XML 71 R56.htm IDEA: XBRL DOCUMENT
v3.22.4

Assets Manufactured for Internal Use, net - Components (Details) - Assets Manufactured for Internal Use - USD ($) $ in Thousands | 12 Months Ended
--- | ---
Dec. 31, 2022 | Dec. 31, 2021 | Dec. 31, 2020
Assets manufactured for internal use |  |  |
Useful life | 10 years |  |
Total cost | $ 64,232 | $ 60,768 |
Accumulated depreciation | (33,992) | (28,764) |
Assets manufactured for internal use, net | 30,240 | 32,004 |
Depreciation expense | 5,200 | 5,300 | $ 5,200
Internal use assets |  |  |
Assets manufactured for internal use |  |  |
Total cost | 61,603 | 60,596 |
Construction in process |  |  |
Assets manufactured for internal use |  |  |
Total cost | $ 2,629 | $ 172 |

X
- Definition Useful life of other long lived assets used in the normal conduct of business and not intended for resale. + References No definition available. + Details
Name: | acls_PropertyPlantAndEquipmentOtherUsefulLife
Namespace Prefix: | acls_
Data Type: | xbrli:durationItemType
Balance Type: | na
Period Type: | duration

X
- Definition Amount of expense charged against earnings to allocate the cost of tangible and intangible assets over their remaining economic lives, classified as other. + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 360 -SubTopic 10 -Section 50 -Paragraph 1 -Subparagraph (a) -URI https://asc.fasb.org/extlink&oid=6391035&loc=d3e2868-110229 Reference 2: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 230 -SubTopic 10 -Section 45 -Paragraph 28 -Subparagraph (b) -URI https://asc.fasb.org/extlink&oid=126954810&loc=d3e3602-108585 Reference 3: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 220 -SubTopic 10 -Section S99 -Paragraph 2 -Subparagraph (SX 210.5-03.3) -URI https://asc.fasb.org/extlink&oid=126953954&loc=SL114868664-224227 + Details
Name: | us-gaap_OtherDepreciationAndAmortization
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration

X
- Definition Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table. + References No definition available. + Details
Name: | us-gaap_PropertyPlantAndEquipmentLineItems
Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

X
- Definition Amount before accumulated depreciation, depletion and amortization of other physical assets used in the normal conduct of business to produce goods and services and not intended for resale. + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Publisher FASB -Name Accounting Standards Codification -Topic 360 -SubTopic 10 -Section 50 -Paragraph 1 -URI https://asc.fasb.org/extlink&oid=6391035&loc=d3e2868-110229 + Details
Name: | us-gaap_PropertyPlantAndEquipmentOther
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | instant

X
- Definition Amount of accumulated depreciation of long-lived, physical assets used to produce goods and services and not intended for resale, classified as other. + References No definition available. + Details
Name: | us-gaap_PropertyPlantAndEquipmentOtherAccumulatedDepreciation
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | credit
Period Type: | instant

X
- Definition Amount after depreciation of long-lived, physical assets used to produce goods and services and not intended for resale, classified as other. + References No definition available. + Details
Name: | us-gaap_PropertyPlantAndEquipmentOtherNet
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | instant

X
- Details
Name: | us-gaap_PropertyPlantAndEquipmentByTypeAxis=acls_AssetsManufacturedForInternalUseMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | acls_InternalUsedAssetsTypeAxis=acls_CompletedInternalUseAssetsMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | acls_InternalUsedAssetsTypeAxis=us-gaap_AssetUnderConstructionMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |