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Revenue (Details) - USD ($) $ in Thousands | 12 Months Ended |  |  |
--- | --- | --- | --- | ---
Dec. 31, 2021 | Dec. 31, 2020 | Dec. 31, 2019 | Dec. 31, 2018
Disaggregation of Revenue |  |  |  |
Contract liabilities | $ 68,436 | $ 23,058 | $ 29,251 | $ 22,584
Deferred revenue | 60,454 | 21,221 |  |
Long-term deferred revenue | $ 7,982 | $ 1,837 |  |
ASC 606 Adjustments | Maximum |  |  |  |
Disaggregation of Revenue |  |  |  |
Unsatisfied extended warranty performance obligations, period | 24 months |  |  |
Systems |  |  |  |
Disaggregation of Revenue |  |  |  |
Payment upon shipment of tool, as a percent | 90.00% |  |  |
Payment upon installation, as a percent | 10.00% |  |  |
Aftermarket | Minimum |  |  |  |
Disaggregation of Revenue |  |  |  |
Payment upon delivery of parts, period | 30 days |  |  |
Aftermarket | Maximum |  |  |  |
Disaggregation of Revenue |  |  |  |
Payment upon delivery of parts, period | 60 days |  |  |

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