<SEC-DOCUMENT>0001959173-23-004553.txt : 20231106
<SEC-HEADER>0001959173-23-004553.hdr.sgml : 20231106
<ACCEPTANCE-DATETIME>20231106114958
ACCESSION NUMBER:		0001959173-23-004553
CONFORMED SUBMISSION TYPE:	144
PUBLIC DOCUMENT COUNT:		1
FILED AS OF DATE:		20231106
DATE AS OF CHANGE:		20231106

SUBJECT COMPANY:	

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AXCELIS TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001113232
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		IRS NUMBER:				341818596
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		144
		SEC ACT:		1933 Act
		SEC FILE NUMBER:	000-30941
		FILM NUMBER:		231379069

	BUSINESS ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915
		BUSINESS PHONE:		978-787-4000

	MAIL ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	EATON SEMICONDUCTOR EQUIPMENT INC
		DATE OF NAME CHANGE:	20000501

REPORTING-OWNER:	

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			KEITHLEY JOSEPH P
		CENTRAL INDEX KEY:			0001073329
		STANDARD INDUSTRIAL CLASSIFICATION:	UNKNOWN SIC - 0000 [0000]
		STATE OF INCORPORATION:			OH
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		144

	MAIL ADDRESS:	
		STREET 1:		NORDSON CORP
		STREET 2:		28601 CLEMENS RD
		CITY:			WESTLAKE
		STATE:			OH
		ZIP:			44145
</SEC-HEADER>
<DOCUMENT>
<TYPE>144
<SEQUENCE>1
<FILENAME>primary_doc.xml
<TEXT>
<XML>
<?xml version="1.0" encoding="UTF-8"?><edgarSubmission xmlns="http://www.sec.gov/edgar/ownership" xmlns:com="http://www.sec.gov/edgar/common">
  <headerData>
    <submissionType>144</submissionType>
    <filerInfo>
      <filer>
        <filerCredentials>
          <cik>0001073329</cik>
          <ccc>XXXXXXXX</ccc>
        </filerCredentials>
      </filer>
      <liveTestFlag>LIVE</liveTestFlag>


    </filerInfo>
  </headerData>
  <formData>
    <issuerInfo>
      <issuerCik>0001113232</issuerCik>
      <issuerName>AXCELIS TECHNOLOGIES INC</issuerName>
      <secFileNumber>000-30941</secFileNumber>
      <issuerAddress>
        <com:street1>108 CHERRY HILL DRIVE</com:street1>
        <com:city>BEVERLY</com:city>
        <com:stateOrCountry>MA</com:stateOrCountry>
        <com:zipCode>01915</com:zipCode>
      </issuerAddress>
      <issuerContactPhone>978-787-4000</issuerContactPhone>
      <nameOfPersonForWhoseAccountTheSecuritiesAreToBeSold>KEITHLEY JOSEPH P</nameOfPersonForWhoseAccountTheSecuritiesAreToBeSold>
      <relationshipsToIssuer>
        <relationshipToIssuer>control person</relationshipToIssuer>
      </relationshipsToIssuer>
    </issuerInfo>
    <securitiesInformation>
      <securitiesClassTitle>Common</securitiesClassTitle>
      <brokerOrMarketmakerDetails>
        <name>Fidelity Brokerage Services LLC</name>
        <address>
          <com:street1>245 summer street</com:street1>
          <com:city>boston</com:city>
          <com:stateOrCountry>MA</com:stateOrCountry>
          <com:zipCode>02110</com:zipCode>
        </address>
      </brokerOrMarketmakerDetails>
      <noOfUnitsSold>2875</noOfUnitsSold>
      <aggregateMarketValue>372427.50</aggregateMarketValue>
      <noOfUnitsOutstanding>34000000</noOfUnitsOutstanding>
      <approxSaleDate>11/06/2023</approxSaleDate>
      <securitiesExchangeName>nasdaq</securitiesExchangeName>
    </securitiesInformation>
    <securitiesToBeSold>
      <securitiesClassTitle>common</securitiesClassTitle>
      <acquiredDate>05/24/2012</acquiredDate>
      <natureOfAcquisitionTransaction>stock award</natureOfAcquisitionTransaction>
      <nameOfPersonfromWhomAcquired>Joseph P. Keithley</nameOfPersonfromWhomAcquired>
      <isGiftTransaction>N</isGiftTransaction>
      <amountOfSecuritiesAcquired>186</amountOfSecuritiesAcquired>
      <paymentDate>05/24/2012</paymentDate>
      <natureOfPayment>Stock Award</natureOfPayment>
    </securitiesToBeSold>
    <securitiesToBeSold>
      <securitiesClassTitle>common</securitiesClassTitle>
      <acquiredDate>05/16/2023</acquiredDate>
      <natureOfAcquisitionTransaction>stock award</natureOfAcquisitionTransaction>
      <nameOfPersonfromWhomAcquired>Joseph P. Keithley</nameOfPersonfromWhomAcquired>
      <isGiftTransaction>N</isGiftTransaction>
      <amountOfSecuritiesAcquired>2689</amountOfSecuritiesAcquired>
      <paymentDate>05/16/2023</paymentDate>
      <natureOfPayment>Stock Award</natureOfPayment>
    </securitiesToBeSold>
    <nothingToReportFlagOnSecuritiesSoldInPast3Months>Y</nothingToReportFlagOnSecuritiesSoldInPast3Months>
    <remarks>shares are being sold from Joseph P Keithley 1985 trust</remarks>
    <noticeSignature>
      <noticeDate>11/06/2023</noticeDate>
      <signature>/s/ Audrey Skillern as a duly authorized representative of Fidelity Brokerage Services LLC, as attorney-in-fact for Joseph P Keithley</signature>
    </noticeSignature>
  </formData>
</edgarSubmission>
</XML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
