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Inventories, net (Tables)
6 Months Ended
Jun. 30, 2026
Inventories, net  
Schedule of components of inventories

June 30,

December 31,

  ​ ​ ​

2026

  ​ ​ ​

2025

  ​ ​ ​

(in thousands)

Raw materials

$

274,338

$

259,039

Work in process

 

55,611

 

51,761

Finished goods (completed systems)

 

8,225

 

18,210

Inventories, net

$

338,174

$

329,010