<SEC-DOCUMENT>0001104659-23-062244.txt : 20230518
<SEC-HEADER>0001104659-23-062244.hdr.sgml : 20230518
<ACCEPTANCE-DATETIME>20230518160146
ACCESSION NUMBER:		0001104659-23-062244
CONFORMED SUBMISSION TYPE:	SD
PUBLIC DOCUMENT COUNT:		2
<RULE>
<RULE-NAME>13p-1
<ITEM>
<ITEM-NUMBER>1.01
<ITEM-PERIOD>20221231
</ITEM>
<ITEM>
<ITEM-NUMBER>1.02
<ITEM-PERIOD>20221231
</ITEM>
</RULE>
FILED AS OF DATE:		20230518
DATE AS OF CHANGE:		20230518

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AXCELIS TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001113232
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				341818596
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		SD
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-30941
		FILM NUMBER:		23935978

	BUSINESS ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915
		BUSINESS PHONE:		978-787-4000

	MAIL ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	EATON SEMICONDUCTOR EQUIPMENT INC
		DATE OF NAME CHANGE:	20000501
</SEC-HEADER>
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<TYPE>SD
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<FILENAME>tm2315965d1_sd.htm
<DESCRIPTION>FORM SD
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<P STYLE="margin: 0">&nbsp;</P>

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    <TD STYLE="width: 28%; border-top: Black 1pt solid; border-right: Black 1pt solid; border-bottom: Black 1pt solid; padding-left: 0.05in; font-size: 10pt"><FONT STYLE="font-size: 10pt">OMB APPROVAL</FONT></TD></TR>
  <TR STYLE="vertical-align: top">
    <TD>&nbsp;</TD>
    <TD STYLE="border-right: Black 1pt solid">&nbsp;</TD>
    <TD STYLE="border-right: Black 1pt solid; border-bottom: Black 1pt solid">
    <P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0 0pt 0.05in">OMB Number: 3235-0697<BR>
    Expires: July&nbsp;31, 2024</P>
    <P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0 0pt 0.05in">Estimated average burden hours per response....477.89</P></TD></TR>
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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"><B>UNITED STATES<BR>
SECURITIES AND EXCHANGE COMMISSION</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"><B>Washington, D.C. 20549</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"><B>FORM&nbsp;SD</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"><B>Specialized Disclosure Report</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"><B>AXCELIS TECHNOLOGIES,&nbsp;INC.</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center">(Exact name of registrant as specified in its charter)</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

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<TD STYLE="text-align: center; vertical-align: top; width: 33%"><P STYLE="text-align: center; margin-top: 0; margin-bottom: 0"><B>Delaware, USA</B></P>
                                            <P STYLE="text-align: center; margin-top: 0; margin-bottom: 0">(State or other jurisdiction</P>
                                            <P STYLE="text-align: center; margin-top: 0; margin-bottom: 0">of incorporation or organization)</P></TD>
<TD STYLE="text-align: center; vertical-align: bottom; width: 1%">&nbsp;</TD>
<TD STYLE="text-align: center; vertical-align: top; width: 32%"><P STYLE="text-align: center; margin-top: 0; margin-bottom: 0"><B> 000-30941</B></P>
                                            <P STYLE="text-align: center; margin-top: 0; margin-bottom: 0"><B></B> (Commission</P>
                                            <P STYLE="text-align: center; margin-top: 0; margin-bottom: 0">File Number)</P></TD>
<TD STYLE="text-align: center; vertical-align: bottom; width: 1%">&nbsp;</TD>
<TD STYLE="text-align: center; vertical-align: top; width: 33%"><P STYLE="text-align: center; margin-top: 0; margin-bottom: 0"><B>34-1818596</B></P>
                                            <P STYLE="text-align: center; margin-top: 0; margin-bottom: 0">(IRS Employer</P>
                                            <P STYLE="text-align: center; margin-top: 0; margin-bottom: 0">Identification No.) &nbsp;</P></TD></TR>
</TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center">&nbsp;</P>

