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Stock-Based Compensation | 9 Months Ended
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Sep. 30, 2025
Stock-Based Compensation |
Stock-Based Compensation | Note 3. Stock-Based Compensation ​ We maintain the Axcelis Technologies, Inc. 2012 Equity Incentive Plan, as amended (the “2012 Equity Plan”), which became effective on May 2, 2012, and permits the issuance of options, restricted stock, restricted stock units (“RSUs”) and performance awards to selected employees, directors, and consultants of the Company. ​ The 2012 Equity Plan is more fully described in Note 13 to the consolidated financial statements in our 2024 Form 10-K. ​ We recognized stock-based compensation expense of $5.3 million and $5.4 million for the three-month periods ended September 30, 2025 and 2024, respectively. We recognized stock-based compensation expense of $15.7 million and $15.6 million for the nine-month periods ended September 30, 2025 and 2024, respectively. These amounts include compensation expense related to RSUs and stock issued to participants under the 2020 Employee Stock Purchase Plan (the “2020 ESPP”). ​ In the three-month periods ended September 30, 2025 and 2024, we issued 3,121 and 5,023 shares of common stock, respectively, upon vesting of RSUs granted under the 2012 Equity Plan and purchases under the 2020 ESPP. In both the three-month periods ended September 30, 2025 and 2024, we received no proceeds in connection with purchases under the 2020 ESPP. ​ In both of the nine-month periods ended September 30, 2025 and 2024, we issued 0.2 million shares of common stock upon vesting of RSUs granted under the 2012 Equity Plan and purchases under the 2020 ESPP. In both the nine-month periods ended September 30, 2025 and 2024, we received proceeds of $1.2 million in connection with purchases under the 2020 ESPP.

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