Form 3 - Initial statement of beneficial ownership of securities:
SEC Accession No. 0002124265-26-000002
Filing Date
2026-03-25
Accepted
2026-03-25 17:26:52
Documents
2
Period of Report
2026-03-12

Document Format Files

Seq Description Document Type Size
1 form3-03252026_090347.html 3  
1 form3-03252026_090347.xml 3 2760
2 ex24-03252026_090347.htm EX-24 4972
  Complete submission text file 0002124265-26-000002.txt   9204
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Issuer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
SIC: 3559 Special Industry Machinery, NEC
(CF Office: 06 Technology)

Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address
Sutton Todd (Reporting) CIK: 0002124265 (see all company filings)

Type: 3 | Act: 34 | File No.: 000-30941 | Film No.: 26793622