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<TR>
<TD STYLE="text-align: center; vertical-align: top; width: 49%"><P STYLE="margin-top: 0; margin-bottom: 0"><B>108 Cherry Hill Drive, Beverly, Massachusetts</B></P>
                                                                <P STYLE="margin-top: 0; margin-bottom: 0">(Address of principal executive offices)</P></TD>
<TD STYLE="text-align: center; vertical-align: bottom; width: 2%">&nbsp;</TD>
<TD STYLE="text-align: center; vertical-align: top; width: 49%"><P STYLE="margin-top: 0; margin-bottom: 0"><B>01915</B></P>
                                                                <P STYLE="margin-top: 0; margin-bottom: 0">(Zip Code)</P></TD></TR>
</TABLE>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"><B>Lynnette C. Fallon, Executive Vice President
and General Counsel, 978-787-4120</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center">(Name and telephone number, including area code,
of the person to contact in connection with this report.)</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">Check the appropriate box to indicate the rule&nbsp;pursuant to which
this form is being filed, and provide the period to which the information in this form applies:</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"><FONT STYLE="font-family: Wingdings">&#120;</FONT>
Rule&nbsp;13p-1 under the Securities Exchange Act (17 CFR 240.13p-1) for the reporting period from January&nbsp;1 to
December&nbsp;31, 2022.</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"></P>

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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"><B>Section&nbsp;1 - Conflict Minerals Disclosure</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"><B>Item 1.01 Conflict Minerals Disclosure and Report</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">a) <B><U>Conflict Minerals in Products</U>.</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">Conflict minerals, as defined in Item 1.01 of Form&nbsp;SD, are necessary
to the functionality or production of products manufactured by Axcelis Technologies,&nbsp;Inc. (&ldquo;Axcelis,&rdquo; or the &ldquo;Company&rdquo;)
or contracted by the Company to be manufactured (the &ldquo;Company&rsquo;s Products&rdquo;) as defined in Rule&nbsp;13p-1 under the Securities
Exchange Act of 1934, as amended (the &ldquo;Rule&rdquo;) and for which manufacturing was completed in the period from January&nbsp;1,
2022 to December&nbsp;31, 2022. Accordingly, we are filing this Form&nbsp;SD for the calendar year covered by this report, as required
by the Rule.</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">b) <B><U>Implementation and Results of our Reasonable Country of Origin
Inquiry</U><I>.</I></B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">The Company has conducted in good faith a reasonable country of origin
inquiry (&ldquo;RCOI&rdquo;) that was reasonably designed to determine whether any of the conflict minerals in the Company&rsquo;s Products
originated in the Democratic Republic of the Congo or an adjoining country or are from recycled or scrap sources. To implement our RCOI:</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">1.&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;Beginning in 2012, we communicated the Company&rsquo;s sourcing policy and commitments to our suppliers;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">2.&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;Beginning in 2013, we educated our suppliers about the conflict minerals reporting obligation;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">3.&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;Each year since 2014, we have annually conducted a RCOI and related due diligence pertaining to the prior calendar year;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">4.&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;Specifically for the RCOI for the calendar year 2022, we began with our request for information from our 2022 material suppliers on March&nbsp;21,
2023, using an on-line survey regarding the mineral content of the parts they sell us, their knowledge on the source of any conflict minerals,
including whether the conflict minerals come from recycled or scrap sources (the &ldquo;Survey&rdquo;); this collection continued until
May&nbsp;4, 2023 (including follow-up by email and/or phone).</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">The Survey was sent to 1,151 suppliers of material included in the
Company&rsquo;s Products. We received responses to the Survey and other responses from 277 different supplier locations, of which 6 indicated
that they had no 2022 sales to the Company, for a net of 271 supplier locations with 2022 sales. Responses included emails, letters, copies
of applicable policies, and completed Conflict Mineral Reporting Templates published by the Responsible Minerals Initiative of the Responsible
Business Alliance (formerly known as the Conflict-Free Sourcing Initiative of the Electronic Industry Citizenship Coalition).&nbsp; All
of these responses were reviewed and categorized. At the conclusion of this process, we had responses from suppliers of parts or components
included in Products representing 83.15% of the total dollars spent on materials for the Company&rsquo;s Products in 2022.</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"></P>

