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Assets Manufactured for Internal Use, net (Tables) | 12 Months Ended
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Dec. 31, 2024
Assets Manufactured for Internal Use, net |
Schedule of components of assets manufactured for internal use | ​
​ | ​ | ​ | ​ | ​ | ​ | ​ | ​
​ | ​ | December 31, |
​ |  | 2024 |  | 2023 |
​ | ​ | (in thousands) |
Internal use assets | ​ | $ | 90,252 | ​ | $ | 76,273 | ​
Construction in process | ​ |  | 964 | ​ |  | 236 | ​
Total cost | ​ |  | 91,216 | ​ |  | 76,509 | ​
Accumulated depreciation | ​ |  | (46,045) | ​ |  | (39,588) | ​
Assets manufactured for internal use, net | ​ | $ | 45,171 | ​ | $ | 36,921 | ​

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- References No definition available. + Details
Name: | acls_AssetsManufacturedForInternalUseDisclosureAbstract
Namespace Prefix: | acls_
Data Type: | xbrli:stringItemType
Balance Type: | na
Period Type: | duration

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- Definition Tabular disclosure of the carrying amounts of other assets. This disclosure includes other current assets and other noncurrent assets. + References No definition available. + Details
Name: | us-gaap_ScheduleOfOtherAssetsTableTextBlock
Namespace Prefix: | us-gaap_
Data Type: | dtr-types:textBlockItemType
Balance Type: | na
Period Type: | duration