Form PRE 14A - Other preliminary proxy statements:
SEC Accession No. 0001104659-24-032133
Filing Date
2024-03-08
Accepted
2024-03-08 09:01:39
Documents
25
Period of Report
2024-05-09

Document Format Files

Seq Description Document Type Size
1 PRE 14A tm242686d2_pre14a.htm   iXBRL PRE 14A 1157722
6 GRAPHIC bc_ceoother-4c.jpg GRAPHIC 59311
7 GRAPHIC bc_ceorealized-4c.jpg GRAPHIC 42931
8 GRAPHIC ic_tickmark-bw.jpg GRAPHIC 1339
9 GRAPHIC lg_axcelis-4c.jpg GRAPHIC 12611
10 GRAPHIC pc_boardnom-4c.jpg GRAPHIC 43667
11 GRAPHIC pc_tenure-4c.jpg GRAPHIC 36485
12 GRAPHIC px_axcelis24page01-4c.jpg GRAPHIC 407308
13 GRAPHIC px_axcelis24page02-4c.jpg GRAPHIC 254523
14 GRAPHIC tb_auditcompetc-4c.jpg GRAPHIC 73732
  Complete submission text file 0001104659-24-032133.txt   4485036

Data Files

Seq Description Document Type Size
2 XBRL TAXONOMY EXTENSION SCHEMA acls-20231231.xsd EX-101.SCH 6547
3 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE acls-20231231_def.xml EX-101.DEF 6264
4 XBRL TAXONOMY EXTENSION LABEL LINKBASE acls-20231231_lab.xml EX-101.LAB 19087
5 XBRL TAXONOMY EXTENSION PRESENTATION LINKBASE acls-20231231_pre.xml EX-101.PRE 8468
26 EXTRACTED XBRL INSTANCE DOCUMENT tm242686d2_pre14a_htm.xml XML 298365
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: PRE 14A | Act: 34 | File No.: 000-30941 | Film No.: 24732481
SIC: 3559 Special Industry Machinery, NEC
(CF Office: 06 Technology)