# Filing Detail

Form ARS - Annual Report to Security Holders:
SEC Accession No. 0001104659-25-029634
Filing Date
2025-03-31
Accepted
2025-03-31 08:04:00
Documents
1
Period of Report
2024-12-31
Effectiveness Date
2025-03-31

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | ARS | tm255061d3_ars.pdf | ARS | 6078136
| Complete submission text file | 0001104659-25-029634.txt |  | 8373705

Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: ARS | Act: 34 | File No.: 000-30941 | Film No.: 25788997
SIC: 3559 Special Industry Machinery, NEC
(CF Office: 06 Technology)