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Pay vs Performance Disclosure | 12 Months Ended
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Dec. 31, 2024 USD ($) | Dec. 31, 2023 USD ($) | Dec. 31, 2022 USD ($) | Dec. 31, 2021 USD ($) | Dec. 31, 2020 USD ($)
Pay vs Performance Disclosure |  |  |  |  |
Pay vs Performance Disclosure, Table | Pay Versus Performance Note: In accordance with an instruction to the SEC regulation under which this Pay Versus Performance information is provided (Regulation S-K, Item 407(v)), this Pay Versus Performance information shall not be deemed to be incorporated by reference into any filing under the Securities Act of 1933, as amended, or the Securities Exchange Act of 1934, as amended. Specifically, this Pay Versus Performance information is not included in the executive compensation information incorporated by reference into Part III of the Company’s Annual Report on Form 10-K. The Pay Versus Performance table below compares the total compensation amounts shown in the Summary Compensation Table in this and our prior four proxy statements to compensation “actually paid” to Dr. Low, who served as our CEO and principal executive officer (“PEO”) in 2024. The table also provides the same information as an average for the non-CEO NEOs specified in this proxy statement for 2024; the non-CEO NEOs named in our 2023 proxy statement for 2023; and the non-CEO NEOs named in our 2022 proxy statement for 2022, 2021 and 2020. The “actually paid” amounts in the Pay Versus Performance table reflect a re-valuation of equity awards granted to our PEO and other NEOs. SEC regulations instruct us to back out the grant date fair value of equity awards that is used in the Summary Compensation Table and replace it with values for unvested equity awards at each year end and values for shares on each vest date. The “actually paid” amounts also reflect the achievement of specific operational goals on the PRSUs granted to executives, which, in 2020, 2021, 2022, 2023 and 2024 increased the number of shares subject to those PRSUs. Accordingly, the “actually paid” compensation is an alternative way of calculating the value for executive equity awards that uses the stock price at year end for unvested grants and at vest dates for those that vest in the year, instead of the stock price at grant for only those awards newly granted in the year. For employees that have served for more than the current year, the “actually paid” values will almost always be higher because they include values for all prior grants, not just the current year. The Summary Compensation Table already incorporates the value of the cash incentive paid for each year, so that performance-related compensation component is unchanged in the “actually paid” amounts in the table.
​ | ​ | ​ | ​ | ​ | ​ | ​ | ​ | ​ | ​ | Value of Initial Fixed $100 Investment made on December 31, 2019, based on: | ​ | ​ | ​ | ​
​ | Year | ​ | ​ | Summary Compensation Table Total for PEO | ​ | ​ | Compensation Actually Paid (“CAP”) to PEO | ​ | ​ | Average Summary Compensation Table Total for Non-PEO NEOs | ​ | ​ | Average CAP to Non-PEO NEOs | ​ | ​ | Total Shareholder Return | ​ | ​ | Peer Group Total Shareholder Return | ​ | ​ | Net Income | ​ | ​ | Revenues | ​
