevant and useful:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:54pt;"></td><td style="font-family:'Times New Roman';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Ion implant revenue separate from revenue from legacy non-ion implant product lines, given that ion implantation systems are the primary driver of our growth and strategic objectives;<br /></span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin-left:0pt;margin-right:0pt;visibility:hidden;">&#8203;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:54pt;"></td><td style="font-family:'Times New Roman';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Systems and Aftermarket revenues, in which &#8220;Aftermarket&#8221; is: </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:90pt;"></td><td style="font-family:'Times New Roman';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">A.</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">The portion of Product revenue relating to spare parts, product upgrades and used equipment, combined with </span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:90pt;"></td><td style="font-family:'Times New Roman';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">B.</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Services revenue, which is the labor component of Aftermarket revenues</span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 108pt;"><span style="margin-left:0pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 72pt;">(Aftermarket purchases reflect current fab utilization as opposed to Systems purchases which reflect capital investment decisions by our customers, which have differing economic drivers); </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 36pt;"><span style="margin-left:0pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">21</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="margin-top:21.6pt;min-height:36pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 30pt 0pt;"><a href="#Toc"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:54pt;"></td><td style="font-family:'Times New Roman';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Revenue by geographic regions, since economic factors impacting customer purchasing decisions may vary by geographic region; and<br /></span><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin-left:0pt;margin-right:0pt;visibility:hidden;">&#8203;</span></td></tr></table><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="width:54pt;"></td><td style="font-family:'Times New Roman';font-size:10pt;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">&#9679;</td><td style="padding:0pt;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;white-space:pre-wrap;">Revenue by our customer market segments, since they can be subject to different economic drivers at different periods of time, impacting a customer&#8217;s likelihood of purchasing capital equipment during any particular period. Currently, management references three customer market segments: memory, mature technology processes and leading edge foundry and logic.  </span></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The ion implant and Aftermarket revenue categories for recent periods are discussed below. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;text-decoration:underline;text-decoration-color:#000000;">Three months ended June 30, 2021 Compared with Three months ended June 30, 2020</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Ion Implant</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Included in total revenue of $147.3&#160;million during the three months ended June 30, 2021 is revenue from sales of ion implant products and services of $142.9&#160;million, or 97.0% of total revenue, compared with $118.7&#160;million, or 96.6%, of total revenue for the three months ended June 30, 2020. The remaining $4.4 million of revenue for the three months ended June 30, 2021 was non-ion implant parts and services.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Aftermarket</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Included in total revenue of $147.3&#160;million during the three months ended June 30, 2021 is revenue from our Aftermarket business of $47.1&#160;million, compared to $46.2&#160;million for the three months ended June 30, 2020. The remaining $100.2 million of revenue for the three months ended June 30, 2021 was from system sales. Aftermarket revenue fluctuates from period to period based on capacity utilization at customers&#8217; manufacturing facilities, which affects the sale of spare parts and demand for equipment service. Aftermarket revenue can also fluctuate from period to period based on the demand for system upgrades or used equipment.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;text-decoration:underline;text-decoration-color:#000000;">Six months ended June 30, 2021 Compared with Six months ended June 30, 2020</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Ion Implant</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Included in total revenue of $280.1&#160;million during the six months ended June 30, 2021 is revenue from sales of ion implant products and services of $271.6&#160;million, or 97.0% of total revenue, compared with $233.8&#160;million, or 96.6%, of total revenue for the six months ended June 30, 2020. The remaining $8.5 million of revenue for the six months ended June 30, 2021 was non-ion implant parts and services.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Aftermarket</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Included in total revenue of $280.1&#160;million during the six months ended June 30, 2021 is revenue from our Aftermarket business of $98.9&#160;million, compared to $82.8&#160;million for the six months ended June 30, 2020. The remaining $181.2 million of revenue for the six months ended June 30, 2021 was from system sales. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">22</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="margin-top:21.6pt;min-height:36pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 30pt 0pt;"><a href="#Toc"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Gross Profit / Gross Margin</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The following table sets forth our gross profit / gross margin:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:19.83%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.04%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.59%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.87%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.58%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:19.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Three months ended  </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:14.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period-to-Period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:17.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:15.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period-to-Period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:19.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:19.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:14.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Change</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:17.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:15.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Change</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:19.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.08%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">$</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">%&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.77%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">$</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.58%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">%&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="25" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:19.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="22" style="vertical-align:bottom;white-space:nowrap;width:76.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(dollars&#160;in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:19.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Gross Profit:</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:19.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Product</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 63,468</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 51,675</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 11,793</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 22.8</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%&#160;</i>&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 119,743</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 96,636</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 23,107</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 23.9</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:19.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 18pt;"><i style="font-style:italic;">Product gross margin</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 45.3</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;"><i style="font-style:italic;">%&#160;</i>&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 44.1</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%&#160;</i>&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 44.9</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%&#160;</i>&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 42.1</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%&#160;</i>&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:19.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:9pt;font-style:italic;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:19.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Services</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 546</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 224</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 322</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"><i style="font-style:italic;white-space:pre-wrap;"> (143.8)</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%&#160;</i>&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 706</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 812</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (106)</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"><i style="font-style:italic;white-space:pre-wrap;"> (13.1)</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">%</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:19.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 18pt;"><i style="font-style:italic;">Services gross margin</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 7.7</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;"><i style="font-style:italic;">%&#160;</i>&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.04%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 3.9</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%&#160;</i>&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 5.3</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%&#160;</i>&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 6.4</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%&#160;</i>&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:19.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 24pt;">Total gross profit</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.17%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 64,014</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.04%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 51,899</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 12,115</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 23.3</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%&#160;</i>&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.94%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 120,449</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.59%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 97,448</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.87%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 23,001</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 23.6</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">%</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:19.83%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 24pt;">Gross margin</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 43.4</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;"><i style="font-style:italic;">%&#160;</i>&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.04%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 42.2</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%&#160;</i>&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.94%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 43.0</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%&#160;</i>&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 40.3</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%&#160;</i>&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;text-decoration:underline;text-decoration-color:#000000;">Three months ended June 30, 2021 Compared with Three months ended June 30, 2020</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Product</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="font-family:'Times';">Gross margin from product revenue was 45.3% for the three months ended June 30, 2021, compared to 44.1% for the three months ended June 30, 2020. The increase resulted from improved gross margins on parts and upgrades and</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Times';">Purion systems.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:27pt;margin:0pt;"><span style="font-family:'Times';visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Services</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:27pt;margin:0pt;"><span style="font-family:'Times';visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="font-family:'Times';">Gross margin from services revenue was 7.7% for the three months ended June 30, 2021, compared to 3.9% for the three months ended June 30, 2020. The increase in gross margin is attributable to changes in the mix of service contracts.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="font-family:'Times';visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;text-decoration:underline;text-decoration-color:#000000;">Six months ended June 30, 2021 Compared with Six months ended June 30, 2020</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Product</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="font-family:'Times';">Gross margin from product revenue was 44.9% for the six months ended June 30, 2021, compared to 42.1% for the six months ended June 30, 2020. The increase in gross margin resulted from an increased mix of higher margin parts and upgrades and improved margins on Purion systems.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:27pt;margin:0pt;"><span style="font-family:'Times';visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;">Services</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:27pt;margin:0pt;"><span style="font-family:'Times';visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="font-family:'Times';">Gross margin from services revenue was 5.3% for the six months ended June 30, 2021, compared to 6.4% for the six months ended June 30, 2020. The decrease in gross margin is attributable to changes in the mix of service contracts.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Times';visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">23</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="margin-top:21.6pt;min-height:36pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 30pt 0pt;"><a href="#Toc"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Operating Expenses</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The following table sets forth our operating expenses:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:23.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:23.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:16.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Three months ended  </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:15.25%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period-to-Period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:16.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:16.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period-to-Period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:23.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:16.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:15.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Change</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:16.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:16.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Change</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:23.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">$</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">%&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">$</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">%&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="25" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:23.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="22" style="vertical-align:bottom;white-space:nowrap;width:72.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(dollars&#160;in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:23.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Research and development</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 16,623</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 16,040</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 583</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 3.6</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">%</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 32,308</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 30,646</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 1,662</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 5.4</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">%</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:23.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt 0pt 0pt 12pt;"><i style="font-style:italic;">Percentage of revenue</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 11.3</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 13.0</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 11.5</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 12.7</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:23.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Sales and marketing</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 12,177</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 9,437</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 2,740</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 29.0</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">%</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 22,564</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 17,641</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 4,923</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 27.9</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">%</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:23.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt 0pt 0pt 12pt;"><i style="font-style:italic;">Percentage of revenue</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 8.3</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 7.7</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 8.1</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 7.3</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:23.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">General and administrative</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 11,217</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 10,041</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 1,176</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 11.7</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">%</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 21,230</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 19,077</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 2,153</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 11.3</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">%</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:23.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt 0pt 0pt 12pt;"><i style="font-style:italic;">Percentage of revenue</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 7.6</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 8.2</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 7.6</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 7.9</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:23.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Total operating expenses</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.95%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 40,017</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.95%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 35,518</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.95%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 4,499</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 12.7</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">%</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.95%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 76,102</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.95%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 67,364</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.95%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 8,738</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 13.0</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">%</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:23.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt 0pt 0pt 18pt;"><i style="font-style:italic;">Percentage of revenue</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 27.2</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 28.9</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 27.2</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 27.9</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.95%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Our operating expenses consist primarily of personnel costs, including salaries, commissions, incentive based compensation, stock-based compensation and related benefits and taxes; project material costs related to the design and development of new products and enhancement of existing products; and professional fees, travel and depreciation expenses.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Personnel costs are our largest expense, representing $25.4&#160;million or 63.5% of our total operating expenses for the three months ended June 30, 2021, compared to $22.8&#160;million or 64.3% of our total operating expenses for the three months ended June 30, 2020. Personnel costs were $47.5&#160;million or 62.4% of our total operating expenses for the six months ended June 30, 2021, compared to $42.8&#160;million or 63.5% of our total operating expenses for the six months ended June 30, 2020. The higher personnel costs for the three and six months ended June 30, 2021 is primarily due to an increase in personnel expenses to support growth.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Research and Development</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:27.19%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.97%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:4.56%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:4.73%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.67%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.67%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.67%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.82%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.39%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:27.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="6" style="vertical-align:bottom;white-space:nowrap;width:17.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Three months ended  </b></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:11.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period-to-Period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:16.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:13.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period-to-Period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:27.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:15.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:11.82%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Change</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:16.96%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:13.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Change</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:27.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">$</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.73%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">%&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.67%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">$</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">%&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="27" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:27.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="24" style="vertical-align:bottom;white-space:nowrap;width:68.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(dollars&#160;in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:27.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Research and development</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 16,623</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 16,040</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:4.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 583</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:4.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 3.6</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">%</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 32,308</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 30,646</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 1,662</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 5.4</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">%</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:27.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;"><i style="font-style:italic;">Percentage of revenue</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 11.3</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 13.0</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:4.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 11.5</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 12.7</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Our ability to remain competitive depends largely on continuously developing innovative technology, with new and enhanced features and systems and introducing them at competitive prices on a timely basis. Accordingly, based on our strategic plan, we establish annual R&amp;D budgets to fund programs that we expect will solve customers&#8217; high value, high impact, ion implantation challenges.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;text-decoration:underline;text-decoration-color:#000000;">Three months ended June 30, 2021 Compared with Three months ended June 30, 2020</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Research and development expense was $16.6&#160;million during the three months ended June 30, 2021, an increase of $0.6 million, or 3.6%, compared with $16.0 million during the three months ended June 30, 2020. The increase is primarily due to higher personnel expenses and incentive based pay expense. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;text-decoration:underline;text-decoration-color:#000000;">Six months ended June 30, 2021 Compared with Six months ended June 30, 2020</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="display:inline-block;text-indent:0pt;width:36pt;"></span>Research and development expense was $32.3&#160;million during the six months ended June 30, 2021, an increase of $1.7 million, or 5.4%, compared with $30.6 million during the six months ended June 30, 2020. The increase is primarily due to higher personnel expenses, supplies and materials costs for ongoing projects and increased depreciation associated with capital additions.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">24</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="margin-top:21.6pt;min-height:36pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 30pt 0pt;"><a href="#Toc"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Sales and Marketing</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:30.92%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.17%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.35%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:30.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:14.79%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Three months ended  </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:13.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period-to-Period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:15.7%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:13.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period-to-Period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:30.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:14.79%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:13.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Change</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:15.7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:13.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Change</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:30.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">$</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">%&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.94%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">$</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.22%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">%&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="25" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:30.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="22" style="vertical-align:bottom;white-space:nowrap;width:64.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(dollars&#160;in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:30.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Sales and marketing</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 12,177</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 9,437</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 2,740</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 29.0</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">%&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 22,564</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 17,641</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 4,923</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 27.9</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">%</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:30.92%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;"><i style="font-style:italic;">Percentage of revenue</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 8.3</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 7.7</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 8.1</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 7.3</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Our sales and marketing expenses result primarily from the sale of our equipment and services through our direct sales force. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;text-decoration:underline;text-decoration-color:#000000;">Three months ended June 30, 2021 Compared with Three months ended June 30, 2020</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Sales and marketing expense was $12.2&#160;million during the three months ended June 30, 2021, an increase of $2.7 million, or 29.0%, compared with $9.4&#160;million during the three months ended June 30, 2020. The increase is primarily due to increases in freight expense and project material costs as well as higher personnel related expenses. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;text-decoration:underline;text-decoration-color:#000000;">Six months ended June 30, 2021 Compared with Six months ended June 30, 2020</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Sales and marketing expense was $22.6&#160;million during the six months ended June 30, 2021, an increase of $4.9 million, or 27.9%, compared with $17.6&#160;million during the six months ended June 30, 2020. The increase is primarily due to increases in freight expense and project material costs as well as higher personnel related expenses. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">General and Administrative</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:29.54%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.35%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.96%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.3%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:29.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:15.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Three months ended  </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:13.73%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period-to-Period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:15.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:13.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period-to-Period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:29.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:15.82%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:13.73%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Change</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:15.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:13.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Change</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:29.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">$</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">%&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">$</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.3%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">%&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="25" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:29.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="22" style="vertical-align:bottom;white-space:nowrap;width:66.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(dollars&#160;in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:29.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">General and administrative</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 11,217</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 10,041</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 1,176</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 11.7</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">%&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 21,230</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 19,077</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 2,153</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 11.3</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">%</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">&#160;&#160;&#160;&#160;</p></td></tr><tr><td style="vertical-align:bottom;width:29.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;"><i style="font-style:italic;">Percentage of revenue</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 7.6</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 8.2</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.35%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 7.6</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.96%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 7.9</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.81%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-style:italic;visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Our general and administrative expenses result primarily from the costs associated with our executive, finance, information technology, legal and human resource functions.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;text-decoration:underline;text-decoration-color:#000000;">Three months ended June 30, 2021 Compared with Three months ended June 30, 2020</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:7pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">General and administrative expense was $11.2&#160;million during the three months ended June 30, 2021, an increase of $1.2 million, or 11.7%, compared with $10.0&#160;million during the three months ended June 30, 2020. The increase is primarily due to an increase in personnel expenses and incentive based pay expense.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><i style="font-style:italic;text-decoration:underline;text-decoration-color:#000000;">Six months ended June 30, 2021 Compared with Six months ended June 30, 2020</i></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:7pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">General and administrative expense was $21.2&#160;million during the six months ended June 30, 2021, an increase of $2.2 million, or 11.3%, compared with $19.1&#160;million during the six months ended June 30, 2020. The increase is primarily due to an increase in personnel expenses and incentive based pay expense.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Other (Expense) Income</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:27.78%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.59%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.59%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.59%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.3%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:27.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:16.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Three months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:14.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period-to-period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:16.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:14.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period-to-period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:27.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:16.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:14.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">change</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:16.34%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:14.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">change</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:27.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.35%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.35%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">$</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">%</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.35%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">$</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">%</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="26" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:27.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="23" style="vertical-align:bottom;white-space:nowrap;width:69.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(dollars&#160;in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:27.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Other expense</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (1,249)</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (808)</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 441</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 54.6</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">%</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (3,398)</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"><span style="white-space:pre-wrap;"> (2,249)</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 1,149</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 51.1</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">%</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:27.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;"><i style="font-style:italic;">Percentage of revenue </i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"><i style="font-style:italic;">&#160;</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"><i style="font-style:italic;white-space:pre-wrap;"> (0.9)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"><i style="font-style:italic;">&#160;</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"><i style="font-style:italic;white-space:pre-wrap;"> (0.7)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"><i style="font-style:italic;">&#160;</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"><i style="font-style:italic;white-space:pre-wrap;"> (1.2)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"><i style="font-style:italic;">&#160;</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.3%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"><i style="font-style:italic;white-space:pre-wrap;"> (1.0)</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr></table></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">25</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="margin-top:21.6pt;min-height:36pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 30pt 0pt;"><a href="#Toc"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Other (expense) income consists primarily of interest expense relating to the finance lease obligation we incurred in connection with the 2015 sale of our headquarters facility and other financing obligations, foreign exchange gains and losses attributable to fluctuations of the U.S. dollar against local currencies of certain of the countries in which we operate as well as interest earned on our invested cash balances. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Other expense was $1.2&#160;million for the three months ended June 30, 2021, compared with $0.8&#160;million for the three months ended June 30, 2020. The increase in other expense was primarily due to an increase in foreign currency exchange losses. Other expense was $3.4&#160;million for the six months ended June 30, 2021, compared with $2.2&#160;million for the six months ended June 30, 2020. The increase in other expense was primarily due to an increase in foreign currency exchange losses of $0.6 million as well as a reduction of $0.5 million in interest income when compared to the six-month period ended June 30, 2020.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="font-size:7pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">During the six-month periods ended June 30, 2021 and 2020, we had no significant off-balance-sheet risk such as exchange contracts, option contracts or other hedging arrangements. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:7pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Income Tax Provision </b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:26.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.87%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.89%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.87%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.84%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.87%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.88%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.87%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.67%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:26.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="6" style="vertical-align:bottom;white-space:nowrap;width:16.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Three months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:14.71%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period-to-period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="6" style="vertical-align:bottom;white-space:nowrap;width:16.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:15.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Period-to-period</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:26.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="6" style="vertical-align:bottom;white-space:nowrap;width:16.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:14.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">change</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="6" style="vertical-align:bottom;white-space:nowrap;width:16.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="4" style="vertical-align:bottom;white-space:nowrap;width:15.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">change</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:26.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:7.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">$</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">%</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="3" style="vertical-align:bottom;white-space:nowrap;width:7.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">$</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">%</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="28" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;width:26.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="25" style="vertical-align:bottom;white-space:nowrap;width:70.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(dollars&#160;in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:26.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:justify;margin:0pt;">Income tax provision</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 3,842</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 2,271</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 1,571</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"><i style="font-style:italic;white-space:pre-wrap;"> (69.2)</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">%</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 5,563</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 3,312</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 2,251</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 68.0</i></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">%</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:26.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 18pt;"><i style="font-style:italic;">Percentage of revenue </i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"><i style="font-style:italic;">&#160;</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 2.6</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"><i style="font-style:italic;">&#160;</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><i style="font-style:italic;white-space:pre-wrap;"> 1.8</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.84%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"><i style="font-style:italic;">&#160;</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 2.0</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"><i style="font-style:italic;">&#160;</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 1.4</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><i style="font-style:italic;">%</i></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.67%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Income tax expense was $3.8 million for the three months ended June 30, 2021, compared to $2.3 million for the three months ended June 30, 2020. The $1.5 million increase was primarily due to a $7.2 million increase in pretax income. Income tax expense was $5.6 million during the six months ended June 30, 2021, compared to $3.3 million for the six months ended June 30, 2020. The $2.3 million increase was primarily due to a $13.1 million increase in pretax income. The effective tax rate for the three and six months ended June 30, 2021 and 2020, respectively, was less than the U.S. statutory rate of 21% due to favorable discrete items related to equity compensation in those periods as well as Federal research and development tax credits that reduce the annual tax rate.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We had $51.4 million and $57.9 million of net deferred tax assets worldwide relating to net operating loss carryforwards, tax credit carryforwards and other temporary differences, as of June 30, 2021 and December 31, 2020, respectively. These deferred tax assets are available to reduce income taxes in future years. We have a $9.1 million valuation allowance in the U.S. against certain tax credits and state net operating losses due to the uncertainty of their realization based on long-term Company forecasts and the expiration dates on these tax assets. If future operating results of the Company within the U.S. or these foreign jurisdictions are significantly less than our expectations, it is reasonably possible that we would be required to record an additional valuation allowance on our deferred tax assets in the future.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><a id="LiquidityandCapitalResources_541794"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Liquidity and Capital Resources</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We had $219.7&#160;million in unrestricted cash and cash equivalents at June 30, 2021, in addition to $0.8&#160;million in restricted cash. Management believes that maintaining a strong cash balance is necessary to provide funding for potential ramps in our business which can require significant cash investment to meet sudden demand. Additionally, we are using cash in our 2021 stock repurchase program and are considering both organic and inorganic opportunities to drive future growth, for which cash resources will be necessary.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="font-size:6pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Our liquidity is affected by many factors. Some of these relate specifically to the operations of our business, for example, the rate of sale of our products, and others relate to the uncertainties of global economic conditions, including the availability of credit and the condition of the overall semiconductor equipment industry. Our established cost structure, other than cost of goods sold, does not vary significantly with changes in volume. We experience fluctuations in operating results and cash flows depending on these factors. Stock repurchases, as discussed below, also reduce our cash balances.</p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">26</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="margin-top:21.6pt;min-height:36pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 30pt 0pt;"><a href="#Toc"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:27pt;margin:0pt;"><span style="font-size:6pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">During the six months ended June 30, 2021, we generated $45.9&#160;million of cash related to operating activities. During the six months ended June 30, 2020, we generated $56.6&#160;million of cash related to operating activities. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:27pt;margin:0pt;"><span style="font-size:6pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Investing activities for the six months ended June 30, 2021 and 2020 resulted in cash outflows of $2.4 million and $3.0&#160;million, respectively, used for capital expenditures.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:27pt;margin:0pt;"><span style="font-size:6pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Financing activities for the six months ended June 30, 2021 resulted in a cash usage of $28.3&#160;million. During the first six months of 2021, $25.0 million in cash was used to repurchase our common stock and $6.5 million was used for payments to government tax authorities for income tax withholding on employee compensation arising from the vesting of RSUs, where shares are withheld by the Company, as well as $0.4 million relating to the reduction of the liability under the finance lease of our corporate headquarters. These amounts were partially offset by $3.6 million of proceeds from the exercise of stock options and purchase of shares under our 2020 ESPP during the first six months of 2021. In comparison, financing activities for the six months ended June 30, 2020 resulted in cash usage of $3.7&#160;<span style="white-space:pre-wrap;">million, $7.5 million of which related to the repurchase of our common stock and $3.9 million related to payments made to government tax authorities for income tax withholding on employee compensation arising from the vesting of RSUs, as well as $0.1 million relating to the reduction of our financing lease liability. These amounts were partially offset by $7.8 million of proceeds related to the exercise of stock options and purchase of shares under our prior employee stock purchase plan during the first six months of 2020.   </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Under the rules of the U.S. Securities and Exchange Commission (the &#8220;SEC&#8221;), we qualify as a &#8220;well-known seasoned issuer,&#8221; which allows us to file shelf registration statements to register an unspecified amount of securities that are effective upon filing. On May 29, 2020, we filed such a shelf registration statement with the SEC for the issuance of an unspecified amount of common stock, preferred stock, various series of debt securities and/or warrants to purchase any of such securities, either individually or in units, from time to time at prices and on terms to be determined at the time of any such offering. This registration statement was effective upon filing and will remain in effect for up to three years from filing, prior to which time we may file another shelf registration statement to maintain the availability of this financing option.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">On July 31, 2020, we entered into a Senior Secured Credit Facilities Credit Agreement (the &#8220;Credit Agreement&#8221;) with Silicon Valley Bank.&#160;The Credit Agreement provides for a revolving credit facility in an aggregate principal amount not to exceed $40.0 million. Our obligations under the Credit Agreement are secured by&#160;a security interest, senior to any current and future debts and to any security interest, in all of our rights, title, and interest in, to and under substantially all of our assets, subject to limited exceptions, including permitted liens. The revolving credit facility terminates on July 31, 2023. As of June 30, 2021, we were in compliance with all covenant requirements of the Credit Agreement. As of such date, no borrowings had been made under the Credit Agreement, although a letter of credit for $5.9 million reduces the funds available for borrowing under the credit line. We have no immediate plans to borrow under the Credit Agreement, but we will use the facility for letters of credit, for ongoing working capital needs and to fund general corporate purposes, as desired. We entered into a First Amendment to the Credit Agreement with Silicon Valley Bank in March 2021 to (i) align the covenants with our 2021 stock repurchase program, and (ii) establish terms to transition from a Eurodollar based interest rate option to an interest rate benchmark using a secured overnight financing rate (known as &#8220;SOFR&#8221;) published by the&#160;Federal Reserve Bank of New York. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We believe that based on our current market, revenue, expense and cash flow forecasts, our existing cash, cash equivalents and equity and debt financing capacity will be sufficient to satisfy our anticipated cash requirements for the short and long-term.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="font-size:6pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Commitments and Contingencies</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:6pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Significant commitments and contingencies at June 30, 2021 are consistent with those discussed in Item 7, &#8220;Management&#8217;s Discussion and Analysis of Financial Condition and Results of Operations,&#8221; and Note 16 to the consolidated financial statements in our Annual Report on Form&#160;10-K for the fiscal year ended December&#160;31, 2020.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">27</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="margin-top:21.6pt;min-height:36pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 30pt 0pt;"><a href="#Toc"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><a id="_1f68e730_9c88_4cbb_bf22_168763105723"></a><a id="Item3QuantitativeandQualitativeDisclosur"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item&#160;3.&#160;&#160;Quantitative and Qualitative Disclosures about Market Risk.</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">As of June 30, 2021, there have been no material changes to the quantitative information about market risk disclosed in Item&#160;7A to our Annual Report on Form&#160;10-K for the year ended December&#160;31, 2020.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><a id="_50931543_c27a_4029_8f76_9092200e1ae9"></a><a id="Item4ControlsandProcedures_773908"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item 4.&#160;&#160;Controls and Procedures.</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Evaluation of Disclosure Controls and Procedures</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Our management, with the participation of our principal executive officer and principal financial officer, has evaluated the effectiveness of our disclosure controls and procedures (as defined in Rule&#160;13a-15(e)&#160;under the Securities Exchange Act of 1934, as amended (the &#8220;Exchange Act&#8221;)) as of the end of the period covered by this report (the &#8220;Evaluation Date&#8221;). Based on this evaluation, our principal executive officer and principal financial officer concluded that, as of the Evaluation Date, these disclosure controls and procedures are effective.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Changes in Internal Control over Financial Reporting</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">There was no change in our internal control over financial reporting (as defined in Rule&#160;13a-15(f)&#160;under the Exchange Act) identified in connection with the evaluation of our internal control that occurred during the three months ended June 30, 2021 that has materially affected, or is reasonably likely to materially affect, our internal control over financial reporting.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt 0pt 10pt 0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">28</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="margin-top:21.6pt;min-height:36pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 30pt 0pt;"><a href="#Toc"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><a id="_f47e4b92_624d_4013_8c43_e2f97c525537"></a><a id="PARTIIOTHERINFORMATION_940705"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">PART&#160;II&#8212;OTHER INFORMATION</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><a id="Item1LegalProceedings_163018"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item&#160;1.&#160;&#160;Legal Proceedings.</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We are, from time to time, a party to litigation that arises in the normal course of our business operations. We are not presently a party to any litigation that we believe might have a material adverse effect on our business operations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><a id="_3f98780c_a313_4d10_997d_b15182192d42"></a><a id="Item1ARiskFactors_163682"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item&#160;1A.&#160;&#160;Risk Factors.</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">As of June 30, 2021, there have been no material changes to the risk factors described in Item&#160;1A to our Annual Report on Form&#160;10-K for the year ended December&#160;31, 2020.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><a id="_3b48526e_ac36_404b_9f2a_e360017d9e75"></a><a id="_contentSection_2ae4ce42_1c83_49d0_9f35_"></a><a id="Item2UnregisteredSalesofEquitySecurities"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item&#160;2.&#160;&#160;Unregistered Sales of Equity Securities and Use of Proceeds.</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:4.5pt 0pt 0pt 0pt;">In December 2020, our Board of Directors authorized a share repurchase program covering 2021 for up to&#160;$100 million&#160;<span style="white-space:pre-wrap;">of the Company&#39;s common stock.  </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The following table summarizes the stock repurchase activity, based upon settlement date, for the three months ended June 30, 2021 as well as the approximate dollar value of shares that may yet be purchased pursuant to our stock repurchase program: </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:middle;white-space:nowrap;width:31.1%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:50%;transform:translate(0,-50%);width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:14.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.97%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:14.48%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:15.82%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:31.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:14.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total Number of Shares Purchased</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:11.97%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Average Price Paid per Share</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:14.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total Number of Shares Purchased as Part of Publicly Announced Program</b></p></td><td style="vertical-align:bottom;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:17.84%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Approximate Dollar Value of Shares that May Yet Be Purchased Under the Program</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:31.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;width:64.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands except per share amounts)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:middle;white-space:nowrap;width:31.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">April 1, 2021 through April 30, 2021</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:14.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 117</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:11.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">$43.35</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:14.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 117</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:15.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><span style="white-space:pre-wrap;"> 83,286</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;white-space:nowrap;width:31.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">May 1, 2021 through May 31, 2021</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 100</span></p></td><td style="vertical-align:bottom;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">$39.74</p></td><td style="vertical-align:bottom;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.48%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 100</span></p></td><td style="vertical-align:bottom;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:15.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><span style="white-space:pre-wrap;"> 79,312</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:middle;white-space:nowrap;width:31.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">June 1, 2021 through June 30, 2021</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:14.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 106</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:11.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">$40.74</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:14.48%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 106</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:15.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><span style="white-space:pre-wrap;"> 75,006</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:middle;white-space:nowrap;width:31.1%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.01%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.48%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 323</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:14.48%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"><span style="white-space:pre-wrap;"> 323</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:15.82%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td colspan="10" style="vertical-align:bottom;white-space:nowrap;width:97.97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.02%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><a id="_f8f1e562_e648_48fa_916e_706ff73af01c"></a><a id="Item3DefaultsUponSeniorSecurities_689958"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item&#160;3.&#160;&#160;Defaults Upon Senior Securities.</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">None.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><a id="_421db8a3_edad_4fa7_8991_aa46450119cd"></a><a id="Item4MineSafetyDisclosures_365895"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item&#160;4.&#160;&#160;Mine Safety Disclosures.</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Not Applicable.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><a id="_e4d47203_807e_4036_b389_9b25d4bb6c04"></a><a id="Item5OtherInformation_535580"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item&#160;5.&#160;&#160;Other Information.</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">None.</p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">29</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="margin-top:21.6pt;min-height:36pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 30pt 0pt;"><a href="#Toc"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><a id="_f994b036_b578_4328_805e_205eb2049c75"></a><a id="Item6Exhibits_453635"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Item&#160;6.&#160;&#160;Exhibits.</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The following exhibits are filed herewith:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:10%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"></div></div></td><td style="vertical-align:bottom;width:2.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"></div></div></td><td style="vertical-align:bottom;width:86.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"></div></div></td></tr><tr><td style="vertical-align:bottom;width:10%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;line-height:9pt;margin:0pt;"><b style="font-weight:bold;">Exhibit<br />No</b></p></td><td style="vertical-align:bottom;width:2.99%;border-bottom:1px solid transparent;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;line-height:9pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;width:86.99%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;line-height:9pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Description</b></p></td></tr><tr><td style="vertical-align:top;width:10%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:9pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:9pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:86.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:9pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:10%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">3.1</p></td><td style="vertical-align:bottom;width:2.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:86.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;" href="http://www.sec.gov/Archives/edgar/data/1113232/000155837017008078/acls-20170930ex31a83feb6.htm"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Restated Certificate of Incorporation of the Company filed November 2, 2017. Incorporated by reference to Exhibit 3.1 of the Company&#8217;s Form 10-Q filed with the Commission on November 3, 2017.</span></a></p></td></tr><tr><td style="vertical-align:top;width:10%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:86.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:10%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">3.2</p></td><td style="vertical-align:bottom;width:2.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:86.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;" href="http://www.sec.gov/Archives/edgar/data/1113232/000110465914040101/a14-8383_4ex3d2.htm"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Bylaws of the Company, as amended as of May 13, 2014. Incorporated by reference to Exhibit 3.2 of the Company&#8217;s Form 8-K filed with the Commission on May 19, 2014.</span></a></p></td></tr><tr><td style="vertical-align:top;width:10%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:86.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:10%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">31.1</p></td><td style="vertical-align:bottom;width:2.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:86.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;" href="acls-20210630xex31d1.htm"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Certification of the Principal Executive Officer under Exchange Act Rule&#160;13a-14(a)/15d-14(a)&#160;(Section&#160;302 of the Sarbanes-Oxley Act), dated August 6, 2021. Filed herewith.</span></a></p></td></tr><tr><td style="vertical-align:top;width:10%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:86.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:10%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">31.2</p></td><td style="vertical-align:bottom;width:2.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:86.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;" href="acls-20210630xex31d2.htm"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Certification of the Principal Financial Officer under Exchange Act Rule&#160;13a-14(a)/15d-14(a)&#160;(Section&#160;302 of the Sarbanes-Oxley Act), dated August 6, 2021. Filed herewith.</span></a></p></td></tr><tr><td style="vertical-align:top;width:10%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:86.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:10%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">32.1</p></td><td style="vertical-align:bottom;width:2.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:86.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;" href="acls-20210630xex32d1.htm"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Certification of the Principal Executive Officer pursuant to Section&#160;1350 of Chapter 63 of title 18 of the United States Code (Section&#160;906 of the Sarbanes-Oxley Act), dated August 6, 2021. Filed herewith.</span></a></p></td></tr><tr><td style="vertical-align:top;width:10%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:86.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:10%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">32.2</p></td><td style="vertical-align:bottom;width:2.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:86.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><a style="-sec-extract:exhibit;" href="acls-20210630xex32d2.htm"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Certification of the Principal Financial Officer pursuant to Section&#160;1350 of Chapter 63 of title 18 of the United States Code (Section&#160;906 of the Sarbanes-Oxley Act), dated August 6, 2021. Filed herewith.</span></a></p></td></tr><tr><td style="vertical-align:top;width:10%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:86.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:10%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">101</p></td><td style="vertical-align:bottom;width:2.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:86.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The following materials from the Company&#8217;s Form&#160;10-Q for the quarter ended June 30, 2021, formatted in inline eXtensible Business Reporting Language (iXBRL): (i)&#160;Consolidated Statements of Operations, (ii)&#160;Consolidated Statements of Comprehensive Income, (iii)&#160;Consolidated Balance Sheets, (iv)&#160;Consolidated Statements of Cash Flows and (v)&#160;Notes to Consolidated Financial Statements (Unaudited). Filed herewith.</p></td></tr><tr><td style="vertical-align:top;width:10%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:86.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:10%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;">104</p></td><td style="vertical-align:bottom;width:2.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:86.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cover Page Interactive Data File (formatted as iXBRL and contained in Exhibit 101).</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt 0pt 10pt 0pt;"><span style="visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">30</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;page-break-after:always;width:81.18%;border:0;margin:30pt 9.41% 30pt 9.41%;"></div><div style="max-width:100%;padding-left:9.41%;padding-right:9.41%;position:relative;"><div style="margin-top:21.6pt;min-height:36pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 30pt 0pt;"><a href="#Toc"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">Table of Contents</span></a></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><a id="_1f67859d_ef99_4595_b7c2_fc11f2c470a0"></a><a id="SIGNATURES_211783"></a><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">SIGNATURES</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Pursuant to the requirements of the Securities Exchange Act of 1934, the Registrant has duly caused this report to be signed on its behalf by the undersigned, thereunto duly authorized.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"></div></div></td><td style="vertical-align:top;width:4.33%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"></div></div></td><td style="vertical-align:top;width:45.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"></div></div></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;">AXCELIS TECHNOLOGIES,&#160;INC.</p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;">DATED: August 6, 2021</p></td><td style="vertical-align:top;width:4.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;">By:</p></td><td style="vertical-align:top;width:45.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;">/s/ KEVIN J. BREWER</p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:4.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:45.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:4.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:45.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;">Kevin J. Brewer</p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><span style="font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:4.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><span style="font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:45.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><i style="font-style:italic;">Executive Vice President and Chief Financial Officer</i></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><span style="font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:4.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><span style="font-style:italic;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:top;width:45.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.37;margin:0pt;"><i style="font-style:italic;">Duly Authorized Officer and Principal Financial Officer</i></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:24pt 0pt 0pt 0pt;">31</p></div></div>
<div style="background-color:#000000;clear:both;height:2pt;margin-left:9.41%;margin-right:9.41%;margin-top:30pt;page-break-after:avoid;width:81.18%;border:0;"></div></body></html>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-31.1
<SEQUENCE>2
<FILENAME>acls-20210630xex31d1.htm
<DESCRIPTION>EX-31.1
<TEXT>
<!--Enhanced HTML document created with Toppan Merrill Bridge  9.11.0.85--><!--Created on: 8/6/2021 02:50:17 PM (UTC)--><!DOCTYPE HTML PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd"><html><head><meta charset="UTF-8"><title></title></head><body><div style="margin-top:30pt;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:right;margin:0pt;"><b style="font-weight:bold;">Exhibit&#160;31.1</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:0pt;"><b style="font-weight:bold;">CERTIFICATION</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:0pt;"><b style="font-weight:bold;">of the Principal Executive Officer</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:0pt;"><b style="font-weight:bold;">Pursuant to Rule&#160;13a-14(a)/15d-14(a)&#160;(implementing Section&#160;302 of the Sarbanes-Oxley Act)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;">I, Mary G. Puma, certify that:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;padding-left:27.5pt;text-indent:-27.5pt;margin:0pt;">1.&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;I have reviewed this quarterly report on Form&#160;10-Q of Axcelis Technologies,&#160;Inc.;</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;padding-left:27.5pt;text-indent:-27.5pt;margin:0pt;">2.&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Based on my knowledge, this report does not contain any untrue statement of a material fact or omit to state a material fact necessary to make the statements made, in light of the circumstances under which such statements were made, not misleading with respect to the period covered by this report;</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;padding-left:27.5pt;text-indent:-27.5pt;margin:0pt;">3.&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Based on my knowledge, the financial statements, and other financial information included in this report, fairly present in all material respects the financial condition, results of operations and cash flows of the registrant as of, and for, the periods presented in this report;</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;padding-left:27.5pt;text-indent:-27.5pt;margin:0pt;">4.&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The registrant&#8217;s other certifying officer(s)&#160;and I are responsible for establishing and maintaining disclosure controls and procedures (as defined in Exchange Act Rules&#160;13a-15(e)&#160;and 15d-15(e)) and internal control over financial reporting (as defined in Exchange Act Rules&#160;13a-15(f)&#160;and 15d-15(f)) for the registrant and have:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:5pt;line-height:1.19;padding-left:27.5pt;text-indent:-27.5pt;margin:0pt 0pt 0pt 28.59pt;"><font style="font-size:10pt;">(a)&#160;&#160;&#160;&#160;&#160;&#160;</font>&#160;<font style="font-size:10pt;">Designed such disclosure controls and procedures, or caused such disclosure controls and procedures to be designed under our supervision, to ensure that material information relating to the registrant, including its consolidated subsidiaries, is made known to us by others within those entities, particularly during the period in which this report is being prepared;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:5pt;line-height:1.19;padding-left:27.5pt;text-indent:-27.5pt;margin:0pt 0pt 0pt 28.59pt;"><font style="font-size:10pt;">(b)&#160;&#160;&#160;&#160;&#160;&#160;</font>&#160;<font style="font-size:10pt;">Designed such internal control over financial reporting, or caused such internal control over financial reporting to be designed under our supervision, to provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting principles;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:5pt;line-height:1.19;padding-left:27.5pt;text-indent:-27.5pt;margin:0pt 0pt 0pt 28.59pt;"><font style="font-size:10pt;">(c)&#160;&#160;&#160;&#160;&#160;&#160;</font>&#160;<font style="font-size:10pt;">Evaluated the effectiveness of the registrant&#8217;s disclosure controls and procedures and presented in this report our conclusions about the effectiveness of the disclosure controls and procedures, as of the end of the period covered by this report based on such evaluation; and</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:5pt;line-height:1.19;padding-left:27.5pt;text-indent:-27.5pt;margin:0pt 0pt 0pt 28.59pt;"><font style="font-size:10pt;">(d)&#160;&#160;&#160;&#160;&#160;&#160;</font>&#160;<font style="font-size:10pt;">Disclosed in this report any change in the registrant&#8217;s internal control over financial reporting that occurred during the registrant&#8217;s most recent fiscal quarter (the registrant&#8217;s fourth fiscal quarter in the case of an annual report) that has materially affected, or is reasonably likely to materially affect, the registrant&#8217;s internal control over financial reporting; and</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;padding-left:27.5pt;text-indent:-27.5pt;margin:0pt;">5.&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The registrant&#8217;s other certifying officer(s)&#160;and I have disclosed, based on our most recent evaluation of internal control over financial reporting, to the registrant&#8217;s auditors and the audit committee of the registrant&#8217;s board of directors (or persons performing the equivalent functions):</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:5pt;line-height:1.19;padding-left:27.5pt;text-indent:-27.5pt;margin:0pt 0pt 0pt 28.59pt;"><font style="font-size:10pt;">(a)&#160;&#160;&#160;&#160;&#160;&#160;</font>&#160;<font style="font-size:10pt;">All significant deficiencies and material weaknesses in the design or operation of internal control over financial reporting which are reasonably likely to adversely affect the registrant&#8217;s ability to record, process, summarize and report financial information; and</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:5pt;line-height:1.19;padding-left:27.5pt;text-indent:-27.5pt;margin:0pt 0pt 0pt 28.59pt;"><font style="font-size:10pt;">(b)&#160;&#160;&#160;&#160;&#160;&#160;</font>&#160;<font style="font-size:10pt;">Any fraud, whether or not material, that involves management or other employees who have a significant role in the registrant&#8217;s internal control over financial reporting.</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><div align="left"><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;table-layout:auto;width:100%;"><tr style="height:1pt;"><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;">Date: August 6, 2021</p></td><td style="vertical-align:top;width:50%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;">/s/ MARY G. PUMA</p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;">Mary G. Puma,</p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="font-style:italic;visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><i style="font-style:italic;">President and Chief Executive Officer</i></p></td></tr></table></div><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></div></div><hr style="background-color:#000000;clear:both;color:#000000;height:2pt;line-height:0;margin-left:10.35%;margin-right:10.35%;margin-top:30pt;page-break-after:avoid;width:79.3%;border-width:0;"></body></html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-31.2
<SEQUENCE>3
<FILENAME>acls-20210630xex31d2.htm
<DESCRIPTION>EX-31.2
<TEXT>
<!--Enhanced HTML document created with Toppan Merrill Bridge  9.11.0.85--><!--Created on: 8/6/2021 02:50:20 PM (UTC)--><!DOCTYPE HTML PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd"><html><head><meta charset="UTF-8"><title></title></head><body><div style="margin-top:30pt;"></div><div style="max-width:100%;padding-left:10.35%;padding-right:10.35%;position:relative;"><div style="margin-top:21.6pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:right;margin:0pt;"><b style="font-weight:bold;">Exhibit&#160;31.2</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:0pt;"><b style="font-weight:bold;">CERTIFICATION</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:0pt;"><b style="font-weight:bold;">of the Principal Financial Officer</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:0pt;"><b style="font-weight:bold;">Pursuant to Rule&#160;13a-14(a)/15d-14(a)&#160;(implementing Section&#160;302 of the Sarbanes-Oxley Act)</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;">I, Kevin J. Brewer, certify that:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;padding-left:27.5pt;text-indent:-27.5pt;margin:0pt;">1.&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;I have reviewed this quarterly report on Form&#160;10-Q of Axcelis Technologies,&#160;Inc.;</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;padding-left:27.5pt;text-indent:-27.5pt;margin:0pt;">2.&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Based on my knowledge, this report does not contain any untrue statement of a material fact or omit to state a material fact necessary to make the statements made, in light of the circumstances under which such statements were made, not misleading with respect to the period covered by this report;</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;padding-left:27.5pt;text-indent:-27.5pt;margin:0pt;">3.&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Based on my knowledge, the financial statements, and other financial information included in this report, fairly present in all material respects the financial condition, results of operations and cash flows of the registrant as of, and for, the periods presented in this report;</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;padding-left:27.5pt;text-indent:-27.5pt;margin:0pt;">4.&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The registrant&#8217;s other certifying officer(s)&#160;and I are responsible for establishing and maintaining disclosure controls and procedures (as defined in Exchange Act Rules&#160;13a-15(e)&#160;and 15d-15(e)) and internal control over financial reporting (as defined in Exchange Act Rules&#160;13a-15(f)&#160;and 15d-15(f)) for the registrant and have:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:5pt;line-height:1.19;padding-left:27.5pt;text-indent:-27.5pt;margin:0pt 0pt 0pt 28.59pt;"><font style="font-size:10pt;">(a)&#160;&#160;&#160;&#160;&#160;&#160;</font>&#160;<font style="font-size:10pt;">Designed such disclosure controls and procedures, or caused such disclosure controls and procedures to be designed under our supervision, to ensure that material information relating to the registrant, including its consolidated subsidiaries, is made known to us by others within those entities, particularly during the period in which this report is being prepared;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:5pt;line-height:1.19;padding-left:27.5pt;text-indent:-27.5pt;margin:0pt 0pt 0pt 28.59pt;"><font style="font-size:10pt;">(b)&#160;&#160;&#160;&#160;&#160;&#160;</font>&#160;<font style="font-size:10pt;">Designed such internal control over financial reporting, or caused such internal control over financial reporting to be designed under our supervision, to provide reasonable assurance regarding the reliability of financial reporting and the preparation of financial statements for external purposes in accordance with generally accepted accounting principles;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:5pt;line-height:1.19;padding-left:27.5pt;text-indent:-27.5pt;margin:0pt 0pt 0pt 28.59pt;"><font style="font-size:10pt;">(c)&#160;&#160;&#160;&#160;&#160;&#160;</font>&#160;<font style="font-size:10pt;">Evaluated the effectiveness of the registrant&#8217;s disclosure controls and procedures and presented in this report our conclusions about the effectiveness of the disclosure controls and procedures, as of the end of the period covered by this report based on such evaluation; and</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:5pt;line-height:1.19;padding-left:27.5pt;text-indent:-27.5pt;margin:0pt 0pt 0pt 28.59pt;"><font style="font-size:10pt;">(d)&#160;&#160;&#160;&#160;&#160;&#160;</font>&#160;<font style="font-size:10pt;">Disclosed in this report any change in the registrant&#8217;s internal control over financial reporting that occurred during the registrant&#8217;s most recent fiscal quarter (the registrant&#8217;s fourth fiscal quarter in the case of an annual report) that has materially affected, or is reasonably likely to materially affect, the registrant&#8217;s internal control over financial reporting; and</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;padding-left:27.5pt;text-indent:-27.5pt;margin:0pt;">5.&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;The registrant&#8217;s other certifying officer(s)&#160;and I have disclosed, based on our most recent evaluation of internal control over financial reporting, to the registrant&#8217;s auditors and the audit committee of the registrant&#8217;s board of directors (or persons performing the equivalent functions):</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:5pt;line-height:1.19;padding-left:27.5pt;text-indent:-27.5pt;margin:0pt 0pt 0pt 28.59pt;"><font style="font-size:10pt;">(a)&#160;&#160;&#160;&#160;&#160;&#160;</font>&#160;<font style="font-size:10pt;">All significant deficiencies and material weaknesses in the design or operation of internal control over financial reporting which are reasonably likely to adversely affect the registrant&#8217;s ability to record, process, summarize and report financial information; and</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:5pt;line-height:1.19;padding-left:27.5pt;text-indent:-27.5pt;margin:0pt 0pt 0pt 28.59pt;"><font style="font-size:10pt;">(b)&#160;&#160;&#160;&#160;&#160;&#160;</font>&#160;<font style="font-size:10pt;">Any fraud, whether or not material, that involves management or other employees who have a significant role in the registrant&#8217;s internal control over financial reporting.</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><div align="left"><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;table-layout:auto;width:100%;"><tr style="height:1pt;"><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;">Date: August 6, 2021</p></td><td style="vertical-align:top;width:50%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;">/s/ KEVIN J. BREWER</p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;">Kevin J. Brewer,</p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="font-style:italic;visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><i style="font-style:italic;">Executive Vice President and Chief Financial Officer</i></p></td></tr></table></div><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></div><div style="clear:both;margin-bottom:27.35pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></div></div><hr style="background-color:#000000;clear:both;color:#000000;height:2pt;line-height:0;margin-left:10.35%;margin-right:10.35%;margin-top:30pt;page-break-after:avoid;width:79.3%;border-width:0;"></body></html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-32.1
<SEQUENCE>4
<FILENAME>acls-20210630xex32d1.htm
<DESCRIPTION>EX-32.1
<TEXT>
<!--Enhanced HTML document created with Toppan Merrill Bridge  9.11.0.85--><!--Created on: 8/6/2021 02:50:24 PM (UTC)--><!DOCTYPE HTML PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd"><html><head><meta charset="UTF-8"><title></title></head><body><div style="margin-top:30pt;"></div><div style="max-width:100%;padding-left:10.29%;padding-right:10.29%;position:relative;"><div style="margin-top:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:right;margin:0pt;"><b style="font-weight:bold;">EXHIBIT&#160;32.1</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:0pt;"><b style="font-weight:bold;">AXCELIS TECHNOLOGIES,&#160;INC.</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:0pt;"><b style="font-weight:bold;">Certification of the Principal Executive Officer</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:0pt;"><b style="font-weight:bold;">Pursuant to Section&#160;1350 of Chapter&#160;63 of title 18 of the United States Code</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-indent:27.5pt;margin:0pt;">The undersigned Chief Executive Officer of Axcelis Technologies,&#160;Inc., a Delaware corporation, hereby certifies, for the purposes of Section&#160;1350 of Chapter&#160;63 of title 18 of the United States Code (as implemented by Section&#160;906 of the Sarbanes-Oxley Act of 2002) as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-indent:27.5pt;margin:0pt;">This Form&#160;10-Q quarterly report fully complies with the requirements of section&#160;13(a)&#160;or 15(d)&#160;of the Securities Exchange Act of 1934 (15 U.S.C. 78m or 78o(d)) and the information contained herein fairly presents, in all material respects, the financial condition and results of operations of the Company.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-indent:27.5pt;margin:0pt;">IN WITNESS WHEREOF, the undersigned has executed this Certification as of August 6, 2021.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><div align="left"><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;table-layout:auto;width:100%;"><tr style="height:1pt;"><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="position:absolute;top:0pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="font-size:1pt;visibility:hidden;">&#8203;</font></p></div></div></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:50%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;">/s/ MARY G. PUMA</p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;">Mary G. Puma</p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="font-style:italic;visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><i style="font-style:italic;">President and Chief Executive Officer of Axcelis Technologies,&#160;Inc.</i></p></td></tr></table></div><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></div></div><hr style="background-color:#000000;clear:both;color:#000000;height:2pt;line-height:0;margin-left:10.29%;margin-right:10.29%;margin-top:30pt;page-break-after:avoid;width:79.41%;border-width:0;"></body></html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-32.2
<SEQUENCE>5
<FILENAME>acls-20210630xex32d2.htm
<DESCRIPTION>EX-32.2
<TEXT>
<!--Enhanced HTML document created with Toppan Merrill Bridge  9.11.0.85--><!--Created on: 8/6/2021 02:50:27 PM (UTC)--><!DOCTYPE HTML PUBLIC "-//W3C//DTD HTML 4.01 Transitional//EN" "http://www.w3.org/TR/html4/loose.dtd"><html><head><meta charset="UTF-8"><title></title></head><body><div style="margin-top:30pt;"></div><div style="max-width:100%;padding-left:10.29%;padding-right:10.29%;position:relative;"><div style="margin-top:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></div><div style="clear:both;max-width:100%;position:relative;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:right;margin:0pt;"><b style="font-weight:bold;">EXHIBIT&#160;32.2</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:0pt;"><b style="font-weight:bold;">AXCELIS TECHNOLOGIES,&#160;INC.</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:0pt;"><b style="font-weight:bold;">Certification of the Principal Financial Officer</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-align:center;margin:0pt;"><b style="font-weight:bold;">Pursuant to Section&#160;1350 of Chapter&#160;63 of title 18 of the United States Code</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-indent:27.5pt;margin:0pt;">The undersigned Chief Financial Officer of Axcelis Technologies,&#160;Inc., a Delaware corporation, hereby certifies, for the purposes of Section&#160;1350 of Chapter&#160;63 of title 18 of the United States Code (as implemented by Section&#160;906 of the Sarbanes-Oxley Act of 2002) as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-indent:27.5pt;margin:0pt;">This Form&#160;10-Q quarterly report fully complies with the requirements of section&#160;13(a)&#160;or 15(d)&#160;of the Securities Exchange Act of 1934 (15 U.S.C. 78m or 78o(d)) and the information contained herein fairly presents, in all material respects, the financial condition and results of operations of the Company.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;text-indent:27.5pt;margin:0pt;">IN WITNESS WHEREOF, the undersigned has executed this Certification as of August 6, 2021.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p><div align="left"><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;table-layout:auto;width:100%;"><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:50%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;">/s/ KEVIN J. BREWER</p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;">Kevin J. Brewer</p></td></tr><tr><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="font-style:italic;visibility:hidden;">&#8203;</font></p></td><td style="vertical-align:top;width:50%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><i style="font-style:italic;">Executive Vice President and Chief Financial Officer of Axcelis Technologies,&#160;Inc.</i></p></td></tr></table></div><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></div><div style="clear:both;margin-bottom:30pt;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.19;margin:0pt;"><font style="visibility:hidden;">&#8203;</font></p></div></div><hr style="background-color:#000000;clear:both;color:#000000;height:2pt;line-height:0;margin-left:10.29%;margin-right:10.29%;margin-top:30pt;page-break-after:avoid;width:79.41%;border-width:0;"></body></html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.SCH
<SEQUENCE>6
<FILENAME>acls-20210630.xsd
<DESCRIPTION>EX-101.SCH
<TEXT>
<XBRL>
<?xml version="1.0" encoding="us-ascii"?>
<!--XBRL document created with Toppan Merrill Bridge  9.6.7811.37134 -->
<!--Based on XBRL 2.1-->
<!--Created on: 8/6/2021 2:50:53 PM-->
<!--Modified on: 8/6/2021 2:50:53 PM-->
<xsd:schema targetNamespace="http://www.axcelis.com/20210630" attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xsd="http://www.w3.org/2001/XMLSchema" xmlns:acls="http://www.axcelis.com/20210630" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:num="http://www.xbrl.org/dtr/type/numeric" xmlns:nonnum="http://www.xbrl.org/dtr/type/non-numeric" xmlns:xbrldt="http://xbrl.org/2005/xbrldt" xmlns:ref="http://www.xbrl.org/2004/ref" xmlns:xl="http://www.xbrl.org/2003/XLink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xbrli="http://www.xbrl.org/2003/instance" xmlns:attributeFormDefault="unqualified" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:country="http://xbrl.sec.gov/country/2020-01-31" xmlns:us-gaap="http://fasb.org/us-gaap/2020-01-31" xmlns:us-types="http://fasb.org/us-types/2020-01-31" xmlns:dei="http://xbrl.sec.gov/dei/2020-01-31" xmlns:negated="http://www.xbrl.org/2009/role/negated" xmlns:srt-types="http://fasb.org/srt-types/2020-01-31">
  <xsd:annotation>
    <xsd:appinfo>
      <link:roleType roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations" id="StatementConsolidatedStatementsOfOperations">
        <link:definition>00100 - Statement - Consolidated Statements of Operations</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome" id="StatementConsolidatedStatementsOfComprehensiveIncome">
        <link:definition>00200 - Statement - Consolidated Statements of Comprehensive Income</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/StatementConsolidatedBalanceSheets" id="StatementConsolidatedBalanceSheets">
        <link:definition>00300 - Statement - Consolidated Balance Sheets</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows" id="StatementConsolidatedStatementsOfCashFlows">
        <link:definition>00500 - Statement - Consolidated Statements of Cash Flows</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails" id="DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails">
        <link:definition>40302 - Disclosure - Leases - Operating and Finance Lease Right-of-use-assets and Related Lease Obligations (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails" id="DisclosureLeasesLeaseCostDetails">
        <link:definition>40303 - Disclosure - Leases - Lease Cost (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails" id="DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails">
        <link:definition>40304 - Disclosure - Leases - Future Minimum Cash Outflow and Weighted-average Remaining Lease Term and Discount Rate (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShareDetails" id="DisclosureComputationOfNetEarningsPerShareDetails">
        <link:definition>40601 - Disclosure - Computation of Net Earnings per Share (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2" id="DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2">
        <link:definition>40604 - Disclosure - Leases - Future Minimum Cash Outflow and Weighted-average Remaining Lease Term and Discount Rate (Details) Cal 2</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails" id="DisclosureCashCashEquivalentsAndRestrictedCashDetails">
        <link:definition>40801 - Disclosure - Cash, cash equivalents and restricted cash (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureInventoriesNetDetails" id="DisclosureInventoriesNetDetails">
        <link:definition>40901 - Disclosure - Inventories, net (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureProductWarrantyDetails" id="DisclosureProductWarrantyDetails">
        <link:definition>41001 - Disclosure - Product Warranty (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DocumentDocumentAndEntityInformation" id="DocumentDocumentAndEntityInformation">
        <link:definition>00090 - Document - Document and Entity Information</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/StatementConsolidatedBalanceSheetsParenthetical" id="StatementConsolidatedBalanceSheetsParenthetical">
        <link:definition>00305 - Statement - Consolidated Balance Sheets (Parenthetical)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity" id="StatementConsolidatedStatementsOfStockholdersEquity">
        <link:definition>00400 - Statement - Consolidated Statements of Stockholders' Equity</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureNatureOfBusiness" id="DisclosureNatureOfBusiness">
        <link:definition>10101 - Disclosure - Nature of Business</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureStockBasedCompensation" id="DisclosureStockBasedCompensation">
        <link:definition>10201 - Disclosure - Stock Based Compensation</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureRevenue" id="DisclosureRevenue">
        <link:definition>10401 - Disclosure - Revenue</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShare" id="DisclosureComputationOfNetEarningsPerShare">
        <link:definition>10601 - Disclosure - Computation of Net Earnings per Share</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveIncome" id="DisclosureAccumulatedOtherComprehensiveIncome">
        <link:definition>10701 - Disclosure - Accumulated Other Comprehensive Income</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCash" id="DisclosureCashCashEquivalentsAndRestrictedCash">
        <link:definition>10801 - Disclosure - Cash, cash equivalents and restricted cash</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureInventoriesNet" id="DisclosureInventoriesNet">
        <link:definition>10901 - Disclosure - Inventories, net</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureProductWarranty" id="DisclosureProductWarranty">
        <link:definition>11001 - Disclosure - Product Warranty</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureFairValueMeasurements" id="DisclosureFairValueMeasurements">
        <link:definition>11101 - Disclosure - Fair Value Measurements</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureFinancingArrangements" id="DisclosureFinancingArrangements">
        <link:definition>11201 - Disclosure - Financing Arrangements</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxes" id="DisclosureIncomeTaxes">
        <link:definition>11301 - Disclosure - Income Taxes</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureConcentrationOfRisk" id="DisclosureConcentrationOfRisk">
        <link:definition>11401 - Disclosure - Concentration of Risk</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureContingencies" id="DisclosureContingencies">
        <link:definition>11601 - Disclosure - Contingencies</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureRecentAccountingGuidance" id="DisclosureRecentAccountingGuidance">
        <link:definition>11701 - Disclosure - Recent Accounting Guidance</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureReceivableAndAllowanceForCreditLossesTables" id="DisclosureReceivableAndAllowanceForCreditLossesTables">
        <link:definition>30503 - Disclosure - Receivable and Allowance for Credit Losses (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShareTables" id="DisclosureComputationOfNetEarningsPerShareTables">
        <link:definition>30603 - Disclosure - Computation of Net Earnings per Share (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveIncomeTables" id="DisclosureAccumulatedOtherComprehensiveIncomeTables">
        <link:definition>30703 - Disclosure - Accumulated Other Comprehensive Income (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashTables" id="DisclosureCashCashEquivalentsAndRestrictedCashTables">
        <link:definition>30803 - Disclosure - Cash, cash equivalents and restricted cash (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureInventoriesNetTables" id="DisclosureInventoriesNetTables">
        <link:definition>30903 - Disclosure - Inventories, net (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureProductWarrantyTables" id="DisclosureProductWarrantyTables">
        <link:definition>31003 - Disclosure - Product Warranty (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureFairValueMeasurementsTables" id="DisclosureFairValueMeasurementsTables">
        <link:definition>31103 - Disclosure - Fair Value Measurements (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureStockBasedCompensationDetails" id="DisclosureStockBasedCompensationDetails">
        <link:definition>40201 - Disclosure - Stock-Based Compensation (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureLeasesDetails" id="DisclosureLeasesDetails">
        <link:definition>40301 - Disclosure - Leases (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureRevenueDetails" id="DisclosureRevenueDetails">
        <link:definition>40401 - Disclosure - Revenue (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails" id="DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails">
        <link:definition>40402 - Disclosure - Revenue - Revenue by discipline &amp; geographical areas (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveIncomeDetails" id="DisclosureAccumulatedOtherComprehensiveIncomeDetails">
        <link:definition>40701 - Disclosure - Accumulated Other Comprehensive Income (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails" id="DisclosureFairValueMeasurementsDetails">
        <link:definition>41101 - Disclosure - Fair Value Measurements (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails" id="DisclosureFinancingArrangementsDetails">
        <link:definition>41201 - Disclosure - Financing Arrangements (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxesDetails" id="DisclosureIncomeTaxesDetails">
        <link:definition>41301 - Disclosure - Income Taxes (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureConcentrationOfRiskDetails" id="DisclosureConcentrationOfRiskDetails">
        <link:definition>41401 - Disclosure - Concentration of Risk (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureLeases" id="DisclosureLeases">
        <link:definition>10301 - Disclosure - Leases</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureReceivableAndAllowanceForCreditLosses" id="DisclosureReceivableAndAllowanceForCreditLosses">
        <link:definition>10501 - Disclosure - Receivable and Allowance for Credit Losses</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureShareRepurchase" id="DisclosureShareRepurchase">
        <link:definition>11501 - Disclosure - Share Repurchase</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureLeasesTables" id="DisclosureLeasesTables">
        <link:definition>30303 - Disclosure - Leases (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureRevenueTables" id="DisclosureRevenueTables">
        <link:definition>30403 - Disclosure - Revenue (Tables)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureLeasesCashFlowByLeaseTypeDetails" id="DisclosureLeasesCashFlowByLeaseTypeDetails">
        <link:definition>40305 - Disclosure - Leases - Cash Flow by Lease Type (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureRevenueContractLiabilitiesDetails" id="DisclosureRevenueContractLiabilitiesDetails">
        <link:definition>40403 - Disclosure - Revenue - Contract liabilities (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureRevenueDeferredRevenueDetails" id="DisclosureRevenueDeferredRevenueDetails">
        <link:definition>40404 - Disclosure - Revenue - Deferred revenue (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureReceivableAndAllowanceForCreditLossesAllowancesForCreditLossesRelatedToTradeReceivablesDetails" id="DisclosureReceivableAndAllowanceForCreditLossesAllowancesForCreditLossesRelatedToTradeReceivablesDetails">
        <link:definition>40501 - Disclosure - Receivable and Allowance for Credit Losses - Allowances for Credit Losses Related to Trade Receivables (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:roleType roleURI="http://www.axcelis.com/role/DisclosureShareRepurchaseDetails" id="DisclosureShareRepurchaseDetails">
        <link:definition>41501 - Disclosure - Share Repurchase (Details)</link:definition>
        <link:usedOn>link:presentationLink</link:usedOn>
        <link:usedOn>link:calculationLink</link:usedOn>
        <link:usedOn>link:definitionLink</link:usedOn>
      </link:roleType>
      <link:linkbaseRef xlink:type="simple" xlink:href="acls-20210630_pre.xml" xlink:role="http://www.xbrl.org/2003/role/presentationLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" />
      <link:linkbaseRef xlink:type="simple" xlink:href="acls-20210630_cal.xml" xlink:role="http://www.xbrl.org/2003/role/calculationLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" />
      <link:linkbaseRef xlink:type="simple" xlink:href="acls-20210630_def.xml" xlink:role="http://www.xbrl.org/2003/role/definitionLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" />
      <link:linkbaseRef xlink:type="simple" xlink:href="acls-20210630_lab.xml" xlink:role="http://www.xbrl.org/2003/role/labelLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" />
    </xsd:appinfo>
  </xsd:annotation>
  <xsd:import namespace="http://www.xbrl.org/dtr/type/non-numeric" schemaLocation="http://www.xbrl.org/dtr/type/nonNumeric-2009-12-16.xsd" />
  <xsd:import namespace="http://www.xbrl.org/2009/role/negated" schemaLocation="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd" />
  <xsd:import namespace="http://xbrl.sec.gov/dei/2020-01-31" schemaLocation="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd" />
  <xsd:import namespace="http://www.xbrl.org/dtr/type/numeric" schemaLocation="http://www.xbrl.org/dtr/type/numeric-2009-12-16.xsd" />
  <xsd:import namespace="http://www.xbrl.org/2003/instance" schemaLocation="http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd" />
  <xsd:import namespace="http://xbrl.org/2005/xbrldt" schemaLocation="http://www.xbrl.org/2005/xbrldt-2005.xsd" />
  <xsd:import namespace="http://fasb.org/us-roles/2020-01-31" schemaLocation="http://xbrl.fasb.org/us-gaap/2020/elts/us-roles-2020-01-31.xsd" />
  <import namespace="http://fasb.org/us-gaap/2020-01-31" schemaLocation="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd" xmlns="http://www.w3.org/2001/XMLSchema" />
  <import namespace="http://fasb.org/srt/2020-01-31" schemaLocation="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd" xmlns="http://www.w3.org/2001/XMLSchema" />
  <xsd:element name="SecondLargestCustomerMember" id="acls_SecondLargestCustomerMember" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="ThirdLargestCustomerMember" id="acls_ThirdLargestCustomerMember" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="LargestCustomerMember" id="acls_LargestCustomerMember" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="ConcentrationRiskNumberOfCustomers" id="acls_ConcentrationRiskNumberOfCustomers" type="xbrli:integerItemType" substitutionGroup="xbrli:item" nillable="true" xbrli:periodType="duration" />
  <element id="acls_ProductWarrantyPeriod" name="ProductWarrantyPeriod" nillable="true" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <xsd:element name="StockPlan2000Member" id="acls_StockPlan2000Member" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="StockOptionAwardsMember" id="acls_StockOptionAwardsMember" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" nillable="true" xbrli:periodType="duration" />
  <xsd:element name="ShareBasedCompensationArrangementByShareBasedPaymentAwardGrantsInPeriodGross" id="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardGrantsInPeriodGross" type="xbrli:sharesItemType" substitutionGroup="xbrli:item" abstract="false" nillable="true" xbrli:periodType="duration" />
  <element id="acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit" name="LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_DepositRelatingToCustomsActivity" name="DepositRelatingToCustomsActivity" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_SaleAndLeaseBackMember" name="SaleAndLeaseBackMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_BeverlyPropertyOwnerLlcMember" name="BeverlyPropertyOwnerLlcMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_CashCashEquivalentsAndRestrictedCashAbstract" name="CashCashEquivalentsAndRestrictedCashAbstract" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_CashCashEquivalentsAndRestrictedCashTextBlock" name="CashCashEquivalentsAndRestrictedCashTextBlock" nillable="true" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_CashCashEquivalentsAndRestrictedCashTableTextBlock" name="CashCashEquivalentsAndRestrictedCashTableTextBlock" nillable="true" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember" name="MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_ServicesMember" name="ServicesMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_PercentageOfPaymentUponShipmentOfTool" name="PercentageOfPaymentUponShipmentOfTool" nillable="true" type="num:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_PeriodOfPaymentUponDeliveryOfParts" name="PeriodOfPaymentUponDeliveryOfParts" nillable="true" type="xbrli:durationItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_PercentageOfPaymentUponInstallation" name="PercentageOfPaymentUponInstallation" nillable="true" type="num:percentItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_RevenueFromExternalCustomersByDisciplineAreasTableTextBlock" name="RevenueFromExternalCustomersByDisciplineAreasTableTextBlock" nillable="true" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_NewSystemsRevenueMember" name="NewSystemsRevenueMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_LeaseDisclosureTextBlock" name="LeaseDisclosureTextBlock" nillable="true" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_OperatingAndFinanceLeaseRightOfUseAsset" name="OperatingAndFinanceLeaseRightOfUseAsset" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="debit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_OperatingAndFinanceLeaseLiability" name="OperatingAndFinanceLeaseLiability" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_FinanceLeaseAccumulatedDepreciation" name="FinanceLeaseAccumulatedDepreciation" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_FinanceLeaseCost" name="FinanceLeaseCost" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_LeaseBalanceSheetDisclosureTableTextBlock" name="LeaseBalanceSheetDisclosureTableTextBlock" nillable="true" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_LeaseCashFlowInformationDisclosureTableTextBlock" name="LeaseCashFlowInformationDisclosureTableTextBlock" nillable="true" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_ShortTermAndVariableLeaseCost" name="ShortTermAndVariableLeaseCost" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_LeaseQuantitativeDisclosureTableTextBlock" name="LeaseQuantitativeDisclosureTableTextBlock" nillable="true" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" name="WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" name="FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" nillable="true" type="xbrli:stringItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount" name="LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_RepaymentOfNetSettlementOnRestrictedStockGrants" name="RepaymentOfNetSettlementOnRestrictedStockGrants" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="credit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_ContractWithCustomerLiabilityDeferralOfRevenue" name="ContractWithCustomerLiabilityDeferralOfRevenue" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock" name="OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock" nillable="true" type="nonnum:textBlockItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_IncreaseInIncomeTaxExpenseBenefit" name="IncreaseInIncomeTaxExpenseBenefit" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="debit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsRemainderOfFiscalYear" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsRemainderOfFiscalYear" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_SiliconValleyBankMember" name="SiliconValleyBankMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_CsIOrAftermarketMember" name="CsIOrAftermarketMember" nillable="true" type="nonnum:domainItemType" substitutionGroup="xbrli:item" abstract="true" xbrli:periodType="duration" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_FinanceLeaseLiabilityPaymentsDueAfterYearFour" name="FinanceLeaseLiabilityPaymentsDueAfterYearFour" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour" name="LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFour" name="LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFour" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="instant" xbrli:balance="credit" xmlns="http://www.w3.org/2001/XMLSchema" />
  <element id="acls_IncreaseInPreTaxIncome" name="IncreaseInPreTaxIncome" nillable="true" type="xbrli:monetaryItemType" substitutionGroup="xbrli:item" xbrli:periodType="duration" xbrli:balance="credit" xmlns="http://www.w3.org/2001/XMLSchema" />
</xsd:schema>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.CAL
<SEQUENCE>7
<FILENAME>acls-20210630_cal.xml
<DESCRIPTION>EX-101.CAL
<TEXT>
<XBRL>
<?xml version="1.0" encoding="us-ascii"?>
<!--XBRL document created with Toppan Merrill Bridge  9.6.7811.37134 -->
<!--Based on XBRL 2.1-->
<!--Created on: 8/6/2021 2:50:53 PM-->
<!--Modified on: 8/6/2021 2:50:53 PM-->
<link:linkbase xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xbrli="http://www.xbrl.org/2003/instance">
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#StatementConsolidatedStatementsOfOperations" roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#StatementConsolidatedStatementsOfComprehensiveIncome" roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#StatementConsolidatedBalanceSheets" roleURI="http://www.axcelis.com/role/StatementConsolidatedBalanceSheets" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#StatementConsolidatedStatementsOfCashFlows" roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails" roleURI="http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureLeasesLeaseCostDetails" roleURI="http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails" roleURI="http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureComputationOfNetEarningsPerShareDetails" roleURI="http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShareDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2" roleURI="http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureCashCashEquivalentsAndRestrictedCashDetails" roleURI="http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureInventoriesNetDetails" roleURI="http://www.axcelis.com/role/DisclosureInventoriesNetDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureProductWarrantyDetails" roleURI="http://www.axcelis.com/role/DisclosureProductWarrantyDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <calculationLink xlink:role="http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations" xlink:type="extended" xlink:title="00100 - Statement - Consolidated Statements of Operations" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_635454443249647540" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_637638582521096961" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_635454443249647540" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_637638582521096961" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingIncomeLoss" xlink:label="us-gaap_OperatingIncomeLoss_637638582521096961" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_637638582521096961" xlink:to="us-gaap_OperatingIncomeLoss_637638582521096961" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_GrossProfit" xlink:label="us-gaap_GrossProfit_637638582521096961" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss_637638582521096961" xlink:to="us-gaap_GrossProfit_637638582521096961" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_Revenues" xlink:label="us-gaap_Revenues_637638582521096961" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_GrossProfit_637638582521096961" xlink:to="us-gaap_Revenues_637638582521096961" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CostOfGoodsAndServicesSold" xlink:label="us-gaap_CostOfGoodsAndServicesSold_637638582521096961" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_GrossProfit_637638582521096961" xlink:to="us-gaap_CostOfGoodsAndServicesSold_637638582521096961" order="2" use="optional" weight="-1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingExpenses" xlink:label="us-gaap_OperatingExpenses_637638582521096961" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingIncomeLoss_637638582521096961" xlink:to="us-gaap_OperatingExpenses_637638582521096961" order="2" use="optional" weight="-1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ResearchAndDevelopmentExpense" xlink:label="us-gaap_ResearchAndDevelopmentExpense_637638582521106960" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingExpenses_637638582521096961" xlink:to="us-gaap_ResearchAndDevelopmentExpense_637638582521106960" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_SellingAndMarketingExpense" xlink:label="us-gaap_SellingAndMarketingExpense_637638582521106960" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingExpenses_637638582521096961" xlink:to="us-gaap_SellingAndMarketingExpense_637638582521106960" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_GeneralAndAdministrativeExpense" xlink:label="us-gaap_GeneralAndAdministrativeExpense_637638582521106960" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OperatingExpenses_637638582521096961" xlink:to="us-gaap_GeneralAndAdministrativeExpense_637638582521106960" order="3" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NonoperatingIncomeExpense" xlink:label="us-gaap_NonoperatingIncomeExpense_637638582521106960" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_637638582521096961" xlink:to="us-gaap_NonoperatingIncomeExpense_637638582521106960" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InvestmentIncomeInterest" xlink:label="us-gaap_InvestmentIncomeInterest_637638582521106960" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NonoperatingIncomeExpense_637638582521106960" xlink:to="us-gaap_InvestmentIncomeInterest_637638582521106960" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InterestExpense" xlink:label="us-gaap_InterestExpense_637638582521106960" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NonoperatingIncomeExpense_637638582521106960" xlink:to="us-gaap_InterestExpense_637638582521106960" order="2" use="optional" weight="-1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OtherNonoperatingIncomeExpense" xlink:label="us-gaap_OtherNonoperatingIncomeExpense_637638582521116952" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NonoperatingIncomeExpense_637638582521106960" xlink:to="us-gaap_OtherNonoperatingIncomeExpense_637638582521116952" order="3" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="us-gaap_IncomeTaxExpenseBenefit_637638582521116952" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_635454443249647540" xlink:to="us-gaap_IncomeTaxExpenseBenefit_637638582521116952" order="2" use="optional" weight="-1" />
  </calculationLink>
  <calculationLink xlink:role="http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome" xlink:type="extended" xlink:title="00200 - Statement - Consolidated Statements of Comprehensive Income" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ComprehensiveIncomeNetOfTax" xlink:label="us-gaap_ComprehensiveIncomeNetOfTax" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_637638582521116952" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_ComprehensiveIncomeNetOfTax" xlink:to="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_637638582521116952" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OtherComprehensiveIncomeLossNetOfTax" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTax_637638582521116952" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_ComprehensiveIncomeNetOfTax" xlink:to="us-gaap_OtherComprehensiveIncomeLossNetOfTax_637638582521116952" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_637638582521116952" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTax_637638582521116952" xlink:to="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_637638582521116952" order="1" use="optional" weight="1" priority="3" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent_637638582521116952" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTax_637638582521116952" xlink:to="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent_637638582521116952" order="2" use="optional" weight="-1" priority="2" />
  </calculationLink>
  <calculationLink xlink:role="http://www.axcelis.com/role/StatementConsolidatedBalanceSheets" xlink:type="extended" xlink:title="00300 - Statement - Consolidated Balance Sheets" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_Assets" xlink:label="us-gaap_Assets" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AssetsCurrent" xlink:label="us-gaap_AssetsCurrent_637638582521126964" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_AssetsCurrent_637638582521126964" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue_637638582521126964" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AssetsCurrent_637638582521126964" xlink:to="us-gaap_CashAndCashEquivalentsAtCarryingValue_637638582521126964" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccountsReceivableNetCurrent" xlink:label="us-gaap_AccountsReceivableNetCurrent_637638582521126964" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AssetsCurrent_637638582521126964" xlink:to="us-gaap_AccountsReceivableNetCurrent_637638582521126964" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InventoryNet" xlink:label="us-gaap_InventoryNet_637638582521126964" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AssetsCurrent_637638582521126964" xlink:to="us-gaap_InventoryNet_637638582521126964" order="3" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_PrepaidExpenseAndOtherAssetsCurrent" xlink:label="us-gaap_PrepaidExpenseAndOtherAssetsCurrent_637638582521126964" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_AssetsCurrent_637638582521126964" xlink:to="us-gaap_PrepaidExpenseAndOtherAssetsCurrent_637638582521126964" order="4" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="us-gaap_PropertyPlantAndEquipmentNet_637638582521126964" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_PropertyPlantAndEquipmentNet_637638582521126964" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseRightOfUseAsset" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset_637638582521126964" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_OperatingLeaseRightOfUseAsset_637638582521126964" order="3" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseRightOfUseAsset" xlink:label="us-gaap_FinanceLeaseRightOfUseAsset_637638582521126964" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_FinanceLeaseRightOfUseAsset_637638582521126964" order="4" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RestrictedCashAndCashEquivalentsNoncurrent" xlink:label="us-gaap_RestrictedCashAndCashEquivalentsNoncurrent_637638582521136957" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_RestrictedCashAndCashEquivalentsNoncurrent_637638582521136957" order="5" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DeferredIncomeTaxAssetsNet" xlink:label="us-gaap_DeferredIncomeTaxAssetsNet_637638582521136957" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_DeferredIncomeTaxAssetsNet_637638582521136957" order="6" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OtherAssetsNoncurrent" xlink:label="us-gaap_OtherAssetsNoncurrent_637638582521136957" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Assets" xlink:to="us-gaap_OtherAssetsNoncurrent_637638582521136957" order="7" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LiabilitiesAndStockholdersEquity" xlink:label="us-gaap_LiabilitiesAndStockholdersEquity" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_Liabilities" xlink:label="us-gaap_Liabilities_637638582521136957" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesAndStockholdersEquity" xlink:to="us-gaap_Liabilities_637638582521136957" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LiabilitiesCurrent" xlink:label="us-gaap_LiabilitiesCurrent_637638582521136957" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Liabilities_637638582521136957" xlink:to="us-gaap_LiabilitiesCurrent_637638582521136957" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccountsPayableCurrent" xlink:label="us-gaap_AccountsPayableCurrent_637638582521136957" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesCurrent_637638582521136957" xlink:to="us-gaap_AccountsPayableCurrent_637638582521136957" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityCurrent" xlink:label="us-gaap_FinanceLeaseLiabilityCurrent_637638582521146946" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesCurrent_637638582521136957" xlink:to="us-gaap_FinanceLeaseLiabilityCurrent_637638582521146946" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EmployeeRelatedLiabilitiesCurrent" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrent_637638582521146946" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesCurrent_637638582521136957" xlink:to="us-gaap_EmployeeRelatedLiabilitiesCurrent_637638582521146946" order="3" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="us-gaap_ProductWarrantyAccrualClassifiedCurrent_637638582521146946" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesCurrent_637638582521136957" xlink:to="us-gaap_ProductWarrantyAccrualClassifiedCurrent_637638582521146946" order="4" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccruedIncomeTaxesCurrent" xlink:label="us-gaap_AccruedIncomeTaxesCurrent_637638582521146946" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesCurrent_637638582521136957" xlink:to="us-gaap_AccruedIncomeTaxesCurrent_637638582521146946" order="5" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ContractWithCustomerLiabilityCurrent" xlink:label="us-gaap_ContractWithCustomerLiabilityCurrent_637638582521146946" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesCurrent_637638582521136957" xlink:to="us-gaap_ContractWithCustomerLiabilityCurrent_637638582521146946" order="6" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OtherLiabilitiesCurrent" xlink:label="us-gaap_OtherLiabilitiesCurrent_637638582521146946" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesCurrent_637638582521136957" xlink:to="us-gaap_OtherLiabilitiesCurrent_637638582521146946" order="7" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityNoncurrent" xlink:label="us-gaap_FinanceLeaseLiabilityNoncurrent_637638582521146946" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Liabilities_637638582521136957" xlink:to="us-gaap_FinanceLeaseLiabilityNoncurrent_637638582521146946" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ContractWithCustomerLiabilityNoncurrent" xlink:label="us-gaap_ContractWithCustomerLiabilityNoncurrent_637638582521156941" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Liabilities_637638582521136957" xlink:to="us-gaap_ContractWithCustomerLiabilityNoncurrent_637638582521156941" order="3" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OtherLiabilitiesNoncurrent" xlink:label="us-gaap_OtherLiabilitiesNoncurrent_637638582521156941" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_Liabilities_637638582521136957" xlink:to="us-gaap_OtherLiabilitiesNoncurrent_637638582521156941" order="4" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockholdersEquity" xlink:label="us-gaap_StockholdersEquity_637638582521156941" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LiabilitiesAndStockholdersEquity" xlink:to="us-gaap_StockholdersEquity_637638582521156941" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CommonStockValueOutstanding" xlink:label="us-gaap_CommonStockValueOutstanding_637638582521156941" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_StockholdersEquity_637638582521156941" xlink:to="us-gaap_CommonStockValueOutstanding_637638582521156941" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AdditionalPaidInCapital" xlink:label="us-gaap_AdditionalPaidInCapital_637638582521166971" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_StockholdersEquity_637638582521156941" xlink:to="us-gaap_AdditionalPaidInCapital_637638582521166971" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RetainedEarningsAccumulatedDeficit" xlink:label="us-gaap_RetainedEarningsAccumulatedDeficit_637638582521166971" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_StockholdersEquity_637638582521156941" xlink:to="us-gaap_RetainedEarningsAccumulatedDeficit_637638582521166971" order="3" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_637638582521166971" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_StockholdersEquity_637638582521156941" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_637638582521166971" order="4" use="optional" weight="1" priority="2" />
  </calculationLink>
  <calculationLink xlink:role="http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows" xlink:type="extended" xlink:title="00500 - Statement - Consolidated Statements of Cash Flows" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivities_637638582521166971" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:to="us-gaap_NetCashProvidedByUsedInOperatingActivities_637638582521166971" order="1" use="optional" weight="1" priority="5" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProfitLoss" xlink:label="us-gaap_ProfitLoss_637638582521166971" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_637638582521166971" xlink:to="us-gaap_ProfitLoss_637638582521166971" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DepreciationDepletionAndAmortization" xlink:label="us-gaap_DepreciationDepletionAndAmortization_637638582521176938" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_637638582521166971" xlink:to="us-gaap_DepreciationDepletionAndAmortization_637638582521176938" order="2" use="optional" weight="1" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DeferredIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefit_637638582521176938" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_637638582521166971" xlink:to="us-gaap_DeferredIncomeTaxExpenseBenefit_637638582521176938" order="3" use="optional" weight="1" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ShareBasedCompensation" xlink:label="us-gaap_ShareBasedCompensation_637638582521176938" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_637638582521166971" xlink:to="us-gaap_ShareBasedCompensation_637638582521176938" order="4" use="optional" weight="1" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InventoryWriteDown" xlink:label="us-gaap_InventoryWriteDown_637638582521176938" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_637638582521166971" xlink:to="us-gaap_InventoryWriteDown_637638582521176938" order="5" use="optional" weight="1" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncreaseDecreaseInAccountsReceivable" xlink:label="us-gaap_IncreaseDecreaseInAccountsReceivable_637638582521176938" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_637638582521166971" xlink:to="us-gaap_IncreaseDecreaseInAccountsReceivable_637638582521176938" order="6" use="optional" weight="-1" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncreaseDecreaseInInventories" xlink:label="us-gaap_IncreaseDecreaseInInventories_637638582521176938" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_637638582521166971" xlink:to="us-gaap_IncreaseDecreaseInInventories_637638582521176938" order="7" use="optional" weight="-1" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" xlink:label="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_637638582521176938" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_637638582521166971" xlink:to="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_637638582521176938" order="8" use="optional" weight="-1" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities" xlink:label="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities_637638582521176938" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_637638582521166971" xlink:to="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities_637638582521176938" order="9" use="optional" weight="1" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncreaseDecreaseInContractWithCustomerLiability" xlink:label="us-gaap_IncreaseDecreaseInContractWithCustomerLiability_637638582521186942" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_637638582521166971" xlink:to="us-gaap_IncreaseDecreaseInContractWithCustomerLiability_637638582521186942" order="10" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable" xlink:label="us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_637638582521186942" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_637638582521166971" xlink:to="us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_637638582521186942" order="11" use="optional" weight="1" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet_637638582521186942" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities_637638582521166971" xlink:to="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet_637638582521186942" order="12" use="optional" weight="-1" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivities_637638582521186942" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:to="us-gaap_NetCashProvidedByUsedInInvestingActivities_637638582521186942" order="2" use="optional" weight="1" priority="5" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:label="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_637638582521186942" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivities_637638582521186942" xlink:to="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_637638582521186942" order="1" use="optional" weight="-1" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivities_637638582521186942" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:to="us-gaap_NetCashProvidedByUsedInFinancingActivities_637638582521186942" order="3" use="optional" weight="1" priority="5" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_PaymentsForRepurchaseOfCommonStock" xlink:label="us-gaap_PaymentsForRepurchaseOfCommonStock_637638582521196958" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities_637638582521186942" xlink:to="us-gaap_PaymentsForRepurchaseOfCommonStock_637638582521196958" order="1" use="optional" weight="-1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeasePrincipalPayments" xlink:label="us-gaap_FinanceLeasePrincipalPayments_637638582521196958" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities_637638582521186942" xlink:to="us-gaap_FinanceLeasePrincipalPayments_637638582521196958" order="2" use="optional" weight="-1" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_RepaymentOfNetSettlementOnRestrictedStockGrants" xlink:label="acls_RepaymentOfNetSettlementOnRestrictedStockGrants_637638582521196958" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities_637638582521186942" xlink:to="acls_RepaymentOfNetSettlementOnRestrictedStockGrants_637638582521196958" order="3" use="optional" weight="-1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProceedsFromStockPlans" xlink:label="us-gaap_ProceedsFromStockPlans_637638582521196958" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities_637638582521186942" xlink:to="us-gaap_ProceedsFromStockPlans_637638582521196958" order="4" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProceedsFromStockOptionsExercised" xlink:label="us-gaap_ProceedsFromStockOptionsExercised_637638582521196958" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities_637638582521186942" xlink:to="us-gaap_ProceedsFromStockOptionsExercised_637638582521196958" order="5" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:label="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_637638582521196958" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:to="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_637638582521196958" order="4" use="optional" weight="1" priority="2" />
  </calculationLink>
  <calculationLink xlink:role="http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails" xlink:type="extended" xlink:title="40302 - Disclosure - Leases - Operating and Finance Lease Right-of-use-assets and Related Lease Obligations (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_OperatingAndFinanceLeaseLiability" xlink:label="acls_OperatingAndFinanceLeaseLiability" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseLiabilityCurrent" xlink:label="us-gaap_OperatingLeaseLiabilityCurrent_637638582521206948" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_OperatingAndFinanceLeaseLiability" xlink:to="us-gaap_OperatingLeaseLiabilityCurrent_637638582521206948" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseLiabilityNoncurrent" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrent_637638582521206948" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_OperatingAndFinanceLeaseLiability" xlink:to="us-gaap_OperatingLeaseLiabilityNoncurrent_637638582521206948" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityCurrent" xlink:label="us-gaap_FinanceLeaseLiabilityCurrent_637638582521206948" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_OperatingAndFinanceLeaseLiability" xlink:to="us-gaap_FinanceLeaseLiabilityCurrent_637638582521206948" order="3" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityNoncurrent" xlink:label="us-gaap_FinanceLeaseLiabilityNoncurrent_637638582521206948" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_OperatingAndFinanceLeaseLiability" xlink:to="us-gaap_FinanceLeaseLiabilityNoncurrent_637638582521206948" order="4" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_OperatingAndFinanceLeaseRightOfUseAsset" xlink:label="acls_OperatingAndFinanceLeaseRightOfUseAsset" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseRightOfUseAsset" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset_637638582521206948" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_OperatingAndFinanceLeaseRightOfUseAsset" xlink:to="us-gaap_OperatingLeaseRightOfUseAsset_637638582521206948" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseRightOfUseAsset" xlink:label="us-gaap_FinanceLeaseRightOfUseAsset_637638582521206948" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_OperatingAndFinanceLeaseRightOfUseAsset" xlink:to="us-gaap_FinanceLeaseRightOfUseAsset_637638582521206948" order="2" use="optional" weight="1" priority="2" />
  </calculationLink>
  <calculationLink xlink:role="http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails" xlink:type="extended" xlink:title="40303 - Disclosure - Leases - Lease Cost (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LeaseCost" xlink:label="us-gaap_LeaseCost" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseCost" xlink:label="us-gaap_OperatingLeaseCost_637638582521216956" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LeaseCost" xlink:to="us-gaap_OperatingLeaseCost_637638582521216956" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_FinanceLeaseCost" xlink:label="acls_FinanceLeaseCost_637638582521216956" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LeaseCost" xlink:to="acls_FinanceLeaseCost_637638582521216956" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseRightOfUseAssetAmortization" xlink:label="us-gaap_FinanceLeaseRightOfUseAssetAmortization_637638582521216956" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_FinanceLeaseCost_637638582521216956" xlink:to="us-gaap_FinanceLeaseRightOfUseAssetAmortization_637638582521216956" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseInterestExpense" xlink:label="us-gaap_FinanceLeaseInterestExpense_637638582521216956" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_FinanceLeaseCost_637638582521216956" xlink:to="us-gaap_FinanceLeaseInterestExpense_637638582521216956" order="2" use="optional" weight="1" priority="2" />
  </calculationLink>
  <calculationLink xlink:role="http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails" xlink:type="extended" xlink:title="40304 - Disclosure - Leases - Future Minimum Cash Outflow and Weighted-average Remaining Lease Term and Discount Rate (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDue" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount" xlink:label="us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount_637638582521216956" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:to="us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount_637638582521216956" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiability" xlink:label="us-gaap_FinanceLeaseLiability_637638582521226953" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:to="us-gaap_FinanceLeaseLiability_637638582521226953" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_OperatingAndFinanceLeaseLiability" xlink:label="acls_OperatingAndFinanceLeaseLiability_637638582521226953" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" xlink:to="acls_OperatingAndFinanceLeaseLiability_637638582521226953" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount_637638582521226953" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount_637638582521226953" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue_636927344944895251" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount_637638582521226953" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue_636927344944895251" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount_637638582521226953" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseLiability" xlink:label="us-gaap_OperatingLeaseLiability_637638582521226953" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue_636927344944895251" xlink:to="us-gaap_OperatingLeaseLiability_637638582521226953" order="2" use="optional" weight="1" priority="2" />
  </calculationLink>
  <calculationLink xlink:role="http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShareDetails" xlink:type="extended" xlink:title="40601 - Disclosure - Computation of Net Earnings per Share (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_637638582521226953" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_637638582521226953" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements" xlink:label="us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements_637638582521236955" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:to="us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements_637638582521236955" order="2" use="optional" weight="1" priority="2" />
  </calculationLink>
  <calculationLink xlink:role="http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2" xlink:type="extended" xlink:title="40604 - Disclosure - Leases - Future Minimum Cash Outflow and Weighted-average Remaining Lease Term and Discount Rate (Details) Cal 2" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDue" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityPaymentsRemainderOfFiscalYear" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsRemainderOfFiscalYear_637638582521236955" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsRemainderOfFiscalYear_637638582521236955" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths_637638582521236955" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths_637638582521236955" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo_637638582521236955" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo_637638582521236955" order="3" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree_637638582521236955" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree_637638582521236955" order="4" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour_637638582521236955" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour_637638582521236955" order="5" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_FinanceLeaseLiabilityPaymentsDueAfterYearFour" xlink:label="acls_FinanceLeaseLiabilityPaymentsDueAfterYearFour_637638582521236955" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:to="acls_FinanceLeaseLiabilityPaymentsDueAfterYearFour_637638582521236955" order="6" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsRemainderOfFiscalYear" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsRemainderOfFiscalYear_637638582521246952" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsRemainderOfFiscalYear_637638582521246952" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths_637638582521246952" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths_637638582521246952" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo_637638582521246952" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo_637638582521246952" order="3" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree_637638582521246952" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree_637638582521246952" order="4" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour_637638582521246952" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour_637638582521246952" order="5" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFour" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFour_637638582521246952" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFour_637638582521246952" order="6" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsRemainderOfFiscalYear" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsRemainderOfFiscalYear_637638582521256949" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsRemainderOfFiscalYear_637638582521256949" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths_637638582521256949" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths_637638582521256949" order="2" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo_637638582521256949" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo_637638582521256949" order="3" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree_637638582521256949" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree_637638582521256949" order="4" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour_637638582521256949" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour_637638582521256949" order="5" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour" xlink:label="acls_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour_637638582521256949" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:to="acls_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour_637638582521256949" order="6" use="optional" weight="1" priority="2" />
  </calculationLink>
  <calculationLink xlink:role="http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails" xlink:type="extended" xlink:title="40801 - Disclosure - Cash, cash equivalents and restricted cash (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue_637638582521266946" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:to="us-gaap_CashAndCashEquivalentsAtCarryingValue_637638582521266946" order="1" use="optional" weight="1" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RestrictedCashAndCashEquivalents" xlink:label="us-gaap_RestrictedCashAndCashEquivalents_637638582521266946" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:to="us-gaap_RestrictedCashAndCashEquivalents_637638582521266946" order="2" use="optional" weight="1" priority="2" />
  </calculationLink>
  <calculationLink xlink:role="http://www.axcelis.com/role/DisclosureInventoriesNetDetails" xlink:type="extended" xlink:title="40901 - Disclosure - Inventories, net (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InventoryNet" xlink:label="us-gaap_InventoryNet_635454461843894040" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InventoryRawMaterialsNetOfReserves" xlink:label="us-gaap_InventoryRawMaterialsNetOfReserves_637638582521266946" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_InventoryNet_635454461843894040" xlink:to="us-gaap_InventoryRawMaterialsNetOfReserves_637638582521266946" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InventoryWorkInProcessNetOfReserves" xlink:label="us-gaap_InventoryWorkInProcessNetOfReserves_637638582521266946" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_InventoryNet_635454461843894040" xlink:to="us-gaap_InventoryWorkInProcessNetOfReserves_637638582521266946" order="2" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InventoryFinishedGoodsNetOfReserves" xlink:label="us-gaap_InventoryFinishedGoodsNetOfReserves_637638582521266946" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_InventoryNet_635454461843894040" xlink:to="us-gaap_InventoryFinishedGoodsNetOfReserves_637638582521266946" order="3" use="optional" weight="1" />
  </calculationLink>
  <calculationLink xlink:role="http://www.axcelis.com/role/DisclosureProductWarrantyDetails" xlink:type="extended" xlink:title="41001 - Disclosure - Product Warranty (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProductWarrantyAccrual" xlink:label="us-gaap_ProductWarrantyAccrual" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="us-gaap_ProductWarrantyAccrualClassifiedCurrent_637638582521266946" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_ProductWarrantyAccrual" xlink:to="us-gaap_ProductWarrantyAccrualClassifiedCurrent_637638582521266946" order="1" use="optional" weight="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProductWarrantyAccrualNoncurrent" xlink:label="us-gaap_ProductWarrantyAccrualNoncurrent_637638582521266946" />
    <calculationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/summation-item" xlink:from="us-gaap_ProductWarrantyAccrual" xlink:to="us-gaap_ProductWarrantyAccrualNoncurrent_637638582521266946" order="2" use="optional" weight="1" priority="2" />
  </calculationLink>
</link:linkbase>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.DEF
<SEQUENCE>8
<FILENAME>acls-20210630_def.xml
<DESCRIPTION>EX-101.DEF
<TEXT>
<XBRL>
<?xml version="1.0" encoding="us-ascii"?>
<!--XBRL document created with Toppan Merrill Bridge  9.6.7811.37134 -->
<!--Based on XBRL 2.1-->
<!--Created on: 8/6/2021 2:50:53 PM-->
<!--Modified on: 8/6/2021 2:50:53 PM-->
<link:linkbase xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xbrli="http://www.xbrl.org/2003/instance" xmlns:xbrldt="http://xbrl.org/2005/xbrldt">
  <roleRef xlink:type="simple" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-roles-2020-01-31.xsd#eedm" roleURI="http://fasb.org/us-gaap/role/eedm/ExtensibleEnumerationLists" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#StatementConsolidatedStatementsOfOperations" roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#StatementConsolidatedStatementsOfStockholdersEquity" roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureStockBasedCompensationDetails" roleURI="http://www.axcelis.com/role/DisclosureStockBasedCompensationDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureLeasesDetails" roleURI="http://www.axcelis.com/role/DisclosureLeasesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureLeasesLeaseCostDetails" roleURI="http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails" roleURI="http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureRevenueDetails" roleURI="http://www.axcelis.com/role/DisclosureRevenueDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails" roleURI="http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureAccumulatedOtherComprehensiveIncomeDetails" roleURI="http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveIncomeDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureCashCashEquivalentsAndRestrictedCashDetails" roleURI="http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureFairValueMeasurementsDetails" roleURI="http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureFinancingArrangementsDetails" roleURI="http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureIncomeTaxesDetails" roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureConcentrationOfRiskDetails" roleURI="http://www.axcelis.com/role/DisclosureConcentrationOfRiskDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <link:arcroleRef arcroleURI="http://xbrl.org/int/dim/arcrole/all" xlink:type="simple" xlink:href="http://www.xbrl.org/2005/xbrldt-2005.xsd#all" />
  <link:arcroleRef arcroleURI="http://xbrl.org/int/dim/arcrole/dimension-domain" xlink:type="simple" xlink:href="http://www.xbrl.org/2005/xbrldt-2005.xsd#dimension-domain" />
  <link:arcroleRef arcroleURI="http://xbrl.org/int/dim/arcrole/domain-member" xlink:type="simple" xlink:href="http://www.xbrl.org/2005/xbrldt-2005.xsd#domain-member" />
  <link:arcroleRef arcroleURI="http://xbrl.org/int/dim/arcrole/hypercube-dimension" xlink:type="simple" xlink:href="http://www.xbrl.org/2005/xbrldt-2005.xsd#hypercube-dimension" />
  <link:arcroleRef arcroleURI="http://xbrl.org/int/dim/arcrole/dimension-default" xlink:type="simple" xlink:href="http://www.xbrl.org/2005/xbrldt-2005.xsd#dimension-default" />
  <definitionLink xlink:role="http://fasb.org/us-gaap/role/eedm/ExtensibleEnumerationLists" xlink:type="extended" xlink:title="Extensible Enumeration Domain Members" xmlns="http://www.xbrl.org/2003/linkbase" />
  <definitionLink xlink:role="http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations" xlink:type="extended" xlink:title="00100 - Statement - Consolidated Statements of Operations" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StatementTable" xlink:label="us-gaap_StatementTable" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_ProductOrServiceAxis" xlink:label="srt_ProductOrServiceAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_StatementTable" xlink:to="srt_ProductOrServiceAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_ProductsAndServicesDomain" xlink:label="srt_ProductsAndServicesDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_ProductOrServiceAxis" xlink:to="srt_ProductsAndServicesDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_ProductsAndServicesDomain" xlink:label="srt_ProductsAndServicesDomain_637638582521276953" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" order="1" xlink:from="srt_ProductOrServiceAxis" xlink:to="srt_ProductsAndServicesDomain_637638582521276953" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProductMember" xlink:label="us-gaap_ProductMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_ProductsAndServicesDomain" xlink:to="us-gaap_ProductMember" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_ServicesMember" xlink:label="acls_ServicesMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_ProductsAndServicesDomain" xlink:to="acls_ServicesMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StatementLineItems" xlink:label="us-gaap_StatementLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_StatementTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RevenuesAbstract" xlink:label="us-gaap_RevenuesAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_RevenuesAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_Revenues" xlink:label="us-gaap_Revenues" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_RevenuesAbstract" xlink:to="us-gaap_Revenues" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CostOfRevenueAbstract" xlink:label="us-gaap_CostOfRevenueAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_CostOfRevenueAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CostOfGoodsAndServicesSold" xlink:label="us-gaap_CostOfGoodsAndServicesSold" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_CostOfGoodsAndServicesSold" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_GrossProfit" xlink:label="us-gaap_GrossProfit" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_GrossProfit" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingExpensesAbstract" xlink:label="us-gaap_OperatingExpensesAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_OperatingExpensesAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ResearchAndDevelopmentExpense" xlink:label="us-gaap_ResearchAndDevelopmentExpense" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_OperatingExpensesAbstract" xlink:to="us-gaap_ResearchAndDevelopmentExpense" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_SellingAndMarketingExpense" xlink:label="us-gaap_SellingAndMarketingExpense" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_OperatingExpensesAbstract" xlink:to="us-gaap_SellingAndMarketingExpense" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_GeneralAndAdministrativeExpense" xlink:label="us-gaap_GeneralAndAdministrativeExpense" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_OperatingExpensesAbstract" xlink:to="us-gaap_GeneralAndAdministrativeExpense" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingExpenses" xlink:label="us-gaap_OperatingExpenses" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_OperatingExpensesAbstract" xlink:to="us-gaap_OperatingExpenses" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingIncomeLoss" xlink:label="us-gaap_OperatingIncomeLoss" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_OperatingIncomeLoss" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NonoperatingIncomeExpenseAbstract" xlink:label="us-gaap_NonoperatingIncomeExpenseAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="7" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_NonoperatingIncomeExpenseAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InvestmentIncomeInterest" xlink:label="us-gaap_InvestmentIncomeInterest" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_NonoperatingIncomeExpenseAbstract" xlink:to="us-gaap_InvestmentIncomeInterest" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InterestExpense" xlink:label="us-gaap_InterestExpense" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_NonoperatingIncomeExpenseAbstract" xlink:to="us-gaap_InterestExpense" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OtherNonoperatingIncomeExpense" xlink:label="us-gaap_OtherNonoperatingIncomeExpense" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_NonoperatingIncomeExpenseAbstract" xlink:to="us-gaap_OtherNonoperatingIncomeExpense" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NonoperatingIncomeExpense" xlink:label="us-gaap_NonoperatingIncomeExpense" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_NonoperatingIncomeExpenseAbstract" xlink:to="us-gaap_NonoperatingIncomeExpense" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="8" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="us-gaap_IncomeTaxExpenseBenefit" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="9" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_IncomeTaxExpenseBenefit" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="10" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="us-gaap_EarningsPerShareAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="11" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_EarningsPerShareAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EarningsPerShareBasic" xlink:label="us-gaap_EarningsPerShareBasic" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_EarningsPerShareAbstract" xlink:to="us-gaap_EarningsPerShareBasic" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EarningsPerShareDiluted" xlink:label="us-gaap_EarningsPerShareDiluted" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_EarningsPerShareAbstract" xlink:to="us-gaap_EarningsPerShareDiluted" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="12" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" xlink:to="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity" xlink:type="extended" xlink:title="00400 - Statement - Consolidated Statements of Stockholders' Equity" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StatementTable" xlink:label="us-gaap_StatementTable" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StatementEquityComponentsAxis" xlink:label="us-gaap_StatementEquityComponentsAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_StatementTable" xlink:to="us-gaap_StatementEquityComponentsAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EquityComponentDomain" xlink:label="us-gaap_EquityComponentDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_StatementEquityComponentsAxis" xlink:to="us-gaap_EquityComponentDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EquityComponentDomain" xlink:label="us-gaap_EquityComponentDomain_637638582521326957" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" order="1" xlink:from="us-gaap_StatementEquityComponentsAxis" xlink:to="us-gaap_EquityComponentDomain_637638582521326957" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CommonStockMember" xlink:label="us-gaap_CommonStockMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_CommonStockMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AdditionalPaidInCapitalMember" xlink:label="us-gaap_AdditionalPaidInCapitalMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_AdditionalPaidInCapitalMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RetainedEarningsMember" xlink:label="us-gaap_RetainedEarningsMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_RetainedEarningsMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeMember" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StatementLineItems" xlink:label="us-gaap_StatementLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_StatementTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:label="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_SharesOutstanding" xlink:label="us-gaap_SharesOutstanding" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_SharesOutstanding" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockholdersEquity" xlink:label="us-gaap_StockholdersEquity" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_StockholdersEquity" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" xlink:label="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised" xlink:label="us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="7" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" xlink:label="us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="8" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan" xlink:label="us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="9" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures" xlink:label="us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="10" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures" xlink:label="us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="11" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="12" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockRepurchasedDuringPeriodShares" xlink:label="us-gaap_StockRepurchasedDuringPeriodShares" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="13" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_StockRepurchasedDuringPeriodShares" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockRepurchasedDuringPeriodValue" xlink:label="us-gaap_StockRepurchasedDuringPeriodValue" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="14" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_StockRepurchasedDuringPeriodValue" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureStockBasedCompensationDetails" xlink:type="extended" xlink:title="40201 - Disclosure - Stock-Based Compensation (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_PlanNameAxis" xlink:label="us-gaap_PlanNameAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_PlanNameAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_PlanNameDomain" xlink:label="us-gaap_PlanNameDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_PlanNameAxis" xlink:to="us-gaap_PlanNameDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_PlanNameDomain" xlink:label="us-gaap_PlanNameDomain_637638582521376952" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" order="1" xlink:from="us-gaap_PlanNameAxis" xlink:to="us-gaap_PlanNameDomain_637638582521376952" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_StockPlan2000Member" xlink:label="acls_StockPlan2000Member" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_PlanNameDomain" xlink:to="acls_StockPlan2000Member" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StatementEquityComponentsAxis" xlink:label="us-gaap_StatementEquityComponentsAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_StatementEquityComponentsAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EquityComponentDomain" xlink:label="us-gaap_EquityComponentDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_StatementEquityComponentsAxis" xlink:to="us-gaap_EquityComponentDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CommonStockMember" xlink:label="us-gaap_CommonStockMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_CommonStockMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AwardTypeAxis" xlink:label="us-gaap_AwardTypeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="3" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_AwardTypeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_AwardTypeAxis" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_637638582521386953" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" order="1" xlink:from="us-gaap_AwardTypeAxis" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_637638582521386953" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EmployeeStockMember" xlink:label="us-gaap_EmployeeStockMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="us-gaap_EmployeeStockMember" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_StockOptionAwardsMember" xlink:label="acls_StockOptionAwardsMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="acls_StockOptionAwardsMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardGrantsInPeriodGross" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardGrantsInPeriodGross" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardGrantsInPeriodGross" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AllocatedShareBasedCompensationExpense" xlink:label="us-gaap_AllocatedShareBasedCompensationExpense" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_AllocatedShareBasedCompensationExpense" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" xlink:label="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProceedsFromStockOptionsExercised" xlink:label="us-gaap_ProceedsFromStockOptionsExercised" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ProceedsFromStockOptionsExercised" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureLeasesDetails" xlink:type="extended" xlink:title="40301 - Disclosure - Leases (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeLeaseDescriptionTable" xlink:label="us-gaap_LesseeLeaseDescriptionTable" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_LesseeLeaseDescriptionTable" xlink:to="srt_RangeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_RangeMember" xlink:label="srt_RangeMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_RangeMember" xlink:label="srt_RangeMember_637638582521406969" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" order="1" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember_637638582521406969" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_RangeMember" xlink:to="srt_MinimumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeLeaseDescriptionLineItems" xlink:label="us-gaap_LesseeLeaseDescriptionLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems" xlink:to="us-gaap_LesseeLeaseDescriptionTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseRenewalTerm" xlink:label="us-gaap_LesseeOperatingLeaseRenewalTerm" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems" xlink:to="us-gaap_LesseeOperatingLeaseRenewalTerm" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend" xlink:label="us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems" xlink:to="us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails" xlink:type="extended" xlink:title="40303 - Disclosure - Leases - Lease Cost (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeLeaseDescriptionTable" xlink:label="us-gaap_LesseeLeaseDescriptionTable" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncomeStatementLocationAxis" xlink:label="us-gaap_IncomeStatementLocationAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_LesseeLeaseDescriptionTable" xlink:to="us-gaap_IncomeStatementLocationAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncomeStatementLocationDomain" xlink:label="us-gaap_IncomeStatementLocationDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_IncomeStatementLocationAxis" xlink:to="us-gaap_IncomeStatementLocationDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncomeStatementLocationDomain" xlink:label="us-gaap_IncomeStatementLocationDomain_637638582521416972" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" order="1" xlink:from="us-gaap_IncomeStatementLocationAxis" xlink:to="us-gaap_IncomeStatementLocationDomain_637638582521416972" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ServiceMember" xlink:label="us-gaap_ServiceMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_IncomeStatementLocationDomain" xlink:to="us-gaap_ServiceMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ResearchAndDevelopmentExpenseMember" xlink:label="us-gaap_ResearchAndDevelopmentExpenseMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_IncomeStatementLocationDomain" xlink:to="us-gaap_ResearchAndDevelopmentExpenseMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_SellingAndMarketingExpenseMember" xlink:label="us-gaap_SellingAndMarketingExpenseMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_IncomeStatementLocationDomain" xlink:to="us-gaap_SellingAndMarketingExpenseMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_GeneralAndAdministrativeExpenseMember" xlink:label="us-gaap_GeneralAndAdministrativeExpenseMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_IncomeStatementLocationDomain" xlink:to="us-gaap_GeneralAndAdministrativeExpenseMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeLeaseDescriptionLineItems" xlink:label="us-gaap_LesseeLeaseDescriptionLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems" xlink:to="us-gaap_LesseeLeaseDescriptionTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LeaseCostAbstract" xlink:label="us-gaap_LeaseCostAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems" xlink:to="us-gaap_LeaseCostAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseCost" xlink:label="us-gaap_OperatingLeaseCost" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_LeaseCostAbstract" xlink:to="us-gaap_OperatingLeaseCost" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseRightOfUseAssetAmortization" xlink:label="us-gaap_FinanceLeaseRightOfUseAssetAmortization" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_LeaseCostAbstract" xlink:to="us-gaap_FinanceLeaseRightOfUseAssetAmortization" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseInterestExpense" xlink:label="us-gaap_FinanceLeaseInterestExpense" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_LeaseCostAbstract" xlink:to="us-gaap_FinanceLeaseInterestExpense" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_FinanceLeaseCost" xlink:label="acls_FinanceLeaseCost" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_LeaseCostAbstract" xlink:to="acls_FinanceLeaseCost" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LeaseCost" xlink:label="us-gaap_LeaseCost" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_LeaseCostAbstract" xlink:to="us-gaap_LeaseCost" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_ShortTermAndVariableLeaseCost" xlink:label="acls_ShortTermAndVariableLeaseCost" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="us-gaap_LeaseCostAbstract" xlink:to="acls_ShortTermAndVariableLeaseCost" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails" xlink:type="extended" xlink:title="40304 - Disclosure - Leases - Future Minimum Cash Outflow and Weighted-average Remaining Lease Term and Discount Rate (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeLeaseDescriptionTable" xlink:label="us-gaap_LesseeLeaseDescriptionTable" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_LesseeLeaseDescriptionTable" xlink:to="srt_RangeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_RangeMember" xlink:label="srt_RangeMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_RangeMember" xlink:to="srt_MinimumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeLeaseDescriptionLineItems" xlink:label="us-gaap_LesseeLeaseDescriptionLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems" xlink:to="us-gaap_LesseeLeaseDescriptionTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:label="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems" xlink:to="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityPaymentsRemainderOfFiscalYear" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsRemainderOfFiscalYear" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsRemainderOfFiscalYear" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_FinanceLeaseLiabilityPaymentsDueAfterYearFour" xlink:label="acls_FinanceLeaseLiabilityPaymentsDueAfterYearFour" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:to="acls_FinanceLeaseLiabilityPaymentsDueAfterYearFour" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDue" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="7" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDue" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount" xlink:label="us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="8" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiability" xlink:label="us-gaap_FinanceLeaseLiability" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="9" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_FinanceLeaseLiability" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:label="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems" xlink:to="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsRemainderOfFiscalYear" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsRemainderOfFiscalYear" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsRemainderOfFiscalYear" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour" xlink:label="acls_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="acls_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="7" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="8" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseLiability" xlink:label="us-gaap_OperatingLeaseLiability" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="9" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_OperatingLeaseLiability" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:label="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems" xlink:to="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsRemainderOfFiscalYear" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsRemainderOfFiscalYear" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsRemainderOfFiscalYear" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFour" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFour" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFour" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="7" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="8" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_OperatingAndFinanceLeaseLiability" xlink:label="acls_OperatingAndFinanceLeaseLiability" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="9" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="acls_OperatingAndFinanceLeaseLiability" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" xlink:label="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems" xlink:to="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1" xlink:label="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" xlink:to="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1" xlink:label="us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" xlink:to="us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent" xlink:label="us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" xlink:to="us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent" xlink:label="us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" xlink:to="us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseTermOfContract" xlink:label="us-gaap_LesseeOperatingLeaseTermOfContract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" xlink:to="us-gaap_LesseeOperatingLeaseTermOfContract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeFinanceLeaseTermOfContract1" xlink:label="us-gaap_LesseeFinanceLeaseTermOfContract1" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" xlink:to="us-gaap_LesseeFinanceLeaseTermOfContract1" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureRevenueDetails" xlink:type="extended" xlink:title="40401 - Disclosure - Revenue (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DisaggregationOfRevenueTable" xlink:label="us-gaap_DisaggregationOfRevenueTable" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_ProductOrServiceAxis" xlink:label="srt_ProductOrServiceAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_DisaggregationOfRevenueTable" xlink:to="srt_ProductOrServiceAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_ProductsAndServicesDomain" xlink:label="srt_ProductsAndServicesDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_ProductOrServiceAxis" xlink:to="srt_ProductsAndServicesDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_NewSystemsRevenueMember" xlink:label="acls_NewSystemsRevenueMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_ProductsAndServicesDomain" xlink:to="acls_NewSystemsRevenueMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_DisaggregationOfRevenueTable" xlink:to="srt_RangeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_RangeMember" xlink:label="srt_RangeMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_RangeMember" xlink:to="srt_MinimumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DisaggregationOfRevenueLineItems" xlink:label="us-gaap_DisaggregationOfRevenueLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_DisaggregationOfRevenueLineItems" xlink:to="us-gaap_DisaggregationOfRevenueTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_PercentageOfPaymentUponShipmentOfTool" xlink:label="acls_PercentageOfPaymentUponShipmentOfTool" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_DisaggregationOfRevenueLineItems" xlink:to="acls_PercentageOfPaymentUponShipmentOfTool" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_PercentageOfPaymentUponInstallation" xlink:label="acls_PercentageOfPaymentUponInstallation" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_DisaggregationOfRevenueLineItems" xlink:to="acls_PercentageOfPaymentUponInstallation" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_PeriodOfPaymentUponDeliveryOfParts" xlink:label="acls_PeriodOfPaymentUponDeliveryOfParts" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_DisaggregationOfRevenueLineItems" xlink:to="acls_PeriodOfPaymentUponDeliveryOfParts" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ContractWithCustomerLiability" xlink:label="us-gaap_ContractWithCustomerLiability" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_DisaggregationOfRevenueLineItems" xlink:to="us-gaap_ContractWithCustomerLiability" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ContractWithCustomerLiabilityCurrent" xlink:label="us-gaap_ContractWithCustomerLiabilityCurrent" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="us-gaap_DisaggregationOfRevenueLineItems" xlink:to="us-gaap_ContractWithCustomerLiabilityCurrent" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ContractWithCustomerLiabilityNoncurrent" xlink:label="us-gaap_ContractWithCustomerLiabilityNoncurrent" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="7" xlink:from="us-gaap_DisaggregationOfRevenueLineItems" xlink:to="us-gaap_ContractWithCustomerLiabilityNoncurrent" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails" xlink:type="extended" xlink:title="40402 - Disclosure - Revenue - Revenue by discipline &amp; geographical areas (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DisaggregationOfRevenueTable" xlink:label="us-gaap_DisaggregationOfRevenueTable" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_ProductOrServiceAxis" xlink:label="srt_ProductOrServiceAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_DisaggregationOfRevenueTable" xlink:to="srt_ProductOrServiceAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_ProductsAndServicesDomain" xlink:label="srt_ProductsAndServicesDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_ProductOrServiceAxis" xlink:to="srt_ProductsAndServicesDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_NewSystemsRevenueMember" xlink:label="acls_NewSystemsRevenueMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_ProductsAndServicesDomain" xlink:to="acls_NewSystemsRevenueMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_CsIOrAftermarketMember" xlink:label="acls_CsIOrAftermarketMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_ProductsAndServicesDomain" xlink:to="acls_CsIOrAftermarketMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_StatementGeographicalAxis" xlink:label="srt_StatementGeographicalAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_DisaggregationOfRevenueTable" xlink:to="srt_StatementGeographicalAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_SegmentGeographicalDomain" xlink:label="srt_SegmentGeographicalDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_StatementGeographicalAxis" xlink:to="srt_SegmentGeographicalDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_SegmentGeographicalDomain" xlink:label="srt_SegmentGeographicalDomain_637638582521556957" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" order="1" xlink:from="srt_StatementGeographicalAxis" xlink:to="srt_SegmentGeographicalDomain_637638582521556957" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_NorthAmericaMember" xlink:label="srt_NorthAmericaMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_SegmentGeographicalDomain" xlink:to="srt_NorthAmericaMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_AsiaMember" xlink:label="srt_AsiaMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_SegmentGeographicalDomain" xlink:to="srt_AsiaMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_EuropeMember" xlink:label="srt_EuropeMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="srt_SegmentGeographicalDomain" xlink:to="srt_EuropeMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DisaggregationOfRevenueLineItems" xlink:label="us-gaap_DisaggregationOfRevenueLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_DisaggregationOfRevenueLineItems" xlink:to="us-gaap_DisaggregationOfRevenueTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" xlink:label="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_DisaggregationOfRevenueLineItems" xlink:to="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveIncomeDetails" xlink:type="extended" xlink:title="40701 - Disclosure - Accumulated Other Comprehensive Income (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StatementEquityComponentsAxis" xlink:label="us-gaap_StatementEquityComponentsAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" xlink:to="us-gaap_StatementEquityComponentsAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EquityComponentDomain" xlink:label="us-gaap_EquityComponentDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_StatementEquityComponentsAxis" xlink:to="us-gaap_EquityComponentDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccumulatedTranslationAdjustmentMember" xlink:label="us-gaap_AccumulatedTranslationAdjustmentMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_AccumulatedTranslationAdjustmentMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember" xlink:label="us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AOCIAttributableToParentNetOfTaxRollForward" xlink:label="us-gaap_AOCIAttributableToParentNetOfTaxRollForward" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:to="us-gaap_AOCIAttributableToParentNetOfTaxRollForward" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_AOCIAttributableToParentNetOfTaxRollForward" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OtherComprehensiveIncomeLossNetOfTax" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTax" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_AOCIAttributableToParentNetOfTaxRollForward" xlink:to="us-gaap_OtherComprehensiveIncomeLossNetOfTax" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails" xlink:type="extended" xlink:title="40801 - Disclosure - Cash, cash equivalents and restricted cash (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StatementTable" xlink:label="us-gaap_StatementTable" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LongtermDebtTypeAxis" xlink:label="us-gaap_LongtermDebtTypeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_StatementTable" xlink:to="us-gaap_LongtermDebtTypeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LongtermDebtTypeDomain" xlink:label="us-gaap_LongtermDebtTypeDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_LongtermDebtTypeAxis" xlink:to="us-gaap_LongtermDebtTypeDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LongtermDebtTypeDomain" xlink:label="us-gaap_LongtermDebtTypeDomain_637638582521577121" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" order="1" xlink:from="us-gaap_LongtermDebtTypeAxis" xlink:to="us-gaap_LongtermDebtTypeDomain_637638582521577121" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RevolvingCreditFacilityMember" xlink:label="us-gaap_RevolvingCreditFacilityMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_LongtermDebtTypeDomain" xlink:to="us-gaap_RevolvingCreditFacilityMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StatementLineItems" xlink:label="us-gaap_StatementLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_StatementTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_CashAndCashEquivalentsAtCarryingValue" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RestrictedCashAndCashEquivalents" xlink:label="us-gaap_RestrictedCashAndCashEquivalents" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_RestrictedCashAndCashEquivalents" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit" xlink:label="acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_StatementLineItems" xlink:to="acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_WorkersCompensationLiabilityCurrentAndNoncurrent" xlink:label="us-gaap_WorkersCompensationLiabilityCurrentAndNoncurrent" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_WorkersCompensationLiabilityCurrentAndNoncurrent" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_DepositRelatingToCustomsActivity" xlink:label="acls_DepositRelatingToCustomsActivity" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="7" xlink:from="us-gaap_StatementLineItems" xlink:to="acls_DepositRelatingToCustomsActivity" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails" xlink:type="extended" xlink:title="41101 - Disclosure - Fair Value Measurements (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueByMeasurementFrequencyAxis" xlink:label="us-gaap_FairValueByMeasurementFrequencyAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="us-gaap_FairValueByMeasurementFrequencyAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueMeasurementFrequencyDomain" xlink:label="us-gaap_FairValueMeasurementFrequencyDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_FairValueByMeasurementFrequencyAxis" xlink:to="us-gaap_FairValueMeasurementFrequencyDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueMeasurementFrequencyDomain" xlink:label="us-gaap_FairValueMeasurementFrequencyDomain_637638582521596972" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" order="1" xlink:from="us-gaap_FairValueByMeasurementFrequencyAxis" xlink:to="us-gaap_FairValueMeasurementFrequencyDomain_637638582521596972" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueMeasurementsRecurringMember" xlink:label="us-gaap_FairValueMeasurementsRecurringMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_FairValueMeasurementFrequencyDomain" xlink:to="us-gaap_FairValueMeasurementsRecurringMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueByFairValueHierarchyLevelAxis" xlink:label="us-gaap_FairValueByFairValueHierarchyLevelAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="us-gaap_FairValueByFairValueHierarchyLevelAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:label="us-gaap_FairValueMeasurementsFairValueHierarchyDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_FairValueByFairValueHierarchyLevelAxis" xlink:to="us-gaap_FairValueMeasurementsFairValueHierarchyDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:label="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_637638582521596972" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" order="1" xlink:from="us-gaap_FairValueByFairValueHierarchyLevelAxis" xlink:to="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_637638582521596972" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueInputsLevel1Member" xlink:label="us-gaap_FairValueInputsLevel1Member" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:to="us-gaap_FairValueInputsLevel1Member" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueByMeasurementBasisAxis" xlink:label="us-gaap_FairValueByMeasurementBasisAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="3" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="us-gaap_FairValueByMeasurementBasisAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_PortionAtFairValueFairValueDisclosureMember" xlink:label="us-gaap_PortionAtFairValueFairValueDisclosureMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_FairValueByMeasurementBasisAxis" xlink:to="us-gaap_PortionAtFairValueFairValueDisclosureMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_PortionAtFairValueFairValueDisclosureMember" xlink:label="us-gaap_PortionAtFairValueFairValueDisclosureMember_637638582521606963" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" order="1" xlink:from="us-gaap_FairValueByMeasurementBasisAxis" xlink:to="us-gaap_PortionAtFairValueFairValueDisclosureMember_637638582521606963" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EstimateOfFairValueFairValueDisclosureMember" xlink:label="us-gaap_EstimateOfFairValueFairValueDisclosureMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_PortionAtFairValueFairValueDisclosureMember" xlink:to="us-gaap_EstimateOfFairValueFairValueDisclosureMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueByAssetClassAxis" xlink:label="us-gaap_FairValueByAssetClassAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="4" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="us-gaap_FairValueByAssetClassAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:label="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_FairValueByAssetClassAxis" xlink:to="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:label="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_637638582521606963" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" order="1" xlink:from="us-gaap_FairValueByAssetClassAxis" xlink:to="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_637638582521606963" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember" xlink:label="acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:to="acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CashAndCashEquivalentsFairValueDisclosure" xlink:label="us-gaap_CashAndCashEquivalentsFairValueDisclosure" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_CashAndCashEquivalentsFairValueDisclosure" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails" xlink:type="extended" xlink:title="41201 - Disclosure - Financing Arrangements (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DebtInstrumentTable" xlink:label="us-gaap_DebtInstrumentTable" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_CounterpartyNameAxis" xlink:label="srt_CounterpartyNameAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="srt_CounterpartyNameAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_RepurchaseAgreementCounterpartyNameDomain" xlink:label="srt_RepurchaseAgreementCounterpartyNameDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_CounterpartyNameAxis" xlink:to="srt_RepurchaseAgreementCounterpartyNameDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_RepurchaseAgreementCounterpartyNameDomain" xlink:label="srt_RepurchaseAgreementCounterpartyNameDomain_637638582521616956" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" order="1" xlink:from="srt_CounterpartyNameAxis" xlink:to="srt_RepurchaseAgreementCounterpartyNameDomain_637638582521616956" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_BeverlyPropertyOwnerLlcMember" xlink:label="acls_BeverlyPropertyOwnerLlcMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_RepurchaseAgreementCounterpartyNameDomain" xlink:to="acls_BeverlyPropertyOwnerLlcMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_SiliconValleyBankMember" xlink:label="acls_SiliconValleyBankMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_RepurchaseAgreementCounterpartyNameDomain" xlink:to="acls_SiliconValleyBankMember" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:label="us-gaap_PropertyPlantAndEquipmentByTypeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_PropertyPlantAndEquipmentByTypeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="us-gaap_PropertyPlantAndEquipmentTypeDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:to="us-gaap_PropertyPlantAndEquipmentTypeDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="us-gaap_PropertyPlantAndEquipmentTypeDomain_637638582521626970" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" order="1" xlink:from="us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:to="us-gaap_PropertyPlantAndEquipmentTypeDomain_637638582521626970" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_BuildingMember" xlink:label="us-gaap_BuildingMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_BuildingMember" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_SaleAndLeaseBackMember" xlink:label="acls_SaleAndLeaseBackMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="acls_SaleAndLeaseBackMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CreditFacilityAxis" xlink:label="us-gaap_CreditFacilityAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="3" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_CreditFacilityAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CreditFacilityDomain" xlink:label="us-gaap_CreditFacilityDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_CreditFacilityAxis" xlink:to="us-gaap_CreditFacilityDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CreditFacilityDomain" xlink:label="us-gaap_CreditFacilityDomain_637638582521636964" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" order="1" xlink:from="us-gaap_CreditFacilityAxis" xlink:to="us-gaap_CreditFacilityDomain_637638582521636964" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RevolvingCreditFacilityMember" xlink:label="us-gaap_RevolvingCreditFacilityMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_CreditFacilityDomain" xlink:to="us-gaap_RevolvingCreditFacilityMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ShortTermDebtTypeAxis" xlink:label="us-gaap_ShortTermDebtTypeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="4" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_ShortTermDebtTypeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ShortTermDebtTypeDomain" xlink:label="us-gaap_ShortTermDebtTypeDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_ShortTermDebtTypeAxis" xlink:to="us-gaap_ShortTermDebtTypeDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ShortTermDebtTypeDomain" xlink:label="us-gaap_ShortTermDebtTypeDomain_637638582521776938" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" order="1" xlink:from="us-gaap_ShortTermDebtTypeAxis" xlink:to="us-gaap_ShortTermDebtTypeDomain_637638582521776938" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LetterOfCreditMember" xlink:label="us-gaap_LetterOfCreditMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_ShortTermDebtTypeDomain" xlink:to="us-gaap_LetterOfCreditMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="us-gaap_DebtInstrumentLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProceedsFromSaleOfPropertyHeldForSale" xlink:label="us-gaap_ProceedsFromSaleOfPropertyHeldForSale" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_ProceedsFromSaleOfPropertyHeldForSale" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseTermOfContract" xlink:label="us-gaap_LesseeOperatingLeaseTermOfContract" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_LesseeOperatingLeaseTermOfContract" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityNoncurrent" xlink:label="us-gaap_FinanceLeaseLiabilityNoncurrent" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_FinanceLeaseLiabilityNoncurrent" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_SecurityDeposit" xlink:label="us-gaap_SecurityDeposit" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_SecurityDeposit" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" xlink:label="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LineOfCreditFacilityFairValueOfAmountOutstanding" xlink:label="us-gaap_LineOfCreditFacilityFairValueOfAmountOutstanding" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="7" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_LineOfCreditFacilityFairValueOfAmountOutstanding" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LettersOfCreditOutstandingAmount" xlink:label="us-gaap_LettersOfCreditOutstandingAmount" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="8" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_LettersOfCreditOutstandingAmount" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureIncomeTaxesDetails" xlink:type="extended" xlink:title="41301 - Disclosure - Income Taxes (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ValuationAllowanceTable" xlink:label="us-gaap_ValuationAllowanceTable" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_ValuationAllowanceTable" xlink:to="srt_RangeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_RangeMember" xlink:label="srt_RangeMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_RangeAxis" xlink:to="srt_RangeMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_RangeMember" xlink:to="srt_MaximumMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ValuationAllowanceLineItems" xlink:label="us-gaap_ValuationAllowanceLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_ValuationAllowanceLineItems" xlink:to="us-gaap_ValuationAllowanceTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="us-gaap_IncomeTaxExpenseBenefit" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ValuationAllowanceLineItems" xlink:to="us-gaap_IncomeTaxExpenseBenefit" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_IncreaseInIncomeTaxExpenseBenefit" xlink:label="acls_IncreaseInIncomeTaxExpenseBenefit" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_ValuationAllowanceLineItems" xlink:to="acls_IncreaseInIncomeTaxExpenseBenefit" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_IncreaseInPreTaxIncome" xlink:label="acls_IncreaseInPreTaxIncome" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="4" xlink:from="us-gaap_ValuationAllowanceLineItems" xlink:to="acls_IncreaseInPreTaxIncome" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="5" xlink:from="us-gaap_ValuationAllowanceLineItems" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DeferredIncomeTaxAssetsNet" xlink:label="us-gaap_DeferredIncomeTaxAssetsNet" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="6" xlink:from="us-gaap_ValuationAllowanceLineItems" xlink:to="us-gaap_DeferredIncomeTaxAssetsNet" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DeferredTaxAssetsValuationAllowance" xlink:label="us-gaap_DeferredTaxAssetsValuationAllowance" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="7" xlink:from="us-gaap_ValuationAllowanceLineItems" xlink:to="us-gaap_DeferredTaxAssetsValuationAllowance" priority="1" use="optional" />
  </definitionLink>
  <definitionLink xlink:role="http://www.axcelis.com/role/DisclosureConcentrationOfRiskDetails" xlink:type="extended" xlink:title="41401 - Disclosure - Concentration of Risk (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ConcentrationRiskTable" xlink:label="us-gaap_ConcentrationRiskTable" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="us-gaap_ConcentrationRiskByBenchmarkAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="1" xlink:from="us-gaap_ConcentrationRiskTable" xlink:to="us-gaap_ConcentrationRiskByBenchmarkAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="us-gaap_ConcentrationRiskBenchmarkDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:to="us-gaap_ConcentrationRiskBenchmarkDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="us-gaap_ConcentrationRiskBenchmarkDomain_637638582521806965" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" order="1" xlink:from="us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:to="us-gaap_ConcentrationRiskBenchmarkDomain_637638582521806965" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_SalesRevenueNetMember" xlink:label="us-gaap_SalesRevenueNetMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_ConcentrationRiskBenchmarkDomain" xlink:to="us-gaap_SalesRevenueNetMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccountsReceivableMember" xlink:label="us-gaap_AccountsReceivableMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ConcentrationRiskBenchmarkDomain" xlink:to="us-gaap_AccountsReceivableMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="us-gaap_ConcentrationRiskByTypeAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="2" xlink:from="us-gaap_ConcentrationRiskTable" xlink:to="us-gaap_ConcentrationRiskByTypeAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="us-gaap_ConcentrationRiskTypeDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="us-gaap_ConcentrationRiskByTypeAxis" xlink:to="us-gaap_ConcentrationRiskTypeDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="us-gaap_ConcentrationRiskTypeDomain_637638582521816967" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" order="1" xlink:from="us-gaap_ConcentrationRiskByTypeAxis" xlink:to="us-gaap_ConcentrationRiskTypeDomain_637638582521816967" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CustomerConcentrationRiskMember" xlink:label="us-gaap_CustomerConcentrationRiskMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="us-gaap_ConcentrationRiskTypeDomain" xlink:to="us-gaap_CustomerConcentrationRiskMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CreditConcentrationRiskMember" xlink:label="us-gaap_CreditConcentrationRiskMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ConcentrationRiskTypeDomain" xlink:to="us-gaap_CreditConcentrationRiskMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_MajorCustomersAxis" xlink:label="srt_MajorCustomersAxis" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/hypercube-dimension" order="3" xlink:from="us-gaap_ConcentrationRiskTable" xlink:to="srt_MajorCustomersAxis" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_NameOfMajorCustomerDomain" xlink:label="srt_NameOfMajorCustomerDomain" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-domain" order="1" xlink:from="srt_MajorCustomersAxis" xlink:to="srt_NameOfMajorCustomerDomain" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_NameOfMajorCustomerDomain" xlink:label="srt_NameOfMajorCustomerDomain_637638582521826951" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/dimension-default" order="1" xlink:from="srt_MajorCustomersAxis" xlink:to="srt_NameOfMajorCustomerDomain_637638582521826951" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LargestCustomerMember" xlink:label="acls_LargestCustomerMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="1" xlink:from="srt_NameOfMajorCustomerDomain" xlink:to="acls_LargestCustomerMember" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_SecondLargestCustomerMember" xlink:label="acls_SecondLargestCustomerMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="srt_NameOfMajorCustomerDomain" xlink:to="acls_SecondLargestCustomerMember" use="optional" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_ThirdLargestCustomerMember" xlink:label="acls_ThirdLargestCustomerMember" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="srt_NameOfMajorCustomerDomain" xlink:to="acls_ThirdLargestCustomerMember" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ConcentrationRiskLineItems" xlink:label="us-gaap_ConcentrationRiskLineItems" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/all" order="1" xlink:from="us-gaap_ConcentrationRiskLineItems" xlink:to="us-gaap_ConcentrationRiskTable" use="optional" xbrldt:contextElement="segment" xbrldt:closed="true" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_ConcentrationRiskNumberOfCustomers" xlink:label="acls_ConcentrationRiskNumberOfCustomers" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="2" xlink:from="us-gaap_ConcentrationRiskLineItems" xlink:to="acls_ConcentrationRiskNumberOfCustomers" priority="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="us-gaap_ConcentrationRiskPercentage1" />
    <definitionArc xlink:type="arc" xlink:arcrole="http://xbrl.org/int/dim/arcrole/domain-member" order="3" xlink:from="us-gaap_ConcentrationRiskLineItems" xlink:to="us-gaap_ConcentrationRiskPercentage1" priority="1" use="optional" />
  </definitionLink>
</link:linkbase>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.LAB
<SEQUENCE>9
<FILENAME>acls-20210630_lab.xml
<DESCRIPTION>EX-101.LAB
<TEXT>
<XBRL>
<?xml version="1.0" encoding="us-ascii"?>
<!--XBRL document created with Toppan Merrill Bridge  9.6.7811.37134 -->
<!--Based on XBRL 2.1-->
<!--Created on: 8/6/2021 2:50:53 PM-->
<!--Modified on: 8/6/2021 2:50:53 PM-->
<link:linkbase xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xbrldt="http://xbrl.org/2005/xbrldt">
  <roleRef xlink:type="simple" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedLabel" roleURI="http://www.xbrl.org/2009/role/negatedLabel" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedTerseLabel" roleURI="http://www.xbrl.org/2009/role/negatedTerseLabel" xmlns="http://www.xbrl.org/2003/linkbase" />
  <link:labelLink xlink:type="extended" xlink:role="http://www.xbrl.org/2003/role/link">
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_CoverAbstract" xlink:label="dei_CoverAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_CoverAbstract" xlink:to="dei_CoverAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_CoverAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Document and Entity Information</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_DocumentInformationTable" xlink:label="dei_DocumentInformationTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentInformationTable" xlink:to="dei_DocumentInformationTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentInformationTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Document Information [Table]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StatementLineItems" xlink:label="us-gaap_StatementLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StatementLineItems" xlink:to="us-gaap_StatementLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StatementLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Statement [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_StatementLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule II-Valuation and Qualifying Accounts</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_DocumentType" xlink:label="dei_DocumentType" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentType" xlink:to="dei_DocumentType_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentType_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Document Type</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_DocumentQuarterlyReport" xlink:label="dei_DocumentQuarterlyReport" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentQuarterlyReport" xlink:to="dei_DocumentQuarterlyReport_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentQuarterlyReport_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Document Quarterly Report</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_DocumentTransitionReport" xlink:label="dei_DocumentTransitionReport" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentTransitionReport" xlink:to="dei_DocumentTransitionReport_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentTransitionReport_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Document Transition Report</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_DocumentPeriodEndDate" xlink:label="dei_DocumentPeriodEndDate" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentPeriodEndDate" xlink:to="dei_DocumentPeriodEndDate_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentPeriodEndDate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Document Period End Date</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityFileNumber" xlink:label="dei_EntityFileNumber" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityFileNumber" xlink:to="dei_EntityFileNumber_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityFileNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity File Number</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityRegistrantName" xlink:label="dei_EntityRegistrantName" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityRegistrantName" xlink:to="dei_EntityRegistrantName_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityRegistrantName_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Registrant Name</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityIncorporationStateCountryCode" xlink:label="dei_EntityIncorporationStateCountryCode" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityIncorporationStateCountryCode" xlink:to="dei_EntityIncorporationStateCountryCode_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityIncorporationStateCountryCode_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Incorporation, State or Country Code</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityTaxIdentificationNumber" xlink:label="dei_EntityTaxIdentificationNumber" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityTaxIdentificationNumber" xlink:to="dei_EntityTaxIdentificationNumber_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityTaxIdentificationNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Tax Identification Number</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityAddressAddressLine1" xlink:label="dei_EntityAddressAddressLine1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressAddressLine1" xlink:to="dei_EntityAddressAddressLine1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityAddressAddressLine1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Address, Address Line One</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityAddressCityOrTown" xlink:label="dei_EntityAddressCityOrTown" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressCityOrTown" xlink:to="dei_EntityAddressCityOrTown_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityAddressCityOrTown_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Address, City or Town</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityAddressStateOrProvince" xlink:label="dei_EntityAddressStateOrProvince" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressStateOrProvince" xlink:to="dei_EntityAddressStateOrProvince_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityAddressStateOrProvince_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Address, State or Province</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityAddressPostalZipCode" xlink:label="dei_EntityAddressPostalZipCode" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressPostalZipCode" xlink:to="dei_EntityAddressPostalZipCode_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityAddressPostalZipCode_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Address, Postal Zip Code</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_CityAreaCode" xlink:label="dei_CityAreaCode" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_CityAreaCode" xlink:to="dei_CityAreaCode_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_CityAreaCode_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">City Area Code</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_LocalPhoneNumber" xlink:label="dei_LocalPhoneNumber" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_LocalPhoneNumber" xlink:to="dei_LocalPhoneNumber_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_LocalPhoneNumber_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Local Phone Number</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_Security12bTitle" xlink:label="dei_Security12bTitle" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_Security12bTitle" xlink:to="dei_Security12bTitle_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_Security12bTitle_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Title of 12(b) Security</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_TradingSymbol" xlink:label="dei_TradingSymbol" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_TradingSymbol" xlink:to="dei_TradingSymbol_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_TradingSymbol_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Trading Symbol</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_SecurityExchangeName" xlink:label="dei_SecurityExchangeName" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_SecurityExchangeName" xlink:to="dei_SecurityExchangeName_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_SecurityExchangeName_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Security Exchange Name</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityCurrentReportingStatus" xlink:label="dei_EntityCurrentReportingStatus" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityCurrentReportingStatus" xlink:to="dei_EntityCurrentReportingStatus_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityCurrentReportingStatus_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Current Reporting Status</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityInteractiveDataCurrent" xlink:label="dei_EntityInteractiveDataCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityInteractiveDataCurrent" xlink:to="dei_EntityInteractiveDataCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityInteractiveDataCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Interactive Data Current</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityFilerCategory" xlink:label="dei_EntityFilerCategory" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityFilerCategory" xlink:to="dei_EntityFilerCategory_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityFilerCategory_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Filer Category</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntitySmallBusiness" xlink:label="dei_EntitySmallBusiness" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntitySmallBusiness" xlink:to="dei_EntitySmallBusiness_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntitySmallBusiness_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Small Business</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityEmergingGrowthCompany" xlink:label="dei_EntityEmergingGrowthCompany" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityEmergingGrowthCompany" xlink:to="dei_EntityEmergingGrowthCompany_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityEmergingGrowthCompany_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Emerging Growth Company</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityShellCompany" xlink:label="dei_EntityShellCompany" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityShellCompany" xlink:to="dei_EntityShellCompany_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityShellCompany_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Shell Company</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityCommonStockSharesOutstanding" xlink:label="dei_EntityCommonStockSharesOutstanding" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityCommonStockSharesOutstanding" xlink:to="dei_EntityCommonStockSharesOutstanding_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityCommonStockSharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Common Stock, Shares Outstanding</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_CurrentFiscalYearEndDate" xlink:label="dei_CurrentFiscalYearEndDate" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_CurrentFiscalYearEndDate" xlink:to="dei_CurrentFiscalYearEndDate_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_CurrentFiscalYearEndDate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Current Fiscal Year End Date</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_DocumentFiscalYearFocus" xlink:label="dei_DocumentFiscalYearFocus" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentFiscalYearFocus" xlink:to="dei_DocumentFiscalYearFocus_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentFiscalYearFocus_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Document Fiscal Year Focus</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_DocumentFiscalPeriodFocus" xlink:label="dei_DocumentFiscalPeriodFocus" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentFiscalPeriodFocus" xlink:to="dei_DocumentFiscalPeriodFocus_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentFiscalPeriodFocus_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Document Fiscal Period Focus</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityCentralIndexKey" xlink:label="dei_EntityCentralIndexKey" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityCentralIndexKey" xlink:to="dei_EntityCentralIndexKey_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityCentralIndexKey_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Entity Central Index Key</label>
