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v3.23.2

Revenue (Details) - USD ($) $ in Thousands | 6 Months Ended |
--- | --- | ---
Jun. 30, 2023 | Dec. 31, 2022
Disaggregation of Revenue |  |
Short-term deferred revenue | $ 138,890 | $ 123,471
Long-term deferred revenue | $ 43,650 | $ 31,306
Systems |  |
Disaggregation of Revenue |  |
Payment upon shipment of tool, as a percent | 90.00% |
Payment upon installation, as a percent | 10.00% |
Aftermarket | Minimum |  |
Disaggregation of Revenue |  |
Payment upon delivery of parts, period | 30 days |
Aftermarket | Maximum |  |
Disaggregation of Revenue |  |
Payment upon delivery of parts, period | 60 days |

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