<SEC-DOCUMENT>0001104659-23-046426.txt : 20230418
<SEC-HEADER>0001104659-23-046426.hdr.sgml : 20230418
<ACCEPTANCE-DATETIME>20230418074153
ACCESSION NUMBER:		0001104659-23-046426
CONFORMED SUBMISSION TYPE:	8-K
PUBLIC DOCUMENT COUNT:		13
CONFORMED PERIOD OF REPORT:	20230224
ITEM INFORMATION:		Other Events
ITEM INFORMATION:		Financial Statements and Exhibits
FILED AS OF DATE:		20230418
DATE AS OF CHANGE:		20230418

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AXCELIS TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001113232
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				341818596
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		8-K
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-30941
		FILM NUMBER:		23825500

	BUSINESS ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915
		BUSINESS PHONE:		978-787-4000

	MAIL ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	EATON SEMICONDUCTOR EQUIPMENT INC
		DATE OF NAME CHANGE:	20000501
</SEC-HEADER>
<DOCUMENT>
<TYPE>8-K
<SEQUENCE>1
<FILENAME>tm2313052d1_8k.htm
<DESCRIPTION>FORM 8-K
<TEXT>
<XBRL>
<?xml version="1.0" encoding="utf-8"?>
<html xmlns="http://www.w3.org/1999/xhtml" xmlns:xs="http://www.w3.org/2001/XMLSchema-instance" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xbrli="http://www.xbrl.org/2003/instance" xmlns:xbrldi="http://xbrl.org/2006/xbrldi" xmlns:xbrldt="http://xbrl.org/2005/xbrldt" xmlns:iso4217="http://www.xbrl.org/2003/iso4217" xmlns:ix="http://www.xbrl.org/2013/inlineXBRL" xmlns:ixt="http://www.xbrl.org/inlineXBRL/transformation/2015-02-26" xmlns:ixt-sec="http://www.sec.gov/inlineXBRL/transformation/2015-08-31" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:dei="http://xbrl.sec.gov/dei/2021q4" xmlns:ref="http://www.xbrl.org/2006/ref" xmlns:us-gaap="http://fasb.org/us-gaap/2021-01-31" xmlns:us-roles="http://fasb.org/us-roles/2021-01-31" xmlns:country="http://xbrl.sec.gov/country/2021" xmlns:srt="http://fasb.org/srt/2021-01-31" xmlns:acls="http://axcelis.com/20230224">
<head>
     <title></title>
<meta http-equiv="Content-Type" content="text/html" />
</head>
<!-- Field: Set; Name: xdx; ID: xdx_02A_US%2DGAAP%2D2021 -->
<!-- Field: Set; Name: xdx; ID: xdx_031_acls_axcelis.com_20230224 -->
<!-- Field: Set; Name: xdx; ID: xdx_040_20230224_20230224 -->
<!-- Field: Set; Name: xdx; ID: xdx_05F_edei%2D%2DEntityCentralIndexKey_0001113232 -->
<!-- Field: Set; Name: xdx; ID: xdx_059_edei%2D%2DAmendmentFlag_false -->
<!-- Field: Set; Name: xdx; ID: xdx_06B_USD_1_iso4217%2D%2DUSD -->
<!-- Field: Set; Name: xdx; ID: xdx_062_Shares_2_xbrli%2D%2Dshares -->
<!-- Field: Set; Name: xdx; ID: xdx_06D_USDPShares_3_iso4217%2D%2DUSD_xbrli%2D%2Dshares -->
<body style="font: 10pt Times New Roman, Times, Serif">
<div style="display: none">
<ix:header>
 <ix:hidden>
  <ix:nonNumeric contextRef="From2023-02-24to2023-02-24" name="dei:EntityCentralIndexKey">0001113232</ix:nonNumeric>
  <ix:nonNumeric contextRef="From2023-02-24to2023-02-24" name="dei:AmendmentFlag">false</ix:nonNumeric>
  </ix:hidden>
 <ix:references>
  <link:schemaRef xlink:href="acls-20230224.xsd" xlink:type="simple" />
  </ix:references>
 <ix:resources>
    <xbrli:context id="From2023-02-24to2023-02-24">
      <xbrli:entity>
        <xbrli:identifier scheme="http://www.sec.gov/CIK">0001113232</xbrli:identifier>
      </xbrli:entity>
      <xbrli:period>
        <xbrli:startDate>2023-02-24</xbrli:startDate>
        <xbrli:endDate>2023-02-24</xbrli:endDate>
      </xbrli:period>
    </xbrli:context>
    <xbrli:unit id="USD">
      <xbrli:measure>iso4217:USD</xbrli:measure>
    </xbrli:unit>
    <xbrli:unit id="Shares">
      <xbrli:measure>xbrli:shares</xbrli:measure>
    </xbrli:unit>
    <xbrli:unit id="USDPShares">
      <xbrli:divide>
        <xbrli:unitNumerator>
          <xbrli:measure>iso4217:USD</xbrli:measure>
        </xbrli:unitNumerator>
        <xbrli:unitDenominator>
          <xbrli:measure>xbrli:shares</xbrli:measure>
        </xbrli:unitDenominator>
      </xbrli:divide>
    </xbrli:unit>
  </ix:resources>
 </ix:header>
</div>


<p style="margin: 0"></p>

<!-- Field: Rule-Page --><div style="margin-top: 12pt; margin-bottom: 3pt; width: 100%"><div style="border-top: Black 2pt solid; border-bottom: Black 1pt solid; font-size: 1pt">&#160;</div></div><!-- Field: /Rule-Page -->

<p style="margin: 0">&#160;</p>

<p style="font: 18pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"><b>UNITED STATES</b></p>

<p style="font: 18pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"><b>SECURITIES AND EXCHANGE COMMISSION</b></p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"><b>Washington, D.C. 20549</b></p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center">&#160;</p>

<p style="font: 18pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"><b>FORM <span id="xdx_90B_edei--DocumentType_c20230224__20230224_zpZaa9bkhnpd"><ix:nonNumeric contextRef="From2023-02-24to2023-02-24" name="dei:DocumentType">8-K</ix:nonNumeric></span></b></p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center">&#160;</p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"><b>CURRENT REPORT</b></p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"><b>Pursuant to Section 13 or 15(d)<br />
 of the
Securities Exchange Act of 1934</b></p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center">&#160;</p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center">Date of Report (Date of earliest event reported):
<span id="xdx_902_edei--DocumentPeriodEndDate_c20230224__20230224_zG54bXylhXY6"><ix:nonNumeric contextRef="From2023-02-24to2023-02-24" format="ixt:datemonthdayyearen" name="dei:DocumentPeriodEndDate">February 24, 2023</ix:nonNumeric></span></p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center">&#160;</p>

<p style="font: 18pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"><b><span id="xdx_901_edei--EntityRegistrantName_c20230224__20230224_zJ5GBjgyMWx4"><ix:nonNumeric contextRef="From2023-02-24to2023-02-24" name="dei:EntityRegistrantName">Axcelis Technologies, Inc.</ix:nonNumeric></span></b></p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center">(Exact name of registrant as specified in
its charter)</p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center">&#160;</p>

<table cellspacing="0" cellpadding="0" style="font: 10pt Times New Roman, Times, Serif; width: 100%; border-collapse: collapse">
<tr>
    <td style="vertical-align: top; width: 32%; text-align: center; font-size: 10pt"><span style="font: 10pt Times New Roman, Times, Serif"><b><span id="xdx_90B_edei--EntityIncorporationStateCountryCode_c20230224__20230224_zlY8wg3AJWge"><ix:nonNumeric contextRef="From2023-02-24to2023-02-24" format="ixt-sec:stateprovnameen" name="dei:EntityIncorporationStateCountryCode">Delaware</ix:nonNumeric></span></b></span></td>
    <td style="vertical-align: bottom; width: 2%">&#160;</td>
    <td style="vertical-align: top; width: 32%; text-align: center; font-size: 10pt"><span style="font: 10pt Times New Roman, Times, Serif"><b><span id="xdx_909_edei--EntityFileNumber_c20230224__20230224_zo6erIVdErr7"><ix:nonNumeric contextRef="From2023-02-24to2023-02-24" name="dei:EntityFileNumber">000-30941</ix:nonNumeric></span></b></span></td>
    <td style="vertical-align: bottom; width: 2%">&#160;</td>
    <td style="vertical-align: top; width: 32%; text-align: center; font-size: 10pt"><span style="font: 10pt Times New Roman, Times, Serif"><b><span id="xdx_908_edei--EntityTaxIdentificationNumber_c20230224__20230224_zGJhlSQnHQk3"><ix:nonNumeric contextRef="From2023-02-24to2023-02-24" name="dei:EntityTaxIdentificationNumber">34-1818596</ix:nonNumeric></span></b></span></td></tr>
<tr>
    <td style="vertical-align: top; text-align: center; font-size: 10pt"><span style="font: 10pt Times New Roman, Times, Serif">(State or other jurisdiction</span></td>
    <td style="vertical-align: bottom">&#160;</td>
    <td style="vertical-align: top; text-align: center; font-size: 10pt"><span style="font: 10pt Times New Roman, Times, Serif">(Commission</span></td>
    <td style="vertical-align: bottom">&#160;</td>
    <td style="vertical-align: top; text-align: center; font-size: 10pt"><span style="font: 10pt Times New Roman, Times, Serif">(IRS Employer</span></td></tr>
<tr>
    <td style="vertical-align: top; text-align: center; font-size: 10pt"><span style="font: 10pt Times New Roman, Times, Serif">of incorporation)</span></td>
    <td style="vertical-align: bottom">&#160;</td>
    <td style="vertical-align: top; text-align: center; font-size: 10pt"><span style="font: 10pt Times New Roman, Times, Serif">File Number)</span></td>
    <td style="vertical-align: bottom">&#160;</td>
    <td style="vertical-align: top; text-align: center; font-size: 10pt"><span style="font: 10pt Times New Roman, Times, Serif">Identification No.)</span></td></tr>
</table>
<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center">&#160;</p>

<table cellspacing="0" cellpadding="0" style="font: 10pt Times New Roman, Times, Serif; width: 100%; border-collapse: collapse">
<tr>
    <td style="vertical-align: top; width: 44%; text-align: center"><span style="font: 10pt Times New Roman, Times, Serif"><b><span id="xdx_90F_edei--EntityAddressAddressLine1_c20230224__20230224_zuH0oV37pbF9"><ix:nonNumeric contextRef="From2023-02-24to2023-02-24" name="dei:EntityAddressAddressLine1">108 Cherry Hill Drive</ix:nonNumeric></span>, <span id="xdx_90A_edei--EntityAddressCityOrTown_c20230224__20230224_z6NrarWBj1oi"><ix:nonNumeric contextRef="From2023-02-24to2023-02-24" name="dei:EntityAddressCityOrTown">Beverly</ix:nonNumeric></span>, <span id="xdx_90B_edei--EntityAddressStateOrProvince_c20230224__20230224_zkHzBFQJpS89"><ix:nonNumeric contextRef="From2023-02-24to2023-02-24" format="ixt-sec:stateprovnameen" name="dei:EntityAddressStateOrProvince">Massachusetts</ix:nonNumeric></span></b></span></td>
    <td style="vertical-align: bottom; width: 15%">&#160;</td>
    <td style="vertical-align: top; width: 41%; text-align: center"><span style="font: 10pt Times New Roman, Times, Serif"><b><span id="xdx_901_edei--EntityAddressPostalZipCode_c20230224__20230224_zaNC1E4nTyF7"><ix:nonNumeric contextRef="From2023-02-24to2023-02-24" name="dei:EntityAddressPostalZipCode">01915</ix:nonNumeric></span></b></span></td></tr>
<tr>
    <td style="vertical-align: top; text-align: center"><span style="font: 10pt Times New Roman, Times, Serif">(Address of principal executive offices)</span></td>
    <td style="vertical-align: bottom">&#160;</td>
    <td style="vertical-align: top; text-align: center"><span style="font: 10pt Times New Roman, Times, Serif">(Zip Code)</span></td></tr>
</table>
<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center">&#160;</p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center">Registrant&#8217;s telephone number, including
area code: <b>(<span id="xdx_900_edei--CityAreaCode_c20230224__20230224_zq8FUp5kzMcc"><ix:nonNumeric contextRef="From2023-02-24to2023-02-24" name="dei:CityAreaCode">978</ix:nonNumeric></span>) <span id="xdx_90D_edei--LocalPhoneNumber_c20230224__20230224_zSrazZcLLIP1"><ix:nonNumeric contextRef="From2023-02-24to2023-02-24" name="dei:LocalPhoneNumber">787-4000</ix:nonNumeric></span></b></p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center">&#160;</p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center">(Former name or former address, if changed
since last report.)</p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center">&#160;</p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">Check the appropriate box below if the Form 8-K filing is intended
to simultaneously satisfy the filing obligation of the registrant under any of the following provisions:</p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&#160;</p>

<table cellpadding="0" cellspacing="0" style="font: 10pt Times New Roman, Times, Serif; margin-top: 0; margin-bottom: 0; width: 100%"><tr style="vertical-align: top; text-align: justify">
<td style="width: 0.25in; text-align: left"><span style="font: 10pt Wingdings"><span id="xdx_902_edei--WrittenCommunications_c20230224__20230224_zVHywr7sfcOg"><ix:nonNumeric contextRef="From2023-02-24to2023-02-24" format="ixt:booleanfalse" name="dei:WrittenCommunications">&#168;</ix:nonNumeric></span></span></td><td style="text-align: justify"><span style="font-family: Times New Roman, Times, Serif">Written
communications pursuant to Rule 425 under the Securities Act (17 CFR 230.425)</span></td>
</tr><tr style="font-size: 2pt; vertical-align: top; text-align: justify">
<td style="font-size: 2pt; text-align: left">&#160;</td><td style="font-size: 2pt; text-align: justify">&#160;</td></tr>
     </table>

<table cellpadding="0" cellspacing="0" style="font: 10pt Times New Roman, Times, Serif; margin-top: 0; margin-bottom: 0; width: 100%"><tr style="vertical-align: top; text-align: justify">
<td style="width: 0.25in; text-align: left"><span style="font: 10pt Wingdings"><span id="xdx_90F_edei--SolicitingMaterial_c20230224__20230224_zGNXyWdU7dpl"><ix:nonNumeric contextRef="From2023-02-24to2023-02-24" format="ixt:booleanfalse" name="dei:SolicitingMaterial">&#168;</ix:nonNumeric></span></span></td><td style="text-align: justify"><span style="font-family: Times New Roman, Times, Serif">Soliciting
material pursuant to Rule 14a-12 under the Exchange Act (17 CFR 240.14a-12)</span></td>
</tr><tr style="font-size: 2pt; vertical-align: top; text-align: justify">
<td style="font-size: 2pt; text-align: left">&#160;</td><td style="font-size: 2pt; text-align: justify">&#160;</td></tr>
     </table>

<table cellpadding="0" cellspacing="0" style="font: 10pt Times New Roman, Times, Serif; margin-top: 0; margin-bottom: 0; width: 100%"><tr style="vertical-align: top; text-align: justify">
<td style="width: 0.25in; text-align: left"><span style="font: 10pt Wingdings"><span id="xdx_90A_edei--PreCommencementTenderOffer_c20230224__20230224_zq5F3oJZNDb5"><ix:nonNumeric contextRef="From2023-02-24to2023-02-24" format="ixt:booleanfalse" name="dei:PreCommencementTenderOffer">&#168;</ix:nonNumeric></span></span></td><td style="text-align: justify"><span style="font-family: Times New Roman, Times, Serif">Pre-commencement
communications pursuant to Rule 14d-2(b) under the Exchange Act (17 CFR 240.14d-2(b))</span></td>
</tr><tr style="font-size: 2pt; vertical-align: top; text-align: justify">
<td style="font-size: 2pt; text-align: left">&#160;</td><td style="font-size: 2pt; text-align: justify">&#160;</td></tr>
     </table>

<table cellpadding="0" cellspacing="0" style="font: 10pt Times New Roman, Times, Serif; margin-top: 0; margin-bottom: 0; width: 100%"><tr style="vertical-align: top; text-align: justify">
<td style="width: 0.25in; text-align: left"><span style="font: 10pt Wingdings"><span id="xdx_900_edei--PreCommencementIssuerTenderOffer_c20230224__20230224_zfv2pINeVnGd"><ix:nonNumeric contextRef="From2023-02-24to2023-02-24" format="ixt:booleanfalse" name="dei:PreCommencementIssuerTenderOffer">&#168;</ix:nonNumeric></span></span></td><td style="text-align: justify"><span style="font-family: Times New Roman, Times, Serif">Pre-commencement
communications pursuant to Rule 13e-4(c) under the Exchange Act (17 CFR 240.13e-4(c))</span></td>
</tr></table>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0 0pt 0.25in; text-indent: -0.25in">&#160;</p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0 0pt 0.25in; text-indent: -0.25in">Securities registered pursuant to Section 12(b) of the Act:</p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0 0pt 0.25in; text-indent: -0.25in">&#160;</p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0 0pt 0.25in; text-indent: -0.25in"></p>