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_AmendmentFlag" xlink:label="dei_AmendmentFlag" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_AmendmentFlag" xlink:to="dei_AmendmentFlag_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_AmendmentFlag_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amendment Flag</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncomeStatementAbstract" xlink:label="us-gaap_IncomeStatementAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeStatementAbstract" xlink:to="us-gaap_IncomeStatementAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeStatementAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Consolidated Statements of Operations</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StatementTable" xlink:label="us-gaap_StatementTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StatementTable" xlink:to="us-gaap_StatementTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StatementTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Statement [Table]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RevenuesAbstract" xlink:label="us-gaap_RevenuesAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenuesAbstract" xlink:to="us-gaap_RevenuesAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RevenuesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenues [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RevenuesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue:</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_Revenues" xlink:label="us-gaap_Revenues" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_Revenues" xlink:to="us-gaap_Revenues_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_Revenues_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenues</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_Revenues_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CostOfRevenueAbstract" xlink:label="us-gaap_CostOfRevenueAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CostOfRevenueAbstract" xlink:to="us-gaap_CostOfRevenueAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CostOfRevenueAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cost of Revenue [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CostOfRevenueAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cost of revenue:</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CostOfGoodsAndServicesSold" xlink:label="us-gaap_CostOfGoodsAndServicesSold" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CostOfGoodsAndServicesSold" xlink:to="us-gaap_CostOfGoodsAndServicesSold_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CostOfGoodsAndServicesSold_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cost of Goods and Services Sold</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CostOfGoodsAndServicesSold_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cost of revenue</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_GrossProfit" xlink:label="us-gaap_GrossProfit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GrossProfit" xlink:to="us-gaap_GrossProfit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_GrossProfit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Gross Profit</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_GrossProfit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Gross profit</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingExpensesAbstract" xlink:label="us-gaap_OperatingExpensesAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingExpensesAbstract" xlink:to="us-gaap_OperatingExpensesAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingExpensesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Expenses [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingExpensesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating expenses:</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ResearchAndDevelopmentExpense" xlink:label="us-gaap_ResearchAndDevelopmentExpense" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ResearchAndDevelopmentExpense" xlink:to="us-gaap_ResearchAndDevelopmentExpense_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ResearchAndDevelopmentExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Research and Development Expense</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ResearchAndDevelopmentExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Research and development</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_SellingAndMarketingExpense" xlink:label="us-gaap_SellingAndMarketingExpense" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SellingAndMarketingExpense" xlink:to="us-gaap_SellingAndMarketingExpense_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SellingAndMarketingExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Selling and Marketing Expense</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SellingAndMarketingExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Sales and marketing</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_GeneralAndAdministrativeExpense" xlink:label="us-gaap_GeneralAndAdministrativeExpense" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GeneralAndAdministrativeExpense" xlink:to="us-gaap_GeneralAndAdministrativeExpense_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_GeneralAndAdministrativeExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">General and Administrative Expense</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_GeneralAndAdministrativeExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">General and administrative</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingExpenses" xlink:label="us-gaap_OperatingExpenses" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingExpenses" xlink:to="us-gaap_OperatingExpenses_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingExpenses_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Expenses</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_OperatingExpenses_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total operating expenses</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingIncomeLoss" xlink:label="us-gaap_OperatingIncomeLoss" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingIncomeLoss" xlink:to="us-gaap_OperatingIncomeLoss_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingIncomeLoss_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Income (Loss)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_OperatingIncomeLoss_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income from operations</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NonoperatingIncomeExpenseAbstract" xlink:label="us-gaap_NonoperatingIncomeExpenseAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NonoperatingIncomeExpenseAbstract" xlink:to="us-gaap_NonoperatingIncomeExpenseAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NonoperatingIncomeExpenseAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Nonoperating Income (Expense) [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_NonoperatingIncomeExpenseAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other (expense) income:</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InvestmentIncomeInterest" xlink:label="us-gaap_InvestmentIncomeInterest" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InvestmentIncomeInterest" xlink:to="us-gaap_InvestmentIncomeInterest_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InvestmentIncomeInterest_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Investment Income, Interest</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InvestmentIncomeInterest_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest income</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InterestExpense" xlink:label="us-gaap_InterestExpense" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InterestExpense" xlink:to="us-gaap_InterestExpense_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InterestExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest Expense</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_InterestExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest expense</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OtherNonoperatingIncomeExpense" xlink:label="us-gaap_OtherNonoperatingIncomeExpense" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherNonoperatingIncomeExpense" xlink:to="us-gaap_OtherNonoperatingIncomeExpense_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherNonoperatingIncomeExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Nonoperating Income (Expense)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OtherNonoperatingIncomeExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other, net</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NonoperatingIncomeExpense" xlink:label="us-gaap_NonoperatingIncomeExpense" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NonoperatingIncomeExpense" xlink:to="us-gaap_NonoperatingIncomeExpense_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NonoperatingIncomeExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Nonoperating Income (Expense)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_NonoperatingIncomeExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total other expense</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income (Loss) from Continuing Operations before Income Taxes, Extraordinary Items, Noncontrolling Interest</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income before income taxes</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="us-gaap_IncomeTaxExpenseBenefit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxExpenseBenefit" xlink:to="us-gaap_IncomeTaxExpenseBenefit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Tax Expense (Benefit)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_IncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income tax provision</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" xlink:to="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net Income (Loss) Available to Common Stockholders, Basic</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net income</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net income</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net income available to common stockholders</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="us-gaap_EarningsPerShareAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EarningsPerShareAbstract" xlink:to="us-gaap_EarningsPerShareAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EarningsPerShareAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Computation of Net Earnings per Share</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EarningsPerShareAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net income per share:</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EarningsPerShareBasic" xlink:label="us-gaap_EarningsPerShareBasic" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EarningsPerShareBasic" xlink:to="us-gaap_EarningsPerShareBasic_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EarningsPerShareBasic_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Earnings Per Share, Basic</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EarningsPerShareBasic_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Basic</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EarningsPerShareDiluted" xlink:label="us-gaap_EarningsPerShareDiluted" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EarningsPerShareDiluted" xlink:to="us-gaap_EarningsPerShareDiluted_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EarningsPerShareDiluted_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Earnings Per Share, Diluted</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EarningsPerShareDiluted_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Diluted</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted Average Number of Shares Outstanding, Diluted [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Shares used in computing net income per share:</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted Average Number of Shares Outstanding, Basic</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Basic weighted average common shares</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted average common shares outstanding used in computing basic income per share</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:to="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted Average Number of Shares Outstanding, Diluted</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Diluted weighted average common shares</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted average common shares used in computing diluted net income per share</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract" xlink:label="us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract" xlink:to="us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Consolidated Statements of Comprehensive Income</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract" xlink:to="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Comprehensive Income (Loss), Net of Tax, Portion Attributable to Parent [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other comprehensive income (loss):</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" xlink:to="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax, Portion Attributable to Parent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Foreign currency translation adjustments</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" xlink:to="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Comprehensive (Income) Loss, Pension and Other Postretirement Benefit Plans, Adjustment, Net of Tax, Portion Attributable to Parent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amortization of actuarial loss and other adjustments from pension plan, net of tax</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedTerseLabel" xlink:label="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Change in pension obligation, net of tax</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OtherComprehensiveIncomeLossNetOfTax" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTax" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTax" xlink:to="us-gaap_OtherComprehensiveIncomeLossNetOfTax_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Comprehensive Income (Loss), Net of Tax</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other comprehensive income (loss):</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other comprehensive income and pension reclassification</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ComprehensiveIncomeNetOfTax" xlink:label="us-gaap_ComprehensiveIncomeNetOfTax" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ComprehensiveIncomeNetOfTax" xlink:to="us-gaap_ComprehensiveIncomeNetOfTax_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ComprehensiveIncomeNetOfTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Comprehensive Income (Loss), Net of Tax, Attributable to Parent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_ComprehensiveIncomeNetOfTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Comprehensive income</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StatementOfFinancialPositionAbstract" xlink:label="us-gaap_StatementOfFinancialPositionAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StatementOfFinancialPositionAbstract" xlink:to="us-gaap_StatementOfFinancialPositionAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StatementOfFinancialPositionAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Consolidated Balance Sheets</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AssetsAbstract" xlink:label="us-gaap_AssetsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AssetsAbstract" xlink:to="us-gaap_AssetsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AssetsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Assets [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AssetsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">ASSETS</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AssetsCurrentAbstract" xlink:label="us-gaap_AssetsCurrentAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AssetsCurrentAbstract" xlink:to="us-gaap_AssetsCurrentAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AssetsCurrentAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Assets, Current [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AssetsCurrentAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Current assets:</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:to="us-gaap_CashAndCashEquivalentsAtCarryingValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash and Cash Equivalents, at Carrying Value</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash and cash equivalents</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccountsReceivableNetCurrent" xlink:label="us-gaap_AccountsReceivableNetCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccountsReceivableNetCurrent" xlink:to="us-gaap_AccountsReceivableNetCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccountsReceivableNetCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts Receivable, Net, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccountsReceivableNetCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts receivable, net</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InventoryNet" xlink:label="us-gaap_InventoryNet" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryNet" xlink:to="us-gaap_InventoryNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InventoryNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventory, Net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InventoryNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventories, net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_InventoryNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventories, net</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_PrepaidExpenseAndOtherAssetsCurrent" xlink:label="us-gaap_PrepaidExpenseAndOtherAssetsCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PrepaidExpenseAndOtherAssetsCurrent" xlink:to="us-gaap_PrepaidExpenseAndOtherAssetsCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PrepaidExpenseAndOtherAssetsCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Prepaid Expense and Other Assets, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PrepaidExpenseAndOtherAssetsCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Prepaid expenses and other current assets</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AssetsCurrent" xlink:label="us-gaap_AssetsCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AssetsCurrent" xlink:to="us-gaap_AssetsCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AssetsCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Assets, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_AssetsCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total current assets</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="us-gaap_PropertyPlantAndEquipmentNet" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentNet" xlink:to="us-gaap_PropertyPlantAndEquipmentNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PropertyPlantAndEquipmentNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment, Net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PropertyPlantAndEquipmentNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, plant and equipment, net</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseRightOfUseAsset" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseRightOfUseAsset" xlink:to="us-gaap_OperatingLeaseRightOfUseAsset_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Right-of-Use Asset</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating lease assets</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseRightOfUseAsset" xlink:label="us-gaap_FinanceLeaseRightOfUseAsset" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseRightOfUseAsset" xlink:to="us-gaap_FinanceLeaseRightOfUseAsset_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseRightOfUseAsset_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Right-of-Use Asset</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FinanceLeaseRightOfUseAsset_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance lease assets, net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_FinanceLeaseRightOfUseAsset_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance lease assets</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RestrictedCashAndCashEquivalentsNoncurrent" xlink:label="us-gaap_RestrictedCashAndCashEquivalentsNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RestrictedCashAndCashEquivalentsNoncurrent" xlink:to="us-gaap_RestrictedCashAndCashEquivalentsNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RestrictedCashAndCashEquivalentsNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Restricted Cash and Cash Equivalents, Noncurrent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RestrictedCashAndCashEquivalentsNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-term restricted cash</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DeferredIncomeTaxAssetsNet" xlink:label="us-gaap_DeferredIncomeTaxAssetsNet" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredIncomeTaxAssetsNet" xlink:to="us-gaap_DeferredIncomeTaxAssetsNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredIncomeTaxAssetsNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Assets, Net.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredIncomeTaxAssetsNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred income taxes</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_DeferredIncomeTaxAssetsNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred tax assets, net</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OtherAssetsNoncurrent" xlink:label="us-gaap_OtherAssetsNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherAssetsNoncurrent" xlink:to="us-gaap_OtherAssetsNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherAssetsNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Assets, Noncurrent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OtherAssetsNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other assets</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_Assets" xlink:label="us-gaap_Assets" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_Assets" xlink:to="us-gaap_Assets_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_Assets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Assets</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_Assets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total assets</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LiabilitiesAndStockholdersEquityAbstract" xlink:label="us-gaap_LiabilitiesAndStockholdersEquityAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract" xlink:to="us-gaap_LiabilitiesAndStockholdersEquityAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LiabilitiesAndStockholdersEquityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Liabilities and Equity [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LiabilitiesAndStockholdersEquityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">LIABILITIES AND STOCKHOLDERS' EQUITY</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LiabilitiesCurrentAbstract" xlink:label="us-gaap_LiabilitiesCurrentAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LiabilitiesCurrentAbstract" xlink:to="us-gaap_LiabilitiesCurrentAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LiabilitiesCurrentAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Liabilities, Current [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LiabilitiesCurrentAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Current liabilities:</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccountsPayableCurrent" xlink:label="us-gaap_AccountsPayableCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccountsPayableCurrent" xlink:to="us-gaap_AccountsPayableCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccountsPayableCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts Payable, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccountsPayableCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts payable</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EmployeeRelatedLiabilitiesCurrent" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EmployeeRelatedLiabilitiesCurrent" xlink:to="us-gaap_EmployeeRelatedLiabilitiesCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Employee-related Liabilities, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accrued compensation</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="us-gaap_ProductWarrantyAccrualClassifiedCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:to="us-gaap_ProductWarrantyAccrualClassifiedCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProductWarrantyAccrualClassifiedCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty Accrual, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProductWarrantyAccrualClassifiedCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Warranty</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_ProductWarrantyAccrualClassifiedCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount classified as current</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccruedIncomeTaxesCurrent" xlink:label="us-gaap_AccruedIncomeTaxesCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccruedIncomeTaxesCurrent" xlink:to="us-gaap_AccruedIncomeTaxesCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccruedIncomeTaxesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accrued Income Taxes, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccruedIncomeTaxesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income taxes</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ContractWithCustomerLiabilityCurrent" xlink:label="us-gaap_ContractWithCustomerLiabilityCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ContractWithCustomerLiabilityCurrent" xlink:to="us-gaap_ContractWithCustomerLiabilityCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ContractWithCustomerLiabilityCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contract with Customer, Liability, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ContractWithCustomerLiabilityCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred revenue</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityCurrent" xlink:label="us-gaap_FinanceLeaseLiabilityCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilityCurrent" xlink:to="us-gaap_FinanceLeaseLiabilityCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseLiabilityCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Liability, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FinanceLeaseLiabilityCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance liabilities current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_FinanceLeaseLiabilityCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Current portion of finance lease obligation</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OtherLiabilitiesCurrent" xlink:label="us-gaap_OtherLiabilitiesCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherLiabilitiesCurrent" xlink:to="us-gaap_OtherLiabilitiesCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherLiabilitiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Liabilities, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OtherLiabilitiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other current liabilities</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LiabilitiesCurrent" xlink:label="us-gaap_LiabilitiesCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LiabilitiesCurrent" xlink:to="us-gaap_LiabilitiesCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LiabilitiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Liabilities, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_LiabilitiesCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total current liabilities</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityNoncurrent" xlink:label="us-gaap_FinanceLeaseLiabilityNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilityNoncurrent" xlink:to="us-gaap_FinanceLeaseLiabilityNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseLiabilityNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Liability, Noncurrent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FinanceLeaseLiabilityNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance liabilities noncurrent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_FinanceLeaseLiabilityNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-term finance lease obligation</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ContractWithCustomerLiabilityNoncurrent" xlink:label="us-gaap_ContractWithCustomerLiabilityNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ContractWithCustomerLiabilityNoncurrent" xlink:to="us-gaap_ContractWithCustomerLiabilityNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ContractWithCustomerLiabilityNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contract with Customer, Liability, Noncurrent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ContractWithCustomerLiabilityNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-term deferred revenue</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OtherLiabilitiesNoncurrent" xlink:label="us-gaap_OtherLiabilitiesNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OtherLiabilitiesNoncurrent" xlink:to="us-gaap_OtherLiabilitiesNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OtherLiabilitiesNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other Liabilities, Noncurrent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OtherLiabilitiesNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other long-term liabilities</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_Liabilities" xlink:label="us-gaap_Liabilities" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_Liabilities" xlink:to="us-gaap_Liabilities_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_Liabilities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Liabilities</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_Liabilities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total liabilities</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CommitmentsAndContingencies" xlink:label="us-gaap_CommitmentsAndContingencies" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommitmentsAndContingencies" xlink:to="us-gaap_CommitmentsAndContingencies_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommitmentsAndContingencies_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Commitments and Contingencies.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CommitmentsAndContingencies_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Commitments and contingencies (Note 16)</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockholdersEquityAbstract" xlink:label="us-gaap_StockholdersEquityAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockholdersEquityAbstract" xlink:to="us-gaap_StockholdersEquityAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockholdersEquityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stockholders' Equity Attributable to Parent [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_StockholdersEquityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stockholders? equity:</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CommonStockValueOutstanding" xlink:label="us-gaap_CommonStockValueOutstanding" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockValueOutstanding" xlink:to="us-gaap_CommonStockValueOutstanding_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommonStockValueOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common Stock, Value, Outstanding</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_CommonStockValueOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common stock, $0.001 par value, 75,000 shares authorized; 33,679 shares issued and outstanding at June 30, 2021; 33,633 shares issued and outstanding at December 31, 2020</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AdditionalPaidInCapital" xlink:label="us-gaap_AdditionalPaidInCapital" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AdditionalPaidInCapital" xlink:to="us-gaap_AdditionalPaidInCapital_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AdditionalPaidInCapital_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Additional Paid in Capital</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AdditionalPaidInCapital_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Additional paid-in capital</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RetainedEarningsAccumulatedDeficit" xlink:label="us-gaap_RetainedEarningsAccumulatedDeficit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RetainedEarningsAccumulatedDeficit" xlink:to="us-gaap_RetainedEarningsAccumulatedDeficit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RetainedEarningsAccumulatedDeficit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Retained Earnings (Accumulated Deficit)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RetainedEarningsAccumulatedDeficit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated deficit</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Other Comprehensive Income (Loss), Net of Tax</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance at June 30, 2021</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance at December 31, 2020</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated other comprehensive income</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockholdersEquity" xlink:label="us-gaap_StockholdersEquity" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockholdersEquity" xlink:to="us-gaap_StockholdersEquity_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockholdersEquity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stockholders' Equity Attributable to Parent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_StockholdersEquity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_StockholdersEquity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_StockholdersEquity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total stockholders? equity</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LiabilitiesAndStockholdersEquity" xlink:label="us-gaap_LiabilitiesAndStockholdersEquity" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LiabilitiesAndStockholdersEquity" xlink:to="us-gaap_LiabilitiesAndStockholdersEquity_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LiabilitiesAndStockholdersEquity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Liabilities and Equity</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_LiabilitiesAndStockholdersEquity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total liabilities and stockholders? equity</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CommonStockParOrStatedValuePerShare" xlink:label="us-gaap_CommonStockParOrStatedValuePerShare" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockParOrStatedValuePerShare" xlink:to="us-gaap_CommonStockParOrStatedValuePerShare_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommonStockParOrStatedValuePerShare_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common Stock, Par or Stated Value Per Share</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CommonStockParOrStatedValuePerShare_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common stock, par value (in dollars per share)</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CommonStockSharesAuthorized" xlink:label="us-gaap_CommonStockSharesAuthorized" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockSharesAuthorized" xlink:to="us-gaap_CommonStockSharesAuthorized_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommonStockSharesAuthorized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common Stock, Shares Authorized</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CommonStockSharesAuthorized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common stock, shares authorized</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CommonStockSharesIssued" xlink:label="us-gaap_CommonStockSharesIssued" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockSharesIssued" xlink:to="us-gaap_CommonStockSharesIssued_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommonStockSharesIssued_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common Stock, Shares, Issued</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CommonStockSharesIssued_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common stock, shares issued</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CommonStockSharesOutstanding" xlink:label="us-gaap_CommonStockSharesOutstanding" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockSharesOutstanding" xlink:to="us-gaap_CommonStockSharesOutstanding_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommonStockSharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common Stock, Shares, Outstanding</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CommonStockSharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common stock, shares outstanding</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StatementOfStockholdersEquityAbstract" xlink:label="us-gaap_StatementOfStockholdersEquityAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StatementOfStockholdersEquityAbstract" xlink:to="us-gaap_StatementOfStockholdersEquityAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StatementOfStockholdersEquityAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Consolidated Statements of Stockholders' Equity</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StatementEquityComponentsAxis" xlink:label="us-gaap_StatementEquityComponentsAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StatementEquityComponentsAxis" xlink:to="us-gaap_StatementEquityComponentsAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StatementEquityComponentsAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Equity Components [Axis]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EquityComponentDomain" xlink:label="us-gaap_EquityComponentDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EquityComponentDomain" xlink:to="us-gaap_EquityComponentDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EquityComponentDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Equity Component [Domain]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EquityComponentDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Equity Component [Domain]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CommonStockMember" xlink:label="us-gaap_CommonStockMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommonStockMember" xlink:to="us-gaap_CommonStockMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommonStockMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common Stock [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CommonStockMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Common Stock</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AdditionalPaidInCapitalMember" xlink:label="us-gaap_AdditionalPaidInCapitalMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AdditionalPaidInCapitalMember" xlink:to="us-gaap_AdditionalPaidInCapitalMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AdditionalPaidInCapitalMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Additional Paid In Capital [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AdditionalPaidInCapitalMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Additional Paid-in Capital</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RetainedEarningsMember" xlink:label="us-gaap_RetainedEarningsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RetainedEarningsMember" xlink:to="us-gaap_RetainedEarningsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RetainedEarningsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Retained Earnings [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RetainedEarningsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Deficit</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:label="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:to="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (Decrease) in Stockholders' Equity [Roll Forward]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (Decrease) in Stockholders' Equity</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_SharesOutstanding" xlink:label="us-gaap_SharesOutstanding" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SharesOutstanding" xlink:to="us-gaap_SharesOutstanding_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Shares, Outstanding</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_SharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance (in shares)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_SharesOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance (in shares)</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" xlink:label="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" xlink:to="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercises in Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Exercise of stock options (in shares)</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised" xlink:label="us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised" xlink:to="us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock Issued During Period, Value, Stock Options Exercised</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Exercise of stock options</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" xlink:label="us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" xlink:to="us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock Issued During Period, Shares, Employee Stock Purchase Plans</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Issuance of shares under Employee Stock Purchase Plan (in shares)</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan" xlink:label="us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan" xlink:to="us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock Issued During Period, Value, Employee Stock Purchase Plan</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Issuance of shares under Employee Stock Purchase Plan</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures" xlink:label="us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures" xlink:to="us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock Issued During Period, Shares, Restricted Stock Award, Net of Forfeitures</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Issuance of restricted common shares (in shares)</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures" xlink:label="us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures" xlink:to="us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock Issued During Period, Value, Restricted Stock Award, Net of Forfeitures</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Issuance of restricted common shares</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" xlink:to="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Adjustments to Additional Paid in Capital, Share-based Compensation, Requisite Service Period Recognition</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock-based compensation expense</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockRepurchasedDuringPeriodShares" xlink:label="us-gaap_StockRepurchasedDuringPeriodShares" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockRepurchasedDuringPeriodShares" xlink:to="us-gaap_StockRepurchasedDuringPeriodShares_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockRepurchasedDuringPeriodShares_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Treasury shares returned to authorized, Shares</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_StockRepurchasedDuringPeriodShares_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Repurchase of common stock (in shares)</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockRepurchasedDuringPeriodValue" xlink:label="us-gaap_StockRepurchasedDuringPeriodValue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockRepurchasedDuringPeriodValue" xlink:to="us-gaap_StockRepurchasedDuringPeriodValue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockRepurchasedDuringPeriodValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Treasury shares returned to authorized, Value</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_StockRepurchasedDuringPeriodValue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Repurchase of common stock</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StatementOfCashFlowsAbstract" xlink:label="us-gaap_StatementOfCashFlowsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StatementOfCashFlowsAbstract" xlink:to="us-gaap_StatementOfCashFlowsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StatementOfCashFlowsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Consolidated Statements of Cash Flows</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract" xlink:to="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net Cash Provided by (Used in) Operating Activities [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash flows from operating activities</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProfitLoss" xlink:label="us-gaap_ProfitLoss" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProfitLoss" xlink:to="us-gaap_ProfitLoss_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProfitLoss_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net Income (Loss), Including Portion Attributable to Noncontrolling Interest</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProfitLoss_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net income</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract" xlink:label="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract" xlink:to="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Adjustments to Reconcile Net Income (Loss) to Cash Provided by (Used in) Operating Activities [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Adjustments to reconcile net income to net cash provided by operating activities:</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DepreciationDepletionAndAmortization" xlink:label="us-gaap_DepreciationDepletionAndAmortization" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DepreciationDepletionAndAmortization" xlink:to="us-gaap_DepreciationDepletionAndAmortization_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DepreciationDepletionAndAmortization_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Depreciation, Depletion and Amortization</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DepreciationDepletionAndAmortization_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Depreciation and amortization</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DeferredIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredIncomeTaxExpenseBenefit" xlink:to="us-gaap_DeferredIncomeTaxExpenseBenefit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Income Tax Expense (Benefit)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred income taxes</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ShareBasedCompensation" xlink:label="us-gaap_ShareBasedCompensation" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensation" xlink:to="us-gaap_ShareBasedCompensation_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock-based compensation expense</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InventoryWriteDown" xlink:label="us-gaap_InventoryWriteDown" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryWriteDown" xlink:to="us-gaap_InventoryWriteDown_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InventoryWriteDown_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventory Write-down</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InventoryWriteDown_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Provision for excess and obsolete inventory</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncreaseDecreaseInOperatingCapitalAbstract" xlink:label="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract" xlink:to="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (Decrease) in Operating Capital [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Changes in operating assets and liabilities:</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncreaseDecreaseInAccountsReceivable" xlink:label="us-gaap_IncreaseDecreaseInAccountsReceivable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInAccountsReceivable" xlink:to="us-gaap_IncreaseDecreaseInAccountsReceivable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInAccountsReceivable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (Decrease) in Accounts Receivable</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_IncreaseDecreaseInAccountsReceivable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts receivable</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncreaseDecreaseInInventories" xlink:label="us-gaap_IncreaseDecreaseInInventories" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInInventories" xlink:to="us-gaap_IncreaseDecreaseInInventories_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInInventories_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (Decrease) in Inventories</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_IncreaseDecreaseInInventories_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventories</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" xlink:label="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" xlink:to="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (Decrease) in Prepaid Expense and Other Assets</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Prepaid expenses and other current assets</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities" xlink:label="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities" xlink:to="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (Decrease) in Accounts Payable and Accrued Liabilities</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts payable and other current liabilities</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncreaseDecreaseInContractWithCustomerLiability" xlink:label="us-gaap_IncreaseDecreaseInContractWithCustomerLiability" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInContractWithCustomerLiability" xlink:to="us-gaap_IncreaseDecreaseInContractWithCustomerLiability_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInContractWithCustomerLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase Decrease In Contract With Customer Liability</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncreaseDecreaseInContractWithCustomerLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred revenue</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable" xlink:label="us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable" xlink:to="us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (Decrease) in Income Taxes Payable</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income taxes</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet" xlink:to="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase (Decrease) in Other Operating Assets and Liabilities, Net</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Other assets and liabilities</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivities" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:to="us-gaap_NetCashProvidedByUsedInOperatingActivities_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net Cash Provided by (Used in) Operating Activities</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net cash provided by operating activities</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract" xlink:to="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net Cash Provided by (Used in) Investing Activities [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash flows from investing activities</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:label="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:to="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Payments to Acquire Property, Plant, and Equipment</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Expenditures for property, plant and equipment and capitalized software</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivities" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:to="us-gaap_NetCashProvidedByUsedInInvestingActivities_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net Cash Provided by (Used in) Investing Activities</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net cash used in investing activities</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract" xlink:to="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net Cash Provided by (Used in) Financing Activities [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash flows from financing activities</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_RepaymentOfNetSettlementOnRestrictedStockGrants" xlink:label="acls_RepaymentOfNetSettlementOnRestrictedStockGrants" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_RepaymentOfNetSettlementOnRestrictedStockGrants" xlink:to="acls_RepaymentOfNetSettlementOnRestrictedStockGrants_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_RepaymentOfNetSettlementOnRestrictedStockGrants_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The net cash out flow on net settlement of restricted stock grants.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_RepaymentOfNetSettlementOnRestrictedStockGrants_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Repayment of Net Settlement on Restricted Stock Grants</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="acls_RepaymentOfNetSettlementOnRestrictedStockGrants_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net settlement on restricted stock grants</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_PaymentsForRepurchaseOfCommonStock" xlink:label="us-gaap_PaymentsForRepurchaseOfCommonStock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PaymentsForRepurchaseOfCommonStock" xlink:to="us-gaap_PaymentsForRepurchaseOfCommonStock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PaymentsForRepurchaseOfCommonStock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Payments for Repurchase of Common Stock</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_PaymentsForRepurchaseOfCommonStock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Repurchase of common stock</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProceedsFromStockPlans" xlink:label="us-gaap_ProceedsFromStockPlans" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProceedsFromStockPlans" xlink:to="us-gaap_ProceedsFromStockPlans_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProceedsFromStockPlans_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds from Stock Plans</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProceedsFromStockPlans_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds from Employee Stock Purchase Plan</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeasePrincipalPayments" xlink:label="us-gaap_FinanceLeasePrincipalPayments" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeasePrincipalPayments" xlink:to="us-gaap_FinanceLeasePrincipalPayments_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeasePrincipalPayments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Principal Payments</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_FinanceLeasePrincipalPayments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Principal payments on finance lease obligation</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FinanceLeasePrincipalPayments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Financing cash outflows from finance leases</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProceedsFromStockOptionsExercised" xlink:label="us-gaap_ProceedsFromStockOptionsExercised" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProceedsFromStockOptionsExercised" xlink:to="us-gaap_ProceedsFromStockOptionsExercised_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProceedsFromStockOptionsExercised_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds from Stock Options Exercised</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProceedsFromStockOptionsExercised_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds from exercise of stock options</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_ProceedsFromStockOptionsExercised_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds from exercise of stock options</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivities" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:to="us-gaap_NetCashProvidedByUsedInFinancingActivities_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net Cash Provided by (Used in) Financing Activities</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivities_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net cash used in financing activities</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:label="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:to="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effect of Exchange Rate on Cash, Cash Equivalents, Restricted Cash and Restricted Cash Equivalents</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effect of exchange rate changes on cash and cash equivalents</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash, Cash Equivalents, Restricted Cash and Restricted Cash Equivalents, Period Increase (Decrease), Including Exchange Rate Effect</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net increase in cash, cash equivalents and restricted cash</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash, Cash Equivalents, Restricted Cash and Restricted Cash Equivalents</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash, cash equivalents and restricted cash at end of period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash, cash equivalents and restricted cash at beginning of period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total cash, cash equivalents and restricted cash</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Nature of Business</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock" xlink:to="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Organization, Consolidation and Presentation of Financial Statements Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Nature of Business</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock Based Compensation</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock" xlink:to="us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Disclosure of Compensation Related Costs, Share-based Payments [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock Based Compensation</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LeasesAbstract" xlink:label="us-gaap_LeasesAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_LeasesAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LeasesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Leases</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LeaseDisclosureTextBlock" xlink:label="acls_LeaseDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_LeaseDisclosureTextBlock" xlink:to="acls_LeaseDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_LeaseDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The entire disclosure of information about leases.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_LeaseDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lease Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_LeaseDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Leases</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RevenueFromContractWithCustomerAbstract" xlink:label="us-gaap_RevenueFromContractWithCustomerAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenueFromContractWithCustomerAbstract" xlink:to="us-gaap_RevenueFromContractWithCustomerAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RevenueFromContractWithCustomerAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue.</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RevenueFromContractWithCustomerTextBlock" xlink:label="us-gaap_RevenueFromContractWithCustomerTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenueFromContractWithCustomerTextBlock" xlink:to="us-gaap_RevenueFromContractWithCustomerTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RevenueFromContractWithCustomerTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue from Contract with Customer [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RevenueFromContractWithCustomerTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccountsReceivableNetAbstract" xlink:label="us-gaap_AccountsReceivableNetAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccountsReceivableNetAbstract" xlink:to="us-gaap_AccountsReceivableNetAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccountsReceivableNetAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Receivable and Allowance for Credit Losses</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock" xlink:label="us-gaap_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock" xlink:to="us-gaap_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Loans, Notes, Trade and Other Receivables Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Receivable and Allowance for Credit Losses</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EarningsPerShareTextBlock" xlink:label="us-gaap_EarningsPerShareTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EarningsPerShareTextBlock" xlink:to="us-gaap_EarningsPerShareTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EarningsPerShareTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Earnings Per Share [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EarningsPerShareTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Computation of Net Earnings per Share</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTaxAbstract" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTaxAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTaxAbstract" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTaxAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTaxAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Other Comprehensive Income</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ComprehensiveIncomeNoteTextBlock" xlink:label="us-gaap_ComprehensiveIncomeNoteTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ComprehensiveIncomeNoteTextBlock" xlink:to="us-gaap_ComprehensiveIncomeNoteTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ComprehensiveIncomeNoteTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Comprehensive Income (Loss) Note [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_ComprehensiveIncomeNoteTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Other Comprehensive Income</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_CashCashEquivalentsAndRestrictedCashAbstract" xlink:label="acls_CashCashEquivalentsAndRestrictedCashAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_CashCashEquivalentsAndRestrictedCashAbstract" xlink:to="acls_CashCashEquivalentsAndRestrictedCashAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_CashCashEquivalentsAndRestrictedCashAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">N/A</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_CashCashEquivalentsAndRestrictedCashAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash, cash equivalents and restricted cash</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_CashCashEquivalentsAndRestrictedCashTextBlock" xlink:label="acls_CashCashEquivalentsAndRestrictedCashTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_CashCashEquivalentsAndRestrictedCashTextBlock" xlink:to="acls_CashCashEquivalentsAndRestrictedCashTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_CashCashEquivalentsAndRestrictedCashTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The entire disclosure of cash, cash equivalents and restricted cash.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_CashCashEquivalentsAndRestrictedCashTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash Cash Equivalents And Restricted Cash [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_CashCashEquivalentsAndRestrictedCashTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash, cash equivalents and restricted cash</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InventoryDisclosureAbstract" xlink:label="us-gaap_InventoryDisclosureAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryDisclosureAbstract" xlink:to="us-gaap_InventoryDisclosureAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InventoryDisclosureAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventories, net</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InventoryDisclosureTextBlock" xlink:label="us-gaap_InventoryDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryDisclosureTextBlock" xlink:to="us-gaap_InventoryDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InventoryDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventory Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InventoryDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventories, net</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProductWarrantiesDisclosuresAbstract" xlink:label="us-gaap_ProductWarrantiesDisclosuresAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantiesDisclosuresAbstract" xlink:to="us-gaap_ProductWarrantiesDisclosuresAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProductWarrantiesDisclosuresAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProductWarrantyDisclosureTextBlock" xlink:label="us-gaap_ProductWarrantyDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyDisclosureTextBlock" xlink:to="us-gaap_ProductWarrantyDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProductWarrantyDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProductWarrantyDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueDisclosuresAbstract" xlink:label="us-gaap_FairValueDisclosuresAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueDisclosuresAbstract" xlink:to="us-gaap_FairValueDisclosuresAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueDisclosuresAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value Measurements</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueDisclosuresTextBlock" xlink:label="us-gaap_FairValueDisclosuresTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueDisclosuresTextBlock" xlink:to="us-gaap_FairValueDisclosuresTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueDisclosuresTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value Disclosures [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FairValueDisclosuresTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value Measurements</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="us-gaap_DebtDisclosureAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtDisclosureAbstract" xlink:to="us-gaap_DebtDisclosureAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtDisclosureAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Financing Arrangements</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DebtDisclosureTextBlock" xlink:label="us-gaap_DebtDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtDisclosureTextBlock" xlink:to="us-gaap_DebtDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DebtDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Financing Arrangements</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="us-gaap_IncomeTaxDisclosureAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="us-gaap_IncomeTaxDisclosureAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxDisclosureAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Taxes</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncomeTaxDisclosureTextBlock" xlink:label="us-gaap_IncomeTaxDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeTaxDisclosureTextBlock" xlink:to="us-gaap_IncomeTaxDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeTaxDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Tax Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncomeTaxDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Taxes</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RisksAndUncertaintiesAbstract" xlink:label="us-gaap_RisksAndUncertaintiesAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RisksAndUncertaintiesAbstract" xlink:to="us-gaap_RisksAndUncertaintiesAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RisksAndUncertaintiesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration of Risk</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ConcentrationRiskDisclosureTextBlock" xlink:label="us-gaap_ConcentrationRiskDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskDisclosureTextBlock" xlink:to="us-gaap_ConcentrationRiskDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConcentrationRiskDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ConcentrationRiskDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration of Risk</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockholdersEquityNoteAbstract" xlink:label="us-gaap_StockholdersEquityNoteAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockholdersEquityNoteAbstract" xlink:to="us-gaap_StockholdersEquityNoteAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockholdersEquityNoteAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share Repurchase</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockholdersEquityNoteDisclosureTextBlock" xlink:label="us-gaap_StockholdersEquityNoteDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockholdersEquityNoteDisclosureTextBlock" xlink:to="us-gaap_StockholdersEquityNoteDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockholdersEquityNoteDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stockholders' Equity Note Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_StockholdersEquityNoteDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share Repurchase</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:to="us-gaap_CommitmentsAndContingenciesDisclosureAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contingencies</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CommitmentsAndContingenciesDisclosureTextBlock" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CommitmentsAndContingenciesDisclosureTextBlock" xlink:to="us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Commitments and Contingencies Disclosure [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contingencies</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccountingPoliciesAbstract" xlink:label="us-gaap_AccountingPoliciesAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccountingPoliciesAbstract" xlink:to="us-gaap_AccountingPoliciesAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccountingPoliciesAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Recent Accounting Guidance</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock" xlink:label="us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock" xlink:to="us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">New Accounting Pronouncements and Changes in Accounting Principles [Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Recent Accounting Guidance</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LeaseBalanceSheetDisclosureTableTextBlock" xlink:label="acls_LeaseBalanceSheetDisclosureTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_LeaseBalanceSheetDisclosureTableTextBlock" xlink:to="acls_LeaseBalanceSheetDisclosureTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_LeaseBalanceSheetDisclosureTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The tabular disclosure of lease balance sheet.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_LeaseBalanceSheetDisclosureTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lease Balance Sheet Disclosure [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_LeaseBalanceSheetDisclosureTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of operating and finance lease right-of-use assets and related lease obligations</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LeaseCostTableTextBlock" xlink:label="us-gaap_LeaseCostTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LeaseCostTableTextBlock" xlink:to="us-gaap_LeaseCostTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LeaseCostTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lease, Cost [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LeaseCostTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of lease costs</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock" xlink:label="acls_OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock" xlink:to="acls_OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Tabular disclosure of undiscounted cash flows of lessee's operating lease liability and finance lease liability.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating And Finance Lease Liability Maturity [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of future minimum operating and finance leases</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LeaseQuantitativeDisclosureTableTextBlock" xlink:label="acls_LeaseQuantitativeDisclosureTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_LeaseQuantitativeDisclosureTableTextBlock" xlink:to="acls_LeaseQuantitativeDisclosureTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_LeaseQuantitativeDisclosureTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The tabular disclosure of lease quantitative information.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_LeaseQuantitativeDisclosureTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lease Quantitative Disclosure [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_LeaseQuantitativeDisclosureTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of weighted-average remaining lease term and discount rates</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LeaseCashFlowInformationDisclosureTableTextBlock" xlink:label="acls_LeaseCashFlowInformationDisclosureTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_LeaseCashFlowInformationDisclosureTableTextBlock" xlink:to="acls_LeaseCashFlowInformationDisclosureTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_LeaseCashFlowInformationDisclosureTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The tabular disclosure of lease cash flow information.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_LeaseCashFlowInformationDisclosureTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lease Cash Flow Information Disclosure [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_LeaseCashFlowInformationDisclosureTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of cash outflows by lease type</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_RevenueFromExternalCustomersByDisciplineAreasTableTextBlock" xlink:label="acls_RevenueFromExternalCustomersByDisciplineAreasTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_RevenueFromExternalCustomersByDisciplineAreasTableTextBlock" xlink:to="acls_RevenueFromExternalCustomersByDisciplineAreasTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_RevenueFromExternalCustomersByDisciplineAreasTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Tabular disclosure of revenue from external customers by discipline areas attributed to the entity's country of domicile and to foreign countries from which the entity derives revenue.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_RevenueFromExternalCustomersByDisciplineAreasTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue From External Customers By Discipline Areas Table Text Block</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_RevenueFromExternalCustomersByDisciplineAreasTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of revenue by discipline</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RevenueFromExternalCustomersByGeographicAreasTableTextBlock" xlink:label="us-gaap_RevenueFromExternalCustomersByGeographicAreasTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenueFromExternalCustomersByGeographicAreasTableTextBlock" xlink:to="us-gaap_RevenueFromExternalCustomersByGeographicAreasTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RevenueFromExternalCustomersByGeographicAreasTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue from External Customers by Geographic Areas [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RevenueFromExternalCustomersByGeographicAreasTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of revenue by geographic markets</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock" xlink:label="us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock" xlink:to="us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contract with Customer, Asset and Liability [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Contract liabilities</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccountsReceivableAllowanceForCreditLossTableTextBlock" xlink:label="us-gaap_AccountsReceivableAllowanceForCreditLossTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccountsReceivableAllowanceForCreditLossTableTextBlock" xlink:to="us-gaap_AccountsReceivableAllowanceForCreditLossTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccountsReceivableAllowanceForCreditLossTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts Receivable, Allowance for Credit Loss [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccountsReceivableAllowanceForCreditLossTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of allowances for credit losses related to trade receivables</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" xlink:label="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" xlink:to="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Earnings Per Share, Basic and Diluted [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of components of net income per share</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock" xlink:label="us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock" xlink:to="us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Accumulated Other Comprehensive Income (Loss) [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of changes in accumulated other comprehensive loss, net of tax</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_CashCashEquivalentsAndRestrictedCashTableTextBlock" xlink:label="acls_CashCashEquivalentsAndRestrictedCashTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_CashCashEquivalentsAndRestrictedCashTableTextBlock" xlink:to="acls_CashCashEquivalentsAndRestrictedCashTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_CashCashEquivalentsAndRestrictedCashTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Tabular disclosure for cash, cash equivalents and restricted cash.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_CashCashEquivalentsAndRestrictedCashTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash Cash Equivalents And Restricted Cash [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_CashCashEquivalentsAndRestrictedCashTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of reconciliation of cash, cash equivalents and restricted cash</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ScheduleOfInventoryCurrentTableTextBlock" xlink:label="us-gaap_ScheduleOfInventoryCurrentTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfInventoryCurrentTableTextBlock" xlink:to="us-gaap_ScheduleOfInventoryCurrentTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfInventoryCurrentTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Inventory, Current [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfInventoryCurrentTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of components of inventories</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock" xlink:label="us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock" xlink:to="us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Product Warranty Liability [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of product warranty liability</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock" xlink:label="us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock" xlink:to="us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Fair Value, Assets and Liabilities Measured on Recurring Basis [Table Text Block]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Company's assets and liabilities by level within the fair value hierarchy</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:to="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Share-based Compensation Arrangements by Share-based Payment Award [Table]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_PlanNameAxis" xlink:label="us-gaap_PlanNameAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PlanNameAxis" xlink:to="us-gaap_PlanNameAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PlanNameAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Plan Name [Axis]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_PlanNameDomain" xlink:label="us-gaap_PlanNameDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PlanNameDomain" xlink:to="us-gaap_PlanNameDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PlanNameDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Plan Name [Domain]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PlanNameDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Plan Name [Domain]</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_StockPlan2000Member" xlink:label="acls_StockPlan2000Member" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_StockPlan2000Member" xlink:to="acls_StockPlan2000Member_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_StockPlan2000Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents information pertaining to the 2000 Stock Plan of the entity.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_StockPlan2000Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock Plan2000 [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_StockPlan2000Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2000 Stock Plan</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock-Based Compensation</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardGrantsInPeriodGross" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardGrantsInPeriodGross" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardGrantsInPeriodGross" xlink:to="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardGrantsInPeriodGross_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardGrantsInPeriodGross_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the number of awards granted in an equity based compensation plan.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardGrantsInPeriodGross_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share Based Compensation Arrangement by Share Based Payment Award Grants in Period Gross</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardGrantsInPeriodGross_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Awards granted (in shares)</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share-based Compensation Arrangement by Share-based Payment Award, Expiration Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Options Expiration period</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AllocatedShareBasedCompensationExpense" xlink:label="us-gaap_AllocatedShareBasedCompensationExpense" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AllocatedShareBasedCompensationExpense" xlink:to="us-gaap_AllocatedShareBasedCompensationExpense_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AllocatedShareBasedCompensationExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Allocated Share-based Compensation Expense</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AllocatedShareBasedCompensationExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock-based compensation expense</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeLeaseDescriptionTable" xlink:label="us-gaap_LesseeLeaseDescriptionTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeLeaseDescriptionTable" xlink:to="us-gaap_LesseeLeaseDescriptionTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeLeaseDescriptionTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Lease, Description [Table]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeLeaseDescriptionLineItems" xlink:label="us-gaap_LesseeLeaseDescriptionLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems" xlink:to="us-gaap_LesseeLeaseDescriptionLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeLeaseDescriptionLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Lease, Description [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeLeaseDescriptionLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lease</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseRenewalTerm" xlink:label="us-gaap_LesseeOperatingLeaseRenewalTerm" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseRenewalTerm" xlink:to="us-gaap_LesseeOperatingLeaseRenewalTerm_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseRenewalTerm_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Renewal Term</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeOperatingLeaseRenewalTerm_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Renewal term</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend" xlink:label="us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend" xlink:to="us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Existence of Option to Extend [true false]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Option to extend</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList" xlink:label="us-gaap_OperatingLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList" xlink:to="us-gaap_OperatingLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Right-of-Use Asset, Statement of Financial Position [Extensible List]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList" xlink:label="us-gaap_FinanceLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList" xlink:to="us-gaap_FinanceLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Right-of-Use Asset, Statement of Financial Position [Extensible List]</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_OperatingAndFinanceLeaseRightOfUseAsset" xlink:label="acls_OperatingAndFinanceLeaseRightOfUseAsset" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_OperatingAndFinanceLeaseRightOfUseAsset" xlink:to="acls_OperatingAndFinanceLeaseRightOfUseAsset_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_OperatingAndFinanceLeaseRightOfUseAsset_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of lessee's right to use underlying asset under operating and finance lease.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_OperatingAndFinanceLeaseRightOfUseAsset_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating And Finance Lease, Right-of-Use Asset</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="acls_OperatingAndFinanceLeaseRightOfUseAsset_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total leased assets</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseLiabilityCurrent" xlink:label="us-gaap_OperatingLeaseLiabilityCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseLiabilityCurrent" xlink:to="us-gaap_OperatingLeaseLiabilityCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseLiabilityCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Liability, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLeaseLiabilityCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating liabilities current</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList" xlink:label="us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList" xlink:to="us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Liability, Current, Statement of Financial Position [Extensible List]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList" xlink:label="us-gaap_FinanceLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList" xlink:to="us-gaap_FinanceLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Liability, Current, Statement of Financial Position [Extensible List]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseLiabilityNoncurrent" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseLiabilityNoncurrent" xlink:to="us-gaap_OperatingLeaseLiabilityNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Liability, Noncurrent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating liabilities noncurrent</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList" xlink:to="us-gaap_OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Liability, Noncurrent, Statement of Financial Position [Extensible List]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList" xlink:label="us-gaap_FinanceLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList" xlink:to="us-gaap_FinanceLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Liability, Noncurrent, Statement of Financial Position [Extensible List]</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_OperatingAndFinanceLeaseLiability" xlink:label="acls_OperatingAndFinanceLeaseLiability" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_OperatingAndFinanceLeaseLiability" xlink:to="acls_OperatingAndFinanceLeaseLiability_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_OperatingAndFinanceLeaseLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Present value of lessee's discounted obligation for lease payments from operating and finance lease.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_OperatingAndFinanceLeaseLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating and Finance Lease, Liability</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="acls_OperatingAndFinanceLeaseLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total lease liabilities</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="acls_OperatingAndFinanceLeaseLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total lease liabilities</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList" xlink:label="us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList" xlink:to="us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Liability, Statement of Financial Position [Extensible List]</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_FinanceLeaseAccumulatedDepreciation" xlink:label="acls_FinanceLeaseAccumulatedDepreciation" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_FinanceLeaseAccumulatedDepreciation" xlink:to="acls_FinanceLeaseAccumulatedDepreciation_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_FinanceLeaseAccumulatedDepreciation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The cumulative amount of depreciation of finance leased assets.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_FinanceLeaseAccumulatedDepreciation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Accumulated Depreciation</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_FinanceLeaseAccumulatedDepreciation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance lease, accumulated depreciation</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_PrepaidRent" xlink:label="us-gaap_PrepaidRent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PrepaidRent" xlink:to="us-gaap_PrepaidRent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PrepaidRent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Prepaid Rent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_PrepaidRent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Prepaid financing costs</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LeaseCostAbstract" xlink:label="us-gaap_LeaseCostAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LeaseCostAbstract" xlink:to="us-gaap_LeaseCostAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LeaseCostAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lease, Cost [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LeaseCostAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lease cost</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseCost" xlink:label="us-gaap_OperatingLeaseCost" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseCost" xlink:to="us-gaap_OperatingLeaseCost_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Cost</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLeaseCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total operating lease cost</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseRightOfUseAssetAmortization" xlink:label="us-gaap_FinanceLeaseRightOfUseAssetAmortization" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseRightOfUseAssetAmortization" xlink:to="us-gaap_FinanceLeaseRightOfUseAssetAmortization_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseRightOfUseAssetAmortization_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Right-of-Use Asset, Amortization</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FinanceLeaseRightOfUseAssetAmortization_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Depreciation of leased assets</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseInterestExpense" xlink:label="us-gaap_FinanceLeaseInterestExpense" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseInterestExpense" xlink:to="us-gaap_FinanceLeaseInterestExpense_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseInterestExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Interest Expense</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FinanceLeaseInterestExpense_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Interest on lease liabilities</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_FinanceLeaseCost" xlink:label="acls_FinanceLeaseCost" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_FinanceLeaseCost" xlink:to="acls_FinanceLeaseCost_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_FinanceLeaseCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of finance lease cost recognized by lessee for lease contract.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_FinanceLeaseCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease Cost</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="acls_FinanceLeaseCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total finance lease cost</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LeaseCost" xlink:label="us-gaap_LeaseCost" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LeaseCost" xlink:to="us-gaap_LeaseCost_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LeaseCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lease, Cost</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_LeaseCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total lease cost</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_ShortTermAndVariableLeaseCost" xlink:label="acls_ShortTermAndVariableLeaseCost" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_ShortTermAndVariableLeaseCost" xlink:to="acls_ShortTermAndVariableLeaseCost_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_ShortTermAndVariableLeaseCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of short-term and variable lease cost.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_ShortTermAndVariableLeaseCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Short-term And Variable Lease, Cost</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_ShortTermAndVariableLeaseCost_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Short-term lease and variable lease costs</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:label="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease Liabilities, Payments, Due [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Future minimum lease payments finance lease</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityPaymentsRemainderOfFiscalYear" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsRemainderOfFiscalYear" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsRemainderOfFiscalYear" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsRemainderOfFiscalYear_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsRemainderOfFiscalYear_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Liability, Payments, Remainder of Fiscal Year</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsRemainderOfFiscalYear_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2021</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Liability, Payments, Due Next Twelve Months</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2022</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Liability, Payments, Due Year Two</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2023</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Liability, Payments, Due Year Three</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2024</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Liability, Payments, Due Year Four</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2025</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_FinanceLeaseLiabilityPaymentsDueAfterYearFour" xlink:label="acls_FinanceLeaseLiabilityPaymentsDueAfterYearFour" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_FinanceLeaseLiabilityPaymentsDueAfterYearFour" xlink:to="acls_FinanceLeaseLiabilityPaymentsDueAfterYearFour_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_FinanceLeaseLiabilityPaymentsDueAfterYearFour_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid after fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_FinanceLeaseLiabilityPaymentsDueAfterYearFour_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease Liability Payments Due After Year Four</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="acls_FinanceLeaseLiabilityPaymentsDueAfterYearFour_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Thereafter</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Liability, Payments, Due</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total lease payments</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount" xlink:label="us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount" xlink:to="us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Liability, Undiscounted Excess Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Less interest portion</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiability" xlink:label="us-gaap_FinanceLeaseLiability" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseLiability" xlink:to="us-gaap_FinanceLeaseLiability_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Liability</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FinanceLeaseLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance lease obligations</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:label="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease Liabilities, Payments Due [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Future minimum lease payments operating lease</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsRemainderOfFiscalYear" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsRemainderOfFiscalYear" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsRemainderOfFiscalYear" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsRemainderOfFiscalYear_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsRemainderOfFiscalYear_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Payments, Remainder of Fiscal Year</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsRemainderOfFiscalYear_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2021</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Payments, Due Next Twelve Months</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2022</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Payments, Due Year Two</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2023</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Payments, Due Year Three</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2024</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Payments, Due Year Four</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2025</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour" xlink:label="acls_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour" xlink:to="acls_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of lessee's undiscounted obligation for lease payment for operating lease due after fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee Operating Lease Liability Payments Due After Year Four</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Thereafter</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Payments, Due</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total lease payments</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Operating Lease, Liability, Undiscounted Excess Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Less interest portion</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseLiability" xlink:label="us-gaap_OperatingLeaseLiability" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseLiability" xlink:to="us-gaap_OperatingLeaseLiability_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Liability</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_OperatingLeaseLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating lease obligations</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:label="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:to="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">n/a.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance And Operating Lease Liabilities Payments Due [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Future minimum lease payments finance and operating lease</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsRemainderOfFiscalYear" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsRemainderOfFiscalYear" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsRemainderOfFiscalYear" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsRemainderOfFiscalYear_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsRemainderOfFiscalYear_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of lessee's undiscounted obligation for lease payments for finance and operating lease having an initial or remaining lease term in excess of one year due in remainder of fiscal year following latest fiscal year.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsRemainderOfFiscalYear_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee Operating And Finance Lease Liability Payments Remainder Of Fiscal Year</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsRemainderOfFiscalYear_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2021</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of lessee operating and finance lease liability payments due next twelve months.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee Operating And Finance Lease Liability Payments Due Next Twelve Months</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2022</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in second fiscal year following latest fiscal year.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee Operating And Finance Lease Liability Payments Due Year Two</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2023</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in third fiscal year following latest fiscal year.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee Operating And Finance Lease Liability Payments Due Year Three</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2024</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in fourth fiscal year following latest fiscal year.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee Operating And Finance Lease Liability Payments Due Year Four</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2025</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFour" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFour" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFour" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFour_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFour_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due after fourth fiscal year following latest fiscal year.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFour_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee Operating And Finance Lease Liability Payments Due After Year Four</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFour_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Thereafter</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of lessee's undiscounted obligation for lease payments for finance and operating lease.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee Operating And Finance Lease Liability Payments Due</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total lease payments</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of lessee's undiscounted obligation for lease payments in excess of discounted obligation for lease payments for finance and operating lease.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee Operating And Finance Lease Liability Undiscounted Excess Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Less interest portion</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" xlink:label="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" xlink:to="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">n/a.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Weighted Average Remaining Lease Term And Discount Rate [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lease term and discount rate</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1" xlink:label="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1" xlink:to="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Weighted Average Remaining Lease Term</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating leases -Weighted-average remaining lease term (in years)</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1" xlink:label="us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1" xlink:to="us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Weighted Average Remaining Lease Term</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance leases - Weighted-average remaining lease term (in years)</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent" xlink:label="us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent" xlink:to="us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Weighted Average Discount Rate, Percent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating leases - Weighted-average discount rate</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent" xlink:label="us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent" xlink:to="us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Weighted Average Discount Rate, Percent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance leases - Weighted-average discount rate</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseTermOfContract" xlink:label="us-gaap_LesseeOperatingLeaseTermOfContract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeOperatingLeaseTermOfContract" xlink:to="us-gaap_LesseeOperatingLeaseTermOfContract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeOperatingLeaseTermOfContract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee Operating Lease Term Of Contract</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeOperatingLeaseTermOfContract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lease term</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_LesseeOperatingLeaseTermOfContract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating lease term</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeFinanceLeaseTermOfContract1" xlink:label="us-gaap_LesseeFinanceLeaseTermOfContract1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LesseeFinanceLeaseTermOfContract1" xlink:to="us-gaap_LesseeFinanceLeaseTermOfContract1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LesseeFinanceLeaseTermOfContract1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Lessee, Finance Lease, Term of Contract</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LesseeFinanceLeaseTermOfContract1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance lease term</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeasePayments" xlink:label="us-gaap_OperatingLeasePayments" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_OperatingLeasePayments" xlink:to="us-gaap_OperatingLeasePayments_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_OperatingLeasePayments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating Lease, Payments</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_OperatingLeasePayments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating cash outflows from operating leases</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseInterestPaymentOnLiability" xlink:label="us-gaap_FinanceLeaseInterestPaymentOnLiability" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FinanceLeaseInterestPaymentOnLiability" xlink:to="us-gaap_FinanceLeaseInterestPaymentOnLiability_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FinanceLeaseInterestPaymentOnLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finance Lease, Interest Payment on Liability</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FinanceLeaseInterestPaymentOnLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating cash outflows from finance leases</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability" xlink:label="us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability" xlink:to="us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Right-of-Use Asset Obtained in Exchange for Operating Lease Liability</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Operating lease assets obtained in exchange for operating lease liabilities</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DisaggregationOfRevenueTable" xlink:label="us-gaap_DisaggregationOfRevenueTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DisaggregationOfRevenueTable" xlink:to="us-gaap_DisaggregationOfRevenueTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DisaggregationOfRevenueTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Disaggregation of Revenue [Table]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DisaggregationOfRevenueLineItems" xlink:label="us-gaap_DisaggregationOfRevenueLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DisaggregationOfRevenueLineItems" xlink:to="us-gaap_DisaggregationOfRevenueLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DisaggregationOfRevenueLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Disaggregation of Revenue [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DisaggregationOfRevenueLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Disaggregation of Revenue</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_PercentageOfPaymentUponShipmentOfTool" xlink:label="acls_PercentageOfPaymentUponShipmentOfTool" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_PercentageOfPaymentUponShipmentOfTool" xlink:to="acls_PercentageOfPaymentUponShipmentOfTool_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_PercentageOfPaymentUponShipmentOfTool_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the percentage of payment terms due upon shipment of tool.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_PercentageOfPaymentUponShipmentOfTool_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Percentage of Payment Upon Shipment of Tool</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_PercentageOfPaymentUponShipmentOfTool_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Payment upon shipment of tool, as a percent</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_PercentageOfPaymentUponInstallation" xlink:label="acls_PercentageOfPaymentUponInstallation" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_PercentageOfPaymentUponInstallation" xlink:to="acls_PercentageOfPaymentUponInstallation_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_PercentageOfPaymentUponInstallation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the percentage of payment terms due upon installation.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_PercentageOfPaymentUponInstallation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Percentage of Payment Upon Installation</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_PercentageOfPaymentUponInstallation_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Payment upon installation, as a percent</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_PeriodOfPaymentUponDeliveryOfParts" xlink:label="acls_PeriodOfPaymentUponDeliveryOfParts" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_PeriodOfPaymentUponDeliveryOfParts" xlink:to="acls_PeriodOfPaymentUponDeliveryOfParts_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_PeriodOfPaymentUponDeliveryOfParts_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the period for payment upon delivery of parts.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_PeriodOfPaymentUponDeliveryOfParts_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Period of Payment Upon Delivery of Parts</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_PeriodOfPaymentUponDeliveryOfParts_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Payment upon delivery of parts, period</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ContractWithCustomerLiability" xlink:label="us-gaap_ContractWithCustomerLiability" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ContractWithCustomerLiability" xlink:to="us-gaap_ContractWithCustomerLiability_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ContractWithCustomerLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contract with Customer, Liability</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_ContractWithCustomerLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance, end of the period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_ContractWithCustomerLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance, beginning of the period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ContractWithCustomerLiability_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contract liabilities</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" xlink:label="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" xlink:to="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue from Contract with Customer, Excluding Assessed Tax</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total Revenue</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_ContractWithCustomerLiabilityDeferralOfRevenue" xlink:label="acls_ContractWithCustomerLiabilityDeferralOfRevenue" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_ContractWithCustomerLiabilityDeferralOfRevenue" xlink:to="acls_ContractWithCustomerLiabilityDeferralOfRevenue_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_ContractWithCustomerLiabilityDeferralOfRevenue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The amount of deferral of revenue in obligation to transfer good or service to customer for which consideration from customer has been received or is due.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_ContractWithCustomerLiabilityDeferralOfRevenue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contract with Customer, Liability, Deferral Of Revenue</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_ContractWithCustomerLiabilityDeferralOfRevenue_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferral of revenue</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ContractWithCustomerLiabilityRevenueRecognized" xlink:label="us-gaap_ContractWithCustomerLiabilityRevenueRecognized" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ContractWithCustomerLiabilityRevenueRecognized" xlink:to="us-gaap_ContractWithCustomerLiabilityRevenueRecognized_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ContractWithCustomerLiabilityRevenueRecognized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contract with Customer, Liability, Revenue Recognized</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ContractWithCustomerLiabilityRevenueRecognized_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Recognition of deferred revenue</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent" xlink:to="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Allowance for Doubtful Accounts Receivable, Current</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance, end of period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance, beginning of period</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AllowanceForDoubtfulAccountsReceivableWriteOffs" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableWriteOffs" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AllowanceForDoubtfulAccountsReceivableWriteOffs" xlink:to="us-gaap_AllowanceForDoubtfulAccountsReceivableWriteOffs_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableWriteOffs_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts Receivable, Allowance for Credit Loss, Writeoff</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableWriteOffs_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Charge-offs</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EarningsPerShareBasicAndDilutedOtherDisclosuresAbstract" xlink:label="us-gaap_EarningsPerShareBasicAndDilutedOtherDisclosuresAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EarningsPerShareBasicAndDilutedOtherDisclosuresAbstract" xlink:to="us-gaap_EarningsPerShareBasicAndDilutedOtherDisclosuresAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EarningsPerShareBasicAndDilutedOtherDisclosuresAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Earnings Per Share, Basic and Diluted, Other Disclosures [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EarningsPerShareBasicAndDilutedOtherDisclosuresAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Computation of Net Earnings per Share</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements" xlink:label="us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements" xlink:to="us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Incremental Common Shares Attributable to Dilutive Effect of Share-based Payment Arrangements</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Incremental options and RSUs</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EarningsPerShareBasicAndDilutedAbstract" xlink:label="us-gaap_EarningsPerShareBasicAndDilutedAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EarningsPerShareBasicAndDilutedAbstract" xlink:to="us-gaap_EarningsPerShareBasicAndDilutedAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EarningsPerShareBasicAndDilutedAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net earnings per share</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EarningsPerShareBasicAndDilutedAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Net income per share</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" xlink:to="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Antidilutive Securities Excluded from Computation of Earnings Per Share, Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Anti-dilutive common equivalent shares excluded from calculation</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Other Comprehensive Income [Table]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Other Comprehensive Income (Loss) [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Other Comprehensive Income</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AOCIAttributableToParentNetOfTaxRollForward" xlink:label="us-gaap_AOCIAttributableToParentNetOfTaxRollForward" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AOCIAttributableToParentNetOfTaxRollForward" xlink:to="us-gaap_AOCIAttributableToParentNetOfTaxRollForward_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AOCIAttributableToParentNetOfTaxRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Other Comprehensive Income (Loss), Net of Tax [Roll Forward]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AOCIAttributableToParentNetOfTaxRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Changes in accumulated other comprehensive income, net of tax</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsAbstract" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsAbstract" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash, Cash Equivalents, Restricted Cash and Restricted Cash Equivalents [Abstract]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RestrictedCashAndCashEquivalents" xlink:label="us-gaap_RestrictedCashAndCashEquivalents" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RestrictedCashAndCashEquivalents" xlink:to="us-gaap_RestrictedCashAndCashEquivalents_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RestrictedCashAndCashEquivalents_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Restricted Cash and Cash Equivalents</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_RestrictedCashAndCashEquivalents_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-term restricted cash</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit" xlink:label="acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit" xlink:to="acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the information pertaining to the portion of the line of credit availability being used to support the outstanding letters of credit.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Line of Credit Facility, Portion of Availability Used to Support Outstanding Letters of Credit</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Restricted cash which relates to support of outstanding letters of credit</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_WorkersCompensationLiabilityCurrentAndNoncurrent" xlink:label="us-gaap_WorkersCompensationLiabilityCurrentAndNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_WorkersCompensationLiabilityCurrentAndNoncurrent" xlink:to="us-gaap_WorkersCompensationLiabilityCurrentAndNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_WorkersCompensationLiabilityCurrentAndNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Workers' Compensation Liability</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_WorkersCompensationLiabilityCurrentAndNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Letter of credit related to workers' compensation insurance</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_DepositRelatingToCustomsActivity" xlink:label="acls_DepositRelatingToCustomsActivity" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_DepositRelatingToCustomsActivity" xlink:to="acls_DepositRelatingToCustomsActivity_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_DepositRelatingToCustomsActivity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">The amount of deposits relating customs activity.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_DepositRelatingToCustomsActivity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deposit Relating To Customs Activity</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_DepositRelatingToCustomsActivity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deposit related to customs activity</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InventoryCurrentTable" xlink:label="us-gaap_InventoryCurrentTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryCurrentTable" xlink:to="us-gaap_InventoryCurrentTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InventoryCurrentTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventory, Current [Table]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InventoryLineItems" xlink:label="us-gaap_InventoryLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryLineItems" xlink:to="us-gaap_InventoryLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InventoryLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventory [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InventoryLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventories, net</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InventoryRawMaterialsNetOfReserves" xlink:label="us-gaap_InventoryRawMaterialsNetOfReserves" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryRawMaterialsNetOfReserves" xlink:to="us-gaap_InventoryRawMaterialsNetOfReserves_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InventoryRawMaterialsNetOfReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventory, Raw Materials, Net of Reserves</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InventoryRawMaterialsNetOfReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Raw materials</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InventoryWorkInProcessNetOfReserves" xlink:label="us-gaap_InventoryWorkInProcessNetOfReserves" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryWorkInProcessNetOfReserves" xlink:to="us-gaap_InventoryWorkInProcessNetOfReserves_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InventoryWorkInProcessNetOfReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventory, Work in Process, Net of Reserves</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InventoryWorkInProcessNetOfReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Work in process</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InventoryFinishedGoodsNetOfReserves" xlink:label="us-gaap_InventoryFinishedGoodsNetOfReserves" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_InventoryFinishedGoodsNetOfReserves" xlink:to="us-gaap_InventoryFinishedGoodsNetOfReserves_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_InventoryFinishedGoodsNetOfReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Inventory, Finished Goods, Net of Reserves</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_InventoryFinishedGoodsNetOfReserves_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Finished goods (completed systems)</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_ProductWarrantyPeriod" xlink:label="acls_ProductWarrantyPeriod" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_ProductWarrantyPeriod" xlink:to="acls_ProductWarrantyPeriod_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_ProductWarrantyPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the period for which the warranty is offered for the products sold.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_ProductWarrantyPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty Period</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_ProductWarrantyPeriod_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product warranty period</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward" xlink:label="us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward" xlink:to="us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Movement in Standard and Extended Product Warranty, Increase (Decrease) [Roll Forward]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Changes in standard product warranty liability</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProductWarrantyAccrual" xlink:label="us-gaap_ProductWarrantyAccrual" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyAccrual" xlink:to="us-gaap_ProductWarrantyAccrual_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProductWarrantyAccrual_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty Accrual</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodEndLabel" xlink:label="us-gaap_ProductWarrantyAccrual_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance at June 30 (end of period)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/periodStartLabel" xlink:label="us-gaap_ProductWarrantyAccrual_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Balance at January 1 (beginning of year)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/totalLabel" xlink:label="us-gaap_ProductWarrantyAccrual_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total warranty liability</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProductWarrantyAccrualWarrantiesIssued" xlink:label="us-gaap_ProductWarrantyAccrualWarrantiesIssued" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyAccrualWarrantiesIssued" xlink:to="us-gaap_ProductWarrantyAccrualWarrantiesIssued_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProductWarrantyAccrualWarrantiesIssued_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty Accrual, Warranties Issued</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProductWarrantyAccrualWarrantiesIssued_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Warranties issued during the period</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProductWarrantyAccrualPayments" xlink:label="us-gaap_ProductWarrantyAccrualPayments" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyAccrualPayments" xlink:to="us-gaap_ProductWarrantyAccrualPayments_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProductWarrantyAccrualPayments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty Accrual, Payments</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2009/role/negatedLabel" xlink:label="us-gaap_ProductWarrantyAccrualPayments_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Settlements made during the period</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease" xlink:label="us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease" xlink:to="us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty Accrual, Preexisting, Increase (Decrease)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Changes in estimate of liability for pre-existing warranties during the period</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract" xlink:label="us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract" xlink:to="us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty Accrual, Balance Sheet Classification [Abstract]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product warranty classification</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProductWarrantyAccrualNoncurrent" xlink:label="us-gaap_ProductWarrantyAccrualNoncurrent" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductWarrantyAccrualNoncurrent" xlink:to="us-gaap_ProductWarrantyAccrualNoncurrent_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProductWarrantyAccrualNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product Warranty Accrual, Noncurrent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProductWarrantyAccrualNoncurrent_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount classified as long-term</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:to="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value Measurements, Recurring and Nonrecurring [Table]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueByMeasurementFrequencyAxis" xlink:label="us-gaap_FairValueByMeasurementFrequencyAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueByMeasurementFrequencyAxis" xlink:to="us-gaap_FairValueByMeasurementFrequencyAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueByMeasurementFrequencyAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Measurement Frequency [Axis]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueMeasurementFrequencyDomain" xlink:label="us-gaap_FairValueMeasurementFrequencyDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueMeasurementFrequencyDomain" xlink:to="us-gaap_FairValueMeasurementFrequencyDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueMeasurementFrequencyDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value Measurement Frequency [Domain]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FairValueMeasurementFrequencyDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value, Measurement Frequency [Domain]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueMeasurementsRecurringMember" xlink:label="us-gaap_FairValueMeasurementsRecurringMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueMeasurementsRecurringMember" xlink:to="us-gaap_FairValueMeasurementsRecurringMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueMeasurementsRecurringMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value Measurements Recurring [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FairValueMeasurementsRecurringMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Recurring</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueByFairValueHierarchyLevelAxis" xlink:label="us-gaap_FairValueByFairValueHierarchyLevelAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueByFairValueHierarchyLevelAxis" xlink:to="us-gaap_FairValueByFairValueHierarchyLevelAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueByFairValueHierarchyLevelAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value, Hierarchy [Axis]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:label="us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:to="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value Measurements Fair Value Hierarchy [Domain]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value Hierarchy [Domain]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueInputsLevel1Member" xlink:label="us-gaap_FairValueInputsLevel1Member" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueInputsLevel1Member" xlink:to="us-gaap_FairValueInputsLevel1Member_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueInputsLevel1Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value Inputs Level1 [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FairValueInputsLevel1Member_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Level 1</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueByAssetClassAxis" xlink:label="us-gaap_FairValueByAssetClassAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueByAssetClassAxis" xlink:to="us-gaap_FairValueByAssetClassAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueByAssetClassAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Asset Class [Axis]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:label="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:to="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value Assets Measured On Recurring Basis Unobservable Input Reconciliation By Asset Class [Domain]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Asset Class [Domain]</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember" xlink:label="acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember" xlink:to="acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Includes fund that invests in short-term money-market instruments, for example, but not limited to, commercial paper, banker's acceptances, repurchase agreements, United States government securities, certificates of deposit, and other highly liquid securities including Agency investments, all of which are considered cash equivalents.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Money Market Funds Us Government Securities And Agency Investments [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Money market funds, US Government Securities and Agency Investments</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:to="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Fair Value Measurements</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CashAndCashEquivalentsFairValueDisclosure" xlink:label="us-gaap_CashAndCashEquivalentsFairValueDisclosure" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CashAndCashEquivalentsFairValueDisclosure" xlink:to="us-gaap_CashAndCashEquivalentsFairValueDisclosure_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CashAndCashEquivalentsFairValueDisclosure_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cash and Cash Equivalents, Fair Value Disclosure</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CashAndCashEquivalentsFairValueDisclosure_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Money market funds, U.S. Government Securities and Agency Investments</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DebtInstrumentTable" xlink:label="us-gaap_DebtInstrumentTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentTable" xlink:to="us-gaap_DebtInstrumentTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtInstrumentTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Schedule of Long-term Debt Instruments [Table]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="us-gaap_DebtInstrumentLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DebtInstrumentLineItems" xlink:to="us-gaap_DebtInstrumentLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DebtInstrumentLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Debt Instrument [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DebtInstrumentLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Financing Arrangements</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProceedsFromSaleOfPropertyHeldForSale" xlink:label="us-gaap_ProceedsFromSaleOfPropertyHeldForSale" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProceedsFromSaleOfPropertyHeldForSale" xlink:to="us-gaap_ProceedsFromSaleOfPropertyHeldForSale_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProceedsFromSaleOfPropertyHeldForSale_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds from Sale of Property Held-for-sale</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProceedsFromSaleOfPropertyHeldForSale_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Proceeds from sale of corporate headquarters</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_SecurityDeposit" xlink:label="us-gaap_SecurityDeposit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SecurityDeposit" xlink:to="us-gaap_SecurityDeposit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SecurityDeposit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Security Deposit</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SecurityDeposit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Security deposit</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" xlink:label="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" xlink:to="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Line of Credit Facility, Maximum Borrowing Capacity</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Maximum borrowing capacity under the credit facility</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LineOfCreditFacilityFairValueOfAmountOutstanding" xlink:label="us-gaap_LineOfCreditFacilityFairValueOfAmountOutstanding" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LineOfCreditFacilityFairValueOfAmountOutstanding" xlink:to="us-gaap_LineOfCreditFacilityFairValueOfAmountOutstanding_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LineOfCreditFacilityFairValueOfAmountOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Line of Credit Facility, Fair Value of Amount Outstanding</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LineOfCreditFacilityFairValueOfAmountOutstanding_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Borrowings amount</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LettersOfCreditOutstandingAmount" xlink:label="us-gaap_LettersOfCreditOutstandingAmount" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LettersOfCreditOutstandingAmount" xlink:to="us-gaap_LettersOfCreditOutstandingAmount_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LettersOfCreditOutstandingAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Letters of Credit Outstanding, Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LettersOfCreditOutstandingAmount_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Letter of credit</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ValuationAllowanceTable" xlink:label="us-gaap_ValuationAllowanceTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ValuationAllowanceTable" xlink:to="us-gaap_ValuationAllowanceTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ValuationAllowanceTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Valuation Allowance [Table]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ValuationAllowanceLineItems" xlink:label="us-gaap_ValuationAllowanceLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ValuationAllowanceLineItems" xlink:to="us-gaap_ValuationAllowanceLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ValuationAllowanceLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Valuation Allowance [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ValuationAllowanceLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Valuation allowance</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_IncreaseInIncomeTaxExpenseBenefit" xlink:label="acls_IncreaseInIncomeTaxExpenseBenefit" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_IncreaseInIncomeTaxExpenseBenefit" xlink:to="acls_IncreaseInIncomeTaxExpenseBenefit_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_IncreaseInIncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Amount of increase in current income tax expense (benefit) and deferred income tax expense (benefit) pertaining to continuing operations.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_IncreaseInIncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase In Income Tax Expense (Benefit)</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_IncreaseInIncomeTaxExpenseBenefit_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase in income tax expense</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_IncreaseInPreTaxIncome" xlink:label="acls_IncreaseInPreTaxIncome" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_IncreaseInPreTaxIncome" xlink:to="acls_IncreaseInPreTaxIncome_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_IncreaseInPreTaxIncome_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the amount of increase in pretax income.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_IncreaseInPreTaxIncome_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase In Pre Tax Income</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_IncreaseInPreTaxIncome_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Increase in pretax income</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Effective Income Tax Rate Reconciliation, at Federal Statutory Income Tax Rate, Percent</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Statutory income tax rate (as a percent)</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DeferredTaxAssetsValuationAllowance" xlink:label="us-gaap_DeferredTaxAssetsValuationAllowance" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_DeferredTaxAssetsValuationAllowance" xlink:to="us-gaap_DeferredTaxAssetsValuationAllowance_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_DeferredTaxAssetsValuationAllowance_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred Tax Assets, Valuation Allowance</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_DeferredTaxAssetsValuationAllowance_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Deferred tax assets valuation allowance</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ConcentrationRiskTable" xlink:label="us-gaap_ConcentrationRiskTable" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskTable" xlink:to="us-gaap_ConcentrationRiskTable_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConcentrationRiskTable_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk [Table]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="us-gaap_ConcentrationRiskByBenchmarkAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:to="us-gaap_ConcentrationRiskByBenchmarkAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConcentrationRiskByBenchmarkAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk Benchmark [Axis]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="us-gaap_ConcentrationRiskBenchmarkDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskBenchmarkDomain" xlink:to="us-gaap_ConcentrationRiskBenchmarkDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConcentrationRiskBenchmarkDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk Benchmark [Domain]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ConcentrationRiskBenchmarkDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk Benchmark [Domain]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_SalesRevenueNetMember" xlink:label="us-gaap_SalesRevenueNetMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SalesRevenueNetMember" xlink:to="us-gaap_SalesRevenueNetMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SalesRevenueNetMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Sales Revenue Net [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SalesRevenueNetMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revenue</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccountsReceivableMember" xlink:label="us-gaap_AccountsReceivableMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccountsReceivableMember" xlink:to="us-gaap_AccountsReceivableMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccountsReceivableMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accounts Receivable [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccountsReceivableMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Consolidated accounts receivable</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="us-gaap_ConcentrationRiskByTypeAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskByTypeAxis" xlink:to="us-gaap_ConcentrationRiskByTypeAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConcentrationRiskByTypeAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk Type [Axis]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="us-gaap_ConcentrationRiskTypeDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskTypeDomain" xlink:to="us-gaap_ConcentrationRiskTypeDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConcentrationRiskTypeDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk Type [Domain]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ConcentrationRiskTypeDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk Type [Domain]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CustomerConcentrationRiskMember" xlink:label="us-gaap_CustomerConcentrationRiskMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CustomerConcentrationRiskMember" xlink:to="us-gaap_CustomerConcentrationRiskMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CustomerConcentrationRiskMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer Concentration Risk [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CustomerConcentrationRiskMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer concentration risk</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CreditConcentrationRiskMember" xlink:label="us-gaap_CreditConcentrationRiskMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CreditConcentrationRiskMember" xlink:to="us-gaap_CreditConcentrationRiskMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CreditConcentrationRiskMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Credit Concentration Risk [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CreditConcentrationRiskMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Credit concentration risk</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_MajorCustomersAxis" xlink:label="srt_MajorCustomersAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_MajorCustomersAxis" xlink:to="srt_MajorCustomersAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_MajorCustomersAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer [Axis]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_NameOfMajorCustomerDomain" xlink:label="srt_NameOfMajorCustomerDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_NameOfMajorCustomerDomain" xlink:to="srt_NameOfMajorCustomerDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_NameOfMajorCustomerDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Name Of Major Customer [Domain]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="srt_NameOfMajorCustomerDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Customer [Domain]</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LargestCustomerMember" xlink:label="acls_LargestCustomerMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_LargestCustomerMember" xlink:to="acls_LargestCustomerMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_LargestCustomerMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents one customer on whom the entity significantly relies giving rise to the largest single concentration risk.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_LargestCustomerMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Largest Customer [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_LargestCustomerMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">First customer</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_SecondLargestCustomerMember" xlink:label="acls_SecondLargestCustomerMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_SecondLargestCustomerMember" xlink:to="acls_SecondLargestCustomerMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_SecondLargestCustomerMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents one customer on whom the entity significantly relies giving rise to the second largest single concentration risk.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_SecondLargestCustomerMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Second Largest Customer [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_SecondLargestCustomerMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Second customer</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_ThirdLargestCustomerMember" xlink:label="acls_ThirdLargestCustomerMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_ThirdLargestCustomerMember" xlink:to="acls_ThirdLargestCustomerMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_ThirdLargestCustomerMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents one customer on whom the entity significantly relies giving rise to the third largest single concentration risk.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_ThirdLargestCustomerMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Third Largest Customer [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_ThirdLargestCustomerMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Third customer</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ConcentrationRiskLineItems" xlink:label="us-gaap_ConcentrationRiskLineItems" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskLineItems" xlink:to="us-gaap_ConcentrationRiskLineItems_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConcentrationRiskLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk [Line Items]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/verboseLabel" xlink:label="us-gaap_ConcentrationRiskLineItems_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration of Risk</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_ConcentrationRiskNumberOfCustomers" xlink:label="acls_ConcentrationRiskNumberOfCustomers" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_ConcentrationRiskNumberOfCustomers" xlink:to="acls_ConcentrationRiskNumberOfCustomers_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_ConcentrationRiskNumberOfCustomers_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the number of customers on whom the entity significantly relies giving rise to concentration risk.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_ConcentrationRiskNumberOfCustomers_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk Number of Customers</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_ConcentrationRiskNumberOfCustomers_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of customers</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="us-gaap_ConcentrationRiskPercentage1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ConcentrationRiskPercentage1" xlink:to="us-gaap_ConcentrationRiskPercentage1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ConcentrationRiskPercentage1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Concentration Risk, Percentage</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ConcentrationRiskPercentage1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Percentage of concentration risk</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockRepurchaseProgramAuthorizedAmount1" xlink:label="us-gaap_StockRepurchaseProgramAuthorizedAmount1" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_StockRepurchaseProgramAuthorizedAmount1" xlink:to="us-gaap_StockRepurchaseProgramAuthorizedAmount1_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_StockRepurchaseProgramAuthorizedAmount1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock Repurchase Program, Authorized Amount</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_StockRepurchaseProgramAuthorizedAmount1_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share repurchase program common stock authorized amount</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_TreasuryStockSharesAcquired" xlink:label="us-gaap_TreasuryStockSharesAcquired" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_TreasuryStockSharesAcquired" xlink:to="us-gaap_TreasuryStockSharesAcquired_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_TreasuryStockSharesAcquired_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Treasury Stock, Shares, Acquired</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_TreasuryStockSharesAcquired_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Number of shares repurchased</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_TreasuryStockAcquiredAverageCostPerShare" xlink:label="us-gaap_TreasuryStockAcquiredAverageCostPerShare" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_TreasuryStockAcquiredAverageCostPerShare" xlink:to="us-gaap_TreasuryStockAcquiredAverageCostPerShare_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_TreasuryStockAcquiredAverageCostPerShare_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Treasury Stock Acquired, Average Cost Per Share</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_TreasuryStockAcquiredAverageCostPerShare_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Average cost</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_ProductOrServiceAxis" xlink:label="srt_ProductOrServiceAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_ProductOrServiceAxis" xlink:to="srt_ProductOrServiceAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_ProductOrServiceAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Products and Services [Axis]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_ProductsAndServicesDomain" xlink:label="srt_ProductsAndServicesDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_ProductsAndServicesDomain" xlink:to="srt_ProductsAndServicesDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_ProductsAndServicesDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Products And Services [Domain]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="srt_ProductsAndServicesDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Products and Services [Domain]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProductMember" xlink:label="us-gaap_ProductMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ProductMember" xlink:to="us-gaap_ProductMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ProductMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ProductMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Product</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_ServicesMember" xlink:label="acls_ServicesMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_ServicesMember" xlink:to="acls_ServicesMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_ServicesMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Service or group of services that are sold by the entity.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_ServicesMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Services [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_ServicesMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Services</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeMember" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeMember" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Other Comprehensive Income [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Other Comprehensive Income (Loss)</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AwardTypeAxis" xlink:label="us-gaap_AwardTypeAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AwardTypeAxis" xlink:to="us-gaap_AwardTypeAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AwardTypeAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Award Type [Axis]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Share Based Compensation Arrangements By Share Based Payment Award Award Type And Plan Name [Domain]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Equity Award [Domain]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EmployeeStockMember" xlink:label="us-gaap_EmployeeStockMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EmployeeStockMember" xlink:to="us-gaap_EmployeeStockMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EmployeeStockMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Employee Stock [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EmployeeStockMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">2020 Employee stock purchase plan</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_StockOptionAwardsMember" xlink:label="acls_StockOptionAwardsMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_StockOptionAwardsMember" xlink:to="acls_StockOptionAwardsMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_StockOptionAwardsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Contract that gives the holder the right, but not the obligation, either to purchase or to sell a certain number of shares of stock at a predetermined price for a specified period of time.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_StockOptionAwardsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock Option Awards [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_StockOptionAwardsMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Stock Options</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_RangeAxis" xlink:to="srt_RangeAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_RangeAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Range [Axis]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_RangeMember" xlink:label="srt_RangeMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_RangeMember" xlink:to="srt_RangeMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_RangeMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Range [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="srt_RangeMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Range [Domain]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_MinimumMember" xlink:to="srt_MinimumMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_MinimumMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Minimum [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="srt_MinimumMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Minimum</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_MaximumMember" xlink:to="srt_MaximumMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_MaximumMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Maximum [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="srt_MaximumMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Maximum</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncomeStatementLocationAxis" xlink:label="us-gaap_IncomeStatementLocationAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeStatementLocationAxis" xlink:to="us-gaap_IncomeStatementLocationAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeStatementLocationAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Statement Location [Axis]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncomeStatementLocationDomain" xlink:label="us-gaap_IncomeStatementLocationDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_IncomeStatementLocationDomain" xlink:to="us-gaap_IncomeStatementLocationDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_IncomeStatementLocationDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Statement Location [Domain]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_IncomeStatementLocationDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Income Statement Location [Domain]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ServiceMember" xlink:label="us-gaap_ServiceMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ServiceMember" xlink:to="us-gaap_ServiceMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ServiceMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Service [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ServiceMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Service</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ResearchAndDevelopmentExpenseMember" xlink:label="us-gaap_ResearchAndDevelopmentExpenseMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ResearchAndDevelopmentExpenseMember" xlink:to="us-gaap_ResearchAndDevelopmentExpenseMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ResearchAndDevelopmentExpenseMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Research And Development Expense [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ResearchAndDevelopmentExpenseMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Research and development</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_SellingAndMarketingExpenseMember" xlink:label="us-gaap_SellingAndMarketingExpenseMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_SellingAndMarketingExpenseMember" xlink:to="us-gaap_SellingAndMarketingExpenseMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_SellingAndMarketingExpenseMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Selling And Marketing Expense [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_SellingAndMarketingExpenseMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Sales and marketing*</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_GeneralAndAdministrativeExpenseMember" xlink:label="us-gaap_GeneralAndAdministrativeExpenseMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_GeneralAndAdministrativeExpenseMember" xlink:to="us-gaap_GeneralAndAdministrativeExpenseMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_GeneralAndAdministrativeExpenseMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">General And Administrative Expense [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_GeneralAndAdministrativeExpenseMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">General and administrative*</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_NewSystemsRevenueMember" xlink:label="acls_NewSystemsRevenueMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_NewSystemsRevenueMember" xlink:to="acls_NewSystemsRevenueMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_NewSystemsRevenueMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents information pertaining to revenue arising from the sale of new systems, a product line of the entity.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_NewSystemsRevenueMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">New Systems Revenue [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_NewSystemsRevenueMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Systems</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_CsIOrAftermarketMember" xlink:label="acls_CsIOrAftermarketMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_CsIOrAftermarketMember" xlink:to="acls_CsIOrAftermarketMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_CsIOrAftermarketMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the information pertaining to CS&amp;I or aftermarket.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_CsIOrAftermarketMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Cs I Or Aftermarket [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_CsIOrAftermarketMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">CS&amp;I/Aftermarket</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_StatementGeographicalAxis" xlink:label="srt_StatementGeographicalAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_StatementGeographicalAxis" xlink:to="srt_StatementGeographicalAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_StatementGeographicalAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Geographical [Axis]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_SegmentGeographicalDomain" xlink:label="srt_SegmentGeographicalDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_SegmentGeographicalDomain" xlink:to="srt_SegmentGeographicalDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_SegmentGeographicalDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Segment Geographical [Domain]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="srt_SegmentGeographicalDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Geographical [Domain]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_NorthAmericaMember" xlink:label="srt_NorthAmericaMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_NorthAmericaMember" xlink:to="srt_NorthAmericaMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_NorthAmericaMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">North America [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="srt_NorthAmericaMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">North America</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_AsiaMember" xlink:label="srt_AsiaMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_AsiaMember" xlink:to="srt_AsiaMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_AsiaMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Asia [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="srt_AsiaMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Asia Pacific</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_EuropeMember" xlink:label="srt_EuropeMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_EuropeMember" xlink:to="srt_EuropeMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_EuropeMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Europe [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="srt_EuropeMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Europe</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccumulatedTranslationAdjustmentMember" xlink:label="us-gaap_AccumulatedTranslationAdjustmentMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedTranslationAdjustmentMember" xlink:to="us-gaap_AccumulatedTranslationAdjustmentMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccumulatedTranslationAdjustmentMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Translation Adjustment [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccumulatedTranslationAdjustmentMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Foreign currency</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember" xlink:label="us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember" xlink:to="us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Accumulated Defined Benefit Plans Adjustment [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Defined benefit pension plan</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LongtermDebtTypeAxis" xlink:label="us-gaap_LongtermDebtTypeAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LongtermDebtTypeAxis" xlink:to="us-gaap_LongtermDebtTypeAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LongtermDebtTypeAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-term Debt, Type [Axis]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LongtermDebtTypeDomain" xlink:label="us-gaap_LongtermDebtTypeDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LongtermDebtTypeDomain" xlink:to="us-gaap_LongtermDebtTypeDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LongtermDebtTypeDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Longterm Debt Type [Domain]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LongtermDebtTypeDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Long-term Debt, Type [Domain]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RevolvingCreditFacilityMember" xlink:label="us-gaap_RevolvingCreditFacilityMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_RevolvingCreditFacilityMember" xlink:to="us-gaap_RevolvingCreditFacilityMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_RevolvingCreditFacilityMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revolving Credit Facility [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_RevolvingCreditFacilityMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Revolving credit facility</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueByMeasurementBasisAxis" xlink:label="us-gaap_FairValueByMeasurementBasisAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_FairValueByMeasurementBasisAxis" xlink:to="us-gaap_FairValueByMeasurementBasisAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_FairValueByMeasurementBasisAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Measurement Basis [Axis]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_PortionAtFairValueFairValueDisclosureMember" xlink:label="us-gaap_PortionAtFairValueFairValueDisclosureMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PortionAtFairValueFairValueDisclosureMember" xlink:to="us-gaap_PortionAtFairValueFairValueDisclosureMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PortionAtFairValueFairValueDisclosureMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Portion At Fair Value Fair Value Disclosure [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PortionAtFairValueFairValueDisclosureMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Portion at Fair Value Measurement [Member]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EstimateOfFairValueFairValueDisclosureMember" xlink:label="us-gaap_EstimateOfFairValueFairValueDisclosureMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_EstimateOfFairValueFairValueDisclosureMember" xlink:to="us-gaap_EstimateOfFairValueFairValueDisclosureMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_EstimateOfFairValueFairValueDisclosureMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Estimate Of Fair Value Fair Value Disclosure [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_EstimateOfFairValueFairValueDisclosureMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Total</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_CounterpartyNameAxis" xlink:label="srt_CounterpartyNameAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_CounterpartyNameAxis" xlink:to="srt_CounterpartyNameAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_CounterpartyNameAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Counterparty Name [Axis]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_RepurchaseAgreementCounterpartyNameDomain" xlink:label="srt_RepurchaseAgreementCounterpartyNameDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="srt_RepurchaseAgreementCounterpartyNameDomain" xlink:to="srt_RepurchaseAgreementCounterpartyNameDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="srt_RepurchaseAgreementCounterpartyNameDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Repurchase Agreement Counterparty Name [Domain]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="srt_RepurchaseAgreementCounterpartyNameDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Counterparty Name [Domain]</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_BeverlyPropertyOwnerLlcMember" xlink:label="acls_BeverlyPropertyOwnerLlcMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_BeverlyPropertyOwnerLlcMember" xlink:to="acls_BeverlyPropertyOwnerLlcMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_BeverlyPropertyOwnerLlcMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents the information pertaining to Beverly Property Owner LLC</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_BeverlyPropertyOwnerLlcMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Beverly Property Owner Llc [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_BeverlyPropertyOwnerLlcMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Beverly Property Owner LLC</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_SiliconValleyBankMember" xlink:label="acls_SiliconValleyBankMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_SiliconValleyBankMember" xlink:to="acls_SiliconValleyBankMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_SiliconValleyBankMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents information pertaining to Silicon Valley Bank.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_SiliconValleyBankMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Silicon Valley Bank [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_SiliconValleyBankMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Silicon Valley Bank</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:label="us-gaap_PropertyPlantAndEquipmentByTypeAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:to="us-gaap_PropertyPlantAndEquipmentByTypeAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PropertyPlantAndEquipmentByTypeAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment, Type [Axis]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="us-gaap_PropertyPlantAndEquipmentTypeDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:to="us-gaap_PropertyPlantAndEquipmentTypeDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_PropertyPlantAndEquipmentTypeDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property Plant And Equipment Type [Domain]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_PropertyPlantAndEquipmentTypeDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Property, Plant and Equipment, Type [Domain]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_BuildingMember" xlink:label="us-gaap_BuildingMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_BuildingMember" xlink:to="us-gaap_BuildingMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_BuildingMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Building [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_BuildingMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Buildings</label>
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_SaleAndLeaseBackMember" xlink:label="acls_SaleAndLeaseBackMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="acls_SaleAndLeaseBackMember" xlink:to="acls_SaleAndLeaseBackMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/documentation" xlink:label="acls_SaleAndLeaseBackMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Represents information pertaining to the sale and leaseback transaction.</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="acls_SaleAndLeaseBackMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Sale And Lease Back [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="acls_SaleAndLeaseBackMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Sale leaseback obligation</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CreditFacilityAxis" xlink:label="us-gaap_CreditFacilityAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CreditFacilityAxis" xlink:to="us-gaap_CreditFacilityAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CreditFacilityAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Credit Facility [Axis]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CreditFacilityDomain" xlink:label="us-gaap_CreditFacilityDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_CreditFacilityDomain" xlink:to="us-gaap_CreditFacilityDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_CreditFacilityDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Credit Facility [Domain]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_CreditFacilityDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Credit Facility [Domain]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ShortTermDebtTypeAxis" xlink:label="us-gaap_ShortTermDebtTypeAxis" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShortTermDebtTypeAxis" xlink:to="us-gaap_ShortTermDebtTypeAxis_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShortTermDebtTypeAxis_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Short-term Debt, Type [Axis]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ShortTermDebtTypeDomain" xlink:label="us-gaap_ShortTermDebtTypeDomain" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_ShortTermDebtTypeDomain" xlink:to="us-gaap_ShortTermDebtTypeDomain_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_ShortTermDebtTypeDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Short Term Debt Type [Domain]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_ShortTermDebtTypeDomain_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Short-term Debt, Type [Domain]</label>
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LetterOfCreditMember" xlink:label="us-gaap_LetterOfCreditMember" xmlns="http://www.xbrl.org/2003/linkbase" />
    <labelArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="us-gaap_LetterOfCreditMember" xlink:to="us-gaap_LetterOfCreditMember_lbl" xmlns="http://www.xbrl.org/2003/linkbase" />
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="us-gaap_LetterOfCreditMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Letter Of Credit [Member]</label>
    <label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/terseLabel" xlink:label="us-gaap_LetterOfCreditMember_lbl" xml:lang="en-US" xmlns="http://www.xbrl.org/2003/linkbase">Letter of credit</label>
  </link:labelLink>
</link:linkbase>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.PRE
<SEQUENCE>10
<FILENAME>acls-20210630_pre.xml
<DESCRIPTION>EX-101.PRE
<TEXT>
<XBRL>
<?xml version="1.0" encoding="us-ascii"?>
<!--XBRL document created with Toppan Merrill Bridge  9.6.7811.37134 -->
<!--Based on XBRL 2.1-->
<!--Created on: 8/6/2021 2:50:53 PM-->
<!--Modified on: 8/6/2021 2:50:53 PM-->
<link:linkbase xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xbrli="http://www.xbrl.org/2003/instance">
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DocumentDocumentAndEntityInformation" roleURI="http://www.axcelis.com/role/DocumentDocumentAndEntityInformation" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#StatementConsolidatedStatementsOfOperations" roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#StatementConsolidatedStatementsOfComprehensiveIncome" roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#StatementConsolidatedBalanceSheets" roleURI="http://www.axcelis.com/role/StatementConsolidatedBalanceSheets" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#StatementConsolidatedBalanceSheetsParenthetical" roleURI="http://www.axcelis.com/role/StatementConsolidatedBalanceSheetsParenthetical" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#StatementConsolidatedStatementsOfStockholdersEquity" roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#StatementConsolidatedStatementsOfCashFlows" roleURI="http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureNatureOfBusiness" roleURI="http://www.axcelis.com/role/DisclosureNatureOfBusiness" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureStockBasedCompensation" roleURI="http://www.axcelis.com/role/DisclosureStockBasedCompensation" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureLeases" roleURI="http://www.axcelis.com/role/DisclosureLeases" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureRevenue" roleURI="http://www.axcelis.com/role/DisclosureRevenue" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureReceivableAndAllowanceForCreditLosses" roleURI="http://www.axcelis.com/role/DisclosureReceivableAndAllowanceForCreditLosses" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureComputationOfNetEarningsPerShare" roleURI="http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShare" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureAccumulatedOtherComprehensiveIncome" roleURI="http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveIncome" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureCashCashEquivalentsAndRestrictedCash" roleURI="http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCash" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureInventoriesNet" roleURI="http://www.axcelis.com/role/DisclosureInventoriesNet" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureProductWarranty" roleURI="http://www.axcelis.com/role/DisclosureProductWarranty" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureFairValueMeasurements" roleURI="http://www.axcelis.com/role/DisclosureFairValueMeasurements" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureFinancingArrangements" roleURI="http://www.axcelis.com/role/DisclosureFinancingArrangements" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureIncomeTaxes" roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxes" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureConcentrationOfRisk" roleURI="http://www.axcelis.com/role/DisclosureConcentrationOfRisk" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureShareRepurchase" roleURI="http://www.axcelis.com/role/DisclosureShareRepurchase" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureContingencies" roleURI="http://www.axcelis.com/role/DisclosureContingencies" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureRecentAccountingGuidance" roleURI="http://www.axcelis.com/role/DisclosureRecentAccountingGuidance" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureLeasesTables" roleURI="http://www.axcelis.com/role/DisclosureLeasesTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureRevenueTables" roleURI="http://www.axcelis.com/role/DisclosureRevenueTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureReceivableAndAllowanceForCreditLossesTables" roleURI="http://www.axcelis.com/role/DisclosureReceivableAndAllowanceForCreditLossesTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureComputationOfNetEarningsPerShareTables" roleURI="http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShareTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureAccumulatedOtherComprehensiveIncomeTables" roleURI="http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveIncomeTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureCashCashEquivalentsAndRestrictedCashTables" roleURI="http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureInventoriesNetTables" roleURI="http://www.axcelis.com/role/DisclosureInventoriesNetTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureProductWarrantyTables" roleURI="http://www.axcelis.com/role/DisclosureProductWarrantyTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureFairValueMeasurementsTables" roleURI="http://www.axcelis.com/role/DisclosureFairValueMeasurementsTables" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureStockBasedCompensationDetails" roleURI="http://www.axcelis.com/role/DisclosureStockBasedCompensationDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureLeasesDetails" roleURI="http://www.axcelis.com/role/DisclosureLeasesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails" roleURI="http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureLeasesLeaseCostDetails" roleURI="http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails" roleURI="http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureLeasesCashFlowByLeaseTypeDetails" roleURI="http://www.axcelis.com/role/DisclosureLeasesCashFlowByLeaseTypeDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureRevenueDetails" roleURI="http://www.axcelis.com/role/DisclosureRevenueDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails" roleURI="http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureRevenueContractLiabilitiesDetails" roleURI="http://www.axcelis.com/role/DisclosureRevenueContractLiabilitiesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureRevenueDeferredRevenueDetails" roleURI="http://www.axcelis.com/role/DisclosureRevenueDeferredRevenueDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureReceivableAndAllowanceForCreditLossesAllowancesForCreditLossesRelatedToTradeReceivablesDetails" roleURI="http://www.axcelis.com/role/DisclosureReceivableAndAllowanceForCreditLossesAllowancesForCreditLossesRelatedToTradeReceivablesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureComputationOfNetEarningsPerShareDetails" roleURI="http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShareDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureAccumulatedOtherComprehensiveIncomeDetails" roleURI="http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveIncomeDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureCashCashEquivalentsAndRestrictedCashDetails" roleURI="http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureInventoriesNetDetails" roleURI="http://www.axcelis.com/role/DisclosureInventoriesNetDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureProductWarrantyDetails" roleURI="http://www.axcelis.com/role/DisclosureProductWarrantyDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureFairValueMeasurementsDetails" roleURI="http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureFinancingArrangementsDetails" roleURI="http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureIncomeTaxesDetails" roleURI="http://www.axcelis.com/role/DisclosureIncomeTaxesDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureConcentrationOfRiskDetails" roleURI="http://www.axcelis.com/role/DisclosureConcentrationOfRiskDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <roleRef xlink:type="simple" xlink:href="acls-20210630.xsd#DisclosureShareRepurchaseDetails" roleURI="http://www.axcelis.com/role/DisclosureShareRepurchaseDetails" xmlns="http://www.xbrl.org/2003/linkbase" />
  <presentationLink xlink:role="http://www.axcelis.com/role/DocumentDocumentAndEntityInformation" xlink:type="extended" xlink:title="00090 - Document - Document and Entity Information" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_CoverAbstract" xlink:label="dei_CoverAbstract" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_DocumentType" xlink:label="dei_DocumentType_637638582521856959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentType_637638582521856959" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_DocumentQuarterlyReport" xlink:label="dei_DocumentQuarterlyReport_637638582521856959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentQuarterlyReport_637638582521856959" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_DocumentTransitionReport" xlink:label="dei_DocumentTransitionReport_637638582521856959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentTransitionReport_637638582521856959" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_DocumentPeriodEndDate" xlink:label="dei_DocumentPeriodEndDate_637638582521856959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentPeriodEndDate_637638582521856959" order="4" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityFileNumber" xlink:label="dei_EntityFileNumber_637638582521856959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityFileNumber_637638582521856959" order="5" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityRegistrantName" xlink:label="dei_EntityRegistrantName_637638582521856959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityRegistrantName_637638582521856959" order="6" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityIncorporationStateCountryCode" xlink:label="dei_EntityIncorporationStateCountryCode_637638582521856959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityIncorporationStateCountryCode_637638582521856959" order="7" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityTaxIdentificationNumber" xlink:label="dei_EntityTaxIdentificationNumber_637638582521856959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityTaxIdentificationNumber_637638582521856959" order="8" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityAddressAddressLine1" xlink:label="dei_EntityAddressAddressLine1_637638582521856959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityAddressAddressLine1_637638582521856959" order="9" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityAddressCityOrTown" xlink:label="dei_EntityAddressCityOrTown_637638582521856959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityAddressCityOrTown_637638582521856959" order="10" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityAddressStateOrProvince" xlink:label="dei_EntityAddressStateOrProvince_637638582521856959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityAddressStateOrProvince_637638582521856959" order="11" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityAddressPostalZipCode" xlink:label="dei_EntityAddressPostalZipCode_637638582521856959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityAddressPostalZipCode_637638582521856959" order="12" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_CityAreaCode" xlink:label="dei_CityAreaCode_637638582521856959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_CityAreaCode_637638582521856959" order="13" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_LocalPhoneNumber" xlink:label="dei_LocalPhoneNumber_637638582521866953" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_LocalPhoneNumber_637638582521866953" order="14" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_Security12bTitle" xlink:label="dei_Security12bTitle_637638582521866953" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_Security12bTitle_637638582521866953" order="15" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_TradingSymbol" xlink:label="dei_TradingSymbol_637638582521866953" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_TradingSymbol_637638582521866953" order="16" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_SecurityExchangeName" xlink:label="dei_SecurityExchangeName_637638582521866953" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_SecurityExchangeName_637638582521866953" order="17" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityCurrentReportingStatus" xlink:label="dei_EntityCurrentReportingStatus_637638582521866953" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityCurrentReportingStatus_637638582521866953" order="18" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityInteractiveDataCurrent" xlink:label="dei_EntityInteractiveDataCurrent_637638582521866953" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityInteractiveDataCurrent_637638582521866953" order="19" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityFilerCategory" xlink:label="dei_EntityFilerCategory_637638582521866953" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityFilerCategory_637638582521866953" order="20" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntitySmallBusiness" xlink:label="dei_EntitySmallBusiness_637638582521866953" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntitySmallBusiness_637638582521866953" order="21" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityEmergingGrowthCompany" xlink:label="dei_EntityEmergingGrowthCompany_637638582521866953" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityEmergingGrowthCompany_637638582521866953" order="22" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityShellCompany" xlink:label="dei_EntityShellCompany_637638582521877188" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityShellCompany_637638582521877188" order="23" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityCommonStockSharesOutstanding" xlink:label="dei_EntityCommonStockSharesOutstanding_637638582521877188" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityCommonStockSharesOutstanding_637638582521877188" order="24" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_CurrentFiscalYearEndDate" xlink:label="dei_CurrentFiscalYearEndDate_637638582521877188" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_CurrentFiscalYearEndDate_637638582521877188" order="25" use="optional" preferredLabel="http://www.xbrl.org/2003/role/label" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_DocumentFiscalYearFocus" xlink:label="dei_DocumentFiscalYearFocus_637638582521877188" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentFiscalYearFocus_637638582521877188" order="26" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_DocumentFiscalPeriodFocus" xlink:label="dei_DocumentFiscalPeriodFocus_637638582521877188" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_DocumentFiscalPeriodFocus_637638582521877188" order="27" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_EntityCentralIndexKey" xlink:label="dei_EntityCentralIndexKey_637638582521877188" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_EntityCentralIndexKey_637638582521877188" order="28" use="optional" />
    <loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd#dei_AmendmentFlag" xlink:label="dei_AmendmentFlag_637638582521886958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="dei_CoverAbstract" xlink:to="dei_AmendmentFlag_637638582521886958" order="29" use="optional" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations" xlink:type="extended" xlink:title="00100 - Statement - Consolidated Statements of Operations" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncomeStatementAbstract" xlink:label="us-gaap_IncomeStatementAbstract_635454443247847540" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StatementTable" xlink:label="us-gaap_StatementTable_637638582521886958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementAbstract_635454443247847540" xlink:to="us-gaap_StatementTable_637638582521886958" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_ProductOrServiceAxis" xlink:label="srt_ProductOrServiceAxis_637638582521886958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementTable_637638582521886958" xlink:to="srt_ProductOrServiceAxis_637638582521886958" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_ProductsAndServicesDomain" xlink:label="srt_ProductsAndServicesDomain_637638582521886958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductOrServiceAxis_637638582521886958" xlink:to="srt_ProductsAndServicesDomain_637638582521886958" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProductMember" xlink:label="us-gaap_ProductMember_637638582521886958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductsAndServicesDomain_637638582521886958" xlink:to="us-gaap_ProductMember_637638582521886958" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_ServicesMember" xlink:label="acls_ServicesMember_637638582521886958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductsAndServicesDomain_637638582521886958" xlink:to="acls_ServicesMember_637638582521886958" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StatementLineItems" xlink:label="us-gaap_StatementLineItems_637638582521886958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementTable_637638582521886958" xlink:to="us-gaap_StatementLineItems_637638582521886958" order="2" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RevenuesAbstract" xlink:label="us-gaap_RevenuesAbstract_637638582521886958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_637638582521886958" xlink:to="us-gaap_RevenuesAbstract_637638582521886958" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_Revenues" xlink:label="us-gaap_Revenues_637638582521886958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenuesAbstract_637638582521886958" xlink:to="us-gaap_Revenues_637638582521886958" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CostOfRevenueAbstract" xlink:label="us-gaap_CostOfRevenueAbstract_637638582521896959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_637638582521886958" xlink:to="us-gaap_CostOfRevenueAbstract_637638582521896959" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CostOfGoodsAndServicesSold" xlink:label="us-gaap_CostOfGoodsAndServicesSold_637638582521896959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CostOfRevenueAbstract_637638582521896959" xlink:to="us-gaap_CostOfGoodsAndServicesSold_637638582521896959" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_GrossProfit" xlink:label="us-gaap_GrossProfit_637638582521896959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_637638582521886958" xlink:to="us-gaap_GrossProfit_637638582521896959" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingExpensesAbstract" xlink:label="us-gaap_OperatingExpensesAbstract_637638582521896959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_637638582521886958" xlink:to="us-gaap_OperatingExpensesAbstract_637638582521896959" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ResearchAndDevelopmentExpense" xlink:label="us-gaap_ResearchAndDevelopmentExpense_637638582521896959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingExpensesAbstract_637638582521896959" xlink:to="us-gaap_ResearchAndDevelopmentExpense_637638582521896959" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_SellingAndMarketingExpense" xlink:label="us-gaap_SellingAndMarketingExpense_637638582521896959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingExpensesAbstract_637638582521896959" xlink:to="us-gaap_SellingAndMarketingExpense_637638582521896959" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_GeneralAndAdministrativeExpense" xlink:label="us-gaap_GeneralAndAdministrativeExpense_637638582521896959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingExpensesAbstract_637638582521896959" xlink:to="us-gaap_GeneralAndAdministrativeExpense_637638582521896959" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingExpenses" xlink:label="us-gaap_OperatingExpenses_637638582521896959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingExpensesAbstract_637638582521896959" xlink:to="us-gaap_OperatingExpenses_637638582521896959" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingIncomeLoss" xlink:label="us-gaap_OperatingIncomeLoss_637638582521896959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_637638582521886958" xlink:to="us-gaap_OperatingIncomeLoss_637638582521896959" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NonoperatingIncomeExpenseAbstract" xlink:label="us-gaap_NonoperatingIncomeExpenseAbstract_637638582521906965" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_637638582521886958" xlink:to="us-gaap_NonoperatingIncomeExpenseAbstract_637638582521906965" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InvestmentIncomeInterest" xlink:label="us-gaap_InvestmentIncomeInterest_637638582521906965" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NonoperatingIncomeExpenseAbstract_637638582521906965" xlink:to="us-gaap_InvestmentIncomeInterest_637638582521906965" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InterestExpense" xlink:label="us-gaap_InterestExpense_637638582521906965" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NonoperatingIncomeExpenseAbstract_637638582521906965" xlink:to="us-gaap_InterestExpense_637638582521906965" order="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OtherNonoperatingIncomeExpense" xlink:label="us-gaap_OtherNonoperatingIncomeExpense_637638582521906965" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NonoperatingIncomeExpenseAbstract_637638582521906965" xlink:to="us-gaap_OtherNonoperatingIncomeExpense_637638582521906965" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NonoperatingIncomeExpense" xlink:label="us-gaap_NonoperatingIncomeExpense_637638582521906965" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NonoperatingIncomeExpenseAbstract_637638582521906965" xlink:to="us-gaap_NonoperatingIncomeExpense_637638582521906965" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest" xlink:label="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_637638582521906965" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_637638582521886958" xlink:to="us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest_637638582521906965" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="us-gaap_IncomeTaxExpenseBenefit_637638582521906965" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_637638582521886958" xlink:to="us-gaap_IncomeTaxExpenseBenefit_637638582521906965" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="9" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_637638582521906965" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_637638582521886958" xlink:to="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_637638582521906965" order="9" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="us-gaap_EarningsPerShareAbstract_637638582521906965" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_637638582521886958" xlink:to="us-gaap_EarningsPerShareAbstract_637638582521906965" order="10" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EarningsPerShareBasic" xlink:label="us-gaap_EarningsPerShareBasic_637638582521916950" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareAbstract_637638582521906965" xlink:to="us-gaap_EarningsPerShareBasic_637638582521916950" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EarningsPerShareDiluted" xlink:label="us-gaap_EarningsPerShareDiluted_637638582521916950" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareAbstract_637638582521906965" xlink:to="us-gaap_EarningsPerShareDiluted_637638582521916950" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract_637638582521916950" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_637638582521886958" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract_637638582521916950" order="11" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_637638582521916950" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract_637638582521916950" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_637638582521916950" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_637638582521916950" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract_637638582521916950" xlink:to="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_637638582521916950" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome" xlink:type="extended" xlink:title="00200 - Statement - Consolidated Statements of Comprehensive Income" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract" xlink:label="us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_635467431371776246" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_637638582521916950" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_635467431371776246" xlink:to="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_637638582521916950" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract_637638582521916950" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract_635467431371776246" xlink:to="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract_637638582521916950" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_637638582521926959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract_637638582521916950" xlink:to="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_637638582521926959" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent_637638582521926959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract_637638582521916950" xlink:to="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent_637638582521926959" order="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="9" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OtherComprehensiveIncomeLossNetOfTax" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTax_637638582521926959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract_637638582521916950" xlink:to="us-gaap_OtherComprehensiveIncomeLossNetOfTax_637638582521926959" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ComprehensiveIncomeNetOfTax" xlink:label="us-gaap_ComprehensiveIncomeNetOfTax_637638582521926959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract_637638582521916950" xlink:to="us-gaap_ComprehensiveIncomeNetOfTax_637638582521926959" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="2" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/StatementConsolidatedBalanceSheets" xlink:type="extended" xlink:title="00300 - Statement - Consolidated Balance Sheets" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StatementOfFinancialPositionAbstract" xlink:label="us-gaap_StatementOfFinancialPositionAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AssetsAbstract" xlink:label="us-gaap_AssetsAbstract_637638582521926959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfFinancialPositionAbstract" xlink:to="us-gaap_AssetsAbstract_637638582521926959" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AssetsCurrentAbstract" xlink:label="us-gaap_AssetsCurrentAbstract_637638582521926959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsAbstract_637638582521926959" xlink:to="us-gaap_AssetsCurrentAbstract_637638582521926959" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue_637638582521926959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsCurrentAbstract_637638582521926959" xlink:to="us-gaap_CashAndCashEquivalentsAtCarryingValue_637638582521926959" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccountsReceivableNetCurrent" xlink:label="us-gaap_AccountsReceivableNetCurrent_637638582521926959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsCurrentAbstract_637638582521926959" xlink:to="us-gaap_AccountsReceivableNetCurrent_637638582521926959" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InventoryNet" xlink:label="us-gaap_InventoryNet_637638582521926959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsCurrentAbstract_637638582521926959" xlink:to="us-gaap_InventoryNet_637638582521926959" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_PrepaidExpenseAndOtherAssetsCurrent" xlink:label="us-gaap_PrepaidExpenseAndOtherAssetsCurrent_637638582521926959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsCurrentAbstract_637638582521926959" xlink:to="us-gaap_PrepaidExpenseAndOtherAssetsCurrent_637638582521926959" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AssetsCurrent" xlink:label="us-gaap_AssetsCurrent_637638582521926959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsCurrentAbstract_637638582521926959" xlink:to="us-gaap_AssetsCurrent_637638582521926959" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_PropertyPlantAndEquipmentNet" xlink:label="us-gaap_PropertyPlantAndEquipmentNet_637638582521926959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsAbstract_637638582521926959" xlink:to="us-gaap_PropertyPlantAndEquipmentNet_637638582521926959" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseRightOfUseAsset" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset_637638582521936960" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsAbstract_637638582521926959" xlink:to="us-gaap_OperatingLeaseRightOfUseAsset_637638582521936960" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseRightOfUseAsset" xlink:label="us-gaap_FinanceLeaseRightOfUseAsset_637638582521936960" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsAbstract_637638582521926959" xlink:to="us-gaap_FinanceLeaseRightOfUseAsset_637638582521936960" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RestrictedCashAndCashEquivalentsNoncurrent" xlink:label="us-gaap_RestrictedCashAndCashEquivalentsNoncurrent_637638582521936960" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsAbstract_637638582521926959" xlink:to="us-gaap_RestrictedCashAndCashEquivalentsNoncurrent_637638582521936960" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DeferredIncomeTaxAssetsNet" xlink:label="us-gaap_DeferredIncomeTaxAssetsNet_637638582521936960" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsAbstract_637638582521926959" xlink:to="us-gaap_DeferredIncomeTaxAssetsNet_637638582521936960" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OtherAssetsNoncurrent" xlink:label="us-gaap_OtherAssetsNoncurrent_637638582521936960" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsAbstract_637638582521926959" xlink:to="us-gaap_OtherAssetsNoncurrent_637638582521936960" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_Assets" xlink:label="us-gaap_Assets_637638582521936960" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AssetsAbstract_637638582521926959" xlink:to="us-gaap_Assets_637638582521936960" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LiabilitiesAndStockholdersEquityAbstract" xlink:label="us-gaap_LiabilitiesAndStockholdersEquityAbstract_637638582521936960" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfFinancialPositionAbstract" xlink:to="us-gaap_LiabilitiesAndStockholdersEquityAbstract_637638582521936960" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LiabilitiesCurrentAbstract" xlink:label="us-gaap_LiabilitiesCurrentAbstract_637638582521936960" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract_637638582521936960" xlink:to="us-gaap_LiabilitiesCurrentAbstract_637638582521936960" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccountsPayableCurrent" xlink:label="us-gaap_AccountsPayableCurrent_637638582521936960" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesCurrentAbstract_637638582521936960" xlink:to="us-gaap_AccountsPayableCurrent_637638582521936960" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EmployeeRelatedLiabilitiesCurrent" xlink:label="us-gaap_EmployeeRelatedLiabilitiesCurrent_637638582521936960" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesCurrentAbstract_637638582521936960" xlink:to="us-gaap_EmployeeRelatedLiabilitiesCurrent_637638582521936960" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="us-gaap_ProductWarrantyAccrualClassifiedCurrent_637638582521946952" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesCurrentAbstract_637638582521936960" xlink:to="us-gaap_ProductWarrantyAccrualClassifiedCurrent_637638582521946952" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccruedIncomeTaxesCurrent" xlink:label="us-gaap_AccruedIncomeTaxesCurrent_637638582521946952" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesCurrentAbstract_637638582521936960" xlink:to="us-gaap_AccruedIncomeTaxesCurrent_637638582521946952" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ContractWithCustomerLiabilityCurrent" xlink:label="us-gaap_ContractWithCustomerLiabilityCurrent_637638582521946952" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesCurrentAbstract_637638582521936960" xlink:to="us-gaap_ContractWithCustomerLiabilityCurrent_637638582521946952" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityCurrent" xlink:label="us-gaap_FinanceLeaseLiabilityCurrent_637638582521946952" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesCurrentAbstract_637638582521936960" xlink:to="us-gaap_FinanceLeaseLiabilityCurrent_637638582521946952" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OtherLiabilitiesCurrent" xlink:label="us-gaap_OtherLiabilitiesCurrent_637638582521946952" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesCurrentAbstract_637638582521936960" xlink:to="us-gaap_OtherLiabilitiesCurrent_637638582521946952" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LiabilitiesCurrent" xlink:label="us-gaap_LiabilitiesCurrent_637638582521946952" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesCurrentAbstract_637638582521936960" xlink:to="us-gaap_LiabilitiesCurrent_637638582521946952" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityNoncurrent" xlink:label="us-gaap_FinanceLeaseLiabilityNoncurrent_637638582521946952" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract_637638582521936960" xlink:to="us-gaap_FinanceLeaseLiabilityNoncurrent_637638582521946952" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ContractWithCustomerLiabilityNoncurrent" xlink:label="us-gaap_ContractWithCustomerLiabilityNoncurrent_637638582521946952" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract_637638582521936960" xlink:to="us-gaap_ContractWithCustomerLiabilityNoncurrent_637638582521946952" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OtherLiabilitiesNoncurrent" xlink:label="us-gaap_OtherLiabilitiesNoncurrent_637638582521946952" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract_637638582521936960" xlink:to="us-gaap_OtherLiabilitiesNoncurrent_637638582521946952" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_Liabilities" xlink:label="us-gaap_Liabilities_637638582521956947" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract_637638582521936960" xlink:to="us-gaap_Liabilities_637638582521956947" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CommitmentsAndContingencies" xlink:label="us-gaap_CommitmentsAndContingencies_637638582521956947" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract_637638582521936960" xlink:to="us-gaap_CommitmentsAndContingencies_637638582521956947" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockholdersEquityAbstract" xlink:label="us-gaap_StockholdersEquityAbstract_637638582521956947" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract_637638582521936960" xlink:to="us-gaap_StockholdersEquityAbstract_637638582521956947" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CommonStockValueOutstanding" xlink:label="us-gaap_CommonStockValueOutstanding_637638582521956947" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityAbstract_637638582521956947" xlink:to="us-gaap_CommonStockValueOutstanding_637638582521956947" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AdditionalPaidInCapital" xlink:label="us-gaap_AdditionalPaidInCapital_637638582521956947" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityAbstract_637638582521956947" xlink:to="us-gaap_AdditionalPaidInCapital_637638582521956947" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RetainedEarningsAccumulatedDeficit" xlink:label="us-gaap_RetainedEarningsAccumulatedDeficit_637638582521956947" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityAbstract_637638582521956947" xlink:to="us-gaap_RetainedEarningsAccumulatedDeficit_637638582521956947" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_637638582521956947" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityAbstract_637638582521956947" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_637638582521956947" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockholdersEquity" xlink:label="us-gaap_StockholdersEquity_637638582521966947" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityAbstract_637638582521956947" xlink:to="us-gaap_StockholdersEquity_637638582521966947" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LiabilitiesAndStockholdersEquity" xlink:label="us-gaap_LiabilitiesAndStockholdersEquity_637638582521966947" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LiabilitiesAndStockholdersEquityAbstract_637638582521936960" xlink:to="us-gaap_LiabilitiesAndStockholdersEquity_637638582521966947" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/StatementConsolidatedBalanceSheetsParenthetical" xlink:type="extended" xlink:title="00305 - Statement - Consolidated Balance Sheets (Parenthetical)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StatementOfFinancialPositionAbstract" xlink:label="us-gaap_StatementOfFinancialPositionAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CommonStockParOrStatedValuePerShare" xlink:label="us-gaap_CommonStockParOrStatedValuePerShare_637638582521966947" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfFinancialPositionAbstract" xlink:to="us-gaap_CommonStockParOrStatedValuePerShare_637638582521966947" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CommonStockSharesAuthorized" xlink:label="us-gaap_CommonStockSharesAuthorized_637638582521966947" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfFinancialPositionAbstract" xlink:to="us-gaap_CommonStockSharesAuthorized_637638582521966947" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CommonStockSharesIssued" xlink:label="us-gaap_CommonStockSharesIssued_637638582521966947" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfFinancialPositionAbstract" xlink:to="us-gaap_CommonStockSharesIssued_637638582521966947" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CommonStockSharesOutstanding" xlink:label="us-gaap_CommonStockSharesOutstanding_637638582521966947" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfFinancialPositionAbstract" xlink:to="us-gaap_CommonStockSharesOutstanding_637638582521966947" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity" xlink:type="extended" xlink:title="00400 - Statement - Consolidated Statements of Stockholders' Equity" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StatementOfStockholdersEquityAbstract" xlink:label="us-gaap_StatementOfStockholdersEquityAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StatementTable" xlink:label="us-gaap_StatementTable_637638582521976959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfStockholdersEquityAbstract" xlink:to="us-gaap_StatementTable_637638582521976959" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StatementEquityComponentsAxis" xlink:label="us-gaap_StatementEquityComponentsAxis_637638582521976959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementTable_637638582521976959" xlink:to="us-gaap_StatementEquityComponentsAxis_637638582521976959" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CommonStockMember" xlink:label="us-gaap_CommonStockMember_637638582521976959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementEquityComponentsAxis_637638582521976959" xlink:to="us-gaap_CommonStockMember_637638582521976959" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AdditionalPaidInCapitalMember" xlink:label="us-gaap_AdditionalPaidInCapitalMember_637638582521976959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementEquityComponentsAxis_637638582521976959" xlink:to="us-gaap_AdditionalPaidInCapitalMember_637638582521976959" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RetainedEarningsMember" xlink:label="us-gaap_RetainedEarningsMember_637638582521976959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementEquityComponentsAxis_637638582521976959" xlink:to="us-gaap_RetainedEarningsMember_637638582521976959" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeMember" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeMember_637638582521976959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementEquityComponentsAxis_637638582521976959" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeMember_637638582521976959" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EquityComponentDomain" xlink:label="us-gaap_EquityComponentDomain_637638582521976959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementEquityComponentsAxis_637638582521976959" xlink:to="us-gaap_EquityComponentDomain_637638582521976959" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StatementLineItems" xlink:label="us-gaap_StatementLineItems_637638582521976959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementTable_637638582521976959" xlink:to="us-gaap_StatementLineItems_637638582521976959" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncreaseDecreaseInStockholdersEquityRollForward" xlink:label="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_637638582521976959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_637638582521976959" xlink:to="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_637638582521976959" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_SharesOutstanding" xlink:label="us-gaap_SharesOutstanding_637638582521976959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_637638582521976959" xlink:to="us-gaap_SharesOutstanding_637638582521976959" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockholdersEquity" xlink:label="us-gaap_StockholdersEquity_637638582521976959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_637638582521976959" xlink:to="us-gaap_StockholdersEquity_637638582521976959" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_637638582521976959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_637638582521976959" xlink:to="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_637638582521976959" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_637638582521986954" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_637638582521976959" xlink:to="us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent_637638582521986954" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent" xlink:label="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent_637638582521986954" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_637638582521976959" xlink:to="us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent_637638582521986954" order="5" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedTerseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" xlink:label="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_637638582521986954" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_637638582521976959" xlink:to="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_637638582521986954" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised" xlink:label="us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised_637638582521986954" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_637638582521976959" xlink:to="us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised_637638582521986954" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans" xlink:label="us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans_637638582521986954" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_637638582521976959" xlink:to="us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans_637638582521986954" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan" xlink:label="us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan_637638582521986954" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_637638582521976959" xlink:to="us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan_637638582521986954" order="9" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures" xlink:label="us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures_637638582521986954" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_637638582521976959" xlink:to="us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures_637638582521986954" order="10" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures" xlink:label="us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures_637638582521986954" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_637638582521976959" xlink:to="us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures_637638582521986954" order="11" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue" xlink:label="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue_637638582521986954" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_637638582521976959" xlink:to="us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue_637638582521986954" order="12" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockRepurchasedDuringPeriodShares" xlink:label="us-gaap_StockRepurchasedDuringPeriodShares_637638582521986954" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_637638582521976959" xlink:to="us-gaap_StockRepurchasedDuringPeriodShares_637638582521986954" order="13" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="9" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockRepurchasedDuringPeriodValue" xlink:label="us-gaap_StockRepurchasedDuringPeriodValue_637638582521996945" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_637638582521976959" xlink:to="us-gaap_StockRepurchasedDuringPeriodValue_637638582521996945" order="14" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_SharesOutstanding" xlink:label="us-gaap_SharesOutstanding_637638582521996945" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_637638582521976959" xlink:to="us-gaap_SharesOutstanding_637638582521996945" order="15" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockholdersEquity" xlink:label="us-gaap_StockholdersEquity_637638582521996945" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInStockholdersEquityRollForward_637638582521976959" xlink:to="us-gaap_StockholdersEquity_637638582521996945" order="16" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows" xlink:type="extended" xlink:title="00500 - Statement - Consolidated Statements of Cash Flows" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StatementOfCashFlowsAbstract" xlink:label="us-gaap_StatementOfCashFlowsAbstract_635454452258798540" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_637638582521996945" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfCashFlowsAbstract_635454452258798540" xlink:to="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_637638582521996945" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProfitLoss" xlink:label="us-gaap_ProfitLoss_637638582521996945" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_637638582521996945" xlink:to="us-gaap_ProfitLoss_637638582521996945" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract" xlink:label="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_637638582522006968" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_637638582521996945" xlink:to="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_637638582522006968" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DepreciationDepletionAndAmortization" xlink:label="us-gaap_DepreciationDepletionAndAmortization_637638582522006968" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_637638582522006968" xlink:to="us-gaap_DepreciationDepletionAndAmortization_637638582522006968" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DeferredIncomeTaxExpenseBenefit" xlink:label="us-gaap_DeferredIncomeTaxExpenseBenefit_637638582522006968" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_637638582522006968" xlink:to="us-gaap_DeferredIncomeTaxExpenseBenefit_637638582522006968" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ShareBasedCompensation" xlink:label="us-gaap_ShareBasedCompensation_637638582522006968" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_637638582522006968" xlink:to="us-gaap_ShareBasedCompensation_637638582522006968" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InventoryWriteDown" xlink:label="us-gaap_InventoryWriteDown_637638582522006968" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract_637638582522006968" xlink:to="us-gaap_InventoryWriteDown_637638582522006968" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncreaseDecreaseInOperatingCapitalAbstract" xlink:label="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_637638582522006968" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_637638582521996945" xlink:to="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_637638582522006968" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncreaseDecreaseInAccountsReceivable" xlink:label="us-gaap_IncreaseDecreaseInAccountsReceivable_637638582522006968" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_637638582522006968" xlink:to="us-gaap_IncreaseDecreaseInAccountsReceivable_637638582522006968" order="1" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncreaseDecreaseInInventories" xlink:label="us-gaap_IncreaseDecreaseInInventories_637638582522006968" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_637638582522006968" xlink:to="us-gaap_IncreaseDecreaseInInventories_637638582522006968" order="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets" xlink:label="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_637638582522006968" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_637638582522006968" xlink:to="us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets_637638582522006968" order="3" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities" xlink:label="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities_637638582522006968" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_637638582522006968" xlink:to="us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities_637638582522006968" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncreaseDecreaseInContractWithCustomerLiability" xlink:label="us-gaap_IncreaseDecreaseInContractWithCustomerLiability_637638582522006968" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_637638582522006968" xlink:to="us-gaap_IncreaseDecreaseInContractWithCustomerLiability_637638582522006968" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable" xlink:label="us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_637638582522006968" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_637638582522006968" xlink:to="us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable_637638582522006968" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet" xlink:label="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet_637638582522006968" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncreaseDecreaseInOperatingCapitalAbstract_637638582522006968" xlink:to="us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet_637638582522006968" order="7" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NetCashProvidedByUsedInOperatingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInOperatingActivities_637638582522016950" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract_637638582521996945" xlink:to="us-gaap_NetCashProvidedByUsedInOperatingActivities_637638582522016950" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_637638582522016950" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfCashFlowsAbstract_635454452258798540" xlink:to="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_637638582522016950" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_PaymentsToAcquirePropertyPlantAndEquipment" xlink:label="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_637638582522016950" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_637638582522016950" xlink:to="us-gaap_PaymentsToAcquirePropertyPlantAndEquipment_637638582522016950" order="1" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NetCashProvidedByUsedInInvestingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInInvestingActivities_637638582522016950" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract_637638582522016950" xlink:to="us-gaap_NetCashProvidedByUsedInInvestingActivities_637638582522016950" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_637638582522016950" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfCashFlowsAbstract_635454452258798540" xlink:to="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_637638582522016950" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_RepaymentOfNetSettlementOnRestrictedStockGrants" xlink:label="acls_RepaymentOfNetSettlementOnRestrictedStockGrants_637638582522016950" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_637638582522016950" xlink:to="acls_RepaymentOfNetSettlementOnRestrictedStockGrants_637638582522016950" order="1" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_PaymentsForRepurchaseOfCommonStock" xlink:label="us-gaap_PaymentsForRepurchaseOfCommonStock_637638582522016950" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_637638582522016950" xlink:to="us-gaap_PaymentsForRepurchaseOfCommonStock_637638582522016950" order="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProceedsFromStockPlans" xlink:label="us-gaap_ProceedsFromStockPlans_637638582522016950" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_637638582522016950" xlink:to="us-gaap_ProceedsFromStockPlans_637638582522016950" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeasePrincipalPayments" xlink:label="us-gaap_FinanceLeasePrincipalPayments_637638582522016950" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_637638582522016950" xlink:to="us-gaap_FinanceLeasePrincipalPayments_637638582522016950" order="4" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProceedsFromStockOptionsExercised" xlink:label="us-gaap_ProceedsFromStockOptionsExercised_637638582522026953" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_637638582522016950" xlink:to="us-gaap_ProceedsFromStockOptionsExercised_637638582522026953" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NetCashProvidedByUsedInFinancingActivities" xlink:label="us-gaap_NetCashProvidedByUsedInFinancingActivities_637638582522026953" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract_637638582522016950" xlink:to="us-gaap_NetCashProvidedByUsedInFinancingActivities_637638582522026953" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:label="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_637638582522026953" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfCashFlowsAbstract_635454452258798540" xlink:to="us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_637638582522026953" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect_637638582522026953" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfCashFlowsAbstract_635454452258798540" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect_637638582522026953" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_637638582522026953" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfCashFlowsAbstract_635454452258798540" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_637638582522026953" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_6376385825220269531" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementOfCashFlowsAbstract_635454452258798540" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_6376385825220269531" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureNatureOfBusiness" xlink:type="extended" xlink:title="10101 - Disclosure - Nature of Business" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock" xlink:label="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock_637638582522036953" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract" xlink:to="us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock_637638582522036953" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureStockBasedCompensation" xlink:type="extended" xlink:title="10201 - Disclosure - Stock Based Compensation" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock_637638582522036953" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock_637638582522036953" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureLeases" xlink:type="extended" xlink:title="10301 - Disclosure - Leases" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LeasesAbstract" xlink:label="us-gaap_LeasesAbstract" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LeaseDisclosureTextBlock" xlink:label="acls_LeaseDisclosureTextBlock_637638582522036953" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="acls_LeaseDisclosureTextBlock_637638582522036953" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureRevenue" xlink:type="extended" xlink:title="10401 - Disclosure - Revenue" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RevenueFromContractWithCustomerAbstract" xlink:label="us-gaap_RevenueFromContractWithCustomerAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RevenueFromContractWithCustomerTextBlock" xlink:label="us-gaap_RevenueFromContractWithCustomerTextBlock_637638582522036953" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenueFromContractWithCustomerAbstract" xlink:to="us-gaap_RevenueFromContractWithCustomerTextBlock_637638582522036953" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureReceivableAndAllowanceForCreditLosses" xlink:type="extended" xlink:title="10501 - Disclosure - Receivable and Allowance for Credit Losses" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccountsReceivableNetAbstract" xlink:label="us-gaap_AccountsReceivableNetAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock" xlink:label="us-gaap_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock_637638582522046959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountsReceivableNetAbstract" xlink:to="us-gaap_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock_637638582522046959" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="5" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShare" xlink:type="extended" xlink:title="10601 - Disclosure - Computation of Net Earnings per Share" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="us-gaap_EarningsPerShareAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EarningsPerShareTextBlock" xlink:label="us-gaap_EarningsPerShareTextBlock_637638582522046959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareAbstract" xlink:to="us-gaap_EarningsPerShareTextBlock_637638582522046959" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveIncome" xlink:type="extended" xlink:title="10701 - Disclosure - Accumulated Other Comprehensive Income" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTaxAbstract" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTaxAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ComprehensiveIncomeNoteTextBlock" xlink:label="us-gaap_ComprehensiveIncomeNoteTextBlock_637638582522046959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTaxAbstract" xlink:to="us-gaap_ComprehensiveIncomeNoteTextBlock_637638582522046959" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCash" xlink:type="extended" xlink:title="10801 - Disclosure - Cash, cash equivalents and restricted cash" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_CashCashEquivalentsAndRestrictedCashAbstract" xlink:label="acls_CashCashEquivalentsAndRestrictedCashAbstract" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_CashCashEquivalentsAndRestrictedCashTextBlock" xlink:label="acls_CashCashEquivalentsAndRestrictedCashTextBlock_637638582522046959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_CashCashEquivalentsAndRestrictedCashAbstract" xlink:to="acls_CashCashEquivalentsAndRestrictedCashTextBlock_637638582522046959" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureInventoriesNet" xlink:type="extended" xlink:title="10901 - Disclosure - Inventories, net" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InventoryDisclosureAbstract" xlink:label="us-gaap_InventoryDisclosureAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InventoryDisclosureTextBlock" xlink:label="us-gaap_InventoryDisclosureTextBlock_637638582522056957" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryDisclosureAbstract" xlink:to="us-gaap_InventoryDisclosureTextBlock_637638582522056957" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureProductWarranty" xlink:type="extended" xlink:title="11001 - Disclosure - Product Warranty" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProductWarrantiesDisclosuresAbstract" xlink:label="us-gaap_ProductWarrantiesDisclosuresAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProductWarrantyDisclosureTextBlock" xlink:label="us-gaap_ProductWarrantyDisclosureTextBlock_637638582522056957" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ProductWarrantiesDisclosuresAbstract" xlink:to="us-gaap_ProductWarrantyDisclosureTextBlock_637638582522056957" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureFairValueMeasurements" xlink:type="extended" xlink:title="11101 - Disclosure - Fair Value Measurements" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueDisclosuresAbstract" xlink:label="us-gaap_FairValueDisclosuresAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueDisclosuresTextBlock" xlink:label="us-gaap_FairValueDisclosuresTextBlock_637638582522056957" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueDisclosuresAbstract" xlink:to="us-gaap_FairValueDisclosuresTextBlock_637638582522056957" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureFinancingArrangements" xlink:type="extended" xlink:title="11201 - Disclosure - Financing Arrangements" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="us-gaap_DebtDisclosureAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DebtDisclosureTextBlock" xlink:label="us-gaap_DebtDisclosureTextBlock_637638582522056957" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtDisclosureAbstract" xlink:to="us-gaap_DebtDisclosureTextBlock_637638582522056957" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureIncomeTaxes" xlink:type="extended" xlink:title="11301 - Disclosure - Income Taxes" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="us-gaap_IncomeTaxDisclosureAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncomeTaxDisclosureTextBlock" xlink:label="us-gaap_IncomeTaxDisclosureTextBlock_637638582522056957" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="us-gaap_IncomeTaxDisclosureTextBlock_637638582522056957" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureConcentrationOfRisk" xlink:type="extended" xlink:title="11401 - Disclosure - Concentration of Risk" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RisksAndUncertaintiesAbstract" xlink:label="us-gaap_RisksAndUncertaintiesAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ConcentrationRiskDisclosureTextBlock" xlink:label="us-gaap_ConcentrationRiskDisclosureTextBlock_637638582522056957" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RisksAndUncertaintiesAbstract" xlink:to="us-gaap_ConcentrationRiskDisclosureTextBlock_637638582522056957" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureShareRepurchase" xlink:type="extended" xlink:title="11501 - Disclosure - Share Repurchase" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockholdersEquityNoteAbstract" xlink:label="us-gaap_StockholdersEquityNoteAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockholdersEquityNoteDisclosureTextBlock" xlink:label="us-gaap_StockholdersEquityNoteDisclosureTextBlock_637638582522066957" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityNoteAbstract" xlink:to="us-gaap_StockholdersEquityNoteDisclosureTextBlock_637638582522066957" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="5" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureContingencies" xlink:type="extended" xlink:title="11601 - Disclosure - Contingencies" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CommitmentsAndContingenciesDisclosureTextBlock" xlink:label="us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_637638582522066957" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CommitmentsAndContingenciesDisclosureAbstract" xlink:to="us-gaap_CommitmentsAndContingenciesDisclosureTextBlock_637638582522066957" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureRecentAccountingGuidance" xlink:type="extended" xlink:title="11701 - Disclosure - Recent Accounting Guidance" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccountingPoliciesAbstract" xlink:label="us-gaap_AccountingPoliciesAbstract_637441634148557871" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock" xlink:label="us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock_637638582522066957" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountingPoliciesAbstract_637441634148557871" xlink:to="us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock_637638582522066957" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureLeasesTables" xlink:type="extended" xlink:title="30303 - Disclosure - Leases (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LeasesAbstract" xlink:label="us-gaap_LeasesAbstract" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LeaseBalanceSheetDisclosureTableTextBlock" xlink:label="acls_LeaseBalanceSheetDisclosureTableTextBlock_637638582522066957" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="acls_LeaseBalanceSheetDisclosureTableTextBlock_637638582522066957" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LeaseCostTableTextBlock" xlink:label="us-gaap_LeaseCostTableTextBlock_637638582522076960" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_LeaseCostTableTextBlock_637638582522076960" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock" xlink:label="acls_OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock_637638582522076960" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="acls_OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock_637638582522076960" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LeaseQuantitativeDisclosureTableTextBlock" xlink:label="acls_LeaseQuantitativeDisclosureTableTextBlock_637638582522076960" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="acls_LeaseQuantitativeDisclosureTableTextBlock_637638582522076960" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LeaseCashFlowInformationDisclosureTableTextBlock" xlink:label="acls_LeaseCashFlowInformationDisclosureTableTextBlock_637638582522076960" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="acls_LeaseCashFlowInformationDisclosureTableTextBlock_637638582522076960" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureRevenueTables" xlink:type="extended" xlink:title="30403 - Disclosure - Revenue (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RevenueFromContractWithCustomerAbstract" xlink:label="us-gaap_RevenueFromContractWithCustomerAbstract" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_RevenueFromExternalCustomersByDisciplineAreasTableTextBlock" xlink:label="acls_RevenueFromExternalCustomersByDisciplineAreasTableTextBlock_637638582522076960" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenueFromContractWithCustomerAbstract" xlink:to="acls_RevenueFromExternalCustomersByDisciplineAreasTableTextBlock_637638582522076960" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RevenueFromExternalCustomersByGeographicAreasTableTextBlock" xlink:label="us-gaap_RevenueFromExternalCustomersByGeographicAreasTableTextBlock_637638582522076960" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenueFromContractWithCustomerAbstract" xlink:to="us-gaap_RevenueFromExternalCustomersByGeographicAreasTableTextBlock_637638582522076960" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock" xlink:label="us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock_637638582522076960" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenueFromContractWithCustomerAbstract" xlink:to="us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock_637638582522076960" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureReceivableAndAllowanceForCreditLossesTables" xlink:type="extended" xlink:title="30503 - Disclosure - Receivable and Allowance for Credit Losses (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccountsReceivableNetAbstract" xlink:label="us-gaap_AccountsReceivableNetAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccountsReceivableAllowanceForCreditLossTableTextBlock" xlink:label="us-gaap_AccountsReceivableAllowanceForCreditLossTableTextBlock_637638582522076960" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountsReceivableNetAbstract" xlink:to="us-gaap_AccountsReceivableAllowanceForCreditLossTableTextBlock_637638582522076960" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShareTables" xlink:type="extended" xlink:title="30603 - Disclosure - Computation of Net Earnings per Share (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="us-gaap_EarningsPerShareAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock" xlink:label="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_637638582522086958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareAbstract" xlink:to="us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock_637638582522086958" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveIncomeTables" xlink:type="extended" xlink:title="30703 - Disclosure - Accumulated Other Comprehensive Income (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTaxAbstract" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTaxAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock" xlink:label="us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock_637638582522086958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTaxAbstract" xlink:to="us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock_637638582522086958" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashTables" xlink:type="extended" xlink:title="30803 - Disclosure - Cash, cash equivalents and restricted cash (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_CashCashEquivalentsAndRestrictedCashAbstract" xlink:label="acls_CashCashEquivalentsAndRestrictedCashAbstract" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_CashCashEquivalentsAndRestrictedCashTableTextBlock" xlink:label="acls_CashCashEquivalentsAndRestrictedCashTableTextBlock_637638582522086958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_CashCashEquivalentsAndRestrictedCashAbstract" xlink:to="acls_CashCashEquivalentsAndRestrictedCashTableTextBlock_637638582522086958" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureInventoriesNetTables" xlink:type="extended" xlink:title="30903 - Disclosure - Inventories, net (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InventoryDisclosureAbstract" xlink:label="us-gaap_InventoryDisclosureAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ScheduleOfInventoryCurrentTableTextBlock" xlink:label="us-gaap_ScheduleOfInventoryCurrentTableTextBlock_637638582522086958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryDisclosureAbstract" xlink:to="us-gaap_ScheduleOfInventoryCurrentTableTextBlock_637638582522086958" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureProductWarrantyTables" xlink:type="extended" xlink:title="31003 - Disclosure - Product Warranty (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProductWarrantiesDisclosuresAbstract" xlink:label="us-gaap_ProductWarrantiesDisclosuresAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock" xlink:label="us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_637638582522086958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ProductWarrantiesDisclosuresAbstract" xlink:to="us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock_637638582522086958" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureFairValueMeasurementsTables" xlink:type="extended" xlink:title="31103 - Disclosure - Fair Value Measurements (Tables)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueDisclosuresAbstract" xlink:label="us-gaap_FairValueDisclosuresAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock" xlink:label="us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock_637638582522096955" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueDisclosuresAbstract" xlink:to="us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock_637638582522096955" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureStockBasedCompensationDetails" xlink:type="extended" xlink:title="40201 - Disclosure - Stock-Based Compensation (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:label="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable" xlink:label="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_637638582522096955" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract" xlink:to="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_637638582522096955" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_PlanNameAxis" xlink:label="us-gaap_PlanNameAxis_637638582522096955" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_637638582522096955" xlink:to="us-gaap_PlanNameAxis_637638582522096955" order="1" use="optional" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_PlanNameDomain" xlink:label="us-gaap_PlanNameDomain_637638582522096955" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PlanNameAxis_637638582522096955" xlink:to="us-gaap_PlanNameDomain_637638582522096955" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_StockPlan2000Member" xlink:label="acls_StockPlan2000Member_637638582522096955" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PlanNameDomain_637638582522096955" xlink:to="acls_StockPlan2000Member_637638582522096955" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StatementEquityComponentsAxis" xlink:label="us-gaap_StatementEquityComponentsAxis_637638582522096955" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_637638582522096955" xlink:to="us-gaap_StatementEquityComponentsAxis_637638582522096955" order="2" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EquityComponentDomain" xlink:label="us-gaap_EquityComponentDomain_637638582522096955" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementEquityComponentsAxis_637638582522096955" xlink:to="us-gaap_EquityComponentDomain_637638582522096955" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CommonStockMember" xlink:label="us-gaap_CommonStockMember_637638582522096955" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EquityComponentDomain_637638582522096955" xlink:to="us-gaap_CommonStockMember_637638582522096955" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AwardTypeAxis" xlink:label="us-gaap_AwardTypeAxis_637638582522096955" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_637638582522096955" xlink:to="us-gaap_AwardTypeAxis_637638582522096955" order="3" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain" xlink:label="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_637638582522106970" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AwardTypeAxis_637638582522096955" xlink:to="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_637638582522106970" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EmployeeStockMember" xlink:label="us-gaap_EmployeeStockMember_637638582522106970" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_637638582522106970" xlink:to="us-gaap_EmployeeStockMember_637638582522106970" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_StockOptionAwardsMember" xlink:label="acls_StockOptionAwardsMember_637638582522106970" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain_637638582522106970" xlink:to="acls_StockOptionAwardsMember_637638582522106970" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems" xlink:label="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_637638582522106970" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable_637638582522096955" xlink:to="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_637638582522106970" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardGrantsInPeriodGross" xlink:label="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardGrantsInPeriodGross_637638582522106970" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_637638582522106970" xlink:to="acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardGrantsInPeriodGross_637638582522106970" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod" xlink:label="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_637638582522106970" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_637638582522106970" xlink:to="us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod_637638582522106970" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AllocatedShareBasedCompensationExpense" xlink:label="us-gaap_AllocatedShareBasedCompensationExpense_637638582522106970" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_637638582522106970" xlink:to="us-gaap_AllocatedShareBasedCompensationExpense_637638582522106970" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised" xlink:label="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_637638582522106970" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_637638582522106970" xlink:to="us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised_637638582522106970" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProceedsFromStockOptionsExercised" xlink:label="us-gaap_ProceedsFromStockOptionsExercised_637638582522106970" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems_637638582522106970" xlink:to="us-gaap_ProceedsFromStockOptionsExercised_637638582522106970" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureLeasesDetails" xlink:type="extended" xlink:title="40301 - Disclosure - Leases (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LeasesAbstract" xlink:label="us-gaap_LeasesAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeLeaseDescriptionTable" xlink:label="us-gaap_LesseeLeaseDescriptionTable_637638582522116962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_LesseeLeaseDescriptionTable_637638582522116962" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis_637638582522116962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LesseeLeaseDescriptionTable_637638582522116962" xlink:to="srt_RangeAxis_637638582522116962" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_RangeMember" xlink:label="srt_RangeMember_637638582522116962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeAxis_637638582522116962" xlink:to="srt_RangeMember_637638582522116962" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember_637638582522116962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_637638582522116962" xlink:to="srt_MinimumMember_637638582522116962" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember_637638582522116962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_637638582522116962" xlink:to="srt_MaximumMember_637638582522116962" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeLeaseDescriptionLineItems" xlink:label="us-gaap_LesseeLeaseDescriptionLineItems_637638582522116962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LesseeLeaseDescriptionTable_637638582522116962" xlink:to="us-gaap_LesseeLeaseDescriptionLineItems_637638582522116962" order="2" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseRenewalTerm" xlink:label="us-gaap_LesseeOperatingLeaseRenewalTerm_637638582522116962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems_637638582522116962" xlink:to="us-gaap_LesseeOperatingLeaseRenewalTerm_637638582522116962" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend" xlink:label="us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend_637638582522116962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems_637638582522116962" xlink:to="us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend_637638582522116962" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails" xlink:type="extended" xlink:title="40302 - Disclosure - Leases - Operating and Finance Lease Right-of-use-assets and Related Lease Obligations (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LeasesAbstract" xlink:label="us-gaap_LeasesAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseRightOfUseAsset" xlink:label="us-gaap_OperatingLeaseRightOfUseAsset_637638582522116962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_OperatingLeaseRightOfUseAsset_637638582522116962" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList" xlink:label="us-gaap_OperatingLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList_637638582522116962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseRightOfUseAsset_637638582522116962" xlink:to="us-gaap_OperatingLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList_637638582522116962" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseRightOfUseAsset" xlink:label="us-gaap_FinanceLeaseRightOfUseAsset_637638582522116962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_FinanceLeaseRightOfUseAsset_637638582522116962" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList" xlink:label="us-gaap_FinanceLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList_637638582522126958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinanceLeaseRightOfUseAsset_637638582522116962" xlink:to="us-gaap_FinanceLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList_637638582522126958" order="1" use="optional" priority="3" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_OperatingAndFinanceLeaseRightOfUseAsset" xlink:label="acls_OperatingAndFinanceLeaseRightOfUseAsset_637638582522126958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="acls_OperatingAndFinanceLeaseRightOfUseAsset_637638582522126958" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseLiabilityCurrent" xlink:label="us-gaap_OperatingLeaseLiabilityCurrent_637638582522126958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_OperatingLeaseLiabilityCurrent_637638582522126958" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList" xlink:label="us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList_637638582522126958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilityCurrent_637638582522126958" xlink:to="us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList_637638582522126958" order="1" use="optional" priority="3" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityCurrent" xlink:label="us-gaap_FinanceLeaseLiabilityCurrent_637638582522126958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_FinanceLeaseLiabilityCurrent_637638582522126958" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList" xlink:label="us-gaap_FinanceLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList_637638582522126958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinanceLeaseLiabilityCurrent_637638582522126958" xlink:to="us-gaap_FinanceLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList_637638582522126958" order="1" use="optional" priority="3" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseLiabilityNoncurrent" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrent_637638582522126958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_OperatingLeaseLiabilityNoncurrent_637638582522126958" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList" xlink:label="us-gaap_OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList_637638582522126958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilityNoncurrent_637638582522126958" xlink:to="us-gaap_OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList_637638582522126958" order="1" use="optional" priority="3" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityNoncurrent" xlink:label="us-gaap_FinanceLeaseLiabilityNoncurrent_637638582522126958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_FinanceLeaseLiabilityNoncurrent_637638582522126958" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList" xlink:label="us-gaap_FinanceLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList_637638582522126958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinanceLeaseLiabilityNoncurrent_637638582522126958" xlink:to="us-gaap_FinanceLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList_637638582522126958" order="1" use="optional" priority="3" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_OperatingAndFinanceLeaseLiability" xlink:label="acls_OperatingAndFinanceLeaseLiability_637638582522126958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="acls_OperatingAndFinanceLeaseLiability_637638582522126958" order="8" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList" xlink:label="us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList_637638582522126958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_OperatingAndFinanceLeaseLiability_637638582522126958" xlink:to="us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList_637638582522126958" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_FinanceLeaseAccumulatedDepreciation" xlink:label="acls_FinanceLeaseAccumulatedDepreciation_637638582522136949" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="acls_FinanceLeaseAccumulatedDepreciation_637638582522136949" order="9" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_PrepaidRent" xlink:label="us-gaap_PrepaidRent_637638582522136949" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_PrepaidRent_637638582522136949" order="10" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails" xlink:type="extended" xlink:title="40303 - Disclosure - Leases - Lease Cost (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LeasesAbstract" xlink:label="us-gaap_LeasesAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeLeaseDescriptionTable" xlink:label="us-gaap_LesseeLeaseDescriptionTable_637638582522136949" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_LesseeLeaseDescriptionTable_637638582522136949" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncomeStatementLocationAxis" xlink:label="us-gaap_IncomeStatementLocationAxis_637638582522136949" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LesseeLeaseDescriptionTable_637638582522136949" xlink:to="us-gaap_IncomeStatementLocationAxis_637638582522136949" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncomeStatementLocationDomain" xlink:label="us-gaap_IncomeStatementLocationDomain_637638582522136949" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementLocationAxis_637638582522136949" xlink:to="us-gaap_IncomeStatementLocationDomain_637638582522136949" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ServiceMember" xlink:label="us-gaap_ServiceMember_637638582522136949" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementLocationDomain_637638582522136949" xlink:to="us-gaap_ServiceMember_637638582522136949" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ResearchAndDevelopmentExpenseMember" xlink:label="us-gaap_ResearchAndDevelopmentExpenseMember_637638582522136949" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementLocationDomain_637638582522136949" xlink:to="us-gaap_ResearchAndDevelopmentExpenseMember_637638582522136949" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_SellingAndMarketingExpenseMember" xlink:label="us-gaap_SellingAndMarketingExpenseMember_637638582522136949" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementLocationDomain_637638582522136949" xlink:to="us-gaap_SellingAndMarketingExpenseMember_637638582522136949" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_GeneralAndAdministrativeExpenseMember" xlink:label="us-gaap_GeneralAndAdministrativeExpenseMember_637638582522136949" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeStatementLocationDomain_637638582522136949" xlink:to="us-gaap_GeneralAndAdministrativeExpenseMember_637638582522136949" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeLeaseDescriptionLineItems" xlink:label="us-gaap_LesseeLeaseDescriptionLineItems_637638582522136949" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LesseeLeaseDescriptionTable_637638582522136949" xlink:to="us-gaap_LesseeLeaseDescriptionLineItems_637638582522136949" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LeaseCostAbstract" xlink:label="us-gaap_LeaseCostAbstract_637638582522136949" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems_637638582522136949" xlink:to="us-gaap_LeaseCostAbstract_637638582522136949" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseCost" xlink:label="us-gaap_OperatingLeaseCost_637638582522146961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeaseCostAbstract_637638582522136949" xlink:to="us-gaap_OperatingLeaseCost_637638582522146961" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseRightOfUseAssetAmortization" xlink:label="us-gaap_FinanceLeaseRightOfUseAssetAmortization_637638582522146961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeaseCostAbstract_637638582522136949" xlink:to="us-gaap_FinanceLeaseRightOfUseAssetAmortization_637638582522146961" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseInterestExpense" xlink:label="us-gaap_FinanceLeaseInterestExpense_637638582522146961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeaseCostAbstract_637638582522136949" xlink:to="us-gaap_FinanceLeaseInterestExpense_637638582522146961" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_FinanceLeaseCost" xlink:label="acls_FinanceLeaseCost_637638582522146961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeaseCostAbstract_637638582522136949" xlink:to="acls_FinanceLeaseCost_637638582522146961" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LeaseCost" xlink:label="us-gaap_LeaseCost_637638582522146961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeaseCostAbstract_637638582522136949" xlink:to="us-gaap_LeaseCost_637638582522146961" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_ShortTermAndVariableLeaseCost" xlink:label="acls_ShortTermAndVariableLeaseCost_637638582522146961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeaseCostAbstract_637638582522136949" xlink:to="acls_ShortTermAndVariableLeaseCost_637638582522146961" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails" xlink:type="extended" xlink:title="40304 - Disclosure - Leases - Future Minimum Cash Outflow and Weighted-average Remaining Lease Term and Discount Rate (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LeasesAbstract" xlink:label="us-gaap_LeasesAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeLeaseDescriptionTable" xlink:label="us-gaap_LesseeLeaseDescriptionTable_637638582522146961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_LesseeLeaseDescriptionTable_637638582522146961" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis_637638582522146961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LesseeLeaseDescriptionTable_637638582522146961" xlink:to="srt_RangeAxis_637638582522146961" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_RangeMember" xlink:label="srt_RangeMember_637638582522146961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeAxis_637638582522146961" xlink:to="srt_RangeMember_637638582522146961" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember_637638582522156962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_637638582522146961" xlink:to="srt_MinimumMember_637638582522156962" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember_637638582522156962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_637638582522146961" xlink:to="srt_MaximumMember_637638582522156962" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeLeaseDescriptionLineItems" xlink:label="us-gaap_LesseeLeaseDescriptionLineItems_637638582522156962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LesseeLeaseDescriptionTable_637638582522146961" xlink:to="us-gaap_LesseeLeaseDescriptionLineItems_637638582522156962" order="2" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract" xlink:label="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract_637638582522156962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems_637638582522156962" xlink:to="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract_637638582522156962" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityPaymentsRemainderOfFiscalYear" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsRemainderOfFiscalYear_637638582522156962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract_637638582522156962" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsRemainderOfFiscalYear_637638582522156962" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths_637638582522156962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract_637638582522156962" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths_637638582522156962" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo_637638582522156962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract_637638582522156962" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo_637638582522156962" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree_637638582522156962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract_637638582522156962" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree_637638582522156962" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour_637638582522156962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract_637638582522156962" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour_637638582522156962" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_FinanceLeaseLiabilityPaymentsDueAfterYearFour" xlink:label="acls_FinanceLeaseLiabilityPaymentsDueAfterYearFour_637638582522156962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract_637638582522156962" xlink:to="acls_FinanceLeaseLiabilityPaymentsDueAfterYearFour_637638582522156962" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityPaymentsDue" xlink:label="us-gaap_FinanceLeaseLiabilityPaymentsDue_637638582522156962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract_637638582522156962" xlink:to="us-gaap_FinanceLeaseLiabilityPaymentsDue_637638582522156962" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount" xlink:label="us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount_637638582522156962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract_637638582522156962" xlink:to="us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount_637638582522156962" order="8" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiability" xlink:label="us-gaap_FinanceLeaseLiability_637638582522166949" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract_637638582522156962" xlink:to="us-gaap_FinanceLeaseLiability_637638582522166949" order="9" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:label="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_637638582522166949" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems_637638582522156962" xlink:to="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_637638582522166949" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsRemainderOfFiscalYear" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsRemainderOfFiscalYear_637638582522166949" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_637638582522166949" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsRemainderOfFiscalYear_637638582522166949" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths_637638582522166949" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_637638582522166949" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths_637638582522166949" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo_637638582522166949" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_637638582522166949" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo_637638582522166949" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree_637638582522166949" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_637638582522166949" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree_637638582522166949" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour_637638582522166949" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_637638582522166949" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour_637638582522166949" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour" xlink:label="acls_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour_637638582522166949" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_637638582522166949" xlink:to="acls_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour_637638582522166949" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue_637638582522166949" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_637638582522166949" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue_637638582522166949" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount" xlink:label="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount_637638582522176951" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_637638582522166949" xlink:to="us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount_637638582522176951" order="8" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseLiability" xlink:label="us-gaap_OperatingLeaseLiability_637638582522176951" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract_637638582522166949" xlink:to="us-gaap_OperatingLeaseLiability_637638582522176951" order="9" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract" xlink:label="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract_637638582522176951" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems_637638582522156962" xlink:to="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract_637638582522176951" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsRemainderOfFiscalYear" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsRemainderOfFiscalYear_637638582522176951" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract_637638582522176951" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsRemainderOfFiscalYear_637638582522176951" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths_637638582522176951" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract_637638582522176951" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths_637638582522176951" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo_637638582522176951" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract_637638582522176951" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo_637638582522176951" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree_637638582522176951" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract_637638582522176951" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree_637638582522176951" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour_637638582522176951" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract_637638582522176951" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour_637638582522176951" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFour" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFour_637638582522186950" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract_637638582522176951" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFour_637638582522186950" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue_637638582522186950" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract_637638582522176951" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue_637638582522186950" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount" xlink:label="acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount_637638582522186950" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract_637638582522176951" xlink:to="acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount_637638582522186950" order="8" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_OperatingAndFinanceLeaseLiability" xlink:label="acls_OperatingAndFinanceLeaseLiability_637638582522186950" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract_637638582522176951" xlink:to="acls_OperatingAndFinanceLeaseLiability_637638582522186950" order="9" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract" xlink:label="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract_637638582522186950" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LesseeLeaseDescriptionLineItems_637638582522156962" xlink:to="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract_637638582522186950" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1" xlink:label="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1_637638582522186950" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract_637638582522186950" xlink:to="us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1_637638582522186950" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1" xlink:label="us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1_637638582522196951" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract_637638582522186950" xlink:to="us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1_637638582522196951" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent" xlink:label="us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent_637638582522196951" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract_637638582522186950" xlink:to="us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent_637638582522196951" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent" xlink:label="us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent_637638582522196951" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract_637638582522186950" xlink:to="us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent_637638582522196951" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseTermOfContract" xlink:label="us-gaap_LesseeOperatingLeaseTermOfContract_637638582522196951" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract_637638582522186950" xlink:to="us-gaap_LesseeOperatingLeaseTermOfContract_637638582522196951" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeFinanceLeaseTermOfContract1" xlink:label="us-gaap_LesseeFinanceLeaseTermOfContract1_637638582522196951" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract_637638582522186950" xlink:to="us-gaap_LesseeFinanceLeaseTermOfContract1_637638582522196951" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureLeasesCashFlowByLeaseTypeDetails" xlink:type="extended" xlink:title="40305 - Disclosure - Leases - Cash Flow by Lease Type (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LeasesAbstract" xlink:label="us-gaap_LeasesAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OperatingLeasePayments" xlink:label="us-gaap_OperatingLeasePayments_637638582522206962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_OperatingLeasePayments_637638582522206962" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseInterestPaymentOnLiability" xlink:label="us-gaap_FinanceLeaseInterestPaymentOnLiability_637638582522206962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_FinanceLeaseInterestPaymentOnLiability_637638582522206962" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeasePrincipalPayments" xlink:label="us-gaap_FinanceLeasePrincipalPayments_637638582522206962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_FinanceLeasePrincipalPayments_637638582522206962" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability" xlink:label="us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability_637638582522206962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LeasesAbstract" xlink:to="us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability_637638582522206962" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureRevenueDetails" xlink:type="extended" xlink:title="40401 - Disclosure - Revenue (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RevenueFromContractWithCustomerAbstract" xlink:label="us-gaap_RevenueFromContractWithCustomerAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DisaggregationOfRevenueTable" xlink:label="us-gaap_DisaggregationOfRevenueTable_637638582522206962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenueFromContractWithCustomerAbstract" xlink:to="us-gaap_DisaggregationOfRevenueTable_637638582522206962" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_ProductOrServiceAxis" xlink:label="srt_ProductOrServiceAxis_637638582522216962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisaggregationOfRevenueTable_637638582522206962" xlink:to="srt_ProductOrServiceAxis_637638582522216962" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_ProductsAndServicesDomain" xlink:label="srt_ProductsAndServicesDomain_637638582522216962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductOrServiceAxis_637638582522216962" xlink:to="srt_ProductsAndServicesDomain_637638582522216962" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_NewSystemsRevenueMember" xlink:label="acls_NewSystemsRevenueMember_637638582522216962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductsAndServicesDomain_637638582522216962" xlink:to="acls_NewSystemsRevenueMember_637638582522216962" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis_637638582522216962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisaggregationOfRevenueTable_637638582522206962" xlink:to="srt_RangeAxis_637638582522216962" order="2" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_RangeMember" xlink:label="srt_RangeMember_637638582522216962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeAxis_637638582522216962" xlink:to="srt_RangeMember_637638582522216962" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_MinimumMember" xlink:label="srt_MinimumMember_637638582522216962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_637638582522216962" xlink:to="srt_MinimumMember_637638582522216962" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember_637638582522216962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_637638582522216962" xlink:to="srt_MaximumMember_637638582522216962" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DisaggregationOfRevenueLineItems" xlink:label="us-gaap_DisaggregationOfRevenueLineItems_637638582522216962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisaggregationOfRevenueTable_637638582522206962" xlink:to="us-gaap_DisaggregationOfRevenueLineItems_637638582522216962" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_PercentageOfPaymentUponShipmentOfTool" xlink:label="acls_PercentageOfPaymentUponShipmentOfTool_637638582522216962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisaggregationOfRevenueLineItems_637638582522216962" xlink:to="acls_PercentageOfPaymentUponShipmentOfTool_637638582522216962" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_PercentageOfPaymentUponInstallation" xlink:label="acls_PercentageOfPaymentUponInstallation_637638582522216962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisaggregationOfRevenueLineItems_637638582522216962" xlink:to="acls_PercentageOfPaymentUponInstallation_637638582522216962" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_PeriodOfPaymentUponDeliveryOfParts" xlink:label="acls_PeriodOfPaymentUponDeliveryOfParts_637638582522216962" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisaggregationOfRevenueLineItems_637638582522216962" xlink:to="acls_PeriodOfPaymentUponDeliveryOfParts_637638582522216962" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ContractWithCustomerLiability" xlink:label="us-gaap_ContractWithCustomerLiability_637638582522226951" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisaggregationOfRevenueLineItems_637638582522216962" xlink:to="us-gaap_ContractWithCustomerLiability_637638582522226951" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ContractWithCustomerLiabilityCurrent" xlink:label="us-gaap_ContractWithCustomerLiabilityCurrent_637638582522226951" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisaggregationOfRevenueLineItems_637638582522216962" xlink:to="us-gaap_ContractWithCustomerLiabilityCurrent_637638582522226951" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ContractWithCustomerLiabilityNoncurrent" xlink:label="us-gaap_ContractWithCustomerLiabilityNoncurrent_637638582522226951" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisaggregationOfRevenueLineItems_637638582522216962" xlink:to="us-gaap_ContractWithCustomerLiabilityNoncurrent_637638582522226951" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails" xlink:type="extended" xlink:title="40402 - Disclosure - Revenue - Revenue by discipline &amp; geographical areas (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RevenueFromContractWithCustomerAbstract" xlink:label="us-gaap_RevenueFromContractWithCustomerAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DisaggregationOfRevenueTable" xlink:label="us-gaap_DisaggregationOfRevenueTable_637638582522226951" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenueFromContractWithCustomerAbstract" xlink:to="us-gaap_DisaggregationOfRevenueTable_637638582522226951" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_ProductOrServiceAxis" xlink:label="srt_ProductOrServiceAxis_637638582522226951" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisaggregationOfRevenueTable_637638582522226951" xlink:to="srt_ProductOrServiceAxis_637638582522226951" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_ProductsAndServicesDomain" xlink:label="srt_ProductsAndServicesDomain_637638582522226951" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductOrServiceAxis_637638582522226951" xlink:to="srt_ProductsAndServicesDomain_637638582522226951" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_NewSystemsRevenueMember" xlink:label="acls_NewSystemsRevenueMember_637638582522226951" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductsAndServicesDomain_637638582522226951" xlink:to="acls_NewSystemsRevenueMember_637638582522226951" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_CsIOrAftermarketMember" xlink:label="acls_CsIOrAftermarketMember_637638582522226951" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_ProductsAndServicesDomain_637638582522226951" xlink:to="acls_CsIOrAftermarketMember_637638582522226951" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_StatementGeographicalAxis" xlink:label="srt_StatementGeographicalAxis_637638582522226951" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisaggregationOfRevenueTable_637638582522226951" xlink:to="srt_StatementGeographicalAxis_637638582522226951" order="2" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_SegmentGeographicalDomain" xlink:label="srt_SegmentGeographicalDomain_637638582522236958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_StatementGeographicalAxis_637638582522226951" xlink:to="srt_SegmentGeographicalDomain_637638582522236958" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_NorthAmericaMember" xlink:label="srt_NorthAmericaMember_637638582522236958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_SegmentGeographicalDomain_637638582522236958" xlink:to="srt_NorthAmericaMember_637638582522236958" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_AsiaMember" xlink:label="srt_AsiaMember_637638582522236958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_SegmentGeographicalDomain_637638582522236958" xlink:to="srt_AsiaMember_637638582522236958" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_EuropeMember" xlink:label="srt_EuropeMember_637638582522236958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_SegmentGeographicalDomain_637638582522236958" xlink:to="srt_EuropeMember_637638582522236958" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DisaggregationOfRevenueLineItems" xlink:label="us-gaap_DisaggregationOfRevenueLineItems_637638582522236958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisaggregationOfRevenueTable_637638582522226951" xlink:to="us-gaap_DisaggregationOfRevenueLineItems_637638582522236958" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax" xlink:label="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax_637638582522236958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DisaggregationOfRevenueLineItems_637638582522236958" xlink:to="us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax_637638582522236958" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="5" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureRevenueContractLiabilitiesDetails" xlink:type="extended" xlink:title="40403 - Disclosure - Revenue - Contract liabilities (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RevenueFromContractWithCustomerAbstract" xlink:label="us-gaap_RevenueFromContractWithCustomerAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ContractWithCustomerLiability" xlink:label="us-gaap_ContractWithCustomerLiability_637638582522236958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenueFromContractWithCustomerAbstract" xlink:to="us-gaap_ContractWithCustomerLiability_637638582522236958" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureRevenueDeferredRevenueDetails" xlink:type="extended" xlink:title="40404 - Disclosure - Revenue - Deferred revenue (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RevenueFromContractWithCustomerAbstract" xlink:label="us-gaap_RevenueFromContractWithCustomerAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ContractWithCustomerLiability" xlink:label="us-gaap_ContractWithCustomerLiability_637638582522247152" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenueFromContractWithCustomerAbstract" xlink:to="us-gaap_ContractWithCustomerLiability_637638582522247152" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_ContractWithCustomerLiabilityDeferralOfRevenue" xlink:label="acls_ContractWithCustomerLiabilityDeferralOfRevenue_637638582522247152" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenueFromContractWithCustomerAbstract" xlink:to="acls_ContractWithCustomerLiabilityDeferralOfRevenue_637638582522247152" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ContractWithCustomerLiabilityRevenueRecognized" xlink:label="us-gaap_ContractWithCustomerLiabilityRevenueRecognized_637638582522247152" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenueFromContractWithCustomerAbstract" xlink:to="us-gaap_ContractWithCustomerLiabilityRevenueRecognized_637638582522247152" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ContractWithCustomerLiability" xlink:label="us-gaap_ContractWithCustomerLiability_6376385825222471521" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RevenueFromContractWithCustomerAbstract" xlink:to="us-gaap_ContractWithCustomerLiability_6376385825222471521" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureReceivableAndAllowanceForCreditLossesAllowancesForCreditLossesRelatedToTradeReceivablesDetails" xlink:type="extended" xlink:title="40501 - Disclosure - Receivable and Allowance for Credit Losses - Allowances for Credit Losses Related to Trade Receivables (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccountsReceivableNetAbstract" xlink:label="us-gaap_AccountsReceivableNetAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_637638582522247152" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountsReceivableNetAbstract" xlink:to="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_637638582522247152" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" priority="9" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AllowanceForDoubtfulAccountsReceivableWriteOffs" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableWriteOffs_637638582522247152" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountsReceivableNetAbstract" xlink:to="us-gaap_AllowanceForDoubtfulAccountsReceivableWriteOffs_637638582522247152" order="2" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent" xlink:label="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_6376385825222471521" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccountsReceivableNetAbstract" xlink:to="us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent_6376385825222471521" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" priority="9" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShareDetails" xlink:type="extended" xlink:title="40601 - Disclosure - Computation of Net Earnings per Share (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EarningsPerShareAbstract" xlink:label="us-gaap_EarningsPerShareAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EarningsPerShareBasicAndDilutedOtherDisclosuresAbstract" xlink:label="us-gaap_EarningsPerShareBasicAndDilutedOtherDisclosuresAbstract_637638582522256961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareAbstract" xlink:to="us-gaap_EarningsPerShareBasicAndDilutedOtherDisclosuresAbstract_637638582522256961" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic" xlink:label="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_637638582522256961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareBasicAndDilutedOtherDisclosuresAbstract_637638582522256961" xlink:to="us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic_637638582522256961" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_WeightedAverageNumberOfSharesOutstandingBasic" xlink:label="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_637638582522256961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareBasicAndDilutedOtherDisclosuresAbstract_637638582522256961" xlink:to="us-gaap_WeightedAverageNumberOfSharesOutstandingBasic_637638582522256961" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements" xlink:label="us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements_637638582522256961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareBasicAndDilutedOtherDisclosuresAbstract_637638582522256961" xlink:to="us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements_637638582522256961" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding" xlink:label="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_637638582522256961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareBasicAndDilutedOtherDisclosuresAbstract_637638582522256961" xlink:to="us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding_637638582522256961" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="8" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EarningsPerShareBasicAndDilutedAbstract" xlink:label="us-gaap_EarningsPerShareBasicAndDilutedAbstract_637638582522256961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareAbstract" xlink:to="us-gaap_EarningsPerShareBasicAndDilutedAbstract_637638582522256961" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EarningsPerShareBasic" xlink:label="us-gaap_EarningsPerShareBasic_637638582522256961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareBasicAndDilutedAbstract_637638582522256961" xlink:to="us-gaap_EarningsPerShareBasic_637638582522256961" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EarningsPerShareDiluted" xlink:label="us-gaap_EarningsPerShareDiluted_637638582522256961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareBasicAndDilutedAbstract_637638582522256961" xlink:to="us-gaap_EarningsPerShareDiluted_637638582522256961" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount" xlink:label="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_637638582522256961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EarningsPerShareBasicAndDilutedAbstract_637638582522256961" xlink:to="us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount_637638582522256961" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveIncomeDetails" xlink:type="extended" xlink:title="40701 - Disclosure - Accumulated Other Comprehensive Income (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTaxAbstract" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTaxAbstract_635409544715678256" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossTable" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable_637638582522256961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTaxAbstract_635409544715678256" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable_637638582522256961" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StatementEquityComponentsAxis" xlink:label="us-gaap_StatementEquityComponentsAxis_637638582522256961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable_637638582522256961" xlink:to="us-gaap_StatementEquityComponentsAxis_637638582522256961" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EquityComponentDomain" xlink:label="us-gaap_EquityComponentDomain_637638582522266958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementEquityComponentsAxis_637638582522256961" xlink:to="us-gaap_EquityComponentDomain_637638582522266958" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccumulatedTranslationAdjustmentMember" xlink:label="us-gaap_AccumulatedTranslationAdjustmentMember_637638582522266958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EquityComponentDomain_637638582522266958" xlink:to="us-gaap_AccumulatedTranslationAdjustmentMember_637638582522266958" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember" xlink:label="us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_637638582522266958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_EquityComponentDomain_637638582522266958" xlink:to="us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_637638582522266958" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems_637638582522266958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossTable_637638582522256961" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems_637638582522266958" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AOCIAttributableToParentNetOfTaxRollForward" xlink:label="us-gaap_AOCIAttributableToParentNetOfTaxRollForward_637638582522266958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems_637638582522266958" xlink:to="us-gaap_AOCIAttributableToParentNetOfTaxRollForward_637638582522266958" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_637638582522266958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AOCIAttributableToParentNetOfTaxRollForward_637638582522266958" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_637638582522266958" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_OtherComprehensiveIncomeLossNetOfTax" xlink:label="us-gaap_OtherComprehensiveIncomeLossNetOfTax_637638582522266958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AOCIAttributableToParentNetOfTaxRollForward_637638582522266958" xlink:to="us-gaap_OtherComprehensiveIncomeLossNetOfTax_637638582522266958" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax" xlink:label="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_6376385825222669581" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_AOCIAttributableToParentNetOfTaxRollForward_637638582522266958" xlink:to="us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax_6376385825222669581" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" priority="3" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails" xlink:type="extended" xlink:title="40801 - Disclosure - Cash, cash equivalents and restricted cash (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsAbstract" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StatementTable" xlink:label="us-gaap_StatementTable_637638582522266958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsAbstract" xlink:to="us-gaap_StatementTable_637638582522266958" order="1" use="optional" priority="6" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LongtermDebtTypeAxis" xlink:label="us-gaap_LongtermDebtTypeAxis_637638582522266958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementTable_637638582522266958" xlink:to="us-gaap_LongtermDebtTypeAxis_637638582522266958" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LongtermDebtTypeDomain" xlink:label="us-gaap_LongtermDebtTypeDomain_637638582522266958" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LongtermDebtTypeAxis_637638582522266958" xlink:to="us-gaap_LongtermDebtTypeDomain_637638582522266958" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RevolvingCreditFacilityMember" xlink:label="us-gaap_RevolvingCreditFacilityMember_637638582522357105" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_LongtermDebtTypeDomain_637638582522266958" xlink:to="us-gaap_RevolvingCreditFacilityMember_637638582522357105" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StatementLineItems" xlink:label="us-gaap_StatementLineItems_637638582522357105" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementTable_637638582522266958" xlink:to="us-gaap_StatementLineItems_637638582522357105" order="2" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CashAndCashEquivalentsAtCarryingValue" xlink:label="us-gaap_CashAndCashEquivalentsAtCarryingValue_637638582522357105" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_637638582522357105" xlink:to="us-gaap_CashAndCashEquivalentsAtCarryingValue_637638582522357105" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="3" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RestrictedCashAndCashEquivalents" xlink:label="us-gaap_RestrictedCashAndCashEquivalents_637638582522357105" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_637638582522357105" xlink:to="us-gaap_RestrictedCashAndCashEquivalents_637638582522357105" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents" xlink:label="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_637638582522357105" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_637638582522357105" xlink:to="us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents_637638582522357105" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit" xlink:label="acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit_637638582522357105" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_637638582522357105" xlink:to="acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit_637638582522357105" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_WorkersCompensationLiabilityCurrentAndNoncurrent" xlink:label="us-gaap_WorkersCompensationLiabilityCurrentAndNoncurrent_637638582522357105" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_637638582522357105" xlink:to="us-gaap_WorkersCompensationLiabilityCurrentAndNoncurrent_637638582522357105" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_DepositRelatingToCustomsActivity" xlink:label="acls_DepositRelatingToCustomsActivity_637638582522357105" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StatementLineItems_637638582522357105" xlink:to="acls_DepositRelatingToCustomsActivity_637638582522357105" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureInventoriesNetDetails" xlink:type="extended" xlink:title="40901 - Disclosure - Inventories, net (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InventoryDisclosureAbstract" xlink:label="us-gaap_InventoryDisclosureAbstract_635454461843844040" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InventoryRawMaterialsNetOfReserves" xlink:label="us-gaap_InventoryRawMaterialsNetOfReserves_637638582522366959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryDisclosureAbstract_635454461843844040" xlink:to="us-gaap_InventoryRawMaterialsNetOfReserves_637638582522366959" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InventoryWorkInProcessNetOfReserves" xlink:label="us-gaap_InventoryWorkInProcessNetOfReserves_637638582522366959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryDisclosureAbstract_635454461843844040" xlink:to="us-gaap_InventoryWorkInProcessNetOfReserves_637638582522366959" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InventoryFinishedGoodsNetOfReserves" xlink:label="us-gaap_InventoryFinishedGoodsNetOfReserves_637638582522366959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryDisclosureAbstract_635454461843844040" xlink:to="us-gaap_InventoryFinishedGoodsNetOfReserves_637638582522366959" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_InventoryNet" xlink:label="us-gaap_InventoryNet_637638582522366959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_InventoryDisclosureAbstract_635454461843844040" xlink:to="us-gaap_InventoryNet_637638582522366959" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureProductWarrantyDetails" xlink:type="extended" xlink:title="41001 - Disclosure - Product Warranty (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProductWarrantiesDisclosuresAbstract" xlink:label="us-gaap_ProductWarrantiesDisclosuresAbstract" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_ProductWarrantyPeriod" xlink:label="acls_ProductWarrantyPeriod_637638582522366959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ProductWarrantiesDisclosuresAbstract" xlink:to="acls_ProductWarrantyPeriod_637638582522366959" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward" xlink:label="us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward_637638582522366959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ProductWarrantiesDisclosuresAbstract" xlink:to="us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward_637638582522366959" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProductWarrantyAccrual" xlink:label="us-gaap_ProductWarrantyAccrual_637638582522366959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward_637638582522366959" xlink:to="us-gaap_ProductWarrantyAccrual_637638582522366959" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodStartLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProductWarrantyAccrualWarrantiesIssued" xlink:label="us-gaap_ProductWarrantyAccrualWarrantiesIssued_637638582522366959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward_637638582522366959" xlink:to="us-gaap_ProductWarrantyAccrualWarrantiesIssued_637638582522366959" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProductWarrantyAccrualPayments" xlink:label="us-gaap_ProductWarrantyAccrualPayments_637638582522376969" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward_637638582522366959" xlink:to="us-gaap_ProductWarrantyAccrualPayments_637638582522376969" order="3" use="optional" preferredLabel="http://www.xbrl.org/2009/role/negatedLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease" xlink:label="us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease_637638582522376969" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward_637638582522366959" xlink:to="us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease_637638582522376969" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProductWarrantyAccrual" xlink:label="us-gaap_ProductWarrantyAccrual_637638582522376969" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward_637638582522366959" xlink:to="us-gaap_ProductWarrantyAccrual_637638582522376969" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/periodEndLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract" xlink:label="us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract_637638582522376969" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ProductWarrantiesDisclosuresAbstract" xlink:to="us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract_637638582522376969" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProductWarrantyAccrualClassifiedCurrent" xlink:label="us-gaap_ProductWarrantyAccrualClassifiedCurrent_637638582522376969" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract_637638582522376969" xlink:to="us-gaap_ProductWarrantyAccrualClassifiedCurrent_637638582522376969" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProductWarrantyAccrualNoncurrent" xlink:label="us-gaap_ProductWarrantyAccrualNoncurrent_637638582522376969" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract_637638582522376969" xlink:to="us-gaap_ProductWarrantyAccrualNoncurrent_637638582522376969" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProductWarrantyAccrual" xlink:label="us-gaap_ProductWarrantyAccrual_6376385825223769691" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract_637638582522376969" xlink:to="us-gaap_ProductWarrantyAccrual_6376385825223769691" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/totalLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails" xlink:type="extended" xlink:title="41101 - Disclosure - Fair Value Measurements (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueDisclosuresAbstract" xlink:label="us-gaap_FairValueDisclosuresAbstract_635627129166575150" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_637638582522376969" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueDisclosuresAbstract_635627129166575150" xlink:to="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_637638582522376969" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueByMeasurementFrequencyAxis" xlink:label="us-gaap_FairValueByMeasurementFrequencyAxis_637638582522386961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_637638582522376969" xlink:to="us-gaap_FairValueByMeasurementFrequencyAxis_637638582522386961" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueMeasurementFrequencyDomain" xlink:label="us-gaap_FairValueMeasurementFrequencyDomain_637638582522386961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueByMeasurementFrequencyAxis_637638582522386961" xlink:to="us-gaap_FairValueMeasurementFrequencyDomain_637638582522386961" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueMeasurementsRecurringMember" xlink:label="us-gaap_FairValueMeasurementsRecurringMember_637638582522386961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueMeasurementFrequencyDomain_637638582522386961" xlink:to="us-gaap_FairValueMeasurementsRecurringMember_637638582522386961" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueByFairValueHierarchyLevelAxis" xlink:label="us-gaap_FairValueByFairValueHierarchyLevelAxis_637638582522386961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_637638582522376969" xlink:to="us-gaap_FairValueByFairValueHierarchyLevelAxis_637638582522386961" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueMeasurementsFairValueHierarchyDomain" xlink:label="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_637638582522386961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueByFairValueHierarchyLevelAxis_637638582522386961" xlink:to="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_637638582522386961" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueInputsLevel1Member" xlink:label="us-gaap_FairValueInputsLevel1Member_637638582522386961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueMeasurementsFairValueHierarchyDomain_637638582522386961" xlink:to="us-gaap_FairValueInputsLevel1Member_637638582522386961" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueByAssetClassAxis" xlink:label="us-gaap_FairValueByAssetClassAxis_637638582522386961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_637638582522376969" xlink:to="us-gaap_FairValueByAssetClassAxis_637638582522386961" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain" xlink:label="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_637638582522386961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueByAssetClassAxis_637638582522386961" xlink:to="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_637638582522386961" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember" xlink:label="acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_637638582522386961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain_637638582522386961" xlink:to="acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_637638582522386961" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueByMeasurementBasisAxis" xlink:label="us-gaap_FairValueByMeasurementBasisAxis_637638582522386961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_637638582522376969" xlink:to="us-gaap_FairValueByMeasurementBasisAxis_637638582522386961" order="4" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_PortionAtFairValueFairValueDisclosureMember" xlink:label="us-gaap_PortionAtFairValueFairValueDisclosureMember_637638582522386961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueByMeasurementBasisAxis_637638582522386961" xlink:to="us-gaap_PortionAtFairValueFairValueDisclosureMember_637638582522386961" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EstimateOfFairValueFairValueDisclosureMember" xlink:label="us-gaap_EstimateOfFairValueFairValueDisclosureMember_637638582522386961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PortionAtFairValueFairValueDisclosureMember_637638582522386961" xlink:to="us-gaap_EstimateOfFairValueFairValueDisclosureMember_637638582522386961" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems" xlink:label="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems_637638582522386961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable_637638582522376969" xlink:to="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems_637638582522386961" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CashAndCashEquivalentsFairValueDisclosure" xlink:label="us-gaap_CashAndCashEquivalentsFairValueDisclosure_637638582522396950" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems_637638582522386961" xlink:to="us-gaap_CashAndCashEquivalentsFairValueDisclosure_637638582522396950" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails" xlink:type="extended" xlink:title="41201 - Disclosure - Financing Arrangements (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DebtDisclosureAbstract" xlink:label="us-gaap_DebtDisclosureAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DebtInstrumentTable" xlink:label="us-gaap_DebtInstrumentTable_637638582522396950" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtDisclosureAbstract" xlink:to="us-gaap_DebtInstrumentTable_637638582522396950" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_CounterpartyNameAxis" xlink:label="srt_CounterpartyNameAxis_637638582522396950" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable_637638582522396950" xlink:to="srt_CounterpartyNameAxis_637638582522396950" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_RepurchaseAgreementCounterpartyNameDomain" xlink:label="srt_RepurchaseAgreementCounterpartyNameDomain_637638582522396950" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_CounterpartyNameAxis_637638582522396950" xlink:to="srt_RepurchaseAgreementCounterpartyNameDomain_637638582522396950" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_BeverlyPropertyOwnerLlcMember" xlink:label="acls_BeverlyPropertyOwnerLlcMember_637638582522396950" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RepurchaseAgreementCounterpartyNameDomain_637638582522396950" xlink:to="acls_BeverlyPropertyOwnerLlcMember_637638582522396950" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_SiliconValleyBankMember" xlink:label="acls_SiliconValleyBankMember_637638582522396950" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RepurchaseAgreementCounterpartyNameDomain_637638582522396950" xlink:to="acls_SiliconValleyBankMember_637638582522396950" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_PropertyPlantAndEquipmentByTypeAxis" xlink:label="us-gaap_PropertyPlantAndEquipmentByTypeAxis_637638582522396950" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable_637638582522396950" xlink:to="us-gaap_PropertyPlantAndEquipmentByTypeAxis_637638582522396950" order="2" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_PropertyPlantAndEquipmentTypeDomain" xlink:label="us-gaap_PropertyPlantAndEquipmentTypeDomain_637638582522396950" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentByTypeAxis_637638582522396950" xlink:to="us-gaap_PropertyPlantAndEquipmentTypeDomain_637638582522396950" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_BuildingMember" xlink:label="us-gaap_BuildingMember_637638582522396950" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain_637638582522396950" xlink:to="us-gaap_BuildingMember_637638582522396950" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_SaleAndLeaseBackMember" xlink:label="acls_SaleAndLeaseBackMember_637638582522396950" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_PropertyPlantAndEquipmentTypeDomain_637638582522396950" xlink:to="acls_SaleAndLeaseBackMember_637638582522396950" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CreditFacilityAxis" xlink:label="us-gaap_CreditFacilityAxis_637638582522406959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable_637638582522396950" xlink:to="us-gaap_CreditFacilityAxis_637638582522406959" order="3" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CreditFacilityDomain" xlink:label="us-gaap_CreditFacilityDomain_637638582522406959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CreditFacilityAxis_637638582522406959" xlink:to="us-gaap_CreditFacilityDomain_637638582522406959" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RevolvingCreditFacilityMember" xlink:label="us-gaap_RevolvingCreditFacilityMember_637638582522406959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_CreditFacilityDomain_637638582522406959" xlink:to="us-gaap_RevolvingCreditFacilityMember_637638582522406959" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ShortTermDebtTypeAxis" xlink:label="us-gaap_ShortTermDebtTypeAxis_637638582522406959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable_637638582522396950" xlink:to="us-gaap_ShortTermDebtTypeAxis_637638582522406959" order="4" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ShortTermDebtTypeDomain" xlink:label="us-gaap_ShortTermDebtTypeDomain_637638582522406959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShortTermDebtTypeAxis_637638582522406959" xlink:to="us-gaap_ShortTermDebtTypeDomain_637638582522406959" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LetterOfCreditMember" xlink:label="us-gaap_LetterOfCreditMember_637638582522406959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ShortTermDebtTypeDomain_637638582522406959" xlink:to="us-gaap_LetterOfCreditMember_637638582522406959" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DebtInstrumentLineItems" xlink:label="us-gaap_DebtInstrumentLineItems_637638582522406959" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentTable_637638582522396950" xlink:to="us-gaap_DebtInstrumentLineItems_637638582522406959" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ProceedsFromSaleOfPropertyHeldForSale" xlink:label="us-gaap_ProceedsFromSaleOfPropertyHeldForSale_637638582522416969" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_637638582522406959" xlink:to="us-gaap_ProceedsFromSaleOfPropertyHeldForSale_637638582522416969" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LesseeOperatingLeaseTermOfContract" xlink:label="us-gaap_LesseeOperatingLeaseTermOfContract_637638582522416969" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_637638582522406959" xlink:to="us-gaap_LesseeOperatingLeaseTermOfContract_637638582522416969" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_FinanceLeaseLiabilityNoncurrent" xlink:label="us-gaap_FinanceLeaseLiabilityNoncurrent_637638582522416969" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_637638582522406959" xlink:to="us-gaap_FinanceLeaseLiabilityNoncurrent_637638582522416969" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_SecurityDeposit" xlink:label="us-gaap_SecurityDeposit_637638582522416969" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_637638582522406959" xlink:to="us-gaap_SecurityDeposit_637638582522416969" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity" xlink:label="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity_637638582522416969" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_637638582522406959" xlink:to="us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity_637638582522416969" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LineOfCreditFacilityFairValueOfAmountOutstanding" xlink:label="us-gaap_LineOfCreditFacilityFairValueOfAmountOutstanding_637638582522416969" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_637638582522406959" xlink:to="us-gaap_LineOfCreditFacilityFairValueOfAmountOutstanding_637638582522416969" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_LettersOfCreditOutstandingAmount" xlink:label="us-gaap_LettersOfCreditOutstandingAmount_637638582522416969" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_DebtInstrumentLineItems_637638582522406959" xlink:to="us-gaap_LettersOfCreditOutstandingAmount_637638582522416969" order="7" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureIncomeTaxesDetails" xlink:type="extended" xlink:title="41301 - Disclosure - Income Taxes (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncomeTaxDisclosureAbstract" xlink:label="us-gaap_IncomeTaxDisclosureAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ValuationAllowanceTable" xlink:label="us-gaap_ValuationAllowanceTable_637638582522426961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_IncomeTaxDisclosureAbstract" xlink:to="us-gaap_ValuationAllowanceTable_637638582522426961" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_RangeAxis" xlink:label="srt_RangeAxis_637638582522426961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ValuationAllowanceTable_637638582522426961" xlink:to="srt_RangeAxis_637638582522426961" order="1" use="optional" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_RangeMember" xlink:label="srt_RangeMember_637638582522426961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeAxis_637638582522426961" xlink:to="srt_RangeMember_637638582522426961" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_MaximumMember" xlink:label="srt_MaximumMember_637638582522426961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_RangeMember_637638582522426961" xlink:to="srt_MaximumMember_637638582522426961" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ValuationAllowanceLineItems" xlink:label="us-gaap_ValuationAllowanceLineItems_637638582522426961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ValuationAllowanceTable_637638582522426961" xlink:to="us-gaap_ValuationAllowanceLineItems_637638582522426961" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="2" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_IncomeTaxExpenseBenefit" xlink:label="us-gaap_IncomeTaxExpenseBenefit_637638582522426961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ValuationAllowanceLineItems_637638582522426961" xlink:to="us-gaap_IncomeTaxExpenseBenefit_637638582522426961" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_IncreaseInIncomeTaxExpenseBenefit" xlink:label="acls_IncreaseInIncomeTaxExpenseBenefit_637638582522426961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ValuationAllowanceLineItems_637638582522426961" xlink:to="acls_IncreaseInIncomeTaxExpenseBenefit_637638582522426961" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="4" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_IncreaseInPreTaxIncome" xlink:label="acls_IncreaseInPreTaxIncome_637638582522426961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ValuationAllowanceLineItems_637638582522426961" xlink:to="acls_IncreaseInPreTaxIncome_637638582522426961" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate" xlink:label="us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate_637638582522426961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ValuationAllowanceLineItems_637638582522426961" xlink:to="us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate_637638582522426961" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="9" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DeferredIncomeTaxAssetsNet" xlink:label="us-gaap_DeferredIncomeTaxAssetsNet_637638582522426961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ValuationAllowanceLineItems_637638582522426961" xlink:to="us-gaap_DeferredIncomeTaxAssetsNet_637638582522426961" order="5" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" priority="7" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_DeferredTaxAssetsValuationAllowance" xlink:label="us-gaap_DeferredTaxAssetsValuationAllowance_637638582522426961" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ValuationAllowanceLineItems_637638582522426961" xlink:to="us-gaap_DeferredTaxAssetsValuationAllowance_637638582522426961" order="6" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="7" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureConcentrationOfRiskDetails" xlink:type="extended" xlink:title="41401 - Disclosure - Concentration of Risk (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_RisksAndUncertaintiesAbstract" xlink:label="us-gaap_RisksAndUncertaintiesAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ConcentrationRiskTable" xlink:label="us-gaap_ConcentrationRiskTable_637638582522436964" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_RisksAndUncertaintiesAbstract" xlink:to="us-gaap_ConcentrationRiskTable_637638582522436964" order="1" use="optional" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ConcentrationRiskByBenchmarkAxis" xlink:label="us-gaap_ConcentrationRiskByBenchmarkAxis_637638582522436964" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskTable_637638582522436964" xlink:to="us-gaap_ConcentrationRiskByBenchmarkAxis_637638582522436964" order="1" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ConcentrationRiskBenchmarkDomain" xlink:label="us-gaap_ConcentrationRiskBenchmarkDomain_637638582522436964" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskByBenchmarkAxis_637638582522436964" xlink:to="us-gaap_ConcentrationRiskBenchmarkDomain_637638582522436964" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_SalesRevenueNetMember" xlink:label="us-gaap_SalesRevenueNetMember_637638582522436964" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskBenchmarkDomain_637638582522436964" xlink:to="us-gaap_SalesRevenueNetMember_637638582522436964" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_AccountsReceivableMember" xlink:label="us-gaap_AccountsReceivableMember_637638582522436964" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskBenchmarkDomain_637638582522436964" xlink:to="us-gaap_AccountsReceivableMember_637638582522436964" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ConcentrationRiskByTypeAxis" xlink:label="us-gaap_ConcentrationRiskByTypeAxis_637638582522436964" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskTable_637638582522436964" xlink:to="us-gaap_ConcentrationRiskByTypeAxis_637638582522436964" order="2" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ConcentrationRiskTypeDomain" xlink:label="us-gaap_ConcentrationRiskTypeDomain_637638582522436964" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskByTypeAxis_637638582522436964" xlink:to="us-gaap_ConcentrationRiskTypeDomain_637638582522436964" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CustomerConcentrationRiskMember" xlink:label="us-gaap_CustomerConcentrationRiskMember_637638582522436964" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskTypeDomain_637638582522436964" xlink:to="us-gaap_CustomerConcentrationRiskMember_637638582522436964" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_CreditConcentrationRiskMember" xlink:label="us-gaap_CreditConcentrationRiskMember_637638582522436964" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskTypeDomain_637638582522436964" xlink:to="us-gaap_CreditConcentrationRiskMember_637638582522436964" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_MajorCustomersAxis" xlink:label="srt_MajorCustomersAxis_637638582522436964" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskTable_637638582522436964" xlink:to="srt_MajorCustomersAxis_637638582522436964" order="3" use="optional" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd#srt_NameOfMajorCustomerDomain" xlink:label="srt_NameOfMajorCustomerDomain_637638582522436964" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_MajorCustomersAxis_637638582522436964" xlink:to="srt_NameOfMajorCustomerDomain_637638582522436964" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_LargestCustomerMember" xlink:label="acls_LargestCustomerMember_637638582522436964" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_NameOfMajorCustomerDomain_637638582522436964" xlink:to="acls_LargestCustomerMember_637638582522436964" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_SecondLargestCustomerMember" xlink:label="acls_SecondLargestCustomerMember_637638582522446957" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_NameOfMajorCustomerDomain_637638582522436964" xlink:to="acls_SecondLargestCustomerMember_637638582522446957" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_ThirdLargestCustomerMember" xlink:label="acls_ThirdLargestCustomerMember_637638582522446957" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="srt_NameOfMajorCustomerDomain_637638582522436964" xlink:to="acls_ThirdLargestCustomerMember_637638582522446957" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="1" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ConcentrationRiskLineItems" xlink:label="us-gaap_ConcentrationRiskLineItems_637638582522446957" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskTable_637638582522436964" xlink:to="us-gaap_ConcentrationRiskLineItems_637638582522446957" order="4" use="optional" preferredLabel="http://www.xbrl.org/2003/role/verboseLabel" />
    <loc xlink:type="locator" xlink:href="acls-20210630.xsd#acls_ConcentrationRiskNumberOfCustomers" xlink:label="acls_ConcentrationRiskNumberOfCustomers_637638582522446957" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskLineItems_637638582522446957" xlink:to="acls_ConcentrationRiskNumberOfCustomers_637638582522446957" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_ConcentrationRiskPercentage1" xlink:label="us-gaap_ConcentrationRiskPercentage1_637638582522446957" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_ConcentrationRiskLineItems_637638582522446957" xlink:to="us-gaap_ConcentrationRiskPercentage1_637638582522446957" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" />
  </presentationLink>
  <presentationLink xlink:role="http://www.axcelis.com/role/DisclosureShareRepurchaseDetails" xlink:type="extended" xlink:title="41501 - Disclosure - Share Repurchase (Details)" xmlns="http://www.xbrl.org/2003/linkbase">
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockholdersEquityNoteAbstract" xlink:label="us-gaap_StockholdersEquityNoteAbstract" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_StockRepurchaseProgramAuthorizedAmount1" xlink:label="us-gaap_StockRepurchaseProgramAuthorizedAmount1_637638582522446957" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityNoteAbstract" xlink:to="us-gaap_StockRepurchaseProgramAuthorizedAmount1_637638582522446957" order="1" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="6" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_TreasuryStockSharesAcquired" xlink:label="us-gaap_TreasuryStockSharesAcquired_637638582522456963" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityNoteAbstract" xlink:to="us-gaap_TreasuryStockSharesAcquired_637638582522456963" order="2" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
    <loc xlink:type="locator" xlink:href="http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd#us-gaap_TreasuryStockAcquiredAverageCostPerShare" xlink:label="us-gaap_TreasuryStockAcquiredAverageCostPerShare_637638582522456963" />
    <presentationArc xlink:type="arc" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="us-gaap_StockholdersEquityNoteAbstract" xlink:to="us-gaap_TreasuryStockAcquiredAverageCostPerShare_637638582522456963" order="3" use="optional" preferredLabel="http://www.xbrl.org/2003/role/terseLabel" priority="5" />
  </presentationLink>
</link:linkbase>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>11
<FILENAME>acls-20210630x10q_htm.xml
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<XML>
<?xml version="1.0" encoding="utf-8"?>
<xbrl
  xmlns="http://www.xbrl.org/2003/instance"
  xmlns:acls="http://www.axcelis.com/20210630"
  xmlns:dei="http://xbrl.sec.gov/dei/2020-01-31"
  xmlns:iso4217="http://www.xbrl.org/2003/iso4217"
  xmlns:link="http://www.xbrl.org/2003/linkbase"
  xmlns:srt="http://fasb.org/srt/2020-01-31"
  xmlns:us-gaap="http://fasb.org/us-gaap/2020-01-31"
  xmlns:xbrldi="http://xbrl.org/2006/xbrldi"
  xmlns:xlink="http://www.w3.org/1999/xlink"
  xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
    <link:schemaRef xlink:href="acls-20210630.xsd" xlink:type="simple"/>
    <context id="Duration_1_1_2021_To_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_qxYF29GUZEK4V73nPRU4lw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-03-31</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_ISQyc_YFT0Ggp2-cT9xM1Q">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-04-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2020_To_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_kQChkn8LbEaU-QAGr3O5aQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-04-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_b17p1G-nhEW5n_uF4leI5A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-03-31</endDate>
        </period>
    </context>
    <context id="As_Of_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_jrp5HTMctEGaBiB28D3Lcg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-06-30</instant>
        </period>
    </context>
    <context id="As_Of_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_8SoISsYsQEmHgmYHZWy3NQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-06-30</instant>
        </period>
    </context>
    <context id="As_Of_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_1OMo5RzwUE2qmccn3CI7VQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-06-30</instant>
        </period>
    </context>
    <context id="As_Of_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_yk0zeuok1ESpzKSxw-_Yng">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-03-31</instant>
        </period>
    </context>
    <context id="As_Of_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_nPR1QHLRd0K6xO7MTzjQDA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-03-31</instant>
        </period>
    </context>
    <context id="As_Of_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_nMZiZF1p1UeYuA1-E7JPNg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-03-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_EjhaMDWkVkaY2PX5EPO33w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_e61Wz1CQE0qiyYcZjij5Yg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_21pDDGs74UqeJxBPHlYzOQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-12-31</instant>
        </period>
    </context>
    <context id="As_Of_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_FtxaGvJtt0GIO2vBuTSv0A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-06-30</instant>
        </period>
    </context>
    <context id="As_Of_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_aZJX0TutVE-uQ6w765155A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-06-30</instant>
        </period>
    </context>
    <context id="As_Of_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_idn7dSJpdU6u4H_5_bzuPw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-06-30</instant>
        </period>
    </context>
    <context id="As_Of_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_sLmqwPENdkO6QkOCbLKQ_w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-03-31</instant>
        </period>
    </context>
    <context id="As_Of_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_-8tath2-uEKtz8uE9FV9Iw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-03-31</instant>
        </period>
    </context>
    <context id="As_Of_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_TXi4cj5lNkO4zanH3e0wpg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-03-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_BYlqNNHP6kuAhGqLvpu1aA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2019-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_d0eqQfbvBEmk6gA7IHzN4w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2019-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_YsEAJpEiF0CucsZJ79McXQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2019-12-31</instant>
        </period>
    </context>
    <context id="As_Of_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_g56DknHgzE22JRq2ngeP8w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-06-30</instant>
        </period>
    </context>
    <context id="As_Of_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_yCLXcdhezkCA8IlJrhRQoA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-03-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_uzzcW3x6bE--mq9X_qlBvw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-12-31</instant>
        </period>
    </context>
    <context id="As_Of_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_p5MwFWjzgEmVRz-u0rc0Lg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-06-30</instant>
        </period>
    </context>
    <context id="As_Of_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_k-roo0M6bUam9HVt-d3Vog">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-03-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_SoIXUiAhFUmgd7essTKzKg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2019-12-31</instant>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_6_30_2021_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_us-gaap_PlanNameAxis_acls_StockPlan2000Member_HVl0riEuP0OGyi-NSg5YHw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">acls:StockOptionAwardsMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">acls:StockPlan2000Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2021_To_6_30_2021_srt_StatementGeographicalAxis_srt_NorthAmericaMember_NEOMdVsPLEyRJ4bIQ1Fqkg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:NorthAmericaMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-04-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2021_To_6_30_2021_srt_StatementGeographicalAxis_srt_EuropeMember_VFQ0RtdcrEasegSfJlNWWQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:EuropeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-04-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2021_To_6_30_2021_srt_StatementGeographicalAxis_srt_AsiaMember_D8-EjbAdWUGp9d6taxPD_g">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:AsiaMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-04-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_CIEelAIbeEuWRJlD5jK5vw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:NewSystemsRevenueMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-04-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_CsIOrAftermarketMember_aeBeVeoQykSPdY4ivJP6HA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:CsIOrAftermarketMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-04-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_6_30_2021_srt_StatementGeographicalAxis_srt_NorthAmericaMember_WMOuVFAHXEu4snTEayMOpA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:NorthAmericaMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_6_30_2021_srt_StatementGeographicalAxis_srt_EuropeMember_7aYEOIYHd06aUpdNgdi5KA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:EuropeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_6_30_2021_srt_StatementGeographicalAxis_srt_AsiaMember_jqdlc7_0s0Kz1yRqcL8iUg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:AsiaMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_CsIOrAftermarketMember_TicKoU9nx0Wjl559v7_68A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:CsIOrAftermarketMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2020_To_6_30_2020_srt_StatementGeographicalAxis_srt_NorthAmericaMember_3ltgpALfo0OIvGrA9bu5eA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:NorthAmericaMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-04-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2020_To_6_30_2020_srt_StatementGeographicalAxis_srt_EuropeMember_mSKgEEjdw0KK9jbwnggJiA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:EuropeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-04-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2020_To_6_30_2020_srt_StatementGeographicalAxis_srt_AsiaMember_sWwca1JA_UemYMycl1F-lQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:AsiaMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-04-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_QLowhise_EWfbCxHfpYWhQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:NewSystemsRevenueMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-04-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_acls_CsIOrAftermarketMember_a2NOCaAuIUSxTOjbsCuaOA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:CsIOrAftermarketMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-04-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_6_30_2020_srt_StatementGeographicalAxis_srt_NorthAmericaMember_HAn6Qh15rkatbPxF72mX2Q">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:NorthAmericaMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_6_30_2020_srt_StatementGeographicalAxis_srt_EuropeMember_brKP66xXNEmuH9-_Iz3PNA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:EuropeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_6_30_2020_srt_StatementGeographicalAxis_srt_AsiaMember_gGOkoCkXY0ODg73v1ZDa2Q">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:StatementGeographicalAxis">srt:AsiaMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_aqASi6Lgl0y688FqkLnekg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:NewSystemsRevenueMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_acls_CsIOrAftermarketMember_WVc5IdW6PECXChKAn2jwNw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:CsIOrAftermarketMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2021_To_6_30_2021_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_QNR4-3SSo02w6_10P-JE4Q">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-04-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_6_30_2021_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_Yvxyzm8yg0SNKmN2RVXDEw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2020_To_6_30_2020_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_H-V3txgTH0yEDXnAa1DUtQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-04-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_6_30_2020_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_HgtTxlyUB0u26rdyUj-qkA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:AwardTypeAxis">us-gaap:EmployeeStockMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:CommonStockMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_30_2015_To_1_30_2015_srt_CounterpartyNameAxis_acls_BeverlyPropertyOwnerLlcMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingMember_ikN0WgABQ0Oc3EVaZNO4XA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:CounterpartyNameAxis">acls:BeverlyPropertyOwnerLlcMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:BuildingMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2015-01-30</startDate>
            <endDate>2015-01-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_1x5HWVO72UqGpq3lSg5vJg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedTranslationAdjustmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_H_xVYtRFcEGPut0zNaxYsg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedDefinedBenefitPlansAdjustmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_IIcvKTwEi0elPGhQkd7WcQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-04-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_WSxitDFH_E2sNO8nvvvOTA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-03-31</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2020_To_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_CtCAykjwqUmInz4EceSxvA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-04-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_F9cCveT0DkqT5kW6lI3UDA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedOtherComprehensiveIncomeMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-03-31</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2021_To_6_30_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_ServiceMember_FSj452F2NkW_cwGShJp-8g">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:ServiceMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-04-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2021_To_6_30_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingAndMarketingExpenseMember_LhPsuVd2s0mQm7i1GpW9DA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:SellingAndMarketingExpenseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-04-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2021_To_6_30_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_UOAsZKMKtkuyCOTrcaa_JA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:ResearchAndDevelopmentExpenseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-04-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2021_To_6_30_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_GeneralAndAdministrativeExpenseMember_G38viKXzTE6J8aNCkxOzig">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:GeneralAndAdministrativeExpenseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-04-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_6_30_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_ServiceMember_0BYdpgalq0qBObRVNMEYrg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:ServiceMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_6_30_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingAndMarketingExpenseMember_ekhbGo7f0km2QXJUas_27w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:SellingAndMarketingExpenseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_6_30_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember__Wm4NbhGzkG8JA-3yNvkww">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:ResearchAndDevelopmentExpenseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_6_30_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_GeneralAndAdministrativeExpenseMember_M2eZ4S3rhU2T52988OgStg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:GeneralAndAdministrativeExpenseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2020_To_6_30_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_ServiceMember_DNcIBesDR0WAx8tJpfZeAw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:ServiceMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-04-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2020_To_6_30_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingAndMarketingExpenseMember_3WMIF-t1m0Od_EYdIVUqxA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:SellingAndMarketingExpenseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-04-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2020_To_6_30_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_bOdIPKEt_UOYlnABbTs6dQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:ResearchAndDevelopmentExpenseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-04-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2020_To_6_30_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_GeneralAndAdministrativeExpenseMember_SzbRC-XIQUe2J4Q3ZQI7Lg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:GeneralAndAdministrativeExpenseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-04-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_6_30_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_ServiceMember_LJCz9i16REm6mYOfTQTJFQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:ServiceMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_6_30_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingAndMarketingExpenseMember_Ip8jAZUCB0KJaalGOwu0eQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:SellingAndMarketingExpenseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_6_30_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_EnJPApftgku3_AVQt4IeFg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:ResearchAndDevelopmentExpenseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_6_30_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_GeneralAndAdministrativeExpenseMember_P-YXIVTwzUSUiO77F6K2Fg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:IncomeStatementLocationAxis">us-gaap:GeneralAndAdministrativeExpenseMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_h4oY94pFW0iXqEL70dTv8g">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-04-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_iLquTy6h6EGwrhHMLkr38Q">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-03-31</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2020_To_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_9eWRNT0z40SUKHvCIS5EYQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-04-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_LzqFMH4R-Uisa6DN0Wxm4w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:RetainedEarningsMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-03-31</endDate>
        </period>
    </context>
    <context id="As_Of_7_31_2020_srt_CounterpartyNameAxis_acls_SiliconValleyBankMember_us-gaap_CreditFacilityAxis_us-gaap_RevolvingCreditFacilityMember_BHV27yDiN0OhXbnK1dB6aQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:CounterpartyNameAxis">acls:SiliconValleyBankMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:CreditFacilityAxis">us-gaap:RevolvingCreditFacilityMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-07-31</instant>
        </period>
    </context>
    <context id="As_Of_6_30_2021_srt_CounterpartyNameAxis_acls_SiliconValleyBankMember_us-gaap_CreditFacilityAxis_us-gaap_RevolvingCreditFacilityMember_1PtMB98UE0qoxrddCYeVXQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:CounterpartyNameAxis">acls:SiliconValleyBankMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:CreditFacilityAxis">us-gaap:RevolvingCreditFacilityMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-06-30</instant>
        </period>
    </context>
    <context id="As_Of_6_30_2021_srt_CounterpartyNameAxis_acls_SiliconValleyBankMember_us-gaap_CreditFacilityAxis_us-gaap_RevolvingCreditFacilityMember_us-gaap_ShortTermDebtTypeAxis_us-gaap_LetterOfCreditMember_f9a-CoaN6k2l9efRYpvUrA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:CounterpartyNameAxis">acls:SiliconValleyBankMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:CreditFacilityAxis">us-gaap:RevolvingCreditFacilityMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ShortTermDebtTypeAxis">us-gaap:LetterOfCreditMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-06-30</instant>
        </period>
    </context>
    <context id="As_Of_1_30_2015_srt_CounterpartyNameAxis_acls_BeverlyPropertyOwnerLlcMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingMember_jmWTWk8TAU2MlL8_CzlyZQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:CounterpartyNameAxis">acls:BeverlyPropertyOwnerLlcMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">us-gaap:BuildingMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2015-01-30</instant>
        </period>
    </context>
    <context id="As_Of_6_30_2021_srt_RangeAxis_srt_MinimumMember_O-5Oo9z0SEm3XMiGRuOLdQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-06-30</instant>
        </period>
    </context>
    <context id="As_Of_6_30_2021_srt_RangeAxis_srt_MaximumMember_DwErj1lpCkWn0mWzw3VRWw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-06-30</instant>
        </period>
    </context>
    <context id="As_Of_6_30_2021_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_SaleAndLeaseBackMember_XO2P9-16s0C-1V43VObF-w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PropertyPlantAndEquipmentByTypeAxis">acls:SaleAndLeaseBackMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-06-30</instant>
        </period>
    </context>
    <context id="Duration_4_1_2021_To_6_30_2021_srt_RangeAxis_srt_MaximumMember_ZnuU6u7lLU-23WdVDtAsjA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-04-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_6_30_2021_srt_RangeAxis_srt_MaximumMember_20Nye_pU60KPVnSZPrRM4A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2020_To_6_30_2020_srt_RangeAxis_srt_MaximumMember_mZg6wqDjnUOiZUO1ONyttQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-04-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_6_30_2020_srt_RangeAxis_srt_MaximumMember_m9F1xkRmoUWAhyuzx-0Kfg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_us-gaap_ProductMember_m8Lp4xDTCkCzgM248x2JYg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">us-gaap:ProductMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-04-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_ServicesMember_B3p_Js8bOEyj9Cp65IPR3Q">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:ServicesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-04-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_us-gaap_ProductMember_dRwAU8JJFUKNNaVrq5xq8A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">us-gaap:ProductMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_ServicesMember_HIMbhElbm0ifjaWX7uAk6Q">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:ServicesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_us-gaap_ProductMember_6gxzGc6zWUaLTLlbbEBCbg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">us-gaap:ProductMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-04-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_acls_ServicesMember_L8qGAvVgAkyJyGPxzt2lhw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:ServicesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-04-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_us-gaap_ProductMember_mlFbuuqGIkiASdw8XYr6cw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">us-gaap:ProductMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_acls_ServicesMember_mzKMywcD6kqNnycd7mcvxg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:ServicesMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="As_Of_3_31_2021_Qs-qxUhDAk-CSx7C4Sn69A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
        </entity>
        <period>
            <instant>2021-03-31</instant>
        </period>
    </context>
    <context id="As_Of_3_31_2020_-5Cw11QoRE6nHA_ngva07Q">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
        </entity>
        <period>
            <instant>2020-03-31</instant>
        </period>
    </context>
    <context id="Duration_4_1_2021_To_6_30_2021_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_LyZ34Ub6ZE2jg6FrLmqvlQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:SecondLargestCustomerMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-04-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2021_To_6_30_2021_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_ioU0Dgho30i3_iChW8hv2Q">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:LargestCustomerMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-04-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_6_30_2021_srt_MajorCustomersAxis_acls_ThirdLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_j0C_ywhC5kqJU_mGLP_QSQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:ThirdLargestCustomerMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_6_30_2021_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_cQ4F0Y1lpUWtviWdWANV4Q">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:SecondLargestCustomerMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_6_30_2021_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_zupJXrbQo0a-8SQG-rownQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:SecondLargestCustomerMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_6_30_2021_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_eSq_6G4BokG9b5v5esDOdg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:LargestCustomerMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_6_30_2021_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_aiCji2R-9U6Rikh9GFRo_A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:LargestCustomerMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2020_To_6_30_2020_srt_MajorCustomersAxis_acls_ThirdLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_mKAzDHjbQESuboLfItMLNQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:ThirdLargestCustomerMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-04-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2020_To_6_30_2020_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_B0YXsPg90Uu6S-dCilKtng">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:SecondLargestCustomerMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-04-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2020_To_6_30_2020_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_ZV9jt22dP0uGeDhuhWngTQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:LargestCustomerMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-04-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_RiSTmhVFYkGWxNcD0K7wdA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:SecondLargestCustomerMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_aFNIvfPpnkaFunvsLdiyvQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:LargestCustomerMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_6_30_2020_srt_MajorCustomersAxis_acls_ThirdLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_BzG27lzRTEKsj0BTibH8JA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:ThirdLargestCustomerMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_6_30_2020_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_qwe-Gd93y0appJEy4zDK-A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:SecondLargestCustomerMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_6_30_2020_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_F3aWLUtC4kSC605maGsNbg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:MajorCustomersAxis">acls:LargestCustomerMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="As_Of_6_30_2020_vfxHSqwZwkeC1Z0d0SG93A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
        </entity>
        <period>
            <instant>2020-06-30</instant>
        </period>
    </context>
    <context id="As_Of_6_30_2021_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_9xTv3Pq1gUSA_r8gGJJknA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByAssetClassAxis">acls:MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel1Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-06-30</instant>
        </period>
    </context>
    <context id="As_Of_6_30_2021_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_kuTMgTqgiki9V2z7-fMlxg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByAssetClassAxis">acls:MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementBasisAxis">us-gaap:EstimateOfFairValueFairValueDisclosureMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-06-30</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2020_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_FraS8kKQ90OGZQfA-1XGoA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByAssetClassAxis">acls:MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByFairValueHierarchyLevelAxis">us-gaap:FairValueInputsLevel1Member</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2020_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_lVUVH_kXYE6gJiajsabg5w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByAssetClassAxis">acls:MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementBasisAxis">us-gaap:EstimateOfFairValueFairValueDisclosureMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:FairValueByMeasurementFrequencyAxis">us-gaap:FairValueMeasurementsRecurringMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2019_FtHnUOMLjkeW-5RTgMqhrA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
        </entity>
        <period>
            <instant>2019-12-31</instant>
        </period>
    </context>
    <context id="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember__5v7cq8u6k6j4ROt48LqZQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-04-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_LcVXrn_7VEe2d4S1f3MdVA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-03-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_3_31_2021_gPmQL1FpQka6Ntdd-jalcA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-03-31</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2020_To_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_pmCEepBP-UK1T09W5cnpig">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-04-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_6Y1LtOVOr0eV3onJXZYpfg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AdditionalPaidInCapitalMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-03-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_3_31_2020_jBnQ2ZrbZEec0jeFEn7byw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-03-31</endDate>
        </period>
    </context>
    <context id="As_Of_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_lj4AoPsMfkCbp5bs5wvdSw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedTranslationAdjustmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-06-30</instant>
        </period>
    </context>
    <context id="As_Of_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_CCIgEjvg00eOsfhU2VWCfA">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedDefinedBenefitPlansAdjustmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-06-30</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_3gAqRSnshEqM1_usXZTg1g">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedTranslationAdjustmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-12-31</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_hy0Vpmp4gkyQqT14NwPRmQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:StatementEquityComponentsAxis">us-gaap:AccumulatedDefinedBenefitPlansAdjustmentMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2020-12-31</instant>
        </period>
    </context>
    <context id="As_Of_8_3_2021_XPjaK0vTnkm9mIMenPJxzg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
        </entity>
        <period>
            <instant>2021-08-03</instant>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_6_30_2021_us-gaap_PlanNameAxis_acls_StockPlan2000Member_gPtI2pgzX0W3fHkKR6jOFg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:PlanNameAxis">acls:StockPlan2000Member</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_srt_RangeAxis_srt_MinimumMember_eoI0MHitoEKWWaFv3U4W5w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:NewSystemsRevenueMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MinimumMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_srt_RangeAxis_srt_MaximumMember_s_z-Qx9rgU29sO1r_6EnQw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:NewSystemsRevenueMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="srt:RangeAxis">srt:MaximumMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_fPmnjFnuFEeqgfLBIms0Xg">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="srt:ProductOrServiceAxis">acls:NewSystemsRevenueMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="As_Of_6_30_2021_us-gaap_LongtermDebtTypeAxis_us-gaap_RevolvingCreditFacilityMember_TBzxievtWUanTNO0EDnI7w">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:LongtermDebtTypeAxis">us-gaap:RevolvingCreditFacilityMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <instant>2021-06-30</instant>
        </period>
    </context>
    <context id="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
        </entity>
        <period>
            <instant>2020-12-31</instant>
        </period>
    </context>
    <context id="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
        </entity>
        <period>
            <instant>2021-06-30</instant>
        </period>
    </context>
    <context id="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
        </entity>
        <period>
            <startDate>2021-04-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
        </entity>
        <period>
            <startDate>2020-04-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2021_To_6_30_2021_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_eiDKLI-O4kSIZoQQF5U5dw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-04-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_6_30_2021_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_EFekRRJHqkGFwzmsymSNnw">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_6_30_2021_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_wvkv2eEMZ0G0rpajOPkWzQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <context id="Duration_4_1_2020_To_6_30_2020_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_s0j2Mdde6Ue5RgxCmzOmuQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-04-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_12_31_2020_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_ycrS1Nkupk2NK-C8fQ6Qog">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:AccountsReceivableMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CreditConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-12-31</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2020_To_6_30_2020_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_9RBgDTrzwk-3NBew4OGitQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
            <segment>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByBenchmarkAxis">us-gaap:SalesRevenueNetMember</xbrldi:explicitMember>
                <xbrldi:explicitMember dimension="us-gaap:ConcentrationRiskByTypeAxis">us-gaap:CustomerConcentrationRiskMember</xbrldi:explicitMember>
            </segment>
        </entity>
        <period>
            <startDate>2020-01-01</startDate>
            <endDate>2020-06-30</endDate>
        </period>
    </context>
    <context id="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
        </entity>
        <period>
            <startDate>2021-01-01</startDate>
            <endDate>2021-06-30</endDate>
        </period>
    </context>
    <unit id="Unit_Standard_customer_0YOFupMhv0yS1XDebetzdQ">
        <measure>acls:customer</measure>
    </unit>
    <unit id="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">
        <measure>iso4217:USD</measure>
    </unit>
    <unit id="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg">
        <measure>pure</measure>
    </unit>
    <unit id="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">
        <measure>shares</measure>
    </unit>
    <unit id="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ">
        <divide>
            <unitNumerator>
                <measure>iso4217:USD</measure>
            </unitNumerator>
            <unitDenominator>
                <measure>shares</measure>
            </unitDenominator>
        </divide>
    </unit>
    <us-gaap:CommitmentsAndContingencies
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      id="Hidden_UH0MAgsHtE2gWwq6j0Ag4Q"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w"
      xsi:nil="true"/>
    <us-gaap:CommitmentsAndContingencies
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      id="Hidden_YZ86FPjWo0qjHJQeZwg7CQ"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w"
      xsi:nil="true"/>
    <us-gaap:CommonStockSharesOutstanding
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Hidden_vzph5N5n_0CEriURooq3Nw"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">33657000</us-gaap:CommonStockSharesOutstanding>
    <us-gaap:CommonStockSharesOutstanding
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Hidden_hiZnTVFr40CTBLh5hSvD9w"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">33633000</us-gaap:CommonStockSharesOutstanding>
    <us-gaap:OperatingLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      id="Hidden_W9KnNs_BPUCoZMTZ8ue8sA">us-gaap:OperatingLeaseRightOfUseAsset</us-gaap:OperatingLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList>
    <us-gaap:FinanceLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      id="Hidden_A9wG4K0J4UKHRE76HpHnMg">us-gaap:FinanceLeaseRightOfUseAsset</us-gaap:FinanceLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList>
    <us-gaap:OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      id="Hidden_7xdEmmVR-kiGHLFbeFZHxw">us-gaap:OtherLiabilitiesCurrent</us-gaap:OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList>
    <us-gaap:OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      id="Hidden_iFHUJS1o9kGUqT5DhGNMFw">us-gaap:OtherLiabilitiesCurrent</us-gaap:OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList>
    <us-gaap:FinanceLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      id="Hidden_Cv0WhFSvyEe6gpVSxXkYow">us-gaap:OtherLiabilitiesCurrent</us-gaap:FinanceLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList>
    <us-gaap:OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      id="Hidden_dHd0m_i_ckaUDDKTbKPNiA">us-gaap:OtherLiabilitiesNoncurrent</us-gaap:OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList>
    <us-gaap:OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      id="Hidden_oweD4mqRAkyNnxDFt4u52A">us-gaap:OtherLiabilitiesNoncurrent</us-gaap:OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList>
    <us-gaap:FinanceLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      id="Hidden_4JxT6-VdKkyC-ozm6pXPvg">us-gaap:FinanceLeaseLiabilityNoncurrent</us-gaap:FinanceLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList>
    <us-gaap:OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      id="Hidden_EFu-sVp3nUiwnTcDpuJATQ">us-gaap:OtherLiabilitiesCurrent us-gaap:OtherLiabilitiesNoncurrent</us-gaap:OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList>
    <us-gaap:LesseeOperatingLeaseRenewalTerm
      contextRef="As_Of_6_30_2021_srt_RangeAxis_srt_MinimumMember_O-5Oo9z0SEm3XMiGRuOLdQ"
      id="Hidden_zan9aSK8zE6OWipLaR-PbQ">P1Y</us-gaap:LesseeOperatingLeaseRenewalTerm>
    <us-gaap:LesseeOperatingLeaseTermOfContract
      contextRef="As_Of_6_30_2021_srt_RangeAxis_srt_MinimumMember_O-5Oo9z0SEm3XMiGRuOLdQ"
      id="Hidden_92crWef4lkGqNHzmJbisQA">P1Y</us-gaap:LesseeOperatingLeaseTermOfContract>
    <dei:EntityCentralIndexKey
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tc_syJ8tm-MXUqsMtwiHkbrHQ_2_1">0001113232</dei:EntityCentralIndexKey>
    <dei:CurrentFiscalYearEndDate
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tc_2n0Oj3N50k-HfxchW5er7Q_3_1">--12-31</dei:CurrentFiscalYearEndDate>
    <dei:DocumentFiscalYearFocus
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tc_SPN65jn60kW1TwsQBJFC9Q_4_1">2021</dei:DocumentFiscalYearFocus>
    <dei:DocumentFiscalPeriodFocus
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tc_GMZsAQyZd0Ge-C4lNfrGzg_5_1">Q2</dei:DocumentFiscalPeriodFocus>
    <dei:AmendmentFlag
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tc_OrEYIGdj706flOmXlD9tQA_6_1">false</dei:AmendmentFlag>
    <dei:EntityRegistrantName
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Hidden_YldTQHeT102xPCcvq4nmHQ">AXCELIS TECHNOLOGIES INC</dei:EntityRegistrantName>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2021_To_6_30_2021_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_cQ4F0Y1lpUWtviWdWANV4Q"
      decimals="3"
      id="Hidden_du9mfOOU5EGSpVFrDPCNpg"
      unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg">0.296</us-gaap:ConcentrationRiskPercentage1>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2021_To_6_30_2021_srt_MajorCustomersAxis_acls_ThirdLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_j0C_ywhC5kqJU_mGLP_QSQ"
      decimals="3"
      id="Hidden_bCiyUD-GJEW9dwOcR7kUFA"
      unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg">0.296</us-gaap:ConcentrationRiskPercentage1>
    <dei:DocumentType
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Narr_7Q_h0dPF5EmtMQQ3CX9HoA">10-Q</dei:DocumentType>
    <dei:DocumentQuarterlyReport
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Narr_DTedQSObJkSx5ZzUWvE9zw">true</dei:DocumentQuarterlyReport>
    <dei:DocumentPeriodEndDate
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Narr_A44B36zVME-Ceeu5MZck-Q">2021-06-30</dei:DocumentPeriodEndDate>
    <dei:DocumentTransitionReport
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Narr_dzwK3pNh4UW2zb9tSjJFyw">false</dei:DocumentTransitionReport>
    <dei:EntityFileNumber
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Narr_UKXlZUrnP0Kmzrt0R9LICg">000-30941</dei:EntityFileNumber>
    <dei:EntityIncorporationStateCountryCode
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tc_pj8aoki6w0erT37FQUZapg_1_0">DE</dei:EntityIncorporationStateCountryCode>
    <dei:EntityTaxIdentificationNumber
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tc_2rmbGu5y70WBGAEIdQxP8A_1_2">34-1818596</dei:EntityTaxIdentificationNumber>
    <dei:EntityAddressAddressLine1
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Narr_GzMjOqy850aS3VMi51-Q1g">108 Cherry Hill Drive</dei:EntityAddressAddressLine1>
    <dei:EntityAddressCityOrTown
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Narr_RHmmUXihykOj3KX7GEKqgg">Beverly</dei:EntityAddressCityOrTown>
    <dei:EntityAddressStateOrProvince
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Narr_ud_T2usNE0G2dhcI45KOVg">MA</dei:EntityAddressStateOrProvince>
    <dei:EntityAddressPostalZipCode
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Narr_NkO3dm-Hy0Kw5Pppe8DWuQ">01915</dei:EntityAddressPostalZipCode>
    <dei:CityAreaCode
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Narr_jrPkDcHwTUufZt3y2VGeeQ">978</dei:CityAreaCode>
    <dei:LocalPhoneNumber
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Narr_pQGTGMaorEirP_EDBAqPtQ">787-4000</dei:LocalPhoneNumber>
    <dei:Security12bTitle
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tc_1vpiXLNVTEGX7EMtnDrdjQ_2_0">Common Stock, $0.001 par value</dei:Security12bTitle>
    <dei:TradingSymbol
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tc_WeaWqdc_E0acc0nH4YIylg_2_1">ACLS</dei:TradingSymbol>
    <dei:SecurityExchangeName
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tc_0Sa3sz1BOke7cLn8j28pEQ_2_2">NASDAQ</dei:SecurityExchangeName>
    <dei:EntityCurrentReportingStatus
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Narr_PW_pzecvpUW4bDbUHsyd2g">Yes</dei:EntityCurrentReportingStatus>
    <dei:EntityInteractiveDataCurrent
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Narr_HVaWuNMPj0iWiF4c_zjvSQ">Yes</dei:EntityInteractiveDataCurrent>
    <dei:EntityFilerCategory
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Narr_mufizb6sZUWWAlUCf7XBXw">Large Accelerated Filer</dei:EntityFilerCategory>
    <dei:EntitySmallBusiness
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Narr_TEf2EqQll0eGMC0bt3xRfw">false</dei:EntitySmallBusiness>
    <dei:EntityEmergingGrowthCompany
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Narr_s1iAfBrLKUy05NaU9SBWPA">false</dei:EntityEmergingGrowthCompany>
    <dei:EntityShellCompany
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Narr_E-FSB0OCQEuzinBLQ9rc6w">false</dei:EntityShellCompany>
    <dei:EntityCommonStockSharesOutstanding
      contextRef="As_Of_8_3_2021_XPjaK0vTnkm9mIMenPJxzg"
      decimals="INF"
      id="Narr_Q5AYkC3UmUSixVlHGHtM4A"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">33574743</dei:EntityCommonStockSharesOutstanding>
    <us-gaap:Revenues
      contextRef="Duration_4_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_us-gaap_ProductMember_m8Lp4xDTCkCzgM248x2JYg"
      decimals="-3"
      id="Tc_yhlje8_B8UivryMkcO_sUA_5_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">140156000</us-gaap:Revenues>
    <us-gaap:Revenues
      contextRef="Duration_4_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_us-gaap_ProductMember_6gxzGc6zWUaLTLlbbEBCbg"
      decimals="-3"
      id="Tc_EC1921suX0O3ecVmbZvLwQ_5_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">117194000</us-gaap:Revenues>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_us-gaap_ProductMember_dRwAU8JJFUKNNaVrq5xq8A"
      decimals="-3"
      id="Tc_9M5vUFhLYEWjD1VlthNCvw_5_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">266765000</us-gaap:Revenues>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_us-gaap_ProductMember_mlFbuuqGIkiASdw8XYr6cw"
      decimals="-3"
      id="Tc__upR2K8zX02UhEcmWYSh_Q_5_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">229327000</us-gaap:Revenues>
    <us-gaap:Revenues
      contextRef="Duration_4_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_ServicesMember_B3p_Js8bOEyj9Cp65IPR3Q"
      decimals="-3"
      id="Tc_8Z8-IR9CDkm17A2nu1Rxow_6_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">7118000</us-gaap:Revenues>
    <us-gaap:Revenues
      contextRef="Duration_4_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_acls_ServicesMember_L8qGAvVgAkyJyGPxzt2lhw"
      decimals="-3"
      id="Tc_4riuv7W-X0WFWCyZ7fjcoA_6_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">5771000</us-gaap:Revenues>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_ServicesMember_HIMbhElbm0ifjaWX7uAk6Q"
      decimals="-3"
      id="Tc_pkWyvje8Vkq1hz1_xjGFbg_6_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">13285000</us-gaap:Revenues>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_acls_ServicesMember_mzKMywcD6kqNnycd7mcvxg"
      decimals="-3"
      id="Tc_TrkasPssPkOfF-eh29pGWQ_6_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">12629000</us-gaap:Revenues>
    <us-gaap:Revenues
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_FohOEfBdrECFgzXA4Vh07A_7_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">147274000</us-gaap:Revenues>
    <us-gaap:Revenues
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_g4KgDrvWG02oeNJUfxybeQ_7_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">122965000</us-gaap:Revenues>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_j1NC4LPS2UOa8-t3ULUHmg_7_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">280050000</us-gaap:Revenues>
    <us-gaap:Revenues
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_561MdHdOdEaoLUQCdenyDw_7_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">241956000</us-gaap:Revenues>
    <us-gaap:CostOfGoodsAndServicesSold
      contextRef="Duration_4_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_us-gaap_ProductMember_m8Lp4xDTCkCzgM248x2JYg"
      decimals="-3"
      id="Tc_7v4dau06QkGfRjKDwxY1MA_9_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">76688000</us-gaap:CostOfGoodsAndServicesSold>
    <us-gaap:CostOfGoodsAndServicesSold
      contextRef="Duration_4_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_us-gaap_ProductMember_6gxzGc6zWUaLTLlbbEBCbg"
      decimals="-3"
      id="Tc_-B2YgpHewUu9d6Tj0we60g_9_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">65519000</us-gaap:CostOfGoodsAndServicesSold>
    <us-gaap:CostOfGoodsAndServicesSold
      contextRef="Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_us-gaap_ProductMember_dRwAU8JJFUKNNaVrq5xq8A"
      decimals="-3"
      id="Tc_YgYH5NWGgEOQm5P16Wy0Bg_9_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">147022000</us-gaap:CostOfGoodsAndServicesSold>
    <us-gaap:CostOfGoodsAndServicesSold
      contextRef="Duration_1_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_us-gaap_ProductMember_mlFbuuqGIkiASdw8XYr6cw"
      decimals="-3"
      id="Tc_6jLMu2QYcECscNKR2UoU4Q_9_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">132691000</us-gaap:CostOfGoodsAndServicesSold>
    <us-gaap:CostOfGoodsAndServicesSold
      contextRef="Duration_4_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_ServicesMember_B3p_Js8bOEyj9Cp65IPR3Q"
      decimals="-3"
      id="Tc_50DTXN4g8E-z9Fu6Ze8hew_10_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">6572000</us-gaap:CostOfGoodsAndServicesSold>
    <us-gaap:CostOfGoodsAndServicesSold
      contextRef="Duration_4_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_acls_ServicesMember_L8qGAvVgAkyJyGPxzt2lhw"
      decimals="-3"
      id="Tc_dOMuIbpFbkWWoP00_RkkEw_10_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">5547000</us-gaap:CostOfGoodsAndServicesSold>
    <us-gaap:CostOfGoodsAndServicesSold
      contextRef="Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_ServicesMember_HIMbhElbm0ifjaWX7uAk6Q"
      decimals="-3"
      id="Tc_8Wn7NRTK-U2UK8J2GfDymA_10_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">12579000</us-gaap:CostOfGoodsAndServicesSold>
    <us-gaap:CostOfGoodsAndServicesSold
      contextRef="Duration_1_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_acls_ServicesMember_mzKMywcD6kqNnycd7mcvxg"
      decimals="-3"
      id="Tc_qUv5uqjuNk2Boir0zf-ICQ_10_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">11817000</us-gaap:CostOfGoodsAndServicesSold>
    <us-gaap:CostOfGoodsAndServicesSold
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_az-juuFQO0-ss0S8joQD7g_11_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">83260000</us-gaap:CostOfGoodsAndServicesSold>
    <us-gaap:CostOfGoodsAndServicesSold
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_l4klwmra90G2vnHC4lkkYQ_11_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">71066000</us-gaap:CostOfGoodsAndServicesSold>
    <us-gaap:CostOfGoodsAndServicesSold
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_sadzZjzUuEiQE9gl5QTfFw_11_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">159601000</us-gaap:CostOfGoodsAndServicesSold>
    <us-gaap:CostOfGoodsAndServicesSold
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_KzaIO0b6vkaIAeQEevCoPQ_11_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">144508000</us-gaap:CostOfGoodsAndServicesSold>
    <us-gaap:GrossProfit
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_GOTLX_3MoUCLMjBk83t7SA_12_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">64014000</us-gaap:GrossProfit>
    <us-gaap:GrossProfit
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_70et4BnAoU-wqpTXifEXng_12_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">51899000</us-gaap:GrossProfit>
    <us-gaap:GrossProfit
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_qaA2ATJqskWVju2mV_bo6A_12_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">120449000</us-gaap:GrossProfit>
    <us-gaap:GrossProfit
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_ubGOjlsDa0CN6-T1EYqKfg_12_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">97448000</us-gaap:GrossProfit>
    <us-gaap:ResearchAndDevelopmentExpense
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_OOnlf1brPUW1SfcdAUs3mw_14_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">16623000</us-gaap:ResearchAndDevelopmentExpense>
    <us-gaap:ResearchAndDevelopmentExpense
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_gCsIlc_rbU6ZWjWN9CqoHA_14_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">16040000</us-gaap:ResearchAndDevelopmentExpense>
    <us-gaap:ResearchAndDevelopmentExpense
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_Qk7hVzLcpkGplrLxbf8Y5A_14_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">32308000</us-gaap:ResearchAndDevelopmentExpense>
    <us-gaap:ResearchAndDevelopmentExpense
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_4kfOhFS9hUWIpO8v2DttFA_14_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">30646000</us-gaap:ResearchAndDevelopmentExpense>
    <us-gaap:SellingAndMarketingExpense
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_i46adAvXkUKOpMT-6mawBw_15_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">12177000</us-gaap:SellingAndMarketingExpense>
    <us-gaap:SellingAndMarketingExpense
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_SyMtYFE6pUmnlRwYZOWotA_15_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">9437000</us-gaap:SellingAndMarketingExpense>
    <us-gaap:SellingAndMarketingExpense
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_ZKaY56EyBkyLoojXxD0nrw_15_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">22564000</us-gaap:SellingAndMarketingExpense>
    <us-gaap:SellingAndMarketingExpense
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_S-tkiT9xQEyCkVU7w3LhUQ_15_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">17641000</us-gaap:SellingAndMarketingExpense>
    <us-gaap:GeneralAndAdministrativeExpense
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_8ZRZoqMAHUqFW7oU4VfDbg_16_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">11217000</us-gaap:GeneralAndAdministrativeExpense>
    <us-gaap:GeneralAndAdministrativeExpense
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_s51MVscUaUWOFPE8MjwDug_16_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">10041000</us-gaap:GeneralAndAdministrativeExpense>
    <us-gaap:GeneralAndAdministrativeExpense
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_ijmUKXxA_E62VpcNshyGRw_16_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">21230000</us-gaap:GeneralAndAdministrativeExpense>
    <us-gaap:GeneralAndAdministrativeExpense
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_Qkmm_XUddUWeJcQGINRgbQ_16_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">19077000</us-gaap:GeneralAndAdministrativeExpense>
    <us-gaap:OperatingExpenses
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_d41Pop1ud0acMjw1pKYIVg_17_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">40017000</us-gaap:OperatingExpenses>
    <us-gaap:OperatingExpenses
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_GzO9y3XG8kOK8ozklPSICQ_17_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">35518000</us-gaap:OperatingExpenses>
    <us-gaap:OperatingExpenses
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_iGuGF4-m1E6vF-q2crt5gA_17_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">76102000</us-gaap:OperatingExpenses>
    <us-gaap:OperatingExpenses
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_QDDhlL96PkiOqe6k8O8iNA_17_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">67364000</us-gaap:OperatingExpenses>
    <us-gaap:OperatingIncomeLoss
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_yrG_zSOgXUasLFeKPkBNSg_18_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">23997000</us-gaap:OperatingIncomeLoss>
    <us-gaap:OperatingIncomeLoss
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_MWgrvzWQrEaf6pw6tsWSvQ_18_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">16381000</us-gaap:OperatingIncomeLoss>
    <us-gaap:OperatingIncomeLoss
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_Yqpn521sCUehbgCzfITUvw_18_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">44347000</us-gaap:OperatingIncomeLoss>
    <us-gaap:OperatingIncomeLoss
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_a3gUQkc5AkW-p7ftW9l88Q_18_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">30084000</us-gaap:OperatingIncomeLoss>
    <us-gaap:InvestmentIncomeInterest
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_0l817oH6wUKCBk61DQE-PQ_20_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">40000</us-gaap:InvestmentIncomeInterest>
    <us-gaap:InvestmentIncomeInterest
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_uVeUOaOxCECLPCUEstiBLg_20_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">70000</us-gaap:InvestmentIncomeInterest>
    <us-gaap:InvestmentIncomeInterest
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_y5v7NGL6LU-Dgdt38XZe8A_20_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">73000</us-gaap:InvestmentIncomeInterest>
    <us-gaap:InvestmentIncomeInterest
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc__mn-Jtg8T0yD0t1uCiMHDQ_20_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">552000</us-gaap:InvestmentIncomeInterest>
    <us-gaap:InterestExpense
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_tHhvFDaTeUaJsqq_mIuq3g_21_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">1274000</us-gaap:InterestExpense>
    <us-gaap:InterestExpense
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_xPJQGRBVLUKBV9CMLdSmRA_21_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">1299000</us-gaap:InterestExpense>
    <us-gaap:InterestExpense
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_IG7ExyxMeUm66rWETjbnew_21_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">2303000</us-gaap:InterestExpense>
    <us-gaap:InterestExpense
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_SCPqG92bFkW6YJydsYTczA_21_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">2602000</us-gaap:InterestExpense>
    <us-gaap:OtherNonoperatingIncomeExpense
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_uGhxSAtrKU-UaeHFWIMYfw_22_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-15000</us-gaap:OtherNonoperatingIncomeExpense>
    <us-gaap:OtherNonoperatingIncomeExpense
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_aPJYYmIpS0uLNAF96DEDog_22_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">421000</us-gaap:OtherNonoperatingIncomeExpense>
    <us-gaap:OtherNonoperatingIncomeExpense
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_wCs-zQXxvESvGvb59urD4Q_22_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-1168000</us-gaap:OtherNonoperatingIncomeExpense>
    <us-gaap:OtherNonoperatingIncomeExpense
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_K-dfBiT8nE62UHUPqoNKvg_22_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-199000</us-gaap:OtherNonoperatingIncomeExpense>
    <us-gaap:NonoperatingIncomeExpense
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_8v0x_tJGIkakxtk3sx6EFw_23_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-1249000</us-gaap:NonoperatingIncomeExpense>
    <us-gaap:NonoperatingIncomeExpense
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_l-6g6SwdWUi1gaTozqaVHQ_23_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-808000</us-gaap:NonoperatingIncomeExpense>
    <us-gaap:NonoperatingIncomeExpense
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_SjgiA1uiBUmxvTYNYapkwg_23_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-3398000</us-gaap:NonoperatingIncomeExpense>
    <us-gaap:NonoperatingIncomeExpense
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_qyx7fI5C60ytdefYlUj1Cg_23_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-2249000</us-gaap:NonoperatingIncomeExpense>
    <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_MAsssxQHwkqr2mSgmE1j0g_24_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">22748000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest>
    <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_F_MzWX5gr0itHFa5FRGfAw_24_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">15573000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest>
    <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_iradXfD9i0G5iso3duliFA_24_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">40949000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest>
    <us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_PwfycA7R3kucjF3k-_iUpQ_24_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">27835000</us-gaap:IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest>
    <us-gaap:IncomeTaxExpenseBenefit
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_LwhWBLh5oEO3F6KQmINl4w_25_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">3842000</us-gaap:IncomeTaxExpenseBenefit>
    <us-gaap:IncomeTaxExpenseBenefit
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_BQZqOz5Le0eRw4DSaBBxqg_25_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">2271000</us-gaap:IncomeTaxExpenseBenefit>
    <us-gaap:IncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_USg7K4we1EqnJ2ce9PupEw_25_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">5563000</us-gaap:IncomeTaxExpenseBenefit>
    <us-gaap:IncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_9EU0b8wmCU-8mJthFVCB_A_25_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">3312000</us-gaap:IncomeTaxExpenseBenefit>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_PhdwkORSAUaVfG9Jk7VyOQ_26_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">18906000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_zXk1JgnNs0aVM4A06lCKww_26_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">13302000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_f9vpWQg5akCFh-NmQGns4Q_26_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">35386000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_-jJxPSYwJUuRJyEkTOgslQ_26_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">24523000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:EarningsPerShareBasic
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="2"
      id="Tc_F2diZK84_EmPp00tuR2D0Q_28_3"
      unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ">0.56</us-gaap:EarningsPerShareBasic>
    <us-gaap:EarningsPerShareBasic
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="2"
      id="Tc_UVRDLqCgeUmVp3I86KZu2w_28_6"
      unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ">0.40</us-gaap:EarningsPerShareBasic>
    <us-gaap:EarningsPerShareBasic
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="2"
      id="Tc_z3zNnHmd3ECkwctcsX0cJA_28_9"
      unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ">1.05</us-gaap:EarningsPerShareBasic>
    <us-gaap:EarningsPerShareBasic
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="2"
      id="Tc_jSSVJ7_jOUmo0pKrdKNqfw_28_12"
      unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ">0.74</us-gaap:EarningsPerShareBasic>
    <us-gaap:EarningsPerShareDiluted
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="2"
      id="Tc_gk6w-5OD90CSdgBvQSnD-Q_29_3"
      unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ">0.55</us-gaap:EarningsPerShareDiluted>
    <us-gaap:EarningsPerShareDiluted
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="2"
      id="Tc_8katv7BcxEWMSvWpfYx24g_29_6"
      unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ">0.39</us-gaap:EarningsPerShareDiluted>
    <us-gaap:EarningsPerShareDiluted
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="2"
      id="Tc_1SmwDqA6BEq0bB68R92F-Q_29_9"
      unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ">1.03</us-gaap:EarningsPerShareDiluted>
    <us-gaap:EarningsPerShareDiluted
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="2"
      id="Tc_gX2Gca92ZEisSYopbZTh4Q_29_12"
      unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ">0.72</us-gaap:EarningsPerShareDiluted>
    <us-gaap:WeightedAverageNumberOfSharesOutstandingBasic
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_arBlv-RI_UCp3PQzd-s0Gg_31_3"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">33677000</us-gaap:WeightedAverageNumberOfSharesOutstandingBasic>
    <us-gaap:WeightedAverageNumberOfSharesOutstandingBasic
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_7xn2k3e_gE65khRZ17FoAA_31_6"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">33116000</us-gaap:WeightedAverageNumberOfSharesOutstandingBasic>
    <us-gaap:WeightedAverageNumberOfSharesOutstandingBasic
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_ooIbddQiXkqKmZZHVDHnPg_31_9"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">33696000</us-gaap:WeightedAverageNumberOfSharesOutstandingBasic>
    <us-gaap:WeightedAverageNumberOfSharesOutstandingBasic
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_VtxuuW0Ub0ec9OIYs8uQqw_31_12"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">32998000</us-gaap:WeightedAverageNumberOfSharesOutstandingBasic>
    <us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_0cXzjb5fL0yzHblBd5LyPg_32_3"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">34311000</us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding>
    <us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_u8f_K6rU50e3msp0X0FWUQ_32_6"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">33958000</us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding>
    <us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_uu2jOMYZ7kOkZr0olqzHtA_32_9"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">34473000</us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding>
    <us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_DbK2Ghq99E2HlQH-zjqJgg_32_12"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">34023000</us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_QPl3nS5qKkSZADDTwavKWQ_4_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">18906000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc__NN_WrqiykegnWripRHoww_4_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">13302000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_u0eu3EX06kqSMn8SBN0PVQ_4_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">35386000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_Lyr9lEf8hECmNvsDTxCoKQ_4_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">24523000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_iNmFWpiHG0uivNzlOBbnqA_6_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">552000</us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_i_IeePXCJ0m-t_d0P-MKLg_6_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">836000</us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_baYmbjOre0uyCYQfVrEwkw_6_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-820000</us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_yt4sxce_A0W4JLoHbVa3DA_6_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-276000</us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_xHzatY7AJUOWHghF8ylGBg_7_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-34000</us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_D13ZupFd-0Wh2HqtjgKjxQ_7_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-57000</us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_S61XsronI0qOTCoUt_b2DQ_7_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-54000</us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_AHIOTKBkQk-mekN-VpnYEQ_7_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-114000</us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeLossNetOfTax
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_6J3ZxzQ-qUSDLJkBhHwx5Q_8_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">586000</us-gaap:OtherComprehensiveIncomeLossNetOfTax>
    <us-gaap:OtherComprehensiveIncomeLossNetOfTax
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_O0MI0v9YGE-gUeqc5-dJuA_8_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">893000</us-gaap:OtherComprehensiveIncomeLossNetOfTax>
    <us-gaap:OtherComprehensiveIncomeLossNetOfTax
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_YgBN_6iiY0Oh63NHVCDREA_8_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-766000</us-gaap:OtherComprehensiveIncomeLossNetOfTax>
    <us-gaap:OtherComprehensiveIncomeLossNetOfTax
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_tBgsxp3TVEOe6qUNfjP8aw_8_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-162000</us-gaap:OtherComprehensiveIncomeLossNetOfTax>
    <us-gaap:ComprehensiveIncomeNetOfTax
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_Rz1BqBySpkK5GiI_-8Xl3g_9_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">19492000</us-gaap:ComprehensiveIncomeNetOfTax>
    <us-gaap:ComprehensiveIncomeNetOfTax
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_ybdVbrwQ_Ey1XzftVJ6oiA_9_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">14195000</us-gaap:ComprehensiveIncomeNetOfTax>
    <us-gaap:ComprehensiveIncomeNetOfTax
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_HU20QR2RN0yVDTMUMFa5nw_9_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">34620000</us-gaap:ComprehensiveIncomeNetOfTax>
    <us-gaap:ComprehensiveIncomeNetOfTax
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_OD1EWrTiKUSWBu4Ebyedaw_9_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">24361000</us-gaap:ComprehensiveIncomeNetOfTax>
    <us-gaap:CashAndCashEquivalentsAtCarryingValue
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_h_OLD2z9w0a-wfhCwU9l_A_5_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">219731000</us-gaap:CashAndCashEquivalentsAtCarryingValue>
    <us-gaap:CashAndCashEquivalentsAtCarryingValue
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_46pqanqyVE-4dp2YSS9B0A_5_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">203479000</us-gaap:CashAndCashEquivalentsAtCarryingValue>
    <us-gaap:AccountsReceivableNetCurrent
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_yqcrJeaUGUytJJcHGYE2TA_6_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">79544000</us-gaap:AccountsReceivableNetCurrent>
    <us-gaap:AccountsReceivableNetCurrent
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_GAB1qPG-JEqmWbKzLsWdjA_6_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">86865000</us-gaap:AccountsReceivableNetCurrent>
    <us-gaap:InventoryNet
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_TCcGJQITWEOKMT8RscFV1A_7_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">192321000</us-gaap:InventoryNet>
    <us-gaap:InventoryNet
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_nLkn7i_W9ki2nOlLWHwzKQ_7_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">161076000</us-gaap:InventoryNet>
    <us-gaap:PrepaidExpenseAndOtherAssetsCurrent
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_2s3lc1Jl5UCX4R_DA_lj9g_8_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">22535000</us-gaap:PrepaidExpenseAndOtherAssetsCurrent>
    <us-gaap:PrepaidExpenseAndOtherAssetsCurrent
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_dQnCUqykEkGQ8QJipYwZ8A_8_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">19371000</us-gaap:PrepaidExpenseAndOtherAssetsCurrent>
    <us-gaap:AssetsCurrent
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_vKG3raoUwU2uOKiGhy6jWQ_9_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">514131000</us-gaap:AssetsCurrent>
    <us-gaap:AssetsCurrent
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_7gUrNYSWkkKgHvuSDkSq0g_9_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">470791000</us-gaap:AssetsCurrent>
    <us-gaap:PropertyPlantAndEquipmentNet
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_FF_3YuUup0S9JxBG3fZwnA_10_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">30683000</us-gaap:PropertyPlantAndEquipmentNet>
    <us-gaap:PropertyPlantAndEquipmentNet
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_z0i6f_BzUkurLXY93aJWgg_10_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">29840000</us-gaap:PropertyPlantAndEquipmentNet>
    <us-gaap:OperatingLeaseRightOfUseAsset
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_L0_9WLwcikGMeuogXgADfQ_11_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">7626000</us-gaap:OperatingLeaseRightOfUseAsset>
    <us-gaap:OperatingLeaseRightOfUseAsset
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_xnLyEDqouEydmXCTRmRIyw_11_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">4542000</us-gaap:OperatingLeaseRightOfUseAsset>
    <us-gaap:FinanceLeaseRightOfUseAsset
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_UIttTY8b_US9Mc_5d-CqcA_12_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">19889000</us-gaap:FinanceLeaseRightOfUseAsset>
    <us-gaap:FinanceLeaseRightOfUseAsset
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_I_JQ0ZBOUUGUR9hekdZLJQ_12_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">20544000</us-gaap:FinanceLeaseRightOfUseAsset>
    <us-gaap:RestrictedCashAndCashEquivalentsNoncurrent
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_dErDqOvbEUaiIIjj4bO_Eg_13_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">755000</us-gaap:RestrictedCashAndCashEquivalentsNoncurrent>
    <us-gaap:RestrictedCashAndCashEquivalentsNoncurrent
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc__zQ037TAnEWEa40-VUEpjQ_13_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">753000</us-gaap:RestrictedCashAndCashEquivalentsNoncurrent>
    <us-gaap:DeferredIncomeTaxAssetsNet
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_gko67WpiL0OgRj2Yid0E1g_14_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">51386000</us-gaap:DeferredIncomeTaxAssetsNet>
    <us-gaap:DeferredIncomeTaxAssetsNet
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_FfVs81tZrEaM7fKNilOo9w_14_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">57851000</us-gaap:DeferredIncomeTaxAssetsNet>
    <us-gaap:OtherAssetsNoncurrent
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_C4cAT7C0z0G-Cuv6-eBcaA_15_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">36170000</us-gaap:OtherAssetsNoncurrent>
    <us-gaap:OtherAssetsNoncurrent
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_PqM6pXD_u0C5vKctoEATyg_15_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">40303000</us-gaap:OtherAssetsNoncurrent>
    <us-gaap:Assets
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_79aYBHEAKkaqKlWxDA4A7A_16_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">660640000</us-gaap:Assets>
    <us-gaap:Assets
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_LBu45smyBE-rF0Lwlx15sg_16_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">624624000</us-gaap:Assets>
    <us-gaap:AccountsPayableCurrent
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_9mP9ziRLlkCjKJ1JWP24Lg_19_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">40695000</us-gaap:AccountsPayableCurrent>
    <us-gaap:AccountsPayableCurrent
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_T07scU1zJUKI7iD_nbh0cA_19_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">24013000</us-gaap:AccountsPayableCurrent>
    <us-gaap:EmployeeRelatedLiabilitiesCurrent
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_WckHr0FakUyaOwFWt4d5QA_20_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">14906000</us-gaap:EmployeeRelatedLiabilitiesCurrent>
    <us-gaap:EmployeeRelatedLiabilitiesCurrent
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_UTQqHYBTpkqudGKyNCp7Jw_20_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">24562000</us-gaap:EmployeeRelatedLiabilitiesCurrent>
    <us-gaap:ProductWarrantyAccrualClassifiedCurrent
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_DxcJ0R4Rk0CJjffh1qd1Iw_21_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">4690000</us-gaap:ProductWarrantyAccrualClassifiedCurrent>
    <us-gaap:ProductWarrantyAccrualClassifiedCurrent
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_cFXta5eXmkqjxESlhj-sXQ_21_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">4280000</us-gaap:ProductWarrantyAccrualClassifiedCurrent>
    <us-gaap:AccruedIncomeTaxesCurrent
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_GwDlLXwXvkCltsErsJrFeQ_22_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">622000</us-gaap:AccruedIncomeTaxesCurrent>
    <us-gaap:AccruedIncomeTaxesCurrent
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_SWtiDBfDmUKdebyMRkmAhA_22_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">654000</us-gaap:AccruedIncomeTaxesCurrent>
    <us-gaap:ContractWithCustomerLiabilityCurrent
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_dO8bDyS4TESqP_BA9-FFaA_23_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">34112000</us-gaap:ContractWithCustomerLiabilityCurrent>
    <us-gaap:ContractWithCustomerLiabilityCurrent
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_NjuG2srEBUmw-S0Vzj0eEQ_23_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">21221000</us-gaap:ContractWithCustomerLiabilityCurrent>
    <us-gaap:FinanceLeaseLiabilityCurrent
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_43ljnWdFPEC89EEpYCMFQg_24_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">864000</us-gaap:FinanceLeaseLiabilityCurrent>
    <us-gaap:FinanceLeaseLiabilityCurrent
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_qicmOvIHIkK4BuLcNTMSLQ_24_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">756000</us-gaap:FinanceLeaseLiabilityCurrent>
    <us-gaap:OtherLiabilitiesCurrent
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_CTOygdTBPkG8uVMjJcHXQg_25_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">10585000</us-gaap:OtherLiabilitiesCurrent>
    <us-gaap:OtherLiabilitiesCurrent
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_OUWVAWS3sEWMA8serhOenw_25_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">8945000</us-gaap:OtherLiabilitiesCurrent>
    <us-gaap:LiabilitiesCurrent
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_8oQo-9K2fEODZncRQKY0Gg_26_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">106474000</us-gaap:LiabilitiesCurrent>
    <us-gaap:LiabilitiesCurrent
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_SWShY7WgSU61eDzTC2gNXg_26_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">84431000</us-gaap:LiabilitiesCurrent>
    <us-gaap:FinanceLeaseLiabilityNoncurrent
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_8zjb-sD1-ESlAi6gu7U-uA_27_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">46923000</us-gaap:FinanceLeaseLiabilityNoncurrent>
    <us-gaap:FinanceLeaseLiabilityNoncurrent
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_D0HRswsqdEi_bKWbibdlHQ_27_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">47393000</us-gaap:FinanceLeaseLiabilityNoncurrent>
    <us-gaap:ContractWithCustomerLiabilityNoncurrent
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_ZjyqpPWwhku8Xr2o6rVptQ_28_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">1406000</us-gaap:ContractWithCustomerLiabilityNoncurrent>
    <us-gaap:ContractWithCustomerLiabilityNoncurrent
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_8sDdHakgbUuYrKrEntZ5WQ_28_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">1837000</us-gaap:ContractWithCustomerLiabilityNoncurrent>
    <us-gaap:OtherLiabilitiesNoncurrent
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_T5F428h0BEubgG0RsFnMng_29_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">11735000</us-gaap:OtherLiabilitiesNoncurrent>
    <us-gaap:OtherLiabilitiesNoncurrent
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_S-Bts5VImE6ATrwCENuaGQ_29_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">9361000</us-gaap:OtherLiabilitiesNoncurrent>
    <us-gaap:Liabilities
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_V0YydiwFEEmhGD0tUvo7ng_30_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">166538000</us-gaap:Liabilities>
    <us-gaap:Liabilities
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_Ady-qYu5TUW5qsklSXImNQ_30_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">143022000</us-gaap:Liabilities>
    <us-gaap:CommonStockParOrStatedValuePerShare
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="INF"
      id="Narr_CkLAyq6yLk28CqeOAuDcuw"
      unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ">0.001</us-gaap:CommonStockParOrStatedValuePerShare>
    <us-gaap:CommonStockParOrStatedValuePerShare
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="INF"
      id="Narr_Hih9rBmWO0eWPzJGP39ywQ"
      unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ">0.001</us-gaap:CommonStockParOrStatedValuePerShare>
    <us-gaap:CommonStockSharesAuthorized
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Narr_1UJcAbqY-kaLpxUEP00gOg"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">75000000</us-gaap:CommonStockSharesAuthorized>
    <us-gaap:CommonStockSharesAuthorized
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Narr_hghZ0gvXz06na0YIhBfQHw"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">75000000</us-gaap:CommonStockSharesAuthorized>
    <us-gaap:CommonStockSharesIssued
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Narr_zKt4-J9MpUqEZfbPoBjbKQ"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">33657000</us-gaap:CommonStockSharesIssued>
    <us-gaap:CommonStockSharesIssued
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Narr_3ZjpDy1OIkCSwz4IaFMS4g"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">33633000</us-gaap:CommonStockSharesIssued>
    <us-gaap:CommonStockValueOutstanding
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_VW12RggmFkqo4cbdtvln4Q_33_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">34000</us-gaap:CommonStockValueOutstanding>
    <us-gaap:CommonStockValueOutstanding
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_gJ--z3tAhU-_p1aI4Pulvw_33_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">34000</us-gaap:CommonStockValueOutstanding>
    <us-gaap:AdditionalPaidInCapital
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_cZLlvcX6h0aNvWnVnL6koQ_34_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">561680000</us-gaap:AdditionalPaidInCapital>
    <us-gaap:AdditionalPaidInCapital
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_diq8QD0-8EiZ8P-12Dq27Q_34_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">570102000</us-gaap:AdditionalPaidInCapital>
    <us-gaap:RetainedEarningsAccumulatedDeficit
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_FusfNExoLk6KjzIe8j-Q1Q_35_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-70281000</us-gaap:RetainedEarningsAccumulatedDeficit>
    <us-gaap:RetainedEarningsAccumulatedDeficit
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_8hbHmXMO1U-f_9Xj9yWFYA_35_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-91969000</us-gaap:RetainedEarningsAccumulatedDeficit>
    <us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_jBC4Xn7yv0S-cU4gYGckHw_36_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">2669000</us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax>
    <us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_QaPl4nRCS0mQyEExrulvrg_36_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">3435000</us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_Ox-xYDRijkyX5Di5lzjt9Q_37_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">494102000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_tB5o8QFVbEaNpgDDhzKpwA_37_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">481602000</us-gaap:StockholdersEquity>
    <us-gaap:LiabilitiesAndStockholdersEquity
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_gFTr9dYvSUCS50En7n3Olg_38_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">660640000</us-gaap:LiabilitiesAndStockholdersEquity>
    <us-gaap:LiabilitiesAndStockholdersEquity
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_6nLvrFc_JESA199RaE-nIw_38_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">624624000</us-gaap:LiabilitiesAndStockholdersEquity>
    <us-gaap:SharesOutstanding
      contextRef="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_SoIXUiAhFUmgd7essTKzKg"
      decimals="-3"
      id="Tc_LrbDbW9_10ehiaJI2mebFw_5_3"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">32585000</us-gaap:SharesOutstanding>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_SoIXUiAhFUmgd7essTKzKg"
      decimals="-3"
      id="Tc_vJRolRzZ3E2h067R1r-xig_5_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">33000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_d0eqQfbvBEmk6gA7IHzN4w"
      decimals="-3"
      id="Tc_RcOZRSsNY0aNKAtETmNKbw_5_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">559878000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_BYlqNNHP6kuAhGqLvpu1aA"
      decimals="-3"
      id="Tc_pHpbsANoFkiQtnFwFpOCAA_5_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-140226000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_YsEAJpEiF0CucsZJ79McXQ"
      decimals="-3"
      id="Tc_gFnhsGvam0mZfz5zQoS07Q_5_15"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-258000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2019_FtHnUOMLjkeW-5RTgMqhrA"
      decimals="-3"
      id="Tc_YRChMxvOpUywscBDN48_Rg_5_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">419427000</us-gaap:StockholdersEquity>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_LzqFMH4R-Uisa6DN0Wxm4w"
      decimals="-3"
      id="Tc_6W_nOXPvOkCmirIMOSY3lw_6_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">11221000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_1_1_2020_To_3_31_2020_jBnQ2ZrbZEec0jeFEn7byw"
      decimals="-3"
      id="Tc_Zt7Vnvv3RkWZXJfQIvAxIg_6_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">11221000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_F9cCveT0DkqT5kW6lI3UDA"
      decimals="-3"
      id="Tc_QEkfEgWeUEGIEhxRsKRTJw_7_15"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-1112000</us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2020_To_3_31_2020_jBnQ2ZrbZEec0jeFEn7byw"
      decimals="-3"
      id="Tc_tPbjkOJ1MkeK3tkos5onbA_7_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-1112000</us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_F9cCveT0DkqT5kW6lI3UDA"
      decimals="-3"
      id="Tc_W-a4E0cgXUOvjcKrqMzt7A_8_15"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-57000</us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2020_To_3_31_2020_jBnQ2ZrbZEec0jeFEn7byw"
      decimals="-3"
      id="Tc_IQig4ytJa02JbPmLTFutZw_8_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-57000</us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised
      contextRef="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_b17p1G-nhEW5n_uF4leI5A"
      decimals="-3"
      id="Tc_lrG69cP5Y0-dFb9qqdno9g_9_3"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">540000</us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised>
    <us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised
      contextRef="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_b17p1G-nhEW5n_uF4leI5A"
      decimals="-3"
      id="Tc_UIT8nZp0z0-Um_7JIUYAYg_9_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">1000</us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised>
    <us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised
      contextRef="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_6Y1LtOVOr0eV3onJXZYpfg"
      decimals="-3"
      id="Tc_Z-NVv6XINESy6RVW52ovYA_9_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">4498000</us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised>
    <us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised
      contextRef="Duration_1_1_2020_To_3_31_2020_jBnQ2ZrbZEec0jeFEn7byw"
      decimals="-3"
      id="Tc_tQj3X68MK0KPZ2WuyM1ZgQ_9_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">4499000</us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised>
    <us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans
      contextRef="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_b17p1G-nhEW5n_uF4leI5A"
      decimals="-3"
      id="Tc_Cm5q1v3SG0Ob2BCm2rl7Xw_10_3"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">1000</us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans>
    <us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan
      contextRef="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_6Y1LtOVOr0eV3onJXZYpfg"
      decimals="-3"
      id="Tc_PyL0OAAWO0Cby6ccHjghmw_10_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">19000</us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan>
    <us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan
      contextRef="Duration_1_1_2020_To_3_31_2020_jBnQ2ZrbZEec0jeFEn7byw"
      decimals="-3"
      id="Tc_3NB6CjuZEUyGN-uxfeFAVw_10_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">19000</us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan>
    <us-gaap:StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures
      contextRef="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_b17p1G-nhEW5n_uF4leI5A"
      decimals="-3"
      id="Tc_jAezT_IGZ0K901sS99XzoQ_11_3"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">69000</us-gaap:StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures>
    <us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures
      contextRef="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_6Y1LtOVOr0eV3onJXZYpfg"
      decimals="-3"
      id="Tc_BhT8SKLil0ubUy20C9f40Q_11_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-1162000</us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures>
    <us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures
      contextRef="Duration_1_1_2020_To_3_31_2020_jBnQ2ZrbZEec0jeFEn7byw"
      decimals="-3"
      id="Tc_Hcgr_vdTV0OujHmnTVusZQ_11_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-1162000</us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures>
    <us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue
      contextRef="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_6Y1LtOVOr0eV3onJXZYpfg"
      decimals="-3"
      id="Tc_2IAzAvxe4k2afQ_DuJYJnA_12_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">1724000</us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue>
    <us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue
      contextRef="Duration_1_1_2020_To_3_31_2020_jBnQ2ZrbZEec0jeFEn7byw"
      decimals="-3"
      id="Tc_s__Q74jVGUi9FGecgKrNYQ_12_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">1724000</us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue>
    <us-gaap:StockRepurchasedDuringPeriodShares
      contextRef="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_b17p1G-nhEW5n_uF4leI5A"
      decimals="-3"
      id="Tc_tHDyD74IlkC_dgrsvkHR2A_13_3"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">358000</us-gaap:StockRepurchasedDuringPeriodShares>
    <us-gaap:StockRepurchasedDuringPeriodValue
      contextRef="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_b17p1G-nhEW5n_uF4leI5A"
      decimals="-3"
      id="Tc_VRfsUCSPOUeJTafgLo_0ew_13_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">1000</us-gaap:StockRepurchasedDuringPeriodValue>
    <us-gaap:StockRepurchasedDuringPeriodValue
      contextRef="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_6Y1LtOVOr0eV3onJXZYpfg"
      decimals="-3"
      id="Tc_df-UM-MzS0WPZOyJ7SKFiA_13_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">5775000</us-gaap:StockRepurchasedDuringPeriodValue>
    <us-gaap:StockRepurchasedDuringPeriodValue
      contextRef="Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_LzqFMH4R-Uisa6DN0Wxm4w"
      decimals="-3"
      id="Tc_P06YM4Qgykym9AuU3HqVxQ_13_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">1725000</us-gaap:StockRepurchasedDuringPeriodValue>
    <us-gaap:StockRepurchasedDuringPeriodValue
      contextRef="Duration_1_1_2020_To_3_31_2020_jBnQ2ZrbZEec0jeFEn7byw"
      decimals="-3"
      id="Tc_vEHcjN249k2conUOWRt8tg_13_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">7501000</us-gaap:StockRepurchasedDuringPeriodValue>
    <us-gaap:SharesOutstanding
      contextRef="As_Of_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_k-roo0M6bUam9HVt-d3Vog"
      decimals="-3"
      id="Tc_75eNwNgx3Uqaj9YgupKvuQ_14_3"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">32837000</us-gaap:SharesOutstanding>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_k-roo0M6bUam9HVt-d3Vog"
      decimals="-3"
      id="Tc_Bruen8xx6EuTXiMuw0KV0w_14_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">33000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_-8tath2-uEKtz8uE9FV9Iw"
      decimals="-3"
      id="Tc_VGOahzzDYUeqc8uZX-cmbQ_14_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">559182000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_sLmqwPENdkO6QkOCbLKQ_w"
      decimals="-3"
      id="Tc_H0Dgk99CbU6-A9W2fcaqBQ_14_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-130730000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_TXi4cj5lNkO4zanH3e0wpg"
      decimals="-3"
      id="Tc_YrYhaGq0JkSoceNJ9v1QKQ_14_15"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-1313000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_3_31_2020_-5Cw11QoRE6nHA_ngva07Q"
      decimals="-3"
      id="Tc_s8mWhpBzR0G5KhzIO4J15g_14_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">427172000</us-gaap:StockholdersEquity>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_9eWRNT0z40SUKHvCIS5EYQ"
      decimals="-3"
      id="Tc_7PKRU4qtD0WB9JK4Xn3Jug_15_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">13302000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_SIJ6pEX8REWwlYVO0Jltpw_15_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">13302000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_CtCAykjwqUmInz4EceSxvA"
      decimals="-3"
      id="Tc_r1FY-tjUQUmQ44K-BqT5oA_16_15"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">836000</us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_CwC52nr3UUOzPUdinBvw6A_16_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">836000</us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_CtCAykjwqUmInz4EceSxvA"
      decimals="-3"
      id="Tc_7PQ0x9lntEymWI8TF1AOWw_17_15"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-57000</us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_9R1DwBwCkUSjGtKozZbeag_17_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-57000</us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised
      contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_kQChkn8LbEaU-QAGr3O5aQ"
      decimals="-3"
      id="Tc_dcntNL5ldUOwtw3u74hYJw_18_3"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">343000</us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised>
    <us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised
      contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_pmCEepBP-UK1T09W5cnpig"
      decimals="-3"
      id="Tc_IAwXZ70_b0KEyzBsczFaEQ_18_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">2783000</us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised>
    <us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_eWcaAYhfoEG7TR2g9eKG-w_18_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">2783000</us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised>
    <us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans
      contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_kQChkn8LbEaU-QAGr3O5aQ"
      decimals="-3"
      id="Tc_LBF0PiQs002MTy4j1VNb_Q_19_3"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">21000</us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans>
    <us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan
      contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_pmCEepBP-UK1T09W5cnpig"
      decimals="-3"
      id="Tc_fNwe2OWS30mXcrfWyqLPLg_19_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">490000</us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan>
    <us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_3oGwkcs_zk6N9l-a1jw3qQ_19_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">490000</us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan>
    <us-gaap:StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures
      contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_kQChkn8LbEaU-QAGr3O5aQ"
      decimals="-3"
      id="Tc_ZTfZASfT90aoc43HzpjatA_20_3"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">232000</us-gaap:StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures>
    <us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures
      contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_pmCEepBP-UK1T09W5cnpig"
      decimals="-3"
      id="Tc_IGui2JBrmkeO_GksjXu02Q_20_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-2698000</us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures>
    <us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_MRhVfgmBiEWoktH8HBTPjw_20_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-2698000</us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures>
    <us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue
      contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_pmCEepBP-UK1T09W5cnpig"
      decimals="-3"
      id="Tc_gK0PdS9jEU6W2FCRVd6hAQ_21_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">3082000</us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue>
    <us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_FR0pVK4DN0yfu1dH4dxF2A_21_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">3082000</us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue>
    <us-gaap:SharesOutstanding
      contextRef="As_Of_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_p5MwFWjzgEmVRz-u0rc0Lg"
      decimals="-3"
      id="Tc_q9KqD2_XMkmWE2cbo8G-cA_22_3"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">33433000</us-gaap:SharesOutstanding>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_p5MwFWjzgEmVRz-u0rc0Lg"
      decimals="-3"
      id="Tc_OQhJyKDZcUqKTvH_L4N82w_22_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">33000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_aZJX0TutVE-uQ6w765155A"
      decimals="-3"
      id="Tc_4HqFGlGKM0SyS-YCEqE6fw_22_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">562839000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_FtxaGvJtt0GIO2vBuTSv0A"
      decimals="-3"
      id="Tc_RNAk7Kx9yEO_hJX8-kZ3VA_22_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-117428000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_6_30_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_idn7dSJpdU6u4H_5_bzuPw"
      decimals="-3"
      id="Tc_K-RnWqYLNUy_evnhPmDyeg_22_15"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-420000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_6_30_2020_vfxHSqwZwkeC1Z0d0SG93A"
      decimals="-3"
      id="Tc_ZnYc96JTqEiL5E4h3ooKvw_22_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">445024000</us-gaap:StockholdersEquity>
    <us-gaap:SharesOutstanding
      contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_uzzcW3x6bE--mq9X_qlBvw"
      decimals="-3"
      id="Tc_7kdQSRXl_UOEAmfH1yVCig_5_3"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">33633000</us-gaap:SharesOutstanding>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_uzzcW3x6bE--mq9X_qlBvw"
      decimals="-3"
      id="Tc_scQ5EJ-RqE6rBxKcISRFhg_5_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">34000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_e61Wz1CQE0qiyYcZjij5Yg"
      decimals="-3"
      id="Tc_tLbc8gaUHku5UaAzML7GeQ_5_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">570102000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_EjhaMDWkVkaY2PX5EPO33w"
      decimals="-3"
      id="Tc_TBfAq4_WBEe1n_WxEJieeA_5_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-91969000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_21pDDGs74UqeJxBPHlYzOQ"
      decimals="-3"
      id="Tc_u91_etvjUEaHnpyslvPmyA_5_15"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">3435000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_t5uUl7SAZUKbWEFG2Ps5Mg_5_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">481602000</us-gaap:StockholdersEquity>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_1_1_2021_To_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_iLquTy6h6EGwrhHMLkr38Q"
      decimals="-3"
      id="Tc_h6BwwryGJ062HR4uwlVDqg_6_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">16480000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_1_1_2021_To_3_31_2021_gPmQL1FpQka6Ntdd-jalcA"
      decimals="-3"
      id="Tc_6RW8mxuJFki7FzqrqPADXA_6_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">16480000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2021_To_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_WSxitDFH_E2sNO8nvvvOTA"
      decimals="-3"
      id="Tc__i5cY6uzgES04yUclG658w_7_15"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-1372000</us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2021_To_3_31_2021_gPmQL1FpQka6Ntdd-jalcA"
      decimals="-3"
      id="Tc_u6TSLZEPXEav7xaB9Qo64A_7_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-1372000</us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2021_To_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_WSxitDFH_E2sNO8nvvvOTA"
      decimals="-3"
      id="Tc_T1SpQ9H1Vk2pE1dvDxT2zQ_8_15"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-20000</us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_1_1_2021_To_3_31_2021_gPmQL1FpQka6Ntdd-jalcA"
      decimals="-3"
      id="Tc__HQyh-0bJ0KgLHjTGLafMw_8_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-20000</us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised
      contextRef="Duration_1_1_2021_To_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_qxYF29GUZEK4V73nPRU4lw"
      decimals="-3"
      id="Tc_fzxu7A7jWkSWe9egvf9L6w_9_3"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">268000</us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised>
    <us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised
      contextRef="Duration_1_1_2021_To_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_LcVXrn_7VEe2d4S1f3MdVA"
      decimals="-3"
      id="Tc_oahuvLn3CUSzjkj8rvvBlA_9_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">2512000</us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised>
    <us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised
      contextRef="Duration_1_1_2021_To_3_31_2021_gPmQL1FpQka6Ntdd-jalcA"
      decimals="-3"
      id="Tc_3_a2H2bvr0aTVGIpd3OeiQ_9_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">2512000</us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised>
    <us-gaap:StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures
      contextRef="Duration_1_1_2021_To_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_qxYF29GUZEK4V73nPRU4lw"
      decimals="-3"
      id="Tc_H1wO5V847kCk8uU63X_3yg_10_3"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">81000</us-gaap:StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures>
    <us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures
      contextRef="Duration_1_1_2021_To_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_LcVXrn_7VEe2d4S1f3MdVA"
      decimals="-3"
      id="Tc_UGuPRHKWsUaDB1uvJiAm8g_10_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-2354000</us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures>
    <us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures
      contextRef="Duration_1_1_2021_To_3_31_2021_gPmQL1FpQka6Ntdd-jalcA"
      decimals="-3"
      id="Tc_zvL6cuejeUSPLnmfQnKIbQ_10_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-2354000</us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures>
    <us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue
      contextRef="Duration_1_1_2021_To_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_LcVXrn_7VEe2d4S1f3MdVA"
      decimals="-3"
      id="Tc_g9PzClyGZ0WctekVu3qLYQ_11_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">2407000</us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue>
    <us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue
      contextRef="Duration_1_1_2021_To_3_31_2021_gPmQL1FpQka6Ntdd-jalcA"
      decimals="-3"
      id="Tc_K-JiRvNjBU-_zE3uLpIBkw_11_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">2407000</us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue>
    <us-gaap:StockRepurchasedDuringPeriodShares
      contextRef="Duration_1_1_2021_To_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_qxYF29GUZEK4V73nPRU4lw"
      decimals="-3"
      id="Tc_OBA9WT_bNUOYbN1qQHaYEA_12_3"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">303000</us-gaap:StockRepurchasedDuringPeriodShares>
    <us-gaap:StockRepurchasedDuringPeriodValue
      contextRef="Duration_1_1_2021_To_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_LcVXrn_7VEe2d4S1f3MdVA"
      decimals="-3"
      id="Tc_QOoq8GzldkGaKvCQ-8Wx8w_12_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">5468000</us-gaap:StockRepurchasedDuringPeriodValue>
    <us-gaap:StockRepurchasedDuringPeriodValue
      contextRef="Duration_1_1_2021_To_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_iLquTy6h6EGwrhHMLkr38Q"
      decimals="-3"
      id="Tc_CvKPj38cQkCZCTVTcZY0Qg_12_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">6167000</us-gaap:StockRepurchasedDuringPeriodValue>
    <us-gaap:StockRepurchasedDuringPeriodValue
      contextRef="Duration_1_1_2021_To_3_31_2021_gPmQL1FpQka6Ntdd-jalcA"
      decimals="-3"
      id="Tc_MDXG-L5dy0W81RFmru7FUw_12_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">11635000</us-gaap:StockRepurchasedDuringPeriodValue>
    <us-gaap:SharesOutstanding
      contextRef="As_Of_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_yCLXcdhezkCA8IlJrhRQoA"
      decimals="-3"
      id="Tc_qX2axl76D0CAs32djgaysA_13_3"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">33679000</us-gaap:SharesOutstanding>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_yCLXcdhezkCA8IlJrhRQoA"
      decimals="-3"
      id="Tc_nmZH3CsmpEGnMUVsGdODTA_13_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">34000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_nPR1QHLRd0K6xO7MTzjQDA"
      decimals="-3"
      id="Tc_5vU5hXDqE0qG7D8SYxvqSQ_13_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">567199000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_yk0zeuok1ESpzKSxw-_Yng"
      decimals="-3"
      id="Tc_uYV25DNwxEaz3iUf8s5hgg_13_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-81656000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_3_31_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_nMZiZF1p1UeYuA1-E7JPNg"
      decimals="-3"
      id="Tc_p2_EHvwK80CuIlXbbt9diw_13_15"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">2083000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_3_31_2021_Qs-qxUhDAk-CSx7C4Sn69A"
      decimals="-3"
      id="Tc_mLa2rH3FnUit-TOvc_4XYQ_13_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">487660000</us-gaap:StockholdersEquity>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_h4oY94pFW0iXqEL70dTv8g"
      decimals="-3"
      id="Tc_4rRCZMQcNEKyafQooHN_Og_14_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">18906000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_mdZJTlP3u0Gf1aP17QeLMQ_14_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">18906000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_IIcvKTwEi0elPGhQkd7WcQ"
      decimals="-3"
      id="Tc_kxlZGpDH00CJqBU2v7ZYSw_15_15"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">552000</us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_eojjVP6rtkedpAyDQgL2Uw_15_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">552000</us-gaap:OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_IIcvKTwEi0elPGhQkd7WcQ"
      decimals="-3"
      id="Tc_iPHBqWMR1kOYVQhytWe7Lg_16_15"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-34000</us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_0U2W0y-Bm0CAQy0YBhoeIg_16_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-34000</us-gaap:OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent>
    <us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised
      contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_ISQyc_YFT0Ggp2-cT9xM1Q"
      decimals="-3"
      id="Tc_-GoeTjiiPkOb4xRE1ZGdyg_17_3"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">72000</us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised>
    <us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised
      contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember__5v7cq8u6k6j4ROt48LqZQ"
      decimals="-3"
      id="Tc_sS9_V8yD-kKqUg1f9hR6cg_17_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">563000</us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised>
    <us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_N2ARsR7IhkOpltAvcRQzcA_17_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">563000</us-gaap:StockIssuedDuringPeriodValueStockOptionsExercised>
    <us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans
      contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_ISQyc_YFT0Ggp2-cT9xM1Q"
      decimals="-3"
      id="Tc_sIUX7lj990W1Kp15_WuGIg_18_3"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">15000</us-gaap:StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans>
    <us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan
      contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember__5v7cq8u6k6j4ROt48LqZQ"
      decimals="-3"
      id="Tc_hVbYZzYTvkK81RfyMF5kSw_18_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">509000</us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan>
    <us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_kVPAEbZy20qoHbOXhf_44w_18_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">509000</us-gaap:StockIssuedDuringPeriodValueEmployeeStockPurchasePlan>
    <us-gaap:StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures
      contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_ISQyc_YFT0Ggp2-cT9xM1Q"
      decimals="-3"
      id="Tc_TPKTfWxX40yxUGIQk9tSAg_19_3"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">214000</us-gaap:StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures>
    <us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures
      contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember__5v7cq8u6k6j4ROt48LqZQ"
      decimals="-3"
      id="Tc_CJTS1MvlrU2DMDdoU5F_lw_19_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-4141000</us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures>
    <us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_W_LQXwEDSkOhcrHHp87mNg_19_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-4141000</us-gaap:StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures>
    <us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue
      contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember__5v7cq8u6k6j4ROt48LqZQ"
      decimals="-3"
      id="Tc_SfODF4kSc0GJI68a6K-nzg_20_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">3377000</us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue>
    <us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_GLUWlYKk80uYy9sUn13Jiw_20_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">3377000</us-gaap:AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue>
    <us-gaap:StockRepurchasedDuringPeriodShares
      contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_ISQyc_YFT0Ggp2-cT9xM1Q"
      decimals="-3"
      id="Tc_u8INv5ST00OID283w5JGuw_21_3"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">323000</us-gaap:StockRepurchasedDuringPeriodShares>
    <us-gaap:StockRepurchasedDuringPeriodValue
      contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember__5v7cq8u6k6j4ROt48LqZQ"
      decimals="-3"
      id="Tc_mmTVPC6rwEasd9bczBpuZQ_21_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">5827000</us-gaap:StockRepurchasedDuringPeriodValue>
    <us-gaap:StockRepurchasedDuringPeriodValue
      contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_h4oY94pFW0iXqEL70dTv8g"
      decimals="-3"
      id="Tc_eSZmVDIIzU6fpFhXTujbPg_21_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">7531000</us-gaap:StockRepurchasedDuringPeriodValue>
    <us-gaap:StockRepurchasedDuringPeriodValue
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_O-b6j6NpDE2EalYnVEgp8Q_21_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">13358000</us-gaap:StockRepurchasedDuringPeriodValue>
    <us-gaap:SharesOutstanding
      contextRef="As_Of_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_g56DknHgzE22JRq2ngeP8w"
      decimals="-3"
      id="Tc_vdb9WPbZO0qRS6GtjMajOw_22_3"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">33657000</us-gaap:SharesOutstanding>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_g56DknHgzE22JRq2ngeP8w"
      decimals="-3"
      id="Tc_shBPzB1zD0-hjokL2Ccm6g_22_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">34000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AdditionalPaidInCapitalMember_8SoISsYsQEmHgmYHZWy3NQ"
      decimals="-3"
      id="Tc_hQp4SFv6tE6w-dM3NvVxEw_22_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">561680000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_jrp5HTMctEGaBiB28D3Lcg"
      decimals="-3"
      id="Tc_hMc06XgmV0OtsWFxQzZgJg_22_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-70281000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedOtherComprehensiveIncomeMember_1OMo5RzwUE2qmccn3CI7VQ"
      decimals="-3"
      id="Tc_CDI7CMQdf0mdjZthFWj9WQ_22_15"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">2669000</us-gaap:StockholdersEquity>
    <us-gaap:StockholdersEquity
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_yC4gsK1mbEGisa4oQ11jrg_22_18"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">494102000</us-gaap:StockholdersEquity>
    <us-gaap:ProfitLoss
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_-EWxfI50h0CgchC7fAHeEA_5_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">35386000</us-gaap:ProfitLoss>
    <us-gaap:ProfitLoss
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_KurpyDWmdUeJ8myDQUSBhQ_5_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">24523000</us-gaap:ProfitLoss>
    <us-gaap:DepreciationDepletionAndAmortization
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_MJUBW_IPEkWjukN2DKZA_w_7_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">5336000</us-gaap:DepreciationDepletionAndAmortization>
    <us-gaap:DepreciationDepletionAndAmortization
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_DqkGnxN8jU6w_NqjWIeZDA_7_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">4829000</us-gaap:DepreciationDepletionAndAmortization>
    <us-gaap:DeferredIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_IWNLcFUS2keBYRnR4u_7Qw_8_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">5107000</us-gaap:DeferredIncomeTaxExpenseBenefit>
    <us-gaap:DeferredIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_8KQ4w6zZLEy8rrXWAAvCzA_8_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">3035000</us-gaap:DeferredIncomeTaxExpenseBenefit>
    <us-gaap:ShareBasedCompensation
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_JY4bjRaLY0y0PusZ_VVI8Q_9_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">5784000</us-gaap:ShareBasedCompensation>
    <us-gaap:ShareBasedCompensation
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_ckNBYUOb5kqtVXuTBoMAew_9_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">4806000</us-gaap:ShareBasedCompensation>
    <us-gaap:InventoryWriteDown
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_OgR_GN5G5U2eBSig_WqI1g_10_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">1888000</us-gaap:InventoryWriteDown>
    <us-gaap:InventoryWriteDown
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_KHrcd3nK_0-Bhq65nKJ8yg_10_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">1708000</us-gaap:InventoryWriteDown>
    <us-gaap:IncreaseDecreaseInAccountsReceivable
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_Il-wziLABEGknr7EShcdxA_12_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-7091000</us-gaap:IncreaseDecreaseInAccountsReceivable>
    <us-gaap:IncreaseDecreaseInAccountsReceivable
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_pcyq2kBQ90OcoXgN_cROUQ_12_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-18752000</us-gaap:IncreaseDecreaseInAccountsReceivable>
    <us-gaap:IncreaseDecreaseInInventories
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_g5wizv19aUGkE63Kgqftig_13_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">32418000</us-gaap:IncreaseDecreaseInInventories>
    <us-gaap:IncreaseDecreaseInInventories
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_XXPUG5ACWEeowTQVJT4twA_13_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">9123000</us-gaap:IncreaseDecreaseInInventories>
    <us-gaap:IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_mMCxnIls5UufuMPDesH5VQ_14_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">3309000</us-gaap:IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets>
    <us-gaap:IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_h-GRoKTgfEKSRNIFczk2aQ_14_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">4206000</us-gaap:IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets>
    <us-gaap:IncreaseDecreaseInAccountsPayableAndAccruedLiabilities
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_MNfIRK39o0-Z_C6-A3aJaw_15_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">7282000</us-gaap:IncreaseDecreaseInAccountsPayableAndAccruedLiabilities>
    <us-gaap:IncreaseDecreaseInAccountsPayableAndAccruedLiabilities
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_h35tYqF-jUqsCNRsPhYY2Q_15_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">11808000</us-gaap:IncreaseDecreaseInAccountsPayableAndAccruedLiabilities>
    <us-gaap:IncreaseDecreaseInContractWithCustomerLiability
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_paMmF7veI0itOZqtcwkTag_16_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">12460000</us-gaap:IncreaseDecreaseInContractWithCustomerLiability>
    <us-gaap:IncreaseDecreaseInContractWithCustomerLiability
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_0ze6nCO-BUeRlIRGPH4AXg_16_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">1167000</us-gaap:IncreaseDecreaseInContractWithCustomerLiability>
    <us-gaap:IncreaseDecreaseInAccruedIncomeTaxesPayable
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_nQBLRrDYJESvqvfIPTXF6w_17_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-27000</us-gaap:IncreaseDecreaseInAccruedIncomeTaxesPayable>
    <us-gaap:IncreaseDecreaseInAccruedIncomeTaxesPayable
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_sgpLfgB950u4zig-CPLdzA_17_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">5000</us-gaap:IncreaseDecreaseInAccruedIncomeTaxesPayable>
    <us-gaap:IncreaseDecreaseInOtherOperatingCapitalNet
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_WrUbwBwBBEq5eesckRUfqg_18_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-1341000</us-gaap:IncreaseDecreaseInOtherOperatingCapitalNet>
    <us-gaap:IncreaseDecreaseInOtherOperatingCapitalNet
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_GqBngwHv9k61NAVkTXo5wg_18_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">729000</us-gaap:IncreaseDecreaseInOtherOperatingCapitalNet>
    <us-gaap:NetCashProvidedByUsedInOperatingActivities
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_vyDsb463o0-O8OdaSwZ95g_19_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">45921000</us-gaap:NetCashProvidedByUsedInOperatingActivities>
    <us-gaap:NetCashProvidedByUsedInOperatingActivities
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_ZAuNh5Nxlk6EwzsEmqyUIw_19_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">56575000</us-gaap:NetCashProvidedByUsedInOperatingActivities>
    <us-gaap:PaymentsToAcquirePropertyPlantAndEquipment
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_QAz0ylymS0qPVIqhhv7rsw_22_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">2392000</us-gaap:PaymentsToAcquirePropertyPlantAndEquipment>
    <us-gaap:PaymentsToAcquirePropertyPlantAndEquipment
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_tRoZsF0ON0WMqqtwIefROg_22_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">2975000</us-gaap:PaymentsToAcquirePropertyPlantAndEquipment>
    <us-gaap:NetCashProvidedByUsedInInvestingActivities
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_q4jEhRw0gkGlYIdrvSI0sw_23_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-2392000</us-gaap:NetCashProvidedByUsedInInvestingActivities>
    <us-gaap:NetCashProvidedByUsedInInvestingActivities
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_cGYh9VM64E-Na6yH5H-1sw_23_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-2975000</us-gaap:NetCashProvidedByUsedInInvestingActivities>
    <acls:RepaymentOfNetSettlementOnRestrictedStockGrants
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_mLwdq6X4vE2inQJ7HMyXfw_26_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">6495000</acls:RepaymentOfNetSettlementOnRestrictedStockGrants>
    <acls:RepaymentOfNetSettlementOnRestrictedStockGrants
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_lrUx8LkOKEWQgtBUbMXdzw_26_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">3860000</acls:RepaymentOfNetSettlementOnRestrictedStockGrants>
    <us-gaap:PaymentsForRepurchaseOfCommonStock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_3gk7l0BLoEiNlEOsHTrMqg_27_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">24993000</us-gaap:PaymentsForRepurchaseOfCommonStock>
    <us-gaap:PaymentsForRepurchaseOfCommonStock
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_7Dv2IUCi3km7uYw8D3WMsg_27_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">7501000</us-gaap:PaymentsForRepurchaseOfCommonStock>
    <us-gaap:ProceedsFromStockPlans
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_U23PIvCvD0O-fK_9y5f44A_28_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">508000</us-gaap:ProceedsFromStockPlans>
    <us-gaap:ProceedsFromStockPlans
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_DNsyLvnnBkK6gvKE4QDXCg_28_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">509000</us-gaap:ProceedsFromStockPlans>
    <us-gaap:FinanceLeasePrincipalPayments
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_yxCCjMCoJk6PwX1m-qu__Q_29_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">362000</us-gaap:FinanceLeasePrincipalPayments>
    <us-gaap:FinanceLeasePrincipalPayments
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_-jRhfC8l9UWtnpycRUitow_29_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">108000</us-gaap:FinanceLeasePrincipalPayments>
    <us-gaap:ProceedsFromStockOptionsExercised
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_ZUJSvQVByU6T3SlJc5hNVg_30_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">3075000</us-gaap:ProceedsFromStockOptionsExercised>
    <us-gaap:ProceedsFromStockOptionsExercised
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_a2t1xFFEUUOAnS81PyC_Pw_30_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">7282000</us-gaap:ProceedsFromStockOptionsExercised>
    <us-gaap:NetCashProvidedByUsedInFinancingActivities
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_4sSl-Grm8kixbnYvHE9anA_31_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-28267000</us-gaap:NetCashProvidedByUsedInFinancingActivities>
    <us-gaap:NetCashProvidedByUsedInFinancingActivities
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_JIHePCf0502gBYuqMc6Eqw_31_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-3678000</us-gaap:NetCashProvidedByUsedInFinancingActivities>
    <us-gaap:EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_JkvWhtGWVEuE1bLhfasWKg_33_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">992000</us-gaap:EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents>
    <us-gaap:EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc__j2iRHKnR0mXbTn1Le6blw_33_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">560000</us-gaap:EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents>
    <us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_3cW8XGuTWk60YftFsaxAYg_34_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">16254000</us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect>
    <us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_w5DIJIJrRk-7VNsflmRg9Q_34_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">50482000</us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect>
    <us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_cxYS7D0cPUCYIFM25YGoCw_36_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">204232000</us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents>
    <us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents
      contextRef="As_Of_12_31_2019_FtHnUOMLjkeW-5RTgMqhrA"
      decimals="-3"
      id="Tc_7gndEq4Zr0SLvh92-GA1ng_36_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">146534000</us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents>
    <us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_ymdaOb98L0-WrP7LJ9bI9w_37_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">220486000</us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents>
    <us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents
      contextRef="As_Of_6_30_2020_vfxHSqwZwkeC1Z0d0SG93A"
      decimals="-3"
      id="Tc_-qUkL8t240SvISEXLtni2g_37_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">197016000</us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents>
    <us-gaap:OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tb_qA2r7MeqFEi1AyjMPBSE-w">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note&#160;1.&#160;&#160;Nature of Business&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Axcelis Technologies,&#160;Inc. (&#x201c;Axcelis&#x201d; or the &#x201c;Company&#x201d;) was incorporated in Delaware in 1995 and is a producer of ion implantation equipment used in the fabrication of semiconductor chips in the United States, Europe and Asia. In addition, we provide extensive worldwide aftermarket service and support, including spare parts, equipment upgrades, used equipment and maintenance services to the semiconductor industry. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The accompanying unaudited consolidated financial statements have been prepared in accordance with U.S. generally accepted accounting principles for interim financial information and with the instructions to Form&#160;10-Q and Article&#160;10 of Regulation S-X. Accordingly, they do not include all of the information and footnotes required by generally accepted accounting principles for complete financial statements. In the opinion of management, all adjustments which are of a normal recurring nature and considered necessary for a fair presentation of these financial statements have been included. Operating results for the interim periods presented are not necessarily indicative of the results that may be expected for other interim periods or for the year as a whole.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The balance sheet at December&#160;31, 2020 has been derived from the audited consolidated financial statements at that date but does not include all the information and footnotes required by generally accepted accounting principles for complete financial statements. For further information, refer to the consolidated financial statements and footnotes thereto included in Axcelis Technologies,&#160;Inc.&#x2019;s Annual Report on Form&#160;10-K for the year ended December&#160;31, 2020.&lt;/p&gt;</us-gaap:OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock>
    <us-gaap:DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tb_6lgFwpmx4EKYU-Fj1J2xPw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 2.&#160;&#160;Stock-Based Compensation&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We maintain the Axcelis Technologies,&#160;Inc. 2012 Equity Incentive Plan, as amended (the &#x201c;2012 Equity Plan&#x201d;), which became effective on May&#160;2, 2012, and permits the issuance of options, restricted stock, restricted stock units (&#x201c;RSUs&#x201d;) and performance awards to selected employees, directors and consultants of the Company. Our 2000 Stock Plan (the &#x201c;2000 Stock Plan&#x201d;) expired on May 1, 2012 and no new grants may be made under that plan after that date. However, unexpired options granted under the 2000 Stock Plan, which have a 10-year term, remain outstanding and subject to the terms of the 2000 Stock Plan. We also maintain the Axcelis Technologies,&#160;Inc. 2020 Employee Stock Purchase Plan (the &#x201c;2020 ESPP&#x201d;), an Internal Revenue Code Section&#160;423 plan. The Company&#x2019;s Employee Stock Purchase Plan, which was effective in June 2000 (the &#x201c;2000 ESPP&#x201d;), expired in June 2020.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:27pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The 2012 Equity Plan is more fully described in Note&#160;13 to the consolidated financial statements in our Annual Report on Form&#160;10-K for the year ended December 31, 2020.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We recognized stock-based compensation expense of $3.4&#160;million and $3.1 million for the three-month periods ended June 30, 2021 and 2020, respectively. We recognized stock-based compensation expense of $5.8 million and $4.8 million for the six-month periods ended June 30, 2021 and 2020, respectively. These amounts include compensation expense related to RSUs, non-qualified stock options and stock to be issued to participants under the 2020 ESPP and 2000 ESPP.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;In the three-month periods ended June 30, 2021 and 2020, we issued 0.3 million and 0.6 million shares of common stock, respectively, upon stock option exercises, purchases under the employee stock purchase plans and vesting of RSUs. In the three-month periods ended June 30, 2021 and 2020, we received proceeds of $1.1&#160;million and $3.3&#160;million, respectively, in connection with the exercise of stock options and purchases under the employee stock purchase plans.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;In the six-month periods ended June 30, 2021 and 2020, we issued 0.7 million and 1.2 million shares of common stock, respectively, upon stock option exercises, purchases under the employee stock purchase plans and vesting of RSUs. In the six-month periods ended June 30, 2021 and 2020, we received proceeds of $3.6&#160;million and $7.8&#160;million, respectively, in connection with the exercise of stock options and purchases under the employee stock purchase plans.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock>
    <acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardGrantsInPeriodGross
      contextRef="Duration_1_1_2021_To_6_30_2021_us-gaap_PlanNameAxis_acls_StockPlan2000Member_gPtI2pgzX0W3fHkKR6jOFg"
      decimals="INF"
      id="Narr_6G2jZYkyU0ef7ymO4h5UOw"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">0</acls:ShareBasedCompensationArrangementByShareBasedPaymentAwardGrantsInPeriodGross>
    <us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod
      contextRef="Duration_1_1_2021_To_6_30_2021_us-gaap_AwardTypeAxis_acls_StockOptionAwardsMember_us-gaap_PlanNameAxis_acls_StockPlan2000Member_HVl0riEuP0OGyi-NSg5YHw"
      id="Narr_oGFl9ziQnUe_vfgoZTdYqw">P10Y</us-gaap:SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod>
    <us-gaap:AllocatedShareBasedCompensationExpense
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-5"
      id="Narr_xv55IxEJEUW9gDCyCpsviQ"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">3400000</us-gaap:AllocatedShareBasedCompensationExpense>
    <us-gaap:AllocatedShareBasedCompensationExpense
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-5"
      id="Narr_98uPwdYpek6j9zmdTsi5lQ"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">3100000</us-gaap:AllocatedShareBasedCompensationExpense>
    <us-gaap:AllocatedShareBasedCompensationExpense
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-5"
      id="Narr_OEaXt6bulUSe-VbVpvbsWw"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">5800000</us-gaap:AllocatedShareBasedCompensationExpense>
    <us-gaap:AllocatedShareBasedCompensationExpense
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-5"
      id="Narr_oD1_97KEtUW3-dApBLFUnw"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">4800000</us-gaap:AllocatedShareBasedCompensationExpense>
    <us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised
      contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_QNR4-3SSo02w6_10P-JE4Q"
      decimals="-5"
      id="Narr_N1a2BbGpq0idfzCcqzhzjQ"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">300000</us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised>
    <us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised
      contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_H-V3txgTH0yEDXnAa1DUtQ"
      decimals="-5"
      id="Narr_ZFk3ITKCR0y1N0vNZQn23Q"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">600000</us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised>
    <us-gaap:ProceedsFromStockOptionsExercised
      contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_QNR4-3SSo02w6_10P-JE4Q"
      decimals="-5"
      id="Narr_qo4O_wV1ckyCAb3VSN35IQ"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">1100000</us-gaap:ProceedsFromStockOptionsExercised>
    <us-gaap:ProceedsFromStockOptionsExercised
      contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_H-V3txgTH0yEDXnAa1DUtQ"
      decimals="-5"
      id="Narr_xXBSmj45akaYbIsIutZYGA"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">3300000</us-gaap:ProceedsFromStockOptionsExercised>
    <us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised
      contextRef="Duration_1_1_2021_To_6_30_2021_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_Yvxyzm8yg0SNKmN2RVXDEw"
      decimals="-5"
      id="Narr_KAxbUkoKr0OMjqmwHbCOBw"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">700000</us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised>
    <us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised
      contextRef="Duration_1_1_2020_To_6_30_2020_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_HgtTxlyUB0u26rdyUj-qkA"
      decimals="-5"
      id="Narr_jjJ-CqxFuEathge7iklSsA"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">1200000</us-gaap:StockIssuedDuringPeriodSharesStockOptionsExercised>
    <us-gaap:ProceedsFromStockOptionsExercised
      contextRef="Duration_1_1_2021_To_6_30_2021_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_Yvxyzm8yg0SNKmN2RVXDEw"
      decimals="-5"
      id="Narr_2vKJZ0W0GEmRJc7ihJm83g"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">3600000</us-gaap:ProceedsFromStockOptionsExercised>
    <us-gaap:ProceedsFromStockOptionsExercised
      contextRef="Duration_1_1_2020_To_6_30_2020_us-gaap_AwardTypeAxis_us-gaap_EmployeeStockMember_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_HgtTxlyUB0u26rdyUj-qkA"
      decimals="-5"
      id="Narr_Q7v7ctqXMUSMHkgEjzvg1g"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">7800000</us-gaap:ProceedsFromStockOptionsExercised>
    <acls:LeaseDisclosureTextBlock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tb_JQhv96fEJkaSfRWAq5n2LA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 3.&#160;&#160;Leases &lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We have operating leases for office space, warehouse space, computer and office equipment and vehicles used in our business operations. We have a finance lease as a result of the 2015 sale-leaseback of our corporate headquarters in Beverly, Massachusetts. All new agreements are reviewed to determine if they contain a lease component. A lease is a contract or part of a contract that conveys the right to control the use of identified property, plant or equipment over a period of time in exchange for consideration. We recognize the lease obligation on a discounted basis using the explicit or implicit discount rate stated within the agreement. We recognize a corresponding right-of-use asset, which is initially determined based upon the net present value of the associated liability and is adjusted for deferred costs and possible impairment, if any. For those lease agreements that do not indicate the applicable discount rate, we use our incremental borrowing rate. We have made the following policy elections: (i) operating leases with an initial term of 12 months or less are not recorded on the consolidated balance sheet; (ii) we recognize lease expense for operating leases on a straight-line basis over the lease term; and (iii) we account for lease components and non-lease components that are fixed payments as one component. Some of our operating leases include one or more options to renew, with renewal terms that can extend the respective lease term &lt;span style="-sec-ix-hidden:Hidden_zan9aSK8zE6OWipLaR-PbQ;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;"&gt;1&lt;/span&gt;&lt;/span&gt; to 3 years. The exercise of lease renewal options are at our sole discretion. For lease extensions that are reasonably certain to occur, we have included these renewal periods in our calculation of the net present value of the lease obligation and related right-of-use asset. Certain leases also include options to purchase the leased property. The depreciable life of certain assets and leasehold improvements is limited by the expected lease term, unless there is a transfer of title or purchase option reasonably certain of exercise. Our lease agreements do not contain any material residual value guarantees or material restrictive covenants. The amounts of operating and finance lease right-of-use assets and related lease obligations recorded within our consolidated balance sheets are as follows: &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:10.8%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Leases&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:20.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Classification&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.8%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="8" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Assets&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:22.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_W9KnNs_BPUCoZMTZ8ue8sA;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;text-align:left;"&gt;Operating leases&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating lease assets&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 7,626&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 4,542&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_A9wG4K0J4UKHRE76HpHnMg;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;text-align:left;"&gt;Finance lease&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Finance lease assets *&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 19,889&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.63%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 20,544&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Total leased assets&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.56%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 27,515&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.63%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 25,086&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Liabilities&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Current&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_7xdEmmVR-kiGHLFbeFZHxw;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;text-align:left;"&gt;Operating&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Other current liabilities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 3,215&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 2,573&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_Cv0WhFSvyEe6gpVSxXkYow;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;text-align:left;"&gt;Finance&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Current portion of finance lease obligation&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 864&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 756&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Noncurrent&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;span style="font-size:8pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;span style="font-size:8pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_dHd0m_i_ckaUDDKTbKPNiA;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;text-align:left;"&gt;Operating &lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Other long-term liabilities&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 4,398&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,949&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_4JxT6-VdKkyC-ozm6pXPvg;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;text-align:left;"&gt;Finance &lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Finance lease obligation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 46,923&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.63%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 47,393&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_EFu-sVp3nUiwnTcDpuJATQ;"&gt;&lt;b style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:bold;text-align:left;"&gt;Total lease liabilities&lt;/b&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;span style="font-size:8pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;span style="font-size:8pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.56%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 55,400&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.63%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 52,671&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:54.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:20.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td colspan="8" style="vertical-align:top;width:100%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;* Finance lease assets are recorded net of accumulated depreciation of $48.9 million and include $0.7 million of prepaid financing costs as of June 30, 2021. Finance lease assets are recorded net of accumulated depreciation of $48.4 million and include $0.7&lt;span style="color:#ff0000;"&gt; &lt;/span&gt;million of prepaid financing costs as of December 31, 2020. &lt;br/&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;min-height:0.0pt;margin:0pt;"&gt;&lt;span style="font-size:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="display:inline-block;text-indent:0pt;width:36pt;"/&gt;All of our operating lease office locations support selling and servicing functions. Operating lease expense, and depreciation and interest expense relating to our finance lease obligation, are recognized within our consolidated statement of operations for the three and six months ended June 30, 2021 and 2020 as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.07;margin:0pt 0pt 0pt 36pt;"&gt;&lt;span style="font-size:5pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:17.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Three months ended  &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:14.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Six months ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:17.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:14.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.69%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Lease cost&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:22.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Classification&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="16" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Operating lease cost&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:33.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Service&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Cost of revenue&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 644&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 624&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,283&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,174&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Research and development&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating expenses&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 122&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 128&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 252&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 209&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Sales and marketing*&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating expenses&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 376&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 346&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 755&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 678&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;General and administrative*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating expenses&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 201&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 220&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 461&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 435&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Total operating lease cost&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.52%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,343&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,318&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 2,751&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 2,496&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Finance lease cost&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Depreciation of leased assets&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Cost of revenue, R&amp;amp;D, Sales and marketing and G&amp;amp;A&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 328&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 328&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 656&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 681&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Interest on lease liabilities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Interest expense&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,274&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,299&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 2,553&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 2,602&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Total finance lease cost&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;span style="font-size:8pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;span style="font-size:8pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.52%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,602&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,627&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 3,209&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 3,283&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:39.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:22.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total lease cost&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:22.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.52%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 2,945&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 2,945&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 5,960&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 5,779&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:22.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td colspan="14" style="vertical-align:bottom;width:97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;* Sales and marketing and general and administrative expense also includes short-term lease and variable lease costs of approximately $0.4 million and $0.9 million for the three and six months ended June 30, 2021, respectively, and includes short-term and variable lease costs of approximately $0.3 million and $0.5 million for the three and six months ended June 30, 2020, respectively.&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;min-height:0.0pt;margin:0pt;"&gt;&lt;span style="font-size:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;  &lt;/span&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="display:inline-block;text-indent:0pt;width:36pt;"/&gt;The lease of our corporate headquarters, shown below under finance leases, had an original lease term of 22 years, beginning in January 2015. All other locations are treated as operating leases, with lease terms ranging from &lt;span style="-sec-ix-hidden:Hidden_92crWef4lkGqNHzmJbisQA;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;"&gt;1&lt;/span&gt;&lt;/span&gt; to 10 years. The tables below reflect the minimum cash outflow regarding our current lease obligations as well as the weighted-average remaining lease term and weighted-average discount rates used in our calculation of our lease obligations and right-of-use assets as of June 30, 2021: &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Finance&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Operating&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:64.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Maturity of Lease Liabilities&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Leases&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Leases&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Leases&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;2021&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 2,929&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,827&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 4,756&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;2022&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 5,980&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 3,053&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 9,033&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;2023&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 6,114&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,544&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 7,658&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;2024&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 6,252&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 794&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 7,046&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;2025&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 5,930&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 712&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 6,642&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Thereafter&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 73,723&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 545&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 74,268&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Total lease payments&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 100,928&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 8,475&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 109,403&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Less interest portion*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt; (53,141)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt; (862)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt; (54,003)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Finance lease and operating lease obligations&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 47,787&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 7,613&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 55,400&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td colspan="10" style="vertical-align:bottom;width:98.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;* Finance lease interest calculated using the implied interest rate; operating lease interest calculated using estimated corporate borrowing rate.&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:14.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:81.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Lease term and discount rate&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Weighted-average remaining lease term (years):&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating leases&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;"&gt;3.0&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Finance leases&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;"&gt;15.6&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Weighted-average discount rate:&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating leases&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;4.5%&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Finance leases&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;10.5%&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="display:inline-block;text-indent:0pt;width:36pt;"/&gt;Our cash outflows from our operating leases include rent expense and other charges associated with these leases. These cash flows are included within the operating activities section of our statement of cash flows. Our cash flows from our finance lease include both an interest component and payment of principal component. The table below shows our cash outflows, by lease type and related section of our statement of cash flows, as well as the non-cash amount capitalized on our balance sheet in relation to our operating lease right-of-use assets for the six months ending June 30, 2021 and 2020, respectively:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt; &lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;min-height:0.0pt;margin:0pt;"&gt;&lt;span style="font-size:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:26.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Six months ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:26.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Cash paid for amounts included in the measurement of lease liabilities&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.91%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="8" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:26.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating cash outflows from operating leases&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 2,751&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 2,496&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating cash outflows from finance leases&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 2,556&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 2,746&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Financing cash outflows from finance leases&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 362&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 108&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating lease assets obtained in exchange for operating lease liabilities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 4,192&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,038&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Finance lease assets obtained in exchange for new finance lease liabilities&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</acls:LeaseDisclosureTextBlock>
    <us-gaap:LesseeOperatingLeaseExistenceOfOptionToExtend
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Narr_YA-Onezxh0Cuu0_eAlgQSg">true</us-gaap:LesseeOperatingLeaseExistenceOfOptionToExtend>
    <us-gaap:LesseeOperatingLeaseRenewalTerm
      contextRef="As_Of_6_30_2021_srt_RangeAxis_srt_MaximumMember_DwErj1lpCkWn0mWzw3VRWw"
      id="Narr_MNp0J9gwf0uyO57Glu3xBQ">P3Y</us-gaap:LesseeOperatingLeaseRenewalTerm>
    <acls:LeaseBalanceSheetDisclosureTableTextBlock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tb_HxSIWsm6WUSyB8Ehf3mD9w">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:10.8%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Leases&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:20.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Classification&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.8%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="8" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Assets&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:22.98%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_W9KnNs_BPUCoZMTZ8ue8sA;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;text-align:left;"&gt;Operating leases&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating lease assets&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 7,626&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 4,542&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_A9wG4K0J4UKHRE76HpHnMg;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;text-align:left;"&gt;Finance lease&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Finance lease assets *&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 19,889&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.63%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 20,544&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Total leased assets&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.56%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 27,515&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.63%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 25,086&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Liabilities&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Current&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_7xdEmmVR-kiGHLFbeFZHxw;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;text-align:left;"&gt;Operating&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Other current liabilities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 3,215&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 2,573&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_Cv0WhFSvyEe6gpVSxXkYow;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;text-align:left;"&gt;Finance&lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Current portion of finance lease obligation&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 864&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 756&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Noncurrent&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;span style="font-size:8pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;&lt;span style="font-size:8pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_dHd0m_i_ckaUDDKTbKPNiA;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;text-align:left;"&gt;Operating &lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Other long-term liabilities&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 4,398&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,949&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_4JxT6-VdKkyC-ozm6pXPvg;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;text-align:left;"&gt;Finance &lt;/span&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Finance lease obligation&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 46,923&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.63%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 47,393&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="-sec-ix-hidden:Hidden_EFu-sVp3nUiwnTcDpuJATQ;"&gt;&lt;b style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:bold;text-align:left;"&gt;Total lease liabilities&lt;/b&gt;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;span style="font-size:8pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;span style="font-size:8pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.56%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 55,400&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.63%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 52,671&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:54.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:20.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td colspan="8" style="vertical-align:top;width:100%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;* Finance lease assets are recorded net of accumulated depreciation of $48.9 million and include $0.7 million of prepaid financing costs as of June 30, 2021. Finance lease assets are recorded net of accumulated depreciation of $48.4 million and include $0.7&lt;span style="color:#ff0000;"&gt; &lt;/span&gt;million of prepaid financing costs as of December 31, 2020. &lt;br/&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</acls:LeaseBalanceSheetDisclosureTableTextBlock>
    <us-gaap:OperatingLeaseRightOfUseAsset
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_R4BXJYMjLEy6V__3fRSCYg_4_4"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">7626000</us-gaap:OperatingLeaseRightOfUseAsset>
    <us-gaap:OperatingLeaseRightOfUseAsset
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_OEJ-JeZ2cUy8zUgjrwGuZw_4_7"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">4542000</us-gaap:OperatingLeaseRightOfUseAsset>
    <us-gaap:FinanceLeaseRightOfUseAsset
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_v_AeHWt6wkmo7dDKRGJfWA_5_4"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">19889000</us-gaap:FinanceLeaseRightOfUseAsset>
    <us-gaap:FinanceLeaseRightOfUseAsset
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_qUvhRBlDtEOh4UXtyL_xkA_5_7"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">20544000</us-gaap:FinanceLeaseRightOfUseAsset>
    <acls:OperatingAndFinanceLeaseRightOfUseAsset
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_U4Df4yztHEepuZAH6Jc2DA_6_4"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">27515000</acls:OperatingAndFinanceLeaseRightOfUseAsset>
    <acls:OperatingAndFinanceLeaseRightOfUseAsset
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_FqSfhrkoOEmYuIIhlXvBeQ_6_7"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">25086000</acls:OperatingAndFinanceLeaseRightOfUseAsset>
    <us-gaap:OperatingLeaseLiabilityCurrent
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_w0fdtFUM70uqRt5WSnMzzQ_9_4"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">3215000</us-gaap:OperatingLeaseLiabilityCurrent>
    <us-gaap:OperatingLeaseLiabilityCurrent
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_hxchTHvX0Eas1ii9N0U0SQ_9_7"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">2573000</us-gaap:OperatingLeaseLiabilityCurrent>
    <us-gaap:FinanceLeaseLiabilityCurrent
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_95snWTbbL0W7z7fwDRv0Qg_10_4"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">864000</us-gaap:FinanceLeaseLiabilityCurrent>
    <us-gaap:FinanceLeaseLiabilityCurrent
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_WAX5dsjwO0edHCKg48MirA_10_7"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">756000</us-gaap:FinanceLeaseLiabilityCurrent>
    <us-gaap:OperatingLeaseLiabilityNoncurrent
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_7U2O9o_Nt0aVWQ3eC4Lrfg_12_4"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">4398000</us-gaap:OperatingLeaseLiabilityNoncurrent>
    <us-gaap:OperatingLeaseLiabilityNoncurrent
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_CRlLNhMU50iqZHOaTDFHRQ_12_7"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">1949000</us-gaap:OperatingLeaseLiabilityNoncurrent>
    <us-gaap:FinanceLeaseLiabilityNoncurrent
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_y1ABwsVs5EuDZ2QdwlajLA_13_4"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">46923000</us-gaap:FinanceLeaseLiabilityNoncurrent>
    <us-gaap:FinanceLeaseLiabilityNoncurrent
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_5b2j37XGckqZd3yh1iYNOg_13_7"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">47393000</us-gaap:FinanceLeaseLiabilityNoncurrent>
    <acls:OperatingAndFinanceLeaseLiability
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_qAeNIIoPJkuGLosdxShK_w_14_4"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">55400000</acls:OperatingAndFinanceLeaseLiability>
    <acls:OperatingAndFinanceLeaseLiability
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_taf-fArIpU2FBFm8di8N2A_14_7"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">52671000</acls:OperatingAndFinanceLeaseLiability>
    <acls:FinanceLeaseAccumulatedDepreciation
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-5"
      id="Narr_k7UAEvVFHku1Bb1-K-Jc8A"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">48900000</acls:FinanceLeaseAccumulatedDepreciation>
    <us-gaap:PrepaidRent
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-5"
      id="Narr_IcXZI9b90UaDgTKwdwbuDw"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">700000</us-gaap:PrepaidRent>
    <acls:FinanceLeaseAccumulatedDepreciation
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-5"
      id="Narr_3-Z5nJbL80ygsUAVsZWPAQ"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">48400000</acls:FinanceLeaseAccumulatedDepreciation>
    <us-gaap:PrepaidRent
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-5"
      id="Narr_5LENUh3ssU-CRTFDIlkDjw"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">700000</us-gaap:PrepaidRent>
    <us-gaap:LeaseCostTableTextBlock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tb_T3NPfUs9n0yFPx64AY4C_Q">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.07;margin:0pt 0pt 0pt 36pt;"&gt;&lt;span style="font-size:5pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:17.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Three months ended  &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:14.42%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Six months ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:17.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:14.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.69%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Lease cost&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:22.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Classification&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="16" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Operating lease cost&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:33.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Service&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Cost of revenue&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 644&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 624&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,283&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,174&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Research and development&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating expenses&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 122&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 128&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 252&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 209&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Sales and marketing*&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating expenses&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 376&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 346&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 755&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 678&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;General and administrative*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating expenses&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 201&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 220&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 461&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 435&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Total operating lease cost&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.52%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,343&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,318&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 2,751&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 2,496&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Finance lease cost&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Depreciation of leased assets&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Cost of revenue, R&amp;amp;D, Sales and marketing and G&amp;amp;A&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 328&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 328&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 656&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 681&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Interest on lease liabilities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Interest expense&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,274&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,299&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 2,553&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 2,602&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Total finance lease cost&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;span style="font-size:8pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"&gt;&lt;span style="font-size:8pt;margin-left:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.52%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,602&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,627&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 3,209&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 3,283&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:39.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:22.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total lease cost&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:22.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.52%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 2,945&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 2,945&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 5,960&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 5,779&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:22.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td colspan="14" style="vertical-align:bottom;width:97%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;* Sales and marketing and general and administrative expense also includes short-term lease and variable lease costs of approximately $0.4 million and $0.9 million for the three and six months ended June 30, 2021, respectively, and includes short-term and variable lease costs of approximately $0.3 million and $0.5 million for the three and six months ended June 30, 2020, respectively.&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:LeaseCostTableTextBlock>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_ServiceMember_FSj452F2NkW_cwGShJp-8g"
      decimals="-3"
      id="Tc_8QVZL7oBcEiKtmfJ1Jgntg_5_4"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">644000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_ServiceMember_DNcIBesDR0WAx8tJpfZeAw"
      decimals="-3"
      id="Tc_1vPnxwJ0bkWzQ76L9qUz2Q_5_7"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">624000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_1_1_2021_To_6_30_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_ServiceMember_0BYdpgalq0qBObRVNMEYrg"
      decimals="-3"
      id="Tc_XmkJg8w8HUWVHQQPQglVxw_5_10"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">1283000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_1_1_2020_To_6_30_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_ServiceMember_LJCz9i16REm6mYOfTQTJFQ"
      decimals="-3"
      id="Tc_mtKqOpEe3USS0KwW1rZyDw_5_13"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">1174000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_UOAsZKMKtkuyCOTrcaa_JA"
      decimals="-3"
      id="Tc__IlalhqCzkSO0LW3mrtKaA_6_4"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">122000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_bOdIPKEt_UOYlnABbTs6dQ"
      decimals="-3"
      id="Tc_HnzVzmsNvU6sQj0HXYb4Zw_6_7"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">128000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_1_1_2021_To_6_30_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember__Wm4NbhGzkG8JA-3yNvkww"
      decimals="-3"
      id="Tc_hUc4x8KPaEyusltpBHXLNw_6_10"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">252000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_1_1_2020_To_6_30_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_ResearchAndDevelopmentExpenseMember_EnJPApftgku3_AVQt4IeFg"
      decimals="-3"
      id="Tc_3oSj2LlhvEWqts8LgrcEsA_6_13"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">209000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingAndMarketingExpenseMember_LhPsuVd2s0mQm7i1GpW9DA"
      decimals="-3"
      id="Tc_gdG6jsyJxUSvnO1EKMorZw_7_4"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">376000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingAndMarketingExpenseMember_3WMIF-t1m0Od_EYdIVUqxA"
      decimals="-3"
      id="Tc_bIw6hFuzQ0mCJ0Jys41Gug_7_7"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">346000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_1_1_2021_To_6_30_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingAndMarketingExpenseMember_ekhbGo7f0km2QXJUas_27w"
      decimals="-3"
      id="Tc_KdY_mbHRIUy0GKeBxexP4A_7_10"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">755000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_1_1_2020_To_6_30_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_SellingAndMarketingExpenseMember_Ip8jAZUCB0KJaalGOwu0eQ"
      decimals="-3"
      id="Tc_JesblnipfE6W5E4cBzkb3w_7_13"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">678000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_GeneralAndAdministrativeExpenseMember_G38viKXzTE6J8aNCkxOzig"
      decimals="-3"
      id="Tc_PeBQxKOso02VG56Uv7KMxg_8_4"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">201000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_GeneralAndAdministrativeExpenseMember_SzbRC-XIQUe2J4Q3ZQI7Lg"
      decimals="-3"
      id="Tc_4RHST4MsVkml9uIVwfdXvQ_8_7"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">220000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_1_1_2021_To_6_30_2021_us-gaap_IncomeStatementLocationAxis_us-gaap_GeneralAndAdministrativeExpenseMember_M2eZ4S3rhU2T52988OgStg"
      decimals="-3"
      id="Tc_zbNuXsVNA0GngyJ5AC2Z_A_8_10"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">461000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_1_1_2020_To_6_30_2020_us-gaap_IncomeStatementLocationAxis_us-gaap_GeneralAndAdministrativeExpenseMember_P-YXIVTwzUSUiO77F6K2Fg"
      decimals="-3"
      id="Tc_DpBE6HZ-xE-AgOS2-c_Knw_8_13"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">435000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_yzrSz4knGkyMoOhqUUxSWQ_9_4"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">1343000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_T5MzIg0c00OS07qowB_UPA_9_7"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">1318000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_vqP9V6VVmUiycd1Onfu4tg_9_10"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">2751000</us-gaap:OperatingLeaseCost>
    <us-gaap:OperatingLeaseCost
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_669bBcf5ok2gZAe4Uk_DQw_9_13"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">2496000</us-gaap:OperatingLeaseCost>
    <us-gaap:FinanceLeaseRightOfUseAssetAmortization
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_djdOfilzaEGk9Nazw9qFWA_11_4"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">328000</us-gaap:FinanceLeaseRightOfUseAssetAmortization>
    <us-gaap:FinanceLeaseRightOfUseAssetAmortization
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_hfWNqUEoIE2ZBf4R096VKA_11_7"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">328000</us-gaap:FinanceLeaseRightOfUseAssetAmortization>
    <us-gaap:FinanceLeaseRightOfUseAssetAmortization
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_F5ldxO2kf0yUCX8LhCq5dg_11_10"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">656000</us-gaap:FinanceLeaseRightOfUseAssetAmortization>
    <us-gaap:FinanceLeaseRightOfUseAssetAmortization
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_B-mbgz1_Q0OVc6NA9Z9AVA_11_13"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">681000</us-gaap:FinanceLeaseRightOfUseAssetAmortization>
    <us-gaap:FinanceLeaseInterestExpense
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_Tom5hu036UaT-0HtpzuE5g_12_4"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">1274000</us-gaap:FinanceLeaseInterestExpense>
    <us-gaap:FinanceLeaseInterestExpense
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_N5qXZnXcvES64lPp2yVjPA_12_7"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">1299000</us-gaap:FinanceLeaseInterestExpense>
    <us-gaap:FinanceLeaseInterestExpense
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_Cf8kiVrpfUKCuNuwsC5h-w_12_10"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">2553000</us-gaap:FinanceLeaseInterestExpense>
    <us-gaap:FinanceLeaseInterestExpense
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_e1kGRmTmXUuP54HtfLbMSg_12_13"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">2602000</us-gaap:FinanceLeaseInterestExpense>
    <acls:FinanceLeaseCost
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_3fVxksCJP0SFHdUCoUNmEA_13_4"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">1602000</acls:FinanceLeaseCost>
    <acls:FinanceLeaseCost
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_DXri41Q2fkWaZqSyxW9nbw_13_7"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">1627000</acls:FinanceLeaseCost>
    <acls:FinanceLeaseCost
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_l7oMM6nk60iBqlW26QFuFw_13_10"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">3209000</acls:FinanceLeaseCost>
    <acls:FinanceLeaseCost
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_Ao4I3Nffp0qJ7frfn8Hv5g_13_13"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">3283000</acls:FinanceLeaseCost>
    <us-gaap:LeaseCost
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_5Z8FbXDY9k2N3tyfXy3V7Q_15_4"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">2945000</us-gaap:LeaseCost>
    <us-gaap:LeaseCost
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_EU2mECOBekWykSGWHJb2oQ_15_7"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">2945000</us-gaap:LeaseCost>
    <us-gaap:LeaseCost
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_LX-oXQP1QEq2Oodw5bt3CA_15_10"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">5960000</us-gaap:LeaseCost>
    <us-gaap:LeaseCost
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_5ZsXLX_fFEGIIqNSnhaT9g_15_13"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">5779000</us-gaap:LeaseCost>
    <acls:ShortTermAndVariableLeaseCost
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-5"
      id="Narr_VjBxgtTGD0mYZ_KT_kkjeA"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">400000</acls:ShortTermAndVariableLeaseCost>
    <acls:ShortTermAndVariableLeaseCost
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-5"
      id="Narr_xanLbgAtqESTsWB7zUmwGw"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">900000</acls:ShortTermAndVariableLeaseCost>
    <acls:ShortTermAndVariableLeaseCost
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-5"
      id="Narr_qGLRvz06rkSCH_AIt7TByA"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">300000</acls:ShortTermAndVariableLeaseCost>
    <acls:ShortTermAndVariableLeaseCost
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-5"
      id="Narr_Gw0jSKaHuUqMzCYEFZFJHA"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">500000</acls:ShortTermAndVariableLeaseCost>
    <us-gaap:LesseeFinanceLeaseTermOfContract1
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      id="Narr_yiMF-6R2GUWgYVXp2-Homw">P22Y</us-gaap:LesseeFinanceLeaseTermOfContract1>
    <us-gaap:LesseeOperatingLeaseTermOfContract
      contextRef="As_Of_6_30_2021_srt_RangeAxis_srt_MaximumMember_DwErj1lpCkWn0mWzw3VRWw"
      id="Narr_HQmiGnXAL02ok_tyyltKvA">P10Y</us-gaap:LesseeOperatingLeaseTermOfContract>
    <acls:OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tb_U3K7ei_RIEyZQkHoucP6iA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Finance&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Operating&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:64.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Maturity of Lease Liabilities&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Leases&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Leases&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Leases&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;2021&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 2,929&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,827&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 4,756&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;2022&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 5,980&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 3,053&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 9,033&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;2023&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 6,114&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,544&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 7,658&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;2024&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 6,252&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 794&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 7,046&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;2025&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 5,930&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 712&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 6,642&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Thereafter&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 73,723&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 545&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 74,268&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Total lease payments&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 100,928&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 8,475&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 109,403&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Less interest portion*&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt; (53,141)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt; (862)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt; (54,003)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Finance lease and operating lease obligations&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 47,787&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 7,613&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 55,400&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td colspan="10" style="vertical-align:bottom;width:98.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;* Finance lease interest calculated using the implied interest rate; operating lease interest calculated using estimated corporate borrowing rate.&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</acls:OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock>
    <us-gaap:FinanceLeaseLiabilityPaymentsRemainderOfFiscalYear
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_1wW4U5as5k2-A4x0iwthGw_4_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">2929000</us-gaap:FinanceLeaseLiabilityPaymentsRemainderOfFiscalYear>
    <us-gaap:LesseeOperatingLeaseLiabilityPaymentsRemainderOfFiscalYear
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_pnSGlicD2UG2ZpM_CK1SIQ_4_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">1827000</us-gaap:LesseeOperatingLeaseLiabilityPaymentsRemainderOfFiscalYear>
    <acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsRemainderOfFiscalYear
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_6v1Ll2inTkKy745ggUk4Ow_4_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">4756000</acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsRemainderOfFiscalYear>
    <us-gaap:FinanceLeaseLiabilityPaymentsDueNextTwelveMonths
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_GtoKGLYUt0SNrt-2giafUg_5_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">5980000</us-gaap:FinanceLeaseLiabilityPaymentsDueNextTwelveMonths>
    <us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_jrO1SYTZEUmJfGqussK0oA_5_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">3053000</us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths>
    <acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_8Bpyj10xx0KT82Ni093_CA_5_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">9033000</acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths>
    <us-gaap:FinanceLeaseLiabilityPaymentsDueYearTwo
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_yp2oD0kZmEydyYMB-Y6W3Q_6_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">6114000</us-gaap:FinanceLeaseLiabilityPaymentsDueYearTwo>
    <us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearTwo
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_gkJfeehHTUi8C-J-sGDZlg_6_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">1544000</us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearTwo>
    <acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_S6roCNDvuEeuH3W7W36hgw_6_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">7658000</acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo>
    <us-gaap:FinanceLeaseLiabilityPaymentsDueYearThree
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_GWYsqI_sd0u-fWnZ2Lq3yw_7_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">6252000</us-gaap:FinanceLeaseLiabilityPaymentsDueYearThree>
    <us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearThree
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_lPCeDmwD0UKb5T55-tXX4w_7_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">794000</us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearThree>
    <acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_RQ3o0Q74z0-YoobO3MAM5w_7_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">7046000</acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree>
    <us-gaap:FinanceLeaseLiabilityPaymentsDueYearFour
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_eOOwGT2Az0CMylgKaaYlcA_8_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">5930000</us-gaap:FinanceLeaseLiabilityPaymentsDueYearFour>
    <us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearFour
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_AjQYcvwJuUuWn-y6rEbaug_8_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">712000</us-gaap:LesseeOperatingLeaseLiabilityPaymentsDueYearFour>
    <acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_7uk2vgkPMka44WzJvKAmIA_8_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">6642000</acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour>
    <acls:FinanceLeaseLiabilityPaymentsDueAfterYearFour
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_gPwsttFHeE-BZapHu82sDA_9_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">73723000</acls:FinanceLeaseLiabilityPaymentsDueAfterYearFour>
    <acls:LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_Z4LBK_XH0Eab_5vXI_lVYA_9_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">545000</acls:LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour>
    <acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFour
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_8Zyt0PBJyk2bzlvz-NOoKQ_9_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">74268000</acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFour>
    <us-gaap:FinanceLeaseLiabilityPaymentsDue
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_a9XczoDsq0mkrbVOE_55jA_10_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">100928000</us-gaap:FinanceLeaseLiabilityPaymentsDue>
    <us-gaap:LesseeOperatingLeaseLiabilityPaymentsDue
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_G1Eh4TRKIE-YSbrIAldqfw_10_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">8475000</us-gaap:LesseeOperatingLeaseLiabilityPaymentsDue>
    <acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_8rjgDZUujkSrP-THqVukxQ_10_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">109403000</acls:LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue>
    <us-gaap:FinanceLeaseLiabilityUndiscountedExcessAmount
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_gNkzSMoNxEGgY1wOxWikYw_11_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">53141000</us-gaap:FinanceLeaseLiabilityUndiscountedExcessAmount>
    <us-gaap:LesseeOperatingLeaseLiabilityUndiscountedExcessAmount
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_WEK9pYyWakqzG-dqvEn7Ig_11_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">862000</us-gaap:LesseeOperatingLeaseLiabilityUndiscountedExcessAmount>
    <acls:LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_O4_0CRdDXk6llJswg8Rf5Q_11_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">54003000</acls:LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount>
    <us-gaap:FinanceLeaseLiability
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_HgikyzmarkmspCtkquNNew_12_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">47787000</us-gaap:FinanceLeaseLiability>
    <us-gaap:OperatingLeaseLiability
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_TU0B2kJ_PEmG1hK-eTsNtQ_12_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">7613000</us-gaap:OperatingLeaseLiability>
    <acls:OperatingAndFinanceLeaseLiability
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_Hao_YVkdskWnnYsPGhzfSA_12_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">55400000</acls:OperatingAndFinanceLeaseLiability>
    <acls:LeaseQuantitativeDisclosureTableTextBlock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tb_zAWxIATsWkCHwsaxvVURwg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:14.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:81.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Lease term and discount rate&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Weighted-average remaining lease term (years):&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating leases&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;"&gt;3.0&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Finance leases&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;"&gt;15.6&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Weighted-average discount rate:&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating leases&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;4.5%&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Finance leases&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;10.5%&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</acls:LeaseQuantitativeDisclosureTableTextBlock>
    <us-gaap:OperatingLeaseWeightedAverageRemainingLeaseTerm1
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      id="Tc_9SO74HBq80CW8CsnOiq3Kw_4_3">P3Y</us-gaap:OperatingLeaseWeightedAverageRemainingLeaseTerm1>
    <us-gaap:FinanceLeaseWeightedAverageRemainingLeaseTerm1
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      id="Tc_aOHsvyxPSkGi_hAZ9FXFkQ_5_3">P15Y7M6D</us-gaap:FinanceLeaseWeightedAverageRemainingLeaseTerm1>
    <us-gaap:OperatingLeaseWeightedAverageDiscountRatePercent
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="3"
      id="Tc_0q3pe29QHEuTqMSjAg_epA_7_3"
      unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg">0.045</us-gaap:OperatingLeaseWeightedAverageDiscountRatePercent>
    <us-gaap:FinanceLeaseWeightedAverageDiscountRatePercent
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="3"
      id="Tc_olkVldL4VEGI9F9nBw0j9w_8_3"
      unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg">0.105</us-gaap:FinanceLeaseWeightedAverageDiscountRatePercent>
    <acls:LeaseCashFlowInformationDisclosureTableTextBlock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tb_xaK9QdSrXke8b6cmjYnDSA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;min-height:0.0pt;margin:0pt;"&gt;&lt;span style="font-size:0pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:26.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Six months ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:26.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Cash paid for amounts included in the measurement of lease liabilities&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.91%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="8" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:26.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating cash outflows from operating leases&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 2,751&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 2,496&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating cash outflows from finance leases&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 2,556&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 2,746&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Financing cash outflows from finance leases&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 362&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 108&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Operating lease assets obtained in exchange for operating lease liabilities&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 4,192&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; 1,038&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;Finance lease assets obtained in exchange for new finance lease liabilities&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</acls:LeaseCashFlowInformationDisclosureTableTextBlock>
    <us-gaap:OperatingLeasePayments
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_apgCCnAldEydYD-houve4w_5_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">2751000</us-gaap:OperatingLeasePayments>
    <us-gaap:OperatingLeasePayments
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_waOSc_6tEUy0qEXnk8pDoQ_5_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">2496000</us-gaap:OperatingLeasePayments>
    <us-gaap:FinanceLeaseInterestPaymentOnLiability
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_X8X-8m7jxEyLVcnaZ1E-FQ_6_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">2556000</us-gaap:FinanceLeaseInterestPaymentOnLiability>
    <us-gaap:FinanceLeaseInterestPaymentOnLiability
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_6WEq0tICYEq6qqehkx-1yw_6_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">2746000</us-gaap:FinanceLeaseInterestPaymentOnLiability>
    <us-gaap:FinanceLeasePrincipalPayments
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_PX7Suv9unku2PPsLNFsRNw_7_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">362000</us-gaap:FinanceLeasePrincipalPayments>
    <us-gaap:FinanceLeasePrincipalPayments
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_0DXWNGOur0-_dR9IdNipvA_7_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">108000</us-gaap:FinanceLeasePrincipalPayments>
    <us-gaap:RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_Ow9OyeWbMUWYIpvFQQN2YA_8_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">4192000</us-gaap:RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability>
    <us-gaap:RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_dQz_AD5E10CcucZNiy9yuw_8_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">1038000</us-gaap:RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability>
    <us-gaap:RevenueFromContractWithCustomerTextBlock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tb_A6E70765XEipHB-WFWa2Dg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Note 4.  Revenue&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="display:inline-block;text-indent:0pt;width:36pt;"&gt;&lt;b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;text-align:left;"&gt; &lt;/b&gt;&lt;/span&gt;To reflect the organization of our business operations, we divide revenue into two categories: revenue from sales of new systems and revenue arising from the sale of used systems, parts and labor to customers who own systems, which we refer to as &#x201c;Aftermarket.&#x201d;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="display:inline-block;text-indent:0pt;width:36pt;"/&gt;Revenue by categories used by management are as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100.52%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.24%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.24%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.36%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.24%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.44%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:24.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Three months ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:27.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Six months ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:24.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:27.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="13" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:53.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Systems&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;100,138 &lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;76,815 &lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;181,129 &lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;159,152 &lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Aftermarket&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 47,136&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 46,150&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 98,921&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 82,804&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Total Revenue&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;147,274 &lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;122,965 &lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.16%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;280,050 &lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;241,956 &lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="display:inline-block;text-indent:0pt;width:36pt;"/&gt;We also consider revenue by geography. Revenue is allocated to geographic markets based upon the location to which our products are shipped and in which our services are performed. Revenue in our principal geographic markets is as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:22.63%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Three months ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:21.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Six months ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:22.63%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:21.8%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="13" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:45.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;North America &lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;10,204&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;8,915&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;19,712&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;19,576&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Asia Pacific&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;116,642&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;106,604&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;220,033&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;203,432&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Europe&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;20,428&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;7,446&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;40,305&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;18,948&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Total Revenue&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;147,274&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;122,965&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;280,050&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;241,956&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="display:inline-block;text-indent:0pt;width:36pt;"/&gt;Our system sales revenue transactions give rise to contract liabilities (in the case of pre-payments and the fair value of goods and services to be delivered after the system delivery, such as installation and certain warranty obligations). &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="display:inline-block;text-indent:0pt;width:36pt;"/&gt;Contract liabilities are as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:69.36%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.85%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.85%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="7" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:28.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:69.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Contract liabilities&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:11.85%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 35,518&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:11.85%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 23,058&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.85%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.85%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="display:inline-block;text-indent:0pt;width:36pt;"/&gt;Contract liabilities are reflected as deferred revenue on the consolidated balance sheet and relate to payments invoiced or received in advance of completion of performance obligations under a contract. Contract liabilities are recognized as revenue upon the fulfillment of performance obligations.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="display:inline-block;text-indent:0pt;width:36pt;"/&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.2%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:17.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Three months ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:17.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Six months ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:17.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';"&gt;&#160;&#160;&#160;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:17.8%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.14%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="13" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:36.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Balance, beginning of the period&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 22,142&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:9pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 34,106&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 23,058&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 29,251&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Deferral of revenue&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 21,893&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 6,248&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 30,117&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 10,724&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:62.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Recognition of deferred revenue&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt; (8,517)&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt; (9,937)&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.64%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt; (17,657)&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt; (9,558)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Balance, end of the period&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 35,518&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.89%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 30,417&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.89%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.64%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 35,518&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.89%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.2%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 30,417&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="display:inline-block;text-indent:0pt;width:36pt;"/&gt;The majority of our system transactions have payment terms of 90% due upon shipment of the tool and 10% due upon acceptance. Aftermarket transaction payment terms usually provide that payment is due either within 30 or 60 days after the service is provided or parts delivered.&lt;/p&gt;</us-gaap:RevenueFromContractWithCustomerTextBlock>
    <acls:RevenueFromExternalCustomersByDisciplineAreasTableTextBlock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tb_17fu3APKY0KeprOweiQ4Fw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100.52%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.24%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.24%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.36%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.24%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.44%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:24.21%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Three months ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:27.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Six months ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:24.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:27.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="13" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:53.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Systems&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;100,138 &lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;76,815 &lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;181,129 &lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;159,152 &lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Aftermarket&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 47,136&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 46,150&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:10.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 98,921&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:3.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 82,804&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Total Revenue&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;147,274 &lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;122,965 &lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.16%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;280,050 &lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;241,956 &lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</acls:RevenueFromExternalCustomersByDisciplineAreasTableTextBlock>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_4_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_CIEelAIbeEuWRJlD5jK5vw"
      decimals="-3"
      id="Tc_X4xwdOMIBU-26ydqGfLuhA_5_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">100138000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_4_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_QLowhise_EWfbCxHfpYWhQ"
      decimals="-3"
      id="Tc_ELeSNLOmP06sOBZSMS_Z8w_5_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">76815000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_fPmnjFnuFEeqgfLBIms0Xg"
      decimals="-3"
      id="Tc_UVAqqsYXz06DQvJasRhQCQ_5_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">181129000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_aqASi6Lgl0y688FqkLnekg"
      decimals="-3"
      id="Tc_4cg3aLLkyEmf-iLIGSrvaA_5_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">159152000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_4_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_CsIOrAftermarketMember_aeBeVeoQykSPdY4ivJP6HA"
      decimals="-3"
      id="Tc_1v7SUSIKZEKwy1s6Y8E5rw_6_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">47136000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_4_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_acls_CsIOrAftermarketMember_a2NOCaAuIUSxTOjbsCuaOA"
      decimals="-3"
      id="Tc_KRrsYIdkhk-4I3aNweUg0w_6_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">46150000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_CsIOrAftermarketMember_TicKoU9nx0Wjl559v7_68A"
      decimals="-3"
      id="Tc_a983Wt19F02KEKL-O5fjCA_6_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">98921000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2020_To_6_30_2020_srt_ProductOrServiceAxis_acls_CsIOrAftermarketMember_WVc5IdW6PECXChKAn2jwNw"
      decimals="-3"
      id="Tc_PubmJECc0kiDA171j2GprA_6_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">82804000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_jnwoMRlJCEuU_Hzthgqc5w_7_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">147274000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc__sWcdrOaLU6AZUL00iZwVA_7_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">122965000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_eww1uL8xikmMBMsJMVIsJA_7_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">280050000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_ruVMbzgOvUGJqOgAuG9W2g_7_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">241956000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromExternalCustomersByGeographicAreasTableTextBlock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tb_TtKCZ6omOUaVn7lfwBCrOA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:22.63%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Three months ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:21.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Six months ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:22.63%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:21.8%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="13" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:45.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;North America &lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;10,204&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;8,915&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;19,712&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;19,576&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Asia Pacific&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;116,642&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;106,604&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;220,033&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;203,432&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Europe&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;20,428&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;7,446&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;40,305&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;18,948&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Total Revenue&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;147,274&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;122,965&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;280,050&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;241,956&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:RevenueFromExternalCustomersByGeographicAreasTableTextBlock>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_4_1_2021_To_6_30_2021_srt_StatementGeographicalAxis_srt_NorthAmericaMember_NEOMdVsPLEyRJ4bIQ1Fqkg"
      decimals="-3"
      id="Tc_pI5jJs-0yUCWUIYSx6Vzjg_5_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">10204000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_4_1_2020_To_6_30_2020_srt_StatementGeographicalAxis_srt_NorthAmericaMember_3ltgpALfo0OIvGrA9bu5eA"
      decimals="-3"
      id="Tc_FNXduIGXuUSdYQw0zaICVA_5_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">8915000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2021_To_6_30_2021_srt_StatementGeographicalAxis_srt_NorthAmericaMember_WMOuVFAHXEu4snTEayMOpA"
      decimals="-3"
      id="Tc_JPefzwbKqUeIJJNTqBWRtA_5_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">19712000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2020_To_6_30_2020_srt_StatementGeographicalAxis_srt_NorthAmericaMember_HAn6Qh15rkatbPxF72mX2Q"
      decimals="-3"
      id="Tc_tKD2VF5gT0u43sVcpabSRg_5_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">19576000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_4_1_2021_To_6_30_2021_srt_StatementGeographicalAxis_srt_AsiaMember_D8-EjbAdWUGp9d6taxPD_g"
      decimals="-3"
      id="Tc_7FPHKsawmEqlTEozU9ztyw_6_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">116642000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_4_1_2020_To_6_30_2020_srt_StatementGeographicalAxis_srt_AsiaMember_sWwca1JA_UemYMycl1F-lQ"
      decimals="-3"
      id="Tc_6HLYw67HZ0WHhNqosJYLhA_6_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">106604000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2021_To_6_30_2021_srt_StatementGeographicalAxis_srt_AsiaMember_jqdlc7_0s0Kz1yRqcL8iUg"
      decimals="-3"
      id="Tc_83qoA6ZClECbGZ2VV1SdCQ_6_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">220033000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2020_To_6_30_2020_srt_StatementGeographicalAxis_srt_AsiaMember_gGOkoCkXY0ODg73v1ZDa2Q"
      decimals="-3"
      id="Tc_Q4yNG2aneUCrJGSS3jhkOw_6_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">203432000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_4_1_2021_To_6_30_2021_srt_StatementGeographicalAxis_srt_EuropeMember_VFQ0RtdcrEasegSfJlNWWQ"
      decimals="-3"
      id="Tc_7KiUsvJ2EUWq7Uo3AmWehA_7_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">20428000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_4_1_2020_To_6_30_2020_srt_StatementGeographicalAxis_srt_EuropeMember_mSKgEEjdw0KK9jbwnggJiA"
      decimals="-3"
      id="Tc_LjtIo9J9DkunMvE4aj92ow_7_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">7446000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2021_To_6_30_2021_srt_StatementGeographicalAxis_srt_EuropeMember_7aYEOIYHd06aUpdNgdi5KA"
      decimals="-3"
      id="Tc_a5aIbyUC8kGyjfX2hNMerQ_7_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">40305000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2020_To_6_30_2020_srt_StatementGeographicalAxis_srt_EuropeMember_brKP66xXNEmuH9-_Iz3PNA"
      decimals="-3"
      id="Tc_xjtYQo0XJUWKQX_18ZxAtw_7_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">18948000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_vnnHrq7DyEuNEUu6Rj--dw_8_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">147274000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_qqBiNsfQNESQ5lCDhrw-AA_8_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">122965000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_04FaH2J_zEaK6EdSyMvPPQ_8_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">280050000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_L0SHuqwpbUG7M2L971sg7Q_8_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">241956000</us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax>