​ | (a)(1) | ​ | ​ | (b) | ​ | ​ | (c)(2) | ​ | ​ | (d) | ​ | ​ | (e)(3) | ​ | ​ | (f) | ​ | ​ | (g)(3) | ​ | ​ | (h) | ​ | ​ | (i) | ​
​ | 2024 | ​ | ​ | ​ | $ | 4,293,508 | ​ | ​ | ​ | ​ | $ | 1,618,794 | ​ | ​ | ​ | ​ | $ | 1,282,936 | ​ | ​ | ​ | ​ | $ | 742,827 | ​ | ​ | ​ | ​ | $ | 289.92 | ​ | ​ | ​ | ​ | $ | 269.24 | ​ | ​ | ​ | ​ | $ | 201,000,000 | ​ | ​ | ​ | ​ | $ | 1,017,900,000 | ​ | ​
​ | 2023 | ​ | ​ | ​ | $ | 4,135,438 | ​ | ​ | ​ | ​ | $ | 6,510,602 | ​ | ​ | ​ | ​ | $ | 1,258,904 | ​ | ​ | ​ | ​ | $ | 2,141,924 | ​ | ​ | ​ | ​ | $ | 538.13 | ​ | ​ | ​ | ​ | $ | 225.75 | ​ | ​ | ​ | ​ | $ | 246,263,000 | ​ | ​ | ​ | ​ | $ | 1,130,604,000 | ​ | ​
​ | 2022 | ​ | ​ | ​ | $ | 1,461,805 | ​ | ​ | ​ | ​ | $ | 1,751,594 | ​ | ​ | ​ | ​ | $ | 1,463,285 | ​ | ​ | ​ | ​ | $ | 1,728,963 | ​ | ​ | ​ | ​ | $ | 329.34 | ​ | ​ | ​ | ​ | $ | 137.05 | ​ | ​ | ​ | ​ | $ | 183,100,000 | ​ | ​ | ​ | ​ | $ | 920,000,000 | ​ | ​
​ | 2021 | ​ | ​ | ​ | $ | 1,423,579 | ​ | ​ | ​ | ​ | $ | 3,663,680 | ​ | ​ | ​ | ​ | $ | 1,405,289 | ​ | ​ | ​ | ​ | $ | 3,648,869 | ​ | ​ | ​ | ​ | $ | 309.38 | ​ | ​ | ​ | ​ | $ | 213.35 | ​ | ​ | ​ | ​ | $ | 98,650,000 | ​ | ​ | ​ | ​ | $ | 662,428,000 | ​ | ​
​ | 2020 | ​ | ​ | ​ | $ | 1,307,974 | ​ | ​ | ​ | ​ | $ | 1,582,284 | ​ | ​ | ​ | ​ | $ | 1,356,639 | ​ | ​ | ​ | ​ | $ | 1,620,922 | ​ | ​ | ​ | ​ | $ | 120.83 | ​ | ​ | ​ | ​ | $ | 151.14 | ​ | ​ | ​ | ​ | $ | 49,982,000 | ​ | ​ | ​ | ​ | $ | 474,560,000 | ​ | ​
​ (1) The non-PEO NEOs reported for the year 2024 are the NEOs identified in this proxy statement, other than Dr. Low: James G. Coogan, Gregory F. Redinbo, Christopher J. Tatnall, and Gerald M. Blumenstock. The non-PEOs reported for the year 2023 are the NEOs identified in our 2024 proxy statement, other than Dr. Low and our former CEO: James G. Coogan, Kevin J. Brewer, Lynnette C. Fallon, Gregory F. Redinbo, and Gerald M. Blumenstock. The non-PEOs reported for the years 2022, 2021 and 2020 are the NEOs identified in our 2023 proxy statement (the first year for which this report was provided), other than our former CEO: Kevin J. Brewer, Russell J. Low , Lynnette C. Fallon, and Douglas A. Lawson. ​ (2) In accordance with SEC rules, the following adjustments were made to Dr. Low’s total compensation for each year to determine CAP: ​
​ | ​ | ​ | ​ | Footnote (2) —Table 1 | ​
​ | ​ | ​ | ​ | Reported Summary Compensation Table Total for PEO | ​ | ​ | Reported Value of Equity Awards | ​ | ​ | Equity Award Adjustments | ​ | ​ | Compensation Actually Paid to PEO | ​
​ | (a) | ​ | ​ | (b) | ​ | ​ | (c)(i) | ​ | ​ | (d)(ii) | ​ | ​ | (e) | ​
​ | 2024 | ​ | ​ | ​ | $ | 4,293,508 | ​ | ​ | ​ | ​ | $ | 3,217,435 | ​ | ​ | ​ | ​ | $ | 542,721 | ​ | ​ | ​ | ​ | $ | 1,618,794 | ​ | ​
​ | 2023 | ​ | ​ | ​ | $ | 4,135,438 | ​ | ​ | ​ | ​ | $ | 3,076,368 | ​ | ​ | ​ | ​ | $ | 5,451,531 | ​ | ​ | ​ | ​ | $ | 6,510,602 | ​ | ​
​ | 2022 | ​ | ​ | ​ | $ | 1,461,805 | ​ | ​ | ​ | ​ | $ | 663,254 | ​ | ​ | ​ | ​ | $ | 953,044 | ​ | ​ | ​ | ​ | $ | 1,751,594 | ​ | ​
