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Employee Benefit Plans | 12 Months Ended
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Dec. 31, 2022
Employee Benefit Plans |
Employee Benefit Plans | Note 12. Employee Benefit Plans ​ (a) Defined Contribution Plan ​ We maintain the Axcelis Long-Term Investment Plan, a defined contribution plan. Eligible employees may contribute up to 35% of their compensation on a before-tax basis subject to Internal Revenue Service (“IRS”) limitations. Highly compensated employees may contribute up to 16% of their compensation on a before-tax basis subject to IRS limitations. In 2022, 2021 and 2020 we provided an employer match of 50% of employees’ pre-tax contributions on the first 6% of eligible compensation. Total related matching contribution expense was $2.7 million, $2.2 million and $2.0 million, for 2022, 2021 and 2020, respectively. ​ (b) Other Compensation Plans ​ We operate in foreign jurisdictions that require lump sum benefits, payable based on statutory regulations, for voluntary or involuntary termination. Where required, an annual actuarial valuation of the benefit plans is obtained. ​ We have recorded an unfunded liability of $3.5 million and $4.7 million at December 31, 2022 and 2021, respectively, for costs associated with these compensation plans in foreign jurisdictions. The following table presents the classification of these liabilities in the Consolidated Balance Sheets: ​
​ | ​ | ​ | ​ | ​ | ​ | ​ | ​
​ | ​ | Year ended |
​ | ​ | December 31, |
​ |  | 2022 |  | 2021 |
​ | ​ | (in thousands) |
Long-term: | ​ | ​ | ​ | ​ | ​ | ​ | ​
Other long-term liabilities | ​ | ​ | 3,516 | ​ | ​ | 4,681 | ​
Total liabilities | ​ | $ | 3,516 | ​ | $ | 4,681 | ​
​ The expense recorded in connection with these plans was $1.5 million, $1.5 million and $1.2 million during the years ended December 31, 2022, 2021 and 2020, respectively.

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