    <us-gaap:ContractWithCustomerAssetAndLiabilityTableTextBlock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tb_HaQtJvvQPUWFHceCFNo6nw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:69.36%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.85%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.85%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.17%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="7" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:28.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:69.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Contract liabilities&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:11.85%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 35,518&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:11.85%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 23,058&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:69.36%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.85%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:11.85%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="display:inline-block;text-indent:0pt;width:36pt;"/&gt;Contract liabilities are reflected as deferred revenue on the consolidated balance sheet and relate to payments invoiced or received in advance of completion of performance obligations under a contract. Contract liabilities are recognized as revenue upon the fulfillment of performance obligations.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="display:inline-block;text-indent:0pt;width:36pt;"/&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.64%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.2%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:17.46%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Three months ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:17.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Six months ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:17.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;span style="font-family:'Calibri','Helvetica','sans-serif';"&gt;&#160;&#160;&#160;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:17.8%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.14%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="13" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:36.5%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Balance, beginning of the period&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 22,142&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:9pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 34,106&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 23,058&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 29,251&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:62.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Deferral of revenue&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 21,893&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 6,248&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.64%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 30,117&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 10,724&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:62.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Recognition of deferred revenue&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt; (8,517)&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt; (9,937)&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.64%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt; (17,657)&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt; (9,558)&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Balance, end of the period&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.88%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 35,518&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.89%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 30,417&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.89%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.64%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 35,518&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.89%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.2%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 30,417&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ContractWithCustomerAssetAndLiabilityTableTextBlock>
    <us-gaap:ContractWithCustomerLiability
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_TepQUoX8yk-FtjvxVPUCsg_4_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">35518000</us-gaap:ContractWithCustomerLiability>
    <us-gaap:ContractWithCustomerLiability
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_DXU3NOxB7k-QUb-iZW54Eg_4_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">23058000</us-gaap:ContractWithCustomerLiability>
    <us-gaap:ContractWithCustomerLiability
      contextRef="As_Of_3_31_2021_Qs-qxUhDAk-CSx7C4Sn69A"
      decimals="-3"
      id="Tc_DmZ8uDn4_0uYrN68Mt3jaQ_5_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">22142000</us-gaap:ContractWithCustomerLiability>
    <us-gaap:ContractWithCustomerLiability
      contextRef="As_Of_3_31_2020_-5Cw11QoRE6nHA_ngva07Q"
      decimals="-3"
      id="Tc_ZhNfaXd1P0Sjo20AIKe1QA_5_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">34106000</us-gaap:ContractWithCustomerLiability>
    <us-gaap:ContractWithCustomerLiability
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_W3foHsrobUieNfuunXTQTA_5_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">23058000</us-gaap:ContractWithCustomerLiability>
    <us-gaap:ContractWithCustomerLiability
      contextRef="As_Of_12_31_2019_FtHnUOMLjkeW-5RTgMqhrA"
      decimals="-3"
      id="Tc_O6JwrBg96kGVLAwQ7l5iaw_5_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">29251000</us-gaap:ContractWithCustomerLiability>
    <acls:ContractWithCustomerLiabilityDeferralOfRevenue
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_pu9hEqpp3EimWKKtApilhg_6_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">21893000</acls:ContractWithCustomerLiabilityDeferralOfRevenue>
    <acls:ContractWithCustomerLiabilityDeferralOfRevenue
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc__tr7lVja2E6T1lsZgYTS2w_6_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">6248000</acls:ContractWithCustomerLiabilityDeferralOfRevenue>
    <acls:ContractWithCustomerLiabilityDeferralOfRevenue
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_NJz2tM3a2EWio_uW_Bx9pA_6_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">30117000</acls:ContractWithCustomerLiabilityDeferralOfRevenue>
    <acls:ContractWithCustomerLiabilityDeferralOfRevenue
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_v0vtwwtINEur7iySMzOQQA_6_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">10724000</acls:ContractWithCustomerLiabilityDeferralOfRevenue>
    <us-gaap:ContractWithCustomerLiabilityRevenueRecognized
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_SDfaCltba0CFIZ9Oj1O9gg_7_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-8517000</us-gaap:ContractWithCustomerLiabilityRevenueRecognized>
    <us-gaap:ContractWithCustomerLiabilityRevenueRecognized
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_dw5FJ7HyQUmRCARfYBSnTw_7_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-9937000</us-gaap:ContractWithCustomerLiabilityRevenueRecognized>
    <us-gaap:ContractWithCustomerLiabilityRevenueRecognized
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_RYyWPXnro0iNsXjKDOUQLg_7_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-17657000</us-gaap:ContractWithCustomerLiabilityRevenueRecognized>
    <us-gaap:ContractWithCustomerLiabilityRevenueRecognized
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_7A-ZlvApkkWSgpGz_acK2A_7_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-9558000</us-gaap:ContractWithCustomerLiabilityRevenueRecognized>
    <us-gaap:ContractWithCustomerLiability
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_qvw69UKhIkWjBVsHALjhow_8_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">35518000</us-gaap:ContractWithCustomerLiability>
    <us-gaap:ContractWithCustomerLiability
      contextRef="As_Of_6_30_2020_vfxHSqwZwkeC1Z0d0SG93A"
      decimals="-3"
      id="Tc_iT3cgvAkl0-EduXDIMwuig_8_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">30417000</us-gaap:ContractWithCustomerLiability>
    <us-gaap:ContractWithCustomerLiability
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_gLJgMo8TvUKIcY_NtixT4Q_8_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">35518000</us-gaap:ContractWithCustomerLiability>
    <us-gaap:ContractWithCustomerLiability
      contextRef="As_Of_6_30_2020_vfxHSqwZwkeC1Z0d0SG93A"
      decimals="-3"
      id="Tc_qglilT_Ut0OO6NRxIFHS6g_8_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">30417000</us-gaap:ContractWithCustomerLiability>
    <acls:PercentageOfPaymentUponShipmentOfTool
      contextRef="Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_fPmnjFnuFEeqgfLBIms0Xg"
      decimals="2"
      id="Narr_SgXnWd1I6UChXpUy-6eUgA"
      unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg">0.90</acls:PercentageOfPaymentUponShipmentOfTool>
    <acls:PercentageOfPaymentUponInstallation
      contextRef="Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_fPmnjFnuFEeqgfLBIms0Xg"
      decimals="2"
      id="Narr_K6wgVSXojEilnfgOKu_W0A"
      unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg">0.10</acls:PercentageOfPaymentUponInstallation>
    <acls:PeriodOfPaymentUponDeliveryOfParts
      contextRef="Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_srt_RangeAxis_srt_MinimumMember_eoI0MHitoEKWWaFv3U4W5w"
      id="Narr_zjkorV-5zkiG_GIQgr0IWQ">P30D</acls:PeriodOfPaymentUponDeliveryOfParts>
    <acls:PeriodOfPaymentUponDeliveryOfParts
      contextRef="Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_srt_RangeAxis_srt_MaximumMember_s_z-Qx9rgU29sO1r_6EnQw"
      id="Narr_wNRPTLIiUESJx5d839aHww">P60D</acls:PeriodOfPaymentUponDeliveryOfParts>
    <us-gaap:LoansNotesTradeAndOtherReceivablesDisclosureTextBlock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tb_q8hmIuwfU0-TMqQLrPhLAA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 5. &lt;/b&gt;&lt;b style="font-weight:bold;"&gt;Receivables and Allowances for Credit Losses&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;All trade receivables are reported on the Consolidated Balance Sheets at their amortized cost adjusted for any write-offs and net of allowances for credit losses. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Axcelis maintains an allowance for credit losses, which represent an estimate of expected losses over the remaining contractual life of our receivables, considering current market conditions and estimates for supportable forecasts when appropriate. The estimate is a result of the Company&#x2019;s ongoing assessments and evaluations of collectability, historical loss experience, and future expectations in estimating credit losses in our receivable portfolio. Axcelis uses historical loss experience rates and applies them to a related aging analysis while also considering customer and/or economic risk where appropriate. Determination of the proper amount of allowances requires management to exercise judgment about the timing, frequency and severity of credit losses that could materially affect the provision for credit losses and, as a result, net earnings. The allowance takes into consideration numerous quantitative and qualitative factors that include receivable type, historical loss experience, loss migration, delinquency trends, collection experience, current economic conditions, estimates for supportable forecasts, when appropriate, and credit risk characteristics. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Axcelis evaluates the credit risk of the customer when extending credit based on a combination of various financial and qualitative factors that may affect our customers&#x2019; ability to pay. These factors may include the customer&#x2019;s financial condition, past payment experience, and credit bureau report, as well as the value of the underlying collateral.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Management performs detailed reviews of Axcelis&#x2019; receivables on a quarterly basis to assess the adequacy of the allowances and to determine if any impairment has occurred. Amounts determined to be uncollectable are charged directly against the allowances, while amounts recovered on previously written-off accounts increase the allowances. Changes to the allowances for credit losses are maintained through adjustments to the provision for credit losses, which are charged to current period earnings.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The following table shows changes of the allowances for credit losses related to trade receivables for the three and six months ended June 30, 2021 and 2020, respectively:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:57.44%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.91%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:57.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Three months ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Six months ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:57.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:18.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:18.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:57.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:8.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:8.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:8.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:8.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="14" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:38.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:57.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Balance, beginning of period&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:1.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 818&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:57.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Provision for credit losses&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:57.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Charge-offs&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (818)&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:57.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Recoveries&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:57.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Balance, end of period&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:1.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:LoansNotesTradeAndOtherReceivablesDisclosureTextBlock>
    <us-gaap:AccountsReceivableAllowanceForCreditLossTableTextBlock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tb_84_8WzJhe0m_Ki6kpu8Ejw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:57.44%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.91%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:57.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Three months ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Six months ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:57.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:18.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:18.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:57.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:8.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:8.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:8.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:8.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="14" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:57.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:1.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:38.87%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:57.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Balance, beginning of period&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:1.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 818&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:57.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Provision for credit losses&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:57.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Charge-offs&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt; (818)&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:57.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;    Recoveries&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:57.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Balance, end of period&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:1.91%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:AccountsReceivableAllowanceForCreditLossTableTextBlock>
    <us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent
      contextRef="As_Of_12_31_2019_FtHnUOMLjkeW-5RTgMqhrA"
      decimals="-3"
      id="Tc_18tXZ6GGL0i0GtySJX6Xew_5_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">818000</us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent>
    <us-gaap:AllowanceForDoubtfulAccountsReceivableWriteOffs
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_nDRZmyvbzkS8wu_dNTq8YA_7_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">818000</us-gaap:AllowanceForDoubtfulAccountsReceivableWriteOffs>
    <us-gaap:EarningsPerShareTextBlock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tb_7mzEgIJFaE6sHXB0Hst7fw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 6.&#160;&#160;Computation of Net Earnings per Share&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Basic earnings per share is computed by dividing income available to common stockholders (the numerator) by the weighted-average number of common shares outstanding (the denominator) for the period. The computation of diluted earnings per share is similar to basic earnings per share, except that the denominator is increased by the number of additional common shares that would have been outstanding if the potentially dilutive common shares issuable on exercise of stock options and vesting of RSUs had been issued, calculated using the treasury stock method. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:27.35pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The components of net earnings per share are as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.44%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:16.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Three months ended  &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:17.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Six months ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:16.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:17.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.73%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="14" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;width:35.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in thousands, except per share amounts) &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Net income available to common stockholders&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 18,906&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 13,302&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 35,386&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 24,523&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Weighted average common shares outstanding used in computing basic income per share&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 33,677&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 33,116&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 33,696&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 32,998&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Incremental options and RSUs&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 634&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 842&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 777&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,025&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Weighted average common shares used in computing diluted net income per share&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 34,311&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 33,958&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 34,473&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 34,023&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Net income per share&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;"&gt;Basic&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 0.56&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 0.40&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1.05&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 0.74&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;"&gt;Diluted&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 0.55&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 0.39&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1.03&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 0.72&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Diluted weighted average common shares outstanding does not include 1,800 and 3,138 common equivalent shares issuable with respect to outstanding equity awards for the three-month periods ended June 30, 2021 and 2020, respectively, or 1,352 and 5,006 common equivalent shares issuable with respect to outstanding equity awards for the six-month periods ending June 30, 2021 and 2020, respectively, as their effect would have been anti-dilutive.&lt;/p&gt;</us-gaap:EarningsPerShareTextBlock>
    <us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tb_giSUWd1z5kqisZpXvfBGRw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.44%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:16.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;white-space:pre-wrap;"&gt;Three months ended  &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:17.06%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Six months ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:16.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:17.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.73%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="14" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;width:35.58%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in thousands, except per share amounts) &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Net income available to common stockholders&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 18,906&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 13,302&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 35,386&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 24,523&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Weighted average common shares outstanding used in computing basic income per share&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 33,677&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 33,116&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 33,696&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 32,998&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Incremental options and RSUs&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 634&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 842&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 777&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1,025&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Weighted average common shares used in computing diluted net income per share&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 34,311&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 33,958&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 34,473&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 34,023&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Net income per share&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.44%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;"&gt;Basic&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 0.56&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 0.40&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1.05&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 0.74&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;"&gt;Diluted&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 0.55&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 0.39&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 1.03&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 0.72&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_uR6qA-PbykuEvPVJ6EDyHQ_5_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">18906000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_DOQrOy3XcEaPCO4gjFiz6g_5_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">13302000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_ROtpOt97eECJJxmvHKr2cA_5_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">35386000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_E30_F1R0E0K1ZiBcvvoS-g_5_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">24523000</us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic>
    <us-gaap:WeightedAverageNumberOfSharesOutstandingBasic
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_iKbMpagay02dERcHzW8GIg_6_3"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">33677000</us-gaap:WeightedAverageNumberOfSharesOutstandingBasic>
    <us-gaap:WeightedAverageNumberOfSharesOutstandingBasic
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_ls_N6FOMa0Sg7IilZTKntw_6_6"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">33116000</us-gaap:WeightedAverageNumberOfSharesOutstandingBasic>
    <us-gaap:WeightedAverageNumberOfSharesOutstandingBasic
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_aBXAByAjuEybqcjzhJ7xUA_6_9"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">33696000</us-gaap:WeightedAverageNumberOfSharesOutstandingBasic>
    <us-gaap:WeightedAverageNumberOfSharesOutstandingBasic
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_arDOAXhhxEecx4JXPOnzng_6_12"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">32998000</us-gaap:WeightedAverageNumberOfSharesOutstandingBasic>
    <us-gaap:IncrementalCommonSharesAttributableToShareBasedPaymentArrangements
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_w9xKmgE1oEWX9igCQWzwRw_7_3"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">634000</us-gaap:IncrementalCommonSharesAttributableToShareBasedPaymentArrangements>
    <us-gaap:IncrementalCommonSharesAttributableToShareBasedPaymentArrangements
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_lM_hbywcyEC-QQ8Qz61nzw_7_6"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">842000</us-gaap:IncrementalCommonSharesAttributableToShareBasedPaymentArrangements>
    <us-gaap:IncrementalCommonSharesAttributableToShareBasedPaymentArrangements
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_-PRKMVxpwkGWthToaYUpdw_7_9"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">777000</us-gaap:IncrementalCommonSharesAttributableToShareBasedPaymentArrangements>
    <us-gaap:IncrementalCommonSharesAttributableToShareBasedPaymentArrangements
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_VQvuys2R8kK119ihAxG5Hw_7_12"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">1025000</us-gaap:IncrementalCommonSharesAttributableToShareBasedPaymentArrangements>
    <us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Tc_nALWfB8EykGgQURJZGZN9A_8_3"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">34311000</us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding>
    <us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Tc_-iitLQQWI0aIu8Ewba-HXg_8_6"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">33958000</us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding>
    <us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_eU_v-BCZpESik7aReGyg-Q_8_9"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">34473000</us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding>
    <us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_ZBBQUxz6hEuw7oByQf3EAA_8_12"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">34023000</us-gaap:WeightedAverageNumberOfDilutedSharesOutstanding>
    <us-gaap:EarningsPerShareBasic
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="2"
      id="Tc_C9J_09Jb50mctXB_b_EMbQ_10_3"
      unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ">0.56</us-gaap:EarningsPerShareBasic>
    <us-gaap:EarningsPerShareBasic
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="2"
      id="Tc_vlTeo5rZwEKI0z-NOgOHzQ_10_6"
      unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ">0.40</us-gaap:EarningsPerShareBasic>
    <us-gaap:EarningsPerShareBasic
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="2"
      id="Tc_yFTu_ytH4EWcjY7m_7TqUg_10_9"
      unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ">1.05</us-gaap:EarningsPerShareBasic>
    <us-gaap:EarningsPerShareBasic
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="2"
      id="Tc_ihmtMTarhUO33WCumNBA4g_10_12"
      unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ">0.74</us-gaap:EarningsPerShareBasic>
    <us-gaap:EarningsPerShareDiluted
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="2"
      id="Tc_pZQSQxb66ECdrgXbTmrClw_11_3"
      unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ">0.55</us-gaap:EarningsPerShareDiluted>
    <us-gaap:EarningsPerShareDiluted
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="2"
      id="Tc_t1dOmjyJwUmcrNJoopkNtg_11_6"
      unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ">0.39</us-gaap:EarningsPerShareDiluted>
    <us-gaap:EarningsPerShareDiluted
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="2"
      id="Tc_ceOQW-Pchkm3HqNuJQGetg_11_9"
      unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ">1.03</us-gaap:EarningsPerShareDiluted>
    <us-gaap:EarningsPerShareDiluted
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="2"
      id="Tc_Vo_Mhb-eOEK7-v8cNejOMA_11_12"
      unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ">0.72</us-gaap:EarningsPerShareDiluted>
    <us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-3"
      id="Narr_n8fadsVXoEqefg4VD7FB9Q"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">1800000</us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount>
    <us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-3"
      id="Narr_aD5J0_8zcEuyf0cf40e5Ew"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">3138000</us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount>
    <us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Narr_BpWIyuOIMUelU08QOVVUSQ"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">1352000</us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount>
    <us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Narr_LYFlPd9qdE-DyR4xeeFevQ"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">5006000</us-gaap:AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount>
    <us-gaap:ComprehensiveIncomeNoteTextBlock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tb_Ep-aujMCdUCIiGWBsSjWGQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 7.&#160;&#160;Accumulated Other Comprehensive Income &lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The following table presents the changes in accumulated other comprehensive income, net of tax, by component, for the six months ended June 30, 2021:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.24%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.9%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.59%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.88%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Foreign&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Defined&#160;benefit&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;currency&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;pension&#160;plan&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Balance at December 31, 2020&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,945&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt; (510)&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,435&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;"&gt;Other comprehensive loss and pension reclassification&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt; (820)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 54&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt; (766)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Balance at June 30, 2021&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,125&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt; (456)&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.59%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.88%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 2,669&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:ComprehensiveIncomeNoteTextBlock>
    <us-gaap:ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tb_nBlVLG5GLkeuP-_40VdT1A">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.24%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.13%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.9%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.59%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.88%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Foreign&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Defined&#160;benefit&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;currency&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;pension&#160;plan&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="11" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Balance at December 31, 2020&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,945&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.9%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt; (510)&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.59%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.88%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,435&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;"&gt;Other comprehensive loss and pension reclassification&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt; (820)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 54&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt; (766)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Balance at June 30, 2021&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,125&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt; (456)&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.59%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.88%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 2,669&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock>
    <us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax
      contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_3gAqRSnshEqM1_usXZTg1g"
      decimals="-3"
      id="Tc_ZsgnJ0TS0UKOUkg0M0SPAw_4_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">3945000</us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax>
    <us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax
      contextRef="As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_hy0Vpmp4gkyQqT14NwPRmQ"
      decimals="-3"
      id="Tc_ZDTTzy1jIU6IH3_89YQgNQ_4_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-510000</us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax>
    <us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_OqOAhVSlOUO0Jyem4zIyPw_4_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">3435000</us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax>
    <us-gaap:OtherComprehensiveIncomeLossNetOfTax
      contextRef="Duration_1_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_1x5HWVO72UqGpq3lSg5vJg"
      decimals="-3"
      id="Tc_UGvcsM4Zqk61HNNz4daM3Q_5_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-820000</us-gaap:OtherComprehensiveIncomeLossNetOfTax>
    <us-gaap:OtherComprehensiveIncomeLossNetOfTax
      contextRef="Duration_1_1_2021_To_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_H_xVYtRFcEGPut0zNaxYsg"
      decimals="-3"
      id="Tc_xGM7OBe92EKHcznImm6_fQ_5_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">54000</us-gaap:OtherComprehensiveIncomeLossNetOfTax>
    <us-gaap:OtherComprehensiveIncomeLossNetOfTax
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_O8ZMY7gCvE-hH86Kpv6gFw_5_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-766000</us-gaap:OtherComprehensiveIncomeLossNetOfTax>
    <us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax
      contextRef="As_Of_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_lj4AoPsMfkCbp5bs5wvdSw"
      decimals="-3"
      id="Tc_vAW0bsx6tEavsLEqy-zs_w_6_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">3125000</us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax>
    <us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax
      contextRef="As_Of_6_30_2021_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember_CCIgEjvg00eOsfhU2VWCfA"
      decimals="-3"
      id="Tc_durn4Dq0pk2AeHvbSdHWpg_6_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-456000</us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax>
    <us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_cd1wZloT1Ue_r6jGdVK9iQ_6_9"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">2669000</us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax>
    <acls:CashCashEquivalentsAndRestrictedCashTextBlock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tb_Fby8iYL9V0OdyhEmxJNz_A">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 8. Cash, cash equivalents and restricted cash&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The following table provides a reconciliation of cash, cash equivalents, and restricted cash reported within the consolidated balance sheets to the total of the amounts shown in the statement of cash flows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:15.37%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:15.39%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:18.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:18.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:18.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:15.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="7" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:38.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Cash and cash equivalents&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:15.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;219,731 &lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:15.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;203,479 &lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Long-term restricted cash&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:15.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;755 &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:15.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;753 &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Total cash, cash equivalents and restricted cash&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:15.37%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;220,486 &lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:15.39%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;204,232 &lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;As of June 30, 2021, we had $0.8&#160;million in restricted cash representing the total of (i) cash collateral for a $0.7&#160;million letter of credit relating to workers&#x2019; compensation insurance and (ii) a $0.1&#160;&lt;span style="white-space:pre-wrap;"&gt;million deposit relating to customs activity.  &lt;/span&gt;&lt;/p&gt;</acls:CashCashEquivalentsAndRestrictedCashTextBlock>
    <acls:CashCashEquivalentsAndRestrictedCashTableTextBlock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tb_KOP_ndfYuUa9KLGfWuTMUA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:15.37%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:15.39%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:18.13%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:18.15%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;width:18.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;width:15.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="7" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:38.45%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Cash and cash equivalents&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:15.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;219,731 &lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:15.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;203,479 &lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Long-term restricted cash&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:15.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;755 &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:15.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;753 &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Total cash, cash equivalents and restricted cash&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:15.37%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;220,486 &lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:15.39%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt;204,232 &lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</acls:CashCashEquivalentsAndRestrictedCashTableTextBlock>
    <us-gaap:CashAndCashEquivalentsAtCarryingValue
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_1hwKACAP90upIQi518d7QA_4_2"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">219731000</us-gaap:CashAndCashEquivalentsAtCarryingValue>
    <us-gaap:CashAndCashEquivalentsAtCarryingValue
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_Vk4JK44HqEeyMvTKzoEPpw_4_5"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">203479000</us-gaap:CashAndCashEquivalentsAtCarryingValue>
    <us-gaap:RestrictedCashAndCashEquivalents
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_A1nYqng-8EW_jiJW7MISgg_5_2"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">755000</us-gaap:RestrictedCashAndCashEquivalents>
    <us-gaap:RestrictedCashAndCashEquivalents
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_L2NxZp4VMkCDn2SP-iB44g_5_5"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">753000</us-gaap:RestrictedCashAndCashEquivalents>
    <us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_hWUT2D-VIkWclqow5cGENQ_6_2"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">220486000</us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents>
    <us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_8pEMlIrAM0aqjMV2rslNYg_6_5"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">204232000</us-gaap:CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents>
    <acls:LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit
      contextRef="As_Of_6_30_2021_us-gaap_LongtermDebtTypeAxis_us-gaap_RevolvingCreditFacilityMember_TBzxievtWUanTNO0EDnI7w"
      decimals="-5"
      id="Narr_wi1pmoRGvkyrdIj1jPhrlg"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">800000</acls:LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit>
    <us-gaap:WorkersCompensationLiabilityCurrentAndNoncurrent
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-5"
      id="Narr_9W2D0Eo4tUK7ezCEFYT_UA"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">700000</us-gaap:WorkersCompensationLiabilityCurrentAndNoncurrent>
    <acls:DepositRelatingToCustomsActivity
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-5"
      id="Narr_pQJ0mS8LMEuAvzQk_H2jHg"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">100000</acls:DepositRelatingToCustomsActivity>
    <us-gaap:InventoryDisclosureTextBlock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tb_yM8ZRDNI40mbX2ZE999Gtg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note&#160;9.&#160;&#160;Inventories, net&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The components of inventories are as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.74%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.12%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="8" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:22.86%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Raw materials&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 109,795&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 100,254&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Work in process&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 40,233&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 33,867&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Finished goods (completed systems)&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 42,293&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.12%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 26,955&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;      Inventories, net&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 192,321&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.12%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 161,076&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;When recorded, inventory reserves reduce the carrying value of inventories to their net realizable value. We establish inventory reserves when conditions exist that indicate inventory may be in excess of anticipated demand or is obsolete based upon assumptions about future demand for the Company&#x2019;s products or market conditions. We regularly evaluate the ability to realize the value of inventories based on a combination of factors including the following: forecasted sales or usage, estimated product end of life dates, estimated current and future market value and new product introductions. Purchasing and usage alternatives are also explored to mitigate inventory exposure.&lt;/p&gt;</us-gaap:InventoryDisclosureTextBlock>
    <us-gaap:ScheduleOfInventoryCurrentTableTextBlock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tb_erGXbxeLmUuOylO-2Lrnvg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.74%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.49%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.12%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="8" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:22.86%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Raw materials&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 109,795&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 100,254&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Work in process&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 40,233&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 33,867&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Finished goods (completed systems)&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 42,293&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.12%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 26,955&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;&lt;span style="white-space:pre-wrap;"&gt;      Inventories, net&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 192,321&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:8.12%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 161,076&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfInventoryCurrentTableTextBlock>
    <us-gaap:InventoryRawMaterialsNetOfReserves
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_uyqMbvlqtEOEOQxNfYzNVQ_4_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">109795000</us-gaap:InventoryRawMaterialsNetOfReserves>
    <us-gaap:InventoryRawMaterialsNetOfReserves
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_uhtxDpzmaEKsgsMFdl52Lg_4_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">100254000</us-gaap:InventoryRawMaterialsNetOfReserves>
    <us-gaap:InventoryWorkInProcessNetOfReserves
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_iDISjiGQdkS6qgB8HVrHrQ_5_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">40233000</us-gaap:InventoryWorkInProcessNetOfReserves>
    <us-gaap:InventoryWorkInProcessNetOfReserves
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_gfEtCIaI7Ey1vEdWAxLy_w_5_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">33867000</us-gaap:InventoryWorkInProcessNetOfReserves>
    <us-gaap:InventoryFinishedGoodsNetOfReserves
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_O6kUV9CO5USmLLCE6j2c3g_6_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">42293000</us-gaap:InventoryFinishedGoodsNetOfReserves>
    <us-gaap:InventoryFinishedGoodsNetOfReserves
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_EZQuL_cor062eBnziaTSnw_6_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">26955000</us-gaap:InventoryFinishedGoodsNetOfReserves>
    <us-gaap:InventoryNet
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_NOnyXU_UM0-2ucmgw_cgrA_7_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">192321000</us-gaap:InventoryNet>
    <us-gaap:InventoryNet
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_kinXGC93vUm3j0ejc-fwGg_7_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">161076000</us-gaap:InventoryNet>
    <us-gaap:ProductWarrantyDisclosureTextBlock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tb_ZRaHG3ybqkWZEtQd5T5wdQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note&#160;10.&#160;&#160;Product Warranty&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We generally offer a one-year warranty for all of our systems, the terms and conditions of which vary depending upon the product sold. For all systems sold, we accrue a liability for the estimated cost of standard warranty at the time of system shipment and defer the portion of systems revenue attributable to the fair value of non-standard warranty. Costs for non-standard warranty are expensed as incurred. Factors that affect our warranty liability include the number of installed units, historical and anticipated product failure rates, material usage and service labor costs. We periodically assess the adequacy of our recorded liability and adjust the amount as necessary.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The changes in our standard product warranty liability are as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:17.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Six months ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:17.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="8" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:17.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Balance at January&#160;1 (beginning of year)&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 4,612&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,244&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;"&gt;Warranties issued during the period&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,013&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 2,635&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;"&gt;Settlements made during the period&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt; (1,991)&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt; (1,913)&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;"&gt;Changes in estimate of liability for pre-existing warranties during the period&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt; (372)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 177&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Balance at June 30 (end of period)&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 5,262&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 4,143&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;"&gt;Amount classified as current&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 4,690&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,942&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;"&gt;Amount classified as long-term &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 572&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 201&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 18pt;"&gt;Total warranty liability&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 5,262&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 4,143&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:ProductWarrantyDisclosureTextBlock>
    <acls:ProductWarrantyPeriod
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Narr_dxHxLma--EWsZMGvacnPSg">P1Y</acls:ProductWarrantyPeriod>
    <us-gaap:ScheduleOfProductWarrantyLiabilityTableTextBlock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tb_tQyHNZ-HnEeMQKuGEUQgiQ">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:17.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Six months ended &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:17.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, &lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="8" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="5" style="vertical-align:bottom;width:17.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Balance at January&#160;1 (beginning of year)&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 4,612&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,244&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;"&gt;Warranties issued during the period&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,013&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 2,635&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;"&gt;Settlements made during the period&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt; (1,991)&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt; (1,913)&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;"&gt;Changes in estimate of liability for pre-existing warranties during the period&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt; (372)&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 177&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;Balance at June 30 (end of period)&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 5,262&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 4,143&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;"&gt;Amount classified as current&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 4,690&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 3,942&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;"&gt;Amount classified as long-term &lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 572&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"&gt;&#160;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 201&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 18pt;"&gt;Total warranty liability&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 5,262&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:9pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"&gt; 4,143&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;</us-gaap:ScheduleOfProductWarrantyLiabilityTableTextBlock>
    <us-gaap:ProductWarrantyAccrual
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-3"
      id="Tc_DA1hZUCcbU2WZAnFmERjWw_5_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">4612000</us-gaap:ProductWarrantyAccrual>
    <us-gaap:ProductWarrantyAccrual
      contextRef="As_Of_12_31_2019_FtHnUOMLjkeW-5RTgMqhrA"
      decimals="-3"
      id="Tc_xN396fuXPEOPWRUEXphXkQ_5_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">3244000</us-gaap:ProductWarrantyAccrual>
    <us-gaap:ProductWarrantyAccrualWarrantiesIssued
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_bNns-yri1kazMPd1bjTG1g_6_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">3013000</us-gaap:ProductWarrantyAccrualWarrantiesIssued>
    <us-gaap:ProductWarrantyAccrualWarrantiesIssued
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_xlzmYIICx06L0oWE6PpjcQ_6_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">2635000</us-gaap:ProductWarrantyAccrualWarrantiesIssued>
    <us-gaap:ProductWarrantyAccrualPayments
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_j3RwgkGnXk2im74G3D_Ggg_7_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">1991000</us-gaap:ProductWarrantyAccrualPayments>
    <us-gaap:ProductWarrantyAccrualPayments
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_dxSkS8qchEqGJLexOQDq3A_7_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">1913000</us-gaap:ProductWarrantyAccrualPayments>
    <us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-3"
      id="Tc_Jw66R_FhvU6J9W8Xbhss_w_8_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">-372000</us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease>
    <us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-3"
      id="Tc_IXjSa-QvK0OVdrpfEgtTZA_8_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">177000</us-gaap:ProductWarrantyAccrualPreexistingIncreaseDecrease>
    <us-gaap:ProductWarrantyAccrual
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_1iXYaitw0k6gw8u4ttSiJA_9_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">5262000</us-gaap:ProductWarrantyAccrual>
    <us-gaap:ProductWarrantyAccrual
      contextRef="As_Of_6_30_2020_vfxHSqwZwkeC1Z0d0SG93A"
      decimals="-3"
      id="Tc_NQi_4VgWHEik-OhakqTfjA_9_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">4143000</us-gaap:ProductWarrantyAccrual>
    <us-gaap:ProductWarrantyAccrualClassifiedCurrent
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_Nmj_GOPvU0SQy-ibrmTd9A_11_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">4690000</us-gaap:ProductWarrantyAccrualClassifiedCurrent>
    <us-gaap:ProductWarrantyAccrualClassifiedCurrent
      contextRef="As_Of_6_30_2020_vfxHSqwZwkeC1Z0d0SG93A"
      decimals="-3"
      id="Tc_vm0vUgSPmEe40EzK2N10Bw_11_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">3942000</us-gaap:ProductWarrantyAccrualClassifiedCurrent>
    <us-gaap:ProductWarrantyAccrualNoncurrent
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_YYiIYOXP90iiKInT8G40wg_12_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">572000</us-gaap:ProductWarrantyAccrualNoncurrent>
    <us-gaap:ProductWarrantyAccrualNoncurrent
      contextRef="As_Of_6_30_2020_vfxHSqwZwkeC1Z0d0SG93A"
      decimals="-3"
      id="Tc_MYgLq8YPuES-GkWOXydi_A_12_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">201000</us-gaap:ProductWarrantyAccrualNoncurrent>
    <us-gaap:ProductWarrantyAccrual
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-3"
      id="Tc_8tWwjC1NL02OsVBRjhMtow_13_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">5262000</us-gaap:ProductWarrantyAccrual>
    <us-gaap:ProductWarrantyAccrual
      contextRef="As_Of_6_30_2020_vfxHSqwZwkeC1Z0d0SG93A"
      decimals="-3"
      id="Tc_DEJTxMKYeE6_KL_A-2QceA_13_6"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">4143000</us-gaap:ProductWarrantyAccrual>
    <us-gaap:FairValueDisclosuresTextBlock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tb_D863REKRVEiII6C16b3bXg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note&#160;11.&#160;&#160;Fair Value Measurements&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Certain assets on our balance sheets are reported at their fair value. Fair value is defined as the price that would be received for an asset or paid to transfer a liability (an exit price) in the principal or most advantageous market for the asset or liability in an orderly transaction between market participants on the measurement date.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:27pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(a)&#160;&#160;Fair Value Hierarchy&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The accounting guidance for fair value measurement requires an entity to maximize the use of observable inputs and minimize the use of unobservable inputs when measuring fair value. The standard establishes a fair value hierarchy based on the level of independent, objective evidence surrounding the inputs used to measure fair value. A financial instrument&#x2019;s categorization within the fair value hierarchy is based upon the lowest level of input that is significant to the fair value measurement. The fair value hierarchy is as follows:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:27pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="text-decoration:underline;text-decoration-color:#000000;"&gt;Level 1 &lt;/span&gt;-&#160;applies to assets or liabilities for which there are quoted prices in active markets for identical assets or liabilities.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="text-decoration:underline;text-decoration-color:#000000;"&gt;Level 2 &lt;/span&gt;-&#160;applies to assets or liabilities for which there are inputs other than quoted prices that are observable for the asset or liability, such as quoted prices for similar assets or liabilities in active markets; quoted prices for identical assets or liabilities in markets with insufficient volume or infrequent transactions (less active markets); or model-derived valuations in which significant inputs are observable or can be derived principally from, or corroborated by, observable market data.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="text-decoration:underline;text-decoration-color:#000000;"&gt;Level 3 &lt;/span&gt;-&#160;applies to assets or liabilities for which there are unobservable inputs to the valuation methodology that are significant to the measurement of the fair value of the assets or liabilities.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(b)&#160;&#160;Fair Value Measurements&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Our money market funds and short-term investments are included in cash and cash equivalents in the consolidated balance sheets. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The following table sets forth our assets by level within the fair value hierarchy:&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:24.5pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Fair&#160;Value&#160;Measurements&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;1&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;2&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;3&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="14" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Assets&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Cash equivalents:&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Money market funds, U.S. Government Securities and Agency Investments&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 190,731&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 190,731&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, 2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Fair&#160;Value&#160;Measurements&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;1&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;2&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;3&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="14" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Assets&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Cash equivalents:&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Money market funds, U.S. Government Securities and Agency Investments&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 172,119&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 172,119&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(c)&#160;&#160;Other Financial Instruments&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;The carrying amounts reflected in the consolidated balance sheets for accounts receivable, prepaid expenses and other current assets and non-current assets, restricted cash, accounts payable and accrued expenses approximate fair value due to their short-term maturities.&lt;/p&gt;</us-gaap:FairValueDisclosuresTextBlock>
    <us-gaap:ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tb_PNtaZV4NIkCJwJz6u93qgw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:24.5pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;June 30, 2021&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Fair&#160;Value&#160;Measurements&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;1&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;2&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;3&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="14" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Assets&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Cash equivalents:&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Money market funds, U.S. Government Securities and Agency Investments&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 190,731&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 190,731&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"&gt;&lt;tr style="height:1pt;"&gt;&lt;td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"&gt;&lt;div style="bottom:0pt;position:absolute;width:100%;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:1pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/div&gt;&lt;/div&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;December 31, 2020&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Fair&#160;Value&#160;Measurements&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;1&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;2&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Level&#160;3&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&#160;&#160;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Total&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr style="height:0pt;visibility:hidden;"&gt;&lt;td colspan="14" style="padding:0pt;"/&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"&gt;&lt;span style="font-size:8pt;font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.26%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(in&#160;thousands)&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;&#160;&lt;/b&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Assets&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;Cash equivalents:&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;tr&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"&gt;Money market funds, U.S. Government Securities and Agency Investments&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 172,119&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; &#x2014;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;$&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"&gt; 172,119&lt;/p&gt;&lt;/td&gt;&lt;td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock>
    <us-gaap:CashAndCashEquivalentsFairValueDisclosure
      contextRef="As_Of_6_30_2021_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_9xTv3Pq1gUSA_r8gGJJknA"
      decimals="-3"
      id="Tc_ziHtdtXnaUi3kA8KOfEJKQ_7_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">190731000</us-gaap:CashAndCashEquivalentsFairValueDisclosure>
    <us-gaap:CashAndCashEquivalentsFairValueDisclosure
      contextRef="As_Of_6_30_2021_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_kuTMgTqgiki9V2z7-fMlxg"
      decimals="-3"
      id="Tc_b0HiEKVHQ0y-UEnafrUj6A_7_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">190731000</us-gaap:CashAndCashEquivalentsFairValueDisclosure>
    <us-gaap:CashAndCashEquivalentsFairValueDisclosure
      contextRef="As_Of_12_31_2020_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByFairValueHierarchyLevelAxis_us-gaap_FairValueInputsLevel1Member_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_FraS8kKQ90OGZQfA-1XGoA"
      decimals="-3"
      id="Tc_j6jJaFax2kSfITeqOCAEgQ_7_3"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">172119000</us-gaap:CashAndCashEquivalentsFairValueDisclosure>
    <us-gaap:CashAndCashEquivalentsFairValueDisclosure
      contextRef="As_Of_12_31_2020_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_lVUVH_kXYE6gJiajsabg5w"
      decimals="-3"
      id="Tc_3MENWeE9A0qvdWRS313uPA_7_12"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">172119000</us-gaap:CashAndCashEquivalentsFairValueDisclosure>
    <us-gaap:DebtDisclosureTextBlock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tb_1OtcUhG7xUWQ31RZuEYzpg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note&#160;12.&#160;&#160;Financing Arrangements&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;On January 30, 2015, we sold our corporate headquarters facility in Beverly, Massachusetts for $48.9&#160;million. As part of the sale, we also entered into a 22-year lease agreement of our headquarters facility. This sale-leaseback is accounted for as a financing lease under generally accepted accounting principles and, as such, we have recorded a financing obligation of $47.8&#160;million as of June 30, 2021. The associated lease payments include both an interest component and payment of principal, with the remaining liability being extinguished at the end of the original lease term. We posted a security deposit of $5.9&#160;&lt;span style="white-space:pre-wrap;"&gt;million in the form of an irrevocable letter of credit at the time of the closing. This letter of credit reduces our availability under our credit facility, as described in the next paragraph.   &lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;On July 31, 2020, we entered into a Senior Secured Credit Facilities Credit Agreement (the &#x201c;Credit Agreement&#x201d;) with Silicon Valley Bank, in its capacity as administrative agent and collateral agent for itself and as a lender, and such other banks and financial institutions or entities that from time to time join as lenders under the Credit Agreement.&#160;The Credit Agreement provides for a revolving credit facility in an aggregate principal amount not to exceed $40.0 million. Our obligations under the Credit Agreement are secured by&#160;a security interest, senior to any current and future debts and to any security interest, in all of our rights, title, and interest in, to and under substantially all of our assets, subject to limited exceptions, including permitted liens. The revolving credit facility terminates on July 31, 2023. As of June 30, 2021, we were in compliance with all covenant requirements of the Credit Agreement. As of such date, no borrowings had been made under the Credit Agreement, although a letter of credit for $5.9 million reduces the funds available for borrowing under the credit line. We entered into a First Amendment to the Credit Agreement with Silicon Valley Bank in March 2021 to (i) align the covenants with our 2021 stock repurchase program, and (ii) established terms to transition from a Eurodollar based interest rate option to an interest rate benchmark using a secured overnight financing rate (known as &#x201c;SOFR&#x201d;) published by the Federal Reserve Bank of New York.&lt;/p&gt;</us-gaap:DebtDisclosureTextBlock>
    <us-gaap:ProceedsFromSaleOfPropertyHeldForSale
      contextRef="Duration_1_30_2015_To_1_30_2015_srt_CounterpartyNameAxis_acls_BeverlyPropertyOwnerLlcMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingMember_ikN0WgABQ0Oc3EVaZNO4XA"
      decimals="-5"
      id="Narr_3HRdrA-e8EKp-6qmO2racg"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">48900000</us-gaap:ProceedsFromSaleOfPropertyHeldForSale>
    <us-gaap:LesseeOperatingLeaseTermOfContract
      contextRef="As_Of_1_30_2015_srt_CounterpartyNameAxis_acls_BeverlyPropertyOwnerLlcMember_us-gaap_PropertyPlantAndEquipmentByTypeAxis_us-gaap_BuildingMember_jmWTWk8TAU2MlL8_CzlyZQ"
      id="Narr_YDPLqfOd-0GpnJNsZoLlxQ">P22Y</us-gaap:LesseeOperatingLeaseTermOfContract>
    <us-gaap:FinanceLeaseLiabilityNoncurrent
      contextRef="As_Of_6_30_2021_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_SaleAndLeaseBackMember_XO2P9-16s0C-1V43VObF-w"
      decimals="-5"
      id="Narr_UQwuOiQGA0iUbpaGtOLpuw"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">47800000</us-gaap:FinanceLeaseLiabilityNoncurrent>
    <us-gaap:SecurityDeposit
      contextRef="As_Of_6_30_2021_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_SaleAndLeaseBackMember_XO2P9-16s0C-1V43VObF-w"
      decimals="-5"
      id="Narr_cYu-yvx6d0W926z9IOX27g"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">5900000</us-gaap:SecurityDeposit>
    <us-gaap:LineOfCreditFacilityMaximumBorrowingCapacity
      contextRef="As_Of_7_31_2020_srt_CounterpartyNameAxis_acls_SiliconValleyBankMember_us-gaap_CreditFacilityAxis_us-gaap_RevolvingCreditFacilityMember_BHV27yDiN0OhXbnK1dB6aQ"
      decimals="-5"
      id="Narr_zcCd6ojfUEialtftCrt5EQ"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">40000000.0</us-gaap:LineOfCreditFacilityMaximumBorrowingCapacity>
    <us-gaap:LineOfCreditFacilityFairValueOfAmountOutstanding
      contextRef="As_Of_6_30_2021_srt_CounterpartyNameAxis_acls_SiliconValleyBankMember_us-gaap_CreditFacilityAxis_us-gaap_RevolvingCreditFacilityMember_1PtMB98UE0qoxrddCYeVXQ"
      decimals="-5"
      id="Narr_wqc2hrB_e0a5o0S632_nLg"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">0</us-gaap:LineOfCreditFacilityFairValueOfAmountOutstanding>
    <us-gaap:LettersOfCreditOutstandingAmount
      contextRef="As_Of_6_30_2021_srt_CounterpartyNameAxis_acls_SiliconValleyBankMember_us-gaap_CreditFacilityAxis_us-gaap_RevolvingCreditFacilityMember_us-gaap_ShortTermDebtTypeAxis_us-gaap_LetterOfCreditMember_f9a-CoaN6k2l9efRYpvUrA"
      decimals="-5"
      id="Narr_fhFwgmmkoEmq7wh63_lQUg"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">5900000</us-gaap:LettersOfCreditOutstandingAmount>
    <us-gaap:IncomeTaxDisclosureTextBlock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tb_2i9VBopE4EiduYp-WyL9Hw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:40.5pt;text-indent:-40.5pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note&#160;13.&#160;&#160;Income Taxes &lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Income tax expense was $3.8 million for the three months ended June 30, 2021, compared to $2.3 million for the three months ended June 30, 2020. The $1.5 million increase was primarily due to a $7.2 million increase in pretax income. Income tax expense was $5.6 million during the six months ended June 30, 2021, compared with $3.3&lt;span style="white-space:pre-wrap;"&gt; million for the six months ended June 30, 2020.  The &lt;/span&gt;$2.3 million increase was primarily due to a $13.1 million increase in pretax income. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;The effective tax rate for the three and six months ended June 30, 2021 and 2020, respectively, was less than the U.S. statutory rate of 21% due to favorable discrete items related to equity compensation in those periods and Federal research and development tax credits that reduce the annual tax rate.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We had $51.4 million and $57.9 million of net deferred tax assets worldwide relating to net operating loss carryforwards, tax credit carryforwards and other temporary differences, as of June 30, 2021 and December 31, 2020, respectively. These deferred tax assets are available to reduce income taxes in future years. We have a $9.1&lt;span style="white-space:pre-wrap;"&gt; million valuation allowance in the U.S. against certain tax credits and state net operating losses due to the uncertainty of their realization based on long-term Company forecasts and the expiration dates on these tax assets. If future operating results of the Company within the U.S. or these foreign jurisdictions are significantly less than our expectations, it is reasonably possible that we would be required to record an additional valuation allowance on our deferred tax assets in the future.  &lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:IncomeTaxDisclosureTextBlock>
    <us-gaap:IncomeTaxExpenseBenefit
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-5"
      id="Narr_6hadeF5EH0m6o8vaHX39xg"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">3800000</us-gaap:IncomeTaxExpenseBenefit>
    <us-gaap:IncomeTaxExpenseBenefit
      contextRef="Duration_4_1_2020_To_6_30_2020_PbdbUThSEE-fxD337EP9fQ"
      decimals="-5"
      id="Narr_TkOjcnZy2EmjJmmQDrCqQQ"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">2300000</us-gaap:IncomeTaxExpenseBenefit>
    <acls:IncreaseInIncomeTaxExpenseBenefit
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-5"
      id="Narr_-ap6sBKDtE2CmSCva2s53w"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">1500000</acls:IncreaseInIncomeTaxExpenseBenefit>
    <acls:IncreaseInPreTaxIncome
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-5"
      id="Narr_VTbqgnnJ-0-_EK2CW66Y_A"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">7200000</acls:IncreaseInPreTaxIncome>
    <us-gaap:IncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-5"
      id="Narr_AxqW8pnf_k2jOOEiXIeZZQ"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">5600000</us-gaap:IncomeTaxExpenseBenefit>
    <us-gaap:IncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2020_To_6_30_2020_lZBzY9bfQUWj5MCwrrD_0A"
      decimals="-5"
      id="Narr_T_RodhwhSEeFMviJ3jPD_g"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">3300000</us-gaap:IncomeTaxExpenseBenefit>
    <acls:IncreaseInIncomeTaxExpenseBenefit
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-5"
      id="Narr_N9BM0_7rAUGbVVjyj3RaFw"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">2300000</acls:IncreaseInIncomeTaxExpenseBenefit>
    <acls:IncreaseInPreTaxIncome
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      decimals="-5"
      id="Narr_cu0qI-0MbkmRUu1Ufx4Qpg"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">13100000</acls:IncreaseInPreTaxIncome>
    <us-gaap:EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate
      contextRef="Duration_1_1_2020_To_6_30_2020_srt_RangeAxis_srt_MaximumMember_m9F1xkRmoUWAhyuzx-0Kfg"
      decimals="2"
      id="Narr_Ah1TYboKyU6AK8Dlj4Gq6g"
      unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg">0.21</us-gaap:EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate>
    <us-gaap:EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate
      contextRef="Duration_4_1_2020_To_6_30_2020_srt_RangeAxis_srt_MaximumMember_mZg6wqDjnUOiZUO1ONyttQ"
      decimals="2"
      id="Narr_bRvmuBk3e0CBr9HqXjGEXw"
      unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg">0.21</us-gaap:EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate>
    <us-gaap:EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate
      contextRef="Duration_1_1_2021_To_6_30_2021_srt_RangeAxis_srt_MaximumMember_20Nye_pU60KPVnSZPrRM4A"
      decimals="2"
      id="Narr_7W4ki_EHpkidnKDRQsSgTA"
      unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg">0.21</us-gaap:EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate>
    <us-gaap:EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate
      contextRef="Duration_4_1_2021_To_6_30_2021_srt_RangeAxis_srt_MaximumMember_ZnuU6u7lLU-23WdVDtAsjA"
      decimals="2"
      id="Narr_l__wrO57JEG0ygWcEfrvxg"
      unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg">0.21</us-gaap:EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate>
    <us-gaap:DeferredIncomeTaxAssetsNet
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-5"
      id="Narr_IB2SBoqzWUOq_yYf0pkvVw"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">51400000</us-gaap:DeferredIncomeTaxAssetsNet>
    <us-gaap:DeferredIncomeTaxAssetsNet
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-5"
      id="Narr_5y9U4dkAP0GHqB5-soTx9Q"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">57900000</us-gaap:DeferredIncomeTaxAssetsNet>
    <us-gaap:DeferredTaxAssetsValuationAllowance
      contextRef="As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug"
      decimals="-5"
      id="Narr_sEnrYotBJ0K6p_TNzyz4hw"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">9100000</us-gaap:DeferredTaxAssetsValuationAllowance>
    <us-gaap:ConcentrationRiskDisclosureTextBlock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tb_9-ss7GL0U0qA6id_lS6yGw">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:40.3pt;text-indent:-40.3pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note&#160;14.&#160;&#160;Concentration of Risk&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;For the three months ended June 30, 2021, two customers accounted for 19.7% and 10.2% of total revenue, respectively. For the three months ended June 30, 2020, three customers accounted for 22.5%, 22.2% and 11.6% of total revenue, respectively.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;For the six months ended June 30, 2021, one customer accounted for 24.4% of total revenue. For the &lt;span style="-sec-ix-hidden:Hidden_du9mfOOU5EGSpVFrDPCNpg;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;white-space:pre-wrap;"&gt;six months&lt;/span&gt;&lt;/span&gt;&lt;span style="white-space:pre-wrap;"&gt; ended &lt;/span&gt;&lt;span style="-sec-ix-hidden:Hidden_bCiyUD-GJEW9dwOcR7kUFA;"&gt;&lt;span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;white-space:pre-wrap;"&gt;June 30, 2020&lt;/span&gt;&lt;/span&gt;&lt;span style="white-space:pre-wrap;"&gt;, three customers accounted for 19.7%, 18.5% and 16.2% of total revenue, respectively.&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;At June 30, 2021, two customers accounted for 11.7% and 10.0% of accounts receivable, respectively. At December 31, 2020, two customers accounted for 23.8% and 11.9% of accounts receivable, respectively.&lt;/p&gt;</us-gaap:ConcentrationRiskDisclosureTextBlock>
    <acls:ConcentrationRiskNumberOfCustomers
      contextRef="Duration_4_1_2021_To_6_30_2021_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_eiDKLI-O4kSIZoQQF5U5dw"
      decimals="INF"
      id="Narr_QSs8XkWDjkOnvDTRxKrgRA"
      unitRef="Unit_Standard_customer_0YOFupMhv0yS1XDebetzdQ">2</acls:ConcentrationRiskNumberOfCustomers>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_4_1_2021_To_6_30_2021_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_ioU0Dgho30i3_iChW8hv2Q"
      decimals="3"
      id="Narr_N-F8E2-YKkiY8K70MuCKKQ"
      unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg">0.197</us-gaap:ConcentrationRiskPercentage1>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_4_1_2021_To_6_30_2021_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_LyZ34Ub6ZE2jg6FrLmqvlQ"
      decimals="3"
      id="Narr_oqWsEWPRx0ijSAWgDHfKRQ"
      unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg">0.102</us-gaap:ConcentrationRiskPercentage1>
    <acls:ConcentrationRiskNumberOfCustomers
      contextRef="Duration_4_1_2020_To_6_30_2020_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_s0j2Mdde6Ue5RgxCmzOmuQ"
      decimals="INF"
      id="Narr_-S0Ke7ztZUOFgJTcXeU9JQ"
      unitRef="Unit_Standard_customer_0YOFupMhv0yS1XDebetzdQ">3</acls:ConcentrationRiskNumberOfCustomers>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_4_1_2020_To_6_30_2020_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_ZV9jt22dP0uGeDhuhWngTQ"
      decimals="3"
      id="Narr_9VY7DR7F20SzdYVlmipP0A"
      unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg">0.225</us-gaap:ConcentrationRiskPercentage1>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_4_1_2020_To_6_30_2020_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_B0YXsPg90Uu6S-dCilKtng"
      decimals="3"
      id="Narr_eFrB7oXFQUarD13Xa9kCZA"
      unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg">0.222</us-gaap:ConcentrationRiskPercentage1>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_4_1_2020_To_6_30_2020_srt_MajorCustomersAxis_acls_ThirdLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_mKAzDHjbQESuboLfItMLNQ"
      decimals="3"
      id="Narr_gYXoSEcoVkOgHm55aUOY-g"
      unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg">0.116</us-gaap:ConcentrationRiskPercentage1>
    <acls:ConcentrationRiskNumberOfCustomers
      contextRef="Duration_1_1_2021_To_6_30_2021_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_EFekRRJHqkGFwzmsymSNnw"
      decimals="INF"
      id="Narr_677t56cFpU-e5iMVoszTsQ"
      unitRef="Unit_Standard_customer_0YOFupMhv0yS1XDebetzdQ">1</acls:ConcentrationRiskNumberOfCustomers>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2021_To_6_30_2021_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_eSq_6G4BokG9b5v5esDOdg"
      decimals="3"
      id="Narr_hfIWfMaRwUK8xvzvzadWBA"
      unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg">0.244</us-gaap:ConcentrationRiskPercentage1>
    <acls:ConcentrationRiskNumberOfCustomers
      contextRef="Duration_1_1_2020_To_6_30_2020_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_9RBgDTrzwk-3NBew4OGitQ"
      decimals="INF"
      id="Narr_Eu3u5Kzo8Eug2vgYnQUa9g"
      unitRef="Unit_Standard_customer_0YOFupMhv0yS1XDebetzdQ">3</acls:ConcentrationRiskNumberOfCustomers>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2020_To_6_30_2020_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_F3aWLUtC4kSC605maGsNbg"
      decimals="3"
      id="Narr_SggzQdTVMEOe2U5TOmXEBw"
      unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg">0.197</us-gaap:ConcentrationRiskPercentage1>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2020_To_6_30_2020_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_qwe-Gd93y0appJEy4zDK-A"
      decimals="3"
      id="Narr_359C5zcC802lvG9QUBNllw"
      unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg">0.185</us-gaap:ConcentrationRiskPercentage1>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2020_To_6_30_2020_srt_MajorCustomersAxis_acls_ThirdLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_BzG27lzRTEKsj0BTibH8JA"
      decimals="3"
      id="Narr_1W-f_ljH7kamYBzePlhU2w"
      unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg">0.162</us-gaap:ConcentrationRiskPercentage1>
    <acls:ConcentrationRiskNumberOfCustomers
      contextRef="Duration_1_1_2021_To_6_30_2021_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_wvkv2eEMZ0G0rpajOPkWzQ"
      decimals="INF"
      id="Narr_ohexLyrL50iqX2BgMYd0sQ"
      unitRef="Unit_Standard_customer_0YOFupMhv0yS1XDebetzdQ">2</acls:ConcentrationRiskNumberOfCustomers>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2021_To_6_30_2021_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_aiCji2R-9U6Rikh9GFRo_A"
      decimals="3"
      id="Narr_D5xpAVJQoUaIResua3VN9Q"
      unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg">0.117</us-gaap:ConcentrationRiskPercentage1>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2021_To_6_30_2021_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_zupJXrbQo0a-8SQG-rownQ"
      decimals="3"
      id="Narr_xGhofE92pUabYBlSpnH5NA"
      unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg">0.100</us-gaap:ConcentrationRiskPercentage1>
    <acls:ConcentrationRiskNumberOfCustomers
      contextRef="Duration_1_1_2020_To_12_31_2020_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_ycrS1Nkupk2NK-C8fQ6Qog"
      decimals="INF"
      id="Narr_AUlm8L2_HkiEZPai6yhXRA"
      unitRef="Unit_Standard_customer_0YOFupMhv0yS1XDebetzdQ">2</acls:ConcentrationRiskNumberOfCustomers>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2020_To_12_31_2020_srt_MajorCustomersAxis_acls_LargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_aFNIvfPpnkaFunvsLdiyvQ"
      decimals="3"
      id="Narr_Hb0mGAQTHUW59lGGLd7Oyg"
      unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg">0.238</us-gaap:ConcentrationRiskPercentage1>
    <us-gaap:ConcentrationRiskPercentage1
      contextRef="Duration_1_1_2020_To_12_31_2020_srt_MajorCustomersAxis_acls_SecondLargestCustomerMember_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_AccountsReceivableMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CreditConcentrationRiskMember_RiSTmhVFYkGWxNcD0K7wdA"
      decimals="3"
      id="Narr_l4-trJ1-zUWajJ0anCDhLA"
      unitRef="Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg">0.119</us-gaap:ConcentrationRiskPercentage1>
    <us-gaap:StockholdersEquityNoteDisclosureTextBlock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tb_vzvNXPWgAUW4d4n1NZPbVA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 15. Share Repurchase&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-weight:bold;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;In December 2020, our Board of Directors approved stock repurchases of up to $100 million of our common stock through the end of 2021. During the six months ended June 30, 2021, we purchased 0.6 million shares at an average cost of $39.92 per share. The timing and actual number of shares repurchased under this program will depend on various factors including price, corporate and regulatory requirements, alternative investment opportunities and other market conditions. &lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Shares repurchased by us are accounted for when the transaction is settled. Shares repurchased and retired are deducted from common stock for par value and from additional paid-in capital for the excess over par value.&#160;If additional paid-in capital has been exhausted, the excess over par value is deducted from retained earnings. Direct costs incurred to acquire the shares are included in the total cost of the shares. &lt;/p&gt;</us-gaap:StockholdersEquityNoteDisclosureTextBlock>
    <us-gaap:StockRepurchaseProgramAuthorizedAmount1
      contextRef="As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ"
      decimals="-6"
      id="Narr_5r1s0aKvlkSwKNdrX2T4WQ"
      unitRef="Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w">100000000</us-gaap:StockRepurchaseProgramAuthorizedAmount1>
    <us-gaap:TreasuryStockSharesAcquired
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="-5"
      id="Narr_JC8zOb-7fE-9GF8QeHPtGQ"
      unitRef="Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA">600000</us-gaap:TreasuryStockSharesAcquired>
    <us-gaap:TreasuryStockAcquiredAverageCostPerShare
      contextRef="Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw"
      decimals="2"
      id="Narr_QFZfjr-xD0aCcLpG0QcVCg"
      unitRef="Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ">39.92</us-gaap:TreasuryStockAcquiredAverageCostPerShare>
    <us-gaap:CommitmentsAndContingenciesDisclosureTextBlock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tb_rdDWMd7LGUO2QWL0aj5lfg">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note&#160;16.&#160;&#160;Contingencies&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(a)&#160;&#160;Litigation&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="font-size:8pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We are from time to time a party to litigation that arises in the normal course of our business operations. We are not presently a party to any litigation that we believe might have a material adverse effect on our business operations.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;(b)&#160;&#160;Indemnifications&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:10.5pt;margin:0pt;"&gt;&lt;span style="font-size:10.5pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;Our system sales agreements typically include provisions under which we agree to take certain actions, provide certain remedies and defend our customers against third-party claims of intellectual property infringement under specified conditions and indemnify customers against any damage and costs awarded in connection with such claims. We have not incurred any material costs as a result of such indemnifications and have not accrued any liabilities related to such obligations in the accompanying consolidated financial statements.&lt;/p&gt;</us-gaap:CommitmentsAndContingenciesDisclosureTextBlock>
    <us-gaap:NewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock
      contextRef="Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ"
      id="Tb_sZG07erywk6iBSkMi3pONA">&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;b style="font-weight:bold;"&gt;Note 17.&#160;&#160;Recent Accounting Guidance&lt;/b&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:10.5pt;margin:0pt;"&gt;&lt;span style="font-size:10.5pt;visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"&gt;&lt;tr&gt;&lt;td style="font-family:'Times New Roman';font-size:10pt;font-weight:bold;text-align:right;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;"&gt;i.&lt;/td&gt;&lt;td style="text-align:right;width:18pt;padding:0pt;"/&gt;&lt;td style="padding:0pt;"&gt;&lt;b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;text-align:left;"&gt;Accounting Standards Update 2019-12 Income Taxes (Topic 740) &lt;/b&gt;&lt;/td&gt;&lt;/tr&gt;&lt;/table&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"&gt;We adopted Financial Accounting Standards Board ASU No. 2019-12 &#x201c;&lt;i style="font-style:italic;"&gt;Income Taxes (Topic 740)&lt;/i&gt;&#x201d; as of January 1, 2021 on a prospective basis. The amendments in this ASU simplify the accounting for income taxes by removing certain exceptions from the previous standard as well as requiring entities to include franchise tax partially based on income as an income based tax and to account for an enacted change in tax laws or rates in the annual effective tax rate computation in the interim period that includes the enactment date. The guidance in ASU 2019-12 is required for annual reporting periods beginning after December 15, 2020. Adoption of ASU 2019-12 had no material effect on our consolidated financial statements and disclosures.&lt;/p&gt;&lt;p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"&gt;&lt;span style="visibility:hidden;"&gt;&#x200b;&lt;/span&gt;&lt;/p&gt;</us-gaap:NewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock>
</xbrl>
</XML>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>12
<FILENAME>R1.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796511441816">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Document and Entity Information - shares<br></strong></div></th>
<th class="th" colspan="1">6 Months Ended</th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Aug. 03, 2021</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_CoverAbstract', window );"><strong>Document and Entity Information</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_DocumentType', window );">Document Type</a></td>
<td class="text">10-Q<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_DocumentQuarterlyReport', window );">Document Quarterly Report</a></td>
<td class="text">true<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_DocumentTransitionReport', window );">Document Transition Report</a></td>
<td class="text">false<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_DocumentPeriodEndDate', window );">Document Period End Date</a></td>
<td class="text">Jun. 30,  2021<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityFileNumber', window );">Entity File Number</a></td>
<td class="text">000-30941<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityRegistrantName', window );">Entity Registrant Name</a></td>
<td class="text">AXCELIS TECHNOLOGIES INC<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityIncorporationStateCountryCode', window );">Entity Incorporation, State or Country Code</a></td>
<td class="text">DE<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityTaxIdentificationNumber', window );">Entity Tax Identification Number</a></td>
<td class="text">34-1818596<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityAddressAddressLine1', window );">Entity Address, Address Line One</a></td>
<td class="text">108 Cherry Hill Drive<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityAddressCityOrTown', window );">Entity Address, City or Town</a></td>
<td class="text">Beverly<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityAddressStateOrProvince', window );">Entity Address, State or Province</a></td>
<td class="text">MA<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityAddressPostalZipCode', window );">Entity Address, Postal Zip Code</a></td>
<td class="text">01915<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_CityAreaCode', window );">City Area Code</a></td>
<td class="text">978<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_LocalPhoneNumber', window );">Local Phone Number</a></td>
<td class="text">787-4000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_Security12bTitle', window );">Title of 12(b) Security</a></td>
<td class="text">Common Stock, $0.001 par value<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_TradingSymbol', window );">Trading Symbol</a></td>
<td class="text">ACLS<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_SecurityExchangeName', window );">Security Exchange Name</a></td>
<td class="text">NASDAQ<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityCurrentReportingStatus', window );">Entity Current Reporting Status</a></td>
<td class="text">Yes<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityInteractiveDataCurrent', window );">Entity Interactive Data Current</a></td>
<td class="text">Yes<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityFilerCategory', window );">Entity Filer Category</a></td>
<td class="text">Large Accelerated Filer<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntitySmallBusiness', window );">Entity Small Business</a></td>
<td class="text">false<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityEmergingGrowthCompany', window );">Entity Emerging Growth Company</a></td>
<td class="text">false<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityShellCompany', window );">Entity Shell Company</a></td>
<td class="text">false<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityCommonStockSharesOutstanding', window );">Entity Common Stock, Shares Outstanding</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">33,574,743<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_CurrentFiscalYearEndDate', window );">Current Fiscal Year End Date</a></td>
<td class="text">--12-31<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_DocumentFiscalYearFocus', window );">Document Fiscal Year Focus</a></td>
<td class="text">2021<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_DocumentFiscalPeriodFocus', window );">Document Fiscal Period Focus</a></td>
<td class="text">Q2<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_EntityCentralIndexKey', window );">Entity Central Index Key</a></td>
<td class="text">0001113232<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_dei_AmendmentFlag', window );">Amendment Flag</a></td>
<td class="text">false<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_AmendmentFlag">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the XBRL content amends previously-filed or accepted submission.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_AmendmentFlag</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_CityAreaCode">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Area code of city</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_CityAreaCode</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_CoverAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Cover page.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_CoverAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_CurrentFiscalYearEndDate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>End date of current fiscal year in the format --MM-DD.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_CurrentFiscalYearEndDate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:gMonthDayItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentFiscalPeriodFocus">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Fiscal period values are FY, Q1, Q2, and Q3.  1st, 2nd and 3rd quarter 10-Q or 10-QT statements have value Q1, Q2, and Q3 respectively, with 10-K, 10-KT or other fiscal year statements having FY.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentFiscalPeriodFocus</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:fiscalPeriodItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentFiscalYearFocus">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>This is focus fiscal year of the document report in YYYY format. For a 2006 annual report, which may also provide financial information from prior periods, fiscal 2006 should be given as the fiscal year focus. Example: 2006.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentFiscalYearFocus</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:gYearItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentPeriodEndDate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The end date of the period reflected on the cover page if a periodic report. For all other reports and registration statements containing historical data, it is the date up through which that historical data is presented.  If there is no historical data in the report, use the filing date. The format of the date is YYYY-MM-DD.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentPeriodEndDate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:dateItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentQuarterlyReport">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true only for a form used as an quarterly report.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Form 10-Q<br> -Number 240<br> -Section 308<br> -Subsection a<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentQuarterlyReport</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentTransitionReport">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true only for a form used as a transition report.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Forms 10-K, 10-Q, 20-F<br> -Number 240<br> -Section 13<br> -Subsection a-1<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentTransitionReport</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentType">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The type of document being provided (such as 10-K, 10-Q, 485BPOS, etc). The document type is limited to the same value as the supporting SEC submission type, or the word 'Other'.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentType</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:submissionTypeItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressAddressLine1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Address Line 1 such as Attn, Building Name, Street Name</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressAddressLine1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressCityOrTown">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Name of the City or Town</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressCityOrTown</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressPostalZipCode">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Code for the postal or zip code</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressPostalZipCode</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressStateOrProvince">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Name of the state or province.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressStateOrProvince</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:stateOrProvinceItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityCentralIndexKey">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>A unique 10-digit SEC-issued value to identify entities that have filed disclosures with the SEC. It is commonly abbreviated as CIK.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation 12B<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityCentralIndexKey</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:centralIndexKeyItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityCommonStockSharesOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicate number of shares or other units outstanding of each of registrant's classes of capital or common stock or other ownership interests, if and as stated on cover of related periodic report. Where multiple classes or units exist define each class/interest by adding class of stock items such as Common Class A [Member], Common Class B [Member] or Partnership Interest [Member] onto the Instrument [Domain] of the Entity Listings, Instrument.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityCommonStockSharesOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityCurrentReportingStatus">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicate 'Yes' or 'No' whether registrants (1) have filed all reports required to be filed by Section 13 or 15(d) of the Securities Exchange Act of 1934 during the preceding 12 months (or for such shorter period that registrants were required to file such reports), and (2) have been subject to such filing requirements for the past 90 days. This information should be based on the registrant's current or most recent filing containing the related disclosure.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityCurrentReportingStatus</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:yesNoItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityEmergingGrowthCompany">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicate if registrant meets the emerging growth company criteria.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation 12B<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityEmergingGrowthCompany</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityFileNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Commission file number. The field allows up to 17 characters. The prefix may contain 1-3 digits, the sequence number may contain 1-8 digits, the optional suffix may contain 1-4 characters, and the fields are separated with a hyphen.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityFileNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:fileNumberItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityFilerCategory">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicate whether the registrant is one of the following: Large Accelerated Filer, Accelerated Filer, Non-accelerated Filer. Definitions of these categories are stated in Rule 12b-2 of the Exchange Act. This information should be based on the registrant's current or most recent filing containing the related disclosure.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation 12B<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityFilerCategory</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:filerCategoryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityIncorporationStateCountryCode">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Two-character EDGAR code representing the state or country of incorporation.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityIncorporationStateCountryCode</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:edgarStateCountryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityInteractiveDataCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the registrant has submitted electronically every Interactive Data File required to be submitted pursuant to Rule 405 of Regulation S-T during the preceding 12 months (or for such shorter period that the registrant was required to submit such files).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation S-T<br> -Number 232<br> -Section 405<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityInteractiveDataCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:yesNoItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityRegistrantName">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The exact name of the entity filing the report as specified in its charter, which is required by forms filed with the SEC.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation 12B<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityRegistrantName</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityShellCompany">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the registrant is a shell company as defined in Rule 12b-2 of the Exchange Act.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation 12B<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityShellCompany</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntitySmallBusiness">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicates that the company is a Smaller Reporting Company (SRC).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation 12B<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntitySmallBusiness</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityTaxIdentificationNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The Tax Identification Number (TIN), also known as an Employer Identification Number (EIN), is a unique 9-digit value assigned by the IRS.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Regulation 12B<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityTaxIdentificationNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:employerIdItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_LocalPhoneNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Local phone number for entity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_LocalPhoneNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_Security12bTitle">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Title of a 12(b) registered security.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_Security12bTitle</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:securityTitleItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_SecurityExchangeName">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Name of the Exchange on which a security is registered.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection d1-1<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_SecurityExchangeName</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:edgarExchangeCodeItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_TradingSymbol">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Trading symbol of an instrument as listed on an exchange.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_TradingSymbol</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:tradingSymbolItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>13
<FILENAME>R2.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796508208088">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Consolidated Statements of Operations - USD ($)<br> shares in Thousands, $ in Thousands</strong></div></th>
<th class="th" colspan="2">3 Months Ended</th>
<th class="th" colspan="2">6 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Jun. 30, 2020</div></th>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Jun. 30, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenuesAbstract', window );"><strong>Revenue:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Revenues', window );">Revenue</a></td>
<td class="nump">$ 147,274<span></span>
</td>
<td class="nump">$ 122,965<span></span>
</td>
<td class="nump">$ 280,050<span></span>
</td>
<td class="nump">$ 241,956<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CostOfRevenueAbstract', window );"><strong>Cost of revenue:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CostOfGoodsAndServicesSold', window );">Cost of revenue</a></td>
<td class="nump">83,260<span></span>
</td>
<td class="nump">71,066<span></span>
</td>
<td class="nump">159,601<span></span>
</td>
<td class="nump">144,508<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GrossProfit', window );">Gross profit</a></td>
<td class="nump">64,014<span></span>
</td>
<td class="nump">51,899<span></span>
</td>
<td class="nump">120,449<span></span>
</td>
<td class="nump">97,448<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingExpensesAbstract', window );"><strong>Operating expenses:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ResearchAndDevelopmentExpense', window );">Research and development</a></td>
<td class="nump">16,623<span></span>
</td>
<td class="nump">16,040<span></span>
</td>
<td class="nump">32,308<span></span>
</td>
<td class="nump">30,646<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SellingAndMarketingExpense', window );">Sales and marketing</a></td>
<td class="nump">12,177<span></span>
</td>
<td class="nump">9,437<span></span>
</td>
<td class="nump">22,564<span></span>
</td>
<td class="nump">17,641<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_GeneralAndAdministrativeExpense', window );">General and administrative</a></td>
<td class="nump">11,217<span></span>
</td>
<td class="nump">10,041<span></span>
</td>
<td class="nump">21,230<span></span>
</td>
<td class="nump">19,077<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingExpenses', window );">Total operating expenses</a></td>
<td class="nump">40,017<span></span>
</td>
<td class="nump">35,518<span></span>
</td>
<td class="nump">76,102<span></span>
</td>
<td class="nump">67,364<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingIncomeLoss', window );">Income from operations</a></td>
<td class="nump">23,997<span></span>
</td>
<td class="nump">16,381<span></span>
</td>
<td class="nump">44,347<span></span>
</td>
<td class="nump">30,084<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NonoperatingIncomeExpenseAbstract', window );"><strong>Other (expense) income:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InvestmentIncomeInterest', window );">Interest income</a></td>
<td class="nump">40<span></span>
</td>
<td class="nump">70<span></span>
</td>
<td class="nump">73<span></span>
</td>
<td class="nump">552<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InterestExpense', window );">Interest expense</a></td>
<td class="num">(1,274)<span></span>
</td>
<td class="num">(1,299)<span></span>
</td>
<td class="num">(2,303)<span></span>
</td>
<td class="num">(2,602)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherNonoperatingIncomeExpense', window );">Other, net</a></td>
<td class="num">(15)<span></span>
</td>
<td class="nump">421<span></span>
</td>
<td class="num">(1,168)<span></span>
</td>
<td class="num">(199)<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NonoperatingIncomeExpense', window );">Total other expense</a></td>
<td class="num">(1,249)<span></span>
</td>
<td class="num">(808)<span></span>
</td>
<td class="num">(3,398)<span></span>
</td>
<td class="num">(2,249)<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest', window );">Income before income taxes</a></td>
<td class="nump">22,748<span></span>
</td>
<td class="nump">15,573<span></span>
</td>
<td class="nump">40,949<span></span>
</td>
<td class="nump">27,835<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxExpenseBenefit', window );">Income tax provision</a></td>
<td class="nump">3,842<span></span>
</td>
<td class="nump">2,271<span></span>
</td>
<td class="nump">5,563<span></span>
</td>
<td class="nump">3,312<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic', window );">Net income</a></td>
<td class="nump">$ 18,906<span></span>
</td>
<td class="nump">$ 13,302<span></span>
</td>
<td class="nump">$ 35,386<span></span>
</td>
<td class="nump">$ 24,523<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareAbstract', window );"><strong>Net income per share:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareBasic', window );">Basic</a></td>
<td class="nump">$ 0.56<span></span>
</td>
<td class="nump">$ 0.40<span></span>
</td>
<td class="nump">$ 1.05<span></span>
</td>
<td class="nump">$ 0.74<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareDiluted', window );">Diluted</a></td>
<td class="nump">$ 0.55<span></span>
</td>
<td class="nump">$ 0.39<span></span>
</td>
<td class="nump">$ 1.03<span></span>
</td>
<td class="nump">$ 0.72<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract', window );"><strong>Shares used in computing net income per share:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic', window );">Basic weighted average common shares</a></td>
<td class="nump">33,677<span></span>
</td>
<td class="nump">33,116<span></span>
</td>
<td class="nump">33,696<span></span>
</td>
<td class="nump">32,998<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding', window );">Diluted weighted average common shares</a></td>
<td class="nump">34,311<span></span>
</td>
<td class="nump">33,958<span></span>
</td>
<td class="nump">34,473<span></span>
</td>
<td class="nump">34,023<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_ProductOrServiceAxis=us-gaap_ProductMember', window );">Product</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenuesAbstract', window );"><strong>Revenue:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Revenues', window );">Revenue</a></td>
<td class="nump">$ 140,156<span></span>
</td>
<td class="nump">$ 117,194<span></span>
</td>
<td class="nump">$ 266,765<span></span>
</td>
<td class="nump">$ 229,327<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CostOfRevenueAbstract', window );"><strong>Cost of revenue:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CostOfGoodsAndServicesSold', window );">Cost of revenue</a></td>
<td class="nump">76,688<span></span>
</td>
<td class="nump">65,519<span></span>
</td>
<td class="nump">147,022<span></span>
</td>
<td class="nump">132,691<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_ProductOrServiceAxis=acls_ServicesMember', window );">Services</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenuesAbstract', window );"><strong>Revenue:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Revenues', window );">Revenue</a></td>
<td class="nump">7,118<span></span>
</td>
<td class="nump">5,771<span></span>
</td>
<td class="nump">13,285<span></span>
</td>
<td class="nump">12,629<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CostOfRevenueAbstract', window );"><strong>Cost of revenue:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CostOfGoodsAndServicesSold', window );">Cost of revenue</a></td>
<td class="nump">$ 6,572<span></span>
</td>
<td class="nump">$ 5,547<span></span>
</td>
<td class="nump">$ 12,579<span></span>
</td>
<td class="nump">$ 11,817<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CostOfGoodsAndServicesSold">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The aggregate costs related to goods produced and sold and services rendered by an entity during the reporting period. This excludes costs incurred during the reporting period related to financial services rendered and other revenue generating activities.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 924<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 11.L)<br> -URI http://asc.fasb.org/extlink&amp;oid=6472922&amp;loc=d3e499488-122856<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.2(a),(d))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395209&amp;loc=SL114868664-224227<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CostOfGoodsAndServicesSold</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CostOfRevenueAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CostOfRevenueAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of net income (loss) for the period per each share of common stock or unit outstanding during the reporting period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22583-107794<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22694-107794<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=d3e1448-109256<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22595-107794<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22694-107794<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 7<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=d3e1337-109256<br><br>Reference 7: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 55<br> -Paragraph 52<br> -URI http://asc.fasb.org/extlink&amp;oid=120380238&amp;loc=d3e4984-109258<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(23))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400993&amp;loc=SL114874131-224263<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 55<br> -Paragraph 15<br> -URI http://asc.fasb.org/extlink&amp;oid=120380238&amp;loc=d3e3842-109258<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 7<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22644-107794<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(25))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395209&amp;loc=SL114868664-224227<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=d3e1252-109256<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 60B<br> -Subparagraph (d)<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=SL5780133-109256<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(27))<br> -URI http://asc.fasb.org/extlink&amp;oid=120399700&amp;loc=SL114874048-224260<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareDiluted">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of net income (loss) for the period available to each share of common stock or common unit outstanding during the reporting period and to each share or unit that would have been outstanding assuming the issuance of common shares or units for all dilutive potential common shares or units outstanding during the reporting period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 55<br> -Paragraph 52<br> -URI http://asc.fasb.org/extlink&amp;oid=120380238&amp;loc=d3e4984-109258<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 7<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22644-107794<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 55<br> -Paragraph 15<br> -URI http://asc.fasb.org/extlink&amp;oid=120380238&amp;loc=d3e3842-109258<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=d3e1252-109256<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22694-107794<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22595-107794<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22583-107794<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 60B<br> -Subparagraph (d)<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=SL5780133-109256<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(27))<br> -URI http://asc.fasb.org/extlink&amp;oid=120399700&amp;loc=SL114874048-224260<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(23))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400993&amp;loc=SL114874131-224263<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22694-107794<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 7<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=d3e1337-109256<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(25))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395209&amp;loc=SL114868664-224227<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareDiluted</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GeneralAndAdministrativeExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The aggregate total of expenses of managing and administering the affairs of an entity, including affiliates of the reporting entity, which are not directly or indirectly associated with the manufacture, sale or creation of a product or product line.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.4)<br> -URI http://asc.fasb.org/extlink&amp;oid=120395209&amp;loc=SL114868664-224227<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GeneralAndAdministrativeExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_GrossProfit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Aggregate revenue less cost of goods and services sold or operating expenses directly attributable to the revenue generation activity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=114001798&amp;loc=d3e33918-111571<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 31<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8924-108599<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8906-108599<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8736-108599<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -URI http://asc.fasb.org/extlink&amp;oid=75031198&amp;loc=d3e14064-108612<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (f)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8933-108599<br><br>Reference 8: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.1,2)<br> -URI http://asc.fasb.org/extlink&amp;oid=120395209&amp;loc=SL114868664-224227<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8933-108599<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_GrossProfit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of income (loss) from continuing operations, including income (loss) from equity method investments, before deduction of income tax expense (benefit), and income (loss) attributable to noncontrolling interest.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8933-108599<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8906-108599<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (f)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8933-108599<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 940<br> -SubTopic 20<br> -Section 25<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=68072869&amp;loc=d3e41242-110953<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8736-108599<br><br>Reference 6: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(10))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395209&amp;loc=SL114868664-224227<br><br>Reference 7: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(8))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400993&amp;loc=SL114874131-224263<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 235<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-05(b)(2))<br> -URI http://asc.fasb.org/extlink&amp;oid=120399901&amp;loc=d3e537907-122884<br><br>Reference 9: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 31<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8924-108599<br><br>Reference 10: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(15))<br> -URI http://asc.fasb.org/extlink&amp;oid=120399700&amp;loc=SL114874048-224260<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of current income tax expense (benefit) and deferred income tax expense (benefit) pertaining to continuing operations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB TOPIC 6.I.7)<br> -URI http://asc.fasb.org/extlink&amp;oid=116825942&amp;loc=d3e330036-122817<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=84230637&amp;loc=d3e32672-109319<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (h)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8736-108599<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22663-107794<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 20<br> -Section 45<br> -Paragraph 2<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=120385591&amp;loc=d3e38679-109324<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(9))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400993&amp;loc=SL114874131-224263<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22658-107794<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxExpenseBenefit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InterestExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of the cost of borrowed funds accounted for as interest expense.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 835<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=6450988&amp;loc=d3e26243-108391<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 835<br> -SubTopic 30<br> -Section 45<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=119993939&amp;loc=d3e28555-108399<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (d)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8736-108599<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (210.5-03(11))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395209&amp;loc=SL114868664-224227<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04.9)<br> -URI http://asc.fasb.org/extlink&amp;oid=120399700&amp;loc=SL114874048-224260<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InterestExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InvestmentIncomeInterest">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount before accretion (amortization) of purchase discount (premium) of interest income on nonoperating securities.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.7(b))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395209&amp;loc=SL114868664-224227<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8736-108599<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InvestmentIncomeInterest</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount, after deduction of tax, noncontrolling interests, dividends on preferred stock and participating securities; of income (loss) available to common shareholders.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22595-107794<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=d3e1448-109256<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22694-107794<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 11<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=d3e1377-109256<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8736-108599<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22694-107794<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 60B<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=SL5780133-109256<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (f)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8933-108599<br><br>Reference 10: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 31<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8924-108599<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8906-108599<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22583-107794<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8933-108599<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NonoperatingIncomeExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The aggregate amount of income or expense from ancillary business-related activities (that is to say, excluding major activities considered part of the normal operations of the business).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.7)<br> -URI http://asc.fasb.org/extlink&amp;oid=120395209&amp;loc=SL114868664-224227<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NonoperatingIncomeExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NonoperatingIncomeExpenseAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NonoperatingIncomeExpenseAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingExpenses">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Generally recurring costs associated with normal operations except for the portion of these expenses which can be clearly related to production and included in cost of sales or services. Includes selling, general and administrative expense.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingExpenses</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingExpensesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingExpensesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingIncomeLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The net result for the period of deducting operating expenses from operating revenues.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 31<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8924-108599<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8906-108599<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8933-108599<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (f)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8933-108599<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8736-108599<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingIncomeLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherNonoperatingIncomeExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of income (expense) related to nonoperating activities, classified as other.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03.9)<br> -URI http://asc.fasb.org/extlink&amp;oid=120395209&amp;loc=SL114868664-224227<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherNonoperatingIncomeExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ResearchAndDevelopmentExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The aggregate costs incurred (1) in a planned search or critical investigation aimed at discovery of new knowledge with the hope that such knowledge will be useful in developing a new product or service, a new process or technique, or in bringing about a significant improvement to an existing product or process; or (2) to translate research findings or other knowledge into a plan or design for a new product or process or for a significant improvement to an existing product or process whether intended for sale or the entity's use, during the reporting period charged to research and development projects, including the costs of developing computer software up to the point in time of achieving technological feasibility, and costs allocated in accounting for a business combination to in-process projects deemed to have no alternative future use.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 985<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6501960&amp;loc=d3e128462-111756<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 730<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6420194&amp;loc=d3e21568-108373<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ResearchAndDevelopmentExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_Revenues">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of revenue recognized from goods sold, services rendered, insurance premiums, or other activities that constitute an earning process. Includes, but is not limited to, investment and interest income before deduction of interest expense when recognized as a component of revenue, and sales and trading gain (loss).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8736-108599<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=114001798&amp;loc=d3e33918-111571<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -URI http://asc.fasb.org/extlink&amp;oid=75031198&amp;loc=d3e14064-108612<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8933-108599<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8933-108599<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8736-108599<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 40<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e9031-108599<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8906-108599<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 41<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e9038-108599<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 42<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e9054-108599<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 235<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-05(b)(2))<br> -URI http://asc.fasb.org/extlink&amp;oid=120399901&amp;loc=d3e537907-122884<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(1))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395209&amp;loc=SL114868664-224227<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_Revenues</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenuesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenuesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SellingAndMarketingExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The aggregate total amount of expenses directly related to the marketing or selling of products or services.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SellingAndMarketingExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The average number of shares or units issued and outstanding that are used in calculating diluted EPS or earnings per unit (EPU), determined based on the timing of issuance of shares or units in the period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 16<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=d3e1505-109256<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of [basic] shares or units, after adjustment for contingently issuable shares or units and other shares or units not deemed outstanding, determined by relating the portion of time within a reporting period that common shares or units have been outstanding to the total time in that period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=d3e1448-109256<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberOfSharesOutstandingBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_ProductOrServiceAxis=us-gaap_ProductMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_ProductOrServiceAxis=us-gaap_ProductMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_ProductOrServiceAxis=acls_ServicesMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_ProductOrServiceAxis=acls_ServicesMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>14
<FILENAME>R3.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796515370312">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Consolidated Statements of Comprehensive Income - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="2">3 Months Ended</th>
<th class="th" colspan="2">6 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Jun. 30, 2020</div></th>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Jun. 30, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract', window );"><strong>Consolidated Statements of Comprehensive Income</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic', window );">Net income</a></td>
<td class="nump">$ 18,906<span></span>
</td>
<td class="nump">$ 13,302<span></span>
</td>
<td class="nump">$ 35,386<span></span>
</td>
<td class="nump">$ 24,523<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract', window );"><strong>Other comprehensive income (loss):</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent', window );">Foreign currency translation adjustments</a></td>
<td class="nump">552<span></span>
</td>
<td class="nump">836<span></span>
</td>
<td class="num">(820)<span></span>
</td>
<td class="num">(276)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent', window );">Amortization of actuarial loss and other adjustments from pension plan, net of tax</a></td>
<td class="nump">34<span></span>
</td>
<td class="nump">57<span></span>
</td>
<td class="nump">54<span></span>
</td>
<td class="nump">114<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeLossNetOfTax', window );">Other comprehensive income (loss):</a></td>
<td class="nump">586<span></span>
</td>
<td class="nump">893<span></span>
</td>
<td class="num">(766)<span></span>
</td>
<td class="num">(162)<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ComprehensiveIncomeNetOfTax', window );">Comprehensive income</a></td>
<td class="nump">$ 19,492<span></span>
</td>
<td class="nump">$ 14,195<span></span>
</td>
<td class="nump">$ 34,620<span></span>
</td>
<td class="nump">$ 24,361<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ComprehensiveIncomeNetOfTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after tax of increase (decrease) in equity from transactions and other events and circumstances from net income and other comprehensive income, attributable to parent entity. Excludes changes in equity resulting from investments by owners and distributions to owners.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(22))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400993&amp;loc=SL114874131-224263<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(24))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395209&amp;loc=SL114868664-224227<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 5<br> -URI http://asc.fasb.org/extlink&amp;oid=121641772&amp;loc=d3e557-108580<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(26))<br> -URI http://asc.fasb.org/extlink&amp;oid=120399700&amp;loc=SL114874048-224260<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1B<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=121641772&amp;loc=SL7669625-108580<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1A<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=121641772&amp;loc=SL7669619-108580<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ComprehensiveIncomeNetOfTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount, after deduction of tax, noncontrolling interests, dividends on preferred stock and participating securities; of income (loss) available to common shareholders.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22595-107794<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=d3e1448-109256<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22694-107794<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 11<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=d3e1377-109256<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8736-108599<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22694-107794<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 60B<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=SL5780133-109256<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (f)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8933-108599<br><br>Reference 10: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 31<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8924-108599<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8906-108599<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22583-107794<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8933-108599<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount, after tax and reclassification adjustment, of (increase) decrease in accumulated other comprehensive income for defined benefit plan, attributable to parent.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1A<br> -Subparagraph (c)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=109239629&amp;loc=SL4573702-111684<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 11<br> -URI http://asc.fasb.org/extlink&amp;oid=121641772&amp;loc=d3e637-108580<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 19<br> -URI http://asc.fasb.org/extlink&amp;oid=108774443&amp;loc=SL4569616-111683<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 10A<br> -Subparagraph (i-k)<br> -URI http://asc.fasb.org/extlink&amp;oid=121641772&amp;loc=SL7669646-108580<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after tax and reclassification adjustments of gain (loss) on foreign currency translation adjustments, foreign currency transactions designated and effective as economic hedges of a net investment in a foreign entity and intra-entity foreign currency transactions that are of a long-term-investment nature, attributable to parent entity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 20<br> -URI http://asc.fasb.org/extlink&amp;oid=108774443&amp;loc=SL4569643-111683<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1A<br> -Subparagraph (c)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=109239629&amp;loc=SL4573702-111684<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 19<br> -URI http://asc.fasb.org/extlink&amp;oid=108774443&amp;loc=SL4569616-111683<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherComprehensiveIncomeLossNetOfTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after tax and reclassification adjustments of other comprehensive income (loss).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1A<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=121641772&amp;loc=SL7669619-108580<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=109259400&amp;loc=d3e21463-112644<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 830<br> -SubTopic 30<br> -Section 45<br> -Paragraph 17<br> -URI http://asc.fasb.org/extlink&amp;oid=118261656&amp;loc=d3e32136-110900<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(21))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395209&amp;loc=SL114868664-224227<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 55<br> -Paragraph 15<br> -URI http://asc.fasb.org/extlink&amp;oid=121640130&amp;loc=d3e1436-108581<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 830<br> -SubTopic 30<br> -Section 45<br> -Paragraph 20<br> -URI http://asc.fasb.org/extlink&amp;oid=118261656&amp;loc=d3e32211-110900<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 830<br> -SubTopic 30<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6450520&amp;loc=d3e32583-110901<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1B<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=121641772&amp;loc=SL7669625-108580<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(23))<br> -URI http://asc.fasb.org/extlink&amp;oid=120399700&amp;loc=SL114874048-224260<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(19))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400993&amp;loc=SL114874131-224263<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherComprehensiveIncomeLossNetOfTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>15
<FILENAME>R4.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796512094584">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Consolidated Balance Sheets - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AssetsCurrentAbstract', window );"><strong>Current assets:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsAtCarryingValue', window );">Cash and cash equivalents</a></td>
<td class="nump">$ 219,731<span></span>
</td>
<td class="nump">$ 203,479<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccountsReceivableNetCurrent', window );">Accounts receivable, net</a></td>
<td class="nump">79,544<span></span>
</td>
<td class="nump">86,865<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryNet', window );">Inventories, net</a></td>
<td class="nump">192,321<span></span>
</td>
<td class="nump">161,076<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PrepaidExpenseAndOtherAssetsCurrent', window );">Prepaid expenses and other current assets</a></td>
<td class="nump">22,535<span></span>
</td>
<td class="nump">19,371<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AssetsCurrent', window );">Total current assets</a></td>
<td class="nump">514,131<span></span>
</td>
<td class="nump">470,791<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentNet', window );">Property, plant and equipment, net</a></td>
<td class="nump">30,683<span></span>
</td>
<td class="nump">29,840<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeaseRightOfUseAsset', window );">Operating lease assets</a></td>
<td class="nump">7,626<span></span>
</td>
<td class="nump">4,542<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FinanceLeaseRightOfUseAsset', window );">Finance lease assets, net</a></td>
<td class="nump">19,889<span></span>
</td>
<td class="nump">20,544<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RestrictedCashAndCashEquivalentsNoncurrent', window );">Long-term restricted cash</a></td>
<td class="nump">755<span></span>
</td>
<td class="nump">753<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredIncomeTaxAssetsNet', window );">Deferred income taxes</a></td>
<td class="nump">51,386<span></span>
</td>
<td class="nump">57,851<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherAssetsNoncurrent', window );">Other assets</a></td>
<td class="nump">36,170<span></span>
</td>
<td class="nump">40,303<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Assets', window );">Total assets</a></td>
<td class="nump">660,640<span></span>
</td>
<td class="nump">624,624<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LiabilitiesCurrentAbstract', window );"><strong>Current liabilities:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccountsPayableCurrent', window );">Accounts payable</a></td>
<td class="nump">40,695<span></span>
</td>
<td class="nump">24,013<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EmployeeRelatedLiabilitiesCurrent', window );">Accrued compensation</a></td>
<td class="nump">14,906<span></span>
</td>
<td class="nump">24,562<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrualClassifiedCurrent', window );">Warranty</a></td>
<td class="nump">4,690<span></span>
</td>
<td class="nump">4,280<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccruedIncomeTaxesCurrent', window );">Income taxes</a></td>
<td class="nump">622<span></span>
</td>
<td class="nump">654<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ContractWithCustomerLiabilityCurrent', window );">Deferred revenue</a></td>
<td class="nump">34,112<span></span>
</td>
<td class="nump">21,221<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilityCurrent', window );">Current portion of finance lease obligation</a></td>
<td class="nump">864<span></span>
</td>
<td class="nump">756<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherLiabilitiesCurrent', window );">Other current liabilities</a></td>
<td class="nump">10,585<span></span>
</td>
<td class="nump">8,945<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LiabilitiesCurrent', window );">Total current liabilities</a></td>
<td class="nump">106,474<span></span>
</td>
<td class="nump">84,431<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilityNoncurrent', window );">Long-term finance lease obligation</a></td>
<td class="nump">46,923<span></span>
</td>
<td class="nump">47,393<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ContractWithCustomerLiabilityNoncurrent', window );">Long-term deferred revenue</a></td>
<td class="nump">1,406<span></span>
</td>
<td class="nump">1,837<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherLiabilitiesNoncurrent', window );">Other long-term liabilities</a></td>
<td class="nump">11,735<span></span>
</td>
<td class="nump">9,361<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_Liabilities', window );">Total liabilities</a></td>
<td class="nump">166,538<span></span>
</td>
<td class="nump">143,022<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommitmentsAndContingencies', window );">Commitments and contingencies (Note 16)</a></td>
<td class="text"> <span></span>
</td>
<td class="text"> <span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquityAbstract', window );"><strong>Stockholders? equity:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommonStockValueOutstanding', window );">Common stock, $0.001 par value, 75,000 shares authorized; 33,679 shares issued and outstanding at June 30, 2021; 33,633 shares issued and outstanding at December 31, 2020</a></td>
<td class="nump">34<span></span>
</td>
<td class="nump">34<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AdditionalPaidInCapital', window );">Additional paid-in capital</a></td>
<td class="nump">561,680<span></span>
</td>
<td class="nump">570,102<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RetainedEarningsAccumulatedDeficit', window );">Accumulated deficit</a></td>
<td class="num">(70,281)<span></span>
</td>
<td class="num">(91,969)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax', window );">Accumulated other comprehensive income</a></td>
<td class="nump">2,669<span></span>
</td>
<td class="nump">3,435<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Total stockholders? equity</a></td>
<td class="nump">494,102<span></span>
</td>
<td class="nump">481,602<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LiabilitiesAndStockholdersEquity', window );">Total liabilities and stockholders? equity</a></td>
<td class="nump">$ 660,640<span></span>
</td>
<td class="nump">$ 624,624<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountsPayableCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of liabilities incurred (and for which invoices have typically been received) and payable to vendors for goods and services received that are used in an entity's business. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.19(a))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccountsPayableCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountsReceivableNetCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount, after allowance for credit loss, of right to consideration from customer for product sold and service rendered in normal course of business, classified as current.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 310<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=121593590&amp;loc=d3e4428-111522<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(3))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 3: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=121566466&amp;loc=d3e6676-107765<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 310<br> -SubTopic 10<br> -Section 45<br> -Paragraph 9<br> -URI http://asc.fasb.org/extlink&amp;oid=121593590&amp;loc=d3e4531-111522<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccountsReceivableNetCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccruedIncomeTaxesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying amount as of the balance sheet date of the unpaid sum of the known and estimated amounts payable to satisfy all currently due domestic and foreign income tax obligations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(15)(b)(1))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400017&amp;loc=d3e572229-122910<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(15)(1))<br> -URI http://asc.fasb.org/extlink&amp;oid=120398452&amp;loc=d3e534808-122878<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(20))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccruedIncomeTaxesCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Accumulated change in equity from transactions and other events and circumstances from non-owner sources, net of tax effect, at period end. Excludes Net Income (Loss), and accumulated changes in equity from transactions resulting from investments by owners and distributions to owners. Includes foreign currency translation items, certain pension adjustments, unrealized gains and losses on certain investments in debt and equity securities, other than temporary impairment (OTTI) losses related to factors other than credit losses on available-for-sale and held-to-maturity debt securities that an entity does not intend to sell and it is not more likely than not that the entity will be required to sell before recovery of the amortized cost basis, as well as changes in the fair value of derivatives related to the effective portion of a designated cash flow hedge.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(30)(a)(4))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 11<br> -URI http://asc.fasb.org/extlink&amp;oid=121641772&amp;loc=d3e637-108580<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(23)(a)(3))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400017&amp;loc=d3e572229-122910<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14A<br> -URI http://asc.fasb.org/extlink&amp;oid=121641772&amp;loc=SL7669686-108580<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 40<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (h)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=121370832&amp;loc=SL117420844-207641<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 40<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (g)(2)(ii)<br> -URI http://asc.fasb.org/extlink&amp;oid=121370832&amp;loc=SL117420844-207641<br><br>Reference 7: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14<br> -URI http://asc.fasb.org/extlink&amp;oid=121641772&amp;loc=d3e681-108580<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AdditionalPaidInCapital">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Excess of issue price over par or stated value of the entity's capital stock and amounts received from other transactions involving the entity's stock or stockholders. Includes adjustments to additional paid in capital. Some examples of such adjustments include recording the issuance of debt with a beneficial conversion feature and certain tax consequences of equity instruments awarded to employees. Use this element for the aggregate amount of additional paid-in capital associated with common and preferred stock. For additional paid-in capital associated with only common stock, use the element additional paid in capital, common stock. For additional paid-in capital associated with only preferred stock, use the element additional paid in capital, preferred stock.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 65<br> -Paragraph 15<br> -Subparagraph (g)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=121322162&amp;loc=SL121327923-165333<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(30)(a)(1))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AdditionalPaidInCapital</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_Assets">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Sum of the carrying amounts as of the balance sheet date of all assets that are recognized. Assets are probable future economic benefits obtained or controlled by an entity as a result of past transactions or events.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(11))<br> -URI http://asc.fasb.org/extlink&amp;oid=120398452&amp;loc=d3e534808-122878<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -URI http://asc.fasb.org/extlink&amp;oid=75031198&amp;loc=d3e14064-108612<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (bb)<br> -URI http://asc.fasb.org/extlink&amp;oid=121559654&amp;loc=d3e5710-111685<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 25<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=116870748&amp;loc=SL6758485-165988<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (d)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8933-108599<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8736-108599<br><br>Reference 8: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(12))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400017&amp;loc=d3e572229-122910<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=114001798&amp;loc=d3e33918-111571<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8906-108599<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_Assets</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AssetsCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Sum of the carrying amounts as of the balance sheet date of all assets that are expected to be realized in cash, sold, or consumed within one year (or the normal operating cycle, if longer). Assets are probable future economic benefits obtained or controlled by an entity as a result of past transactions or events.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=121566466&amp;loc=d3e6801-107765<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -URI http://asc.fasb.org/extlink&amp;oid=75031198&amp;loc=d3e14064-108612<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 25<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=116870748&amp;loc=SL6758485-165988<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=114001798&amp;loc=d3e33918-111571<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (bb)<br> -URI http://asc.fasb.org/extlink&amp;oid=121559654&amp;loc=d3e5710-111685<br><br>Reference 6: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.9)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 8: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=121566466&amp;loc=d3e6676-107765<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AssetsCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AssetsCurrentAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AssetsCurrentAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashAndCashEquivalentsAtCarryingValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates. Excludes cash and cash equivalents within disposal group and discontinued operation.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=121586364&amp;loc=d3e3044-108585<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121566466&amp;loc=d3e6676-107765<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.1)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashAndCashEquivalentsAtCarryingValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommitmentsAndContingencies">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Represents the caption on the face of the balance sheet to indicate that the entity has entered into (1) purchase or supply arrangements that will require expending a portion of its resources to meet the terms thereof, and (2) is exposed to potential losses or, less frequently, gains, arising from (a) possible claims against a company's resources due to future performance under contract terms, and (b) possible losses or likely gains from uncertainties that will ultimately be resolved when one or more future events that are deemed likely to occur do occur or fail to occur.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.25)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03.(a),19)<br> -URI http://asc.fasb.org/extlink&amp;oid=120400017&amp;loc=d3e572229-122910<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03.17)<br> -URI http://asc.fasb.org/extlink&amp;oid=120398452&amp;loc=d3e534808-122878<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 450<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=121557415&amp;loc=d3e14326-108349<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommitmentsAndContingencies</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockValueOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Value of all classes of common stock held by shareholders. May be all or portion of the number of common shares authorized. These shares exclude common shares repurchased by the entity and held as treasury shares.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockValueOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ContractWithCustomerLiabilityCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable, classified as current.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=121556615&amp;loc=SL49130531-203044<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=121556615&amp;loc=SL49130532-203044<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121604090&amp;loc=SL49130549-203045<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ContractWithCustomerLiabilityCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ContractWithCustomerLiabilityNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable, classified as noncurrent.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=121556615&amp;loc=SL49130532-203044<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=121556615&amp;loc=SL49130531-203044<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121604090&amp;loc=SL49130549-203045<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ContractWithCustomerLiabilityNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredIncomeTaxAssetsNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount, after allocation of valuation allowances and deferred tax liability, of deferred tax asset attributable to deductible differences and carryforwards, with jurisdictional netting.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 45<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=120406818&amp;loc=d3e31931-109318<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=120406818&amp;loc=d3e31917-109318<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredIncomeTaxAssetsNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EmployeeRelatedLiabilitiesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Total of the carrying values as of the balance sheet date of obligations incurred through that date and payable for obligations related to services received from employees, such as accrued salaries and bonuses, payroll taxes and fringe benefits. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.20)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EmployeeRelatedLiabilitiesCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseLiabilityCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from finance lease, classified as current.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=121603541&amp;loc=SL77918627-209977<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseLiabilityCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseLiabilityNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from finance lease, classified as noncurrent.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=121603541&amp;loc=SL77918627-209977<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseLiabilityNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseRightOfUseAsset">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount, after accumulated amortization, of right-of-use asset from finance lease.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121603541&amp;loc=SL77918627-209977<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseRightOfUseAsset</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after valuation and LIFO reserves of inventory expected to be sold, or consumed within one year or operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=121566466&amp;loc=d3e6676-107765<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.6(a))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_Liabilities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Sum of the carrying amounts as of the balance sheet date of all liabilities that are recognized. Liabilities are probable future sacrifices of economic benefits arising from present obligations of an entity to transfer assets or provide services to other entities in the future.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 25<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=116870748&amp;loc=SL6758485-165988<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -URI http://asc.fasb.org/extlink&amp;oid=75031198&amp;loc=d3e14064-108612<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (bb)<br> -URI http://asc.fasb.org/extlink&amp;oid=121559654&amp;loc=d3e5710-111685<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.19-26)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=121559654&amp;loc=d3e5710-111685<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=114001798&amp;loc=d3e33918-111571<br><br>Reference 7: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (d)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8906-108599<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_Liabilities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LiabilitiesAndStockholdersEquity">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of liabilities and equity items, including the portion of equity attributable to noncontrolling interests, if any.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=114001798&amp;loc=d3e33918-111571<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(23))<br> -URI http://asc.fasb.org/extlink&amp;oid=120398452&amp;loc=d3e534808-122878<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(25))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400017&amp;loc=d3e572229-122910<br><br>Reference 4: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(32))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 6: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -URI http://asc.fasb.org/extlink&amp;oid=75031198&amp;loc=d3e14064-108612<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LiabilitiesAndStockholdersEquity</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LiabilitiesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Total obligations incurred as part of normal operations that are expected to be paid during the following twelve months or within one business cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (bb)<br> -URI http://asc.fasb.org/extlink&amp;oid=121559654&amp;loc=d3e5710-111685<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -URI http://asc.fasb.org/extlink&amp;oid=75031198&amp;loc=d3e14064-108612<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 25<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=116870748&amp;loc=SL6758485-165988<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.21)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=121559654&amp;loc=d3e5710-111685<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=114001798&amp;loc=d3e33918-111571<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LiabilitiesCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LiabilitiesCurrentAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LiabilitiesCurrentAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseRightOfUseAsset">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's right to use underlying asset under operating lease.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121603541&amp;loc=SL77918627-209977<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseRightOfUseAsset</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherAssetsNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of noncurrent assets classified as other.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.17)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherAssetsNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherLiabilitiesCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of liabilities classified as other, due within one year or the normal operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 5<br> -URI http://asc.fasb.org/extlink&amp;oid=121566466&amp;loc=d3e6904-107765<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=121566466&amp;loc=d3e6911-107765<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.20)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherLiabilitiesCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherLiabilitiesNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of liabilities classified as other, due after one year or the normal operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.24)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherLiabilitiesNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PrepaidExpenseAndOtherAssetsCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of asset related to consideration paid in advance for costs that provide economic benefits in future periods, and amount of other assets that are expected to be realized or consumed within one year or the normal operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(7))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=121566466&amp;loc=d3e6676-107765<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(8))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PrepaidExpenseAndOtherAssetsCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrualClassifiedCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of obligations incurred through that date and payable for estimated claims under standard and extended warranty protection rights granted to customers. For classified balance sheets, represents the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 7<br> -URI http://asc.fasb.org/extlink&amp;oid=68068213&amp;loc=d3e12524-110249<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.20)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 25<br> -Paragraph 5<br> -URI http://asc.fasb.org/extlink&amp;oid=68070138&amp;loc=d3e11281-110244<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantyAccrualClassifiedCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after accumulated depreciation, depletion and amortization of physical assets used in the normal conduct of business to produce goods and services and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, and furniture and fixtures.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(14))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 360<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6391035&amp;loc=d3e2868-110229<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(8))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400017&amp;loc=d3e572229-122910<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(13))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RestrictedCashAndCashEquivalentsNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cash and cash equivalents restricted as to withdrawal or usage, classified as noncurrent. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121566466&amp;loc=d3e6812-107765<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(17))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=121583591&amp;loc=SL98516268-108586<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=121586364&amp;loc=d3e3044-108585<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 954<br> -SubTopic 210<br> -Section 45<br> -Paragraph 5<br> -URI http://asc.fasb.org/extlink&amp;oid=120413173&amp;loc=SL116631458-115580<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RestrictedCashAndCashEquivalentsNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RetainedEarningsAccumulatedDeficit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cumulative amount of the reporting entity's undistributed earnings or deficit.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(30)(a)(3))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 65<br> -Paragraph 15<br> -Subparagraph (g)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=121322162&amp;loc=SL121327923-165333<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(23)(a)(4))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400017&amp;loc=d3e572229-122910<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 40<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (h)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=121370832&amp;loc=SL117420844-207641<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -URI http://asc.fasb.org/extlink&amp;oid=120397183&amp;loc=d3e187085-122770<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 40<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (g)(2)(i)<br> -URI http://asc.fasb.org/extlink&amp;oid=121370832&amp;loc=SL117420844-207641<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RetainedEarningsAccumulatedDeficit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquity">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Total of all stockholders' equity (deficit) items, net of receivables from officers, directors, owners, and affiliates of the entity which are attributable to the parent. The amount of the economic entity's stockholders' equity attributable to the parent excludes the amount of stockholders' equity which is allocable to that ownership interest in subsidiary equity which is not attributable to the parent (noncontrolling interest, minority interest). This excludes temporary equity and is sometimes called permanent equity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 310<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB Topic 4.E)<br> -URI http://asc.fasb.org/extlink&amp;oid=27010918&amp;loc=d3e74512-122707<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(31))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(30))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 6: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -URI http://asc.fasb.org/extlink&amp;oid=75031198&amp;loc=d3e14064-108612<br><br>Reference 7: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=114001798&amp;loc=d3e33918-111571<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquity</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquityAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquityAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>16
<FILENAME>R5.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796506004936">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Consolidated Balance Sheets (Parenthetical) - $ / shares<br> shares in Thousands</strong></div></th>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementOfFinancialPositionAbstract', window );"><strong>Consolidated Balance Sheets</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommonStockParOrStatedValuePerShare', window );">Common stock, par value (in dollars per share)</a></td>
<td class="nump">$ 0.001<span></span>
</td>
<td class="nump">$ 0.001<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommonStockSharesAuthorized', window );">Common stock, shares authorized</a></td>
<td class="nump">75,000<span></span>
</td>
<td class="nump">75,000<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommonStockSharesIssued', window );">Common stock, shares issued</a></td>
<td class="nump">33,657<span></span>
</td>
<td class="nump">33,633<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommonStockSharesOutstanding', window );">Common stock, shares outstanding</a></td>
<td class="nump">33,657<span></span>
</td>
<td class="nump">33,633<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockParOrStatedValuePerShare">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Face amount or stated value per share of common stock.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockParOrStatedValuePerShare</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockSharesAuthorized">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The maximum number of common shares permitted to be issued by an entity's charter and bylaws.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockSharesAuthorized</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockSharesIssued">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Total number of common shares of an entity that have been sold or granted to shareholders (includes common shares that were issued, repurchased and remain in the treasury). These shares represent capital invested by the firm's shareholders and owners, and may be all or only a portion of the number of shares authorized. Shares issued include shares outstanding and shares held in the treasury.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockSharesIssued</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommonStockSharesOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of shares of common stock outstanding. Common stock represent the ownership interest in a corporation.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=109259400&amp;loc=d3e21463-112644<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommonStockSharesOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementOfFinancialPositionAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementOfFinancialPositionAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>17
<FILENAME>R6.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796511035224">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Consolidated Statements of Stockholders' Equity - USD ($)<br> shares in Thousands, $ in Thousands</strong></div></th>
<th class="th"><div>Common Stock</div></th>
<th class="th"><div>Additional Paid-in Capital</div></th>
<th class="th"><div>Accumulated Deficit</div></th>
<th class="th"><div>Accumulated Other Comprehensive Income (Loss)</div></th>
<th class="th"><div>Total</div></th>
</tr>
<tr class="rc">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharesOutstanding', window );">Balance (in shares) at Dec. 31, 2019</a></td>
<td class="nump">32,585<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at Dec. 31, 2019</a></td>
<td class="nump">$ 33<span></span>
</td>
<td class="nump">$ 559,878<span></span>
</td>
<td class="num">$ (140,226)<span></span>
</td>
<td class="num">$ (258)<span></span>
</td>
<td class="nump">$ 419,427<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInStockholdersEquityRollForward', window );"><strong>Increase (Decrease) in Stockholders' Equity</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic', window );">Net income</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">11,221<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">11,221<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent', window );">Foreign currency translation adjustments</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(1,112)<span></span>
</td>
<td class="num">(1,112)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent', window );">Change in pension obligation, net of tax</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">57<span></span>
</td>
<td class="nump">57<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised', window );">Exercise of stock options (in shares)</a></td>
<td class="nump">540<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised', window );">Exercise of stock options</a></td>
<td class="nump">$ 1<span></span>
</td>
<td class="nump">4,498<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">4,499<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans', window );">Issuance of shares under Employee Stock Purchase Plan (in shares)</a></td>
<td class="nump">1<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan', window );">Issuance of shares under Employee Stock Purchase Plan</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">19<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">19<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures', window );">Issuance of restricted common shares (in shares)</a></td>
<td class="nump">69<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures', window );">Issuance of restricted common shares</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(1,162)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(1,162)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue', window );">Stock-based compensation expense</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1,724<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1,724<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockRepurchasedDuringPeriodShares', window );">Repurchase of common stock (in shares)</a></td>
<td class="num">(358)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockRepurchasedDuringPeriodValue', window );">Repurchase of common stock</a></td>
<td class="num">$ (1)<span></span>
</td>
<td class="num">(5,775)<span></span>
</td>
<td class="num">(1,725)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(7,501)<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharesOutstanding', window );">Balance (in shares) at Mar. 31, 2020</a></td>
<td class="nump">32,837<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at Mar. 31, 2020</a></td>
<td class="nump">$ 33<span></span>
</td>
<td class="nump">559,182<span></span>
</td>
<td class="num">(130,730)<span></span>
</td>
<td class="num">(1,313)<span></span>
</td>
<td class="nump">427,172<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharesOutstanding', window );">Balance (in shares) at Dec. 31, 2019</a></td>
<td class="nump">32,585<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at Dec. 31, 2019</a></td>
<td class="nump">$ 33<span></span>
</td>
<td class="nump">559,878<span></span>
</td>
<td class="num">(140,226)<span></span>
</td>
<td class="num">(258)<span></span>
</td>
<td class="nump">419,427<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInStockholdersEquityRollForward', window );"><strong>Increase (Decrease) in Stockholders' Equity</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic', window );">Net income</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">24,523<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent', window );">Foreign currency translation adjustments</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(276)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent', window );">Change in pension obligation, net of tax</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">114<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharesOutstanding', window );">Balance (in shares) at Jun. 30, 2020</a></td>
<td class="nump">33,433<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at Jun. 30, 2020</a></td>
<td class="nump">$ 33<span></span>
</td>
<td class="nump">562,839<span></span>
</td>
<td class="num">(117,428)<span></span>
</td>
<td class="num">(420)<span></span>
</td>
<td class="nump">445,024<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharesOutstanding', window );">Balance (in shares) at Mar. 31, 2020</a></td>
<td class="nump">32,837<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at Mar. 31, 2020</a></td>
<td class="nump">$ 33<span></span>
</td>
<td class="nump">559,182<span></span>
</td>
<td class="num">(130,730)<span></span>
</td>
<td class="num">(1,313)<span></span>
</td>
<td class="nump">427,172<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInStockholdersEquityRollForward', window );"><strong>Increase (Decrease) in Stockholders' Equity</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic', window );">Net income</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">13,302<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">13,302<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent', window );">Foreign currency translation adjustments</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">836<span></span>
</td>
<td class="nump">836<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent', window );">Change in pension obligation, net of tax</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">57<span></span>
</td>
<td class="nump">57<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised', window );">Exercise of stock options (in shares)</a></td>
<td class="nump">343<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised', window );">Exercise of stock options</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">2,783<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">2,783<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans', window );">Issuance of shares under Employee Stock Purchase Plan (in shares)</a></td>
<td class="nump">21<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan', window );">Issuance of shares under Employee Stock Purchase Plan</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">490<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">490<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures', window );">Issuance of restricted common shares (in shares)</a></td>
<td class="nump">232<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures', window );">Issuance of restricted common shares</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(2,698)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(2,698)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue', window );">Stock-based compensation expense</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">3,082<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">3,082<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharesOutstanding', window );">Balance (in shares) at Jun. 30, 2020</a></td>
<td class="nump">33,433<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at Jun. 30, 2020</a></td>
<td class="nump">$ 33<span></span>
</td>
<td class="nump">562,839<span></span>
</td>
<td class="num">(117,428)<span></span>
</td>
<td class="num">(420)<span></span>
</td>
<td class="nump">445,024<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharesOutstanding', window );">Balance (in shares) at Dec. 31, 2020</a></td>
<td class="nump">33,633<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at Dec. 31, 2020</a></td>
<td class="nump">$ 34<span></span>
</td>
<td class="nump">570,102<span></span>
</td>
<td class="num">(91,969)<span></span>
</td>
<td class="nump">3,435<span></span>
</td>
<td class="nump">481,602<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInStockholdersEquityRollForward', window );"><strong>Increase (Decrease) in Stockholders' Equity</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic', window );">Net income</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">16,480<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">16,480<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent', window );">Foreign currency translation adjustments</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(1,372)<span></span>
</td>
<td class="num">(1,372)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent', window );">Change in pension obligation, net of tax</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">20<span></span>
</td>
<td class="nump">20<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised', window );">Exercise of stock options (in shares)</a></td>
<td class="nump">268<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised', window );">Exercise of stock options</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">2,512<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">2,512<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures', window );">Issuance of restricted common shares (in shares)</a></td>
<td class="nump">81<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures', window );">Issuance of restricted common shares</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(2,354)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(2,354)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue', window );">Stock-based compensation expense</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">2,407<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">2,407<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockRepurchasedDuringPeriodShares', window );">Repurchase of common stock (in shares)</a></td>
<td class="num">(303)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockRepurchasedDuringPeriodValue', window );">Repurchase of common stock</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(5,468)<span></span>
</td>
<td class="num">(6,167)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(11,635)<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharesOutstanding', window );">Balance (in shares) at Mar. 31, 2021</a></td>
<td class="nump">33,679<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at Mar. 31, 2021</a></td>
<td class="nump">$ 34<span></span>
</td>
<td class="nump">567,199<span></span>
</td>
<td class="num">(81,656)<span></span>
</td>
<td class="nump">2,083<span></span>
</td>
<td class="nump">487,660<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharesOutstanding', window );">Balance (in shares) at Dec. 31, 2020</a></td>
<td class="nump">33,633<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at Dec. 31, 2020</a></td>
<td class="nump">$ 34<span></span>
</td>
<td class="nump">570,102<span></span>
</td>
<td class="num">(91,969)<span></span>
</td>
<td class="nump">3,435<span></span>
</td>
<td class="nump">481,602<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInStockholdersEquityRollForward', window );"><strong>Increase (Decrease) in Stockholders' Equity</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic', window );">Net income</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">35,386<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent', window );">Foreign currency translation adjustments</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(820)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent', window );">Change in pension obligation, net of tax</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">54<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharesOutstanding', window );">Balance (in shares) at Jun. 30, 2021</a></td>
<td class="nump">33,657<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at Jun. 30, 2021</a></td>
<td class="nump">$ 34<span></span>
</td>
<td class="nump">561,680<span></span>
</td>
<td class="num">(70,281)<span></span>
</td>
<td class="nump">2,669<span></span>
</td>
<td class="nump">494,102<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharesOutstanding', window );">Balance (in shares) at Mar. 31, 2021</a></td>
<td class="nump">33,679<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at Mar. 31, 2021</a></td>
<td class="nump">$ 34<span></span>
</td>
<td class="nump">567,199<span></span>
</td>
<td class="num">(81,656)<span></span>
</td>
<td class="nump">2,083<span></span>
</td>
<td class="nump">487,660<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInStockholdersEquityRollForward', window );"><strong>Increase (Decrease) in Stockholders' Equity</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic', window );">Net income</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">18,906<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">18,906<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent', window );">Foreign currency translation adjustments</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">552<span></span>
</td>
<td class="nump">552<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent', window );">Change in pension obligation, net of tax</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">34<span></span>
</td>
<td class="nump">34<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised', window );">Exercise of stock options (in shares)</a></td>
<td class="nump">72<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised', window );">Exercise of stock options</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">563<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">563<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans', window );">Issuance of shares under Employee Stock Purchase Plan (in shares)</a></td>
<td class="nump">15<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan', window );">Issuance of shares under Employee Stock Purchase Plan</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">509<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">509<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures', window );">Issuance of restricted common shares (in shares)</a></td>
<td class="nump">214<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures', window );">Issuance of restricted common shares</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(4,141)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(4,141)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue', window );">Stock-based compensation expense</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">3,377<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">3,377<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockRepurchasedDuringPeriodShares', window );">Repurchase of common stock (in shares)</a></td>
<td class="num">(323)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockRepurchasedDuringPeriodValue', window );">Repurchase of common stock</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(5,827)<span></span>
</td>
<td class="num">(7,531)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(13,358)<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharesOutstanding', window );">Balance (in shares) at Jun. 30, 2021</a></td>
<td class="nump">33,657<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rc">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquity', window );">Balance at Jun. 30, 2021</a></td>
<td class="nump">$ 34<span></span>
</td>
<td class="nump">$ 561,680<span></span>
</td>
<td class="num">$ (70,281)<span></span>
</td>
<td class="nump">$ 2,669<span></span>
</td>
<td class="nump">$ 494,102<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase to additional paid-in capital (APIC) for recognition of cost for award under share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 20<br> -Section 55<br> -Paragraph 12<br> -URI http://asc.fasb.org/extlink&amp;oid=120383193&amp;loc=d3e11149-113907<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5047-113901<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 20<br> -Section 55<br> -Paragraph 13<br> -URI http://asc.fasb.org/extlink&amp;oid=120383193&amp;loc=d3e11178-113907<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 35<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=121326096&amp;loc=d3e4534-113899<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInStockholdersEquityRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInStockholdersEquityRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount, after deduction of tax, noncontrolling interests, dividends on preferred stock and participating securities; of income (loss) available to common shareholders.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22595-107794<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=d3e1448-109256<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22694-107794<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 11<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=d3e1377-109256<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8736-108599<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22694-107794<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 60B<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=SL5780133-109256<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (f)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8933-108599<br><br>Reference 10: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 31<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8924-108599<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8906-108599<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22583-107794<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8933-108599<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount, after tax and reclassification adjustment, of (increase) decrease in accumulated other comprehensive income for defined benefit plan, attributable to parent.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1A<br> -Subparagraph (c)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=109239629&amp;loc=SL4573702-111684<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 11<br> -URI http://asc.fasb.org/extlink&amp;oid=121641772&amp;loc=d3e637-108580<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 19<br> -URI http://asc.fasb.org/extlink&amp;oid=108774443&amp;loc=SL4569616-111683<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 10A<br> -Subparagraph (i-k)<br> -URI http://asc.fasb.org/extlink&amp;oid=121641772&amp;loc=SL7669646-108580<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after tax and reclassification adjustments of gain (loss) on foreign currency translation adjustments, foreign currency transactions designated and effective as economic hedges of a net investment in a foreign entity and intra-entity foreign currency transactions that are of a long-term-investment nature, attributable to parent entity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 20<br> -URI http://asc.fasb.org/extlink&amp;oid=108774443&amp;loc=SL4569643-111683<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1A<br> -Subparagraph (c)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=109239629&amp;loc=SL4573702-111684<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 19<br> -URI http://asc.fasb.org/extlink&amp;oid=108774443&amp;loc=SL4569616-111683<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharesOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of shares issued which are neither cancelled nor held in the treasury.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharesOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of shares issued during the period as a result of an employee stock purchase plan.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=109259400&amp;loc=d3e21463-112644<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -URI http://asc.fasb.org/extlink&amp;oid=120397183&amp;loc=d3e187085-122770<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of shares issued during the period related to Restricted Stock Awards, net of any shares forfeited.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=109259400&amp;loc=d3e21463-112644<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -URI http://asc.fasb.org/extlink&amp;oid=120397183&amp;loc=d3e187085-122770<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of share options (or share units) exercised during the current period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(iv)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -URI http://asc.fasb.org/extlink&amp;oid=120397183&amp;loc=d3e187085-122770<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=109259400&amp;loc=d3e21463-112644<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Aggregate change in value for stock issued during the period as a result of employee stock purchase plan.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -URI http://asc.fasb.org/extlink&amp;oid=120397183&amp;loc=d3e187085-122770<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=109259400&amp;loc=d3e21463-112644<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Value of stock related to Restricted Stock Awards issued during the period, net of the stock value of such awards forfeited.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -URI http://asc.fasb.org/extlink&amp;oid=120397183&amp;loc=d3e187085-122770<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=109259400&amp;loc=d3e21463-112644<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Value of stock issued as a result of the exercise of stock options.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=109259400&amp;loc=d3e21463-112644<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -URI http://asc.fasb.org/extlink&amp;oid=120397183&amp;loc=d3e187085-122770<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.29-31)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockRepurchasedDuringPeriodShares">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of shares that have been repurchased during the period and have not been retired and are not held in treasury. Some state laws may govern the circumstances under which an entity may acquire its own stock and prescribe the accounting treatment therefore. This element is used when state law does not recognize treasury stock.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=109259400&amp;loc=d3e21463-112644<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -URI http://asc.fasb.org/extlink&amp;oid=120397183&amp;loc=d3e187085-122770<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockRepurchasedDuringPeriodShares</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockRepurchasedDuringPeriodValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Equity impact of the value of stock that has been repurchased during the period and has not been retired and is not held in treasury. Some state laws may mandate the circumstances under which an entity may acquire its own stock and prescribe the accounting treatment therefore. This element is used when state law does not recognize treasury stock.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=109259400&amp;loc=d3e21463-112644<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -URI http://asc.fasb.org/extlink&amp;oid=120397183&amp;loc=d3e187085-122770<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockRepurchasedDuringPeriodValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquity">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Total of all stockholders' equity (deficit) items, net of receivables from officers, directors, owners, and affiliates of the entity which are attributable to the parent. The amount of the economic entity's stockholders' equity attributable to the parent excludes the amount of stockholders' equity which is allocable to that ownership interest in subsidiary equity which is not attributable to the parent (noncontrolling interest, minority interest). This excludes temporary equity and is sometimes called permanent equity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 310<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB Topic 4.E)<br> -URI http://asc.fasb.org/extlink&amp;oid=27010918&amp;loc=d3e74512-122707<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(31))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(30))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 6: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -URI http://asc.fasb.org/extlink&amp;oid=75031198&amp;loc=d3e14064-108612<br><br>Reference 7: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=114001798&amp;loc=d3e33918-111571<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquity</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>18
<FILENAME>R7.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796514952584">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Consolidated Statements of Cash Flows - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="2">6 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Jun. 30, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract', window );"><strong>Cash flows from operating activities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProfitLoss', window );">Net income</a></td>
<td class="nump">$ 35,386<span></span>
</td>
<td class="nump">$ 24,523<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract', window );"><strong>Adjustments to reconcile net income to net cash provided by operating activities:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DepreciationDepletionAndAmortization', window );">Depreciation and amortization</a></td>
<td class="nump">5,336<span></span>
</td>
<td class="nump">4,829<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredIncomeTaxExpenseBenefit', window );">Deferred income taxes</a></td>
<td class="nump">5,107<span></span>
</td>
<td class="nump">3,035<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensation', window );">Stock-based compensation expense</a></td>
<td class="nump">5,784<span></span>
</td>
<td class="nump">4,806<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryWriteDown', window );">Provision for excess and obsolete inventory</a></td>
<td class="nump">1,888<span></span>
</td>
<td class="nump">1,708<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract', window );"><strong>Changes in operating assets and liabilities:</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInAccountsReceivable', window );">Accounts receivable</a></td>
<td class="nump">7,091<span></span>
</td>
<td class="nump">18,752<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInInventories', window );">Inventories</a></td>
<td class="num">(32,418)<span></span>
</td>
<td class="num">(9,123)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets', window );">Prepaid expenses and other current assets</a></td>
<td class="num">(3,309)<span></span>
</td>
<td class="num">(4,206)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities', window );">Accounts payable and other current liabilities</a></td>
<td class="nump">7,282<span></span>
</td>
<td class="nump">11,808<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInContractWithCustomerLiability', window );">Deferred revenue</a></td>
<td class="nump">12,460<span></span>
</td>
<td class="nump">1,167<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable', window );">Income taxes</a></td>
<td class="num">(27)<span></span>
</td>
<td class="nump">5<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet', window );">Other assets and liabilities</a></td>
<td class="nump">1,341<span></span>
</td>
<td class="num">(729)<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInOperatingActivities', window );">Net cash provided by operating activities</a></td>
<td class="nump">45,921<span></span>
</td>
<td class="nump">56,575<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract', window );"><strong>Cash flows from investing activities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment', window );">Expenditures for property, plant and equipment and capitalized software</a></td>
<td class="num">(2,392)<span></span>
</td>
<td class="num">(2,975)<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInInvestingActivities', window );">Net cash used in investing activities</a></td>
<td class="num">(2,392)<span></span>
</td>
<td class="num">(2,975)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract', window );"><strong>Cash flows from financing activities</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_RepaymentOfNetSettlementOnRestrictedStockGrants', window );">Net settlement on restricted stock grants</a></td>
<td class="num">(6,495)<span></span>
</td>
<td class="num">(3,860)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PaymentsForRepurchaseOfCommonStock', window );">Repurchase of common stock</a></td>
<td class="num">(24,993)<span></span>
</td>
<td class="num">(7,501)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProceedsFromStockPlans', window );">Proceeds from Employee Stock Purchase Plan</a></td>
<td class="nump">508<span></span>
</td>
<td class="nump">509<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FinanceLeasePrincipalPayments', window );">Principal payments on finance lease obligation</a></td>
<td class="num">(362)<span></span>
</td>
<td class="num">(108)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProceedsFromStockOptionsExercised', window );">Proceeds from exercise of stock options</a></td>
<td class="nump">3,075<span></span>
</td>
<td class="nump">7,282<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetCashProvidedByUsedInFinancingActivities', window );">Net cash used in financing activities</a></td>
<td class="num">(28,267)<span></span>
</td>
<td class="num">(3,678)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents', window );">Effect of exchange rate changes on cash and cash equivalents</a></td>
<td class="nump">992<span></span>
</td>
<td class="nump">560<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect', window );">Net increase in cash, cash equivalents and restricted cash</a></td>
<td class="nump">16,254<span></span>
</td>
<td class="nump">50,482<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents', window );">Cash, cash equivalents and restricted cash at beginning of period</a></td>
<td class="nump">204,232<span></span>
</td>
<td class="nump">146,534<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents', window );">Cash, cash equivalents and restricted cash at end of period</a></td>
<td class="nump">$ 220,486<span></span>
</td>
<td class="nump">$ 197,016<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_RepaymentOfNetSettlementOnRestrictedStockGrants">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The net cash out flow on net settlement of restricted stock grants.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_RepaymentOfNetSettlementOnRestrictedStockGrants</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cash and cash equivalents, and cash and cash equivalents restricted to withdrawal or usage. Excludes amount for disposal group and discontinued operations. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 24<br> -URI http://asc.fasb.org/extlink&amp;oid=121586364&amp;loc=d3e3521-108585<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=121586364&amp;loc=d3e3044-108585<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=121583591&amp;loc=SL98516268-108586<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) in cash, cash equivalents, and cash and cash equivalents restricted to withdrawal or usage; including effect from exchange rate change. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 830<br> -SubTopic 230<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=98513438&amp;loc=d3e33268-110906<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 24<br> -URI http://asc.fasb.org/extlink&amp;oid=121586364&amp;loc=d3e3521-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredIncomeTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred income tax expense (benefit) pertaining to income (loss) from continuing operations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.7)<br> -URI http://asc.fasb.org/extlink&amp;oid=116825942&amp;loc=d3e330036-122817<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.Fact.1)<br> -URI http://asc.fasb.org/extlink&amp;oid=116825942&amp;loc=d3e330036-122817<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.Fact.2)<br> -URI http://asc.fasb.org/extlink&amp;oid=116825942&amp;loc=d3e330036-122817<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=121586364&amp;loc=d3e3602-108585<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=84230637&amp;loc=d3e32639-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredIncomeTaxExpenseBenefit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DepreciationDepletionAndAmortization">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The aggregate expense recognized in the current period that allocates the cost of tangible assets, intangible assets, or depleting assets to periods that benefit from use of the assets.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (e)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8736-108599<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=121586364&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DepreciationDepletionAndAmortization</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) from effect of exchange rate changes on cash and cash equivalents, and cash and cash equivalents restricted to withdrawal or usage; held in foreign currencies. Excludes amounts for disposal group and discontinued operations. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 830<br> -SubTopic 230<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=98513438&amp;loc=d3e33268-110906<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeasePrincipalPayments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cash outflow for principal payment on finance lease.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 5<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121603541&amp;loc=SL77918643-209977<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (g)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918686-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeasePrincipalPayments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The increase (decrease) during the reporting period in the amounts payable to vendors for goods and services received and the amount of obligations and expenses incurred but not paid.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121586364&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInAccountsReceivable">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The increase (decrease) during the reporting period in amount due within one year (or one business cycle) from customers for the credit sale of goods and services.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121586364&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInAccountsReceivable</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The increase (decrease) during the period in the amount due for taxes based on the reporting entity's earnings or attributable to the entity's income earning process (business presence) within a given jurisdiction.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121586364&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInContractWithCustomerLiability">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) in obligation to transfer good or service to customer for which consideration has been received or is receivable.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121586364&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInContractWithCustomerLiability</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInInventories">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The increase (decrease) during the reporting period in the aggregate value of all inventory held by the reporting entity, associated with underlying transactions that are classified as operating activities.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121586364&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInInventories</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInOperatingCapitalAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInOperatingCapitalAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) in operating assets after deduction of operating liabilities classified as other.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121586364&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) in prepaid expenses, and assets classified as other.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121586364&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryWriteDown">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of loss from reductions in inventory due to subsequent measurement adjustments, including, but not limited to, physical deterioration, obsolescence, or changes in price levels.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 330<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=116847112&amp;loc=d3e4542-108314<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryWriteDown</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInFinancingActivities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cash inflow (outflow) from financing activities, including discontinued operations. Financing activity cash flows include obtaining resources from owners and providing them with a return on, and a return of, their investment; borrowing money and repaying amounts borrowed, or settling the obligation; and obtaining and paying for other resources obtained from creditors on long-term credit.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 24<br> -URI http://asc.fasb.org/extlink&amp;oid=121586364&amp;loc=d3e3521-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInFinancingActivities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInInvestingActivities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cash inflow (outflow) from investing activities, including discontinued operations. Investing activity cash flows include making and collecting loans and acquiring and disposing of debt or equity instruments and property, plant, and equipment and other productive assets.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 24<br> -URI http://asc.fasb.org/extlink&amp;oid=121586364&amp;loc=d3e3521-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInInvestingActivities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInOperatingActivities">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cash inflow (outflow) from operating activities, including discontinued operations. Operating activity cash flows include transactions, adjustments, and changes in value not defined as investing or financing activities.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 25<br> -URI http://asc.fasb.org/extlink&amp;oid=121586364&amp;loc=d3e3536-108585<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 24<br> -URI http://asc.fasb.org/extlink&amp;oid=121586364&amp;loc=d3e3521-108585<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -URI http://asc.fasb.org/extlink&amp;oid=121586364&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInOperatingActivities</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PaymentsForRepurchaseOfCommonStock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash outflow to reacquire common stock during the period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 15<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121586364&amp;loc=d3e3291-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PaymentsForRepurchaseOfCommonStock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PaymentsToAcquirePropertyPlantAndEquipment">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash outflow associated with the acquisition of long-lived, physical assets that are used in the normal conduct of business to produce goods and services and not intended for resale; includes cash outflows to pay for construction of self-constructed assets.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 13<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=121586364&amp;loc=d3e3213-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PaymentsToAcquirePropertyPlantAndEquipment</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromStockOptionsExercised">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cash inflow from exercise of option under share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2A<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=SL79508275-113901<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121586364&amp;loc=d3e3255-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromStockOptionsExercised</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromStockPlans">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash inflow associated with the amount received from the stock plan during the period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121586364&amp;loc=d3e3255-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromStockPlans</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProfitLoss">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The consolidated profit or loss for the period, net of income taxes, including the portion attributable to the noncontrolling interest.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(g)(1)(ii))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1A<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121641772&amp;loc=SL7669619-108580<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 205<br> -SubTopic 20<br> -Section 50<br> -Paragraph 7<br> -URI http://asc.fasb.org/extlink&amp;oid=109222650&amp;loc=SL51721683-107760<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (b)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22499-107794<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 28<br> -Subparagraph (f)<br> -URI http://asc.fasb.org/extlink&amp;oid=75031198&amp;loc=d3e14064-108612<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1A<br> -Subparagraph (a)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=109239629&amp;loc=SL4573702-111684<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 235<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-05(b)(2))<br> -URI http://asc.fasb.org/extlink&amp;oid=120399901&amp;loc=d3e537907-122884<br><br>Reference 8: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 31<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8924-108599<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1B<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121641772&amp;loc=SL7669625-108580<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22663-107794<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8736-108599<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8933-108599<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1A<br> -Subparagraph (c)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=109239629&amp;loc=SL4573702-111684<br><br>Reference 14: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 55<br> -Paragraph 4J<br> -URI http://asc.fasb.org/extlink&amp;oid=120409616&amp;loc=SL4591551-111686<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8906-108599<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=121586364&amp;loc=d3e3000-108585<br><br>Reference 17: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 45<br> -Paragraph 19<br> -URI http://asc.fasb.org/extlink&amp;oid=108774443&amp;loc=SL4569616-111683<br><br>Reference 18: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 323<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=114001798&amp;loc=d3e33918-111571<br><br>Reference 19: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (f)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8933-108599<br><br>Reference 20: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -SubTopic 10<br> -Section 55<br> -Paragraph 4K<br> -URI http://asc.fasb.org/extlink&amp;oid=120409616&amp;loc=SL4591552-111686<br><br>Reference 21: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22658-107794<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProfitLoss</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensation">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of noncash expense for share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121586364&amp;loc=d3e3602-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensation</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>19
<FILENAME>R8.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796506355944">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Nature of Business<br></strong></div></th>
<th class="th" colspan="1">6 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract', window );"><strong>Nature of Business</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock', window );">Nature of Business</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;1.&#160;&#160;Nature of Business</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Axcelis Technologies,&#160;Inc. (&#8220;Axcelis&#8221; or the &#8220;Company&#8221;) was incorporated in Delaware in 1995 and is a producer of ion implantation equipment used in the fabrication of semiconductor chips in the United States, Europe and Asia. In addition, we provide extensive worldwide aftermarket service and support, including spare parts, equipment upgrades, used equipment and maintenance services to the semiconductor industry. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The accompanying unaudited consolidated financial statements have been prepared in accordance with U.S. generally accepted accounting principles for interim financial information and with the instructions to Form&#160;10-Q and Article&#160;10 of Regulation S-X. Accordingly, they do not include all of the information and footnotes required by generally accepted accounting principles for complete financial statements. In the opinion of management, all adjustments which are of a normal recurring nature and considered necessary for a fair presentation of these financial statements have been included. Operating results for the interim periods presented are not necessarily indicative of the results that may be expected for other interim periods or for the year as a whole.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The balance sheet at December&#160;31, 2020 has been derived from the audited consolidated financial statements at that date but does not include all the information and footnotes required by generally accepted accounting principles for complete financial statements. For further information, refer to the consolidated financial statements and footnotes thereto included in Axcelis Technologies,&#160;Inc.&#8217;s Annual Report on Form&#160;10-K for the year ended December&#160;31, 2020.</p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for organization, consolidation and basis of presentation of financial statements disclosure.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 205<br> -URI http://asc.fasb.org/topic&amp;trid=2122149<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 810<br> -URI http://asc.fasb.org/topic&amp;trid=2197479<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>20
<FILENAME>R9.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796508168072">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stock Based Compensation<br></strong></div></th>
<th class="th" colspan="1">6 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract', window );"><strong>Stock Based Compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock', window );">Stock Based Compensation</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 2.&#160;&#160;Stock-Based Compensation</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We maintain the Axcelis Technologies,&#160;Inc. 2012 Equity Incentive Plan, as amended (the &#8220;2012 Equity Plan&#8221;), which became effective on May&#160;2, 2012, and permits the issuance of options, restricted stock, restricted stock units (&#8220;RSUs&#8221;) and performance awards to selected employees, directors and consultants of the Company. Our 2000 Stock Plan (the &#8220;2000 Stock Plan&#8221;) expired on May 1, 2012 and no new grants may be made under that plan after that date. However, unexpired options granted under the 2000 Stock Plan, which have a 10-year term, remain outstanding and subject to the terms of the 2000 Stock Plan. We also maintain the Axcelis Technologies,&#160;Inc. 2020 Employee Stock Purchase Plan (the &#8220;2020 ESPP&#8221;), an Internal Revenue Code Section&#160;423 plan. The Company&#8217;s Employee Stock Purchase Plan, which was effective in June 2000 (the &#8220;2000 ESPP&#8221;), expired in June 2020.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:27pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The 2012 Equity Plan is more fully described in Note&#160;13 to the consolidated financial statements in our Annual Report on Form&#160;10-K for the year ended December 31, 2020.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We recognized stock-based compensation expense of $3.4&#160;million and $3.1 million for the three-month periods ended June 30, 2021 and 2020, respectively. We recognized stock-based compensation expense of $5.8 million and $4.8 million for the six-month periods ended June 30, 2021 and 2020, respectively. These amounts include compensation expense related to RSUs, non-qualified stock options and stock to be issued to participants under the 2020 ESPP and 2000 ESPP.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">In the three-month periods ended June 30, 2021 and 2020, we issued 0.3 million and 0.6 million shares of common stock, respectively, upon stock option exercises, purchases under the employee stock purchase plans and vesting of RSUs. In the three-month periods ended June 30, 2021 and 2020, we received proceeds of $1.1&#160;million and $3.3&#160;million, respectively, in connection with the exercise of stock options and purchases under the employee stock purchase plans.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">In the six-month periods ended June 30, 2021 and 2020, we issued 0.7 million and 1.2 million shares of common stock, respectively, upon stock option exercises, purchases under the employee stock purchase plans and vesting of RSUs. In the six-month periods ended June 30, 2021 and 2020, we received proceeds of $3.6&#160;million and $7.8&#160;million, respectively, in connection with the exercise of stock options and purchases under the employee stock purchase plans.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -URI http://asc.fasb.org/topic&amp;trid=2228938<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>21
<FILENAME>R10.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796506345496">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Leases<br></strong></div></th>
<th class="th" colspan="1">6 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LeasesAbstract', window );"><strong>Leases</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_LeaseDisclosureTextBlock', window );">Leases</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 3.&#160;&#160;Leases </b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We have operating leases for office space, warehouse space, computer and office equipment and vehicles used in our business operations. We have a finance lease as a result of the 2015 sale-leaseback of our corporate headquarters in Beverly, Massachusetts. All new agreements are reviewed to determine if they contain a lease component. A lease is a contract or part of a contract that conveys the right to control the use of identified property, plant or equipment over a period of time in exchange for consideration. We recognize the lease obligation on a discounted basis using the explicit or implicit discount rate stated within the agreement. We recognize a corresponding right-of-use asset, which is initially determined based upon the net present value of the associated liability and is adjusted for deferred costs and possible impairment, if any. For those lease agreements that do not indicate the applicable discount rate, we use our incremental borrowing rate. We have made the following policy elections: (i) operating leases with an initial term of 12 months or less are not recorded on the consolidated balance sheet; (ii) we recognize lease expense for operating leases on a straight-line basis over the lease term; and (iii) we account for lease components and non-lease components that are fixed payments as one component. Some of our operating leases include one or more options to renew, with renewal terms that can extend the respective lease term <span style="-sec-ix-hidden:Hidden_zan9aSK8zE6OWipLaR-PbQ;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">1</span></span> to 3 years. The exercise of lease renewal options are at our sole discretion. For lease extensions that are reasonably certain to occur, we have included these renewal periods in our calculation of the net present value of the lease obligation and related right-of-use asset. Certain leases also include options to purchase the leased property. The depreciable life of certain assets and leasehold improvements is limited by the expected lease term, unless there is a transfer of title or purchase option reasonably certain of exercise. Our lease agreements do not contain any material residual value guarantees or material restrictive covenants. The amounts of operating and finance lease right-of-use assets and related lease obligations recorded within our consolidated balance sheets are as follows: </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:10.8%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;width:2.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:54.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Leases</b></p></td><td style="vertical-align:bottom;width:20.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Classification</b></p></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.8%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Assets</b></p></td><td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:22.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_W9KnNs_BPUCoZMTZ8ue8sA;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;text-align:left;">Operating leases</span></span></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating lease assets</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 7,626</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 4,542</p></td></tr><tr><td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_A9wG4K0J4UKHRE76HpHnMg;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;text-align:left;">Finance lease</span></span></p></td><td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance lease assets *</p></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 19,889</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 20,544</p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Total leased assets</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.56%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 27,515</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.63%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 25,086</p></td></tr><tr><td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Liabilities</b></p></td><td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Current</b></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_7xdEmmVR-kiGHLFbeFZHxw;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;text-align:left;">Operating</span></span></p></td><td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Other current liabilities</p></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 3,215</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 2,573</p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_Cv0WhFSvyEe6gpVSxXkYow;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;text-align:left;">Finance</span></span></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Current portion of finance lease obligation</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 864</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 756</p></td></tr><tr><td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Noncurrent</b></p></td><td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_dHd0m_i_ckaUDDKTbKPNiA;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;text-align:left;">Operating </span></span></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Other long-term liabilities</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 4,398</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,949</p></td></tr><tr><td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_4JxT6-VdKkyC-ozm6pXPvg;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;text-align:left;">Finance </span></span></p></td><td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance lease obligation</p></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 46,923</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 47,393</p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_EFu-sVp3nUiwnTcDpuJATQ;"><b style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:bold;text-align:left;">Total lease liabilities</b></span></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.56%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 55,400</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.63%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 52,671</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td colspan="8" style="vertical-align:top;width:100%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">* Finance lease assets are recorded net of accumulated depreciation of $48.9 million and include $0.7 million of prepaid financing costs as of June 30, 2021. Finance lease assets are recorded net of accumulated depreciation of $48.4 million and include $0.7<span style="color:#ff0000;"> </span>million of prepaid financing costs as of December 31, 2020. <br/><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="display:inline-block;text-indent:0pt;width:36pt;"/>All of our operating lease office locations support selling and servicing functions. Operating lease expense, and depreciation and interest expense relating to our finance lease obligation, are recognized within our consolidated statement of operations for the three and six months ended June 30, 2021 and 2020 as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.07;margin:0pt 0pt 0pt 36pt;"><span style="font-size:5pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:17.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Three months ended  </b></p></td><td style="vertical-align:bottom;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:14.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:17.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:14.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:39.69%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><b style="font-weight:bold;">Lease cost</b></p></td><td style="vertical-align:bottom;width:22.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Classification</b></p></td><td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="16" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Operating lease cost</b></p></td><td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:33.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Service</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Cost of revenue</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 644</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 624</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,283</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,174</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Research and development</p></td><td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating expenses</p></td><td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 122</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 128</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 252</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 209</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Sales and marketing*</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating expenses</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 376</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 346</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 755</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 678</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">General and administrative*</p></td><td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating expenses</p></td><td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 201</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 220</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 461</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 435</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Total operating lease cost</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.52%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,343</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,318</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 2,751</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 2,496</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Finance lease cost</b></p></td><td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Depreciation of leased assets</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Cost of revenue, R&amp;D, Sales and marketing and G&amp;A</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 328</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 328</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 656</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 681</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Interest on lease liabilities</p></td><td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Interest expense</p></td><td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,274</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,299</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 2,553</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 2,602</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Total finance lease cost</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.52%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,602</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,627</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 3,209</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 3,283</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Total lease cost</b></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.52%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 2,945</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 2,945</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 5,960</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 5,779</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td colspan="14" style="vertical-align:bottom;width:97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">* Sales and marketing and general and administrative expense also includes short-term lease and variable lease costs of approximately $0.4 million and $0.9 million for the three and six months ended June 30, 2021, respectively, and includes short-term and variable lease costs of approximately $0.3 million and $0.5 million for the three and six months ended June 30, 2020, respectively.</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="white-space:pre-wrap;">  </span><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="display:inline-block;text-indent:0pt;width:36pt;"/>The lease of our corporate headquarters, shown below under finance leases, had an original lease term of 22 years, beginning in January 2015. All other locations are treated as operating leases, with lease terms ranging from <span style="-sec-ix-hidden:Hidden_92crWef4lkGqNHzmJbisQA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;">1</span></span> to 10 years. The tables below reflect the minimum cash outflow regarding our current lease obligations as well as the weighted-average remaining lease term and weighted-average discount rates used in our calculation of our lease obligations and right-of-use assets as of June 30, 2021: </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Finance</b></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Operating</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:64.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Maturity of Lease Liabilities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Leases</b></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Leases</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Leases</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">2021</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 2,929</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,827</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 4,756</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">2022</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 5,980</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 3,053</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 9,033</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">2023</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 6,114</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,544</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 7,658</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">2024</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 6,252</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 794</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 7,046</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">2025</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 5,930</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 712</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 6,642</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Thereafter</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 73,723</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 545</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 74,268</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Total lease payments</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 100,928</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 8,475</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 109,403</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Less interest portion*</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (53,141)</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (862)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (54,003)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance lease and operating lease obligations</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 47,787</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 7,613</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 55,400</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td colspan="10" style="vertical-align:bottom;width:98.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">* Finance lease interest calculated using the implied interest rate; operating lease interest calculated using estimated corporate borrowing rate.</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:14.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><b style="font-weight:bold;">Lease term and discount rate</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Weighted-average remaining lease term (years):</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating leases</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;">3.0</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;">15.6</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Weighted-average discount rate:</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">4.5%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance leases</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">10.5%</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="display:inline-block;text-indent:0pt;width:36pt;"/>Our cash outflows from our operating leases include rent expense and other charges associated with these leases. These cash flows are included within the operating activities section of our statement of cash flows. Our cash flows from our finance lease include both an interest component and payment of principal component. The table below shows our cash outflows, by lease type and related section of our statement of cash flows, as well as the non-cash amount capitalized on our balance sheet in relation to our operating lease right-of-use assets for the six months ending June 30, 2021 and 2020, respectively:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"> <span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:26.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:26.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><b style="font-weight:bold;">Cash paid for amounts included in the measurement of lease liabilities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.91%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:26.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating cash outflows from operating leases</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 2,751</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 2,496</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating cash outflows from finance leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 2,556</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 2,746</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Financing cash outflows from finance leases</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 362</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 108</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating lease assets obtained in exchange for operating lease liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 4,192</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,038</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance lease assets obtained in exchange for new finance lease liabilities</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_LeaseDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure of information about leases.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_LeaseDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LeasesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LeasesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>22
<FILENAME>R11.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796508616520">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Revenue<br></strong></div></th>
<th class="th" colspan="1">6 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerAbstract', window );"><strong>Revenue.</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerTextBlock', window );">Revenue</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Note 4.  Revenue</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="display:inline-block;text-indent:0pt;width:36pt;"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;text-align:left;"> </b></span>To reflect the organization of our business operations, we divide revenue into two categories: revenue from sales of new systems and revenue arising from the sale of used systems, parts and labor to customers who own systems, which we refer to as &#8220;Aftermarket.&#8221;</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="display:inline-block;text-indent:0pt;width:36pt;"/>Revenue by categories used by management are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100.52%;"><tr style="height:1pt;"><td style="vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:24.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Three months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:27.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:24.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:27.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:53.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Systems</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">100,138 </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">76,815 </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">181,129 </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">159,152 </p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Aftermarket</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 47,136</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 46,150</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 98,921</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 82,804</p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Total Revenue</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">147,274 </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">122,965 </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.16%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">280,050 </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">241,956 </p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="display:inline-block;text-indent:0pt;width:36pt;"/>We also consider revenue by geography. Revenue is allocated to geographic markets based upon the location to which our products are shipped and in which our services are performed. Revenue in our principal geographic markets is as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:22.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Three months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:21.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:22.63%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:21.8%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:45.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">North America </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">10,204</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">8,915</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">19,712</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">19,576</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Asia Pacific</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">116,642</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">106,604</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">220,033</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">203,432</p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Europe</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">20,428</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">7,446</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">40,305</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">18,948</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Total Revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">147,274</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">122,965</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">280,050</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">241,956</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="display:inline-block;text-indent:0pt;width:36pt;"/>Our system sales revenue transactions give rise to contract liabilities (in the case of pre-payments and the fair value of goods and services to be delivered after the system delivery, such as installation and certain warranty obligations). </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="display:inline-block;text-indent:0pt;width:36pt;"/>Contract liabilities are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:69.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.85%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.85%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:69.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:69.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:69.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:28.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:69.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Contract liabilities</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:11.85%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 35,518</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:11.85%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 23,058</p></td></tr><tr><td style="vertical-align:bottom;width:69.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="display:inline-block;text-indent:0pt;width:36pt;"/>Contract liabilities are reflected as deferred revenue on the consolidated balance sheet and relate to payments invoiced or received in advance of completion of performance obligations under a contract. Contract liabilities are recognized as revenue upon the fulfillment of performance obligations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="display:inline-block;text-indent:0pt;width:36pt;"/><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:17.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Three months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:17.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:17.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';">&#160;&#160;&#160;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:17.8%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.14%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:36.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance, beginning of the period</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 22,142</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 34,106</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 23,058</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 29,251</p></td></tr><tr><td style="vertical-align:bottom;width:62.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">    Deferral of revenue</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 21,893</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 6,248</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 30,117</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 10,724</p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:62.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">    Recognition of deferred revenue</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (8,517)</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (9,937)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.64%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (17,657)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (9,558)</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance, end of the period</p></td><td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 35,518</p></td><td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.89%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 30,417</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.89%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.64%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 35,518</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.89%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.2%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 30,417</p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="display:inline-block;text-indent:0pt;width:36pt;"/>The majority of our system transactions have payment terms of 90% due upon shipment of the tool and 10% due upon acceptance. Aftermarket transaction payment terms usually provide that payment is due either within 30 or 60 days after the service is provided or parts delivered.</p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueFromContractWithCustomerAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueFromContractWithCustomerAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueFromContractWithCustomerTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure of revenue from contract with customer to transfer good or service and to transfer nonfinancial asset. Includes, but is not limited to, disaggregation of revenue, credit loss recognized from contract with customer, judgment and change in judgment related to contract with customer, and asset recognized from cost incurred to obtain or fulfill contract with customer. Excludes insurance and lease contracts.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -URI http://asc.fasb.org/topic&amp;trid=49130388<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=121604090&amp;loc=SL49130551-203045<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 13<br> -Subparagraph (b)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=121604090&amp;loc=SL49130556-203045<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 12<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=121604090&amp;loc=SL49130554-203045<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -URI http://asc.fasb.org/extlink&amp;oid=121604090&amp;loc=SL49130550-203045<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 12<br> -Subparagraph (e)<br> -URI http://asc.fasb.org/extlink&amp;oid=121604090&amp;loc=SL49130554-203045<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 12<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121604090&amp;loc=SL49130554-203045<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 12<br> -Subparagraph (d)<br> -URI http://asc.fasb.org/extlink&amp;oid=121604090&amp;loc=SL49130554-203045<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 15<br> -URI http://asc.fasb.org/extlink&amp;oid=121604090&amp;loc=SL49130558-203045<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 12<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=121604090&amp;loc=SL49130554-203045<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueFromContractWithCustomerTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>23
