XML 92 R78.htm IDEA: XBRL DOCUMENT
v3.22.0.1

Schedule II Valuation and Qualifying Accounts (Details) - USD ($) $ in Thousands | 12 Months Ended
--- | ---
Dec. 31, 2021 | Dec. 31, 2020 | Dec. 31, 2019
Allowance for doubtful accounts and returns |  |  |
Changes in Valuation and Qualifying Accounts |  |  |
Balance at Beginning of Period |  | $ 818 |
Charged to Costs and Expenses |  |  | $ 818
Deductions |  | 818 |
Balance at End of Period |  |  | 818
Deferred tax valuation allowance |  |  |
Changes in Valuation and Qualifying Accounts |  |  |
Balance at Beginning of Period | $ 9,133 | 8,327 | 6,835
Charged to Costs and Expenses | 780 | 806 | 1,492
Deductions | 2,224 |  |
Balance at End of Period | $ 7,689 | $ 9,133 | $ 8,327

X
- Definition A roll forward is a reconciliation of a concept from the beginning of a period to the end of a period. + References No definition available. + Details
Name: | us-gaap_MovementInValuationAllowancesAndReservesRollForward
Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

X
- Definition Amount of valuation and qualifying accounts and reserves. + References Reference 1: http://www.xbrl.org/2003/role/disclosureRef -Publisher FASB -Name Accounting Standards Codification -Topic 235 -SubTopic 10 -Section S99 -Paragraph 4 -Subparagraph (SX 210.12-09(Column B)) -URI http://asc.fasb.org/extlink&oid=120395691&loc=d3e24092-122690 Reference 2: http://www.xbrl.org/2003/role/disclosureRef -Publisher FASB -Name Accounting Standards Codification -Topic 235 -SubTopic 10 -Section S99 -Paragraph 4 -Subparagraph (SX 210.12-09(Column E)) -URI http://asc.fasb.org/extlink&oid=120395691&loc=d3e24092-122690 + Details
Name: | us-gaap_ValuationAllowancesAndReservesBalance
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | instant

X
- Definition Amount of increase in valuation and qualifying accounts and reserves from charge to cost and expense. + References Reference 1: http://www.xbrl.org/2003/role/disclosureRef -Publisher FASB -Name Accounting Standards Codification -Topic 235 -SubTopic 10 -Section S99 -Paragraph 4 -Subparagraph (SX 210.12-09(Column C)(1)) -URI http://asc.fasb.org/extlink&oid=120395691&loc=d3e24092-122690 + Details
Name: | us-gaap_ValuationAllowancesAndReservesChargedToCostAndExpense
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | duration

X
- Definition Amount of decrease in valuation and qualifying accounts and reserves. + References Reference 1: http://www.xbrl.org/2003/role/disclosureRef -Publisher FASB -Name Accounting Standards Codification -Topic 235 -SubTopic 10 -Section S99 -Paragraph 4 -Subparagraph (SX 210.12-09(Column D)) -URI http://asc.fasb.org/extlink&oid=120395691&loc=d3e24092-122690 + Details
Name: | us-gaap_ValuationAllowancesAndReservesDeductions
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration

X
- Details
Name: | us-gaap_ValuationAllowancesAndReservesTypeAxis=acls_AllowanceForDoubtfulAccountsAndReturnsMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_ValuationAllowancesAndReservesTypeAxis=us-gaap_ValuationAllowanceOfDeferredTaxAssetsMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |