<SEC-DOCUMENT>0001415889-24-029047-index.html : 20241212
<SEC-HEADER>0001415889-24-029047.hdr.sgml : 20241212
<ACCEPTANCE-DATETIME>20241212080555
ACCESSION NUMBER:		0001415889-24-029047
CONFORMED SUBMISSION TYPE:	3
PUBLIC DOCUMENT COUNT:		2
CONFORMED PERIOD OF REPORT:	20241212
FILED AS OF DATE:		20241212
DATE AS OF CHANGE:		20241212

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			Evans Eileen
		CENTRAL INDEX KEY:			0001715912
		ORGANIZATION NAME:           	

	FILING VALUES:
		FORM TYPE:		3
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-30941
		FILM NUMBER:		241543304

	MAIL ADDRESS:	
		STREET 1:		C/O SUNPOWER CORPORATION
		STREET 2:		880 HARBOUR WAY SOUTH, SUITE 600
		CITY:			RICHMOND
		STATE:			CA
		ZIP:			94804

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AXCELIS TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001113232
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		ORGANIZATION NAME:           	06 Technology
		IRS NUMBER:				341818596
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915
		BUSINESS PHONE:		978-787-4000

	MAIL ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	EATON SEMICONDUCTOR EQUIPMENT INC
		DATE OF NAME CHANGE:	20000501
</SEC-HEADER>
<DOCUMENT>
<TYPE>3
<SEQUENCE>1
<FILENAME>form3-12122024_011251.xml
<TEXT>
Document 1 - file: form3-12122024_011251.html

Document 1 - RAW XML: form3-12122024_011251.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-24
<SEQUENCE>2
<FILENAME>ex24-12122024_011252.htm
<TEXT>
Document 2 - file: ex24-12122024_011252.htm

</DOCUMENT>
</SEC-DOCUMENT>