<SEC-DOCUMENT>0001415889-25-013217.txt : 20250515
<SEC-HEADER>0001415889-25-013217.hdr.sgml : 20250515
<ACCEPTANCE-DATETIME>20250515170022
ACCESSION NUMBER:		0001415889-25-013217
CONFORMED SUBMISSION TYPE:	4
PUBLIC DOCUMENT COUNT:		2
CONFORMED PERIOD OF REPORT:	20250515
FILED AS OF DATE:		20250515
DATE AS OF CHANGE:		20250515

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			Quirk Jeanne
		CENTRAL INDEX KEY:			0001908822
		ORGANIZATION NAME:           	

	FILING VALUES:
		FORM TYPE:		4
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-30941
		FILM NUMBER:		25955089

	MAIL ADDRESS:	
		STREET 1:		AXCELIS TECHNOLOGIES, INC.
		STREET 2:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			AXCELIS TECHNOLOGIES INC
		CENTRAL INDEX KEY:			0001113232
		STANDARD INDUSTRIAL CLASSIFICATION:	SPECIAL INDUSTRY MACHINERY, NEC [3559]
		ORGANIZATION NAME:           	06 Technology
		EIN:				341818596
		STATE OF INCORPORATION:			DE
		FISCAL YEAR END:			1231

	BUSINESS ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915
		BUSINESS PHONE:		978-787-4000

	MAIL ADDRESS:	
		STREET 1:		108 CHERRY HILL DRIVE
		CITY:			BEVERLY
		STATE:			MA
		ZIP:			01915

	FORMER COMPANY:	
		FORMER CONFORMED NAME:	EATON SEMICONDUCTOR EQUIPMENT INC
		DATE OF NAME CHANGE:	20000501
</SEC-HEADER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>form4-05152025_050518.xml
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0508</schemaVersion>

    <documentType>4</documentType>

    <periodOfReport>2025-05-15</periodOfReport>

    <issuer>
        <issuerCik>0001113232</issuerCik>
        <issuerName>AXCELIS TECHNOLOGIES INC</issuerName>
        <issuerTradingSymbol>ACLS</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001908822</rptOwnerCik>
            <rptOwnerName>Quirk Jeanne</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>C/O AXCELIS TECHNOLOGIES, INC.</rptOwnerStreet1>
            <rptOwnerStreet2>108 CHERRY HILL DRIVE</rptOwnerStreet2>
            <rptOwnerCity>BEVERLY</rptOwnerCity>
            <rptOwnerState>MA</rptOwnerState>
            <rptOwnerZipCode>01915</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>true</isDirector>
            <isOfficer>false</isOfficer>
            <isTenPercentOwner>false</isTenPercentOwner>
            <isOther>false</isOther>
            <officerTitle></officerTitle>
            <otherText></otherText>
        </reportingOwnerRelationship>
    </reportingOwner>

    <aff10b5One>0</aff10b5One>

    <nonDerivativeTable>
        <nonDerivativeTransaction>
            <securityTitle>
                <value>Common Stock</value>
            </securityTitle>
            <transactionDate>
                <value>2025-05-15</value>
            </transactionDate>
            <transactionCoding>
                <transactionFormType>4</transactionFormType>
                <transactionCode>A</transactionCode>
                <equitySwapInvolved>0</equitySwapInvolved>
            </transactionCoding>
            <transactionAmounts>
                <transactionShares>
                    <value>3586</value>
                </transactionShares>
                <transactionPricePerShare>
                    <value>0</value>
                    <footnoteId id="F1"/>
                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>A</value>
                </transactionAcquiredDisposedCode>
            </transactionAmounts>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>11749</value>
                    <footnoteId id="F2"/>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
                <natureOfOwnership>
                    <value></value>
                </natureOfOwnership>
            </ownershipNature>
        </nonDerivativeTransaction>
    </nonDerivativeTable>

    <derivativeTable></derivativeTable>

    <footnotes>
        <footnote id="F1">These shares are issuable on vesting of restricted stock units granted under the Company's 2012 Equity Incentive Plan on May 15, 2025.  Assuming completion of the director's current term of service on the Board of Directors, these restricted stock units will vest on May 15, 2026.</footnote>
        <footnote id="F2">Of the shares held as of May 15, 2025, 4,158 were issuable on vesting of restricted stock units granted to the director under the 2012 Equity Incentive Plan and are subject to forfeiture.</footnote>
    </footnotes>

