Form 10-Q - Quarterly report [Sections 13 or 15(d)]:
SEC Accession No. 0001104659-25-107689
Filing Date
2025-11-06
Accepted
2025-11-06 15:37:06
Documents
82
Period of Report
2025-09-30

Document Format Files

Seq Description Document Type Size
1 10-Q acls-20250930x10q.htm   iXBRL 10-Q 2196393
2 EX-31.1 acls-20250930xex31d1.htm EX-31.1 12519
3 EX-31.2 acls-20250930xex31d2.htm EX-31.2 12954
4 EX-32.1 acls-20250930xex32d1.htm EX-32.1 6743
5 EX-32.2 acls-20250930xex32d2.htm EX-32.2 6760
  Complete submission text file 0001104659-25-107689.txt   8666654

Data Files

Seq Description Document Type Size
6 EX-101.SCH acls-20250930.xsd EX-101.SCH 48466
7 EX-101.CAL acls-20250930_cal.xml EX-101.CAL 80737
8 EX-101.DEF acls-20250930_def.xml EX-101.DEF 170186
9 EX-101.LAB acls-20250930_lab.xml EX-101.LAB 449329
10 EX-101.PRE acls-20250930_pre.xml EX-101.PRE 319982
85 EXTRACTED XBRL INSTANCE DOCUMENT acls-20250930x10q_htm.xml XML 1602570
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: 10-Q | Act: 34 | File No.: 000-30941 | Film No.: 251457871
SIC: 3559 Special Industry Machinery, NEC
(CF Office: 06 Technology)