​ | 2021 | ​ | ​ | ​ | $ | 1,423,579 | ​ | ​ | ​ | ​ | $ | 622,771 | ​ | ​ | ​ | ​ | $ | 2,862,872 | ​ | ​ | ​ | ​ | $ | 3,663,680 | ​ | ​
​ | 2020 | ​ | ​ | ​ | $ | 1,307,974 | ​ | ​ | ​ | ​ | $ | 593,410 | ​ | ​ | ​ | ​ | $ | 867,720 | ​ | ​ | ​ | ​ | $ | 1,582,284 | ​ | ​
​ (i) The grant date fair value of equity awards in column (c) of Footnote (2) —Table 1 represents the total of the amounts reported in the “Stock Awards” and “Option Awards” columns in the Summary Compensation Table for the applicable year. ​ (ii) The equity award adjustments in column (d) of Footnote (2) —Table 1 include the addition (or subtraction, as applicable) of the following: (1) the year-end fair value of any equity awards granted in the applicable year that are outstanding and unvested as of the end of the year; (2) the amount of change as of the end of the applicable year (from the end of the prior fiscal year) in fair value of any awards granted in prior years that are outstanding and unvested as of the end of the applicable year; and (3) for awards granted in prior years that vest in the applicable year, the amount equal to the change as of the vesting date (from the end of the prior fiscal year) in fair value. None of the years shown had any (A) awards granted and vested in same applicable year; (B) awards granted in prior years that were determined to fail to meet the applicable vesting conditions during the applicable year; or (C) dividends or other earnings paid on stock or option awards in the applicable year prior to the vesting date. The valuation assumptions used to calculate fair values did not materially differ from those disclosed at the time of grant. The amounts deducted or added in calculating the equity award adjustments are as follows: ​
​ | ​ | ​ | ​ | Footnote (2) —Table 2 | ​
​ | Year | ​ | ​ | Year End Fair Value of Equity Awards Granted in the Year | ​ | ​ | Year over Year Change in Fair Value of Outstanding and Unvested Equity Awards at Year End | ​ | ​ | Year over Year Change in Fair Value of Equity Awards Granted in Prior Years that Vested in the Year | ​ | ​ | Total Equity Award Adjustments | ​
​ | (a) | ​ | ​ | (b) | ​ | ​ | (c) | ​ | ​ | (d) | ​ | ​ | (e) | ​
​ | 2024 | ​ | ​ | ​ | $ | 2,254,775 | ​ | ​ | ​ | ​ | $ | (1,322,429) | ​ | ​ | ​ | ​ | $ | (389,625) | ​ | ​ | ​ | ​ | $ | 542,721 | ​ | ​
​ | 2023 | ​ | ​ | ​ | $ | 3,662,744 | ​ | ​ | ​ | ​ | $ | 785,807 | ​ | ​ | ​ | ​ | $ | 1,002,980 | ​ | ​ | ​ | ​ | $ | 5,451,531 | ​ | ​
​ | 2022 | ​ | ​ | ​ | $ | 1,097,108 | ​ | ​ | ​ | ​ | $ | 105,066 | ​ | ​ | ​ | ​ | $ | (249,130) | ​ | ​ | ​ | ​ | $ | 953,044 | ​ | ​
​ | 2021 | ​ | ​ | ​ | $ | 1,521,024 | ​ | ​ | ​ | ​ | $ | 1,108,418 | ​ | ​ | ​ | ​ | $ | 233,430 | ​ | ​ | ​ | ​ | $ | 2,862,872 | ​ | ​
​ | 2020 | ​ | ​ | ​ | $ | 734,698 | ​ | ​ | ​ | ​ | $ | 115,682 | ​ | ​ | ​ | ​ | $ | 17,340 | ​ | ​ | ​ | ​ | $ | 867,720 | ​ | ​
​ (3) In accordance with SEC rules, the following adjustments were made to average total compensation for the non-PEO NEOs as a group for each year to determine CAP, using the same methodology described above in Footnote 2: ​
​ | ​ | ​ | ​ | Footnote (3) —Table 1 | ​
