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Insider Trading Arrangements - Robert J. Mahoney	3 Months Ended
	Jun. 30, 2026 shares
Trading Arrangements, by Individual
Material Terms of Trading Arrangement	On June 15, 2026, Robert J. Mahoney, our Executive Vice President, Global Operations, adopted a 10b5-1 Preset Diversification Program. The Preset Diversification Program will terminate December 31, 2026 and provides for the sale of up to 1,832 shares of Axcelis stock.
Name	Robert J. Mahoney
Title	Executive Vice President
Rule 10b5-1 Arrangement Adopted	true
Adoption Date	Jun. 15, 2026
Expiration Date	Dec. 31, 2026
Aggregate Available	1,832

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