<table cellspacing="0" cellpadding="0" style="font: 10pt Times New Roman, Times, Serif; width: 100%; border-collapse: collapse">
<tr style="vertical-align: top">
    <td style="border-bottom: Black 1pt solid; width: 40%; text-align: center"><span style="font: 10pt Times New Roman, Times, Serif"><b style="font-style: normal; font-weight: normal">Title of each class</b></span></td>
    <td style="border-bottom: Black 1pt solid; width: 20%; text-align: center"><span style="font: 10pt Times New Roman, Times, Serif"><b style="font-style: normal; font-weight: normal">Trading symbol(s)</b></span></td>
    <td style="border-bottom: Black 1pt solid; vertical-align: top; width: 40%; text-align: center"><span style="font: 10pt Times New Roman, Times, Serif"><b style="font-style: normal; font-weight: normal">Name of each exchange on which registered</b></span></td></tr>
<tr style="vertical-align: top">
    <td style="text-align: center"><span style="font: 10pt Times New Roman, Times, Serif"><span id="xdx_90A_edei--Security12bTitle_c20230224__20230224_zj9wzHcqkbl"><ix:nonNumeric contextRef="From2023-02-24to2023-02-24" name="dei:Security12bTitle">Common
    Stock, $0.001 par value</ix:nonNumeric></span></span></td>
    <td style="text-align: center"><span style="font: 10pt Times New Roman, Times, Serif"><span id="xdx_90F_edei--TradingSymbol_c20230224__20230224_zQEUtIo0jyHh"><ix:nonNumeric contextRef="From2023-02-24to2023-02-24" name="dei:TradingSymbol">ACLS</ix:nonNumeric></span></span></td>
    <td style="text-align: center"><span style="font: 10pt Times New Roman, Times, Serif"><span id="xdx_90A_edei--SecurityExchangeName_c20230224__20230224_zOY0lh6Ff8Mc"><ix:nonNumeric contextRef="From2023-02-24to2023-02-24" format="ixt-sec:exchnameen" name="dei:SecurityExchangeName">Nasdaq Global Select Market</ix:nonNumeric></span></span></td></tr>
</table>
<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0 0pt 0.25in; text-indent: -0.25in">&#160;</p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">Indicate by check mark whether the registrant is an emerging
growth company as defined in Rule 405 of the Securities Act of 1933(&#167;230.405 of this chapter) or Rule 12b-2 of the Securities
Exchange Act of 1934 (&#167;240.12b-2 of this chapter).</p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: right">&#160;</p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: right"><span style="font-family: Times New Roman, Times, Serif">Emerging
growth company </span><span style="font-family: Wingdings"><span id="xdx_903_edei--EntityEmergingGrowthCompany_c20230224__20230224_zjaIFF9FsWqb"><ix:nonNumeric contextRef="From2023-02-24to2023-02-24" format="ixt:booleanfalse" name="dei:EntityEmergingGrowthCompany">&#168;</ix:nonNumeric></span></span></p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&#160;</p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"><span style="font: 10pt Times New Roman, Times, Serif">If
an emerging growth company, indicate by check mark if  registrant has elected not to use the extended transition period for
complying with any new or revised financial accounting standards provided pursuant to Section 13(a) of the Exchange Act.</span> <span style="font-family: Wingdings">&#168;</span></p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&#160;&#160;</p>


<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"></p>

<!-- Field: Rule-Page --><div style="margin-top: 3pt; margin-bottom: 12pt; width: 100%"><div style="border-top: Black 1pt solid; border-bottom: Black 2pt solid; font-size: 1pt">&#160;</div></div><!-- Field: /Rule-Page -->

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"></p>

<!-- Field: Page; Sequence: 1 -->
    <div style="border-bottom: Black 1pt solid; margin-top: 12pt; margin-bottom: 6pt"><p style="margin: 0pt">&#160;</p></div>
    <div style="break-before: page; margin-top: 6pt; margin-bottom: 12pt"><p style="margin: 0pt">&#160;</p></div>
    <!-- Field: /Page -->

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&#160;</p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"><b>Item 8.01 Other Events.</b></p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&#160;</p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">In order to inform the stockholders of Axcelis Technologies,&#160;Inc.
(the &#8220;Company&#8221;) as to the current status of the Company&#8217;s employment agreement with Mary G. Puma, President and Chief
Executive Officer, the Company is herewith filing the Amended and Restated Employment Agreement with Ms.&#160;Puma dated February&#160;24,
2023 (the &#8220;2023 Puma Agreement&#8221;). The 2023 Puma Agreement states that Ms.&#160;Puma will continue to provide services to the
Company as Chief Executive Officer, Executive Chairperson and as Senior Advisor, sequentially, for periods ending in July&#160;2025. The
2023 Puma Agreement provides for Ms.&#160;Puma&#8217;s compensation for such services, but does not provide for separation pay unless
terminated by the Company without cause or by Ms.&#160;Puma with good reason prior to July&#160;31, 2025. In such case, the main component
of the separation pay is the amount remaining to be paid under the agreement through July&#160;31, 2025. The 2023 Puma Agreement supersedes&#160;the
Amended and Restated Employment Agreement dated as of May&#160;24, 2022 (the &#8220;2022 Puma Agreement&#8221;).</p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&#160;</p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">Axcelis does not consider the terms of the 2023 Puma Agreement to be
a material modification to Ms.&#160;Puma&#8217;s compensation, given that the specified minimum compensation did not materially increase
from that specified in the 2022 Puma Agreement. Accordingly, this disclosure is being filed under Item 8.01 and not Item 5.02(e)&#160;of
this Form&#160;8-K. The 2023 Puma is filed as an Exhibit&#160;10.1 hereto and will be incorporated by reference into the Exhibits to the
Form&#160;10-Q for the quarter ended March&#160;31, 2023, when filed.</p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&#160;</p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"><b>Item 9.01 Financial Statements and Exhibits.</b></p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&#160;</p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">(d)&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;&#160;Exhibits</p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&#160;</p>

<table cellpadding="0" cellspacing="0" style="font: 10pt Times New Roman, Times, Serif; width: 100%; margin-top: 0pt; margin-bottom: 0pt"><tr style="vertical-align: top">
<td style="width: 0"></td><td style="width: 0.5in"><a href="tm2313052d1_ex10-1.htm" style="-sec-extract: exhibit">10.1</a></td><td><a href="tm2313052d1_ex10-1.htm" style="-sec-extract: exhibit">Amended and Restated Employment Agreement between Axcelis Technologies,&#160;Inc. and Mary G. Puma dated as of February&#160;24, 2023.</a></td></tr></table>

<p style="margin-top: 0; margin-bottom: 0">&#160;</p>

<table cellpadding="0" cellspacing="0" style="font: 10pt Times New Roman, Times, Serif; width: 100%; margin-top: 0pt; margin-bottom: 0pt">
<tr>
    <td style="vertical-align: top; text-align: left; width: 0.5in">104</td>
    <td style="vertical-align: top">Cover Page Interactive Data File (embedded within the Inline XBRL document)</td></tr>
</table>

<p style="margin-top: 0; margin-bottom: 0">&#160;</p>

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<p style="margin-top: 0; margin-bottom: 0">&#160;</p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"><b>SIGNATURE</b></p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&#160;</p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">Pursuant to the requirements of the Securities Exchange Act of 1934,
the Registrant has duly caused this report to be signed on its behalf by the undersigned hereunto duly authorized.</p>

<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&#160;</p>

<table cellspacing="0" cellpadding="0" style="font: 10pt Times New Roman, Times, Serif; width: 100%; border-collapse: collapse">
  <tr style="vertical-align: top">
    <td style="font-size: 10pt"><span style="font-family: Times New Roman, Times, Serif; font-size: 10pt">Date: April&#160;18, 2023</span></td>
    <td colspan="2">
    <p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">Axcelis Technologies,&#160;Inc.&#160;</p></td></tr>
  <tr style="vertical-align: top">
    <td style="width: 50%">&#160;</td>
    <td style="width: 3%">&#160;</td>
    <td style="width: 47%">&#160;</td></tr>
  <tr style="vertical-align: top">
    <td>&#160;</td>
    <td style="font-size: 10pt"><span style="font-family: Times New Roman, Times, Serif; font-size: 10pt">By:</span></td>
    <td style="border-bottom: Black 1pt solid; font-size: 10pt"><span style="font-family: Times New Roman, Times, Serif; font-size: 10pt">/s/ Lynnette C. Fallon</span></td></tr>
  <tr style="vertical-align: top">
    <td>&#160;</td>
    <td>&#160;</td>
    <td style="font-size: 10pt"><span style="font-family: Times New Roman, Times, Serif; font-size: 10pt">Lynnette C. Fallon</span></td></tr>
  </table>
<p style="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&#160;</p>
<p style="margin: 0"></p>

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    <!-- Field: /Page -->

<p style="margin: 0">&#160;</p>


</body>
</html>
<!-- Field: Set; Name: xdx; ID: xdx_08B_extensions -->
<!-- eJxFjd0KwjAMhZ9g7xB6PbTOP9idDhVxiowh3haXSXFrRlr/Hsm3tNsQQyAk53w5QoRiQ2tdIcN5maWQY91UyiFkWCKjuaB3JNtdDH5meNXWsTKuW39gQp5Bz0wH44u/d86HtljEIGdDOR5GEuQ8nkxgsRdBqydkSl2gcVpVoEwBR6aGNTrF7/5Drl5kqH53SSdkq8nEMBrIXv5AJEcRHOihnsQ3C2maiCDsKhAbpnvTxtytoxpWFdY+y/bov4Mv1mNJDA== -->
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-10.1
<SEQUENCE>2
<FILENAME>tm2313052d1_ex10-1.htm
<DESCRIPTION>EXHIBIT 10.1
<TEXT>
<HTML>
<HEAD>
     <TITLE></TITLE>
</HEAD>
<BODY STYLE="font: 10pt Times New Roman, Times, Serif">

<P STYLE="text-align: right; margin: 0"><B>Exhibit 10.1</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: right">Conformed Exec Copy</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center">AXCELIS TECHNOLOGIES,&nbsp;INC.</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center">2023 AMENDED AND RESTATED EMPLOYMENT AGREEMENT</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center">Mary G. Puma</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-indent: 0.5in">The parties to this 2023 Amended and Restated Employment
Agreement, dated as of February&nbsp;24, 2023 (&ldquo;Agreement&rdquo;), are AXCELIS TECHNOLOGIES,&nbsp;INC., a Delaware, USA, corporation
(the &ldquo;Company&rdquo;), and MARY G. PUMA, an individual residing in the State of New Hampshire, USA (the &ldquo;Executive&rdquo;).
The Company and the Executive are party to an Amended and Restated Employment Agreement effective as of May&nbsp;24, 2022 (&ldquo;Current
Agreement&rdquo;). The parties desire to amend and restate the Current Agreement. This Agreement provides for the continued employment
of the Executive upon the terms and conditions of set forth herein. The execution and delivery of this Agreement have been duly authorized
by the Board of Directors of the Company (the &ldquo;Board&rdquo;). This Agreement shall become effective on February&nbsp;24, 2023 (the
 &ldquo;Effective Date&rdquo;).</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-indent: 0.5in">&nbsp;NOW, THEREFORE, the Company and the Executive,
each intending to be legally bound, hereby mutually covenant and agree as follows:</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">1.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B>Employment
and Term</B>.</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="margin: 0">1.1.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp; <B><I><U>Employment</U></I></B>. The Company hereby
continues to employ the Executive:</P>




<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 0.5in"></TD><TD STYLE="width: 0.25in">(a)</TD><TD><FONT STYLE="font-family: Times New Roman, Times, Serif">Initially, continuing as the President and Chief Executive Officer of the
Company, until the first Board of Directors meeting after the 2023 Annual Meeting of Stockholders (but not later than May&nbsp;30, 2023);
and</FONT></TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 0.5in"></TD><TD STYLE="width: 0.25in">(b)</TD><TD><FONT STYLE="font-family: Times New Roman, Times, Serif">For a one year period commencing on the first Board of Directors meeting
after the 2023 Annual Meeting of Stockholders (but not later than May&nbsp;30, 2023) and ending at the 2024 Annual Meeting of Stockholders
(but not later than May&nbsp;30, 2024), as the Executive Chairperson of the Board of Directors of the Company; accordingly, Executive
will be nominated for election at the 2023 Annual Meeting of Stockholders for a further one year term, at the end of which she will retire
from the Board; and</FONT></TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 0.5in"></TD><TD STYLE="width: 0.25in">(c)</TD><TD><FONT STYLE="font-family: Times New Roman, Times, Serif">Following Executive&rsquo;s service as Executive Chairperson, through July&nbsp;31,
2025, as a senior advisor, using the title &ldquo;Senior Advisor&rdquo; or other mutually agreeable title (&ldquo;Senior Advisor&rdquo;).</FONT></TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">The Executive hereby accepts such continued employment with the Company,
for the periods set forth above.</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"></P>

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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">1.2.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B><I><U>Term</U>.</I></B>
The term of the Executive&rsquo;s employment under this Agreement (the &ldquo;Term&rdquo;) shall commence on the Effective Date and end
on July&nbsp;31, 2025.</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">2.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B>Duties</B>.
The Executive shall devote her best skill and efforts (reasonable sick leave and vacations excepted) to the performance of her duties
under this Agreement, as follows:</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">2.1.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B><I>As
President and Chief Executive Officer</I></B>. As President and Chief Executive Officer, the Executive shall report to the Board of Directors
and perform duties consistent with her positions.</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">2.2.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B><I>As
Executive Chairperson</I></B>. As Executive Chairperson, the Executive shall report to the Board of Directors of the Company and perform
duties agreed upon with the successor Chief Executive Officer, subject to approval by the Board of Directors and as are consistent with
the Governance Guidelines adopted by the Board of Directors. It is acknowledged that the Executive Chairperson duties are expected to
average less than or equal to 50% of full time service (approximately 20 hours per week). It is expressly understood that some weeks may
require more hours and some less, and that the Executive Chairperson will be required to provide services only to the extent requested
by the Company. It is also acknowledged that the Executive Chairperson duties will be performed without any ordinary course obligations
to be present in the Company&rsquo;s facilities in Beverly, Massachusetts or elsewhere, except as may be specifically agreed by Executive.</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">2.3.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B><I>Senior
Advisor</I></B>. As Senior Advisor (following her retirement from service as a Board member), the Executive shall report to the successor
Chief Executive Officer of the Company and perform duties agreed upon with the successor Chief Executive Officer. It is acknowledged that
the Senior Advisor duties are expected to average less than or equal to 12.5% of full time service (approximately 5 hours per week). It
is expressly understood that some weeks may require more hours and some less, and that the Senior Advisor will be required to provide
services only to the extent requested by the Company. It is also acknowledged that the Senior Advisor duties will be performed without
any ordinary course obligations to be present in the Company&rsquo;s facilities in Beverly, Massachusetts or elsewhere, except as may
be specifically agreed by Executive.</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">2.4.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B><I>Other
Activities.</I></B> In addition, the Executive may devote reasonable periods required for (i)&nbsp;serving as a director or member of
a committee of any organization involving no conflict of interest with the interests of the Company or its subsidiaries (including but
not limited to (A)&nbsp;the Board of Semiconductor Equipment and Materials International, the industry organization on which the Executive
currently serves (&ldquo;SEMI&rdquo;), and (B)&nbsp;the Boards of other for profit or non-profit organizations, including other public
companies); (ii)&nbsp;fulfilling speaking engagements (iii)&nbsp;engaging in charitable and community activities; (iv)&nbsp;participating
in industry and trade organization activities; and (v)&nbsp;managing her personal investments; provided, that such activities do not materially
interfere with the regular performance of her duties and responsibilities under this Agreement.</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"></P>

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    <DIV STYLE="break-before: page; margin-top: 6pt; margin-bottom: 12pt"><P STYLE="margin: 0pt">&nbsp;</P></DIV>
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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">3.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B>Base
Salary</B>. For services performed by the Executive for the Company pursuant to this Agreement during the Term of employment as provided
in Paragraph 1.2, the Company shall pay the Executive a base salary at the rate of at least $669,000 per year, payable in accordance with
the Company&rsquo;s regular payroll practices (but no less frequently than monthly). Any compensation which may be paid to the Executive
under any additional compensation or incentive plan of the Company or which may be otherwise authorized from time to time by the Board
(or an appropriate committee thereof) shall be in addition to the base salary to which the Executive shall be entitled under this Agreement.</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">4.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><I>Intentionally
Omitted.</I></FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">5.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B>Other
Benefits</B>. In addition to the base salary to be paid to the Executive pursuant to Paragraph 3 hereof, the Executive shall also be entitled
to the following:</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">5.1.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B><I>Participation
in Plans</I></B>. The Executive shall be entitled to a bonus opportunity for both the 2023 and 2024 fiscal years based on the attainment
of performance goals and objectives approved by the Board; such target amount shall be 100% of base salary received in the year as Chief
Executive Officer and as Executive Chairperson, if target level performance is achieved, and such greater or lesser amount if actual
performance exceeds or falls short of target performance goals and objectives as provided under the Company&rsquo;s bonus arrangements
for senior executives. Base compensation received as Senior Advisor shall not be included in determining the bonus opportunity for 2024.
Any such bonus shall be vested as and when approved by the Board of Directors and vested bonuses shall be payable by the Company not
later than the end of the fiscal year in which such bonus vests. During the Term, the Executive shall also be eligible to participate
in the various benefit plans maintained in force by the Company from time to time, including any qualified and nonqualified pension,
supplemental pension, disability, medical, dental, group life insurance, supplemental life insurance coverage, business travel insurance,
sick leave, and other similar retirement and welfare benefit plans, programs and arrangements, subject to the terms of such plans.</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">5.2.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B><I>Equity
Grants</I></B>. Provided Executive is in compliance with this Agreement:</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 0"></TD><TD STYLE="width: 0.25in">(a)</TD><TD><FONT STYLE="font-family: Times New Roman, Times, Serif"><I>Unvested Equity Awards Held on the Effective Date</I>. In accordance with
the Company&rsquo;s Executive Equity Retirement Program, at the 2024 Annual Meeting of Stockholders (but not later than May&nbsp;30, 2024),
the Executive&rsquo;s unvested equity awards held on the Effective Date and not yet vested in accordance with their terms shall vest,
as follows:</FONT></TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 0.25in"></TD><TD STYLE="width: 0.25in">i.</TD><TD>all equity awards made during and prior to 2021 and the performance vesting Restricted Stock Unit (&ldquo;PRSU&rdquo;) granted in
2022 shall be fully vested; and</TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 0.25in"></TD><TD STYLE="width: 0.25in">ii.</TD><TD>the service based equity award made in 2022 shall be at least 75% vested (and shall be 100% vested on May&nbsp;16, 2024 unless the
Executive&rsquo;s employment does not continue through that date).</TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"></P>