<FILENAME>R12.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796506075688">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Receivable and Allowance for Credit Losses<br></strong></div></th>
<th class="th" colspan="1">6 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccountsReceivableNetAbstract', window );"><strong>Receivable and Allowance for Credit Losses</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock', window );">Receivable and Allowance for Credit Losses</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;margin:0pt;"><b style="font-weight:bold;">Note 5. </b><b style="font-weight:bold;">Receivables and Allowances for Credit Losses</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">All trade receivables are reported on the Consolidated Balance Sheets at their amortized cost adjusted for any write-offs and net of allowances for credit losses. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Axcelis maintains an allowance for credit losses, which represent an estimate of expected losses over the remaining contractual life of our receivables, considering current market conditions and estimates for supportable forecasts when appropriate. The estimate is a result of the Company&#8217;s ongoing assessments and evaluations of collectability, historical loss experience, and future expectations in estimating credit losses in our receivable portfolio. Axcelis uses historical loss experience rates and applies them to a related aging analysis while also considering customer and/or economic risk where appropriate. Determination of the proper amount of allowances requires management to exercise judgment about the timing, frequency and severity of credit losses that could materially affect the provision for credit losses and, as a result, net earnings. The allowance takes into consideration numerous quantitative and qualitative factors that include receivable type, historical loss experience, loss migration, delinquency trends, collection experience, current economic conditions, estimates for supportable forecasts, when appropriate, and credit risk characteristics. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Axcelis evaluates the credit risk of the customer when extending credit based on a combination of various financial and qualitative factors that may affect our customers&#8217; ability to pay. These factors may include the customer&#8217;s financial condition, past payment experience, and credit bureau report, as well as the value of the underlying collateral.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Management performs detailed reviews of Axcelis&#8217; receivables on a quarterly basis to assess the adequacy of the allowances and to determine if any impairment has occurred. Amounts determined to be uncollectable are charged directly against the allowances, while amounts recovered on previously written-off accounts increase the allowances. Changes to the allowances for credit losses are maintained through adjustments to the provision for credit losses, which are charged to current period earnings.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The following table shows changes of the allowances for credit losses related to trade receivables for the three and six months ended June 30, 2021 and 2020, respectively:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:57.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:1.91%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:1.09%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:57.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Three months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td><td style="vertical-align:bottom;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:57.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:18.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:18.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:57.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:8.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:8.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:8.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:8.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="14" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:57.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:38.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:57.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance, beginning of period</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 818</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:57.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">    Provision for credit losses</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:57.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">    Charge-offs</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (818)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:57.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">    Recoveries</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:57.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance, end of period</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountsReceivableNetAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccountsReceivableNetAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for claims held for amounts due a entity, excluding financing receivables. Examples include, but are not limited to, trade accounts receivables, notes receivables, loans receivables. Includes disclosure for allowance for credit losses.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 310<br> -SubTopic 10<br> -URI http://asc.fasb.org/subtopic&amp;trid=2196772<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>24
<FILENAME>R13.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796506288952">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Computation of Net Earnings per Share<br></strong></div></th>
<th class="th" colspan="1">6 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareAbstract', window );"><strong>Computation of Net Earnings per Share</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareTextBlock', window );">Computation of Net Earnings per Share</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 6.&#160;&#160;Computation of Net Earnings per Share</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Basic earnings per share is computed by dividing income available to common stockholders (the numerator) by the weighted-average number of common shares outstanding (the denominator) for the period. The computation of diluted earnings per share is similar to basic earnings per share, except that the denominator is increased by the number of additional common shares that would have been outstanding if the potentially dilutive common shares issuable on exercise of stock options and vesting of RSUs had been issued, calculated using the treasury stock method. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:27.35pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The components of net earnings per share are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:16.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Three months ended  </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:17.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:16.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:17.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.73%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="14" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;width:35.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands, except per share amounts) </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Net income available to common stockholders</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 18,906</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 13,302</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 35,386</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 24,523</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Weighted average common shares outstanding used in computing basic income per share</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 33,677</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 33,116</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 33,696</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 32,998</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Incremental options and RSUs</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 634</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 842</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 777</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,025</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Weighted average common shares used in computing diluted net income per share</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 34,311</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 33,958</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 34,473</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 34,023</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Net income per share</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Basic</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 0.56</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 0.40</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1.05</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 0.74</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Diluted</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 0.55</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 0.39</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1.03</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 0.72</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Diluted weighted average common shares outstanding does not include 1,800 and 3,138 common equivalent shares issuable with respect to outstanding equity awards for the three-month periods ended June 30, 2021 and 2020, respectively, or 1,352 and 5,006 common equivalent shares issuable with respect to outstanding equity awards for the six-month periods ending June 30, 2021 and 2020, respectively, as their effect would have been anti-dilutive.</p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for earnings per share.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=109243012&amp;loc=SL65017193-207537<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -URI http://asc.fasb.org/topic&amp;trid=2144383<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3630-109257<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>25
<FILENAME>R14.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796507372728">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Accumulated Other Comprehensive Income<br></strong></div></th>
<th class="th" colspan="1">6 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTaxAbstract', window );"><strong>Accumulated Other Comprehensive Income</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ComprehensiveIncomeNoteTextBlock', window );">Accumulated Other Comprehensive Income</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><b style="font-weight:bold;">Note 7.&#160;&#160;Accumulated Other Comprehensive Income </b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The following table presents the changes in accumulated other comprehensive income, net of tax, by component, for the six months ended June 30, 2021:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.59%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.88%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Foreign</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Defined&#160;benefit</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">currency</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">pension&#160;plan</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance at December 31, 2020</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,945</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (510)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,435</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Other comprehensive loss and pension reclassification</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (820)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 54</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (766)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance at June 30, 2021</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,125</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (456)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.59%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.88%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 2,669</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTaxAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTaxAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ComprehensiveIncomeNoteTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for comprehensive income, which includes, but is not limited to, 1) the amount of income tax expense or benefit allocated to each component of other comprehensive income, including reclassification adjustments, 2) the reclassification adjustments for each classification of other comprehensive income and 3) the ending accumulated balances for each component of comprehensive income.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -URI http://asc.fasb.org/topic&amp;trid=2134417<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(21))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395209&amp;loc=SL114868664-224227<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(23))<br> -URI http://asc.fasb.org/extlink&amp;oid=120399700&amp;loc=SL114874048-224260<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(19))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400993&amp;loc=SL114874131-224263<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ComprehensiveIncomeNoteTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>26
<FILENAME>R15.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796511603432">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Cash, cash equivalents and restricted cash<br></strong></div></th>
<th class="th" colspan="1">6 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_CashCashEquivalentsAndRestrictedCashAbstract', window );"><strong>Cash, cash equivalents and restricted cash</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_CashCashEquivalentsAndRestrictedCashTextBlock', window );">Cash, cash equivalents and restricted cash</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 8. Cash, cash equivalents and restricted cash</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The following table provides a reconciliation of cash, cash equivalents, and restricted cash reported within the consolidated balance sheets to the total of the amounts shown in the statement of cash flows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:15.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:15.39%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:18.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:18.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:18.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:15.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:38.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Cash and cash equivalents</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:15.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">219,731 </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:15.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">203,479 </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Long-term restricted cash</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:15.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">755 </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:15.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">753 </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Total cash, cash equivalents and restricted cash</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:15.37%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">220,486 </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:15.39%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">204,232 </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">As of June 30, 2021, we had $0.8&#160;million in restricted cash representing the total of (i) cash collateral for a $0.7&#160;million letter of credit relating to workers&#8217; compensation insurance and (ii) a $0.1&#160;<span style="white-space:pre-wrap;">million deposit relating to customs activity.  </span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_CashCashEquivalentsAndRestrictedCashAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>N/A</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_CashCashEquivalentsAndRestrictedCashAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_CashCashEquivalentsAndRestrictedCashTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure of cash, cash equivalents and restricted cash.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_CashCashEquivalentsAndRestrictedCashTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>27
<FILENAME>R16.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796506315768">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Inventories, net<br></strong></div></th>
<th class="th" colspan="1">6 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryDisclosureAbstract', window );"><strong>Inventories, net</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryDisclosureTextBlock', window );">Inventories, net</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;9.&#160;&#160;Inventories, net</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The components of inventories are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.12%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:22.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Raw materials</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 109,795</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 100,254</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Work in process</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 40,233</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 33,867</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Finished goods (completed systems)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 42,293</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.12%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 26,955</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">      Inventories, net</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 192,321</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 161,076</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">When recorded, inventory reserves reduce the carrying value of inventories to their net realizable value. We establish inventory reserves when conditions exist that indicate inventory may be in excess of anticipated demand or is obsolete based upon assumptions about future demand for the Company&#8217;s products or market conditions. We regularly evaluate the ability to realize the value of inventories based on a combination of factors including the following: forecasted sales or usage, estimated product end of life dates, estimated current and future market value and new product introductions. Purchasing and usage alternatives are also explored to mitigate inventory exposure.</p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for inventory. Includes, but is not limited to, the basis of stating inventory, the method of determining inventory cost, the classes of inventory, and the nature of the cost elements included in inventory.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 330<br> -URI http://asc.fasb.org/topic&amp;trid=2126998<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>28
<FILENAME>R17.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796524344344">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Product Warranty<br></strong></div></th>
<th class="th" colspan="1">6 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProductWarrantiesDisclosuresAbstract', window );"><strong>Product Warranty</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProductWarrantyDisclosureTextBlock', window );">Product Warranty</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;10.&#160;&#160;Product Warranty</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We generally offer a one-year warranty for all of our systems, the terms and conditions of which vary depending upon the product sold. For all systems sold, we accrue a liability for the estimated cost of standard warranty at the time of system shipment and defer the portion of systems revenue attributable to the fair value of non-standard warranty. Costs for non-standard warranty are expensed as incurred. Factors that affect our warranty liability include the number of installed units, historical and anticipated product failure rates, material usage and service labor costs. We periodically assess the adequacy of our recorded liability and adjust the amount as necessary.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The changes in our standard product warranty liability are as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:17.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:17.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:17.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance at January&#160;1 (beginning of year)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 4,612</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,244</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Warranties issued during the period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,013</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 2,635</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Settlements made during the period</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (1,991)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (1,913)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Changes in estimate of liability for pre-existing warranties during the period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (372)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 177</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance at June 30 (end of period)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 5,262</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 4,143</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Amount classified as current</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 4,690</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,942</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Amount classified as long-term </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 572</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 201</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 18pt;">Total warranty liability</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 5,262</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 4,143</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantiesDisclosuresAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantiesDisclosuresAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for standard and extended product warranties and other product guarantee contracts, including a tabular reconciliation of the changes in the guarantor's aggregate product warranty liability for the reporting period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -URI http://asc.fasb.org/topic&amp;trid=2155896<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantyDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>29
<FILENAME>R18.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796506291112">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Fair Value Measurements<br></strong></div></th>
<th class="th" colspan="1">6 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FairValueDisclosuresAbstract', window );"><strong>Fair Value Measurements</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FairValueDisclosuresTextBlock', window );">Fair Value Measurements</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;11.&#160;&#160;Fair Value Measurements</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Certain assets on our balance sheets are reported at their fair value. Fair value is defined as the price that would be received for an asset or paid to transfer a liability (an exit price) in the principal or most advantageous market for the asset or liability in an orderly transaction between market participants on the measurement date.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:27pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><b style="font-weight:bold;">(a)&#160;&#160;Fair Value Hierarchy</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The accounting guidance for fair value measurement requires an entity to maximize the use of observable inputs and minimize the use of unobservable inputs when measuring fair value. The standard establishes a fair value hierarchy based on the level of independent, objective evidence surrounding the inputs used to measure fair value. A financial instrument&#8217;s categorization within the fair value hierarchy is based upon the lowest level of input that is significant to the fair value measurement. The fair value hierarchy is as follows:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:27pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="text-decoration:underline;text-decoration-color:#000000;">Level 1 </span>-&#160;applies to assets or liabilities for which there are quoted prices in active markets for identical assets or liabilities.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="text-decoration:underline;text-decoration-color:#000000;">Level 2 </span>-&#160;applies to assets or liabilities for which there are inputs other than quoted prices that are observable for the asset or liability, such as quoted prices for similar assets or liabilities in active markets; quoted prices for identical assets or liabilities in markets with insufficient volume or infrequent transactions (less active markets); or model-derived valuations in which significant inputs are observable or can be derived principally from, or corroborated by, observable market data.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="text-decoration:underline;text-decoration-color:#000000;">Level 3 </span>-&#160;applies to assets or liabilities for which there are unobservable inputs to the valuation methodology that are significant to the measurement of the fair value of the assets or liabilities.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><b style="font-weight:bold;">(b)&#160;&#160;Fair Value Measurements</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Our money market funds and short-term investments are included in cash and cash equivalents in the consolidated balance sheets. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The following table sets forth our assets by level within the fair value hierarchy:</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:24.5pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value&#160;Measurements</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;1</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;2</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;3</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="14" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Assets</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash equivalents:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Money market funds, U.S. Government Securities and Agency Investments</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 190,731</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 190,731</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value&#160;Measurements</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;1</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;2</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;3</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="14" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Assets</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash equivalents:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Money market funds, U.S. Government Securities and Agency Investments</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 172,119</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 172,119</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><b style="font-weight:bold;">(c)&#160;&#160;Other Financial Instruments</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:18pt;text-indent:-18pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">The carrying amounts reflected in the consolidated balance sheets for accounts receivable, prepaid expenses and other current assets and non-current assets, restricted cash, accounts payable and accrued expenses approximate fair value due to their short-term maturities.</p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FairValueDisclosuresAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FairValueDisclosuresAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FairValueDisclosuresTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for the fair value of financial instruments (as defined), including financial assets and financial liabilities (collectively, as defined), and the measurements of those instruments as well as disclosures related to the fair value of non-financial assets and liabilities. Such disclosures about the financial instruments, assets, and liabilities would include: (1) the fair value of the required items together with their carrying amounts (as appropriate); (2) for items for which it is not practicable to estimate fair value, disclosure would include: (a) information pertinent to estimating fair value (including, carrying amount, effective interest rate, and maturity, and (b) the reasons why it is not practicable to estimate fair value; (3) significant concentrations of credit risk including: (a) information about the activity, region, or economic characteristics identifying a concentration, (b) the maximum amount of loss the entity is exposed to based on the gross fair value of the related item, (c) policy for requiring collateral or other security and information as to accessing such collateral or security, and (d) the nature and brief description of such collateral or security; (4) quantitative information about market risks and how such risks are managed; (5) for items measured on both a recurring and nonrecurring basis information regarding the inputs used to develop the fair value measurement; and (6) for items presented in the financial statement for which fair value measurement is elected: (a) information necessary to understand the reasons for the election, (b) discussion of the effect of fair value changes on earnings, (c) a description of [similar groups] items for which the election is made and the relation thereof to the balance sheet, the aggregate carrying value of items included in the balance sheet that are not eligible for the election; (7) all other required (as defined) and desired information.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 820<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=117815213&amp;loc=d3e19207-110258<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FairValueDisclosuresTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>30
<FILENAME>R19.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796507392760">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Financing Arrangements<br></strong></div></th>
<th class="th" colspan="1">6 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtDisclosureAbstract', window );"><strong>Financing Arrangements</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtDisclosureTextBlock', window );">Financing Arrangements</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:36pt;text-indent:-36pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;12.&#160;&#160;Financing Arrangements</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">On January 30, 2015, we sold our corporate headquarters facility in Beverly, Massachusetts for $48.9&#160;million. As part of the sale, we also entered into a 22-year lease agreement of our headquarters facility. This sale-leaseback is accounted for as a financing lease under generally accepted accounting principles and, as such, we have recorded a financing obligation of $47.8&#160;million as of June 30, 2021. The associated lease payments include both an interest component and payment of principal, with the remaining liability being extinguished at the end of the original lease term. We posted a security deposit of $5.9&#160;<span style="white-space:pre-wrap;">million in the form of an irrevocable letter of credit at the time of the closing. This letter of credit reduces our availability under our credit facility, as described in the next paragraph.   </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">On July 31, 2020, we entered into a Senior Secured Credit Facilities Credit Agreement (the &#8220;Credit Agreement&#8221;) with Silicon Valley Bank, in its capacity as administrative agent and collateral agent for itself and as a lender, and such other banks and financial institutions or entities that from time to time join as lenders under the Credit Agreement.&#160;The Credit Agreement provides for a revolving credit facility in an aggregate principal amount not to exceed $40.0 million. Our obligations under the Credit Agreement are secured by&#160;a security interest, senior to any current and future debts and to any security interest, in all of our rights, title, and interest in, to and under substantially all of our assets, subject to limited exceptions, including permitted liens. The revolving credit facility terminates on July 31, 2023. As of June 30, 2021, we were in compliance with all covenant requirements of the Credit Agreement. As of such date, no borrowings had been made under the Credit Agreement, although a letter of credit for $5.9 million reduces the funds available for borrowing under the credit line. We entered into a First Amendment to the Credit Agreement with Silicon Valley Bank in March 2021 to (i) align the covenants with our 2021 stock repurchase program, and (ii) established terms to transition from a Eurodollar based interest rate option to an interest rate benchmark using a secured overnight financing rate (known as &#8220;SOFR&#8221;) published by the Federal Reserve Bank of New York.</p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for information about short-term and long-term debt arrangements, which includes amounts of borrowings under each line of credit, note payable, commercial paper issue, bonds indenture, debenture issue, own-share lending arrangements and any other contractual agreement to repay funds, and about the underlying arrangements, rationale for a classification as long-term, including repayment terms, interest rates, collateral provided, restrictions on use of assets and activities, whether or not in compliance with debt covenants, and other matters important to users of the financial statements, such as the effects of refinancing and noncompliance with debt covenants.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 470<br> -URI http://asc.fasb.org/topic&amp;trid=2208564<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>31
<FILENAME>R20.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796506117512">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Taxes<br></strong></div></th>
<th class="th" colspan="1">6 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxDisclosureAbstract', window );"><strong>Income Taxes</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxDisclosureTextBlock', window );">Income Taxes</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:40.5pt;text-indent:-40.5pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;13.&#160;&#160;Income Taxes </b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Income tax expense was $3.8 million for the three months ended June 30, 2021, compared to $2.3 million for the three months ended June 30, 2020. The $1.5 million increase was primarily due to a $7.2 million increase in pretax income. Income tax expense was $5.6 million during the six months ended June 30, 2021, compared with $3.3<span style="white-space:pre-wrap;"> million for the six months ended June 30, 2020.  The </span>$2.3 million increase was primarily due to a $13.1 million increase in pretax income. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">The effective tax rate for the three and six months ended June 30, 2021 and 2020, respectively, was less than the U.S. statutory rate of 21% due to favorable discrete items related to equity compensation in those periods and Federal research and development tax credits that reduce the annual tax rate.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We had $51.4 million and $57.9 million of net deferred tax assets worldwide relating to net operating loss carryforwards, tax credit carryforwards and other temporary differences, as of June 30, 2021 and December 31, 2020, respectively. These deferred tax assets are available to reduce income taxes in future years. We have a $9.1<span style="white-space:pre-wrap;"> million valuation allowance in the U.S. against certain tax credits and state net operating losses due to the uncertainty of their realization based on long-term Company forecasts and the expiration dates on these tax assets. If future operating results of the Company within the U.S. or these foreign jurisdictions are significantly less than our expectations, it is reasonably possible that we would be required to record an additional valuation allowance on our deferred tax assets in the future.  </span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for income taxes. Disclosures may include net deferred tax liability or asset recognized in an enterprise's statement of financial position, net change during the year in the total valuation allowance, approximate tax effect of each type of temporary difference and carryforward that gives rise to a significant portion of deferred tax liabilities and deferred tax assets, utilization of a tax carryback, and tax uncertainties information.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 21<br> -URI http://asc.fasb.org/extlink&amp;oid=84230637&amp;loc=d3e32857-109319<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB Topic 11.C)<br> -URI http://asc.fasb.org/extlink&amp;oid=116825942&amp;loc=d3e330215-122817<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 17<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=84230637&amp;loc=d3e32809-109319<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB TOPIC 6.I.5.Q1)<br> -URI http://asc.fasb.org/extlink&amp;oid=116825942&amp;loc=d3e330036-122817<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 14<br> -URI http://asc.fasb.org/extlink&amp;oid=84230637&amp;loc=d3e32705-109319<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 270<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6424409&amp;loc=d3e44925-109338<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -URI http://asc.fasb.org/topic&amp;trid=2144680<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 30<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=6424122&amp;loc=d3e41874-109331<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>32
<FILENAME>R21.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796506274072">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Concentration of Risk<br></strong></div></th>
<th class="th" colspan="1">6 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RisksAndUncertaintiesAbstract', window );"><strong>Concentration of Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskDisclosureTextBlock', window );">Concentration of Risk</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;padding-left:40.3pt;text-indent:-40.3pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;14.&#160;&#160;Concentration of Risk</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">For the three months ended June 30, 2021, two customers accounted for 19.7% and 10.2% of total revenue, respectively. For the three months ended June 30, 2020, three customers accounted for 22.5%, 22.2% and 11.6% of total revenue, respectively.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">For the six months ended June 30, 2021, one customer accounted for 24.4% of total revenue. For the <span style="-sec-ix-hidden:Hidden_du9mfOOU5EGSpVFrDPCNpg;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;white-space:pre-wrap;">six months</span></span><span style="white-space:pre-wrap;"> ended </span><span style="-sec-ix-hidden:Hidden_bCiyUD-GJEW9dwOcR7kUFA;"><span style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:normal;text-align:left;white-space:pre-wrap;">June 30, 2020</span></span><span style="white-space:pre-wrap;">, three customers accounted for 19.7%, 18.5% and 16.2% of total revenue, respectively.</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">At June 30, 2021, two customers accounted for 11.7% and 10.0% of accounts receivable, respectively. At December 31, 2020, two customers accounted for 23.8% and 11.9% of accounts receivable, respectively.</p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for any concentrations existing at the date of the financial statements that make an entity vulnerable to a reasonably possible, near-term, severe impact. This disclosure informs financial statement users about the general nature of the risk associated with the concentration, and may indicate the percentage of concentration risk as of the balance sheet date.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -URI http://asc.fasb.org/topic&amp;trid=2134479<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RisksAndUncertaintiesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RisksAndUncertaintiesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>33
<FILENAME>R22.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796507708680">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Share Repurchase<br></strong></div></th>
<th class="th" colspan="1">6 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquityNoteAbstract', window );"><strong>Share Repurchase</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquityNoteDisclosureTextBlock', window );">Share Repurchase</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 15. Share Repurchase</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">In December 2020, our Board of Directors approved stock repurchases of up to $100 million of our common stock through the end of 2021. During the six months ended June 30, 2021, we purchased 0.6 million shares at an average cost of $39.92 per share. The timing and actual number of shares repurchased under this program will depend on various factors including price, corporate and regulatory requirements, alternative investment opportunities and other market conditions. </p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Shares repurchased by us are accounted for when the transaction is settled. Shares repurchased and retired are deducted from common stock for par value and from additional paid-in capital for the excess over par value.&#160;If additional paid-in capital has been exhausted, the excess over par value is deducted from retained earnings. Direct costs incurred to acquire the shares are included in the total cost of the shares. </p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquityNoteAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquityNoteAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquityNoteDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for shareholders' equity comprised of portions attributable to the parent entity and noncontrolling interest, including other comprehensive income. Includes, but is not limited to, balances of common stock, preferred stock, additional paid-in capital, other capital and retained earnings, accumulated balance for each classification of other comprehensive income and amount of comprehensive income.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(e)(1))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -URI http://asc.fasb.org/extlink&amp;oid=120397183&amp;loc=d3e187085-122770<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -URI http://asc.fasb.org/topic&amp;trid=2208762<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquityNoteDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>34
<FILENAME>R23.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796507663480">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Contingencies<br></strong></div></th>
<th class="th" colspan="1">6 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommitmentsAndContingenciesDisclosureAbstract', window );"><strong>Contingencies</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CommitmentsAndContingenciesDisclosureTextBlock', window );">Contingencies</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note&#160;16.&#160;&#160;Contingencies</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(a)&#160;&#160;Litigation</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We are from time to time a party to litigation that arises in the normal course of our business operations. We are not presently a party to any litigation that we believe might have a material adverse effect on our business operations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">(b)&#160;&#160;Indemnifications</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:10.5pt;margin:0pt;"><span style="font-size:10.5pt;visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">Our system sales agreements typically include provisions under which we agree to take certain actions, provide certain remedies and defend our customers against third-party claims of intellectual property infringement under specified conditions and indemnify customers against any damage and costs awarded in connection with such claims. We have not incurred any material costs as a result of such indemnifications and have not accrued any liabilities related to such obligations in the accompanying consolidated financial statements.</p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommitmentsAndContingenciesDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommitmentsAndContingenciesDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CommitmentsAndContingenciesDisclosureTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for commitments and contingencies.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 450<br> -URI http://asc.fasb.org/topic&amp;trid=2127136<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 440<br> -URI http://asc.fasb.org/topic&amp;trid=2144648<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 440<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=121559207&amp;loc=d3e25336-109308<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 440<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121559207&amp;loc=d3e25336-109308<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CommitmentsAndContingenciesDisclosureTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>35
<FILENAME>R24.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796505981240">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Recent Accounting Guidance<br></strong></div></th>
<th class="th" colspan="1">6 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccountingPoliciesAbstract', window );"><strong>Recent Accounting Guidance</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock', window );">Recent Accounting Guidance</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><b style="font-weight:bold;">Note 17.&#160;&#160;Recent Accounting Guidance</b></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:10.5pt;margin:0pt;"><span style="font-size:10.5pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-family:'Times New Roman','Times','serif';font-size:10pt;margin-bottom:0pt;margin-top:0pt;table-layout:fixed;width:100%;border:0pt;"><tr><td style="font-family:'Times New Roman';font-size:10pt;font-weight:bold;text-align:right;vertical-align:text-top;white-space:nowrap;width:18pt;padding:0pt;">i.</td><td style="text-align:right;width:18pt;padding:0pt;"/><td style="padding:0pt;"><b style="font-family:'Times New Roman','Times','serif';font-size:10pt;font-style:normal;font-weight:bold;text-align:left;">Accounting Standards Update 2019-12 Income Taxes (Topic 740) </b></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;">We adopted Financial Accounting Standards Board ASU No. 2019-12 &#8220;<i style="font-style:italic;">Income Taxes (Topic 740)</i>&#8221; as of January 1, 2021 on a prospective basis. The amendments in this ASU simplify the accounting for income taxes by removing certain exceptions from the previous standard as well as requiring entities to include franchise tax partially based on income as an income based tax and to account for an enacted change in tax laws or rates in the annual effective tax rate computation in the interim period that includes the enactment date. The guidance in ASU 2019-12 is required for annual reporting periods beginning after December 15, 2020. Adoption of ASU 2019-12 had no material effect on our consolidated financial statements and disclosures.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountingPoliciesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccountingPoliciesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The entire disclosure for change in accounting principle. Includes, but is not limited to, nature, reason, and method of adopting amendment to accounting standards or other change in accounting principle.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (g)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=113356391&amp;loc=SL49131195-203048<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -URI http://asc.fasb.org/topic&amp;trid=2122394<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (i)<br> -URI http://asc.fasb.org/extlink&amp;oid=113356391&amp;loc=SL49131195-203048<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section S99<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=112272810&amp;loc=SL108384541-122693<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (i)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=113356391&amp;loc=SL49131195-203048<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 40<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (g)(2)(iii)<br> -URI http://asc.fasb.org/extlink&amp;oid=121370832&amp;loc=SL117420844-207641<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (b)(4)<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22499-107794<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 40<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (g)(2)(ii)<br> -URI http://asc.fasb.org/extlink&amp;oid=121370832&amp;loc=SL117420844-207641<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 40<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (g)(2)(i)<br> -URI http://asc.fasb.org/extlink&amp;oid=121370832&amp;loc=SL117420844-207641<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 65<br> -Paragraph 15<br> -Subparagraph (g)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=121322162&amp;loc=SL121327923-165333<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 65<br> -Paragraph 1<br> -Subparagraph (j)<br> -URI http://asc.fasb.org/extlink&amp;oid=113356391&amp;loc=SL49131195-203048<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 40<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (g)(2)(iv)<br> -URI http://asc.fasb.org/extlink&amp;oid=121370832&amp;loc=SL117420844-207641<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 926<br> -SubTopic 20<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (f)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=120154821&amp;loc=SL120154904-197079<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section S99<br> -Paragraph 5<br> -Subparagraph (SAB Topic 11.M.Q2)<br> -URI http://asc.fasb.org/extlink&amp;oid=112272810&amp;loc=d3e31137-122693<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 926<br> -SubTopic 20<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (f)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=120154821&amp;loc=SL120154904-197079<br><br>Reference 16: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22499-107794<br><br>Reference 17: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 926<br> -SubTopic 20<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (f)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=120154821&amp;loc=SL120154904-197079<br><br>Reference 18: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 10<br> -Section 65<br> -Paragraph 4<br> -Subparagraph (e)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=121646688&amp;loc=SL121648383-210437<br><br>Reference 19: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (c)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22499-107794<br><br>Reference 20: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 40<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (h)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=121370832&amp;loc=SL117420844-207641<br><br>Reference 21: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 10<br> -Section 65<br> -Paragraph 4<br> -Subparagraph (e)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=121646688&amp;loc=SL121648383-210437<br><br>Reference 22: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (b)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22499-107794<br><br>Reference 23: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 65<br> -Paragraph 8<br> -Subparagraph (e)(1)<br><br>Reference 24: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 65<br> -Paragraph 8<br> -Subparagraph (e)(2)<br><br>Reference 25: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 65<br> -Paragraph 8<br> -Subparagraph (e)(3)<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>36
<FILENAME>R25.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796506165144">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Leases (Tables)<br></strong></div></th>
<th class="th" colspan="1">6 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LeasesAbstract', window );"><strong>Leases</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_LeaseBalanceSheetDisclosureTableTextBlock', window );">Schedule of operating and finance lease right-of-use assets and related lease obligations</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:10.8%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;width:2.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:54.32%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Leases</b></p></td><td style="vertical-align:bottom;width:20.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Classification</b></p></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.8%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Assets</b></p></td><td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:22.98%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_W9KnNs_BPUCoZMTZ8ue8sA;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;text-align:left;">Operating leases</span></span></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating lease assets</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 7,626</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 4,542</p></td></tr><tr><td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_A9wG4K0J4UKHRE76HpHnMg;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;text-align:left;">Finance lease</span></span></p></td><td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance lease assets *</p></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 19,889</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 20,544</p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Total leased assets</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.56%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 27,515</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.63%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 25,086</p></td></tr><tr><td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Liabilities</b></p></td><td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Current</b></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_7xdEmmVR-kiGHLFbeFZHxw;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;text-align:left;">Operating</span></span></p></td><td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Other current liabilities</p></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 3,215</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 2,573</p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_Cv0WhFSvyEe6gpVSxXkYow;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;text-align:left;">Finance</span></span></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Current portion of finance lease obligation</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 864</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 756</p></td></tr><tr><td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Noncurrent</b></p></td><td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_dHd0m_i_ckaUDDKTbKPNiA;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;text-align:left;">Operating </span></span></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Other long-term liabilities</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 4,398</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,949</p></td></tr><tr><td style="vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_4JxT6-VdKkyC-ozm6pXPvg;"><span style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:normal;text-align:left;">Finance </span></span></p></td><td style="vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance lease obligation</p></td><td style="vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 46,923</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 47,393</p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="-sec-ix-hidden:Hidden_EFu-sVp3nUiwnTcDpuJATQ;"><b style="font-family:'Times New Roman','Times','serif';font-size:8pt;font-style:normal;font-weight:bold;text-align:left;">Total lease liabilities</b></span></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.56%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 55,400</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.63%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 52,671</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:54.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:20.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td colspan="8" style="vertical-align:top;width:100%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">* Finance lease assets are recorded net of accumulated depreciation of $48.9 million and include $0.7 million of prepaid financing costs as of June 30, 2021. Finance lease assets are recorded net of accumulated depreciation of $48.4 million and include $0.7<span style="color:#ff0000;"> </span>million of prepaid financing costs as of December 31, 2020. <br/><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LeaseCostTableTextBlock', window );">Schedule of lease costs</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;line-height:1.07;margin:0pt 0pt 0pt 36pt;"><span style="font-size:5pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:17.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Three months ended  </b></p></td><td style="vertical-align:bottom;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:14.42%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:17.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:14.42%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:39.69%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><b style="font-weight:bold;">Lease cost</b></p></td><td style="vertical-align:bottom;width:22.36%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Classification</b></p></td><td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.18%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="16" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Operating lease cost</b></p></td><td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:33.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Service</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Cost of revenue</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 644</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 624</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,283</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,174</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Research and development</p></td><td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating expenses</p></td><td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 122</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 128</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 252</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 209</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Sales and marketing*</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating expenses</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 376</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 346</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 755</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 678</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">General and administrative*</p></td><td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating expenses</p></td><td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 201</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 220</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 461</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 435</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Total operating lease cost</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.52%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,343</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,318</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 2,751</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 2,496</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Finance lease cost</b></p></td><td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Depreciation of leased assets</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Cost of revenue, R&amp;D, Sales and marketing and G&amp;A</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 328</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 328</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 656</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 681</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Interest on lease liabilities</p></td><td style="vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Interest expense</p></td><td style="vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,274</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,299</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 2,553</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 2,602</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Total finance lease cost</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 18pt;"><span style="font-size:8pt;margin-left:0pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.52%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,602</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,627</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 3,209</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 3,283</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.52%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Total lease cost</b></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.66%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.52%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 2,945</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.5%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 2,945</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 5,960</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:0.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.46%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 5,779</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:39.69%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:22.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.52%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.62%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:0.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td colspan="14" style="vertical-align:bottom;width:97%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">* Sales and marketing and general and administrative expense also includes short-term lease and variable lease costs of approximately $0.4 million and $0.9 million for the three and six months ended June 30, 2021, respectively, and includes short-term and variable lease costs of approximately $0.3 million and $0.5 million for the three and six months ended June 30, 2020, respectively.</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock', window );">Schedule of future minimum operating and finance leases</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Finance</b></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Operating</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">&#160;</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:64.87%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;"><b style="font-weight:bold;">Maturity of Lease Liabilities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Leases</b></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Leases</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Leases</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">2021</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 2,929</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,827</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 4,756</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">2022</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 5,980</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 3,053</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 9,033</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">2023</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 6,114</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,544</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 7,658</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">2024</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 6,252</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 794</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 7,046</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">2025</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 5,930</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 712</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 6,642</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Thereafter</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 73,723</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 545</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 74,268</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Total lease payments</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 100,928</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 8,475</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 109,403</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Less interest portion*</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (53,141)</p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (862)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;"> (54,003)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance lease and operating lease obligations</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 47,787</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 7,613</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.06%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 55,400</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:64.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td colspan="10" style="vertical-align:bottom;width:98.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">* Finance lease interest calculated using the implied interest rate; operating lease interest calculated using estimated corporate borrowing rate.</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_LeaseQuantitativeDisclosureTableTextBlock', window );">Schedule of weighted-average remaining lease term and discount rates</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:14.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><b style="font-weight:bold;">Lease term and discount rate</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:14.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Weighted-average remaining lease term (years):</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating leases</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;">3.0</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;">15.6</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Weighted-average discount rate:</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">4.5%</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance leases</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;">10.5%</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:81.56%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_LeaseCashFlowInformationDisclosureTableTextBlock', window );">Schedule of cash outflows by lease type</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;min-height:0.0pt;margin:0pt;"><span style="font-size:0pt;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:26.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:26.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><b style="font-weight:bold;">Cash paid for amounts included in the measurement of lease liabilities</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.91%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:26.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating cash outflows from operating leases</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 2,751</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 2,496</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating cash outflows from finance leases</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 2,556</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 2,746</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Financing cash outflows from finance leases</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 362</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 108</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Operating lease assets obtained in exchange for operating lease liabilities</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 4,192</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> 1,038</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">Finance lease assets obtained in exchange for new finance lease liabilities</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:right;margin:0pt 2.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:69.68%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.57%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';font-size:11pt;visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_LeaseBalanceSheetDisclosureTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The tabular disclosure of lease balance sheet.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_LeaseBalanceSheetDisclosureTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_LeaseCashFlowInformationDisclosureTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The tabular disclosure of lease cash flow information.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_LeaseCashFlowInformationDisclosureTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_LeaseQuantitativeDisclosureTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The tabular disclosure of lease quantitative information.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_LeaseQuantitativeDisclosureTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of undiscounted cash flows of lessee's operating lease liability and finance lease liability.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LeaseCostTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of lessee's lease cost. Includes, but is not limited to, interest expense for finance lease, amortization of right-of-use asset for finance lease, operating lease cost, short-term lease cost, variable lease cost and sublease income.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918686-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LeaseCostTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LeasesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LeasesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>37
<FILENAME>R26.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796508277736">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Revenue (Tables)<br></strong></div></th>
<th class="th" colspan="1">6 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerAbstract', window );"><strong>Revenue.</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_RevenueFromExternalCustomersByDisciplineAreasTableTextBlock', window );">Schedule of revenue by discipline</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100.52%;"><tr style="height:1pt;"><td style="vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:10.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:3.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:24.21%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Three months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:27.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:24.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:27.45%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.4%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.68%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:53.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Systems</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">100,138 </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">76,815 </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">181,129 </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">159,152 </p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Aftermarket</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 47,136</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 46,150</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:10.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 98,921</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:3.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 82,804</p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:45.41%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Total Revenue</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.23%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">147,274 </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">122,965 </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:10.16%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">280,050 </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:3.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">241,956 </p></td></tr></table><span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueFromExternalCustomersByGeographicAreasTableTextBlock', window );">Schedule of revenue by geographic markets</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:22.63%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Three months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:21.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:22.63%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:21.8%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.25%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.23%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:45.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">North America </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">10,204</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">8,915</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">19,712</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">19,576</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Asia Pacific</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">116,642</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">106,604</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">220,033</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">203,432</p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Europe</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">20,428</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">7,446</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">40,305</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">18,948</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:52.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Total Revenue</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.32%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">147,274</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">122,965</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">280,050</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.93%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">241,956</p></td></tr></table><span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock', window );">Schedule of Contract liabilities</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:69.36%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.85%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:11.85%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:69.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.17%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td></tr><tr><td style="vertical-align:bottom;width:69.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:13.17%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:69.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:28.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:69.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Contract liabilities</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:11.85%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 35,518</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.31%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:11.85%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 23,058</p></td></tr><tr><td style="vertical-align:bottom;width:69.36%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.31%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:11.85%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="display:inline-block;text-indent:0pt;width:36pt;"/>Contract liabilities are reflected as deferred revenue on the consolidated balance sheet and relate to payments invoiced or received in advance of completion of performance obligations under a contract. Contract liabilities are recognized as revenue upon the fulfillment of performance obligations.</p><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="display:inline-block;text-indent:0pt;width:36pt;"/><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.64%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:17.46%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Three months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:17.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:17.46%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="font-family:'Calibri','Helvetica','sans-serif';">&#160;&#160;&#160;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:17.8%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.14%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.16%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.53%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:8.1%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="13" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:36.5%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance, beginning of the period</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 22,142</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 34,106</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 23,058</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 29,251</p></td></tr><tr><td style="vertical-align:bottom;width:62.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">    Deferral of revenue</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 21,893</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 6,248</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.64%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 30,117</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 10,724</p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:62.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">    Recognition of deferred revenue</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (8,517)</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (9,937)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.64%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (17,657)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.2%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (9,558)</p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:62.33%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance, end of the period</p></td><td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.88%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.26%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 35,518</p></td><td style="vertical-align:bottom;width:1.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.89%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.27%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 30,417</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.89%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.64%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 35,518</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.89%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.2%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 30,417</p></td></tr></table><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_RevenueFromExternalCustomersByDisciplineAreasTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of revenue from external customers by discipline areas attributed to the entity's country of domicile and to foreign countries from which the entity derives revenue.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_RevenueFromExternalCustomersByDisciplineAreasTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of receivable, contract asset, and contract liability from contract with customer. Includes, but is not limited to, change in contract asset and contract liability.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=121604090&amp;loc=SL49130551-203045<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueFromContractWithCustomerAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueFromContractWithCustomerAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueFromExternalCustomersByGeographicAreasTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of revenue from external customers by geographic areas attributed to the entity's country of domicile and to foreign countries from which the entity derives revenue.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 41<br> -Subparagraph a<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e9038-108599<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueFromExternalCustomersByGeographicAreasTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>38
<FILENAME>R27.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796505138456">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Receivable and Allowance for Credit Losses (Tables)<br></strong></div></th>
<th class="th" colspan="1">6 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccountsReceivableNetAbstract', window );"><strong>Receivable and Allowance for Credit Losses</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccountsReceivableAllowanceForCreditLossTableTextBlock', window );">Schedule of allowances for credit losses related to trade receivables</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:justify;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:57.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:1.91%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;width:1.09%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:57.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Three months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:18.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td><td style="vertical-align:bottom;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:57.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:18.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:18.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:57.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:8.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:8.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:8.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:8.89%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="14" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:57.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:1.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:38.87%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:57.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance, beginning of period</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 818</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:57.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">    Provision for credit losses</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:57.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">    Charge-offs</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"> (818)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:57.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">    Recoveries</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:57.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance, end of period</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.91%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.09%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.76%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountsReceivableAllowanceForCreditLossTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of allowance for credit loss on accounts receivable.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 20<br> -Section 50<br> -Paragraph 13<br> -URI http://asc.fasb.org/extlink&amp;oid=121599337&amp;loc=SL82919249-210447<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccountsReceivableAllowanceForCreditLossTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountsReceivableNetAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccountsReceivableNetAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>39
<FILENAME>R28.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796524400760">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Computation of Net Earnings per Share (Tables)<br></strong></div></th>
<th class="th" colspan="1">6 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareAbstract', window );"><strong>Computation of Net Earnings per Share</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock', window );">Schedule of components of net income per share</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.44%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:16.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;white-space:pre-wrap;">Three months ended  </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:17.06%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:16.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:17.06%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.57%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.71%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.73%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="14" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;width:35.58%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands, except per share amounts) </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Net income available to common stockholders</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 18,906</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 13,302</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 35,386</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 24,523</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Weighted average common shares outstanding used in computing basic income per share</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 33,677</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 33,116</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 33,696</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 32,998</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Incremental options and RSUs</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 634</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 842</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 777</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.44%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1,025</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Weighted average common shares used in computing diluted net income per share</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 34,311</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 33,958</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 34,473</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 34,023</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Net income per share</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.14%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.44%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Basic</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 0.56</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 0.40</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1.05</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 0.74</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:61.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Diluted</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.14%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 0.55</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 0.39</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.28%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.43%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 1.03</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.29%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.44%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 0.72</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of an entity's basic and diluted earnings per share calculations, including a reconciliation of numerators and denominators of the basic and diluted per-share computations for income from continuing operations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>40
<FILENAME>R29.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796505995128">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Accumulated Other Comprehensive Income (Tables)<br></strong></div></th>
<th class="th" colspan="1">6 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTaxAbstract', window );"><strong>Accumulated Other Comprehensive Income</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock', window );">Schedule of changes in accumulated other comprehensive loss, net of tax</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:36pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.13%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.9%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.59%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.88%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.38%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Foreign</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Defined&#160;benefit</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:6.38%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">currency</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">pension&#160;plan</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="11" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="8" style="vertical-align:bottom;white-space:nowrap;width:31.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance at December 31, 2020</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,945</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.9%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (510)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.59%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.88%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,435</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Other comprehensive loss and pension reclassification</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.24%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (820)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.9%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 54</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.59%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.88%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (766)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:65.53%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance at June 30, 2021</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.24%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.13%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,125</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.99%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.9%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (456)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.59%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.88%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 2,669</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.08%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTaxAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTaxAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the components of accumulated other comprehensive income (loss).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 830<br> -SubTopic 30<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6450520&amp;loc=d3e32583-110901<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14A<br> -URI http://asc.fasb.org/extlink&amp;oid=121641772&amp;loc=SL7669686-108580<br><br>Reference 3: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 830<br> -SubTopic 30<br> -Section 45<br> -Paragraph 20<br> -URI http://asc.fasb.org/extlink&amp;oid=118261656&amp;loc=d3e32211-110900<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>41
<FILENAME>R30.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796506204760">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Cash, cash equivalents and restricted cash (Tables)<br></strong></div></th>
<th class="th" colspan="1">6 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_CashCashEquivalentsAndRestrictedCashAbstract', window );"><strong>Cash, cash equivalents and restricted cash</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_CashCashEquivalentsAndRestrictedCashTableTextBlock', window );">Schedule of reconciliation of cash, cash equivalents and restricted cash</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-weight:bold;visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:15.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:15.39%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:18.13%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:18.15%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;width:18.13%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;width:15.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="7" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:38.45%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Cash and cash equivalents</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:15.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">219,731 </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.75%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:15.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">203,479 </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Long-term restricted cash</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:15.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">755 </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:15.39%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">753 </p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:60.34%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Total cash, cash equivalents and restricted cash</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:15.37%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">220,486 </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.16%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.75%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:15.39%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;">204,232 </p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.19%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_CashCashEquivalentsAndRestrictedCashAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>N/A</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_CashCashEquivalentsAndRestrictedCashAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_CashCashEquivalentsAndRestrictedCashTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure for cash, cash equivalents and restricted cash.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_CashCashEquivalentsAndRestrictedCashTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>42
<FILENAME>R31.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796506318632">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Inventories, net (Tables)<br></strong></div></th>
<th class="th" colspan="1">6 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryDisclosureAbstract', window );"><strong>Inventories, net</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfInventoryCurrentTableTextBlock', window );">Schedule of components of inventories</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.49%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:11.12%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.49%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;white-space:nowrap;width:22.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Raw materials</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 109,795</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 100,254</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Work in process</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 40,233</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 33,867</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Finished goods (completed systems)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.74%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 42,293</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:8.12%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 26,955</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:72.66%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;"><span style="white-space:pre-wrap;">      Inventories, net</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.74%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 192,321</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.24%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.37%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="vertical-align:bottom;white-space:nowrap;width:8.12%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 161,076</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.22%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfInventoryCurrentTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the carrying amount as of the balance sheet date of merchandise, goods, commodities, or supplies held for future sale or to be used in manufacturing, servicing or production process.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(6)(c))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(6)(b))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(6)(a))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6361739&amp;loc=d3e7789-107766<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfInventoryCurrentTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>43
<FILENAME>R32.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796507708680">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Product Warranty (Tables)<br></strong></div></th>
<th class="th" colspan="1">6 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProductWarrantiesDisclosuresAbstract', window );"><strong>Product Warranty</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock', window );">Schedule of product warranty liability</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:17.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Six months ended </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:17.43%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, </b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.51%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="8" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="5" style="vertical-align:bottom;width:17.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance at January&#160;1 (beginning of year)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 4,612</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,244</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Warranties issued during the period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,013</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 2,635</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Settlements made during the period</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (1,991)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (1,913)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Changes in estimate of liability for pre-existing warranties during the period</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;"> (372)</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 177</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">Balance at June 30 (end of period)</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 5,262</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 4,143</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Amount classified as current</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 4,690</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 3,942</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 12pt;">Amount classified as long-term </p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 572</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt;">&#160;</p></td><td style="vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 201</p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:77.78%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt 0pt 0pt 18pt;">Total warranty liability</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 5,262</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.39%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:9pt;visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.47%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:6.03%;border-bottom:3px double #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:9pt;text-align:right;margin:0pt 3pt 0pt 0pt;"> 4,143</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.37%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantiesDisclosuresAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantiesDisclosuresAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of the changes in the guarantor's aggregate product warranty liability, including the beginning balance of the aggregate product warranty liability, the aggregate reductions in that liability for payments made (in cash or in kind) under the warranty, the aggregate changes in the liability for accruals related to product warranties issued during the reporting period, the aggregate changes in the liability for accruals related to preexisting warranties (including adjustments related to changes in estimates), and the ending balance of the aggregate product warranty liability.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=68068213&amp;loc=d3e12565-110249<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>44
<FILENAME>R33.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796507651528">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Fair Value Measurements (Tables)<br></strong></div></th>
<th class="th" colspan="1">6 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FairValueDisclosuresAbstract', window );"><strong>Fair Value Measurements</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock', window );">Schedule of Company's assets and liabilities by level within the fair value hierarchy</a></td>
<td class="text"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-indent:24.5pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">June 30, 2021</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value&#160;Measurements</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;1</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;2</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;3</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="14" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Assets</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash equivalents:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Money market funds, U.S. Government Securities and Agency Investments</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 190,731</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 190,731</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><table style="border-collapse:collapse;font-size:16pt;height:max-content;margin-left:auto;margin-right:auto;padding-left:0pt;padding-right:0pt;width:100%;"><tr style="height:1pt;"><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><div style="height:1pt;overflow:hidden;overflow-wrap:break-word;position:relative;"><div style="bottom:0pt;position:absolute;width:100%;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:1pt;visibility:hidden;">&#8203;</span></p></div></div></td></tr><tr><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">December 31, 2020</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.26%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Fair&#160;Value&#160;Measurements</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.15%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;1</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:10.83%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;2</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:7.27%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Level&#160;3</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;&#160;&#160;&#160;</b></p></td><td colspan="2" style="vertical-align:bottom;white-space:nowrap;width:9.21%;border-bottom:1px solid #000000;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">Total</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr style="height:0pt;visibility:hidden;"><td colspan="14" style="padding:0pt;"/></tr><tr><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:center;margin:0pt;"><span style="font-size:8pt;font-weight:bold;visibility:hidden;">&#8203;</span></p></td><td colspan="11" style="vertical-align:bottom;white-space:nowrap;width:42.26%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">(in&#160;thousands)</b></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:8pt;text-align:center;margin:0pt;"><b style="font-weight:bold;">&#160;</b></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Assets</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">Cash equivalents:</p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr><tr><td style="background-color:#cceeff;vertical-align:bottom;width:54.89%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt 0pt 0pt 12pt;">Money market funds, U.S. Government Securities and Agency Investments</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.74%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 172,119</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:9.43%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:2.54%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:5.86%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> &#8212;</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.61%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.4%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;">$</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:7.8%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;text-align:right;margin:0pt 3.5pt 0pt 0pt;"> 172,119</p></td><td style="background-color:#cceeff;vertical-align:bottom;white-space:nowrap;width:1.23%;margin:0pt;padding:0pt;"><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p></td></tr></table><p style="font-family:'Times New Roman','Times','serif';font-size:10pt;margin:0pt;"><span style="visibility:hidden;">&#8203;</span></p><span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FairValueDisclosuresAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FairValueDisclosuresAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Tabular disclosure of assets and liabilities, including [financial] instruments measured at fair value that are classified in stockholders' equity, if any, that are measured at fair value on a recurring basis. The disclosures contemplated herein include the fair value measurements at the reporting date by the level within the fair value hierarchy in which the fair value measurements in their entirety fall, segregating fair value measurements using quoted prices in active markets for identical assets (Level 1), significant other observable inputs (Level 2), and significant unobservable inputs (Level 3).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 820<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=117815213&amp;loc=d3e19207-110258<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 820<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=117815213&amp;loc=d3e19207-110258<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>nonnum:textBlockItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>45
<FILENAME>R34.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796511765592">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Stock-Based Compensation (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="4">3 Months Ended</th>
<th class="th" colspan="2">6 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Mar. 31, 2021</div></th>
<th class="th"><div>Jun. 30, 2020</div></th>
<th class="th"><div>Mar. 31, 2020</div></th>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Jun. 30, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Stock-Based Compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AllocatedShareBasedCompensationExpense', window );">Stock-based compensation expense</a></td>
<td class="nump">$ 3,400<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 3,100<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 5,800<span></span>
</td>
<td class="nump">$ 4,800<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProceedsFromStockOptionsExercised', window );">Proceeds from exercise of stock options</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 3,075<span></span>
</td>
<td class="nump">$ 7,282<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementEquityComponentsAxis=us-gaap_CommonStockMember', window );">Common Stock</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Stock-Based Compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised', window );">Exercise of stock options (in shares)</a></td>
<td class="nump">72,000<span></span>
</td>
<td class="nump">268,000<span></span>
</td>
<td class="nump">343,000<span></span>
</td>
<td class="nump">540,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementEquityComponentsAxis=us-gaap_CommonStockMember', window );">Common Stock | 2020 Employee stock purchase plan</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Stock-Based Compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised', window );">Exercise of stock options (in shares)</a></td>
<td class="nump">300,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">600,000<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">700,000<span></span>
</td>
<td class="nump">1,200,000<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProceedsFromStockOptionsExercised', window );">Proceeds from exercise of stock options</a></td>
<td class="nump">$ 1,100<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 3,300<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 3,600<span></span>
</td>
<td class="nump">$ 7,800<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PlanNameAxis=acls_StockPlan2000Member', window );">2000 Stock Plan</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Stock-Based Compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardGrantsInPeriodGross', window );">Awards granted (in shares)</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PlanNameAxis=acls_StockPlan2000Member', window );">2000 Stock Plan | Stock Options</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems', window );"><strong>Stock-Based Compensation</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod', window );">Options Expiration period</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">10 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardGrantsInPeriodGross">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Represents the number of awards granted in an equity based compensation plan.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardGrantsInPeriodGross</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AllocatedShareBasedCompensationExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of expense for award under share-based payment arrangement. Excludes amount capitalized.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5047-113901<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 14.F)<br> -URI http://asc.fasb.org/extlink&amp;oid=115993241&amp;loc=d3e301413-122809<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (h)(1)(i)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AllocatedShareBasedCompensationExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromStockOptionsExercised">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cash inflow from exercise of option under share-based payment arrangement.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2A<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=SL79508275-113901<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121586364&amp;loc=d3e3255-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromStockOptionsExercised</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Period from grant date that an equity-based award expires, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (a)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of share options (or share units) exercised during the current period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 718<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)(1)(iv)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=120381028&amp;loc=d3e5070-113901<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -URI http://asc.fasb.org/extlink&amp;oid=120397183&amp;loc=d3e187085-122770<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(28))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=109259400&amp;loc=d3e21463-112644<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementEquityComponentsAxis=us-gaap_CommonStockMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementEquityComponentsAxis=us-gaap_CommonStockMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AwardTypeAxis=us-gaap_EmployeeStockMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AwardTypeAxis=us-gaap_EmployeeStockMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PlanNameAxis=acls_StockPlan2000Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PlanNameAxis=acls_StockPlan2000Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AwardTypeAxis=acls_StockOptionAwardsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AwardTypeAxis=acls_StockOptionAwardsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>46
<FILENAME>R35.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796506061512">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Leases (Details)<br></strong></div></th>
<th class="th" colspan="1">6 Months Ended</th>
</tr>
<tr><th class="th"><div>Jun. 30, 2021</div></th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LesseeLeaseDescriptionLineItems', window );"><strong>Lessee, Lease, Description [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend', window );">Option to extend</a></td>
<td class="text">true<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_RangeAxis=srt_MinimumMember', window );">Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LesseeLeaseDescriptionLineItems', window );"><strong>Lessee, Lease, Description [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseRenewalTerm', window );">Renewal term</a></td>
<td class="text">1 year<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_RangeAxis=srt_MaximumMember', window );">Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LesseeLeaseDescriptionLineItems', window );"><strong>Lessee, Lease, Description [Line Items]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseRenewalTerm', window );">Renewal term</a></td>
<td class="text">3 years<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeLeaseDescriptionLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeLeaseDescriptionLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicates (true false) whether lessee has option to extend operating lease.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (a)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918673-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseRenewalTerm">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Term of lessee's operating lease renewal, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (a)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918673-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseRenewalTerm</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MinimumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MinimumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>47
<FILENAME>R36.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796515648040">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Leases - Operating and Finance Lease Right-of-use-assets and Related Lease Obligations (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LeasesAbstract', window );"><strong>Leases</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeaseRightOfUseAsset', window );">Operating lease assets</a></td>
<td class="nump">$ 7,626<span></span>
</td>
<td class="nump">$ 4,542<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList', window );">Operating Lease, Right-of-Use Asset, Statement of Financial Position [Extensible List]</a></td>
<td class="text">Operating lease assets<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FinanceLeaseRightOfUseAsset', window );">Finance lease assets</a></td>
<td class="nump">$ 19,889<span></span>
</td>
<td class="nump">20,544<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FinanceLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList', window );">Finance Lease, Right-of-Use Asset, Statement of Financial Position [Extensible List]</a></td>
<td class="text">Finance lease assets<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_OperatingAndFinanceLeaseRightOfUseAsset', window );">Total leased assets</a></td>
<td class="nump">$ 27,515<span></span>
</td>
<td class="nump">25,086<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiabilityCurrent', window );">Operating liabilities current</a></td>
<td class="nump">$ 3,215<span></span>
</td>
<td class="nump">$ 2,573<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList', window );">Operating Lease, Liability, Current, Statement of Financial Position [Extensible List]</a></td>
<td class="text">Other Liabilities, Current<span></span>
</td>
<td class="text">Other Liabilities, Current<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilityCurrent', window );">Finance liabilities current</a></td>
<td class="nump">$ 864<span></span>
</td>
<td class="nump">$ 756<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList', window );">Finance Lease, Liability, Current, Statement of Financial Position [Extensible List]</a></td>
<td class="text">Other Liabilities, Current<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiabilityNoncurrent', window );">Operating liabilities noncurrent</a></td>
<td class="nump">$ 4,398<span></span>
</td>
<td class="nump">$ 1,949<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList', window );">Operating Lease, Liability, Noncurrent, Statement of Financial Position [Extensible List]</a></td>
<td class="text">Other Liabilities, Noncurrent<span></span>
</td>
<td class="text">Other Liabilities, Noncurrent<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilityNoncurrent', window );">Finance liabilities noncurrent</a></td>
<td class="nump">$ 46,923<span></span>
</td>
<td class="nump">$ 47,393<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList', window );">Finance Lease, Liability, Noncurrent, Statement of Financial Position [Extensible List]</a></td>
<td class="text">Finance liabilities noncurrent<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_OperatingAndFinanceLeaseLiability', window );">Total lease liabilities</a></td>
<td class="nump">$ 55,400<span></span>
</td>
<td class="nump">52,671<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList', window );">Operating Lease, Liability, Statement of Financial Position [Extensible List]</a></td>
<td class="text">us-gaap:OtherLiabilitiesCurrent us-gaap:OtherLiabilitiesNoncurrent<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_FinanceLeaseAccumulatedDepreciation', window );">Finance lease, accumulated depreciation</a></td>
<td class="nump">$ 48,900<span></span>
</td>
<td class="nump">48,400<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PrepaidRent', window );">Prepaid financing costs</a></td>
<td class="nump">$ 700<span></span>
</td>
<td class="nump">$ 700<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_FinanceLeaseAccumulatedDepreciation">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cumulative amount of depreciation of finance leased assets.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_FinanceLeaseAccumulatedDepreciation</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_OperatingAndFinanceLeaseLiability">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from operating and finance lease.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_OperatingAndFinanceLeaseLiability</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_OperatingAndFinanceLeaseRightOfUseAsset">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's right to use underlying asset under operating and finance lease.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_OperatingAndFinanceLeaseRightOfUseAsset</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseLiabilityCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from finance lease, classified as current.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=121603541&amp;loc=SL77918627-209977<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseLiabilityCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicates line item in statement of financial position that includes current finance lease liability.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=121603541&amp;loc=SL77918631-209977<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>srt-types:extensibleListItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseLiabilityNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from finance lease, classified as noncurrent.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=121603541&amp;loc=SL77918627-209977<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseLiabilityNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicates line item in statement of financial position that includes noncurrent finance lease liability.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=121603541&amp;loc=SL77918631-209977<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>srt-types:extensibleListItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseRightOfUseAsset">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount, after accumulated amortization, of right-of-use asset from finance lease.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121603541&amp;loc=SL77918627-209977<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseRightOfUseAsset</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicates line item in statement of financial position that includes finance lease right-of-use asset.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=121603541&amp;loc=SL77918631-209977<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>srt-types:extensibleListItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LeasesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LeasesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseLiabilityCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from operating lease, classified as current.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=121603541&amp;loc=SL77918627-209977<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseLiabilityCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicates line item in statement of financial position that includes current operating lease liability.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=121603541&amp;loc=SL77918631-209977<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>srt-types:extensibleListItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseLiabilityNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from operating lease, classified as noncurrent.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=121603541&amp;loc=SL77918627-209977<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseLiabilityNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicates line item in statement of financial position that includes noncurrent operating lease liability.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=121603541&amp;loc=SL77918631-209977<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>srt-types:extensibleListItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicates line item in statement of financial position that includes operating lease liability.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=121603541&amp;loc=SL77918631-209977<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>srt-types:extensibleListItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseRightOfUseAsset">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's right to use underlying asset under operating lease.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121603541&amp;loc=SL77918627-209977<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseRightOfUseAsset</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Indicates line item in statement of financial position that includes operating lease right-of-use asset.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=121603541&amp;loc=SL77918631-209977<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>srt-types:extensibleListItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PrepaidRent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of asset related to consideration paid in advance for rent that provides economic benefits within a future period of one year or the normal operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 340<br> -SubTopic 10<br> -Section 05<br> -Paragraph 5<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=68074540&amp;loc=d3e5879-108316<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=121566466&amp;loc=d3e6787-107765<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (g)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=121566466&amp;loc=d3e6676-107765<br><br>Reference 4: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 340<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6387103&amp;loc=d3e6435-108320<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PrepaidRent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>48
<FILENAME>R37.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796508208552">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Leases - Lease Cost (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="2">3 Months Ended</th>
<th class="th" colspan="2">6 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Jun. 30, 2020</div></th>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Jun. 30, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LeaseCostAbstract', window );"><strong>Lease cost</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeaseCost', window );">Total operating lease cost</a></td>
<td class="nump">$ 1,343<span></span>
</td>
<td class="nump">$ 1,318<span></span>
</td>
<td class="nump">$ 2,751<span></span>
</td>
<td class="nump">$ 2,496<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FinanceLeaseRightOfUseAssetAmortization', window );">Depreciation of leased assets</a></td>
<td class="nump">328<span></span>
</td>
<td class="nump">328<span></span>
</td>
<td class="nump">656<span></span>
</td>
<td class="nump">681<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FinanceLeaseInterestExpense', window );">Interest on lease liabilities</a></td>
<td class="nump">1,274<span></span>
</td>
<td class="nump">1,299<span></span>
</td>
<td class="nump">2,553<span></span>
</td>
<td class="nump">2,602<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_FinanceLeaseCost', window );">Total finance lease cost</a></td>
<td class="nump">1,602<span></span>
</td>
<td class="nump">1,627<span></span>
</td>
<td class="nump">3,209<span></span>
</td>
<td class="nump">3,283<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LeaseCost', window );">Total lease cost</a></td>
<td class="nump">2,945<span></span>
</td>
<td class="nump">2,945<span></span>
</td>
<td class="nump">5,960<span></span>
</td>
<td class="nump">5,779<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_ShortTermAndVariableLeaseCost', window );">Short-term lease and variable lease costs</a></td>
<td class="nump">400<span></span>
</td>
<td class="nump">300<span></span>
</td>
<td class="nump">900<span></span>
</td>
<td class="nump">500<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeStatementLocationAxis=us-gaap_ServiceMember', window );">Service</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LeaseCostAbstract', window );"><strong>Lease cost</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeaseCost', window );">Total operating lease cost</a></td>
<td class="nump">644<span></span>
</td>
<td class="nump">624<span></span>
</td>
<td class="nump">1,283<span></span>
</td>
<td class="nump">1,174<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeStatementLocationAxis=us-gaap_ResearchAndDevelopmentExpenseMember', window );">Research and development</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LeaseCostAbstract', window );"><strong>Lease cost</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeaseCost', window );">Total operating lease cost</a></td>
<td class="nump">122<span></span>
</td>
<td class="nump">128<span></span>
</td>
<td class="nump">252<span></span>
</td>
<td class="nump">209<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeStatementLocationAxis=us-gaap_SellingAndMarketingExpenseMember', window );">Sales and marketing*</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LeaseCostAbstract', window );"><strong>Lease cost</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeaseCost', window );">Total operating lease cost</a></td>
<td class="nump">376<span></span>
</td>
<td class="nump">346<span></span>
</td>
<td class="nump">755<span></span>
</td>
<td class="nump">678<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeStatementLocationAxis=us-gaap_GeneralAndAdministrativeExpenseMember', window );">General and administrative*</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LeaseCostAbstract', window );"><strong>Lease cost</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeaseCost', window );">Total operating lease cost</a></td>
<td class="nump">$ 201<span></span>
</td>
<td class="nump">$ 220<span></span>
</td>
<td class="nump">$ 461<span></span>
</td>
<td class="nump">$ 435<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_FinanceLeaseCost">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of finance lease cost recognized by lessee for lease contract.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_FinanceLeaseCost</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_ShortTermAndVariableLeaseCost">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of short-term and variable lease cost.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_ShortTermAndVariableLeaseCost</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseInterestExpense">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of interest expense on finance lease liability.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918686-209980<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 4<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121603541&amp;loc=SL77918638-209977<br><br>Reference 3: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 55<br> -Paragraph 53<br> -URI http://asc.fasb.org/extlink&amp;oid=121568110&amp;loc=SL77918982-209971<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseInterestExpense</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseRightOfUseAssetAmortization">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of amortization expense attributable to right-of-use asset from finance lease.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918686-209980<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 4<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121603541&amp;loc=SL77918638-209977<br><br>Reference 3: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 55<br> -Paragraph 53<br> -URI http://asc.fasb.org/extlink&amp;oid=121568110&amp;loc=SL77918982-209971<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseRightOfUseAssetAmortization</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LeaseCost">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lease cost recognized by lessee for lease contract.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918686-209980<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 55<br> -Paragraph 53<br> -URI http://asc.fasb.org/extlink&amp;oid=121568110&amp;loc=SL77918982-209971<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LeaseCost</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LeaseCostAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LeaseCostAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseCost">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of single lease cost, calculated by allocation of remaining cost of lease over remaining lease term. Includes, but is not limited to, single lease cost, after impairment of right-of-use asset, calculated by amortization of remaining right-of-use asset and accretion of lease liability.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 55<br> -Paragraph 53<br> -URI http://asc.fasb.org/extlink&amp;oid=121568110&amp;loc=SL77918982-209971<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918686-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseCost</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeStatementLocationAxis=us-gaap_ServiceMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeStatementLocationAxis=us-gaap_ServiceMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeStatementLocationAxis=us-gaap_ResearchAndDevelopmentExpenseMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeStatementLocationAxis=us-gaap_ResearchAndDevelopmentExpenseMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeStatementLocationAxis=us-gaap_SellingAndMarketingExpenseMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeStatementLocationAxis=us-gaap_SellingAndMarketingExpenseMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeStatementLocationAxis=us-gaap_GeneralAndAdministrativeExpenseMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeStatementLocationAxis=us-gaap_GeneralAndAdministrativeExpenseMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>49
<FILENAME>R38.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796515739144">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Leases - Future Minimum Cash Outflow and Weighted-average Remaining Lease Term and Discount Rate (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract', window );"><strong>Future minimum lease payments finance lease</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilityPaymentsRemainderOfFiscalYear', window );">2021</a></td>
<td class="nump">$ 2,929<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths', window );">2022</a></td>
<td class="nump">5,980<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo', window );">2023</a></td>
<td class="nump">6,114<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree', window );">2024</a></td>
<td class="nump">6,252<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour', window );">2025</a></td>
<td class="nump">5,930<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_FinanceLeaseLiabilityPaymentsDueAfterYearFour', window );">Thereafter</a></td>
<td class="nump">73,723<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilityPaymentsDue', window );">Total lease payments</a></td>
<td class="nump">100,928<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount', window );">Less interest portion</a></td>
<td class="num">(53,141)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiability', window );">Finance lease obligations</a></td>
<td class="nump">47,787<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract', window );"><strong>Future minimum lease payments operating lease</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsRemainderOfFiscalYear', window );">2021</a></td>
<td class="nump">1,827<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths', window );">2022</a></td>
<td class="nump">3,053<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo', window );">2023</a></td>
<td class="nump">1,544<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree', window );">2024</a></td>
<td class="nump">794<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour', window );">2025</a></td>
<td class="nump">712<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour', window );">Thereafter</a></td>
<td class="nump">545<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue', window );">Total lease payments</a></td>
<td class="nump">8,475<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount', window );">Less interest portion</a></td>
<td class="num">(862)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeaseLiability', window );">Operating lease obligations</a></td>
<td class="nump">7,613<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract', window );"><strong>Future minimum lease payments finance and operating lease</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsRemainderOfFiscalYear', window );">2021</a></td>
<td class="nump">4,756<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths', window );">2022</a></td>
<td class="nump">9,033<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo', window );">2023</a></td>
<td class="nump">7,658<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree', window );">2024</a></td>
<td class="nump">7,046<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour', window );">2025</a></td>
<td class="nump">6,642<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFour', window );">Thereafter</a></td>
<td class="nump">74,268<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue', window );">Total lease payments</a></td>
<td class="nump">109,403<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount', window );">Less interest portion</a></td>
<td class="num">(54,003)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_OperatingAndFinanceLeaseLiability', window );">Total lease liabilities</a></td>
<td class="nump">$ 55,400<span></span>
</td>
<td class="nump">$ 52,671<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract', window );"><strong>Lease term and discount rate</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1', window );">Operating leases -Weighted-average remaining lease term (in years)</a></td>
<td class="text">3 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1', window );">Finance leases - Weighted-average remaining lease term (in years)</a></td>
<td class="text">15 years 7 months 6 days<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent', window );">Operating leases - Weighted-average discount rate</a></td>
<td class="nump">4.50%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent', window );">Finance leases - Weighted-average discount rate</a></td>
<td class="nump">10.50%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LesseeFinanceLeaseTermOfContract1', window );">Finance lease term</a></td>
<td class="text">22 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_RangeAxis=srt_MinimumMember', window );">Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract', window );"><strong>Lease term and discount rate</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseTermOfContract', window );">Operating lease term</a></td>
<td class="text">1 year<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_RangeAxis=srt_MaximumMember', window );">Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract', window );"><strong>Lease term and discount rate</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseTermOfContract', window );">Operating lease term</a></td>
<td class="text">10 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>n/a.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_FinanceLeaseLiabilityPaymentsDueAfterYearFour">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid after fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_FinanceLeaseLiabilityPaymentsDueAfterYearFour</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payments for finance and operating lease.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFour">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due after fourth fiscal year following latest fiscal year.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFour</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee operating and finance lease liability payments due next twelve months.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in fourth fiscal year following latest fiscal year.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in third fiscal year following latest fiscal year.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in second fiscal year following latest fiscal year.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsRemainderOfFiscalYear">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payments for finance and operating lease having an initial or remaining lease term in excess of one year due in remainder of fiscal year following latest fiscal year.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsRemainderOfFiscalYear</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payments in excess of discounted obligation for lease payments for finance and operating lease.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for operating lease due after fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_OperatingAndFinanceLeaseLiability">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from operating and finance lease.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_OperatingAndFinanceLeaseLiability</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>n/a.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseLiability">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from finance lease.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918701-209980<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=121603541&amp;loc=SL77918627-209977<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseLiability</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseLiabilityPaymentsDue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payments for finance lease.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918701-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseLiabilityPaymentsDue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in next fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918701-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918701-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in third fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918701-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in second fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918701-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseLiabilityPaymentsRemainderOfFiscalYear">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in remainder of current fiscal year.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918701-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseLiabilityPaymentsRemainderOfFiscalYear</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payments in excess of discounted obligation for lease payments for finance lease.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918701-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Weighted average discount rate for finance lease calculated at point in time.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (g)(4)<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918686-209980<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 55<br> -Paragraph 53<br> -URI http://asc.fasb.org/extlink&amp;oid=121568110&amp;loc=SL77918982-209971<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Weighted average remaining lease term for finance lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (g)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918686-209980<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 55<br> -Paragraph 53<br> -URI http://asc.fasb.org/extlink&amp;oid=121568110&amp;loc=SL77918982-209971<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeFinanceLeaseTermOfContract1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Term of lessee's finance lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (a)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918673-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeFinanceLeaseTermOfContract1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for operating lease.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918701-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in next fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918701-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918701-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in third fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918701-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in second fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918701-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseLiabilityPaymentsRemainderOfFiscalYear">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payment for operating lease having initial or remaining lease term in excess of one year to be paid in remainder of current fiscal year.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918701-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseLiabilityPaymentsRemainderOfFiscalYear</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of lessee's undiscounted obligation for lease payments in excess of discounted obligation for lease payments for operating lease.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918701-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseTermOfContract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Term of lessee's operating lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (a)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918673-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseTermOfContract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseLiability">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from operating lease.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=121603541&amp;loc=SL77918627-209977<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseLiability</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Weighted average discount rate for operating lease calculated at point in time.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (g)(4)<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918686-209980<br><br>Reference 2: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 55<br> -Paragraph 53<br> -URI http://asc.fasb.org/extlink&amp;oid=121568110&amp;loc=SL77918982-209971<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Weighted average remaining lease term for operating lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 55<br> -Paragraph 53<br> -URI http://asc.fasb.org/extlink&amp;oid=121568110&amp;loc=SL77918982-209971<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (g)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918686-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MinimumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MinimumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>50
<FILENAME>R39.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796509714920">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Leases - Cash Flow by Lease Type (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="2">6 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Jun. 30, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LeasesAbstract', window );"><strong>Leases</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OperatingLeasePayments', window );">Operating cash outflows from operating leases</a></td>
<td class="nump">$ 2,751<span></span>
</td>
<td class="nump">$ 2,496<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FinanceLeaseInterestPaymentOnLiability', window );">Operating cash outflows from finance leases</a></td>
<td class="nump">2,556<span></span>
</td>
<td class="nump">2,746<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FinanceLeasePrincipalPayments', window );">Financing cash outflows from finance leases</a></td>
<td class="nump">362<span></span>
</td>
<td class="nump">108<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability', window );">Operating lease assets obtained in exchange for operating lease liabilities</a></td>
<td class="nump">$ 4,192<span></span>
</td>
<td class="nump">$ 1,038<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseInterestPaymentOnLiability">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of interest paid on finance lease liability.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (g)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918686-209980<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 5<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=121603541&amp;loc=SL77918643-209977<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseInterestPaymentOnLiability</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeasePrincipalPayments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cash outflow for principal payment on finance lease.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 5<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121603541&amp;loc=SL77918643-209977<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (g)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918686-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeasePrincipalPayments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LeasesAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LeasesAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OperatingLeasePayments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cash outflow from operating lease, excluding payments to bring another asset to condition and location necessary for its intended use.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 5<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=121603541&amp;loc=SL77918643-209977<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (g)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918686-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OperatingLeasePayments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase in right-of-use asset obtained in exchange for operating lease liability.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 55<br> -Paragraph 53<br> -URI http://asc.fasb.org/extlink&amp;oid=121568110&amp;loc=SL77918982-209971<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (g)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918686-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>51
<FILENAME>R40.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796507903368">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Revenue (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="1">6 Months Ended</th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Mar. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Jun. 30, 2020</div></th>
<th class="th"><div>Mar. 31, 2020</div></th>
<th class="th"><div>Dec. 31, 2019</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DisaggregationOfRevenueLineItems', window );"><strong>Disaggregation of Revenue</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ContractWithCustomerLiability', window );">Contract liabilities</a></td>
<td class="nump">$ 35,518<span></span>
</td>
<td class="nump">$ 22,142<span></span>
</td>
<td class="nump">$ 23,058<span></span>
</td>
<td class="nump">$ 30,417<span></span>
</td>
<td class="nump">$ 34,106<span></span>
</td>
<td class="nump">$ 29,251<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ContractWithCustomerLiabilityCurrent', window );">Deferred revenue</a></td>
<td class="nump">34,112<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">21,221<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ContractWithCustomerLiabilityNoncurrent', window );">Long-term deferred revenue</a></td>
<td class="nump">$ 1,406<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 1,837<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_ProductOrServiceAxis=acls_NewSystemsRevenueMember', window );">Systems</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DisaggregationOfRevenueLineItems', window );"><strong>Disaggregation of Revenue</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_PercentageOfPaymentUponShipmentOfTool', window );">Payment upon shipment of tool, as a percent</a></td>
<td class="nump">90.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_PercentageOfPaymentUponInstallation', window );">Payment upon installation, as a percent</a></td>
<td class="nump">10.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_ProductOrServiceAxis=acls_NewSystemsRevenueMember', window );">Systems | Minimum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DisaggregationOfRevenueLineItems', window );"><strong>Disaggregation of Revenue</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_PeriodOfPaymentUponDeliveryOfParts', window );">Payment upon delivery of parts, period</a></td>
<td class="text">30 days<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_ProductOrServiceAxis=acls_NewSystemsRevenueMember', window );">Systems | Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DisaggregationOfRevenueLineItems', window );"><strong>Disaggregation of Revenue</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_PeriodOfPaymentUponDeliveryOfParts', window );">Payment upon delivery of parts, period</a></td>
<td class="text">60 days<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_PercentageOfPaymentUponInstallation">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Represents the percentage of payment terms due upon installation.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_PercentageOfPaymentUponInstallation</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_PercentageOfPaymentUponShipmentOfTool">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Represents the percentage of payment terms due upon shipment of tool.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_PercentageOfPaymentUponShipmentOfTool</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_PeriodOfPaymentUponDeliveryOfParts">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Represents the period for payment upon delivery of parts.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_PeriodOfPaymentUponDeliveryOfParts</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ContractWithCustomerLiability">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=121556615&amp;loc=SL49130531-203044<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121604090&amp;loc=SL49130549-203045<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=121556615&amp;loc=SL49130532-203044<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ContractWithCustomerLiability</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ContractWithCustomerLiabilityCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable, classified as current.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=121556615&amp;loc=SL49130531-203044<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=121556615&amp;loc=SL49130532-203044<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121604090&amp;loc=SL49130549-203045<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ContractWithCustomerLiabilityCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ContractWithCustomerLiabilityNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable, classified as noncurrent.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=121556615&amp;loc=SL49130532-203044<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=121556615&amp;loc=SL49130531-203044<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121604090&amp;loc=SL49130549-203045<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ContractWithCustomerLiabilityNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DisaggregationOfRevenueLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DisaggregationOfRevenueLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_ProductOrServiceAxis=acls_NewSystemsRevenueMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_ProductOrServiceAxis=acls_NewSystemsRevenueMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MinimumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MinimumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>52
<FILENAME>R41.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796511696008">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Revenue - Revenue by discipline &amp; geographical areas (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="2">3 Months Ended</th>
<th class="th" colspan="2">6 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Jun. 30, 2020</div></th>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Jun. 30, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DisaggregationOfRevenueLineItems', window );"><strong>Disaggregation of Revenue</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax', window );">Total Revenue</a></td>
<td class="nump">$ 147,274<span></span>
</td>
<td class="nump">$ 122,965<span></span>
</td>
<td class="nump">$ 280,050<span></span>
</td>
<td class="nump">$ 241,956<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_StatementGeographicalAxis=srt_NorthAmericaMember', window );">North America</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DisaggregationOfRevenueLineItems', window );"><strong>Disaggregation of Revenue</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax', window );">Total Revenue</a></td>
<td class="nump">10,204<span></span>
</td>
<td class="nump">8,915<span></span>
</td>
<td class="nump">19,712<span></span>
</td>
<td class="nump">19,576<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_StatementGeographicalAxis=srt_AsiaMember', window );">Asia Pacific</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DisaggregationOfRevenueLineItems', window );"><strong>Disaggregation of Revenue</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax', window );">Total Revenue</a></td>
<td class="nump">116,642<span></span>
</td>
<td class="nump">106,604<span></span>
</td>
<td class="nump">220,033<span></span>
</td>
<td class="nump">203,432<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_StatementGeographicalAxis=srt_EuropeMember', window );">Europe</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DisaggregationOfRevenueLineItems', window );"><strong>Disaggregation of Revenue</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax', window );">Total Revenue</a></td>
<td class="nump">20,428<span></span>
</td>
<td class="nump">7,446<span></span>
</td>
<td class="nump">40,305<span></span>
</td>
<td class="nump">18,948<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_ProductOrServiceAxis=acls_NewSystemsRevenueMember', window );">Systems</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DisaggregationOfRevenueLineItems', window );"><strong>Disaggregation of Revenue</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax', window );">Total Revenue</a></td>
<td class="nump">100,138<span></span>
</td>
<td class="nump">76,815<span></span>
</td>
<td class="nump">181,129<span></span>
</td>
<td class="nump">159,152<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_ProductOrServiceAxis=acls_CsIOrAftermarketMember', window );">CS&amp;I/Aftermarket</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DisaggregationOfRevenueLineItems', window );"><strong>Disaggregation of Revenue</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax', window );">Total Revenue</a></td>
<td class="nump">$ 47,136<span></span>
</td>
<td class="nump">$ 46,150<span></span>
</td>
<td class="nump">$ 98,921<span></span>
</td>
<td class="nump">$ 82,804<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DisaggregationOfRevenueLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DisaggregationOfRevenueLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount, excluding tax collected from customer, of revenue from satisfaction of performance obligation by transferring promised good or service to customer. Tax collected from customer is tax assessed by governmental authority that is both imposed on and concurrent with specific revenue-producing transaction, including, but not limited to, sales, use, value added and excise.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8906-108599<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 40<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e9031-108599<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 41<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e9038-108599<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8933-108599<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8933-108599<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121604090&amp;loc=SL49130543-203045<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8736-108599<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8736-108599<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 42<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e9054-108599<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 5<br> -URI http://asc.fasb.org/extlink&amp;oid=121604090&amp;loc=SL49130545-203045<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 924<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 11.L)<br> -URI http://asc.fasb.org/extlink&amp;oid=6472922&amp;loc=d3e499488-122856<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_StatementGeographicalAxis=srt_NorthAmericaMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_StatementGeographicalAxis=srt_NorthAmericaMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_StatementGeographicalAxis=srt_AsiaMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_StatementGeographicalAxis=srt_AsiaMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_StatementGeographicalAxis=srt_EuropeMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_StatementGeographicalAxis=srt_EuropeMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_ProductOrServiceAxis=acls_NewSystemsRevenueMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_ProductOrServiceAxis=acls_NewSystemsRevenueMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_ProductOrServiceAxis=acls_CsIOrAftermarketMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_ProductOrServiceAxis=acls_CsIOrAftermarketMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>53
<FILENAME>R42.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796509757960">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Revenue - Contract liabilities (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Mar. 31, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Jun. 30, 2020</div></th>
<th class="th"><div>Mar. 31, 2020</div></th>
<th class="th"><div>Dec. 31, 2019</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerAbstract', window );"><strong>Revenue.</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ContractWithCustomerLiability', window );">Contract liabilities</a></td>
<td class="nump">$ 35,518<span></span>
</td>
<td class="nump">$ 22,142<span></span>
</td>
<td class="nump">$ 23,058<span></span>
</td>
<td class="nump">$ 30,417<span></span>
</td>
<td class="nump">$ 34,106<span></span>
</td>
<td class="nump">$ 29,251<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ContractWithCustomerLiability">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=121556615&amp;loc=SL49130531-203044<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121604090&amp;loc=SL49130549-203045<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=121556615&amp;loc=SL49130532-203044<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ContractWithCustomerLiability</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueFromContractWithCustomerAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueFromContractWithCustomerAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>54
<FILENAME>R43.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796507827016">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Revenue - Deferred revenue (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="2">3 Months Ended</th>
<th class="th" colspan="2">6 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Jun. 30, 2020</div></th>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Jun. 30, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RevenueFromContractWithCustomerAbstract', window );"><strong>Revenue.</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ContractWithCustomerLiability', window );">Balance, beginning of the period</a></td>
<td class="nump">$ 22,142<span></span>
</td>
<td class="nump">$ 34,106<span></span>
</td>
<td class="nump">$ 23,058<span></span>
</td>
<td class="nump">$ 29,251<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_ContractWithCustomerLiabilityDeferralOfRevenue', window );">Deferral of revenue</a></td>
<td class="nump">21,893<span></span>
</td>
<td class="nump">6,248<span></span>
</td>
<td class="nump">30,117<span></span>
</td>
<td class="nump">10,724<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ContractWithCustomerLiabilityRevenueRecognized', window );">Recognition of deferred revenue</a></td>
<td class="num">(8,517)<span></span>
</td>
<td class="num">(9,937)<span></span>
</td>
<td class="num">(17,657)<span></span>
</td>
<td class="num">(9,558)<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ContractWithCustomerLiability', window );">Balance, end of the period</a></td>
<td class="nump">$ 35,518<span></span>
</td>
<td class="nump">$ 30,417<span></span>
</td>
<td class="nump">$ 35,518<span></span>
</td>
<td class="nump">$ 30,417<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_ContractWithCustomerLiabilityDeferralOfRevenue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of deferral of revenue in obligation to transfer good or service to customer for which consideration from customer has been received or is due.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_ContractWithCustomerLiabilityDeferralOfRevenue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ContractWithCustomerLiability">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=121556615&amp;loc=SL49130531-203044<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121604090&amp;loc=SL49130549-203045<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=121556615&amp;loc=SL49130532-203044<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ContractWithCustomerLiability</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ContractWithCustomerLiabilityRevenueRecognized">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of revenue recognized that was previously included in balance of obligation to transfer good or service to customer for which consideration from customer has been received or is due.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 606<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=121604090&amp;loc=SL49130549-203045<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ContractWithCustomerLiabilityRevenueRecognized</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RevenueFromContractWithCustomerAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RevenueFromContractWithCustomerAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>55
<FILENAME>R44.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796511829368">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Receivable and Allowance for Credit Losses - Allowances for Credit Losses Related to Trade Receivables (Details)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="1">6 Months Ended</th>
</tr>
<tr><th class="th">
<div>Jun. 30, 2020 </div>
<div>USD ($)</div>
</th></tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccountsReceivableNetAbstract', window );"><strong>Receivable and Allowance for Credit Losses</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent', window );">Balance, beginning of period</a></td>
<td class="nump">$ 818<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AllowanceForDoubtfulAccountsReceivableWriteOffs', window );">Charge-offs</a></td>
<td class="num">$ (818)<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccountsReceivableNetAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccountsReceivableNetAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of allowance for credit loss on accounts receivable, classified as current.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(4)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 310<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=121611835&amp;loc=d3e5074-111524<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=121599878&amp;loc=SL82895884-210446<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AllowanceForDoubtfulAccountsReceivableWriteOffs">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of direct write-downs of accounts receivable charged against the allowance.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 326<br> -SubTopic 20<br> -Section 50<br> -Paragraph 13<br> -Subparagraph (d)<br> -URI http://asc.fasb.org/extlink&amp;oid=121599337&amp;loc=SL82919249-210447<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AllowanceForDoubtfulAccountsReceivableWriteOffs</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>56
<FILENAME>R45.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796508501624">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Computation of Net Earnings per Share (Details) - USD ($)<br> $ / shares in Units, shares in Thousands, $ in Thousands</strong></div></th>
<th class="th" colspan="4">3 Months Ended</th>
<th class="th" colspan="2">6 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Mar. 31, 2021</div></th>
<th class="th"><div>Jun. 30, 2020</div></th>
<th class="th"><div>Mar. 31, 2020</div></th>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Jun. 30, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareBasicAndDilutedOtherDisclosuresAbstract', window );"><strong>Computation of Net Earnings per Share</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic', window );">Net income available to common stockholders</a></td>
<td class="nump">$ 18,906<span></span>
</td>
<td class="nump">$ 16,480<span></span>
</td>
<td class="nump">$ 13,302<span></span>
</td>
<td class="nump">$ 11,221<span></span>
</td>
<td class="nump">$ 35,386<span></span>
</td>
<td class="nump">$ 24,523<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic', window );">Weighted average common shares outstanding used in computing basic income per share</a></td>
<td class="nump">33,677<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">33,116<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">33,696<span></span>
</td>
<td class="nump">32,998<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements', window );">Incremental options and RSUs</a></td>
<td class="nump">634<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">842<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">777<span></span>
</td>
<td class="nump">1,025<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding', window );">Weighted average common shares used in computing diluted net income per share</a></td>
<td class="nump">34,311<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">33,958<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">34,473<span></span>
</td>
<td class="nump">34,023<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareBasicAndDilutedAbstract', window );"><strong>Net income per share</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareBasic', window );">Basic</a></td>
<td class="nump">$ 0.56<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 0.40<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 1.05<span></span>
</td>
<td class="nump">$ 0.74<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EarningsPerShareDiluted', window );">Diluted</a></td>
<td class="nump">$ 0.55<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 0.39<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 1.03<span></span>
</td>
<td class="nump">$ 0.72<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount', window );">Anti-dilutive common equivalent shares excluded from calculation</a></td>
<td class="nump">1,800<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">3,138<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">1,352<span></span>
</td>
<td class="nump">5,006<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Securities (including those issuable pursuant to contingent stock agreements) that could potentially dilute basic earnings per share (EPS) or earnings per unit (EPU) in the future that were not included in the computation of diluted EPS or EPU because to do so would increase EPS or EPU amounts or decrease loss per share or unit amounts for the period presented.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of net income (loss) for the period per each share of common stock or unit outstanding during the reporting period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22583-107794<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22694-107794<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=d3e1448-109256<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22595-107794<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22694-107794<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 7<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=d3e1337-109256<br><br>Reference 7: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 55<br> -Paragraph 52<br> -URI http://asc.fasb.org/extlink&amp;oid=120380238&amp;loc=d3e4984-109258<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(23))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400993&amp;loc=SL114874131-224263<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 55<br> -Paragraph 15<br> -URI http://asc.fasb.org/extlink&amp;oid=120380238&amp;loc=d3e3842-109258<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 7<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22644-107794<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(25))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395209&amp;loc=SL114868664-224227<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=d3e1252-109256<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 60B<br> -Subparagraph (d)<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=SL5780133-109256<br><br>Reference 15: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(27))<br> -URI http://asc.fasb.org/extlink&amp;oid=120399700&amp;loc=SL114874048-224260<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareBasicAndDilutedAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareBasicAndDilutedAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareBasicAndDilutedOtherDisclosuresAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareBasicAndDilutedOtherDisclosuresAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EarningsPerShareDiluted">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of net income (loss) for the period available to each share of common stock or common unit outstanding during the reporting period and to each share or unit that would have been outstanding assuming the issuance of common shares or units for all dilutive potential common shares or units outstanding during the reporting period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 55<br> -Paragraph 52<br> -URI http://asc.fasb.org/extlink&amp;oid=120380238&amp;loc=d3e4984-109258<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 7<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22644-107794<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 55<br> -Paragraph 15<br> -URI http://asc.fasb.org/extlink&amp;oid=120380238&amp;loc=d3e3842-109258<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=d3e1252-109256<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22694-107794<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22595-107794<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22583-107794<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 60B<br> -Subparagraph (d)<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=SL5780133-109256<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(27))<br> -URI http://asc.fasb.org/extlink&amp;oid=120399700&amp;loc=SL114874048-224260<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(23))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400993&amp;loc=SL114874131-224263<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22694-107794<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 7<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=d3e1337-109256<br><br>Reference 14: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(25))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395209&amp;loc=SL114868664-224227<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EarningsPerShareDiluted</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Additional shares included in the calculation of diluted EPS as a result of the potentially dilutive effect of share based payment arrangements using the treasury stock method.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 22<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=d3e1707-109256<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 28A<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=d3e1500-109256<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 23<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=d3e1757-109256<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount, after deduction of tax, noncontrolling interests, dividends on preferred stock and participating securities; of income (loss) available to common shareholders.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22595-107794<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=d3e1448-109256<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22694-107794<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 11<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=d3e1377-109256<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8736-108599<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 11<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22694-107794<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 60B<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=SL5780133-109256<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (f)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8933-108599<br><br>Reference 10: http://www.xbrl.org/2003/role/exampleRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 31<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8924-108599<br><br>Reference 11: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 30<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8906-108599<br><br>Reference 12: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22583-107794<br><br>Reference 13: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 32<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8933-108599<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The average number of shares or units issued and outstanding that are used in calculating diluted EPS or earnings per unit (EPU), determined based on the timing of issuance of shares or units in the period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 16<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=d3e1505-109256<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_WeightedAverageNumberOfSharesOutstandingBasic">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of [basic] shares or units, after adjustment for contingently issuable shares or units and other shares or units not deemed outstanding, determined by relating the portion of time within a reporting period that common shares or units have been outstanding to the total time in that period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 50<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=6371337&amp;loc=d3e3550-109257<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 260<br> -SubTopic 10<br> -Section 45<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=121326447&amp;loc=d3e1448-109256<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WeightedAverageNumberOfSharesOutstandingBasic</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>57
<FILENAME>R46.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796515137352">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Accumulated Other Comprehensive Income (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="2">3 Months Ended</th>
<th class="th" colspan="2">6 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Jun. 30, 2020</div></th>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Jun. 30, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AOCIAttributableToParentNetOfTaxRollForward', window );"><strong>Changes in accumulated other comprehensive income, net of tax</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax', window );">Balance at December 31, 2020</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 3,435<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeLossNetOfTax', window );">Other comprehensive income and pension reclassification</a></td>
<td class="nump">$ 586<span></span>
</td>
<td class="nump">$ 893<span></span>
</td>
<td class="num">(766)<span></span>
</td>
<td class="num">$ (162)<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax', window );">Balance at June 30, 2021</a></td>
<td class="nump">2,669<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">2,669<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementEquityComponentsAxis=us-gaap_AccumulatedTranslationAdjustmentMember', window );">Foreign currency</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AOCIAttributableToParentNetOfTaxRollForward', window );"><strong>Changes in accumulated other comprehensive income, net of tax</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax', window );">Balance at December 31, 2020</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">3,945<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeLossNetOfTax', window );">Other comprehensive income and pension reclassification</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(820)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax', window );">Balance at June 30, 2021</a></td>
<td class="nump">3,125<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">3,125<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StatementEquityComponentsAxis=us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember', window );">Defined benefit pension plan</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AOCIAttributableToParentNetOfTaxRollForward', window );"><strong>Changes in accumulated other comprehensive income, net of tax</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax', window );">Balance at December 31, 2020</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">(510)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_OtherComprehensiveIncomeLossNetOfTax', window );">Other comprehensive income and pension reclassification</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">54<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax', window );">Balance at June 30, 2021</a></td>
<td class="num">$ (456)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="num">$ (456)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AOCIAttributableToParentNetOfTaxRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AOCIAttributableToParentNetOfTaxRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Accumulated change in equity from transactions and other events and circumstances from non-owner sources, net of tax effect, at period end. Excludes Net Income (Loss), and accumulated changes in equity from transactions resulting from investments by owners and distributions to owners. Includes foreign currency translation items, certain pension adjustments, unrealized gains and losses on certain investments in debt and equity securities, other than temporary impairment (OTTI) losses related to factors other than credit losses on available-for-sale and held-to-maturity debt securities that an entity does not intend to sell and it is not more likely than not that the entity will be required to sell before recovery of the amortized cost basis, as well as changes in the fair value of derivatives related to the effective portion of a designated cash flow hedge.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(30)(a)(4))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 11<br> -URI http://asc.fasb.org/extlink&amp;oid=121641772&amp;loc=d3e637-108580<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(23)(a)(3))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400017&amp;loc=d3e572229-122910<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14A<br> -URI http://asc.fasb.org/extlink&amp;oid=121641772&amp;loc=SL7669686-108580<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 40<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (h)(2)<br> -URI http://asc.fasb.org/extlink&amp;oid=121370832&amp;loc=SL117420844-207641<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 40<br> -Section 65<br> -Paragraph 2<br> -Subparagraph (g)(2)(ii)<br> -URI http://asc.fasb.org/extlink&amp;oid=121370832&amp;loc=SL117420844-207641<br><br>Reference 7: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 14<br> -URI http://asc.fasb.org/extlink&amp;oid=121641772&amp;loc=d3e681-108580<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_OtherComprehensiveIncomeLossNetOfTax">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after tax and reclassification adjustments of other comprehensive income (loss).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1A<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=121641772&amp;loc=SL7669619-108580<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=109259400&amp;loc=d3e21463-112644<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 830<br> -SubTopic 30<br> -Section 45<br> -Paragraph 17<br> -URI http://asc.fasb.org/extlink&amp;oid=118261656&amp;loc=d3e32136-110900<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SX 210.5-03(21))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395209&amp;loc=SL114868664-224227<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 55<br> -Paragraph 15<br> -URI http://asc.fasb.org/extlink&amp;oid=121640130&amp;loc=d3e1436-108581<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 830<br> -SubTopic 30<br> -Section 45<br> -Paragraph 20<br> -URI http://asc.fasb.org/extlink&amp;oid=118261656&amp;loc=d3e32211-110900<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 830<br> -SubTopic 30<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6450520&amp;loc=d3e32583-110901<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 220<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1B<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=121641772&amp;loc=SL7669625-108580<br><br>Reference 9: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-04(23))<br> -URI http://asc.fasb.org/extlink&amp;oid=120399700&amp;loc=SL114874048-224260<br><br>Reference 10: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(19))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400993&amp;loc=SL114874131-224263<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_OtherComprehensiveIncomeLossNetOfTax</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementEquityComponentsAxis=us-gaap_AccumulatedTranslationAdjustmentMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementEquityComponentsAxis=us-gaap_AccumulatedTranslationAdjustmentMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StatementEquityComponentsAxis=us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StatementEquityComponentsAxis=us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>58
<FILENAME>R47.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796511618504">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Cash, cash equivalents and restricted cash (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Jun. 30, 2020</div></th>
<th class="th"><div>Dec. 31, 2019</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsAtCarryingValue', window );">Cash and cash equivalents</a></td>
<td class="nump">$ 219,731<span></span>
</td>
<td class="nump">$ 203,479<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_RestrictedCashAndCashEquivalents', window );">Long-term restricted cash</a></td>
<td class="nump">755<span></span>
</td>
<td class="nump">753<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents', window );">Total cash, cash equivalents and restricted cash</a></td>
<td class="nump">220,486<span></span>
</td>
<td class="nump">$ 204,232<span></span>
</td>
<td class="nump">$ 197,016<span></span>
</td>
<td class="nump">$ 146,534<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_WorkersCompensationLiabilityCurrentAndNoncurrent', window );">Letter of credit related to workers' compensation insurance</a></td>
<td class="nump">700<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_DepositRelatingToCustomsActivity', window );">Deposit related to customs activity</a></td>
<td class="nump">100<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LongtermDebtTypeAxis=us-gaap_RevolvingCreditFacilityMember', window );">Revolving credit facility</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit', window );">Restricted cash which relates to support of outstanding letters of credit</a></td>
<td class="nump">$ 800<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_DepositRelatingToCustomsActivity">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of deposits relating customs activity.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_DepositRelatingToCustomsActivity</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Represents the information pertaining to the portion of the line of credit availability being used to support the outstanding letters of credit.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashAndCashEquivalentsAtCarryingValue">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates. Excludes cash and cash equivalents within disposal group and discontinued operation.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=121586364&amp;loc=d3e3044-108585<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121566466&amp;loc=d3e6676-107765<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.1)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashAndCashEquivalentsAtCarryingValue</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cash and cash equivalents, and cash and cash equivalents restricted to withdrawal or usage. Excludes amount for disposal group and discontinued operations. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 24<br> -URI http://asc.fasb.org/extlink&amp;oid=121586364&amp;loc=d3e3521-108585<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=121586364&amp;loc=d3e3044-108585<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=121583591&amp;loc=SL98516268-108586<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_RestrictedCashAndCashEquivalents">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of cash and cash equivalents restricted as to withdrawal or usage. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(2))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400017&amp;loc=d3e572229-122910<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(1))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=121583591&amp;loc=SL98516268-108586<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(1)(a))<br> -URI http://asc.fasb.org/extlink&amp;oid=120398452&amp;loc=d3e534808-122878<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=121586364&amp;loc=d3e3044-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_RestrictedCashAndCashEquivalents</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_WorkersCompensationLiabilityCurrentAndNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of obligations and payables pertaining to claims incurred of a workers compensation nature.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03(15)(5))<br> -URI http://asc.fasb.org/extlink&amp;oid=120398452&amp;loc=d3e534808-122878<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-03(a)(15)(a))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400017&amp;loc=d3e572229-122910<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(20))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(24))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_WorkersCompensationLiabilityCurrentAndNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LongtermDebtTypeAxis=us-gaap_RevolvingCreditFacilityMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LongtermDebtTypeAxis=us-gaap_RevolvingCreditFacilityMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>59
<FILENAME>R48.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796506063672">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Inventories, net (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryDisclosureAbstract', window );"><strong>Inventories, net</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryRawMaterialsNetOfReserves', window );">Raw materials</a></td>
<td class="nump">$ 109,795<span></span>
</td>
<td class="nump">$ 100,254<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryWorkInProcessNetOfReserves', window );">Work in process</a></td>
<td class="nump">40,233<span></span>
</td>
<td class="nump">33,867<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryFinishedGoodsNetOfReserves', window );">Finished goods (completed systems)</a></td>
<td class="nump">42,293<span></span>
</td>
<td class="nump">26,955<span></span>
</td>
</tr>
<tr class="reu">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_InventoryNet', window );">Inventories, net</a></td>
<td class="nump">$ 192,321<span></span>
</td>
<td class="nump">$ 161,076<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryDisclosureAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryDisclosureAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryFinishedGoodsNetOfReserves">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying amount, net of valuation reserves and adjustments, as of the balance sheet date of merchandise or goods held by the company that are readily available for sale.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 330<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB Topic 5.BB)<br> -URI http://asc.fasb.org/extlink&amp;oid=27011343&amp;loc=d3e100047-122729<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(6)(a)(1))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryFinishedGoodsNetOfReserves</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount after valuation and LIFO reserves of inventory expected to be sold, or consumed within one year or operating cycle, if longer.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=121566466&amp;loc=d3e6676-107765<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.6(a))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryRawMaterialsNetOfReserves">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying amount, net of valuation reserves and adjustments, as of the balance sheet date of unprocessed items to be consumed in the manufacturing or production process.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 330<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB Topic 5.BB)<br> -URI http://asc.fasb.org/extlink&amp;oid=27011343&amp;loc=d3e100047-122729<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(6)(a)(4))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryRawMaterialsNetOfReserves</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_InventoryWorkInProcessNetOfReserves">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying amount, net of reserves and adjustments, as of the balance sheet date of merchandise or goods which are partially completed. This inventory is generally comprised of raw materials, labor and factory overhead costs, which require further materials, labor and overhead to be converted into finished goods, and which generally require the use of estimates to determine percentage complete and pricing.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 330<br> -SubTopic 10<br> -Section S99<br> -Paragraph 2<br> -Subparagraph (SAB Topic 5.BB)<br> -URI http://asc.fasb.org/extlink&amp;oid=27011343&amp;loc=d3e100047-122729<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(6)(a)(3))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_InventoryWorkInProcessNetOfReserves</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>60
<FILENAME>R49.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796515639544">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Product Warranty (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="2">6 Months Ended</th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Jun. 30, 2020</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProductWarrantiesDisclosuresAbstract', window );"><strong>Product Warranty</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_ProductWarrantyPeriod', window );">Product warranty period</a></td>
<td class="text">1 year<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward', window );"><strong>Changes in standard product warranty liability</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrual', window );">Balance at January 1 (beginning of year)</a></td>
<td class="nump">$ 4,612<span></span>
</td>
<td class="nump">$ 3,244<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrualWarrantiesIssued', window );">Warranties issued during the period</a></td>
<td class="nump">3,013<span></span>
</td>
<td class="nump">2,635<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrualPayments', window );">Settlements made during the period</a></td>
<td class="num">(1,991)<span></span>
</td>
<td class="num">(1,913)<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease', window );">Changes in estimate of liability for pre-existing warranties during the period</a></td>
<td class="num">(372)<span></span>
</td>
<td class="nump">177<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrual', window );">Balance at June 30 (end of period)</a></td>
<td class="nump">5,262<span></span>
</td>
<td class="nump">4,143<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract', window );"><strong>Product warranty classification</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrualClassifiedCurrent', window );">Amount classified as current</a></td>
<td class="nump">4,690<span></span>
</td>
<td class="nump">3,942<span></span>
</td>
<td class="nump">$ 4,280<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrualNoncurrent', window );">Amount classified as long-term</a></td>
<td class="nump">572<span></span>
</td>
<td class="nump">201<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rou">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProductWarrantyAccrual', window );">Total warranty liability</a></td>
<td class="nump">$ 5,262<span></span>
</td>
<td class="nump">$ 4,143<span></span>
</td>
<td class="nump">$ 4,612<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_ProductWarrantyPeriod">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Represents the period for which the warranty is offered for the products sold.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_ProductWarrantyPeriod</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantiesDisclosuresAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantiesDisclosuresAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrual">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of obligations incurred through that date and payable for estimated claims under standard and extended warranty protection rights granted to customers.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 942<br> -SubTopic 210<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.9-03.15(5))<br> -URI http://asc.fasb.org/extlink&amp;oid=120398452&amp;loc=d3e534808-122878<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (c)(1)<br> -URI http://asc.fasb.org/extlink&amp;oid=68068213&amp;loc=d3e12565-110249<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph (c)(5)<br> -URI http://asc.fasb.org/extlink&amp;oid=68068213&amp;loc=d3e12565-110249<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantyAccrual</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrualClassifiedCurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of obligations incurred through that date and payable for estimated claims under standard and extended warranty protection rights granted to customers. For classified balance sheets, represents the current portion of the liabilities (due within one year or within the normal operating cycle if longer).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 7<br> -URI http://asc.fasb.org/extlink&amp;oid=68068213&amp;loc=d3e12524-110249<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.20)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 25<br> -Paragraph 5<br> -URI http://asc.fasb.org/extlink&amp;oid=68070138&amp;loc=d3e11281-110244<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantyAccrualClassifiedCurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrualNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Carrying value as of the balance sheet date of obligations incurred through that date and due after one year (or beyond the operating cycle if longer) for estimated claims under standard and extended warranty protection rights granted to customers.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.24)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 450<br> -SubTopic 20<br> -Section 50<br> -Paragraph 3<br> -URI http://asc.fasb.org/extlink&amp;oid=121557415&amp;loc=d3e14394-108349<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 450<br> -SubTopic 20<br> -Section 50<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=121557415&amp;loc=d3e14326-108349<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantyAccrualNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrualPayments">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of decrease in the standard and extended product warranty accrual from payments made in cash or in kind to satisfy claims under the terms of the standard and extended product warranty.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph ((c)(2))<br> -URI http://asc.fasb.org/extlink&amp;oid=68068213&amp;loc=d3e12565-110249<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantyAccrualPayments</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase (decrease) in the standard and extended product warranty accrual from changes in estimates attributable to preexisting product warranties.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph ((c)(4))<br> -URI http://asc.fasb.org/extlink&amp;oid=68068213&amp;loc=d3e12565-110249<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProductWarrantyAccrualWarrantiesIssued">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase in the standard and extended product warranty accrual from warranties issued.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 460<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -Subparagraph ((c)(3))<br> -URI http://asc.fasb.org/extlink&amp;oid=68068213&amp;loc=d3e12565-110249<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProductWarrantyAccrualWarrantiesIssued</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>61
<FILENAME>R50.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796512110056">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Fair Value Measurements (Details) - Recurring - Money market funds, US Government Securities and Agency Investments - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Total</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems', window );"><strong>Fair Value Measurements</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsFairValueDisclosure', window );">Money market funds, U.S. Government Securities and Agency Investments</a></td>
<td class="nump">$ 190,731<span></span>
</td>
<td class="nump">$ 172,119<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember', window );">Level 1</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems', window );"><strong>Fair Value Measurements</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_CashAndCashEquivalentsFairValueDisclosure', window );">Money market funds, U.S. Government Securities and Agency Investments</a></td>
<td class="nump">$ 190,731<span></span>
</td>
<td class="nump">$ 172,119<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CashAndCashEquivalentsFairValueDisclosure">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Fair value portion of currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CashAndCashEquivalentsFairValueDisclosure</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FairValueByMeasurementFrequencyAxis=us-gaap_FairValueMeasurementsRecurringMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FairValueByAssetClassAxis=acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FairValueByAssetClassAxis=acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FairValueByMeasurementBasisAxis=us-gaap_EstimateOfFairValueFairValueDisclosureMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FairValueByMeasurementBasisAxis=us-gaap_EstimateOfFairValueFairValueDisclosureMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FairValueByFairValueHierarchyLevelAxis=us-gaap_FairValueInputsLevel1Member">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FairValueByFairValueHierarchyLevelAxis=us-gaap_FairValueInputsLevel1Member</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>62
<FILENAME>R51.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796511812776">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Financing Arrangements (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th"><div>Jan. 30, 2015</div></th>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
<th class="th"><div>Jul. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Financing Arrangements</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilityNoncurrent', window );">Long-term finance lease obligation</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 46,923<span></span>
</td>
<td class="nump">$ 47,393<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=acls_SaleAndLeaseBackMember', window );">Sale leaseback obligation</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Financing Arrangements</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_FinanceLeaseLiabilityNoncurrent', window );">Long-term finance lease obligation</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">47,800<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_SecurityDeposit', window );">Security deposit</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">5,900<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_CounterpartyNameAxis=acls_BeverlyPropertyOwnerLlcMember', window );">Beverly Property Owner LLC | Buildings</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Financing Arrangements</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ProceedsFromSaleOfPropertyHeldForSale', window );">Proceeds from sale of corporate headquarters</a></td>
<td class="nump">$ 48,900<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LesseeOperatingLeaseTermOfContract', window );">Lease term</a></td>
<td class="text">22 years<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_CounterpartyNameAxis=acls_SiliconValleyBankMember', window );">Silicon Valley Bank | Revolving credit facility</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Financing Arrangements</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity', window );">Maximum borrowing capacity under the credit facility</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 40,000<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LineOfCreditFacilityFairValueOfAmountOutstanding', window );">Borrowings amount</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">0<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_CounterpartyNameAxis=acls_SiliconValleyBankMember', window );">Silicon Valley Bank | Revolving credit facility | Letter of credit</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DebtInstrumentLineItems', window );"><strong>Financing Arrangements</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_LettersOfCreditOutstandingAmount', window );">Letter of credit</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 5,900<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DebtInstrumentLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DebtInstrumentLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_FinanceLeaseLiabilityNoncurrent">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Present value of lessee's discounted obligation for lease payments from finance lease, classified as noncurrent.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 45<br> -Paragraph 1<br> -Subparagraph (b)<br> -URI http://asc.fasb.org/extlink&amp;oid=121603541&amp;loc=SL77918627-209977<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_FinanceLeaseLiabilityNoncurrent</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LesseeOperatingLeaseTermOfContract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Term of lessee's operating lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 842<br> -SubTopic 20<br> -Section 50<br> -Paragraph 3<br> -Subparagraph (a)(3)<br> -URI http://asc.fasb.org/extlink&amp;oid=121609121&amp;loc=SL77918673-209980<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LesseeOperatingLeaseTermOfContract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:durationItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LettersOfCreditOutstandingAmount">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The total amount of the contingent obligation under letters of credit outstanding as of the reporting date.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LettersOfCreditOutstandingAmount</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LineOfCreditFacilityFairValueOfAmountOutstanding">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Fair value of the amount outstanding under the credit facility.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=121572278&amp;loc=d3e13433-108611<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LineOfCreditFacilityFairValueOfAmountOutstanding</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Maximum borrowing capacity under the credit facility without consideration of any current restrictions on the amount that could be borrowed or the amounts currently outstanding under the facility.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.19(b),22(b))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ProceedsFromSaleOfPropertyHeldForSale">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The cash inflow from the sale of formerly productive land held for sale, anything permanently fixed to it, including buildings, structures on it, and so forth.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 230<br> -SubTopic 10<br> -Section 45<br> -Paragraph 12<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=121586364&amp;loc=d3e3179-108585<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ProceedsFromSaleOfPropertyHeldForSale</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_SecurityDeposit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>The amount of an asset, typically cash, provided to a counterparty to provide certain assurance of performance by the entity pursuant to the terms of a written or oral agreement, such as a lease.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02.8,17)<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_SecurityDeposit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=acls_SaleAndLeaseBackMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentByTypeAxis=acls_SaleAndLeaseBackMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_CounterpartyNameAxis=acls_BeverlyPropertyOwnerLlcMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_CounterpartyNameAxis=acls_BeverlyPropertyOwnerLlcMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_BuildingMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_PropertyPlantAndEquipmentByTypeAxis=us-gaap_BuildingMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_CounterpartyNameAxis=acls_SiliconValleyBankMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_CounterpartyNameAxis=acls_SiliconValleyBankMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_CreditFacilityAxis=us-gaap_RevolvingCreditFacilityMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_CreditFacilityAxis=us-gaap_RevolvingCreditFacilityMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ShortTermDebtTypeAxis=us-gaap_LetterOfCreditMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ShortTermDebtTypeAxis=us-gaap_LetterOfCreditMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>63
<FILENAME>R52.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796507998520">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Income Taxes (Details) - USD ($)<br> $ in Thousands</strong></div></th>
<th class="th" colspan="2">3 Months Ended</th>
<th class="th" colspan="2">6 Months Ended</th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Jun. 30, 2020</div></th>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Jun. 30, 2020</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ValuationAllowanceLineItems', window );"><strong>Valuation allowance</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_IncomeTaxExpenseBenefit', window );">Income tax provision</a></td>
<td class="nump">$ 3,842<span></span>
</td>
<td class="nump">$ 2,271<span></span>
</td>
<td class="nump">$ 5,563<span></span>
</td>
<td class="nump">$ 3,312<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_IncreaseInIncomeTaxExpenseBenefit', window );">Increase in income tax expense</a></td>
<td class="nump">1,500<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">2,300<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_IncreaseInPreTaxIncome', window );">Increase in pretax income</a></td>
<td class="nump">7,200<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">13,100<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredIncomeTaxAssetsNet', window );">Deferred tax assets, net</a></td>
<td class="nump">51,386<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">51,386<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 57,851<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_DeferredTaxAssetsValuationAllowance', window );">Deferred tax assets valuation allowance</a></td>
<td class="nump">$ 9,100<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 9,100<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_srt_RangeAxis=srt_MaximumMember', window );">Maximum</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ValuationAllowanceLineItems', window );"><strong>Valuation allowance</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate', window );">Statutory income tax rate (as a percent)</a></td>
<td class="nump">21.00%<span></span>
</td>
<td class="nump">21.00%<span></span>
</td>
<td class="nump">21.00%<span></span>
</td>
<td class="nump">21.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_IncreaseInIncomeTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of increase in current income tax expense (benefit) and deferred income tax expense (benefit) pertaining to continuing operations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_IncreaseInIncomeTaxExpenseBenefit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_IncreaseInPreTaxIncome">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Represents the amount of increase in pretax income.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_IncreaseInPreTaxIncome</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredIncomeTaxAssetsNet">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount, after allocation of valuation allowances and deferred tax liability, of deferred tax asset attributable to deductible differences and carryforwards, with jurisdictional netting.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 45<br> -Paragraph 6<br> -URI http://asc.fasb.org/extlink&amp;oid=120406818&amp;loc=d3e31931-109318<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 45<br> -Paragraph 4<br> -URI http://asc.fasb.org/extlink&amp;oid=120406818&amp;loc=d3e31917-109318<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredIncomeTaxAssetsNet</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_DeferredTaxAssetsValuationAllowance">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of deferred tax assets for which it is more likely than not that a tax benefit will not be realized.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -Subparagraph (c)<br> -URI http://asc.fasb.org/extlink&amp;oid=84230637&amp;loc=d3e32537-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_DeferredTaxAssetsValuationAllowance</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Percentage of domestic federal statutory tax rate applicable to pretax income (loss).</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB Topic 6.I.Fact.4)<br> -URI http://asc.fasb.org/extlink&amp;oid=116825942&amp;loc=d3e330036-122817<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 12<br> -URI http://asc.fasb.org/extlink&amp;oid=84230637&amp;loc=d3e32687-109319<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_IncomeTaxExpenseBenefit">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of current income tax expense (benefit) and deferred income tax expense (benefit) pertaining to continuing operations.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SAB TOPIC 6.I.7)<br> -URI http://asc.fasb.org/extlink&amp;oid=116825942&amp;loc=d3e330036-122817<br><br>Reference 2: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 10<br> -Section 50<br> -Paragraph 10<br> -URI http://asc.fasb.org/extlink&amp;oid=84230637&amp;loc=d3e32672-109319<br><br>Reference 3: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 22<br> -Subparagraph (h)<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e8736-108599<br><br>Reference 4: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 235<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.4-08(h))<br> -URI http://asc.fasb.org/extlink&amp;oid=120395691&amp;loc=d3e23780-122690<br><br>Reference 5: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 9<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22663-107794<br><br>Reference 6: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 740<br> -SubTopic 20<br> -Section 45<br> -Paragraph 2<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=120385591&amp;loc=d3e38679-109324<br><br>Reference 7: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 944<br> -SubTopic 220<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.7-04(9))<br> -URI http://asc.fasb.org/extlink&amp;oid=120400993&amp;loc=SL114874131-224263<br><br>Reference 8: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 250<br> -SubTopic 10<br> -Section 50<br> -Paragraph 8<br> -URI http://asc.fasb.org/extlink&amp;oid=109234566&amp;loc=d3e22658-107794<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_IncomeTaxExpenseBenefit</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>debit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ValuationAllowanceLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ValuationAllowanceLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_RangeAxis=srt_MaximumMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_RangeAxis=srt_MaximumMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>64
<FILENAME>R53.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796514824920">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Concentration of Risk (Details) - customer<br></strong></div></th>
<th class="th" colspan="2">3 Months Ended</th>
<th class="th" colspan="2">6 Months Ended</th>
<th class="th" colspan="1">12 Months Ended</th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Jun. 30, 2020</div></th>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Jun. 30, 2020</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember', window );">Revenue | Customer concentration risk</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_ConcentrationRiskNumberOfCustomers', window );">Number of customers</a></td>
<td class="nump">2<span></span>
</td>
<td class="nump">3<span></span>
</td>
<td class="nump">1<span></span>
</td>
<td class="nump">3<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember', window );">Revenue | Customer concentration risk | First customer</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Percentage of concentration risk</a></td>
<td class="nump">19.70%<span></span>
</td>
<td class="nump">22.50%<span></span>
</td>
<td class="nump">24.40%<span></span>
</td>
<td class="nump">19.70%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember', window );">Revenue | Customer concentration risk | Second customer</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Percentage of concentration risk</a></td>
<td class="nump">10.20%<span></span>
</td>
<td class="nump">22.20%<span></span>
</td>
<td class="nump">29.60%<span></span>
</td>
<td class="nump">18.50%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember', window );">Revenue | Customer concentration risk | Third customer</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Percentage of concentration risk</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">11.60%<span></span>
</td>
<td class="nump">29.60%<span></span>
</td>
<td class="nump">16.20%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_AccountsReceivableMember', window );">Consolidated accounts receivable | Credit concentration risk</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl custom" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_acls_ConcentrationRiskNumberOfCustomers', window );">Number of customers</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">2<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">2<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_AccountsReceivableMember', window );">Consolidated accounts receivable | Credit concentration risk | First customer</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Percentage of concentration risk</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">11.70%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">23.80%<span></span>
</td>
</tr>
<tr class="rh">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_AccountsReceivableMember', window );">Consolidated accounts receivable | Credit concentration risk | Second customer</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskLineItems', window );"><strong>Concentration of Risk</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_ConcentrationRiskPercentage1', window );">Percentage of concentration risk</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">10.00%<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">11.90%<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_acls_ConcentrationRiskNumberOfCustomers">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Represents the number of customers on whom the entity significantly relies giving rise to concentration risk.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">acls_ConcentrationRiskNumberOfCustomers</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>acls_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:integerItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskLineItems">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskLineItems</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskPercentage1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>For an entity that discloses a concentration risk in relation to quantitative amount, which serves as the "benchmark" (or denominator) in the equation, this concept represents the concentration percentage derived from the division.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/disclosureRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 280<br> -SubTopic 10<br> -Section 50<br> -Paragraph 42<br> -URI http://asc.fasb.org/extlink&amp;oid=120311839&amp;loc=d3e9054-108599<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 18<br> -URI http://asc.fasb.org/extlink&amp;oid=99393423&amp;loc=d3e6351-108592<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 20<br> -URI http://asc.fasb.org/extlink&amp;oid=121572278&amp;loc=d3e13531-108611<br><br>Reference 4: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 825<br> -SubTopic 10<br> -Section 50<br> -Paragraph 21<br> -Subparagraph (a)<br> -URI http://asc.fasb.org/extlink&amp;oid=121572278&amp;loc=d3e13537-108611<br><br>Reference 5: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 275<br> -SubTopic 10<br> -Section 50<br> -Paragraph 20<br> -URI http://asc.fasb.org/extlink&amp;oid=99393423&amp;loc=d3e6404-108592<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskPercentage1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:percentItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_SalesRevenueNetMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskByTypeAxis=us-gaap_CustomerConcentrationRiskMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByTypeAxis=us-gaap_CustomerConcentrationRiskMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_MajorCustomersAxis=acls_LargestCustomerMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_MajorCustomersAxis=acls_LargestCustomerMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_MajorCustomersAxis=acls_SecondLargestCustomerMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_MajorCustomersAxis=acls_SecondLargestCustomerMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_srt_MajorCustomersAxis=acls_ThirdLargestCustomerMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">srt_MajorCustomersAxis=acls_ThirdLargestCustomerMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_AccountsReceivableMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByBenchmarkAxis=us-gaap_AccountsReceivableMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_ConcentrationRiskByTypeAxis=us-gaap_CreditConcentrationRiskMember">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Details</a><div><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_ConcentrationRiskByTypeAxis=us-gaap_CreditConcentrationRiskMember</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td></td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td></td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>65
<FILENAME>R54.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
							function toggleNextSibling (e) {
							if (e.nextSibling.style.display=='none') {
							e.nextSibling.style.display='block';
							} else { e.nextSibling.style.display='none'; }
							}</script>
</head>
<body>
<span style="display: none;">v3.21.2</span><table class="report" border="0" cellspacing="2" id="idm139796523187624">
<tr>
<th class="tl" colspan="1" rowspan="2"><div style="width: 200px;"><strong>Share Repurchase (Details) - USD ($)<br> $ / shares in Units, shares in Millions, $ in Millions</strong></div></th>
<th class="th" colspan="1">3 Months Ended</th>
<th class="th" colspan="1"></th>
</tr>
<tr>
<th class="th"><div>Jun. 30, 2021</div></th>
<th class="th"><div>Dec. 31, 2020</div></th>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockholdersEquityNoteAbstract', window );"><strong>Share Repurchase</strong></a></td>
<td class="text">&#160;<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_StockRepurchaseProgramAuthorizedAmount1', window );">Share repurchase program common stock authorized amount</a></td>
<td class="text">&#160;<span></span>
</td>
<td class="nump">$ 100<span></span>
</td>
</tr>
<tr class="re">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_TreasuryStockSharesAcquired', window );">Number of shares repurchased</a></td>
<td class="nump">0.6<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl " style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="top.Show.showAR( this, 'defref_us-gaap_TreasuryStockAcquiredAverageCostPerShare', window );">Average cost</a></td>
<td class="nump">$ 39.92<span></span>
</td>
<td class="text">&#160;<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockRepurchaseProgramAuthorizedAmount1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Amount of stock repurchase plan authorized.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockRepurchaseProgramAuthorizedAmount1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:monetaryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>credit</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>instant</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_StockholdersEquityNoteAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- References</a><div><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_StockholdersEquityNoteAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_TreasuryStockAcquiredAverageCostPerShare">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Total cost of shares repurchased divided by the total number of shares repurchased.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 30<br> -Section 45<br> -Paragraph 1<br> -URI http://asc.fasb.org/extlink&amp;oid=6405813&amp;loc=d3e23239-112655<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_TreasuryStockAcquiredAverageCostPerShare</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>num:perShareItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_us-gaap_TreasuryStockSharesAcquired">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="top.Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">- Definition</a><div><p>Number of shares that have been repurchased during the period and are being held in treasury.</p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section 50<br> -Paragraph 2<br> -URI http://asc.fasb.org/extlink&amp;oid=109259400&amp;loc=d3e21463-112644<br><br>Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 505<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.3-04)<br> -URI http://asc.fasb.org/extlink&amp;oid=120397183&amp;loc=d3e187085-122770<br><br>Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef<br> -Publisher FASB<br> -Name Accounting Standards Codification<br> -Topic 210<br> -SubTopic 10<br> -Section S99<br> -Paragraph 1<br> -Subparagraph (SX 210.5-02(29))<br> -URI http://asc.fasb.org/extlink&amp;oid=120391452&amp;loc=d3e13212-122682<br></p></div>
<a href="javascript:void(0);" onclick="top.Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">us-gaap_TreasuryStockSharesAcquired</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>us-gaap_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:sharesItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EXCEL
<SEQUENCE>66
<FILENAME>Financial_Report.xlsx
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
begin 644 Financial_Report.xlsx
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M=]W3CHG&K=!X#;[Q3X?#KHG&J]!TZVDF)_VN:Z3I%FA"1N/K>A(5M>5 TR
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M!Z.:60F]A%9JGZJ'-#ZH'C(*!?&Y'C[E>G@*-Y;&O%"N@GL!_]':-\*K^(+
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MU4#E/]O4#6CV#30<D05>,9FV-J/D3@H\W/[O#;#"Q([A[8N_ 5!+ P04
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M9"B>R:^B<<2W2,&$@E+J,0\EJRW?PPUZ!LD*RX0EO&ET7[8('/T"G5?;7-:
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M 7"@(Y2^JF2H!+L3E3"6EV)U QIH!,5YI.?C#7MR9!S<O<\$":2%=\(#M))
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MK!VU^RUA=V/DIAO'WTEC9-U=KCFSL)V ?;Z2E@SV-V["W_^BL_@74$L#!!0
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MSW%[0:SN;YFG9?/3>VBU_L1;[LHJW[2-I8--DNU_1X_M0'0:(&)I@-L&6&N
MA:4!:1L0O8'-$FT;4*T!Y98&K&W QEX#;QOP9NSW@]6,]'5415<71?[@%;5:
M]E:_:*:K:2T'.,GJ.^M35<C_)K)==37/LS)/DU54Q2OO4R5_R=NF*KW\3K[+
MEU_6>;J*B_)[[^:_75)]\Z;>7Y^NO1^^>^.5ZZB(2R_)O#_7^:Z,LE7YUONN
M]_YB5DF+]0?-EJV=]WL[V&IGLY'W6_/10.NYN_5/JU52WZ]1ZMU&R6HJO<RC
M;5)%*=#7]4!?R^5NLTN;<;F.[Y)E4@&=W(SOY(]J'1>>O$"Y ZSKI?DU]CYD
MRWP3>S_\FI?E&Z#[A;O[/W/CTF9R_@\W 3[<!+CIAUKZ>1^E4;:4/N2 [:?U
MC1=5\K*7[SR"WGK81R$TE_M>6=-KO85]O2*8!>QB]A4P0PYFR"@S8PSL>^)=
M ^3PZ?L[QI0P%@8BZ,NN3=D441]CWM?= #IYR7W1PA11%%(LX(&AAX&A33MB
M&1AYLTAVE'*:Y+@TK][4JPU:IHY[@AT^C3FGX7=)M:2Y/:&UPXR91PACI(W#
MD*IGC!^,<:<Q"12)BTQNCD419\MO7E5$62G76 .JU;]RSVRV,&BU<L/0%$E+
MFNTA5<^V.-@63MOS=93=Q_6$;5LNYY_3Y+ZQ_=;+Y&C++;>*'B';PC#$A.;9
M*>D9#@Z& Z?AF\>X6";R=I.^ROH>\_)M;;;L;A/0H@Q,*]2'O80'+^%I7J#/
M#XW5I]V7\]!P2&FH+V)0%,+7@7R%6]]Y)1_*<M=L;_65[ FZR^32]6XVVS3_
M%L?[]>S=[HKENE[LMW(W'!KQ]C,9>,E]HYVX #V_41#9R#07:F/MUO2O0$$-
MN:G6O0)IORJ29<WAY3[$:*]I:&1-Q'&;,04XY";<&&/@2!)H8^+Z]C4HZ]M6
M^$'4:;N9[VD=QC=>ZVULO^G&C_5KB!/SMLO>Q I,=<<#JKYA13#D1MC'>/MT
M<\J1?AK>YJX=FG:37%/2P7S?D"(7<J/+;@@TP8&81-O)$, J)@33HAM()D>8
MZ?, R 3S;7N)0A]RL\\27_X6%4_A'?;!$3"I1G! +&!#BFS(C;9.B#GL(1B.
M,1& /!:B .O38.JFB/B"^%J4"0L1T>?+E,DH4TZL98 4;I&;MZ<F!,B$IB,C
MP(J:V$W-8W*"MBOGA&$3F&!6 .C@M  2FGD!H'(E!EC!&J-72 UP)U]TH]69
M'"RP"4U,&2:6JU3<Q&YNGA'Y+S  12RXQ9)B(G8S\8RH?H$!ZB$+]+""'G9#
MS[)T?]EE<MGX]GT.F\@CA!+;I"GF83?S.DMWV(-)/'/IFHQB7$(AU)<NF,4)
MB@-]Z0)"BGU]Z9HJ2IEO"U*P8B-^&3;BH]B(%1OQ\[$1CV C'LE&0 >S$18:
M; 1D+C9BQ48<OL)>2Q3[B)M][D(, 5(_0GP])QB4]<TI\!!WEGA.,8:825]
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MG82=4DH14 (FC&\E#*CZAA6NA!M7IY=2!)!G$=N3:4(A2K@1=5PI19B\F;(
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MNEK Q>'#5[;=*?-A>7W9D"U]H.I;<R_TV[*?I6 5K27C-1!T<[6X@1<KC,P
M:_$/HT_RZ!D85]:<?S<OGXJK16 0T9+FRDQ!])]'NJ)E:6;2.'YTDR[Z-<W
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M'24%%<9 _[[A7!U>S +]_PE<_P]02P,$%     @ D58&4X*Q=X"5!   ]PH
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MR;K4P .D'HYF18]! ':W%3SCAAE>M._=?F),HC1%R!W7&V '@7JE[W& .JK
MZ*#4' D8O9S)U5EM/ ),!]X(GK5!-?.2:TZ%N!\,9=B#WQH0&$(EE!,H$@H5
M=$M%S3I? F0RXX8OP>D-%US?&\]%^^7_AH0'*Z@PR*P,6,J!,X4^ ENV4BE^
M(QC*2WF%<CCH(K2\GQ/(T4! JMZ/!_\R9L\E*:4&YG.>H7(,,UO4&T64(\V!
ML*T;@(OS,JL,(BK(#6A)[HR&8-L01 7-&XPK*42S82L!]3WIRH]Z09[R9].H
M1^.  )U2"2H4=>7YI&@2+,@E,'@Q2E "M%H%.9>TJD;/ EHY;;Q$F%@V!>$<
M2 +-G6WI1CG@/%!7&\^<L&0\3T'$&"? M-8ZG_'TP5F1U7-C&"#3T*%9H\25
M87H4J8T)2UF>31:,?5"\%;_#:*/W;5Y 7D;!_E$6K$L]$[[!4*(&.R ,T"]D
MA5G6*!]#O&*0=IQ&X>:]U79+/Z,8L9H!DR8S0# PTS%8TA*O3^,_Z@EED)DR
MV$V\81DK;D#Q@>=TM>1*0!A!:LJ:5-%MQ<J)/RYYA2&K)LB?FC0 %05,H9Z1
MW_8UN#?11/Z Y@E)G-B/K7'H1*%/KD<%Y'JOG!@4SWL@;^FDZ=+B&5"$Y)/$
M\#(@^3[9@9R?.!&4(FLB<MPT)F_;3,+9%.JQSZL:L@VX[N^%'W3W&_@/)/P6
MGSC VQ,2./Y8$"=*@EYU'2]06IM:L-HKTE:=V.<CC</)7!+%Y%=99M]91"'+
M]9F)BT-"=L_0"9;I9-9SEN&R%_CZ(>G"V%GZP3!, &E@>\U)%IZ0*')"U[4G
M?"=._G@X/S_L[DU'T^9IK(78AV197=3"I.F<07'$,MA:]TF8SI?0W@MA3BI8
M#MMD]L2=)_T"[ 0XJ'UYZP]HB[8^*ESMLP>F@OGWXRT\SMN/3HC?^_EI WU!
M5UL9'E[ZI8_\[O#"HY/U9*)[OFUKGM(/)^_A;1IX8L#S0'+OA6+5+9X3KA &
MS F--BNA'QM"(0Y#>^3;(\_QTV T]I)I?OD C1ZMLHWQCAP("-GTQ@/C;<<Q
MQ*;G^];[D"#\R+=TLIS0^DCQ>(.$"EI]88C\^2DZ03(4K" <WI-HR+]Q,DU0
M/T.+4$%V04HTAR:78TN$#<%)<G!6&MXM$X;Q,!\&T81<D\KD8PR-5@C"L54"
M+[7&OI-$WF@<+N,)GG%V.$CJ?_5\LY=SQHW GNLZY,-/M-B>OW$..8,9_6PV
MO+(+KI\>'<61W=/$Z;0L_ )',.@(-?;&TW+3KW9M]5#D?"M:8+2T&A\GB@)K
M%+O^A&SC%*N'[80N8",P8S^Q)7;L8#)C*[#_+$^[H!\1U(?&(3HQCIQE/"KT
M3I),L\C_^_G\J.NNC^:=WKVH4+(KP@J.>M EMFU84^?Q'HA6W)QK!UV:!@%.
MO)6\XP54>CB_0P$?5W:8&-J0E6Q.>]I43%Q6^P5RU&\XUJ$)+WZL5F'$Y3?Q
M%^SS%_U>_MPQ?_,';?3C#WO',O*T[C>!\8[JNL(+$]!4TU$<.OGL73B>'NX_
MCW01IB<9!9UO9Q//24?9)G02*Z<"\)":(#[3(3X#Q[6RX-)Q@\ &&P:QXWEV
M*HVLI@5.I5%J@X46F-U/)$L;R U'+$YK,K :N)/9Q)LFZMB)PV'V$QR.&%WA
M1>T$.' 2?YIWHW!*/0D=/Q[$LE-C?T-B6<!UP29V54N=,(E&.Y9P!AIHO\5+
M)=Z5KO:H^7S"QM,H<+S0>S9=2&/_P&P4.JX;# M[9Q"\N-YK<H;CGBT0'/&2
MU/8IL+)G-SU[1[H?EZG'$O0:RZC(VB/3<"MK;F+-S7N["^\)SR<B'T<"DR;[
MY=;5^OZMX_<2;7):>3O<=)E.?G2;/$H!G\W7+I:?T5N0;(TG2OP".$AHD#R]
MAV.!>O;B04XF-U'[&X+Y8.F1/:P#132/C_,WDN4/,!3.H[\^R(EK;_JS/1]]
MRIVXQQ55&]+</D#II07JL[]V-5^;, 0*4$;=W)CWK?RH71XYTNB<^\AB-!@G
M0XYDK5="[A195;*87@O;5>O4L>@DUM5A2V,3;Q41)[%*RO5P0_-H?+V[Q],:
MX[GI 5Y'5SOR!K^2-:88?7W:SS^'+LM"QUM:1W(HQ>F>+.R1U/#SWOC0<O@2
M%-\\__S$S'=Z'OH*O+"^F1>L6IM_!BABDD3S^;R?[?]\\*KYYCYL;_ZY\(Y6
M:P[%2[ 5@+KS))HU7]"Z@99;\P7^1FHM"_.*GTM9A1M@?26E[@9(H/]+QN5_
M 5!+ P04    " "15@93VM#!,I8#   ^#0  &0   'AL+W=O<FMS:&5E=',O
M<VAE970Q,2YX;6SM5VV/VS8,_BN"-PPM(,26++]U28#DVJ$=T.)PUZV?%8>)
MA;.E3%::Z[\O;2>N;TZR%BB&%=B7T'K$5Y%4J.G!V(>Z '#DL2IU/?,*YW8O
M?+_."ZAD/3$[T+BS,;:2#I=VZ]<["W+="E6ESX,@]BNIM#>?MMBMG4_-WI5*
MPZTE];ZJI/VTA-(<9A[S3L"=VA:N ?SY=">W< _NC]VMQ97?:UFK"G2MC"86
M-C-OP5XL1</?,ORIX% /ODD3R<J8AV;Q9CWS@L8A*"%WC0:)Y"/<0%DVBM"-
MOXXZO=YD(SC\/FG_K8T=8UG)&FY,^4&M73'S4H^L82/WI;LSA]=PC"=J].6F
MK-M?<NAX6>B1?%\[4QV%T8-*Z8[*Q^,Y# 32X(( /PKPUN_.4.OE2^GD?&K-
M@=B&&[4U'VVHK30ZIW23E'MG<5>AG)O?P4?0>YCZ#I4UD)\?!9>=(+\@&).W
M1KNB)J_T&M9/Y7UTHO>$GSQ9\JL*?]_K"0D#2GC V15]81]9V.H+KT<VN:)*
M]*I$JTI\^R%=%WQG'! Q(4<%Y)>?4AZ$O_YGZ/O" I"J2R0TB>RW[M7C^8T3
MQ7Q!FZ^+P(DV"1TN@J_8.=%G2A-7F'TM];I^3NX_U0ZJNM_^F; @H"Q,!T@2
MTY1%0Y:44<:S(1)EE$6<+#8.L+7M ]Y^?[<L$M0;C^$8)<=^9BG-!K&<:,II
M&@CRWCA9CJH _4 C/!%#A'.:Q4/O>1K08& 1$<%H%HU=^[^*OK**WAGK"K*H
MP*I</JDERH-A-C"I3RLIHPGC3X$HB<FB5I+<REQM5#XRSEA,8\''>(#XP%P?
M <>$A^&9 PBI"#EYM;?XGWQFFPJ>CN"$"G&FB@,:!M'8)0Q8I#]HN8XJYR7D
M4*W DI!]2SE=*)H;+&.+0P0IE5RI4CD%PWLHC&C$AM<0#_$<QOGXT>AW:>Y_
MHZF7LI0Z!TI6L%5:*[TE9H,,0';8Y^:+=Y@:3ID8MG$H*';CY>0AD%$>,2RI
M#5B+S8&J[84_=<YHFHW;-Z9<C,L!#X6QY,S=0!,NL 5SL]6JG5_1XKJUC@=]
MR?2S%(LP>3[&,YJ%YW"6T#@Z+Q!%Z>!0,<$7CW-4^AB4& 3UCQSG1C1_,-/B
M1;UM)_>:Y&:O73?>]FC_.%AT,_$7]NYE\59:K(B:E+!!T6"21!ZQW;3>+9S9
MM1/RRCB<M]O/ A\X8!L&W-\8G...B\9 _V2:?P902P,$%     @ D58&4SY#
M^(0U!@  RA$  !D   !X;"]W;W)K<VAE971S+W-H965T,3(N>&ULQ5AM;]LV
M$/XKA#<,'>#9CI.V09L$:-(-V[ .0=)MGVGI9+&A1)>D['B_?L\=)5EVFJ #
MVNU#(HGBO3UW]QSELXWS=Z$DBNJ^LG4X'Y4QKEY-IR$KJ=)AXE94XTWA?*4C
M'OUR&E:>="Y"E9W.9[,7TTJ;>G1Q)FO7_N+,-=&:FJZ]"DU5:;^]).LVYZ.C
M4;=P8Y9EY(7IQ=E*+^F6XA^K:X^G::\E-Q75P;A:>2K.1V^.7EV>\'[9\*>A
M31C<*XYDX=P=/_R2GX]F[!!9RB)KT+BLZ8JL945PXV.K<]2;9,'A?:?])XD=
ML2QTH"MG_S)Y+,]'IR.54Z$;&V_<YF=JXWG.^C)G@_Q7F[3WY'BDLB9$5[7"
M\* R=;KJ^Q:'@<#I[!&!>2LP%[^3(?'RK8[ZXLR[C?*\&]KX1D(5:3AG:D[*
M;?1X:R 7+VXH([/6"TM*U[EZ8Y$E76>DD&]UY2DW4?WF0J!P-HVPQU+3K-5]
MF73/']']0KUS=2R#^K'.*=^7G\+/WMEYY^SE_$F%OS;U1!W/QFH^FQ\]H>^X
M#_Y8]!U_X>#WC)WTQD[$V,E70?IIW;^[2.KY1.ULA'TCX:$5]=TWI_/9\6O>
MI*+7.:')!N*>GU?.1\H5VB>6I*Y<'9PUN>:U2VW%_5NN/>R/O,5XI2O(F+^Q
M(W,A*IU_0!7CB1W0]59MO(GT@RN*Y&(-XG&%TON>9LE3*YY.=J[>9V1-4,PV
M$7^L8B?Z4'*L-J7)2@[$4Z Z\GX*T:"=B<W2_0KT ._2?N76Y"543VS#U$M$
M40.=+#;:*FL*$7.-'X(UYDW!Y.1%H/&>38'D[A <7L$A,%"*M[.>X@S-BB&6
MJL S93H RTU)"&NU\F[E#?9.U'NXU/L- #3,!Q /.Y,R4ZT +N-T]/(UXJB7
MCGW1'%4 B<;6^EK;1B=O( KV8'K4"V--W(Y5:4 XWF0<*@ 1>+PA8#L6\:*)
M#>HBH=:J,3VB$OP0?GZW#Y7B: O4D)OTR6QXY^.6E1>TV#P@L0;WB+A2T0D*
M5HI1+R7:6MMM, R@X3:SP1UDAOF4N [S*= GO'2508>9<,>H([8]V-]2) _6
ME5 [K/D]29TW]6'M>OK8&*0&R:\QTQAX=I3NR6<FD/K0Y$M9U M,2%$'Z.#;
M6!4LBX"W$FH@5")R(EG:PS26FHNJL;GB:H"GUD*F*)"2SK^UD:'YH!]8-3*Y
MJY^Q]!]ISZ4>4IWM^BGJ.TEBW,&8D*@;H.B:H#XVNHZ&2V&=: T+MGLNT#7.
MMQZ;.K/-'L>HN%W1TS4G"Y59)K-CC%LP7XM21)/ETGJV&_%#T:X+^QSO^G#\
M.4TX?M"%J05:/*5BLE(S,\ F]&6?X*FVW5+)[HFVM=17I!BC^XB8!FW$YPUA
M7PWWJ\6@$-?:&TY @;4Z0PT\C7ZE^Q+AANS,AI8P5,L 7*LKO94Z"#L5+-WE
M;^AU3S<[+WJ4QU $^H<VJ?=#)ND"!)WHIATT4ID;'-#XRG88/>J@:G"(\':;
M*-ERVWMM=Y"_VS4<+/%I-:!<,"0L$/2TYN,<JVI3TP4^''F",R#$R(,A!A\I
M9)H1$A4G,"6Q(=MV3@U:GZ/"YKRE#-!T(?/.@)F-%\=*Q.4RJ<P<_"<$$G82
M(K_@2'M>9A8#*7&A+?$^![=DD=M]R=,O'O@P[HBOU8S-/-!2":T8!)2,32,8
ME<9#&,?B+&U&@I&+0 <Z)^JJU/62!(F#D#_!+W"V&\X<3PF66);M(2"-H5;-
M$RS53>UAY$Q!;4=S(;E\0%I="3!Y8;; /2Z2A%XH'?*>M2$\S-K#$+J1PGX^
M.!7Q=B'MTE,BO&#N596.N<3'7(5#*O6'5-F"&SR"<'EJHC7M]E7O\_]]?2^!
M[ 70O;H]C.PQ'7W$CRX<7@6:P</L,]X<7I\9/I2BH %Q^+Y?;H^E8S02S@1R
M@D/6VYKI-GTK=T?SU_]RY?3HM'^Z?F+,?LKGH:8OM7XEW9$.TU_+YC,$O8/W
M)E&*^0^#[#.**OR"N7S$_*>^]*:#[VN,O:7\BA"4$&?ZU.Y7^Q\JWJ3O\]WV
M]"O'.R2,OULL%1"=35X^'^% (+\<I(?H5O*UOG 1,U9N2P(->=Z ]X7#MU[[
MP ;ZGV\N_@%02P,$%     @ D58&4[?$C%>$!   / T  !D   !X;"]W;W)K
M<VAE971S+W-H965T,3,N>&ULQ5=9;]LX$/XKA'>Q: '%EB7;L;..@2;M8KM
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M]F_#:=L2-^[MPW+)]))+ P(+@D8'AZ, =-NLVX55M6^0"V6IW?II2>\;:N=
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MH@RH&X!H] .-*R$S<!J<$<K.D#Y"(44B"^E6L$>2>"]=@-P'(MXH4*FL1,$
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MC(8%Z/M,TRV_F;""]OT]_0M02P,$%     @ D58&4VJOWZSR!0  F0T  !D
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ML9OIXE9A1!>%;X%?BE<: VJ^24S>H075@EJ0HZ"M7;,)-6S1V?+*)AB8-)8
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M]R *O #S<X]K7_?"&VR^QL[_!U!+ P04    " "15@93?@;]*5@$  !!"@
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M7/6ID%SAU.0Z MWW#-_@M'5(FZSGX<-1X6*'^M!*CQ4$A:&Q E2O!W]T#^3
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MV6" [[7!X36\A #CK7'U#U!+ P04    " "15@93+VTT!8\"   0!P  &0
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M.ROI*(P+E(8K"1HWDVC6NY@/O']P^,%Q:P[FX"MY5.K)&S=L$J4^(2PQLYY
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M--#"!PD>)7$\B@1E,EC,/':G%S-56\XDW&EB:B&H?ET"5\T\& 0[X)YM2NN
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M6$1P^#(UT;"IX""AG4/W11CZD]"/1!#,TUROPHP<U2Y^K_;DDS/:%V48O$&
M^I('IVO>?PS0N I!9&9$J\@L>181"I$9'XO(NY J8%_UX'39V^!"[93KV*@C
MU3.IL7^:FLN^M,#X#4+3IVYX3>Z^.C3CO.K'D1D:BRB(S-",17$8FJ$9BZ)X
M=B$T?1J'TWG\5U(IVD('!V?JF$2%K.F/9"I"J,^4R'M]A%"?+!%\PPBUSL[V
MK)ZQKUW91,BL-!91$)D[9)O(#XT(N8,39TGX3A_UA4(X5+(Y=G2MW>>$3_H0
M;;3?P]L5M+0G\';=?"SHW3??+KYBOJ.54).V55UY-[%:2[SY'-#<2+;7Y]TG
M)M7I65_F!&>$UP+U?,N8?+FI.^@^RBS_ 5!+ P04    " "15@93@SNEE.@$
M  #S%P  &0   'AL+W=O<FMS:&5E=',O<VAE970S."YX;6RUF%U/XS@4AO^*
M5<U*("TD_DC2CDJE!81V1X,& ;-S;5J76I/$W=BE\._73D)<B.WLELX-)&G.
M><]YXSRQ/=V*ZJ=<,:; <Y&7\FRT4FK].8KD?,4**D_%FI7ZEZ6H"JKT:?48
MR77%Z*(.*O((Q7$:%927H]FTOG93S:9BHW)>LIL*R$U1T.KEG.5B>S:"H]<+
MM_QQI<R%:#9=TT=VQ]3W]4VESZ(NRX(7K)1<E*!BR[/1'_#S!<$FH+[C;\ZV
M<N<8F%8>A/AI3OY:G(UB4Q'+V5R9%%3_>V(7+,]-)EW'/VW24:=I G>/7[-?
MU<WK9AZH9!<B_\$7:G4V&H_ @BWI)E>W8OLG:QM*3+ZYR&7]%VS;>^,1F&^D
M$D4;K"LH>-G\I\^M$3L!*/$$H#8 O0N Q!. VX#:N:BIK&[KDBHZFU9B"RIS
MM\YF#FIOZFC=#2_-8[Q3E?Z5ZS@U^\JT!Q*<@*N-VE0,7/.2%YL"7%"Y M\V
M:JF?,Z#E ORH#6&+$_K$*OV P2TSHX27CZ#. >Y95=1W7G(Y%YM2@5NJ&#BZ
M9(KR7!YKC>]WE^#HTS'X!'@)[E=B(_7]<AHIW8@I)YJW19\W12-/T5\VY2G
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M1MZ9!QGF;%&:>[G\CBL_ \N7RE*[7U@VL4GL0;K01E8K,"FHN&B^['55APT
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M"K)ZT4I;_.VTE6-I39INDR9%R;I=$_LD1L60 4[:?S_ CI5L3N0;&_#[O.?
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MZUM"-'=DTU%\9X_HFBM]X&VSU+\5$$:@OV\X5\>..?7=CRK["U!+ P04
M" "15@93>R"_I_$"  !I"0  &0   'AL+W=O<FMS:&5E=',O<VAE970T,RYX
M;6RE5EUOVC 4_2M6M(=6:LEW A4@%<*T3:I4T75[-LF%6$UL9CNE^_>SG9!!
M2"G:7L"^/N=<'_O&]GC'^(O( 21Z*PLJ)E8NY?;.MD6:0XG%@&V!JI$UXR66
MJLLWMMARP)DAE87M.4YDEYA0:SHVL4<^';-*%H3"(T>B*DO,?\^@8+N)Y5K[
MP))L<JD#]G2\Q1MX OF\?>2J9[<J&2F!"L(HXK">6/?NW2+6> /X06 G#MI(
M.UDQ]J([7[.)Y>@)00&IU I8_;W"'(I""ZEI_&HTK3:E)AZV]^J?C7?E984%
MS%GQDV0RGUA#"V6PQE4AEVSW!1H_H=9+62',+]K5V,BS4%H)R<J&K&90$EK_
MX[=F'0X(2J>?X#4$KTL(WB'X#<&_-$/0$()+,X0-P5BW:^]FX1(L\73,V0YQ
MC59JNF%6W[#5>A&JZ^1)<C5*%$].E_ *M )TBQ)8 ^>0J=VO0U<)2$P*<:T&
MGY\2=/7I&GU"A*+O.:L$IID8VU)-00O9:9-N5J?SWDGGHP=&92[0@F:0]?"3
M\_SH#-]6UEO_WM[_S#LK^*VB ^0[-\AS/+=G/O/+Z4Z?G?_+OOCG[$>+X;?%
MX!L]_WPQ#,Y(!:U48*2"=Z1FN, TA1NT@@VAE- -8FLD<T!;X(3U;?VL5HR,
MHC[?7J>>YP;>V'X]W)!3E!^X3G2,2GJT?"<<'J,6/:B1%[HMZLAZV%H/SUJO
M/R1<:,/-M]3GMA8)#W.[PY'?<7N*BKR@8R,Y!?F.Z\8=LZ<HUXF]H-]LU)J-
MSII=0LHVE)A#7_G-.H=(G_'H9!ZWP[ [VWD/:C3R.ZBD!^7&4=BUWB<6'E3#
MD?6XM1Y?5N) LX^+.SXMVS!T.SLY[T$Y07=MDHNT%A]IU:;M@[NC!+XQE[9
M*:NHK$^.-MJ^"^[-==B)S]R[N=L33]0[HK[V_\K7CY 'S-79(% !:Y7*&<1J
M@WA]L=<=R;;FYEHQJ>Y!T\S56PBX!JCQ-6-RW]$)VM?5] ]02P,$%     @
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M+#2Z^F0%J&Y".\-0[:=B0\;.F-^6]E%#Y0*LOR R>\,E&)[)]"]02P,$%
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M$JX \'W-F#R\* ?MC73V'U!+ P04    " "15@93PB@.Y&X#  !=#0  &0
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MHXX7U./ R,K=P-;2X'W.O=K. LHNP/E"2O,XL)>Z]F_"XE]02P,$%     @
MD58&4X1_<%5" P  L L  !D   !X;"]W;W)K<VAE971S+W-H965T-3(N>&UL
MK59=;YLP%/TK%NJD5MH*AD#2*(G4EE3KI$I5O_;LPDV""G9FFR3]][,-H:00
MFK5[2;"YY]QSC.U[1VO&7\0"0*)-EE(QMA92+H>V+:(%9$2<LB50]6;&>$:D
M&O*Y+98<2&Q 66J[CA/8&4FH-1F9N5L^&;%<I@F%6XY$GF6$OUY RM9C"UO;
MB;MDOI!ZPIZ,EF0.]R ?E[=<C>R*)4XRH")A%'&8C:US/+S"!F BGA)8B]HS
MTE:>&7O1@^MX;#E:$:0024U!U-\*+B%--9/2\:<DM:J<&EA_WK)?&?/*S#,1
M<,G2WTDL%V-K8*$89B1/Y1U;_X32D*_Y(I8*\XO616Q/!4>YD"PKP4I!EM#B
MGVS*A:@!%$\[P"T![GM ;P_ *P'>H1EZ):!W: :_!/B' H(2$)BU+Q;+K'1(
M))F,.%LCKJ,5FWXPG\N@U0(G5.^L>\G5VT3AY.2:1BP#]$ V(-!Q")(DJ3A!
M/]#C?8B.CT[0$4HH>EBP7! :BY$M55(-M:,RP461P-V3P$,WC,J%0%,:0]R"
M#[OQ00?>5F8KQ^[6\87;2?@KIZ?(<[XCUW%QBY[+P^%.FYVO99]^+?M5-SR$
M2,%Q&WQG+;UJ]WB&S]O#]T32G!0W1*KN*$(CZ&#M5:P]P]KKWI.2;-"2LU6B
M;[&VC5>P!(9%WZ"KB3?HN2-[5?^:S2#7[>/=H+ 9Y/N!MQLT;4GGX;=T.U;]
MRJK_D555#P3H0Y:\V8:-JAP"VDP7?'Y-!?8=YYV?9I#KU8)VI :5U.!@J:J(
M:9F%XC:504- WVVH; 9A#^^3V:]D]CMEAC #SB$VZTB$ "F^(PJR366_(<#'
MWB!X)_.@J*M^<POU!SYN-S.HS S^U0Q:?73F"F^#AIXSW/@"'P3M:#ZK-)]U
M:KXAFR3+LXY[ #MOQ<GYC_<+KA4]W*GQ7A*92\9?ZX>.$PGHF A$T!)X!%2>
MM):[;FH7GSK.M[:Z\EE@^%G@]!/ 8D'M6D.1 9^;UD^@B.54%M6AFJW:RW/3
M5+V;O\##2]PR'^+AM&@>W^B+7O:&\'E"!4IAIE(YIWUU\'C1'A8#R9:FG7EF
M4C5'YG&A6FK@.D"]GS$FMP.=H&K2)W\!4$L#!!0    ( )%6!E/<N?QZNP,
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M^%QS\,IIR<7&F4=@6"BA=&!L96VH(5CJ!P</W0R*WO*47"K=Q'81W-]YN_P
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MTZ(=I7\=Q_:0T^FO8R*T>EOH^7%H5 J.W&,EC'%BM/XU@LD/['X 4$L#!!0
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M/.^:Y@#WG>H?1M;KGYBL?Q[SY3]02P,$%     @ D58&4P^45$C: 0  62
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MCGH[@=Z.>CN!WC[:[";0VU%O)]#;46\GT-M1;R?0VU%O)]#;46\GT#NBWI%
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M8U!R;W!S+V-O<F4N>&UL4$L! A0#%     @ D58&4YE<G",0!@  G"<  !,
M             ( !S0$  'AL+W1H96UE+W1H96UE,2YX;6Q02P$"% ,4
M" "15@93)*J'G#0%  "#%0  &               @($."   >&PO=V]R:W-H
M965T<R]S:&5E=#$N>&UL4$L! A0#%     @ D58&4[Q-UNB_!@  ^1X  !@
M             ("!> T  'AL+W=O<FMS:&5E=',O<VAE970R+GAM;%!+ 0(4
M Q0    ( )%6!E-DI0.;6P,  !(+   8              " @6T4  !X;"]W
M;W)K<VAE971S+W-H965T,RYX;6Q02P$"% ,4    " "15@93BVBKG5P&  #=
M&0  &               @('^%P  >&PO=V]R:W-H965T<R]S:&5E=#0N>&UL
M4$L! A0#%     @ D58&4R)JN]9B @  FP8  !@              ("!D!X
M 'AL+W=O<FMS:&5E=',O<VAE970U+GAM;%!+ 0(4 Q0    ( )%6!E/P#Z7-
M>PD  ,@\   8              " @2@A  !X;"]W;W)K<VAE971S+W-H965T
M-BYX;6Q02P$"% ,4    " "15@93<P#K+CT&   ?&   &
M@('9*@  >&PO=V]R:W-H965T<R]S:&5E=#<N>&UL4$L! A0#%     @ D58&
M4X*Q=X"5!   ]PH  !@              ("!3#$  'AL+W=O<FMS:&5E=',O
M<VAE970X+GAM;%!+ 0(4 Q0    ( )%6!E-HR_4*"04  %4.   8
M      " @1<V  !X;"]W;W)K<VAE971S+W-H965T.2YX;6Q02P$"% ,4
M" "15@93F;,!<8D)  ">(0  &0              @(%6.P  >&PO=V]R:W-H
M965T<R]S:&5E=#$P+GAM;%!+ 0(4 Q0    ( )%6!E/:T,$RE@,  #X-   9
M              " @19%  !X;"]W;W)K<VAE971S+W-H965T,3$N>&UL4$L!
M A0#%     @ D58&4SY#^(0U!@  RA$  !D              ("!XT@  'AL
M+W=O<FMS:&5E=',O<VAE970Q,BYX;6Q02P$"% ,4    " "15@93M\2,5X0$
M   \#0  &0              @(%/3P  >&PO=V]R:W-H965T<R]S:&5E=#$S
M+GAM;%!+ 0(4 Q0    ( )%6!E.10/>5SP(  #T'   9              "
M@0I4  !X;"]W;W)K<VAE971S+W-H965T,30N>&UL4$L! A0#%     @ D58&
M4^A\:Q9  P  , @  !D              ("!$%<  'AL+W=O<FMS:&5E=',O
M<VAE970Q-2YX;6Q02P$"% ,4    " "15@93U</MT=4#  #B"   &0
M        @(&'6@  >&PO=V]R:W-H965T<R]S:&5E=#$V+GAM;%!+ 0(4 Q0
M   ( )%6!E,6LMY?300  ,$*   9              " @9->  !X;"]W;W)K
M<VAE971S+W-H965T,3<N>&UL4$L! A0#%     @ D58&4WA]%$< !0  BP\
M !D              ("!%V,  'AL+W=O<FMS:&5E=',O<VAE970Q."YX;6Q0
M2P$"% ,4    " "15@93:J_?K/(%  "9#0  &0              @(%.:
M>&PO=V]R:W-H965T<R]S:&5E=#$Y+GAM;%!+ 0(4 Q0    ( )%6!E-^!OTI
M6 0  $$*   9              " @7=N  !X;"]W;W)K<VAE971S+W-H965T
M,C N>&UL4$L! A0#%     @ D58&4R]M- 6/ @  $ <  !D
M ("!!G,  'AL+W=O<FMS:&5E=',O<VAE970R,2YX;6Q02P$"% ,4    " "1
M5@93"@>;.9\#  #N!P  &0              @(',=0  >&PO=V]R:W-H965T
M<R]S:&5E=#(R+GAM;%!+ 0(4 Q0    ( )%6!E.UA(7H9 ,  (4'   9
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M970R-RYX;6Q02P$"% ,4    " "15@93PC=#HBL#  #8"   &0
M    @($\C@  >&PO=V]R:W-H965T<R]S:&5E=#(X+GAM;%!+ 0(4 Q0    (
M )%6!E->3-J:I (  )(&   9              " @9Z1  !X;"]W;W)K<VAE
M971S+W-H965T,CDN>&UL4$L! A0#%     @ D58&4Q>46P-O @  ,08  !D
M             ("!>90  'AL+W=O<FMS:&5E=',O<VAE970S,"YX;6Q02P$"
M% ,4    " "15@93YY>'<($"  #[!0  &0              @($?EP  >&PO
M=V]R:W-H965T<R]S:&5E=#,Q+GAM;%!+ 0(4 Q0    ( )%6!E/QXNTM]P(
M +\'   9              " @=>9  !X;"]W;W)K<VAE971S+W-H965T,S(N
M>&UL4$L! A0#%     @ D58&4XBTH+&X @  G D  !D              ("!
M!9T  'AL+W=O<FMS:&5E=',O<VAE970S,RYX;6Q02P$"% ,4    " "15@93
MMKLQ:<0#  !$#P  &0              @('TGP  >&PO=V]R:W-H965T<R]S
M:&5E=#,T+GAM;%!+ 0(4 Q0    ( )%6!E.B^?CS10(  ,<&   9
M      " @>^C  !X;"]W;W)K<VAE971S+W-H965T,S4N>&UL4$L! A0#%
M  @ D58&4PA;L<H7!   GQ$  !D              ("!:Z8  'AL+W=O<FMS
M:&5E=',O<VAE970S-BYX;6Q02P$"% ,4    " "15@93+4EHJCT$  "@$0
M&0              @(&YJ@  >&PO=V]R:W-H965T<R]S:&5E=#,W+GAM;%!+
M 0(4 Q0    ( )%6!E.#.Z64Z 0  /,7   9              " @2VO  !X
M;"]W;W)K<VAE971S+W-H965T,S@N>&UL4$L! A0#%     @ D58&4S%0T FK
M @  70<  !D              ("!3+0  'AL+W=O<FMS:&5E=',O<VAE970S
M.2YX;6Q02P$"% ,4    " "15@93_S;.@WP#   D#0  &0
M@($NMP  >&PO=V]R:W-H965T<R]S:&5E=#0P+GAM;%!+ 0(4 Q0    ( )%6
M!E.0]%=^NP,  +,.   9              " @>&Z  !X;"]W;W)K<VAE971S
M+W-H965T-#$N>&UL4$L! A0#%     @ D58&4YU%D*I* @  M 8  !D
M         ("!T[X  'AL+W=O<FMS:&5E=',O<VAE970T,BYX;6Q02P$"% ,4
M    " "15@93>R"_I_$"  !I"0  &0              @(%4P0  >&PO=V]R
M:W-H965T<R]S:&5E=#0S+GAM;%!+ 0(4 Q0    ( )%6!E-![V/-0@(  #(%
M   9              " @7S$  !X;"]W;W)K<VAE971S+W-H965T-#0N>&UL
M4$L! A0#%     @ D58&4P6LNVH8!   G0X  !D              ("!]<8
M 'AL+W=O<FMS:&5E=',O<VAE970T-2YX;6Q02P$"% ,4    " "15@93PB@.
MY&X#  !=#0  &0              @(%$RP  >&PO=V]R:W-H965T<R]S:&5E
M=#0V+GAM;%!+ 0(4 Q0    ( )%6!E,3<9.K^ (  .\(   9
M  " @>G.  !X;"]W;W)K<VAE971S+W-H965T-#<N>&UL4$L! A0#%     @
MD58&4PO9A7]F @  008  !D              ("!&-(  'AL+W=O<FMS:&5E
M=',O<VAE970T."YX;6Q02P$"% ,4    " "15@93S'E7A*@#   A#   &0
M            @(&UU   >&PO=V]R:W-H965T<R]S:&5E=#0Y+GAM;%!+ 0(4
M Q0    ( )%6!E,4O[VJ7P(  *L&   9              " @938  !X;"]W
M;W)K<VAE971S+W-H965T-3 N>&UL4$L! A0#%     @ D58&4Q_M^/EY P
M,@P  !D              ("!*ML  'AL+W=O<FMS:&5E=',O<VAE970U,2YX
M;6Q02P$"% ,4    " "15@93A']P54(#  "P"P  &0              @(':
MW@  >&PO=V]R:W-H965T<R]S:&5E=#4R+GAM;%!+ 0(4 Q0    ( )%6!E/<
MN?QZNP,  )D2   9              " @5/B  !X;"]W;W)K<VAE971S+W-H
M965T-3,N>&UL4$L! A0#%     @ D58&4Y5]T<)Q @  _04  !D
M     ("!1>8  'AL+W=O<FMS:&5E=',O<VAE970U-"YX;6Q02P$"% ,4
M" "15@93G*I])QH#  !J$0  #0              @ 'MZ   >&PO<W1Y;&5S
M+GAM;%!+ 0(4 Q0    ( )%6!E.7BKL<P    !,"   +              "
M 3+L  !?<F5L<R\N<F5L<U!+ 0(4 Q0    ( )%6!E,G8Z+=K 0  *(C   /
M              "  1OM  !X;"]W;W)K8F]O:RYX;6Q02P$"% ,4    " "1
M5@93#Y142-H!  !9(   &@              @ 'T\0  >&PO7W)E;',O=V]R
M:V)O;VLN>&UL+G)E;'-02P$"% ,4    " "15@93(5VG)LT!   D(   $P
M            @ $&]   6T-O;G1E;G1?5'EP97-=+GAM;%!+!08     /@ ^
+ .D0   $]@     !

