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v3.26.1

Merger (Details) $ / shares in Units, $ in Millions | Jun. 30, 2026 $ / shares | Dec. 31, 2025 $ / shares | Sep. 30, 2025 USD ($) $ / shares
--- | --- | --- | ---
Merger |  |  |
Common stock, par value (in dollars per share) | $ / shares | $ 0.001 | $ 0.001 |
Veeco Instruments Inc |  |  |
Merger |  |  |
Exchange Ratio |  |  | 0.3575
Termination fee payable by Axcelis |  |  | $ 108.7
Termination fee receivable by Axcelis |  |  | 77.5
Fixed expense reimbursement |  |  | $ 15.0
Veeco Instruments Inc |  |  |
Merger |  |  |
Common stock, par value (in dollars per share) | $ / shares |  |  | $ 0.01

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