# Filing Detail

Form DEF 14A - Other definitive proxy statements:
SEC Accession No. 0001104659-24-040855
Filing Date
2024-03-29
Accepted
2024-03-29 08:01:11
Documents
23
Period of Report
2024-05-09

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | FORM DEF 14A | tm242686-d4_def14a.htm iXBRL | DEF 14A | 1156304
6 | GRAPHIC | lg_axcelis-4c.jpg | GRAPHIC | 12611
7 | GRAPHIC | pc_boardnom-4c.jpg | GRAPHIC | 43667
8 | GRAPHIC | pc_tenure-4c.jpg | GRAPHIC | 36485
9 | GRAPHIC | ic_tickmark-bw.jpg | GRAPHIC | 1339
10 | GRAPHIC | tb_auditcompetc-4c.jpg | GRAPHIC | 73732
11 | GRAPHIC | bc_ceoother-4c.jpg | GRAPHIC | 59311
12 | GRAPHIC | bc_ceorealized-4c.jpg | GRAPHIC | 42931
13 | GRAPHIC | px_axcelis24page01-4c.jpg | GRAPHIC | 407308
14 | GRAPHIC | px_axcelis24page02-4c.jpg | GRAPHIC | 254523
| Complete submission text file | 0001104659-24-040855.txt |  | 4465462

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
2 | XBRL TAXONOMY EXTENSION SCHEMA | acls-20231231.xsd | EX-101.SCH | 6547
3 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE | acls-20231231_def.xml | EX-101.DEF | 6264
4 | XBRL TAXONOMY EXTENSION LABEL LINKBASE | acls-20231231_lab.xml | EX-101.LAB | 19087
5 | XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE | acls-20231231_pre.xml | EX-101.PRE | 8468
26 | EXTRACTED XBRL INSTANCE DOCUMENT | tm242686-d4_def14a_htm.xml | XML | 298327

Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: DEF 14A | Act: 34 | File No.: 000-30941 | Film No.: 24802062
SIC: 3559 Special Industry Machinery, NEC
(CF Office: 06 Technology)