# Filing Detail

Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001104659-25-107689
Filing Date
2025-11-06
Accepted
2025-11-06 15:37:06
Documents
82
Period of Report
2025-09-30

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | 10-Q | acls-20250930x10q.htm iXBRL | 10-Q | 2196393
2 | EX-31.1 | acls-20250930xex31d1.htm | EX-31.1 | 12519
3 | EX-31.2 | acls-20250930xex31d2.htm | EX-31.2 | 12954
4 | EX-32.1 | acls-20250930xex32d1.htm | EX-32.1 | 6743
5 | EX-32.2 | acls-20250930xex32d2.htm | EX-32.2 | 6760
| Complete submission text file | 0001104659-25-107689.txt |  | 8666654

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
6 | EX-101.SCH | acls-20250930.xsd | EX-101.SCH | 48466
7 | EX-101.CAL | acls-20250930_cal.xml | EX-101.CAL | 80737
8 | EX-101.DEF | acls-20250930_def.xml | EX-101.DEF | 170186
9 | EX-101.LAB | acls-20250930_lab.xml | EX-101.LAB | 449329
10 | EX-101.PRE | acls-20250930_pre.xml | EX-101.PRE | 319982
85 | EXTRACTED XBRL INSTANCE DOCUMENT | acls-20250930x10q_htm.xml | XML | 1602570

Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 251457871
SIC: 3559 Special Industry Machinery, NEC
(CF Office: 06 Technology)