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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">As of May&nbsp;4, 2023, 189 of the supplier responses with 2022 sales
(70% of all such supplier responses) asserted that either:</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">(A)&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;no conflict minerals were present
in the materials sold to the Company by the supplier; or</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">(B)&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;the conflict minerals in the
materials sold to the Company by the supplier did not originate in the Democratic Republic of the Congo or an adjoining country or the
supplier had no reason to believe that the conflict minerals in the materials sold to the Company may have originated in the Democratic
Republic of the Congo or an adjoining country; or</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">(C)&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;&#8239;the conflict minerals in the
materials sold to the Company came from recycled or scrap sources.</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">Also as of May&nbsp;4, 2023, 34 of the responding suppliers had not
provided sufficient clarity to determine whether they could be placed in the above categories or not, despite our efforts to obtain clear
information.</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"><B>(c)&nbsp;Due Diligence on Specific Conflict Mineral Sources.</B>&nbsp;
Forty eight (48) responding suppliers (18% of all responding suppliers with 2022 sales) indicated that (1)&nbsp;one or more conflict mineral
was incorporated in the materials sold to the Company and (2)&nbsp;they knew or had reason to believe such conflict minerals originated
in the Democratic Republic of the Congo or an adjoining country, and did not come from recycled or scrap sources. Accordingly, we have
exercised due diligence on the source and chain of custody of these conflict minerals that conforms to the Supplement on Tin, Tantalum
and Tungsten and the Supplement on Gold included in the Organisation for Economic Co-operation and Development (&ldquo;OECD&rdquo;) framework:
OECD (2013), OECD Due Diligence Guidance for Responsible Supply Chains of Minerals from Conflict-Affected and High-Risk Areas: Second
Edition. The Company has filed a Conflict Minerals Report with respect to these conflict minerals.</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">This Form&nbsp;SD and the Conflict Minerals Report have been disclosed
on our publicly available Internet website, axcelis.com, under a heading entitled &ldquo;Conflict Minerals Disclosure&rdquo; which is
linked here: <U>https://www.axcelis.com/about/corporate-responsibility/</U></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"><B>Item 1.02. Exhibit</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">In accordance with Rule&nbsp;13p-1 under the Securities Exchange Act
of 1934, Axcelis is filing as an exhibit to this Form&nbsp;SD, the Conflict Minerals Report required by Item 1.01.</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"><B>Section&nbsp;2 &mdash; Exhibits</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"><B>Item 2.01 Exhibits</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">The following exhibit is filed as part of this Report</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLPADDING="0" CELLSPACING="0" STYLE="font: 10pt Times New Roman, Times, Serif; margin-top: 0; margin-bottom: 0; width: 100%"><TR STYLE="vertical-align: top; text-align: justify">
<TD STYLE="text-align: justify"><A HREF="tm2315965d1_ex1-01.htm" STYLE="-sec-extract: exhibit">Exhibit&nbsp;1.01 &mdash;</A> <A HREF="tm2315965d1_ex1-01.htm" STYLE="-sec-extract: exhibit">Conflict Minerals Report as required by Items 1.01 and 1.02 of this Form.</A></TD>
</TR></TABLE>