    <ownerSignature>
        <signatureName>/s/ Eileen J. Evans, Attorney-in-Fact</signatureName>
        <signatureDate>2025-05-15</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-24
<SEQUENCE>2
<FILENAME>ex24-05152025_050520.htm
<TEXT>
<!DOCTYPE html PUBLIC "-//IETF//DTD HTML//EN">
<html><head><title>ex24-05152025_050520.htm</title></head><body style="margin-top:0;font-family:Times New Roman; font-size:10pt; color:#000000">
<p style="margin:0px" align="center">Exhibit 24.1</p>
<p style="margin:0px" align="center"><br></p>
<p style="margin:0px" align="center">POWER OF ATTORNEY</p>
<p style="margin:0px" align="center">For Executing Reports under Section 16(a)</p>
<p style="margin:0px" align="center">with respect to securities of</p>
<p style="margin:0px" align="center">AXCELIS TECHNOLOGIES INC.</p>
<p style="margin:0px" align="center">&nbsp;</p>
<p style="margin:0px; text-indent:48px">The undersigned hereby constitutes and appoints each of Russell J. Low, James G. Coogan, Eileen J. Evans, Lynnette C. Fallon, and Megan Gates, Esq. of the Covington &amp; Burling law firm, each acting singly, the undersigned<font style="font-family:Arial Unicode MS,Times New Roman">&rsquo;</font>s true and lawful attorney-in-fact, from the date hereof until this Power of Attorney is revoked, to:</p>
<p style="margin:0px; text-indent:48px" align="justify">&nbsp;</p>
<p style="margin-top:0px; margin-bottom:-2px; text-indent:0.467px; width:48px; float:left">(1)</p>
<p style="margin:0px; padding-left:48px; text-indent:-2px">execute, for and on behalf of the undersigned, Forms 3, 4 and 5 with respect to securities of Axcelis Technologies, Inc. in accordance with Section 16(a) of the Securities Exchange Act of 1934 and the rules thereunder, it being understood that the documents executed by such attorney-in-fact on behalf of the undersigned pursuant to this Power of Attorney shall be in such form and shall contain such terms and conditions as such attorney-in-fact may approve in his or her discretion; and</p>
<p style="margin:0px; clear:left">&nbsp;</p>
<p style="margin-top:0px; margin-bottom:-2px; text-indent:0.467px; width:48px; float:left">(2)</p>
<p style="margin:0px; padding-left:48px; text-indent:-2px">do and perform any and all acts, for and on behalf of the undersigned, that may be necessary or desirable to complete the execution of any such Form 3, 4 or 5 and the timely filing of such form with the United States Securities and Exchange Commission and any other authority.</p>
<p style="margin:0px; clear:left">&nbsp;</p>
<p style="margin:0px; text-indent:48px">The undersigned hereby grants to each such attorney-in-fact full power and authority to do and perform all and every act and thing whatsoever requisite, necessary and proper to be done in the exercise of any of the rights and powers herein granted, as fully for all intents and purposes as the undersigned might or could do if personally present, with full power of substitution or revocation, hereby ratifying and confirming all that such attorney-in-fact, or his or her substitute or substitutes, shall lawfully do or cause to be done by virtue of this power of attorney and the rights and powers herein granted. The undersigned acknowledges that the foregoing attorneys-in-fact, in serving in such capacity at the request of the undersigned, are not assuming any of the undersigned<font style="font-family:Arial Unicode MS,Times New Roman">&rsquo;</font>s responsibilities to comply with Section 16 of the Securities Exchange Act of 1934.</p>
<p style="margin:0px; text-indent:48px">&nbsp;</p>
<p style="margin:0px; text-indent:48px">IN WITNESS WHEREOF, the undersigned has caused this Power of Attorney to be executed this 8th day of May, 2025.</p>
<p style="margin:0px">&nbsp;</p>
<p style="margin:0px"><br></p>
<table style="margin-top:0px; font-size:10pt" cellpadding="0" cellspacing="0" width="100%" align="center"><tr style="font-size:0"><td width="166.667"></td><td width="166.667"></td></tr><tr><td style="margin-top:0px; padding-left:4px; padding-top:0px; padding-right:4px; padding-bottom:0px" valign="bottom" width="166.667"><p style="margin:0px">&nbsp;</p>
</td><td style="margin-top:0px; padding-left:4px; padding-top:0px; padding-right:4px; padding-bottom:0px; border-bottom:1.333px solid #000000" valign="bottom" width="166.667"><p style="margin:0px">/s/ Jeanne Quirk</p>
</td></tr><tr><td style="margin-top:0px; padding-left:4px; padding-top:0px; padding-right:4px; padding-bottom:0px" valign="bottom" width="166.667"><p style="margin:0px">&nbsp;</p>
</td><td style="margin-top:0px; padding-left:4px; padding-top:0px; padding-right:4px; padding-bottom:0px" valign="bottom" width="166.667"><p style="margin:0px">Jeanne Quirk</p>
</td></tr></table><p style="margin:0px">&nbsp;</p>
<p style="margin-top:0px; margin-bottom:6.667px">&nbsp;</p>
<p style="margin:0px">&nbsp;</p>
<p style="margin:0px"><br></p>
<p style="margin:0px"><br></p>
</body></html>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
