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ACCESSION NUMBER:		0001104659-22-016582
CONFORMED SUBMISSION TYPE:	SC 13G/A
PUBLIC DOCUMENT COUNT:		1
FILED AS OF DATE:		20220209
DATE AS OF CHANGE:		20220209

SUBJECT COMPANY:	

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AXCELIS TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001113232
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				341818596
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		SC 13G/A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	005-60443
		FILM NUMBER:		22606514

	BUSINESS ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915
		BUSINESS PHONE:		978-787-4000

	MAIL ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	EATON SEMICONDUCTOR EQUIPMENT INC
		DATE OF NAME CHANGE:	20000501

FILED BY:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			VANGUARD GROUP INC
		CENTRAL INDEX KEY:			0000102909
		IRS NUMBER:				231945930
		STATE OF INCORPORATION:			PA
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		SC 13G/A

	BUSINESS ADDRESS:	
		STREET 1:		PO BOX 2600
		STREET 2:		V26
		CITY:			VALLEY FORGE
		STATE:			PA
		ZIP:			19482-2600
		BUSINESS PHONE:		6106691000

	MAIL ADDRESS:	
		STREET 1:		PO BOX 2600
		STREET 2:		V26
		CITY:			VALLEY FORGE
		STATE:			PA
		ZIP:			19482-2600
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<DOCUMENT>
<TYPE>SC 13G/A
<SEQUENCE>1
<FILENAME>tv0360-axcelistechnologiesin.htm
<DESCRIPTION>SCHEDULE 13G/A
<TEXT>
Document 1 - file: tv0360-axcelistechnologiesin.htm

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