<P STYLE="margin-top: 0; margin-bottom: 0">&nbsp;</P>

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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"><B>SIGNATURES</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">Pursuant to the requirements of the Securities Exchange Act of 1934,
the registrant has duly caused this report to be signed on its behalf by the duly authorized undersigned.</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<TABLE CELLSPACING="0" CELLPADDING="0" STYLE="font: 10pt Times New Roman, Times, Serif; width: 100%; border-collapse: collapse">
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    <TD STYLE="font: 10pt Times New Roman, Times, Serif; width: 48%"><FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt">AXCELIS TECHNOLOGIES,&nbsp;INC.</FONT></TD>
    <TD STYLE="font: 10pt Times New Roman, Times, Serif; width: 4%"><FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt">&nbsp;</FONT></TD>
    <TD STYLE="font: 10pt Times New Roman, Times, Serif; width: 48%"><FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt">&nbsp;</FONT></TD></TR>
  <TR STYLE="font: 10pt Times New Roman, Times, Serif; vertical-align: top">
    <TD STYLE="font: 10pt Times New Roman, Times, Serif"><FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt"><I>(Registrant)</I></FONT></TD>
    <TD STYLE="font: 10pt Times New Roman, Times, Serif"><FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt">&nbsp;</FONT></TD>
    <TD STYLE="font: 10pt Times New Roman, Times, Serif"><FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt">&nbsp;</FONT></TD></TR>
  <TR STYLE="font: 10pt Times New Roman, Times, Serif; vertical-align: top">
    <TD STYLE="font: 10pt Times New Roman, Times, Serif"><FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt">&nbsp;</FONT></TD>
    <TD STYLE="font: 10pt Times New Roman, Times, Serif"><FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt">&nbsp;</FONT></TD>
    <TD STYLE="font: 10pt Times New Roman, Times, Serif"><FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt">&nbsp;</FONT></TD></TR>
  <TR STYLE="font: 10pt Times New Roman, Times, Serif; vertical-align: top">
    <TD STYLE="font: 10pt Times New Roman, Times, Serif; border-bottom: Black 1pt solid"><FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt">/s/
    Lynnette C. Fallon</FONT></TD>
    <TD STYLE="font: 10pt Times New Roman, Times, Serif"><FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt">&nbsp;</FONT></TD>
    <TD STYLE="font: 10pt Times New Roman, Times, Serif; border-bottom: Black 1pt solid"><FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt">May&nbsp;18,
    2023</FONT></TD></TR>
  <TR STYLE="font: 10pt Times New Roman, Times, Serif; vertical-align: top">
    <TD STYLE="font: 10pt Times New Roman, Times, Serif"><FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt">By Lynnette C. Fallon, Executive
    Vice President, HR/Legal and General Counsel</FONT></TD>
    <TD STYLE="font: 10pt Times New Roman, Times, Serif"><FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt">&nbsp;</FONT></TD>
    <TD STYLE="font: 10pt Times New Roman, Times, Serif"><FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt">(Date)</FONT></TD></TR>
  </TABLE>
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<P STYLE="margin: 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: right"><B>Exhibit&nbsp;1.01</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"><B>Axcelis Technologies,&nbsp;Inc. Conflict Minerals
Report</B></P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"><B>Products for which manufacturing was completed
during</B></P>

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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0; text-align: center"><B>the year ended December&nbsp;31, 2022</B></P>

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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">This conflict minerals report is filed as an exhibit to Form&nbsp;SD
filed by Axcelis Technologies,&nbsp;Inc. (the &ldquo;Company&rdquo;). As noted in the Form&nbsp;SD, 48 suppliers that responded to the
Company&rsquo;s reasonable country of origin inquiry survey (representing 18% of all supplier responses with 2022 sales) indicated that
they knew or had reason to believe that a conflict mineral incorporated in one or more of the Company&rsquo;s Products (as defined below)
originated in the Democratic Republic of the Congo or an adjoining country, and did not come from recycled or scrap sources.</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">&nbsp;</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"><B>Due Diligence</B></P>

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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">Axcelis has exercised due diligence on the source and chain of custody
of certain gold, tin, tantalum and tungsten necessary to the functionality or production of the products described below that were manufactured,
either by the Company under contract to the Company (the &ldquo;Company&rsquo;s Products&rdquo;), as defined in Rule&nbsp;13p-1 under
the Securities Exchange Act of 1934, as amended (the &ldquo;Rule&rdquo;) during the period from January&nbsp;1, 2022 to December&nbsp;31,
2022. The Company&rsquo;s due diligence conformed to the Supplement on Tin, Tantalum and Tungsten and the Supplement on Gold to the Five-Step
Framework for Risk-Based Due Diligence in the Mineral Supply Chain included in the Organisation for Economic Co-operation and Development
(&ldquo;OECD&rdquo;) <I>Due Diligence Guidance for Responsible Supply Chains of Minerals from Conflict-Affected and High-Risk Areas</I>,
Second Edition.</P>

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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">The OECD defines due diligence as an on-going, proactive and reactive
process through which companies can ensure that they respect human rights and do not contribute to conflict. We have taken the following
actions as part of our due diligence:</P>

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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"><FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt"><B><I>Sourcing
Policy.</I></B></FONT> We adopted a conflict-free sourcing policy in 2012, and posted it on our internet supplier portal. We have also
communicated directly with suppliers regarding the content of the policy, which provides:</P>

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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0 0pt 0.5in">&ldquo;Axcelis expects its suppliers to only source materials
from environmentally and socially responsible sources. Specifically, Axcelis will not support any vendor or other entity in its supply
chain that extracts or transports minerals (including Tin, Tantalum, Tungsten or Gold) and uses the resulting financial or other resources
to fund or otherwise fuel conflict in the Democratic Republic of the Congo, or any other country. Axcelis takes seriously the allegations
that some metals mined or transported by such companies may be making their way into the general industry supply chain and that profits
from these businesses could potentially contribute to human rights violations.</P>

