Form 4 - Statement of changes in beneficial ownership of securities:
SEC Accession No. 0001415889-25-013215
Filing Date
2025-05-15
Accepted
2025-05-15 17:00:18
Documents
2
Period of Report
2025-05-15

Document Format Files

Seq Description Document Type Size
1 form4-05152025_050513.html 4  
1 form4-05152025_050513.xml 4 3759
2 ex24-05152025_050514.htm EX-24 5237
  Complete submission text file 0001415889-25-013215.txt   10525
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Issuer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
SIC: 3559 Special Industry Machinery, NEC
(CF Office: 06 Technology)

Mailing Address 7005 SOUTHFRONT ROAD LIVERMORE CA 94551
Business Address 925-290-4124
Titinger Jorge (Reporting) CIK: 0001385162 (see all company filings)

Type: 4 | Act: 34 | File No.: 000-30941 | Film No.: 25955084