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Inventories, net (Details) - USD ($)
$ in Thousands
Jun. 30, 2026
Dec. 31, 2025
Inventories, net    
Raw materials $ 274,338 $ 259,039
Work in process 55,611 51,761
Finished goods (completed systems) 8,225 18,210
Inventories, net $ 338,174 $ 329,010