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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0 0pt 0.5in">&ldquo;Axcelis supports the development of independently
verifiable supply chain transactions, when available and credible, to ensure materials are supplied from environmentally and socially
responsible sources. Axcelis is committed to building on existing systems and practices to ensure that our suppliers comply with these
expectations. Axcelis expects its vendors to comply with this policy.&rdquo;</P>

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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"><FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt"><B><I>Conflict
Mineral Team. </I></B></FONT>Beginning in 2013, the Company formed a team comprised of representatives from our Supply Chain management,
Environmental, Health and Safety management and our General Counsel to focus on conflict minerals.</P>

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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"><FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt"><B><I>Risk
Identification and Assessment. </I></B></FONT>The Conflict Mineral team reviewed the Rule, the adopting release associated with the
Rule&nbsp;and the Commission&rsquo;s FAQ. We educated ourselves regarding our industry groups&rsquo; efforts to address due
diligence, including the Responsible Minerals Initiative (&ldquo;RMI&rdquo;), which was founded in 2008 by the Responsible Business
Alliance (formerly known as the Electronics Industry Citizenship Coalition) and the Global e-Sustainability Initiative.&nbsp; The
RMI (formerly known as the Conflict-Free Sourcing Initiative), publishes a Conflict Minerals Reporting Template and manages a
Responsible Minerals Assurance Process, which is an independent, third-party audit that determines which smelters and refiners can
be verified as&nbsp;having systems in place to responsibly source minerals&nbsp;in line with current global standards.<FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt"><SUP>1</SUP></FONT>&nbsp;&nbsp; The Conflict Mineral team then developed a reasonable country of origin inquiry Survey, as described in
our Form&nbsp;SD, which allowed us to identify vendors for whom there was a risk of sourcing from the Democratic Republic of Congo
or an adjoining country. We engaged in further communication with, and evaluation of, suppliers who were identified as risks through
the Survey, including review of documents submitted to us, such as vendor sourcing policies, RMI Conflict Mineral Reporting
Templates and other material.</P>

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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"><B>Independent Private Sector Audit</B></P>

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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">The Company did not obtain an independent private sector audit (an
 &ldquo;IPSA&rdquo;) of this Conflict Minerals Report as required by Item 1.01(c)(1)(ii)&nbsp;of Form&nbsp;SD promulgated under the Rule&nbsp;in
reliance on the statement of the Staff of the Securities and Exchange Commission issued April&nbsp;29, 2014.&nbsp; That statement provided
that an IPSA will not be required unless a company voluntarily elects to describe a product as &ldquo;DRC conflict free&rdquo; in its
Conflict Mineral Report.&nbsp; Since we are not describing our products as &ldquo;DRC conflict free,&rdquo; we have not obtained an IPSA.</P>

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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"><B>Risk Mitigation Steps</B></P>

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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">During the reporting period for the calendar year ending December&nbsp;31,
2023, we are continuing to engage in the activities described above in &ldquo;Due Diligence.&rdquo; In addition, in our efforts to attain
a conflict-free supply chain for our products, we intend to continue to contact our suppliers to encourage them and the smelters/refiners
in our supply chain to participate in the conflict free certification program developed under the Responsible Minerals Assurance Process
of the RMI and the Global e-Sustainability Initiative.</P>

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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"><SUP>1</SUP> The Company, as a smaller semiconductor equipment manufacturing
company, is relying on the RMI and other electronics industry groups, as contemplated by the OECD <I>Due Diligence Guidance for Responsible
Supply Chains of Minerals from Conflict-Affected and High-Risk Areas, </I>Second Edition. Specifically, the Company notes the following
observation in Section&nbsp;C5 of the Supplement on Tin, Tantalum and Tungsten to the OECD&rsquo;s Five-Step Framework for Risk-Based
Due Diligence in the Mineral Supply Chain: &ldquo;Companies which, due to their size or other factors, may find it difficult to identify
actors upstream from their direct suppliers may engage and actively cooperate with industry members with whom they share suppliers or
downstream companies with whom they have a business relationship to identify which smelters are in the supply chain.&rdquo;</P>

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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"><B>Description of Products</B></P>

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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0">With respect to those of the Company&rsquo;s Products on which the
Company exercised due diligence, the following table provides a description of the Company&rsquo;s Products, the facilities used to process
the necessary conflict minerals in those products, if known, the country of origin of the necessary conflict minerals, if known and the
efforts to determine the mine or location of origin of those products.</P>