​ | ​ | ​ | ​ | Average Reported Summary Compensation Table Total for Non- PEO NEOs | ​ | ​ | Average Reported Value of Equity Awards | ​ | ​ | Average Equity Award Adjustments | ​ | ​ | Average Compensation Actually Paid to Non-PEO NEOs | ​
​ | (a) | ​ | ​ | (b) | ​ | ​ | (c)(i) | ​ | ​ | (d)(ii) | ​ | ​ | (e) | ​
​ | 2024 | ​ | ​ | ​ | $ | 1,282,936 | ​ | ​ | ​ | ​ | $ | 750,769 | ​ | ​ | ​ | ​ | $ | 178,699 | ​ | ​ | ​ | ​ | $ | 742,827 | ​ | ​
​ | 2023 | ​ | ​ | ​ | $ | 1,258,904 | ​ | ​ | ​ | ​ | $ | 673,331 | ​ | ​ | ​ | ​ | $ | 1,556,352 | ​ | ​ | ​ | ​ | $ | 2,141,924 | ​ | ​
​ | 2022 | ​ | ​ | ​ | $ | 1,463,285 | ​ | ​ | ​ | ​ | $ | 639,377 | ​ | ​ | ​ | ​ | $ | 905,055 | ​ | ​ | ​ | ​ | $ | 1,728,963 | ​ | ​
​ | 2021 | ​ | ​ | ​ | $ | 1,405,289 | ​ | ​ | ​ | ​ | $ | 600,314 | ​ | ​ | ​ | ​ | $ | 2,843,894 | ​ | ​ | ​ | ​ | $ | 3,648,869 | ​ | ​
​ | 2020 | ​ | ​ | ​ | $ | 1,356,639 | ​ | ​ | ​ | ​ | $ | 600,125 | ​ | ​ | ​ | ​ | $ | 864,408 | ​ | ​ | ​ | ​ | $ | 1,620,922 | ​ | ​
​ (i) The grant date fair value of equity awards in column (c) of Footnote (4) —Table 1 represents the average of the total of the amounts reported in the “Stock Awards” and “Option Awards” columns for each non-PEO NEO in the Summary Compensation Table for the applicable year. ​ (ii) The amounts deducted or added in calculating the average equity award adjustments are as follows: ​
​ | ​ | ​ | ​ | Footnote (3) —Table 2 | ​
​ | Year | ​ | ​ | Average Year End Fair Value of Equity Awards Granted in the Year | ​ | ​ | Year over Year Average Change in Fair Value of Outstanding and Unvested Equity Awards at Year End | ​ | ​ | Year over Year Average Change in Fair Value of Equity Awards Granted in Prior Years that Vested in the Year | ​ | ​ | Total Average Equity Award Adjustments | ​
​ | (a) | ​ | ​ | (b) | ​ | ​ | (c) | ​ | ​ | (d) | ​ | ​ | (e) | ​
​ | 2024 | ​ | ​ | ​ | $ | 548,616 | ​ | ​ | ​ | ​ | $ | (273,412) | ​ | ​ | ​ | ​ | $ | (96,504) | ​ | ​ | ​ | ​ | $ | 178,699 | ​ | ​
​ | 2023 | ​ | ​ | ​ | $ | 677,608 | ​ | ​ | ​ | ​ | $ | 292,321 | ​ | ​ | ​ | ​ | $ | 586,423 | ​ | ​ | ​ | ​ | $ | 1,556,352 | ​ | ​
​ | 2022 | ​ | ​ | ​ | $ | 1,057,612 | ​ | ​ | ​ | ​ | $ | 103,466 | ​ | ​ | ​ | ​ | $ | (256,024) | ​ | ​ | ​ | ​ | $ | 905,055 | ​ | ​
​ | 2021 | ​ | ​ | ​ | $ | 1,466,176 | ​ | ​ | ​ | ​ | $ | 1,138,403 | ​ | ​ | ​ | ​ | $ | 239,315 | ​ | ​ | ​ | ​ | $ | 2,843,894 | ​ | ​
​ | 2020 | ​ | ​ | ​ | $ | 743,011 | ​ | ​ | ​ | ​ | $ | 120,704 | ​ | ​ | ​ | ​ | $ | 693 | ​ | ​ | ​ | ​ | $ | 864,408 | ​ | ​
​ (4) The Peer Group used in this chart is the Philadelphia Semiconductor Index (SOXX) which is also used in the Company’s stock performance graph provided under Item 201(e) of Regulation S-K in our annual report to stockholders. ​ In 2024, as shown in the Pay Versus Performance table, the compensation “actually paid” (“CAP”) to our PEO and average CAP to our other NEOs is lower than the respective amounts shown in the Summary Compensation Table, primarily due to the fact that the price of the common stock was generally lower during 2024 than at year end 2023. Accordingly, the value of our equity awards at vest and the value of unvested awards at year end 2024 was generally lower than the value at grant shown in the Summary Compensation Table. Despite the lower common stock prices in 2024, the Company still outperformed on the five year (2019-2024) cumulative shareholder return in comparison to that of the SOXX Index. Axcelis’ 2024 net income and revenue, as shown in the Pay Versus Performance table, were slightly below that of 2023. |  |  |  |
