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v3.22.1

Revenue (Details) | 3 Months Ended
--- | ---
Mar. 31, 2022
Systems |
Disaggregation of Revenue |
Payment upon shipment of tool, as a percent | 90.00%
Payment upon installation, as a percent | 10.00%
Aftermarket | Minimum |
Disaggregation of Revenue |
Payment upon delivery of parts, period | 30 days
Aftermarket | Maximum |
Disaggregation of Revenue |
Payment upon delivery of parts, period | 60 days

X
- Definition Represents the percentage of payment terms due upon installation. + References No definition available. + Details
Name: | acls_PercentageOfPaymentUponInstallation
Namespace Prefix: | acls_
Data Type: | dtr-types:percentItemType
Balance Type: | na
Period Type: | duration

X
- Definition Represents the percentage of payment terms due upon shipment of tool. + References No definition available. + Details
Name: | acls_PercentageOfPaymentUponShipmentOfTool
Namespace Prefix: | acls_
Data Type: | dtr-types:percentItemType
Balance Type: | na
Period Type: | duration

X
- Definition Represents the period for payment upon delivery of parts. + References No definition available. + Details
Name: | acls_PeriodOfPaymentUponDeliveryOfParts
Namespace Prefix: | acls_
Data Type: | xbrli:durationItemType
Balance Type: | na
Period Type: | duration

X
- Definition Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table. + References No definition available. + Details
Name: | us-gaap_DisaggregationOfRevenueLineItems
Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

X
- Details
Name: | srt_ProductOrServiceAxis=acls_NewSystemsRevenueMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | srt_ProductOrServiceAxis=acls_AfterMarketMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | srt_RangeAxis=srt_MinimumMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | srt_RangeAxis=srt_MaximumMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |