# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001558370-22-012118
Filing Date
2022-08-04
Accepted
2022-08-04 12:21:17
Documents
70
Period of Report
2022-06-30

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | acls-20220630x10q.htm iXBRL | 10-Q | 1964308
2 | EX-10.1 | acls-20220630xex10d1.htm | EX-10.1 | 99738
3 | EX-31.1 | acls-20220630xex31d1.htm | EX-31.1 | 12612
4 | EX-31.2 | acls-20220630xex31d2.htm | EX-31.2 | 13053
5 | EX-32.1 | acls-20220630xex32d1.htm | EX-32.1 | 6838
6 | EX-32.2 | acls-20220630xex32d2.htm | EX-32.2 | 6064
| Complete submission text file | 0001558370-22-012118.txt |  | 7254767

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
7 | EX-101.SCH | acls-20220630.xsd | EX-101.SCH | 39378
8 | EX-101.CAL | acls-20220630_cal.xml | EX-101.CAL | 68361
9 | EX-101.DEF | acls-20220630_def.xml | EX-101.DEF | 146837
10 | EX-101.LAB | acls-20220630_lab.xml | EX-101.LAB | 380570
11 | EX-101.PRE | acls-20220630_pre.xml | EX-101.PRE | 269387
64 | EXTRACTED XBRL INSTANCE DOCUMENT | acls-20220630x10q_htm.xml | XML | 1369703

Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 221135599
SIC: 3559 Special Industry Machinery, NEC