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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 0"></TD><TD STYLE="width: 0.25in">(b)</TD><TD><FONT STYLE="font-family: Times New Roman, Times, Serif"><I>Performance Restricted Stock Unit in 2023</I>. The Company shall, at a
minimum, grant a PRSU award for 2023 to the Executive as and when such grants are provided to other executives, but not later than May&nbsp;15,
2023, having (i)&nbsp;a value equal to $1,500,000, (ii)&nbsp;the same 2023 performance goals as the 2023 PRSUs granted to the other executive
officers of the Company, and (iii ) substantially the same other terms as the 2022 PRSUs, including the potential of earning up to 150%
of the target value. The 2023 PRSUs shall vest as to 100% of the earned shares on February&nbsp;28, 2024, without regard to termination
of employment.</FONT></TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 0"></TD><TD STYLE="width: 0.25in">(c)</TD><TD><FONT STYLE="font-family: Times New Roman, Times, Serif"><I>Performance Restricted Stock Unit in 2024</I>. The Company shall, at a
minimum, grant a PRSU award for 2024 to the Executive as and when such grants are provided to other executives, but not later than May&nbsp;15,
2024, having (i)&nbsp;a value equal to $625,000, (ii)&nbsp;the same 2024 performance goals as the PRSUs granted to the other executive
officers of the Company, and (iii)&nbsp;substantially the same other terms as the 2022 PRSUs, including the potential of earning up to
150% of the target value. The 2024 PRSUs shall vest as to 100% of the earned shares on February&nbsp;28, 2025, without regard to termination
of employment.</FONT></TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">5.3.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B><I>Fringe
Benefits</I></B>. In addition to the foregoing, the Executive shall be entitled to an office, fringe benefits and other similar benefits
no less favorable than those available to other senior executives of the Company. This includes use of Axcelis IT equipment, email, and
intranet access. On or before the 2023 Annual Meeting of Stockholders, Executive shall vacate her current office and will be provided
access to an adjacent executive office. During her service as Executive Chairman, Executive shall continue to be listed on the Axcelis
website as a member of the Executive Management team, as well as a member of the Board of Directors.</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">5.4.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B><I>Expense
Reimbursement</I></B>. The Company shall reimburse the Executive, upon a proper accounting, for reasonable business expenses and disbursements
incurred by her in the course of the performance of her duties under this Agreement. It is agreed that during Executive&rsquo;s service
as Executive Chairperson and Senior Advisor, the Company will reimburse Executive&rsquo;s travel expenses from wherever Executive is residing
at the time of any agreed travel to the Company&rsquo;s facilities or elsewhere on behalf of the Company (including but not limited to
meetings of the Company&rsquo;s Board of Directors and SEMI Board meetings).</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">5.5.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B><I>Vacation</I></B>.
The Executive shall be entitled to vacation and paid time off during the initial and each successive year during the Term of this Agreement
in accordance with the Company&rsquo;s policies applicable to senior executives, or such greater period as the Board shall approve, without
reduction in salary or other benefits.</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">6.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B>Covenants
of the Employee</B>. In order to induce the Company to enter into this Agreement, the Executive hereby agrees as follows:</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">6.1.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B><I>Confidentiality</I></B>.
Except as may be required by law and for acts in the ordinary course of the Executive&rsquo;s performance of her duties for the Company
and believed by the Executive in good faith to be in the best interests of the Company, the Executive shall keep confidential and shall
not divulge to any other person or entity, during the Term or thereafter, any of the business secrets or other confidential information
regarding the Company, or any of its subsidiaries or affiliates, which has not otherwise become public knowledge.</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"></P>

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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">6.2.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B><I>Records</I></B>.
All papers, books and records of every kind and description relating to the business and affairs of the Company, or any of its subsidiaries
or affiliates, whether or not prepared by the Executive shall be the sole and exclusive property of the Company, and the Executive shall
surrender them to the Company at any time upon request by the Company.</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">6.3.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B><I>Change
of Control Agreement</I></B>. The Executive acknowledges that she is bound by, and benefits from, the Change of Control Severance Agreement
between the Executive and the Company dated as of March&nbsp;1, 2017, effective as of November&nbsp;6, 2019 (such agreement and any similar
successor agreement, referred to herein as the &ldquo;Change of Control Agreement&rdquo;). The Company agrees that to the extent Executive&rsquo;s
employment is terminated by the Company without Cause or by the Executive for Good Reason before or on July&nbsp;31, 2025 at a time when
there is either a Potential Change of Control or at a time within 24 months following a Change of Control (as such terms are defined in
the Change of Control Agreement), the Executive will be entitled to the severance benefits described in the Change of Control Agreement,
subject to the terms thereof and of Paragraph 15 hereof; provided, however, that notwithstanding Section&nbsp;2 of the Change of Control
Agreement, the term thereof will extend to the later of July&nbsp;31, 2025 or the end of a Potential Change in Control Period, and that
that the covenant in Section&nbsp;4 of the Change of Control Agreement will not require the Executive to remain in employment after July&nbsp;31,
2025.</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">7.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B>Termination</B>.
Unless earlier terminated in accordance with the following provisions of this Paragraph 7, the Company shall continue to employ the Executive
and the Executive shall remain employed by the Company during the entire Term as set forth in Paragraph 1.2. Paragraph 8 hereof sets forth
certain obligations of the Company in the event that the Executive&rsquo;s employment hereunder is terminated prior to July&nbsp;31, 2025.
Certain capitalized terms used in this Paragraph 7 and Paragraph 8 hereof are defined in Paragraph 7.3 below.</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">7.1.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B><I>Death
or Disability</I></B>. Except to the extent otherwise expressly stated herein, including without limitation, as provided in Paragraph
8.1 with respect to certain post-Date of Termination payment obligations of the Company, the Executive&rsquo;s employment shall terminate
immediately on the Date of Termination in the event of the Executive&rsquo;s death or in the event of Executive&rsquo;s Disability. For
purposes of this Agreement, &ldquo;Disability&rdquo; shall mean the absence of the Executive from the Executive&rsquo;s duties with the
Company for 180 consecutive business days as a result of incapacity due to mental or physical illness or injury which is determined to
be total and permanent by a physician selected by the Company or its insurers and reasonably acceptable to the Executive or the Executive&rsquo;s
legal representative. In the event of Disability, until the Date of Termination, the base salary payable to the Executive under Paragraph
3 hereof shall be reduced dollar-for-dollar by the amount of disability benefits, if any, paid to the Executive in accordance with any
disability policy or program of the Company.</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;<BR>
</P>

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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">7.2.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B><I>Notification
of Discharge by the Company or Resignation for Good Reason</I></B>. In accordance with the procedures hereinafter set forth, the Company
may discharge the Executive from her employment hereunder with or without Cause and the Executive may resign from her employment hereunder
for Good Reason or otherwise. Any discharge of the Executive by the Company or resignation by the Executive for Good Reason shall be communicated
by a Notice of Termination to the Executive (in the case of discharge) or to the Company (in the case of the Executive&rsquo;s resignation)
given in accordance with Paragraph 10 of this Agreement. For purposes of this Agreement, a &ldquo;Notice of Termination&rdquo; means a
written notice which:</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 0.5in"></TD><TD STYLE="width: 0.5in">(i)</TD><TD>indicates the specific termination provision in this Agreement relied upon,</TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 0.5in"></TD><TD STYLE="width: 0.5in">(ii)</TD><TD>sets forth in reasonable detail the facts and circumstances providing a basis for termination of the Executive&rsquo;s employment
under the provision so indicated and</TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 0.5in"></TD><TD STYLE="width: 0.5in">(iii)</TD><TD>if the Date of Termination is to be other than the date of receipt of such notice, specifies the termination date (which date shall
in all events be within fifteen (15) days after the giving of such notice).</TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">No purported termination of the Executive&rsquo;s employment for Cause
shall be effective without a Notice of Termination to the Executive. The failure by the Executive to set forth in any Notice of Termination
to the Company any facts or circumstances which contributes to a showing of Good Reason shall not waive any right of the Executive hereunder
or preclude the Executive from asserting such fact or circumstances in enforcing the Executive&rsquo;s rights hereunder.</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">7.3.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B><I>Definitions</I></B>.
For purposes of this Paragraph 7 and Paragraph 8 hereof, the following capitalized terms shall have the meanings set forth below:</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">7.3.1.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt">&ldquo;<U>Accrued
Obligations</U>&rdquo; shall mean, as of the Date of Termination, the sum of (A)&nbsp;the Executive&rsquo;s base salary under Paragraph
3 through the Date of Termination to the extent not theretofore paid, (B)&nbsp;the amount of any bonus, incentive compensation, deferred
compensation and other cash compensation accrued by the Executive as of the Date of Termination to the extent not theretofore paid and
(C)&nbsp;any vacation pay, expense reimbursements and other cash entitlements accrued by the Executive as of the Date of Termination to
the extent not theretofore paid.</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">7.3.2.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt">&ldquo;<U>Cause</U>&rdquo;
shall mean (A)&nbsp;the willful and continued failure of the Executive to perform substantially the Executive&rsquo;s duties with the
Company or one of its affiliates (other than any such failure resulting from disability), after a written demand for substantial performance
is delivered to the Executive by the Board of Directors which specifically identifies the manner in which the Board believes that the
Executive has not substantially performed the Executive&rsquo;s duties, or (B)&nbsp;the willful engaging by the Executive in illegal conduct
or gross misconduct which is injurious to the Company. For purposes of this provision, no act or failure to act on the part of the Executive
shall be considered &ldquo;willful&rdquo; unless it is done, or omitted to be done, by the Executive in bad faith or without reasonable
belief that the Executive&rsquo;s action or omission was in the best interests of the Company. Any act or failure to act based upon authority
given pursuant to a resolution duly adopted by the Board or based on the advice of a senior officer of the Company or counsel for the
Company shall be conclusively presumed to be done, or omitted to be done, by the Executive in good faith and in the best interests of
the Company. The cessation of employment of the Executive shall not be deemed to be for Cause unless and until there shall have been delivered
to the Executive a copy of a resolution duly adopted by the affirmative vote of not less than two-thirds of the entire membership of the
Board at a meeting of the Board called and held for such purpose (after reasonable notice is provided to the Executive and the Executive
is given an opportunity, together with counsel, to be heard before the Board), finding that, in the good faith opinion of the Board, the
Executive is guilty of the conduct described in subparagraph (A)&nbsp;or (B)&nbsp;above of this Paragraph 7.3.2, and specifying the particulars
thereof in detail.</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"></P>

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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">7.3.3.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt">&ldquo;<U>Date
of Termination</U>&rdquo; shall mean (A)&nbsp;in the event of a discharge of the Executive by the Company for Cause or a resignation by
the Executive for Good Reason, the date the Executive (in the case of such discharge) or the Company (in the case of such resignation)
receives a Notice of Termination, or any later permitted date specified in such Notice of Termination, as the case may be, (B)&nbsp;in
the event of a discharge of the Executive without Cause or a resignation by the Executive without Good Reason, the date the Executive
(in the case of discharge) or the Company (in the case of resignation) receives notice of such termination of employment, (C)&nbsp;in
the event of the Executive&rsquo;s death, the date of the Executive&rsquo;s death, and (D)&nbsp;in the event of termination of the Executive&rsquo;s
employment by reason of Disability pursuant to Paragraph 7.1, the date the Executive receives written notice of such termination.</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">7.3.4.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt">&ldquo;<U>Good
Reason</U>&rdquo; shall mean, subject to the notice and cure requirements below, a voluntary termination by the Executive within one year
following the initial existence of one or more of the following conditions, without the written consent of the Executive:</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 0.5in"></TD><TD STYLE="width: 0.25in">(a)</TD><TD><FONT STYLE="font-family: Times New Roman, Times, Serif">Material diminution of base compensation;</FONT></TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 0.5in"></TD><TD STYLE="width: 0.25in">(b)</TD><TD><FONT STYLE="font-family: Times New Roman, Times, Serif">Material diminution of the Executive&rsquo;s authority, duties or responsibilities;</FONT></TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 0.5in"></TD><TD STYLE="width: 0.25in">(c)</TD><TD><FONT STYLE="font-family: Times New Roman, Times, Serif">Material change in the geographic location in which the Executive provides
services; and</FONT></TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 0.5in"></TD><TD STYLE="width: 0.25in">(d)</TD><TD><FONT STYLE="font-family: Times New Roman, Times, Serif">Any other action or inaction by the Company that constitutes a material breach
of the terms of this Agreement.</FONT></TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">The Executive must provide notice to the Company of the existence of
the Good Reason condition not later than 90 days of its initial existence. The Company shall have a period of 60 days to cure the condition
giving rise to such notice. In the event the Company cures or corrects the specific Good Reason condition within the time period specified
above, Good Reason termination shall not be deemed to exist with respect to the specific condition set forth in the Notice of Termination.</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"></P>

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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">8.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B><U>Obligations
of the Company Upon Termination</U></B>.</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">8.1.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B><I>Discharge
for Cause, Resignation Without Good Reason, Death or Disability</I></B>. During the Term of this Agreement, in the event of a discharge
of the Executive for Cause or resignation by the Executive without Good Reason, or in the event this Agreement terminates pursuant to
Paragraph 7.1 by reason of the death or Disability of the Executive:</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 0.5in"></TD><TD STYLE="width: 0.25in">(a)</TD><TD><FONT STYLE="font-family: Times New Roman, Times, Serif">the Company shall pay all Accrued Obligations to the Executive, or to her
beneficiaries, heirs or estate in the event of the Executive&rsquo;s death, in a lump sum in cash within thirty (30) days after the Date
of Termination; and</FONT></TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 0.5in"></TD><TD STYLE="width: 0.25in">(b)</TD><TD><FONT STYLE="font-family: Times New Roman, Times, Serif">the Executive, or her beneficiaries, heirs or estate in the event of the
Executive&rsquo;s death, shall be entitled to receive all benefits accrued by her as of the Date of Termination under all qualified and
nonqualified retirement, pension, profit sharing and similar plans of the Company in such manner and at such time as are provided under
the terms of such plans and arrangements; and</FONT></TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 0.5in"></TD><TD STYLE="width: 0.25in">(c)</TD><TD><FONT STYLE="font-family: Times New Roman, Times, Serif">except as otherwise provided in Paragraph 15 hereof, all other obligations
of the Company under this Agreement shall cease forthwith.</FONT></TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">8.2.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B><I>Discharge
Without Cause or Resignation for Good Reason</I></B>. During the Term of this Agreement, if the Executive is discharged other than for
(x)&nbsp;Cause (i.e., without Cause) or (y)&nbsp;Disability, or if the Executive resigns with Good Reason:</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 0.5in"></TD><TD STYLE="width: 0.25in">(a)</TD><TD><FONT STYLE="font-family: Times New Roman, Times, Serif">the Company shall pay to the Executive in a lump sum in cash within thirty
(30) days after the Date of Termination the aggregate of the following amounts:</FONT></TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 1.5in"></TD><TD STYLE="width: 0.25in">i.</TD><TD>all Accrued Obligations; and</TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 1.5in"></TD><TD STYLE="width: 0.25in">ii.</TD><TD>an amount equal to the aggregate base pay due under this Agreement to the Executive through July&nbsp;31, 2025; and</TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 1.5in"></TD><TD STYLE="width: 0.25in">iii.</TD><TD>an amount equal to the Executive&rsquo;s bonus calculated as provided in Paragraph 5.1 for either or both the 2023 and 2024 fiscal
years, to the extent not yet been paid at the Date of Termination, provided that the Company&rsquo;s performance relating to such bonus
shall be fixed at not less than 100% of the Executive&rsquo;s target, if such performance has not yet been determined by the Board of
Directors; and</TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 1.5in"></TD><TD STYLE="width: 0.25in">iv.</TD><TD>to the extent that the PRSUs described in Paragraph 5.2 have not been granted as of the Date of Termination, an amount equal to the
value of such promised grants as set forth there in, being $1,500,000 in the case of the 2023 PRSU and $625,000 in the case of the 2024
PRSU.</TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"></P>

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    <DIV STYLE="break-before: page; margin-top: 6pt; margin-bottom: 12pt"><P STYLE="margin: 0pt">&nbsp;</P></DIV>
    <!-- Field: /Page -->

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 0.5in"></TD><TD STYLE="width: 0.25in">(b)</TD><TD><FONT STYLE="font-family: Times New Roman, Times, Serif">If Executive elects to continue health coverage under the Company&rsquo;s
health plan in accordance with the continuation requirements of COBRA, the Company will pay for the cost of such coverage until the earlier
of (i)&nbsp;the date Executive begins full-time employment or full-time self-employment; or (ii)&nbsp;the end of the eighteenth month
after the Date of Termination; and</FONT></TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 0.5in"></TD><TD STYLE="width: 0.25in">(c)</TD><TD><FONT STYLE="font-family: Times New Roman, Times, Serif">the Executive shall be entitled to receive all benefits accrued by her as
of the Date of Termination under all qualified and nonqualified retirement, pension, profit sharing and similar plans of the Company in
such manner and at such time as are provided under the terms of such plans; and</FONT></TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 0.5in"></TD><TD STYLE="width: 0.25in">(d)</TD><TD><FONT STYLE="font-family: Times New Roman, Times, Serif">all equity awards granted awarded to the Executive by the Company on or before
the Date of Termination shall become fully vested and nonforfeitable as of the Date of Termination (any unvested PRSU as to which the
Board has not yet determined the percentage earned shall be deemed to be earned at not less than 100% of the shares granted) and shall
remain in effect (and exercisable in the case of stock options) in accordance with the terms and conditions of their grant; and</FONT></TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 0.5in"></TD><TD STYLE="width: 0.25in">(e)</TD><TD><FONT STYLE="font-family: Times New Roman, Times, Serif">through July&nbsp;31, 2025, the Company will continue to support the Executive&rsquo;s
service on the Board of SEMI as a representative of the Company, as contemplated by Paragraph 2.4; and</FONT></TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" WIDTH="100%" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0pt; margin-bottom: 0pt"><TR STYLE="vertical-align: top">
<TD STYLE="width: 0.5in"></TD><TD STYLE="width: 0.25in">(f)</TD><TD><FONT STYLE="font-family: Times New Roman, Times, Serif">except as otherwise provided in Paragraph 15 hereof, all other obligations
of the Company under this Agreement shall cease forthwith.</FONT></TD></TR></TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">8.3.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B><I>Payment
Obligations Absolute</I></B>. The Company&rsquo;s obligation to make the payments and the arrangements provided for herein shall be absolute
and unconditional, and shall not be affected by any circumstances, including, without limitation, any offset, counterclaim, recoupment,
defense, or other right which the Company may have against the Executive or any other party. Each and every payment made hereunder by
the Company shall be final, and the Company shall not seek to recover all or any part of such payment from the Executive or from whomsoever
may be entitled thereto, for any reasons whatsoever.</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">8.4.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B><I>Section&nbsp;409A</I>.</B>
Notwithstanding anything to the contrary in this Agreement, if the Executive is a &ldquo;specified employee&rdquo; within the meaning
of Section&nbsp;409A of the Internal Revenue Code of 1986, as amended (the &ldquo;Code&rdquo;) and the final regulations and any guidance
promulgated thereunder (&ldquo;Section&nbsp;409A&rdquo;) at the time of Executive&rsquo;s separation from service, and the severance payments
and separation benefits payable to Executive, if any, pursuant to this Agreement is considered &ldquo;nonqualified deferred compensation&rdquo;
as defined pursuant to Section&nbsp;409A, such payments and benefits shall be made to Executive with the first payroll that is six months
and one day following the Executive&rsquo;s Date of Termination.</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">8.5.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B><I>Contractual
Rights to Benefits</I></B>. This Agreement establishes and vests in the Executive a contractual right to the benefits to which she is
entitled hereunder. The Executive shall not be obligated to seek other employment in mitigation of the amounts payable or arrangements
made under any provision of this Agreement, and the obtaining of any such other employment shall in no event effect any reduction of the
Company&rsquo;s obligations to make the payments and arrangements required to be made under this Agreement.</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"></P>

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    <DIV STYLE="break-before: page; margin-top: 6pt; margin-bottom: 12pt"><P STYLE="margin: 0pt">&nbsp;</P></DIV>
    <!-- Field: /Page -->

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">9.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B>Binding
Effect</B>. This Agreement shall be binding upon and inure to the benefit of the heirs and representatives of the Executive and the successors
and assigns of the Company. The Company shall require any successor (whether direct or indirect, by purchase, merger, reorganization,
consolidation, acquisition of property or stock, liquidation, or otherwise) to all or a majority of its assets, by agreement in form and
substance reasonably satisfactory to the Executive, expressly to assume and agree to perform this Agreement in the same manner and to
the same extent that the Company would be required to perform this Agreement if no such succession had taken place. Regardless whether
such agreement is executed, this Agreement shall be binding upon any successor of the Company in accordance with the operation of law
and such successor shall be deemed the &ldquo;Company&rdquo; for purposes of this Agreement.</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">10.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B>Notices</B>.
All notices, requests, demands and other communications hereunder shall be in writing and shall be deemed to have been duly given if delivered
by hand or mailed within the continental United States by first class certified mail, return receipt requested, postage prepaid, addressed
as follows:</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">to the Board or the Company, to:</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-indent: 1.5in">Axcelis Technologies,&nbsp;Inc.&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-indent: 1.5in">108 Cherry Hill Drive&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-indent: 1.5in">Beverly, Massachusetts 01915</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">to the Executive, to:</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-indent: 1.5in">Mary G. Puma&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-indent: 1.5in">c/o Axcelis Technologies,&nbsp;Inc.&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-indent: 1.5in">108 Cherry Hill Drive&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-indent: 1.5in">Beverly, Massachusetts 01915</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">Addresses may be changed by written notice sent to the other party
at the last recorded address of that party.</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">11.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B>No
Assignment</B>. Except as expressly provided in Paragraph 9, this Agreement is not assignable by any party and no payment to be made hereunder
shall be subject to anticipation, alienation, sale, transfer, assignment, pledge, encumbrance or other charge.</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">12.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B>Execution
in Counterparts</B>. This Agreement will be executed by the parties hereto in two or more counterparts, each of which shall be deemed
to be an original, but all such counterparts shall constitute one and the same instrument, and all signatures need not appear on any one
counterpart.</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"></P>

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    <DIV STYLE="break-before: page; margin-top: 6pt; margin-bottom: 12pt"><P STYLE="margin: 0pt">&nbsp;</P></DIV>
    <!-- Field: /Page -->

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">13.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B>Jurisdiction
and Governing Law</B>. Jurisdiction over disputes with regard to this Agreement shall be exclusively in the courts of the Commonwealth
of Massachusetts, and this Agreement shall be construed and interpreted in accordance with and governed by the local laws of the Commonwealth
of Massachusetts, other than the conflict of laws provisions of such laws.</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">14.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B>Severability</B>.
If any provision of this Agreement shall be adjudged by any court of competent jurisdiction to be invalid or unenforceable for any reason,
such judgment shall not affect, impair or invalidate the remainder of this Agreement.</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">15.&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;<FONT STYLE="font-size: 10pt"><B>Prior
Understandings</B>. This Agreement amends and restates in its entirety the Current Agreement as of the Effective Date and embodies the
entire understanding of the parties hereto, and supersedes all other oral or written agreements or understandings between them regarding
the subject matter hereof including the Current Agreement, but excluding the Change of Control Severance Agreement dated as of March&nbsp;1,
2017, and effective as of November&nbsp;6, 2019, the Indemnification Agreement between the Executive and the Company dated February&nbsp;28,
2012, and the Executive Equity Retirement Program. In the event of a termination of Executive&rsquo;s employment during a Potential Change
of Control or following a Change of Control (as defined in such Change of Control Agreement), the Executive shall be entitled to receive
the greater of the amounts and benefits under this Agreement or the Change of Control Agreement but the Executive shall not receive the
aggregate of the amounts and benefits under both such agreements. If she is entitled to receive amounts and benefits under both the Change
of Control Agreement and this Agreement, the amount and benefits payable, if any, under the Change of Control Agreement shall be deemed
to have been paid first and, if the amounts and benefits due under this Agreement are greater than those actually paid under the Change
of Control Agreement, such excess shall be paid under this Agreement. Nothing in this Agreement is intended as and shall not be read as
a modification of the Change of Control Agreement (except as set forth in Paragraph 6.3), the Indemnification Agreement or any outstanding
equity award agreement (except as set forth in Paragraph 5.2(a)), and such agreements shall be and remain in full force and effect in
accordance with their respective terms. No change, alteration or modification hereof may be made except in a writing, signed by each of
the parties hereto. The headings in this Agreement are for convenience of reference only and shall not be construed as part of this Agreement
or to limit or otherwise affect the meaning hereof.</FONT></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"></P>

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    <DIV STYLE="margin-top: 12pt; margin-bottom: 6pt; border-bottom: Black 1pt solid"><P STYLE="text-align: center; margin-top: 0pt; margin-bottom: 0pt"><FONT STYLE="font-size: 10pt">&nbsp;<!-- Field: Sequence; Type: Arabic; Name: PageNo -->11<!-- Field: /Sequence --></FONT></P></DIV>
    <DIV STYLE="break-before: page; margin-top: 6pt; margin-bottom: 12pt"><P STYLE="margin: 0pt">&nbsp;</P></DIV>
    <!-- Field: /Page -->

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">IN WITNESS WHEREOF, the parties hereto have executed and delivered
this Agreement as of the Effective Date.</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" STYLE="border-collapse: collapse; width: 100%">
  <TR STYLE="vertical-align: bottom">
    <TD>&nbsp;</TD>
    <TD COLSPAN="2" STYLE="font: 10pt Times New Roman, Times, Serif">AXCELIS TECHNOLOGIES,&nbsp;INC.</TD></TR>
  <TR STYLE="vertical-align: bottom">
    <TD>&nbsp;</TD>
    <TD COLSPAN="2" STYLE="font: 10pt Times New Roman, Times, Serif">&nbsp;</TD></TR>
  <TR STYLE="vertical-align: bottom">
    <TD STYLE="width: 50%">&nbsp;</TD>
    <TD STYLE="font: 10pt Times New Roman, Times, Serif; width: 5%">By:</TD>
    <TD STYLE="border-bottom: Black 1pt solid; font: 10pt Times New Roman, Times, Serif; width: 45%">/s/ Lynnette C. Fallon</TD></TR>
  <TR STYLE="vertical-align: bottom">
    <TD>&nbsp;</TD>
    <TD STYLE="font: 10pt Times New Roman, Times, Serif">Name:</TD>
    <TD STYLE="font: 10pt Times New Roman, Times, Serif">Lynnette C. Fallon</TD></TR>
  <TR STYLE="vertical-align: bottom">
    <TD>&nbsp;</TD>
    <TD STYLE="font: 10pt Times New Roman, Times, Serif">Title:</TD>
    <TD STYLE="font: 10pt Times New Roman, Times, Serif">Executive Vice President HR/Legal and General Counsel</TD></TR>
  <TR STYLE="vertical-align: bottom">
    <TD>&nbsp;</TD>
    <TD COLSPAN="2" STYLE="font: 10pt Times New Roman, Times, Serif">&nbsp;</TD></TR>
  <TR STYLE="vertical-align: bottom">
    <TD>&nbsp;</TD>
    <TD COLSPAN="2" STYLE="font: 10pt Times New Roman, Times, Serif">MARY G. PUMA</TD></TR>
  <TR STYLE="vertical-align: bottom">
    <TD>&nbsp;</TD>
    <TD COLSPAN="2" STYLE="font: 10pt Times New Roman, Times, Serif">&nbsp;</TD></TR>
  <TR STYLE="vertical-align: bottom">
    <TD>&nbsp;</TD>
    <TD COLSPAN="2" STYLE="border-bottom: Black 1pt solid; font: 10pt Times New Roman, Times, Serif">/s/ Mary G. Puma</TD></TR>
  </TABLE>


<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"></P>

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    <DIV STYLE="margin-top: 12pt; margin-bottom: 6pt; border-bottom: Black 1pt solid"><P STYLE="text-align: center; margin-top: 0pt; margin-bottom: 0pt"><FONT STYLE="font-size: 10pt">&nbsp;<!-- Field: Sequence; Type: Arabic; Name: PageNo -->12<!-- Field: /Sequence --></FONT></P></DIV>
    <!-- Field: /Page -->