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<TABLE CELLSPACING="0" CELLPADDING="0" STYLE="font: 10pt Times New Roman, Times, Serif; width: 100%; border-collapse: collapse">
  <TR STYLE="vertical-align: bottom">
    <TD STYLE="border-bottom: Black 1pt solid; width: 22%"><FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt"><B>Description&nbsp;of Product&nbsp;Subject<BR>
to Due&nbsp;Diligence</B></FONT></TD>
    <TD STYLE="width: 2%">&nbsp;</TD>
    <TD STYLE="border-bottom: Black 1pt solid; width: 31%"><FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt"><B>Facilities&nbsp;Used&nbsp;to Process<BR>
the&nbsp;Conflict&nbsp;Minerals in&nbsp;the<BR>
Product</B></FONT></TD>
    <TD STYLE="width: 2%">&nbsp;</TD>
    <TD STYLE="border-bottom: Black 1pt solid; width: 15%"><FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt"><B>Country&nbsp;of<BR>
Origin&nbsp;of<BR>
the Conflict<BR>
Minerals</B></FONT></TD>
    <TD STYLE="width: 1%">&nbsp;</TD>
    <TD STYLE="border-bottom: Black 1pt solid; width: 27%"><FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt"><B>Efforts&nbsp;to&nbsp;Determine&nbsp;the<BR>
Mine&nbsp;or Location&nbsp;of&nbsp;Origin</B></FONT></TD></TR>
  <TR STYLE="vertical-align: top; background-color: #CCEEFF">
    <TD><FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt">Components or parts for semiconductor processing ion implantation equipment sold by the Company covered by 37 supplier responses.</FONT></TD>
    <TD>&nbsp;</TD>
    <TD><FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt">These vendors represented that all of the conflict
    minerals sourced from the Democratic Republic of the Congo and adjoining countries were from RMAP Conformant Smelters and Refiners<SUP>2</SUP>&nbsp;or
    ITSCI sources.<SUP>3</SUP></FONT></TD>
    <TD>&nbsp;</TD>
    <TD><FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt">Unknown</FONT></TD>
    <TD>&nbsp;</TD>
    <TD><FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt">Receipt of completed RMI Conflict Mineral Reporting Template.</FONT></TD></TR>
  <TR STYLE="vertical-align: top">
    <TD>&nbsp;</TD>
    <TD>&nbsp;</TD>
    <TD>&nbsp;</TD>
    <TD>&nbsp;</TD>
    <TD>&nbsp;</TD>
    <TD>&nbsp;</TD>
    <TD>&nbsp;</TD></TR>
  <TR STYLE="vertical-align: top; background-color: #CCEEFF">
    <TD><FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt">Components or parts for semiconductor processing ion implantation equipment sold by the Company purchased from 11 vendors.</FONT></TD>
    <TD>&nbsp;</TD>
    <TD><FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt">These vendors represented that some or all of the conflict minerals sourced from the Democratic Republic of the Congo and adjoining countries were not from RMAP Conformant Smelters and Refiners or ITSCI sources.</FONT></TD>
    <TD>&nbsp;</TD>
    <TD><FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt">Unknown</FONT></TD>
    <TD>&nbsp;</TD>
    <TD><FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt">On-going communication with the vendors, including a reminder of the Company&rsquo;s sourcing policy and a request that the vendor work to ensure that all smelters/refiners used are RMAP Conformant or ITSCI sources. The Company will ask the vendor to confirm when they are using RMAP Conformant smelters or ITSCI sources, and will from time to time consider a different source of the components or parts if the vendor has not provided such confirmation.</FONT></TD></TR>
  </TABLE>
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<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"><FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt"><SUP>2
</SUP></FONT>RMAP Conformant Smelters and Refiners are smelters and refiners which are conformant with the Responsible Minerals Assurance
Process assessment protocols published by the RMI. These protocols are used to determine which smelters and refiners can be verified
as&nbsp;having systems in place to responsibly source minerals&nbsp;in line with current global standards.</P>

<P STYLE="font: 10pt Times New Roman, Times, Serif; margin: 0pt 0"><FONT STYLE="font-family: Times New Roman, Times, Serif; font-size: 10pt"><SUP>3
</SUP></FONT>ITSCI sources are sources for tin which are certified as conflict free by ITRI, the global tin industry association.</P>

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