# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001558370-21-014801
Filing Date
2021-11-05
Accepted
2021-11-05 14:04:50
Documents
71
Period of Report
2021-09-30

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | acls-20210930x10q.htm iXBRL | 10-Q | 2059413
2 | EX-31.1 | acls-20210930xex31d1.htm | EX-31.1 | 12615
3 | EX-31.2 | acls-20210930xex31d2.htm | EX-31.2 | 13056
4 | EX-32.1 | acls-20210930xex32d1.htm | EX-32.1 | 6841
5 | EX-32.2 | acls-20210930xex32d2.htm | EX-32.2 | 6067
| Complete submission text file | 0001558370-21-014801.txt |  | 7193993

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
6 | EX-101.SCH | acls-20210930.xsd | EX-101.SCH | 40517
7 | EX-101.CAL | acls-20210930_cal.xml | EX-101.CAL | 68250
8 | EX-101.DEF | acls-20210930_def.xml | EX-101.DEF | 121781
9 | EX-101.LAB | acls-20210930_lab.xml | EX-101.LAB | 397524
10 | EX-101.PRE | acls-20210930_pre.xml | EX-101.PRE | 278241
11 | EXTRACTED XBRL INSTANCE DOCUMENT | acls-20210930x10q_htm.xml | XML | 1361877

Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 211383832
SIC: 3559 Special Industry Machinery, NEC