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

</BODY>
</HTML>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.SCH
<SEQUENCE>3
<FILENAME>acls-20230224.xsd
<DESCRIPTION>XBRL TAXONOMY EXTENSION SCHEMA
<TEXT>
<XBRL>
<?xml version="1.0" encoding="US-ASCII" ?>
    <!-- Field: Doc-Info; Name: Generator; Value: GoFiler Complete; Version: 5.18a -->
    <!-- Field: Doc-Info; Name: VendorURI; Value: https://www.novaworks.com -->
    <!-- Field: Doc-Info; Name: Status; Value: 0x00000000 -->
    <!-- Field: Doc-Info; Name: Misc; Value: +aA5w7xRiXgen8uLa3ZcWauOCbOdzZR+2YkxtmBxbRma3yMhNZto3S4FZr+GYdIE -->
<schema xmlns="http://www.w3.org/2001/XMLSchema" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xbrli="http://www.xbrl.org/2003/instance" xmlns:xbrldt="http://xbrl.org/2005/xbrldt" xmlns:xbrldi="http://xbrl.org/2006/xbrldi" xmlns:dei="http://xbrl.sec.gov/dei/2021q4" xmlns:us-gaap="http://fasb.org/us-gaap/2021-01-31" xmlns:srt="http://fasb.org/srt/2021-01-31" xmlns:srt-types="http://fasb.org/srt-types/2021-01-31" xmlns:acls="http://axcelis.com/20230224" elementFormDefault="qualified" targetNamespace="http://axcelis.com/20230224">
    <annotation>
      <appinfo>
	<link:roleType roleURI="http://axcelis.com/role/Cover" id="Cover">
	  <link:definition>00000001 - Document - Cover</link:definition>
	  <link:usedOn>link:presentationLink</link:usedOn>
	  <link:usedOn>link:calculationLink</link:usedOn>
	  <link:usedOn>link:definitionLink</link:usedOn>
	</link:roleType>
	<link:linkbaseRef xlink:type="simple" xlink:href="acls-20230224_pre.xml" xlink:role="http://www.xbrl.org/2003/role/presentationLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:title="Presentation Links" />
	<link:linkbaseRef xlink:type="simple" xlink:href="acls-20230224_lab.xml" xlink:role="http://www.xbrl.org/2003/role/labelLinkbaseRef" xlink:arcrole="http://www.w3.org/1999/xlink/properties/linkbase" xlink:title="Label Links" />
      </appinfo>
    </annotation>
    <import namespace="http://www.xbrl.org/2003/instance" schemaLocation="http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd" />
    <import namespace="http://www.xbrl.org/2003/linkbase" schemaLocation="http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd" />
    <import namespace="http://xbrl.sec.gov/dei/2021q4" schemaLocation="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd" />
    <import namespace="http://fasb.org/us-gaap/2021-01-31" schemaLocation="https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd" />
    <import namespace="http://fasb.org/us-types/2021-01-31" schemaLocation="https://xbrl.fasb.org/us-gaap/2021/elts/us-types-2021-01-31.xsd" />
    <import namespace="http://www.xbrl.org/dtr/type/2020-01-21" schemaLocation="https://www.xbrl.org/dtr/type/2020-01-21/types.xsd" />
    <import namespace="http://xbrl.sec.gov/country/2021" schemaLocation="https://xbrl.sec.gov/country/2021/country-2021.xsd" />
    <import namespace="http://fasb.org/srt/2021-01-31" schemaLocation="https://xbrl.fasb.org/srt/2021/elts/srt-2021-01-31.xsd" />
    <import namespace="http://fasb.org/srt-types/2021-01-31" schemaLocation="https://xbrl.fasb.org/srt/2021/elts/srt-types-2021-01-31.xsd" />
</schema>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.LAB
<SEQUENCE>4
<FILENAME>acls-20230224_lab.xml
<DESCRIPTION>XBRL TAXONOMY EXTENSION LABEL LINKBASE
<TEXT>
<XBRL>
<?xml version="1.0" encoding="US-ASCII" standalone="no"?>
    <!-- Field: Doc-Info; Name: Generator; Value: GoFiler Complete; Version: 5.18a -->
    <!-- Field: Doc-Info; Name: VendorURI; Value: https://www.novaworks.com -->
    <!-- Field: Doc-Info; Name: Status; Value: 0x00000000 -->
<link:linkbase xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xbrli="http://www.xbrl.org/2003/instance" xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd">
    <link:roleRef xlink:type="simple" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedLabel" roleURI="http://www.xbrl.org/2009/role/negatedLabel" />
    <link:roleRef xlink:type="simple" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedPeriodEndLabel" roleURI="http://www.xbrl.org/2009/role/negatedPeriodEndLabel" />
    <link:roleRef xlink:type="simple" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedPeriodStartLabel" roleURI="http://www.xbrl.org/2009/role/negatedPeriodStartLabel" />
    <link:roleRef xlink:type="simple" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedTotalLabel" roleURI="http://www.xbrl.org/2009/role/negatedTotalLabel" />
    <link:roleRef xlink:type="simple" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedNetLabel" roleURI="http://www.xbrl.org/2009/role/negatedNetLabel" />
    <link:roleRef xlink:type="simple" xlink:href="http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd#negatedTerseLabel" roleURI="http://www.xbrl.org/2009/role/negatedTerseLabel" />
    <link:roleRef xlink:type="simple" xlink:href="http://www.xbrl.org/lrr/role/net-2009-12-16.xsd#netLabel" roleURI="http://www.xbrl.org/2009/role/netLabel" />
    <link:labelLink xlink:type="extended" xlink:role="http://www.xbrl.org/2003/role/link">
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_CoverAbstract" xlink:label="dei_CoverAbstract" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_CoverAbstract" xlink:to="dei_CoverAbstract_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_CoverAbstract_lbl" xml:lang="en-US">Cover [Abstract]</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_DocumentType" xlink:label="dei_DocumentType" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentType" xlink:to="dei_DocumentType_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentType_lbl" xml:lang="en-US">Document Type</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_AmendmentFlag" xlink:label="dei_AmendmentFlag" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_AmendmentFlag" xlink:to="dei_AmendmentFlag_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_AmendmentFlag_lbl" xml:lang="en-US">Amendment Flag</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_AmendmentDescription" xlink:label="dei_AmendmentDescription" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_AmendmentDescription" xlink:to="dei_AmendmentDescription_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_AmendmentDescription_lbl" xml:lang="en-US">Amendment Description</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_DocumentRegistrationStatement" xlink:label="dei_DocumentRegistrationStatement" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentRegistrationStatement" xlink:to="dei_DocumentRegistrationStatement_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentRegistrationStatement_lbl" xml:lang="en-US">Document Registration Statement</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_DocumentAnnualReport" xlink:label="dei_DocumentAnnualReport" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentAnnualReport" xlink:to="dei_DocumentAnnualReport_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentAnnualReport_lbl" xml:lang="en-US">Document Annual Report</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_DocumentQuarterlyReport" xlink:label="dei_DocumentQuarterlyReport" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentQuarterlyReport" xlink:to="dei_DocumentQuarterlyReport_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentQuarterlyReport_lbl" xml:lang="en-US">Document Quarterly Report</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_DocumentTransitionReport" xlink:label="dei_DocumentTransitionReport" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentTransitionReport" xlink:to="dei_DocumentTransitionReport_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentTransitionReport_lbl" xml:lang="en-US">Document Transition Report</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_DocumentShellCompanyReport" xlink:label="dei_DocumentShellCompanyReport" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentShellCompanyReport" xlink:to="dei_DocumentShellCompanyReport_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentShellCompanyReport_lbl" xml:lang="en-US">Document Shell Company Report</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_DocumentShellCompanyEventDate" xlink:label="dei_DocumentShellCompanyEventDate" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentShellCompanyEventDate" xlink:to="dei_DocumentShellCompanyEventDate_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentShellCompanyEventDate_lbl" xml:lang="en-US">Document Shell Company Event Date</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_DocumentPeriodStartDate" xlink:label="dei_DocumentPeriodStartDate" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentPeriodStartDate" xlink:to="dei_DocumentPeriodStartDate_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentPeriodStartDate_lbl" xml:lang="en-US">Document Period Start Date</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_DocumentPeriodEndDate" xlink:label="dei_DocumentPeriodEndDate" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentPeriodEndDate" xlink:to="dei_DocumentPeriodEndDate_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentPeriodEndDate_lbl" xml:lang="en-US">Document Period End Date</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_DocumentFiscalPeriodFocus" xlink:label="dei_DocumentFiscalPeriodFocus" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentFiscalPeriodFocus" xlink:to="dei_DocumentFiscalPeriodFocus_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentFiscalPeriodFocus_lbl" xml:lang="en-US">Document Fiscal Period Focus</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_DocumentFiscalYearFocus" xlink:label="dei_DocumentFiscalYearFocus" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentFiscalYearFocus" xlink:to="dei_DocumentFiscalYearFocus_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentFiscalYearFocus_lbl" xml:lang="en-US">Document Fiscal Year Focus</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_CurrentFiscalYearEndDate" xlink:label="dei_CurrentFiscalYearEndDate" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_CurrentFiscalYearEndDate" xlink:to="dei_CurrentFiscalYearEndDate_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_CurrentFiscalYearEndDate_lbl" xml:lang="en-US">Current Fiscal Year End Date</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityFileNumber" xlink:label="dei_EntityFileNumber" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityFileNumber" xlink:to="dei_EntityFileNumber_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityFileNumber_lbl" xml:lang="en-US">Entity File Number</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityRegistrantName" xlink:label="dei_EntityRegistrantName" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityRegistrantName" xlink:to="dei_EntityRegistrantName_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityRegistrantName_lbl" xml:lang="en-US">Entity Registrant Name</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityCentralIndexKey" xlink:label="dei_EntityCentralIndexKey" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityCentralIndexKey" xlink:to="dei_EntityCentralIndexKey_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityCentralIndexKey_lbl" xml:lang="en-US">Entity Central Index Key</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityPrimarySicNumber" xlink:label="dei_EntityPrimarySicNumber" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityPrimarySicNumber" xlink:to="dei_EntityPrimarySicNumber_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityPrimarySicNumber_lbl" xml:lang="en-US">Entity Primary SIC Number</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityTaxIdentificationNumber" xlink:label="dei_EntityTaxIdentificationNumber" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityTaxIdentificationNumber" xlink:to="dei_EntityTaxIdentificationNumber_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityTaxIdentificationNumber_lbl" xml:lang="en-US">Entity Tax Identification Number</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityIncorporationStateCountryCode" xlink:label="dei_EntityIncorporationStateCountryCode" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityIncorporationStateCountryCode" xlink:to="dei_EntityIncorporationStateCountryCode_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityIncorporationStateCountryCode_lbl" xml:lang="en-US">Entity Incorporation, State or Country Code</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityAddressAddressLine1" xlink:label="dei_EntityAddressAddressLine1" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressAddressLine1" xlink:to="dei_EntityAddressAddressLine1_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityAddressAddressLine1_lbl" xml:lang="en-US">Entity Address, Address Line One</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityAddressAddressLine2" xlink:label="dei_EntityAddressAddressLine2" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressAddressLine2" xlink:to="dei_EntityAddressAddressLine2_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityAddressAddressLine2_lbl" xml:lang="en-US">Entity Address, Address Line Two</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityAddressAddressLine3" xlink:label="dei_EntityAddressAddressLine3" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressAddressLine3" xlink:to="dei_EntityAddressAddressLine3_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityAddressAddressLine3_lbl" xml:lang="en-US">Entity Address, Address Line Three</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityAddressCityOrTown" xlink:label="dei_EntityAddressCityOrTown" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressCityOrTown" xlink:to="dei_EntityAddressCityOrTown_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityAddressCityOrTown_lbl" xml:lang="en-US">Entity Address, City or Town</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityAddressStateOrProvince" xlink:label="dei_EntityAddressStateOrProvince" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressStateOrProvince" xlink:to="dei_EntityAddressStateOrProvince_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityAddressStateOrProvince_lbl" xml:lang="en-US">Entity Address, State or Province</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityAddressCountry" xlink:label="dei_EntityAddressCountry" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressCountry" xlink:to="dei_EntityAddressCountry_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityAddressCountry_lbl" xml:lang="en-US">Entity Address, Country</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityAddressPostalZipCode" xlink:label="dei_EntityAddressPostalZipCode" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityAddressPostalZipCode" xlink:to="dei_EntityAddressPostalZipCode_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityAddressPostalZipCode_lbl" xml:lang="en-US">Entity Address, Postal Zip Code</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_CountryRegion" xlink:label="dei_CountryRegion" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_CountryRegion" xlink:to="dei_CountryRegion_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_CountryRegion_lbl" xml:lang="en-US">Country Region</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_CityAreaCode" xlink:label="dei_CityAreaCode" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_CityAreaCode" xlink:to="dei_CityAreaCode_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_CityAreaCode_lbl" xml:lang="en-US">City Area Code</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_LocalPhoneNumber" xlink:label="dei_LocalPhoneNumber" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_LocalPhoneNumber" xlink:to="dei_LocalPhoneNumber_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_LocalPhoneNumber_lbl" xml:lang="en-US">Local Phone Number</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_Extension" xlink:label="dei_Extension" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_Extension" xlink:to="dei_Extension_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_Extension_lbl" xml:lang="en-US">Extension</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_WrittenCommunications" xlink:label="dei_WrittenCommunications" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_WrittenCommunications" xlink:to="dei_WrittenCommunications_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_WrittenCommunications_lbl" xml:lang="en-US">Written Communications</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_SolicitingMaterial" xlink:label="dei_SolicitingMaterial" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_SolicitingMaterial" xlink:to="dei_SolicitingMaterial_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_SolicitingMaterial_lbl" xml:lang="en-US">Soliciting Material</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_PreCommencementTenderOffer" xlink:label="dei_PreCommencementTenderOffer" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_PreCommencementTenderOffer" xlink:to="dei_PreCommencementTenderOffer_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_PreCommencementTenderOffer_lbl" xml:lang="en-US">Pre-commencement Tender Offer</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_PreCommencementIssuerTenderOffer" xlink:label="dei_PreCommencementIssuerTenderOffer" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_PreCommencementIssuerTenderOffer" xlink:to="dei_PreCommencementIssuerTenderOffer_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_PreCommencementIssuerTenderOffer_lbl" xml:lang="en-US">Pre-commencement Issuer Tender Offer</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_Security12bTitle" xlink:label="dei_Security12bTitle" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_Security12bTitle" xlink:to="dei_Security12bTitle_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_Security12bTitle_lbl" xml:lang="en-US">Title of 12(b) Security</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_NoTradingSymbolFlag" xlink:label="dei_NoTradingSymbolFlag" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_NoTradingSymbolFlag" xlink:to="dei_NoTradingSymbolFlag_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_NoTradingSymbolFlag_lbl" xml:lang="en-US">No Trading Symbol Flag</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_TradingSymbol" xlink:label="dei_TradingSymbol" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_TradingSymbol" xlink:to="dei_TradingSymbol_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_TradingSymbol_lbl" xml:lang="en-US">Trading Symbol</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_SecurityExchangeName" xlink:label="dei_SecurityExchangeName" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_SecurityExchangeName" xlink:to="dei_SecurityExchangeName_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_SecurityExchangeName_lbl" xml:lang="en-US">Security Exchange Name</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_Security12gTitle" xlink:label="dei_Security12gTitle" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_Security12gTitle" xlink:to="dei_Security12gTitle_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_Security12gTitle_lbl" xml:lang="en-US">Title of 12(g) Security</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_SecurityReportingObligation" xlink:label="dei_SecurityReportingObligation" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_SecurityReportingObligation" xlink:to="dei_SecurityReportingObligation_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_SecurityReportingObligation_lbl" xml:lang="en-US">Security Reporting Obligation</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_AnnualInformationForm" xlink:label="dei_AnnualInformationForm" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_AnnualInformationForm" xlink:to="dei_AnnualInformationForm_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_AnnualInformationForm_lbl" xml:lang="en-US">Annual Information Form</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_AuditedAnnualFinancialStatements" xlink:label="dei_AuditedAnnualFinancialStatements" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_AuditedAnnualFinancialStatements" xlink:to="dei_AuditedAnnualFinancialStatements_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_AuditedAnnualFinancialStatements_lbl" xml:lang="en-US">Audited Annual Financial Statements</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityWellKnownSeasonedIssuer" xlink:label="dei_EntityWellKnownSeasonedIssuer" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityWellKnownSeasonedIssuer" xlink:to="dei_EntityWellKnownSeasonedIssuer_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityWellKnownSeasonedIssuer_lbl" xml:lang="en-US">Entity Well-known Seasoned Issuer</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityVoluntaryFilers" xlink:label="dei_EntityVoluntaryFilers" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityVoluntaryFilers" xlink:to="dei_EntityVoluntaryFilers_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityVoluntaryFilers_lbl" xml:lang="en-US">Entity Voluntary Filers</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityCurrentReportingStatus" xlink:label="dei_EntityCurrentReportingStatus" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityCurrentReportingStatus" xlink:to="dei_EntityCurrentReportingStatus_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityCurrentReportingStatus_lbl" xml:lang="en-US">Entity Current Reporting Status</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityInteractiveDataCurrent" xlink:label="dei_EntityInteractiveDataCurrent" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityInteractiveDataCurrent" xlink:to="dei_EntityInteractiveDataCurrent_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityInteractiveDataCurrent_lbl" xml:lang="en-US">Entity Interactive Data Current</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityFilerCategory" xlink:label="dei_EntityFilerCategory" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityFilerCategory" xlink:to="dei_EntityFilerCategory_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityFilerCategory_lbl" xml:lang="en-US">Entity Filer Category</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntitySmallBusiness" xlink:label="dei_EntitySmallBusiness" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntitySmallBusiness" xlink:to="dei_EntitySmallBusiness_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntitySmallBusiness_lbl" xml:lang="en-US">Entity Small Business</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityEmergingGrowthCompany" xlink:label="dei_EntityEmergingGrowthCompany" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityEmergingGrowthCompany" xlink:to="dei_EntityEmergingGrowthCompany_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityEmergingGrowthCompany_lbl" xml:lang="en-US">Entity Emerging Growth Company</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityExTransitionPeriod" xlink:label="dei_EntityExTransitionPeriod" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityExTransitionPeriod" xlink:to="dei_EntityExTransitionPeriod_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityExTransitionPeriod_lbl" xml:lang="en-US">Elected Not To Use the Extended Transition Period</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_DocumentAccountingStandard" xlink:label="dei_DocumentAccountingStandard" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentAccountingStandard" xlink:to="dei_DocumentAccountingStandard_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentAccountingStandard_lbl" xml:lang="en-US">Document Accounting Standard</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_OtherReportingStandardItemNumber" xlink:label="dei_OtherReportingStandardItemNumber" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_OtherReportingStandardItemNumber" xlink:to="dei_OtherReportingStandardItemNumber_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_OtherReportingStandardItemNumber_lbl" xml:lang="en-US">Other Reporting Standard Item Number</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityShellCompany" xlink:label="dei_EntityShellCompany" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityShellCompany" xlink:to="dei_EntityShellCompany_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityShellCompany_lbl" xml:lang="en-US">Entity Shell Company</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityPublicFloat" xlink:label="dei_EntityPublicFloat" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityPublicFloat" xlink:to="dei_EntityPublicFloat_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityPublicFloat_lbl" xml:lang="en-US">Entity Public Float</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityBankruptcyProceedingsReportingCurrent" xlink:label="dei_EntityBankruptcyProceedingsReportingCurrent" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityBankruptcyProceedingsReportingCurrent" xlink:to="dei_EntityBankruptcyProceedingsReportingCurrent_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityBankruptcyProceedingsReportingCurrent_lbl" xml:lang="en-US">Entity Bankruptcy Proceedings, Reporting Current</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityCommonStockSharesOutstanding" xlink:label="dei_EntityCommonStockSharesOutstanding" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_EntityCommonStockSharesOutstanding" xlink:to="dei_EntityCommonStockSharesOutstanding_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_EntityCommonStockSharesOutstanding_lbl" xml:lang="en-US">Entity Common Stock, Shares Outstanding</link:label>
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_DocumentsIncorporatedByReferenceTextBlock" xlink:label="dei_DocumentsIncorporatedByReferenceTextBlock" />
      <link:labelArc xlink:arcrole="http://www.xbrl.org/2003/arcrole/concept-label" xlink:from="dei_DocumentsIncorporatedByReferenceTextBlock" xlink:to="dei_DocumentsIncorporatedByReferenceTextBlock_lbl" xlink:type="arc" />
      <link:label xlink:type="resource" xlink:role="http://www.xbrl.org/2003/role/label" xlink:label="dei_DocumentsIncorporatedByReferenceTextBlock_lbl" xml:lang="en-US">Documents Incorporated by Reference [Text Block]</link:label>
    </link:labelLink>
</link:linkbase>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.PRE
<SEQUENCE>5
<FILENAME>acls-20230224_pre.xml
<DESCRIPTION>XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE
<TEXT>
<XBRL>
<?xml version="1.0" encoding="US-ASCII" standalone="no"?>
    <!-- Field: Doc-Info; Name: Generator; Value: GoFiler Complete; Version: 5.18a -->
    <!-- Field: Doc-Info; Name: VendorURI; Value: https://www.novaworks.com -->
    <!-- Field: Doc-Info; Name: Status; Value: 0x00000000 -->
<link:linkbase xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:link="http://www.xbrl.org/2003/linkbase" xmlns:xbrli="http://www.xbrl.org/2003/instance" xsi:schemaLocation="http://www.xbrl.org/2003/linkbase http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd">
    <link:roleRef roleURI="http://axcelis.com/role/Cover" xlink:href="acls-20230224.xsd#Cover" xlink:type="simple" />
    <link:presentationLink xlink:type="extended" xlink:role="http://axcelis.com/role/Cover" xlink:title="00000001 - Document - Cover">
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_CoverAbstract" xlink:label="loc_deiCoverAbstract" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_DocumentType" xlink:label="loc_deiDocumentType" />
      <link:presentationArc order="0" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiDocumentType" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_AmendmentFlag" xlink:label="loc_deiAmendmentFlag" />
      <link:presentationArc order="10" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiAmendmentFlag" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_AmendmentDescription" xlink:label="loc_deiAmendmentDescription" />
      <link:presentationArc order="20" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiAmendmentDescription" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_DocumentRegistrationStatement" xlink:label="loc_deiDocumentRegistrationStatement" />
      <link:presentationArc order="30" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiDocumentRegistrationStatement" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_DocumentAnnualReport" xlink:label="loc_deiDocumentAnnualReport" />
      <link:presentationArc order="40" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiDocumentAnnualReport" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_DocumentQuarterlyReport" xlink:label="loc_deiDocumentQuarterlyReport" />
      <link:presentationArc order="50" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiDocumentQuarterlyReport" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_DocumentTransitionReport" xlink:label="loc_deiDocumentTransitionReport" />
      <link:presentationArc order="60" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiDocumentTransitionReport" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_DocumentShellCompanyReport" xlink:label="loc_deiDocumentShellCompanyReport" />
      <link:presentationArc order="70" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiDocumentShellCompanyReport" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_DocumentShellCompanyEventDate" xlink:label="loc_deiDocumentShellCompanyEventDate" />
      <link:presentationArc order="80" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiDocumentShellCompanyEventDate" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_DocumentPeriodStartDate" xlink:label="loc_deiDocumentPeriodStartDate" />
      <link:presentationArc order="90" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiDocumentPeriodStartDate" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_DocumentPeriodEndDate" xlink:label="loc_deiDocumentPeriodEndDate" />
      <link:presentationArc order="100" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiDocumentPeriodEndDate" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_DocumentFiscalPeriodFocus" xlink:label="loc_deiDocumentFiscalPeriodFocus" />
      <link:presentationArc order="110" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiDocumentFiscalPeriodFocus" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_DocumentFiscalYearFocus" xlink:label="loc_deiDocumentFiscalYearFocus" />
      <link:presentationArc order="120" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiDocumentFiscalYearFocus" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_CurrentFiscalYearEndDate" xlink:label="loc_deiCurrentFiscalYearEndDate" />
      <link:presentationArc order="130" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiCurrentFiscalYearEndDate" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityFileNumber" xlink:label="loc_deiEntityFileNumber" />
      <link:presentationArc order="140" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiEntityFileNumber" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityRegistrantName" xlink:label="loc_deiEntityRegistrantName" />
      <link:presentationArc order="150" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiEntityRegistrantName" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityCentralIndexKey" xlink:label="loc_deiEntityCentralIndexKey" />
      <link:presentationArc order="160" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiEntityCentralIndexKey" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityPrimarySicNumber" xlink:label="loc_deiEntityPrimarySicNumber" />
      <link:presentationArc order="170" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiEntityPrimarySicNumber" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityTaxIdentificationNumber" xlink:label="loc_deiEntityTaxIdentificationNumber" />
      <link:presentationArc order="180" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiEntityTaxIdentificationNumber" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityIncorporationStateCountryCode" xlink:label="loc_deiEntityIncorporationStateCountryCode" />
      <link:presentationArc order="190" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiEntityIncorporationStateCountryCode" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityAddressAddressLine1" xlink:label="loc_deiEntityAddressAddressLine1" />
      <link:presentationArc order="200" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiEntityAddressAddressLine1" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityAddressAddressLine2" xlink:label="loc_deiEntityAddressAddressLine2" />
      <link:presentationArc order="210" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiEntityAddressAddressLine2" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityAddressAddressLine3" xlink:label="loc_deiEntityAddressAddressLine3" />
      <link:presentationArc order="220" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiEntityAddressAddressLine3" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityAddressCityOrTown" xlink:label="loc_deiEntityAddressCityOrTown" />
      <link:presentationArc order="230" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiEntityAddressCityOrTown" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityAddressStateOrProvince" xlink:label="loc_deiEntityAddressStateOrProvince" />
      <link:presentationArc order="240" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiEntityAddressStateOrProvince" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityAddressCountry" xlink:label="loc_deiEntityAddressCountry" />
      <link:presentationArc order="250" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiEntityAddressCountry" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityAddressPostalZipCode" xlink:label="loc_deiEntityAddressPostalZipCode" />
      <link:presentationArc order="260" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiEntityAddressPostalZipCode" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_CountryRegion" xlink:label="loc_deiCountryRegion" />
      <link:presentationArc order="270" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiCountryRegion" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_CityAreaCode" xlink:label="loc_deiCityAreaCode" />
      <link:presentationArc order="280" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiCityAreaCode" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_LocalPhoneNumber" xlink:label="loc_deiLocalPhoneNumber" />
      <link:presentationArc order="290" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiLocalPhoneNumber" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_Extension" xlink:label="loc_deiExtension" />
      <link:presentationArc order="300" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiExtension" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_WrittenCommunications" xlink:label="loc_deiWrittenCommunications" />
      <link:presentationArc order="310" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiWrittenCommunications" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_SolicitingMaterial" xlink:label="loc_deiSolicitingMaterial" />
      <link:presentationArc order="320" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiSolicitingMaterial" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_PreCommencementTenderOffer" xlink:label="loc_deiPreCommencementTenderOffer" />
      <link:presentationArc order="330" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiPreCommencementTenderOffer" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_PreCommencementIssuerTenderOffer" xlink:label="loc_deiPreCommencementIssuerTenderOffer" />
      <link:presentationArc order="340" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiPreCommencementIssuerTenderOffer" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_Security12bTitle" xlink:label="loc_deiSecurity12bTitle" />
      <link:presentationArc order="350" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiSecurity12bTitle" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_NoTradingSymbolFlag" xlink:label="loc_deiNoTradingSymbolFlag" />
      <link:presentationArc order="360" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiNoTradingSymbolFlag" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_TradingSymbol" xlink:label="loc_deiTradingSymbol" />
      <link:presentationArc order="370" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiTradingSymbol" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_SecurityExchangeName" xlink:label="loc_deiSecurityExchangeName" />
      <link:presentationArc order="380" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiSecurityExchangeName" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_Security12gTitle" xlink:label="loc_deiSecurity12gTitle" />
      <link:presentationArc order="390" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiSecurity12gTitle" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_SecurityReportingObligation" xlink:label="loc_deiSecurityReportingObligation" />
      <link:presentationArc order="400" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiSecurityReportingObligation" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_AnnualInformationForm" xlink:label="loc_deiAnnualInformationForm" />
      <link:presentationArc order="410" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiAnnualInformationForm" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_AuditedAnnualFinancialStatements" xlink:label="loc_deiAuditedAnnualFinancialStatements" />
      <link:presentationArc order="420" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiAuditedAnnualFinancialStatements" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityWellKnownSeasonedIssuer" xlink:label="loc_deiEntityWellKnownSeasonedIssuer" />
      <link:presentationArc order="430" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiEntityWellKnownSeasonedIssuer" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityVoluntaryFilers" xlink:label="loc_deiEntityVoluntaryFilers" />
      <link:presentationArc order="440" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiEntityVoluntaryFilers" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityCurrentReportingStatus" xlink:label="loc_deiEntityCurrentReportingStatus" />
      <link:presentationArc order="450" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiEntityCurrentReportingStatus" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityInteractiveDataCurrent" xlink:label="loc_deiEntityInteractiveDataCurrent" />
      <link:presentationArc order="460" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiEntityInteractiveDataCurrent" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityFilerCategory" xlink:label="loc_deiEntityFilerCategory" />
      <link:presentationArc order="470" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiEntityFilerCategory" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntitySmallBusiness" xlink:label="loc_deiEntitySmallBusiness" />
      <link:presentationArc order="480" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiEntitySmallBusiness" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityEmergingGrowthCompany" xlink:label="loc_deiEntityEmergingGrowthCompany" />
      <link:presentationArc order="490" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiEntityEmergingGrowthCompany" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityExTransitionPeriod" xlink:label="loc_deiEntityExTransitionPeriod" />
      <link:presentationArc order="500" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiEntityExTransitionPeriod" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_DocumentAccountingStandard" xlink:label="loc_deiDocumentAccountingStandard" />
      <link:presentationArc order="510" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiDocumentAccountingStandard" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_OtherReportingStandardItemNumber" xlink:label="loc_deiOtherReportingStandardItemNumber" />
      <link:presentationArc order="520" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiOtherReportingStandardItemNumber" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityShellCompany" xlink:label="loc_deiEntityShellCompany" />
      <link:presentationArc order="530" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiEntityShellCompany" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityPublicFloat" xlink:label="loc_deiEntityPublicFloat" />
      <link:presentationArc order="540" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiEntityPublicFloat" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityBankruptcyProceedingsReportingCurrent" xlink:label="loc_deiEntityBankruptcyProceedingsReportingCurrent" />
      <link:presentationArc order="550" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiEntityBankruptcyProceedingsReportingCurrent" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_EntityCommonStockSharesOutstanding" xlink:label="loc_deiEntityCommonStockSharesOutstanding" />
      <link:presentationArc order="560" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiEntityCommonStockSharesOutstanding" xlink:type="arc" />
      <link:loc xlink:type="locator" xlink:href="https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd#dei_DocumentsIncorporatedByReferenceTextBlock" xlink:label="loc_deiDocumentsIncorporatedByReferenceTextBlock" />
      <link:presentationArc order="570" xlink:arcrole="http://www.xbrl.org/2003/arcrole/parent-child" xlink:from="loc_deiCoverAbstract" xlink:to="loc_deiDocumentsIncorporatedByReferenceTextBlock" xlink:type="arc" />
    </link:presentationLink>
</link:linkbase>
</XBRL>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>6
<FILENAME>R1.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<html>
<head>
<title></title>
<link rel="stylesheet" type="text/css" href="include/report.css">
<script type="text/javascript" src="Show.js">/* Do Not Remove This Comment */</script><script type="text/javascript">
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<span style="display: none;">v3.23.1</span><table class="report" border="0" cellspacing="2" id="idm140689373284304">
<tr>
<th class="tl" colspan="1" rowspan="1"><div style="width: 200px;"><strong>Cover<br></strong></div></th>
<th class="th"><div>Feb. 24, 2023</div></th>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_CoverAbstract', window );"><strong>Cover [Abstract]</strong></a></td>
<td class="text">&#160;<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_DocumentType', window );">Document Type</a></td>
<td class="text">8-K<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_AmendmentFlag', window );">Amendment Flag</a></td>
<td class="text">false<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_DocumentPeriodEndDate', window );">Document Period End Date</a></td>
<td class="text">Feb. 24,  2023<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityFileNumber', window );">Entity File Number</a></td>
<td class="text">000-30941<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityRegistrantName', window );">Entity Registrant Name</a></td>
<td class="text">Axcelis Technologies, Inc.<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityCentralIndexKey', window );">Entity Central Index Key</a></td>
<td class="text">0001113232<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityTaxIdentificationNumber', window );">Entity Tax Identification Number</a></td>
<td class="text">34-1818596<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityIncorporationStateCountryCode', window );">Entity Incorporation, State or Country Code</a></td>
<td class="text">DE<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityAddressAddressLine1', window );">Entity Address, Address Line One</a></td>
<td class="text">108 Cherry Hill Drive<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityAddressCityOrTown', window );">Entity Address, City or Town</a></td>
<td class="text">Beverly<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityAddressStateOrProvince', window );">Entity Address, State or Province</a></td>
<td class="text">MA<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityAddressPostalZipCode', window );">Entity Address, Postal Zip Code</a></td>
<td class="text">01915<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_CityAreaCode', window );">City Area Code</a></td>
<td class="text">978<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_LocalPhoneNumber', window );">Local Phone Number</a></td>
<td class="text">787-4000<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_WrittenCommunications', window );">Written Communications</a></td>
<td class="text">false<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_SolicitingMaterial', window );">Soliciting Material</a></td>
<td class="text">false<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_PreCommencementTenderOffer', window );">Pre-commencement Tender Offer</a></td>
<td class="text">false<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_PreCommencementIssuerTenderOffer', window );">Pre-commencement Issuer Tender Offer</a></td>
<td class="text">false<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_Security12bTitle', window );">Title of 12(b) Security</a></td>
<td class="text">Common
    Stock, $0.001 par value<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_TradingSymbol', window );">Trading Symbol</a></td>
<td class="text">ACLS<span></span>
</td>
</tr>
<tr class="ro">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_SecurityExchangeName', window );">Security Exchange Name</a></td>
<td class="text">NASDAQ<span></span>
</td>
</tr>
<tr class="re">
<td class="pl" style="border-bottom: 0px;" valign="top"><a class="a" href="javascript:void(0);" onclick="Show.showAR( this, 'defref_dei_EntityEmergingGrowthCompany', window );">Entity Emerging Growth Company</a></td>
<td class="text">false<span></span>
</td>
</tr>
</table>
<div style="display: none;">
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_AmendmentFlag">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the XBRL content amends previously-filed or accepted submission.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_AmendmentFlag</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_CityAreaCode">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Area code of city</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_CityAreaCode</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_CoverAbstract">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Cover page.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_CoverAbstract</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:stringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentPeriodEndDate">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>For the EDGAR submission types of Form 8-K: the date of the report, the date of the earliest event reported; for the EDGAR submission types of Form N-1A: the filing date; for all other submission types: the end of the reporting or transition period.  The format of the date is YYYY-MM-DD.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentPeriodEndDate</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:dateItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_DocumentType">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The type of document being provided (such as 10-K, 10-Q, 485BPOS, etc). The document type is limited to the same value as the supporting SEC submission type, or the word 'Other'.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_DocumentType</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:submissionTypeItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressAddressLine1">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Address Line 1 such as Attn, Building Name, Street Name</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressAddressLine1</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressCityOrTown">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Name of the City or Town</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressCityOrTown</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressPostalZipCode">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Code for the postal or zip code</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressPostalZipCode</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityAddressStateOrProvince">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Name of the state or province.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityAddressStateOrProvince</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:stateOrProvinceItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityCentralIndexKey">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>A unique 10-digit SEC-issued value to identify entities that have filed disclosures with the SEC. It is commonly abbreviated as CIK.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityCentralIndexKey</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:centralIndexKeyItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityEmergingGrowthCompany">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Indicate if registrant meets the emerging growth company criteria.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityEmergingGrowthCompany</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityFileNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Commission file number. The field allows up to 17 characters. The prefix may contain 1-3 digits, the sequence number may contain 1-8 digits, the optional suffix may contain 1-4 characters, and the fields are separated with a hyphen.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityFileNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:fileNumberItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityIncorporationStateCountryCode">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Two-character EDGAR code representing the state or country of incorporation.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityIncorporationStateCountryCode</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:edgarStateCountryItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityRegistrantName">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The exact name of the entity filing the report as specified in its charter, which is required by forms filed with the SEC.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityRegistrantName</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_EntityTaxIdentificationNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>The Tax Identification Number (TIN), also known as an Employer Identification Number (EIN), is a unique 9-digit value assigned by the IRS.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b-2<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_EntityTaxIdentificationNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:employerIdItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_LocalPhoneNumber">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Local phone number for entity.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_LocalPhoneNumber</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:normalizedStringItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_PreCommencementIssuerTenderOffer">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 13e<br> -Subsection 4c<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_PreCommencementIssuerTenderOffer</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_PreCommencementTenderOffer">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 14d<br> -Subsection 2b<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_PreCommencementTenderOffer</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_Security12bTitle">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Title of a 12(b) registered security.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection b<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_Security12bTitle</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:securityTitleItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_SecurityExchangeName">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Name of the Exchange on which a security is registered.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Number 240<br> -Section 12<br> -Subsection d1-1<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_SecurityExchangeName</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:edgarExchangeCodeItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_SolicitingMaterial">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as soliciting material pursuant to Rule 14a-12 under the Exchange Act.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Exchange Act<br> -Section 14a<br> -Number 240<br> -Subsection 12<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_SolicitingMaterial</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_TradingSymbol">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Trading symbol of an instrument as listed on an exchange.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>No definition available.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_TradingSymbol</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>dei:tradingSymbolItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
<table border="0" cellpadding="0" cellspacing="0" class="authRefData" style="display: none;" id="defref_dei_WrittenCommunications">
<tr><td class="hide"><a style="color: white;" href="javascript:void(0);" onclick="Show.hideAR();">X</a></td></tr>
<tr><td><div class="body" style="padding: 2px;">
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">- Definition</a><div><p>Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as written communications pursuant to Rule 425 under the Securities Act.</p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ References</a><div style="display: none;"><p>Reference 1: http://www.xbrl.org/2003/role/presentationRef<br> -Publisher SEC<br> -Name Securities Act<br> -Number 230<br> -Section 425<br></p></div>
<a href="javascript:void(0);" onclick="Show.toggleNext( this );">+ Details</a><div style="display: none;"><table border="0" cellpadding="0" cellspacing="0">
<tr>
<td><strong> Name:</strong></td>
<td style="white-space:nowrap;">dei_WrittenCommunications</td>
</tr>
<tr>
<td style="padding-right: 4px;white-space:nowrap;"><strong> Namespace Prefix:</strong></td>
<td>dei_</td>
</tr>
<tr>
<td><strong> Data Type:</strong></td>
<td>xbrli:booleanItemType</td>
</tr>
<tr>
<td><strong> Balance Type:</strong></td>
<td>na</td>
</tr>
<tr>
<td><strong> Period Type:</strong></td>
<td>duration</td>
</tr>
</table></div>
</div></td></tr>
</table>
</div>
</body>
</html>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>7
<FILENAME>tm2313052d1_8k_htm.xml
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<XML>
<?xml version="1.0" encoding="utf-8"?>
<xbrl
  xmlns="http://www.xbrl.org/2003/instance"
  xmlns:dei="http://xbrl.sec.gov/dei/2021q4"
  xmlns:iso4217="http://www.xbrl.org/2003/iso4217"
  xmlns:link="http://www.xbrl.org/2003/linkbase"
  xmlns:xlink="http://www.w3.org/1999/xlink">
    <link:schemaRef xlink:href="acls-20230224.xsd" xlink:type="simple"/>
    <context id="From2023-02-24to2023-02-24">
        <entity>
            <identifier scheme="http://www.sec.gov/CIK">0001113232</identifier>
        </entity>
        <period>
            <startDate>2023-02-24</startDate>
            <endDate>2023-02-24</endDate>
        </period>
    </context>
    <unit id="USD">
        <measure>iso4217:USD</measure>
    </unit>
    <unit id="Shares">
        <measure>shares</measure>
    </unit>
    <unit id="USDPShares">
        <divide>
            <unitNumerator>
                <measure>iso4217:USD</measure>
            </unitNumerator>
            <unitDenominator>
                <measure>shares</measure>
            </unitDenominator>
        </divide>
    </unit>
    <dei:EntityCentralIndexKey contextRef="From2023-02-24to2023-02-24">0001113232</dei:EntityCentralIndexKey>
    <dei:AmendmentFlag contextRef="From2023-02-24to2023-02-24">false</dei:AmendmentFlag>
    <dei:DocumentType contextRef="From2023-02-24to2023-02-24">8-K</dei:DocumentType>
    <dei:DocumentPeriodEndDate contextRef="From2023-02-24to2023-02-24">2023-02-24</dei:DocumentPeriodEndDate>
    <dei:EntityRegistrantName contextRef="From2023-02-24to2023-02-24">Axcelis Technologies, Inc.</dei:EntityRegistrantName>
    <dei:EntityIncorporationStateCountryCode contextRef="From2023-02-24to2023-02-24">DE</dei:EntityIncorporationStateCountryCode>
    <dei:EntityFileNumber contextRef="From2023-02-24to2023-02-24">000-30941</dei:EntityFileNumber>
    <dei:EntityTaxIdentificationNumber contextRef="From2023-02-24to2023-02-24">34-1818596</dei:EntityTaxIdentificationNumber>
    <dei:EntityAddressAddressLine1 contextRef="From2023-02-24to2023-02-24">108 Cherry Hill Drive</dei:EntityAddressAddressLine1>
    <dei:EntityAddressCityOrTown contextRef="From2023-02-24to2023-02-24">Beverly</dei:EntityAddressCityOrTown>
    <dei:EntityAddressStateOrProvince contextRef="From2023-02-24to2023-02-24">MA</dei:EntityAddressStateOrProvince>
    <dei:EntityAddressPostalZipCode contextRef="From2023-02-24to2023-02-24">01915</dei:EntityAddressPostalZipCode>
    <dei:CityAreaCode contextRef="From2023-02-24to2023-02-24">978</dei:CityAreaCode>
    <dei:LocalPhoneNumber contextRef="From2023-02-24to2023-02-24">787-4000</dei:LocalPhoneNumber>
    <dei:WrittenCommunications contextRef="From2023-02-24to2023-02-24">false</dei:WrittenCommunications>
    <dei:SolicitingMaterial contextRef="From2023-02-24to2023-02-24">false</dei:SolicitingMaterial>
    <dei:PreCommencementTenderOffer contextRef="From2023-02-24to2023-02-24">false</dei:PreCommencementTenderOffer>
    <dei:PreCommencementIssuerTenderOffer contextRef="From2023-02-24to2023-02-24">false</dei:PreCommencementIssuerTenderOffer>
    <dei:Security12bTitle contextRef="From2023-02-24to2023-02-24">Common     Stock, $0.001 par value</dei:Security12bTitle>
    <dei:TradingSymbol contextRef="From2023-02-24to2023-02-24">ACLS</dei:TradingSymbol>
    <dei:SecurityExchangeName contextRef="From2023-02-24to2023-02-24">NASDAQ</dei:SecurityExchangeName>
    <dei:EntityEmergingGrowthCompany contextRef="From2023-02-24to2023-02-24">false</dei:EntityEmergingGrowthCompany>
</xbrl>
</XML>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EXCEL
<SEQUENCE>8
<FILENAME>Financial_Report.xlsx
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
begin 644 Financial_Report.xlsx
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M=]W3CHG&K=!X#;[Q3X?#KHG&J]!TZVDF)_VN:Z3I%FA"1N/K>A(5M>5 TR
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M!Z.:60F]A%9JGZJ'-#ZH'C(*!?&Y'C[E>G@*-Y;&O%"N@GL!_]':-\*K^(+
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MU4#E/]O4#6CV#30<D05>,9FV-J/D3@H\W/[O#;#"Q([A[8N_ 5!+ P04
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MP5O@+H#OETK9]X';LI:_.(S^!5!+ P04    "  Z/9)6GZ ;\+$"  #B#
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M#ZP+V.Q _G@>F*FX3YI"5S%NV G&D3S'$)C%^(QF&5*=##[Q_F"G)$WS/(X
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MTZ(=I7\=Q_:0T^FO8R*T>EOH^7%H5 J.W&,EC'%BM/XU@LD/['X 4$L#!!0
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MBBJ6<%H@XLD@;6E6?;!/3K3G>1<W]T6NS>,)KM\,<'AT_@%02P,$%     @
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MX3]>?P%02P$"% ,4    "  Z/9)6!T%-8H$   "Q    $
M@ $     9&]C4')O<',O87!P+GAM;%!+ 0(4 Q0    ( #H]DE9JC9W[[P
M "L"   1              "  :\   !D;V-0<F]P<R]C;W)E+GAM;%!+ 0(4
M Q0    ( #H]DE:97)PC$ 8  )PG   3              "  <T!  !X;"]T
M:&5M92]T:&5M93$N>&UL4$L! A0#%     @ .CV25FU3Y?A*!   ?1   !@
M             ("!#@@  'AL+W=O<FMS:&5E=',O<VAE970Q+GAM;%!+ 0(4
M Q0    ( #H]DE:?H!OPL0(  .(,   -              "  8X,  !X;"]S
M='EL97,N>&UL4$L! A0#%     @ .CV25I>*NQS     $P(   L
M     ( !:@\  %]R96QS+RYR96QS4$L! A0#%     @ .CV25JK$(A8S 0
M(@(   \              ( !4Q   'AL+W=O<FMB;V]K+GAM;%!+ 0(4 Q0
M   ( #H]DE8D'INBK0   /@!   :              "  ;,1  !X;"]?<F5L
M<R]W;W)K8F]O:RYX;6PN<F5L<U!+ 0(4 Q0    ( #H]DE9ED'F2&0$  ,\#
M   3              "  9@2  !;0V]N=&5N=%]4>7!E<UTN>&UL4$L%!@
0   )  D /@(  .(3      $!