Company Selected Measure Name | Revenues |  |  |  |
Named Executive Officers, Footnote | (1) The non-PEO NEOs reported for the year 2024 are the NEOs identified in this proxy statement, other than Dr. Low: James G. Coogan, Gregory F. Redinbo, Christopher J. Tatnall, and Gerald M. Blumenstock. The non-PEOs reported for the year 2023 are the NEOs identified in our 2024 proxy statement, other than Dr. Low and our former CEO: James G. Coogan, Kevin J. Brewer, Lynnette C. Fallon, Gregory F. Redinbo, and Gerald M. Blumenstock. The non-PEOs reported for the years 2022, 2021 and 2020 are the NEOs identified in our 2023 proxy statement (the first year for which this report was provided), other than our former CEO: Kevin J. Brewer, Russell J. Low , Lynnette C. Fallon, and Douglas A. Lawson. |  |  |  |
Peer Group Issuers, Footnote | (4) The Peer Group used in this chart is the Philadelphia Semiconductor Index (SOXX) which is also used in the Company’s stock performance graph provided under Item 201(e) of Regulation S-K in our annual report to stockholders. |  |  |  |
PEO Total Compensation Amount | $ 4,293,508 | $ 4,135,438 | $ 1,461,805 | $ 1,423,579 | $ 1,307,974
PEO Actually Paid Compensation Amount | $ 1,618,794 | 6,510,602 | 1,751,594 | 3,663,680 | 1,582,284
Adjustment To PEO Compensation, Footnote | (2) In accordance with SEC rules, the following adjustments were made to Dr. Low’s total compensation for each year to determine CAP: ​
​ | ​ | ​ | ​ | Footnote (2) —Table 1 | ​
​ | ​ | ​ | ​ | Reported Summary Compensation Table Total for PEO | ​ | ​ | Reported Value of Equity Awards | ​ | ​ | Equity Award Adjustments | ​ | ​ | Compensation Actually Paid to PEO | ​
​ | (a) | ​ | ​ | (b) | ​ | ​ | (c)(i) | ​ | ​ | (d)(ii) | ​ | ​ | (e) | ​
​ | 2024 | ​ | ​ | ​ | $ | 4,293,508 | ​ | ​ | ​ | ​ | $ | 3,217,435 | ​ | ​ | ​ | ​ | $ | 542,721 | ​ | ​ | ​ | ​ | $ | 1,618,794 | ​ | ​
​ | 2023 | ​ | ​ | ​ | $ | 4,135,438 | ​ | ​ | ​ | ​ | $ | 3,076,368 | ​ | ​ | ​ | ​ | $ | 5,451,531 | ​ | ​ | ​ | ​ | $ | 6,510,602 | ​ | ​
​ | 2022 | ​ | ​ | ​ | $ | 1,461,805 | ​ | ​ | ​ | ​ | $ | 663,254 | ​ | ​ | ​ | ​ | $ | 953,044 | ​ | ​ | ​ | ​ | $ | 1,751,594 | ​ | ​
​ | 2021 | ​ | ​ | ​ | $ | 1,423,579 | ​ | ​ | ​ | ​ | $ | 622,771 | ​ | ​ | ​ | ​ | $ | 2,862,872 | ​ | ​ | ​ | ​ | $ | 3,663,680 | ​ | ​
​ | 2020 | ​ | ​ | ​ | $ | 1,307,974 | ​ | ​ | ​ | ​ | $ | 593,410 | ​ | ​ | ​ | ​ | $ | 867,720 | ​ | ​ | ​ | ​ | $ | 1,582,284 | ​ | ​
