<SEC-DOCUMENT>0001104659-24-040855-index.html : 20240329
<SEC-HEADER>0001104659-24-040855.hdr.sgml : 20240329
<ACCEPTANCE-DATETIME>20240329080111
ACCESSION NUMBER:		0001104659-24-040855
CONFORMED SUBMISSION TYPE:	DEF 14A
PUBLIC DOCUMENT COUNT:		23
CONFORMED PERIOD OF REPORT:	20240509
FILED AS OF DATE:		20240329
DATE AS OF CHANGE:		20240329

FILER:

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AXCELIS TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001113232
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		ORGANIZATION NAME:           	06 Technology
		IRS NUMBER:				341818596
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	FILING VALUES:
		FORM TYPE:		DEF 14A
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-30941
		FILM NUMBER:		24802062

	BUSINESS ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915
		BUSINESS PHONE:		978-787-4000

	MAIL ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	EATON SEMICONDUCTOR EQUIPMENT INC
		DATE OF NAME CHANGE:	20000501
</SEC-HEADER>
<DOCUMENT>
<TYPE>DEF 14A
<SEQUENCE>1
<FILENAME>tm242686-d4_def14a.htm
<DESCRIPTION>FORM DEF 14A
<TEXT>
Document 1 - file: tm242686-d4_def14a.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.SCH
<SEQUENCE>2
<FILENAME>acls-20231231.xsd
<DESCRIPTION>XBRL TAXONOMY EXTENSION SCHEMA
<TEXT>
Document 2 - file: acls-20231231.xsd

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.DEF
<SEQUENCE>3
<FILENAME>acls-20231231_def.xml
<DESCRIPTION>XBRL TAXONOMY EXTENSION DEFINITION LINKBASE
<TEXT>
Document 3 - file: acls-20231231_def.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.LAB
<SEQUENCE>4
<FILENAME>acls-20231231_lab.xml
<DESCRIPTION>XBRL TAXONOMY EXTENSION LABEL LINKBASE
<TEXT>
Document 4 - file: acls-20231231_lab.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>EX-101.PRE
<SEQUENCE>5
<FILENAME>acls-20231231_pre.xml
<DESCRIPTION>XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE
<TEXT>
Document 5 - file: acls-20231231_pre.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>6
<FILENAME>lg_axcelis-4c.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 6 - file: lg_axcelis-4c.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>7
<FILENAME>pc_boardnom-4c.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 7 - file: pc_boardnom-4c.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>8
<FILENAME>pc_tenure-4c.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 8 - file: pc_tenure-4c.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>9
<FILENAME>ic_tickmark-bw.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 9 - file: ic_tickmark-bw.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>10
<FILENAME>tb_auditcompetc-4c.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 10 - file: tb_auditcompetc-4c.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>11
<FILENAME>bc_ceoother-4c.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 11 - file: bc_ceoother-4c.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>12
<FILENAME>bc_ceorealized-4c.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 12 - file: bc_ceorealized-4c.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>13
<FILENAME>px_axcelis24page01-4c.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 13 - file: px_axcelis24page01-4c.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>GRAPHIC
<SEQUENCE>14
<FILENAME>px_axcelis24page02-4c.jpg
<DESCRIPTION>GRAPHIC
<TEXT>
Document 14 - file: px_axcelis24page02-4c.jpg

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>16
<FILENAME>R1.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 16 - file: R1.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>17
<FILENAME>R2.htm
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 17 - file: R2.htm

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>18
<FILENAME>Show.js
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 18 - file: Show.js

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>19
<FILENAME>report.css
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 19 - file: report.css

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>21
<FILENAME>FilingSummary.xml
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 21 - file: FilingSummary.html

Document 21 - RAW XML: FilingSummary.xml

</DOCUMENT>
<DOCUMENT>
<TYPE>JSON
<SEQUENCE>23
<FILENAME>MetaLinks.json
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 23 - file: MetaLinks.json

</DOCUMENT>
<DOCUMENT>
<TYPE>ZIP
<SEQUENCE>24
<FILENAME>0001104659-24-040855-xbrl.zip
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 24 - file: 0001104659-24-040855-xbrl.zip

</DOCUMENT>
<DOCUMENT>
<TYPE>XML
<SEQUENCE>26
<FILENAME>tm242686-d4_def14a_htm.xml
<DESCRIPTION>IDEA: XBRL DOCUMENT
<TEXT>
Document 26 - file: tm242686-d4_def14a_htm.html

Document 26 - RAW XML: tm242686-d4_def14a_htm.xml

</DOCUMENT>
</SEC-DOCUMENT>