Form DEF 14A - Other definitive proxy statements:
SEC Accession No. 0001104659-26-037356
Filing Date
2026-03-31
Accepted
2026-03-31 07:28:35
Documents
19
Period of Report
2026-05-05

Document Format Files

Seq Description Document Type Size
1 FORM- DEF 14A tm261420-1_def14a.htm   iXBRL DEF 14A 1027155
4 GRAPHIC bc_ceoneotargcomp-4c.jpg GRAPHIC 38998
5 GRAPHIC bc_ceorealizedcompvtarg-4c.jpg GRAPHIC 49176
6 GRAPHIC lg_axcelis-4c.jpg GRAPHIC 12671
7 GRAPHIC px_26axcelispxy01pg01-4c.jpg GRAPHIC 393560
8 GRAPHIC px_26axcelispxy01pg02-4c.jpg GRAPHIC 257065
9 GRAPHIC tb_boardcomm-4c.jpg GRAPHIC 61063
  Complete submission text file 0001104659-26-037356.txt   3942733

Data Files

Seq Description Document Type Size
2 XBRL TAXONOMY EXTENSION SCHEMA acls-20251231.xsd EX-101.SCH 2834
3 XBRL TAXONOMY EXTENSION DEFINITION LINKBASE acls-20251231_def.xml EX-101.DEF 1911
22 EXTRACTED XBRL INSTANCE DOCUMENT tm261420-1_def14a_htm.xml XML 256912
Mailing Address 108 CHERRY HILL DRIVE BEVERLY MA 01915
Business Address 108 CHERRY HILL DRIVE BEVERLY MA 01915 978-787-4000
AXCELIS TECHNOLOGIES INC (Filer) CIK: 0001113232 (see all company filings)

EIN.: 341818596 | State of Incorp.: DE | Fiscal Year End: 1231
Type: DEF 14A | Act: 34 | File No.: 000-30941 | Film No.: 26816901
SIC: 3559 Special Industry Machinery, NEC
(CF Office: 06 Technology)