(i) The grant date fair value of equity awards in column (c) of Footnote (2) —Table 1 represents the total of the amounts reported in the “Stock Awards” and “Option Awards” columns in the Summary Compensation Table for the applicable year. ​ (ii) The equity award adjustments in column (d) of Footnote (2) —Table 1 include the addition (or subtraction, as applicable) of the following: (1) the year-end fair value of any equity awards granted in the applicable year that are outstanding and unvested as of the end of the year; (2) the amount of change as of the end of the applicable year (from the end of the prior fiscal year) in fair value of any awards granted in prior years that are outstanding and unvested as of the end of the applicable year; and (3) for awards granted in prior years that vest in the applicable year, the amount equal to the change as of the vesting date (from the end of the prior fiscal year) in fair value. None of the years shown had any (A) awards granted and vested in same applicable year; (B) awards granted in prior years that were determined to fail to meet the applicable vesting conditions during the applicable year; or (C) dividends or other earnings paid on stock or option awards in the applicable year prior to the vesting date. The valuation assumptions used to calculate fair values did not materially differ from those disclosed at the time of grant. The amounts deducted or added in calculating the equity award adjustments are as follows: ​
​ | ​ | ​ | ​ | Footnote (2) —Table 2 | ​
​ | Year | ​ | ​ | Year End Fair Value of Equity Awards Granted in the Year | ​ | ​ | Year over Year Change in Fair Value of Outstanding and Unvested Equity Awards at Year End | ​ | ​ | Year over Year Change in Fair Value of Equity Awards Granted in Prior Years that Vested in the Year | ​ | ​ | Total Equity Award Adjustments | ​
​ | (a) | ​ | ​ | (b) | ​ | ​ | (c) | ​ | ​ | (d) | ​ | ​ | (e) | ​
​ | 2024 | ​ | ​ | ​ | $ | 2,254,775 | ​ | ​ | ​ | ​ | $ | (1,322,429) | ​ | ​ | ​ | ​ | $ | (389,625) | ​ | ​ | ​ | ​ | $ | 542,721 | ​ | ​
​ | 2023 | ​ | ​ | ​ | $ | 3,662,744 | ​ | ​ | ​ | ​ | $ | 785,807 | ​ | ​ | ​ | ​ | $ | 1,002,980 | ​ | ​ | ​ | ​ | $ | 5,451,531 | ​ | ​
​ | 2022 | ​ | ​ | ​ | $ | 1,097,108 | ​ | ​ | ​ | ​ | $ | 105,066 | ​ | ​ | ​ | ​ | $ | (249,130) | ​ | ​ | ​ | ​ | $ | 953,044 | ​ | ​
​ | 2021 | ​ | ​ | ​ | $ | 1,521,024 | ​ | ​ | ​ | ​ | $ | 1,108,418 | ​ | ​ | ​ | ​ | $ | 233,430 | ​ | ​ | ​ | ​ | $ | 2,862,872 | ​ | ​
​ | 2020 | ​ | ​ | ​ | $ | 734,698 | ​ | ​ | ​ | ​ | $ | 115,682 | ​ | ​ | ​ | ​ | $ | 17,340 | ​ | ​ | ​ | ​ | $ | 867,720 | ​ | ​
Non-PEO NEO Average Total Compensation Amount | $ 1,282,936 | 1,258,904 | 1,463,285 | 1,405,289 | 1,356,639
Non-PEO NEO Average Compensation Actually Paid Amount | $ 742,827 | 2,141,924 | 1,728,963 | 3,648,869 | 1,620,922
Adjustment to Non-PEO NEO Compensation Footnote | (3) In accordance with SEC rules, the following adjustments were made to average total compensation for the non-PEO NEOs as a group for each year to determine CAP, using the same methodology described above in Footnote 2: ​
​ | ​ | ​ | ​ | Footnote (3) —Table 1 | ​
​ | ​ | ​ | ​ | Average Reported Summary Compensation Table Total for Non- PEO NEOs | ​ | ​ | Average Reported Value of Equity Awards | ​ | ​ | Average Equity Award Adjustments | ​ | ​ | Average Compensation Actually Paid to Non-PEO NEOs | ​
