# Filing Detail

Form 10-K/A - Annual report [Section 13 and 15(d), not S-K Item 405]: [Amend]
SEC Accession No. 0001558370-24-001969
Filing Date
2024-02-28
Accepted
2024-02-28 15:01:02
Documents
101
Period of Report
2023-12-31

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-K/A | acls-20231231x10ka.htm iXBRL | 10-K/A | 2038579
2 | EX-23.1 | acls-20231231xex23d1.htm | EX-23.1 | 6622
3 | EX-31.1 | acls-20231231xex31d1.htm | EX-31.1 | 13252
4 | EX-31.2 | acls-20231231xex31d2.htm | EX-31.2 | 14268
5 | EX-32.1 | acls-20231231xex32d1.htm | EX-32.1 | 6233
6 | EX-32.2 | acls-20231231xex32d2.htm | EX-32.2 | 7558
| Complete submission text file | 0001558370-24-001969.txt |  | 11282804

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
7 | EX-101.SCH | acls-20231231.xsd | EX-101.SCH | 68548
8 | EX-101.CAL | acls-20231231_cal.xml | EX-101.CAL | 105523
9 | EX-101.DEF | acls-20231231_def.xml | EX-101.DEF | 249912
10 | EX-101.LAB | acls-20231231_lab.xml | EX-101.LAB | 681081
11 | EX-101.PRE | acls-20231231_pre.xml | EX-101.PRE | 486388
103 | EXTRACTED XBRL INSTANCE DOCUMENT | acls-20231231x10ka_htm.xml | XML | 2552173

Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-K/A | Act: 34 | File No.: 000-30941 | Film No.: 24694250
SIC: 3559 Special Industry Machinery, NEC
(CF Office: 06 Technology)