end
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>9
<FILENAME>Show.js
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
// Edgar(tm) Renderer was created by staff of the U.S. Securities and Exchange Commission.  Data and content created by government employees within the scope of their employment are not subject to domestic copyright protection. 17 U.S.C. 105.
var Show={};Show.LastAR=null,Show.showAR=function(a,r,w){if(Show.LastAR)Show.hideAR();var e=a;while(e&&e.nodeName!='TABLE')e=e.nextSibling;if(!e||e.nodeName!='TABLE'){var ref=((window)?w.document:document).getElementById(r);if(ref){e=ref.cloneNode(!0);
e.removeAttribute('id');a.parentNode.appendChild(e)}}
if(e)e.style.display='block';Show.LastAR=e};Show.hideAR=function(){Show.LastAR.style.display='none'};Show.toggleNext=function(a){var e=a;while(e.nodeName!='DIV')e=e.nextSibling;if(!e.style){}else if(!e.style.display){}else{var d,p_;if(e.style.display=='none'){d='block';p='-'}else{d='none';p='+'}
e.style.display=d;if(a.textContent){a.textContent=p+a.textContent.substring(1)}else{a.innerText=p+a.innerText.substring(1)}}}
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>10
<FILENAME>report.css
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
/* Updated 2009-11-04 */
/* v2.2.0.24 */