​ | (a) | ​ | ​ | (b) | ​ | ​ | (c)(i) | ​ | ​ | (d)(ii) | ​ | ​ | (e) | ​
​ | 2024 | ​ | ​ | ​ | $ | 1,282,936 | ​ | ​ | ​ | ​ | $ | 750,769 | ​ | ​ | ​ | ​ | $ | 178,699 | ​ | ​ | ​ | ​ | $ | 742,827 | ​ | ​
​ | 2023 | ​ | ​ | ​ | $ | 1,258,904 | ​ | ​ | ​ | ​ | $ | 673,331 | ​ | ​ | ​ | ​ | $ | 1,556,352 | ​ | ​ | ​ | ​ | $ | 2,141,924 | ​ | ​
​ | 2022 | ​ | ​ | ​ | $ | 1,463,285 | ​ | ​ | ​ | ​ | $ | 639,377 | ​ | ​ | ​ | ​ | $ | 905,055 | ​ | ​ | ​ | ​ | $ | 1,728,963 | ​ | ​
​ | 2021 | ​ | ​ | ​ | $ | 1,405,289 | ​ | ​ | ​ | ​ | $ | 600,314 | ​ | ​ | ​ | ​ | $ | 2,843,894 | ​ | ​ | ​ | ​ | $ | 3,648,869 | ​ | ​
​ | 2020 | ​ | ​ | ​ | $ | 1,356,639 | ​ | ​ | ​ | ​ | $ | 600,125 | ​ | ​ | ​ | ​ | $ | 864,408 | ​ | ​ | ​ | ​ | $ | 1,620,922 | ​ | ​
(i) The grant date fair value of equity awards in column (c) of Footnote (4) —Table 1 represents the average of the total of the amounts reported in the “Stock Awards” and “Option Awards” columns for each non-PEO NEO in the Summary Compensation Table for the applicable year. ​ (ii) The amounts deducted or added in calculating the average equity award adjustments are as follows: ​
​ | ​ | ​ | ​ | Footnote (3) —Table 2 | ​
​ | Year | ​ | ​ | Average Year End Fair Value of Equity Awards Granted in the Year | ​ | ​ | Year over Year Average Change in Fair Value of Outstanding and Unvested Equity Awards at Year End | ​ | ​ | Year over Year Average Change in Fair Value of Equity Awards Granted in Prior Years that Vested in the Year | ​ | ​ | Total Average Equity Award Adjustments | ​
​ | (a) | ​ | ​ | (b) | ​ | ​ | (c) | ​ | ​ | (d) | ​ | ​ | (e) | ​
​ | 2024 | ​ | ​ | ​ | $ | 548,616 | ​ | ​ | ​ | ​ | $ | (273,412) | ​ | ​ | ​ | ​ | $ | (96,504) | ​ | ​ | ​ | ​ | $ | 178,699 | ​ | ​
​ | 2023 | ​ | ​ | ​ | $ | 677,608 | ​ | ​ | ​ | ​ | $ | 292,321 | ​ | ​ | ​ | ​ | $ | 586,423 | ​ | ​ | ​ | ​ | $ | 1,556,352 | ​ | ​
​ | 2022 | ​ | ​ | ​ | $ | 1,057,612 | ​ | ​ | ​ | ​ | $ | 103,466 | ​ | ​ | ​ | ​ | $ | (256,024) | ​ | ​ | ​ | ​ | $ | 905,055 | ​ | ​
​ | 2021 | ​ | ​ | ​ | $ | 1,466,176 | ​ | ​ | ​ | ​ | $ | 1,138,403 | ​ | ​ | ​ | ​ | $ | 239,315 | ​ | ​ | ​ | ​ | $ | 2,843,894 | ​ | ​
​ | 2020 | ​ | ​ | ​ | $ | 743,011 | ​ | ​ | ​ | ​ | $ | 120,704 | ​ | ​ | ​ | ​ | $ | 693 | ​ | ​ | ​ | ​ | $ | 864,408 | ​ | ​
Tabular List, Table | The three most important financial measures that impact realized executive compensation at Axcelis are:
​ | ​ | Revenues | ​ | ​
​ | ​ | Operating Profit | ​ | ​
​ | ​ | Gross Margin | ​ | ​
These three measures are the metrics used in the Axcelis Management Incentive Program, our annual cash incentive program, discussed in the Compensation Discussion and Analysis above. We believe these measures also have a significant influence on our stock price (which is the main differential between the Summary Compensation Table amounts and the “actually paid” amounts in the Pay Versus Performance Table), along with other measures considered by investors, such as net income and earnings per share. |  |  |  |
Total Shareholder Return Amount | $ 289.92 | 538.13 | 329.34 | 309.38 | 120.83
Peer Group Total Shareholder Return Amount | 269.24 | 225.75 | 137.05 | 213.35 | 151.14
