# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001558370-22-007307
Filing Date
2022-05-05
Accepted
2022-05-05 14:07:09
Documents
69
Period of Report
2022-03-31

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | acls-20220331x10q.htm iXBRL | 10-Q | 1435778
2 | EX-31.1 | acls-20220331xex31d1.htm | EX-31.1 | 12609
3 | EX-31.2 | acls-20220331xex31d2.htm | EX-31.2 | 13050
4 | EX-32.1 | acls-20220331xex32d1.htm | EX-32.1 | 6835
5 | EX-32.2 | acls-20220331xex32d2.htm | EX-32.2 | 6061
| Complete submission text file | 0001558370-22-007307.txt |  | 6043877

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
6 | EX-101.SCH | acls-20220331.xsd | EX-101.SCH | 39627
7 | EX-101.CAL | acls-20220331_cal.xml | EX-101.CAL | 67860
8 | EX-101.DEF | acls-20220331_def.xml | EX-101.DEF | 145939
9 | EX-101.LAB | acls-20220331_lab.xml | EX-101.LAB | 378753
10 | EX-101.PRE | acls-20220331_pre.xml | EX-101.PRE | 267790
63 | EXTRACTED XBRL INSTANCE DOCUMENT | acls-20220331x10q_htm.xml | XML | 1078780

Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 22895465
SIC: 3559 Special Industry Machinery, NEC