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Proc-Type: 2001,MIC-CLEAR
Originator-Name: webmaster@www.sec.gov
Originator-Key-Asymmetric:
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 TWSM7vrzLADbmYQaionwg5sDW3P6oaM5D3tdezXMm7z1T+B+twIDAQAB
MIC-Info: RSA-MD5,RSA,
 MWBzXxcs9zw64osF77zZFwSKStcR/L9F0GsE4isuzDSbXjLAPI36sQMdjvN4JiIx
 me7+O3IvsVtCZ7cqvOO2XA==

<SEC-DOCUMENT>0001181431-10-028745.txt : 20100521
<SEC-HEADER>0001181431-10-028745.hdr.sgml : 20100521
<ACCEPTANCE-DATETIME>20100521194449
ACCESSION NUMBER:		0001181431-10-028745
CONFORMED SUBMISSION TYPE:	3
PUBLIC DOCUMENT COUNT:		2
CONFORMED PERIOD OF REPORT:	20100519
FILED AS OF DATE:		20100521
DATE AS OF CHANGE:		20100521

REPORTING-OWNER:	

	OWNER DATA:	
		COMPANY CONFORMED NAME:			DeLateur Richard
		CENTRAL INDEX KEY:			0001492413

	FILING VALUES:
		FORM TYPE:		3
		SEC ACT:		1934 Act
		SEC FILE NUMBER:	000-50307
		FILM NUMBER:		10852223

	MAIL ADDRESS:	
		STREET 1:		C/O FORMFACTOR, INC.
		STREET 2:		7005 SOUTHFRONT ROAD
		CITY:			LIVERMORE
		STATE:			CA
		ZIP:			94551

ISSUER:		

	COMPANY DATA:	
		COMPANY CONFORMED NAME:			FORMFACTOR INC
		CENTRAL INDEX KEY:			0001039399
		STANDARD INDUSTRIAL CLASSIFICATION:	SEMICONDUCTORS & RELATED DEVICES [3674]
		IRS NUMBER:				133711155
		STATE OF INCORPORATION:			DE

	BUSINESS ADDRESS:	
		STREET 1:		7005 SOUTHFRONT ROAD
		CITY:			LIVERMORE
		STATE:			CA
		ZIP:			94551
		BUSINESS PHONE:		9252433522

	MAIL ADDRESS:	
		STREET 1:		7005 SOUTHFRONT ROAD
		CITY:			LIVERMORE
		STATE:			CA
		ZIP:			94551
</SEC-HEADER>
<DOCUMENT>
<TYPE>3
<SEQUENCE>1
<FILENAME>rrd276517.xml
<DESCRIPTION>R. DELATEUR FORM 3
<TEXT>
<XML>
<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0203</schemaVersion>

    <documentType>3</documentType>

    <periodOfReport>2010-05-19</periodOfReport>

    <noSecuritiesOwned>1</noSecuritiesOwned>

    <issuer>
        <issuerCik>0001039399</issuerCik>
        <issuerName>FORMFACTOR INC</issuerName>
        <issuerTradingSymbol>FORM</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001492413</rptOwnerCik>
            <rptOwnerName>DeLateur Richard</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>C/O FORMFACTOR, INC.</rptOwnerStreet1>
            <rptOwnerStreet2>7005 SOUTHFRONT ROAD</rptOwnerStreet2>
            <rptOwnerCity>LIVERMORE</rptOwnerCity>
            <rptOwnerState>CA</rptOwnerState>
            <rptOwnerZipCode>94551</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>0</isDirector>
            <isOfficer>1</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
            <officerTitle>Chief Financial Officer</officerTitle>
        </reportingOwnerRelationship>
    </reportingOwner>

    <remarks>Exhibit 24: Confirming Statement (Power of Attorney)</remarks>

    <ownerSignature>
        <signatureName>/s/ Richard DeLateur</signatureName>
        <signatureDate>2010-05-20</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
<DOCUMENT>
<TYPE>EX-24.1
<SEQUENCE>2
<FILENAME>rrd247740_279761.htm
<DESCRIPTION>CONFIRMING STATEMENT (POWER OF ATTORNEY)
<TEXT>
<HTML>
<HEAD>
<TITLE>
rrd247740_279761.html
</TITLE>
</HEAD>
<BODY>
<PRE>
CONFIRMING STATEMENT

I confirm that I have authorized and designated Henry I. Feir and Stuart L.
Merkadeau to execute and file on my behalf all Forms 3, 4 and 5 (including any
amendments thereto) that I may be required to file with the U.S. Securities and
Exchange Commission as a result of my ownership of or transactions in securities
of the Company. The authority of the above-designated individuals shall continue
until I am no longer required to file Forms 3, 4 and 5 with regard to my
ownership of or transactions in securities of the Company, unless earlier
revoked in writing. I acknowledge that the Company and the above-designated
individuals, and each of them, are not assuming any of my responsibilities to
comply with Section 16 of the Securities Exchange Act of 1934, as amended.


/s/ Richard DeLateur

Richard DeLateur

Dated: May 20, 2010



</PRE>
</BODY>
</HTML>
</TEXT>
</DOCUMENT>
</SEC-DOCUMENT>
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