Net Income (Loss) | $ 201,000,000 | $ 246,263,000 | $ 183,100,000 | $ 98,650,000 | $ 49,982,000
Company Selected Measure Amount | 1,017,900,000 | 1,130,604,000 | 920,000,000 | 662,428,000 | 474,560,000
PEO Name | Dr. Low |  |  |  |
Measure:: 1 |  |  |  |  |
Pay vs Performance Disclosure |  |  |  |  |
Name | Revenues |  |  |  |
Measure:: 2 |  |  |  |  |
Pay vs Performance Disclosure |  |  |  |  |
Name | Operating Profit |  |  |  |
Measure:: 3 |  |  |  |  |
Pay vs Performance Disclosure |  |  |  |  |
Name | Gross Margin |  |  |  |
PEO | Aggregate Grant Date Fair Value of Equity Award Amounts Reported in Summary Compensation Table |  |  |  |  |
Pay vs Performance Disclosure |  |  |  |  |
Adjustment to Compensation, Amount | $ (3,217,435) | $ (3,076,368) | $ (663,254) | $ (622,771) | $ (593,410)
PEO | Equity Awards Adjustments, Excluding Value Reported in Compensation Table |  |  |  |  |
Pay vs Performance Disclosure |  |  |  |  |
Adjustment to Compensation, Amount | 542,721 | 5,451,531 | 953,044 | 2,862,872 | 867,720
PEO | Year-end Fair Value of Equity Awards Granted in Covered Year that are Outstanding and Unvested |  |  |  |  |
Pay vs Performance Disclosure |  |  |  |  |
Adjustment to Compensation, Amount | 2,254,775 | 3,662,744 | 1,097,108 | 1,521,024 | 734,698
PEO | Year-over-Year Change in Fair Value of Equity Awards Granted in Prior Years That are Outstanding and Unvested |  |  |  |  |
Pay vs Performance Disclosure |  |  |  |  |
Adjustment to Compensation, Amount | (1,322,429) | 785,807 | 105,066 | 1,108,418 | 115,682
PEO | Change in Fair Value as of Vesting Date of Prior Year Equity Awards Vested in Covered Year |  |  |  |  |
Pay vs Performance Disclosure |  |  |  |  |
Adjustment to Compensation, Amount | (389,625) | 1,002,980 | (249,130) | 233,430 | 17,340
Non-PEO NEO | Aggregate Grant Date Fair Value of Equity Award Amounts Reported in Summary Compensation Table |  |  |  |  |
Pay vs Performance Disclosure |  |  |  |  |
Adjustment to Compensation, Amount | (750,769) | (673,331) | (639,377) | (600,314) | (600,125)
Non-PEO NEO | Equity Awards Adjustments, Excluding Value Reported in Compensation Table |  |  |  |  |
Pay vs Performance Disclosure |  |  |  |  |
Adjustment to Compensation, Amount | 178,699 | 1,556,352 | 905,055 | 2,843,894 | 864,408
Non-PEO NEO | Year-end Fair Value of Equity Awards Granted in Covered Year that are Outstanding and Unvested |  |  |  |  |
Pay vs Performance Disclosure |  |  |  |  |
Adjustment to Compensation, Amount | 548,616 | 677,608 | 1,057,612 | 1,466,176 | 743,011
Non-PEO NEO | Year-over-Year Change in Fair Value of Equity Awards Granted in Prior Years That are Outstanding and Unvested |  |  |  |  |
Pay vs Performance Disclosure |  |  |  |  |
Adjustment to Compensation, Amount | (273,412) | 292,321 | 103,466 | 1,138,403 | 120,704
Non-PEO NEO | Change in Fair Value as of Vesting Date of Prior Year Equity Awards Vested in Covered Year |  |  |  |  |
Pay vs Performance Disclosure |  |  |  |  |
Adjustment to Compensation, Amount | $ (96,504) | $ 586,423 | $ (256,024) | $ 239,315 | $ 693

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