<SEC-DOCUMENT>0001209191-21-033621.txt : 20210518
<SEC-HEADER>0001209191-21-033621.hdr.sgml : 20210518
<ACCEPTANCE-DATETIME>20210518173252
ACCESSION NUMBER:		0001209191-21-033621
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20210515
FILED AS OF DATE:		20210518
DATE AS OF CHANGE:		20210518

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			FALLON LYNNETTE C
		CENTRAL INDEX KEY:			0001195654

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-30941
		FILM NUMBER:		21937454

	MAIL ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AXCELIS TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001113232
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				341818596
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915
		BUSINESS PHONE:		978-787-4000

	MAIL ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	EATON SEMICONDUCTOR EQUIPMENT INC
		DATE OF NAME CHANGE:	20000501
</SEC-HEADER>
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<TYPE>4
<SEQUENCE>1
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<DESCRIPTION>FORM 4 SUBMISSION
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            <rptOwnerStreet1>C/O AXCELIS TECHNOLOGIES, INC.</rptOwnerStreet1>
            <rptOwnerStreet2>108 CHERRY HILL DRIVE</rptOwnerStreet2>
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            <rptOwnerState>MA</rptOwnerState>
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            <isDirector>0</isDirector>
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            <officerTitle>Executive VP, HR/Legal</officerTitle>
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    <footnotes>
        <footnote id="F1">These shares were withheld by the Company to cover the tax withholding obligations of the executive on the vesting of restricted stock units.</footnote>
        <footnote id="F2">Represents the closing price of the common stock on the date of the tax withholding.</footnote>
        <footnote id="F3">Of the shares held after this first tax withholding forfeiture (and related vesting) on May 15, 2021, 28,016 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.</footnote>
        <footnote id="F4">Of the shares held after this second tax withholding forfeiture (and related vesting) on May 15, 2021, 25,292 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.</footnote>
        <footnote id="F5">Of the shares held after this tax withholding forfeiture (and related vesting) on May 16, 2021, 23,395 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.</footnote>
        <footnote id="F6">Of the shares held after this tax withholding forfeiture (and related vesting) on  May 17, 2021, 21,207 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.</footnote>
        <footnote id="F7">These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan.  Assuming continuation of employment, 25% of these restricted stock units will vest on each of May 17, 2022, May 17, 2023, May 17, 2024 and May 17, 2025.</footnote>
        <footnote id="F8">Of the shares held after this first grant on May 17, 2021, 29,064 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.</footnote>
        <footnote id="F9">In this grant under the Company's 2012 Equity Incentive Plan, the executive may earn shares of common stock, ranging from zero to 150% of the granted units. The shares are earned based on the achievement of 2021 performance goals.  Assuming continuation of employment,50% of the earned shares will vest on each of February 28, 2022 and February 28, 2023.  Unearned restricted stock units will forfeit on February 28, 2022.</footnote>
        <footnote id="F10">Of the shares held after this second grant on May 17, 2021, 36,921 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture.</footnote>
    </footnotes>

    <remarks></remarks>

    <ownerSignature>
        <signatureName>Lynnette C. Fallon</signatureName>
        <signatureDate>2021-05-18</signatureDate>
    </ownerSignature>
</ownershipDocument>
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</DOCUMENT>
</SEC-DOCUMENT>
