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Summary of Significant Accounting Policies - Revenue Recognition (Details) | 12 Months Ended
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Dec. 31, 2021
Aftermarket |
Product warranty period | 90 days
Systems |
Product warranty period | 1 year
Minimum | Aftermarket |
Product warranty period | 1 year
Maximum | Aftermarket |
Product warranty period | 3 years

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- Definition Represents the extended period for which the warranty is offered for the products sold. + References No definition available. + Details
Name: | acls_ExtendedProductWarrantyPeriod
Namespace Prefix: | acls_
Data Type: | xbrli:durationItemType
Balance Type: | na
Period Type: | duration

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- Details
Name: | srt_ProductOrServiceAxis=acls_AfterMarketMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

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- Details
Name: | srt_ProductOrServiceAxis=acls_NewSystemsRevenueMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

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- Details
Name: | srt_RangeAxis=srt_MinimumMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

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- Details
Name: | srt_RangeAxis=srt_MaximumMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |