<SEC-DOCUMENT>0001415889-24-013328-index.html : 20240516
<SEC-HEADER>0001415889-24-013328.hdr.sgml : 20240516
<ACCEPTANCE-DATETIME>20240516161549
ACCESSION NUMBER:		0001415889-24-013328
CONFORMED SUBMISSION TYPE:	4/A
PUBLIC DOCUMENT COUNT:		1
CONFORMED PERIOD OF REPORT:	20240515
FILED AS OF DATE:		20240516
DATE AS OF CHANGE:		20240516

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			Chiu Tzu Yin
		CENTRAL INDEX KEY:			0001738290
		ORGANIZATION NAME:           	

	FILING VALUES:
		FORM TYPE:		4/A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-30941
		FILM NUMBER:		24955786

	MAIL ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AXCELIS TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001113232
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		ORGANIZATION NAME:           	06 Technology
		IRS NUMBER:				341818596
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915
		BUSINESS PHONE:		978-787-4000

	MAIL ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	EATON SEMICONDUCTOR EQUIPMENT INC
		DATE OF NAME CHANGE:	20000501
</SEC-HEADER>
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<TYPE>4/A
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<FILENAME>form4a-05162024_040535.xml
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Document 1 - file: form4a-05162024_040535.html

Document 1 - RAW XML: form4a-05162024_040535.xml

</DOCUMENT>
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