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Cash, cash equivalents and restricted cash (Tables)

9 Months Ended

Sep. 30, 2025

Cash, cash equivalents and restricted cash

Schedule of reconciliation of cash, cash equivalents and restricted cash

​

​	​	​	​	​	​	​
​	September 30,		​	December 31,		​
​	2025		​	​	2024	​
​	(in thousands)					​
Cash and cash equivalents	$	187,501	​	$	123,512	​
Long-term restricted cash	​	7,626	​	​	7,552	​
Total cash, cash equivalents and restricted cash	$	195,127	​	$	131,064	​

X

- Definition

N/A

+ References

No definition available.

+ Details

Name:	acls_CashCashEquivalentsAndRestrictedCashAbstract
Namespace Prefix:	acls_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

X

- Definition

Tabular disclosure for cash, cash equivalents and restricted cash.

+ References

No definition available.

+ Details

Name:	acls_CashCashEquivalentsAndRestrictedCashTableTextBlock
Namespace Prefix:	acls_
Data Type:	dtr-types:textBlockItemType
Balance Type:	na
Period Type:	duration