<SEC-DOCUMENT>0000902664-21-001297-index.html : 20210212
<SEC-HEADER>0000902664-21-001297.hdr.sgml : 20210212
<ACCEPTANCE-DATETIME>20210212160703
ACCESSION NUMBER:		0000902664-21-001297
CONFORMED SUBMISSION TYPE:	SC 13G/A
PUBLIC DOCUMENT COUNT:		1
FILED AS OF DATE:		20210212
DATE AS OF CHANGE:		20210212

SUBJECT COMPANY:	

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AXCELIS TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001113232
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				341818596
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		SC 13G/A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	005-60443
		FILM NUMBER:		21627254

	BUSINESS ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915
		BUSINESS PHONE:		978-787-4000

	MAIL ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	EATON SEMICONDUCTOR EQUIPMENT INC
		DATE OF NAME CHANGE:	20000501

FILED BY:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			Senvest Management, LLC
		CENTRAL INDEX KEY:			0001328785
		IRS NUMBER:				000000000
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		SC 13G/A

	BUSINESS ADDRESS:	
		STREET 1:		540 MADISON AVENUE
		STREET 2:		32ND FLOOR
		CITY:			NEW YORK
		STATE:			NY
		ZIP:			10022
		BUSINESS PHONE:		514-281-8082

	MAIL ADDRESS:	
		STREET 1:		540 MADISON AVENUE
		STREET 2:		32ND FLOOR
		CITY:			NEW YORK
		STATE:			NY
		ZIP:			10022

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	RIMA SENVEST MANAGEMENT, L.L.C.
		DATE OF NAME CHANGE:	20120127

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	RIMA MANAGEMENT, LLC
		DATE OF NAME CHANGE:	20050531
</SEC-HEADER>
<DOCUMENT>
<TYPE>SC 13G/A
<SEQUENCE>1
<FILENAME>p21-0601sc13ga.htm
<DESCRIPTION>AXCELIS TECHNOLOGIES, INC.
<TEXT>
Document 1 - file: p21-0601sc13ga.htm

</DOCUMENT>
</SEC-DOCUMENT>