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Income Taxes - Operating Loss Carryforwards (Details) $ in Millions | 12 Months Ended
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Dec. 31, 2023 USD ($)
Federal |
Operating loss carryforwards |
Net operating loss carryforwards | $ 0.1
Foreign |
Operating loss carryforwards |
Net operating loss carryforwards | 0.2
Research and development and other tax credit carryforwards |
Operating loss carryforwards |
Net operating loss carryforwards | 15.2
Uncertain tax position | $ 3.0

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- Definition Amount of operating loss carryforwards are subject to an uncertain tax position reserve. + References No definition available. + Details
Name: | acls_OperatingLossCarryforwardsAreSubjectToUncertainTaxPositionReserve
Namespace Prefix: | acls_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | duration

X
- Definition Amount of operating loss carryforward, before tax effects, available to reduce future taxable income under enacted tax laws. + References Reference 1: http://fasb.org/us-gaap/role/ref/legacyRef -Name Accounting Standards Codification -Topic 740 -SubTopic 10 -Section 50 -Paragraph 3 -Subparagraph (a) -Publisher FASB -URI https://asc.fasb.org//1943274/2147482685/740-10-50-3 + Details
Name: | us-gaap_OperatingLossCarryforwards
Namespace Prefix: | us-gaap_
Data Type: | xbrli:monetaryItemType
Balance Type: | debit
Period Type: | instant

X
- Definition Line items represent financial concepts included in a table. These concepts are used to disclose reportable information associated with domain members defined in one or many axes to the table. + References No definition available. + Details
Name: | us-gaap_OperatingLossCarryforwardsLineItems
Namespace Prefix: | us-gaap_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

X
- Details
Name: | us-gaap_IncomeTaxAuthorityAxis=acls_FederalMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_IncomeTaxAuthorityAxis=us-gaap_ForeignCountryMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |

X
- Details
Name: | us-gaap_TaxCreditCarryforwardAxis=acls_ResearchDevelopmentAndOtherTaxCreditMember
Namespace Prefix: |
Data Type: | na
Balance Type: |
Period Type: |