EX-21.1 5 acls-20221231xex21d1.htm EX-21.1

Exhibit 21.1

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Axcelis Technologies, Inc.

Exhibit 21.1 to Form 10-K for the year ended December 31, 2022

Subsidiaries

The following is a list of all direct and indirect wholly-owned subsidiaries of Axcelis Technologies, Inc. as of the date hereof:

Domestic Subsidiaries

1. | Axcelis Technologies (Israel) Inc., a Delaware corporation

European Subsidiaries

2. | Axcelis Technologies GmbH (Germany)

3. | Axcelis Technologies, Srl (Italy)

4. | Axcelis Technologies, Sarl (France)

Asian Subsidiaries

5. | Axcelis Technologies, KK (Japan)

6. | Axcelis Technologies Limited (Korea)

7. | Axcelis Technologies, Ltd. (Taiwan)

8. | Axcelis Technologies Pte. Ltd. (Singapore)

9. | Axcelis Technologies Semiconductor Trading (Shanghai) Co., Ltd. (Peoples Republic of China)

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