XML 45 R34.htm IDEA: XBRL DOCUMENT
v3.24.0.1

Assets Manufactured for Internal Use, net (Tables) | 12 Months Ended
--- | ---
Dec. 31, 2023
Assets Manufactured for Internal Use, net |
Schedule of components of assets manufactured for internal use | ​
​ | ​ | ​ | ​ | ​ | ​ | ​ | ​
​ | ​ | December 31, |
​ |  | 2023 |  | 2022 |
​ | ​ | (in thousands) |
Internal use assets | ​ | $ | 76,273 | ​ | $ | 61,603 | ​
Construction in process | ​ |  | 236 | ​ |  | 2,629 | ​
Total cost | ​ |  | 76,509 | ​ |  | 64,232 | ​
Accumulated depreciation | ​ |  | (39,588) | ​ |  | (33,992) | ​
Assets manufactured for internal use, net | ​ | $ | 36,921 | ​ | $ | 30,240 | ​

X
- References No definition available. + Details
Name: | acls_AssetsManufacturedForInternalUseDisclosureAbstract
Namespace Prefix: | acls_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

X
- Definition Tabular disclosure of the carrying amounts of other assets. This disclosure includes other current assets and other noncurrent assets. + References No definition available. + Details
Name: | us-gaap_ScheduleOfOtherAssetsTableTextBlock
Namespace Prefix: | us-gaap_
Data Type: | dtr-types:textBlockItemType
Balance Type: | na
Period Type: | duration