end
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>67
<FILENAME>Show.js
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
// Edgar(tm) Renderer was created by staff of the U.S. Securities and Exchange Commission.  Data and content created by government employees within the scope of their employment are not subject to domestic copyright protection. 17 U.S.C. 105.
var Show={};Show.LastAR=null,Show.showAR=function(a,r,w){if(Show.LastAR)Show.hideAR();var e=a;while(e&&e.nodeName!='TABLE')e=e.nextSibling;if(!e||e.nodeName!='TABLE'){var ref=((window)?w.document:document).getElementById(r);if(ref){e=ref.cloneNode(!0);
e.removeAttribute('id');a.parentNode.appendChild(e)}}
if(e)e.style.display='block';Show.LastAR=e};Show.hideAR=function(){Show.LastAR.style.display='none'};Show.toggleNext=function(a){var e=a;while(e.nodeName!='DIV')e=e.nextSibling;if(!e.style){}else if(!e.style.display){}else{var d,p_;if(e.style.display=='none'){d='block';p='-'}else{d='none';p='+'}
e.style.display=d;if(a.textContent){a.textContent=p+a.textContent.substring(1)}else{a.innerText=p+a.innerText.substring(1)}}}
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>68
<FILENAME>report.css
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
/* Updated 2009-11-04 */
/* v2.2.0.24 */