/* DefRef Styles */
..report table.authRefData{
	background-color: #def;
	border: 2px solid #2F4497;
	font-size: 1em;
	position: absolute;
}

..report table.authRefData a {
	display: block;
	font-weight: bold;
}

..report table.authRefData p {
	margin-top: 0px;
}

..report table.authRefData .hide {
	background-color: #2F4497;
	padding: 1px 3px 0px 0px;
	text-align: right;
}

..report table.authRefData .hide a:hover {
	background-color: #2F4497;
}

..report table.authRefData .body {
	height: 150px;
	overflow: auto;
	width: 400px;
}

..report table.authRefData table{
	font-size: 1em;
}

/* Report Styles */
..pl a, .pl a:visited {
	color: black;
	text-decoration: none;
}

/* table */
..report {
	background-color: white;
	border: 2px solid #acf;
	clear: both;
	color: black;
	font: normal 8pt Helvetica, Arial, san-serif;
	margin-bottom: 2em;
}

..report hr {
	border: 1px solid #acf;
}

/* Top labels */
..report th {
	background-color: #acf;
	color: black;
	font-weight: bold;
	text-align: center;
}

..report th.void	{
	background-color: transparent;
	color: #000000;
	font: bold 10pt Helvetica, Arial, san-serif;
	text-align: left;
}

..report .pl {
	text-align: left;
	vertical-align: top;
	white-space: normal;
	width: 200px;
	white-space: normal; /* word-wrap: break-word; */
}

..report td.pl a.a {
	cursor: pointer;
	display: block;
	width: 200px;
	overflow: hidden;
}

..report td.pl div.a {
	width: 200px;
}

..report td.pl a:hover {
	background-color: #ffc;
}

/* Header rows... */
..report tr.rh {
	background-color: #acf;
	color: black;
	font-weight: bold;
}

/* Calendars... */
..report .rc {
	background-color: #f0f0f0;
}

/* Even rows... */
..report .re, .report .reu {
	background-color: #def;
}

..report .reu td {
	border-bottom: 1px solid black;
}

/* Odd rows... */
..report .ro, .report .rou {
	background-color: white;
}

..report .rou td {
	border-bottom: 1px solid black;
}

..report .rou table td, .report .reu table td {
	border-bottom: 0px solid black;
}

/* styles for footnote marker */
..report .fn {
	white-space: nowrap;
}

/* styles for numeric types */
..report .num, .report .nump {
	text-align: right;
	white-space: nowrap;
}

..report .nump {
	padding-left: 2em;
}

..report .nump {
	padding: 0px 0.4em 0px 2em;
}

/* styles for text types */
..report .text {
	text-align: left;
	white-space: normal;
}

