    <SEC-DOCUMENT>0001104659-25-029634-index.html : 20250331
    <SEC-HEADER>0001104659-25-029634.hdr.sgml : 20250331
    <ACCEPTANCE-DATETIME>20250331080400
    ACCESSION NUMBER:		0001104659-25-029634
    CONFORMED SUBMISSION TYPE:	ARS
    PUBLIC DOCUMENT COUNT:		1
    CONFORMED PERIOD OF REPORT:	20241231
    FILED AS OF DATE:		20250331
    DATE AS OF CHANGE:		20250331
    EFFECTIVENESS DATE:		20250331

    FILER:

    	COMPANY DATA:
    		COMPANY CONFORMED NAME:			AXCELIS TECHNOLOGIES INC
    		CENTRAL INDEX KEY:			0001113232
    		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
    		ORGANIZATION NAME:           	06 Technology
    		EIN:				341818596
    		STATE OF INCORPORATION:			DE
    		FISCAL YEAR END:			1231

    	FILING VALUES:
    		FORM TYPE:		ARS
    		SEC ACT:		1934 Act
    		SEC FILE NUMBER:	000-30941
    		FILM NUMBER:		25788997

    	BUSINESS ADDRESS:
    		STREET 1:		108 CHERRY HILL DRIVE
    		CITY:			BEVERLY
    		STATE:			MA
    		ZIP:			01915
    		BUSINESS PHONE:		978-787-4000

    	MAIL ADDRESS:
    		STREET 1:		108 CHERRY HILL DRIVE
    		CITY:			BEVERLY
    		STATE:			MA
    		ZIP:			01915

    	FORMER COMPANY:
    		FORMER CONFORMED NAME:	EATON SEMICONDUCTOR EQUIPMENT INC
    		DATE OF NAME CHANGE:	20000501
    </SEC-HEADER>
    <DOCUMENT>
    <TYPE>ARS
    <SEQUENCE>1
    <FILENAME>tm255061d3_ars.pdf
    <DESCRIPTION>ARS
    <TEXT>
    Document 1 - file: tm255061d3_ars.pdf

    </DOCUMENT>
    </SEC-DOCUMENT>