<SEC-DOCUMENT>0001104659-23-087226-index.html : 20230803
<SEC-HEADER>0001104659-23-087226.hdr.sgml : 20230803
<ACCEPTANCE-DATETIME>20230803151412
ACCESSION NUMBER:		0001104659-23-087226
CONFORMED SUBMISSION TYPE:	S-3ASR
PUBLIC DOCUMENT COUNT:		9
FILED AS OF DATE:		20230803
DATE AS OF CHANGE:		20230803
EFFECTIVENESS DATE:		20230803

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AXCELIS TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001113232
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				341818596
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		S-3ASR
		SEC ACT:		1933 Act
		SEC FILE NUMBER:	333-273639
		FILM NUMBER:		231139542

	BUSINESS ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915
		BUSINESS PHONE:		978-787-4000

	MAIL ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	EATON SEMICONDUCTOR EQUIPMENT INC
		DATE OF NAME CHANGE:	20000501
</SEC-HEADER>
<DOCUMENT>
<TYPE>S-3ASR
<SEQUENCE>1
<FILENAME>tm2321901-1_s3asr.htm
<DESCRIPTION>S-3ASR
<TEXT>
Document 1 - file: tm2321901-1_s3asr.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-4.1
<SEQUENCE>2
<FILENAME>tm2321901d2_ex4-1.htm
<DESCRIPTION>EXHIBIT 4.1
<TEXT>
Document 2 - file: tm2321901d2_ex4-1.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-5.1
<SEQUENCE>3
<FILENAME>tm2321901d2_ex5-1.htm
<DESCRIPTION>EXHIBIT 5.1
<TEXT>
Document 3 - file: tm2321901d2_ex5-1.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-23.1
<SEQUENCE>4
<FILENAME>tm2321901d1_ex23-1.htm
<DESCRIPTION>EXHIBIT 23.1
<TEXT>
Document 4 - file: tm2321901d1_ex23-1.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-FILING FEES
<SEQUENCE>5
<FILENAME>tm2321901d2_ex-filingfees.htm
<DESCRIPTION>EX-FILING FEES
<TEXT>
Document 5 - file: tm2321901d2_ex-filingfees.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>6
<FILENAME>lg_axcelis-pn.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 6 - file: lg_axcelis-pn.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>7
<FILENAME>tm2321901d2_ex5-1img01.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 7 - file: tm2321901d2_ex5-1img01.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>8
<FILENAME>tm2321901d2_ex5-1img02.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 8 - file: tm2321901d2_ex5-1img02.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>9
<FILENAME>tm2321901d2_ex5-1img03.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 9 - file: tm2321901d2_ex5-1img03.jpg

</DOCUMENT>
</SEC-DOCUMENT>