..report .text .big {
	margin-bottom: 1em;
	width: 17em;
}

..report .text .more {
	display: none;
}

..report .text .note {
	font-style: italic;
	font-weight: bold;
}

..report .text .small {
	width: 10em;
}

..report sup {
	font-style: italic;
}

..report .outerFootnotes {
	font-size: 1em;
}
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>11
<FILENAME>FilingSummary.xml
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
<XML>
<?xml version='1.0' encoding='utf-8'?>
<FilingSummary>
  <Version>3.23.1</Version>
  <ProcessingTime/>
  <ReportFormat>html</ReportFormat>
  <ContextCount>1</ContextCount>
  <ElementCount>22</ElementCount>
  <EntityCount>1</EntityCount>
  <FootnotesReported>false</FootnotesReported>
  <SegmentCount>0</SegmentCount>
  <ScenarioCount>0</ScenarioCount>
  <TuplesReported>false</TuplesReported>
  <UnitCount>3</UnitCount>
  <MyReports>
    <Report instance="tm2313052d1_8k.htm">
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <HtmlFileName>R1.htm</HtmlFileName>
      <LongName>00000001 - Document - Cover</LongName>
      <ReportType>Sheet</ReportType>
      <Role>http://axcelis.com/role/Cover</Role>
      <ShortName>Cover</ShortName>
      <MenuCategory>Cover</MenuCategory>
      <Position>1</Position>
    </Report>
    <Report>
      <IsDefault>false</IsDefault>
      <HasEmbeddedReports>false</HasEmbeddedReports>
      <LongName>All Reports</LongName>
      <ReportType>Book</ReportType>
      <ShortName>All Reports</ShortName>
    </Report>
  </MyReports>
  <InputFiles>
    <File doctype="8-K" original="tm2313052d1_8k.htm">tm2313052d1_8k.htm</File>
    <File>acls-20230224.xsd</File>
    <File>acls-20230224_lab.xml</File>
    <File>acls-20230224_pre.xml</File>
    <File>tm2313052d1_ex10-1.htm</File>
  </InputFiles>
  <SupplementalFiles/>
  <BaseTaxonomies>
    <BaseTaxonomy items="22">http://xbrl.sec.gov/dei/2021q4</BaseTaxonomy>
  </BaseTaxonomies>
  <HasPresentationLinkbase>true</HasPresentationLinkbase>
  <HasCalculationLinkbase>false</HasCalculationLinkbase>
</FilingSummary>
</XML>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>JSON
<SEQUENCE>13
<FILENAME>MetaLinks.json
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
{
 "instance": {
  "tm2313052d1_8k.htm": {
   "axisCustom": 0,
   "axisStandard": 0,
   "baseTaxonomies": {
    "http://xbrl.sec.gov/dei/2021q4": 22
   },
   "contextCount": 1,
   "dts": {
    "inline": {
     "local": [
      "tm2313052d1_8k.htm"
     ]
    },
    "labelLink": {
     "local": [
      "acls-20230224_lab.xml"
     ]
    },
    "presentationLink": {
     "local": [
      "acls-20230224_pre.xml"
     ]
    },
    "schema": {
     "local": [
      "acls-20230224.xsd"
     ],
     "remote": [
      "http://www.xbrl.org/2003/xbrl-instance-2003-12-31.xsd",
      "http://www.xbrl.org/2003/xbrl-linkbase-2003-12-31.xsd",
      "http://www.xbrl.org/2003/xl-2003-12-31.xsd",
      "http://www.xbrl.org/2003/xlink-2003-12-31.xsd",
      "http://www.xbrl.org/2005/xbrldt-2005.xsd",
      "http://www.xbrl.org/2006/ref-2006-02-27.xsd",
      "http://www.xbrl.org/lrr/role/negated-2009-12-16.xsd",
      "http://www.xbrl.org/lrr/role/net-2009-12-16.xsd",
      "https://www.xbrl.org/2020/extensible-enumerations-2.0.xsd",
      "https://www.xbrl.org/dtr/type/2020-01-21/types.xsd",
      "https://xbrl.fasb.org/srt/2021/elts/srt-2021-01-31.xsd",
      "https://xbrl.fasb.org/srt/2021/elts/srt-roles-2021-01-31.xsd",
      "https://xbrl.fasb.org/srt/2021/elts/srt-types-2021-01-31.xsd",
      "https://xbrl.fasb.org/us-gaap/2021/elts/us-gaap-2021-01-31.xsd",
      "https://xbrl.fasb.org/us-gaap/2021/elts/us-roles-2021-01-31.xsd",
      "https://xbrl.fasb.org/us-gaap/2021/elts/us-types-2021-01-31.xsd",
      "https://xbrl.sec.gov/country/2021/country-2021.xsd",
      "https://xbrl.sec.gov/dei/2021q4/dei-2021q4.xsd"
     ]
    }
   },
   "elementCount": 59,
   "entityCount": 1,
   "hidden": {
    "http://xbrl.sec.gov/dei/2021q4": 2,
    "total": 2
   },
   "keyCustom": 0,
   "keyStandard": 22,
   "memberCustom": 0,
   "memberStandard": 0,
   "nsprefix": "acls",
   "nsuri": "http://axcelis.com/20230224",
   "report": {
    "R1": {
     "firstAnchor": {
      "ancestors": [
       "span",
       "b",
       "p",
       "body",
       "html"
      ],
      "baseRef": "tm2313052d1_8k.htm",
      "contextRef": "From2023-02-24to2023-02-24",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "dei:DocumentType",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     },
     "groupType": "document",
     "isDefault": "true",
     "longName": "00000001 - Document - Cover",
     "menuCat": "Cover",
     "order": "1",
     "role": "http://axcelis.com/role/Cover",
     "shortName": "Cover",
     "subGroupType": "",
     "uniqueAnchor": {
      "ancestors": [
       "span",
       "b",
       "p",
       "body",
       "html"
      ],
      "baseRef": "tm2313052d1_8k.htm",
      "contextRef": "From2023-02-24to2023-02-24",
      "decimals": null,
      "first": true,
      "lang": "en-US",
      "name": "dei:DocumentType",
      "reportCount": 1,
      "unique": true,
      "unitRef": null,
      "xsiNil": "false"
     }
    }
   },
   "segmentCount": 0,
   "tag": {
    "dei_AmendmentDescription": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Description of changes contained within amended document.",
        "label": "Amendment Description"
       }
      }
     },
     "localname": "AmendmentDescription",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "stringItemType"
    },
    "dei_AmendmentFlag": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true when the XBRL content amends previously-filed or accepted submission.",
        "label": "Amendment Flag"
       }
      }
     },
     "localname": "AmendmentFlag",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_AnnualInformationForm": {
     "auth_ref": [
      "r14"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag with value true on a form if it is an annual report containing an annual information form.",
        "label": "Annual Information Form"
       }
      }
     },
     "localname": "AnnualInformationForm",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_AuditedAnnualFinancialStatements": {
     "auth_ref": [
      "r14"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag with value true on a form if it is an annual report containing audited financial statements.",
        "label": "Audited Annual Financial Statements"
       }
      }
     },
     "localname": "AuditedAnnualFinancialStatements",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_CityAreaCode": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Area code of city",
        "label": "City Area Code"
       }
      }
     },
     "localname": "CityAreaCode",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_CountryRegion": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Region code of country",
        "label": "Country Region"
       }
      }
     },
     "localname": "CountryRegion",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_CoverAbstract": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Cover page.",
        "label": "Cover [Abstract]"
       }
      }
     },
     "localname": "CoverAbstract",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "xbrltype": "stringItemType"
    },
    "dei_CurrentFiscalYearEndDate": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "End date of current fiscal year in the format --MM-DD.",
        "label": "Current Fiscal Year End Date"
       }
      }
     },
     "localname": "CurrentFiscalYearEndDate",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "gMonthDayItemType"
    },
    "dei_DocumentAccountingStandard": {
     "auth_ref": [
      "r13"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The basis of accounting the registrant has used to prepare the financial statements included in this filing This can either be 'U.S. GAAP', 'International Financial Reporting Standards', or 'Other'.",
        "label": "Document Accounting Standard"
       }
      }
     },
     "localname": "DocumentAccountingStandard",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "accountingStandardItemType"
    },
    "dei_DocumentAnnualReport": {
     "auth_ref": [
      "r11",
      "r13",
      "r14"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true only for a form used as an annual report.",
        "label": "Document Annual Report"
       }
      }
     },
     "localname": "DocumentAnnualReport",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_DocumentFiscalPeriodFocus": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Fiscal period values are FY, Q1, Q2, and Q3.  1st, 2nd and 3rd quarter 10-Q or 10-QT statements have value Q1, Q2, and Q3 respectively, with 10-K, 10-KT or other fiscal year statements having FY.",
        "label": "Document Fiscal Period Focus"
       }
      }
     },
     "localname": "DocumentFiscalPeriodFocus",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "fiscalPeriodItemType"
    },
    "dei_DocumentFiscalYearFocus": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "This is focus fiscal year of the document report in YYYY format. For a 2006 annual report, which may also provide financial information from prior periods, fiscal 2006 should be given as the fiscal year focus. Example: 2006.",
        "label": "Document Fiscal Year Focus"
       }
      }
     },
     "localname": "DocumentFiscalYearFocus",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "gYearItemType"
    },
    "dei_DocumentPeriodEndDate": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "For the EDGAR submission types of Form 8-K: the date of the report, the date of the earliest event reported; for the EDGAR submission types of Form N-1A: the filing date; for all other submission types: the end of the reporting or transition period.  The format of the date is YYYY-MM-DD.",
        "label": "Document Period End Date"
       }
      }
     },
     "localname": "DocumentPeriodEndDate",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "dateItemType"
    },
    "dei_DocumentPeriodStartDate": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The start date of the period covered in the document, in YYYY-MM-DD format.",
        "label": "Document Period Start Date"
       }
      }
     },
     "localname": "DocumentPeriodStartDate",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "dateItemType"
    },
    "dei_DocumentQuarterlyReport": {
     "auth_ref": [
      "r12"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true only for a form used as an quarterly report.",
        "label": "Document Quarterly Report"
       }
      }
     },
     "localname": "DocumentQuarterlyReport",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_DocumentRegistrationStatement": {
     "auth_ref": [
      "r0"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true only for a form used as a registration statement.",
        "label": "Document Registration Statement"
       }
      }
     },
     "localname": "DocumentRegistrationStatement",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_DocumentShellCompanyEventDate": {
     "auth_ref": [
      "r13"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Date of event requiring a shell company report.",
        "label": "Document Shell Company Event Date"
       }
      }
     },
     "localname": "DocumentShellCompanyEventDate",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "dateItemType"
    },
    "dei_DocumentShellCompanyReport": {
     "auth_ref": [
      "r13"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true for a Shell Company Report pursuant to section 13 or 15(d) of the Exchange Act.",
        "label": "Document Shell Company Report"
       }
      }
     },
     "localname": "DocumentShellCompanyReport",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_DocumentTransitionReport": {
     "auth_ref": [
      "r15"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true only for a form used as a transition report.",
        "label": "Document Transition Report"
       }
      }
     },
     "localname": "DocumentTransitionReport",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_DocumentType": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The type of document being provided (such as 10-K, 10-Q, 485BPOS, etc). The document type is limited to the same value as the supporting SEC submission type, or the word 'Other'.",
        "label": "Document Type"
       }
      }
     },
     "localname": "DocumentType",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "submissionTypeItemType"
    },
    "dei_DocumentsIncorporatedByReferenceTextBlock": {
     "auth_ref": [
      "r3"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Documents incorporated by reference.",
        "label": "Documents Incorporated by Reference [Text Block]"
       }
      }
     },
     "localname": "DocumentsIncorporatedByReferenceTextBlock",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "textBlockItemType"
    },
    "dei_EntityAddressAddressLine1": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Address Line 1 such as Attn, Building Name, Street Name",
        "label": "Entity Address, Address Line One"
       }
      }
     },
     "localname": "EntityAddressAddressLine1",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_EntityAddressAddressLine2": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Address Line 2 such as Street or Suite number",
        "label": "Entity Address, Address Line Two"
       }
      }
     },
     "localname": "EntityAddressAddressLine2",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_EntityAddressAddressLine3": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Address Line 3 such as an Office Park",
        "label": "Entity Address, Address Line Three"
       }
      }
     },
     "localname": "EntityAddressAddressLine3",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_EntityAddressCityOrTown": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Name of the City or Town",
        "label": "Entity Address, City or Town"
       }
      }
     },
     "localname": "EntityAddressCityOrTown",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_EntityAddressCountry": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "ISO 3166-1 alpha-2 country code.",
        "label": "Entity Address, Country"
       }
      }
     },
     "localname": "EntityAddressCountry",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "countryCodeItemType"
    },
    "dei_EntityAddressPostalZipCode": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Code for the postal or zip code",
        "label": "Entity Address, Postal Zip Code"
       }
      }
     },
     "localname": "EntityAddressPostalZipCode",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_EntityAddressStateOrProvince": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Name of the state or province.",
        "label": "Entity Address, State or Province"
       }
      }
     },
     "localname": "EntityAddressStateOrProvince",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "stateOrProvinceItemType"
    },
    "dei_EntityBankruptcyProceedingsReportingCurrent": {
     "auth_ref": [
      "r6"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "For registrants involved in bankruptcy proceedings during the preceding five years, the value Yes indicates that the registrant has filed all documents and reports required to be filed by Section 12, 13 or 15(d) of the Securities Exchange Act of 1934 subsequent to the distribution of securities under a plan confirmed by a court; the value No indicates the registrant has not.  Registrants not involved in bankruptcy proceedings during the preceding five years should not report this element.",
        "label": "Entity Bankruptcy Proceedings, Reporting Current"
       }
      }
     },
     "localname": "EntityBankruptcyProceedingsReportingCurrent",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_EntityCentralIndexKey": {
     "auth_ref": [
      "r2"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "A unique 10-digit SEC-issued value to identify entities that have filed disclosures with the SEC. It is commonly abbreviated as CIK.",
        "label": "Entity Central Index Key"
       }
      }
     },
     "localname": "EntityCentralIndexKey",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "centralIndexKeyItemType"
    },
    "dei_EntityCommonStockSharesOutstanding": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicate number of shares or other units outstanding of each of registrant's classes of capital or common stock or other ownership interests, if and as stated on cover of related periodic report. Where multiple classes or units exist define each class/interest by adding class of stock items such as Common Class A [Member], Common Class B [Member] or Partnership Interest [Member] onto the Instrument [Domain] of the Entity Listings, Instrument.",
        "label": "Entity Common Stock, Shares Outstanding"
       }
      }
     },
     "localname": "EntityCommonStockSharesOutstanding",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "sharesItemType"
    },
    "dei_EntityCurrentReportingStatus": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicate 'Yes' or 'No' whether registrants (1) have filed all reports required to be filed by Section 13 or 15(d) of the Securities Exchange Act of 1934 during the preceding 12 months (or for such shorter period that registrants were required to file such reports), and (2) have been subject to such filing requirements for the past 90 days. This information should be based on the registrant's current or most recent filing containing the related disclosure.",
        "label": "Entity Current Reporting Status"
       }
      }
     },
     "localname": "EntityCurrentReportingStatus",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "yesNoItemType"
    },
    "dei_EntityEmergingGrowthCompany": {
     "auth_ref": [
      "r2"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicate if registrant meets the emerging growth company criteria.",
        "label": "Entity Emerging Growth Company"
       }
      }
     },
     "localname": "EntityEmergingGrowthCompany",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_EntityExTransitionPeriod": {
     "auth_ref": [
      "r19"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicate if an emerging growth company has elected not to use the extended transition period for complying with any new or revised financial accounting standards.",
        "label": "Elected Not To Use the Extended Transition Period"
       }
      }
     },
     "localname": "EntityExTransitionPeriod",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_EntityFileNumber": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Commission file number. The field allows up to 17 characters. The prefix may contain 1-3 digits, the sequence number may contain 1-8 digits, the optional suffix may contain 1-4 characters, and the fields are separated with a hyphen.",
        "label": "Entity File Number"
       }
      }
     },
     "localname": "EntityFileNumber",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "fileNumberItemType"
    },
    "dei_EntityFilerCategory": {
     "auth_ref": [
      "r2"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicate whether the registrant is one of the following: Large Accelerated Filer, Accelerated Filer, Non-accelerated Filer. Definitions of these categories are stated in Rule 12b-2 of the Exchange Act. This information should be based on the registrant's current or most recent filing containing the related disclosure.",
        "label": "Entity Filer Category"
       }
      }
     },
     "localname": "EntityFilerCategory",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "filerCategoryItemType"
    },
    "dei_EntityIncorporationStateCountryCode": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Two-character EDGAR code representing the state or country of incorporation.",
        "label": "Entity Incorporation, State or Country Code"
       }
      }
     },
     "localname": "EntityIncorporationStateCountryCode",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "edgarStateCountryItemType"
    },
    "dei_EntityInteractiveDataCurrent": {
     "auth_ref": [
      "r16"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true when the registrant has submitted electronically every Interactive Data File required to be submitted pursuant to Rule 405 of Regulation S-T during the preceding 12 months (or for such shorter period that the registrant was required to submit such files).",
        "label": "Entity Interactive Data Current"
       }
      }
     },
     "localname": "EntityInteractiveDataCurrent",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "yesNoItemType"
    },
    "dei_EntityPrimarySicNumber": {
     "auth_ref": [
      "r14"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Primary Standard Industrial Classification (SIC) Number for the Entity.",
        "label": "Entity Primary SIC Number"
       }
      }
     },
     "localname": "EntityPrimarySicNumber",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "sicNumberItemType"
    },
    "dei_EntityPublicFloat": {
     "auth_ref": [],
     "crdr": "credit",
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The aggregate market value of the voting and non-voting common equity held by non-affiliates computed by reference to the price at which the common equity was last sold, or the average bid and asked price of such common equity, as of the last business day of the registrant's most recently completed second fiscal quarter.",
        "label": "Entity Public Float"
       }
      }
     },
     "localname": "EntityPublicFloat",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "monetaryItemType"
    },
    "dei_EntityRegistrantName": {
     "auth_ref": [
      "r2"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The exact name of the entity filing the report as specified in its charter, which is required by forms filed with the SEC.",
        "label": "Entity Registrant Name"
       }
      }
     },
     "localname": "EntityRegistrantName",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_EntityShellCompany": {
     "auth_ref": [
      "r2"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true when the registrant is a shell company as defined in Rule 12b-2 of the Exchange Act.",
        "label": "Entity Shell Company"
       }
      }
     },
     "localname": "EntityShellCompany",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_EntitySmallBusiness": {
     "auth_ref": [
      "r2"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicates that the company is a Smaller Reporting Company (SRC).",
        "label": "Entity Small Business"
       }
      }
     },
     "localname": "EntitySmallBusiness",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_EntityTaxIdentificationNumber": {
     "auth_ref": [
      "r2"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "The Tax Identification Number (TIN), also known as an Employer Identification Number (EIN), is a unique 9-digit value assigned by the IRS.",
        "label": "Entity Tax Identification Number"
       }
      }
     },
     "localname": "EntityTaxIdentificationNumber",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "employerIdItemType"
    },
    "dei_EntityVoluntaryFilers": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicate 'Yes' or 'No' if the registrant is not required to file reports pursuant to Section 13 or Section 15(d) of the Act.",
        "label": "Entity Voluntary Filers"
       }
      }
     },
     "localname": "EntityVoluntaryFilers",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "yesNoItemType"
    },
    "dei_EntityWellKnownSeasonedIssuer": {
     "auth_ref": [
      "r17"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Indicate 'Yes' or 'No' if the registrant is a well-known seasoned issuer, as defined in Rule 405 of the Securities Act. Is used on Form Type: 10-K, 10-Q, 8-K, 20-F, 6-K, 10-K/A, 10-Q/A, 20-F/A, 6-K/A, N-CSR, N-Q, N-1A.",
        "label": "Entity Well-known Seasoned Issuer"
       }
      }
     },
     "localname": "EntityWellKnownSeasonedIssuer",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "yesNoItemType"
    },
    "dei_Extension": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Extension number for local phone number.",
        "label": "Extension"
       }
      }
     },
     "localname": "Extension",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_LocalPhoneNumber": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Local phone number for entity.",
        "label": "Local Phone Number"
       }
      }
     },
     "localname": "LocalPhoneNumber",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "normalizedStringItemType"
    },
    "dei_NoTradingSymbolFlag": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true only for a security having no trading symbol.",
        "label": "No Trading Symbol Flag"
       }
      }
     },
     "localname": "NoTradingSymbolFlag",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "trueItemType"
    },
    "dei_OtherReportingStandardItemNumber": {
     "auth_ref": [
      "r13"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "\"Item 17\" or \"Item 18\" specified when the basis of accounting is neither US GAAP nor IFRS.",
        "label": "Other Reporting Standard Item Number"
       }
      }
     },
     "localname": "OtherReportingStandardItemNumber",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "otherReportingStandardItemNumberItemType"
    },
    "dei_PreCommencementIssuerTenderOffer": {
     "auth_ref": [
      "r7"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as pre-commencement communications pursuant to Rule 13e-4(c) under the Exchange Act.",
        "label": "Pre-commencement Issuer Tender Offer"
       }
      }
     },
     "localname": "PreCommencementIssuerTenderOffer",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_PreCommencementTenderOffer": {
     "auth_ref": [
      "r8"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as pre-commencement communications pursuant to Rule 14d-2(b) under the Exchange Act.",
        "label": "Pre-commencement Tender Offer"
       }
      }
     },
     "localname": "PreCommencementTenderOffer",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_Security12bTitle": {
     "auth_ref": [
      "r1"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Title of a 12(b) registered security.",
        "label": "Title of 12(b) Security"
       }
      }
     },
     "localname": "Security12bTitle",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "securityTitleItemType"
    },
    "dei_Security12gTitle": {
     "auth_ref": [
      "r5"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Title of a 12(g) registered security.",
        "label": "Title of 12(g) Security"
       }
      }
     },
     "localname": "Security12gTitle",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "securityTitleItemType"
    },
    "dei_SecurityExchangeName": {
     "auth_ref": [
      "r4"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Name of the Exchange on which a security is registered.",
        "label": "Security Exchange Name"
       }
      }
     },
     "localname": "SecurityExchangeName",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "edgarExchangeCodeItemType"
    },
    "dei_SecurityReportingObligation": {
     "auth_ref": [
      "r9"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "15(d), indicating whether the security has a reporting obligation under that section of the Exchange Act.",
        "label": "Security Reporting Obligation"
       }
      }
     },
     "localname": "SecurityReportingObligation",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "securityReportingObligationItemType"
    },
    "dei_SolicitingMaterial": {
     "auth_ref": [
      "r10"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as soliciting material pursuant to Rule 14a-12 under the Exchange Act.",
        "label": "Soliciting Material"
       }
      }
     },
     "localname": "SolicitingMaterial",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "booleanItemType"
    },
    "dei_TradingSymbol": {
     "auth_ref": [],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Trading symbol of an instrument as listed on an exchange.",
        "label": "Trading Symbol"
       }
      }
     },
     "localname": "TradingSymbol",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "tradingSymbolItemType"
    },
    "dei_WrittenCommunications": {
     "auth_ref": [
      "r18"
     ],
     "lang": {
      "en-us": {
       "role": {
        "documentation": "Boolean flag that is true when the Form 8-K filing is intended to satisfy the filing obligation of the registrant as written communications pursuant to Rule 425 under the Securities Act.",
        "label": "Written Communications"
       }
      }
     },
     "localname": "WrittenCommunications",
     "nsuri": "http://xbrl.sec.gov/dei/2021q4",
     "presentation": [
      "http://axcelis.com/role/Cover"
     ],
     "xbrltype": "booleanItemType"
    }
   },
   "unitCount": 3
  }
 },
 "std_ref": {
  "r0": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "12",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r1": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "b",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r10": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "14a",
   "Subsection": "12",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r11": {
   "Name": "Form 10-K",
   "Number": "249",
   "Publisher": "SEC",
   "Section": "310",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r12": {
   "Name": "Form 10-Q",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "308",
   "Subsection": "a",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r13": {
   "Name": "Form 20-F",
   "Number": "249",
   "Publisher": "SEC",
   "Section": "220",
   "Subsection": "f",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r14": {
   "Name": "Form 40-F",
   "Number": "249",
   "Publisher": "SEC",
   "Section": "240",
   "Subsection": "f",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r15": {
   "Name": "Forms 10-K, 10-Q, 20-F",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "13",
   "Subsection": "a-1",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r16": {
   "Name": "Regulation S-T",
   "Number": "232",
   "Publisher": "SEC",
   "Section": "405",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r17": {
   "Name": "Securities Act",
   "Number": "230",
   "Publisher": "SEC",
   "Section": "405",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r18": {
   "Name": "Securities Act",
   "Number": "230",
   "Publisher": "SEC",
   "Section": "425",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r19": {
   "Name": "Securities Act",
   "Number": "7A",
   "Publisher": "SEC",
   "Section": "B",
   "Subsection": "2",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r2": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "b-2",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r3": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "b-23",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r4": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "d1-1",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r5": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "12",
   "Subsection": "g",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r6": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "12, 13, 15d",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r7": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "13e",
   "Subsection": "4c",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r8": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "14d",
   "Subsection": "2b",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  },
  "r9": {
   "Name": "Exchange Act",
   "Number": "240",
   "Publisher": "SEC",
   "Section": "15",
   "Subsection": "d",
   "role": "http://www.xbrl.org/2003/role/presentationRef"
  }
 },
 "version": "2.2"
}
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>ZIP
<SEQUENCE>14
<FILENAME>0001104659-23-046426-xbrl.zip
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
begin 644 0001104659-23-046426-xbrl.zip
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M.:K_/.P:R/.MT?9S3;/\ U!+ P04    "  Z/9)6;/*C&O\*  !LAP  %0
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MQ+2EE.=">\,BZBE@J9A$7'9/S]F8%H>R"'\0?&W=;5ER;DG\C2ZK^.+0R%T
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M;DL[BFC1NH8$M&N"TA(&!0OD#@2F"-#<Y"'>H?D7P6(8,C6E'V!:5NVX5+(
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MM'MN+=I+HFQ%S7C!^"[8,R53'Z$M#>EQ=!^6;>+'$;VR/B3.CR$G\VJD1R9
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MMHT]AF^6 ,6A,4)],Q(80T6H+MHGNF[M ?<FWN*,^^7>-FN/_ ]02P,$%
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M(#=,&UJV:0\,9+1E:9E?YQ9W&A,*EH^DHVFX,Y()Y80[3,.J12>&M;UE"$[
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MMTW]S_^;@A@?"Q>/ZJC]X;1V?.R+Y/\!4$L#!!0    ( #H]DE;#QJ/<V2T
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MRO&&O0.XY_5#G2)4+(@*N2US5%Z TP.)#&P^FZ]CX9GATYC+F<?D9"3B"[Z
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MKJ(([SJE[9L.UL4JE,87MF4+YM;P\S+[]?'.?2<@70RXBJ;W&9K>_38"LBC
M'AQ-TBS)+C&SC+]\F(XVEC*'P>:;8 ](':3")W1Y[.=HL2[CRQ\0:4C@Y(Z
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MLPA:.-C\Z>'"P>837OC _&J) 1?_4^5Q$<4C9EEXH3^B8YX<$9_5-3,M_Z&
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MO3!GU/P3G:2G6+02/</!I[,7GZG)-X&CH)2C<;_'C7;_HZ[B#YC2T>[9'Q3
M\.5H]U%-;&E[]5 <AKF*'Q#2F+R71?HX=8Z%E-VMG>"$4_M_#3YC',)/JO%N
MW5OC79[Z^>+#R?X?F,S]XM/%T>?W_P=02P$"% ,4    "  Z/9)65,GE*#@#
M  #R"P  $0              @ $     86-L<RTR,#(S,#(R-"YX<V102P$"
M% ,4    "  Z/9)6;/*C&O\*  !LAP  %0              @ %G P  86-L
M<RTR,#(S,#(R-%]L86(N>&UL4$L! A0#%     @ .CV25AQRI0E3!P  OU@
M !4              ( !F0X  &%C;',M,C R,S R,C1?<')E+GAM;%!+ 0(4
M Q0    ( #H]DE8C]3XJ11,  -]E   2              "  1\6  !T;3(S
M,3,P-3)D,5\X:RYH=&U02P$"% ,4    "  Z/9)6P\:CW-DM  !?!P$ %@
M            @ &4*0  =&TR,S$S,#4R9#%?97@Q,"TQ+FAT;5!+!08
..!0 % $D!  "A5P     !

end
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