/* DefRef Styles */
..report table.authRefData{
	background-color: #def;
	border: 2px solid #2F4497;
	font-size: 1em;
	position: absolute;
}

..report table.authRefData a {
	display: block;
	font-weight: bold;
}

..report table.authRefData p {
	margin-top: 0px;
}

..report table.authRefData .hide {
	background-color: #2F4497;
	padding: 1px 3px 0px 0px;
	text-align: right;
}

..report table.authRefData .hide a:hover {
	background-color: #2F4497;
}

..report table.authRefData .body {
	height: 150px;
	overflow: auto;
	width: 400px;
}

..report table.authRefData table{
	font-size: 1em;
}

/* Report Styles */
..pl a, .pl a:visited {
	color: black;
	text-decoration: none;
}

/* table */
..report {
	background-color: white;
	border: 2px solid #acf;
	clear: both;
	color: black;
	font: normal 8pt Helvetica, Arial, san-serif;
	margin-bottom: 2em;
}

..report hr {
	border: 1px solid #acf;
}

/* Top labels */
..report th {
	background-color: #acf;
	color: black;
	font-weight: bold;
	text-align: center;
}

..report th.void	{
	background-color: transparent;
	color: #000000;
	font: bold 10pt Helvetica, Arial, san-serif;
	text-align: left;
}

..report .pl {
	text-align: left;
	vertical-align: top;
	white-space: normal;
	width: 200px;
	white-space: normal; /* word-wrap: break-word; */
}

..report td.pl a.a {
	cursor: pointer;
	display: block;
	width: 200px;
	overflow: hidden;
}

..report td.pl div.a {
	width: 200px;
}

..report td.pl a:hover {
	background-color: #ffc;
}

/* Header rows... */
..report tr.rh {
	background-color: #acf;
	color: black;
	font-weight: bold;
}

/* Calendars... */
..report .rc {
	background-color: #f0f0f0;
}

/* Even rows... */
..report .re, .report .reu {
	background-color: #def;
}

..report .reu td {
	border-bottom: 1px solid black;
}

/* Odd rows... */
..report .ro, .report .rou {
	background-color: white;
}

..report .rou td {
	border-bottom: 1px solid black;
}

..report .rou table td, .report .reu table td {
	border-bottom: 0px solid black;
}

/* styles for footnote marker */
..report .fn {
	white-space: nowrap;
}

/* styles for numeric types */
..report .num, .report .nump {
	text-align: right;
	white-space: nowrap;
}

..report .nump {
	padding-left: 2em;
}

..report .nump {
	padding: 0px 0.4em 0px 2em;
}

/* styles for text types */
..report .text {
	text-align: left;
	white-space: normal;
}

