Form 8-K - Current report:
SEC Accession No. 0001104659-21-065918
Filing Date
2021-05-13
Accepted
2021-05-13 16:04:23
Documents
12
Period of Report
2021-05-12
Items
Item 5.07: Submission of Matters to a Vote of Security Holders
Item 8.01: Other Events

Document Format Files

Seq Description Document Type Size
1 FORM 8-K tm2116060d1_8k.htm   iXBRL 8-K 51737
  Complete submission text file 0001104659-21-065918.txt   225544

Data Files

Seq Description Document Type Size
2 XBRL TAXONOMY EXTENSION SCHEMA acls-20210512.xsd EX-101.SCH 3184
3 XBRL TAXONOMY EXTENSION LABEL LINKBASE acls-20210512_lab.xml EX-101.LAB 34592
4 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE acls-20210512_pre.xml EX-101.PRE 22709
5 EXTRACTED XBRL INSTANCE DOCUMENT tm2116060d1_8k_htm.xml XML 3487
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 8-K | Act: 34 | File No.: 000-30941 | Film No.: 21919539
SIC: 3559 Special Industry Machinery, NEC