# Filing Detail

Form DEF 14A - Other definitive proxy statements:
SEC Accession No. 0001104659-26-037356
Filing Date
2026-03-31
Accepted
2026-03-31 07:28:35
Documents
19
Period of Report
2026-05-05

Document Format Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
1 | FORM- DEF 14A | tm261420-1_def14a.htm iXBRL | DEF 14A | 1027155
4 | GRAPHIC | bc_ceoneotargcomp-4c.jpg | GRAPHIC | 38998
5 | GRAPHIC | bc_ceorealizedcompvtarg-4c.jpg | GRAPHIC | 49176
6 | GRAPHIC | lg_axcelis-4c.jpg | GRAPHIC | 12671
7 | GRAPHIC | px_26axcelispxy01pg01-4c.jpg | GRAPHIC | 393560
8 | GRAPHIC | px_26axcelispxy01pg02-4c.jpg | GRAPHIC | 257065
9 | GRAPHIC | tb_boardcomm-4c.jpg | GRAPHIC | 61063
| Complete submission text file | 0001104659-26-037356.txt |  | 3942733

Data Files

Seq | Description | Document | Type | Size
--- | --- | --- | --- | ---
2 | XBRL TAXONOMY EXTENSION SCHEMA | acls-20251231.xsd | EX-101.SCH | 2834
3 | XBRL TAXONOMY EXTENSION DEFINITION LINKBASE | acls-20251231_def.xml | EX-101.DEF | 1911
22 | EXTRACTED XBRL INSTANCE DOCUMENT | tm261420-1_def14a_htm.xml | XML | 256912

Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: DEF 14A | Act: 34 | File No.: 000-30941 | Film No.: 26816901
SIC: 3559 Special Industry Machinery, NEC
(CF Office: 06 Technology)