..report .text .big {
	margin-bottom: 1em;
	width: 17em;
}

..report .text .more {
	display: none;
}

..report .text .note {
	font-style: italic;
	font-weight: bold;
}

..report .text .small {
	width: 10em;
}

..report sup {
	font-style: italic;
}

..report .outerFootnotes {
	font-size: 1em;
}
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>69
<FILENAME>FilingSummary.xml
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<XML>
<?xml version='1.0' encoding='utf-8'?>
<FilingSummary>
  <Version>3.21.2</Version>
  <ProcessingTime/>
  <ReportFormat>html</ReportFormat>
  <ContextCount>149</ContextCount>
  <ElementCount>318</ElementCount>
  <EntityCount>1</EntityCount>
  <FootnotesReported>false</FootnotesReported>
  <SegmentCount>40</SegmentCount>
  <ScenarioCount>0</ScenarioCount>
  <TuplesReported>false</TuplesReported>
  <UnitCount>5</UnitCount>
  <MyReports>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R1.htm</HtmlFileName>
      <LongName>00090 - Document - Document and Entity Information</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DocumentDocumentAndEntityInformation</Role>
      <ShortName>Document and Entity Information</ShortName>
      <MenuCategory>Cover</MenuCategory>
      <Position>1</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R2.htm</HtmlFileName>
      <LongName>00100 - Statement - Consolidated Statements of Operations</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations</Role>
      <ShortName>Consolidated Statements of Operations</ShortName>
      <MenuCategory>Statements</MenuCategory>
      <Position>2</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R3.htm</HtmlFileName>
      <LongName>00200 - Statement - Consolidated Statements of Comprehensive Income</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome</Role>
      <ShortName>Consolidated Statements of Comprehensive Income</ShortName>
      <MenuCategory>Statements</MenuCategory>
      <Position>3</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R4.htm</HtmlFileName>
      <LongName>00300 - Statement - Consolidated Balance Sheets</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/StatementConsolidatedBalanceSheets</Role>
      <ShortName>Consolidated Balance Sheets</ShortName>
      <MenuCategory>Statements</MenuCategory>
      <Position>4</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R5.htm</HtmlFileName>
      <LongName>00305 - Statement - Consolidated Balance Sheets (Parenthetical)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/StatementConsolidatedBalanceSheetsParenthetical</Role>
      <ShortName>Consolidated Balance Sheets (Parenthetical)</ShortName>
      <MenuCategory>Statements</MenuCategory>
      <Position>5</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R6.htm</HtmlFileName>
      <LongName>00400 - Statement - Consolidated Statements of Stockholders' Equity</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity</Role>
      <ShortName>Consolidated Statements of Stockholders' Equity</ShortName>
      <MenuCategory>Statements</MenuCategory>
      <Position>6</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R7.htm</HtmlFileName>
      <LongName>00500 - Statement - Consolidated Statements of Cash Flows</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows</Role>
      <ShortName>Consolidated Statements of Cash Flows</ShortName>
      <MenuCategory>Statements</MenuCategory>
      <Position>7</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R8.htm</HtmlFileName>
      <LongName>10101 - Disclosure - Nature of Business</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureNatureOfBusiness</Role>
      <ShortName>Nature of Business</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>8</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R9.htm</HtmlFileName>
      <LongName>10201 - Disclosure - Stock Based Compensation</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureStockBasedCompensation</Role>
      <ShortName>Stock Based Compensation</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>9</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R10.htm</HtmlFileName>
      <LongName>10301 - Disclosure - Leases</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureLeases</Role>
      <ShortName>Leases</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>10</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R11.htm</HtmlFileName>
      <LongName>10401 - Disclosure - Revenue</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureRevenue</Role>
      <ShortName>Revenue</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>11</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R12.htm</HtmlFileName>
      <LongName>10501 - Disclosure - Receivable and Allowance for Credit Losses</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureReceivableAndAllowanceForCreditLosses</Role>
      <ShortName>Receivable and Allowance for Credit Losses</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>12</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R13.htm</HtmlFileName>
      <LongName>10601 - Disclosure - Computation of Net Earnings per Share</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShare</Role>
      <ShortName>Computation of Net Earnings per Share</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>13</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R14.htm</HtmlFileName>
      <LongName>10701 - Disclosure - Accumulated Other Comprehensive Income</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveIncome</Role>
      <ShortName>Accumulated Other Comprehensive Income</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>14</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R15.htm</HtmlFileName>
      <LongName>10801 - Disclosure - Cash, cash equivalents and restricted cash</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCash</Role>
      <ShortName>Cash, cash equivalents and restricted cash</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>15</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R16.htm</HtmlFileName>
      <LongName>10901 - Disclosure - Inventories, net</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureInventoriesNet</Role>
      <ShortName>Inventories, net</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>16</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R17.htm</HtmlFileName>
      <LongName>11001 - Disclosure - Product Warranty</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureProductWarranty</Role>
      <ShortName>Product Warranty</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>17</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R18.htm</HtmlFileName>
      <LongName>11101 - Disclosure - Fair Value Measurements</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureFairValueMeasurements</Role>
      <ShortName>Fair Value Measurements</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>18</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R19.htm</HtmlFileName>
      <LongName>11201 - Disclosure - Financing Arrangements</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureFinancingArrangements</Role>
      <ShortName>Financing Arrangements</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>19</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R20.htm</HtmlFileName>
      <LongName>11301 - Disclosure - Income Taxes</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureIncomeTaxes</Role>
      <ShortName>Income Taxes</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>20</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R21.htm</HtmlFileName>
      <LongName>11401 - Disclosure - Concentration of Risk</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureConcentrationOfRisk</Role>
      <ShortName>Concentration of Risk</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>21</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R22.htm</HtmlFileName>
      <LongName>11501 - Disclosure - Share Repurchase</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureShareRepurchase</Role>
      <ShortName>Share Repurchase</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>22</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R23.htm</HtmlFileName>
      <LongName>11601 - Disclosure - Contingencies</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureContingencies</Role>
      <ShortName>Contingencies</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>23</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R24.htm</HtmlFileName>
      <LongName>11701 - Disclosure - Recent Accounting Guidance</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureRecentAccountingGuidance</Role>
      <ShortName>Recent Accounting Guidance</ShortName>
      <MenuCategory>Notes</MenuCategory>
      <Position>24</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R25.htm</HtmlFileName>
      <LongName>30303 - Disclosure - Leases (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureLeasesTables</Role>
      <ShortName>Leases (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureLeases</ParentRole>
      <Position>25</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R26.htm</HtmlFileName>
      <LongName>30403 - Disclosure - Revenue (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureRevenueTables</Role>
      <ShortName>Revenue (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureRevenue</ParentRole>
      <Position>26</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R27.htm</HtmlFileName>
      <LongName>30503 - Disclosure - Receivable and Allowance for Credit Losses (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureReceivableAndAllowanceForCreditLossesTables</Role>
      <ShortName>Receivable and Allowance for Credit Losses (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureReceivableAndAllowanceForCreditLosses</ParentRole>
      <Position>27</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R28.htm</HtmlFileName>
      <LongName>30603 - Disclosure - Computation of Net Earnings per Share (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShareTables</Role>
      <ShortName>Computation of Net Earnings per Share (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShare</ParentRole>
      <Position>28</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R29.htm</HtmlFileName>
      <LongName>30703 - Disclosure - Accumulated Other Comprehensive Income (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveIncomeTables</Role>
      <ShortName>Accumulated Other Comprehensive Income (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveIncome</ParentRole>
      <Position>29</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R30.htm</HtmlFileName>
      <LongName>30803 - Disclosure - Cash, cash equivalents and restricted cash (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashTables</Role>
      <ShortName>Cash, cash equivalents and restricted cash (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCash</ParentRole>
      <Position>30</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R31.htm</HtmlFileName>
      <LongName>30903 - Disclosure - Inventories, net (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureInventoriesNetTables</Role>
      <ShortName>Inventories, net (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureInventoriesNet</ParentRole>
      <Position>31</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R32.htm</HtmlFileName>
      <LongName>31003 - Disclosure - Product Warranty (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureProductWarrantyTables</Role>
      <ShortName>Product Warranty (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureProductWarranty</ParentRole>
      <Position>32</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R33.htm</HtmlFileName>
      <LongName>31103 - Disclosure - Fair Value Measurements (Tables)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureFairValueMeasurementsTables</Role>
      <ShortName>Fair Value Measurements (Tables)</ShortName>
      <MenuCategory>Tables</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureFairValueMeasurements</ParentRole>
      <Position>33</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R34.htm</HtmlFileName>
      <LongName>40201 - Disclosure - Stock-Based Compensation (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureStockBasedCompensationDetails</Role>
      <ShortName>Stock-Based Compensation (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>34</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R35.htm</HtmlFileName>
      <LongName>40301 - Disclosure - Leases (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureLeasesDetails</Role>
      <ShortName>Leases (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureLeasesTables</ParentRole>
      <Position>35</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R36.htm</HtmlFileName>
      <LongName>40302 - Disclosure - Leases - Operating and Finance Lease Right-of-use-assets and Related Lease Obligations (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails</Role>
      <ShortName>Leases - Operating and Finance Lease Right-of-use-assets and Related Lease Obligations (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>36</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R37.htm</HtmlFileName>
      <LongName>40303 - Disclosure - Leases - Lease Cost (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails</Role>
      <ShortName>Leases - Lease Cost (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>37</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R38.htm</HtmlFileName>
      <LongName>40304 - Disclosure - Leases - Future Minimum Cash Outflow and Weighted-average Remaining Lease Term and Discount Rate (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails</Role>
      <ShortName>Leases - Future Minimum Cash Outflow and Weighted-average Remaining Lease Term and Discount Rate (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>38</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R39.htm</HtmlFileName>
      <LongName>40305 - Disclosure - Leases - Cash Flow by Lease Type (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureLeasesCashFlowByLeaseTypeDetails</Role>
      <ShortName>Leases - Cash Flow by Lease Type (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>39</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R40.htm</HtmlFileName>
      <LongName>40401 - Disclosure - Revenue (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureRevenueDetails</Role>
      <ShortName>Revenue (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureRevenueTables</ParentRole>
      <Position>40</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R41.htm</HtmlFileName>
      <LongName>40402 - Disclosure - Revenue - Revenue by discipline &amp; geographical areas (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails</Role>
      <ShortName>Revenue - Revenue by discipline &amp; geographical areas (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>41</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R42.htm</HtmlFileName>
      <LongName>40403 - Disclosure - Revenue - Contract liabilities (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureRevenueContractLiabilitiesDetails</Role>
      <ShortName>Revenue - Contract liabilities (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>42</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R43.htm</HtmlFileName>
      <LongName>40404 - Disclosure - Revenue - Deferred revenue (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureRevenueDeferredRevenueDetails</Role>
      <ShortName>Revenue - Deferred revenue (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>43</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R44.htm</HtmlFileName>
      <LongName>40501 - Disclosure - Receivable and Allowance for Credit Losses - Allowances for Credit Losses Related to Trade Receivables (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureReceivableAndAllowanceForCreditLossesAllowancesForCreditLossesRelatedToTradeReceivablesDetails</Role>
      <ShortName>Receivable and Allowance for Credit Losses - Allowances for Credit Losses Related to Trade Receivables (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <Position>44</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R45.htm</HtmlFileName>
      <LongName>40601 - Disclosure - Computation of Net Earnings per Share (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShareDetails</Role>
      <ShortName>Computation of Net Earnings per Share (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShareTables</ParentRole>
      <Position>45</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R46.htm</HtmlFileName>
      <LongName>40701 - Disclosure - Accumulated Other Comprehensive Income (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveIncomeDetails</Role>
      <ShortName>Accumulated Other Comprehensive Income (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveIncomeTables</ParentRole>
      <Position>46</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R47.htm</HtmlFileName>
      <LongName>40801 - Disclosure - Cash, cash equivalents and restricted cash (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails</Role>
      <ShortName>Cash, cash equivalents and restricted cash (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashTables</ParentRole>
      <Position>47</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R48.htm</HtmlFileName>
      <LongName>40901 - Disclosure - Inventories, net (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureInventoriesNetDetails</Role>
      <ShortName>Inventories, net (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureInventoriesNetTables</ParentRole>
      <Position>48</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R49.htm</HtmlFileName>
      <LongName>41001 - Disclosure - Product Warranty (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureProductWarrantyDetails</Role>
      <ShortName>Product Warranty (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureProductWarrantyTables</ParentRole>
      <Position>49</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R50.htm</HtmlFileName>
      <LongName>41101 - Disclosure - Fair Value Measurements (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails</Role>
      <ShortName>Fair Value Measurements (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureFairValueMeasurementsTables</ParentRole>
      <Position>50</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R51.htm</HtmlFileName>
      <LongName>41201 - Disclosure - Financing Arrangements (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails</Role>
      <ShortName>Financing Arrangements (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureFinancingArrangements</ParentRole>
      <Position>51</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R52.htm</HtmlFileName>
      <LongName>41301 - Disclosure - Income Taxes (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureIncomeTaxesDetails</Role>
      <ShortName>Income Taxes (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureIncomeTaxes</ParentRole>
      <Position>52</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R53.htm</HtmlFileName>
      <LongName>41401 - Disclosure - Concentration of Risk (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureConcentrationOfRiskDetails</Role>
      <ShortName>Concentration of Risk (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureConcentrationOfRisk</ParentRole>
      <Position>53</Position>
    </Report>
    <Report instance="acls-20210630x10q.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R54.htm</HtmlFileName>
      <LongName>41501 - Disclosure - Share Repurchase (Details)</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://www.axcelis.com/role/DisclosureShareRepurchaseDetails</Role>
      <ShortName>Share Repurchase (Details)</ShortName>
      <MenuCategory>Details</MenuCategory>
      <ParentRole>http://www.axcelis.com/role/DisclosureShareRepurchase</ParentRole>
      <Position>54</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <LongName>All Reports</LongName>
      <ReportType>Book</ReportType>
      <ShortName>All Reports</ShortName>
    </Report>
  </MyReports>
  <InputFiles>
    <File doctype="10-Q" original="acls-20210630x10q.htm">acls-20210630x10q.htm</File>
    <File>acls-20210630.xsd</File>
    <File>acls-20210630_cal.xml</File>
    <File>acls-20210630_def.xml</File>
    <File>acls-20210630_lab.xml</File>
    <File>acls-20210630_pre.xml</File>
    <File>acls-20210630xex31d1.htm</File>
    <File>acls-20210630xex31d2.htm</File>
    <File>acls-20210630xex32d1.htm</File>
    <File>acls-20210630xex32d2.htm</File>
  </InputFiles>
  <SupplementalFiles/>
  <BaseTaxonomies>
    <BaseTaxonomy>http://fasb.org/srt/2020-01-31</BaseTaxonomy>
    <BaseTaxonomy>http://xbrl.sec.gov/dei/2020-01-31</BaseTaxonomy>
    <BaseTaxonomy>http://fasb.org/us-gaap/2020-01-31</BaseTaxonomy>
  </BaseTaxonomies>
  <HasPresentationLinkbase>true</HasPresentationLinkbase>
  <HasCalculationLinkbase>true</HasCalculationLinkbase>
</FilingSummary>
</XML>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>JSON
<SEQUENCE>72
<FILENAME>MetaLinks.json
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
{
 "instance": {
  "acls-20210630x10q.htm": {
   "axisCustom": 0,
   "axisStandard": 19,
   "contextCount": 149,
   "dts": {
    "calculationLink": {
     "local": [
      "acls-20210630_cal.xml"
     ]
    },
    "definitionLink": {
     "local": [
      "acls-20210630_def.xml"
     ],
     "remote": [
      "http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-eedm-def-2020-01-31.xml",
      "http://xbrl.fasb.org/srt/2020/elts/srt-eedm1-def-2020-01-31.xml"
     ]
    },
    "inline": {
     "local": [
      "acls-20210630x10q.htm"
     ]
    },
    "labelLink": {
     "local": [
      "acls-20210630_lab.xml"
     ],
     "remote": [
      "http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-doc-2020-01-31.xml",
      "https://xbrl.sec.gov/dei/2020/dei-doc-2020-01-31.xml"
     ]
    },
    "presentationLink": {
     "local": [
      "acls-20210630_pre.xml"
     ]
    },
    "referenceLink": {
     "remote": [
      "https://xbrl.sec.gov/dei/2020/dei-ref-2020-01-31.xml",
      "http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-ref-2020-01-31.xml"
     ]
    },
    "schema": {
     "local": [
      "acls-20210630.xsd"
     ],
     "remote": [
      "http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd",
      "http://www.xbrl.org/2003/xl-2003-12-31.xsd",
      "http://www.xbrl.org/2003/xlink-2003-12-31.xsd",
      "https://xbrl.sec.gov/dei/2020/dei-2020-01-31.xsd",
      "http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd",
      "http://www.xbrl.org/2005/xbrldt-2005.xsd",
      "http://www.xbrl.org/dtr/type/nonNumeric-2009-12-16.xsd",
      "http://www.xbrl.org/dtr/type/numeric-2009-12-16.xsd",
      "http://xbrl.fasb.org/us-gaap/2020/elts/us-gaap-2020-01-31.xsd",
      "http://xbrl.fasb.org/us-gaap/2020/elts/us-roles-2020-01-31.xsd",
      "http://xbrl.fasb.org/srt/2020/elts/srt-2020-01-31.xsd",
      "http://www.xbrl.org/2006/ref-2006-02-27.xsd",
      "http://xbrl.fasb.org/srt/2020/elts/srt-types-2020-01-31.xsd",
      "http://xbrl.fasb.org/srt/2020/elts/srt-roles-2020-01-31.xsd",
      "https://xbrl.sec.gov/country/2020/country-2020-01-31.xsd",
      "http://xbrl.fasb.org/us-gaap/2020/elts/us-types-2020-01-31.xsd",
      "http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd",
      "http://www.xbrl.org/lrr/role/deprecated-2009-12-16.xsd",
      "http://www.xbrl.org/lrr/role/reference-2009-12-16.xsd",
      "http://xbrl.fasb.org/us-gaap/2020/elts/us-parts-codification-2020-01-31.xsd"
     ]
    }
   },
   "elementCount": 397,
   "entityCount": 1,
   "hidden": {
    "http://fasb.org/us-gaap/2020-01-31": 17,
    "http://xbrl.sec.gov/dei/2020-01-31": 6,
    "total": 23
   },
   "keyCustom": 35,
   "keyStandard": 283,
   "memberCustom": 12,
   "memberStandard": 27,
   "nsprefix": "acls",
   "nsuri": "http://www.axcelis.com/20210630",
   "report": {
    "R1": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "dei:DocumentType",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "document",
     "isDefault": "true",
     "longName": "00090 - Document - Document and Entity Information",
     "role": "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation",
     "shortName": "Document and Entity Information",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "dei:DocumentType",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R10": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "acls:LeaseDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "10301 - Disclosure - Leases",
     "role": "http://www.axcelis.com/role/DisclosureLeases",
     "shortName": "Leases",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "acls:LeaseDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R11": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:RevenueFromContractWithCustomerTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "10401 - Disclosure - Revenue",
     "role": "http://www.axcelis.com/role/DisclosureRevenue",
     "shortName": "Revenue",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:RevenueFromContractWithCustomerTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R12": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:LoansNotesTradeAndOtherReceivablesDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "10501 - Disclosure - Receivable and Allowance for Credit Losses",
     "role": "http://www.axcelis.com/role/DisclosureReceivableAndAllowanceForCreditLosses",
     "shortName": "Receivable and Allowance for Credit Losses",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:LoansNotesTradeAndOtherReceivablesDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R13": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:EarningsPerShareTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "10601 - Disclosure - Computation of Net Earnings per Share",
     "role": "http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShare",
     "shortName": "Computation of Net Earnings per Share",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:EarningsPerShareTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R14": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ComprehensiveIncomeNoteTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "10701 - Disclosure - Accumulated Other Comprehensive Income",
     "role": "http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveIncome",
     "shortName": "Accumulated Other Comprehensive Income",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ComprehensiveIncomeNoteTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R15": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "acls:CashCashEquivalentsAndRestrictedCashTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "10801 - Disclosure - Cash, cash equivalents and restricted cash",
     "role": "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCash",
     "shortName": "Cash, cash equivalents and restricted cash",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "acls:CashCashEquivalentsAndRestrictedCashTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R16": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:InventoryDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "10901 - Disclosure - Inventories, net",
     "role": "http://www.axcelis.com/role/DisclosureInventoriesNet",
     "shortName": "Inventories, net",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:InventoryDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R17": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ProductWarrantyDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "11001 - Disclosure - Product Warranty",
     "role": "http://www.axcelis.com/role/DisclosureProductWarranty",
     "shortName": "Product Warranty",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ProductWarrantyDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R18": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:FairValueDisclosuresTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "11101 - Disclosure - Fair Value Measurements",
     "role": "http://www.axcelis.com/role/DisclosureFairValueMeasurements",
     "shortName": "Fair Value Measurements",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:FairValueDisclosuresTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R19": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:DebtDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "11201 - Disclosure - Financing Arrangements",
     "role": "http://www.axcelis.com/role/DisclosureFinancingArrangements",
     "shortName": "Financing Arrangements",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:DebtDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R2": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:Revenues",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     },
     "groupType": "statement",
     "isDefault": "false",
     "longName": "00100 - Statement - Consolidated Statements of Operations",
     "role": "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations",
     "shortName": "Consolidated Statements of Operations",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:Revenues",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     }
    },
    "R20": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:IncomeTaxDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "11301 - Disclosure - Income Taxes",
     "role": "http://www.axcelis.com/role/DisclosureIncomeTaxes",
     "shortName": "Income Taxes",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:IncomeTaxDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R21": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ConcentrationRiskDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "11401 - Disclosure - Concentration of Risk",
     "role": "http://www.axcelis.com/role/DisclosureConcentrationOfRisk",
     "shortName": "Concentration of Risk",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ConcentrationRiskDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R22": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:StockholdersEquityNoteDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "11501 - Disclosure - Share Repurchase",
     "role": "http://www.axcelis.com/role/DisclosureShareRepurchase",
     "shortName": "Share Repurchase",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:StockholdersEquityNoteDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R23": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:CommitmentsAndContingenciesDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "11601 - Disclosure - Contingencies",
     "role": "http://www.axcelis.com/role/DisclosureContingencies",
     "shortName": "Contingencies",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:CommitmentsAndContingenciesDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R24": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:NewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "11701 - Disclosure - Recent Accounting Guidance",
     "role": "http://www.axcelis.com/role/DisclosureRecentAccountingGuidance",
     "shortName": "Recent Accounting Guidance",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:NewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R25": {
     "firstAnchor": {
      "ancestors": [
       "acls:LeaseDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "acls:LeaseBalanceSheetDisclosureTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "30303 - Disclosure - Leases (Tables)",
     "role": "http://www.axcelis.com/role/DisclosureLeasesTables",
     "shortName": "Leases (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "acls:LeaseDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "acls:LeaseBalanceSheetDisclosureTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R26": {
     "firstAnchor": {
      "ancestors": [
       "us-gaap:RevenueFromContractWithCustomerTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "acls:RevenueFromExternalCustomersByDisciplineAreasTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "30403 - Disclosure - Revenue (Tables)",
     "role": "http://www.axcelis.com/role/DisclosureRevenueTables",
     "shortName": "Revenue (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "us-gaap:RevenueFromContractWithCustomerTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "acls:RevenueFromExternalCustomersByDisciplineAreasTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R27": {
     "firstAnchor": {
      "ancestors": [
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:AccountsReceivableAllowanceForCreditLossTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "30503 - Disclosure - Receivable and Allowance for Credit Losses (Tables)",
     "role": "http://www.axcelis.com/role/DisclosureReceivableAndAllowanceForCreditLossesTables",
     "shortName": "Receivable and Allowance for Credit Losses (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:AccountsReceivableAllowanceForCreditLossTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R28": {
     "firstAnchor": {
      "ancestors": [
       "us-gaap:EarningsPerShareTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "30603 - Disclosure - Computation of Net Earnings per Share (Tables)",
     "role": "http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShareTables",
     "shortName": "Computation of Net Earnings per Share (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "us-gaap:EarningsPerShareTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R29": {
     "firstAnchor": {
      "ancestors": [
       "us-gaap:ComprehensiveIncomeNoteTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "30703 - Disclosure - Accumulated Other Comprehensive Income (Tables)",
     "role": "http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveIncomeTables",
     "shortName": "Accumulated Other Comprehensive Income (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "us-gaap:ComprehensiveIncomeNoteTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R3": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic",
      "reportCount": 1,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     },
     "groupType": "statement",
     "isDefault": "false",
     "longName": "00200 - Statement - Consolidated Statements of Comprehensive Income",
     "role": "http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome",
     "shortName": "Consolidated Statements of Comprehensive Income",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw",
      "decimals": "-3",
      "lang": null,
      "name": "us-gaap:ComprehensiveIncomeNetOfTax",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     }
    },
    "R30": {
     "firstAnchor": {
      "ancestors": [
       "acls:CashCashEquivalentsAndRestrictedCashTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "acls:CashCashEquivalentsAndRestrictedCashTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "30803 - Disclosure - Cash, cash equivalents and restricted cash (Tables)",
     "role": "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashTables",
     "shortName": "Cash, cash equivalents and restricted cash (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "acls:CashCashEquivalentsAndRestrictedCashTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "acls:CashCashEquivalentsAndRestrictedCashTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R31": {
     "firstAnchor": {
      "ancestors": [
       "us-gaap:InventoryDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfInventoryCurrentTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "30903 - Disclosure - Inventories, net (Tables)",
     "role": "http://www.axcelis.com/role/DisclosureInventoriesNetTables",
     "shortName": "Inventories, net (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "us-gaap:InventoryDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfInventoryCurrentTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R32": {
     "firstAnchor": {
      "ancestors": [
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfProductWarrantyLiabilityTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "31003 - Disclosure - Product Warranty (Tables)",
     "role": "http://www.axcelis.com/role/DisclosureProductWarrantyTables",
     "shortName": "Product Warranty (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfProductWarrantyLiabilityTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R33": {
     "firstAnchor": {
      "ancestors": [
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "31103 - Disclosure - Fair Value Measurements (Tables)",
     "role": "http://www.axcelis.com/role/DisclosureFairValueMeasurementsTables",
     "shortName": "Fair Value Measurements (Tables)",
     "subGroupType": "tables",
     "uniqueAnchor": {
      "ancestors": [
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R34": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "us-gaap:DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw",
      "decimals": "-5",
      "first": true,
      "lang": null,
      "name": "us-gaap:AllocatedShareBasedCompensationExpense",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40201 - Disclosure - Stock-Based Compensation (Details)",
     "role": "http://www.axcelis.com/role/DisclosureStockBasedCompensationDetails",
     "shortName": "Stock-Based Compensation (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "us-gaap:DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw",
      "decimals": "-5",
      "first": true,
      "lang": null,
      "name": "us-gaap:AllocatedShareBasedCompensationExpense",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     }
    },
    "R35": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "acls:LeaseDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:LesseeOperatingLeaseExistenceOfOptionToExtend",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40301 - Disclosure - Leases (Details)",
     "role": "http://www.axcelis.com/role/DisclosureLeasesDetails",
     "shortName": "Leases (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "acls:LeaseDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:LesseeOperatingLeaseExistenceOfOptionToExtend",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R36": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:OperatingLeaseRightOfUseAsset",
      "reportCount": 1,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40302 - Disclosure - Leases - Operating and Finance Lease Right-of-use-assets and Related Lease Obligations (Details)",
     "role": "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails",
     "shortName": "Leases - Operating and Finance Lease Right-of-use-assets and Related Lease Obligations (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "acls:LeaseBalanceSheetDisclosureTableTextBlock",
       "acls:LeaseDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug",
      "decimals": "-3",
      "lang": null,
      "name": "acls:OperatingAndFinanceLeaseRightOfUseAsset",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     }
    },
    "R37": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:LeaseCostTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:OperatingLeaseCost",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40303 - Disclosure - Leases - Lease Cost (Details)",
     "role": "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails",
     "shortName": "Leases - Lease Cost (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:LeaseCostTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:OperatingLeaseCost",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     }
    },
    "R38": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "acls:OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:FinanceLeaseLiabilityPaymentsRemainderOfFiscalYear",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40304 - Disclosure - Leases - Future Minimum Cash Outflow and Weighted-average Remaining Lease Term and Discount Rate (Details)",
     "role": "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails",
     "shortName": "Leases - Future Minimum Cash Outflow and Weighted-average Remaining Lease Term and Discount Rate (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "acls:OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:FinanceLeaseLiabilityPaymentsRemainderOfFiscalYear",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     }
    },
    "R39": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "acls:LeaseCashFlowInformationDisclosureTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:OperatingLeasePayments",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40305 - Disclosure - Leases - Cash Flow by Lease Type (Details)",
     "role": "http://www.axcelis.com/role/DisclosureLeasesCashFlowByLeaseTypeDetails",
     "shortName": "Leases - Cash Flow by Lease Type (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "acls:LeaseCashFlowInformationDisclosureTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:OperatingLeasePayments",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     }
    },
    "R4": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:CashAndCashEquivalentsAtCarryingValue",
      "reportCount": 1,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     },
     "groupType": "statement",
     "isDefault": "false",
     "longName": "00300 - Statement - Consolidated Balance Sheets",
     "role": "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets",
     "shortName": "Consolidated Balance Sheets",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug",
      "decimals": "-3",
      "lang": null,
      "name": "us-gaap:AccountsReceivableNetCurrent",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     }
    },
    "R40": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ContractWithCustomerAssetAndLiabilityTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:ContractWithCustomerLiability",
      "reportCount": 1,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40401 - Disclosure - Revenue (Details)",
     "role": "http://www.axcelis.com/role/DisclosureRevenueDetails",
     "shortName": "Revenue (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_srt_ProductOrServiceAxis_acls_NewSystemsRevenueMember_fPmnjFnuFEeqgfLBIms0Xg",
      "decimals": "2",
      "lang": null,
      "name": "acls:PercentageOfPaymentUponShipmentOfTool",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_pure_WuuzkorcYESlvzjgScXZPg",
      "xsiNil": "false"
     }
    },
    "R41": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "acls:RevenueFromExternalCustomersByDisciplineAreasTableTextBlock",
       "us-gaap:RevenueFromContractWithCustomerTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40402 - Disclosure - Revenue - Revenue by discipline & geographical areas (Details)",
     "role": "http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails",
     "shortName": "Revenue - Revenue by discipline & geographical areas (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "acls:RevenueFromExternalCustomersByDisciplineAreasTableTextBlock",
       "us-gaap:RevenueFromContractWithCustomerTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:RevenueFromContractWithCustomerExcludingAssessedTax",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     }
    },
    "R42": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ContractWithCustomerAssetAndLiabilityTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:ContractWithCustomerLiability",
      "reportCount": 1,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40403 - Disclosure - Revenue - Contract liabilities (Details)",
     "role": "http://www.axcelis.com/role/DisclosureRevenueContractLiabilitiesDetails",
     "shortName": "Revenue - Contract liabilities (Details)",
     "subGroupType": "details",
     "uniqueAnchor": null
    },
    "R43": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ContractWithCustomerAssetAndLiabilityTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "As_Of_3_31_2021_Qs-qxUhDAk-CSx7C4Sn69A",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:ContractWithCustomerLiability",
      "reportCount": 1,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40404 - Disclosure - Revenue - Deferred revenue (Details)",
     "role": "http://www.axcelis.com/role/DisclosureRevenueDeferredRevenueDetails",
     "shortName": "Revenue - Deferred revenue (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ContractWithCustomerAssetAndLiabilityTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw",
      "decimals": "-3",
      "lang": null,
      "name": "acls:ContractWithCustomerLiabilityDeferralOfRevenue",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     }
    },
    "R44": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:AccountsReceivableAllowanceForCreditLossTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "As_Of_12_31_2019_FtHnUOMLjkeW-5RTgMqhrA",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40501 - Disclosure - Receivable and Allowance for Credit Losses - Allowances for Credit Losses Related to Trade Receivables (Details)",
     "role": "http://www.axcelis.com/role/DisclosureReceivableAndAllowanceForCreditLossesAllowancesForCreditLossesRelatedToTradeReceivablesDetails",
     "shortName": "Receivable and Allowance for Credit Losses - Allowances for Credit Losses Related to Trade Receivables (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:AccountsReceivableAllowanceForCreditLossTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "As_Of_12_31_2019_FtHnUOMLjkeW-5RTgMqhrA",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:AllowanceForDoubtfulAccountsReceivableCurrent",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     }
    },
    "R45": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic",
      "reportCount": 1,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40601 - Disclosure - Computation of Net Earnings per Share (Details)",
     "role": "http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShareDetails",
     "shortName": "Computation of Net Earnings per Share (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock",
       "us-gaap:EarningsPerShareTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw",
      "decimals": "-3",
      "lang": null,
      "name": "us-gaap:IncrementalCommonSharesAttributableToShareBasedPaymentArrangements",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA",
      "xsiNil": "false"
     }
    },
    "R46": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax",
      "reportCount": 1,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40701 - Disclosure - Accumulated Other Comprehensive Income (Details)",
     "role": "http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveIncomeDetails",
     "shortName": "Accumulated Other Comprehensive Income (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock",
       "us-gaap:ComprehensiveIncomeNoteTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "As_Of_12_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_AccumulatedTranslationAdjustmentMember_3gAqRSnshEqM1_usXZTg1g",
      "decimals": "-3",
      "lang": null,
      "name": "us-gaap:AccumulatedOtherComprehensiveIncomeLossNetOfTax",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     }
    },
    "R47": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:CashAndCashEquivalentsAtCarryingValue",
      "reportCount": 1,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40801 - Disclosure - Cash, cash equivalents and restricted cash (Details)",
     "role": "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails",
     "shortName": "Cash, cash equivalents and restricted cash (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "acls:CashCashEquivalentsAndRestrictedCashTableTextBlock",
       "acls:CashCashEquivalentsAndRestrictedCashTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug",
      "decimals": "-3",
      "lang": null,
      "name": "us-gaap:RestrictedCashAndCashEquivalents",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     }
    },
    "R48": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfInventoryCurrentTableTextBlock",
       "us-gaap:InventoryDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:InventoryRawMaterialsNetOfReserves",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "40901 - Disclosure - Inventories, net (Details)",
     "role": "http://www.axcelis.com/role/DisclosureInventoriesNetDetails",
     "shortName": "Inventories, net (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfInventoryCurrentTableTextBlock",
       "us-gaap:InventoryDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:InventoryRawMaterialsNetOfReserves",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     }
    },
    "R49": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "us-gaap:ProductWarrantyDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "acls:ProductWarrantyPeriod",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41001 - Disclosure - Product Warranty (Details)",
     "role": "http://www.axcelis.com/role/DisclosureProductWarrantyDetails",
     "shortName": "Product Warranty (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "us-gaap:ProductWarrantyDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "acls:ProductWarrantyPeriod",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R5": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug",
      "decimals": "INF",
      "first": true,
      "lang": null,
      "name": "us-gaap:CommonStockParOrStatedValuePerShare",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ",
      "xsiNil": "false"
     },
     "groupType": "statement",
     "isDefault": "false",
     "longName": "00305 - Statement - Consolidated Balance Sheets (Parenthetical)",
     "role": "http://www.axcelis.com/role/StatementConsolidatedBalanceSheetsParenthetical",
     "shortName": "Consolidated Balance Sheets (Parenthetical)",
     "subGroupType": "parenthetical",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug",
      "decimals": "INF",
      "first": true,
      "lang": null,
      "name": "us-gaap:CommonStockParOrStatedValuePerShare",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Divide_USD_shares_mq2i8Imyx0OICKimneRJOQ",
      "xsiNil": "false"
     }
    },
    "R50": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "As_Of_6_30_2021_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_kuTMgTqgiki9V2z7-fMlxg",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:CashAndCashEquivalentsFairValueDisclosure",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41101 - Disclosure - Fair Value Measurements (Details)",
     "role": "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails",
     "shortName": "Fair Value Measurements (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "us-gaap:ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock",
       "ix:continuation",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "As_Of_6_30_2021_us-gaap_FairValueByAssetClassAxis_acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember_us-gaap_FairValueByMeasurementBasisAxis_us-gaap_EstimateOfFairValueFairValueDisclosureMember_us-gaap_FairValueByMeasurementFrequencyAxis_us-gaap_FairValueMeasurementsRecurringMember_kuTMgTqgiki9V2z7-fMlxg",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:CashAndCashEquivalentsFairValueDisclosure",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     }
    },
    "R51": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "As_Of_6_30_2021_dtevE0Wp3kCvLFxfrezBug",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:FinanceLeaseLiabilityNoncurrent",
      "reportCount": 1,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41201 - Disclosure - Financing Arrangements (Details)",
     "role": "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails",
     "shortName": "Financing Arrangements (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "us-gaap:DebtDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "As_Of_6_30_2021_us-gaap_PropertyPlantAndEquipmentByTypeAxis_acls_SaleAndLeaseBackMember_XO2P9-16s0C-1V43VObF-w",
      "decimals": "-5",
      "lang": null,
      "name": "us-gaap:FinanceLeaseLiabilityNoncurrent",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     }
    },
    "R52": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:IncomeTaxExpenseBenefit",
      "reportCount": 1,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41301 - Disclosure - Income Taxes (Details)",
     "role": "http://www.axcelis.com/role/DisclosureIncomeTaxesDetails",
     "shortName": "Income Taxes (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "us-gaap:IncomeTaxDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_4_1_2021_To_6_30_2021_2peKwRQMlEu6BfebwU08jw",
      "decimals": "-5",
      "lang": null,
      "name": "acls:IncreaseInIncomeTaxExpenseBenefit",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     }
    },
    "R53": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "us-gaap:ConcentrationRiskDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_4_1_2021_To_6_30_2021_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_eiDKLI-O4kSIZoQQF5U5dw",
      "decimals": "INF",
      "first": true,
      "lang": null,
      "name": "acls:ConcentrationRiskNumberOfCustomers",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_customer_0YOFupMhv0yS1XDebetzdQ",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41401 - Disclosure - Concentration of Risk (Details)",
     "role": "http://www.axcelis.com/role/DisclosureConcentrationOfRiskDetails",
     "shortName": "Concentration of Risk (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "us-gaap:ConcentrationRiskDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_4_1_2021_To_6_30_2021_us-gaap_ConcentrationRiskByBenchmarkAxis_us-gaap_SalesRevenueNetMember_us-gaap_ConcentrationRiskByTypeAxis_us-gaap_CustomerConcentrationRiskMember_eiDKLI-O4kSIZoQQF5U5dw",
      "decimals": "INF",
      "first": true,
      "lang": null,
      "name": "acls:ConcentrationRiskNumberOfCustomers",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_customer_0YOFupMhv0yS1XDebetzdQ",
      "xsiNil": "false"
     }
    },
    "R54": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "us-gaap:StockholdersEquityNoteDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ",
      "decimals": "-6",
      "first": true,
      "lang": null,
      "name": "us-gaap:StockRepurchaseProgramAuthorizedAmount1",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "41501 - Disclosure - Share Repurchase (Details)",
     "role": "http://www.axcelis.com/role/DisclosureShareRepurchaseDetails",
     "shortName": "Share Repurchase (Details)",
     "subGroupType": "details",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "us-gaap:StockholdersEquityNoteDisclosureTextBlock",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "As_Of_12_31_2020_UuE3a8rQ70OZ3UAwj2bUeQ",
      "decimals": "-6",
      "first": true,
      "lang": null,
      "name": "us-gaap:StockRepurchaseProgramAuthorizedAmount1",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     }
    },
    "R6": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "As_Of_12_31_2019_us-gaap_StatementEquityComponentsAxis_us-gaap_CommonStockMember_SoIXUiAhFUmgd7essTKzKg",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:SharesOutstanding",
      "reportCount": 1,
      "unitRef": "Unit_Standard_shares_EqxiewjDAkywdKYlOK4jrA",
      "xsiNil": "false"
     },
     "groupType": "statement",
     "isDefault": "false",
     "longName": "00400 - Statement - Consolidated Statements of Stockholders' Equity",
     "role": "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity",
     "shortName": "Consolidated Statements of Stockholders' Equity",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2020_To_3_31_2020_us-gaap_StatementEquityComponentsAxis_us-gaap_RetainedEarningsMember_LzqFMH4R-Uisa6DN0Wxm4w",
      "decimals": "-3",
      "lang": null,
      "name": "us-gaap:NetIncomeLossAvailableToCommonStockholdersBasic",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     }
    },
    "R7": {
     "firstAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:ProfitLoss",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     },
     "groupType": "statement",
     "isDefault": "false",
     "longName": "00500 - Statement - Consolidated Statements of Cash Flows",
     "role": "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows",
     "shortName": "Consolidated Statements of Cash Flows",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "p",
       "td",
       "tr",
       "table",
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": "-3",
      "first": true,
      "lang": null,
      "name": "us-gaap:ProfitLoss",
      "reportCount": 1,
      "unique": true,
      "unitRef": "Unit_Standard_USD_zFXg3vno4EOIcI8NjbdC6w",
      "xsiNil": "false"
     }
    },
    "R8": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "10101 - Disclosure - Nature of Business",
     "role": "http://www.axcelis.com/role/DisclosureNatureOfBusiness",
     "shortName": "Nature of Business",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    },
    "R9": {
     "firstAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "disclosure",
     "isDefault": "false",
     "longName": "10201 - Disclosure - Stock Based Compensation",
     "role": "http://www.axcelis.com/role/DisclosureStockBasedCompensation",
     "shortName": "Stock Based Compensation",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "div",
       "div",
       "body",
       "html"
      ],
      "baseRef": "acls-20210630x10q.htm",
      "contextRef": "Duration_1_1_2021_To_6_30_2021_M8enLMqyp0-TBX-zgTmikQ",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "us-gaap:DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    }
   },
   "segmentCount": 40,
   "tag": {
    "acls_BeverlyPropertyOwnerLlcMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the information pertaining to Beverly Property Owner LLC",
        "label": "Beverly Property Owner Llc [Member]",
        "terseLabel": "Beverly Property Owner LLC"
       }
      }
     },
     "localname": "BeverlyPropertyOwnerLlcMember",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "acls_CashCashEquivalentsAndRestrictedCashAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "N/A",
        "label": "Cash, cash equivalents and restricted cash"
       }
      }
     },
     "localname": "CashCashEquivalentsAndRestrictedCashAbstract",
     "nsuri": "http://www.axcelis.com/20210630",
     "xbrltype": "stringItemType"
    },
    "acls_CashCashEquivalentsAndRestrictedCashTableTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure for cash, cash equivalents and restricted cash.",
        "label": "Cash Cash Equivalents And Restricted Cash [Table Text Block]",
        "terseLabel": "Schedule of reconciliation of cash, cash equivalents and restricted cash"
       }
      }
     },
     "localname": "CashCashEquivalentsAndRestrictedCashTableTextBlock",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "acls_CashCashEquivalentsAndRestrictedCashTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure of cash, cash equivalents and restricted cash.",
        "label": "Cash Cash Equivalents And Restricted Cash [Text Block]",
        "terseLabel": "Cash, cash equivalents and restricted cash"
       }
      }
     },
     "localname": "CashCashEquivalentsAndRestrictedCashTextBlock",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCash"
     ],
     "xbrltype": "textBlockItemType"
    },
    "acls_ConcentrationRiskNumberOfCustomers": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the number of customers on whom the entity significantly relies giving rise to concentration risk.",
        "label": "Concentration Risk Number of Customers",
        "terseLabel": "Number of customers"
       }
      }
     },
     "localname": "ConcentrationRiskNumberOfCustomers",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureConcentrationOfRiskDetails"
     ],
     "xbrltype": "integerItemType"
    },
    "acls_ContractWithCustomerLiabilityDeferralOfRevenue": {
     "auth_ref": [],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The amount of deferral of revenue in obligation to transfer good or service to customer for which consideration from customer has been received or is due.",
        "label": "Contract with Customer, Liability, Deferral Of Revenue",
        "terseLabel": "Deferral of revenue"
       }
      }
     },
     "localname": "ContractWithCustomerLiabilityDeferralOfRevenue",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueDeferredRevenueDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "acls_CsIOrAftermarketMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the information pertaining to CS&amp;I or aftermarket.",
        "label": "Cs I Or Aftermarket [Member]",
        "terseLabel": "CS&amp;I/Aftermarket"
       }
      }
     },
     "localname": "CsIOrAftermarketMember",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "acls_DepositRelatingToCustomsActivity": {
     "auth_ref": [],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The amount of deposits relating customs activity.",
        "label": "Deposit Relating To Customs Activity",
        "terseLabel": "Deposit related to customs activity"
       }
      }
     },
     "localname": "DepositRelatingToCustomsActivity",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "n/a.",
        "label": "Finance And Operating Lease Liabilities Payments Due [Abstract]",
        "terseLabel": "Future minimum lease payments finance and operating lease"
       }
      }
     },
     "localname": "FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "acls_FinanceLeaseAccumulatedDepreciation": {
     "auth_ref": [],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The cumulative amount of depreciation of finance leased assets.",
        "label": "Finance Lease, Accumulated Depreciation",
        "terseLabel": "Finance lease, accumulated depreciation"
       }
      }
     },
     "localname": "FinanceLeaseAccumulatedDepreciation",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "acls_FinanceLeaseCost": {
     "auth_ref": [],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_LeaseCost",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of finance lease cost recognized by lessee for lease contract.",
        "label": "Finance Lease Cost",
        "totalLabel": "Total finance lease cost"
       }
      }
     },
     "localname": "FinanceLeaseCost",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "acls_FinanceLeaseLiabilityPaymentsDueAfterYearFour": {
     "auth_ref": [],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "order": 6.0,
       "parentTag": "us-gaap_FinanceLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid after fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Finance Lease Liability Payments Due After Year Four",
        "verboseLabel": "Thereafter"
       }
      }
     },
     "localname": "FinanceLeaseLiabilityPaymentsDueAfterYearFour",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "acls_IncreaseInIncomeTaxExpenseBenefit": {
     "auth_ref": [],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase in current income tax expense (benefit) and deferred income tax expense (benefit) pertaining to continuing operations.",
        "label": "Increase In Income Tax Expense (Benefit)",
        "terseLabel": "Increase in income tax expense"
       }
      }
     },
     "localname": "IncreaseInIncomeTaxExpenseBenefit",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "acls_IncreaseInPreTaxIncome": {
     "auth_ref": [],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the amount of increase in pretax income.",
        "label": "Increase In Pre Tax Income",
        "terseLabel": "Increase in pretax income"
       }
      }
     },
     "localname": "IncreaseInPreTaxIncome",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "acls_LargestCustomerMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents one customer on whom the entity significantly relies giving rise to the largest single concentration risk.",
        "label": "Largest Customer [Member]",
        "terseLabel": "First customer"
       }
      }
     },
     "localname": "LargestCustomerMember",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureConcentrationOfRiskDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "acls_LeaseBalanceSheetDisclosureTableTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The tabular disclosure of lease balance sheet.",
        "label": "Lease Balance Sheet Disclosure [Table Text Block]",
        "terseLabel": "Schedule of operating and finance lease right-of-use assets and related lease obligations"
       }
      }
     },
     "localname": "LeaseBalanceSheetDisclosureTableTextBlock",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "acls_LeaseCashFlowInformationDisclosureTableTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The tabular disclosure of lease cash flow information.",
        "label": "Lease Cash Flow Information Disclosure [Table Text Block]",
        "terseLabel": "Schedule of cash outflows by lease type"
       }
      }
     },
     "localname": "LeaseCashFlowInformationDisclosureTableTextBlock",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "acls_LeaseDisclosureTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure of information about leases.",
        "label": "Lease Disclosure [Text Block]",
        "terseLabel": "Leases"
       }
      }
     },
     "localname": "LeaseDisclosureTextBlock",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeases"
     ],
     "xbrltype": "textBlockItemType"
    },
    "acls_LeaseQuantitativeDisclosureTableTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The tabular disclosure of lease quantitative information.",
        "label": "Lease Quantitative Disclosure [Table Text Block]",
        "terseLabel": "Schedule of weighted-average remaining lease term and discount rates"
       }
      }
     },
     "localname": "LeaseQuantitativeDisclosureTableTextBlock",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue": {
     "auth_ref": [],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      },
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payments for finance and operating lease.",
        "label": "Lessee Operating And Finance Lease Liability Payments Due",
        "totalLabel": "Total lease payments"
       }
      }
     },
     "localname": "LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFour": {
     "auth_ref": [],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "order": 6.0,
       "parentTag": "acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due after fourth fiscal year following latest fiscal year.",
        "label": "Lessee Operating And Finance Lease Liability Payments Due After Year Four",
        "verboseLabel": "Thereafter"
       }
      }
     },
     "localname": "LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFour",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths": {
     "auth_ref": [],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "order": 2.0,
       "parentTag": "acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee operating and finance lease liability payments due next twelve months.",
        "label": "Lessee Operating And Finance Lease Liability Payments Due Next Twelve Months",
        "verboseLabel": "2022"
       }
      }
     },
     "localname": "LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour": {
     "auth_ref": [],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "order": 5.0,
       "parentTag": "acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in fourth fiscal year following latest fiscal year.",
        "label": "Lessee Operating And Finance Lease Liability Payments Due Year Four",
        "verboseLabel": "2025"
       }
      }
     },
     "localname": "LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree": {
     "auth_ref": [],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "order": 4.0,
       "parentTag": "acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in third fiscal year following latest fiscal year.",
        "label": "Lessee Operating And Finance Lease Liability Payments Due Year Three",
        "verboseLabel": "2024"
       }
      }
     },
     "localname": "LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo": {
     "auth_ref": [],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "order": 3.0,
       "parentTag": "acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in second fiscal year following latest fiscal year.",
        "label": "Lessee Operating And Finance Lease Liability Payments Due Year Two",
        "verboseLabel": "2023"
       }
      }
     },
     "localname": "LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsRemainderOfFiscalYear": {
     "auth_ref": [],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "order": 1.0,
       "parentTag": "acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payments for finance and operating lease having an initial or remaining lease term in excess of one year due in remainder of fiscal year following latest fiscal year.",
        "label": "Lessee Operating And Finance Lease Liability Payments Remainder Of Fiscal Year",
        "terseLabel": "2021"
       }
      }
     },
     "localname": "LesseeOperatingAndFinanceLeaseLiabilityPaymentsRemainderOfFiscalYear",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount": {
     "auth_ref": [],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails": {
       "order": 2.0,
       "parentTag": "acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payments in excess of discounted obligation for lease payments for finance and operating lease.",
        "label": "Lessee Operating And Finance Lease Liability Undiscounted Excess Amount",
        "negatedLabel": "Less interest portion"
       }
      }
     },
     "localname": "LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "acls_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour": {
     "auth_ref": [],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "order": 6.0,
       "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease due after fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Lessee Operating Lease Liability Payments Due After Year Four",
        "terseLabel": "Thereafter"
       }
      }
     },
     "localname": "LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "acls_LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit": {
     "auth_ref": [],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the information pertaining to the portion of the line of credit availability being used to support the outstanding letters of credit.",
        "label": "Line of Credit Facility, Portion of Availability Used to Support Outstanding Letters of Credit",
        "terseLabel": "Restricted cash which relates to support of outstanding letters of credit"
       }
      }
     },
     "localname": "LineOfCreditFacilityPortionOfAvailabilityUsedToSupportOutstandingLettersOfCredit",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "acls_MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Includes fund that invests in short-term money-market instruments, for example, but not limited to, commercial paper, banker's acceptances, repurchase agreements, United States government securities, certificates of deposit, and other highly liquid securities including Agency investments, all of which are considered cash equivalents.",
        "label": "Money Market Funds Us Government Securities And Agency Investments [Member]",
        "terseLabel": "Money market funds, US Government Securities and Agency Investments"
       }
      }
     },
     "localname": "MoneyMarketFundsUsGovernmentSecuritiesAndAgencyInvestmentsMember",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "acls_NewSystemsRevenueMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents information pertaining to revenue arising from the sale of new systems, a product line of the entity.",
        "label": "New Systems Revenue [Member]",
        "terseLabel": "Systems"
       }
      }
     },
     "localname": "NewSystemsRevenueMember",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueDetails",
      "http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "acls_OperatingAndFinanceLeaseLiability": {
     "auth_ref": [],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails": {
       "order": 1.0,
       "parentTag": "acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue",
       "weight": 1.0
      },
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Present value of lessee's discounted obligation for lease payments from operating and finance lease.",
        "label": "Operating and Finance Lease, Liability",
        "totalLabel": "Total lease liabilities",
        "verboseLabel": "Total lease liabilities"
       }
      }
     },
     "localname": "OperatingAndFinanceLeaseLiability",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails",
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "acls_OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of undiscounted cash flows of lessee's operating lease liability and finance lease liability.",
        "label": "Operating And Finance Lease Liability Maturity [Table Text Block]",
        "terseLabel": "Schedule of future minimum operating and finance leases"
       }
      }
     },
     "localname": "OperatingAndFinanceLeaseLiabilityMaturityTableTextBlock",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "acls_OperatingAndFinanceLeaseRightOfUseAsset": {
     "auth_ref": [],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's right to use underlying asset under operating and finance lease.",
        "label": "Operating And Finance Lease, Right-of-Use Asset",
        "totalLabel": "Total leased assets"
       }
      }
     },
     "localname": "OperatingAndFinanceLeaseRightOfUseAsset",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "acls_PercentageOfPaymentUponInstallation": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the percentage of payment terms due upon installation.",
        "label": "Percentage of Payment Upon Installation",
        "terseLabel": "Payment upon installation, as a percent"
       }
      }
     },
     "localname": "PercentageOfPaymentUponInstallation",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "acls_PercentageOfPaymentUponShipmentOfTool": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the percentage of payment terms due upon shipment of tool.",
        "label": "Percentage of Payment Upon Shipment of Tool",
        "terseLabel": "Payment upon shipment of tool, as a percent"
       }
      }
     },
     "localname": "PercentageOfPaymentUponShipmentOfTool",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "acls_PeriodOfPaymentUponDeliveryOfParts": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the period for payment upon delivery of parts.",
        "label": "Period of Payment Upon Delivery of Parts",
        "terseLabel": "Payment upon delivery of parts, period"
       }
      }
     },
     "localname": "PeriodOfPaymentUponDeliveryOfParts",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "acls_ProductWarrantyPeriod": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the period for which the warranty is offered for the products sold.",
        "label": "Product Warranty Period",
        "terseLabel": "Product warranty period"
       }
      }
     },
     "localname": "ProductWarrantyPeriod",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureProductWarrantyDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "acls_RepaymentOfNetSettlementOnRestrictedStockGrants": {
     "auth_ref": [],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 3.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The net cash out flow on net settlement of restricted stock grants.",
        "label": "Repayment of Net Settlement on Restricted Stock Grants",
        "negatedLabel": "Net settlement on restricted stock grants"
       }
      }
     },
     "localname": "RepaymentOfNetSettlementOnRestrictedStockGrants",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "acls_RevenueFromExternalCustomersByDisciplineAreasTableTextBlock": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of revenue from external customers by discipline areas attributed to the entity's country of domicile and to foreign countries from which the entity derives revenue.",
        "label": "Revenue From External Customers By Discipline Areas Table Text Block",
        "terseLabel": "Schedule of revenue by discipline"
       }
      }
     },
     "localname": "RevenueFromExternalCustomersByDisciplineAreasTableTextBlock",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "acls_SaleAndLeaseBackMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents information pertaining to the sale and leaseback transaction.",
        "label": "Sale And Lease Back [Member]",
        "terseLabel": "Sale leaseback obligation"
       }
      }
     },
     "localname": "SaleAndLeaseBackMember",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "acls_SecondLargestCustomerMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents one customer on whom the entity significantly relies giving rise to the second largest single concentration risk.",
        "label": "Second Largest Customer [Member]",
        "terseLabel": "Second customer"
       }
      }
     },
     "localname": "SecondLargestCustomerMember",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureConcentrationOfRiskDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "acls_ServicesMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Service or group of services that are sold by the entity.",
        "label": "Services [Member]",
        "terseLabel": "Services"
       }
      }
     },
     "localname": "ServicesMember",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "domainItemType"
    },
    "acls_ShareBasedCompensationArrangementByShareBasedPaymentAwardGrantsInPeriodGross": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the number of awards granted in an equity based compensation plan.",
        "label": "Share Based Compensation Arrangement by Share Based Payment Award Grants in Period Gross",
        "terseLabel": "Awards granted (in shares)"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardGrantsInPeriodGross",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockBasedCompensationDetails"
     ],
     "xbrltype": "sharesItemType"
    },
    "acls_ShortTermAndVariableLeaseCost": {
     "auth_ref": [],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of short-term and variable lease cost.",
        "label": "Short-term And Variable Lease, Cost",
        "terseLabel": "Short-term lease and variable lease costs"
       }
      }
     },
     "localname": "ShortTermAndVariableLeaseCost",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "acls_SiliconValleyBankMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents information pertaining to Silicon Valley Bank.",
        "label": "Silicon Valley Bank [Member]",
        "terseLabel": "Silicon Valley Bank"
       }
      }
     },
     "localname": "SiliconValleyBankMember",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "acls_StockOptionAwardsMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Contract that gives the holder the right, but not the obligation, either to purchase or to sell a certain number of shares of stock at a predetermined price for a specified period of time.",
        "label": "Stock Option Awards [Member]",
        "terseLabel": "Stock Options"
       }
      }
     },
     "localname": "StockOptionAwardsMember",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockBasedCompensationDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "acls_StockPlan2000Member": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents information pertaining to the 2000 Stock Plan of the entity.",
        "label": "Stock Plan2000 [Member]",
        "terseLabel": "2000 Stock Plan"
       }
      }
     },
     "localname": "StockPlan2000Member",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockBasedCompensationDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "acls_ThirdLargestCustomerMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents one customer on whom the entity significantly relies giving rise to the third largest single concentration risk.",
        "label": "Third Largest Customer [Member]",
        "terseLabel": "Third customer"
       }
      }
     },
     "localname": "ThirdLargestCustomerMember",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureConcentrationOfRiskDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "n/a.",
        "label": "Weighted Average Remaining Lease Term And Discount Rate [Abstract]",
        "terseLabel": "Lease term and discount rate"
       }
      }
     },
     "localname": "WeightedAverageRemainingLeaseTermAndDiscountRateAbstract",
     "nsuri": "http://www.axcelis.com/20210630",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "dei_AmendmentFlag": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true when the XBRL content amends previously-filed or accepted submission.",
        "label": "Amendment Flag"
       }
      }
     },
     "localname": "AmendmentFlag",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_CityAreaCode": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Area code of city",
        "label": "City Area Code"
       }
      }
     },
     "localname": "CityAreaCode",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_CoverAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Cover page.",
        "label": "Document and Entity Information"
       }
      }
     },
     "localname": "CoverAbstract",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "xbrltype": "stringItemType"
    },
    "dei_CurrentFiscalYearEndDate": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "End date of current fiscal year in the format --MM-DD.",
        "label": "Current Fiscal Year End Date"
       }
      }
     },
     "localname": "CurrentFiscalYearEndDate",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "gMonthDayItemType"
    },
    "dei_DocumentFiscalPeriodFocus": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Fiscal period values are FY, Q1, Q2, and Q3.  1st, 2nd and 3rd quarter 10-Q or 10-QT statements have value Q1, Q2, and Q3 respectively, with 10-K, 10-KT or other fiscal year statements having FY.",
        "label": "Document Fiscal Period Focus"
       }
      }
     },
     "localname": "DocumentFiscalPeriodFocus",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "fiscalPeriodItemType"
    },
    "dei_DocumentFiscalYearFocus": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "This is focus fiscal year of the document report in YYYY format. For a 2006 annual report, which may also provide financial information from prior periods, fiscal 2006 should be given as the fiscal year focus. Example: 2006.",
        "label": "Document Fiscal Year Focus"
       }
      }
     },
     "localname": "DocumentFiscalYearFocus",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "gYearItemType"
    },
    "dei_DocumentPeriodEndDate": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The end date of the period reflected on the cover page if a periodic report. For all other reports and registration statements containing historical data, it is the date up through which that historical data is presented.  If there is no historical data in the report, use the filing date. The format of the date is YYYY-MM-DD.",
        "label": "Document Period End Date"
       }
      }
     },
     "localname": "DocumentPeriodEndDate",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "dateItemType"
    },
    "dei_DocumentQuarterlyReport": {
     "auth_ref": [
      "r426"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true only for a form used as an quarterly report.",
        "label": "Document Quarterly Report"
       }
      }
     },
     "localname": "DocumentQuarterlyReport",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_DocumentTransitionReport": {
     "auth_ref": [
      "r427"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true only for a form used as a transition report.",
        "label": "Document Transition Report"
       }
      }
     },
     "localname": "DocumentTransitionReport",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_DocumentType": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The type of document being provided (such as 10-K, 10-Q, 485BPOS, etc). The document type is limited to the same value as the supporting SEC submission type, or the word 'Other'.",
        "label": "Document Type"
       }
      }
     },
     "localname": "DocumentType",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "submissionTypeItemType"
    },
    "dei_EntityAddressAddressLine1": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Address Line 1 such as Attn, Building Name, Street Name",
        "label": "Entity Address, Address Line One"
       }
      }
     },
     "localname": "EntityAddressAddressLine1",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_EntityAddressCityOrTown": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Name of the City or Town",
        "label": "Entity Address, City or Town"
       }
      }
     },
     "localname": "EntityAddressCityOrTown",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_EntityAddressPostalZipCode": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Code for the postal or zip code",
        "label": "Entity Address, Postal Zip Code"
       }
      }
     },
     "localname": "EntityAddressPostalZipCode",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_EntityAddressStateOrProvince": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Name of the state or province.",
        "label": "Entity Address, State or Province"
       }
      }
     },
     "localname": "EntityAddressStateOrProvince",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "stateOrProvinceItemType"
    },
    "dei_EntityCentralIndexKey": {
     "auth_ref": [
      "r428"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "A unique 10-digit SEC-issued value to identify entities that have filed disclosures with the SEC. It is commonly abbreviated as CIK.",
        "label": "Entity Central Index Key"
       }
      }
     },
     "localname": "EntityCentralIndexKey",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "centralIndexKeyItemType"
    },
    "dei_EntityCommonStockSharesOutstanding": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicate number of shares or other units outstanding of each of registrant's classes of capital or common stock or other ownership interests, if and as stated on cover of related periodic report. Where multiple classes or units exist define each class/interest by adding class of stock items such as Common Class A [Member], Common Class B [Member] or Partnership Interest [Member] onto the Instrument [Domain] of the Entity Listings, Instrument.",
        "label": "Entity Common Stock, Shares Outstanding"
       }
      }
     },
     "localname": "EntityCommonStockSharesOutstanding",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "sharesItemType"
    },
    "dei_EntityCurrentReportingStatus": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicate 'Yes' or 'No' whether registrants (1) have filed all reports required to be filed by Section 13 or 15(d) of the Securities Exchange Act of 1934 during the preceding 12 months (or for such shorter period that registrants were required to file such reports), and (2) have been subject to such filing requirements for the past 90 days. This information should be based on the registrant's current or most recent filing containing the related disclosure.",
        "label": "Entity Current Reporting Status"
       }
      }
     },
     "localname": "EntityCurrentReportingStatus",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "yesNoItemType"
    },
    "dei_EntityEmergingGrowthCompany": {
     "auth_ref": [
      "r428"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicate if registrant meets the emerging growth company criteria.",
        "label": "Entity Emerging Growth Company"
       }
      }
     },
     "localname": "EntityEmergingGrowthCompany",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_EntityFileNumber": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Commission file number. The field allows up to 17 characters. The prefix may contain 1-3 digits, the sequence number may contain 1-8 digits, the optional suffix may contain 1-4 characters, and the fields are separated with a hyphen.",
        "label": "Entity File Number"
       }
      }
     },
     "localname": "EntityFileNumber",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "fileNumberItemType"
    },
    "dei_EntityFilerCategory": {
     "auth_ref": [
      "r428"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicate whether the registrant is one of the following: Large Accelerated Filer, Accelerated Filer, Non-accelerated Filer. Definitions of these categories are stated in Rule 12b-2 of the Exchange Act. This information should be based on the registrant's current or most recent filing containing the related disclosure.",
        "label": "Entity Filer Category"
       }
      }
     },
     "localname": "EntityFilerCategory",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "filerCategoryItemType"
    },
    "dei_EntityIncorporationStateCountryCode": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Two-character EDGAR code representing the state or country of incorporation.",
        "label": "Entity Incorporation, State or Country Code"
       }
      }
     },
     "localname": "EntityIncorporationStateCountryCode",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "edgarStateCountryItemType"
    },
    "dei_EntityInteractiveDataCurrent": {
     "auth_ref": [
      "r429"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true when the registrant has submitted electronically every Interactive Data File required to be submitted pursuant to Rule 405 of Regulation S-T during the preceding 12 months (or for such shorter period that the registrant was required to submit such files).",
        "label": "Entity Interactive Data Current"
       }
      }
     },
     "localname": "EntityInteractiveDataCurrent",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "yesNoItemType"
    },
    "dei_EntityRegistrantName": {
     "auth_ref": [
      "r428"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The exact name of the entity filing the report as specified in its charter, which is required by forms filed with the SEC.",
        "label": "Entity Registrant Name"
       }
      }
     },
     "localname": "EntityRegistrantName",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_EntityShellCompany": {
     "auth_ref": [
      "r428"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true when the registrant is a shell company as defined in Rule 12b-2 of the Exchange Act.",
        "label": "Entity Shell Company"
       }
      }
     },
     "localname": "EntityShellCompany",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_EntitySmallBusiness": {
     "auth_ref": [
      "r428"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicates that the company is a Smaller Reporting Company (SRC).",
        "label": "Entity Small Business"
       }
      }
     },
     "localname": "EntitySmallBusiness",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_EntityTaxIdentificationNumber": {
     "auth_ref": [
      "r428"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The Tax Identification Number (TIN), also known as an Employer Identification Number (EIN), is a unique 9-digit value assigned by the IRS.",
        "label": "Entity Tax Identification Number"
       }
      }
     },
     "localname": "EntityTaxIdentificationNumber",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "employerIdItemType"
    },
    "dei_LocalPhoneNumber": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Local phone number for entity.",
        "label": "Local Phone Number"
       }
      }
     },
     "localname": "LocalPhoneNumber",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_Security12bTitle": {
     "auth_ref": [
      "r424"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Title of a 12(b) registered security.",
        "label": "Title of 12(b) Security"
       }
      }
     },
     "localname": "Security12bTitle",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "securityTitleItemType"
    },
    "dei_SecurityExchangeName": {
     "auth_ref": [
      "r425"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Name of the Exchange on which a security is registered.",
        "label": "Security Exchange Name"
       }
      }
     },
     "localname": "SecurityExchangeName",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "edgarExchangeCodeItemType"
    },
    "dei_TradingSymbol": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Trading symbol of an instrument as listed on an exchange.",
        "label": "Trading Symbol"
       }
      }
     },
     "localname": "TradingSymbol",
     "nsuri": "http://xbrl.sec.gov/dei/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DocumentDocumentAndEntityInformation"
     ],
     "xbrltype": "tradingSymbolItemType"
    },
    "srt_AsiaMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Asia [Member]",
        "terseLabel": "Asia Pacific"
       }
      }
     },
     "localname": "AsiaMember",
     "nsuri": "http://fasb.org/srt/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "srt_CounterpartyNameAxis": {
     "auth_ref": [
      "r53",
      "r98"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Counterparty Name [Axis]"
       }
      }
     },
     "localname": "CounterpartyNameAxis",
     "nsuri": "http://fasb.org/srt/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "srt_EuropeMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Europe [Member]",
        "terseLabel": "Europe"
       }
      }
     },
     "localname": "EuropeMember",
     "nsuri": "http://fasb.org/srt/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "srt_MajorCustomersAxis": {
     "auth_ref": [
      "r165",
      "r222",
      "r228",
      "r401"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Customer [Axis]"
       }
      }
     },
     "localname": "MajorCustomersAxis",
     "nsuri": "http://fasb.org/srt/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureConcentrationOfRiskDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "srt_MaximumMember": {
     "auth_ref": [
      "r247",
      "r248",
      "r357",
      "r358",
      "r359",
      "r360",
      "r361",
      "r362",
      "r363",
      "r398",
      "r402"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Maximum [Member]",
        "terseLabel": "Maximum"
       }
      }
     },
     "localname": "MaximumMember",
     "nsuri": "http://fasb.org/srt/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesDetails",
      "http://www.axcelis.com/role/DisclosureLeasesDetails",
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails",
      "http://www.axcelis.com/role/DisclosureRevenueDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "srt_MinimumMember": {
     "auth_ref": [
      "r247",
      "r248",
      "r357",
      "r358",
      "r359",
      "r360",
      "r361",
      "r362",
      "r363",
      "r398",
      "r402"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Minimum [Member]",
        "terseLabel": "Minimum"
       }
      }
     },
     "localname": "MinimumMember",
     "nsuri": "http://fasb.org/srt/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesDetails",
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails",
      "http://www.axcelis.com/role/DisclosureRevenueDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "srt_NameOfMajorCustomerDomain": {
     "auth_ref": [
      "r165",
      "r222",
      "r228",
      "r401"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Name Of Major Customer [Domain]",
        "terseLabel": "Customer [Domain]"
       }
      }
     },
     "localname": "NameOfMajorCustomerDomain",
     "nsuri": "http://fasb.org/srt/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureConcentrationOfRiskDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "srt_NorthAmericaMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "North America [Member]",
        "terseLabel": "North America"
       }
      }
     },
     "localname": "NorthAmericaMember",
     "nsuri": "http://fasb.org/srt/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "srt_ProductOrServiceAxis": {
     "auth_ref": [
      "r161",
      "r222",
      "r226",
      "r364",
      "r397",
      "r399"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Products and Services [Axis]"
       }
      }
     },
     "localname": "ProductOrServiceAxis",
     "nsuri": "http://fasb.org/srt/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueDetails",
      "http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "stringItemType"
    },
    "srt_ProductsAndServicesDomain": {
     "auth_ref": [
      "r161",
      "r222",
      "r226",
      "r364",
      "r397",
      "r399"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Products And Services [Domain]",
        "terseLabel": "Products and Services [Domain]"
       }
      }
     },
     "localname": "ProductsAndServicesDomain",
     "nsuri": "http://fasb.org/srt/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueDetails",
      "http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "domainItemType"
    },
    "srt_RangeAxis": {
     "auth_ref": [
      "r238",
      "r247",
      "r248",
      "r357",
      "r358",
      "r359",
      "r360",
      "r361",
      "r362",
      "r363",
      "r398",
      "r402"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Range [Axis]"
       }
      }
     },
     "localname": "RangeAxis",
     "nsuri": "http://fasb.org/srt/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesDetails",
      "http://www.axcelis.com/role/DisclosureLeasesDetails",
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails",
      "http://www.axcelis.com/role/DisclosureRevenueDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "srt_RangeMember": {
     "auth_ref": [
      "r238",
      "r247",
      "r248",
      "r357",
      "r358",
      "r359",
      "r360",
      "r361",
      "r362",
      "r363",
      "r398",
      "r402"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Range [Member]",
        "terseLabel": "Range [Domain]"
       }
      }
     },
     "localname": "RangeMember",
     "nsuri": "http://fasb.org/srt/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesDetails",
      "http://www.axcelis.com/role/DisclosureLeasesDetails",
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails",
      "http://www.axcelis.com/role/DisclosureRevenueDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "srt_RepurchaseAgreementCounterpartyNameDomain": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Repurchase Agreement Counterparty Name [Domain]",
        "terseLabel": "Counterparty Name [Domain]"
       }
      }
     },
     "localname": "RepurchaseAgreementCounterpartyNameDomain",
     "nsuri": "http://fasb.org/srt/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "srt_SegmentGeographicalDomain": {
     "auth_ref": [
      "r162",
      "r163",
      "r222",
      "r227",
      "r400",
      "r414",
      "r415",
      "r416",
      "r417",
      "r418",
      "r419",
      "r420",
      "r421"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Segment Geographical [Domain]",
        "terseLabel": "Geographical [Domain]"
       }
      }
     },
     "localname": "SegmentGeographicalDomain",
     "nsuri": "http://fasb.org/srt/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "srt_StatementGeographicalAxis": {
     "auth_ref": [
      "r162",
      "r163",
      "r222",
      "r227",
      "r400",
      "r412",
      "r414",
      "r415",
      "r416",
      "r417",
      "r418",
      "r419",
      "r420",
      "r421",
      "r422"
     ],
     "lang": {
      "en-us": {
       "role": {
        "label": "Geographical [Axis]"
       }
      }
     },
     "localname": "StatementGeographicalAxis",
     "nsuri": "http://fasb.org/srt/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_AOCIAttributableToParentNetOfTaxRollForward": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.",
        "label": "Accumulated Other Comprehensive Income (Loss), Net of Tax [Roll Forward]",
        "terseLabel": "Changes in accumulated other comprehensive income, net of tax"
       }
      }
     },
     "localname": "AOCIAttributableToParentNetOfTaxRollForward",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveIncomeDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_AccountingPoliciesAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Recent Accounting Guidance"
       }
      }
     },
     "localname": "AccountingPoliciesAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "xbrltype": "stringItemType"
    },
    "us-gaap_AccountsPayableCurrent": {
     "auth_ref": [
      "r40"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "order": 1.0,
       "parentTag": "us-gaap_LiabilitiesCurrent",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Carrying value as of the balance sheet date of liabilities incurred (and for which invoices have typically been received) and payable to vendors for goods and services received that are used in an entity's business. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).",
        "label": "Accounts Payable, Current",
        "terseLabel": "Accounts payable"
       }
      }
     },
     "localname": "AccountsPayableCurrent",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AccountsReceivableAllowanceForCreditLossTableTextBlock": {
     "auth_ref": [
      "r177"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of allowance for credit loss on accounts receivable.",
        "label": "Accounts Receivable, Allowance for Credit Loss [Table Text Block]",
        "terseLabel": "Schedule of allowances for credit losses related to trade receivables"
       }
      }
     },
     "localname": "AccountsReceivableAllowanceForCreditLossTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureReceivableAndAllowanceForCreditLossesTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_AccountsReceivableMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Due from customers or clients for goods or services that have been delivered or sold.",
        "label": "Accounts Receivable [Member]",
        "terseLabel": "Consolidated accounts receivable"
       }
      }
     },
     "localname": "AccountsReceivableMember",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureConcentrationOfRiskDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_AccountsReceivableNetAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Receivable and Allowance for Credit Losses"
       }
      }
     },
     "localname": "AccountsReceivableNetAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "xbrltype": "stringItemType"
    },
    "us-gaap_AccountsReceivableNetCurrent": {
     "auth_ref": [
      "r4",
      "r21",
      "r166",
      "r167"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "order": 2.0,
       "parentTag": "us-gaap_AssetsCurrent",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, after allowance for credit loss, of right to consideration from customer for product sold and service rendered in normal course of business, classified as current.",
        "label": "Accounts Receivable, Net, Current",
        "terseLabel": "Accounts receivable, net"
       }
      }
     },
     "localname": "AccountsReceivableNetCurrent",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AccruedIncomeTaxesCurrent": {
     "auth_ref": [
      "r17",
      "r371",
      "r385"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "order": 5.0,
       "parentTag": "us-gaap_LiabilitiesCurrent",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Carrying amount as of the balance sheet date of the unpaid sum of the known and estimated amounts payable to satisfy all currently due domestic and foreign income tax obligations.",
        "label": "Accrued Income Taxes, Current",
        "terseLabel": "Income taxes"
       }
      }
     },
     "localname": "AccruedIncomeTaxesCurrent",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AccumulatedDefinedBenefitPlansAdjustmentMember": {
     "auth_ref": [
      "r55",
      "r60",
      "r61",
      "r301"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Accumulated other comprehensive (income) loss related to defined benefit plans attributable to the parent.",
        "label": "Accumulated Defined Benefit Plans Adjustment [Member]",
        "terseLabel": "Defined benefit pension plan"
       }
      }
     },
     "localname": "AccumulatedDefinedBenefitPlansAdjustmentMember",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveIncomeDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_AccumulatedOtherComprehensiveIncomeLossLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Accumulated Other Comprehensive Income (Loss) [Line Items]",
        "terseLabel": "Accumulated Other Comprehensive Income"
       }
      }
     },
     "localname": "AccumulatedOtherComprehensiveIncomeLossLineItems",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveIncomeDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTax": {
     "auth_ref": [
      "r24",
      "r58",
      "r59",
      "r60",
      "r387",
      "r407",
      "r410"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "order": 4.0,
       "parentTag": "us-gaap_StockholdersEquity",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Accumulated change in equity from transactions and other events and circumstances from non-owner sources, net of tax effect, at period end. Excludes Net Income (Loss), and accumulated changes in equity from transactions resulting from investments by owners and distributions to owners. Includes foreign currency translation items, certain pension adjustments, unrealized gains and losses on certain investments in debt and equity securities, other than temporary impairment (OTTI) losses related to factors other than credit losses on available-for-sale and held-to-maturity debt securities that an entity does not intend to sell and it is not more likely than not that the entity will be required to sell before recovery of the amortized cost basis, as well as changes in the fair value of derivatives related to the effective portion of a designated cash flow hedge.",
        "label": "Accumulated Other Comprehensive Income (Loss), Net of Tax",
        "periodEndLabel": "Balance at June 30, 2021",
        "periodStartLabel": "Balance at December 31, 2020",
        "terseLabel": "Accumulated other comprehensive income"
       }
      }
     },
     "localname": "AccumulatedOtherComprehensiveIncomeLossNetOfTax",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveIncomeDetails",
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AccumulatedOtherComprehensiveIncomeLossNetOfTaxAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Accumulated Other Comprehensive Income"
       }
      }
     },
     "localname": "AccumulatedOtherComprehensiveIncomeLossNetOfTaxAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "xbrltype": "stringItemType"
    },
    "us-gaap_AccumulatedOtherComprehensiveIncomeLossTable": {
     "auth_ref": [
      "r324",
      "r325",
      "r326",
      "r327",
      "r328",
      "r330"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of information about components of accumulated other comprehensive income (loss).",
        "label": "Accumulated Other Comprehensive Income [Table]"
       }
      }
     },
     "localname": "AccumulatedOtherComprehensiveIncomeLossTable",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveIncomeDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_AccumulatedOtherComprehensiveIncomeMember": {
     "auth_ref": [
      "r57",
      "r60",
      "r61",
      "r100",
      "r101",
      "r102",
      "r301",
      "r403",
      "r404"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Accumulated increase (decrease) in equity from transactions and other events and circumstances from non-owner sources, attributable to the parent. Excludes net income (loss), and accumulated changes in equity from transactions resulting from investments by owners and distributions to owners.",
        "label": "Accumulated Other Comprehensive Income [Member]",
        "terseLabel": "Accumulated Other Comprehensive Income (Loss)"
       }
      }
     },
     "localname": "AccumulatedOtherComprehensiveIncomeMember",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_AccumulatedTranslationAdjustmentMember": {
     "auth_ref": [
      "r54",
      "r60",
      "r61",
      "r301",
      "r325",
      "r326",
      "r327",
      "r328",
      "r330"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Accumulated other comprehensive income (loss) resulting from foreign currency translation adjustments, foreign currency transactions designated and effective as economic hedges of a net investment in a foreign entity and intra-entity foreign currency transactions that are of a long-term-investment nature, attributable to the parent.",
        "label": "Accumulated Translation Adjustment [Member]",
        "terseLabel": "Foreign currency"
       }
      }
     },
     "localname": "AccumulatedTranslationAdjustmentMember",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveIncomeDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_AdditionalPaidInCapital": {
     "auth_ref": [
      "r22",
      "r263"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "order": 2.0,
       "parentTag": "us-gaap_StockholdersEquity",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Excess of issue price over par or stated value of the entity's capital stock and amounts received from other transactions involving the entity's stock or stockholders. Includes adjustments to additional paid in capital. Some examples of such adjustments include recording the issuance of debt with a beneficial conversion feature and certain tax consequences of equity instruments awarded to employees. Use this element for the aggregate amount of additional paid-in capital associated with common and preferred stock. For additional paid-in capital associated with only common stock, use the element additional paid in capital, common stock. For additional paid-in capital associated with only preferred stock, use the element additional paid in capital, preferred stock.",
        "label": "Additional Paid in Capital",
        "terseLabel": "Additional paid-in capital"
       }
      }
     },
     "localname": "AdditionalPaidInCapital",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AdditionalPaidInCapitalMember": {
     "auth_ref": [
      "r100",
      "r101",
      "r102",
      "r259",
      "r260",
      "r261"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Excess of issue price over par or stated value of the entity's capital stock and amounts received from other transactions involving the entity's stock or stockholders.",
        "label": "Additional Paid In Capital [Member]",
        "terseLabel": "Additional Paid-in Capital"
       }
      }
     },
     "localname": "AdditionalPaidInCapitalMember",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue": {
     "auth_ref": [
      "r249",
      "r251",
      "r265",
      "r266"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase to additional paid-in capital (APIC) for recognition of cost for award under share-based payment arrangement.",
        "label": "Adjustments to Additional Paid in Capital, Share-based Compensation, Requisite Service Period Recognition",
        "terseLabel": "Stock-based compensation expense"
       }
      }
     },
     "localname": "AdjustmentsToAdditionalPaidInCapitalSharebasedCompensationRequisiteServicePeriodRecognitionValue",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Adjustments to Reconcile Net Income (Loss) to Cash Provided by (Used in) Operating Activities [Abstract]",
        "terseLabel": "Adjustments to reconcile net income to net cash provided by operating activities:"
       }
      }
     },
     "localname": "AdjustmentsToReconcileNetIncomeLossToCashProvidedByUsedInOperatingActivitiesAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_AllocatedShareBasedCompensationExpense": {
     "auth_ref": [
      "r251",
      "r256",
      "r264"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of expense for award under share-based payment arrangement. Excludes amount capitalized.",
        "label": "Allocated Share-based Compensation Expense",
        "terseLabel": "Stock-based compensation expense"
       }
      }
     },
     "localname": "AllocatedShareBasedCompensationExpense",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockBasedCompensationDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AllowanceForDoubtfulAccountsReceivableCurrent": {
     "auth_ref": [
      "r28",
      "r168",
      "r175"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of allowance for credit loss on accounts receivable, classified as current.",
        "label": "Allowance for Doubtful Accounts Receivable, Current",
        "periodEndLabel": "Balance, end of period",
        "periodStartLabel": "Balance, beginning of period"
       }
      }
     },
     "localname": "AllowanceForDoubtfulAccountsReceivableCurrent",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureReceivableAndAllowanceForCreditLossesAllowancesForCreditLossesRelatedToTradeReceivablesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AllowanceForDoubtfulAccountsReceivableWriteOffs": {
     "auth_ref": [
      "r176"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of direct write-downs of accounts receivable charged against the allowance.",
        "label": "Accounts Receivable, Allowance for Credit Loss, Writeoff",
        "negatedLabel": "Charge-offs"
       }
      }
     },
     "localname": "AllowanceForDoubtfulAccountsReceivableWriteOffs",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureReceivableAndAllowanceForCreditLossesAllowancesForCreditLossesRelatedToTradeReceivablesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount": {
     "auth_ref": [
      "r131"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Securities (including those issuable pursuant to contingent stock agreements) that could potentially dilute basic earnings per share (EPS) or earnings per unit (EPU) in the future that were not included in the computation of diluted EPS or EPU because to do so would increase EPS or EPU amounts or decrease loss per share or unit amounts for the period presented.",
        "label": "Antidilutive Securities Excluded from Computation of Earnings Per Share, Amount",
        "terseLabel": "Anti-dilutive common equivalent shares excluded from calculation"
       }
      }
     },
     "localname": "AntidilutiveSecuritiesExcludedFromComputationOfEarningsPerShareAmount",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShareDetails"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_Assets": {
     "auth_ref": [
      "r96",
      "r150",
      "r153",
      "r159",
      "r171",
      "r296",
      "r302",
      "r322",
      "r370",
      "r383"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Sum of the carrying amounts as of the balance sheet date of all assets that are recognized. Assets are probable future economic benefits obtained or controlled by an entity as a result of past transactions or events.",
        "label": "Assets",
        "totalLabel": "Total assets"
       }
      }
     },
     "localname": "Assets",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AssetsAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Assets [Abstract]",
        "terseLabel": "ASSETS"
       }
      }
     },
     "localname": "AssetsAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_AssetsCurrent": {
     "auth_ref": [
      "r6",
      "r8",
      "r52",
      "r96",
      "r171",
      "r296",
      "r302",
      "r322"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "order": 1.0,
       "parentTag": "us-gaap_Assets",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Sum of the carrying amounts as of the balance sheet date of all assets that are expected to be realized in cash, sold, or consumed within one year (or the normal operating cycle, if longer). Assets are probable future economic benefits obtained or controlled by an entity as a result of past transactions or events.",
        "label": "Assets, Current",
        "totalLabel": "Total current assets"
       }
      }
     },
     "localname": "AssetsCurrent",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_AssetsCurrentAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Assets, Current [Abstract]",
        "terseLabel": "Current assets:"
       }
      }
     },
     "localname": "AssetsCurrentAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_AwardTypeAxis": {
     "auth_ref": [
      "r252",
      "r257"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by type of award under share-based payment arrangement.",
        "label": "Award Type [Axis]"
       }
      }
     },
     "localname": "AwardTypeAxis",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockBasedCompensationDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_BuildingMember": {
     "auth_ref": [
      "r183"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Facility held for productive use including, but not limited to, office, production, storage and distribution facilities.",
        "label": "Building [Member]",
        "terseLabel": "Buildings"
       }
      }
     },
     "localname": "BuildingMember",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_CashAndCashEquivalentsAtCarryingValue": {
     "auth_ref": [
      "r2",
      "r37",
      "r93"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents",
       "weight": 1.0
      },
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "order": 1.0,
       "parentTag": "us-gaap_AssetsCurrent",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates. Excludes cash and cash equivalents within disposal group and discontinued operation.",
        "label": "Cash and Cash Equivalents, at Carrying Value",
        "terseLabel": "Cash and cash equivalents"
       }
      }
     },
     "localname": "CashAndCashEquivalentsAtCarryingValue",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails",
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_CashAndCashEquivalentsFairValueDisclosure": {
     "auth_ref": [],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Fair value portion of currency on hand as well as demand deposits with banks or financial institutions. Includes other kinds of accounts that have the general characteristics of demand deposits. Also includes short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.",
        "label": "Cash and Cash Equivalents, Fair Value Disclosure",
        "terseLabel": "Money market funds, U.S. Government Securities and Agency Investments"
       }
      }
     },
     "localname": "CashAndCashEquivalentsFairValueDisclosure",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents": {
     "auth_ref": [
      "r88",
      "r93",
      "r94"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash and cash equivalents, and cash and cash equivalents restricted to withdrawal or usage. Excludes amount for disposal group and discontinued operations. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.",
        "label": "Cash, Cash Equivalents, Restricted Cash and Restricted Cash Equivalents",
        "periodEndLabel": "Cash, cash equivalents and restricted cash at end of period",
        "periodStartLabel": "Cash, cash equivalents and restricted cash at beginning of period",
        "totalLabel": "Total cash, cash equivalents and restricted cash"
       }
      }
     },
     "localname": "CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Cash, Cash Equivalents, Restricted Cash and Restricted Cash Equivalents [Abstract]"
       }
      }
     },
     "localname": "CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "xbrltype": "stringItemType"
    },
    "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect": {
     "auth_ref": [
      "r88",
      "r323"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase (decrease) in cash, cash equivalents, and cash and cash equivalents restricted to withdrawal or usage; including effect from exchange rate change. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.",
        "label": "Cash, Cash Equivalents, Restricted Cash and Restricted Cash Equivalents, Period Increase (Decrease), Including Exchange Rate Effect",
        "totalLabel": "Net increase in cash, cash equivalents and restricted cash"
       }
      }
     },
     "localname": "CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_CommitmentsAndContingencies": {
     "auth_ref": [
      "r48",
      "r189",
      "r375",
      "r391"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Represents the caption on the face of the balance sheet to indicate that the entity has entered into (1) purchase or supply arrangements that will require expending a portion of its resources to meet the terms thereof, and (2) is exposed to potential losses or, less frequently, gains, arising from (a) possible claims against a company's resources due to future performance under contract terms, and (b) possible losses or likely gains from uncertainties that will ultimately be resolved when one or more future events that are deemed likely to occur do occur or fail to occur.",
        "label": "Commitments and Contingencies.",
        "terseLabel": "Commitments and contingencies (Note 16)"
       }
      }
     },
     "localname": "CommitmentsAndContingencies",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_CommitmentsAndContingenciesDisclosureAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Contingencies"
       }
      }
     },
     "localname": "CommitmentsAndContingenciesDisclosureAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "xbrltype": "stringItemType"
    },
    "us-gaap_CommitmentsAndContingenciesDisclosureTextBlock": {
     "auth_ref": [
      "r186",
      "r187",
      "r188",
      "r191"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for commitments and contingencies.",
        "label": "Commitments and Contingencies Disclosure [Text Block]",
        "terseLabel": "Contingencies"
       }
      }
     },
     "localname": "CommitmentsAndContingenciesDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureContingencies"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_CommonStockMember": {
     "auth_ref": [
      "r100",
      "r101"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Stock that is subordinate to all other stock of the issuer.",
        "label": "Common Stock [Member]",
        "terseLabel": "Common Stock"
       }
      }
     },
     "localname": "CommonStockMember",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockBasedCompensationDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_CommonStockParOrStatedValuePerShare": {
     "auth_ref": [
      "r20"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Face amount or stated value per share of common stock.",
        "label": "Common Stock, Par or Stated Value Per Share",
        "terseLabel": "Common stock, par value (in dollars per share)"
       }
      }
     },
     "localname": "CommonStockParOrStatedValuePerShare",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheetsParenthetical"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_CommonStockSharesAuthorized": {
     "auth_ref": [
      "r20"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The maximum number of common shares permitted to be issued by an entity's charter and bylaws.",
        "label": "Common Stock, Shares Authorized",
        "terseLabel": "Common stock, shares authorized"
       }
      }
     },
     "localname": "CommonStockSharesAuthorized",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheetsParenthetical"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_CommonStockSharesIssued": {
     "auth_ref": [
      "r20"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Total number of common shares of an entity that have been sold or granted to shareholders (includes common shares that were issued, repurchased and remain in the treasury). These shares represent capital invested by the firm's shareholders and owners, and may be all or only a portion of the number of shares authorized. Shares issued include shares outstanding and shares held in the treasury.",
        "label": "Common Stock, Shares, Issued",
        "terseLabel": "Common stock, shares issued"
       }
      }
     },
     "localname": "CommonStockSharesIssued",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheetsParenthetical"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_CommonStockSharesOutstanding": {
     "auth_ref": [
      "r20",
      "r203"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of shares of common stock outstanding. Common stock represent the ownership interest in a corporation.",
        "label": "Common Stock, Shares, Outstanding",
        "terseLabel": "Common stock, shares outstanding"
       }
      }
     },
     "localname": "CommonStockSharesOutstanding",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheetsParenthetical"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_CommonStockValueOutstanding": {
     "auth_ref": [
      "r20"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "order": 1.0,
       "parentTag": "us-gaap_StockholdersEquity",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Value of all classes of common stock held by shareholders. May be all or portion of the number of common shares authorized. These shares exclude common shares repurchased by the entity and held as treasury shares.",
        "label": "Common Stock, Value, Outstanding",
        "verboseLabel": "Common stock, $0.001 par value, 75,000 shares authorized; 33,679 shares issued and outstanding at June 30, 2021; 33,633 shares issued and outstanding at December 31, 2020"
       }
      }
     },
     "localname": "CommonStockValueOutstanding",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ComprehensiveIncomeNetOfTax": {
     "auth_ref": [
      "r64",
      "r66",
      "r67",
      "r73",
      "r378",
      "r393"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount after tax of increase (decrease) in equity from transactions and other events and circumstances from net income and other comprehensive income, attributable to parent entity. Excludes changes in equity resulting from investments by owners and distributions to owners.",
        "label": "Comprehensive Income (Loss), Net of Tax, Attributable to Parent",
        "totalLabel": "Comprehensive income"
       }
      }
     },
     "localname": "ComprehensiveIncomeNetOfTax",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ComprehensiveIncomeNoteTextBlock": {
     "auth_ref": [
      "r72",
      "r82",
      "r377",
      "r392"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for comprehensive income, which includes, but is not limited to, 1) the amount of income tax expense or benefit allocated to each component of other comprehensive income, including reclassification adjustments, 2) the reclassification adjustments for each classification of other comprehensive income and 3) the ending accumulated balances for each component of comprehensive income.",
        "label": "Comprehensive Income (Loss) Note [Text Block]",
        "verboseLabel": "Accumulated Other Comprehensive Income"
       }
      }
     },
     "localname": "ComprehensiveIncomeNoteTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveIncome"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ConcentrationRiskBenchmarkDomain": {
     "auth_ref": [
      "r140",
      "r141",
      "r165",
      "r319",
      "r320"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The denominator in a calculation of a disclosed concentration risk percentage.",
        "label": "Concentration Risk Benchmark [Domain]",
        "terseLabel": "Concentration Risk Benchmark [Domain]"
       }
      }
     },
     "localname": "ConcentrationRiskBenchmarkDomain",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureConcentrationOfRiskDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_ConcentrationRiskByBenchmarkAxis": {
     "auth_ref": [
      "r140",
      "r141",
      "r165",
      "r319",
      "r320",
      "r411"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by benchmark of concentration risk.",
        "label": "Concentration Risk Benchmark [Axis]"
       }
      }
     },
     "localname": "ConcentrationRiskByBenchmarkAxis",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureConcentrationOfRiskDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ConcentrationRiskByTypeAxis": {
     "auth_ref": [
      "r140",
      "r141",
      "r165",
      "r319",
      "r320",
      "r411"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by type of concentration risk, for example, but not limited to, asset, liability, net assets, geographic, customer, employees, supplier, lender.",
        "label": "Concentration Risk Type [Axis]"
       }
      }
     },
     "localname": "ConcentrationRiskByTypeAxis",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureConcentrationOfRiskDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ConcentrationRiskDisclosureTextBlock": {
     "auth_ref": [
      "r143"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for any concentrations existing at the date of the financial statements that make an entity vulnerable to a reasonably possible, near-term, severe impact. This disclosure informs financial statement users about the general nature of the risk associated with the concentration, and may indicate the percentage of concentration risk as of the balance sheet date.",
        "label": "Concentration Risk Disclosure [Text Block]",
        "terseLabel": "Concentration of Risk"
       }
      }
     },
     "localname": "ConcentrationRiskDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureConcentrationOfRisk"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ConcentrationRiskLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Concentration Risk [Line Items]",
        "verboseLabel": "Concentration of Risk"
       }
      }
     },
     "localname": "ConcentrationRiskLineItems",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureConcentrationOfRiskDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ConcentrationRiskPercentage1": {
     "auth_ref": [
      "r140",
      "r141",
      "r165",
      "r319",
      "r320"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "For an entity that discloses a concentration risk in relation to quantitative amount, which serves as the \"benchmark\" (or denominator) in the equation, this concept represents the concentration percentage derived from the division.",
        "label": "Concentration Risk, Percentage",
        "terseLabel": "Percentage of concentration risk"
       }
      }
     },
     "localname": "ConcentrationRiskPercentage1",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureConcentrationOfRiskDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "us-gaap_ConcentrationRiskTable": {
     "auth_ref": [
      "r138",
      "r140",
      "r141",
      "r142",
      "r319",
      "r321"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Describes the nature of a concentration, a benchmark to which it is compared, and the percentage that the risk is to the benchmark.",
        "label": "Concentration Risk [Table]"
       }
      }
     },
     "localname": "ConcentrationRiskTable",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureConcentrationOfRiskDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ConcentrationRiskTypeDomain": {
     "auth_ref": [
      "r140",
      "r141",
      "r165",
      "r319",
      "r320"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "For an entity that discloses a concentration risk as a percentage of some financial balance or benchmark, identifies the type (for example, asset, liability, net assets, geographic, customer, employees, supplier, lender) of the concentration.",
        "label": "Concentration Risk Type [Domain]",
        "terseLabel": "Concentration Risk Type [Domain]"
       }
      }
     },
     "localname": "ConcentrationRiskTypeDomain",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureConcentrationOfRiskDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_ContractWithCustomerAssetAndLiabilityTableTextBlock": {
     "auth_ref": [
      "r213"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of receivable, contract asset, and contract liability from contract with customer. Includes, but is not limited to, change in contract asset and contract liability.",
        "label": "Contract with Customer, Asset and Liability [Table Text Block]",
        "terseLabel": "Schedule of Contract liabilities"
       }
      }
     },
     "localname": "ContractWithCustomerAssetAndLiabilityTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ContractWithCustomerLiability": {
     "auth_ref": [
      "r211",
      "r212",
      "r223"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable.",
        "label": "Contract with Customer, Liability",
        "periodEndLabel": "Balance, end of the period",
        "periodStartLabel": "Balance, beginning of the period",
        "terseLabel": "Contract liabilities"
       }
      }
     },
     "localname": "ContractWithCustomerLiability",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueContractLiabilitiesDetails",
      "http://www.axcelis.com/role/DisclosureRevenueDeferredRevenueDetails",
      "http://www.axcelis.com/role/DisclosureRevenueDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ContractWithCustomerLiabilityCurrent": {
     "auth_ref": [
      "r211",
      "r212",
      "r223"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "order": 6.0,
       "parentTag": "us-gaap_LiabilitiesCurrent",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable, classified as current.",
        "label": "Contract with Customer, Liability, Current",
        "terseLabel": "Deferred revenue"
       }
      }
     },
     "localname": "ContractWithCustomerLiabilityCurrent",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueDetails",
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ContractWithCustomerLiabilityNoncurrent": {
     "auth_ref": [
      "r211",
      "r212",
      "r223"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "order": 3.0,
       "parentTag": "us-gaap_Liabilities",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable, classified as noncurrent.",
        "label": "Contract with Customer, Liability, Noncurrent",
        "terseLabel": "Long-term deferred revenue"
       }
      }
     },
     "localname": "ContractWithCustomerLiabilityNoncurrent",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueDetails",
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ContractWithCustomerLiabilityRevenueRecognized": {
     "auth_ref": [
      "r224"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of revenue recognized that was previously included in balance of obligation to transfer good or service to customer for which consideration from customer has been received or is due.",
        "label": "Contract with Customer, Liability, Revenue Recognized",
        "terseLabel": "Recognition of deferred revenue"
       }
      }
     },
     "localname": "ContractWithCustomerLiabilityRevenueRecognized",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueDeferredRevenueDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_CostOfGoodsAndServicesSold": {
     "auth_ref": [
      "r77",
      "r364"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations": {
       "order": 2.0,
       "parentTag": "us-gaap_GrossProfit",
       "weight": -1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The aggregate costs related to goods produced and sold and services rendered by an entity during the reporting period. This excludes costs incurred during the reporting period related to financial services rendered and other revenue generating activities.",
        "label": "Cost of Goods and Services Sold",
        "terseLabel": "Cost of revenue"
       }
      }
     },
     "localname": "CostOfGoodsAndServicesSold",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_CostOfRevenueAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Cost of Revenue [Abstract]",
        "terseLabel": "Cost of revenue:"
       }
      }
     },
     "localname": "CostOfRevenueAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_CreditConcentrationRiskMember": {
     "auth_ref": [
      "r321"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Reflects the percentage that a specified receivable or amount at risk from a counterparty under a contractual arrangement is to a specified benchmark, such as total receivables, net revenues, pretax results. Risk is the materially adverse effects of loss attributable to (a) the failure to collect a significant receivable from a major customer or group of homogeneous accounts, or (b) a failure by a counterparty to perform under terms of a contractual arrangement.",
        "label": "Credit Concentration Risk [Member]",
        "terseLabel": "Credit concentration risk"
       }
      }
     },
     "localname": "CreditConcentrationRiskMember",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureConcentrationOfRiskDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_CreditFacilityAxis": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by type of credit facility. Credit facilities provide capital to borrowers without the need to structure a loan for each borrowing.",
        "label": "Credit Facility [Axis]"
       }
      }
     },
     "localname": "CreditFacilityAxis",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_CreditFacilityDomain": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Type of credit facility. Credit facilities provide capital to borrowers without the need to structure a loan for each borrowing.",
        "label": "Credit Facility [Domain]",
        "terseLabel": "Credit Facility [Domain]"
       }
      }
     },
     "localname": "CreditFacilityDomain",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_CustomerConcentrationRiskMember": {
     "auth_ref": [
      "r139",
      "r165"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Reflects the percentage that revenues in the period from one or more significant customers is to net revenues, as defined by the entity, such as total net revenues, product line revenues, segment revenues. The risk is the materially adverse effects of loss of a significant customer.",
        "label": "Customer Concentration Risk [Member]",
        "terseLabel": "Customer concentration risk"
       }
      }
     },
     "localname": "CustomerConcentrationRiskMember",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureConcentrationOfRiskDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_DebtDisclosureAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Financing Arrangements"
       }
      }
     },
     "localname": "DebtDisclosureAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "xbrltype": "stringItemType"
    },
    "us-gaap_DebtDisclosureTextBlock": {
     "auth_ref": [
      "r202"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for information about short-term and long-term debt arrangements, which includes amounts of borrowings under each line of credit, note payable, commercial paper issue, bonds indenture, debenture issue, own-share lending arrangements and any other contractual agreement to repay funds, and about the underlying arrangements, rationale for a classification as long-term, including repayment terms, interest rates, collateral provided, restrictions on use of assets and activities, whether or not in compliance with debt covenants, and other matters important to users of the financial statements, such as the effects of refinancing and noncompliance with debt covenants.",
        "label": "Debt Disclosure [Text Block]",
        "terseLabel": "Financing Arrangements"
       }
      }
     },
     "localname": "DebtDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangements"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_DebtInstrumentLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Debt Instrument [Line Items]",
        "terseLabel": "Financing Arrangements"
       }
      }
     },
     "localname": "DebtInstrumentLineItems",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_DebtInstrumentTable": {
     "auth_ref": [
      "r46",
      "r99",
      "r204",
      "r205",
      "r206",
      "r207",
      "r332",
      "r333",
      "r335",
      "r382"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "A table or schedule providing information pertaining to long-term debt instruments or arrangements, including identification, terms, features, collateral requirements and other information necessary to a fair presentation. These are debt arrangements that originally required repayment more than twelve months after issuance or greater than the normal operating cycle of the company, if longer.",
        "label": "Schedule of Long-term Debt Instruments [Table]"
       }
      }
     },
     "localname": "DebtInstrumentTable",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_DeferredIncomeTaxAssetsNet": {
     "auth_ref": [
      "r269",
      "r270"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "order": 6.0,
       "parentTag": "us-gaap_Assets",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, after allocation of valuation allowances and deferred tax liability, of deferred tax asset attributable to deductible differences and carryforwards, with jurisdictional netting.",
        "label": "Deferred Tax Assets, Net.",
        "terseLabel": "Deferred income taxes",
        "verboseLabel": "Deferred tax assets, net"
       }
      }
     },
     "localname": "DeferredIncomeTaxAssetsNet",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesDetails",
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredIncomeTaxExpenseBenefit": {
     "auth_ref": [
      "r91",
      "r97",
      "r277",
      "r285",
      "r286",
      "r287"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 3.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of deferred income tax expense (benefit) pertaining to income (loss) from continuing operations.",
        "label": "Deferred Income Tax Expense (Benefit)",
        "terseLabel": "Deferred income taxes"
       }
      }
     },
     "localname": "DeferredIncomeTaxExpenseBenefit",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DeferredTaxAssetsValuationAllowance": {
     "auth_ref": [
      "r275"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of deferred tax assets for which it is more likely than not that a tax benefit will not be realized.",
        "label": "Deferred Tax Assets, Valuation Allowance",
        "terseLabel": "Deferred tax assets valuation allowance"
       }
      }
     },
     "localname": "DeferredTaxAssetsValuationAllowance",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DepreciationDepletionAndAmortization": {
     "auth_ref": [
      "r91",
      "r148"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 2.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The aggregate expense recognized in the current period that allocates the cost of tangible assets, intangible assets, or depleting assets to periods that benefit from use of the assets.",
        "label": "Depreciation, Depletion and Amortization",
        "terseLabel": "Depreciation and amortization"
       }
      }
     },
     "localname": "DepreciationDepletionAndAmortization",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_DisaggregationOfRevenueLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Disaggregation of Revenue [Line Items]",
        "terseLabel": "Disaggregation of Revenue"
       }
      }
     },
     "localname": "DisaggregationOfRevenueLineItems",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueDetails",
      "http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_DisaggregationOfRevenueTable": {
     "auth_ref": [
      "r222",
      "r226",
      "r227",
      "r228",
      "r229",
      "r230",
      "r231",
      "r232"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of information about disaggregation of revenue into categories depicting how nature, amount, timing, and uncertainty of revenue and cash flows are affected by economic factor.",
        "label": "Disaggregation of Revenue [Table]"
       }
      }
     },
     "localname": "DisaggregationOfRevenueTable",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueDetails",
      "http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock": {
     "auth_ref": [
      "r267"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for share-based payment arrangement.",
        "label": "Disclosure of Compensation Related Costs, Share-based Payments [Text Block]",
        "verboseLabel": "Stock Based Compensation"
       }
      }
     },
     "localname": "DisclosureOfCompensationRelatedCostsShareBasedPaymentsTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockBasedCompensation"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Stock Based Compensation"
       }
      }
     },
     "localname": "DisclosureOfCompensationRelatedCostsSharebasedPaymentsAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "xbrltype": "stringItemType"
    },
    "us-gaap_EarningsPerShareAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Computation of Net Earnings per Share",
        "terseLabel": "Net income per share:"
       }
      }
     },
     "localname": "EarningsPerShareAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_EarningsPerShareBasic": {
     "auth_ref": [
      "r74",
      "r109",
      "r110",
      "r111",
      "r112",
      "r113",
      "r120",
      "r123",
      "r128",
      "r129",
      "r130",
      "r134",
      "r135",
      "r379",
      "r394"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The amount of net income (loss) for the period per each share of common stock or unit outstanding during the reporting period.",
        "label": "Earnings Per Share, Basic",
        "terseLabel": "Basic"
       }
      }
     },
     "localname": "EarningsPerShareBasic",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShareDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_EarningsPerShareBasicAndDilutedAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Net earnings per share",
        "terseLabel": "Net income per share"
       }
      }
     },
     "localname": "EarningsPerShareBasicAndDilutedAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShareDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_EarningsPerShareBasicAndDilutedOtherDisclosuresAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Earnings Per Share, Basic and Diluted, Other Disclosures [Abstract]",
        "terseLabel": "Computation of Net Earnings per Share"
       }
      }
     },
     "localname": "EarningsPerShareBasicAndDilutedOtherDisclosuresAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShareDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_EarningsPerShareDiluted": {
     "auth_ref": [
      "r74",
      "r109",
      "r110",
      "r111",
      "r112",
      "r113",
      "r123",
      "r128",
      "r129",
      "r130",
      "r134",
      "r135",
      "r379",
      "r394"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The amount of net income (loss) for the period available to each share of common stock or common unit outstanding during the reporting period and to each share or unit that would have been outstanding assuming the issuance of common shares or units for all dilutive potential common shares or units outstanding during the reporting period.",
        "label": "Earnings Per Share, Diluted",
        "terseLabel": "Diluted"
       }
      }
     },
     "localname": "EarningsPerShareDiluted",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShareDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_EarningsPerShareTextBlock": {
     "auth_ref": [
      "r131",
      "r132",
      "r133",
      "r136"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for earnings per share.",
        "label": "Earnings Per Share [Text Block]",
        "terseLabel": "Computation of Net Earnings per Share"
       }
      }
     },
     "localname": "EarningsPerShareTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShare"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents": {
     "auth_ref": [
      "r323"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 4.0,
       "parentTag": "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase (decrease) from effect of exchange rate changes on cash and cash equivalents, and cash and cash equivalents restricted to withdrawal or usage; held in foreign currencies. Excludes amounts for disposal group and discontinued operations. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.",
        "label": "Effect of Exchange Rate on Cash, Cash Equivalents, Restricted Cash and Restricted Cash Equivalents",
        "terseLabel": "Effect of exchange rate changes on cash and cash equivalents"
       }
      }
     },
     "localname": "EffectOfExchangeRateOnCashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate": {
     "auth_ref": [
      "r272",
      "r288"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Percentage of domestic federal statutory tax rate applicable to pretax income (loss).",
        "label": "Effective Income Tax Rate Reconciliation, at Federal Statutory Income Tax Rate, Percent",
        "verboseLabel": "Statutory income tax rate (as a percent)"
       }
      }
     },
     "localname": "EffectiveIncomeTaxRateReconciliationAtFederalStatutoryIncomeTaxRate",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "us-gaap_EmployeeRelatedLiabilitiesCurrent": {
     "auth_ref": [
      "r44"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "order": 3.0,
       "parentTag": "us-gaap_LiabilitiesCurrent",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Total of the carrying values as of the balance sheet date of obligations incurred through that date and payable for obligations related to services received from employees, such as accrued salaries and bonuses, payroll taxes and fringe benefits. Used to reflect the current portion of the liabilities (due within one year or within the normal operating cycle if longer).",
        "label": "Employee-related Liabilities, Current",
        "terseLabel": "Accrued compensation"
       }
      }
     },
     "localname": "EmployeeRelatedLiabilitiesCurrent",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_EmployeeStockMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "An Employee Stock Purchase Plan is a tax-efficient means by which employees of a corporation can purchase the corporation's stock.",
        "label": "Employee Stock [Member]",
        "terseLabel": "2020 Employee stock purchase plan"
       }
      }
     },
     "localname": "EmployeeStockMember",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockBasedCompensationDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_EquityComponentDomain": {
     "auth_ref": [
      "r100",
      "r101",
      "r102",
      "r106",
      "r114",
      "r116",
      "r137",
      "r172",
      "r203",
      "r208",
      "r259",
      "r260",
      "r261",
      "r278",
      "r279",
      "r324",
      "r325",
      "r326",
      "r327",
      "r328",
      "r330",
      "r403",
      "r404",
      "r405"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Components of equity are the parts of the total Equity balance including that which is allocated to common, preferred, treasury stock, retained earnings, etc.",
        "label": "Equity Component [Domain]",
        "terseLabel": "Equity Component [Domain]"
       }
      }
     },
     "localname": "EquityComponentDomain",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveIncomeDetails",
      "http://www.axcelis.com/role/DisclosureStockBasedCompensationDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_EstimateOfFairValueFairValueDisclosureMember": {
     "auth_ref": [
      "r318"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Measured as an estimate of fair value.",
        "label": "Estimate Of Fair Value Fair Value Disclosure [Member]",
        "terseLabel": "Total"
       }
      }
     },
     "localname": "EstimateOfFairValueFairValueDisclosureMember",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Fair Value, Assets and Liabilities Measured on Recurring and Nonrecurring Basis [Line Items]",
        "verboseLabel": "Fair Value Measurements"
       }
      }
     },
     "localname": "FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisLineItems",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable": {
     "auth_ref": [
      "r307",
      "r308",
      "r309",
      "r314"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of information about asset and liability measured at fair value on recurring and nonrecurring basis.",
        "label": "Fair Value Measurements, Recurring and Nonrecurring [Table]"
       }
      }
     },
     "localname": "FairValueAssetsAndLiabilitiesMeasuredOnRecurringAndNonrecurringBasisTable",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain": {
     "auth_ref": [
      "r312"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Class of asset.",
        "label": "Fair Value Assets Measured On Recurring Basis Unobservable Input Reconciliation By Asset Class [Domain]",
        "terseLabel": "Asset Class [Domain]"
       }
      }
     },
     "localname": "FairValueAssetsMeasuredOnRecurringBasisUnobservableInputReconciliationByAssetClassDomain",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_FairValueByAssetClassAxis": {
     "auth_ref": [
      "r307",
      "r314"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by class of asset.",
        "label": "Asset Class [Axis]"
       }
      }
     },
     "localname": "FairValueByAssetClassAxis",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_FairValueByFairValueHierarchyLevelAxis": {
     "auth_ref": [
      "r239",
      "r240",
      "r241",
      "r242",
      "r243",
      "r244",
      "r245",
      "r246",
      "r308",
      "r354",
      "r355",
      "r356"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by level within fair value hierarchy and fair value measured at net asset value per share as practical expedient.",
        "label": "Fair Value, Hierarchy [Axis]"
       }
      }
     },
     "localname": "FairValueByFairValueHierarchyLevelAxis",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_FairValueByMeasurementBasisAxis": {
     "auth_ref": [
      "r307",
      "r315"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by measurement basis.",
        "label": "Measurement Basis [Axis]"
       }
      }
     },
     "localname": "FairValueByMeasurementBasisAxis",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_FairValueByMeasurementFrequencyAxis": {
     "auth_ref": [
      "r307",
      "r308",
      "r310",
      "r311",
      "r316"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by measurement frequency.",
        "label": "Measurement Frequency [Axis]"
       }
      }
     },
     "localname": "FairValueByMeasurementFrequencyAxis",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_FairValueDisclosuresAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Fair Value Measurements"
       }
      }
     },
     "localname": "FairValueDisclosuresAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "xbrltype": "stringItemType"
    },
    "us-gaap_FairValueDisclosuresTextBlock": {
     "auth_ref": [
      "r313"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for the fair value of financial instruments (as defined), including financial assets and financial liabilities (collectively, as defined), and the measurements of those instruments as well as disclosures related to the fair value of non-financial assets and liabilities. Such disclosures about the financial instruments, assets, and liabilities would include: (1) the fair value of the required items together with their carrying amounts (as appropriate); (2) for items for which it is not practicable to estimate fair value, disclosure would include: (a) information pertinent to estimating fair value (including, carrying amount, effective interest rate, and maturity, and (b) the reasons why it is not practicable to estimate fair value; (3) significant concentrations of credit risk including: (a) information about the activity, region, or economic characteristics identifying a concentration, (b) the maximum amount of loss the entity is exposed to based on the gross fair value of the related item, (c) policy for requiring collateral or other security and information as to accessing such collateral or security, and (d) the nature and brief description of such collateral or security; (4) quantitative information about market risks and how such risks are managed; (5) for items measured on both a recurring and nonrecurring basis information regarding the inputs used to develop the fair value measurement; and (6) for items presented in the financial statement for which fair value measurement is elected: (a) information necessary to understand the reasons for the election, (b) discussion of the effect of fair value changes on earnings, (c) a description of [similar groups] items for which the election is made and the relation thereof to the balance sheet, the aggregate carrying value of items included in the balance sheet that are not eligible for the election; (7) all other required (as defined) and desired information.",
        "label": "Fair Value Disclosures [Text Block]",
        "terseLabel": "Fair Value Measurements"
       }
      }
     },
     "localname": "FairValueDisclosuresTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurements"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_FairValueInputsLevel1Member": {
     "auth_ref": [
      "r239",
      "r240",
      "r245",
      "r246",
      "r308",
      "r354"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Quoted prices in active markets for identical assets or liabilities that the reporting entity can access at the measurement date.",
        "label": "Fair Value Inputs Level1 [Member]",
        "terseLabel": "Level 1"
       }
      }
     },
     "localname": "FairValueInputsLevel1Member",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_FairValueMeasurementFrequencyDomain": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Measurement frequency.",
        "label": "Fair Value Measurement Frequency [Domain]",
        "terseLabel": "Fair Value, Measurement Frequency [Domain]"
       }
      }
     },
     "localname": "FairValueMeasurementFrequencyDomain",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_FairValueMeasurementsFairValueHierarchyDomain": {
     "auth_ref": [
      "r239",
      "r240",
      "r241",
      "r242",
      "r243",
      "r244",
      "r245",
      "r246",
      "r354",
      "r355",
      "r356"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Categories used to prioritize the inputs to valuation techniques to measure fair value.",
        "label": "Fair Value Measurements Fair Value Hierarchy [Domain]",
        "terseLabel": "Fair Value Hierarchy [Domain]"
       }
      }
     },
     "localname": "FairValueMeasurementsFairValueHierarchyDomain",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_FairValueMeasurementsRecurringMember": {
     "auth_ref": [
      "r313",
      "r316"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Frequent fair value measurement. Includes, but is not limited to, fair value adjustment for impairment of asset, liability or equity, frequently measured at fair value.",
        "label": "Fair Value Measurements Recurring [Member]",
        "terseLabel": "Recurring"
       }
      }
     },
     "localname": "FairValueMeasurementsRecurringMember",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_FinanceLeaseInterestExpense": {
     "auth_ref": [
      "r339",
      "r345",
      "r353"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails": {
       "order": 2.0,
       "parentTag": "acls_FinanceLeaseCost",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of interest expense on finance lease liability.",
        "label": "Finance Lease, Interest Expense",
        "terseLabel": "Interest on lease liabilities"
       }
      }
     },
     "localname": "FinanceLeaseInterestExpense",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_FinanceLeaseInterestPaymentOnLiability": {
     "auth_ref": [
      "r341",
      "r347"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of interest paid on finance lease liability.",
        "label": "Finance Lease, Interest Payment on Liability",
        "terseLabel": "Operating cash outflows from finance leases"
       }
      }
     },
     "localname": "FinanceLeaseInterestPaymentOnLiability",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesCashFlowByLeaseTypeDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Finance Lease Liabilities, Payments, Due [Abstract]",
        "terseLabel": "Future minimum lease payments finance lease"
       }
      }
     },
     "localname": "FinanceLeaseLiabilitiesPaymentsDueAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_FinanceLeaseLiability": {
     "auth_ref": [
      "r337",
      "r352"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_FinanceLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Present value of lessee's discounted obligation for lease payments from finance lease.",
        "label": "Finance Lease, Liability",
        "terseLabel": "Finance lease obligations"
       }
      }
     },
     "localname": "FinanceLeaseLiability",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_FinanceLeaseLiabilityCurrent": {
     "auth_ref": [
      "r337"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails": {
       "order": 3.0,
       "parentTag": "acls_OperatingAndFinanceLeaseLiability",
       "weight": 1.0
      },
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "order": 2.0,
       "parentTag": "us-gaap_LiabilitiesCurrent",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Present value of lessee's discounted obligation for lease payments from finance lease, classified as current.",
        "label": "Finance Lease, Liability, Current",
        "terseLabel": "Finance liabilities current",
        "verboseLabel": "Current portion of finance lease obligation"
       }
      }
     },
     "localname": "FinanceLeaseLiabilityCurrent",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails",
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_FinanceLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList": {
     "auth_ref": [
      "r338"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicates line item in statement of financial position that includes current finance lease liability.",
        "label": "Finance Lease, Liability, Current, Statement of Financial Position [Extensible List]"
       }
      }
     },
     "localname": "FinanceLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails"
     ],
     "xbrltype": "extensibleListItemType"
    },
    "us-gaap_FinanceLeaseLiabilityNoncurrent": {
     "auth_ref": [
      "r337"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails": {
       "order": 4.0,
       "parentTag": "acls_OperatingAndFinanceLeaseLiability",
       "weight": 1.0
      },
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "order": 2.0,
       "parentTag": "us-gaap_Liabilities",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Present value of lessee's discounted obligation for lease payments from finance lease, classified as noncurrent.",
        "label": "Finance Lease, Liability, Noncurrent",
        "terseLabel": "Finance liabilities noncurrent",
        "verboseLabel": "Long-term finance lease obligation"
       }
      }
     },
     "localname": "FinanceLeaseLiabilityNoncurrent",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails",
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails",
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_FinanceLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList": {
     "auth_ref": [
      "r338"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicates line item in statement of financial position that includes noncurrent finance lease liability.",
        "label": "Finance Lease, Liability, Noncurrent, Statement of Financial Position [Extensible List]"
       }
      }
     },
     "localname": "FinanceLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails"
     ],
     "xbrltype": "extensibleListItemType"
    },
    "us-gaap_FinanceLeaseLiabilityPaymentsDue": {
     "auth_ref": [
      "r352"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      },
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payments for finance lease.",
        "label": "Finance Lease, Liability, Payments, Due",
        "totalLabel": "Total lease payments"
       }
      }
     },
     "localname": "FinanceLeaseLiabilityPaymentsDue",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths": {
     "auth_ref": [
      "r352"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "order": 2.0,
       "parentTag": "us-gaap_FinanceLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in next fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Finance Lease, Liability, Payments, Due Next Twelve Months",
        "terseLabel": "2022"
       }
      }
     },
     "localname": "FinanceLeaseLiabilityPaymentsDueNextTwelveMonths",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour": {
     "auth_ref": [
      "r352"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "order": 5.0,
       "parentTag": "us-gaap_FinanceLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Finance Lease, Liability, Payments, Due Year Four",
        "verboseLabel": "2025"
       }
      }
     },
     "localname": "FinanceLeaseLiabilityPaymentsDueYearFour",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree": {
     "auth_ref": [
      "r352"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "order": 4.0,
       "parentTag": "us-gaap_FinanceLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in third fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Finance Lease, Liability, Payments, Due Year Three",
        "verboseLabel": "2024"
       }
      }
     },
     "localname": "FinanceLeaseLiabilityPaymentsDueYearThree",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo": {
     "auth_ref": [
      "r352"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "order": 3.0,
       "parentTag": "us-gaap_FinanceLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in second fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Finance Lease, Liability, Payments, Due Year Two",
        "verboseLabel": "2023"
       }
      }
     },
     "localname": "FinanceLeaseLiabilityPaymentsDueYearTwo",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_FinanceLeaseLiabilityPaymentsRemainderOfFiscalYear": {
     "auth_ref": [
      "r352"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "order": 1.0,
       "parentTag": "us-gaap_FinanceLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in remainder of current fiscal year.",
        "label": "Finance Lease, Liability, Payments, Remainder of Fiscal Year",
        "terseLabel": "2021"
       }
      }
     },
     "localname": "FinanceLeaseLiabilityPaymentsRemainderOfFiscalYear",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount": {
     "auth_ref": [
      "r352"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_FinanceLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payments in excess of discounted obligation for lease payments for finance lease.",
        "label": "Finance Lease, Liability, Undiscounted Excess Amount",
        "negatedLabel": "Less interest portion"
       }
      }
     },
     "localname": "FinanceLeaseLiabilityUndiscountedExcessAmount",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_FinanceLeasePrincipalPayments": {
     "auth_ref": [
      "r340",
      "r347"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 2.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash outflow for principal payment on finance lease.",
        "label": "Finance Lease, Principal Payments",
        "negatedLabel": "Principal payments on finance lease obligation",
        "terseLabel": "Financing cash outflows from finance leases"
       }
      }
     },
     "localname": "FinanceLeasePrincipalPayments",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesCashFlowByLeaseTypeDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_FinanceLeaseRightOfUseAsset": {
     "auth_ref": [
      "r336"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails": {
       "order": 2.0,
       "parentTag": "acls_OperatingAndFinanceLeaseRightOfUseAsset",
       "weight": 1.0
      },
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "order": 4.0,
       "parentTag": "us-gaap_Assets",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, after accumulated amortization, of right-of-use asset from finance lease.",
        "label": "Finance Lease, Right-of-Use Asset",
        "terseLabel": "Finance lease assets, net",
        "verboseLabel": "Finance lease assets"
       }
      }
     },
     "localname": "FinanceLeaseRightOfUseAsset",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails",
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_FinanceLeaseRightOfUseAssetAmortization": {
     "auth_ref": [
      "r339",
      "r345",
      "r353"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails": {
       "order": 1.0,
       "parentTag": "acls_FinanceLeaseCost",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of amortization expense attributable to right-of-use asset from finance lease.",
        "label": "Finance Lease, Right-of-Use Asset, Amortization",
        "terseLabel": "Depreciation of leased assets"
       }
      }
     },
     "localname": "FinanceLeaseRightOfUseAssetAmortization",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_FinanceLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList": {
     "auth_ref": [
      "r338"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicates line item in statement of financial position that includes finance lease right-of-use asset.",
        "label": "Finance Lease, Right-of-Use Asset, Statement of Financial Position [Extensible List]"
       }
      }
     },
     "localname": "FinanceLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails"
     ],
     "xbrltype": "extensibleListItemType"
    },
    "us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent": {
     "auth_ref": [
      "r350",
      "r353"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Weighted average discount rate for finance lease calculated at point in time.",
        "label": "Finance Lease, Weighted Average Discount Rate, Percent",
        "terseLabel": "Finance leases - Weighted-average discount rate"
       }
      }
     },
     "localname": "FinanceLeaseWeightedAverageDiscountRatePercent",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1": {
     "auth_ref": [
      "r349",
      "r353"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Weighted average remaining lease term for finance lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.",
        "label": "Finance Lease, Weighted Average Remaining Lease Term",
        "terseLabel": "Finance leases - Weighted-average remaining lease term (in years)"
       }
      }
     },
     "localname": "FinanceLeaseWeightedAverageRemainingLeaseTerm1",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "us-gaap_GeneralAndAdministrativeExpense": {
     "auth_ref": [
      "r78"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations": {
       "order": 3.0,
       "parentTag": "us-gaap_OperatingExpenses",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The aggregate total of expenses of managing and administering the affairs of an entity, including affiliates of the reporting entity, which are not directly or indirectly associated with the manufacture, sale or creation of a product or product line.",
        "label": "General and Administrative Expense",
        "terseLabel": "General and administrative"
       }
      }
     },
     "localname": "GeneralAndAdministrativeExpense",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_GeneralAndAdministrativeExpenseMember": {
     "auth_ref": [
      "r75"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Primary financial statement caption encompassing general and administrative expense.",
        "label": "General And Administrative Expense [Member]",
        "terseLabel": "General and administrative*"
       }
      }
     },
     "localname": "GeneralAndAdministrativeExpenseMember",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_GrossProfit": {
     "auth_ref": [
      "r76",
      "r96",
      "r150",
      "r152",
      "r155",
      "r158",
      "r160",
      "r171",
      "r322"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations": {
       "order": 1.0,
       "parentTag": "us-gaap_OperatingIncomeLoss",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Aggregate revenue less cost of goods and services sold or operating expenses directly attributable to the revenue generation activity.",
        "label": "Gross Profit",
        "totalLabel": "Gross profit"
       }
      }
     },
     "localname": "GrossProfit",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest": {
     "auth_ref": [
      "r71",
      "r150",
      "r152",
      "r155",
      "r158",
      "r160",
      "r368",
      "r376",
      "r381",
      "r395"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations": {
       "order": 1.0,
       "parentTag": "us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of income (loss) from continuing operations, including income (loss) from equity method investments, before deduction of income tax expense (benefit), and income (loss) attributable to noncontrolling interest.",
        "label": "Income (Loss) from Continuing Operations before Income Taxes, Extraordinary Items, Noncontrolling Interest",
        "totalLabel": "Income before income taxes"
       }
      }
     },
     "localname": "IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncomeStatementAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Consolidated Statements of Operations"
       }
      }
     },
     "localname": "IncomeStatementAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "xbrltype": "stringItemType"
    },
    "us-gaap_IncomeStatementLocationAxis": {
     "auth_ref": [
      "r185"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by location in the income statement.",
        "label": "Income Statement Location [Axis]"
       }
      }
     },
     "localname": "IncomeStatementLocationAxis",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_IncomeStatementLocationDomain": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Location in the income statement.",
        "label": "Income Statement Location [Domain]",
        "terseLabel": "Income Statement Location [Domain]"
       }
      }
     },
     "localname": "IncomeStatementLocationDomain",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_IncomeTaxDisclosureAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Income Taxes"
       }
      }
     },
     "localname": "IncomeTaxDisclosureAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "xbrltype": "stringItemType"
    },
    "us-gaap_IncomeTaxDisclosureTextBlock": {
     "auth_ref": [
      "r273",
      "r274",
      "r276",
      "r283",
      "r289",
      "r291",
      "r292",
      "r293"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for income taxes. Disclosures may include net deferred tax liability or asset recognized in an enterprise's statement of financial position, net change during the year in the total valuation allowance, approximate tax effect of each type of temporary difference and carryforward that gives rise to a significant portion of deferred tax liabilities and deferred tax assets, utilization of a tax carryback, and tax uncertainties information.",
        "label": "Income Tax Disclosure [Text Block]",
        "terseLabel": "Income Taxes"
       }
      }
     },
     "localname": "IncomeTaxDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxes"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_IncomeTaxExpenseBenefit": {
     "auth_ref": [
      "r97",
      "r115",
      "r116",
      "r149",
      "r271",
      "r284",
      "r290",
      "r396"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations": {
       "order": 2.0,
       "parentTag": "us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic",
       "weight": -1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of current income tax expense (benefit) and deferred income tax expense (benefit) pertaining to continuing operations.",
        "label": "Income Tax Expense (Benefit)",
        "verboseLabel": "Income tax provision"
       }
      }
     },
     "localname": "IncomeTaxExpenseBenefit",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncreaseDecreaseInAccountsPayableAndAccruedLiabilities": {
     "auth_ref": [
      "r90"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 9.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The increase (decrease) during the reporting period in the amounts payable to vendors for goods and services received and the amount of obligations and expenses incurred but not paid.",
        "label": "Increase (Decrease) in Accounts Payable and Accrued Liabilities",
        "terseLabel": "Accounts payable and other current liabilities"
       }
      }
     },
     "localname": "IncreaseDecreaseInAccountsPayableAndAccruedLiabilities",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncreaseDecreaseInAccountsReceivable": {
     "auth_ref": [
      "r90"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 6.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The increase (decrease) during the reporting period in amount due within one year (or one business cycle) from customers for the credit sale of goods and services.",
        "label": "Increase (Decrease) in Accounts Receivable",
        "negatedLabel": "Accounts receivable"
       }
      }
     },
     "localname": "IncreaseDecreaseInAccountsReceivable",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncreaseDecreaseInAccruedIncomeTaxesPayable": {
     "auth_ref": [
      "r90"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 11.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The increase (decrease) during the period in the amount due for taxes based on the reporting entity's earnings or attributable to the entity's income earning process (business presence) within a given jurisdiction.",
        "label": "Increase (Decrease) in Income Taxes Payable",
        "terseLabel": "Income taxes"
       }
      }
     },
     "localname": "IncreaseDecreaseInAccruedIncomeTaxesPayable",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncreaseDecreaseInContractWithCustomerLiability": {
     "auth_ref": [
      "r90"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 10.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase (decrease) in obligation to transfer good or service to customer for which consideration has been received or is receivable.",
        "label": "Increase Decrease In Contract With Customer Liability",
        "terseLabel": "Deferred revenue"
       }
      }
     },
     "localname": "IncreaseDecreaseInContractWithCustomerLiability",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncreaseDecreaseInInventories": {
     "auth_ref": [
      "r90"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 7.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The increase (decrease) during the reporting period in the aggregate value of all inventory held by the reporting entity, associated with underlying transactions that are classified as operating activities.",
        "label": "Increase (Decrease) in Inventories",
        "negatedLabel": "Inventories"
       }
      }
     },
     "localname": "IncreaseDecreaseInInventories",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncreaseDecreaseInOperatingCapitalAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Increase (Decrease) in Operating Capital [Abstract]",
        "terseLabel": "Changes in operating assets and liabilities:"
       }
      }
     },
     "localname": "IncreaseDecreaseInOperatingCapitalAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_IncreaseDecreaseInOtherOperatingCapitalNet": {
     "auth_ref": [
      "r90"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 12.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase (decrease) in operating assets after deduction of operating liabilities classified as other.",
        "label": "Increase (Decrease) in Other Operating Assets and Liabilities, Net",
        "negatedLabel": "Other assets and liabilities"
       }
      }
     },
     "localname": "IncreaseDecreaseInOtherOperatingCapitalNet",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets": {
     "auth_ref": [
      "r90"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 8.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase (decrease) in prepaid expenses, and assets classified as other.",
        "label": "Increase (Decrease) in Prepaid Expense and Other Assets",
        "negatedLabel": "Prepaid expenses and other current assets"
       }
      }
     },
     "localname": "IncreaseDecreaseInPrepaidDeferredExpenseAndOtherAssets",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_IncreaseDecreaseInStockholdersEquityRollForward": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.",
        "label": "Increase (Decrease) in Stockholders' Equity [Roll Forward]",
        "terseLabel": "Increase (Decrease) in Stockholders' Equity"
       }
      }
     },
     "localname": "IncreaseDecreaseInStockholdersEquityRollForward",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_IncrementalCommonSharesAttributableToShareBasedPaymentArrangements": {
     "auth_ref": [
      "r124",
      "r125",
      "r126",
      "r130"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShareDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding",
       "weight": 1.0
      }
     },
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Additional shares included in the calculation of diluted EPS as a result of the potentially dilutive effect of share based payment arrangements using the treasury stock method.",
        "label": "Incremental Common Shares Attributable to Dilutive Effect of Share-based Payment Arrangements",
        "terseLabel": "Incremental options and RSUs"
       }
      }
     },
     "localname": "IncrementalCommonSharesAttributableToShareBasedPaymentArrangements",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShareDetails"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_InterestExpense": {
     "auth_ref": [
      "r69",
      "r147",
      "r331",
      "r334",
      "r380"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations": {
       "order": 2.0,
       "parentTag": "us-gaap_NonoperatingIncomeExpense",
       "weight": -1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of the cost of borrowed funds accounted for as interest expense.",
        "label": "Interest Expense",
        "negatedLabel": "Interest expense"
       }
      }
     },
     "localname": "InterestExpense",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_InventoryDisclosureAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Inventories, net"
       }
      }
     },
     "localname": "InventoryDisclosureAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "xbrltype": "stringItemType"
    },
    "us-gaap_InventoryDisclosureTextBlock": {
     "auth_ref": [
      "r180"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for inventory. Includes, but is not limited to, the basis of stating inventory, the method of determining inventory cost, the classes of inventory, and the nature of the cost elements included in inventory.",
        "label": "Inventory Disclosure [Text Block]",
        "terseLabel": "Inventories, net"
       }
      }
     },
     "localname": "InventoryDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureInventoriesNet"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_InventoryFinishedGoodsNetOfReserves": {
     "auth_ref": [
      "r29",
      "r179"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureInventoriesNetDetails": {
       "order": 3.0,
       "parentTag": "us-gaap_InventoryNet",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Carrying amount, net of valuation reserves and adjustments, as of the balance sheet date of merchandise or goods held by the company that are readily available for sale.",
        "label": "Inventory, Finished Goods, Net of Reserves",
        "terseLabel": "Finished goods (completed systems)"
       }
      }
     },
     "localname": "InventoryFinishedGoodsNetOfReserves",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureInventoriesNetDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_InventoryNet": {
     "auth_ref": [
      "r3",
      "r50"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureInventoriesNetDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      },
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "order": 3.0,
       "parentTag": "us-gaap_AssetsCurrent",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount after valuation and LIFO reserves of inventory expected to be sold, or consumed within one year or operating cycle, if longer.",
        "label": "Inventory, Net",
        "terseLabel": "Inventories, net",
        "totalLabel": "Inventories, net"
       }
      }
     },
     "localname": "InventoryNet",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureInventoriesNetDetails",
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_InventoryRawMaterialsNetOfReserves": {
     "auth_ref": [
      "r31",
      "r179"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureInventoriesNetDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_InventoryNet",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Carrying amount, net of valuation reserves and adjustments, as of the balance sheet date of unprocessed items to be consumed in the manufacturing or production process.",
        "label": "Inventory, Raw Materials, Net of Reserves",
        "terseLabel": "Raw materials"
       }
      }
     },
     "localname": "InventoryRawMaterialsNetOfReserves",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureInventoriesNetDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_InventoryWorkInProcessNetOfReserves": {
     "auth_ref": [
      "r30",
      "r179"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureInventoriesNetDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_InventoryNet",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Carrying amount, net of reserves and adjustments, as of the balance sheet date of merchandise or goods which are partially completed. This inventory is generally comprised of raw materials, labor and factory overhead costs, which require further materials, labor and overhead to be converted into finished goods, and which generally require the use of estimates to determine percentage complete and pricing.",
        "label": "Inventory, Work in Process, Net of Reserves",
        "terseLabel": "Work in process"
       }
      }
     },
     "localname": "InventoryWorkInProcessNetOfReserves",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureInventoriesNetDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_InventoryWriteDown": {
     "auth_ref": [
      "r178"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 5.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of loss from reductions in inventory due to subsequent measurement adjustments, including, but not limited to, physical deterioration, obsolescence, or changes in price levels.",
        "label": "Inventory Write-down",
        "terseLabel": "Provision for excess and obsolete inventory"
       }
      }
     },
     "localname": "InventoryWriteDown",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_InvestmentIncomeInterest": {
     "auth_ref": [
      "r79",
      "r146"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations": {
       "order": 1.0,
       "parentTag": "us-gaap_NonoperatingIncomeExpense",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount before accretion (amortization) of purchase discount (premium) of interest income on nonoperating securities.",
        "label": "Investment Income, Interest",
        "terseLabel": "Interest income"
       }
      }
     },
     "localname": "InvestmentIncomeInterest",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LeaseCost": {
     "auth_ref": [
      "r351",
      "r353"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lease cost recognized by lessee for lease contract.",
        "label": "Lease, Cost",
        "totalLabel": "Total lease cost"
       }
      }
     },
     "localname": "LeaseCost",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LeaseCostAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Lease, Cost [Abstract]",
        "terseLabel": "Lease cost"
       }
      }
     },
     "localname": "LeaseCostAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_LeaseCostTableTextBlock": {
     "auth_ref": [
      "r351"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of lessee's lease cost. Includes, but is not limited to, interest expense for finance lease, amortization of right-of-use asset for finance lease, operating lease cost, short-term lease cost, variable lease cost and sublease income.",
        "label": "Lease, Cost [Table Text Block]",
        "terseLabel": "Schedule of lease costs"
       }
      }
     },
     "localname": "LeaseCostTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_LeasesAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Leases"
       }
      }
     },
     "localname": "LeasesAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "xbrltype": "stringItemType"
    },
    "us-gaap_LesseeFinanceLeaseTermOfContract1": {
     "auth_ref": [
      "r343"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Term of lessee's finance lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.",
        "label": "Lessee, Finance Lease, Term of Contract",
        "terseLabel": "Finance lease term"
       }
      }
     },
     "localname": "LesseeFinanceLeaseTermOfContract1",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "us-gaap_LesseeLeaseDescriptionLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Lessee, Lease, Description [Line Items]",
        "terseLabel": "Lease"
       }
      }
     },
     "localname": "LesseeLeaseDescriptionLineItems",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesDetails",
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails",
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_LesseeLeaseDescriptionTable": {
     "auth_ref": [
      "r344"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of information about lessee's leases.",
        "label": "Lessee, Lease, Description [Table]"
       }
      }
     },
     "localname": "LesseeLeaseDescriptionTable",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesDetails",
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails",
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_LesseeOperatingLeaseExistenceOfOptionToExtend": {
     "auth_ref": [
      "r343"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicates (true false) whether lessee has option to extend operating lease.",
        "label": "Lessee, Operating Lease, Existence of Option to Extend [true false]",
        "terseLabel": "Option to extend"
       }
      }
     },
     "localname": "LesseeOperatingLeaseExistenceOfOptionToExtend",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesDetails"
     ],
     "xbrltype": "booleanItemType"
    },
    "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue": {
     "auth_ref": [
      "r352"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      },
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease.",
        "label": "Lessee, Operating Lease, Liability, Payments, Due",
        "totalLabel": "Total lease payments"
       }
      }
     },
     "localname": "LesseeOperatingLeaseLiabilityPaymentsDue",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths": {
     "auth_ref": [
      "r352"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "order": 2.0,
       "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in next fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Lessee, Operating Lease, Liability, Payments, Due Next Twelve Months",
        "terseLabel": "2022"
       }
      }
     },
     "localname": "LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour": {
     "auth_ref": [
      "r352"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "order": 5.0,
       "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Lessee, Operating Lease, Liability, Payments, Due Year Four",
        "verboseLabel": "2025"
       }
      }
     },
     "localname": "LesseeOperatingLeaseLiabilityPaymentsDueYearFour",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree": {
     "auth_ref": [
      "r352"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "order": 4.0,
       "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in third fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Lessee, Operating Lease, Liability, Payments, Due Year Three",
        "verboseLabel": "2024"
       }
      }
     },
     "localname": "LesseeOperatingLeaseLiabilityPaymentsDueYearThree",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo": {
     "auth_ref": [
      "r352"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "order": 3.0,
       "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in second fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).",
        "label": "Lessee, Operating Lease, Liability, Payments, Due Year Two",
        "verboseLabel": "2023"
       }
      }
     },
     "localname": "LesseeOperatingLeaseLiabilityPaymentsDueYearTwo",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LesseeOperatingLeaseLiabilityPaymentsRemainderOfFiscalYear": {
     "auth_ref": [
      "r352"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetailsCal2": {
       "order": 1.0,
       "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payment for operating lease having initial or remaining lease term in excess of one year to be paid in remainder of current fiscal year.",
        "label": "Lessee, Operating Lease, Liability, Payments, Remainder of Fiscal Year",
        "terseLabel": "2021"
       }
      }
     },
     "localname": "LesseeOperatingLeaseLiabilityPaymentsRemainderOfFiscalYear",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount": {
     "auth_ref": [
      "r352"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's undiscounted obligation for lease payments in excess of discounted obligation for lease payments for operating lease.",
        "label": "Lessee, Operating Lease, Liability, Undiscounted Excess Amount",
        "negatedLabel": "Less interest portion"
       }
      }
     },
     "localname": "LesseeOperatingLeaseLiabilityUndiscountedExcessAmount",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LesseeOperatingLeaseRenewalTerm": {
     "auth_ref": [
      "r343"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Term of lessee's operating lease renewal, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.",
        "label": "Lessee, Operating Lease, Renewal Term",
        "terseLabel": "Renewal term"
       }
      }
     },
     "localname": "LesseeOperatingLeaseRenewalTerm",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "us-gaap_LesseeOperatingLeaseTermOfContract": {
     "auth_ref": [
      "r343"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Term of lessee's operating lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.",
        "label": "Lessee Operating Lease Term Of Contract",
        "terseLabel": "Lease term",
        "verboseLabel": "Operating lease term"
       }
      }
     },
     "localname": "LesseeOperatingLeaseTermOfContract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails",
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "us-gaap_LetterOfCreditMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "A document typically issued by a financial institution which acts as a guarantee of payment to a beneficiary, or as the source of payment for a specific transaction (for example, wiring funds to a foreign exporter if and when specified merchandise is accepted pursuant to the terms of the letter of credit).",
        "label": "Letter Of Credit [Member]",
        "terseLabel": "Letter of credit"
       }
      }
     },
     "localname": "LetterOfCreditMember",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_LettersOfCreditOutstandingAmount": {
     "auth_ref": [],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The total amount of the contingent obligation under letters of credit outstanding as of the reporting date.",
        "label": "Letters of Credit Outstanding, Amount",
        "terseLabel": "Letter of credit"
       }
      }
     },
     "localname": "LettersOfCreditOutstandingAmount",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_Liabilities": {
     "auth_ref": [
      "r43",
      "r96",
      "r154",
      "r171",
      "r297",
      "r302",
      "r303",
      "r322"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "order": 1.0,
       "parentTag": "us-gaap_LiabilitiesAndStockholdersEquity",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Sum of the carrying amounts as of the balance sheet date of all liabilities that are recognized. Liabilities are probable future sacrifices of economic benefits arising from present obligations of an entity to transfer assets or provide services to other entities in the future.",
        "label": "Liabilities",
        "totalLabel": "Total liabilities"
       }
      }
     },
     "localname": "Liabilities",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LiabilitiesAndStockholdersEquity": {
     "auth_ref": [
      "r27",
      "r96",
      "r171",
      "r322",
      "r373",
      "r389"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of liabilities and equity items, including the portion of equity attributable to noncontrolling interests, if any.",
        "label": "Liabilities and Equity",
        "totalLabel": "Total liabilities and stockholders? equity"
       }
      }
     },
     "localname": "LiabilitiesAndStockholdersEquity",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LiabilitiesAndStockholdersEquityAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Liabilities and Equity [Abstract]",
        "terseLabel": "LIABILITIES AND STOCKHOLDERS' EQUITY"
       }
      }
     },
     "localname": "LiabilitiesAndStockholdersEquityAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_LiabilitiesCurrent": {
     "auth_ref": [
      "r45",
      "r96",
      "r171",
      "r297",
      "r302",
      "r303",
      "r322"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "order": 1.0,
       "parentTag": "us-gaap_Liabilities",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Total obligations incurred as part of normal operations that are expected to be paid during the following twelve months or within one business cycle, if longer.",
        "label": "Liabilities, Current",
        "totalLabel": "Total current liabilities"
       }
      }
     },
     "localname": "LiabilitiesCurrent",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LiabilitiesCurrentAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Liabilities, Current [Abstract]",
        "terseLabel": "Current liabilities:"
       }
      }
     },
     "localname": "LiabilitiesCurrentAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_LineOfCreditFacilityFairValueOfAmountOutstanding": {
     "auth_ref": [
      "r318"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Fair value of the amount outstanding under the credit facility.",
        "label": "Line of Credit Facility, Fair Value of Amount Outstanding",
        "terseLabel": "Borrowings amount"
       }
      }
     },
     "localname": "LineOfCreditFacilityFairValueOfAmountOutstanding",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LineOfCreditFacilityMaximumBorrowingCapacity": {
     "auth_ref": [
      "r41"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Maximum borrowing capacity under the credit facility without consideration of any current restrictions on the amount that could be borrowed or the amounts currently outstanding under the facility.",
        "label": "Line of Credit Facility, Maximum Borrowing Capacity",
        "terseLabel": "Maximum borrowing capacity under the credit facility"
       }
      }
     },
     "localname": "LineOfCreditFacilityMaximumBorrowingCapacity",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_LoansNotesTradeAndOtherReceivablesDisclosureTextBlock": {
     "auth_ref": [
      "r170"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for claims held for amounts due a entity, excluding financing receivables. Examples include, but are not limited to, trade accounts receivables, notes receivables, loans receivables. Includes disclosure for allowance for credit losses.",
        "label": "Loans, Notes, Trade and Other Receivables Disclosure [Text Block]",
        "verboseLabel": "Receivable and Allowance for Credit Losses"
       }
      }
     },
     "localname": "LoansNotesTradeAndOtherReceivablesDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureReceivableAndAllowanceForCreditLosses"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_LongtermDebtTypeAxis": {
     "auth_ref": [
      "r46"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by type of long-term debt.",
        "label": "Long-term Debt, Type [Axis]"
       }
      }
     },
     "localname": "LongtermDebtTypeAxis",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_LongtermDebtTypeDomain": {
     "auth_ref": [
      "r46",
      "r201"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Type of long-term debt arrangement, such as notes, line of credit, commercial paper, asset-based financing, project financing, letter of credit financing. These are debt arrangements that originally required repayment more than twelve months after issuance or greater than the normal operating cycle of the company, if longer.",
        "label": "Longterm Debt Type [Domain]",
        "terseLabel": "Long-term Debt, Type [Domain]"
       }
      }
     },
     "localname": "LongtermDebtTypeDomain",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period.",
        "label": "Movement in Standard and Extended Product Warranty, Increase (Decrease) [Roll Forward]",
        "terseLabel": "Changes in standard product warranty liability"
       }
      }
     },
     "localname": "MovementInStandardAndExtendedProductWarrantyIncreaseDecreaseRollForward",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureProductWarrantyDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_NetCashProvidedByUsedInFinancingActivities": {
     "auth_ref": [
      "r88"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 3.0,
       "parentTag": "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash inflow (outflow) from financing activities, including discontinued operations. Financing activity cash flows include obtaining resources from owners and providing them with a return on, and a return of, their investment; borrowing money and repaying amounts borrowed, or settling the obligation; and obtaining and paying for other resources obtained from creditors on long-term credit.",
        "label": "Net Cash Provided by (Used in) Financing Activities",
        "totalLabel": "Net cash used in financing activities"
       }
      }
     },
     "localname": "NetCashProvidedByUsedInFinancingActivities",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_NetCashProvidedByUsedInFinancingActivitiesAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Net Cash Provided by (Used in) Financing Activities [Abstract]",
        "terseLabel": "Cash flows from financing activities"
       }
      }
     },
     "localname": "NetCashProvidedByUsedInFinancingActivitiesAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_NetCashProvidedByUsedInInvestingActivities": {
     "auth_ref": [
      "r88"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 2.0,
       "parentTag": "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash inflow (outflow) from investing activities, including discontinued operations. Investing activity cash flows include making and collecting loans and acquiring and disposing of debt or equity instruments and property, plant, and equipment and other productive assets.",
        "label": "Net Cash Provided by (Used in) Investing Activities",
        "totalLabel": "Net cash used in investing activities"
       }
      }
     },
     "localname": "NetCashProvidedByUsedInInvestingActivities",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_NetCashProvidedByUsedInInvestingActivitiesAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Net Cash Provided by (Used in) Investing Activities [Abstract]",
        "terseLabel": "Cash flows from investing activities"
       }
      }
     },
     "localname": "NetCashProvidedByUsedInInvestingActivitiesAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_NetCashProvidedByUsedInOperatingActivities": {
     "auth_ref": [
      "r88",
      "r89",
      "r92"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 1.0,
       "parentTag": "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalentsPeriodIncreaseDecreaseIncludingExchangeRateEffect",
       "weight": 1.0
      }
     },
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash inflow (outflow) from operating activities, including discontinued operations. Operating activity cash flows include transactions, adjustments, and changes in value not defined as investing or financing activities.",
        "label": "Net Cash Provided by (Used in) Operating Activities",
        "totalLabel": "Net cash provided by operating activities"
       }
      }
     },
     "localname": "NetCashProvidedByUsedInOperatingActivities",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_NetCashProvidedByUsedInOperatingActivitiesAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Net Cash Provided by (Used in) Operating Activities [Abstract]",
        "terseLabel": "Cash flows from operating activities"
       }
      }
     },
     "localname": "NetCashProvidedByUsedInOperatingActivitiesAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_NetIncomeLossAvailableToCommonStockholdersBasic": {
     "auth_ref": [
      "r109",
      "r110",
      "r111",
      "r112",
      "r120",
      "r121",
      "r127",
      "r130",
      "r150",
      "r152",
      "r155",
      "r158",
      "r160"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome": {
       "order": 1.0,
       "parentTag": "us-gaap_ComprehensiveIncomeNetOfTax",
       "weight": 1.0
      },
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, after deduction of tax, noncontrolling interests, dividends on preferred stock and participating securities; of income (loss) available to common shareholders.",
        "label": "Net Income (Loss) Available to Common Stockholders, Basic",
        "terseLabel": "Net income",
        "totalLabel": "Net income",
        "verboseLabel": "Net income available to common stockholders"
       }
      }
     },
     "localname": "NetIncomeLossAvailableToCommonStockholdersBasic",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShareDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_NewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock": {
     "auth_ref": [
      "r103",
      "r104",
      "r107",
      "r108",
      "r117",
      "r118",
      "r119",
      "r173",
      "r174",
      "r233",
      "r234",
      "r235",
      "r236",
      "r262",
      "r280",
      "r281",
      "r282",
      "r365",
      "r366",
      "r367",
      "r406",
      "r407",
      "r408",
      "r409",
      "r410"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for change in accounting principle. Includes, but is not limited to, nature, reason, and method of adopting amendment to accounting standards or other change in accounting principle.",
        "label": "New Accounting Pronouncements and Changes in Accounting Principles [Text Block]",
        "terseLabel": "Recent Accounting Guidance"
       }
      }
     },
     "localname": "NewAccountingPronouncementsAndChangesInAccountingPrinciplesTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRecentAccountingGuidance"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_NonoperatingIncomeExpense": {
     "auth_ref": [
      "r80"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations": {
       "order": 2.0,
       "parentTag": "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The aggregate amount of income or expense from ancillary business-related activities (that is to say, excluding major activities considered part of the normal operations of the business).",
        "label": "Nonoperating Income (Expense)",
        "totalLabel": "Total other expense"
       }
      }
     },
     "localname": "NonoperatingIncomeExpense",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_NonoperatingIncomeExpenseAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Nonoperating Income (Expense) [Abstract]",
        "verboseLabel": "Other (expense) income:"
       }
      }
     },
     "localname": "NonoperatingIncomeExpenseAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_OperatingExpenses": {
     "auth_ref": [],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations": {
       "order": 2.0,
       "parentTag": "us-gaap_OperatingIncomeLoss",
       "weight": -1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Generally recurring costs associated with normal operations except for the portion of these expenses which can be clearly related to production and included in cost of sales or services. Includes selling, general and administrative expense.",
        "label": "Operating Expenses",
        "totalLabel": "Total operating expenses"
       }
      }
     },
     "localname": "OperatingExpenses",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OperatingExpensesAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Operating Expenses [Abstract]",
        "terseLabel": "Operating expenses:"
       }
      }
     },
     "localname": "OperatingExpensesAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_OperatingIncomeLoss": {
     "auth_ref": [
      "r150",
      "r152",
      "r155",
      "r158",
      "r160"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations": {
       "order": 1.0,
       "parentTag": "us-gaap_IncomeLossFromContinuingOperationsBeforeIncomeTaxesExtraordinaryItemsNoncontrollingInterest",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The net result for the period of deducting operating expenses from operating revenues.",
        "label": "Operating Income (Loss)",
        "totalLabel": "Income from operations"
       }
      }
     },
     "localname": "OperatingIncomeLoss",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OperatingLeaseCost": {
     "auth_ref": [
      "r346",
      "r353"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_LeaseCost",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of single lease cost, calculated by allocation of remaining cost of lease over remaining lease term. Includes, but is not limited to, single lease cost, after impairment of right-of-use asset, calculated by amortization of remaining right-of-use asset and accretion of lease liability.",
        "label": "Operating Lease, Cost",
        "terseLabel": "Total operating lease cost"
       }
      }
     },
     "localname": "OperatingLeaseCost",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Operating Lease Liabilities, Payments Due [Abstract]",
        "terseLabel": "Future minimum lease payments operating lease"
       }
      }
     },
     "localname": "OperatingLeaseLiabilitiesPaymentsDueAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_OperatingLeaseLiability": {
     "auth_ref": [
      "r337"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Present value of lessee's discounted obligation for lease payments from operating lease.",
        "label": "Operating Lease, Liability",
        "verboseLabel": "Operating lease obligations"
       }
      }
     },
     "localname": "OperatingLeaseLiability",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OperatingLeaseLiabilityCurrent": {
     "auth_ref": [
      "r337"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails": {
       "order": 1.0,
       "parentTag": "acls_OperatingAndFinanceLeaseLiability",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Present value of lessee's discounted obligation for lease payments from operating lease, classified as current.",
        "label": "Operating Lease, Liability, Current",
        "terseLabel": "Operating liabilities current"
       }
      }
     },
     "localname": "OperatingLeaseLiabilityCurrent",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList": {
     "auth_ref": [
      "r338"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicates line item in statement of financial position that includes current operating lease liability.",
        "label": "Operating Lease, Liability, Current, Statement of Financial Position [Extensible List]"
       }
      }
     },
     "localname": "OperatingLeaseLiabilityCurrentStatementOfFinancialPositionExtensibleList",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails"
     ],
     "xbrltype": "extensibleListItemType"
    },
    "us-gaap_OperatingLeaseLiabilityNoncurrent": {
     "auth_ref": [
      "r337"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails": {
       "order": 2.0,
       "parentTag": "acls_OperatingAndFinanceLeaseLiability",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Present value of lessee's discounted obligation for lease payments from operating lease, classified as noncurrent.",
        "label": "Operating Lease, Liability, Noncurrent",
        "terseLabel": "Operating liabilities noncurrent"
       }
      }
     },
     "localname": "OperatingLeaseLiabilityNoncurrent",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList": {
     "auth_ref": [
      "r338"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicates line item in statement of financial position that includes noncurrent operating lease liability.",
        "label": "Operating Lease, Liability, Noncurrent, Statement of Financial Position [Extensible List]"
       }
      }
     },
     "localname": "OperatingLeaseLiabilityNoncurrentStatementOfFinancialPositionExtensibleList",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails"
     ],
     "xbrltype": "extensibleListItemType"
    },
    "us-gaap_OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList": {
     "auth_ref": [
      "r338"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicates line item in statement of financial position that includes operating lease liability.",
        "label": "Operating Lease, Liability, Statement of Financial Position [Extensible List]"
       }
      }
     },
     "localname": "OperatingLeaseLiabilityStatementOfFinancialPositionExtensibleList",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails"
     ],
     "xbrltype": "extensibleListItemType"
    },
    "us-gaap_OperatingLeasePayments": {
     "auth_ref": [
      "r342",
      "r347"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash outflow from operating lease, excluding payments to bring another asset to condition and location necessary for its intended use.",
        "label": "Operating Lease, Payments",
        "terseLabel": "Operating cash outflows from operating leases"
       }
      }
     },
     "localname": "OperatingLeasePayments",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesCashFlowByLeaseTypeDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OperatingLeaseRightOfUseAsset": {
     "auth_ref": [
      "r336"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails": {
       "order": 1.0,
       "parentTag": "acls_OperatingAndFinanceLeaseRightOfUseAsset",
       "weight": 1.0
      },
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "order": 3.0,
       "parentTag": "us-gaap_Assets",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of lessee's right to use underlying asset under operating lease.",
        "label": "Operating Lease, Right-of-Use Asset",
        "verboseLabel": "Operating lease assets"
       }
      }
     },
     "localname": "OperatingLeaseRightOfUseAsset",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails",
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OperatingLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList": {
     "auth_ref": [
      "r338"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicates line item in statement of financial position that includes operating lease right-of-use asset.",
        "label": "Operating Lease, Right-of-Use Asset, Statement of Financial Position [Extensible List]"
       }
      }
     },
     "localname": "OperatingLeaseRightOfUseAssetStatementOfFinancialPositionExtensibleList",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails"
     ],
     "xbrltype": "extensibleListItemType"
    },
    "us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent": {
     "auth_ref": [
      "r350",
      "r353"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Weighted average discount rate for operating lease calculated at point in time.",
        "label": "Operating Lease, Weighted Average Discount Rate, Percent",
        "terseLabel": "Operating leases - Weighted-average discount rate"
       }
      }
     },
     "localname": "OperatingLeaseWeightedAverageDiscountRatePercent",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "percentItemType"
    },
    "us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1": {
     "auth_ref": [
      "r349",
      "r353"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Weighted average remaining lease term for operating lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.",
        "label": "Operating Lease, Weighted Average Remaining Lease Term",
        "terseLabel": "Operating leases -Weighted-average remaining lease term (in years)"
       }
      }
     },
     "localname": "OperatingLeaseWeightedAverageRemainingLeaseTerm1",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesFutureMinimumCashOutflowAndWeightedAverageRemainingLeaseTermAndDiscountRateDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Nature of Business"
       }
      }
     },
     "localname": "OrganizationConsolidationAndPresentationOfFinancialStatementsAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "xbrltype": "stringItemType"
    },
    "us-gaap_OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock": {
     "auth_ref": [
      "r1",
      "r306"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for organization, consolidation and basis of presentation of financial statements disclosure.",
        "label": "Organization, Consolidation and Presentation of Financial Statements Disclosure [Text Block]",
        "terseLabel": "Nature of Business"
       }
      }
     },
     "localname": "OrganizationConsolidationAndPresentationOfFinancialStatementsDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureNatureOfBusiness"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_OtherAssetsNoncurrent": {
     "auth_ref": [
      "r39"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "order": 7.0,
       "parentTag": "us-gaap_Assets",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of noncurrent assets classified as other.",
        "label": "Other Assets, Noncurrent",
        "terseLabel": "Other assets"
       }
      }
     },
     "localname": "OtherAssetsNoncurrent",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent": {
     "auth_ref": [
      "r56",
      "r58",
      "r294",
      "r300"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome": {
       "order": 2.0,
       "parentTag": "us-gaap_OtherComprehensiveIncomeLossNetOfTax",
       "weight": -1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, after tax and reclassification adjustment, of (increase) decrease in accumulated other comprehensive income for defined benefit plan, attributable to parent.",
        "label": "Other Comprehensive (Income) Loss, Pension and Other Postretirement Benefit Plans, Adjustment, Net of Tax, Portion Attributable to Parent",
        "negatedLabel": "Amortization of actuarial loss and other adjustments from pension plan, net of tax",
        "negatedTerseLabel": "Change in pension obligation, net of tax"
       }
      }
     },
     "localname": "OtherComprehensiveIncomeDefinedBenefitPlansAdjustmentNetOfTaxPortionAttributableToParent",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent": {
     "auth_ref": [
      "r294",
      "r295",
      "r300"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome": {
       "order": 1.0,
       "parentTag": "us-gaap_OtherComprehensiveIncomeLossNetOfTax",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount after tax and reclassification adjustments of gain (loss) on foreign currency translation adjustments, foreign currency transactions designated and effective as economic hedges of a net investment in a foreign entity and intra-entity foreign currency transactions that are of a long-term-investment nature, attributable to parent entity.",
        "label": "Other Comprehensive Income (Loss), Foreign Currency Transaction and Translation Adjustment, Net of Tax, Portion Attributable to Parent",
        "terseLabel": "Foreign currency translation adjustments"
       }
      }
     },
     "localname": "OtherComprehensiveIncomeForeignCurrencyTransactionAndTranslationAdjustmentNetOfTaxPortionAttributableToParent",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OtherComprehensiveIncomeLossNetOfTax": {
     "auth_ref": [
      "r63",
      "r66",
      "r68",
      "r72",
      "r203",
      "r324",
      "r329",
      "r330",
      "r377",
      "r392"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome": {
       "order": 2.0,
       "parentTag": "us-gaap_ComprehensiveIncomeNetOfTax",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount after tax and reclassification adjustments of other comprehensive income (loss).",
        "label": "Other Comprehensive Income (Loss), Net of Tax",
        "totalLabel": "Other comprehensive income (loss):",
        "verboseLabel": "Other comprehensive income and pension reclassification"
       }
      }
     },
     "localname": "OtherComprehensiveIncomeLossNetOfTax",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveIncomeDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Other Comprehensive Income (Loss), Net of Tax, Portion Attributable to Parent [Abstract]",
        "terseLabel": "Other comprehensive income (loss):"
       }
      }
     },
     "localname": "OtherComprehensiveIncomeLossNetOfTaxPortionAttributableToParentAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfComprehensiveIncome"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_OtherLiabilitiesCurrent": {
     "auth_ref": [
      "r10",
      "r11",
      "r44"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "order": 7.0,
       "parentTag": "us-gaap_LiabilitiesCurrent",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of liabilities classified as other, due within one year or the normal operating cycle, if longer.",
        "label": "Other Liabilities, Current",
        "terseLabel": "Other current liabilities"
       }
      }
     },
     "localname": "OtherLiabilitiesCurrent",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OtherLiabilitiesNoncurrent": {
     "auth_ref": [
      "r47"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "order": 4.0,
       "parentTag": "us-gaap_Liabilities",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of liabilities classified as other, due after one year or the normal operating cycle, if longer.",
        "label": "Other Liabilities, Noncurrent",
        "terseLabel": "Other long-term liabilities"
       }
      }
     },
     "localname": "OtherLiabilitiesNoncurrent",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_OtherNonoperatingIncomeExpense": {
     "auth_ref": [
      "r81"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations": {
       "order": 3.0,
       "parentTag": "us-gaap_NonoperatingIncomeExpense",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of income (expense) related to nonoperating activities, classified as other.",
        "label": "Other Nonoperating Income (Expense)",
        "terseLabel": "Other, net"
       }
      }
     },
     "localname": "OtherNonoperatingIncomeExpense",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PaymentsForRepurchaseOfCommonStock": {
     "auth_ref": [
      "r86"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 1.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The cash outflow to reacquire common stock during the period.",
        "label": "Payments for Repurchase of Common Stock",
        "negatedLabel": "Repurchase of common stock"
       }
      }
     },
     "localname": "PaymentsForRepurchaseOfCommonStock",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PaymentsToAcquirePropertyPlantAndEquipment": {
     "auth_ref": [
      "r84"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 1.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInInvestingActivities",
       "weight": -1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The cash outflow associated with the acquisition of long-lived, physical assets that are used in the normal conduct of business to produce goods and services and not intended for resale; includes cash outflows to pay for construction of self-constructed assets.",
        "label": "Payments to Acquire Property, Plant, and Equipment",
        "negatedLabel": "Expenditures for property, plant and equipment and capitalized software"
       }
      }
     },
     "localname": "PaymentsToAcquirePropertyPlantAndEquipment",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PlanNameAxis": {
     "auth_ref": [
      "r252",
      "r257"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by plan name for share-based payment arrangement.",
        "label": "Plan Name [Axis]"
       }
      }
     },
     "localname": "PlanNameAxis",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockBasedCompensationDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_PlanNameDomain": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Plan name for share-based payment arrangement.",
        "label": "Plan Name [Domain]",
        "terseLabel": "Plan Name [Domain]"
       }
      }
     },
     "localname": "PlanNameDomain",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockBasedCompensationDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_PortionAtFairValueFairValueDisclosureMember": {
     "auth_ref": [
      "r317"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Measured at fair value for financial reporting purposes.",
        "label": "Portion At Fair Value Fair Value Disclosure [Member]",
        "terseLabel": "Portion at Fair Value Measurement [Member]"
       }
      }
     },
     "localname": "PortionAtFairValueFairValueDisclosureMember",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_PrepaidExpenseAndOtherAssetsCurrent": {
     "auth_ref": [
      "r6",
      "r35",
      "r36"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "order": 4.0,
       "parentTag": "us-gaap_AssetsCurrent",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of asset related to consideration paid in advance for costs that provide economic benefits in future periods, and amount of other assets that are expected to be realized or consumed within one year or the normal operating cycle, if longer.",
        "label": "Prepaid Expense and Other Assets, Current",
        "terseLabel": "Prepaid expenses and other current assets"
       }
      }
     },
     "localname": "PrepaidExpenseAndOtherAssetsCurrent",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PrepaidRent": {
     "auth_ref": [
      "r5",
      "r7",
      "r181",
      "r182"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of asset related to consideration paid in advance for rent that provides economic benefits within a future period of one year or the normal operating cycle, if longer.",
        "label": "Prepaid Rent",
        "verboseLabel": "Prepaid financing costs"
       }
      }
     },
     "localname": "PrepaidRent",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesOperatingAndFinanceLeaseRightOfUseAssetsAndRelatedLeaseObligationsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ProceedsFromSaleOfPropertyHeldForSale": {
     "auth_ref": [
      "r83"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The cash inflow from the sale of formerly productive land held for sale, anything permanently fixed to it, including buildings, structures on it, and so forth.",
        "label": "Proceeds from Sale of Property Held-for-sale",
        "terseLabel": "Proceeds from sale of corporate headquarters"
       }
      }
     },
     "localname": "ProceedsFromSaleOfPropertyHeldForSale",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ProceedsFromStockOptionsExercised": {
     "auth_ref": [
      "r85",
      "r258"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 5.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash inflow from exercise of option under share-based payment arrangement.",
        "label": "Proceeds from Stock Options Exercised",
        "terseLabel": "Proceeds from exercise of stock options",
        "verboseLabel": "Proceeds from exercise of stock options"
       }
      }
     },
     "localname": "ProceedsFromStockOptionsExercised",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockBasedCompensationDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ProceedsFromStockPlans": {
     "auth_ref": [
      "r85"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 4.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInFinancingActivities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The cash inflow associated with the amount received from the stock plan during the period.",
        "label": "Proceeds from Stock Plans",
        "terseLabel": "Proceeds from Employee Stock Purchase Plan"
       }
      }
     },
     "localname": "ProceedsFromStockPlans",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ProductMember": {
     "auth_ref": [
      "r226"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Article or substance produced by nature, labor or machinery.",
        "label": "Product [Member]",
        "terseLabel": "Product"
       }
      }
     },
     "localname": "ProductMember",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_ProductWarrantiesDisclosuresAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Product Warranty"
       }
      }
     },
     "localname": "ProductWarrantiesDisclosuresAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "xbrltype": "stringItemType"
    },
    "us-gaap_ProductWarrantyAccrual": {
     "auth_ref": [
      "r197",
      "r198",
      "r374"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureProductWarrantyDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Carrying value as of the balance sheet date of obligations incurred through that date and payable for estimated claims under standard and extended warranty protection rights granted to customers.",
        "label": "Product Warranty Accrual",
        "periodEndLabel": "Balance at June 30 (end of period)",
        "periodStartLabel": "Balance at January 1 (beginning of year)",
        "totalLabel": "Total warranty liability"
       }
      }
     },
     "localname": "ProductWarrantyAccrual",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureProductWarrantyDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ProductWarrantyAccrualBalanceSheetClassificationAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Product Warranty Accrual, Balance Sheet Classification [Abstract]",
        "terseLabel": "Product warranty classification"
       }
      }
     },
     "localname": "ProductWarrantyAccrualBalanceSheetClassificationAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureProductWarrantyDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ProductWarrantyAccrualClassifiedCurrent": {
     "auth_ref": [
      "r44",
      "r192",
      "r193"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureProductWarrantyDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_ProductWarrantyAccrual",
       "weight": 1.0
      },
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "order": 4.0,
       "parentTag": "us-gaap_LiabilitiesCurrent",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Carrying value as of the balance sheet date of obligations incurred through that date and payable for estimated claims under standard and extended warranty protection rights granted to customers. For classified balance sheets, represents the current portion of the liabilities (due within one year or within the normal operating cycle if longer).",
        "label": "Product Warranty Accrual, Current",
        "terseLabel": "Warranty",
        "verboseLabel": "Amount classified as current"
       }
      }
     },
     "localname": "ProductWarrantyAccrualClassifiedCurrent",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureProductWarrantyDetails",
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ProductWarrantyAccrualNoncurrent": {
     "auth_ref": [
      "r47",
      "r189",
      "r190"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureProductWarrantyDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_ProductWarrantyAccrual",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Carrying value as of the balance sheet date of obligations incurred through that date and due after one year (or beyond the operating cycle if longer) for estimated claims under standard and extended warranty protection rights granted to customers.",
        "label": "Product Warranty Accrual, Noncurrent",
        "terseLabel": "Amount classified as long-term"
       }
      }
     },
     "localname": "ProductWarrantyAccrualNoncurrent",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureProductWarrantyDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ProductWarrantyAccrualPayments": {
     "auth_ref": [
      "r194"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of decrease in the standard and extended product warranty accrual from payments made in cash or in kind to satisfy claims under the terms of the standard and extended product warranty.",
        "label": "Product Warranty Accrual, Payments",
        "negatedLabel": "Settlements made during the period"
       }
      }
     },
     "localname": "ProductWarrantyAccrualPayments",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureProductWarrantyDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ProductWarrantyAccrualPreexistingIncreaseDecrease": {
     "auth_ref": [
      "r196"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase (decrease) in the standard and extended product warranty accrual from changes in estimates attributable to preexisting product warranties.",
        "label": "Product Warranty Accrual, Preexisting, Increase (Decrease)",
        "terseLabel": "Changes in estimate of liability for pre-existing warranties during the period"
       }
      }
     },
     "localname": "ProductWarrantyAccrualPreexistingIncreaseDecrease",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureProductWarrantyDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ProductWarrantyAccrualWarrantiesIssued": {
     "auth_ref": [
      "r195"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase in the standard and extended product warranty accrual from warranties issued.",
        "label": "Product Warranty Accrual, Warranties Issued",
        "terseLabel": "Warranties issued during the period"
       }
      }
     },
     "localname": "ProductWarrantyAccrualWarrantiesIssued",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureProductWarrantyDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ProductWarrantyDisclosureTextBlock": {
     "auth_ref": [
      "r200"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for standard and extended product warranties and other product guarantee contracts, including a tabular reconciliation of the changes in the guarantor's aggregate product warranty liability for the reporting period.",
        "label": "Product Warranty Disclosure [Text Block]",
        "terseLabel": "Product Warranty"
       }
      }
     },
     "localname": "ProductWarrantyDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureProductWarranty"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ProfitLoss": {
     "auth_ref": [
      "r0",
      "r62",
      "r65",
      "r87",
      "r96",
      "r105",
      "r115",
      "r116",
      "r150",
      "r152",
      "r155",
      "r158",
      "r160",
      "r171",
      "r294",
      "r298",
      "r299",
      "r304",
      "r305",
      "r322",
      "r381"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 1.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The consolidated profit or loss for the period, net of income taxes, including the portion attributable to the noncontrolling interest.",
        "label": "Net Income (Loss), Including Portion Attributable to Noncontrolling Interest",
        "terseLabel": "Net income"
       }
      }
     },
     "localname": "ProfitLoss",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PropertyPlantAndEquipmentByTypeAxis": {
     "auth_ref": [
      "r38",
      "r184"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by type of long-lived, physical assets used to produce goods and services and not intended for resale.",
        "label": "Property, Plant and Equipment, Type [Axis]"
       }
      }
     },
     "localname": "PropertyPlantAndEquipmentByTypeAxis",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_PropertyPlantAndEquipmentNet": {
     "auth_ref": [
      "r14",
      "r15",
      "r184",
      "r390"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "order": 2.0,
       "parentTag": "us-gaap_Assets",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount after accumulated depreciation, depletion and amortization of physical assets used in the normal conduct of business to produce goods and services and not intended for resale. Examples include, but are not limited to, land, buildings, machinery and equipment, office equipment, and furniture and fixtures.",
        "label": "Property, Plant and Equipment, Net",
        "terseLabel": "Property, plant and equipment, net"
       }
      }
     },
     "localname": "PropertyPlantAndEquipmentNet",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_PropertyPlantAndEquipmentTypeDomain": {
     "auth_ref": [
      "r14",
      "r183"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Listing of long-lived, physical assets that are used in the normal conduct of business to produce goods and services and not intended for resale. Examples include land, buildings, machinery and equipment, and other types of furniture and equipment including, but not limited to, office equipment, furniture and fixtures, and computer equipment and software.",
        "label": "Property Plant And Equipment Type [Domain]",
        "terseLabel": "Property, Plant and Equipment, Type [Domain]"
       }
      }
     },
     "localname": "PropertyPlantAndEquipmentTypeDomain",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_ResearchAndDevelopmentExpense": {
     "auth_ref": [
      "r268",
      "r423"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations": {
       "order": 1.0,
       "parentTag": "us-gaap_OperatingExpenses",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The aggregate costs incurred (1) in a planned search or critical investigation aimed at discovery of new knowledge with the hope that such knowledge will be useful in developing a new product or service, a new process or technique, or in bringing about a significant improvement to an existing product or process; or (2) to translate research findings or other knowledge into a plan or design for a new product or process or for a significant improvement to an existing product or process whether intended for sale or the entity's use, during the reporting period charged to research and development projects, including the costs of developing computer software up to the point in time of achieving technological feasibility, and costs allocated in accounting for a business combination to in-process projects deemed to have no alternative future use.",
        "label": "Research and Development Expense",
        "terseLabel": "Research and development"
       }
      }
     },
     "localname": "ResearchAndDevelopmentExpense",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ResearchAndDevelopmentExpenseMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Primary financial statement caption in which the reported facts about research and development expense have been included.",
        "label": "Research And Development Expense [Member]",
        "terseLabel": "Research and development"
       }
      }
     },
     "localname": "ResearchAndDevelopmentExpenseMember",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_RestrictedCashAndCashEquivalents": {
     "auth_ref": [
      "r13",
      "r93",
      "r94",
      "r369",
      "r386"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails": {
       "order": 2.0,
       "parentTag": "us-gaap_CashCashEquivalentsRestrictedCashAndRestrictedCashEquivalents",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash and cash equivalents restricted as to withdrawal or usage. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.",
        "label": "Restricted Cash and Cash Equivalents",
        "verboseLabel": "Long-term restricted cash"
       }
      }
     },
     "localname": "RestrictedCashAndCashEquivalents",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_RestrictedCashAndCashEquivalentsNoncurrent": {
     "auth_ref": [
      "r9",
      "r16",
      "r93",
      "r94",
      "r413"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "order": 5.0,
       "parentTag": "us-gaap_Assets",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of cash and cash equivalents restricted as to withdrawal or usage, classified as noncurrent. Cash includes, but is not limited to, currency on hand, demand deposits with banks or financial institutions, and other accounts with general characteristics of demand deposits. Cash equivalents include, but are not limited to, short-term, highly liquid investments that are both readily convertible to known amounts of cash and so near their maturity that they present insignificant risk of changes in value because of changes in interest rates.",
        "label": "Restricted Cash and Cash Equivalents, Noncurrent",
        "terseLabel": "Long-term restricted cash"
       }
      }
     },
     "localname": "RestrictedCashAndCashEquivalentsNoncurrent",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_RetainedEarningsAccumulatedDeficit": {
     "auth_ref": [
      "r23",
      "r208",
      "r263",
      "r388",
      "r406",
      "r410"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "order": 3.0,
       "parentTag": "us-gaap_StockholdersEquity",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The cumulative amount of the reporting entity's undistributed earnings or deficit.",
        "label": "Retained Earnings (Accumulated Deficit)",
        "terseLabel": "Accumulated deficit"
       }
      }
     },
     "localname": "RetainedEarningsAccumulatedDeficit",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_RetainedEarningsMember": {
     "auth_ref": [
      "r100",
      "r101",
      "r102",
      "r106",
      "r114",
      "r116",
      "r172",
      "r259",
      "r260",
      "r261",
      "r278",
      "r279",
      "r403",
      "r405"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The cumulative amount of the reporting entity's undistributed earnings or deficit.",
        "label": "Retained Earnings [Member]",
        "terseLabel": "Accumulated Deficit"
       }
      }
     },
     "localname": "RetainedEarningsMember",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_RevenueFromContractWithCustomerAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Revenue."
       }
      }
     },
     "localname": "RevenueFromContractWithCustomerAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "xbrltype": "stringItemType"
    },
    "us-gaap_RevenueFromContractWithCustomerExcludingAssessedTax": {
     "auth_ref": [
      "r144",
      "r145",
      "r151",
      "r156",
      "r157",
      "r161",
      "r162",
      "r165",
      "r221",
      "r222",
      "r364"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount, excluding tax collected from customer, of revenue from satisfaction of performance obligation by transferring promised good or service to customer. Tax collected from customer is tax assessed by governmental authority that is both imposed on and concurrent with specific revenue-producing transaction, including, but not limited to, sales, use, value added and excise.",
        "label": "Revenue from Contract with Customer, Excluding Assessed Tax",
        "verboseLabel": "Total Revenue"
       }
      }
     },
     "localname": "RevenueFromContractWithCustomerExcludingAssessedTax",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueRevenueByDisciplineGeographicalAreasDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_RevenueFromContractWithCustomerTextBlock": {
     "auth_ref": [
      "r213",
      "r214",
      "r215",
      "r216",
      "r217",
      "r218",
      "r219",
      "r220",
      "r225",
      "r237"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure of revenue from contract with customer to transfer good or service and to transfer nonfinancial asset. Includes, but is not limited to, disaggregation of revenue, credit loss recognized from contract with customer, judgment and change in judgment related to contract with customer, and asset recognized from cost incurred to obtain or fulfill contract with customer. Excludes insurance and lease contracts.",
        "label": "Revenue from Contract with Customer [Text Block]",
        "terseLabel": "Revenue"
       }
      }
     },
     "localname": "RevenueFromContractWithCustomerTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenue"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_RevenueFromExternalCustomersByGeographicAreasTableTextBlock": {
     "auth_ref": [
      "r164"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of revenue from external customers by geographic areas attributed to the entity's country of domicile and to foreign countries from which the entity derives revenue.",
        "label": "Revenue from External Customers by Geographic Areas [Table Text Block]",
        "terseLabel": "Schedule of revenue by geographic markets"
       }
      }
     },
     "localname": "RevenueFromExternalCustomersByGeographicAreasTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureRevenueTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_Revenues": {
     "auth_ref": [
      "r70",
      "r96",
      "r144",
      "r145",
      "r151",
      "r156",
      "r157",
      "r161",
      "r162",
      "r165",
      "r171",
      "r322",
      "r381"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations": {
       "order": 1.0,
       "parentTag": "us-gaap_GrossProfit",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of revenue recognized from goods sold, services rendered, insurance premiums, or other activities that constitute an earning process. Includes, but is not limited to, investment and interest income before deduction of interest expense when recognized as a component of revenue, and sales and trading gain (loss).",
        "label": "Revenues",
        "terseLabel": "Revenue"
       }
      }
     },
     "localname": "Revenues",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_RevenuesAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Revenues [Abstract]",
        "terseLabel": "Revenue:"
       }
      }
     },
     "localname": "RevenuesAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_RevolvingCreditFacilityMember": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Arrangement in which loan proceeds can continuously be obtained following repayments, but the total amount borrowed cannot exceed a specified maximum amount.",
        "label": "Revolving Credit Facility [Member]",
        "terseLabel": "Revolving credit facility"
       }
      }
     },
     "localname": "RevolvingCreditFacilityMember",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails",
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability": {
     "auth_ref": [
      "r348",
      "r353"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of increase in right-of-use asset obtained in exchange for operating lease liability.",
        "label": "Right-of-Use Asset Obtained in Exchange for Operating Lease Liability",
        "terseLabel": "Operating lease assets obtained in exchange for operating lease liabilities"
       }
      }
     },
     "localname": "RightOfUseAssetObtainedInExchangeForOperatingLeaseLiability",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesCashFlowByLeaseTypeDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_RisksAndUncertaintiesAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Concentration of Risk"
       }
      }
     },
     "localname": "RisksAndUncertaintiesAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "xbrltype": "stringItemType"
    },
    "us-gaap_SalesRevenueNetMember": {
     "auth_ref": [
      "r140",
      "r165"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Revenue from sale of product and rendering of service and other sources of income, when it serves as benchmark in concentration of risk calculation.",
        "label": "Sales Revenue Net [Member]",
        "terseLabel": "Revenue"
       }
      }
     },
     "localname": "SalesRevenueNetMember",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureConcentrationOfRiskDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock": {
     "auth_ref": [
      "r60",
      "r329",
      "r330"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of the components of accumulated other comprehensive income (loss).",
        "label": "Schedule of Accumulated Other Comprehensive Income (Loss) [Table Text Block]",
        "terseLabel": "Schedule of changes in accumulated other comprehensive loss, net of tax"
       }
      }
     },
     "localname": "ScheduleOfAccumulatedOtherComprehensiveIncomeLossTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveIncomeTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock": {
     "auth_ref": [
      "r130"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of an entity's basic and diluted earnings per share calculations, including a reconciliation of numerators and denominators of the basic and diluted per-share computations for income from continuing operations.",
        "label": "Schedule of Earnings Per Share, Basic and Diluted [Table Text Block]",
        "terseLabel": "Schedule of components of net income per share"
       }
      }
     },
     "localname": "ScheduleOfEarningsPerShareBasicAndDilutedTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShareTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock": {
     "auth_ref": [
      "r307",
      "r308"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of assets and liabilities, including [financial] instruments measured at fair value that are classified in stockholders' equity, if any, that are measured at fair value on a recurring basis. The disclosures contemplated herein include the fair value measurements at the reporting date by the level within the fair value hierarchy in which the fair value measurements in their entirety fall, segregating fair value measurements using quoted prices in active markets for identical assets (Level 1), significant other observable inputs (Level 2), and significant unobservable inputs (Level 3).",
        "label": "Schedule of Fair Value, Assets and Liabilities Measured on Recurring Basis [Table Text Block]",
        "terseLabel": "Schedule of Company's assets and liabilities by level within the fair value hierarchy"
       }
      }
     },
     "localname": "ScheduleOfFairValueAssetsAndLiabilitiesMeasuredOnRecurringBasisTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFairValueMeasurementsTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfInventoryCurrentTableTextBlock": {
     "auth_ref": [
      "r12",
      "r32",
      "r33",
      "r34"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of the carrying amount as of the balance sheet date of merchandise, goods, commodities, or supplies held for future sale or to be used in manufacturing, servicing or production process.",
        "label": "Schedule of Inventory, Current [Table Text Block]",
        "terseLabel": "Schedule of components of inventories"
       }
      }
     },
     "localname": "ScheduleOfInventoryCurrentTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureInventoriesNetTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfProductWarrantyLiabilityTableTextBlock": {
     "auth_ref": [
      "r199"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Tabular disclosure of the changes in the guarantor's aggregate product warranty liability, including the beginning balance of the aggregate product warranty liability, the aggregate reductions in that liability for payments made (in cash or in kind) under the warranty, the aggregate changes in the liability for accruals related to product warranties issued during the reporting period, the aggregate changes in the liability for accruals related to preexisting warranties (including adjustments related to changes in estimates), and the ending balance of the aggregate product warranty liability.",
        "label": "Schedule of Product Warranty Liability [Table Text Block]",
        "terseLabel": "Schedule of product warranty liability"
       }
      }
     },
     "localname": "ScheduleOfProductWarrantyLiabilityTableTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureProductWarrantyTables"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable": {
     "auth_ref": [
      "r252",
      "r257"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Disclosure of information about share-based payment arrangement.",
        "label": "Schedule of Share-based Compensation Arrangements by Share-based Payment Award [Table]"
       }
      }
     },
     "localname": "ScheduleOfShareBasedCompensationArrangementsByShareBasedPaymentAwardTable",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockBasedCompensationDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_SecurityDeposit": {
     "auth_ref": [
      "r51"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The amount of an asset, typically cash, provided to a counterparty to provide certain assurance of performance by the entity pursuant to the terms of a written or oral agreement, such as a lease.",
        "label": "Security Deposit",
        "terseLabel": "Security deposit"
       }
      }
     },
     "localname": "SecurityDeposit",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_SellingAndMarketingExpense": {
     "auth_ref": [],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations": {
       "order": 2.0,
       "parentTag": "us-gaap_OperatingExpenses",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The aggregate total amount of expenses directly related to the marketing or selling of products or services.",
        "label": "Selling and Marketing Expense",
        "terseLabel": "Sales and marketing"
       }
      }
     },
     "localname": "SellingAndMarketingExpense",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_SellingAndMarketingExpenseMember": {
     "auth_ref": [
      "r75"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Primary financial statement caption encompassing selling and marketing expense.",
        "label": "Selling And Marketing Expense [Member]",
        "terseLabel": "Sales and marketing*"
       }
      }
     },
     "localname": "SellingAndMarketingExpenseMember",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_ServiceMember": {
     "auth_ref": [
      "r226"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Assistance, including, but not limited to, technology, license and maintenance, license and service, maintenance, oil and gas, and financial service.",
        "label": "Service [Member]",
        "terseLabel": "Service"
       }
      }
     },
     "localname": "ServiceMember",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureLeasesLeaseCostDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_ShareBasedCompensation": {
     "auth_ref": [
      "r90"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows": {
       "order": 4.0,
       "parentTag": "us-gaap_NetCashProvidedByUsedInOperatingActivities",
       "weight": 1.0
      }
     },
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of noncash expense for share-based payment arrangement.",
        "label": "Share-based Compensation",
        "terseLabel": "Stock-based compensation expense"
       }
      }
     },
     "localname": "ShareBasedCompensation",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfCashFlows"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award [Line Items]",
        "terseLabel": "Stock-Based Compensation"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementByShareBasedPaymentAwardLineItems",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockBasedCompensationDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain": {
     "auth_ref": [
      "r250",
      "r254"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Award under share-based payment arrangement.",
        "label": "Share Based Compensation Arrangements By Share Based Payment Award Award Type And Plan Name [Domain]",
        "terseLabel": "Equity Award [Domain]"
       }
      }
     },
     "localname": "ShareBasedCompensationArrangementsByShareBasedPaymentAwardAwardTypeAndPlanNameDomain",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockBasedCompensationDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod": {
     "auth_ref": [
      "r253"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Period from grant date that an equity-based award expires, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents the reported fact of one year, five months, and thirteen days.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Expiration Period",
        "terseLabel": "Options Expiration period"
       }
      }
     },
     "localname": "SharebasedCompensationArrangementBySharebasedPaymentAwardExpirationPeriod",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockBasedCompensationDetails"
     ],
     "xbrltype": "durationItemType"
    },
    "us-gaap_SharesOutstanding": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of shares issued which are neither cancelled nor held in the treasury.",
        "label": "Shares, Outstanding",
        "periodEndLabel": "Balance (in shares)",
        "periodStartLabel": "Balance (in shares)"
       }
      }
     },
     "localname": "SharesOutstanding",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_ShortTermDebtTypeAxis": {
     "auth_ref": [
      "r42"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by type of short-term debt arrangement.",
        "label": "Short-term Debt, Type [Axis]"
       }
      }
     },
     "localname": "ShortTermDebtTypeAxis",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ShortTermDebtTypeDomain": {
     "auth_ref": [
      "r40"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Type of short-term debt arrangement, such as notes, line of credit, commercial paper, asset-based financing, project financing, letter of credit financing.",
        "label": "Short Term Debt Type [Domain]",
        "terseLabel": "Short-term Debt, Type [Domain]"
       }
      }
     },
     "localname": "ShortTermDebtTypeDomain",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureFinancingArrangementsDetails"
     ],
     "xbrltype": "domainItemType"
    },
    "us-gaap_StatementEquityComponentsAxis": {
     "auth_ref": [
      "r49",
      "r100",
      "r101",
      "r102",
      "r106",
      "r114",
      "r116",
      "r137",
      "r172",
      "r203",
      "r208",
      "r259",
      "r260",
      "r261",
      "r278",
      "r279",
      "r324",
      "r325",
      "r326",
      "r327",
      "r328",
      "r330",
      "r403",
      "r404",
      "r405"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Information by component of equity.",
        "label": "Equity Components [Axis]"
       }
      }
     },
     "localname": "StatementEquityComponentsAxis",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureAccumulatedOtherComprehensiveIncomeDetails",
      "http://www.axcelis.com/role/DisclosureStockBasedCompensationDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_StatementLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Statement [Line Items]",
        "terseLabel": "Schedule II-Valuation and Qualifying Accounts"
       }
      }
     },
     "localname": "StatementLineItems",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_StatementOfCashFlowsAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Consolidated Statements of Cash Flows"
       }
      }
     },
     "localname": "StatementOfCashFlowsAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "xbrltype": "stringItemType"
    },
    "us-gaap_StatementOfFinancialPositionAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Consolidated Balance Sheets"
       }
      }
     },
     "localname": "StatementOfFinancialPositionAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "xbrltype": "stringItemType"
    },
    "us-gaap_StatementOfIncomeAndComprehensiveIncomeAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Consolidated Statements of Comprehensive Income"
       }
      }
     },
     "localname": "StatementOfIncomeAndComprehensiveIncomeAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "xbrltype": "stringItemType"
    },
    "us-gaap_StatementOfStockholdersEquityAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Consolidated Statements of Stockholders' Equity"
       }
      }
     },
     "localname": "StatementOfStockholdersEquityAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "xbrltype": "stringItemType"
    },
    "us-gaap_StatementTable": {
     "auth_ref": [
      "r100",
      "r101",
      "r102",
      "r137",
      "r364"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Schedule reflecting a Statement of Income, Statement of Cash Flows, Statement of Financial Position, Statement of Shareholders' Equity and Other Comprehensive Income, or other statement as needed.",
        "label": "Statement [Table]"
       }
      }
     },
     "localname": "StatementTable",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans": {
     "auth_ref": [
      "r19",
      "r20",
      "r203",
      "r208"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of shares issued during the period as a result of an employee stock purchase plan.",
        "label": "Stock Issued During Period, Shares, Employee Stock Purchase Plans",
        "terseLabel": "Issuance of shares under Employee Stock Purchase Plan (in shares)"
       }
      }
     },
     "localname": "StockIssuedDuringPeriodSharesEmployeeStockPurchasePlans",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures": {
     "auth_ref": [
      "r19",
      "r20",
      "r203",
      "r208"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of shares issued during the period related to Restricted Stock Awards, net of any shares forfeited.",
        "label": "Stock Issued During Period, Shares, Restricted Stock Award, Net of Forfeitures",
        "terseLabel": "Issuance of restricted common shares (in shares)"
       }
      }
     },
     "localname": "StockIssuedDuringPeriodSharesRestrictedStockAwardNetOfForfeitures",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_StockIssuedDuringPeriodSharesStockOptionsExercised": {
     "auth_ref": [
      "r19",
      "r20",
      "r203",
      "r208",
      "r255"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of share options (or share units) exercised during the current period.",
        "label": "Share-based Compensation Arrangement by Share-based Payment Award, Options, Exercises in Period",
        "terseLabel": "Exercise of stock options (in shares)"
       }
      }
     },
     "localname": "StockIssuedDuringPeriodSharesStockOptionsExercised",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureStockBasedCompensationDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_StockIssuedDuringPeriodValueEmployeeStockPurchasePlan": {
     "auth_ref": [
      "r19",
      "r20",
      "r203",
      "r208"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Aggregate change in value for stock issued during the period as a result of employee stock purchase plan.",
        "label": "Stock Issued During Period, Value, Employee Stock Purchase Plan",
        "terseLabel": "Issuance of shares under Employee Stock Purchase Plan"
       }
      }
     },
     "localname": "StockIssuedDuringPeriodValueEmployeeStockPurchasePlan",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures": {
     "auth_ref": [
      "r203",
      "r208"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Value of stock related to Restricted Stock Awards issued during the period, net of the stock value of such awards forfeited.",
        "label": "Stock Issued During Period, Value, Restricted Stock Award, Net of Forfeitures",
        "terseLabel": "Issuance of restricted common shares"
       }
      }
     },
     "localname": "StockIssuedDuringPeriodValueRestrictedStockAwardNetOfForfeitures",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_StockIssuedDuringPeriodValueStockOptionsExercised": {
     "auth_ref": [
      "r49",
      "r203",
      "r208"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Value of stock issued as a result of the exercise of stock options.",
        "label": "Stock Issued During Period, Value, Stock Options Exercised",
        "terseLabel": "Exercise of stock options"
       }
      }
     },
     "localname": "StockIssuedDuringPeriodValueStockOptionsExercised",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_StockRepurchaseProgramAuthorizedAmount1": {
     "auth_ref": [],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Amount of stock repurchase plan authorized.",
        "label": "Stock Repurchase Program, Authorized Amount",
        "terseLabel": "Share repurchase program common stock authorized amount"
       }
      }
     },
     "localname": "StockRepurchaseProgramAuthorizedAmount1",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureShareRepurchaseDetails"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_StockRepurchasedDuringPeriodShares": {
     "auth_ref": [
      "r19",
      "r20",
      "r203",
      "r208"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of shares that have been repurchased during the period and have not been retired and are not held in treasury. Some state laws may govern the circumstances under which an entity may acquire its own stock and prescribe the accounting treatment therefore. This element is used when state law does not recognize treasury stock.",
        "label": "Treasury shares returned to authorized, Shares",
        "negatedLabel": "Repurchase of common stock (in shares)"
       }
      }
     },
     "localname": "StockRepurchasedDuringPeriodShares",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_StockRepurchasedDuringPeriodValue": {
     "auth_ref": [
      "r19",
      "r20",
      "r203",
      "r208"
     ],
     "crdr": "debit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Equity impact of the value of stock that has been repurchased during the period and has not been retired and is not held in treasury. Some state laws may mandate the circumstances under which an entity may acquire its own stock and prescribe the accounting treatment therefore. This element is used when state law does not recognize treasury stock.",
        "label": "Treasury shares returned to authorized, Value",
        "negatedLabel": "Repurchase of common stock"
       }
      }
     },
     "localname": "StockRepurchasedDuringPeriodValue",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_StockholdersEquity": {
     "auth_ref": [
      "r20",
      "r25",
      "r26",
      "r96",
      "r169",
      "r171",
      "r322"
     ],
     "calculation": {
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets": {
       "order": 2.0,
       "parentTag": "us-gaap_LiabilitiesAndStockholdersEquity",
       "weight": 1.0
      }
     },
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Total of all stockholders' equity (deficit) items, net of receivables from officers, directors, owners, and affiliates of the entity which are attributable to the parent. The amount of the economic entity's stockholders' equity attributable to the parent excludes the amount of stockholders' equity which is allocable to that ownership interest in subsidiary equity which is not attributable to the parent (noncontrolling interest, minority interest). This excludes temporary equity and is sometimes called permanent equity.",
        "label": "Stockholders' Equity Attributable to Parent",
        "periodEndLabel": "Balance",
        "periodStartLabel": "Balance",
        "totalLabel": "Total stockholders? equity"
       }
      }
     },
     "localname": "StockholdersEquity",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfStockholdersEquity"
     ],
     "xbrltype": "monetaryItemType"
    },
    "us-gaap_StockholdersEquityAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Stockholders' Equity Attributable to Parent [Abstract]",
        "terseLabel": "Stockholders? equity:"
       }
      }
     },
     "localname": "StockholdersEquityAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedBalanceSheets"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_StockholdersEquityNoteAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Share Repurchase"
       }
      }
     },
     "localname": "StockholdersEquityNoteAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "xbrltype": "stringItemType"
    },
    "us-gaap_StockholdersEquityNoteDisclosureTextBlock": {
     "auth_ref": [
      "r95",
      "r208",
      "r210"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The entire disclosure for shareholders' equity comprised of portions attributable to the parent entity and noncontrolling interest, including other comprehensive income. Includes, but is not limited to, balances of common stock, preferred stock, additional paid-in capital, other capital and retained earnings, accumulated balance for each classification of other comprehensive income and amount of comprehensive income.",
        "label": "Stockholders' Equity Note Disclosure [Text Block]",
        "verboseLabel": "Share Repurchase"
       }
      }
     },
     "localname": "StockholdersEquityNoteDisclosureTextBlock",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureShareRepurchase"
     ],
     "xbrltype": "textBlockItemType"
    },
    "us-gaap_TreasuryStockAcquiredAverageCostPerShare": {
     "auth_ref": [
      "r209"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Total cost of shares repurchased divided by the total number of shares repurchased.",
        "label": "Treasury Stock Acquired, Average Cost Per Share",
        "terseLabel": "Average cost"
       }
      }
     },
     "localname": "TreasuryStockAcquiredAverageCostPerShare",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureShareRepurchaseDetails"
     ],
     "xbrltype": "perShareItemType"
    },
    "us-gaap_TreasuryStockSharesAcquired": {
     "auth_ref": [
      "r20",
      "r203",
      "r208"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of shares that have been repurchased during the period and are being held in treasury.",
        "label": "Treasury Stock, Shares, Acquired",
        "terseLabel": "Number of shares repurchased"
       }
      }
     },
     "localname": "TreasuryStockSharesAcquired",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureShareRepurchaseDetails"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_ValuationAllowanceLineItems": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table.",
        "label": "Valuation Allowance [Line Items]",
        "terseLabel": "Valuation allowance"
       }
      }
     },
     "localname": "ValuationAllowanceLineItems",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_ValuationAllowanceTable": {
     "auth_ref": [
      "r275"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "A listing of an entity's valuation allowances to reduce deferred tax assets to amounts which it is more likely than not will not be realized, including a description of the deferred tax assets for which the valuation allowance has been recorded and the amount of the valuation allowance.",
        "label": "Valuation Allowance [Table]"
       }
      }
     },
     "localname": "ValuationAllowanceTable",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureIncomeTaxesDetails"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding": {
     "auth_ref": [
      "r122",
      "r130"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShareDetails": {
       "order": null,
       "parentTag": null,
       "root": true,
       "weight": null
      }
     },
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The average number of shares or units issued and outstanding that are used in calculating diluted EPS or earnings per unit (EPU), determined based on the timing of issuance of shares or units in the period.",
        "label": "Weighted Average Number of Shares Outstanding, Diluted",
        "terseLabel": "Diluted weighted average common shares",
        "totalLabel": "Weighted average common shares used in computing diluted net income per share"
       }
      }
     },
     "localname": "WeightedAverageNumberOfDilutedSharesOutstanding",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShareDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_WeightedAverageNumberOfSharesOutstandingAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "label": "Weighted Average Number of Shares Outstanding, Diluted [Abstract]",
        "terseLabel": "Shares used in computing net income per share:"
       }
      }
     },
     "localname": "WeightedAverageNumberOfSharesOutstandingAbstract",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "stringItemType"
    },
    "us-gaap_WeightedAverageNumberOfSharesOutstandingBasic": {
     "auth_ref": [
      "r120",
      "r130"
     ],
     "calculation": {
      "http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShareDetails": {
       "order": 1.0,
       "parentTag": "us-gaap_WeightedAverageNumberOfDilutedSharesOutstanding",
       "weight": 1.0
      }
     },
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Number of [basic] shares or units, after adjustment for contingently issuable shares or units and other shares or units not deemed outstanding, determined by relating the portion of time within a reporting period that common shares or units have been outstanding to the total time in that period.",
        "label": "Weighted Average Number of Shares Outstanding, Basic",
        "terseLabel": "Basic weighted average common shares",
        "verboseLabel": "Weighted average common shares outstanding used in computing basic income per share"
       }
      }
     },
     "localname": "WeightedAverageNumberOfSharesOutstandingBasic",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureComputationOfNetEarningsPerShareDetails",
      "http://www.axcelis.com/role/StatementConsolidatedStatementsOfOperations"
     ],
     "xbrltype": "sharesItemType"
    },
    "us-gaap_WorkersCompensationLiabilityCurrentAndNoncurrent": {
     "auth_ref": [
      "r17",
      "r18",
      "r372",
      "r384"
     ],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Carrying value as of the balance sheet date of obligations and payables pertaining to claims incurred of a workers compensation nature.",
        "label": "Workers' Compensation Liability",
        "terseLabel": "Letter of credit related to workers' compensation insurance"
       }
      }
     },
     "localname": "WorkersCompensationLiabilityCurrentAndNoncurrent",
     "nsuri": "http://fasb.org/us-gaap/2020-01-31",
     "presentation": [
      "http://www.axcelis.com/role/DisclosureCashCashEquivalentsAndRestrictedCashDetails"
     ],
     "xbrltype": "monetaryItemType"
    }
   },
   "unitCount": 5
  }
 },
 "std_ref": {
  "r0": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "205",
   "URI": "http://asc.fasb.org/extlink&oid=109222650&loc=SL51721683-107760"
  },
  "r1": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "205",
   "URI": "http://asc.fasb.org/topic&trid=2122149"
  },
  "r10": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=121566466&loc=d3e6904-107765"
  },
  "r100": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "23",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "250",
   "URI": "http://asc.fasb.org/extlink&oid=115929471&loc=d3e21914-107793"
  },
  "r101": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "24",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "250",
   "URI": "http://asc.fasb.org/extlink&oid=115929471&loc=d3e21930-107793"
  },
  "r102": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "250",
   "URI": "http://asc.fasb.org/extlink&oid=115929471&loc=d3e21711-107793"
  },
  "r103": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "250",
   "URI": "http://asc.fasb.org/extlink&oid=109234566&loc=d3e22499-107794"
  },
  "r104": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)(1)",
   "Topic": "250",
   "URI": "http://asc.fasb.org/extlink&oid=109234566&loc=d3e22499-107794"
  },
  "r105": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)(2)",
   "Topic": "250",
   "URI": "http://asc.fasb.org/extlink&oid=109234566&loc=d3e22499-107794"
  },
  "r106": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)(3)",
   "Topic": "250",
   "URI": "http://asc.fasb.org/extlink&oid=109234566&loc=d3e22499-107794"
  },
  "r107": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)(4)",
   "Topic": "250",
   "URI": "http://asc.fasb.org/extlink&oid=109234566&loc=d3e22499-107794"
  },
  "r108": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)",
   "Topic": "250",
   "URI": "http://asc.fasb.org/extlink&oid=109234566&loc=d3e22499-107794"
  },
  "r109": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "11",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "250",
   "URI": "http://asc.fasb.org/extlink&oid=109234566&loc=d3e22694-107794"
  },
  "r11": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=121566466&loc=d3e6911-107765"
  },
  "r110": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "11",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "250",
   "URI": "http://asc.fasb.org/extlink&oid=109234566&loc=d3e22694-107794"
  },
  "r111": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "250",
   "URI": "http://asc.fasb.org/extlink&oid=109234566&loc=d3e22583-107794"
  },
  "r112": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "250",
   "URI": "http://asc.fasb.org/extlink&oid=109234566&loc=d3e22595-107794"
  },
  "r113": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "250",
   "URI": "http://asc.fasb.org/extlink&oid=109234566&loc=d3e22644-107794"
  },
  "r114": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "250",
   "URI": "http://asc.fasb.org/extlink&oid=109234566&loc=d3e22644-107794"
  },
  "r115": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "250",
   "URI": "http://asc.fasb.org/extlink&oid=109234566&loc=d3e22658-107794"
  },
  "r116": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "9",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "250",
   "URI": "http://asc.fasb.org/extlink&oid=109234566&loc=d3e22663-107794"
  },
  "r117": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 11.M.Q2)",
   "Topic": "250",
   "URI": "http://asc.fasb.org/extlink&oid=112272810&loc=d3e31137-122693"
  },
  "r118": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Topic": "250",
   "URI": "http://asc.fasb.org/extlink&oid=112272810&loc=SL108384541-122693"
  },
  "r119": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "250",
   "URI": "http://asc.fasb.org/topic&trid=2122394"
  },
  "r12": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=6361739&loc=d3e7789-107766"
  },
  "r120": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "260",
   "URI": "http://asc.fasb.org/extlink&oid=121326447&loc=d3e1448-109256"
  },
  "r121": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "11",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "260",
   "URI": "http://asc.fasb.org/extlink&oid=121326447&loc=d3e1377-109256"
  },
  "r122": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "16",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "260",
   "URI": "http://asc.fasb.org/extlink&oid=121326447&loc=d3e1505-109256"
  },
  "r123": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "260",
   "URI": "http://asc.fasb.org/extlink&oid=121326447&loc=d3e1252-109256"
  },
  "r124": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "22",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "260",
   "URI": "http://asc.fasb.org/extlink&oid=121326447&loc=d3e1707-109256"
  },
  "r125": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "23",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "260",
   "URI": "http://asc.fasb.org/extlink&oid=121326447&loc=d3e1757-109256"
  },
  "r126": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "28A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "260",
   "URI": "http://asc.fasb.org/extlink&oid=121326447&loc=d3e1500-109256"
  },
  "r127": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "60B",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "260",
   "URI": "http://asc.fasb.org/extlink&oid=121326447&loc=SL5780133-109256"
  },
  "r128": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "60B",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "260",
   "URI": "http://asc.fasb.org/extlink&oid=121326447&loc=SL5780133-109256"
  },
  "r129": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "260",
   "URI": "http://asc.fasb.org/extlink&oid=121326447&loc=d3e1337-109256"
  },
  "r13": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(1))",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r130": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "260",
   "URI": "http://asc.fasb.org/extlink&oid=6371337&loc=d3e3550-109257"
  },
  "r131": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "260",
   "URI": "http://asc.fasb.org/extlink&oid=6371337&loc=d3e3550-109257"
  },
  "r132": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "260",
   "URI": "http://asc.fasb.org/extlink&oid=6371337&loc=d3e3630-109257"
  },
  "r133": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "260",
   "URI": "http://asc.fasb.org/extlink&oid=109243012&loc=SL65017193-207537"
  },
  "r134": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Topic": "260",
   "URI": "http://asc.fasb.org/extlink&oid=120380238&loc=d3e3842-109258"
  },
  "r135": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "52",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Topic": "260",
   "URI": "http://asc.fasb.org/extlink&oid=120380238&loc=d3e4984-109258"
  },
  "r136": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "260",
   "URI": "http://asc.fasb.org/topic&trid=2144383"
  },
  "r137": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "272",
   "URI": "http://asc.fasb.org/extlink&oid=6828210&loc=d3e70191-108054"
  },
  "r138": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "16",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "275",
   "URI": "http://asc.fasb.org/extlink&oid=99393423&loc=d3e6327-108592"
  },
  "r139": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "18",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "275",
   "URI": "http://asc.fasb.org/extlink&oid=99393423&loc=d3e6351-108592"
  },
  "r14": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(13))",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r140": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "18",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "275",
   "URI": "http://asc.fasb.org/extlink&oid=99393423&loc=d3e6351-108592"
  },
  "r141": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "20",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "275",
   "URI": "http://asc.fasb.org/extlink&oid=99393423&loc=d3e6404-108592"
  },
  "r142": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "21",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "275",
   "URI": "http://asc.fasb.org/extlink&oid=99393423&loc=d3e6442-108592"
  },
  "r143": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "275",
   "URI": "http://asc.fasb.org/topic&trid=2134479"
  },
  "r144": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "22",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "280",
   "URI": "http://asc.fasb.org/extlink&oid=120311839&loc=d3e8736-108599"
  },
  "r145": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "22",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "280",
   "URI": "http://asc.fasb.org/extlink&oid=120311839&loc=d3e8736-108599"
  },
  "r146": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "22",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "280",
   "URI": "http://asc.fasb.org/extlink&oid=120311839&loc=d3e8736-108599"
  },
  "r147": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "22",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "280",
   "URI": "http://asc.fasb.org/extlink&oid=120311839&loc=d3e8736-108599"
  },
  "r148": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "22",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(e)",
   "Topic": "280",
   "URI": "http://asc.fasb.org/extlink&oid=120311839&loc=d3e8736-108599"
  },
  "r149": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "22",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(h)",
   "Topic": "280",
   "URI": "http://asc.fasb.org/extlink&oid=120311839&loc=d3e8736-108599"
  },
  "r15": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(14))",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r150": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "22",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "http://asc.fasb.org/extlink&oid=120311839&loc=d3e8736-108599"
  },
  "r151": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "30",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "280",
   "URI": "http://asc.fasb.org/extlink&oid=120311839&loc=d3e8906-108599"
  },
  "r152": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "30",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "280",
   "URI": "http://asc.fasb.org/extlink&oid=120311839&loc=d3e8906-108599"
  },
  "r153": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "30",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "280",
   "URI": "http://asc.fasb.org/extlink&oid=120311839&loc=d3e8906-108599"
  },
  "r154": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "30",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "280",
   "URI": "http://asc.fasb.org/extlink&oid=120311839&loc=d3e8906-108599"
  },
  "r155": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "31",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "http://asc.fasb.org/extlink&oid=120311839&loc=d3e8924-108599"
  },
  "r156": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "32",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "280",
   "URI": "http://asc.fasb.org/extlink&oid=120311839&loc=d3e8933-108599"
  },
  "r157": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "32",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "280",
   "URI": "http://asc.fasb.org/extlink&oid=120311839&loc=d3e8933-108599"
  },
  "r158": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "32",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "280",
   "URI": "http://asc.fasb.org/extlink&oid=120311839&loc=d3e8933-108599"
  },
  "r159": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "32",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "280",
   "URI": "http://asc.fasb.org/extlink&oid=120311839&loc=d3e8933-108599"
  },
  "r16": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(17))",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r160": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "32",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)",
   "Topic": "280",
   "URI": "http://asc.fasb.org/extlink&oid=120311839&loc=d3e8933-108599"
  },
  "r161": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "40",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "http://asc.fasb.org/extlink&oid=120311839&loc=d3e9031-108599"
  },
  "r162": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "41",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "280",
   "URI": "http://asc.fasb.org/extlink&oid=120311839&loc=d3e9038-108599"
  },
  "r163": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "41",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "280",
   "URI": "http://asc.fasb.org/extlink&oid=120311839&loc=d3e9038-108599"
  },
  "r164": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "41",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "a",
   "Topic": "280",
   "URI": "http://asc.fasb.org/extlink&oid=120311839&loc=d3e9038-108599"
  },
  "r165": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "42",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "280",
   "URI": "http://asc.fasb.org/extlink&oid=120311839&loc=d3e9054-108599"
  },
  "r166": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "310",
   "URI": "http://asc.fasb.org/extlink&oid=121593590&loc=d3e4428-111522"
  },
  "r167": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "9",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "310",
   "URI": "http://asc.fasb.org/extlink&oid=121593590&loc=d3e4531-111522"
  },
  "r168": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "310",
   "URI": "http://asc.fasb.org/extlink&oid=121611835&loc=d3e5074-111524"
  },
  "r169": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 4.E)",
   "Topic": "310",
   "URI": "http://asc.fasb.org/extlink&oid=27010918&loc=d3e74512-122707"
  },
  "r17": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(20))",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r170": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "SubTopic": "10",
   "Topic": "310",
   "URI": "http://asc.fasb.org/subtopic&trid=2196772"
  },
  "r171": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "323",
   "URI": "http://asc.fasb.org/extlink&oid=114001798&loc=d3e33918-111571"
  },
  "r172": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "326",
   "URI": "http://asc.fasb.org/extlink&oid=121646688&loc=SL121648383-210437"
  },
  "r173": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(e)(1)",
   "Topic": "326",
   "URI": "http://asc.fasb.org/extlink&oid=121646688&loc=SL121648383-210437"
  },
  "r174": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(e)(2)",
   "Topic": "326",
   "URI": "http://asc.fasb.org/extlink&oid=121646688&loc=SL121648383-210437"
  },
  "r175": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Topic": "326",
   "URI": "http://asc.fasb.org/extlink&oid=121599878&loc=SL82895884-210446"
  },
  "r176": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)",
   "Topic": "326",
   "URI": "http://asc.fasb.org/extlink&oid=121599337&loc=SL82919249-210447"
  },
  "r177": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "326",
   "URI": "http://asc.fasb.org/extlink&oid=121599337&loc=SL82919249-210447"
  },
  "r178": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "330",
   "URI": "http://asc.fasb.org/extlink&oid=116847112&loc=d3e4542-108314"
  },
  "r179": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 5.BB)",
   "Topic": "330",
   "URI": "http://asc.fasb.org/extlink&oid=27011343&loc=d3e100047-122729"
  },
  "r18": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(24))",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r180": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "330",
   "URI": "http://asc.fasb.org/topic&trid=2126998"
  },
  "r181": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "05",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "340",
   "URI": "http://asc.fasb.org/extlink&oid=68074540&loc=d3e5879-108316"
  },
  "r182": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "340",
   "URI": "http://asc.fasb.org/extlink&oid=6387103&loc=d3e6435-108320"
  },
  "r183": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "360",
   "URI": "http://asc.fasb.org/extlink&oid=6391035&loc=d3e2868-110229"
  },
  "r184": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "360",
   "URI": "http://asc.fasb.org/extlink&oid=6391035&loc=d3e2868-110229"
  },
  "r185": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "360",
   "URI": "http://asc.fasb.org/extlink&oid=109226691&loc=d3e2941-110230"
  },
  "r186": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "440",
   "URI": "http://asc.fasb.org/extlink&oid=121559207&loc=d3e25336-109308"
  },
  "r187": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "440",
   "URI": "http://asc.fasb.org/extlink&oid=121559207&loc=d3e25336-109308"
  },
  "r188": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "440",
   "URI": "http://asc.fasb.org/topic&trid=2144648"
  },
  "r189": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "450",
   "URI": "http://asc.fasb.org/extlink&oid=121557415&loc=d3e14326-108349"
  },
  "r19": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(28))",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r190": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "450",
   "URI": "http://asc.fasb.org/extlink&oid=121557415&loc=d3e14394-108349"
  },
  "r191": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "450",
   "URI": "http://asc.fasb.org/topic&trid=2127136"
  },
  "r192": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "25",
   "SubTopic": "10",
   "Topic": "460",
   "URI": "http://asc.fasb.org/extlink&oid=68070138&loc=d3e11281-110244"
  },
  "r193": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "460",
   "URI": "http://asc.fasb.org/extlink&oid=68068213&loc=d3e12524-110249"
  },
  "r194": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "((c)(2))",
   "Topic": "460",
   "URI": "http://asc.fasb.org/extlink&oid=68068213&loc=d3e12565-110249"
  },
  "r195": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "((c)(3))",
   "Topic": "460",
   "URI": "http://asc.fasb.org/extlink&oid=68068213&loc=d3e12565-110249"
  },
  "r196": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "((c)(4))",
   "Topic": "460",
   "URI": "http://asc.fasb.org/extlink&oid=68068213&loc=d3e12565-110249"
  },
  "r197": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)",
   "Topic": "460",
   "URI": "http://asc.fasb.org/extlink&oid=68068213&loc=d3e12565-110249"
  },
  "r198": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(5)",
   "Topic": "460",
   "URI": "http://asc.fasb.org/extlink&oid=68068213&loc=d3e12565-110249"
  },
  "r199": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "460",
   "URI": "http://asc.fasb.org/extlink&oid=68068213&loc=d3e12565-110249"
  },
  "r2": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=121566466&loc=d3e6676-107765"
  },
  "r20": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(29))",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r200": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "460",
   "URI": "http://asc.fasb.org/topic&trid=2155896"
  },
  "r201": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "470",
   "URI": "http://asc.fasb.org/extlink&oid=6802200&loc=SL6230698-112601"
  },
  "r202": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "470",
   "URI": "http://asc.fasb.org/topic&trid=2208564"
  },
  "r203": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "505",
   "URI": "http://asc.fasb.org/extlink&oid=109259400&loc=d3e21463-112644"
  },
  "r204": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "505",
   "URI": "http://asc.fasb.org/extlink&oid=109259400&loc=d3e21475-112644"
  },
  "r205": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "505",
   "URI": "http://asc.fasb.org/extlink&oid=109259400&loc=d3e21506-112644"
  },
  "r206": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "505",
   "URI": "http://asc.fasb.org/extlink&oid=109259400&loc=d3e21521-112644"
  },
  "r207": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "505",
   "URI": "http://asc.fasb.org/extlink&oid=109259400&loc=d3e21538-112644"
  },
  "r208": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.3-04)",
   "Topic": "505",
   "URI": "http://asc.fasb.org/extlink&oid=120397183&loc=d3e187085-122770"
  },
  "r209": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Topic": "505",
   "URI": "http://asc.fasb.org/extlink&oid=6405813&loc=d3e23239-112655"
  },
  "r21": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(3))",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r210": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "505",
   "URI": "http://asc.fasb.org/topic&trid=2208762"
  },
  "r211": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "606",
   "URI": "http://asc.fasb.org/extlink&oid=121556615&loc=SL49130531-203044"
  },
  "r212": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "606",
   "URI": "http://asc.fasb.org/extlink&oid=121556615&loc=SL49130532-203044"
  },
  "r213": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "606",
   "URI": "http://asc.fasb.org/extlink&oid=121604090&loc=SL49130551-203045"
  },
  "r214": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "606",
   "URI": "http://asc.fasb.org/extlink&oid=121604090&loc=SL49130554-203045"
  },
  "r215": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "606",
   "URI": "http://asc.fasb.org/extlink&oid=121604090&loc=SL49130554-203045"
  },
  "r216": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "606",
   "URI": "http://asc.fasb.org/extlink&oid=121604090&loc=SL49130554-203045"
  },
  "r217": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "606",
   "URI": "http://asc.fasb.org/extlink&oid=121604090&loc=SL49130554-203045"
  },
  "r218": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(e)",
   "Topic": "606",
   "URI": "http://asc.fasb.org/extlink&oid=121604090&loc=SL49130554-203045"
  },
  "r219": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)(2)",
   "Topic": "606",
   "URI": "http://asc.fasb.org/extlink&oid=121604090&loc=SL49130556-203045"
  },
  "r22": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(30)(a)(1))",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r220": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "606",
   "URI": "http://asc.fasb.org/extlink&oid=121604090&loc=SL49130558-203045"
  },
  "r221": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "606",
   "URI": "http://asc.fasb.org/extlink&oid=121604090&loc=SL49130543-203045"
  },
  "r222": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "606",
   "URI": "http://asc.fasb.org/extlink&oid=121604090&loc=SL49130545-203045"
  },
  "r223": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "606",
   "URI": "http://asc.fasb.org/extlink&oid=121604090&loc=SL49130549-203045"
  },
  "r224": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "606",
   "URI": "http://asc.fasb.org/extlink&oid=121604090&loc=SL49130549-203045"
  },
  "r225": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "9",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "606",
   "URI": "http://asc.fasb.org/extlink&oid=121604090&loc=SL49130550-203045"
  },
  "r226": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "91",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "606",
   "URI": "http://asc.fasb.org/extlink&oid=121551570&loc=SL49130690-203046-203046"
  },
  "r227": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "91",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "606",
   "URI": "http://asc.fasb.org/extlink&oid=121551570&loc=SL49130690-203046-203046"
  },
  "r228": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "91",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "606",
   "URI": "http://asc.fasb.org/extlink&oid=121551570&loc=SL49130690-203046-203046"
  },
  "r229": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "91",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Subparagraph": "(d)",
   "Topic": "606",
   "URI": "http://asc.fasb.org/extlink&oid=121551570&loc=SL49130690-203046-203046"
  },
  "r23": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(30)(a)(3))",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r230": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "91",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Subparagraph": "(e)",
   "Topic": "606",
   "URI": "http://asc.fasb.org/extlink&oid=121551570&loc=SL49130690-203046-203046"
  },
  "r231": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "91",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Subparagraph": "(f)",
   "Topic": "606",
   "URI": "http://asc.fasb.org/extlink&oid=121551570&loc=SL49130690-203046-203046"
  },
  "r232": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "91",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Subparagraph": "(g)",
   "Topic": "606",
   "URI": "http://asc.fasb.org/extlink&oid=121551570&loc=SL49130690-203046-203046"
  },
  "r233": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(g)(2)",
   "Topic": "606",
   "URI": "http://asc.fasb.org/extlink&oid=113356391&loc=SL49131195-203048"
  },
  "r234": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(i)",
   "Topic": "606",
   "URI": "http://asc.fasb.org/extlink&oid=113356391&loc=SL49131195-203048"
  },
  "r235": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(i)(2)",
   "Topic": "606",
   "URI": "http://asc.fasb.org/extlink&oid=113356391&loc=SL49131195-203048"
  },
  "r236": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(j)",
   "Topic": "606",
   "URI": "http://asc.fasb.org/extlink&oid=113356391&loc=SL49131195-203048"
  },
  "r237": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "606",
   "URI": "http://asc.fasb.org/topic&trid=49130388"
  },
  "r238": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)(i)",
   "Topic": "715",
   "URI": "http://asc.fasb.org/extlink&oid=118255775&loc=d3e1928-114920"
  },
  "r239": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)(ii)",
   "Topic": "715",
   "URI": "http://asc.fasb.org/extlink&oid=118255775&loc=d3e1928-114920"
  },
  "r24": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(30)(a)(4))",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r240": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)(iv)(01)",
   "Topic": "715",
   "URI": "http://asc.fasb.org/extlink&oid=118255775&loc=d3e1928-114920"
  },
  "r241": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)(iv)(02)",
   "Topic": "715",
   "URI": "http://asc.fasb.org/extlink&oid=118255775&loc=d3e1928-114920"
  },
  "r242": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)(iv)(02)(A)",
   "Topic": "715",
   "URI": "http://asc.fasb.org/extlink&oid=118255775&loc=d3e1928-114920"
  },
  "r243": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)(iv)(02)(B)",
   "Topic": "715",
   "URI": "http://asc.fasb.org/extlink&oid=118255775&loc=d3e1928-114920"
  },
  "r244": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)(iv)(02)(C)",
   "Topic": "715",
   "URI": "http://asc.fasb.org/extlink&oid=118255775&loc=d3e1928-114920"
  },
  "r245": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(d)(iv)(03)",
   "Topic": "715",
   "URI": "http://asc.fasb.org/extlink&oid=118255775&loc=d3e1928-114920"
  },
  "r246": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "17",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Topic": "715",
   "URI": "http://asc.fasb.org/extlink&oid=118257860&loc=d3e4179-114921"
  },
  "r247": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "80",
   "Subparagraph": "(d)",
   "Topic": "715",
   "URI": "http://asc.fasb.org/extlink&oid=65877416&loc=SL14450657-114947"
  },
  "r248": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "80",
   "Topic": "715",
   "URI": "http://asc.fasb.org/extlink&oid=35742348&loc=SL14450788-114948"
  },
  "r249": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "35",
   "SubTopic": "10",
   "Topic": "718",
   "URI": "http://asc.fasb.org/extlink&oid=121326096&loc=d3e4534-113899"
  },
  "r25": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(30))",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r250": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "718",
   "URI": "http://asc.fasb.org/extlink&oid=120381028&loc=d3e5047-113901"
  },
  "r251": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "718",
   "URI": "http://asc.fasb.org/extlink&oid=120381028&loc=d3e5047-113901"
  },
  "r252": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "718",
   "URI": "http://asc.fasb.org/extlink&oid=120381028&loc=d3e5047-113901"
  },
  "r253": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)(2)",
   "Topic": "718",
   "URI": "http://asc.fasb.org/extlink&oid=120381028&loc=d3e5070-113901"
  },
  "r254": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a),(g)",
   "Topic": "718",
   "URI": "http://asc.fasb.org/extlink&oid=120381028&loc=d3e5070-113901"
  },
  "r255": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)(iv)(2)",
   "Topic": "718",
   "URI": "http://asc.fasb.org/extlink&oid=120381028&loc=d3e5070-113901"
  },
  "r256": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(h)(1)(i)",
   "Topic": "718",
   "URI": "http://asc.fasb.org/extlink&oid=120381028&loc=d3e5070-113901"
  },
  "r257": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "718",
   "URI": "http://asc.fasb.org/extlink&oid=120381028&loc=d3e5070-113901"
  },
  "r258": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "718",
   "URI": "http://asc.fasb.org/extlink&oid=120381028&loc=SL79508275-113901"
  },
  "r259": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(e)",
   "Topic": "718",
   "URI": "http://asc.fasb.org/extlink&oid=121322162&loc=SL121327923-165333"
  },
  "r26": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(31))",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r260": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(f)(1)",
   "Topic": "718",
   "URI": "http://asc.fasb.org/extlink&oid=121322162&loc=SL121327923-165333"
  },
  "r261": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(f)(2)",
   "Topic": "718",
   "URI": "http://asc.fasb.org/extlink&oid=121322162&loc=SL121327923-165333"
  },
  "r262": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(g)(1)",
   "Topic": "718",
   "URI": "http://asc.fasb.org/extlink&oid=121322162&loc=SL121327923-165333"
  },
  "r263": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(g)(2)",
   "Topic": "718",
   "URI": "http://asc.fasb.org/extlink&oid=121322162&loc=SL121327923-165333"
  },
  "r264": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 14.F)",
   "Topic": "718",
   "URI": "http://asc.fasb.org/extlink&oid=115993241&loc=d3e301413-122809"
  },
  "r265": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Topic": "718",
   "URI": "http://asc.fasb.org/extlink&oid=120383193&loc=d3e11149-113907"
  },
  "r266": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Topic": "718",
   "URI": "http://asc.fasb.org/extlink&oid=120383193&loc=d3e11178-113907"
  },
  "r267": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "718",
   "URI": "http://asc.fasb.org/topic&trid=2228938"
  },
  "r268": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "730",
   "URI": "http://asc.fasb.org/extlink&oid=6420194&loc=d3e21568-108373"
  },
  "r269": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "http://asc.fasb.org/extlink&oid=120406818&loc=d3e31917-109318"
  },
  "r27": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(32))",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r270": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "http://asc.fasb.org/extlink&oid=120406818&loc=d3e31931-109318"
  },
  "r271": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "http://asc.fasb.org/extlink&oid=84230637&loc=d3e32672-109319"
  },
  "r272": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "http://asc.fasb.org/extlink&oid=84230637&loc=d3e32687-109319"
  },
  "r273": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "14",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "http://asc.fasb.org/extlink&oid=84230637&loc=d3e32705-109319"
  },
  "r274": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "17",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "740",
   "URI": "http://asc.fasb.org/extlink&oid=84230637&loc=d3e32809-109319"
  },
  "r275": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "740",
   "URI": "http://asc.fasb.org/extlink&oid=84230637&loc=d3e32537-109319"
  },
  "r276": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "21",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "740",
   "URI": "http://asc.fasb.org/extlink&oid=84230637&loc=d3e32857-109319"
  },
  "r277": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "9",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "740",
   "URI": "http://asc.fasb.org/extlink&oid=84230637&loc=d3e32639-109319"
  },
  "r278": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(d)(2)",
   "Topic": "740"
  },
  "r279": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(d)(3)",
   "Topic": "740"
  },
  "r28": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(4)",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r280": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(e)(1)",
   "Topic": "740"
  },
  "r281": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(e)(2)",
   "Topic": "740"
  },
  "r282": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "10",
   "Subparagraph": "(e)(3)",
   "Topic": "740"
  },
  "r283": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB TOPIC 6.I.5.Q1)",
   "Topic": "740",
   "URI": "http://asc.fasb.org/extlink&oid=116825942&loc=d3e330036-122817"
  },
  "r284": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB TOPIC 6.I.7)",
   "Topic": "740",
   "URI": "http://asc.fasb.org/extlink&oid=116825942&loc=d3e330036-122817"
  },
  "r285": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 6.I.7)",
   "Topic": "740",
   "URI": "http://asc.fasb.org/extlink&oid=116825942&loc=d3e330036-122817"
  },
  "r286": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 6.I.Fact.1)",
   "Topic": "740",
   "URI": "http://asc.fasb.org/extlink&oid=116825942&loc=d3e330036-122817"
  },
  "r287": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 6.I.Fact.2)",
   "Topic": "740",
   "URI": "http://asc.fasb.org/extlink&oid=116825942&loc=d3e330036-122817"
  },
  "r288": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 6.I.Fact.4)",
   "Topic": "740",
   "URI": "http://asc.fasb.org/extlink&oid=116825942&loc=d3e330036-122817"
  },
  "r289": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 11.C)",
   "Topic": "740",
   "URI": "http://asc.fasb.org/extlink&oid=116825942&loc=d3e330215-122817"
  },
  "r29": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(6)(a)(1))",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r290": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "740",
   "URI": "http://asc.fasb.org/extlink&oid=120385591&loc=d3e38679-109324"
  },
  "r291": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "270",
   "Topic": "740",
   "URI": "http://asc.fasb.org/extlink&oid=6424409&loc=d3e44925-109338"
  },
  "r292": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Subparagraph": "(a)",
   "Topic": "740",
   "URI": "http://asc.fasb.org/extlink&oid=6424122&loc=d3e41874-109331"
  },
  "r293": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "740",
   "URI": "http://asc.fasb.org/topic&trid=2144680"
  },
  "r294": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "19",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "810",
   "URI": "http://asc.fasb.org/extlink&oid=108774443&loc=SL4569616-111683"
  },
  "r295": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "20",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "810",
   "URI": "http://asc.fasb.org/extlink&oid=108774443&loc=SL4569643-111683"
  },
  "r296": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "25",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "810",
   "URI": "http://asc.fasb.org/extlink&oid=116870748&loc=SL6758485-165988"
  },
  "r297": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "25",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "810",
   "URI": "http://asc.fasb.org/extlink&oid=116870748&loc=SL6758485-165988"
  },
  "r298": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)(1)",
   "Topic": "810",
   "URI": "http://asc.fasb.org/extlink&oid=109239629&loc=SL4573702-111684"
  },
  "r299": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(1)",
   "Topic": "810",
   "URI": "http://asc.fasb.org/extlink&oid=109239629&loc=SL4573702-111684"
  },
  "r3": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=121566466&loc=d3e6676-107765"
  },
  "r30": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(6)(a)(3))",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r300": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)(3)",
   "Topic": "810",
   "URI": "http://asc.fasb.org/extlink&oid=109239629&loc=SL4573702-111684"
  },
  "r301": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c),(3)",
   "Topic": "810",
   "URI": "http://asc.fasb.org/extlink&oid=109239629&loc=SL4573702-111684"
  },
  "r302": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(bb)",
   "Topic": "810",
   "URI": "http://asc.fasb.org/extlink&oid=121559654&loc=d3e5710-111685"
  },
  "r303": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "810",
   "URI": "http://asc.fasb.org/extlink&oid=121559654&loc=d3e5710-111685"
  },
  "r304": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4J",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Topic": "810",
   "URI": "http://asc.fasb.org/extlink&oid=120409616&loc=SL4591551-111686"
  },
  "r305": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4K",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Topic": "810",
   "URI": "http://asc.fasb.org/extlink&oid=120409616&loc=SL4591552-111686"
  },
  "r306": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "810",
   "URI": "http://asc.fasb.org/topic&trid=2197479"
  },
  "r307": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "820",
   "URI": "http://asc.fasb.org/extlink&oid=117815213&loc=d3e19207-110258"
  },
  "r308": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "820",
   "URI": "http://asc.fasb.org/extlink&oid=117815213&loc=d3e19207-110258"
  },
  "r309": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(bb)",
   "Topic": "820",
   "URI": "http://asc.fasb.org/extlink&oid=117815213&loc=d3e19207-110258"
  },
  "r31": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(6)(a)(4))",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r310": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(bbb)(1)",
   "Topic": "820",
   "URI": "http://asc.fasb.org/extlink&oid=117815213&loc=d3e19207-110258"
  },
  "r311": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(bbb)(2)",
   "Topic": "820",
   "URI": "http://asc.fasb.org/extlink&oid=117815213&loc=d3e19207-110258"
  },
  "r312": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "820",
   "URI": "http://asc.fasb.org/extlink&oid=117815213&loc=d3e19207-110258"
  },
  "r313": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "820",
   "URI": "http://asc.fasb.org/extlink&oid=117815213&loc=d3e19207-110258"
  },
  "r314": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "820",
   "URI": "http://asc.fasb.org/extlink&oid=117815213&loc=d3e19279-110258"
  },
  "r315": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "820",
   "URI": "http://asc.fasb.org/extlink&oid=117815213&loc=SL6742756-110258"
  },
  "r316": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "820",
   "URI": "http://asc.fasb.org/extlink&oid=117815213&loc=SL6742756-110258"
  },
  "r317": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "825",
   "URI": "http://asc.fasb.org/extlink&oid=116690757&loc=d3e13220-108610"
  },
  "r318": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "825",
   "URI": "http://asc.fasb.org/extlink&oid=121572278&loc=d3e13433-108611"
  },
  "r319": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "20",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "825",
   "URI": "http://asc.fasb.org/extlink&oid=121572278&loc=d3e13531-108611"
  },
  "r32": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(6)(a))",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r320": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "21",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "825",
   "URI": "http://asc.fasb.org/extlink&oid=121572278&loc=d3e13537-108611"
  },
  "r321": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "21",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "825",
   "URI": "http://asc.fasb.org/extlink&oid=121572278&loc=d3e13537-108611"
  },
  "r322": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "28",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(f)",
   "Topic": "825",
   "URI": "http://asc.fasb.org/extlink&oid=75031198&loc=d3e14064-108612"
  },
  "r323": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "230",
   "Topic": "830",
   "URI": "http://asc.fasb.org/extlink&oid=98513438&loc=d3e33268-110906"
  },
  "r324": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "17",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Topic": "830",
   "URI": "http://asc.fasb.org/extlink&oid=118261656&loc=d3e32136-110900"
  },
  "r325": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "20",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Subparagraph": "(a)",
   "Topic": "830",
   "URI": "http://asc.fasb.org/extlink&oid=118261656&loc=d3e32211-110900"
  },
  "r326": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "20",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Subparagraph": "(b)",
   "Topic": "830",
   "URI": "http://asc.fasb.org/extlink&oid=118261656&loc=d3e32211-110900"
  },
  "r327": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "20",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Subparagraph": "(c)",
   "Topic": "830",
   "URI": "http://asc.fasb.org/extlink&oid=118261656&loc=d3e32211-110900"
  },
  "r328": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "20",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Subparagraph": "(d)",
   "Topic": "830",
   "URI": "http://asc.fasb.org/extlink&oid=118261656&loc=d3e32211-110900"
  },
  "r329": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "20",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Topic": "830",
   "URI": "http://asc.fasb.org/extlink&oid=118261656&loc=d3e32211-110900"
  },
  "r33": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(6)(b))",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r330": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "30",
   "Topic": "830",
   "URI": "http://asc.fasb.org/extlink&oid=6450520&loc=d3e32583-110901"
  },
  "r331": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "835",
   "URI": "http://asc.fasb.org/extlink&oid=6450988&loc=d3e26243-108391"
  },
  "r332": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Topic": "835",
   "URI": "http://asc.fasb.org/extlink&oid=119993939&loc=d3e28541-108399"
  },
  "r333": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Topic": "835",
   "URI": "http://asc.fasb.org/extlink&oid=119993939&loc=d3e28551-108399"
  },
  "r334": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "30",
   "Topic": "835",
   "URI": "http://asc.fasb.org/extlink&oid=119993939&loc=d3e28555-108399"
  },
  "r335": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "30",
   "Topic": "835",
   "URI": "http://asc.fasb.org/extlink&oid=114775985&loc=d3e28878-108400"
  },
  "r336": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "842",
   "URI": "http://asc.fasb.org/extlink&oid=121603541&loc=SL77918627-209977"
  },
  "r337": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "842",
   "URI": "http://asc.fasb.org/extlink&oid=121603541&loc=SL77918627-209977"
  },
  "r338": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Topic": "842",
   "URI": "http://asc.fasb.org/extlink&oid=121603541&loc=SL77918631-209977"
  },
  "r339": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "842",
   "URI": "http://asc.fasb.org/extlink&oid=121603541&loc=SL77918638-209977"
  },
  "r34": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(6)(c))",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r340": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "842",
   "URI": "http://asc.fasb.org/extlink&oid=121603541&loc=SL77918643-209977"
  },
  "r341": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "842",
   "URI": "http://asc.fasb.org/extlink&oid=121603541&loc=SL77918643-209977"
  },
  "r342": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "20",
   "Subparagraph": "(c)",
   "Topic": "842",
   "URI": "http://asc.fasb.org/extlink&oid=121603541&loc=SL77918643-209977"
  },
  "r343": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)(3)",
   "Topic": "842",
   "URI": "http://asc.fasb.org/extlink&oid=121609121&loc=SL77918673-209980"
  },
  "r344": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "842",
   "URI": "http://asc.fasb.org/extlink&oid=121609121&loc=SL77918673-209980"
  },
  "r345": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(a)",
   "Topic": "842",
   "URI": "http://asc.fasb.org/extlink&oid=121609121&loc=SL77918686-209980"
  },
  "r346": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)",
   "Topic": "842",
   "URI": "http://asc.fasb.org/extlink&oid=121609121&loc=SL77918686-209980"
  },
  "r347": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(g)(1)",
   "Topic": "842",
   "URI": "http://asc.fasb.org/extlink&oid=121609121&loc=SL77918686-209980"
  },
  "r348": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(g)(2)",
   "Topic": "842",
   "URI": "http://asc.fasb.org/extlink&oid=121609121&loc=SL77918686-209980"
  },
  "r349": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(g)(3)",
   "Topic": "842",
   "URI": "http://asc.fasb.org/extlink&oid=121609121&loc=SL77918686-209980"
  },
  "r35": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(7))",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r350": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(g)(4)",
   "Topic": "842",
   "URI": "http://asc.fasb.org/extlink&oid=121609121&loc=SL77918686-209980"
  },
  "r351": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "842",
   "URI": "http://asc.fasb.org/extlink&oid=121609121&loc=SL77918686-209980"
  },
  "r352": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "842",
   "URI": "http://asc.fasb.org/extlink&oid=121609121&loc=SL77918701-209980"
  },
  "r353": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "53",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Topic": "842",
   "URI": "http://asc.fasb.org/extlink&oid=121568110&loc=SL77918982-209971"
  },
  "r354": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(bb)(1)",
   "Topic": "860",
   "URI": "http://asc.fasb.org/extlink&oid=121570589&loc=d3e107207-111719"
  },
  "r355": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(bb)(2)",
   "Topic": "860",
   "URI": "http://asc.fasb.org/extlink&oid=121570589&loc=d3e107207-111719"
  },
  "r356": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(bb)(3)",
   "Topic": "860",
   "URI": "http://asc.fasb.org/extlink&oid=121570589&loc=d3e107207-111719"
  },
  "r357": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)(1)",
   "Topic": "860",
   "URI": "http://asc.fasb.org/extlink&oid=121570589&loc=d3e107207-111719"
  },
  "r358": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)(2)",
   "Topic": "860",
   "URI": "http://asc.fasb.org/extlink&oid=121570589&loc=d3e107207-111719"
  },
  "r359": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(c)(3)",
   "Topic": "860",
   "URI": "http://asc.fasb.org/extlink&oid=121570589&loc=d3e107207-111719"
  },
  "r36": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02(8))",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r360": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)(1)",
   "Topic": "860",
   "URI": "http://asc.fasb.org/extlink&oid=121570589&loc=d3e107314-111719"
  },
  "r361": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)(2)",
   "Topic": "860",
   "URI": "http://asc.fasb.org/extlink&oid=121570589&loc=d3e107314-111719"
  },
  "r362": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Subparagraph": "(b)(3)",
   "Topic": "860",
   "URI": "http://asc.fasb.org/extlink&oid=121570589&loc=d3e107314-111719"
  },
  "r363": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "6",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "910",
   "URI": "http://asc.fasb.org/extlink&oid=119991564&loc=SL119991595-234733"
  },
  "r364": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SAB Topic 11.L)",
   "Topic": "924",
   "URI": "http://asc.fasb.org/extlink&oid=6472922&loc=d3e499488-122856"
  },
  "r365": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "20",
   "Subparagraph": "(f)(1)",
   "Topic": "926",
   "URI": "http://asc.fasb.org/extlink&oid=120154821&loc=SL120154904-197079"
  },
  "r366": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "20",
   "Subparagraph": "(f)(2)",
   "Topic": "926",
   "URI": "http://asc.fasb.org/extlink&oid=120154821&loc=SL120154904-197079"
  },
  "r367": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "20",
   "Subparagraph": "(f)(3)",
   "Topic": "926",
   "URI": "http://asc.fasb.org/extlink&oid=120154821&loc=SL120154904-197079"
  },
  "r368": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "25",
   "SubTopic": "20",
   "Topic": "940",
   "URI": "http://asc.fasb.org/extlink&oid=68072869&loc=d3e41242-110953"
  },
  "r369": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.9-03(1)(a))",
   "Topic": "942",
   "URI": "http://asc.fasb.org/extlink&oid=120398452&loc=d3e534808-122878"
  },
  "r37": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.1)",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r370": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.9-03(11))",
   "Topic": "942",
   "URI": "http://asc.fasb.org/extlink&oid=120398452&loc=d3e534808-122878"
  },
  "r371": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.9-03(15)(1))",
   "Topic": "942",
   "URI": "http://asc.fasb.org/extlink&oid=120398452&loc=d3e534808-122878"
  },
  "r372": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.9-03(15)(5))",
   "Topic": "942",
   "URI": "http://asc.fasb.org/extlink&oid=120398452&loc=d3e534808-122878"
  },
  "r373": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.9-03(23))",
   "Topic": "942",
   "URI": "http://asc.fasb.org/extlink&oid=120398452&loc=d3e534808-122878"
  },
  "r374": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.9-03.15(5))",
   "Topic": "942",
   "URI": "http://asc.fasb.org/extlink&oid=120398452&loc=d3e534808-122878"
  },
  "r375": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.9-03.17)",
   "Topic": "942",
   "URI": "http://asc.fasb.org/extlink&oid=120398452&loc=d3e534808-122878"
  },
  "r376": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.9-04(15))",
   "Topic": "942",
   "URI": "http://asc.fasb.org/extlink&oid=120399700&loc=SL114874048-224260"
  },
  "r377": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.9-04(23))",
   "Topic": "942",
   "URI": "http://asc.fasb.org/extlink&oid=120399700&loc=SL114874048-224260"
  },
  "r378": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.9-04(26))",
   "Topic": "942",
   "URI": "http://asc.fasb.org/extlink&oid=120399700&loc=SL114874048-224260"
  },
  "r379": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.9-04(27))",
   "Topic": "942",
   "URI": "http://asc.fasb.org/extlink&oid=120399700&loc=SL114874048-224260"
  },
  "r38": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.14)",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r380": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.9-04.9)",
   "Topic": "942",
   "URI": "http://asc.fasb.org/extlink&oid=120399700&loc=SL114874048-224260"
  },
  "r381": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "235",
   "Subparagraph": "(SX 210.9-05(b)(2))",
   "Topic": "942",
   "URI": "http://asc.fasb.org/extlink&oid=120399901&loc=d3e537907-122884"
  },
  "r382": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "470",
   "Topic": "942",
   "URI": "http://asc.fasb.org/extlink&oid=75038535&loc=d3e64711-112823"
  },
  "r383": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03(a)(12))",
   "Topic": "944",
   "URI": "http://asc.fasb.org/extlink&oid=120400017&loc=d3e572229-122910"
  },
  "r384": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03(a)(15)(a))",
   "Topic": "944",
   "URI": "http://asc.fasb.org/extlink&oid=120400017&loc=d3e572229-122910"
  },
  "r385": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03(a)(15)(b)(1))",
   "Topic": "944",
   "URI": "http://asc.fasb.org/extlink&oid=120400017&loc=d3e572229-122910"
  },
  "r386": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03(a)(2))",
   "Topic": "944",
   "URI": "http://asc.fasb.org/extlink&oid=120400017&loc=d3e572229-122910"
  },
  "r387": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03(a)(23)(a)(3))",
   "Topic": "944",
   "URI": "http://asc.fasb.org/extlink&oid=120400017&loc=d3e572229-122910"
  },
  "r388": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03(a)(23)(a)(4))",
   "Topic": "944",
   "URI": "http://asc.fasb.org/extlink&oid=120400017&loc=d3e572229-122910"
  },
  "r389": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03(a)(25))",
   "Topic": "944",
   "URI": "http://asc.fasb.org/extlink&oid=120400017&loc=d3e572229-122910"
  },
  "r39": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.17)",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r390": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03(a)(8))",
   "Topic": "944",
   "URI": "http://asc.fasb.org/extlink&oid=120400017&loc=d3e572229-122910"
  },
  "r391": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "210",
   "Subparagraph": "(SX 210.7-03.(a),19)",
   "Topic": "944",
   "URI": "http://asc.fasb.org/extlink&oid=120400017&loc=d3e572229-122910"
  },
  "r392": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.7-04(19))",
   "Topic": "944",
   "URI": "http://asc.fasb.org/extlink&oid=120400993&loc=SL114874131-224263"
  },
  "r393": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.7-04(22))",
   "Topic": "944",
   "URI": "http://asc.fasb.org/extlink&oid=120400993&loc=SL114874131-224263"
  },
  "r394": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.7-04(23))",
   "Topic": "944",
   "URI": "http://asc.fasb.org/extlink&oid=120400993&loc=SL114874131-224263"
  },
  "r395": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.7-04(8))",
   "Topic": "944",
   "URI": "http://asc.fasb.org/extlink&oid=120400993&loc=SL114874131-224263"
  },
  "r396": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "220",
   "Subparagraph": "(SX 210.7-04(9))",
   "Topic": "944",
   "URI": "http://asc.fasb.org/extlink&oid=120400993&loc=SL114874131-224263"
  },
  "r397": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4H",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "40",
   "Topic": "944",
   "URI": "http://asc.fasb.org/extlink&oid=116884468&loc=SL65671331-158438"
  },
  "r398": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "7A",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "40",
   "Subparagraph": "(d)",
   "Topic": "944",
   "URI": "http://asc.fasb.org/extlink&oid=121643868&loc=SL117782755-158439"
  },
  "r399": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13H",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "40",
   "Subparagraph": "(a)",
   "Topic": "944",
   "URI": "http://asc.fasb.org/extlink&oid=121639165&loc=SL117783719-158441"
  },
  "r4": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=121566466&loc=d3e6676-107765"
  },
  "r40": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.19(a))",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r400": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13H",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "40",
   "Subparagraph": "(b)",
   "Topic": "944",
   "URI": "http://asc.fasb.org/extlink&oid=121639165&loc=SL117783719-158441"
  },
  "r401": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13H",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "40",
   "Subparagraph": "(c)",
   "Topic": "944",
   "URI": "http://asc.fasb.org/extlink&oid=121639165&loc=SL117783719-158441"
  },
  "r402": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "29F",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "40",
   "Topic": "944",
   "URI": "http://asc.fasb.org/extlink&oid=121639165&loc=SL117819544-158441"
  },
  "r403": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(e)",
   "Topic": "944",
   "URI": "http://asc.fasb.org/extlink&oid=121370832&loc=SL117420844-207641"
  },
  "r404": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(f)(1)",
   "Topic": "944",
   "URI": "http://asc.fasb.org/extlink&oid=121370832&loc=SL117420844-207641"
  },
  "r405": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(f)(2)",
   "Topic": "944",
   "URI": "http://asc.fasb.org/extlink&oid=121370832&loc=SL117420844-207641"
  },
  "r406": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(g)(2)(i)",
   "Topic": "944",
   "URI": "http://asc.fasb.org/extlink&oid=121370832&loc=SL117420844-207641"
  },
  "r407": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(g)(2)(ii)",
   "Topic": "944",
   "URI": "http://asc.fasb.org/extlink&oid=121370832&loc=SL117420844-207641"
  },
  "r408": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(g)(2)(iii)",
   "Topic": "944",
   "URI": "http://asc.fasb.org/extlink&oid=121370832&loc=SL117420844-207641"
  },
  "r409": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(g)(2)(iv)",
   "Topic": "944",
   "URI": "http://asc.fasb.org/extlink&oid=121370832&loc=SL117420844-207641"
  },
  "r41": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.19(b),22(b))",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r410": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "65",
   "SubTopic": "40",
   "Subparagraph": "(h)(2)",
   "Topic": "944",
   "URI": "http://asc.fasb.org/extlink&oid=121370832&loc=SL117420844-207641"
  },
  "r411": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "825",
   "Topic": "944",
   "URI": "http://asc.fasb.org/extlink&oid=99380617&loc=SL75241803-196195"
  },
  "r412": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "310",
   "Subparagraph": "(SX 210.12-29(Footnote 4))",
   "Topic": "948",
   "URI": "http://asc.fasb.org/extlink&oid=120402547&loc=d3e617274-123014"
  },
  "r413": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "210",
   "Topic": "954",
   "URI": "http://asc.fasb.org/extlink&oid=120413173&loc=SL116631458-115580"
  },
  "r414": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "360",
   "Subparagraph": "(SX 210.12-28(Column B))",
   "Topic": "970",
   "URI": "http://asc.fasb.org/extlink&oid=120402810&loc=d3e638233-123024"
  },
  "r415": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "360",
   "Subparagraph": "(SX 210.12-28(Column C))",
   "Topic": "970",
   "URI": "http://asc.fasb.org/extlink&oid=120402810&loc=d3e638233-123024"
  },
  "r416": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "360",
   "Subparagraph": "(SX 210.12-28(Column D))",
   "Topic": "970",
   "URI": "http://asc.fasb.org/extlink&oid=120402810&loc=d3e638233-123024"
  },
  "r417": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "360",
   "Subparagraph": "(SX 210.12-28(Column E))",
   "Topic": "970",
   "URI": "http://asc.fasb.org/extlink&oid=120402810&loc=d3e638233-123024"
  },
  "r418": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "360",
   "Subparagraph": "(SX 210.12-28(Column F))",
   "Topic": "970",
   "URI": "http://asc.fasb.org/extlink&oid=120402810&loc=d3e638233-123024"
  },
  "r419": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "360",
   "Subparagraph": "(SX 210.12-28(Column G))",
   "Topic": "970",
   "URI": "http://asc.fasb.org/extlink&oid=120402810&loc=d3e638233-123024"
  },
  "r42": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.19)",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r420": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "360",
   "Subparagraph": "(SX 210.12-28(Column H))",
   "Topic": "970",
   "URI": "http://asc.fasb.org/extlink&oid=120402810&loc=d3e638233-123024"
  },
  "r421": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "360",
   "Subparagraph": "(SX 210.12-28(Column I))",
   "Topic": "970",
   "URI": "http://asc.fasb.org/extlink&oid=120402810&loc=d3e638233-123024"
  },
  "r422": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "360",
   "Subparagraph": "(SX 210.12-28(Footnote 2))",
   "Topic": "970",
   "URI": "http://asc.fasb.org/extlink&oid=120402810&loc=d3e638233-123024"
  },
  "r423": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "20",
   "Topic": "985",
   "URI": "http://asc.fasb.org/extlink&oid=6501960&loc=d3e128462-111756"
  },
  "r424": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "b"
  },
  "r425": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "d1-1"
  },
  "r426": {
   "Name": "Form 10-Q",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "308",
   "Subsection": "a"
  },
  "r427": {
   "Name": "Forms 10-K, 10-Q, 20-F",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "13",
   "Subsection": "a-1"
  },
  "r428": {
   "Name": "Regulation 12B",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "b-2"
  },
  "r429": {
   "Name": "Regulation S-T",
   "Number": "232",
   "Publisher": "SEC",
   "Section": "405"
  },
  "r43": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.19-26)",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r44": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.20)",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r45": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.21)",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r46": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.22)",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r47": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.24)",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r48": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.25)",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r49": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.29-31)",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r5": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(g)(3)",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=121566466&loc=d3e6676-107765"
  },
  "r50": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.6(a))",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r51": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.8,17)",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r52": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-02.9)",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=120391452&loc=d3e13212-122682"
  },
  "r53": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "16",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "20",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=99393222&loc=SL20226024-175313"
  },
  "r54": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a),(b),(c)",
   "Topic": "220",
   "URI": "http://asc.fasb.org/extlink&oid=121641772&loc=SL7669646-108580"
  },
  "r55": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(i),(j),(k)",
   "Topic": "220",
   "URI": "http://asc.fasb.org/extlink&oid=121641772&loc=SL7669646-108580"
  },
  "r56": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(i-k)",
   "Topic": "220",
   "URI": "http://asc.fasb.org/extlink&oid=121641772&loc=SL7669646-108580"
  },
  "r57": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "10A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "http://asc.fasb.org/extlink&oid=121641772&loc=SL7669646-108580"
  },
  "r58": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "11",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "http://asc.fasb.org/extlink&oid=121641772&loc=d3e637-108580"
  },
  "r59": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "14",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "http://asc.fasb.org/extlink&oid=121641772&loc=d3e681-108580"
  },
  "r6": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=121566466&loc=d3e6676-107765"
  },
  "r60": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "14A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "http://asc.fasb.org/extlink&oid=121641772&loc=SL7669686-108580"
  },
  "r61": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "17B",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "http://asc.fasb.org/extlink&oid=121641772&loc=SL34724394-108580"
  },
  "r62": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "220",
   "URI": "http://asc.fasb.org/extlink&oid=121641772&loc=SL7669619-108580"
  },
  "r63": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "220",
   "URI": "http://asc.fasb.org/extlink&oid=121641772&loc=SL7669619-108580"
  },
  "r64": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1A",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "220",
   "URI": "http://asc.fasb.org/extlink&oid=121641772&loc=SL7669619-108580"
  },
  "r65": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "220",
   "URI": "http://asc.fasb.org/extlink&oid=121641772&loc=SL7669625-108580"
  },
  "r66": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1B",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "220",
   "URI": "http://asc.fasb.org/extlink&oid=121641772&loc=SL7669625-108580"
  },
  "r67": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "5",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "http://asc.fasb.org/extlink&oid=121641772&loc=d3e557-108580"
  },
  "r68": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "55",
   "SubTopic": "10",
   "Topic": "220",
   "URI": "http://asc.fasb.org/extlink&oid=121640130&loc=d3e1436-108581"
  },
  "r69": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(210.5-03(11))",
   "Topic": "220",
   "URI": "http://asc.fasb.org/extlink&oid=120395209&loc=SL114868664-224227"
  },
  "r7": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=121566466&loc=d3e6787-107765"
  },
  "r70": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03(1))",
   "Topic": "220",
   "URI": "http://asc.fasb.org/extlink&oid=120395209&loc=SL114868664-224227"
  },
  "r71": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03(10))",
   "Topic": "220",
   "URI": "http://asc.fasb.org/extlink&oid=120395209&loc=SL114868664-224227"
  },
  "r72": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03(21))",
   "Topic": "220",
   "URI": "http://asc.fasb.org/extlink&oid=120395209&loc=SL114868664-224227"
  },
  "r73": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03(24))",
   "Topic": "220",
   "URI": "http://asc.fasb.org/extlink&oid=120395209&loc=SL114868664-224227"
  },
  "r74": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03(25))",
   "Topic": "220",
   "URI": "http://asc.fasb.org/extlink&oid=120395209&loc=SL114868664-224227"
  },
  "r75": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03(4))",
   "Topic": "220",
   "URI": "http://asc.fasb.org/extlink&oid=120395209&loc=SL114868664-224227"
  },
  "r76": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03.1,2)",
   "Topic": "220",
   "URI": "http://asc.fasb.org/extlink&oid=120395209&loc=SL114868664-224227"
  },
  "r77": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03.2(a),(d))",
   "Topic": "220",
   "URI": "http://asc.fasb.org/extlink&oid=120395209&loc=SL114868664-224227"
  },
  "r78": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03.4)",
   "Topic": "220",
   "URI": "http://asc.fasb.org/extlink&oid=120395209&loc=SL114868664-224227"
  },
  "r79": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03.7(b))",
   "Topic": "220",
   "URI": "http://asc.fasb.org/extlink&oid=120395209&loc=SL114868664-224227"
  },
  "r8": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "3",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=121566466&loc=d3e6801-107765"
  },
  "r80": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03.7)",
   "Topic": "220",
   "URI": "http://asc.fasb.org/extlink&oid=120395209&loc=SL114868664-224227"
  },
  "r81": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.5-03.9)",
   "Topic": "220",
   "URI": "http://asc.fasb.org/extlink&oid=120395209&loc=SL114868664-224227"
  },
  "r82": {
   "Name": "Accounting Standards Codification",
   "Publisher": "FASB",
   "Topic": "220",
   "URI": "http://asc.fasb.org/topic&trid=2134417"
  },
  "r83": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "12",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "230",
   "URI": "http://asc.fasb.org/extlink&oid=121586364&loc=d3e3179-108585"
  },
  "r84": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "13",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(c)",
   "Topic": "230",
   "URI": "http://asc.fasb.org/extlink&oid=121586364&loc=d3e3213-108585"
  },
  "r85": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "14",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "230",
   "URI": "http://asc.fasb.org/extlink&oid=121586364&loc=d3e3255-108585"
  },
  "r86": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "15",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "230",
   "URI": "http://asc.fasb.org/extlink&oid=121586364&loc=d3e3291-108585"
  },
  "r87": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "2",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "http://asc.fasb.org/extlink&oid=121586364&loc=d3e3000-108585"
  },
  "r88": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "24",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "http://asc.fasb.org/extlink&oid=121586364&loc=d3e3521-108585"
  },
  "r89": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "25",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "http://asc.fasb.org/extlink&oid=121586364&loc=d3e3536-108585"
  },
  "r9": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "210",
   "URI": "http://asc.fasb.org/extlink&oid=121566466&loc=d3e6812-107765"
  },
  "r90": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "28",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(a)",
   "Topic": "230",
   "URI": "http://asc.fasb.org/extlink&oid=121586364&loc=d3e3602-108585"
  },
  "r91": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "28",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Subparagraph": "(b)",
   "Topic": "230",
   "URI": "http://asc.fasb.org/extlink&oid=121586364&loc=d3e3602-108585"
  },
  "r92": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "28",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "http://asc.fasb.org/extlink&oid=121586364&loc=d3e3602-108585"
  },
  "r93": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "4",
   "Publisher": "FASB",
   "Section": "45",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "http://asc.fasb.org/extlink&oid=121586364&loc=d3e3044-108585"
  },
  "r94": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "8",
   "Publisher": "FASB",
   "Section": "50",
   "SubTopic": "10",
   "Topic": "230",
   "URI": "http://asc.fasb.org/extlink&oid=121583591&loc=SL98516268-108586"
  },
  "r95": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.4-08(e)(1))",
   "Topic": "235",
   "URI": "http://asc.fasb.org/extlink&oid=120395691&loc=d3e23780-122690"
  },
  "r96": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.4-08(g)(1)(ii))",
   "Topic": "235",
   "URI": "http://asc.fasb.org/extlink&oid=120395691&loc=d3e23780-122690"
  },
  "r97": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.4-08(h))",
   "Topic": "235",
   "URI": "http://asc.fasb.org/extlink&oid=120395691&loc=d3e23780-122690"
  },
  "r98": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.4-08(m)(1)(iii))",
   "Topic": "235",
   "URI": "http://asc.fasb.org/extlink&oid=120395691&loc=d3e23780-122690"
  },
  "r99": {
   "Name": "Accounting Standards Codification",
   "Paragraph": "1",
   "Publisher": "FASB",
   "Section": "S99",
   "SubTopic": "10",
   "Subparagraph": "(SX 210.4-08.(e),(f))",
   "Topic": "235",
   "URI": "http://asc.fasb.org/extlink&oid=120395691&loc=d3e23780-122690"
  }
 },
 "version": "2.1"
}
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>ZIP
<SEQUENCE>73
<FILENAME>0001558370-21-010725-xbrl.zip
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
begin 644 0001558370-21-010725-xbrl.zip
M4$L#!!0    ( )%6!E,NRU7Q60X  )BB   1    86-L<RTR,#(Q,#8S,"YX
M<V3M7>MSVS82_WXS]S_@].&N-U-9DA])[(O;\2/.>,:.?);2]CYU8!*2,*%
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MNTX"5&]%Q<X[A0YNTX8/^$EL82 DB"7Q\7GDMYB*X]KT1@/ZS=;R:$#B _R
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M7K?;;YUT.R>#;K/;K&H#5*34'7JY0="X(<CE1 Y'X)V8/N=<Q%Z4T;P27,C
M:ADM"5,E<E=*]W>?_OCBB9MCF![?\IR[1;@F3I6X7"GC5\0C[ D[GWW?T6-<
MGG.W&-?$J3*FN.7*%[S3">W@.^(;)(.95NW;:J[6OI$\*Q98E]IWR0[BWGG.
M1*9?RQ)7=.U9ABX7+F*,C @T#'.O"E#,;5XIS>=KZ6ZSTA!-K82S,15>#%&4
M;?=H+L"VP:[0AZ.YQ:,8]MO_ 5!+ P04    " "15@93HH1&2?4=  #[Z0$
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M*;# /2/U6>>,5/$I?[&TKU/Y$YV6JB]HIE5Z14 8I(?EJT>H%.MTX3R5(A0
M(^R:8,Q#/I*RA@]9:9E:R<MEP_D92"F=43H^ZI^?G)H_>=4L44R( +@KQ(2$
M1[$8Y2 XG4+3*R<C5^0'H/V!ZWK9\Q]MS[T-+NV9%]N^D E)'0C.H#(K$BP
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M+Q+/=V4IU^N%( 1J-8RT2-4ZE%9\#-M'-/J"R Q]83LB%X-3$D(X25/!0CP
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M^_2R_X0(LB@5YHQBC;0,(=BF.>(U@AN:F5RA,<)D/;L2,SL)_(!X<YBH H0
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M*3?7\0M?(21L_PL+,WJ9O*H\LK$A<F]4*U<OC7;<"K$7:H3M7\ K)TD$S;.
M$W55NLRZ<F+%G8*KK1+&W<VGJ7PG-'E*N4P9O)B>,\54]K#<&,@3!ELV$#L1
M0.^T78VAKW.HZHW:R3LK8;EZWV&;K:Q*['B/;4*;7*RA2)(H>%39"$M3FDGH
MJ#PY['!3[-0@2]]/=G&6WE.?AB]P1F1LR\:NLP,*M0'T$'':;U;@H!'?,BP4
MG,B!E:ODN4G,4.K+E/JZ=/@B7@J5B?%M?6;GX@TJZWV[TF%63MTDMV5OKK#
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MH<J22)Y$,K4+$3](D\3T&>I\= :)T2P#S^/*L!(NJD DZ;3RB$F]R[:V<X0
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M0TU4 GU?0M@1?K!>\[DCY$S5@C').9.2=8Z@P%P :\&> '^W%X6<6>OF<&$
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MIM'8*XA;O+=0E.6^COE?R89#S=O5VY;&*3VG,5V=;/D:=T+JB-V4+J\6M/;
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M1F*%W 7&-' MQV $/H@=<E1UAQW:"XZD*A:IRD7.]Z3:,)>-2%"H0 -L?8&
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M9 L.?O4&Q]YZIS+KB=S5.JA?=4"#;HC=LHOT_<MY21XBL:/"A>1L''OQI":
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M'L2XX7_Q#XN/\O[__/\!4$L#!!0    ( )%6!E,@<J772#P  #)0!  5
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MXP*M/-+,\@DJX7/B("<X]K#9G:+%%-9WP"1IJM$J6DWP__'2^6I[>(E!T'L
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M8>K+5*RA=^XA*!HP9N)6NRB.>^CZCKNR/8Z!8/;I.23$^#%QW[OS&NOT&:W
M/IC=^M?OS@(_EW$30+F++ TH]A!%;7.[GTUNA_[C W@%?BSI+0Z/!KO>8D:G
M+TYA-MP;!)]\@_"[&RTNXS *E@!RO$7AWBI,!%*+_?("\2D\@L5TG@V6]: =
MJXMVDUQ2=<79+\VG7F^IW<-@%CO1%#X"^.HZM&?O2,W*W W4:U%:%5MM2O&H
MI0;#B3_+!AY>!3@.0E=CM:TVNI12!%%_@LPI?WV-DF_R';P]KD.<19'!E_C(
M&JNICKH45,I.CH@,@\KU67\&R[\W:H"U93.VMS?3.GQP5/748TN8H TS9U?]
M!T>U4"!C7&45\OGHLQ)K/SC:,R5R^3#DP5'*ZG''>7&4UTT;U;>P2C;BN=-
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M,\66@Z?2HM%HDV<]DXVD087F\ZV/[ K VY;)*YK#V&X^!6C:+P/_,0J<GXO
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M08&AT2H8Y!DU!!6/BP!&3V+O%A/;:H>"^K9=G#]]DYDJ/# M/*6U=CH5UXR
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MNG(Y.$[K1PK#)E_".V(#=E<NS=^4HH1!3-%HB)I2M#+B5/-$8\MFIFT7V^[
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M2 L>82:1BX1'X5"91\N2#4F1^,ZXS7%)=9G%<9IKL&H4$!3-5;J'@3.&Z?6
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MLKEV/*3%5HJ9T2MD( B2Q!&6B#VH4\)3^_T.[&E26R8WO?I9"/\1!H;2:19
M!T6P92,CSV>$91::3X7I3WOX\B)/.&)/B;CYG>IGN$JQG>APF4*M7JGGH7FX
MW2"_6,O<;9A_87C]Q2U%V0ME.UA^<L!(<P.5ZB5$-^%.@1RLWBL)S4IHGIN0
MQ^'4YN\KDLEMD%6A$5G"&5(0%1(5"%G%!1%A1(%22$7"5)%B,6(;9-W>(=,R
M$%F"%E2&E05"9!A!8E%9H("D*#*% 8"SAW<H.$&P\** BE"7$!2B"BPAB@)0
M59QE,1;(*')P1T<66B3?];L9E>.I+#/K%1A;1M"4@ E/6NH-E/! 4[ X2LC4
MJN9<9_+*"+;$MBU/<\;WAC]8B-TN6P5+B/)FZ7'G-H5KOJ+OV;L?-BN^X2\'
MZ\+[BWN;-LB3]5S/V75L;YWLYB4/W]YY\@3[/_M"\J9YPL89W/7ECGWQ49>3
MYS>LV[TR#WH8)>85ZAX\S<,IV!^.^\<,UL'*Z1U.OZK[7YY8N4'=HZECSP-U
M]N$!E(W5+UJR[< 95?BLL-!2)DCC=%896]F&4R!8IQ-&M'6-6B# Z>!TKLD/
MQ>D(OAAYQ17( D-<B$%^S6E3J<\7^"<\?!X!EY;Y2 CI&62P(RZ+V\PZ.7S>
MOAL*I0]S3"GODRL:Z:7S*:ZH-)<-)A6\\A7IPXDDRJ ,R5(OR]^UZY&_0N F
MX!32AG-()S'Q'<U5-#F<1MKJ/Y*3^/%;VT=ZV-89B9:V#K__'8/Q*L#X5['5
M3G#FU+!7P-GP]1 ZB9I]]W<D8C&1FG6?78>E%,4!KKO]IP+9BNY-H_/KZJ0^
M6S$D(K;Q;E4CT603?6T:C2),(@/A[*P2!<TP$EE'FS]O2+_6.&;@Q[K3L1?6
MWBBV"J;)][7Q2J]/\'*?SG/EV>BU44R#>;!X=73<7KKO]I45KHMY:-L1"55\
MW6G ET%-OK_2Y2M"!_/=&H?D,64L%PFR7.^^-BQ5T75%>>R[P NR,]\X.!<*
M26U);]APG(VA-GWP24/":WH=5\QD8864%V1C.@5,MN>_ML2'H"Q*?BZ*_MK2
M%40HI@[DIC85C018 MD/\EOASU"; _<V 2\9?F!T$FMM"@=8 =<4JOC\>.I?
MYQ;30$VE'" ^$LR)T]"S<F'1X7UUZ.$KK)L'X#7!9&GFS3C\^S*Y:Q4;NDB-
ML6T]#1!/F_E.OBK:#J<Y#8'+IE.SAO<:J31#)PD$03X9AJW[Z& @O2C]RTUX
MP #3@-!M['T?@W :*WXX"/\\!3E2*'QW-[<Q1PF%_]$4+J ,0 6"4!E!HE$6
M?L55&L5IE$9W\<$/)$RS A_Z)XK=L>1CQ?AP7M\VF@P<H"2FON/Z05C9LQ.P
M1>AYH]A?TM^!3@_6\5*R]_.CQ_^E;GX8!V@&%2E5)>"X([A ,*@LL(B""S0N
MH0JM2@P@U<>Q7'R\F+).39CQFC<GG?%J(5:2N_#00<M*TLX*&% E7LMB%7,Q
M8OWDNADHIL<M,T.F7^KTM36R6O=+=:&;:J/5T7;2OQ>EED0*!S++"@2FB/ /
M30H2I2B"C",,S0),4@!]> >I,@0"5%20:86 =S"2(&&X)* 202D8(ZLB==@;
M086CQB*4(E"T" 1"!;0@,3@NX(J"23A%((I*'=Y!B"(-)1D(.*W2 @%45F )
M# @8*@(XFK)((^#R<>[-U);![UCTO6%L'+TCT>?FQPGRCMAN4@H_/=H_M?>R
MX%A,U; 7.\G<?4\&N2\_):AQ]>0"CLFK>[+NKXN2:QN^!W[M\B3.NQ/K8Z+B
MX6ZH[=\3 Q0X>8<2,0,^D0'X'8['##@3 ]X2DMWJHD>;T*;+1UO0MM=#!?GL
M56?+F&<N;W;[/;[XK R@Y+T0!!\_;OA?\<<ZFK?9?PG@'#\A!\<3ORGZN54N
M\8@^C*@CAI, -\P:?-M@;A1%/)CW@UG;IF>$T@F6\C@H_9Z +O1BK,%?'OSL
M/UNBB?7!)>.VVPG2"L6D4.W<+]NA\ZG6K]2Z'2[?I[FJ9V4=9=+<Y(($F6Z0
MW^'1)K>)_T;N$ 1-3$4G,0\._/Z#E>)8=WT.][=Z<9-,?<_Z'A![,T46.$24
M9<0J$(/BR@B2>^#$*I6IM-_'X%B?OBV/)-"P9UF@V$&?VZKP0*_?RP#2%G%W
MC:;K.J#EBL5,,&;*-3<)7C715<19(F_8DF@DVL  LI<(=F@"[Y55^H]=RSP(
MJ^!WV(F.[>>$WU[H9]%2@O5?D)!6"7D,9#T15*N"YA2$^0!!0&HO%?(O=!LW
M'HMNF&BL)$3#@"V"G15!F&OF:T&0R[,3$M@V@ _>QKGN]PS83F)ON\ V[K47
M+MM)11 +"ZQ]L%,@H<"KT(T*FDX=((/0J4*QS3/"#6-NXB_X9"C#"=>'SH [
MMH,<S5TVO#<6O<?T+,3#3H>YT^'-6Y+^ODV(EI+X"]NC6X)P@(VD22!Z\*:P
M/;PSZ,_V8<'&$S?L2=A=T?42++)Y@B*NW+N#7/>S+X9E?,>!'=KL?PE4KB=Z
MOKL7BF_TA.D:R/,IWR.DK,07W)6"C6Y^#X+".X>@VO;YV3(Q3S;)[&U #64[
ML7E"S?[3)Q&[)]U=T8K6-KA'40Q0% 831%)F!4*A4$%$<:C8*!Q#%%1A5?'C
M*AQ\//P#Z8>";VJ>!_$2ZE['M@)3:ZP2P6KY*E$,;(PHAZN16=$3$\'F@,>*
MX>$9^]'PEF^ (T*QO[,- C^,;L">$P@9J(86&/F;<SL3[63G.261^"#]L.GX
M/>*!^_==(K'C\]EQO#>VP=!N8;V'XT)7[/FU:F.":#TM1\C">C)O-\^#XU-X
ME$C<P_S(35\7[5'$KN8FQ(0![P<)Z%E#[#K!<:>A%#N!D3OZ:P)*3/+(!=>$
MD(?O<'8F!8J["<E?W0:V'3X,6L"@IZ/$R+$7WGAW^0Y:>1#V3 G.60VCCF$R
M0S"(&/+KN?Z%E]%?NV:O-GB^?[N&@57?-GZFK[N6FK6GF>!4-8GM5NKVW91K
M$L^M,<))4F$ 10N ILC-:A8KD;2 T1**2'#V1=./=H)(*H.0)$L+B$HJ H$#
M5F!(3!$D251Q/%BF(L5'JUF4C,IB4%A9Q66!0*'*8VA9%%"6H15*PEF&>+3&
M!DB,4C 1=D-B$($ #"ZP%([#%Y$H+@%X@R0=WD'#WR4,:CLY6'PD1 6:5QR^
M",<E!8,]8W#B<-T1=H&F:!P7!04A)($@)480@<@**M3&@!!924$>T<'(M )P
M%@@B+4$Z2!I2SN"4H! R)<*'R*QXN&(I4"1*420F"BK!PM$5$7@O 3"!5BD:
MPZ&AIPCR.^]7B<B:QNGK-V]*8CXS=?O5!)\0>HV+-A^15QU5B=H&H.-]7_&^
MKW/O^]K4E Y=HL S'-G.ZDRYQ<&TSLELW[$W!3%]55M+E#OD>[V4P6=4NI_N
M+VY^5XY[=A\_+8EWHUS#;I348T%X=S3HZ^S)JAV;<WW@^,3 B# PVL_-7#<"
MD/C$BDH;Q1]V,.V[D"YW/X;<X52,FS4- P'Y:@:1/'S94A?'/( WB.Q7W7;Y
M\8(=8S=B7'TF),H=#S8]%T6^/+YW'<R'_<MLNK>'<Q?54FK:J93Y%4+61)YM
MIWN-U#EQ?OE-J.2GKM*^FJ3_C&@5U1<BK\%VE*/A8DU]O,(3KNM O\.RPV49
MW]U$;&$7-_4[CQ0:LYWP/<8J>/%"@Z\-9-J"]-N!*8-C&?HQEFC)FF@$TX"@
M5$28%;<]#,5-!)LA->6Y'1+X7^+?1^.NB<0#=M[I'7WNAHLW"-UN<P'& HDA
M24$!:+#EA5$%EA)5 :$4@B95A57)7:CT0J3]P9*$.P:&<:\&_X+R%RX-;$HM
MG1!XWR[,#X![=#G]$QRD@*"G>I-+YMIII)YI<OY:L]*5)NO(U,?Z1_>K;8GW
M3J"O:AU#11B$EG!:8"6)"F+S2K#SBQ!(A*!16J11A&(>K1@@!"D!!H,(0A"!
MD%E58!25$E2 JA2+LR2*/XKFBS(C DIE!$:4)8%@)4R0$%01,(HD$ 9"#SOG
M[K(CBW^I<-DLY8]\UTO@F[+# 38<D%@$?[8PR(7KQ5"!!B<@A5+^EB.H#NHR
M6[ZIV)X"9 W. &X2+G3,()'((892KE"'@RG@&\ST&Q.QC,P[EFZR9K$*K$9I
MN1[=)+9/<?^]*=9R1Q)6PAS/,,6S'7:P[GNAH8 68P]233(UT#,X;_)M;=DU
M"OF"5R6@*X+CMR1-W-($OD/(;AA^)S8$[Q2)\W0?I[S)+W6#ER?LA_=^Y +?
M&\_)V3LD:-OBV#E!^XF'%SQ&1]'<J2&NCIP>E(&>LN1H<!0*P)B#P)4/1@0Z
M#\GML.R/PPD*XP^&&_FC-8G_[_\<++:(L@Z=*=]2@E4YV_FY&]*]DZ>V1& A
MYT8@N5E7$%4X1_@I&@MQY6ZG+BSD#?4_#Y6@MR2')W*%9X@E'CX^K":<># 9
M>T>@CP\FV_[VGH/)<.K)(D=\+-D''TNVJYR(X2A!0I<.(50<6B:2%5B,"3;2
MD@P9"!WZ:&5Z,SR?==S3H\+13P=)NHP_\:%5VE]?:+_D*CISA]#7N.IY"FG4
M'<5\*=H.HG#D'?;L-MLX1^!]&SLA6(.6_]Y@-Z^*&4O<T>0G1 L/M,03ISYY
M9,SNC5XCU>J@N6(M5<L44Q7H(]=;U510=A_.1@F6QI\HXO.8PU"OOQ0%W5K'
MH+O;\LV;?Y*;?^XIV-5VOJ=C8QEVMO/C,'7^P&^HXC\HU/V698S7[,!%8OKW
M EKT@(GF=@&]L,)8N.=!8"B69>B(R6?0VP1Z]P:A>X.1B@?^^8&_[VCBH:>)
MOWA+]!7- \K?L1JX2C5PQJ6]B,$-SF3",$J0B/$@PK9:GX)-L!@"CT60B\]0
M3\#>?M?WX0?G9P^]O]^CYD&"09@5[VK+W7:9S7K/P=%F81/X 7DR ;YR].(Q
M'J\8C\%ZBP/&P'+A1*AH73YD]#Y 'G0_$536-T$,S1W[B1B:5P;-M&A OP^T
MQP $KBG)HB0>>4AN.YW8]#HX]@<B\RG"LD &08'/S9P61V^_).;(&'-7AKE[
MB\+-?$ANY.%V: '#Q=XQG%8"Q]VNQ28VA,1V<,=W*L;DM6(R<%%%=YPS[(4K
M4"R[*49\30 -NI\(^W\/R&\*0SJ&X17 L&9[P/7L?8D^$C;EK2C",.Q[D/YZ
M@,?7@ZE?"V?,%>/L(%Z/545+'&T8EM5<V0\/ZH7J,66)QLK5H''(12QP'ZZ8
M8%]FQ>0*.?#0X_O4Q(>>A[9UU_? .C_H!J@RE$UR?M"F!5S?>!ST_5*K+BA[
MQ6KB^YCC.NSH7 ,+ 6,8!F&C:'5W7?QJ=C1&R%4@)!,4OX3]3-UOCN)<3S.A
MI^<*!(,Q&!5%T.QZG7CH=N*^WS&28B1] I*V3L_!*CU%LO!_4430,R[:UT).
M$ 6*D1-YY%2TF:_!Z<,*SATRXE3S1 .*I^T[,C1")('2+!%%"-UW.YSS;#N>
MN._YEP/3-2\$',S+\6:PT1MR*\A?A[R#7XWMMV"R:]BN[T1L7AY&1O O$QFY
M0@[L]S@$_%Z?$_>=AAU+2;:_.QP@T=)<_4L%/K O$Q\E@OUBCFVXD)D-QY:!
M$K!/H&F<19B("5\(?^++P/^:AG[7U1#S#YW]%J"^AOU.+^QE*A;KG0+7VM_(
MQ!((C9 1$[&]C4S%1#(1=CKQ5;<M8=<<S3C<$%,!(]$(54)XXH,KH!2.H%%3
M8$%7M]5LOHP!N9*A#WN9V.MFC.1H(CD5^.DY4?9L)Q0EBL$B)DI[*$Y]'1A'
M?]R##B:V/8S1&TGT8KSU< )K6S2 :ZN;)-Z'P]TB)E4/:/Y"V2[7QX;]'B?"
M+@?K(=L$\+V3 8.I'^^&16:VQCS6!='4!7@6J&*PL,5/;:L-+,UV'O@H4 S+
MDE%S$A]TP1>*[UX?&W8]3@1=3FSZO*<#8KQ'$N]$%39NBRKP5GLQ> &G2(:-
M6ICG >A?*))[1>,?=#6QZ>O^@DV,[$@BFZP'=66+UJ88;% @F<1)DD$B)E0/
MH":_#*BO9.C#7B;VNADC.9)(IKCE6),TSQ4($J?PJ)F%!P137P;!$1_R7>^^
M%&#QQ\F&ES]!Y$\J:7^G3KVI!NAS596#A]]71 ]><HZJIL\61,:(;=EJY+YJ
M-7;!0N(,>H<RSQ02#VM^)QX^!J,1%Q+_'H7$(X+<W?G?B"P3(D,*C$0@ L&(
MJB")"/RCPA\P5:8(9'<*]O:.;8WM[<$_P78Q@ ,"%0@I.*H;%46!I0 E'-QT
M0KG<CZF0_N+(/',LT\/Q1-(1E7PO2H>EU!\24=!P^R?V4$OW:3Y*=/3UAAVO
MURC]N'KUAUU^J3K]M@CL9E2?_CVVN_[N8N/[I+^7/W[LF(T[85A32QD8FIOH
M 'EL0:LVTH![N\VALN2'$=R(QNGU-*-QI,%)130_6$K>T]^_BE;"&]M^D,_I
MWB8 9 XTA;"GFX-O$J(9;-)S_XY2EQ^7 [Y8KXY[R<PQC?PVJZ>(*J.P*B,H
M#(4+A A$04)P49 96@$4"0T@*AT8L(XL#!5D[,,[)-YLLLJ,($H:0Z:"D\@>
MMU3*B^',&I(*0E79ZE!,KLMS:@%;,H];FBY;+:X[_%*OLWXABPRA,#<6 B;@
MCUMF!BJ=U]>^JM?'QKJBJ+2>5YJPY9-GJGZCW!S('84'R71)JQ4)5=$7P8%/
MCUO..S._[=&C%"+6"&9I5]9,MI^"+<G'+9F9H!)9;.YRO5XEMQ)Z6#/?&\&6
M3][.#;/)VF#)J;IHY#C*SW39RJ0)6Z+HXZ:-"I5C.EJMK-<SA)RVN_E6>902
M" %YW#)-.@HVG*@#9.73F-P3+:M;& GDTY94?LB#XDJSN)[@C;(+@YFT.D'+
M)\1[#;I<3M61.M_C%B:U8FK39C]H^83X12NC\B6RT=,QIK.FUUU;ZS +V/(I
M.U61XIAR8ZJ+$RO575?1-JH'SWQ*_-"M]4;IM5[EM7:O,I++A;9NI 3J*4G)
M?K^0'?+M)I\?C"LI5$N92&TDT$];,DE*+V=%NLWEI\M*;:[)8H%L"LS3EI[)
MFB1?R!AZ>3I:93M6GY);"X%]VK*M=K'!@AX9NJBY365:GB,5:22@R-.F/5E8
MZL1ZW.1->D!D\_F6G1Q"L4>?-A6$!C9)3<4"A[F=M$^)?JT]AEC"GC:%_F&M
M)[DIE*-D<S0HZLU4$@X4BC]M.L1+NI[I5-;Z:EA ;=RLR3._*:!'),I73;JO
M&<44EZ0-C^ -,EFHPZ<>$:FU; NU]=+EN%6QK:*:.*X6(/+0(ZQ::FA-F-;+
M77Z&X4MT4M38# >;'N%58RYPE?6@+2)8N=7DDMH(I.>PZ1%F66Z5],KESAAI
M@TQFE>R N2W!OA[AUJ@%K$Y=T?((EB+K!NTRW*H#M<01;J5Z1:F0[ H6HB61
MID!6E4'>@JKG"+=*9&NA9)!L7O>%RJPM]PO55C(E8$>XU<5(O#1LLQ5$ ]YT
M1;FLX"'PJ4>XI3%CO( ELS.]1V/#52F/=]NED8 =X=;0L)9NR<B*?,9HY-(I
MMDG-X+AB1[B5A,:JG9I3& \:V86;9SN#*M14V!%NF9RQZ)3Z+5NGA**0\T;+
M >.%39\HB^8BZZM<A7#X7@$!-0<T03_9#)H^T1;]X:I2S@@%EB]/ZCVD*JVM
M$A$V?:(NTK5Y'ZLT;%ZO,^5VK9"JD5H^;/I47RSXR6*N=^T!WZ.\_M11@5@H
MP($](EKJB"/TZ:#&(U0I9:'RTA\.*T%=CZ=-^ZTND)O8M T[.V?*AL87V&XS
M:/ID".S*'!\6[7H1,2M+2N6<*I<9IH*F3X9@/$[F4_18RNE8N]L0N%*[0]='
M0=,G0T!AA88ZF]@]I)>=(LJDT6Q6QN%3GPZ!J&):#9"SKMYV&3 ==0M>:@#I
M.H(#/]GBL2&) FXV,Y;.6&^B1&,4-'U"5P9?EG%EB;?T).?:<VYM%@OIL.D3
MNK(UW,Y7 4IQR>9T(1;G9,G<=. )73G)'$Y[9<?FZI-1<MAG\_7<+&SZE*[!
M6D_B1HN><,DUB[+U.=IM#IK!L:9/Z.KXO."*61]%VCV]S*W ,%D++/81T+((
MGLZ+G:&/8%6Y[C'#"INC8-,'T'[485O;B%(8EQ)]S][]L(E*A;^<_SRN@Z W
M@=_15'RRTQ\'E]]^GM9>9,6RP[C*ADSLCO[,P]%B1NP8@=[16,R("#""N2-B
MU10%1L2J*3*,0&+5% 5&0-44GX<9!4;$JBDBC(B]IH@P@KEC\)@1$6!$K)HB
MPXC8:XH$(]@[%(T9$0%&Q*KI8QGQ>BK]VX*NEZ/Z/1D"YY7!:\V;V(W*?9DK
M\KDR5P<R@>%WQ(M^V[O'@WE7<LLS&8&=\""S@Y.3$O>I+[& ?*2 $'?$><?C
M?0)R\[O]^ RM6! ^XL#TV'1\*X$X30XVX9;M4O36GT*GRT28X9G8;<;X*F)R
MKRJ)TU0E')U/'9SW:M+[PP=C#7I&4QH+R/<0D-C$1E @WHN Y_:^/ '$Z^6&
M7UW:0/:V)UZEN@C.L+T637%=@A%DJ%RW8""Q8)Q#,$CRV@4CUAAG$ ST#B6N
M73!BC7% _Q'W\FEU!%D&0%5_1<WO;($YL'SP\Q@WWTK$Y\XMWE^?XSS4OY87
M\[6I?RV%]VM3_[TE_[6TBZ]-_6L9HE^;^N\M^=]=Y[^<@/BUJ?_>DO^]=?YK
M^6U?F_IKDORH+PG<%^-#L? %#<=6?-F[ADGW660T^@;XOS^@VY>9+;U0<#2!
MWY$'52 3_VA+V$<KYXAA#;N$;VE>*ZA!R,,/0ML3+45T%(%O9X5UKC_"YY9-
M</6B7&1J$TG)4(N;1+CY?;FY*^MOZDP)1% -",%0H6,+5+"!/_SB.IZP%?6Z
MTP;.7)-!:JFY@N\F1Z(XW5VL E,"CF RE2FQS'8R>F8]JF($L\1*@]%-0@&R
M9HJ&^^]-$K]);"HY_WNC+;V?EF\JMK>]?I.P1!..YO;A/[?!$/<FX4*>P0OP
MYFV)@-78F !&2#.\-G=655VN"RZ?$LB@^A!*(+<H2?WSXW"HKB)"%@6P?H+/
M\$%@O< $+TI@1?;!BKP5K-1HN<[+U+K'BY5.Q9 D+IV1S@)6+H.R&.KZ?:2.
M [EK2L-Y9=&$8*4@6%'Z%F6)&*S?S;)>8DX:";"B'V%9E=8BQ3.E4HXOUVIB
MUYF1RQF3.@=8V2HYYW/CRH#K3;)HU_#&M<P\*!G'WOS&*.J6IL@8K-_+LEYF
M&ATEL+[/LII&3O+]6;ZH:ZFVLF#Z X>2%^< J^!/6UB96?<1C!]SLMD;M,="
M8%E1#*(58V]QC/[N:+W:Y>#',8>MX+EQS.B\ZP2?G<3_\@$DNXR'<Z\11W@4
M(AL5$67#%78PW1J#-#X52BXCU;G5A,U,*;+8:.'-<Q@#9L@DBRTVD]5-E$YA
MEH^VEO8BZ/?-;SC)0IF3+$&L23YNW27"&+J4)OG<Y+K(:9)3'<MCFJ3"S/*I
M>7>4TE>E5;ZQ7'N8,3Z+6TDXFC^G>\D^TLOU,JLAK4YD.ZCP3=W\)F]I&HTU
M2>R37%B3!/&B"(]"9.-)QS1)H5B5QIPAF8BF3L1>G_93.G46GV2J]U;S"6"Z
M^@P=KU%A.<GGI!'L-WOS&\5O,>:T8%*L2F*GY&.30B(\"I&-=AU3)>:Z7%TM
MY"RESVK62E9H4YXOS[**U'%TT6VX;D.OJ[DD&&/L--]KPGX'L2X4NZ6"LW1C
M77+EZ35,^(*.[8E&PMD(PS>+5[YS*3#"BNU%]1X'J3XV2(5-07G1:E8-SJ?2
M*I 6/,),SC);S-GC.J>F%8?+Y$;K?HKHCA$Z)=";7!SZ%J/CY?WWK1A&6,P_
M&--QN.BE<%%#4B2^,VYS7%)=9G&<YAJL>I9YVX@HC[+.O)=',!O42KRZ7$F@
M"3$=I.Q@V"T;9P'$=CH.W'Q X*;* *M2G:VF2+*3[B?7HXZIZ6?!] 2M98A*
MHXWQ=9%)>CA?X0MF<!ICD-G#(+<(B<28CNUT'$%Y=P3%&*;7 U92FWQO0E8S
M"\?)"LA9LO5("JTJ!:6N<*)=X9L9*-ZK[ )B.DP (M!;-DZ$O]H$H%_!&>&N
M%QP([L1U(>(]PG%=B%CRXSW"9\E1^:[4?V_)_^XZ/ZX+\7VI_\XZ/ZX+<2W4
M7\_"=5P7XH]#X5\D+!97B_C4:A%!J*2NYFU;<5.6LDM3:MN&<B1N1L\)1?01
MJJGGU=:DG%TL!V@U);#A7@GJEF).VRP18_JS7(N++DE_)TQ'JJC$FS"=3&.#
MT;0 %KS/*E1G@BP A8P@IJF;WQ1Y2Z*GY0?&F/[R=CJN/?&)M2?>A.G!:% @
M:[W\B*LW3;*!4KT5D@XPS6YRRQ ,BT$=&^JX1L4GUZAX$ZBI2:7J8\V!S&5<
MN59N8;S-$TT(ZC"3'\=N*?:T'89?&-57NV@=5ZV(=XC&52NB,).+4-6*-YD'
M$LEV^C5BQ'#)-9OSJ2%@QF AH$@0G*%N2?HTER]6+O&>T;B0Q6>'B2Y0R.)-
MRD6I5_VB-,U)>J]G-Q!$:.DZ%RJ7L+8%29Q6+RU6+K'G$M>V^.QXU05J6[Q)
MN3 ]BZZU.N4DC_%EIH3EU>S*3 7*A0VWJ)-TO$4]=EWB<A?7$3B[0+F+-VF7
M&3\G_=G$K^E8VM8<9*TFBYEFH%W"N!EZRZ"Q\W+]B43[%3#DP^T?WRP&&N^P
MC0-?T:N$\2:=+:Z3$]_/->M(TG61-C.QFUEZ)*!H$,MB\%N,BO?<QGMNXPA4
MY&ICO GE!J$;"],1622/S:U"AC!T?= ,4$[=_*;16X3Z]IMP8UL>AX*B5RWC
M32AW164]G*QYG].:'#LRR&9'S2T"E ?1'9*]I9!OG[80&_,X)A.] AIO@GEY
M+1;KB$3-=;&8 DT.S#-V(S3F89B%(&Y)Y-OO#KC:]"3XS+QCNVYBZMBJ=G2C
MUG<,CUWKWNK/CJY_^SU?'QQ<";'9"*%Y1#7GZYU*7\"K-I^I5"=IG<$]NIV"
M>CG,#")N$?2T2J,QPJ]G#WD$$/Z]=X!]<&#E9833"/"(M)6R^>1B-NWT-97K
M6Z, X4%Z#GK+L/$*>FS#SY%_\RT0?I&@RLL(GXDI+-4IS5R]UYWXF-D5))L*
M;7B8(X/<$D0,\=B(GR,)YCM!_+P!E9<A[DOY^L1PLR*2J5')#LH-9F4U-.)!
M!(6E(<3CLRBO-5$%/K,^!8&P6:,$6$Z!Y0+W:%W2+\RDB&^D_V0BK[.8:"RN
M7Z5,7"1G^)_.R6\@KM]$NUYCV<Y87+^I=KW.6IM?6%RO=NGV<66)%G"!Z,CC
M!)PJPXGL'!CVU 16O*8;QX/C-=T(K>GN<)JRE.P#2KE-Z.!(^*A>MPP5E9P&
MWT/;JJRD>!<W%P)*A =*4K<4AL?1HSA '*_R1GB5]ZV8'V7<HB$+CL13P]ZD
M5V,S,[N0"C!/A9A'B-/VR<28C^U\M";2D<#\A8Z>?!OFFSH][JXK\E3/3PVG
MLI149D"&F&=O?N/8+7YBFFV,^=C.1RL:$27,G_MHRK=AGM#5^CC79L=\KSBM
M,W,LZWFY$//!TC".W%+$:5OEOB/HH[XT_*3T)V2^&T9G8!L=!"O&WRS6%O&5
MC/A@E*L,J+2!8<#A@SJWNL/5\QI7(RA12<W[.E^N3ZN=)&6*B_1"0,DPFH+=
MHO1I16-BE%Z;SQ2'0#XU!/(FE+9756^0XZ@I;UI&:S$8UGNVEPI02MW\9F\)
M/ 9I;$KCF,6'QRS>!-)A61R0%+=*ZZN*;4_ZRRQB.:$I96]^8]@M29VV_2Q&
MZ1<WI7&4X6.C#&\SI4E/USKLLLFM,GJ7IQ=X9<PW Y2&^_?I6XKX]F4ZODP.
M2!Y8P!&-,,@@*J9F::X72.;\:*W$[Q@TBJMVQ^>-?(6@QQ;IT :D#G#^O"%@
MAJVA/:NF"OPLUZ-MGNBJ66DDH%08^4!OL;A<;ER-^U/R3"(\"E\L"/-VK>&2
M:+7KRKS(]^JY!L=4)XNL'VJ-(!,%N45.]!YCK1'[&O$)(=<9%7J[UM F)E_N
M+U,"1V'=J5QSQZM\:Q%HC2 T!'T-/,Y?BWV-S\AUB? H?+$HU=NU1E,W3:'/
M*PK? R6YF2_66B.I&6B-,%3%WB(G+LY^1[5Q/=DP^R=ZV$]J)WRST&-<"#R.
M+D4ONG1?TF2KK-UC1T<2:,.>HKZ"B#*<%:+3\J#8A3-#.H@G$7!F>&(\*0;W
M5_/8XB!0I(- IX [OZZS*[R?9_1ZF;'7NM%HAX>KT4'8!R=O2?3;U_R.+7<<
MJXE>K.84<&MY/Y\CDB;*4?-<<H;)CD>.4@&XV9O?-'6+(J<=*1^#^YM;[CBD
M<MF0RBG@;F:S8Z/"4@U=J\\ I3-U1JN%X Z"*!1]B\=I>5>;[P.?6;1DVP0)
MU;'-7?3$MHY&3;YC%"S>_!T7>8E4 &4#UXKM'M/5*R<OK-OU49\7W4H.E!MZ
MNM8>"2@3A% P_)9EXWAWO.7['"DWWPGI%XJFO(CT:F_DS->]IL.)*C5=4)[;
M:\^; =(W!5UP)DZCB6WZ.=)DO@72+QM:>1'I@]G4(C'4S?!@+(TR:[78X>>+
M .GLS6^"N,6)V*;'-OT<J2W?">D7BK.\B'01'_%-7293>B\YI56OQQH,$]KT
M;?$6A(G/W[O6=!7XS+HW!D[BKVUBRM\)+12&^&R/2#E9GTQD?+;'UR'R&U2?
MC\_V^"I$?A/M&I_M\56(_ ;:-3[;(V)$7NTZ[^.Z#D4X$W: ZVWG(/$D,HX,
MQZN]T5GM+5IS",Z@U.\F8+2#ZY&@$6(P*&T7J 5?SJ1U"LTVN62C"7NUR9J/
MXT5Q:#A>[HWP<N\;H.YW 5\7Z\L,EZDT,CSG>EJZ,@J@3MW\IF.HQU8]7N^-
M\GKO&Z"^(N=T+5^A*GPR.U(\G.D/ 9,*H!YDU,?G<\56/5[PC?*"[QN@+IA6
MLN2-F ZRRB(>ZF>T:B$;.O#!JB])GK9UYCN"/>I+OL\&7;8KP-\L>!;QI8GO
M<EA'H%O_NO+HR 9'SQ=^\0KC>2XK=@ OEMS93#"+_@R',R4T+$UYB]%/\VC^
MCM'X%1RB:XMF7 *-YPY@O(;&9:/4S+?2W0I?3G?93+6BM,U6*D C%:*196,T
MQK8Q"@&'LZ+Q0C&&U]!8S-/<<K6L MZD**?'=2:2!18!&H-2BK<X\C2Z$*/Q
M.]K&3X\)7 *-YPX#O(;&=J8QR[.8E--[U*"T4MQ!1UZ'MC&8_6.WU)'2&=\-
MCE\FZR), +]-6,"+0SAQ1>MO?7K&]4<A0C#7;,L^W-OSH.HAV?"1Q]9Q\^-E
M.^4Y93[)BZ"0ZQ6K Q5Z8%@8G2!/T_>QMH@K6<>G9EQGR.15U?%D9V"C-!B8
MQ6D;\2NU5(ZELES6'@4:@[KY36#Q5O_8O_B,U)!HC\*51W+^W+]89-SDNME?
MSKGV/#^72-9WLD0ST!9L$&]%J:>E5F,7(W8QOO=A&=<?;/ISA5%.*FI:ZS 6
M1V%\@6_,[%IY'KH7FW,R3ER?^8[ZXGIR4 Y.R0@K$<1I*-_(\XL#2%$+(/V1
MJF;FR%+P2OFB+NI+3\?=)<7E%@*&;S-;B'@M/2ZU_25B/M>?&?-' #>2U(AJ
M+Y0>KZ$CL6.O9V*WT P 3MW\9I 3IVXQO+^]_8X#-&<.T/P1O-N3D99"?2W-
MF\MY9U ;B%-],0K@S=[\QF]Q-@9X;+_C@$HD BI_!/#9:DFK13)#(2OX7'5@
M\!,T$P)\D] 3>^A7G-#SZ_ZX# E ,0+;\BD)3UP>/VCT.X;$XNW6<1&5*,17
M'FKMYAS;S,!^:)8/Q[-^?\A-.@3QIETG@#"W]!P1FE3-$IU5T0.F"VU 0(%C
M&T9H!9[=QEE-N:Z[;!86^LS!S/;(Y- ) O4^$1Z]@=W2Q&D'',8:(]ZU?36[
ME[Y87LYE-49.J*Y[?7+D()I7R(EDKI574XM 8P3;HLA;,J[S$/L89\G;^18:
MXT+;K2ZI,31'5/IJEM60/*FY-J[XAI9+!1J##4](9X_,+6.-$?L8<668Z 25
M+JLQ&@MU):?H%J[[\B2'ZTE!XZ?-0&.$T2CZEL&?[C>(5<9UY/8\1*,\<9F8
M.G9 G&U]LV!BO![X)?)YOF3P":KO[9)!&EA U8ZIZ,IBW$M7QJ3-U?$<56Z:
MQ9I!P&D@&02.\%N&.*T 6(SP;[X@&/F$GB\9+#H%X>GF<%9?DQ6 @-:"R+;%
M='HY&P4(I\(50?JT_5LQPK^]#8]X3L^7#.Z<@G"^/:++Q *@W,PJ83)@&_Z4
M"VTX>_.;O"6ITR*Y,<*_N0V/?%+/EPS&G()PEN,1B5F8&3[)F"5OG.MFTD(J
M0'AX-NLMCGY[-_V:LWIJ(#X*Z3-VSN-0N2FV+QG@8MKM8'C^^])%>#Z!X$BH
M\\OLJ +>0W@]-1<U0X0#W;$SMFG:5MNS97UL&Y ;;EIT-?E8O'RL+/1ZJYWB
MQ:Z:9TLZW5W5FP)&A=NKF%L6H>)P^:=NG?_J&N-)#.>;:XPS;]%ZM\98]W6T
M-+)J+B)VJT0*H8Q,>;$(-$:0Q0,=PR,%'&.-$?L89RS$\UTUQF5V?;U;8ZCL
M?-IKCDA1S^3&R9K9S%LN$?H8P18P\A9G8A\C]C$N6HGGFVN,,V\C>[?&2$Y*
MRT9[L"CQ?JNTXO1.?>0:H<8(LWB(6Q*+4X6O.(OG(?J4F (GX8Y%!_S\9M'#
MB)^ \<E$7F9OV*<O]7P#<;U,UO#GB^L%-B9].B>_@;A^$^UZB5TQL;C&VO5#
MB+S,EHQ/Y^3UB.O5KGP_/J FG(#&$\<X.OU]5\!?#C5EM;FF@##0%,[27<&<
M81I3-%=+I%[,E#73 JU2O?G!J^#8&\)-G.A8< 3=!G#:01</@TK(P_9S3-&&
M9880.+,Q11#/;V%9I"E@3+#4C=R1<1 Z#D+'"]V750QO7NP^AV+@NZUL9989
M =[L3O$B0Y6'/K8(% /U_[/WI<]I.]G:W]^J^S]0N?=6S51!1ON2F9LJ 6+?
M!(CMBTI(C1#:0 L"_OI7$G;B6"1Q8@.2W5,U_MG.<=.G^YRG3S]]^G0,# 0"
M@0%&#/ \^S; \+=GVM< AA-^ZMD-2\7YBA$JON+-$*7%Q< 0OROS&8$WR6'$
M (^M;PL,?WQT?0U@V(Q&DQ8M;?JBY2#;MJNV>[M5$C'$Y]/(9YJ R)#3T^GG
M#%%5-P,?J!^,X'O3^ZF9A&E([.2.V'EPQ0MXK!E46"+[51:IC%2MO!=&=K4D
M2!C[0.V\+%"#_ISCL OR,;GC8W[NSXPA^WNZK!SX:7>TGVY7\P-&:+$_)XP,
M_K*J?]"?/]+Z#&F4>],H/_=G=&2%U1U'E?D=LBQ3S)#%:N?U^4RDP&H1<'V&
M[$?6V(]?Q-LSK*[(++;@=6\T=[;+Q7A-)/[\P'_ VA!YS9")VDPFWRL$'E +
MNAW9H[4-XB>!"O9+T_8_(K&5UPKM6=4^GS< H.7GI])X5K7/YV4":/D0\_/Q
M6D=6M?_8EO^Q,3^?5QP^HN7G[0 [R6$HA""F+Z(-G1QU5M9 O*NS'/N\A[OX
MDN<[GL*\L^=W?$(A6]K^=>&,!PJ.WQUT$&ZJG'$,U?;<[+>)C<O=LZ+?],%/
MN;.;]@)K"=S^ZDS)] /?BS6(AOAGE3-DMVSN2\.F)%:V^$ XJ24/J6L2CB:/
M*^!%BJ8_.C67=Z[]CL\K9$O;>WC_=:OSO=;[Z8.-&3B0-)XBC?5P@=(UA^-B
M[Z<2[T?1EUUR@MX/U_[<G:=?T_MO4FGOM=[O.,VEJ@KZS-BUK<6B,:DV[$&R
M]K/GM9^%W@_7_G=Z^GX#[[]NU;S7>O_$/P3!%!&7"%#8?G/N,8&P"V/O3QYL
MP(HLRWQT]\_MJ?Q/;B7\!:WS$2F[=WM-]=YO)4.&*#,,T0,BI):+"RL%HLQ.
MFR6YZB#'4V-IEE6R<XSC1"SAB(@BCK[L?3X()>_H8FL&H 323=F@F_X 2@)F
M);4I5R01@%O>%IDAM:DHQ%!R)IQ8\F4Q)X02&)5\Y)(:[Y6[^A,H";!-OSM?
MT$;?6+B(8^Y.#9^+H81-HA*"AB7?851R8RB!1%AFB+ _@)+JLHW5USN6Y;&&
M*31*I\VNI24;G(0*(XH(?#[BUQS9O_SXR8XKF*\"(K-R7]_5FW1L!$!!5N+[
M+[)]C"_ ]!P_:M]W"OX:>*!0<>SDH6(Y9N!JNBW;BBZ;A<C%?&!%[7EOV-6,
MC-CK;4S5]U__$WUY_#O%!+(;>]#ZH?%O.!M_R$-@BR#_>Q4T_7'6,>()TWI6
M$7_2Z>3K?_V_IYU/ \3#BO!$JW6"9U^PQ.TU4%JZ0#9*\BKZX"^R&<I'[S%N
M13^CS.-J\^7;JA*/0X']3*#_6_C^;3P:J:&TY$/IR8 ]@$S)!"O_R_FO'G^5
MK"*/OW,\/4; +RXP(YC?@[CM'UI-9L5WME\P]#,5&T'TXX-6.'6E27K&?>/?
MI^0_<F'MQLO2?X\=Y9D1ONHCSS_&#47H'2U6YODW9X[]\5=/C"<>UZ@_XQ@J
M"\XJA@/_[/4/YBZ_Q.1_G+)+<Y$1SY63Y56261:C92I:2Q69D8@EBDLRJM"2
MBJT B<H$#F3LTUGYVZP>RQ\^Y6&VEHZI1O_('11@ZEYA#)2U'3FHI@.O> X;
MF[;R^3__6C[5[2F>?P=Q9U6)5@ 7K('M13,2_5UFU/MA ?K>X[,Q/NESX?P>
M5^&;OO?O^C^:=K2*.H$717'>/[/4,=&6 S4*Y-1;]^KO?9)D%)K"ETN)9@$K
M$0I0)!;'<0DH"$WB@,8(!'TP6ODQ2!;*NM<+EQN 6&@3W026)':5, [PGTM6
M)ILCA>QTE*^W J2_,_'3AN<B2>:Y9*G5WMK+5G_%U\>U3B#6>KAH"1*6;G,S
MQ#OE;9.1C=W\((RV+K%ID&$DF6JS;8 %MK7<(S\J3S;#75>=H$M!PM-M DO8
MTJNAZ_$EO*JN5OA,;[I1V"^1SR6M?JE,1KL47 S&.K5U.^/&6N BR=2G5T5A
M6 ?#386WC@UFT=W,F),=MXFF!E11-IRA&AYA')5UI<RV>C,:#R5"0E)#WT7I
M\7)6-8U1I;623ZK81;>Q9$JE0&NO&P.ZL>:!X71;*K/3_;$62:94&BO=L+-9
M.:8H[RS*56T'G?IQFRF5YK:LCA>F2? Z1^C&L=RN=%=<S#BG5!JJIEDY<DIH
M3'U KB3<V_2'FD2F5:JC;>6 DR.)EUO<L=7H.SVEHT6;Q)1D$VELM#9PEWQ[
M,UAIQ%26'%Z0Z N2&UFD/<'&Q4JGTZ;(A:;1NU!BTI*J:+A\R]CUC HV,3I2
MQY0=2I/8M.0)VTZ'J]YZC5!]L4J:R*KN++E(,C7TJ+<:EONCTMJ8KH:SDRT=
M>,$)(\G4T"LXZ0P:Y+(KM@?A+D!/NZ ]B]M,#3W=#]K:6"R/#*RK[183OPQ:
M;BSY;>B3?=>WZ/+,.T21I2EO/?#E\9NGP!+'7P^Q6!Q+*.<8Y#&43D(_.?"=
MQU^< [_D-S^$AT\VI0\RZ>C;=Q\[]O"!Z!FW7G81AD(^L^2O-L%/ J0G[3M1
MFRO3"1]A\/'G4KR]_G*.I<-HG'X;QC[L*I(/?A25E]'R&?C@RA'L<W!_(AC]
MXQ]MG!Z^OC*3E?KE73,X$;>:"#@+&9@%ZC/]R^OV<"(@+GVPB8"SD(%9@+B4
MD8F N)25B8"SD(%9@+B4D8F N)25B8"SD(%9@+B4D8F N/2V$_&'%8=^2[3>
M3FOF\53]Z1';C6[K_]H&;W^B][:CHCAF_,O_^T1^>HE-H/3GZPX'\ZI3UZ?3
MN'5!XO)Q9L7:!:!@1=)KKP!L%:B%[T?8T#X^CGU\^CK2#S\: K2#-R]5!Q>.
M]VX0?PL,/R; H]M#(4D[ND7^^VN!HQ78H( C10@8T#Z@?< %Y?TM**_U@',Z
M;/IKRB&^00/V.VCXV5C0"4638[2(KT[F!2B@7=S4+A!H%] N(%Y NX!X\3=V
M\5:EV>X1<_:^O8MVW>H>M]A99+4@P:U5O_B(Y5LI\[NCRNQ6#8C?KSS59AJ^
MMQV"[S>5)M/;+-4*%=ZS)EKD@.<;;AW'\[B]K)OQ-8JQ4TFJ(8Y\1S'6$1@!
MU_M9]4QA8.+VB-RUC=&"JU;'H;QO3X6H]_BGKRA39)&7E<Z%O@Y]_</[^G6+
MEKW>UZ5>3YJZ._UH ,V>NOIVV'#"^*H<%?DZ7L21E[U>"WT=^OK']?6;5!5[
MO:\'" AP?H90QF[4M9E1N8<,)O&Z'A<5(XLX ]=UZ.O0UU_DZ]<M^_5Z7^\<
M7=;D5\R:KUB]O5<='RI.._;UN.H71A3)&U?]RI.SY^!DK^^O@9N\1O^]KLG#
M:_3_,".;^>?%I^C?\9Q=)U_]76AX&W"^]S1"6WT/&D);?3=*OGL-H:V^&R7?
MO8;05C.F9&Z/>)^_OE5S7!#UJJ $K@MLY5CP7=GVS&2S7)#53>#YW\O_PLUE
M/IFD>Y>>_T#\TDW.B!/ZX'DE5\<"#\Y<>?#E<>S*9_TX6QU_=VSNFU_W@-]?
MC>7#P'&3?_!]5U\&_IFN&LA1,_X%=DKO6;7I5F_4D4#?]TYFO[RT=URL[Z>O
M) F/G"!X0/#([*'SW<%#:@(PF%5:B%7R)149E+KMI+PJ]>DK@\,S+ @>[PD\
M8KCX1ZX/KF^-%U&;40\O ,=2GEO+3=\%2'"LS(75Q.5#(XP49R/@B'.0GP''
M/R%R0.2 R'&_8_#,(,?1)[R# B0.F1*MCM-83F2\&N]7DM-T.AUS0.C(R5GZ
M<SJ+LV(+.9WI*V=5B.8SD-WX):OX6+T0N4O!2<[>GU!;A97K6(5M;*'1'VU-
MV2X6;.#'?^[+AP]&;+Z&A+_C):97+1E_M3)D6-D/PG95P4JW@5H&=O2-/XC\
MUGNS%>/0B#!D3G,ML3]M:.L:<S3K94VBS\_*OVB/"D$"@D2&E?T@K-8U0:**
MXHM@6U-+R'2--7;^1FMO#O'S/]2GKR0-00*"! 2)7%!9UP2)$87./->QF\BN
M/ZXXHB\ML6H,$FP$$C"2@" !02(?K-4U08)K-/OC=MD0C)(%C%YILK7GR4."
M,4&%HA\>)MY-NM78\67S@8+ZQ?4/2#]>\>0BPU":K;&"*T\VB*[X%N'C G-A
M\:!:^.)P$DJ[2*M.RRBO&^&!%"0FR<:"EX(AN&1RK""X9(,@^PVX])%N$]FS
M\SI?TD2P4\B2V@JX"%SB;"T67D*&X)+%L<H\N+S?M+!G>/+3+>]<*_<D2M?G
M2']-X;W&I%(=\C&PL)^^TA1,R8#(DLFQ@LAR-P+NI<CBES7OL,7'$[X/J)W8
M6VT&C!Q&R)*0:53Z>@J$EMQE>S')!U0N,&@?C!E]NP,4/$(QU0F6)K@9C/V^
MPM4;H/,=],K2KO*ZE-4%F/[%9G)X0LN[\G&T-=ID76]*)69FXIK$)I5IV2+!
MONSJ('1GZ,X?U9VO2Q+]F3L?E^IDZ8:"Q!_1V6GE3UJ4HW.1.\?%9XDBRI+0
MG:$[0W>^&T?S9^[<$#%$&&+#'G*<5,==L5N323N,W#FN+TL4J0M7[* [0W>^
MMUY9<N?K$B-_YL[]*LI/W;'>%D?3<D#PRR-0Y=B='TK(XA3ZT?TYX3O^E61I
M9:9C-WE4<P1 05;B!"39/D:34^@Y?M2^[Q3\-?! H>+8":$I^T MU'1;MI7X
M#EWD'S[X7@[J]N]_WG0,7V]CJK[_^I_HR^/?*2:0W=B#U@^-?X/-^$,>_ =!
M_O<JX/CCX&+$$SKMK"+QI-/)U__Z?T\[GR9$'P#^B5;K\VM96.+V&B@M72 ;
M)7D5?? 7V0SEH_>@)8-^1IG'Q>/+MT4B'H<"^YE _[?P_=MX-%)#:<F'TI,!
M>P"9D@E6_I?S7SW^*ED4'G_G>'H,=%]<$%\QWH.X[1]:36;%=[9?L C(8B.(
M?GS0"J>N-$G/"$[\^Y3\1RZLW7BA^>^QHSPSPE=]Y/G'N*$(O:/EQ_SA1=F'
M7STQGGA<X_3%&"KCB[&5>!%,<.#!W.67F/R/4W9I+C+BN7*RB$H$3;(,3BPE
MA%ZM) )1<4G&250B< (L*80B"9;]=%;^-ECXJ[?IN(,"3-TKC(&RMB,'U73@
M%<]9Z%&L\/G;$W5GW9XB?%DV(X 'HS4 OB<Q)(N2>&;4^F$I>NAIX=S5;RK=
MOY?_:-K1TND$7A1 >L4"B.8B<N(M< O>6G:CQ=:*@-./$WNSTV71E@,UBN+4
M6_?J[QU2(50<Q5A66C% E@ABQ4@RJBXE5F%QC*"!BN/J@^7*CW$P6J$)%2DO
MIV(=Q9A6"QL<.N4PCM>?2Y*SA7LLKR<N0M4W5(-U%7$SCB7)5)MNO[Z=]\H.
M,B)9@$XEK"^CH82EVVQ@G1K;7B D@@V'0]VE.;?:YB+)5)L.5\%<?RPYH@4.
MFP4PJ@)-:1(N(<\E3XR%U[I#:X:43'2'(.[*+G7BQR%2DI5J<[[5F- 696?<
M;YQZI+I>"A*9EMQUCL&!W*(K,0KT)-V:,J.Y'$NF-%H2CL:L*T[/F'9.,XTX
M[4ETR462*8WJ U&FRU*U9=2#YJ&S\5R^[PO1_BCUZ0ML6*Y37:/%Z]J((/L#
MA^ON0XE.2[8V3,G9XYHI@LX!;,*ELRF/XL/=E*2\6FYFD^6@;.QDQ>'&+-5E
M+"':_Z0D%5LOC>F6V3%&*TVR2VVZTC4%"472HJ2W'[/R !LAI:Y31\L;:3YL
M1:)H6G00A-:V.7!/"(52T^6D8:G]2F1-6%ITV-=Z]AH<#Z*^G2)-%*D$3)V3
MT MS[V^VX9#R*I115YOM,B656&\2M7IA\C=DY;C5#\@!T=<&V!#+7K_?U"3T
MPNQOJ($?G.A)$Y$/[,)GYXNV+$0=N#!55JDWJ-A:?2*V#\-2W=$UK*-IL6C*
M4IKH=C5L>8;*5X1)N]-7.6S22T13IC)RA]H!6QNH>"R'5;'2*&]4.NK !0MH
M(ENJO1"\)0(:ITYY7/6D<!:)7C !E1\?FNX0M44,UYPF&%2DIAX-U@4;D-KJ
M?,4,U@327BDJN^LO*S@NQ*(IM7JNU47:Z(3G@3'?L!VISF"5I-646MJRN]P;
MRFR*@#ZG5\!LP9::D?=?L"QM-!!-40)K1%_REM_;3E K<@'L@F4!=@GH0W5<
M-8XE%K6Q'N-AFZC5"Y:EL@B*4=2ZBO1+ Y>=5*FUSV@2=L&RQI6AI],+DS+
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M;Y87UK+F30Q*L1"-8U1DM$E$4WHM24STB3%YY*DQ.)XPM%:S32X63>EU:CF
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M5'YW<OHQ1P4ZT%^<*7[,4?G= =_''!7H0#E<@6XR"+\[=KKW($!_R="@_/I
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MY\UN6MQ;K?NE*&4= N*FUXX9S8YW[LFE0B!N &SF<*#X8#S3NT&(M"=(&&,
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M;"(+5X%;X*VMZ1P!*"1V4A@\/*M8B!G[/!^ZP2Q<F(4+Z=N7T;>/&) (/2)
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MS(R9QEIU*\96EH.SAT]\U<1'HZ?93@I==I.-SLI+?DR.DI,6(^'HB2N87KT
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MF;H?2,C=$^\6,'KMKK([;P"H\A6^I_;+,Y:P^YNDR6LD75(<!*AP!=._(*H
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ML-F.K_KJ8+$:?O+BET9<KI&ZU50[XII;H]OD01IH8*18)QQXL5>K2#F^3<U
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MIL<!W>DTNZ5.S')2R#0A\DD^D"=*^)S#,@,.<(+)9#4,L! 5>9_5O$OFL2;
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M3.0M*@T'$4@&$"_^S!.?89WW>\V(^I'G'\-*\/=*\V0^3.M$1"LR!/";&DK
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MS3:5]3?TNH.);7&.&$/SP$&>U&G#Y5!0?$6KQ8<([%9T"4.G,E(.J\H]E,<
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M!4_ETKDY*RMLC4HA]P#!;YQZ8!+D64C/MU3BYK#WQ6,SL--#0X&/*0!U!=!
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M'?R'E3@+)# ? B-"DUB1B<?(?X9&Y%\O7_/IB/(O2QRJX,^^\S5[#AV\=+;
MJ6C1_57ECQ_ETS[!ME\ZO,N*N5#%S6]%4Q4-1(>J+LU<WD?18*?<G0$WSM*,
M^W6W=RE519.FVT9$?W7'KCX:*<C[Z!(V/#-BV@M4?R!B J@*L!FR']C1E8)U
M8&1K6)W,Q\CKVWK!>@$T$SS@;[QP4*X)6L  IK5O!MV;ZG[;TG''WJIT\'!P
MAF,-RDB..(HU433\'6B+>(<9^T33@O^9H_H):*ANY]" H+5%K F _S< <(>C
MK"-S*/2)&0$:\K O7#)N@E0:J?I(5U7=,7^[>OI**_\E*ZL__X'_',P*=MY
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MJLRLK,QI7"6SLPZ;/G. 3I&SS,1>%99"<V%42;Y8-BWHN<=1@(Z.,P]UG/X
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M%1@K;AHKCO )/T.-1'_E$+5D8:51@[6^6$<J5;-8AZB!CA"C88HY+L_QL1S
M6SE#]"O5;QLVSK8R@<\-SA,"#%+Y^PL4.L( ?ZU3Q ,@+K'=X=I,VW-BJEF#
M=I478[$))Y($\@M)@@BSU'G2U3$08"# 0'#E(\-#2=<D/XZV&L4\'^DU!U:>
MT^7YR$.  )W!1#@:/\X=Q*>%&"$P0@0/(;[I"QYR_ZR)DNX+[D1K6K5(*S=O
MN]JRCH""198#&XX2QX64\=%@$(\&D8R$5-2( -A.:&9:B'__@X\$ H[2.,QW
MBAL/H7_<!II_Z/@)AJS:0XBK#I#YY1#J,S=%/QTZ'*QHZV;9K"SYK-(CO>JR
MHVH]:/21?A(I'2:CY!Z4_Q-C <8"C 6!PX(/?;\O8$*'+[*SWJHC:?-U-B+/
M%[P1SRL($Y CR.RG?7T%$.[6W<,8@3$BN!CQ%>_O"U!1C8I$JB&GNQJCZP7;
M4Q*-4:R.H()%"01AXH G> JTN'&/[U;. K?BL3T-A)(<,G?"L_W,', 7E1!?
M\2'A12)_-,0_V70'.GB,T-_EZ;W#V-^'WN(!6,\IJK9:0[JUJ3U+.=K<K<#E
M$TD*>871>#B>.$__(ZS^6/VO3>\=J_\[KN$! &@)1)+2"F*-GV;)<3$"6G;%
MJ2, 8/Q*=N1E _P8$C D8$@XN3_XJ2=XR#203+'7UF1;ZQA&SZYEQ^M1DT/(
M@#R^6#A*G*?LP)UZ@C?4?/ZN>\W?1T6OX)%\]MO< 0IC8IE^#)(?2:;OUB+'
M8H[%_'ZM2VA2H]_^WR^2^'7,KL4FGN*)RYXM_$_H]>G"<\89?,6AJTL.D$.N
MC4X:G#'\[72FJ_"3YU'0<0'_VCN.>'\2^"'T?]#/0].:F>CK(>A76J:'?HM^
M?+H#>7DU;0J^\\!2X30YU#8.T8&FE P[LC\O^465\J7M?QT)NN%_=@Y?Q9W"
M>8=__OWJQU?N;-JU_-,BD83_YSNT+?.%=UM. *-4GJ]F1*25[$;62FNJ:O4W
MAYB0T757,AS5@5,M0%JUA[IINQ9HH;=IP4<E=7.H;5W6@;CF.LL\U[([6BKG
MV=)RT18:GK)QLU7#!3+G?#!.1,/(7U" AM(,OH1CN2! FO]FY='/6[JDK>\M
MJXL__X9_[&8>0E6QD"2/MX]_#JR@U]C*,4'\]UDP?@B0AN[HIJ)_8R?;^ E)
M;.CRW]K_\S__X^7;[\<-MC&@%V2- =I)?E.^_BD@,K" I$7\:C>_)=V35O9N
MBR.?R,0NOO3[.8Z$%B+$/D7)_P[]_2=:CKVUG$K+R(L5VVI[1 <CY_?F6[N/
M_,UM]YEIJX@YORV@^R*,YGXUJ\\6QYS]IL@G!LD)_'%+%<V<B4LO@EKH/_HO
M3_XMA<86TM[_:IG#CQ#GJX_<_(@F@D)L325]\XFWH73[T0OI0>N*KJ@B/0^9
MHU *(8M_/W6K$=*?%]+SGLR_9MDA7DB[:)?0+TPSY?&Z1\R)[J2FYUB*<S@$
M7;\V3WL>.;*U2373R"A\LUE+6:XX';5KBDB)Q-N14FTZ*Y"<-.";!2;JQ0;N
M; 70R+TY2_5:0N0-+L&KXV9>*ZY<TJ 4D=Z?<]&;]6N-69454A.7SR37G%A(
M*6)T?V1>+\P3+6E2X3N%Q8*QFI'UW$#]N/=&TJM"A<I99D9;%>BQD:G'H]4F
MZFBU-W),#]IQHS*/:ZD9G>/KQ55MRJ&2TGLCDQDCHS+QA<J[(CO/T4-K6+#K
M8F)_I)UC9G)G[=3Y52OI9!O$*&W$O4,K[Z7;G9FZ6 T)9AT1BYUFNL4TZH?6
M<UU:JV)S(!7Y>4%5JQF>LL=*_=!ZTD4R2:64GB-TN'R,B_+I'%_UX,B].<V)
MY8Q5IN1HC&/4^74M%P,%-&=L3T)$FFO7!ER;GW:;@^Z8*&4;'0_R:&_.8IV+
M2_%Y2]*8A<M64X-<=VA[AWBT8H=R9S9NE86I.B?46F05S<'UC.W/"91.9B7D
MQU-B:G=6"8JK%!,NFG/O/4U0*<IVW.P)J42Z-F"[#7=:]P[Q/6F51TVSGBWR
M:E;RO+0='V2'!_GN]L!Z/B\KHN8N)'[E+$>E;MD[Q/?&I"/KN<G"%>:YJE7O
MS"+NLJ2([/[(YGP )MT1*VIJK#8L=M:,F2R@*@1[M)?Y^&C%S F28.*5(L45
MDJ.:X6TJ(+T>&1$;Z48YYM:UE>72RB3:T6L)5 ]E;Y7(3MI@TB9=()AIK]>:
M#N(MDO VE5/\D6\VXITQ4JB/%RPSX@N:U!PU.MP\9E ESC<RT'N_\ZT/31-H
MK_J N-LA-Z<E<'?4I9D-?N_^\1)\T1ZRW4\0'@XW.+JS!_SM2W(=<_?!9O/R
M/WFUQ;VP<+=C]DT(Q]J]V/:!Y&9/.2Z<!G?HV(=>Z N0?S&_"><<Z::WLYUV
M/T>0K?Y[8P]X<)T^W8JWII'_X-U0:6";N@O=C_/NPN^[OU^QU?_:43^-^#S%
M/G1M,",NQ CZB?[05<>,N! C2*P/@6##4^S#T"QFQ-<8\<53ZD]WZ,N&QE\Z
MD -3ER]T'/+)YGCF.,K95^4YGDP=%4XFHY_L4:=.RSFX'(-7#WE)_:\_!=<
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MV 2VL6_5QK[1KJY!V ,"NS:/#+(!P])C A0/B)%!@\+[L5Z/.7XZKJ+$S+6
MV''=M69:PQ[?U!?KB=(<=OLUY:<E);Y?9.:-"9S>6B8-:)C4@(6H?:XQ$:&>
MK6%B3L\ Q=9SO-N:EYL33A'!C!/C?OFII_T^%/^-3=W','4_#RU@R_8&+=N?
MP/F-6*AWA_,?!#J.1'E3U]JZ7(JV^6R>S;!&TB,F++H4XC<@.Q;FL15^\U;X
M"2_!WZR5?A]V>1"(O'"HX;,H#$Y^.&_=@=>WW0,BP>=^#5FU9[JT^JT:NFJ
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MO'["\-F/'2[;A?3\AV77[C+ZS52(D_0AKFW2;>P#S4:EF9)*&9PN\RNYEXY
M@%^ J+>Y%4V%XS'RLEV( W-^B#7\#!I^WKT^:!I.O-1P0M3[R76/'8SJ0F<2
M*Z<\RTJ+!'=^#?>D:G,H,@XOK(@YWS6TQ"QMHKH'#-+P*,M<N)GP UM\MV38
MC<Y08N;FK;<@0OBE+NEB"^VD%MK+RUWY;9;T%L6KQD?MX;N);B0QC4^6_*K4
M'AI2G^0CF3IZ483GL=AQ>/Z AMF#*R\VODYG?'U;>9D./R><?*K'SYGY'(RU
M981<H<Y?OC$6CYY%>1_:YKJ5*-M&I+YMC.$8VPUZX#==;@K;@V>S!VN[.W$?
MN/6U;KSI+EC7T%RJ5K-+E8S=J'B; BXT0^&P'0:- "X.MD//9H<> QI$NMNI
M9*NN141$N<'FY8HZ6Z"J3PRJ!Y+ D<"'CP1N<A:WEY3-@2.IQB:_$2R'8\E0
M@)\ ^?:&\ZL<1QPIQ,$&;!F>SC)L(/*J(\$&'%++ZE8I\P:_5<F,:;T^#?HH
M E'UV.H*= 9EH=/+SQ:9>KU"];A-2:AHF&2/LQP?T$!\<(W&9MOIS+;3:K1<
M7XM<.L:31&KH#OL5=<6N7%3D#1EU88(^SJS#UMN]QA3!D4:= 9_QNIK/)V8=
MCCG>8/C@X?/Z$"])ZJR%3N_!W,$"?2NFT 4$^J%W^T!?Z+FC&SM7)O+:A7P>
MHRC50Y2APO)Z2GF]P,X3O&+##[7?OBPV_+*[7C"+:EVB(O*WZK!*NXB0DEI+
M/9+LUP6JV,^(XT)YZ33K*+*%[BU++T8FJ"K9+<V8A%8D<VJT/BK0<IV#(Q-O
M1U:5KC$>C"H$K]9ESEUG^K.>IXC4_ISZ6E@N9@6[*%!T:F)4<Y-6>E&'(_?F
MS(VTJ<S0<ER0XKG9I-")9$7=$^G].;NMA--(9)8M?EZ=9K(*$3.-3AV.C+T=
M.2W6I^-Z95S1W$5$])PV,Y^*"ARY]W20GW#S3L&<"8">B.EB*I,O>NCI)/EV
MZ#AKEUVUT&1XRET0D[RD17H*)T;W7S1%2#5:2\HDOZ+C\9[9-+2LI8@QD7@[
MLE6(2$ZV30PA\:)=L#DJUFMQ<.3>G/5RDEKWG#HM3"/6N+F.ZYPQ0G>T]H@?
MJNVQ0+")*>]F8XU1SFN7\V4T<H_XBIW/U ECTA= ?]3E^S$IU=71T_>)+V9<
M>9VMTUFMF'76]7J:,9<I163V28+8)>1I-E'6&++:35DKN3^A4$[*WLAD65X3
M1+D\XSL%+M.U#*L::RMPY![QXWF*L9J@KVK5:G(Y3 GQ?II%<^YS7I)73$>J
M=@2I2PGBLFVLM#DZW-[GO-N=1W)>9"E(?7Z1BE5M(]5 (Y^)/U-)X^< ,%@
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M>:43HPKQR'*</PB4FE6*-LAV9T),:\,D"_3Q*!WG#@$EL:C0M?$BU>&S4:8
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M]<];/RY(JD^(D5C*(\FZV> 9(\>)AK*0B/CE[H;WQY61U)7)&M&<F!3!Y8N
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MF9J)NX^-1:FJ<KLR*RMS=C-I#&7S_L8P1H-[NPM:@@1O(BFF)9B68%KB+.)
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M-AWR;[@%[;Y E]41=AGQ $/#LCE)&6.[(G61X4"5&W. !X<WP=/S5RW&A0W
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M5:I)YAMSVV"7?[<,\0[WP" >LX'" KWF=+"64<$8C T-JSCXBJIWP#+ ATL
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M .E/A06.D*G D(-D^N/6_%:F-9C6\(/6V ^A-__=8/2Y?A"_JAY282$6:.U
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M_$?B,+S$<O0_=4/>5FGYJZ^DO\) F&6Q=&DKI9K=CY:X!_85TC))S,GH<)!
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M J=/V/0LUL45'*QG\=J#B#]LPH6>6B(J)$2:$HXL],O[X=\];+>GGY<^ =5
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M=I,^L+1+[#F;+JBT"_#4@\AVR3U73O$-E#@#@)@(=D\[EH#K/QA80#HR)8T
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MX#G_9'=VY]8$:+L8UCNIU_N]F,E?83V_[0Y3VPSW^%["&.YA G0R 8J&DTR
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MR1R8$[K\%7QN*Y. 9\AY>#$\.@G%W3&=L?PVN("/IB,(.8\\X"& @;@1J*Z
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M7[.?OAZ 1RNV&A"6$=Y "7B[P%10_SRT4HQ\82#@,4];\UW"0@-=O8I<O2Q
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M&U5SQNYYG*^H=-?1J95-D\IU/6ET!LI5[]@VNB7HEM3>FG3J^58L.<,^",X
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MO%)>#G:*8*<(=HI<4*?(7UG (NJ+7A'JSKS BY.()MX=PX:1,ZF#P#*@0\N
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M'HQV+"#LHP%A:?UZVU"?>QK09WA@Z%XGX;7\A,>E5J0(AO5NN/)<OJ]U<J#
M5R3P1OTG_BDH\&T^Z+"E7AKZHQ>BC9[KC[;X3-:B.0W-4X7^:(L!\7Y*@PE#
M+[5"+[7%:$#U4(?WVF) 5*H>T*=%GQ9]VGITU-$';+?;8/%M'=!6(0[D=BF(
M@^?CH*?9PU9#X>HL<; VT8:V?[3;O;Q=.3045[D5&(JVKVG09T"? 7V&:GT&
MO=UF GV&*GV&=F.A#I<!(U^GBGRM5&3J6YZRK <7&8"5Z6),K8UZ\&A[>+Q!
M[&FFVG5JKUR^>6042T7A!?+?9!JF,0W<^'5U:R5U</ L>[A!ZI]Z!'!#ZF#M
MF)3R_J=T9?]3/+/[>;/<UUA<_2QK/81>M0.-RL*\[00CP^B81A]/H4=$GPVB
M]8YN&XCHRF99\P%>>R!03+M6H*MV,/-!0.\8_1[BO#($[-Z1K 6G$1K&]K.Y
MJR)3[?F;-3"\;$[3[=Z!"VUW[2K-!&_4TE&GH3=Z+H@VAAV]C^NK"A%]1H!N
MH]=I=HRNA7BN# %* > XIW/K&=C58:'^)>BRSUFS"]UP6'\_LI5+RRVS),<H
M,<R]0!5=Q3RE0R?BG+J(W;$@96TYI[T-YYG7[E<^[V#K$U%%-??T"&7>UWIM
MD9,UG;U;)[RL:%X(_3.%_D S$?JGS02T$OJUK^%:215TDYI(*;02&NIT@)Q4
M/FK.-;02&F?@1J 'C1[TQ4)_B- _:?:BE<A7W(&^0'>YN4ZG2^=Z ^MII6:L
M1$?#L1I.Y$C>)'3DL_J'>N# *A03+X"W)#=6;W5<G]*(3+9V01#V,&=!#.^+
M6)SZ"9E''MP.XR#C*)R19,J($\9)3&@<AXY'$^:2>R^9DA">RQZ8D_+'=,C8
M"VC@P <O&(?1C/(]^DG"G&D0^N'DL4-\-LE&,$UA5OQ]\ B'D7$:./SJ6*N0
M)HJPYF O1?#094X8"<K=I,#.R/<"MOI+GKS,FDDW[KA>;&7'V_W)^W VIU'.
MMCV7ZX6OU)S^ZA^NOYH0F.TM0[FPD'L:DRO#T$R9B(51^!SN;AJ!.A0RD^SA
M2@<>#Z+B1(S&(L]Y!4\CV8,Z)(Q$.>C+#@A?F7M7AJ[IQ[Y4UX#[;/%6+RY)
MNYO"_>'2J+R S%D4AT' _(6>X&2!2X!VG"(CN- E<_J87X!"?(P0KVVAODN$
M=UZ, GRP )N[!#C>R9%U\377Q=?:(+Y#S3CNE2B\50QC5UOP)^!!1%Y]D*1X
M33X&P+S%_I^-B-,1';K"HRV*G.3>$PYO<)['[";_4!X&EY=L2X 9?8!K@P3P
MD#OSUSX;)V7O_CHJ=@]8/FEI;8,!0T[JP!JDOM8?X)%2RXKT1$>LZ<@(9 0R
MHA3--W>>N(.,:.[T1SP@6 U&H&I2@A&@FE B5& $'DRK"A]0,RG!"'2:%&$$
M2H0BC$")4(01N(Q0AA&HFI 1R BT$<HQ FV$,HS0D1$J,**WN\03^8"1I@OC
M RHF)1@!/A,ZKRHP B5"$4:@1"C""+35JO !B\NJ9,13-QC;5]S7HL-/:HNQ
M5=XCM_$@G/JH4IP5U#WVJ" #EIBFTD<%;>B6:<FQ:*J PSX:'+;6K[>K]KG@
M^ P/#-WK)+R>BT_5(:/>/O/GSKOBXP%12^[7DO7VW3X7$&L-2:@CF].1]9^N
MJ::.5'K:%:O()ISIX^7@F4<)XD("360U"XD6G[Q<M'JV1$&J IGG+B]:#!EG
M2H,)PT4':M3Z%ATM%@_4J*=9C+08,E5KU$M2J+A$P26*NORO3#N:QVK'OMA^
MO\7*D6][TQ9G\QS0TF\[6O26&-)S $N[5<L5+NMJW9O<;+<N>=D6LZ.82W[>
MPH!Z$UVRAM$R;#M:T"5#_[UQE^RL]<K1+MF@U?"HT"6[)(_L[(*D^8.R(GI]
MRU.6E6JOT*HK!,#P*_KZ>PRR=:Q%[@U5KZ)\Y?+-FJ-8ZAPOD/\FTS"-:>#&
MKU$+'9*J&5'G^R0*T\#--]EW',;&X[>G52)K1Y;)W<:S?=<WL?6I$SF9;EB;
M6FXTSVE.5W5.9]\F,'6?'K@JD-N."'QE=$Q[^'J'W:J.P36'(Q"T%8"V?A95
M =J!/F@(LHA8U1%[4C6[>DCK(>BU;:,1[)Z?CZ :MX\XDK=K;S^.NKV6]B4B
M6?4YG;4:/MAQL#K6L"G7X1R]W8;G5#-H3WJ^^\&8-1M<H2%D%8?L[DVA5'1W
MC8YA#YMQ>,].XZK&[V,<7D,S&G!XS\K?52#[E3_V/8QY%'GPF+\Q_X[Q>?!'
MTB"^7G_N4[:C4C(ON,SH'/G$,/?"7VR+P-,B="(.CXW8'0M21K9!7[7UPL$9
MT>$3>:SNE _PSW8R/%?_E3!8A174$=K]E:YQU[0BC#>]9-K-WY=MD5W5@'SR
M',)Q0.Y7"&3$<055!OM6S"<P2K6KZ1;0X )]$61[4^T$BDWYXI!^<<Y**[UN
M0S/1ZU8@'*@0D$^>RS@.QSHZW6HUVRCH>=0>!6\!#9K!@5)31K8WU)6IV(PO
M*OOQ)J$CG_V4'<Q1.F_$\1F-.+6FV6#SID*+#[J. T>V]G>8=BD7(DEF=E</
M%?GSGY9.2UG+A64-D*5I90UFIN#QA%W+PUCH&-Y\0_U[^AAGTQP8FE'T5MX4
M392<$&2HV<9+LOC(R;%&RQE]N"Y1+$/4M<_&R8V\*_]*J(#\NSTGPF1L2<+Y
MC6EH/8XJ^#.;E=6KB4LKZ2FKE)VE9!JQ\8\O?O@6.KM0_=17EOR;((QFU%]J
M_LJ^*J&'TQ7&\XTCF^?"WL/5 *BXD #Z4PD]VS"_S+)-O&A$%1S1XG;>XQ*,
M]@)X2X;R#3U0K[(FJ-?$"YQPQH@3!K$7)S&91QY<#R_FP/"XEF%QDO=,$<G=
M8$*2D,"#R-@+:. P KB 7\,1P(MR&)![QI^<1A%SX0-_?, <^8N73,6]IFYT
M24PE!,,T(E-&W7^E-()WQF1,'4$P0@.7A&+0\F7\[8L7Q1TR#B,@=0!CE'M)
MD@GU@EC<YX=Q#+2C21)YHU1H<C[RL9\Z22KOYR_GH_E#^ZH1V0U(J'A" K>#
M621B%O!>)JYUP%K"K_EM#JA0>#C\!M^!S72F?.KAG$4T883&\)?O\W\7I*11
M $0!2O Y>\$=? E_.S2>DA'U.3ECC32&AR7@*H?3''?W0,$K0S/EFAS>YW,H
M ><%$Y+U$X.*G6CY?BT=8--L3CD6!?JN=&UPU)-TC7R;"F1' O <!VOC7$B0
MFPJX 7W+=^1XS7#UN "NA*M&-LS=TNS-(XY7SP'9/7-S&PUW/J>1>7.1 L[T
M2#ZTDO10T#QN*A6(O*Q;7.8%"^'*M-G]E 6+F6>Z"F9X+69(Y+$8&^=Y&KE;
MW-D_W$=M8I2_I)'0]AO(MQ%O0NMR0G:X&IQ2EP0AW#D)O#&XYD$"S!M?9UKN
M.IXREI#(B[^3. 7%"7PN( $&(XFHDX!^#^>"[<4W!! KT3=E[H0/CT81OVG&
M?9A*5:>2'#N\N_VCE(9O](%\CD(^2*!CT=*NJA<DS72^3I'[M3C<,,]C=I-_
M* ^#HS;SZKE7ZDAO=GD545JH9FN(]57:VM8:AIS4@<5O/<W&@TA7A.,D!Y'J
MVA"/2$9&(",*1G2UP<XT*C("SZJ^*#Z@9D)&("-63 0R0@5&H(E0@P^HF11A
M!#JOBC ")4(11O2TP<YM-9$1C=GJ7@\9@8Q 1J"-4(P1Z#4IP@A<SZG!!]1,
MR ADQ+*)0#ZHP >T$(KP ;F@ !? <=W97X*,0'&X("[T-1O%005&&+B@5H41
M/61$A8QXZB:/^^I<+^'PMWUKV%,?Z/5<JA2'O_6./?O-J'WKEN>>_?9MO=>G
M)2=LJ@(.^VAPV%I_IWMY<G!\%CTNUTEX+;M=*D/&[CS5R>==\>&K-<]6%4%X
MEI:L=S>%YP+BZVI?(.K(AG1D5[/4AD9M.G+W0NOD\ZY:1S:[<V6S1\/B2@)7
M$M6L)+).T&SY;<P?"*RY/9?D&]<HK#"*%FFTG8VN+UH,&=D&WQ8_7#6+BJN.
M0U8=+18/U*BG68VT&#(5:U1<HZ@C'KA&P35*)>K1/%8]]H0^:+%VY)LWH2U]
M$EBL8\'2%Q5.[0:+CF!!S7(06*XJ0LJY&Z&CX6&W&AXOV[+J5\TCOXP8Q^7J
M3?3(FO3(AFW'"CIDS2F6=H.E*H>LW@*N5GICLEB_Q=BHSAO#^*@ZPG!$?#1_
M4%9!KV]YRK)*'10Z=84 &'G%1>\><]P]VG?35=<UK^2Q(K'4.5X@_TVF81K3
MP(U?HQ8Z)$NS?F*5XS V'K\]K1)9.7CSGVF<>./'9:)D^_ G](',\WWX-S'\
MJ5,\F=98.VLS-Z?G-*>K.J>S;WN>N@^$)=;2<7%+8KOM-%BK,[#-';:M*MJ<
MP9F*[44]2G+%&R>K*,EFQ^P;9R#)B-Y+M$-&I]L(>L]1^>[;.E;5@^A[0\W<
M>A)]=>JJYJS:&L-?GM=T4/U>@/KM=KH]ZPR<!UP&H"17*<FM6P58'<LXA_7\
M"<!;;^ZS<1M4;Y]Y/0O8;B,+V',#[K[MY)IF]A%K@=Y T^M?"33@ES6Z$F@@
M-;3'E\H?^Q[&/(H\>,S?F'_'^#SX(VD07Z\_]RD;FRF99%YF= Y]8@SVXE]L
ML,%S;'3"^*'G$;MC0<K(-NRKYG\UX%^K-N7G!3\6^K\2!JNVMCQ"U9M:KR)B
M-.Z#[F;TRU8)\1Y(;Y?J]:FCG-<AYTHM/8^0<W"W4,Y;+.>-2'7M]JP%-+A
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MG6T%HS<GJI\\"@<95[*PAPA1\)"'3^<QN\D_E ?%QY %"?@B-]/R>9!'Q"1
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M7V-=%'E.Q7,L:$9\ID06(//J=7]GF71]T\!=P??W]-W%_X/_ 5!+ P04
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M?EB#;3(97T@#%17YIRM!EC3EBO-K\)9 ?88T^ ..[Q/'V9U'=P^1FU"C0X[
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M0.HQM[KNK>^$JTOF\>]02P$"% ,4    " "15@93+LM5\5D.  "8H@  $0
M            @ $     86-L<RTR,#(Q,#8S,"YX<V102P$"% ,4    " "1
M5@93U-+K'E81  "Q"P$ %0              @ &(#@  86-L<RTR,#(Q,#8S
M,%]C86PN>&UL4$L! A0#%     @ D58&4Z*$1DGU'0  ^^D! !4
M     ( !$2   &%C;',M,C R,3 V,S!?9&5F+GAM;%!+ 0(4 Q0    ( )%6
M!E,QF9.-CET  *$P!@ 5              "  3D^  !A8VQS+3(P,C$P-C,P
M7VQA8BYX;6Q02P$"% ,4    " "15@93('*EUT@\   R4 0 %0
M    @ 'ZFP  86-L<RTR,#(Q,#8S,%]P<F4N>&UL4$L! A0#%     @ D58&
M4ZN5:)@'^ $  >L= !4              ( !==@  &%C;',M,C R,3 V,S!X
M,3!Q+FAT;5!+ 0(4 Q0    ( )%6!E,+*<R*O@@  ,LP   8
M  "  :_0 @!A8VQS+3(P,C$P-C,P>&5X,S%D,2YH=&U02P$"% ,4    " "1
M5@93$NO1K>4(  "$,@  &               @ &CV0( 86-L<RTR,#(Q,#8S
M,'AE>#,Q9#(N:'1M4$L! A0#%     @ D58&4]LXDG\[!0  /1H  !@
M         ( !ON(" &%C;',M,C R,3 V,S!X97@S,F0Q+FAT;5!+ 0(4 Q0
M   ( )%6!E-A+>,(! 4  #<7   8              "  2_H @!A8VQS+3(P
G,C$P-C,P>&5X,S)D,BYH=&U02P4&      H "@"F @  :>T"

end
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
