# Filing Detail

Form DEF 14A - Other definitive proxy statements:
SEC Accession No. 0001104659-25-029630
Filing Date
2025-03-31
Accepted
2025-03-31 08:00:34
Documents
21
Period of Report
2025-05-07

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | DEF 14A | tm252354-2_def14a.htm iXBRL | DEF 14A | 1154975
5 | GRAPHIC | bc_ceoandother-4c.jpg | GRAPHIC | 59278
6 | GRAPHIC | bc_ceorealized-4c.jpg | GRAPHIC | 45884
7 | GRAPHIC | lg_axcelis-4c.jpg | GRAPHIC | 12591
8 | GRAPHIC | px_axcelis2025pg01-4c.jpg | GRAPHIC | 405831
9 | GRAPHIC | px_axcelis2025pg02-4c.jpg | GRAPHIC | 259130
10 | GRAPHIC | tb_boardcomm-4c.jpg | GRAPHIC | 64587
| Complete submission text file | 0001104659-25-029630.txt |  | 4167911

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
2 | XBRL TAXONOMY EXTENSION SCHEMA | acls-20241231.xsd | EX-101.SCH | 4913
3 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE | acls-20241231_def.xml | EX-101.DEF | 1879
4 | XBRL TAXONOMY EXTENSION LABEL LINKBASE | acls-20241231_lab.xml | EX-101.LAB | 9445
23 | EXTRACTED XBRL INSTANCE DOCUMENT | tm252354-2_def14a_htm.xml | XML | 252945

Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: DEF 14A | Act: 34 | File No.: 000-30941 | Film No.: 25788984
SIC: 3559 Special Industry Machinery, NEC
(CF Office: 06 Technology)