Form S-4 - Registration of securities, business combinations:
SEC Accession No. 0001104659-25-119351
Filing Date
2025-12-08
Accepted
2025-12-08 17:08:58
Documents
22

Document Format Files

Seq Description Document Type Size
1 S-4 tm2532715-1_s4.htm S-4 4498306
2 EXHIBIT 23.1 tm2532715d2_ex23-1.htm EX-23.1 2180
3 EXHIBIT 23.2 tm2532715d2_ex23-2.htm EX-23.2 3302
4 EXHIBIT 99.1 tm2532715d2_ex99-1.htm EX-99.1 3987
5 EXHIBIT 99.2 tm2532715d2_ex99-2.htm EX-99.2 3673
6 EX-FILING FEES tm2532715d1_ex-filingfees.htm   iXBRL EX-FILING FEES 29379
7 GRAPHIC lg_axcelis-4c.jpg GRAPHIC 18819
8 GRAPHIC lg_ubs-4c.jpg GRAPHIC 13761
9 GRAPHIC lg_veeco-4c.jpg GRAPHIC 12246
10 GRAPHIC lg_veecomaterial-4clr.jpg GRAPHIC 19039
11 GRAPHIC tm2532715d2_ex23-3img001.jpg GRAPHIC 2503
12 GRAPHIC tm2532715d2_ex23-3img002.jpg GRAPHIC 1942
  Complete submission text file 0001104659-25-119351.txt   4771351

Data Files

Seq Description Document Type Size
25 EXTRACTED XBRL INSTANCE DOCUMENT tm2532715d1_ex-filingfees_htm.xml XML 7437
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: S-4 | Act: 33 | File No.: 333-292008 | Film No.: 251556896
SIC: 3559 Special Industry Machinery, NEC
(CF Office: 06 Technology)