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Revenue (Details) - USD ($) $ in Thousands | 6 Months Ended |  |  |  |  |
--- | --- | --- | --- | --- | --- | ---
Jun. 30, 2024 | Mar. 31, 2024 | Dec. 31, 2023 | Jun. 30, 2023 | Mar. 31, 2023 | Dec. 31, 2022
Disaggregation of Revenue |  |  |  |  |  |
Deferred revenue | $ 174,011 | $ 208,418 | $ 210,885 | $ 182,540 | $ 201,725 | $ 154,777
Short-term deferred revenue | 148,390 |  | 164,677 |  |  |
Long-term deferred revenue | $ 25,621 |  | $ 46,208 |  |  |
Systems |  |  |  |  |  |
Disaggregation of Revenue |  |  |  |  |  |
Payment upon shipment of the system, as a percent | 90.00% |  |  |  |  |
Payment upon acceptance, as a percent | 10.00% |  |  |  |  |
Systems | Minimum |  |  |  |  |  |
Disaggregation of Revenue |  |  |  |  |  |
Pre-shipment deposit, as a percent | 20.00% |  |  |  |  |
Systems | Maximum |  |  |  |  |  |
Disaggregation of Revenue |  |  |  |  |  |
Pre-shipment deposit, as a percent | 60.00% |  |  |  |  |
Aftermarket | Minimum |  |  |  |  |  |
Disaggregation of Revenue |  |  |  |  |  |
Payment upon delivery of parts, period | 30 days |  |  |  |  |
Aftermarket | Maximum |  |  |  |  |  |
Disaggregation of Revenue |  |  |  |  |  |
Payment upon delivery of parts, period | 60 days |  |  |  |  |

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